JP4663668B2 - 六角形のナノ板状構造のダイヤモンドの形成方法 - Google Patents
六角形のナノ板状構造のダイヤモンドの形成方法 Download PDFInfo
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- 239000010432 diamond Substances 0.000 title claims description 91
- 229910003460 diamond Inorganic materials 0.000 title claims description 86
- 239000002055 nanoplate Substances 0.000 title claims description 56
- 238000000034 method Methods 0.000 title claims description 39
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 239000011148 porous material Substances 0.000 claims description 14
- 238000002848 electrochemical method Methods 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000003054 catalyst Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 2
- 230000003197 catalytic effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 16
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000010931 gold Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000003786 synthesis reaction Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000004070 electrodeposition Methods 0.000 description 4
- 238000001889 high-resolution electron micrograph Methods 0.000 description 4
- 238000001308 synthesis method Methods 0.000 description 4
- 238000003917 TEM image Methods 0.000 description 3
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000002113 nanodiamond Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 230000002194 synthesizing effect Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000007833 carbon precursor Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002524 electron diffraction data Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000560 biocompatible material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- GPYPVKIFOKLUGD-UHFFFAOYSA-N gold indium Chemical compound [In].[Au] GPYPVKIFOKLUGD-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004098 selected area electron diffraction Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
- C30B7/12—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by electrolysis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Description
また、生体適合性原子である炭素を生体適合用材料として生体感知(bio-sensor)の基本になる基板材料としての可能性研究など、多くの分野でナノ結晶のダイヤモンドを利用した研究が進められている。このようなバイオ分野は、特に最近に注目されつつある。
したがって、高温の処理過程を経る必要がない、簡便かつ価格競争力のあるダイヤモンドを合成し得るダイヤモンドの形成方法が求められる。
また、産業への応用のためには、均一な表面、厚さ、大きさ及び模様のナノ板状構造のダイヤモンドの形成方法が必要である。
本発明の他の目的は、均一な表面、厚さ、大きさ及び模様のナノ板状構造のダイヤモンドを形成する方法を提供することにある。
また、これ以外に、このようなナノ板状構造のダイヤモンドの形成方法と異なる実施の形態、または構成要素の変更、追加などによる他の実施の形態の提供が可能である。
本発明では、ナノ型板(nanotemplate)を使用して、電気化学的方法でナノダイヤモンドをエピタキシャル成長させる。このようなナノダイヤモンドは、ナノ大きさであるから、バルクダイヤモンドとは異なる特徴的な性質を示す。
本発明は、ダイヤモンドの前駆体として、水溶液状態の炭素前駆体(CH3 CN、アセトニトリル)及び脂肪族炭化水素誘導体(エタノール、メタノール等)を使用する。
また、陽極酸化アルミニウム(AAO)ナノ型板は、均一な大きさの孔隙(大きさ:1〜 1,000nm)を有し、Co、Ni、Fe、Ptなどを触媒金属として使用した。
図1のAはナノ型板を示す。ナノ型板としては、陽極酸化アルミニウム(AAO:Anodic Aluminum Oxide)ナノ型板または高分子ナノ型板を使用する。
ここでは、200nm大きさの孔隙を有する非晶質陽極酸化アルミニウムナノ型板を使用する場合を示す。
このように形成したナノ板状構造のダイヤモンドをラマン分光法(Raman spectroscopy)で分析すると、1368cmでピークを示し、これは、sp3 結合を有するダイヤモンドであることを示す。
上述した本発明の好ましい実施の形態は、例示の目的のために開示されたものであり、本発明の属する技術の分野における通常の知識を有する者であれば、本発明の技術的思想を逸脱しない範囲内で、様々な置換、変形、及び変更が可能であり、このような置換、変更などは、特許請求の範囲に属するものである。
Claims (6)
- 六角形のナノ板状構造のダイヤモンドの形成方法において、
多数の孔隙を有するナノ型板を提供するステップと、
電気化学的方法を使用して、前記ナノ型板上に結晶学的に六角形のナノ板状構造のダイヤモンドを形成するステップと、
前記ナノ型板を除去して、前記六角形のナノ板状構造のダイヤモンドを分離するステップと、を含む六角形のナノ板状構造のダイヤモンドの形成方法。 - 前記ナノ型板提供ステップの後に、前記六角形のナノ板状構造のダイヤモンド形成の触媒金属を前記ナノ型板に蒸着するステップをさらに含む請求項1に記載の六角形のナノ板状構造のダイヤモンドの形成方法。
- 前記触媒金属は、Co、Ni、FeまたはPtのうちのいずれか1つである請求項2に記載の六角形のナノ板状構造のダイヤモンドの形成方法。
- 前記ナノ型板は、陽極酸化アルミニウムナノ型板である請求項1に記載の六角形のナノ板状構造のダイヤモンドの形成方法。
- 六角形のナノ板状構造のダイヤモンドの形成方法において、
多数の孔隙を有するナノ型板の下端部に伝導体を蒸着するステップと、
電気化学的方法を使用して、前記ナノ型板上に結晶学的に六角形のナノ板状構造のダイヤモンドを形成するステップと、
前記ナノ型板を除去して、前記六角形のナノ板状構造のダイヤモンドを分離するステップと、を含む六角形のナノ板状構造のダイヤモンドの形成方法。 - 前記伝導体がAuである請求項5に記載の六角形のナノ板状構造のダイヤモンドの形成方法。
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KR1020060048542A KR100791790B1 (ko) | 2006-05-30 | 2006-05-30 | 육각형의 나노 판상 다이아몬드 형성방법 |
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JP2007320845A JP2007320845A (ja) | 2007-12-13 |
JP4663668B2 true JP4663668B2 (ja) | 2011-04-06 |
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US (1) | US20070295603A1 (ja) |
EP (1) | EP1867758B1 (ja) |
JP (1) | JP4663668B2 (ja) |
KR (1) | KR100791790B1 (ja) |
Families Citing this family (4)
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US7897494B2 (en) * | 2008-06-24 | 2011-03-01 | Imec | Formation of single crystal semiconductor nanowires |
CN103224215B (zh) * | 2013-04-09 | 2015-09-02 | 中国科学院合肥物质科学研究院 | 六边形纳米片阵列及其制备方法 |
WO2022185098A1 (en) | 2021-03-04 | 2022-09-09 | Crystallyte Co., Ltd. | Electrolytic process for producing a nanocrystalline carbon with 1 d, 2d, or 3d structure and/or a nanocrystalline diamond and/or an amorphous carbon and/or a metal-carbon nanomaterial composite and/or a mixture thereof at ambient conditions |
WO2024121603A1 (en) | 2022-12-08 | 2024-06-13 | Crystallyte Co., Ltd. | A process for producing a nanocrystalline carbon with 1d, 2d, or 3d structure and/or a nanocrystalline diamond and/or an amorphous carbon and/or a metal-carbon nanomaterial composite and/or a mixture thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03205399A (ja) * | 1989-12-30 | 1991-09-06 | Canon Inc | ダイヤモンド被覆材及びその製造法 |
JPH0633234B2 (ja) * | 1989-08-02 | 1994-05-02 | 義捷 難波 | ダイヤモンド薄膜の製造方法 |
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US6129901A (en) * | 1997-11-18 | 2000-10-10 | Martin Moskovits | Controlled synthesis and metal-filling of aligned carbon nanotubes |
US6685810B2 (en) | 2000-02-22 | 2004-02-03 | California Institute Of Technology | Development of a gel-free molecular sieve based on self-assembled nano-arrays |
WO2003043045A2 (en) | 2001-11-13 | 2003-05-22 | Nanosciences Corporation | Photocathode |
WO2003046265A2 (en) * | 2001-11-26 | 2003-06-05 | Massachusetts Institute Of Technology | Thick porous anodic alumina films and nanowire arrays grown on a solid substrate |
JP2004202602A (ja) * | 2002-12-24 | 2004-07-22 | Sony Corp | 微小構造体の製造方法、及び型材の製造方法 |
US7279085B2 (en) * | 2005-07-19 | 2007-10-09 | General Electric Company | Gated nanorod field emitter structures and associated methods of fabrication |
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- 2006-05-30 KR KR1020060048542A patent/KR100791790B1/ko active IP Right Grant
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- 2007-02-21 EP EP07003576.1A patent/EP1867758B1/en active Active
- 2007-02-26 US US11/678,828 patent/US20070295603A1/en not_active Abandoned
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0633234B2 (ja) * | 1989-08-02 | 1994-05-02 | 義捷 難波 | ダイヤモンド薄膜の製造方法 |
JPH03205399A (ja) * | 1989-12-30 | 1991-09-06 | Canon Inc | ダイヤモンド被覆材及びその製造法 |
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KR20070114908A (ko) | 2007-12-05 |
EP1867758B1 (en) | 2018-10-31 |
KR100791790B1 (ko) | 2008-01-03 |
US20070295603A1 (en) | 2007-12-27 |
JP2007320845A (ja) | 2007-12-13 |
EP1867758A1 (en) | 2007-12-19 |
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