JP2002029883A - Crystal taking-out device and method of taking-out crystal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a crystal taking-out device with which a long size single crystal ingot grown in an existing single crystal pulling-up device can be easily taken out of the device without changing the shape or the structure of the existing single crystal pulling-up device. SOLUTION: The crystal taking-out device has a holding mechanism capable of inclining a single crystal ingot, and the single crystal ingot inclined by the holding mechanism is subjected to circular motion. Thereby, the single crystal ingot can be taken out of an opening part having an opening diameter smaller than the length of the single crystal ingot. Accordingly, the single crystal ingot pulled in a long size can be taken out to the outside without enlarging the opening part of the existing single crystal pulling-up device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single crystal ingot pulling apparatus using the CZ method (Czochralski method), which is used for removing the single crystal ingot from the pulling apparatus after the pulling of the single crystal ingot is completed. Apparatus and method.

[0002]

2. Description of the Related Art In the production process of a single crystal, there is an operation process of carrying out a pulled single crystal ingot from a pulling apparatus. As a device for carrying out such an unloading operation, there has been proposed a single crystal gripping device for gripping a single crystal ingot with an arm and unloading the same (Japanese Patent Laid-Open No. 9-165289). Will be automated.

[0003] Here, the pulled single crystal ingot is a state in which the single crystal ingot is suspended at the upper end thereof by a small-diameter portion called a "neck" which is continuously grown from a seed crystal. As a pre-operation when removing the ingot from the pulling device, first, the equipment operator cuts the small diameter part called the "neck" manually with tools such as nippers or pliers, so that the single crystal ingot is seeded. Work is needed to separate them.

[0004]

However, in order to carry out this work, the apparatus operator must go to a high place each time, and the troublesome work is repeated. In addition, the "neck" which can withstand the weight of a heavy single crystal ingot has a large diameter and is difficult to cut off with nippers or pliers, which imposes a heavy burden on an operator. Furthermore, when the single crystal ingot is heavy, there is a great concern that the single crystal ingot will fall, and considering that the operator is involved in this, the worker approaches the single crystal ingot on an unstable scaffold. I want to avoid doing it.

In recent years, it has been required to pull up a large silicon single crystal in order to reduce the cost of a silicon wafer and the like, and accordingly, the length of the single crystal ingot has been increased. It is becoming. For this purpose, a single crystal ingot longer than the height of the chamber opening (the length of the chamber opening in the longitudinal direction (vertical direction)) may be pulled up, as described in Japanese Patent Application Laid-Open No. 9-165289. Such a single crystal gripping device is a simple one in which a single crystal ingot suspended in the vertical direction is taken out horizontally from the chamber opening in a posture as it is, so the length of the single crystal ingot that can be taken out from the pulling device is: However, the height of the chamber opening was limited, and it was not possible to take out a long single crystal ingot exceeding the height.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to easily take out a single crystal ingot having a longer length and a larger weight which is pulled up by a single crystal pulling apparatus, and to remove the ingot later. An object of the present invention is to provide a crystal take-out apparatus and a method that can be used for carrying out work.

[0007]

In order to achieve the above object, a crystal extracting apparatus according to the present invention comprises a single crystal suspended from a neck portion connected to a seed crystal in a state where the crystal is pulled up. By providing a take-out device that can perform oblique take-out of the crystal ingot, it is possible to easily take out even a single crystal ingot that has been pulled longer than the vertically long opening of the chamber of the pulling device. It is characterized by the following. At this time, the single crystal ingot suspended in the chamber is easily separated from the seed by cutting the neck portion without manual operation.

[0008] More specifically, the present invention provides the following crystal extracting apparatus and crystal extracting method.

(1) Crystal removal for removing a single crystal ingot whose neck portion is suspended and held by a seed chuck in a chamber of a CZ single crystal pulling apparatus from the single crystal pulling apparatus. An apparatus, comprising a crystal cleaving apparatus for separating a single crystal ingot suspended by a seed chuck in the single crystal pulling apparatus from a seed by generating a crack at a neck portion and cleaving the single ingot. Crystal removal equipment.

[0010] The "single crystal ingot whose neck portion is suspended and held by the seed chuck in the chamber" is a single crystal ingot pulled up from the raw material melt, It means a single crystal ingot that has been taken out of the CZ method single crystal pulling apparatus and is ready to be transferred to the next step.

(2) The crystal take-out device according to (1), wherein the crystal cutting device collides a blade made of a hard material with a neck portion.

The mechanism for causing the blade to collide with the neck portion includes a device using compressed air, a device using electromagnetic force, and the like as a device for causing a blade made of a hard material to collide with the neck portion at high speed. However, the present invention is not limited thereto, and includes any configuration.

Preferably, the blade is made of a hard material such as a cemented carbide obtained by sintering tungsten carbide or titanium carbide with a cobalt alloy.

(3) A crystal for taking out a single crystal ingot whose neck portion is suspended and held by a seed chuck in a chamber of a CZ single crystal pulling apparatus from a vertically long opening of the chamber. An unloading device, which is an arm for gripping a single crystal ingot stored in a suspended state in the chamber, wherein the single crystal ingot is gripped by the gripping force when the single crystal ingot is separated from a seed. An arm for supporting the ingot; and control means for controlling the movement of the arm. The control means includes: a tilt drive means for driving the arm to tilt the single crystal ingot; and a circular motion of the single crystal ingot. Rotation control means for controlling an arm to cause the single crystal ingot to be separated from a seed. Removing the single crystal ingot from the longitudinal opening of the chamber after tilting the upper end of the single crystal ingot circularly around its tail portion by a predetermined angle with respect to the vertical direction. apparatus.

The tilt driving means for driving the arm to tilt the single crystal ingot includes driving means such as a pneumatically driven cylinder and a motor jack. The rotation control means may be of any configuration, such as a link configuration or a configuration in which the arm is moved along a guide.

(4) The rotation control means for controlling the movement of the arm includes first and second link members having different lengths, each of which is rotatably supported by a predetermined support member. An arm supporting member rotatably supported by the first and second link members.
And a second link member, the arm supporting member, and the supporting member constitute a four-node rotating chain in which the supporting member is a fixed link, and the single crystal ingot gripped by the arm supporting member has a tail portion thereof. The crystal take-out apparatus according to (3), wherein the arm supporting member is tilted by the four-node rotating chain so as to rotate about the center.

(5) A computer readable storage medium storing a program for controlling the driving means, wherein the single crystal ingot is separated from a seed.
When the shoulder portion of the single crystal ingot is taken out of the chamber from the vertically long opening of the chamber by the tilt drive means and the rotation control means, the single crystal ingot is raised and horizontally moved. A computer-readable storage medium that stores therein.

The "storage medium" includes FD, CD, D
All forms such as VD and HD are included, which may be an external storage medium or an internal storage medium built into a computer.

According to this program, after the single crystal ingot separated from the seed is tilted and its shoulder portion is taken out of the single crystal pulling apparatus through the vertically long opening of the chamber, the single crystal ingot is removed. The crystal ingot is taken out from the long opening portion in the order of the straight body portion and the tail portion.

(6) The arms are paired with palms at their ends, and the single crystal ingot is gripped by sandwiching the single crystal ingot between the palms of the pair of arms. (3)
(4) The crystal removal apparatus according to (5) or (5).

(7) A single crystal ingot group taken out of the single crystal pulling device by the crystal taking device according to any one of (1) to (6).

Such a single crystal ingot group includes (1)
And (2), it can be expected that the cut surfaces are somewhat more uniform than those cut with conventional nippers, etc., and (3) to (6) This means that a longer and heavier one than before is a set of products continuously produced.

The method according to the present invention can be generalized and expressed as follows.

(8) A method for taking out a single crystal ingot pulled up by a CZ method single crystal pulling apparatus from the single crystal pulling apparatus, wherein the taper shape of a tail portion of the single crystal ingot is utilized. A method for facilitating removal of the single crystal ingot from the single crystal pulling device by tilting the single crystal ingot by the shape.

(9) A crystal for taking out a single crystal ingot whose neck portion is suspended and held by a seed chuck in a chamber of a CZ method single crystal pulling apparatus from a vertically long opening of the chamber. An unloading device, wherein a single crystal ingot stored in a suspended state in the chamber is separated from a seed by causing a crack at a neck portion of the single crystal ingot, thereby separating the single ingot from the seed. An arm for holding a single crystal ingot stored in a suspended state, wherein the arm supports the single crystal ingot by its holding force when the single crystal ingot is separated from a seed, and Driving means and control means for controlling movement, wherein the driving means Tilt driving means for driving the arm to tilt the ingot, and rotation control means for controlling the movement of the arm so that the single crystal ingot moves circularly, when the single crystal ingot is separated from the seed, A crystal extracting apparatus, wherein the single crystal ingot is rotated at a predetermined angle with respect to a vertical direction by circularly moving around a tail portion thereof, and is taken out from a vertically long opening of the chamber.

According to the crystal take-out apparatus of the present invention as described above, a single crystal ingot longer than the shape of the opening for taking out the single crystal ingot formed in the single crystal puller is pulled. It can be removed from inside the device.

By using the crystal take-out apparatus according to the present invention, it is possible to manufacture a single crystal ingot longer than the opening shape of the existing single crystal pulling apparatus. Can be dealt with without changing the shape and structure of the existing single crystal pulling apparatus.

Further, a single crystal ingot suspended with a neck portion held by a predetermined seed chuck is separated from the seed chuck by generating a crack in the neck portion, so that fragments are not scattered by a small force. Separation work can be easily performed. By introducing this method, the work of separating the single crystal ingot can be automated, eliminating the work of the equipment operator from high places, and reducing the work load on the equipment operator.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A crystal extracting apparatus and a crystal extracting method according to the present invention will be described below with reference to the drawings.

[Structure of Apparatus] FIG. 1 shows a crystal extracting apparatus 50 according to the present invention and a single crystal pulling apparatus 1 for extracting a single crystal ingot by the crystal extracting apparatus 50.
It is a perspective view which shows the whole structure of.

As shown in FIG. 1, the single crystal pulling apparatus 1 comprises a lower chamber 11 for storing a crystal material and an upper chamber 2 for pulling a single crystal ingot 8. In a state where the single crystal ingot 8 is pulled up, the single crystal ingot 8 is held by the cable 4 wound by the cable winder, the seed crystal seed chuck 5 connected to the tip of the cable 4, and the seed crystal seed chuck 5. The seed crystal 6 is suspended by the seed crystal 6 and a small-diameter neck portion 7 continuously grown from the seed crystal 6.

In such a state, the crystal take-out device 50 for taking out the single crystal ingot 8 from the upper chamber 2 of the pulling device 1 is in front of the single crystal taking-out opening 13 formed in the upper chamber 2 of the pulling device 1. Then, the height of the vertical movement base 52 that moves vertically along the guide frame 51 is adjusted as appropriate.

As a result, the holding arms 54 and 55 of the holding mechanism 60 supported by the vertically moving base 52 via the support member 53 are positioned at a height at which a predetermined position of the single crystal ingot 8 is held. In this state, the holding arms 54 and 55 hold the single crystal ingot 8 by the opening / closing mechanism.

Incidentally, the gripping arm 54 is composed of a pair of arm members, and these arm members are driven by an air cylinder in a closing direction to grip the straight body portion of the single crystal ingot.

The gripping arm 55 provided beneath the gripping arm 54 is composed of a pair of arm members. By driving these arm members in the closing direction by an air cylinder, at the straight body portion of the single crystal ingot,
A position separated by a predetermined interval from a position gripped by the grip arm 54 is gripped.

Thus, the gripping arms 54 and 55 form a palm, and the single crystal ingot gripped by the palm can rotate in accordance with the rotation of the palm.

Here, in the gripping mechanism 60, the arm base 57 is connected to the support member 53 via the links 61 and 62.
Is supported on the upper end of the arm base 57 via a height adjusting cylinder 58.
Is provided.

As shown in FIG. 2, the crystal separation apparatus 70 has a slider driving section 71 whose height can be adjusted by a height adjusting cylinder 58. The height of the slider driving section 71 is determined by a predetermined small television camera. Can be adjusted. In this case, the neck 7 colliding with the blade 73 can be confirmed at the position where the light spot of the laser pointer hits.

A slider 72 made of Teflon (registered trademark) is guided and held by the slider driving section 71 so as to be able to protrude in the direction of arrow a. A high-hardness blade 73 made of a cemented carbide obtained by sintering tungsten carbide or titanium carbide with a cobalt alloy is fixed to the tip of the slider 72, and is compressed in the direction of arrow a by compressed air obtained from a pneumatic circuit 75. It projects at high speed and collides with the neck portion 7 of the single crystal ingot 8 suspended in the upper chamber 2 of the pulling device 1, and the single crystal ingot is cut off from the seed crystal 6 at the neck portion 7.

Incidentally, when cutting the single crystal ingot from the seed crystal 6, the arms 54, 55 holding the single crystal ingot 8 are slightly moved upward by the vertical movement base 52, so that the single crystal ingot is cut. Is supported so that tensile stress remains in the neck portion 7 by the remaining weight. Thereby, the blade 7
When a crack occurs in the neck part 7 due to the collision of the neck part 7 with the neck part 7, the crack rapidly develops and the neck part 7 can be easily cut. Thus, a part of the weight of the single crystal ingot is transferred to the arms 54 and 55.
By breaking the neck portion 7 after supporting the single crystal ingot, the weight of all
5 can be avoided.

In the pneumatic circuit 75, the compressed air source 7
A solenoid valve V1 is provided in a pipe connected to the valve 7. When the solenoid valve V1 is opened, compressed air flows into an air chamber of the slider driving unit 71 to cause the slider 72 to protrude. Slider 7
Numeral 2 strikes a stopper 74 and stops at a predetermined position.

To accommodate the slider 72, the solenoid valve V1
By closing the solenoid valves V2 and V3,
2, the working air flows into the aspirator 78 to be in a reduced pressure state.
The air in the first air chamber is exhausted, and the slider 72 is stored in the slider driving section 71.

Thus, the gripping arms 54, 55 (FIG. 1)
The single crystal ingot 8 gripped by the above is cleaved at its neck portion 7 by the crystal cleaving device 70 so that it can be taken out of the upper chamber 2 to the outside.

Here, the arms 54 and 55 are set in the upper chamber 2.
The single crystal ingot 8 is a so-called long ingot whose length L1 is longer than the width L2 of the opening 13 of the upper chamber 2 in the longitudinal direction (vertical direction). It is difficult to take it out of the upper chamber 2 while holding it vertically.

Therefore, the gripping mechanism 60 of the crystal removal device 50
After tilting the gripped single crystal ingot 8, it is lifted upward and taken out of the upper chamber 2.

That is, FIG. 3 is a perspective view showing the detailed structure of the gripping mechanism 60. A link 61 is pivotally supported by a support member 53 so as to be rotatable. Are rotatably supported.

A link 62 is rotatably supported between the arm base 57 and the support member 53 so as to be rotatable relative to each other. Thus, the support member 53, the link 61, the arm base 57 and the link 62 allow the support member 53 to rotate. A four-bar rotational chain with 53 fixed is configured.

As shown in FIG. 4 showing the detailed configuration of the gripping mechanism 60, the air cylinder 63 is held in a state where the arms 54 and 55 grip the single crystal ingot 8 while the longitudinal direction thereof is oriented vertically. When the operation is performed to house the output shaft of the air cylinder 63, the arm base 57 engaged with the output shaft rotates according to the operation of the air cylinder 63.

In this case, the pair T1 between the link 61 and the arm base 57 rotates in the direction of the arrow around the pair T2 between the support member 53 and the link 62. The pair T3 between the pair rotates in the direction of the arrow about the pair T4 between the support member 53 and the pair. Here, the length of the link 62 farther than the link 61 with respect to the arms 54 and 55 is longer than the length of the link 61, and as shown in FIG.
The amount of tilt of the arm base 57 in the vertical direction when the first and second rotations are made to be smaller than when the arm base 57 is tilted about the pair T1 or T2 without providing the link mechanism. I have. As a result, the single crystal ingot 8 held by the arms 54 and 55 is tilted about its tail.

In this case, the tail portion of the single crystal ingot 8 is tapered, so that even if the single crystal ingot 8 is tilted, the tail portion does not contact the inner wall of the pulling device.

The single crystal ingot 8 thus tilted
Projection width L3 when is projected onto a projection plane parallel to the vertical direction.
Is the length L1 of the single crystal ingot 8 in the longitudinal direction (FIG. 4)
The single crystal ingot 8 is tilted until the projection width L3 becomes shorter than the vertical width L2 of the opening 13 of the upper chamber 2 (FIG. 1). At this time, the shoulder portion of the single crystal ingot 8 comes out of the opening 13, and in this state, by moving the crystal extraction device 50 in the horizontal direction away from the pulling device 1, the tilted single crystal ingot 8 becomes , Are taken out of the upper chamber 2.

FIG. 6 is a view showing a series of steps for taking out the single crystal ingot 8 from the pulling apparatus 1. The single crystal ingot 8 suspended by the seed crystal seed chuck 5 (FIG. 6A) After being cut at the neck 7 and lifted upward as indicated by an arrow y (FIG. 6 (B)), it is further moved in a horizontal direction as indicated by an arrow x (FIG. 6 (C)), so that the upper chamber 2 Taken out.

[Operation] In the crystal take-out apparatus 50 having the above-described function and configuration, the single crystal ingot 8 in the upper chamber 2 is gripped by the arms 54 and 55, and the single crystal ingot 8 is It can be separated from the seed crystal 6 at the neck 7.

Therefore, the operator does not need to manually cut the neck 7, and the work of unloading the single crystal ingot 8 can be automated.

In the cleaving process of the neck portion 7 by the cleaving device 70, the load of the single crystal ingot 8 on the neck portion 7 is caused by its own weight or by slightly raising the arms 54, 55 holding the single crystal ingot 8. As a result, in a state where a part of the weight of the single crystal ingot 8 is released and a part thereof remains, that is, a state where a tensile stress is generated in the neck portion 7, the blade 73 made of a hard material collides therewith at a high speed. . As a result, a crack is generated in the neck portion 7, and the crack is instantaneously propagated by the tensile stress generated in the neck portion 7 to break the neck portion 7.

As a result, the single crystal ingot 8 is separated from the seed crystal (seed) with a small force and without scattering of fragments, as compared with the method of cutting the neck portion 7 by crushing using a nipper, pliers or the like. .

The single crystal ingot 8 separated from the seed crystal 6 is tilted about its tail by the holding mechanism 60 of the crystal take-out device 50. In this way, as shown in FIG. 6B, first, only the shoulder portion of single crystal ingot 8 is brought out of opening 13 of upper chamber 2 to the outside.

In this state, by lifting the single crystal ingot 8 in the direction of the arrow y, the upper end of the single crystal ingot 8 is kept out of the opening 13 as shown in FIG. The lower end of single crystal ingot 8 can be moved to a height that can be pulled out of opening 13. By moving the single crystal ingot 8 in this state in the horizontal direction indicated by the arrow x, the single crystal ingot 8 can be pulled out of the upper chamber 2.

Thus, single crystal ingot 8 longer than opening 13 is taken out of upper chamber 2 through opening 13.

As described above, by taking out the single crystal ingot 8 by tilting it, the single crystal ingot 8 pulled up by the conventional pulling device 1 so as to be longer than the vertical width L2 of the opening 13 is used. It can be taken out without changing the shape and structure of the chamber such as the opening 13.

[Other Embodiments] In the above-described embodiment, the case where the single crystal ingot 8 is tilted by using the gripping mechanism 60 having the link structure has been described. However, the present invention is not limited to this. As shown in FIG. 5, the arms 54 and 55 are gripped by a carriage 153 movable along a guide rail 154 with the lower end of the single crystal ingot 8 suspended in the pulling device 1 as a center of curvature. Single crystal ingot 8 gripped by 54, 55
Can be tilted.

The truck 153 is connected to the air cylinder 155
The guide rails 154 move on the guide rails 154, and the guide rails 154 are supported by the vertical movement base 152. By moving the vertical movement base 152 up and down along the frame 151, the arms 54 and 55 can be moved up and down. .

As described above, various configurations can be applied to the configuration in which the single crystal ingot 8 is inclined.

In the above-described embodiment, the single crystal ingot 8 having the shoulder portion that is tilted so that the shoulder portion comes out of the opening 13 of the upper chamber 2 is moved horizontally to pull up the single crystal ingot 8. Although the case of taking out from 1 has been described, the present invention is not limited to this,
The point is that the single crystal ingot 8 may be taken out of the pulling apparatus 1 through the opening 13 in the order of the shoulder portion, the long body portion and the tail portion. For example, the tilted single crystal ingot 8 is moved obliquely upward. The single crystal ingot 8 that is longer than the length of the opening 13 can be taken out of the pulling device 1 by moving along the predetermined arc.

In the above-described embodiment, the case where the single crystal ingot 8 is gripped by using two pairs of arms (gripping arms 54 and 55) is described. However, the present invention is not limited to this, and three or more pairs are used. 1 having a width enough to use a pair of arms or to tilt the single crystal ingot 8 gripped.
A pair of arm pairs may be used.

[0067]

As described above, the crystal take-out apparatus according to the present invention has a chamber shape similar to that of a conventional single crystal pulling apparatus.
It is possible to take out a single crystal ingot pulled up long from the inside of the pulling device without making any change to the structure.

In the crystal take-out apparatus according to the present invention, the single crystal ingot can be separated from the seed crystal without manual operation by cutting the neck portion of the single crystal ingot by the cleaving device. Can be automated.

[Brief description of the drawings]

FIG. 1 is a side view showing the overall configuration of a crystal take-out apparatus according to the present invention.

FIG. 2 is a diagram showing a configuration of a cleaving device according to the present invention.

FIG. 3 is a perspective view showing a configuration of an arm mechanism of the crystal take-out apparatus according to the present invention.

FIG. 4 is a view for explaining the operation of an arm mechanism of the crystal take-out apparatus according to the present invention.

FIG. 5 is a diagram for explaining an operation of an arm mechanism of the crystal take-out apparatus according to the present invention.

FIG. 6 is a view showing an extraction method of the crystal extraction apparatus according to the present invention.

FIG. 7 is a side view showing another embodiment of the crystal removal device according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Single crystal pulling apparatus 2 Upper chamber 3 Winding apparatus 4 Cable 5 Seed crystal seed chuck 6 Seed crystal 7 Neck 8 Single crystal ingot 11 Lower chamber 13 Opening 50, 150 Crystal take-out device 51 Guide frame 52 Vertical movement base 53 Support member 54, 55 Arm 57 Arm support member 63, 155 Air cylinder 70 Cutting device 71 Slider driving unit 72 Slider 73 Blade 153 Cart 154 Guide rail

Claims (9)

[Claims] 1. A crystal take-out device for taking out a single crystal ingot whose neck portion is suspended and held by a seed chuck in a chamber of a CZ method single crystal pulling device from the single crystal pulling device. In the single crystal pulling apparatus, a single crystal ingot suspended by a seed chuck in the single crystal pulling apparatus is provided with a crystal cleaving device for separating the seed from the seed by generating a crack in the neck portion and cleaving the ingot. Crystal extractor. 2. The crystal take-out apparatus according to claim 1, wherein said crystal cutting apparatus collides a blade made of a hard material with a neck portion. 3. A crystal take-out for taking out a single crystal ingot stored in a state where a neck portion is suspended and held by a seed chuck in a chamber of a CZ method single crystal pulling apparatus from a vertically long opening of the chamber. An apparatus for gripping a single crystal ingot stored in a suspended state in the chamber, wherein the single crystal ingot is held by a gripping force when the single crystal ingot is separated from a seed. And a control means for controlling the movement of the arm, wherein the control means drives the arm to tilt the single crystal ingot, and causes the single crystal ingot to make a circular motion. Rotation control means for controlling the arm so that the single crystal ingot is separated from the seed The single crystal ingot is tilted by a predetermined angle with respect to the vertical direction by making a circular motion around its tail portion, and then is raised and moved horizontally to be taken out from the longitudinal opening of the chamber. apparatus. 4. A means for inclining the arm includes first and second link members having different lengths rotatably supported on a predetermined support member, respectively, and the first and second links. An arm support member rotatably supported by a member, wherein the first and second link members, the arm support member, and the support member constitute a four-bar rotating chain in which the support member is a fixed link. 4. The arm support member according to claim 3, wherein the arm support member is driven by the four-node rotating chain so that the single crystal ingot gripped by the arm support member rotates about its tail portion. Crystal extractor. 5. A computer-readable storage medium storing a program for controlling said driving means, wherein after the single crystal ingot is separated from a seed, the shoulder portion of the single crystal ingot is moved by the arm control means. A computer-readable storage medium storing a program for moving a single crystal ingot upward and horizontally when the single crystal ingot is taken out of the chamber through a vertically long opening of the chamber. 6. The arm is provided with a pair of palms at its ends, and the single crystal ingot is gripped by sandwiching the single crystal ingot between the palms of the pair of arms. The crystal take-out apparatus according to claim 3, 4 or 5, wherein: 7. A single crystal ingot group taken out of the single crystal pulling device by the crystal taking device according to any one of claims 1 to 6. 8. A method for taking out a single crystal ingot pulled up by a CZ method single crystal pulling apparatus from the single crystal pulling apparatus, wherein the tapered shape is obtained by utilizing a tapered shape of a tail portion of the single crystal ingot. A method of facilitating taking out the single crystal ingot from the single crystal pulling apparatus by tilting the single crystal ingot by the amount of: 9. A crystal taking-out device for taking out a single-crystal ingot stored in a state where a neck portion is suspended and held by a seed chuck in a chamber of a CZ method single crystal pulling apparatus from a vertically long opening of the chamber. An apparatus, comprising: a crystal cleaving device that separates a single crystal ingot stored in a suspended state in the chamber from a seed by generating a crack in a neck portion thereof and cleaving the ingot; and suspending the single crystal ingot in the chamber. An arm for holding a single crystal ingot stored in a lowered state, the arm supporting the single crystal ingot by the holding force when the single crystal ingot is separated from a seed; and movement of the arm. Controlling means for controlling the tilting of the single crystal ingot. Tilt driving means for driving the arm so as to rotate the single crystal ingot, and rotation control means for controlling the arm so as to circularly move the single crystal ingot. When the single crystal ingot is separated from the seed, the single crystal ingot is The crystal is taken out from the vertically long opening of the chamber after being tilted at a predetermined angle with respect to the vertical direction by making a circular motion around the tail portion.