JP4652793B2 - Method and apparatus for processing flat materials in continuous equipment - Google Patents

Abstract

The transport and treatment method has the circuit boards or conductor foils (1) transported horizontally, with an electrolyte flow (8) through the transport plane, for acting on both sides of the circuit boards or conductor foils. The electrolyte flow is provided by openings in electrolyte spray pipes (10) positioned in mirror symmetry to the transported circuit boards or conductor foils and assists the transport of the latter in the transport direction (3). - An INDEPENDENT CLAIM for a transport and treatment device for circuit boards and conductor foils is also included.

Description

  The present invention relates to transporting and processing flat materials in horizontal transport continuous equipment.

  The present invention is preferably used for wet chemical treatment or electrolytic treatment of circuit boards and circuit foils. In circuit board technology, these treatments include, for example, surface cleaning and etching, removal of shavings from holes, interlayer connection of holes, reinforcement of conductive films and patterns by electrolytic treatment, development of conductive paths, peeling and etching, It relates to surface oxidation and reduction and other processes. The fine circuit board has a smaller structure and hole size. The circuit board and the circuit foil are transported through the continuous equipment by transport rollers and contact rollers. At this time, it is very important that thorough mass exchange (Stoffaustausch) is performed even in a small hole provided in the material. This is done by applying an electrolyte to the surface. In the fine substrate technology, these holes and patterns are smaller. These dimensions are 25 μm or less, but the electrolyte flow must be more strongly applied to achieve the necessary mass exchange.

  It is more difficult to transport a very flexible circuit foil having a thickness of 50 μm or less. That is, when the electrolyte is applied to the surface, the circuit foil may deviate from the transport track. At this time, the surface rubs the guide member, and in the worst case, the conveyance is stagnated. However, to achieve mass exchange in the holes in circuit boards produced in the same continuous facility, it is necessary to apply an electrolyte flow to the material.

  Patent Document 1 discloses an invention relating to electrolytic treatment of a circuit board having holes and blind holes. The present invention can also be applied to wet chemical processing methods. The material is passed beside the nozzle that periodically changes the injection direction. In order to make full use of the spraying action, the distance between the nozzle and the surface must be small. The nozzle is brought close to the surface to a minimum of 1 mm. There is also a problem with the 5 mm spacing that is preferably used. On the one hand, if the distance is so close, the material to be wet-treated, especially the foil, may hit each nozzle pipe, and on the other hand, the pipe will draw a circular trajectory with a different distance from the material when turning. In the electrolytic treatment of the material, the swivelable nozzle pipe is outside the electrolytic treatment tank constituted by the electrode and the material. The electrode therefore requires insulation to avoid short circuits. This is particularly necessary when processing circuit foils. The electrolyte flow can cause the material trajectory to deviate from the transport trajectory. This is particularly noticeable when the turning direction is opposite to the conveying direction. Also, because of the high cost, only a small number of nozzle pipes can be realized along the transport track.

  Patent Document 2 discloses an invention related to electrolytic treatment of a circuit board having holes. An electrolyte spray tube having a hole or nozzle is disposed outside the electrolytic treatment tank. The electrolyte flows through the holes in the anode to the surface and reaches the holes in the material. These electrolyte streams can deviate the circuit foil from the transport track very easily. Therefore, the present invention is suitable only for processing circuit boards.

  For example, in wet chemical treatment or electrolytic treatment of a circuit board having a thickness of 0.2 mm or more, importance is placed on material exchange in the through hole and the blind hole. Patent Document 3 discloses an apparatus and a method for performing wet chemical treatment on a circuit board under a liquid level in a continuous facility for conveying materials horizontally. Patent Document 4 discloses an apparatus and method for wet-chemical treatment of a circuit board under a liquid level in a continuous facility for conveying a material in a horizontal direction. The electrolyte flows out from the nozzle pipe arranged in the direction transverse to the conveying direction and is dammed by the conveying roller. The nozzle pipe and the conveyance roller are arranged so as to be shifted in the conveyance direction between the upper side and the lower side of the material. This causes the electrolyte flowing along the surface to produce different static and dynamic pressures on both sides of the material in the area of the nozzle pipe. Therefore, according to Bernoulli's principle, the electrolyte flows from the side where the static pressure is large through the through hole toward the direction where the pressure is low. A low static pressure exists where the electrolyte flows along the material surface at a rate greater than the flow rate across the material. As a result, very good material exchange takes place in the through-holes. Therefore, the present invention is suitable for processing circuit boards. On the other hand, circuit boards and multilayer boards that have very small through holes or blind holes and require thorough material exchange are increasingly used. In the case of blind holes, Bernoulli's principle does not contribute to mass exchange. This is because the difference in pressure on both sides of the material cannot be effective. Therefore, this invention has little effect on the treatment of blind holes.

German Patent No. 10044209 (DE10044209A1) German Patent No. 197175512 (DE19717512C3) German Patent No. 19718769 (DE197178769A1) German Patent No. 1951211 (DE19519211A1)

  An object of the present invention is to provide a method and apparatus that can reliably transport a thick circuit board having a through hole and a blind hole and an extremely thin circuit foil having a hole without reorganization in a continuous facility. It is to be. In addition, through holes and blind holes are exposed to thorough mass exchange.

In order to solve the above-described problems, in the first invention, a flat material, preferably circuit foil and a circuit board are transported in an electrolyte in a continuous facility of wet chemical processing and / or electrolytic processing for transporting a material in a horizontal direction. in and processing method for, through at least a first electrolyte flow the material in the transport plane, said at least a first electrolyte flow of the material in the upper and lower sides, the first of a row provided in the electrolyte spray pipes It flows out mirror-symmetrically from the hole toward the material, the action of the force applied to the material is almost offset, and at least the first electrolyte flow outflow direction is directed to the transport direction to support the transport ,
At least the first electrolyte flow flows out from some openings of the electrolyte spray tubes arranged in pairs, the openings face each other on the upper side and the lower side, and the electrolyte is alternately applied to the surfaces on both sides. The local range where the static pressure is low and the local range where the static pressure is high are created to face each other. Thus, the force applied to the material is canceled out, so that the circuit foil is reliably guided in the transport track .
According to a second invention, in the first invention, the electrolyte spray tubes on both sides have at least one other row of openings, and the second electrolyte flow from these openings is the angle of the opening of the first row. The amount and flow rate of the electrolyte that flows out at an angle β different from α and this second electrolyte flow can be changed independently of the first electrolyte flow in the first row and can be adapted to the requirements of the material .
According to a third invention, in the first invention or the second invention, support for transporting the material through the first electrolyte flow is performed on both sides of the material, and the first electrolyte flow is transported from the electrolyte spray tube to the transport plane. Outflow at an angle α of 5 ° to 60 ° with reference to.
In a fourth invention, in any one of the first to third inventions, mass exchange is performed in a blind hole by a second electrolyte flow on both sides of the material, and the second electrolyte flow is discharged from the electrolyte spray tube. It flows out at an angle β of 60 ° to 90 ° with respect to the transport plane.
According to a fifth invention, in any one of the first to fourth inventions, the flow rate and flow velocity of the first electrolyte flow and the second electrolyte flow can be adjusted independently of each other, so that the need for materials can be met. Can be adapted.
According to a sixth invention, in any one of the first to fifth inventions, the first electrolyte flow and the second electrolyte flow flow out from one constituent member by arranging “inner tube” which requires less space. By doing so, the duration of processing of the material along the conveying section is increased.
In a seventh invention, in any one of the first to sixth inventions, the material is conveyed by a conveying roller and / or a contact roller.
In an eighth invention according to any one of the first to seventh inventions, the material is electrically contacted by a contact roller, a contact pulley or a clamp during the electrolytic treatment.
In a ninth invention, in any one of the first to eighth inventions, the electrolytic treatment of the material is performed with a soluble anode or an insoluble anode.

According to a tenth aspect of the present invention, there is provided an apparatus for carrying out the method according to any one of the first to ninth aspects of the present invention, which is a continuous facility for wet chemical treatment and / or electrolytic treatment for conveying material in the horizontal direction. A flat material, preferably a circuit foil and a circuit board adapted to transport and process in an electrolyte, the electrolyte spray tubes being paired and oriented transversely to the material transport direction, The upper and lower sides of each of the openings have a row of openings, and the directions of these openings are such that at least the first electrolyte flow of both electrolyte spray tubes flows out mirror-symmetrically in the transport direction at an angle α. The action of forces applied to at least the first electrolyte flow material of equal magnitude on both sides can be offset.
In the first aspect of the invention, in the invention of the first 0, the electrolyte spray tube has a second opening in a row, the outflow angle β of the second electrolyte stream, outflow angle of the first electrolyte stream Different from α.
In the first 2 of the invention, the first 0 or the first aspect of the invention, a first opening provided at intervals in the electrolyte spray tract, with the upper and lower sides by half the spacing of the openings, respectively A local range having a low static pressure and a local range having a high static pressure are alternately formed on the surface.
In the invention of the first 3, in any one invention of the first 0-first 2, the angle of the first electrolyte stream α is a 5 ° to 60 ° to the surface of the material as a reference.
In the invention of the first 4, in any one invention of the first 0-first 3, the range of the second electrolyte stream (11) of the angle β is based on the surface of the material 70 ° to 90 ° is there.
In the invention of the first 5, in any one invention of the first 0-first 4, the electrolyte spray pipes have a structure "tube in a tube", the outer tube of the first opening row And a second row of openings is arranged in the small inner tube, and the second opening simultaneously penetrates the wall of the outer tube.
In the invention of the first 6, in any one invention of the first 0-first 5, pumps, valves, flaps, slides and the baffle plate is provided as means for influencing individually to the electrolyte flow of the electrolyte ing.
In the invention of the first 7, in any one invention of the first 0-first 6, characterized by transport rollers and / or contact rollers for conveying the material.
In the invention of the first 8, in any one invention of the first 0-first 7, characterized by contact rollers, conveyor pulleys or clamp for electrical contact with the material.
In the nineteenth invention, in any one invention of the first 0-first 8, having a soluble anode or insoluble anode in the electrolytic process continuous equipment.
In the invention of the second 0, in any one invention of the first 0-19, an electrolyte spray pipes for the first electrolyte flow between the electrolyte spray pipes for the second electrolyte stream disposed to now separated Features a pair.

  In the present invention, conveying the material through the continuous equipment is performed by a conveying roller and possibly a contact roller. The material to be processed may be a circuit board or a very flexible circuit foil. According to the present invention, these two types of materials are treated with various electrolyte streams, and for that purpose it is not necessary to change the organization of the continuous equipment.

  The electrolyte flow that strikes both sides of the material diagonally in the conveying direction is applied to the circuit foil. These flows strike the surface mirror-symmetrically on the upper and lower sides of the material, so that the forces generated by the flows are cancelled. In this way, the material remains in the transport plane. By selecting the direction of flow as the transport direction, the transport of thin circuit foils is additionally supported. As a result, a very thin circuit foil can be transported reliably.

  Relatively thick circuit foils and circuit boards usually also have very small blind holes. The mass exchange of these pores is achieved by another electrolyte flow of the present invention. The electrolyte also flows from the spray tube arranged transversely to the material transport direction to the surface of the material in a substantially perpendicular flow direction. The electrolyte flow that is mirror-imaged at a predetermined angle on the upper side of the material is slightly offset in the transport direction with respect to the electrolyte flow on the lower side of the material. The centers of these electrolyte streams do not coincide with each other. Thereby, material exchange is additionally performed in the blind hole. This material flow is preferentially introduced because of the relatively thick circuit foil with blind holes or the material flow may be off the transport track, especially when the flow rate and / or flow rate of the vertical electrolyte flow is high. Only when circuit boards are manufactured. It is possible to throttle the electrolyte flow or otherwise modify it to meet the requirements given by the material. In the case of a thin circuit foil, there are virtually no blind holes. The boundary is approximately 100 μm thick. Below that, no vertical electrolyte flow is required, or only a relatively small flow rate is required.

  Especially for the second electrolyte flow, which is almost perpendicular to the material, the volume flow can be made variable by providing an adjustable pump, choke, baffle plate or flap in the electrolyte circulation, which can be adapted to the thickness of the material. it can.

  According to the present invention, the substance exchange in the through hole can be realized by further applying the Bernoulli principle. Below the surface of the liquid is an electrolyte spray tube in the vicinity of both sides of the material and transverse to the transport direction. The electrolyte flows out of these spray tubes obliquely in the conveying direction and flows along the surface. Since the flow rate of the electrolyte is different on both sides of the material, different static pressures are generated, causing flow of through holes provided in the circuit board. In the case of thin circuit foils, this pressure difference will cause the circuit foils to deflect from the transport track. Therefore, in the present invention, the pressure difference on both sides of the material is locally limited and alternated in the transverse direction with respect to the conveying direction in a small area range on the upper and lower sides. By doing so, the force acting on the entire circuit foil is canceled by the flow, and the circuit foil cannot be deflected from the transport track. As the electrolyte flows out of the electrolyte spray tube obliquely in the transport direction in a mirror image symmetry with respect to the transport plane, the transport of the circuit foil is additionally supported. This ensures that the circuit foil remains in the transport plane. Bernoulli's principle is maintained because the different static pressures in the electrolyte alternate locally on both sides of the material. This is very important for material exchange in the through-hole when the same processing as that for the circuit foil is performed in the same continuous equipment even if the thickness of the material gradually increases.

  In the following, the present invention will be described in detail with reference to conceptual FIGS.

  In FIG. 1, a material 1 to be processed is fed in a transport direction 3 by a driven transport roller 2 having a shaft 4. Increasingly, thin materials and ultrathin materials are also subjected to wet chemical treatment and / or electrolytic treatment. The thickness d of these circuit foils is 50 μm or less in the circuit board technology. If the core of the circuit foil is made of polyamide, for example, the circuit foil is particularly flexible and the surface is very sensitive. This makes it extremely difficult to transport through wet chemical processing equipment. In addition, the circuit foil may be deviated from the transport track due to the electrolyte flow, leading to a stagnation of the transport. According to the present invention, the circuit foil is reliably conveyed by guiding the material 1 in the conveying plane 17. This is achieved by the fact that the first electrolyte flow 8 of equal size is directed mirror-symmetrically with respect to the surface of the material on the upper side 6 and the lower side 7 of the conveying plane 17. The direction of the electrolyte flow 8 is in the transport direction 3. A thin circuit foil is also guided in the transport plane by precisely adjusting the first electrolyte flow 8 from both sides at an angle α and obliquely hitting the material 1. These first electrolyte flows 8 are caused to flow out from an electrolyte spray tube 10 arranged in a pair with respect to the transport plane. The electrolyte spray tube 10 includes openings 9 arranged in a row inside. The opening 9 may be a hole or a nozzle, for example. The electrolyte spray tube 10 extends on both sides of the transport plane 17 at least over the entire width of the material in a direction transverse to the transport direction. In circulation, the electrolyte passes through the electrolyte spray tube 10 by a pump (not shown), is filled in a working container (not shown), and is sent from there to a pump sump.

  The forces caused by the electrolyte flow 8 on both sides of the material 1 are almost offset each other. By directing the electrolyte flow direction at an angle α in the transport direction, the material is additionally assisted during transport. The angle α is 5 ° to 60 °, preferably 15 ° with respect to the surface of the material.

  The conveying roller 2 is supported on the upper side 6 so that it can adapt to the thickness d of the material 1 against the acting force F. The transport roller on the lower side 7 of the material is supported so as to fixedly specify the transport plane. The force F is expediently applied by a spring force or a weight. This force can also be made adjustable. Generally, as the thickness of the circuit board increases, a greater force F is required. In order to make it easy to see, the interval between the conveying rollers 2 in the conveying direction 3 is shown large in FIGS. The transport roller 2 and the electrolyte spray tube 10 can be arranged in a different order.

  The arrangement of FIG. 2 assists in processing a circuit board having blind holes. This material is also transported by the driven transport roller 2 having the shaft 4. The second electrolyte flow 11 flows out from the second openings 12 arranged in a row through the electrolyte spray tube 10, causing a thorough mass exchange even in the blind holes. The opening 12 is guided through the walls of the inner spray tube 13 and the outer spray tube 10. The outflow angle β of the second electrolyte stream 11 is significantly different from the outflow angle α. The outflow angle β is 60 ° to 90 °, preferably 80 °. If the outflow angle β is smaller than 90 °, the second electrolyte flow 11 is also directed in the conveying direction of the material 1. This second electrolyte stream 11 is supplied by the same electrolyte spray tube 10 as the first electrolyte stream 8. This inexpensive configuration is suitable for processing blind circuit boards that do not deviate from the transport track by the second electrolyte flow 11 due to their large thickness. This also applies to the case where the second electrolyte flow 11 is slightly displaced in the conveying direction between the upper side 6 and the lower side 7 of the material 1 as shown in FIG. This misalignment causes additional through-flow of the through hole and maintains mass exchange within the blind hole. However, for very sensitive thin circuit foils, the second electrolyte flow 11 has been found to be an obstacle. If the flow is strong, the conveyance stability of the circuit foil is impaired, and if the flow is weak, the material exchange in the blind holes of the circuit board processed by the same continuous equipment is insufficient. Therefore, both electrolyte streams 8, 11 are supplied from two electrolyte spray tubes, preferably by an electrolyte circulation that can be adjusted independently of each other. The two electrolyte spray tubes can also be arranged one after the other on both sides of the material in the conveying direction 3. In order to shorten the length of the equipment or to speed up the processing time, it is preferable to select an “in-tube” structure that requires less space for incorporation into the equipment. Square tubes may be assembled nested together. It is also possible to form two electrolyte circulations in one component by milling, gluing or extruding.

  The electrolyte flows 8, 11 in the electrolyte spray tube 10 and the inner spray tube 13 can be adjusted independently of each other. This is true for volumetric flow and flow rates. Particularly in the case of a very thin circuit foil having a thickness d of 50 μm or less, for example, the second electrolyte flow can be completely interrupted. With this configuration, it is possible to process ultrathin circuit foils and circuit boards in succession without rearranging the equipment in one continuous facility. The required strength of the electrolyte streams 8, 11 can be adjusted by controlling an electrolyte pump and valves not shown.

  For example, in a circuit board having a thickness of 1.6 mm or more, especially when the hole diameter is less than 0.2 mm, for example, even if the second electrolyte flow is introduced, the duration of the through-hole in the continuous treatment is continued. I found out that it was insufficient. In order to maintain a longer processing time for material exchange in the pores, the number of electrolyte spray tubes would have to be increased as viewed in the transport direction. In order to avoid this equipment technical cost, in another configuration of the present invention, the first electrolyte flow 8 has a through-hole in the material over the longer section of the equipment without increasing the number of electrolyte spray tubes. It is formed to flow through. This is done by applying Bernoulli's principle. As a result of the difference in electrolyte pressure between the upper side 6 and the lower side 7 of the material 1, the holes can flow through. The electrolyte flows through these holes from the side with the higher static pressure to the side with the lower static pressure. If there is such a pressure difference on both sides of the material, the thin circuit foil will also be displaced from the transport track. As a result, the circuit foil will stagnate again. For this reason, according to the present invention, when the different pressures on the upper side 6 and the lower side 7 of the material are adjusted to face each other and alternate locally, the forces acting on the circuit foil cancel each other. The material is subsequently guided in the transport plane.

  FIG. 3 shows a configuration for forming a local pressure difference. Electrolyte spray tubes with an inner spray tube or electrolyte spray tubes without an inner spray tube are arranged in pairs on both sides of the transport plane 17. Openings are provided in the electrolyte spray tube at intervals. The first opening 9 of the electrolyte spray tube 10 on the upper side 6 is offset from the first opening 9 on the lower side 7 by half the distance between the openings. Thereby, on both sides, different ranges of the electrolyte flow rate are alternately generated along the surface of the material 1. The electrolyte quickly flows out from the opening 9 of the electrolyte spray tube 10, thereby creating a low static pressure range 14 on the surface of the material in the immediate vicinity of the opening 9 having a high dynamic pressure. On the other hand, the flow velocity is small between the openings 9. Here, a range in which the dynamic pressure is small and the static pressure is large occurs. These ranges alternate in the transverse direction with respect to the transport direction. By shifting the opening 9 in the electrolyte spray tube 10 on the sides facing each other, the pressure range is also shifted alternately. Thereby, in the range of the first electrolyte flow 8 on both sides of the material, one locally high static pressure and one small static pressure face each other. Local pressure differences cause through-hole flow through a larger conveying section, and therefore also longer and more effective mass exchange. It is possible to combine the use of Bernoulli's principle locally and alternately with the second electrolyte flow 11 which is particularly effective in blind holes. An inner spray tube 13 may be used for this purpose. The material is transported by the driven transport roller 2 supported by the shaft 4.

  FIG. 4 shows a side view of a continuous facility for electrolytic treatment to which the present invention is applied. The electrolytic treatment is, for example, reinforcement of interlayer connection and / or conductor pattern formation by electrolytic treatment. Even in these electrolysis processes, the mass exchange in the pores and blind holes determines the economics of the process. The greater the mass exchange, the greater the current density used. In electroplating, an attempt is made to increase the length of the active region, that is, the length of the anode in the transport direction, based on the length of the continuous equipment. Therefore, an “in-tube” structure is particularly suitable here. This configuration is suitable for both circuit foils and circuit boards. The first mirror-symmetric electrolytic flow 8 also holds the thin circuit foil in the transport track under the anode 16. This eliminates other insulating materials that may contact and damage the surface of the material in some cases. The anode 16 can be a soluble anode or an insoluble anode. The conveying roller 2 functions to transmit a current to the material 1 as a contact roller partially or entirely at the same time. Other types of contact methods such as terminals and contact wheels can also be used.

  In order to reliably guide very thin circuit foils in particular, it is advantageous in all configurations of the invention if the respective hydraulic conditions on the upper side 6 and the lower side 7 of the material 1 are exactly equal. This can be realized very inexpensively by connecting the electrolyte spray tubes 10 arranged in pairs on the upper side 6 and the lower side 7 of the material 1 to a common electrolyte circulation. At least a pair of electrolyte spray tubes 10 are connected to one circulation, that is, one electrolyte pump. This measure ensures uniform hydraulic conditions in the electrolyte spray tube. The same applies to the pair of inner spray tubes 13. These tubes on the upper side 6 and the lower side 7 are connected to another common electrolyte circulation.

  In a continuous facility that processes only one product in a row, only one common electrolyte circulation is sufficient to reliably transport the circuit foil. In this case, the electrolyte streams 8, 11 are fixedly adjusted, for example, by pumps, valves, flaps or baffle plates.

  In the above description, the treatment liquid used for each process is generally called an electrolyte. In wet chemical treatment and electrolytic treatment, the material must be cleaned to prevent the introduction of process liquids when moving from one process to the next. Even in this cleaning process, material exchange in the pores and blind holes is very important. The invention therefore also relates to such a process below the liquid level, ie a washing bath in a continuous installation.

  In the description of the present invention, for convenience, various thicknesses d are assumed when characterizing the material. This is because the thickness can be measured very easily practically. When describing circuit boards, circuit foils, and very thin circuit foils, it is assumed that thin materials are more flexible than thick materials. This is also practically applicable.

  In order to ensure that the material is transported through the continuous equipment, the flexibility or stiffness of the flat material is critical. It should be pointed out that even substrates or foils of equal thickness can have different stiffnesses. For example, when the thickness of the core made of a single plastic is reduced and the thickness of copper coated thereon is increased, the circuit foil increases in rigidity even if the thickness d remains constant.

  The present invention is suitable for all kinds of materials that are actually used in circuit board technology. The following example shows this. The present invention is also suitable for wet chemical and electrolytic treatment of other flat materials used in horizontal continuous equipment such as solar cells.

  For example, in a circuit board having a thickness of 2.4 mm and a through hole diameter of 0.3 mm, wet chemical treatment and / or electrolytic treatment requires thorough material exchange in the holes. The same applies to blind holes provided in these substrates. This mass exchange is achieved very well by the present invention. For a circuit foil having a thickness of, for example, 50 μm, the ratio of the hole diameter to the depth is about 1: 1. Therefore, it is not necessary to apply a strong electrolyte flow for mass exchange in the pores. Therefore, it is advantageous that the processing of the circuit foil is performed without flowing the electrolyte vertically. The very thin circuit foil is prevented from deviating from the transport plane by accurately applying the electrolyte flow from the electrolyte spray tubes on both sides arranged in pairs to the circuit foil with equal strength. This electrolyte flow is applied at an angle which is clearly different from 90 ° with respect to the transport plane, and the flow direction is in the direction of transport of the material. At the same time, the upper and lower electrolyte flow forces cancel each other.

It is a side view of the conveyance roller provided with the electrolyte spray tube for the wet chemical processing of material, and conveyance support of circuit foil. FIG. 6 is a side view of another electrolyte flow for processing a circuit board having blind holes and through holes. It is sectional drawing of the wet chemical processing equipment seen in the conveyance direction of material, and the side view of the local electrolyte flow which alternates in the both sides of material. It is a side view of the electrolysis equipment for processing circuit foil and a circuit board.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Material, circuit board, circuit foil 2 Conveyance roller, contact roller 3 Conveyance direction 4 Axis 5 Arrow which shows direction of force 6 Upper side 7 Lower side 8 1st electrolyte flow 9 1st opening part 10 Electrolyte spray pipe 11 2nd Electrolyte flow 12 Second opening 13 Inner spray tube 14 Low static pressure range 15 High static pressure range 16 Anode 17 Conveying plane

Claims (20)

In a method of transporting and processing flat materials, preferably circuit foils and circuit boards, in an electrolyte, in a wet chemical processing and / or electrolytic processing continuous facility that transports the material horizontally.
At least a first electrolyte stream in the conveying plane the material passed through (8), said at least a first electrolyte stream (8) of the material in the upper and the lower side, a row provided in the electrolyte spray pipes (10) Flowing mirror-symmetrically from the first hole (9) toward the material, the action of the force on the material is substantially offset, and at least the direction of flow of the first electrolyte flow (8) is to assist in transport. Facing the transport direction ,
At least the first electrolyte flow (8) flows out of some openings (9) of the electrolyte spray tubes arranged in pairs, and the openings (9) face each other on the upper side and the lower side. In addition, a local range in which the static pressure in the electrolyte is alternately low and a local range in which the static pressure is high are alternately generated on the surfaces on both sides, and these ranges flow through the pores provided in the material. And at the same time canceling out the force applied to the material due to the flow, thereby ensuring that the circuit foil is also guided in the transport track . The electrolyte spray tubes (10) on both sides each have at least one other row of openings (12) from which the second electrolyte flow is at the angle of the opening (9) in the first row. It flows at different angles β and alpha, further flow rate and flow velocity of the second electrolyte stream (11) may be changed independently of the first electrolyte stream of the first column (8), adapted to the material requirements of The method according to claim 1, wherein: Support for transport of the material through the first electrolyte stream (8) is provided on both sides of the material, and the first electrolyte stream (8) is angled from 5 ° to 60 ° with respect to the transport plane from the electrolyte spray tube. The method according to claim 1 or 2, wherein the effluent flows at α. Mass exchange takes place in the blind hole by the second electrolyte flow (11) on both sides of the material, and the second electrolyte flow (11) is at an angle of 60 ° to 90 ° with respect to the transport plane from the electrolyte spray tube. The method according to any one of claims 1 to 3, characterized in that it flows out with β. The flow rate and flow rate of the first electrolyte flow and the second electrolyte flow can be adjusted in strength independently of each other and can be adapted to the needs of the material. The method described. The “inner tube” arrangement, which requires less space, allows the first electrolyte flow and the second electrolyte flow to flow out of one component, thereby reducing the duration of material processing along the conveying section. 6. A method according to any one of claims 1 to 5, characterized in that it is enhanced. The method according to claim 1, wherein the material is conveyed by a conveying roller and / or a contact roller. The method according to claim 1, wherein the material is electrically contacted by a contact roller, a contact pulley or a clamp during the electrolytic treatment. 9. The method according to claim 1, wherein the electrolytic treatment of the material is carried out with a soluble anode or an insoluble anode. An apparatus for carrying out the method according to any one of claims 1 to 9, wherein the material is a flat material, preferably a continuous facility for wet chemical treatment and / or electrolytic treatment for conveying the material in the horizontal direction. In the circuit foil and circuit board that are transported and processed in the electrolyte,
The electrolyte spray tubes (10) are paired and oriented in the transverse direction with respect to the material transport direction, and are provided with a row of openings (9) on the upper and lower sides of the transport plane (17), respectively. Moreover, the orientation of these openings (9) is such that at least the first electrolyte flow (8) of both electrolyte spray tubes (10) flows out mirror-symmetrically in the transport direction at an angle α, and on both sides (6, 7). A device characterized in that the action of forces exerted on the material of at least the first electrolyte flow (8) of equal magnitude can be offset from each other. The electrolyte spray tube has a row of second openings (12), and the outflow angle β of the second electrolyte flow (11) is different from the outflow angle α of the first electrolyte flow (8). The apparatus of claim 10. The first openings (9) provided at intervals in the electrolyte spray tube face each other on the upper side (6) and the lower side (7) so as to be shifted from each other by half of the interval between the openings. 12. A device according to claim 10 or 11, characterized in that local areas with low static pressure and local areas (14, 15) with high static pressure are alternately formed on the surface. Device according to any one of claims 10 to 12, characterized in that the angle α of the first electrolyte stream (8) is between 5 ° and 60 ° with respect to the surface of the material. 14. The device according to claim 10, wherein the angle [beta] of the second electrolyte stream (11) is in the range of 70 [deg.] To 90 [deg.] With respect to the surface of the material. The electrolyte spray tube (10) has an “in-tube” configuration, a row of first openings (9) is disposed in the outer tube, and a second in the inner small tube (13). 15. A row of openings (12) of claim 10, wherein the second opening (12) penetrates the wall of the outer tube at the same time. The device described. 16. A pump, a valve, a flap, a slide and a baffle plate are provided as means for individually affecting the electrolyte flow (8, 11) of the electrolyte. The device described in 1. The apparatus according to claim 10, further comprising a transport roller and / or a contact roller for transporting the material. 18. A device according to any one of claims 10 to 17, comprising a contact roller, a transport pulley or a clamp for electrical contact of the material. The apparatus according to any one of claims 10 to 18, wherein the electrolytic treatment continuous equipment has a soluble anode or an insoluble anode. 20. An electrolyte spray tube for a first electrolyte stream (8) and a pair of an electrolyte spray tube for a second electrolyte stream (11) arranged separately therefrom. The apparatus according to claim 1.

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