JP4702984B2 - Crystal extraction apparatus and crystal extraction method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus and a method used when a single crystal ingot is pulled out by a CZ method (Czochralski method) and the single crystal ingot is taken out from the pulling apparatus after the pulling of the single crystal ingot is completed.
[0002]
[Prior art]
In the manufacturing process of a single crystal, there is an operation process of carrying out the pulled single crystal ingot from the pulling device. As a device for carrying out such a carry-out operation, a single-crystal grasping device has been proposed (Japanese Patent Laid-Open No. 9-165289) for holding and carrying out a single crystal ingot by means of an arm. Will be automated.
[0003]
Here, the pulled single crystal ingot is suspended by a small-diameter portion called a “neck” continuously grown from the seed crystal at its upper end, and the pulled single crystal ingot is pulled up. As the work in the previous stage when taking out from the equipment, first, the equipment operator manually cuts the single crystal ingot from the seed crystal by cutting it with a tool such as nippers or pliers manually. Is required.
[0004]
[Problems to be solved by the invention]
However, in order to perform this work, the device operator must go up to a high place each time, and the troublesome work is repeated. In addition, the “neck” that can withstand the weight of a heavy single crystal ingot has a large diameter and is difficult to separate with nippers, pliers, etc., which places a heavy burden on the operator. Furthermore, when the single crystal ingot is heavy, there is a great deal of fear of the single crystal ingot falling, and considering that the operator is involved in this, the worker approaches the single crystal ingot based on an unstable scaffold. I want to avoid doing it.
[0005]
In recent years, in order to reduce the cost of silicon wafers, etc., it has been required to pull up a large silicon single crystal. Accordingly, the length of a single crystal ingot has been increased. It is coming. For this reason, a single crystal ingot that is longer than the height of the chamber opening (the length in the longitudinal direction (vertical direction) of the chamber opening) may be pulled up, but the above-mentioned JP-A-9-165289 discloses. Such a single crystal gripping device is a simple one in which the single crystal ingot suspended in the vertical direction is simply taken out from the chamber opening portion in the same posture, so the length of the single crystal ingot that can be taken out from the pulling device is The length of the chamber opening is limited, and a long single crystal ingot exceeding the height cannot be taken out.
[0006]
The present invention has been made in view of the problems as described above, and its purpose is to easily take out a single, large and heavy single crystal ingot pulled up by a single crystal pulling apparatus for later carrying out work. An object of the present invention is to provide a crystal extraction apparatus and method that can be provided.
[0007]
[Means for Solving the Problems]
In order to achieve the above-described object, the crystal extracting apparatus according to the present invention is configured to take out the single crystal ingot suspended from the seed crystal from the seed crystal in a state where the pulling is completed. By providing a take-out apparatus capable of performing the above-described process, even a single crystal ingot pulled up longer than the longitudinally long opening of the chamber of the pull-up apparatus can be easily taken out. At that time, the single crystal ingot suspended in the chamber is easily separated from the seed by cleaving the neck portion without human intervention.
[0008]
More specifically, the present invention provides the following crystal extraction apparatus and crystal extraction method.
[0009]
(1) A crystal takeout device for taking out a single crystal ingot stored in a state where a neck portion is held by a seed chuck and suspended in a chamber of a CZ method single crystal pulling device from the single crystal pulling device. A crystal cleaving device for separating a single crystal ingot suspended by a seed chuck in the single crystal pulling device from a seed by cleaving the neck portion by generating a crack. apparatus.
[0010]
The “single crystal ingot stored in a state in which the neck portion is held by the seed chuck and suspended in the chamber” is a single crystal ingot pulled up from the raw material melt and is a single crystal ingot. It means a single crystal ingot that has been taken out of the crystal pulling apparatus and can be transferred to the next step.
[0011]
(2) The crystal extracting device according to (1), wherein the crystal cleaving device is configured to collide a blade made of a high hardness material with a neck portion.
[0012]
As for the mechanism for causing the blade to collide with the neck portion, the blade made of a high hardness material can be caused to collide with the neck portion at high speed, such as those using compressed air and those using electromagnetic force. However, the present invention is not limited to these, and includes any configuration.
[0013]
The blade is preferably made of a high hardness material such as a cemented carbide obtained by sintering tungsten carbide or titanium carbide with a cobalt alloy.
[0014]
(3) A crystal takeout device for taking out a single crystal ingot stored in a state where the neck portion is held by a seed chuck and suspended in the chamber of the CZ method single crystal pulling device from the vertically long opening of the chamber. An arm for gripping a single crystal ingot stored in a state suspended in the chamber, and supporting the single crystal ingot by the grip force when the single crystal ingot is separated from the seed. And a control means for controlling the movement of the arm, wherein the control means drives the arm to tilt the single crystal ingot, and causes the single crystal ingot to move circularly. Rotation control means for controlling the arm, and when the single crystal ingot is separated from the seed, A crystal extracting device, wherein a crystal ingot is circularly moved around the tail portion of the single crystal ingot and tilted by a predetermined angle with respect to a vertical direction, and then taken out from a longitudinally long opening of the chamber.
[0015]
The tilt driving means for driving the arm so as to tilt the single crystal ingot includes driving means such as a cylinder driven by air pressure and a motor jack. Further, the rotation control means includes any structure such as a link structure and a structure that moves the arm along the guide.
[0016]
(4) The rotation control means for controlling the movement of the arm includes first and second link members having different lengths that are rotatably supported with respect to a predetermined support member, and the first and second link members. An arm support member rotatably supported by two link members, and a four-bar rotation using the first and second link members, the arm support member, and the support member as a fixed link. (3) wherein the arm support member is tilted by the four-bar rotation chain so that the single crystal ingot constituting the chain rotates around the tail portion of the single crystal ingot held by the arm support member. The crystal extraction apparatus described.
[0017]
(5) A computer-readable storage medium storing a program for controlling the driving means, wherein after the single crystal ingot is separated from the seed, the shoulder portion of the single crystal ingot is driven by the tilt driving means and the rotation control means. A computer-readable storage medium storing a program for moving up and horizontally moving a single crystal ingot when it is taken out of the chamber from the vertically long opening of the chamber.
[0018]
The “storage medium” includes all forms such as FD, CD, DVD, HD, etc., which may be an external storage medium or an internal storage medium built in a computer. Good.
[0019]
According to this program, after the single crystal ingot separated from the seed is tilted, the shoulder portion of the single crystal ingot is taken out of the single crystal pulling device from the vertically long opening of the chamber, and then the single crystal ingot The straight body portion and the tail portion are taken out from the open vertically long mouth portion in this order.
[0020]
(6) The arm has a pair of palms at its ends, and the single crystal ingot is gripped by sandwiching the single crystal ingot between the palms of the pair of arms. 3) The crystal extracting device according to (4) or (5).
[0021]
(7) A single crystal ingot group taken out from the single crystal pulling apparatus by the crystal extracting apparatus according to any one of (1) to (6).
[0022]
Such single crystal ingots can be expected to have a more uniform cut surface than those cut with a conventional nipper or the like for those related to (1) and (2). About what concerns 3)-(6), it will be said that it is a collection of what was continuously produced by the thing longer and heavy weight than before.
[0023]
The method according to the present invention is generalized and expressed as follows.
[0024]
(8) A crystal extraction method for taking out a single crystal ingot pulled up by a CZ method single crystal pulling apparatus from the single crystal pulling apparatus, and using the taper shape of the tail portion of the single crystal ingot, A method of facilitating removal of the single crystal ingot from the single crystal pulling device by tilting the single crystal ingot only.
[0025]
(9) A crystal takeout device for taking out a single crystal ingot stored in a state where a neck portion is held by a seed chuck and suspended in a chamber of a CZ method single crystal pulling device from a vertically long opening of the chamber. A crystal cleaving device for separating a single crystal ingot stored in a state suspended in the chamber from a seed by cracking at a neck portion of the ingot, and suspended in the chamber An arm that grips the single crystal ingot stored in a state where the single crystal ingot is separated from the seed, and the arm that supports the single crystal ingot by the gripping force, and driving means for the arm, Control means for controlling movement, and the drive means tilts the single crystal ingot. An inclination driving means for driving the arm so that the single crystal ingot moves circularly, and a rotation control means for controlling the movement of the arm so that the single crystal ingot moves circularly, and when the single crystal ingot is separated from the seed, A crystal extracting device, wherein a crystal ingot is circularly moved around its tail portion to be inclined at a predetermined angle with respect to a vertical direction and taken out from a vertically long opening of the chamber.
[0026]
According to the crystal extracting apparatus according to the present invention as described above, a single crystal ingot longer than the shape of the opening for taking out the single crystal ingot formed in the single crystal pulling apparatus is taken from the inside of the single crystal pulling apparatus. It can be taken out.
[0027]
By using the crystal take-out device according to the present invention, it is possible to produce a single crystal ingot longer than the opening shape in the existing single crystal pulling device, in response to the demand for producing a large single crystal ingot. It is possible to cope without changing the shape and structure of the existing single crystal pulling apparatus.
[0028]
In addition, a single crystal ingot suspended with a neck portion held by a predetermined seed chuck is separated from the seed chuck by creating a crack in the neck portion, so that it can be easily separated without scattering of fragments. Work can be done. By introducing this method, it is possible to automate the separation work of the single crystal ingot, to eliminate the work at the height of the equipment operator, and to reduce the work burden on the equipment operator.
[0029]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a crystal extraction apparatus and a crystal extraction method according to the present invention will be described with reference to the drawings.
[0030]
[Device configuration]
FIG. 1 is a perspective view showing a whole structure of a crystal pulling apparatus 50 according to the present invention and a single crystal pulling apparatus 1 adapted to take out a single crystal ingot by the crystal pulling apparatus 50.
[0031]
As shown in FIG. 1, a single crystal pulling apparatus 1 includes a lower chamber 11 for accumulating crystal raw materials and an upper chamber 2 for pulling up a single crystal ingot 8, and the single crystal ingot 8 is pulled up. In this state, the single crystal ingot 8 is held by the cable 4 wound up by the cable winding machine, the seed crystal seed chuck 5 connected to the tip of the cable 4, and the seed crystal seed chuck 5. It is in a state of being suspended by the seed crystal 6 and the small-diameter neck portion 7 continuously grown from the seed crystal 6.
[0032]
In such a state, the crystal takeout device 50 for taking out the single crystal ingot 8 from the upper chamber 2 of the pulling device 1 is moved to the front of the opening portion 13 for taking out the single crystal formed in the upper chamber 2 of the pulling device 1. After that, the height of the vertical movement base 52 that moves up and down along the guide frame 51 is appropriately adjusted.
[0033]
As a result, the gripping arms 54 and 55 of the gripping mechanism 60 supported by the vertical movement base 52 via the support member 53 are positioned at a height at which a predetermined position of the single crystal ingot 8 is gripped. In this state, the gripping arms 54 and 55 grip the single crystal ingot 8 by its opening / closing mechanism.
[0034]
Incidentally, the gripping arm 54 is composed of a pair of arm members, and these arm members are driven in a closing direction by an air cylinder so as to grip the straight body portion of the single crystal ingot.
[0035]
In addition, the grip arm 55 provided in the lower part of the grip arm 54 is composed of a pair of arm members. By driving these arm members in a closing direction by an air cylinder, the grip arm 54 is formed in the straight body portion of the single crystal ingot. A position at a predetermined interval from the position to be held by is held.
[0036]
As a result, the gripping arms 54 and 55 constitute a palm body, and the single crystal ingot gripped by the palm body can be rotated according to the rotation of the palm body.
[0037]
Here, in the gripping mechanism portion 60, the arm base 57 is supported by the support member 53 via links 61 and 62, and the upper end portion of the arm base 57 is crystal cleaved via a height adjusting cylinder 58. A device 70 is provided.
[0038]
As shown in FIG. 2, the crystal separation device 70 has a slider drive unit 71 whose height can be adjusted by a height adjusting cylinder 58, and the height can be adjusted by image processing using a predetermined small TV camera. It has become. In this case, the neck portion 7 where the blade 73 collides can be confirmed at a position where the light spot of the laser pointer hits.
[0040]
A slider 72 made of Teflon is guided and held by the slider drive unit 71 so as to protrude in the direction of arrow a. A high-hardness blade 73 made of a cemented carbide obtained by sintering tungsten carbide or titanium carbide with a cobalt alloy is fixed to the tip of the slider 72, and is compressed in the direction of arrow a by compressed air obtained from the pneumatic circuit 75. It protrudes at high speed and collides with the neck portion 7 of the single crystal ingot 8 suspended in the upper chamber 2 of the pulling apparatus 1, and the single crystal ingot is cleaved from the seed crystal 6 at the neck portion 7.
[0041]
Incidentally, when the single crystal ingot is cleaved from the seed crystal 6, the arms 54 and 55 holding the single crystal ingot 8 are moved slightly upward by the vertical movement base 52, thereby increasing the weight of the single crystal ingot. The majority is supported so that a tensile stress remains in the neck portion 7 due to the remaining weight. Thereby, when a crack occurs in the neck portion 7 due to the blade 73 colliding with the neck portion 7, the crack rapidly develops and the neck portion 7 can be easily cleaved. In this way, by supporting a part of the weight of the single crystal ingot with the arms 54 and 55 and then cleaving the neck portion 7, the weight of all the single crystal ingots is prevented from being applied to the arms 54 and 55 at one time. can do.
[0042]
In the pneumatic circuit 75, an electromagnetic valve V1 is provided in a pipe connected to a compressed air source 77. When the electromagnetic valve V1 is opened, the compressed air flows into the air chamber of the slider drive unit 71 and causes the slider 72 to protrude. . The slider 72 hits the stopper 74 and stops at a predetermined position.
[0043]
In order to house the slider 72, the solenoid valve V1 is closed and the solenoid valves V2 and V3 are opened, so that the working air flows from the solenoid valve V2 into the aspirator 78 and the pressure is reduced, and the slider is driven via the solenoid valve V3. The air in the air chamber of the portion 71 is discharged and the slider 72 is accommodated in the slider driving portion 71.
[0044]
Thus, the single crystal ingot 8 grasped by the grasping arms 54 and 55 (FIG. 1) is cleaved at the neck portion 7 by the crystal cleaving device 70 and can be taken out from the upper chamber 2 to the outside.
[0045]
Here, the single crystal ingot 8 held by the arms 54 and 55 in the upper chamber 2 has a length L1 longer than a width L2 in the longitudinal direction (vertical direction) of the opening 13 of the upper chamber 2. It is difficult to take out the single crystal ingot 8 from the upper chamber 2 while holding the single crystal ingot 8 in the vertical direction.
[0046]
Therefore, the gripping mechanism 60 of the crystal extracting device 50 tilts the gripped single crystal ingot 8 and then lifts it upward to take it out from the upper chamber 2.
[0047]
3 is a perspective view showing a detailed configuration of the gripping mechanism 60. A link 61 is pivotally supported by the support member 53, and an arm base 57 is further rotatable at the tip of the link 61. As shown in FIG. It is pivotally supported by.
[0048]
Further, a link 62 is pivotally supported between the arm base 57 and the support member 53 so that the support member 53 is fixed by the support member 53, the link 61, the arm base 57 and the link 62. A four-bar rotation chain is constructed.
[0049]
Then, as shown in FIG. 4 which shows the detailed structure of the gripping mechanism section 60, the air cylinder 63 is operated in a state where the arms 54 and 55 grip the single crystal ingot 8 with the longitudinal direction thereof being in the vertical direction. When the output shaft of the air cylinder 63 is stored, the arm base 57 engaged with the output shaft rotates according to the operation of the air cylinder 63.
[0050]
In this case, the pair T1 between the link 61 and the arm base 57 rotates in the direction of the arrow about the pair T2 between the support member 53 and the link 62 between the arm base 57 and the arm base 57. T3 rotates in the direction of the arrow about the pair T4 with the support member 53. Here, the length of the link 62 far from the link 61 with respect to the arms 54 and 55 is longer than the length of the link 61, and when the links 61 and 62 rotate as shown in FIG. The tilt amount of the arm base 57 with respect to the vertical direction is made smaller than when the arm base 57 is tilted about the pair T1 or T2 without providing the link mechanism. As a result, the single crystal ingot 8 held by the arms 54 and 55 is tilted around its tail portion.
[0051]
In this case, since the tail portion of the single crystal ingot 8 is tapered, the tail portion does not contact the inner wall of the pulling device even if the single crystal ingot 8 is tilted.
[0052]
The projection width L3 when the single crystal ingot 8 tilted in this way is projected onto a projection plane parallel to the vertical direction is shorter than the length L1 (FIG. 4) of the single crystal ingot 8 in the longitudinal direction. The single crystal ingot 8 is tilted until the width L3 becomes shorter than the vertical width L2 of the opening 13 of the upper chamber 2 (FIG. 1). At this time, the shoulder portion of the single crystal ingot 8 is in a state of being exposed to the outside from the opening 13, and the tilted single crystal ingot 8 is moved by moving the crystal extraction device 50 in the horizontal direction away from the pulling device 1 in this state. , Taken out from the upper chamber 2.
[0053]
6 is a diagram showing a series of steps for taking out the single crystal ingot 8 from the pulling apparatus 1. The single crystal ingot 8 (FIG. 6 (A)) suspended by the seed crystal seed chuck 5 has a neck portion. After being cleaved at 7 and lifted upward as indicated by an arrow y (FIG. 6B), it is further moved in the horizontal direction indicated by an arrow x (FIG. 6C) to be taken out from the upper chamber 2.
[0054]
[Operation]
In the crystal extracting device 50 having the above-described function and configuration, the single crystal ingot 8 in the upper chamber 2 is held by the arms 54 and 55 and the single crystal ingot 8 is seeded at the neck portion 7 by the cleaving device 70. It can be separated from the crystal 6.
[0055]
Therefore, it is not necessary to cut the neck portion 7 manually by the apparatus operator, and the work of carrying out the single crystal ingot 8 can be automated.
[0056]
In the cleaving process of the neck portion 7 by the cleaving device 70, the load of the single crystal ingot 8 is applied to the neck portion 7 by its own weight or by slightly raising the arms 54 and 55 holding the single crystal ingot 8. In a state where a part of the weight of the ingot 8 is released and a part thereof remains, that is, in a state where a tensile stress is generated in the neck portion 7, a blade 73 made of a high hardness material collides with the blade at a high speed. As a result, a crack is generated in the neck portion 7. At this time, the crack is instantaneously developed by the tensile stress generated in the neck portion 7 and the neck portion 7 is cleaved.
[0057]
As a result, the single crystal ingot 8 is separated from the seed crystal (seed) with a small force and without scattering of fragments as compared with the cutting method of the neck portion 7 by crushing using nippers or pliers.
[0058]
The single crystal ingot 8 separated from the seed crystal 6 is tilted around its tail portion by the gripping mechanism 60 of the crystal take-out device 50. In this way, as shown in FIG. 6B, only the shoulder portion of the single crystal ingot 8 is first brought out from the opening 13 of the upper chamber 2.
[0059]
In this state, the single crystal ingot 8 is lifted in the direction of the arrow y, so that the single crystal ingot 8 is in a state in which the upper end portion of the single crystal ingot 8 protrudes from the opening 13 as shown in FIG. 8 can be moved to a height at which the lower end of 8 can be pulled out from the opening 13. In this state, the single crystal ingot 8 can be pulled out of the upper chamber 2 by moving the single crystal ingot 8 in the horizontal direction indicated by the arrow x.
[0060]
Thus, the single crystal ingot 8 longer than the opening 13 is taken out of the upper chamber 2 through the opening 13.
[0061]
In this way, the single crystal ingot 8 is taken out at an angle, and the single crystal ingot 8 pulled up to be longer than the vertical width L2 of the opening 13 by using the conventional pulling device 1 is then opened to the opening 13. It can be taken out without changing the shape and structure of the chamber.
[0062]
[Other embodiments]
In the above-described embodiment, the case where the single crystal ingot 8 is inclined using the gripping mechanism portion 60 having the link structure has been described. However, the present invention is not limited to this, and for example, as shown in FIG. A single crystal held by the arms 54 and 55 by holding the arms 54 and 55 by a carriage 153 movable along a guide rail 154 centered on the lower end of the single crystal ingot 8 suspended on The ingot 8 can be tilted.
[0063]
Incidentally, the carriage 153 is moved on the guide rail 154 by the air cylinder 155, and the guide rail 154 is supported by the vertical movement base 152. By moving the vertical movement base 152 up and down along the frame 151, the arm 54, 55 can be moved up and down.
[0064]
In this way, various configurations can be applied to the configuration in which the single crystal ingot 8 is tilted.
[0065]
In the above-described embodiment, the single crystal ingot 8 with the shoulder portion protruding outside from the opening 13 of the upper chamber 2 is moved horizontally to take out the single crystal ingot 8 from the pulling device 1. Although the present invention is not limited to this, the main point is that the single crystal ingot 8 may be removed from the pulling device 1 through the opening 13 in the order of the shoulder portion, the long trunk portion, and the tail portion. For example, the single crystal ingot 8 longer than the length of the opening 13 can be taken out from the pulling device 1 by moving the tilted single crystal ingot 8 obliquely upward or along a predetermined arc. it can.
[0066]
In the above-described embodiment, the case where the single crystal ingot 8 is gripped using two pairs of arms (grip arms 54 and 55) has been described. However, the present invention is not limited to this, and three or more pairs of arms are used. Or a pair of arms having a width that can tilt the grasped single crystal ingot 8 may be used.
[0067]
【The invention's effect】
As described above, the crystal extraction apparatus according to the present invention takes out a single crystal ingot pulled up from the inside of the pulling apparatus without any change in the chamber shape and structure of the conventional single crystal pulling apparatus. Is possible.
[0068]
Moreover, the crystal take-out device according to the present invention can separate the single crystal ingot from the seed crystal without manual labor by cleaving the neck portion of the single crystal ingot with the cleaving device, and automates the work of carrying out the single crystal ingot. It becomes possible.
[Brief description of the drawings]
FIG. 1 is a side view showing the overall configuration of a crystal extracting apparatus according to the present invention.
FIG. 2 is a diagram showing a configuration of a cleaving apparatus according to the present invention.
FIG. 3 is a perspective view showing a configuration of an arm mechanism portion of the crystal extracting apparatus according to the present invention.
FIG. 4 is a diagram for explaining an operation of an arm mechanism portion of a crystal extracting apparatus according to the present invention.
FIG. 5 is a diagram for explaining the operation of the arm mechanism of the crystal extracting apparatus according to the present invention.
FIG. 6 is a diagram showing a method for extracting a crystal extracting apparatus according to the present invention.
FIG. 7 is a side view showing another embodiment of the crystal extracting apparatus according to the present invention.
[Explanation of symbols]
1 Single crystal pulling device
2 Upper chamber
3 Winding device
4 Cable
5 Seed crystal seed chuck
6 seed crystals
7 Neck
8 Single crystal ingot
11 Lower chamber
13 opening
50, 150 Crystal extractor
51 Guide frame
52 Vertical movement base
53 Support members
54, 55 arms
57 Arm support member
63, 155 Air cylinder
70 cleaving device
71 Slider drive unit
72 slider
73 blade
153 bogie
154 Guide rail

Claims (5)

The single crystal ingot neck portion in the chamber of CZ single-crystal pulling apparatus is stored in a state of being suspended held by the seed chuck, a crystal take-out apparatus for taking out from portrait opening of the chamber ,
An arm for gripping a single crystal ingot stored in a state of being suspended in the chamber, and when the single crystal ingot is separated from a seed, the single crystal ingot is supported by the grip force of the arm. Arm to
Arm control means for controlling the movement of the arm ,
The arm control means includes said a tilting drive means for driving said arm to tilt the single crystal ingot, and a rotation control means for controlling said arm so as to circular motion the single crystal ingot,
The tilt driving means is rotatably supported by first and second link members having different lengths, which are rotatably supported by predetermined link support members, respectively, and the first and second link members. An arm support member that is supported, and the first and second link members, the arm support member and the link support member constitute a four-bar rotation chain having the link support member as a fixed link,
When the single crystal ingot is separated from the seed, the arm support member is driven by the four-bar rotation chain so that the single crystal ingot gripped by the arm support member rotates around its tail portion. The single crystal ingot is tilted by a predetermined angle with respect to the vertical direction by circularly moving around the tail portion, and then lifted and horizontally moved to be taken out from the vertically long opening of the chamber. Crystal take-out device. The arms are a pair having palms at their ends,
Crystal take-out apparatus according to claim 1, characterized in that the gripping of the single crystal ingot by sandwiching the single crystal ingot by the palm of the pair of arms. A computer-readable storage medium storing a program for controlling the tilt driving means in the crystal extracting device according to claim 1 or 2 ,
After the single crystal ingot is separated from the seed, the arm control means moves the single crystal ingot up and horizontally when the shoulder portion of the single crystal ingot is taken out of the chamber from the vertically long opening of the chamber. A computer-readable storage medium storing a program containing the above. The single crystal ingot neck portion in the chamber of CZ single-crystal pulling apparatus is stored in a state of being suspended held by the seed chuck, a crystal take-out apparatus for taking out from portrait opening of the chamber ,
An arm for gripping a single crystal ingot stored in a state suspended in the chamber;
A single crystal ingot that has a blade capable of colliding with the neck portion and is stored in a suspended state in the chamber is held by the arm and moved upward. A crystal cleaving device for separating the single crystal ingot from the seed by causing a crack in the neck portion to cleave by causing the blade to collide with the neck portion;
And a arm control means for controlling the movement of the arm,
When the single crystal ingot is separated from the seed, the arm supports the single crystal ingot by the gripping force of the arm,
The arm control means includes said a tilting drive means for driving said arm to tilt the single crystal ingot, and a rotation control means for controlling said arm so as to circular motion the single crystal ingot, the single-crystal When the ingot is separated from the seed, the single crystal ingot is tilted by a predetermined angle with respect to the vertical direction by circularly moving around the tail portion, and then taken out from the vertically long opening of the chamber. Crystal take-out device. 5. The crystal extracting device according to claim 4, wherein the blade is made of a high hardness material.

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