JP4655289B2 - Lamination method and apparatus for laminated ceramic parts - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for laminating a multilayer ceramic component such as a multilayer ceramic capacitor and an apparatus therefor.
[0002]
[Prior art]
In recent years, particularly in the field of multilayer ceramic capacitors, an increase in capacitance per unit volume and miniaturization have been strongly desired. With the recent rise of the information industry, the trend is getting stronger and the demand is increasing. Therefore, the thickness of the ceramic sheet is required from about 20 μm to 5 μm, and further about 4 to 3.5 μm.
[0003]
As shown in FIG. 22, the first example of the conventional multilayer ceramic component laminating apparatus is a continuous ceramic sheet film 80 in which a conductor pattern serving as an internal electrode is printed on the surface of a continuous band-shaped carrier film 80b. Supply mechanism 81, a transport mechanism 82 for transporting the continuous strip-shaped ceramic sheet 80a that has been peeled off, a winding mechanism 83 for continuously winding the carrier film 80b, and the surface of the transported ceramic sheet 80a An adsorption mechanism 85 is provided on the lower surface, and the lower surface is provided with an adsorption mechanism 85, which adsorbs and cuts the ceramic sheet 80a directly and conveys it to the press machine 88 via the transfer mechanism 84, and the conveyed ceramic sheet 80a. And press machine 88 for forming a ceramic laminate by thermocompression bonding.
Here, the ceramic sheet 80a is peeled off in a continuous belt-like state from the carrier film 80b of the ceramic sheet film 80 by a combination of the supply mechanism 81, the winding mechanism 83, and the transport mechanism 82.
[0004]
Since the ceramic sheet 80a has a relatively low mechanical strength, the ceramic sheet 80a becomes brittle when the thickness is reduced. When the ceramic sheet 80a is cut and peeled off from the carrier film 80b by being sucked by the suction / conveyor 87, the ceramic sheet 80a becomes Prone to wrinkles, tears and deformation. For this reason, in the conventional first example, the thickness of the ceramic sheet 80a is limited to 20 μm or more.
[0005]
In order to solve this problem, for example, Japanese Patent Application Laid-Open No. 7-1428 discloses in a conceptual diagram as shown in FIG. 23 a supply mechanism 81 and a transport mechanism 82 for continuously supplying and transporting a ceramic sheet film 80, and a carrier film. A winding mechanism 83 for continuously winding 80 b, a peeling table 89 disposed on the back side of the conveyed ceramic sheet film 80 and having an acute-angled end 89 a, and a surface side of the conveyed ceramic sheet film 80. An adsorption mechanism 85 is provided on the lower surface and adsorbs and conveys 87, which adsorbs the surface of the ceramic sheet film 80 to cut out the ceramic sheet 80a and conveys it to the press machine 88 via the transfer mechanism 84. A press machine 88 that sequentially thermocompresses the ceramic sheets 80a to form a ceramic laminate. There has been proposed.
In the second example, only the ceramic sheet 80 a on the surface of the ceramic sheet film 80 conveyed on the peeling table 89 is cut by the suction / conveyance device 87, and at the same time, the carrier film 80 b is removed by the winding mechanism 83. The point that the ceramic sheet 80a cut by winding the carrier film 80b in the direction pressed against the acute angle end portion 89a is peeled off from the carrier film 80b is an improvement on the defect of the first example. is there. There is a description that the ceramic sheet 80a can be laminated up to a thickness of 5 μm.
[0006]
[Problems to be solved by the invention]
However, such conventional techniques have the following problems.
(1) The stacking tact time is long.
The tact time per ceramic sheet depends on the transport time for the suction / conveyor to move horizontally over a relatively long distance and the press time of the press machine, which is limited to prevent air bubbles from getting into the laminated ceramic sheet during pressing. Long (about 6-7 seconds).
(2) Lamination accuracy is poor.
Since the suction / conveyance machine having a relatively heavy structure moves and moves horizontally, the accuracy when the ceramic sheets are laminated is relatively poor (about 10 μm).
(3) Bubble entrainment in the multilayer ceramic sheet.
When the speed of the press was increased in order to shorten the tact time as much as possible, there were problems such as air bubbles being entangled between the laminated ceramic sheets during pressing, and wrinkling of the ceramic sheets.
(4) There is a limit to the thickness of the ceramic sheet.
In the above configuration, the limit of the thickness of the ceramic sheet is 5 μm or more. In addition to the improvement of the above problems, in addition to the improvement of the above problems, the tension adjustment mechanism of each film and the ceramic sheet cutting position accuracy of the ceramic sheet film are included in the supply mechanism and transport mechanism of the carrier film and the winding mechanism of the carrier film. There is room for improvement, such as the need to add an appropriate adjustment mechanism such as a feed mechanism for securing.
[0007]
In order to solve these problems, the object of the present invention is to cope with a thin ceramic sheet of less than 5 μm, high stacking accuracy, prevention of entrainment of bubbles in the multilayer ceramic sheet, and high stacking tact time. An object of the present invention is to provide a method and apparatus for laminating multilayer ceramic parts that have high performance and high production capacity and are space-saving.
[0008]
[Means for Solving the Problems]
According to the invention Multilayer ceramic component laminating equipment A supply mechanism and a first transport mechanism for continuously supplying and transporting a ceramic sheet film in which a conductor pattern serving as an internal electrode is printed on the surface of a continuous band-shaped carrier film, and the ceramic sheet film transported It is provided on the back side and has an adsorption mechanism that adsorbs the back side of the ceramic sheet film on the top surface. The upper end of the tip has an acute end formed with an appropriate acute angle, and holds the back side of the ceramic sheet film. And a separation mechanism having a separation table that moves freely between a first stop position that is a standby position and a second stop position that is a predetermined ceramic sheet stacking position, and a proximity to the front of the first stop position And a cutting head for cutting the ceramic sheet around the lamination head. A press mechanism for thermocompression bonding the ceramic sheets stacked by being pressed against the stacking head and having a heater built in the upper portion thereof A provisional press mechanism, and a second transport mechanism and a winding mechanism for continuously transporting and winding the carrier film from which the ceramic sheet has been cut and peeled from the peeling mechanism in the direction of pressing the sharp edge of the peeling table. When, A first stop position of the peeling table is a position where the tip of the acute end is in front of the stacking head, and a second stop position is a position where the tip of the acute end is passed through the lower surface of the stacking head. The supply mechanism and the first transport mechanism are mounted with the ceramic sheet film wound in a roll shape, and a supply mechanism including a supply roller that is driven by an actuator to sequentially feed and supply the ceramic sheet film; A first transport mechanism comprising a plurality of guide rollers for guiding and transporting the ceramic sheet film supplied from the supply mechanism, and a first transport mechanism provided between the first transport mechanism and maintaining an appropriate tension of the ceramic sheet film. 1 tension adjusting mechanism, provided in front of the peeling table, and configured to move forward and backward in the advancing and retreating direction of the peeling table in response to the advancing and retreating operation of the peeling table. Feed roller machine for feeding relatively forward or stop And the second transport mechanism and the winding mechanism are provided below the peeling mechanism, and each include a plurality of guide rollers that guide and transport the carrier film from which the ceramic sheet has been cut and peeled from the peeling mechanism. An appropriate tension of the carrier film provided between the second transport mechanism, at least one film locking mechanism provided adjacent to the second transport mechanism and locking the carrier film, and the second transport mechanism. A second tension adjusting mechanism that maintains the winding force, and a winding mechanism that includes a winding roller that is driven by an actuator and is finally wound on the carrier film that is conveyed by the second conveying mechanism; It is characterized by having.
[0010]
The feed roller mechanism is connected to an actuator and is configured to move in a moving direction of the peeling table so as to move forward and backward in accordance with an advance and retreat operation of the peeling table. A movable roller that conveys the ceramic sheet film substantially in line with the upper surface of the peeling table, and the movable roller moves forward and backward so that the movable roller always rotates or stops in a direction to advance the ceramic sheet film. Configured.
[0011]
Further, the first tension adjusting mechanism is connected to a first actuator for maintaining the tension of the ceramic sheet film at an appropriate constant force, and is connected to a first slide member that moves forward and backward in the operating direction of the first actuator. A first movable roller that is attached and conveys the ceramic sheet film, and wherein the second tension adjusting mechanism is connected to a second actuator for appropriately maintaining the tension of the carrier film at a constant force. A second movable roller that is attached to a second slide member that moves forward and backward in the operation direction and conveys the carrier film is provided.
[0012]
Further, the stacking head of the stacking mechanism is disposed between the frame top plate on the temporary press frame that forms the outer frame of the temporary press mechanism and supports the press reaction force, and the stacking head, A hollow strut member suspended on the lower surface, a rod member that is inserted through the frame top plate and the strut member, and is movable in a vertical direction by an actuator connected to the upper end thereof; It is fixed to the lower end, and is rotatably supported by a plate member that is disposed below the plurality of roller members provided around the upper end of the laminated head and serves as a rolling surface of the roller. The alignment mechanism, which has a hollow portion through which the upper end portion of the column member is inserted at the upper end portion and is fixed to the lower surface of the frame top plate, and a plurality of linear slices configured to be vertically extendable. Engaged through the mechanism, lamination heads when retracted upwardly, characterized in that the top surface of the layered head are configured so as to contact the lower end surface of the strut member.
[0013]
The drive mechanism for driving the press head of the temporary press mechanism includes a high-speed drive mechanism that moves at a high speed when the press head advances and retreats, and a slow-speed drive mechanism that moves at a slow speed at the time of final press. The speed is controlled in stages.
[0014]
The press head drive mechanism is rotatably guided via a bearing member at a lower portion of the press head that is guided by a guide member fixed to the temporary press frame and connected to a slide member that can be moved up and down. A screw drive mechanism comprising a coupled power transmission member, a nut member fixed to the lower portion of the power transmission member, and a screw member engaged with the nut member; A high-speed drive mechanism including a first motor that rotationally drives the member, a second motor that is coupled to a power reduction member that engages with the power transmission member, and that rotationally drives the nut member, and an upper portion of the first motor. A slow speed drive mechanism that is fixed to the temporary press frame and includes a screw member locking mechanism that rotationally locks the screw member, and locks the nut member by stopping the second motor. In this state, the first motor is operated to rotate the screw member to advance and retract the press head at a high speed. At the time of the final pressing, the first motor is stopped and the screw member locking mechanism is operated to lock the screw member. In this state, the second motor is operated to rotate the nut member to advance the press head slightly.
[0015]
Further, in the method for laminating a multilayer ceramic component, the ceramic sheet film is formed by laminating a ceramic sheet on which a conductor pattern is printed using the multilayer ceramic component laminating apparatus, and forming a ceramic laminate by thermocompression bonding. A supply and transport process for continuously supplying and transporting while maintaining appropriate tension adjustment by the supply mechanism and the first transport mechanism, and the back side of the ceramic sheet film is adsorbed and held by the peeling mechanism at the stacking position. A moving forward step, an alignment step of correcting the displacement amount of the ceramic sheet confirmed by the image processing mechanism by the alignment mechanism between the forward step, and the laminating mechanism after the forward step is finished by the ceramic sheet Cera of the surface of the ceramic sheet film descending on the film At the same time the suction of the peeling mechanism is released, the cutting mechanism lowers the cutter sheet and cuts the periphery of the ceramic sheet. After the cutting process is finished, the cutting mechanism is raised and the film mechanism is released. In a state where the carrier film is locked by a stopping mechanism, the peeling mechanism is retracted to the standby position, and a peeling process in which the ceramic sheet on the surface of the ceramic sheet film is peeled, and after the peeling process is completed, The film locking mechanism is released, the laminating mechanism that adsorbs the ceramic sheet is raised, and the alignment mechanism returns to the original position, and the temporary press mechanism heated by the heater after the saving process is completed. Ascending at a high speed by the temporary press drive mechanism and starting pressing the ceramic sheet And a temporary pressing step in which the temporary pressing mechanism rises at a slow speed to perform final pressing and thermocompression-bond the ceramic sheet, and a predetermined number of stacked conductors are respectively formed above and below by performing the step a predetermined number of times. A ceramic laminate is formed by thermocompression bonding a predetermined number of laminated ceramic sheets with a predetermined temporary pressing force in a state of being sandwiched by a cover sheet on which a pattern is not printed.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a most preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a conceptual diagram of a multilayer ceramic component laminating apparatus according to an embodiment of the present invention.
The multilayer apparatus for multilayer ceramic components such as the multilayer ceramic capacitor according to the present invention is a ceramic in which a conductor pattern serving as an internal electrode is printed on the surface of a carrier film 1b made of a material such as a continuous band-shaped PET (polyethylene terephthalate). A supply mechanism 11 and a first transport mechanism that continuously supply and transport the sheet film 1 and an adsorption that is disposed on the back side of the transported ceramic sheet film 1 and that adsorbs the back side of the ceramic sheet film 1 on the upper surface. A first stop position, which is a standby position with a mechanism 26d, has an acute-angle end portion 26e formed at an appropriate acute angle at the upper end of the tip, and holds the back side of the ceramic sheet film 1, and a predetermined ceramic sheet lamination position A peeling mechanism 26 having a peeling table 26a that can move forward and backward between the second stop position. The laminated head 31a, which is disposed in front of the first stop position and includes a suction mechanism 33 that sucks the ceramic sheet 1a on the lower surface, and the cutting mechanism 34 that cuts only the ceramic sheet 1a around the laminated head 31a. And a laminated mechanism 31 provided directly opposite to the laminated head 31a, a heater (not shown) is built in the upper portion, and the laminated ceramic sheet 1a is thermocompression-bonded by being pressed against the laminated head 31a. The carrier film 1b is continuously conveyed in a direction in which the temporary pressing mechanism 36 provided with the press head 36a and the carrier film 1b from which the ceramic sheet 1a is cut and peeled from the peeling mechanism 26 are pressed against the acute angle end portion 26e of the peeling table 26a. A second transport mechanism and a winding mechanism 25, which will be described later, are provided.
The adsorbing mechanisms 26d and 33 are composed of, for example, a porous plate having a plurality of appropriately sized holes.
[0018]
As shown in FIG. 10, the first stop position P1 of the peeling table 26a is the position where the tip of the acute angle end portion 26e is in front of the stacking head 31a, and the second stop position P2 is the tip of the acute angle end portion 26e is the stacking head 31a. It is the position which passed the lower surface of the.
[0019]
As shown in FIG. 1, the supply mechanism 11 and the first transport mechanism are attached to the ceramic sheet film 1 wound in a roll shape, and are driven by an actuator (not shown) to sequentially feed and supply the ceramic sheet film 1. A supply mechanism 11 having a roller 11a, a first conveyance mechanism including a plurality of guide rollers 12, 13, 15, and 16 for guiding and conveying the ceramic sheet film 1 supplied from the supply mechanism 11, and a first conveyance mechanism The first tension adjusting mechanism 14 that maintains an appropriate tension (for example, about 1 to 2 kg) of the ceramic sheet film 1 and the peeling table 26a are provided in front of the peeling table 26a. Corresponding to the advance / retreat operation, it is configured to move freely in the advance / retreat direction of the peeling table 26a and peel And a feed roller mechanism 17 for feeding to constantly relatively forward or stop the ceramic sheet film 1 against Buru 26a.
[0020]
The first tension adjusting mechanism 14 is connected to a first actuator 14c for maintaining the tension of the ceramic sheet film 1 at the appropriate constant force, and extends in the operating direction of the first actuator 14c. A first movable roller 14d is provided that is attached to a first slide member 14a that is guided by 14b and moves forward and backward, and that conveys the ceramic sheet film 1. The first slide member 14a is provided with a first position sensor 14e such as a potentiometer that detects the position of the first movable roller 14d and sends a control signal to the operation control unit in parallel with the first actuator 14c. Yes.
[0021]
The feed roller mechanism 17 is guided by a guide rail member 17b extending in the moving direction of the peeling table 26a, and is a slide connected to the actuator 17c so as to move freely corresponding to the forward and backward movement of the peeling table 26a. A member 17a and a movable roller 17d attached to the slide member 17a and transporting the ceramic sheet film 1 substantially in line with the upper surface of the peeling table 26a are provided, and the movable roller 17d always rotates in a direction to advance the ceramic sheet film 1. The movable roller 17d is moved forward and backward so as to stop or at least stop.
With such a configuration, the ceramic sheet film 1 is not always retracted relative to the peeling table 26a during the forward / backward movement of the peeling table 26a, and is combined with an image processing mechanism having a monitoring mechanism 27 described later. The position of the ceramic sheet 1a on the sheet film 1 can be accurately aligned with the first stop position P1, which is a predetermined standby position, and conveyed.
[0022]
The second transport mechanism and the take-up mechanism 25 are disposed below the peeling mechanism 26, and a plurality of guide rollers 19, 20 that guide and transport the carrier film 1b from which the ceramic sheet 1a has been cut and peeled from the peeling mechanism 26. A second transport mechanism 21, 22, 24, provided adjacent to the second transport mechanism, and provided in the middle of the second transport mechanism, and film locking mechanisms 28, 29 for locking the carrier film 1 b, The second tension adjusting mechanism 23 that maintains an appropriate tension (for example, about 1 to 2 kg) of the carrier film 1b and the carrier film 1b that is driven by an actuator (not shown) and conveyed by the second conveying mechanism are finally wound. And a winding mechanism 25 including a winding roller 25a for taking.
The guide rollers 19, 20, and 21 and the film locking mechanism 28 of the second transport mechanism are mounted on the slide member 26b and move forward and backward together with the peeling table 26a.
[0023]
The film locking mechanisms 28 and 29 are provided adjacent to the guide rollers 19 and 22, respectively, and the locking members 28 a and 29 a are pressed in the direction of the guide rollers 19 and 22 by an actuator (not shown) to move on the guide rollers 19 and 22. The carrier film 1b being conveyed is locked.
When the peeling table 26a moves forward from the first stop position P1 to the second stop position P2, the film locking mechanism 28 operates, and in the process of cutting and peeling the ceramic sheet 1a from the surface of the carrier film 1b in the peeling mechanism 26, When the peeling table 26a moves backward from the second stop position P2 in the direction of the first stop position P1, the film locking mechanism 29 operates, and in any case, the carrier film 1b is locked so as not to return.
[0024]
The second tension adjusting mechanism 23 is guided by a guide member 23b which is connected to the second actuator 23c for maintaining the tension of the carrier film 1b at the appropriate constant force and extends in the operating direction of the second actuator 23c. And a second movable roller 23d that is attached to a second slide member 23a that moves forward and backward and conveys the carrier film 1b.
The second slide member 23a is provided with a second position sensor 23e such as a potentiometer that detects the position of the second movable roller 23d and sends a control signal to the operation control unit in parallel with the second actuator 23c. Yes.
[0025]
The image processing mechanism is provided at least two positions in front of the stacking mechanism 31 in proximity to the upper side of the peeling table 26a, and defines the position of the ceramic sheet 1a on the ceramic sheet film 1 at the first stop position P1. An image processing (not shown) that performs image processing on the monitoring mechanism 27, 35 such as a CCD camera for monitoring the position of the mark not to be performed, and image processing is performed on the positional deviation image data of the ceramic sheet 1a obtained by the monitoring mechanism 27, 35. It consists of a system.
If the ceramic sheet 1a is, for example, a square, the monitoring mechanisms 27, 35 are arranged at least one by one corresponding to the diagonal because the mark is also arranged at the diagonal of the square. desirable.
[0026]
Further, a first position detecting means such as a fiber sensor (not shown) provided in the vicinity of the first stop position P1 causes the ceramic sheet film 1 conveyed on the release table 26a to be a first stop that is a standby position of the release table 26a. The position of a stop mark (not shown) provided on the ceramic sheet 1a is detected at the position P1, and the stop mark is precisely aligned with the first stop position P1 to wait.
[0027]
Furthermore, when the second position detecting means such as a fiber sensor (not shown) provided in the vicinity of the second stop position P2 moves forward to the second stop position P2 where the peeling table 26a is the ceramic sheet lamination position, the stop of the ceramic sheet 1a is stopped. The position of the mark is detected and stopped in accordance with the second stop position P2.
[0028]
The stacking mechanism 31 is provided with an alignment mechanism 32 for correcting the position of the displacement amount of the ceramic sheet 1a confirmed by image processing by the image processing mechanism.
[0029]
The alignment mechanism 32 is a well-known one that is already on the market and will not be described in detail. However, as shown in FIGS. 2 and 3, respectively, the top table 32 a and the base having a planar arrangement structure are shown. X1, X2, and Y-axis cross linear guides 32c1, 32c2, 32c3 and X1, X2 configured to be movable back and forth in the in-plane horizontal axes X1 and X2 and the Y-axis direction orthogonal thereto. The Y-axis cross roller rings 32d1, 32d2, 32d3 and the fourth cross roller ring 32d4 are arranged in a plane.
[0030]
As shown in FIGS. 1 and 4, a top table 32a is attached to the upper surface of the laminated head 31a, and a base plate 32b forms an outer frame of the temporary press mechanism 36 to support the press reaction force, and the top plate of the temporary press frame 36k. It is fixed at 36k1.
The X1, X2, and Y-axis cross linear guides 32c1, 32c2, and 32c3 are moved forward and backward in the X1, X2, and Y-axis directions by the X1, X2, and Y-axis motors M1, M2, and M3, respectively, via couplings 32e1, 32e2, and 32e3. As shown in FIG. 3, the laminated head 31a attached to the top table 32a is appropriately moved or rotated in the horizontal plane by X1, X2, and Y axes as shown in FIG. The amount of displacement of the ceramic sheet 1a can be accurately corrected (aligned).
[0031]
As shown in FIGS. 4 and 5, the stacking head 31a of the stacking mechanism 31 is disposed between the frame top plate 36k1 above the temporary press frame 36k and the stacking head 31a, and is suspended from the lower surface of the frame top plate 36k1. The hollow supporting column member 37, and the frame top plate 36k1 and the bearing members 37b, 37c, 37d such as linear bushes disposed inside the supporting column member 37 are inserted and provided at the upper end thereof. A rod member 31b that moves slightly in the vertical direction (for example, about 2 mm) by an actuator 39 such as a cylinder and the lower end portion of the rod member 31b is fixed, and a roller mounting member 38a is provided around the upper end of the laminated head 31a. The roller is disposed under the roller member 38 such as at least three or more ball bearings with bolts. And it is rotatably supported by the plate member 31c of the surface.
[0032]
The actuator 39 is, for example, an air cylinder hingedly connected to a frame top plate 36k1 by a fixing member (not shown). As shown in FIG. 4, the tip member 39a at the tip of the air cylinder rod and the central portion of the rod member 31b The tip member 31d at the upper end is hinge-coupled by a shaft member 31e such as a pin, and one end is hinge-coupled by the tip member of the support member 31g standing on the upper surface of the frame top plate 36k1 and the shaft member 31h such as a pin. The other end of the link member 31f is hinged by a shaft member 31i such as a pin.
Further, when the actuator 39 is actuated and the cylinder rod extends downward, a stop member 39b fixed to the lower end portion of the cylinder rod tip member 39a is provided with a positioning adjustment screw block 31j suspended from the upper surface of the frame top plate 36k1. Stops in contact with. This stop position will be described below. When the peeling table 26a comes to the second stop position P2, which is the stacking position, the lower surface of the stacking head 31a softly contacts the ceramic sheet film 1 and sucks the ceramic sheet 1a. The second stop position is adjusted by the adjustment screw block 31j.
[0033]
Furthermore, the top table 32a below the base 32b of the alignment mechanism 32, which has a hollow portion 32f through which the upper end portion of the column member 37 is inserted at the upper end portion of the laminated head 31a and is fixed to the lower surface of the frame top plate 36k1, They are engaged via a plurality of linear slide mechanisms 32c that are configured to be slightly extendable in the vertical direction (for example, about 2 mm).
When the laminated head 31a is pulled upward and retracted by the actuator 39, the upper surface of the laminated head 31a is configured to come into contact with the lower end surface 37a of the column member 37.
[0034]
With such a configuration, the temporary press mechanism 36 is operated and pressed in a state where the laminated head 31a is retracted upward, but the pressing reaction force is transmitted directly from the laminated head 31a to the frame top plate 36k1 via the support member 37.
That is, the alignment mechanism 32, which is a precise mechanism, is configured so that no pressing reaction force is applied.
[0035]
The actuator 39 operates in the following two stages.
First, the stacking head 31a of the stacking mechanism 31 is slightly extended (for example, about 1 mm) to the first stop position that is the lower alignment operation position.
At the first stop position, the alignment mechanism 32 corrects the position of the deviation amount of the ceramic sheet 1a confirmed by the image processing mechanism.
Next, after the alignment step is finished, the actuator 39 is actuated again to slightly extend the laminated head 31a (for example, about 1 mm) to the second stop position, which is the lower adsorption position, and bring it into contact with the ceramic sheet film 1. .
At the second stop position, the laminated head 31a adsorbs the ceramic sheet 1a on the surface of the ceramic sheet film 1.
[0036]
As shown in FIGS. 6 to 8, the cutting mechanism 34 is a link mechanism disposed on a slide member 34j that engages with a guide member 34k disposed along the periphery of the laminated head 31a and moves forward and backward. A plurality of cutters 34a that are rotatably mounted through 34h and cut only the ceramic sheet 1b at the same time, and are arranged around the laminated head 31a and driven by an actuator (not shown) for moving the slide member 34j forward and backward. A drive mechanism constituted by a drive timing pulley 34b, a driven timing pulley 34c engaged with the drive timing belt 34d, and a driven timing belt 34e, and the cutter 34a for moving up and down via a link mechanism 34h. The actuator 34q and the cutter 34a attached to the link mechanism 34h appropriately And a biasing member 34i which biases depressing with a force.
[0037]
As shown in FIGS. 7 and 8, the cutter 34a is a cutter whose one end is hinged to a lower end portion of a cutter frame 34g projecting from a lower portion of the slide member 34j via a shaft support member 34n such as a pin. The other end portion of the arm 34f is hinge-coupled with a link mechanism 34h via a shaft support member 34m such as a pin so as to be rotatable.
Further, as shown in FIG. 8, a push-down member 34r extending around the laminated head 31a below the guide member 34k and configured to move up and down by an actuator 34q provided on the upper portion is provided as shown in FIG. The cutter 34a is pushed down through the upper part of the arm 34f.
[0038]
On the other hand, the urging member 34i attached to the upper part of the link mechanism 34h urges the cutter 34a in a direction to push down the cutter 34a with an appropriate force when the cutter 34a is pushed down so as to contact the upper surface of the ceramic sheet 1a by the actuator 34q. The urging force is adjusted so as to cut only the ceramic sheet 1a.
With such a configuration, the urging member 34i plays a buffering role so that the excessive pressing force of the actuator 34q is not directly transmitted to the cutter 34a and is not cut to the carrier film 1b.
However, the biasing member 34i is configured such that tension is actuated in a direction in which the cutter 34a is automatically pulled up via the link mechanism 34h in a normal standby state in which the actuator 34q is retracted.
[0039]
The drive mechanism that drives the press head 36a of the temporary press mechanism 36 includes a high-speed drive mechanism that moves at a high speed when the press head 36a advances and retreats, and a slow-speed drive mechanism that moves at a slow speed at the time of the final press. Speed controlled by stage.
[0040]
As shown in FIG. 1, the drive mechanism of the press head 36a is guided by a guide member 36n fixed to the temporary press frame 36k and is connected to a lower portion of the press head 36a connected to a slide member 36p which can be moved up and down. A screw drive mechanism 36b comprising a power transmission member 36h that is rotatably connected via a member 36e, a nut member 36g fixed to the lower portion of the power transmission member 36h, and a screw member 36c engaged with the nut member 36g; A high-speed drive mechanism that is connected to the lower end of the screw member 36c and includes a first motor 36j that rotationally drives the screw member 36c, and a power reduction member 36i that engages with the power transmission member 36h, as shown in FIG. A second motor 36m that is coupled and rotationally drives the nut member 36g, and a temporary press frame 36k on the top of the first motor 36j, are fixed to the screw. And a very low speed drive mechanism consisting of a threaded member engaging mechanism 36f for rotating locking the timber 36c.
[0041]
By stopping the second motor 36m, the first motor 36j is operated while the nut member 36g is locked, the screw member 36c is rotated to move the press head 36a forward and backward, and the first motor 36j is stopped at the time of final pressing. At the same time, the second motor 36m is operated in a state where the screw member locking mechanism 36f is operated to lock the screw member 36c, and the nut member 36g is rotated to advance the press head 36a slightly.
[0042]
With the above configuration, for example, the high-speed advance / retreat of the press head 36a is performed at a high speed of about 55 to 0.2 seconds for the stroke 55 mm, and the fine advance length is variable from about 0.2 seconds or more for 0.2 mm. Slowly controlled.
This is because the press head 36a is stretched at a high speed in order to shorten the stacking tact time. However, when the laminated ceramic sheet 1a and / or a cover sheet on which a conductor pattern (to be described later) is not printed is thermocompression bonded at the final pressing stage, the press head is used. The reason is that 36a is extended at a slow speed to sufficiently expel air between the laminated ceramic sheets 1a and / or between the cover sheets so as not to entrain air bubbles.
[0043]
Next, a method for laminating a multilayer ceramic component according to an embodiment of the present invention in which the ceramic sheet 1 is laminated and thermocompression-bonded to form a ceramic laminate using the multilayer ceramic component laminating apparatus will be described with reference to FIG. This will be described with reference to FIG.
[0044]
First, as shown in FIGS. 1 and 10, the first step of laminating the multilayer ceramic component is to maintain the appropriate tension adjustment of the ceramic sheet film 1 by the supply mechanism 11 and the first transport mechanism to the first stop position P1. This is a supply and transfer process in which supply and transfer are continuously performed on the waiting peeling table 26e.
At this time, the first position detecting means stops the ceramic sheet film 1 conveyed on the peeling table 26a by accurately aligning the position of the ceramic sheet 1a with the first stop position P1 of the peeling table 26a. Let them wait.
[0045]
Next, in the second lamination step, as shown in FIG. 11, the back side of the ceramic sheet film 1 is peeled off in a state where the locking member 28a of the film locking mechanism 28 is extended and the carrier film 1b is locked. The actuator 39 (FIG. 4) is moved between the forward movement process that is adsorbed and held by the table 26a and moved in accordance with the second stop position P2, which is the stacking position, by the second position detection means. In operation, the stacking head 31a of the stacking mechanism 31 is slightly extended (for example, about 1 mm) to the first stop position which is the lower alignment operation position. This is a forward and alignment process including an alignment process for correcting the position of the displacement of the ceramic sheet 1a by the alignment mechanism 32.
[0046]
Next, in the third stacking step, after the alignment step is completed, as shown in FIG. 12, the actuator 39 (FIG. 4) is actuated again to move the stacking head 31a slightly (for example, about 1 mm) below the suction position. It is extended to the second stop position, and is brought into contact with the ceramic sheet film 1 so that the lamination head 31a adsorbs the ceramic sheet 1a of No. 1 on the surface of the ceramic sheet film 1 and at the same time the adsorption of the peeling mechanism 31 is released. Is a stacking mechanism adsorption step.
[0047]
Next, the fourth lamination step is a cutting step in which the cutter mechanism 34 descends and cuts the periphery of the ceramic sheet 1a as shown in FIG.
[0048]
Subsequently, the fifth stacking step is a cutting mechanism evacuation step in which the cutting mechanism 34 rises as shown in FIG.
[0049]
Subsequently, in the sixth lamination step, as shown in FIG. 15, the locking member 28a of the film locking mechanism 28 moves backward to release the locking state, and the locking member 29a of the film locking mechanism 29 extends. With the carrier film 1b locked, the peeling table 26a moves backward to the first stop position P1 at the standby position, and the ceramic sheet 1a of No. 1 on the surface of the ceramic sheet film 1 is peeled accordingly. It is a process.
At this time, as shown in FIG. 16, the ceramic sheet film 1 conveyed on the peeling table 26a is moved to the first stop position P1 of the peeling table 26a by the first position detecting means. Stop and wait for the correct position.
[0050]
Next, in the seventh lamination step, as shown in FIG. 16, after the peeling step, the locking member 29a of the film locking mechanism 29 is retracted to release the locking state, and the actuator 39 (FIG. 4) is released. The alignment mechanism 32 returns to the original position in a state where the laminated head 31a that has moved backward and sucked the ceramic sheet 1a of No. 1 is slightly raised (for example, about 1 mm) to the first stop position above. This is an alignment mechanism retracting step.
[0051]
Subsequently, as shown in FIG. 17, the eighth stacking process is a stacking mechanism retracting process in which the stacking mechanism 31 is further raised to the retracted position of the origin by the operation of the actuator 39 (FIG. 4) after the alignment mechanism retracting process is completed.
[0052]
Next, as shown in FIG. 18, in the ninth lamination step, the temporary press mechanism 36 that is heated by the heater is extended (lifted) at a high speed by the temporary press drive mechanism after the lamination mechanism evacuation step is completed. It is a process.
[0053]
Subsequently, in the tenth lamination step, as shown in FIG. 19, the pressing of the ceramic sheet 1a of No. 1 is started, and at the same time, the temporary press mechanism 36 extends (raises) at a slow speed and the final pressing is performed. It is the temporary press process of thermocompression-bonding the ceramic sheet 1a.
[0054]
Finally, the eleventh stacking step is a temporary press mechanism retracting step in which the temporary press mechanism 36 is retracted (lowered) at a high speed to the standby position as shown in FIG.
Note that the locking member 28a of the film locking mechanism 28 is also retracted to release the locked state.
[0055]
By repeating the above steps sequentially (2), (3), --- number ceramic sheets 1a a predetermined number of times, a predetermined number (for example, about 40 to 50) laminated conductors are respectively provided above and below. A predetermined number (for example, about 200 to 400 sheets) of laminated ceramic sheets 1a are thermocompression-bonded by a predetermined (for example, about 8 tons) temporary pressing force in a state where the pattern is sandwiched between cover sheets on which no pattern is printed. To form a ceramic laminate.
[0056]
Next, an entire multilayer ceramic component multilayer system according to an embodiment of the present invention will be described with reference to FIGS.
[0057]
As shown in FIG. 1 and described above, the multilayer system for multilayer ceramic components according to an embodiment of the present invention includes a supply mechanism 11, a first transport mechanism, a peeling mechanism 26, the image processing mechanism, and a second mechanism. A ceramic sheet film supply / conveyance unit 10 comprising a conveyance mechanism and a take-up mechanism 25, and a first side surface 30a is disposed adjacent to the front of the ceramic sheet film supply / conveyance unit 10 as shown in FIG. As shown in FIG. 1, the laminated temporary press unit 30 including the laminated mechanism 31 and the temporary press mechanism 36, and the first side surface 30a and the second side surface 30b on the opposite side of the laminated temporary press unit 30 are disposed adjacent to each other. Although not shown, a continuous belt-like carrier film constructed in the same manner as in FIG. 1 and the ceramic sheet film supply and conveyance unit 10 described above. A tension adjusting mechanism for maintaining an appropriate tension of the cover sheet film on which no conductor pattern is printed on the surface; a supply mechanism for continuously supplying and transporting the cover sheet film; and a first transport mechanism; The cover sheet film is provided on the back surface side of the cover sheet film and has an adsorption mechanism for adsorbing the back surface side of the cover sheet film on the upper surface, the upper end portion of the cover sheet having an acute angle end formed at an appropriate acute angle, and the cover sheet film A cover sheet film comprising a peeling mechanism having a peeling table that holds the back side of the sheet and moves freely between a first stop position that is a standby position and a second stop position that is a predetermined cover sheet stacking position. Adjacent to the supply conveyance unit 70 and the third or fourth side surface (for example, the third side surface 30c) of the laminated temporary press unit 30. The laminated body that is disposed and incorporates the heater and vacuum suction mechanisms 51a and 52a and is integrally formed by the laminated temporary pressing unit 30 and conveyed by the conveying mechanism is stronger than the pressing force of the temporary pressing mechanism 36 (for example, A laminated main press unit 50 composed of a main press mechanism for finally forming a ceramic laminate by thermocompression bonding with a pressing force of about 50 tons), a ceramic sheet film supply / conveyance unit 10, and a cover sheet film supply / conveyance unit 70. 1, a vacuum generation unit 40 for supplying a vacuum to each suction mechanism and vacuum suction mechanism of the laminated temporary press unit 30 and the laminated main press unit 50, and an operation control and monitor panel for each unit as shown in FIG. 61, and an operation control unit 60.
[0058]
As shown in FIG. 21, the laminated main press unit 50 includes a heater and a vacuum suction mechanism 51 a that incorporates a heater on the upper surface and vacuum-sucks the laminated body that is integrally formed and conveyed by the laminated temporary press unit 30. A press pedestal 51 provided with a heater and a vacuum suction mechanism 52a on the lower surface, and a sealing mechanism 52b that descends to a position in contact with the upper surface of the press pedestal 51 to hermetically seal the stack and vacuum suck the stack. A laminated main press mechanism including a press head 52 that finally forms a ceramic laminate by thermocompression bonding with the predetermined pressing force, a frame base 54 that supports the laminated main press mechanism, and a cover that covers the whole 59.
[0059]
The press pedestal 51 is fixed on the upper surface of the frame pedestal 54.
The press head 52 is fixed to the lower surface of the center of a slide member 56 that is guided by a guide member 55 erected on the upper surface of the frame pedestal 54 and moves up and down in a vertical direction.
The tip of the cylinder rod 53a of the fluid pressure cylinder 53 attached to the center of the cylinder attachment member 57 fixed to the upper end of the guide member 55 by a fixing member 58 such as a nut is connected to the center upper surface of the slide member 56. Yes. The fluid pressure cylinder 53 provides the predetermined strong pressing force.
[0060]
As described above, the laminated body laminated in the laminated temporary press unit 10 is a laminated body of cover sheets in which the upper and lower parts of the laminated ceramic sheet 1a are each an appropriate number (for example, about 40 to 50).
[0061]
【The invention's effect】
As described above, the method and apparatus for laminating ceramic multilayer components such as the multilayer ceramic capacitor according to the present invention described in detail have the following superior effects.
(1) Reduction of stacking tact time and space saving.
The horizontal movement of the laminating mechanism 31 is eliminated, the ceramic sheet film 1 is transported and the ceramic sheet 1a is peeled off by horizontal movement at a minimum distance close to the size of the ceramic sheet 1a of the peeling mechanism 26 (space saving); By enabling high-speed pressing by adopting the high-speed and fine-speed control of the temporary press mechanism 36, the tact time per ceramic sheet is significantly reduced from about 6-7 seconds to 3.8 seconds, for example. Turned into.
[0062]
(2) Improved stacking accuracy.
The horizontal movement of the laminating mechanism 31 having a relatively heavy structure is eliminated, and the ceramic sheet film 1 is conveyed by the horizontal movement of the peeling mechanism 26, and the ceramic sheet film 1 is always placed on the peeling table 26a by the feed roller mechanism 17. On the other hand, the position of the ceramic sheet 1a on the ceramic sheet film 1 is accurately matched to the first stop position P1, which is a predetermined standby position, without being moved back relatively. Then, the position of the ceramic sheet 1a is finally accurately corrected by the alignment mechanism 32, so that the accuracy at the time of laminating the ceramic sheets is greatly improved, for example, from about 10 μm to about 5 μm.
[0063]
(3) Prevents entrainment of bubbles and generation of wrinkles in the multilayer ceramic sheet.
By enabling the final fine press by adopting the high-speed and fine-speed control of the temporary press mechanism 36, the air between the laminated ceramic sheets 1a and / or between the cover sheets is sufficiently expelled to prevent air bubbles from being involved. This prevents the ceramic sheet from wrinkling.
[0064]
(4) Capable of meeting demands for thinner ceramic sheets.
With the above configuration and effects, the thickness of the ceramic sheet can be sufficiently met, for example, from the conventional limit of 5 μm or more to 2 to 3.5 μm.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram of a multilayer ceramic component laminating apparatus according to an embodiment of the present invention.
FIG. 2 is a conceptual diagram of an alignment mechanism as viewed in the direction of arrows AA in FIG. 1;
FIG. 3 is an operation concept diagram of an alignment mechanism.
4 is a detailed view of a portion F (lamination mechanism support structure) in FIG. 1; FIG.
5 is a GG arrow view (stacking mechanism support structure) in FIG. 4;
6 is a BB arrow view (conceptual diagram of the cutter mechanism) in FIG. 1. FIG.
FIG. 7 is a DD arrow view (conceptual diagram of a cutter mechanism) in FIG. 6;
FIG. 8 is a view taken along the line EE in FIG. 7 (conceptual diagram of the cutter mechanism).
9 is a view taken along the line CC in FIG. 1 (conceptual diagram of a temporary press mechanism).
FIG. 10 is a first process diagram (supply and transfer process diagram) of multilayer ceramic component lamination by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 11 is a second process diagram (advancing and alignment process diagram) of multilayer ceramic component lamination by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 12 is a third process diagram (layer mechanism adsorption process diagram) of multilayer ceramic component lamination by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 13 is a fourth process diagram (cutting process diagram) of multilayer ceramic component lamination by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 14 is a fifth process diagram of multilayer ceramic component lamination (cutting mechanism evacuation process diagram) by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 15 is a sixth process diagram (lamination process diagram) for multilayer ceramic component lamination by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 16 is a seventh process diagram of multilayer ceramic component lamination (alignment mechanism evacuation process diagram) by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 17 is an eighth process diagram (laminate mechanism evacuation process diagram) of multilayer ceramic component lamination by the multilayer ceramic component laminate apparatus of the present invention.
FIG. 18 is a ninth process diagram of multilayer ceramic component lamination (temporary press mechanism high-speed extension process diagram) performed by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 19 is a tenth process diagram (temporary press process diagram) of multilayer ceramic component lamination by the multilayer ceramic component lamination apparatus of the present invention.
FIG. 20 is a conceptual plan view of a multilayer system for multilayer ceramic components according to one embodiment of the present invention.
FIG. 21 is a conceptual diagram of the press mechanism as viewed in the direction of arrows FF in FIG. 20;
FIG. 22 is a conceptual diagram of a conventional multilayer ceramic component laminating apparatus (first example).
FIG. 23 is a conceptual diagram of a conventional multilayer ceramic component laminating apparatus (second example).
[Explanation of symbols]
1, 80 Ceramic sheet film
1a, 80a Ceramic sheet
1b, 80b Carrier film
10 Ceramic sheet film supply / conveyance unit
11, 81 Supply mechanism
12, 13, 15, 16, 18, 19, 20, 21, 22, 24, 29, 82 transport mechanism (guide roller)
14 First tension adjustment mechanism
14a First slide member
14b First guide member
14c First actuator
14d first movable roller
14e First position sensor
17 Feed roller mechanism
17a, 26b, 34j, 34p, 36p, 56 Slide member
17b, 26c, 34k, 36n, 55 Guide member
17c, 26f, 34q, 39 Actuator
17d movable roller
23 Second tension adjustment mechanism
23a Second slide member
23b Second guide member
23c Second actuator
23d second movable roller
23e Second position sensor
25, 83 Winding mechanism
26 Peeling mechanism
26a peeling table
26d, 33, 85 Adsorption mechanism
26e acute angle end
27, 35 Monitoring mechanism (CCD camera)
28 First film locking mechanism
28a, 29a Locking member
29 Second film locking mechanism
30 Laminated temporary press unit
30a, 30b, 30c, 30d 1st, 2nd, 3rd, 4th side
31 Stacking mechanism
31a Laminated head
31b Rod member
31c Board member
31d, 39a Tip member
31e, 31h, 31i Shaft member
31f Link member
31g Support member
32 Alignment mechanism
32a top table
32b base
32c1, 32c2, 32c3 X1-axis, X2-axis, Y-axis cross linear guide
32d1, 32d2, 32d3 X1-axis, X2-axis, Y-axis cross roller ring
32d4 4th cross roller ring
32e Linear slide mechanism
32f Hollow part
34 Cutting mechanism
34a, 86 Cutter
34b Followed timing pulley
34c Drive timing pulley
34d Drive timing belt
34e Followed timing belt
34f Cutter arm
34g Cutter frame
34h Link mechanism
34i biasing member
34m cutter shaft
34r push-down member
36 Temporary press mechanism
36a, 52 Press head
36b Screw drive mechanism
36c Screw member
36e, 37b, 37c, 37d Bearing member
36f Screw member locking mechanism
36g nut member
36h Power transmission member
36i Power reduction member
36j first motor
36k temporary press frame
36k1 frame top plate
36m second motor
37 Prop member
37a Lower end surface
38 Roller members
38a Roller mounting member
40 Vacuum generation unit
50 press unit
50a Fluid pressure unit
51 Press pedestal
51a, 52a heater and vacuum suction mechanism
52b Sealing mechanism
53 Fluid pressure cylinder
53a Cylinder rod
54 Frame base
55 Guide member
57 Cylinder mounting member
58 Fixing member
59 Cover
60 Operation control unit
61 Control panel
62 Operation panel
70 Cover sheet supply unit
84 Transfer mechanism
87 Adsorption / cutting machine
88 Press machine
89 Peeling stand
M1, M2, M3 X1-axis, X2-axis, Y-axis motors
P1 First stop position (standby position)
P2 Second stop position (stacking position)

Claims (7)

A supply mechanism and a first transport mechanism for continuously supplying and transporting a ceramic sheet film in which a conductor pattern serving as an internal electrode is printed on the surface of a continuous band-shaped carrier film;
It is disposed on the back surface side of the conveyed ceramic sheet film, and has an adsorption mechanism that adsorbs the back surface side of the ceramic sheet film on the upper surface, and has an acute angle end portion formed at an appropriate acute angle at the tip upper portion, A peeling mechanism comprising a peeling table that holds the back side of the ceramic sheet film and moves freely between a first stop position that is a standby position and a second stop position that is a predetermined ceramic sheet lamination position;
A laminating mechanism that is disposed near the front of the first stop position and includes a stacking mechanism that includes a suction mechanism that sucks the ceramic sheet on a lower surface; and a cutting mechanism that cuts the ceramic sheet around the stacking head; ,
A temporary press mechanism provided with a press head that is disposed directly opposite to the laminated head, incorporates a heater at the top, and thermocompresses the laminated ceramic sheets by pressing against the laminated head;
And a second conveying mechanism and the winding mechanism to take continuously transported and wound in a direction of pressing the sharp end of the separator table carrier film ceramic sheet is cut peeled from the release mechanism,
The first stop position of the peeling table is a position where the tip of the acute angle end is in front of the stacking head, and the second stop position is a position where the tip of the acute angle end is passed through the lower surface of the stacking head ,
The supply mechanism and the first transport mechanism are
A supply mechanism provided with a supply roller for attaching the ceramic sheet film wound in a roll shape and sequentially feeding and supplying the ceramic sheet film driven by an actuator;
A first transport mechanism comprising a plurality of guide rollers for guiding and transporting the ceramic sheet film supplied from the supply mechanism;
A first tension adjusting mechanism which is provided in the middle of the first transport mechanism and maintains an appropriate tension of the ceramic sheet film;
The ceramic sheet film is provided in front of the peeling table, and is configured to move forward and backward in the advancing / retreating direction of the peeling table in response to the advance / retreat operation of the peeling table. The ceramic sheet film is continuously advanced or stopped relative to the peeling table. A feed roller mechanism for supplying
The second transport mechanism and the winding mechanism are
A second transport mechanism comprising a plurality of guide rollers disposed below the peeling mechanism and guiding and transporting the carrier film from which the ceramic sheet has been cut and peeled from the peeling mechanism;
At least one film locking mechanism provided adjacent to the second transport mechanism and locking the carrier film;
A second tension adjusting mechanism which is provided in the middle of the second transport mechanism and maintains an appropriate tension of the carrier film;
And a winding mechanism having a winding roller for finally winding the carrier film driven by the actuator and transported by the second transport mechanism . The feed roller mechanism is
A slide member coupled to an actuator and configured to move in a reciprocating manner in accordance with the advancing and retreating operation of the peeling table in the moving direction of the peeling table;
A movable roller attached to the slide member and transporting the ceramic sheet film substantially in line with the upper surface of the peeling table;
2. The multilayer ceramic component laminating apparatus according to claim 1, wherein the movable roller is configured to move forward and backward so that the movable roller always rotates or stops in a direction to advance the ceramic sheet film. The first tension adjustment mechanism includes:
The ceramic sheet film is attached to a first slide member that is connected to a first actuator for maintaining the tension of the ceramic sheet at an appropriate constant force so as to move forward and backward in the operating direction of the first actuator, and transports the ceramic sheet film. 1 movable roller,
The second tension adjusting mechanism includes:
A second movable member that is connected to a second actuator that is connected to a second actuator for maintaining the tension of the carrier film at an appropriate constant force and moves in a movable manner in the operating direction of the second actuator, and that conveys the carrier film. 2. The multilayer ceramic component laminating apparatus according to claim 1, further comprising a roller. The stacking head of the stacking mechanism is
A strut having a hollow structure, which is disposed between the frame top plate on the top of the temporary press frame that forms the outer frame of the temporary press mechanism and supports the pressing reaction force, and the laminated head, and is suspended from the lower surface of the frame top plate. Members,
A rod member that is inserted through the frame top plate and the column member, and is movable in an up-and-down direction by an actuator connected to an upper end thereof;
A rod member fixed to the lower end of the rod member and disposed below the plurality of roller members provided around the upper end of the stacking head and rotatably supported by a plate member serving as a rolling surface of the roller. ,
The upper end portion of the laminating head, wherein the A Raimento mechanism which is fixed to the lower surface of the frame top plate has a hollow portion in which the upper end of the strut member is inserted telescopically constructed plurality of linear slide vertically Engaged with the mechanism,
2. The multilayer ceramic component stacking apparatus according to claim 1, wherein when the multilayer head is retracted upward, an upper surface of the multilayer head is in contact with a lower end surface of the support member. The drive mechanism for driving the press head of the temporary press mechanism is:
A high-speed drive mechanism that moves at high speed when the press head moves forward and backward,
A slow drive mechanism that moves at a slow speed during final pressing,
2. The multilayer ceramic component laminating apparatus according to claim 1, wherein the speed is controlled to at least two stages of the high speed and the slow speed movement. The drive mechanism of the press head is:
A power transmission member rotatably connected via a bearing member to a lower portion of the press head guided by a guide member fixed to the temporary press frame and connected to a slide member which is movable up and down; and the power transmission A screw drive mechanism comprising a nut member fixed to the lower part of the member and a screw member engaged with the nut member, a first motor connected to the lower end of the screw member and rotating the screw member ; A high-speed drive mechanism consisting of
A second motor that is coupled to a power reduction member that engages with the power transmission member and that rotationally drives the nut member, and a screw that is fixed to a temporary press frame above the first motor and that rotationally locks the screw member with a very slow speed drive mechanism comprising a member locking mechanism, and
By stopping the second motor, the first motor is operated in a state where the nut member is locked to rotate the screw member to advance and retract the press head at a high speed. At the time of the final press, the first motor is stopped simultaneously. 2. The press head according to claim 1, wherein the second motor is operated in a state in which the screw member locking mechanism is operated to lock the screw member, and the nut member is rotated to advance the press head slightly . Multilayer ceramic component laminating equipment. In the lamination | stacking method of the lamination | stacking ceramic component which laminates | stacks the ceramic sheet which printed and formed the conductor pattern using the lamination | stacking apparatus of the lamination | stacking ceramic component of the said Claim 1 thru | or 6, and thermocompression-bonds to form a ceramic laminated body. ,
A supply and transfer step of continuously supplying and transferring the ceramic sheet film while maintaining appropriate tension adjustment by the supply mechanism and the first transfer mechanism;
A forward step in which the back side of the ceramic sheet film is adsorbed and held by the peeling mechanism and moved to the laminating position;
During said advancing step, an alignment step for position correction of the displacement amount of the ceramic sheet was confirmed by images processing mechanism by A Raimento mechanism,
After the advance step, the laminating mechanism descends onto the ceramic sheet film and adsorbs the ceramic sheet on the surface of the ceramic sheet film, and at the same time the adsorption of the peeling mechanism is released, and the cutting mechanism descends to A cutting process for cutting the periphery of the ceramic sheet;
After the cutting step, the cutting mechanism is raised and at the same time the carrier film is locked by the film locking mechanism, the peeling mechanism is retracted to the standby position, and accordingly the ceramic on the surface of the ceramic sheet film A peeling step in which the sheet is peeled;
After the peeling step is completed, the film locking mechanism is released, the laminating mechanism that adsorbs the ceramic sheet rises, and the alignment step with the alignment mechanism returns to the origin position;
After the evacuation process, the temporary press mechanism heated by the heater is raised at a high speed by the temporary press drive mechanism, and at the same time the ceramic sheet starts pressing, the temporary press mechanism rises at a very low speed to perform the final press, and the ceramic anda provisional pressing step of thermocompression bonding the sheet,
By performing the above-mentioned process a predetermined number of times, a predetermined number of laminated ceramic sheets are placed at a predetermined temporary pressing force in a state where a predetermined number of laminated conductor patterns are sandwiched between cover sheets on which printing is not formed. A method for laminating laminated ceramic parts, characterized in that a ceramic laminated body is formed by thermocompression bonding using a method.

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