JP4702801B2 - Continuous film deposition system - Google Patents

Description

  The present invention relates to a continuous film forming apparatus for continuously forming a functional thin film on a surface of a belt-shaped film forming substrate while conveying the film.

  A film-forming substrate made of a long film or sheet made of plastic or inorganic material is continuously run and transported in a vacuum chamber, and various functional thin films are formed on the surface by sputtering or vapor deposition. There is a continuous film forming apparatus. In this type of continuous film forming apparatus, it is necessary to perform maintenance and setup operations such as replacement of a sputtering source, replacement and cleaning of a mask, replacement of a film formation base material, and paper feeding for each batch process.

  For this reason, the conventional continuous film forming apparatus has one end opened as described in, for example, Patent Document 1 (Japanese Patent Laid-Open No. 10-36967) and Patent Document 2 (Japanese Patent Laid-Open No. 2001-3168). A vacuum chamber having a chamber main body and a closing lid for closing the opening end of the chamber so as to be openable / closable is supported. It had a structure like this. However, such an old type continuous film forming apparatus requires a relatively large installation space and maintenance space because it is necessary to pull out a roll group for transporting a substrate or a sputtering source from the chamber body. There is a problem that the maintenance workability of the member left behind is inferior.

  Therefore, in recent years, a continuous film forming apparatus that is excellent in workability and requires less installation space has been proposed. An example of such a continuous film forming apparatus is shown in FIGS. This continuous film forming apparatus includes a vacuum chamber 1 and a film forming roll 2 around which a film base material (film forming base material) is wound is rotatably provided. The vacuum chamber 1 is provided with a shielding plate 11 that divides the inside of the vacuum chamber 1 up and down, and an unwinding roll 3, a winding roll 4, a free roll 5, and a load cell roll 6 are disposed at the top of the vacuum chamber 1. Are provided with cathode boxes (film forming sources) 7L and 7R on the left and right sides of the film forming roll 2 in the lateral direction (lateral direction). An evacuation pump 10 is attached to the upper back surface of the vacuum chamber 1. The film forming roll 2 is driven by a constant speed motor to convey the film substrate at a constant speed, and the unwinding roll 3 and the winding roll 4 feed back the tension detected by the load cell roll 6 to perform torque rotation control. The film forming process is performed with a predetermined tension.

  A bobbin obtained by winding a film base material in a coil shape is attached to the unwinding roll 3, and the film base material wound around the bobbin is continuously applied to the film forming roll 2 via a free roll 5 and a load cell roll 6. Supplied. After depressurizing the inside of the vacuum chamber 1 to a vacuum, the film substrate supplied to the film forming roll 2 is sputter-deposited on the outer peripheral surface of the film forming roll 2, and then the load cell roll 6 and the free roll 5 are again attached. Through the bobbin mounted on the winding roll 4.

  The vacuum chamber 1 includes a rear wall 21 and a front wall 22 disposed so as to be opposed thereto by an upper surface wall 23 and a lower surface wall 24, and an outer frame portion 25 having a square shape in a side view and right and left sides thereof. It has a box shape composed of side walls 26 </ b> L and 26 </ b> R that close the opening, and is installed on the lower frame 13. The outer frame portion 25 is a fixed chamber portion 15, the side walls 26L and 26R are moving chamber portions 16L and 16R, and the left and right moving chamber portions 16L and 16R are on the back wall 21 side of the fixed chamber portion 15. The hinge mechanism 18 provided at the end can be opened and closed with respect to the fixed chamber 15 in an airtight manner. The rolls such as the film forming roll 2, the unwinding roll 3, and the winding roll 4 are supported vertically and freely on the wall surfaces of the back wall 21 and the front wall 22, and the cathode boxes 7L and 7R are The side walls 26L and 26R are detachably attached.

  For this reason, after the film base material is formed, the left and right moving chamber parts 16L and 16R are simply opened from the fixed chamber part 15, and maintenance and setup work can be easily performed without removing the roll group in the fixed chamber part 15. It can be performed. Further, since the cathode boxes 7L and 7R are also attached to the side walls 26L and 26R, replacement and maintenance can be easily performed. Since these operations can be performed simply by opening the moving chamber portion, the installation space and the maintenance space can be reduced.

In the continuous film forming apparatus, the outer frame portion 25 of the vacuum chamber 1 is the fixed chamber portion 15 and the left and right side walls 26L and 26R are the left and right moving chamber portions 16L and 16R. The arrangement is not limited to this, and each division part of the vacuum chamber 1A having a division structure described in Patent Document 3 (Japanese Patent Laid-Open No. 2006-77284) can be used. That is, as shown in FIG. 12, one side end of the back wall 21 of the vacuum chamber 1A, one side of the front wall 22, the first divided surface 31 passing through the top wall 23 and the bottom wall 24, and the back surface The vacuum chamber 1 </ b> A is divided into a left divided portion 34 </ b> L and a central divided portion 33 by the other side end portion of the wall 21, the other side portion of the front wall 22 and the second divided surface 32 passing through the upper surface wall 23 and the lower surface wall 24. The central division 33 may be the fixed chamber portion 15 and the left division portion 34L and the right division portion 34R may be the left and right moving chamber portions 16L and 16R. In this type, the opening area when the moving chamber portions 16L and 16R are opened becomes wider, and workability such as maintenance is further improved. These including the continuous film forming apparatus shown in FIGS. 10 and 11 are referred to as a double-side open type continuous film forming apparatus.
JP 10-36967 A Japanese Patent Laid-Open No. 2001-3168 JP 2006-77284 A

  A film substrate conveyed by a group of rolls such as a film forming roll is wound up by a take-up roll after film formation, but if the film substrate meanders during conveyance, the ends of the substrate will not be aligned. If winding is poor, it will be impossible if it is remarkable. Therefore, in order to prevent meandering during conveyance, the parallelism between the rotation axes of the rolls contributing to the conveyance of the base material (hereinafter referred to as “parallelism between roll axes”) falls within an allowable range. In general, it is desirable that the parallelism between roll axes be within about 20 μm.

  In the two-side open type continuous film forming apparatus, when the vacuum chamber is evacuated at the time of film formation, the back wall and the front wall of the fixed chamber portion are deformed so as to be bent inward by the atmospheric pressure. As described above, this type of continuous film forming apparatus has a roll group such as a film forming roll supported between the back wall and the front wall of the fixed chamber portion so as to be rotatable perpendicularly to the wall surface. When the degree is out of the allowable range, the film substrate becomes extremely meandering, and there is a problem that winding failure or failure is likely to occur. In particular, this tendency becomes more prominent as the vacuum chamber becomes larger, which is an obstacle to enlargement.

As a countermeasure, by increasing the thickness of the rear wall and positive wall constituting the fixing chamber portion, it is possible to prevent deformation of these walls, the thickness of the increase lead to increase in weight of the vacuum chamber As a result, the weight of the apparatus and the floor load are increased, and the total cost is inevitably increased.

  The present invention has been made in view of such a problem, and in a double-side open type continuous film forming apparatus, it can freely rotate to a fixed chamber portion during vacuum film formation without increasing the thickness of the back wall and front wall of the vacuum chamber. An object of the present invention is to provide a continuous film forming apparatus in which the parallelism between the roll axes of the roll group supported by the film is within an allowable range.

This onset Ming, a continuous deposition apparatus for depositing while conveying the film formation substrate, a fixed chamber part connecting the rear wall and the oppositely disposed front wall to the top wall and lower wall A vacuum chamber comprising a pair of left and right moving chamber portions each having left and right side walls closing the left and right openings of the fixed chamber portion, and a film forming roll housed in the vacuum chamber and rotatably provided A lateral film-forming source that forms a film on the film-forming substrate wound around the film-forming roll from the side, an unwinding roll that supplies the film-forming substrate to the film-forming roll, and after film formation A film forming roll, a winding roll, and a winding roll. The film forming roll, the unwinding roll, and the winding roll Is the back wall of the fixed chamber Is rotatably supported vertically on the wall surface of the fine front wall, the lateral deposition source is detachably attached to the movable chamber part, the rear wall and the front wall of the fixed chamber part, the respective plate thickness equivalent , and the time the pressure was reduced to the vacuum chamber, an opening is provided in the rear wall and the front wall as the deflection caused by the back wall and the front wall is bent inward is equal at any position in the longitudinal direction.

According to the above Killen diagenetic film device, by opening the right and left transfer chamber portion from the fixed chamber part, the maintenance of the roll-gun and side-forming source provided in the transfer chamber of the right and left in the fixed chamber part and setup operation Can be easily performed. In addition, the back wall and the front wall of the fixed chamber portion on which the roll group is rotatably supported, when the vacuum chamber is depressurized, the deflection caused by bending the back wall and the front wall inward is at an arbitrary position in the vertical direction. Therefore, even if the wall thickness of the back wall and the front wall of the fixed chamber is relatively thin, the deformation of the back wall and the front wall is symmetrical, so it is supported vertically on the wall of the back wall and the front wall. The degree of parallelism between the roll axes of the rolls thus formed hardly changes. For this reason, the film-forming substrate can be conveyed without meandering, and the film-formed substrate can be wound up with its end portions aligned. Of course, since it is not necessary to increase the thickness of the back wall and the front wall of the fixed chamber so as not to be deformed, the weight of the vacuum chamber and thus the continuous film forming apparatus hardly increases. For this reason, especially in the case of a large-sized apparatus, it is extremely advantageous in terms of weight reduction and material cost reduction.

In the present invention the continuous deposition apparatus can Rukoto further provided a space restricting member to maintain the spacing between the back wall and the front wall of the fixed chamber part.

By providing the pre SL between隔規system member, it is possible to considerably reduce the deformation of the rear wall and the front wall, to keep the roll axis between the parallelism of the rolls rotatably provided perpendicularly to these walls The film-forming substrate can be transported without meandering and wound up with the ends aligned. Of course, it is not necessary to increase the plate thickness in order to prevent deformation of the wall, which is advantageous in the case of a large apparatus.

It is preferable that the space regulating member is detachably provided on the back wall and the front wall of the fixed chamber portion. By providing in this way, when the movement chamber part is opened and the roll group in the fixed chamber part is accessed, the interval regulating member can be easily removed, so that workability such as maintenance and paper passing work is improved. It is Ru can.

As described above, in the continuous film-forming apparatus of the present invention, the plate thickness of the rear wall and positive wall of the fixed chamber part made equal, when the vacuum chamber was evacuated, caused by the back wall and the front wall is bent inwardly deflection opening in the rear wall and positive wall so that equal at any position in the vertical direction are provided.

By equal the thickness of the rear wall and positive wall of the fixed chamber part, the bending stiffness about the thickness center in the cross section of each wall become equal, the rear wall at the time of vacuum deposition, the deformation of the front wall that Ki de be in plane symmetry. Furthermore, during vacuum decompression of the vacuum chamber, the rear wall and the front wall an opening to said rear wall and positive wall as deflection caused by bending inwardly is equivalent at any position in the longitudinal direction, various openings Even if formed, the deformation of the back wall and the front wall during vacuum film formation can be maintained in plane symmetry, and the parallelism between the roll axes of the roll group supported by the fixed chamber portion can be maintained. By particularly providing the space restricting member, coupled with maintenance of spacing between the back wall and the positive wall of the fixed chamber part by the space restricting member, at the time of vacuum deposition, between the roll axis parallelism is more difficult to change In addition, the film formation substrate after film formation can be wound more stably.

Further, interpolation in the continuous film-forming apparatus, a lower deposition source for deposition from below the film substrate wound around the deposition rolls disposed, the lower film source on the front wall of the fixed chamber part An insertion / removal opening that is removably attached may be provided, and a dummy opening having the same shape or substantially the same shape may be provided in a portion facing the insertion / removal opening on the back wall of the fixed chamber portion.

  The insertion / removal opening for removably attaching the lower film forming source has a relatively large size, and the influence on the deformation of the front wall of the fixed chamber portion cannot be ignored. By providing a dummy opening having the same shape or substantially the same shape as the insertion / removal opening at the portion facing the opening, the influence of the opening on the back wall and the front wall of the fixed chamber portion becomes equal. The plane symmetry of the deformation of the back wall and the front wall is maintained, and the adverse effect on the parallelism between the roll axes can be eliminated. Of course, since the lower film-forming source can be easily attached and detached from the front wall of the fixed chamber portion, the maintainability is also good.

According to continuous film formation apparatus of the present invention, the rear wall and front wall of the fixed chamber part, when reducing the pressure of the vacuum chamber, optionally position the deflection occurs in the longitudinal direction by the rear wall and the front wall is bent inwardly Therefore, these walls can be deformed in plane symmetry during vacuum film formation without increasing the thickness of these walls. Furthermore, the Rukoto spaced regulating member for maintaining the spacing between the back wall and the front wall of the fixed chamber part can significantly reduce deformation of these walls at the time of vacuum deposition. For this reason, the parallelism between the roll axes of the roll group that is vertically and rotatably supported on the wall surfaces of these walls is maintained, and the film-formed substrate can be wound up well. In particular, since it is not necessary to increase the plate thickness in order to prevent deformation of the rear wall and the front wall, the large apparatus is extremely advantageous in terms of weight reduction and material cost reduction.

  Hereinafter, a first embodiment of a continuous film forming apparatus of the present invention will be described with reference to FIGS. The same members as those of the conventional continuous film forming apparatus shown in FIGS. 10 and 11 are denoted by the same reference numerals and description thereof will be omitted or simplified, and differences will be mainly described.

  In the continuous film forming apparatus according to this embodiment, a rear wall 21 and a front wall 22 arranged to face the rear wall 21 are connected by an upper surface wall 23 and a lower surface wall 24, and an outer frame portion 25 having a side view in a side view and its left and right sides. The vacuum chamber 1 includes left and right side walls 26L and 26R that close the opening, and the thickness Tb of the back wall 21 of the outer frame portion 25 is the same as the thickness Tf of the front wall 22. Yes.

  The outer frame portion 25 is a fixed chamber portion 15 and the side walls 26L and 26R are left and right moving chamber portions 16L and 16R, respectively, and these are hinges provided at the side end portions of the back wall 21 of the fixed chamber portion 15. The mechanism 18 is provided in the fixed chamber portion 15 so as to be freely opened and closed. In addition, a sealing member is provided on a mating surface between the fixed chamber portion 15 including the outer frame portion 25 and the moving chamber portions 16L and 16R including the side walls 26L and 26R, and the moving chamber portions 16L and 16R are closed. Then, it integrates with the fixed chamber part 15 airtightly.

  The interior of the fixed chamber portion 15 is partitioned into an upper portion, a middle portion, and a lower portion in the vertical direction by shielding plates 11A and 11B installed on the back wall 21 and the front wall 22. An unwinding roll 3, a winding roll 4, a free roll 5, and a load cell roll 6 are supported on the rear wall 21 and the front wall 22 so as to be freely rotatable at the upper part of the fixed chamber portion 15. In addition, a film forming roll 2 is rotatably supported in the middle portion, and left and right cathode boxes 7L and 7R serving as sputtering sources are provided on the left and right in the lateral direction with respect to the film forming roll 2 through a mask 12. These are detachably attached to the side walls 26L and 26R. The mask 12 is for depositing a predetermined region of the forming roll 2. The shielding plates 11A and 11B are for preventing mutual contamination of the sputtered film. In order to make the vacuum chamber 1 compact, the evacuation pump 10 is attached to the upper surface wall 23 of the fixed chamber portion 15 via a gate valve. In FIG. 2, the shielding plates 11A and 11B and the mask 12 are not shown.

As shown in FIG. 3, the front wall 22 constituting the fixed chamber portion 15 is provided with a paper passing work opening 27 having a diameter of about 150 mm at a substantially central portion on the longitudinal center line of the front wall 22. In addition, an internal observation opening 28 having a diameter of about 70 mm is provided in two upper and lower stages symmetrically with respect to the vertical center line. The paper passing work opening 27 is provided with an opening / closing lid for airtightly closing the opening, and the internal observation opening 28 is airtightly fitted with a transparent lid. Although not shown, the deposition rolls 2 in the rear wall 2 1, unwinding roll 3, through-shaped opening for passing the drive shaft, such as the take-up roll 4 is established.

  The film forming operation on the film substrate in this continuous film forming apparatus is basically the same as the conventional one, and after the vacuum chamber 1 is evacuated, the film substrate unwound from the unwinding roll 3 is free. By the film-forming substance continuously supplied to the film-forming roll 2 through the roll 5 and the load cell roll 6 and released from the targets respectively provided on the right and right side cathode boxes on the outer peripheral surface of the film-forming roll 2. After film formation, the film is wound around the winding roll 4 through the load cell roll 6 and the free roll 5 again.

  When the film base material having been formed is wound on the take-up roll 4, the inside of the vacuum chamber 1 is returned to the atmospheric pressure, and the left and right moving chamber portions 16L and 16R are first moved from the fixed chamber portion 15 as shown in FIG. After separating and opening and releasing both sides of the fixed chamber portion 15, the bobbin of the unwinding roll 3 and the winding roll 4 is exchanged and the paper passing operation is performed. If necessary, the targets of the cathode boxes 7L and 7R After the replacement, the moving chamber parts 16L and 16R are connected and integrated in an airtight manner with the fixed chamber part 15, the inside of the vacuum chamber 1 is evacuated, and film formation is performed again.

Continuous film forming apparatus of the above embodiment, since the plate thickness of the rear wall 21 and the positive wall 22 constituting the fixed chamber part 15 are equal, when depressurizing the vacuum chamber 1 in a vacuum, these walls, the inwardly convex Thus, the deformation of the back wall 21 and the front wall 22 is plane symmetric. For this reason, the parallelism between the axes of the rotation axes of the roll group supported vertically and freely on the wall surfaces of the back wall 21 and the front wall 22 hardly changes, and the film base material traveling through the roll group does not meander. The film is transported stably and wound up so that the end of the film substrate is aligned with the winding roll 4.

  Here, a calculation example of a dimensional change of a predetermined portion of the outer frame portion 25 constituting the fixed chamber portion 15 when the relatively large vacuum chamber is decompressed to a vacuum will be described. FIG. 4 shows a side view of the fixed chamber portion 15 (outer frame portion 25) used for the calculation. The alternate long and short dash line is the thickness center line of each wall, the dimensional unit is mm, and the lateral width of each wall is 700 mm. It is. Further, the deformation measurement reference points are the intersection Cb of the horizontal center line passing through the height center of the outer frame portion 25 and the plate thickness center line of the back wall 21, the plate thickness center line Cf of the front wall 22, and the figure. As shown, the support point Pb on the back wall 21 side and the support point Pf on the front wall 22 side of the roll shaft. The roll was supported perpendicularly to the wall surfaces of the back wall 21 and the front wall 22, and the lateral installation position of the roll axis was the center of the lateral width of the back wall 21 and the front wall 22.

  FIG. 5 shows the deformation state of the outer frame portion (fixed chamber portion) when the inside of the vacuum chamber is depressurized to a vacuum when the plate thickness Tb of the back wall 21 and the plate thickness Tf of the front wall 22 are both 50 mm. It is a figure which shows the board thickness centerline to show, and the displacement state of a predetermined part. The back wall 21 and the front wall 22 of the fixed chamber portion are deformed inwardly by the atmospheric pressure, and the inward displacement of Cb and Cf is Δx1 = Δx2 = 0.46 mm, and the upward movement of Pb and Pf The displacement was Δy1 = Δy2 = 33 μm. For this reason, it can be seen that the central axis of the roll does not tilt before and after the vacuum decompression and is always kept horizontal. Therefore, when a plurality of rolls are provided so as to be supported perpendicularly to the wall surfaces of the back wall 21 and the front wall 22, the parallelism between the roll axes of these rolls does not change before and after the vacuum pressure reduction, and the film substrate is meandering. It can be conveyed and taken up without having to.

  In the first embodiment, the front wall 22 is provided with a paper passing opening 27 and an internal observation opening 28, and the rear wall 21 is provided with an opening through which the drive shafts of various rolls are inserted. The total width of the openings at the height position is about 150 mm at most. If the lateral width of the front wall 22 or the back wall 21 is 700 mm, the total width of the openings is 21% or less. 22 has little influence on the deformation of the wall at the time of vacuum depressurization, and since these deformations are almost plane-symmetric, there is no adverse effect that the parallelism between the roll axes becomes unacceptable. However, it is preferable that the openings that do not affect the parallelism between the roll axes are arranged so as to be distributed in the vertical direction as symmetrically as possible with respect to the vertical center line of the back wall 21 and the front wall 22. In general, when the width of the opening is about 25% or more of the width of the front wall, by providing an opening having the same shape at the same facing portion of the front wall 22 and the back wall 21, It is possible to prevent deformation of the wall 22 from being deformed during vacuum decompression.

  On the other hand, FIG. 6 is shown as a comparative example. This is a plate thickness center line showing the deformation state of the fixed chamber portion when the inside of the vacuum chamber is depressurized to a vacuum when the plate thickness Tb of the back wall 21 is 50 mm and the plate thickness Tf of the front wall 22 is 35 mm, It is a figure which shows the displacement state of a predetermined part. The back wall 21 and the front wall 22 of the fixed chamber part are deformed inwardly by atmospheric pressure, and the inward displacements of Cb and Cf are Δx1 = 0.5 mm and Δx2 = 0.95 mm, and Pb and Pf The upward displacement was Δy1 = 35 μm and Δy2 = 69 μm. For this reason, assuming that another roll having a roll axis center line on the lateral center line of the outer frame portion 25 is supported perpendicularly to the wall surface, the parallelism between the axes of these rolls is adjusted to 0 μm before vacuum decompression. However, it becomes 34 μm after vacuum decompression. As a result, when a plurality of rolls are vertically supported on the wall surfaces of the back wall 21 and the front wall 22, the parallelism between roll axes of these rolls changes considerably after vacuum decompression. It turns out that there is a risk of.

  Next, a continuous film forming apparatus according to a second embodiment of the present invention will be described with reference to FIGS. In addition, the same member as the continuous film-forming apparatus concerning 1st Embodiment attaches | subjects the same code | symbol, and abbreviate | omits or simplifies description.

In the continuous film forming apparatus of the second embodiment, four interval regulating members 41 that maintain the interval between the back wall 21 and the front wall 22 of the fixed chamber portion 15 are provided perpendicular to the wall surface.
The two spacing regulating members 41 provided on the upper portion of the fixed chamber portion 15 are in the vicinity of the center portion in the vertical direction of the fixed chamber portion 15 and do not interfere with the roll group, that is, substantially on the side of the load cell roll 6. It is detachably attached at a symmetrical position with respect to the vertical center line. A support member 42 having a U-shaped receiving portion is attached to the inner wall surfaces of the back wall 21 and the front wall 22, and the interval regulating member 41 is detachably mounted on the receiving portion of the support member 42. ing.

When the vacuum chamber 1 is depressurized in vacuum, both end portions of the upper two spacing regulating members 41 are in direct contact with the inner wall surfaces of the back wall 21 and the front wall 22 so as to prevent deformation to the inside of the wall. Stretch. For this reason, at the time of vacuum film-forming, the parallelism between roll axes of the roll group provided in the fixed chamber portion 15 hardly changes, and the film substrate can be smoothly conveyed and wound. The thickness Tb of the back wall 21 and front wall 22 of the fixed chamber part 15, by the same thickness of the Tf, it is possible to deformation of the wall is space restricting member 41 is not in contact with the plane symmetry, roll A change in the parallelism between the axes can be further suppressed. The two spacing regulating members 41 provided in the lower part of the fixed chamber portion 15 will be referred to when the lower cathode box 8 described later is described.

The spacing regulating member can be manufactured with a rod having a circular or square cross section. Specifically, if the outer size of the front wall 22 is 70 cm wide and 110 cm high, when the inside of the vacuum chamber 1 is evacuated, the external force due to atmospheric pressure applied here is approximately 7700 kgf (70 × 110 × 1 kgf / cm). ² ), and when this is received by two interval restricting members made of solid rods of 30 mm square, the compressive stress applied to the members is about 4.2 kgf / mm ² . This stress is at a level that causes no problem in terms of material strength and buckling stress. Thus, since the cross-sectional size of the space regulating member is relatively small and does not interfere with operations such as paper passing, the space regulating member 41 is provided when the vacuum chamber is enlarged. Even if it does, maintenance to a roll group, a paper passing action, etc. can be performed easily.

  By the way, the amount of displacement is proportional to the fourth power of the length of the beam in the case of a distributed load at the free end of the beam (when the simple support beams at both ends receive a uniform load), and is proportional to the third power of the length even when receiving a concentrated load. Therefore, when the interval regulating member 41 is provided at the center in the longitudinal direction of the back wall 21 and the front wall 22, the displacement amount is 1/8 to 1/16, and the inclination of the roll axis is proportional to this. The deviation of the parallelism between roll axes can be suppressed. For example, in the case of FIG. 5, if the distance regulating member 41 is provided in the longitudinal center of the back wall 21 and the front wall 22, the original displacement amount Δx1 = Δx2 = 33 μm is reduced to at least 1/8 of 4 μm. Can do.

  In the continuous film forming apparatus according to the second embodiment, a mask 12 facing the lower surface of the film forming roll 2 is provided, and a lower cathode box 8 is provided below the mask 12. The lower cathode box 8 is removably attached to an insertion / removal opening 29 provided in a penetrating manner in the front wall 22 of the fixed chamber portion 15. On the other hand, the rear wall 21 of the fixed chamber portion 15 is provided with a dummy opening 30 having the same shape as a portion opposite to the insertion / removal opening 29, and a lid for airtightly closing the opening.

  The lower cathode box 8 is inserted / removed by a transport carriage provided with a jig for detachably fixing the end exposed outside the front wall 22. That is, after fixing the jig to the end of the cathode box 8 and removing the bolt for fastening the fixing flange of the lower cathode box 8 to the front wall 22, the carriage is moved backward to bring the front of the front wall 22 into front. Pull out. When the lower cathode box 8 is attached, the reverse is performed. After the lower cathode box 8 is inserted into the insertion / removal opening 29, the lower cathode box 8 is airtightly attached to the front wall 22 by a fixing flange.

  The insertion opening 29 has a height of about 200 mm and a width of about 300 mm. If the width of the front wall 22 is about 700 mm, the substantial width is about 400 mm. For this reason, if the back wall 21 is not provided with the dummy opening 30, the deformation of the back wall 21 and the front wall 22 becomes asymmetric during vacuum decompression of the vacuum chamber 1, the parallelism between the roll axes is outside the allowable range, and the film There is a risk of meandering when the substrate is rolled. In this embodiment, since the dummy opening 30 is provided in the back wall 21, the deformation of the back wall 21 and the front wall 22 is plane-symmetric and the parallelism between roll axes can be prevented from changing.

  In the second embodiment, the two spacing regulating members 41 provided at the lower portion of the fixed chamber portion 15 are provided with the opening 29 for insertion / removal of the lower cathode box 8 in the front wall 22 of the fixed chamber portion 15, and the rear wall 21. Since the corresponding dummy opening 30 is provided, it is supplementarily provided in consideration of the decrease in the rigidity of the wall due to these. The lower space regulating member 41 is a position where there is no hindrance to the attachment and detachment of the mask 12 provided on the lower side of the film forming roll 2, and can be attached and detached by the support member 42 at a symmetrical position with respect to the vertical center line of the wall. Is attached. The lower space regulating member 41 is effective for maintaining the plane symmetry of deformation when a relatively large size insertion / removal opening and dummy opening are provided, but is not necessarily required.

  It is preferable that the space regulating member 41 has a structure that can be expanded and contracted by a screw or the like. By adopting such a structure, the interval regulating member 41 can be easily attached and detached. In this case, the distance between the back wall 21 and the front wall 22 is measured and recorded when the fixed chamber portion 15 is assembled. In addition, the length of the interval regulating member 41 can be easily set to be a predetermined interval.

  In the first and second embodiments, the hinge mechanisms 18 of the moving chamber portions 16L and 16R are provided at both end portions of the back wall 21, but may be provided at both end portions of the front wall 21 of the fixed chamber portion 15. . Moreover, in the said embodiment, you may make it the roll group provided in the fixed chamber part 15 provide the unwinding roll 3 and the winding roll 4 under the free roll 5 like FIG.

  Further, in the first and second embodiments, the connection structure of the outer frame portion 25 constituting the fixed chamber portion 15 is not limited to the one in which the plate members constituting each wall are welded and integrated, but both side walls 26L, 26R and the upper surface wall 23 may be integrated by welding, and only the lower surface wall 24 may be connected and integrated by a bolt or the like, or each wall may be connected and integrated by a bolt or the like.

It is a notch front view of the continuous film-forming apparatus of 1st Embodiment. It is the sectional view on the AA line of FIG. It is a front view of a 1st embodiment. It is a side view of the outer frame part used when calculating | requiring the displacement of each part at the time of vacuum pressure reduction. It is a displacement explanatory drawing of an outer frame part plate | board thickness center line in case the plate | board thickness of a back wall and a front wall is equal, and a predetermined part. It is a displacement explanatory drawing of an outer frame part board thickness center line in case the board thickness of a back wall and a front wall differs, and a predetermined part. It is a notch front view of the continuous film-forming apparatus of 2nd Embodiment. It is the sectional view on the AA line of FIG. It is a front view of 2nd Embodiment. It is a notch front view of the conventional continuous film-forming apparatus. It is a top view of the conventional continuous film-forming apparatus. It is a top view of the other conventional continuous film-forming apparatus.

Explanation of symbols

1 vacuum chamber, 2 film forming roll,
3 unwinding rolls, 4 winding rolls,
7L, 7R side cathode box, 8 lower cathode box,
15 fixed chamber, 16L, 16R moving chamber,
21 back wall, 22 front wall,
23 top wall, 24 bottom wall,
25 Outer frame part, 26L, 26R Side wall 41 Spacing restriction member

Claims (4)

A continuous film forming apparatus for forming a film while conveying a film forming substrate,
A pair of left and right moving chamber portions each having a fixed chamber portion in which a rear wall and a front wall arranged opposite to each other are connected by an upper surface wall and a lower surface wall, and left and right side walls closing the left and right openings of the fixed chamber portion A vacuum chamber comprising: a film forming roll that is housed in the vacuum chamber and rotatably provided; and a side film that is formed laterally on a film forming substrate wound around the film forming roll. A film source, an unwinding roll that supplies the film-forming substrate to the film-forming roll, and a winding roll that winds the film-forming substrate after film formation,
The left and right moving chamber portions are provided to be openable and closable by an opening and closing mechanism with respect to the fixed chamber portion,
The film forming roll, unwinding roll, and take-up roll are rotatably supported vertically on the back wall and front wall of the fixed chamber section, and the side film forming source is detachably provided on the moving chamber section. And
The back wall and the front wall of the fixed chamber part have the same plate thickness, and when the vacuum chamber is decompressed, the deflection caused by bending the back wall and the front wall inward is at an arbitrary position in the vertical direction. A continuous film forming apparatus in which openings are provided in the back wall and the front wall so as to be equivalent. The continuous film-forming apparatus according to claim 1, wherein an interval regulating member is provided between the back wall and the front wall of the fixed chamber portion to maintain the interval.   The continuous film forming apparatus according to claim 2, wherein the interval regulating member is detachably provided on a back wall and a front wall of the fixed chamber portion. A lower film forming source for forming a film from below is provided on the film forming substrate wound on the film forming roll, and the lower film forming source is removably attached to the front wall of the fixed chamber section. The continuous formation according to any one of claims 1 to 3 , wherein an opening is provided, and a dummy opening having the same shape or substantially the same shape is provided in a portion of the back wall of the fixed chamber portion facing the insertion / removal opening. Membrane device.

Images