JP4664649B2 - High frequency magnetic material and high frequency magnetic component using the same - Google Patents

Description

  The present invention relates to a high-frequency magnetic material effective for a magnetic component used in a high-frequency region, and a high-frequency magnetic component such as an inductor, a transformer, a filter, and an electromagnetic wave absorber. Moreover, it is related with the manufacturing method.

In recent years, the use of magnetic material parts as key materials and parts has been expanding, and the importance has been increasing year by year. Examples of applications include inductors, transformers, filters (for example, common mode choke coils and normal mode choke coils), electromagnetic wave absorbers, and magnetic inks.
For example, as a magnetic material used for an inductance element used in a high frequency range of 1 MHz or higher, ferrite is mainly cited. Ferrite is the most preferable material that can be used in the above frequency range, but it has been difficult to improve the characteristics in a higher frequency range.

In order to improve such a problem, an inductance element using a thin film technology such as a sputtering method and a plating method for a high permeability material has been actively developed (JP-A-5-13235: Patent Document 1). ). Although such an inductance element has been confirmed to exhibit excellent characteristics even in a high frequency range of 10 GHz or higher, thin film technology such as sputtering requires a large facility, and the film thickness and the like are precisely determined. Since it has to be controlled, it was not necessarily sufficient in terms of cost and yield.
Moreover, an electromagnetic wave absorber is mentioned as another use. The electromagnetic wave absorber absorbs noise generated with higher frequency of the electronic device and reduces problems such as malfunction of the electronic device. Examples of the electronic device include a semiconductor element such as an IC chip and various communication devices. There are various electronic devices such as those used in a high frequency range of 1 MHz to several GHz, and even several tens of GHz. Especially, in recent years, electronic devices used in a high frequency range of 1 GHz or more tend to increase. is there.
As electromagnetic wave absorbers for electronic devices used in such a high frequency range, conventionally, those in which ferrite particles, carbonyl iron particles, FeAlSi flakes, FeCrAl flakes and the like are mixed with a resin have been used, but in a high frequency range of 1 GHz or more. However, satisfactory characteristics were not obtained.

In recent years, as electromagnetic wave absorbers in a high frequency region of 1 GHz or more, those using composite magnetic particles in which magnetic metal particles and ceramics are integrated as shown in JP 2001-358493 A (Patent Document 2) have been shown. ing. Although this material has good electromagnetic wave absorption characteristics in a high frequency range, it must be manufactured by a mechanical alloying method and must be mixed for a long time in order to uniformly react magnetic metal particles and ceramic particles. In particular, when a large amount (for example, 10 kg or more) of material is to be produced at a time by the mechanical alloy method, mixing for a longer time is required and it cannot be said that the yield is good.
In addition, a magnetic film having electromagnetic wave absorbing ability, which has a magnetic phase made of a metal magnetic material and a high electrical resistance phase made of ferrite that electrically insulates the magnetic phases from each other, is disclosed (Japanese Patent Laid-Open No. 2003-297628). : Patent Document 3). In this method, metal magnetic particles and ferrite particles are mixed so as to have a predetermined ratio, and a thick film of 1 to 500 μm is formed by an aerosol deposition method. However, the strain obtained by this method has a large strain, and this strain is not sufficiently relaxed unless heat treatment is performed at a high temperature, and sufficient characteristics cannot be obtained. Further, when heat treatment is performed at a high temperature, the metal particles become large, and it has been difficult to cope with high frequency, which is the initial aim.
Further, studies have been made on magnetic films made of two types of oxide magnetic materials (Japanese Patent Laid-Open No. 2003-297629: Patent Document 4). The magnetic film composed of this combination is also thickened by the aerosol deposition method. In this case as well, the strain generated during fabrication is large, and heat treatment at high temperature is necessary to alleviate this, and the substrate In many cases, sufficient characteristics could not be obtained due to peeling from the surface.

JP-A-5-13235 JP 2001-358493 A JP 2003-297628 A JP 2003-297629 A

A conventional high-frequency magnetic material such as an amorphous alloy or ferrite can be manufactured with a high yield by a rapid cooling method or a sintering method, but sufficient characteristics have not been obtained in a high-frequency region of 10 MHz or more.
On the other hand, a magnetic thin film using a sputtering method and a magnetic material using mechanical alloying have excellent characteristics even in a high frequency region of 1 GHz or more, but have problems in yield and cost.
As described above, no conventional high-frequency magnetic material has been obtained that is excellent in both high-frequency characteristics of 10 MHz and manufacturability such as yield. Further, it is necessary to improve the characteristics at the frequency used in the current switching power supply and the like.

The present invention is for solving the above-mentioned problems, and is characterized by comprising metal particles comprising at least one of ferrite oxide and an alloy based on Fe, Co, Fe or Co. It is a high frequency magnetic material. The ferrite oxide is preferably hexagonal ferrite, garnet ferrite or spinel type ferrite.
The hexagonal ferrite is M type: MFe ₁₂ O ₁₉ , W type: MMe ₂ Fe ₁₆ O ₂₇ , X type: M ₂ Me ₂ Fe ₂₈ O ₄₆ , Y type: M ₂ Me ₂ Fe ₁₂ O ₂₂ , Z type. : M ₃ Me ₂ Fe ₂₄ O ₄₁ , U type: M ₄ Me ₂ Fe ₃₆ O ₆₀ , at least one selected (M is at least one selected from Ba, Sr, Ca, Me is Mg, Mn , Fe, Co, Ni, Cu, Zn, etc.). Garnet ferrite is expressed by R ₃ Fe ₅ O ₁₂ (R: rare earth element). Further, the spinel type ferrite is represented by MFe ₂ O ₄ (M is at least one of Ni, Zn, Mn, etc.) such as NiZn type and MnZn type ferrite.
It is preferable that at least a part of the metal particles made of at least one of the Fe, Co, Fe, or Co-based alloys exist in the ferrite oxide.

Moreover, it is preferable that the average particle diameter of this metal particle is 5 nm-5 micrometers. Moreover, it is preferable that the volume ratio of a metal particle is 5 to 60%. A high-frequency magnetic component using one or more of such high-frequency magnetic materials is suitable, for example, as an electromagnetic wave absorber or a high-frequency magnetic component that operates at 1 MHz or higher.
In addition, as a manufacturing method in which at least a part of the metal particles composed of at least one of the Fe, Co, Fe, or Co-based alloy is present in the ferrite oxide, the ferrite is reduced to Fe From the viewpoint of cost and mass productivity, a method of depositing metal particles comprising at least one of Co, Fe or Co based alloys is preferred.

According to the present invention, an effective high-frequency magnetic material used not only in a frequency range of 1 MHz to 10 MHz but also in a magnetic component used in a high frequency range of 1 GHz or higher, or a power supply component used in a switching frequency of 100 kHz or higher is provided. Can be provided. The high-frequency magnetic material of the present invention is suitable for high-frequency magnetic parts such as inductors, transformers, filters, chip parts, and electromagnetic wave absorbers.
Further, if a method of reducing ferrite oxide is used, it is possible to produce a high-frequency magnetic material exhibiting excellent characteristics stably at low cost.

<Ferrite oxide>
First, the present invention comprises a ferrite oxide. The ferrite oxide is preferably one of hexagonal ferrite (first embodiment), garnet ferrite (second embodiment), and spinel ferrite (third embodiment).
The three embodiments can be selectively used in the frequency range to be used, in particular, a high-frequency magnetic material composed of a combination of hexagonal ferrite and metal particles, a high-frequency magnetic component, and a high-frequency magnetic material composed of a combination of garnet ferrite and metal particles, The high-frequency magnetic component can be used in a wide frequency band, and the former embodiment is particularly preferable from the viewpoint of characteristics. Further, high-frequency magnetic materials and high-frequency magnetic parts made of a combination of spinel ferrite and metal particles are effective on the relatively low side in the target frequency range.

In the first embodiment of the present invention, the hexagonal ferrite includes M type: MFe ₁₂ O ₁₉ , W type: MMe ₂ Fe ₁₆ O ₂₇ , X type: M ₂ Me ₂ Fe ₂₈ O ₄₆ , Y type: M ₂ Me. ₂ Fe ₁₂ O ₂₂ , Z type: M ₃ Me ₂ Fe ₂₄ O ₄₁ , U type: M ₄ Me ₂ Fe ₃₆ O ₆₀ are preferred. Here, M is at least one selected from Ba, Sr, and Ca, Me is a metal element, and is divalent, for example, at least one of Mg, Mn, Fe, Co, Ni, Cu, Zn, and the like. Although it is preferable, it is not limited to these elements. Further, a part of Fe can be substituted with, for example, divalent ions and tetravalent ions such as Co ²⁺ and Ti ⁴⁺ , or Co ²⁺ and Zr ⁴⁺ .

In the second embodiment of the present invention, the garnet ferrite is represented by R ₃ Fe ₅ O ₁₂ (R: rare earth element).
In the third embodiment of the present invention, the spinel ferrite is represented by MeFe ₂ O ₄ . Here, like the first embodiment, Me is preferably at least one of Mg, Mn, Fe, Co, Ni, Cu, Zn and the like, but is not limited to these elements.

<Metal particles>
The high-frequency magnetic material of the present invention includes metal particles made of at least one of Fe, Co, Fe, or an alloy based on Co. As the metal particles, one kind of Fe particles, Co particles, Fe-based alloy particles, and Co-based alloy particles may be present.
The Fe-based alloy and the Co-based alloy are preferably Fe-Co based alloys. When the second component (third component in the case of an Fe—Co based alloy) is included, alloy particles containing Ni, Mn, Cu, and the like can be cited.
In the present invention, at least one of Fe particles, Co particles, and Fe—Co based alloy particles may be present as metal particles, and other nonmagnetic metal elements may be alloyed with this, If the amount is too large, the saturation magnetization is too low. Therefore, in consideration of the high frequency characteristics, other nonmagnetic metal elements (reducing metals other than Fe and Co, the reducing metal of the present invention is the most among the metal elements constituting the ferrite). The alloying by a metal element other than the non-reducible element is preferably 30 at% or less.
It is preferable that at least a part of the metal particles made of at least one of Fe, Co, Fe, or Co-based alloys exist inside the ferrite oxide. This is preferable for use at high frequencies because the metal particles are less likely to have a large particle size even when heat treatment is performed due to the presence of metal in the ferrite. In addition, even when deposited by the aerosol deposition method, distortion generated at the time of production can be alleviated, so that heat treatment at high temperature is reduced. Presence within the ferrite oxide means dispersion within the particle, and indicates a state in which metal particles are precipitated inside the ferrite oxide particles. In addition, metal particles may exist at the crystal grain boundaries as long as such a state of intra-particle dispersion exists.

The metal or alloy particles preferably have an average particle size of 5 nm to 5 μm. If the average particle size is less than 5 nm, superparamagnetism occurs, and the amount of magnetic flux becomes insufficient. On the other hand, if it exceeds 5 μm, the eddy current loss increases, and the magnetic characteristics in the intended high frequency region are degraded. Furthermore, it is preferably 10 nm to 3 μm. In particular, exchange interaction occurs at 100 nm or less, and excellent high frequency characteristics can be obtained.
The metal particles are preferably present in at least one of the crystal grains of the crystal grains constituting the high-frequency magnetic material or in the crystal grain boundaries. In order to improve the high-frequency magnetic characteristics, it is preferable that metal particles exist both in the crystal grains and in the crystal grain boundaries.
On the relatively low frequency side (for example, 1 MHz), the average particle diameter of the metal particles may be large, for example, 5 μm or less. As the operating frequency increases, the average particle size of the metal particles is preferably small, and when the frequency is increased to 1 GHz or higher, the influence of the skin effect on the magnetic material (magnetic component) increases. The maximum value of is preferably metal particles of 3 μm (= 3000 nm) or less. If the thickness is less than 5 nm, the characteristics are rather deteriorated. Therefore, the frequency is optimized in the range of 5 nm to 5 μm.

The proportion of the metal particles is preferably 5 to 60% by volume. If this is less than 5%, the effect of the metal particles is not observed, and there is no difference from the characteristics of the ferrite itself. On the other hand, if it exceeds 60%, good characteristics at high frequencies, which are the characteristics of ferrite, cannot be sufficiently extracted. Preferably it is 10-55%, More preferably, it is 15-50%.
On the relatively low frequency side (100 kHz to 1 MHz region), a high frequency magnetic material mainly composed of a combination of spinel ferrite and metal particles is preferable, and a high frequency band (1 MHz to GHz region) and hexagonal ferrite or garnet ferrite. A high-frequency magnetic material mainly composed of a combination of metal particles and metal is preferred. It should be noted that the above-mentioned frequency is a rough standard, and the type of ferrite can be appropriately selected according to the purpose.

<High-frequency magnetic parts>
When the high-frequency magnetic material of the present invention is applied to a high-frequency magnetic component, one type of ferrite may be used, or one or more of the hexagonal type, garnet type, or spinel type may be used in combination. good.
Since the high frequency magnetic component using the high frequency magnetic material exhibits excellent high frequency characteristics, it is used in a high frequency range from 100 kHz to GHz, such as an inductor, choke coil, filter, transformer, chip component, and electromagnetic wave absorber. Suitable for high frequency magnetic parts. The high-frequency magnetic component can be used in various forms such as a sintered body, a bulk body, a powder, and a mixture with a resin.

<Manufacturing method>
The manufacturing method of the high-frequency magnetic material of the present invention is not limited as long as it has the above-described configuration, but a preferable manufacturing method is as follows.
As a production method, hexagonal ferrite, garnet-type ferrite or spinel-type ferrite is prepared by a general method, and then heat-treated in a reducing atmosphere, so that at least one of alloys based on Fe, Co, Fe, or Co is produced. A method of depositing the metal particles composed of the above is suitable. According to this method, it is possible to obtain a preferable form in which at least a part of the metal particles composed of at least one of the Fe, Co, Fe or Co-based alloys are present inside the ferrite particles.
Here, the general method is a normal dry method or a wet method. Specifically, a carbonate containing a metal element constituting ferrite is mixed to a predetermined ratio, and then 1200 ° C. or less. A precipitate is obtained in the form of a hydroxide or an oxide containing a large amount of water by firing the material with ferrite or by adding the aqueous solution to a strong alkali using a metal salt constituting the ferrite. By heating this, a predetermined oxide is obtained. Or there is a spray drying method.
Furthermore, a crystallized glass method may be used. In this method, ferrite obtained by a predetermined composition ratio and a vitrification element such as B ₂ O ₃ are mixed and melted at a weight ratio of 1: 1, and then rapidly cooled by a twin roll method to be amorphous. Thereafter, crystallization heat treatment is performed, the vitrification component is separated by chemical treatment, and the precipitated ferrite is recovered. This ferrite powder is reduced to a composite magnetic material of metal particles and various ferrites by heat treatment.

The reduction method is a method of arranging ferrite in a reducing atmosphere, and the amount of metal particles deposited can be adjusted by adjusting the temperature of the atmosphere and the reduction time.
An example of the reducing condition is hydrogen reduction. The temperature and time of hydrogen reduction are not particularly limited as long as at least a part of the ferrite is reduced by hydrogen. However, since the progress of the reduction reaction is too slow at 200 ° C. or lower and the growth of the deposited metal particles proceeds in a short time when the temperature exceeds 1500 ° C., the range of 200 to 1500 ° C. is preferable. Moreover, although time is decided by balance with reduction temperature, the range of 10 minutes-100 hours may be sufficient. The hydrogen atmosphere is preferably a flow, and the value may be 10 cc / min or more. In this case, even if the sample to be reduced is fixed, an apparatus that can perform reduction while moving the sample with an apparatus having a rotating mechanism such as a rotary kiln is preferable because uniform reduction can be performed.
Moreover, since the method of depositing metal particles by reduction is used, even if the ferrite has various shapes such as a sintered body and powder, it can be uniformly deposited on the surface.

When processing high-frequency magnetic materials into high-frequency magnetic parts, machining such as polishing or cutting is required for sintered bodies, and mixing (compositing) with resin is required for powder, and surface treatment is also required. According to In addition, when used as an inductor, choke coil, filter, chip component, or transformer, suitable winding processing is performed.
Further, there is an aerosol deposition method as a bulking method. In this method, the raw material powder is aerosolized and sprayed onto a substrate, a film or the like to form a sample having a predetermined thickness. In this case, a homogeneously dispersed thick film can be obtained in a relatively short time by mixing the raw material powder with the first to third high-frequency magnetic materials of the present invention at a predetermined ratio. In addition, when the high-frequency magnetic material of the present invention is used to thicken the film by the aerosol deposition method, the metal particles can provide a kind of cushion effect, and good magnetic properties and magnetic parts can be obtained without heat treatment. Shows good characteristics. Note that heat treatment may be performed.

Hereinafter, the present invention will be described with reference to examples.
(Examples 1-22, Comparative Examples 1-3)
Various raw materials such as Fe ₂ O ₃ , BaCO ₃ , SrCO ₃ , Co ₃ O ₄ , ZnO, and Mn ₃ O ₄ were weighed so as to have a predetermined composition ratio of ferrite so as to have the composition shown in Table 1. After that, it was dry mixed. Based on the obtained sample, it was fired in a rotary kiln to produce the desired ferrite.
After pulverizing the obtained sample, it was put in a hydrogen furnace and heated to a predetermined temperature at a rate of 10 ° C. per minute while flowing 9cc of hydrogen gas having a purity of 99.9% at a rate of 10 ° C. per minute for 20 to 90 minutes. After reduction, the furnace was cooled to obtain the high-frequency magnetic material of this example.
This was mixed with an epoxy resin (5 wt%), formed into a rectangular parallelepiped having a width of 4.4 mm, a length of 5 mm, and a height of 1 mm, cured at 150 ° C., and used as an evaluation sample.

As comparative examples, FeAlSi particles hardened with an epoxy resin were used as Comparative Example 1, carbonyl iron particles hardened with an epoxy resin were used as Comparative Example 2, and NiZn ferrite sintered bodies were used as Comparative Example 3.
High-frequency magnetic characteristics were evaluated for permeability and electromagnetic wave absorption characteristics. The permeability was measured at 2 GHz. Further, as the electromagnetic wave absorption characteristics, the ratio of electromagnetic wave absorption amount at 2.45 GHz = [input− (reflection amount + transmission amount)] was measured. Furthermore, after leaving for 1000 hours (H) in a high temperature and humidity chamber having a temperature of 60 ° C. and a humidity of 90%, the magnetic permeability was measured again and compared with the initial value.
The average crystal grain size of the deposited metal particles was measured based on TEM observation. Specifically, the longest diagonal line of each metal particle shown by TEM observation (photograph) or SEM observation (photograph) was taken as the particle diameter, and the average was obtained from the average. In addition, the average value was calculated | required for the TEM photograph or the SEM photograph, taking a unit area 10 micrometers x 10 micrometers at three or more places. Further, the ratio (volume%) of the metal particles was obtained from an average value obtained by measuring five or more area ratios obtained by an SEM photograph or a TEM photograph. Tables 1 and 2 show the results. The ferrites shown in Tables 1 and 2 are all hexagonal ferrites.

As can be seen from the table, it was found that the high-frequency magnetic material according to this example can obtain excellent magnetic properties. In the high-frequency magnetic material according to this example, at least precipitated metal particles dispersed in the ferrite oxide were confirmed.
In the high-frequency magnetic material according to the example, the precipitated metal particles were all at least one of Fe particles, Co particles, Fe-based alloy particles, and Co-based alloy particles. In addition, the maximum diameter of the deposited metal particles was 5 μm or less.

(Examples 23 to 30)
Fe ₂ O ₃ , NiO, Co ₃ O ₄ , ZnO, Mn ₃ O ₄ , MgO, CuO, Ga ₂ O ₃ , R ₂ O ₃ (R: rare earth element), etc. so as to have the composition shown in Table 3 These raw materials were weighed so as to have a predetermined ferrite composition ratio, and then dry-mixed. Based on the obtained sample, it was fired in a rotary kiln to produce the desired ferrite.
After pulverizing the obtained sample, it was put in a hydrogen furnace and heated to a predetermined temperature at a rate of 10 ° C. per minute while flowing 200 cc of hydrogen gas having a purity of 99.9% per minute for 20 to 90 minutes. After reduction, the furnace was cooled to obtain the high-frequency magnetic material of this example.

This was mixed with an epoxy resin (5 wt%), formed into a rectangular parallelepiped having a width of 4.4 mm, a length of 5 mm, and a height of 1 mm, cured at 150 ° C., and used as an evaluation sample.
High-frequency magnetic characteristics were evaluated for permeability and electromagnetic wave absorption characteristics. The magnetic permeability was measured at 800 MHz for Examples 23 to 26 and at 5 GHz for Examples 27 to 30. Similarly, the ratio of electromagnetic wave absorption = [input− (reflection amount + transmission amount)] at 800 MHz for Examples 23 to 26 and 5 GHz for Examples 27 to 30 was measured as electromagnetic wave absorption characteristics. Comparative examples 4 and 5 were set to 1 and indicated as relative values. The average crystal grain size of the deposited metal particles was measured based on TEM observation. Specifically, the longest diagonal line of each metal particle shown by TEM observation (photograph) was used as the particle diameter, and the average was obtained from the average. In addition, the average value was calculated | required for the TEM photograph, taking a unit area of 10 μm × 10 μm at three or more locations. The ratio of metal particles (volume%) was determined by the same method as in the examples shown in Table 1.
In addition, Examples 23-26 are spinel type ferrites, and Examples 27-30 are garnet type ferrites.

(Examples 31 to 40, Comparative Examples 5 and 6)
Samples of each example shown in Tables 1 to 3 were mixed in the proportions shown in Table 3, and samples having a thickness of 50 μm were prepared on the SiO ₂ substrate by the aerosol deposition method. Based on these samples, electromagnetic wave absorption characteristics were evaluated for 1 GHz and 5 GHz. The value was compared based on the value of Comparative Example 6 below. The Q value was also measured under two conditions of 50 MHz and 500 MHz, and this value was also measured as a relative value based on the value of Comparative Example 6.
As Comparative Example _5, Fe 50 _{Co 50} with metal particles having an average particle diameter of 200nm composition of NiZn ferrite having an average particle diameter of 200nm were mixed in a ratio of 75:25 (vol%), film on SiO2 substrate aerosol deposition A sample having a thickness of 50 μm was prepared.
Further, as Comparative Example 6, NiZn ferrite and MnZn ferrite were mixed at a volume ratio (volume%) of 67:33, and a sample with a thickness of 50 μm was produced by the same method.
In addition, when Comparative Examples 5 and 6 were heat-treated at 900 ° C. for 1 hour, there were portions that were peeled off from the SiO 2 substrate, so that the samples could not be used for measurement.

It can be seen that the high-frequency magnetic component according to this example exhibits good high-frequency characteristics in a wide frequency range.
(Example 41, Comparative Example 7)
A hexagonal Ba ferrite was prepared by changing only the treatment amount of the sample of Example 6 in the same manner, and reduction treatment was performed at 1 kg / batch or 10 kg / batch to attempt precipitation of FeCo particles. For the purpose of homogeneous reduction, the sample is reduced while moving with a rotary kiln.
As Comparative Example 7, Fe particles having an average particle diameter of 5 μm and SiO ₂ particles having an average particle diameter of 2 μm were set to have a volume ratio of 1: 1, and an attempt was made to produce Fe crystal grain-containing SiO ₂ particles by a mechanical alloying method. The weight ratio of the stainless steel balls to the powder was 40: 1, and the mixture was placed in a SUS pot and treated at 200 rpm for 50 hours. The throughput is 1 kg / batch and 10 kg / batch.
The obtained samples were pulverized and classified so as to have an average particle size of 20 μm or less, and high-frequency magnetic materials (powder samples) of Example 41 and Comparative Example 7 were obtained.
Each powder sample was arbitrarily extracted and the presence or absence of FeCo particles was measured. Yield (%) = (number of samples in which FeCo particles were confirmed / total number of samples taken) × 100 (%).

As described above, in the mechanical alloying method, it was found that when the amount of treatment increases, the precipitation of metal particles varies. On the other hand, since the present Example reduced in the hydrogen stream, it turned out that a metal particle can be deposited uniformly.
(Examples 42 to 46, Comparative Example 8)
A high-frequency magnetic material having the same composition as in Example 1 was prepared by changing the reducing conditions to change the size of the deposited metal particles. The same measurement as in Example 1 was performed on each sample. The results are shown in Table 5.

  As described above, it has been found that the average crystal grain size of the deposited metal particles is 10 nm to 5 μm, and that the maximum diameter of the deposited metal particles is 3 μm or less exhibits excellent characteristics.

Claims (9)

5% to 60% by volume of metal particles having an average particle diameter of 5 nm to 2 μm made of at least one of ferrite oxide and Fe, Co, Fe or Co based alloys, A high-frequency magnetic material characterized in that at least a part thereof is present inside ferrite oxide particles by reductive heat treatment.   The high-frequency magnetic material according to claim 1, wherein the ferrite oxide is hexagonal ferrite.   The high-frequency magnetic material according to claim 2, wherein the hexagonal ferrite is selected from at least one of M type, W type, X type, Y type, Z type, and U type.   The high-frequency magnetic material according to claim 1, wherein the ferrite oxide is garnet ferrite.   2. The high-frequency magnetic material according to claim 1, wherein the ferrite oxide is spinel type ferrite.   The high-frequency magnetic material according to any one of claims 1 to 5, comprising 15 to 50% by volume of the metal particles.   7. The high frequency magnetic material according to claim 1, wherein the average particle diameter of the metal particles is 100 nm or less. A high frequency magnetic component using the high frequency magnetic material according to claim 1. A high-frequency magnetic component comprising at least two types of the high-frequency magnetic material according to claim 1.