JP4700441B2 - Method for manufacturing opening body having oblique through hole - Google Patents

Description

  The present invention relates to a method for manufacturing an opening having an oblique through hole, for example, an opening having an oblique through hole which is an electrode for plasma generation in an ashing apparatus or an etching apparatus in the process of manufacturing a semiconductor element.

  In order to make the atmosphere in the reaction vessel such as a plasma etching apparatus uniform, the arrangement of the through holes in the opening must be provided uniformly on the surface of the opening, and the through holes are symmetrical with respect to the central axis of the opening. A workpiece such as a quartz glass disk is fixed on a table that moves in the X and Y axis directions, and a through hole is formed with a drill that moves up and down in the Z axis direction.

It is possible to form oblique through holes in the board by tilting the workpiece on the table, but it is difficult to form a plurality of through holes so as to be symmetrical with respect to the central axis of the board. Met.
Japanese Patent Laid-Open No. 10-139547 JP 2000-286244 A

  The present invention makes it possible to easily form a through-hole whose inclination is axisymmetric with respect to the central axis on the concentric circle centered on the central axis.

  The material body is placed on a tilted turntable, the turntable is rotated with respect to its central axis, the drilling position is determined, and the drilling is performed vertically on a concentric circle so that it is symmetrical with respect to the central axis. An inclined through hole is formed.

It is installed on an inclined turntable, rotated and positioned, and drilled from the vertical direction in the disc body, so the formed through holes are concentric, and the inclined direction is a line with respect to the central axis. It becomes symmetric.
By appropriately selecting the drilling position on the inclined turntable, it is possible to form an opening having a through hole having an arbitrary directionality.
Moreover, it is easy to arbitrarily combine the inclination angle and the inclination direction of the through hole, and it is possible to manufacture an opening body according to various purposes.

FIG. 1 is a conceptual diagram of a machining apparatus for forming a tilted through hole in a disc body in line symmetry with respect to a central axis C, and is a turntable that can move in the XY axis direction and can be tilted. 5 and a punching device 6 in the Z-axis direction perpendicular to the XY plane, and the inclination angle is indicated by θ.
The rotation center axis C of the turntable 5 inclined equal to the inclination angle of the through-hole formed in the opening 2 is set so that the center of the material of the opening 2 matches, and a punching device is set at an appropriate distance from the center axis C. The turntable is moved and positioned so that 6 is positioned, and drilled to form a through hole 21 inclined as shown in the sectional view of FIG. Next, the turntable 5 is rotated by a predetermined angle and drilled to form through holes 21 arranged on the circumference as shown in FIG.

By moving the turntable 5, the position of the drilling device 6 is positioned at a position farther from the central axis than the initial position, and by similarly drilling, a through hole is formed on a concentric circle of the first through hole 21 formed. The
Therefore, the angle of the through hole provided in the board is an angle formed by the reference plane (X′-Y ′ plane) of the turntable and the perpendicular of the horizontal reference plane (XY plane) of the processing machine. It is possible to arbitrarily shift the opening of the through hole at an arbitrary angle according to the thickness of the opening so that the openings on the inner and outer surfaces do not overlap two-dimensionally.
By appropriately selecting the fixing position of the drilling device 6, the inclination direction of the through hole 21 can be determined, and the formed through hole 21 is always line-symmetric with respect to the central axis.

  The inclination direction of the through-hole 21 is determined by a region defined by a line L1 connecting the uppermost point A and the lowermost point B of the inclined turntable 5 and a line L2 passing through the central axis C and perpendicular to L1. As shown in FIGS. 4 and 5, when the through-hole 21 is drilled in the vertical direction in the upper region at a distance of R1 from the central axis C on L1, the through-hole 21 is inclined equal to the inclination angle (θ) of the turntable 5. An extension line in the drilling direction is directed to the rotation center axis C indicated by the arrow, and when the turntable 5 is drilled by rotating at a certain angle, the through-hole 21 is a part of a reverse conical shape. Will be formed. When the piercing device is moved to a position at a distance R2 from the central axis C and piercing is performed, the through holes 21 having the same direction are formed concentrically, and the opening body 2 having the cross-sectional shape shown in FIG. 2 is obtained.

  In FIG. 5, when the through hole 21 is vertically drilled in the region below the central axis C on L1, the through hole 21 becomes an inclined hole equal to the inclination angle (θ) of the turntable 5, and the extension line is the center. Although it is away from the axis C, the upward extension line is directed toward the central axis C. When the turntable 5 is rotated by a certain angle and drilled on the circumference, the through hole 21 forms a part of a conical shape. To be. By changing the drilling positions on concentric circles, as shown in FIG. 6, it is possible to form the opening 2 in which the drilling direction is toward the central axis C and the drilling direction is mixed.

When the drilling position is removed from the line L1 and drilled in the vertical direction in the region above the line L2, the extension line of the through hole 21 does not intersect the central axis C and becomes a twisted positional relationship. It is formed in the shape of winding a shaft. Further, when the hole is drilled in the region below the line L2, the formed through hole 21 is directed away from the central axis C.
When drilled on the line L2, the through-hole 21 is directed in the tangential direction of the circle in plan view.

Accordingly, the inclination direction of the through-hole 21 when the drilling position is removed from the line L1 can be said to be the vortex entrainment direction and the entrainment angle, and the central axis C of the through-hole 21 processed concentrically is the turntable 5 The angle formed by the line formed by projecting on the reference plane (X′-Y ′ plane) and the tangent of the concentric circle on the reference plane becomes more gradual as the drilling position opened on the same circumference moves away from the line L1. It will have an angle.
FIG. 7 shows a projected view of the through-holes arranged in line symmetry that are perforated by the rotation of the turntable 5. FIG. 7A is a projection view of the through hole 21 opened in line symmetry by rotation of the turntable (perforation every 90 degrees: one rotation) at the position of point a in FIG. The arrow represents the direction of the through hole 21. 7B is a projection view of the through-hole 21 drilled at the point b in FIG. 4 and opened in line symmetry by the rotation of the turntable 5, and FIG. 7C is a view at the point c in FIG. It is a projection figure of a through-hole.
In this way, when the drilling position is set to a position other than the line L1 connecting the lowest point and the highest point of the inclined turntable, the gas that has passed through the opening body becomes a vortex around the central axis and is drilled on the line L1. In this case, the gas flow is directed toward or away from the central axis.

  Since the drilling position can be arbitrarily selected for each concentric circle and the inclination directions of the through holes can be arbitrarily combined, the inclined through holes can be easily drilled according to the purpose.

The photograph shown in Fig. 8 (1) shows a φ50mm x 6mm quartz glass disk placed on a turntable tilted at an inclination angle of 10, 20, and 30 degrees, and laser processed on a concentric circle from the center of the turntable. It is a cross-sectional photograph of what formed the through-hole of φ0.2mm.
FIG. 8 (2) is a cross-sectional photograph of a φ50 mm × 6 mm silicon disk formed with a φ0.5 mm through hole using a diamond drill.

The conceptual diagram of an inclination through-hole processing apparatus. Sectional drawing of the opening body which has an inclination through-hole. The top view of the opening body which has an inclination through-hole. Explanatory drawing of the drilling position and inclination direction of a through-hole. Explanatory drawing of the drilling position and inclination direction of a through-hole. Sectional drawing of the opening body which has a through-hole from which an inclination direction differs. The projection figure of the through-hole arrange | positioned line-symmetrically. The cross-sectional photograph of the inclination through-hole formed by the method of this invention.

DESCRIPTION OF SYMBOLS 1 Plasma etching apparatus 2 Opening body (electrode)
21 Through-hole 3 Holding ring 4 Wafer 5 Turntable 6 Punching device

Claims (2)

The center of the disc body of the material of the opening body is placed on the rotation center axis of the tilt turntable, and the turntable is moved and positioned so that the drilling device is located at an appropriate distance from the rotation center axis. A manufacturing method of an opening body in which an inclined through-hole that is line-symmetrical with respect to a central axis is formed by rotating a hole at a predetermined angle and drilling in a vertical direction. 2. The method of manufacturing an opening body according to claim 1, wherein the drilling position is drilled in a vertical direction at a position other than a line connecting the lowest point and the highest point of the inclined turntable.