JP4648232B2 - Failure analysis method and failure analysis system - Google Patents

Description

  The present invention relates to a failure analysis technique for performing failure analysis of electronic components and the like.

  High-yield manufacturing is required in the manufacture of electronic devices such as semiconductor devices such as semiconductor memories, microprocessors, semiconductor lasers, and magnetic heads typified by dynamic random access memory (DRAM).

  That is, a decrease in product yield due to the occurrence of defects causes a deterioration in profitability. For this reason, the early detection and early countermeasures of the defect, foreign material, and processing defect which cause a defect become a big subject. For example, in the manufacturing field of semiconductor devices, efforts are focused on finding defects by careful inspection and analyzing the cause of occurrence. In an actual electronic component manufacturing process using a wafer, the wafer in the middle of the process is inspected, and a countermeasure method is investigated by pursuing the cause of an abnormal portion such as a defect in a circuit pattern or a foreign substance.

  Usually, a high-resolution scanning electron microscope (hereinafter abbreviated as SEM) is used for observing the microstructure of a sample. However, as the integration of semiconductors increases, the object cannot be observed at the SEM resolution. Instead, a transmission electron microscope (hereinafter abbreviated as TEM) having higher observation resolution is used.

  Conventional TEM sample preparation involves a work of making a sample substrate into small pieces by cleavage or cutting, and when the sample substrate is a wafer, in most cases, the wafer has to be cleaved.

  Recently, an ion beam is irradiated onto a sample substrate, and a micro-region processing method that applies an action in which particles constituting the sample substrate are emitted from the sample substrate by sputtering, that is, focused ion beam (hereinafter abbreviated as FIB) processing. There is an example of using.

  First, using a dicing apparatus or the like, a strip-shaped pellet having a thickness of submillimeter including a region to be observed is cut out from a sample substrate such as a wafer. Next, a part of the strip-shaped pellet is processed into a thin wall shape by FIB to obtain a TEM sample. Here, the FIB-processed sample for TEM observation is characterized in that a part of the test piece is processed into a thin film having a thickness of about 100 nm for TEM observation. Although this method makes it possible to locate and observe a desired observation portion with micrometer level accuracy, the wafer must still be cleaved.

  As described above, monitoring the results of a certain process during the manufacture of semiconductor devices and the like has a great advantage in terms of yield management. However, in sample preparation as described above, the wafer is cleaved and the wafer fragments are the next. It is discarded without proceeding to the process. In particular, in recent years, the diameter of wafers has been increasing in order to reduce the manufacturing cost of semiconductor devices. That is, the number of semiconductor devices that can be manufactured with one wafer is increased to reduce the unit price. However, on the contrary, the price of the wafer itself becomes expensive, the added value increases as the manufacturing process progresses, and the number of semiconductor devices lost due to the destruction of the wafer also increases. Therefore, a conventional inspection method that involves cleaving a wafer is very uneconomical.

  On the other hand, there is a method capable of producing a sample without cleaving the wafer. This method is disclosed in Japanese Patent Laid-Open No. 05-52721 (Conventional Example 1).

  In this method, as shown in FIGS. 2A to 2G, first, the posture of the sample substrate 202 is maintained so that the FIB 201 irradiates at a right angle to the surface of the sample substrate 202, and the FIB 201 is mounted on the sample substrate. A rectangular hole 207 having a required depth is formed on the sample surface by scanning in a rectangular shape (FIG. 2A). Next, the sample substrate 202 is inclined to form the bottom hole 208. The inclination angle of the sample substrate 202 is changed by a sample stage (not shown) (FIG. 2B). The posture of the sample substrate 202 is changed, the sample substrate 202 is placed so that the surface of the sample substrate 202 is again perpendicular to the FIB 201, and a notch groove 209 is formed (FIG. 2C). A manipulator (not shown) is driven, and the tip of the probe 203 at the tip of the manipulator is brought into contact with a portion where the sample substrate 202 is separated (FIG. 2D). Next, the deposition gas 205 is supplied from the gas nozzle 210 and the FIB 201 is locally irradiated to the region including the tip of the probe 203 to form the ion beam assisted deposition film 204. The separated portion of the sample substrate 202 in contact with the tip of the probe 203 is connected by an ion beam assisted deposition film 204 (FIG. 2E). The remaining part is cut and processed with the FIB 201 (FIG. 2F), and a micro sample 206 as a separated sample is cut out from the sample substrate 202. The cut out small sample 206 is supported by the connected probe 203 (FIG. 2 (g)).

  When the minute sample 206 is processed with the FIB 201 and a region to be observed is processed into a thin film, a TEM sample (not shown) is obtained. Analysis can be performed by introducing a micro sample separated by this method into various analyzers.

  In addition, the above is an example of adopting a method of taking out a micro sample with a sample preparation device. However, with the sample preparation device, the shape of the cross-section sample thin film is processed, the sample substrate is taken out from the sample preparation device, There is also a method of taking out a cross-sectional sample thin film by a mechanism. For example, it is described in the document “Material Research Society, Symposium Proceedings, vol. 480, 1997, pp. 19-27” (conventional example 2). Similarly, it is described in the document “Proceedings of the 22nd International Symposium for Testing and Failure Analysis, 18-22 November 1996, pp.199-205” (conventional example 3).

  As shown in FIG. 3A, both sides of the target position on the wafer 308 are processed stepwise with the FIB 301 to produce a cross-sectional sample thin film 307, and then the sample stage is tilted to thereby cause the FIB 301. The sample substrate is irradiated by changing the angle between the sample surface and the sample surface, the periphery of the sample thin film is cut by FIB 301 as shown in FIG. 3B, and the sample thin film 307 is separated from the wafer. Then, the wafer is taken out from the FIB apparatus, the glass rod is brought close to the processing part in the atmosphere, the sample thin film 307 is adsorbed to the glass rod by using static electricity, taken out from the wafer, the glass rod is moved to the mesh 309, It is electrostatically adsorbed on the mesh or installed so that the processed surface faces the transparent adhesive. As described above, even if the processed cross-section sample thin film is not taken out in the apparatus, even if most of the outer shape of the cross-section sample thin film is processed by the ion beam, analysis is performed by introducing the separated cross-section sample thin film into the TEM. Can do.

  A device manufacturing method using a method similar to that in Conventional Example 1 for process management is described in, for example, Japanese Patent Laid-Open No. 2000-156393 (Conventional Example 4).

  In this method, process management is performed according to the flow shown in FIG. After the completion of the process m1, the lot 401 input to the process m1 sorts a predetermined number of the lots 401 as the inspection sample 402, and the remaining sample 403 stands by. The selected portion 404 to be inspected 404 is extracted as a minute sample 405. The inspection sample 402 from which the minute sample 405 has been extracted is again incorporated into the remaining sample 403, and is put into the next process m2 as a lot 401A. Here, the micro sample 405 is processed so as to be compatible with various analysis devices 406, sent to the analysis device 406 through the path f, and the target portion of the micro sample 405 is analyzed. The analysis result is sent to the computer 407 and stored as a database. The stored database is transmitted to the process m1 or the process m2 through the communication path h as necessary, and gives an instruction to change the process condition.

  As described above, a major feature is that during the process from the process m1 to the process m2, the wafer passes through the paths a, b, c, and d, and the minute sample to be analyzed is extracted during that time. In addition, the number of sample substrates is not reduced by the inspection, and the number of sample substrates in the lot 401 to be input into the process m1 and the lot 401 to be input into the process m2 is the same. Therefore, there is no semiconductor device lost by dividing the wafer as in the past, and the manufacturing yield of the total semiconductor devices can be increased and the manufacturing cost can be reduced.

JP 05-52721 A JP 2000-156393 A Material Research Society, Symposium Proceedings, vol.480, 1997, pp.19-27 Proceedings of the 22nd International Symposium for Testing and Failure Analysis, 18-22 November 1996, pp.199-205

  In the failure analysis, when a failure mode is found by another inspection device such as a probe inspection or an EB tester, the cause process is investigated. Here, the failure analysis in the present invention is not mainly a failure that exists only at a specific position in the wafer, but mainly a failure that spreads over the entire surface of the wafer or a certain range due to the processing process. Targeted.

  As a defect analysis procedure, when a desired region is determined after a defect is found in an inspection, and a sample such as Conventional Example 1, Conventional Example 2, or Conventional Example 3 is used to produce an observation and analysis sample The following issues remain.

  Even if an abnormal part can be found in an observation sample produced after device formation, the cause process may not be determined in some cases. This example will be described with reference to FIGS.

  FIG. 5A shows a cross section of a device after a certain wiring process. In this example, metal wiring formation in a dual damascene process is shown, and a metal wiring 501 is formed in a wiring hole region formed in the insulating layer 502. At this time, the metal wiring 501 is normally formed. In the process of forming the wiring cap layer 503 to be formed next, a heat process of about 300 to 400 ° C. is performed. As a result, as shown in FIG. 5B, a defective gap portion 504 may be formed in the connection hole portion of the metal wiring 501. Alternatively, even if no defect occurs in FIG. 5B, the void defect portion 504 may also occur due to the heat process at 400 to 500 ° C. when forming the insulating layer 505 shown in FIG. 5C. .

  However, after completion of the final process, for example, a place to be observed is determined after a disconnection or a high resistance portion is found by probe inspection, and a wiring process is performed by forming a cross-section by a method as in the conventional examples 1 to 3. When investigating, it is very difficult to determine which process directly caused void formation even if the void defect portion 504 as shown in FIG. 5D is observed. For this reason, it is important to investigate the cause from information that does not affect the subsequent process.

  The above-mentioned conventional example 4 is very effective for monitoring a processing process in which a region to be monitored is determined in advance and the region may be processed into an observation thin film or a cross section. However, the following problems remain to be used for defect analysis.

  In the defect analysis, the place to be observed and analyzed cannot be specified in advance. For this reason, if a micro sample is extracted at the end of each process or a plurality of processes and processed into a TEM sample or the like in advance, a region to be observed in a subsequent inspection is determined, and the region is different from the position of the TEM sample produced. In some cases, it is highly possible that the desired position has already disappeared by processing, and cannot be observed. In the case of defect analysis, not only the position but also the direction of the surface to be observed is important. For example, in the case of a DRAM, there may be a direction such as a cross section parallel to the word line, a vertical cross section, or a plane parallel to the sample surface. Considering a combination of these positions and directions, the possibility that the TEM thin film position (or other observation or analysis cross-sectional position) prepared in advance coincides with a desired region for defect analysis is very low. For this reason, in defect analysis, sample processing for observation and analysis requires processing at a position determined based on defect data after inspection.

  The present invention has been made in view of the above-mentioned problems, and in failure analysis of a device or the like, a failure analysis technique capable of ensuring an observation sample that can correspond to any desired observation location that is later determined by inspection. The purpose is to provide.

  In order to achieve the above object, in the present invention, a micro sample (or sample) is extracted and stored at the end of a predetermined processing process, and the micro sample is placed at the observation and analysis position determined based on the defect data later. Perform additional machining. That is, a micro sample extraction device (or a sample extraction device) that extracts a part of the substrate as a sample using a processing beam at the end of any processing process for forming a desired pattern on the substrate; Micro sample storage device (or sample storage device) that stores the extracted sample, storage sample data recording device that manages management information related to the sample as a database, and analysis of the sample stored according to the defect analysis request The basic configuration includes a micro sample additional processing apparatus (or a sample additional processing apparatus) that processes the sample and a defect analysis apparatus that analyzes the processed sample.

  Hereinafter, typical configuration examples of the failure analysis system according to the present invention will be listed.

  (1) A sample storage tool (or a micro-sample) for extracting a part of a sample from the substrate by ion beam processing and storing the sample at the end of any processing process for forming a desired pattern on the substrate. A sample extraction device to be transported to a sample storage tool, a storage sample data recording device for constructing a database in which at least a product name, a substrate name, a process name of the substrate and a storage position of the sample are associated with each other, and the sample storage A sample storage device for storing the tool corresponding to the database of the storage sample data recording device, a sample additional processing device for taking out the selected sample from the sample storage tool and performing additional processing based on additional processing information, and an additional And a failure analysis device for analyzing the processed sample.

As a result, the cause of the defect can be identified retroactively with respect to the defect found in the subsequent process, so that the cause investigation becomes efficient.
(2) Sample storage in which a part is extracted from the substrate as a sample by ion beam processing after each of two or more different processing processes for forming a desired circuit pattern on the substrate, and the sample is stored. A sample extraction device to be transported to a tool, a storage sample data recording device for constructing a database in which at least a product name, a substrate name, a process name of the substrate and a storage position of the sample are associated with each other, and the sample storage device Storage corresponding to the database of the storage sample data recording device, the sample storage device for selecting the sample corresponding to any product designation after completion of the product of the sample, and taking out the sample selected according to the defect analysis request A sample additional processing apparatus that performs additional processing based on the additional processing information and a failure analysis apparatus that analyzes the additional processed sample are configured.

  As a result, the cause of the defect can be identified for the defective device found after the product shipment, which is effective for explanation to the customer.

  (3) In the defect analysis system having the above-described configuration, the sample storage device stores the sample storage tool corresponding to the database of the stored sample data recording device, and performs defect inspection after at least two processing processes. The method is characterized in that the sample corresponding to the substrate determined to be defective based on a preset threshold value is selected. Further, the present invention has a defect database recording device for recording the structure observation or analysis data of the sample obtained from the defect analysis device as defective sample data in correspondence with the process parameters of the processing process.

  As a result, it becomes easy to specify process parameters that are likely to cause defects, so that the direction in which parameters should be assigned in advanced process control can be limited, leading to efficiency.

  (4) The defect analysis system having the above configuration includes an ion beam control system for controlling the ion beam processing, and the ion beam control system is formed on the substrate with the size of the sample to be extracted. The circuit pattern is set to be larger than the repetition interval of the circuit pattern.

  As a result, it is possible to analyze a defect at an arbitrary position in one device pattern by a subsequent additional process.

  (5) In the defect analysis system having the above configuration, the sample storage device stores a database in which at least a product name, a substrate name, a process name, and a storage position of the sample are associated with each other. It is characterized by having.

  Thereby, a process history and a micro sample position can be matched easily.

  (6) In the defect analysis system having the above-described configuration, the sample storage tool includes a database in which at least a product name, a substrate name, a process name, and a storage position of the sample are associated with each other. It has a non-contact IC chip that stores numerical values that can be handled by 1.

  Thereby, a process history and a micro sample can be easily matched on a one-to-one basis.

  (7) In the defect analysis system having the above-described configuration, the sample storage device and the sample storage device, or the sample storage device and the sample additional processing device can exchange the sample storage device without being exposed to the atmosphere. It is configured to be connectable.

  Thereby, the contamination of a micro sample is suppressed and the reliability of failure analysis is improved.

  (8) In the defect analysis system having the above configuration, the material for forming the sample storage device is silicon.

  This suppresses contamination of a micro sample in a device having a silicon substrate and improves the reliability of failure analysis.

  (9) In the defect analysis system having the above-described configuration, the sample processing apparatus has an ion beam mark processing function for processing a mark for revealing extracted coordinates into the sample before extracting the sample. And

  Thereby, the coordinate corresponding to the original board | substrate of the micro sample after extraction can be identified easily.

  ADVANTAGE OF THE INVENTION According to this invention, the defect analysis technique which can ensure the observation sample which can respond | correspond to the arbitrary observation desired places decided later by a test | inspection in defect analysis of a device etc. is realizable.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows the configuration of an embodiment of a failure analysis system according to the present invention. The defect analysis system 101 includes a micro sample extraction device 102 that can directly extract a micro sample having a size of several microns to several tens of microns without cutting the wafer, and a micro sample storage device 103 that stores the extracted micro sample. A storage sample data recording device 104 that supervises management data of the micro sample, a micro sample additional processing device 105 that processes the micro sample stored according to the defect analysis request into a form that can be analyzed, and the processed micro sample It is comprised from the defect analysis apparatus 106 which analyzes these.

  Hereinafter, an outline of the failure analysis system will be described. First, a process is selected in the device manufacturing process that is expected to require a failure analysis later.

  Reference numerals 601 to 607 shown in FIG. 6 denote device manufacturing processes, and correspond to, for example, exposure, dry etching, CVD (chemical vapor deposition), wet etching, CMP (chemical mechanical polishing), and the like. For example, if the process 602 and the process 605 are selected as the micro sample extraction process, the information is stored in the storage sample data recording device 104 in advance as the extraction schedule and extraction position information 119.

  In FIG. 1, for example, if the apparatus that processes the process 602 is the process apparatus 107, the wafer 108 that has been processed by the process apparatus 107 is introduced into the micro sample extraction apparatus 102 in the defect analysis system 101 according to this information. The At this time, the storage sample data recording device 104 receives the process information 114 from the process device 107 (or a database for managing the process conditions of the process device 107), and the micro sample extraction device 102 should extract the micro sample from the wafer. Then, information 115 such as the position of the micro sample storage tool in which the micro sample is to be stored is transmitted. Based on the extraction position information and the storage position information, the micro sample extraction device 102 extracts the micro sample 110 from the wafer 108 and stores it in the designated position of the micro sample storage device 109. Here, the micro sample storage device 103 is connected to the micro sample extraction device 102, and the micro sample storage device 109 is stored in the micro sample storage device 103. The storage position information 116 in the micro sample storage device 103 is sent to the storage sample data recording device 104.

  In this way, the micro sample is managed as data by the storage sample data recording device 104 and stored in the micro sample storage device 103 as hardware. As shown in FIG. 6, the wafer 108 from which the micro sample 110 has been extracted is passed to a subsequent process 603, and then the wafer after the process 605 is introduced into the micro sample extracting device 102 in the defect analysis system 101. As a result, a minute sample is extracted. In this way, the micro sample is stored in the micro sample storage device 103 in the same manner as required in the process.

  Examples of information recorded in the storage sample data recording device 104 at the time of micro sample extraction (when the micro sample is stored in the micro sample storage device) include process flow, each process condition (temperature, time, etc.), Process date, wafer lot number, micro sample extraction process, micro sample extraction lot, micro sample extraction wafer, micro sample extraction chip, micro sample extraction bit address, micro sample extraction direction, micro sample storage tool number, micro sample storage hole number, etc. It is.

  Thereafter, for example, after the inspection process, when the process to be analyzed for failure and the content of the failure analysis are determined, the failure analysis request 120 is input to the storage sample data recording device 104. The storage sample data recording device 104 searches the storage position of the corresponding micro sample 110 from the database. The micro sample storage device 103 receives this storage position information, and introduces a micro sample storage tool 109 corresponding to the connected micro sample additional processing device 105. The micro sample additional processing device 105 receives information 117 on the storage position and additional processing position of the micro sample 110 in the micro sample storage tool 109 from the stored sample data recording device 104, takes out the corresponding micro sample 110, and places it on the sample holder. In addition, additional processing such as thin film processing (for example, gate vertical cross section) is performed. The defect analysis sample 113 additionally processed in this way is introduced into the defect analysis apparatus 106 and analyzed for defects, and analysis information 118 is transmitted to and stored in the storage sample data recording apparatus 104, and defect analysis information 121 combined with process information and the like. Is output as In this way, failure analysis data (including image data) is output in response to a failure analysis request.

  By using such a system, it is possible to store a minute sample immediately after an arbitrary process, so that it is possible to directly analyze a failure in response to a failure analysis request that will be clarified later. Good analysis can be realized.

  Next, a specific configuration of a micro sample extraction device serving as a key device among the devices constituting the failure analysis system of the present invention will be described with reference to FIG.

  The micro sample extraction device 102 includes a movable sample table 702 on which a sample substrate such as a semiconductor wafer 108 is placed, a sample position control device 703 that controls the position of the sample table 702 in order to specify the observation and processing position of the wafer 108. An ion beam optical system 705 that performs processing by irradiating the wafer 108 with the ion beam 704, an electron beam optical system 707 that irradiates an electron beam 706 for observing the vicinity of the wafer 108, and secondary electrons from the wafer 108. The secondary electron detector 708 is detected.

  The configuration of the ion beam optical system 705 is as follows. An ion source 715 that generates ions is applied with an acceleration voltage with respect to the ground potential by an acceleration power source 716. When the ion emission of the ion source 715 is unstable, the heating of the ion source 715 is improved by conducting heating with the energization heating power source 717. An extraction voltage is applied to the ion source 715 from the extraction power source 719 to the extraction electrode 718 that forms an extraction electric field of ions. The ion beam thus extracted is limited in beam spread by the aperture 720. The aperture 720 is at the same potential as the extraction electrode 718. The ion beam that has passed through the aperture 720 is focused by a focusing lens 722 to which a focusing voltage is applied by a focusing power source 721. The focused ion beam is scanned and deflected by a deflector 724 to which a deflection power source 723 is applied. The deflected ion beam is focused on the surface of the wafer 108 by an objective lens 726 to which an objective voltage is applied by an objective power source 725. The acceleration power source 716, the extraction power source 719, the focusing power source 721, the deflection power source 723, and the objective power source 725 are controlled by the ion beam optical system controller 727.

  A probe 728 for extracting a minute sample in the wafer 108 processed by the ion beam 704 is driven by a probe driving device 729 controlled by a probe position control device 730. A deposition gas source 731 for supplying a deposition gas for forming an ion beam assisted deposition film used for fixing a probe 728 and a micro sample is positioned by a deposition gas source control device 732, its position, heater temperature, Valve opening and closing is controlled. A micro sample storage tool 109 having a plurality of holes for storing the extracted micro sample is arranged beside the sample stage 702.

  The electron beam optical system 707 is controlled by the electron beam optical system control device 733 in terms of electron beam irradiation conditions, position, and the like. The central processing unit 735 controls the ion beam optical system control unit 727, the sample position control unit 703, the probe position control unit 730, the display unit 734 that displays detection information of the secondary electron detector 708, and the like. The sample stage 702, the minute sample storage device 109, the ion beam optical system 705, the electron beam optical system 707, the secondary electron detector 708, the probe 728, and the like are disposed in the vacuum container 737. The central processing unit 735 exchanges extracted sample position information and stored position information with the stored sample data recording device 104.

  Here, a specific method for storing a micro sample in the micro sample storage device 109 will be described with reference to FIGS. Here, a description will be given from a state in which the wafer 108 is introduced into the micro sample extraction apparatus 102 shown in FIG.

  First, rectangular holes 801 and 802 are formed in the wafer 108 by the ion beam 704 on both outer sides of the portion to be extracted with a small sample (FIG. 8A). Next, a rectangular groove 806 is formed by the ion beam 704 (FIG. 8B). Next, the sample stage 702 is tilted to irradiate the sample surface with the ion beam 704 obliquely, thereby forming the oblique grooves 808 and forming the micro sample 110 connected only with the wafer 108 and a part of the support portions 805. . (FIG. 8 (c)). The sample stage inclination is returned, the probe driving device 729 is controlled by the probe position control device 730, and the probe 728 is brought into contact with a part of the micro sample 110. The probe 728 and the micro sample 110 that are brought into contact with each other are fixed using ion beam assist deposition (FIG. 8D). After the ion beam assisted deposition film 809 is formed, the support portion 805 is cut with the ion beam 704 (FIG. 8E).

  In this way, the micro sample 110 is cut out, and the probe 728 is raised by the probe driving device 729 and extracted (FIG. 8F). Next, the cut out micro sample 110 is inserted into the storage hole 811 in the micro sample storage device 109 (FIG. 8G). After the insertion, the tip of the probe 728 is cut by the ion beam 704 to separate the micro sample 110 (FIG. 8 (h)). Thus, the micro sample 110 is stored in the micro sample storage device 109. (FIG. 8 (i)). When a plurality of micro samples are extracted from the process, this process is repeated and stored in another storage hole 812.

  The above micro sample extraction has been described with a micro sample extraction device as shown in FIG. 7 in which the sample stage 702 is inclined. However, as shown in FIG. 15, in an apparatus configuration in which the sample stage 1501 is not inclined and the ion beam optical system 1502 is inclined with respect to the sample surface, the sample surface normal of the sample stage 1501 is set as the rotation axis. By performing the rotation control, it is possible to realize the micro sample extraction processing as described above.

  Incidentally, the mechanism constituting FIG. 15 is the same as that shown in FIG. 1 except for the above-described inclined arrangement, and in FIG. 15, the probe-related mechanism and the deposition gas source relation in relation to the illustration. Although the mechanism is omitted, it actually exists.

  Here, the wafer 108 is taken out from the micro sample extraction apparatus 102 and is transferred to the next device process (process 603 in the case of FIG. 6). However, the wafer 108 is in a state in which a processing hole for extracting a micro sample is left as it is, and this processing hole may cause a process failure in a subsequent process. For this reason, it is desired to refill this processed hole. An example of the backfilling method is shown in FIGS.

  FIG. 9A shows a state in which the minute sample 110 is extracted from the wafer 108 by the probe 728, and the processing hole 901 is in a vacant state. As shown in FIG. 9B, an ion beam 704 is applied to the processing hole 901 while supplying a deposition gas 902 (for example, phenanthrene, tungsten hexacarbonyl, tetraethoxysilane, etc.) from a deposition gas source 731. By scanning, as shown in FIG. 9C, filling with the deposit 903 can be performed. By returning the wafer 108 thus backfilled to the next process, it is possible to suppress process defects caused by the processed holes.

  On the other hand, the micro sample storage device 109 that stores the extracted micro sample 110 is stored in the micro sample storage device 103 that can store a plurality of micro sample storage devices. The micro sample storage device 103 has, for example, a configuration as shown in FIG. 10 and has a load / unload mechanism 1001 that can load and unload an arbitrary micro sample storage device 109. It can be connected to the sample extraction device 102 and the micro sample additional processing device 105, and the micro sample storage device 109 can be loaded and unloaded without being exposed to the atmosphere.

  In this way, the location to be observed and analyzed for the minute sample stored in the post-process inspection of the wafer 108 is determined. For example, in probe inspection, defect information such as a short circuit, disconnection, writing, and reading can be obtained. Based on this defect information, the location to be observed, for example, if there are many disconnections in the metal wiring, observe the cross section for several processes after the metal wiring formation process, and for example, high resistance of plugs, contacts, etc. In this case, a process, a region, a direction, and the like to be actually observed are determined such as a residual film of a plug etching hole, a plug cross-section, or a planar observation of a connection portion.

  Based on the information thus determined, the corresponding wafer lot, wafer, process, and chip are determined, the micro sample storage tool 109 is introduced into the micro sample additional processing device 105, and a micro sample (for example, here) Then, the micro sample 110) is taken out. This extraction will be described with reference to FIGS.

  As shown in FIG. 11A, a micro sample 110 is taken out using a probe 1105. Here, in the drawing, the storage hole 811 and the like are depicted as being exposed on the front side, but in actuality, they are isolated holes that are not exposed on the side surface. This extraction method may be fixed using the position film with the ion beam assist described above, or may be a tweezers type described later.

  In the case where the observation and analysis determined from the inspection result (hereinafter referred to as observation only for the sake of simplification) is, for example, a cross section perpendicular to the sample surface of the original wafer 108, the observation cross section is shown in FIG. As shown in FIG. 11B, the posture is such that it is parallel to the longitudinal direction 1103 of the micro sample fixing surface 1102 of the micro sample holder 1101 to be introduced into the observation apparatus and perpendicular to the micro sample fixing surface 1102. Secure to. This fixing is performed by, for example, the ion beam assist deposition film 1104 or the like. Thereafter, the probe 1105 is removed (for example, when the position is used with ion beam assist to fix the probe 1105, the cutting of the tip of the probe 1105 by the ion beam 1106 is used), and then the target position is cross-section processed, or By processing a thin film having a thickness of about 100 nm, as shown in FIG. 11C, cross-sectional observation of an SEM or TEM at a desired position becomes possible.

  When the observation region determined from the inspection result is a plane parallel to the sample surface of the original wafer 108, the observation plane is the micro sample fixing surface 1102 of the micro sample holder 1101 as shown in FIG. Are fixed so as to be in a posture parallel to the longitudinal direction 1103 and perpendicular to the minute sample fixing surface 1102. Fixing as shown in FIG. 11D is possible when the probe 1105 has a rotation mechanism and the posture of the micro sample 110 can be rotated by 90 ° from the time of taking out. If the probe 1105 does not have a rotating mechanism, as shown in FIG. 11 (d ′), the micro sample holder 1101 is tilted by 90 ° in advance, and the micro sample 110 is fixed thereto. Thereafter, the probe 1105 is removed in the same manner as in the case of the vertical cross section, and in the case of FIG. Then, by performing cross-section processing or thin film processing on the target plane position, as shown in FIG.

  Here, although the micro sample extraction device 102 and the micro sample additional processing device 105 have been described as separate devices, there is no problem even if the same device is used for micro sample extraction and additional processing.

  Here, the size of the micro sample 110 to be extracted will be described. The object of the present invention is to be able to provide an arbitrary observation plane determined after device inspection, and therefore it is necessary to ensure a minimum repeating pattern of the device. Naturally, there is a repetitive pattern with a large period, but here, a repetitive pattern having a size of about 100 μm or less that does not affect the process and can be processed in a practical time by ion beam processing is targeted.

  For example, assuming that the device patterns 1201, 1202, 1203, 1204 as shown in FIG. 12A are repetitive patterns, a micro sample 110 having a size that includes at least one pattern 1201 is extracted. To do. Here, this repetitive pattern includes not only the sample surface but also one pattern with respect to the inside of the sample (in the depth direction).

  In FIG. 12A, for example, a simple configuration in which there are one transistor and one capacitor in one pattern such as a DRAM has been described, but in the case of an SRAM (Static Random Access Memory), for example, one pattern In such a case, it is necessary to extract a size including all of them.

  FIG. 12B is an example showing the surface of a certain SRAM after the wiring process. Among them, the repetitive pattern corresponding to 1-bit storage is the one shown in FIG. 12C (FIG. 12B). Shows the boundary with a dotted line.) For this reason, for example, as ion beam processing for extracting this, it is necessary to take a region as indicated by 1205 in FIG. By securing the size of the micro sample to be extracted as described above, it is possible to perform additional processing at an arbitrary place in the pattern.

  Next, coordinates for extracting a micro sample in the wafer 108 will be described. What is analyzed in this system is an anomaly caused by a problem of the process itself rather than an anomaly that exists singularly. In many cases, the abnormality of the process itself is different at positions such as the center and the periphery of the wafer. Therefore, nine points such as points 1302 and 1303 shown in FIG. It is desirable.

  For this reason, in the next micro sample extraction process, nine points are similarly extracted, but positions different from the previous extraction positions (points 1302, 1303, etc.) such as points 1304 and 1305 shown in FIG. 13B. Select. Subsequent extraction is similarly performed by shifting the extraction position. FIG. 13C shows, for example, points (points 1306, 1307, 1308, 1309, etc.) to be analyzed after four types of processes. In this figure, the display of the position to be analyzed with respect to the wafer size is greatly depicted for easy viewing, but the area to be analyzed is actually sufficiently small. For this reason, for example, as shown in FIG. 13D, all points to be analyzed are often contained in one chip 1310, and it is efficient because a small number of chips are sacrificed for failure analysis. However, in the immediate vicinity of the extraction part (including the above-mentioned backfilling of the processed hole), there may be an abnormality affected by the alteration of the extraction part, so the analysis point for each process is There is also a need to make it not too close.

  Moreover, once extracted from the wafer as a micro sample, it becomes difficult to make the coordinates in the original wafer coincide with the coordinates in the micro sample. In order to make these coordinates coincide, marking as described below is effective.

  As shown in FIG. 14A, the coordinate system in the wafer 108 is set so that the notch 1402 faces downward and the intersection of the outer peripheral tangents is the coordinate origin 1403. For this reason, the coordinates of the analysis position 1401 are expressed by a horizontal (X) direction coordinate 1404 and a vertical (Y) direction coordinate 1405. Although the analysis position 1401 is depicted by X in the illustrated relationship, there is actually no such mark. Therefore, in order to identify this analysis position 1401, marks 1407 and 1408 are formed by ion beam processing as shown in FIG.

  Here, an inner square frame is a region 1409 of a micro sample to be extracted, and a region surrounded by two squares is an ion beam processing scheduled region 1406. Therefore, the marks 1407 and 1408 are formed so as to cover at least the area 1409. However, in order to leave the mark of the extraction position also on the wafer 108, it is desirable to form the marks 1407 and 1408 so as to remain outside the processing scheduled area 1406. FIG. 14C shows a state after processing the ion beam for extraction. Even if the ion beam is processed in the ion beam processing region 1410 and extracted as shown in FIG. 14D, the analysis position depends on the positions of the marks 1408 and 1407. 1401 can be identified.

  As described above, because the defect analysis system for extracting and storing the micro sample of the present invention for each arbitrary process, it is possible to secure a sample on the spot for the process that has been completed previously, It is possible to acquire an observation image of a target position that is not affected by the subsequent process, and to realize a defect analysis system that can efficiently investigate the cause of the defect.

  Next, an example of the shape of the sample storage device in the present invention will be described with reference to FIG.

  FIG. 16A shows an example of a micro sample storage device 109 that can be detachably attached to the sample stage 102 on which the wafer 108 is placed. FIG. 16B is an enlarged view of the minute sample storage device 109. A plurality of holes such as storage holes 811 and 812 are provided. Here, the size of the storage hole 811 is shown to be considerably larger for the sake of description, but in reality, the size of the micro sample storage tool 109 is several mm to several cm, whereas the storage hole 811 is several tens of μm. It is about the size. Here, the groove 1602 is mounted on the sample stage 102 in a sliding manner. The shape of only the micro sample storage tool is shown in FIG. The micro sample storage device can be taken out at the same time as or after the wafer 108 is taken out. Then, a new micro sample storage tool is introduced for the next different wafer.

  Furthermore, as the shape of the storage hole, a shape corresponding to the wedge-shaped shape of the extracted microsample 110 shown by the storage hole 811 shown in FIG. 11 is ideal, but such a shape is not limited to an ion beam or a laser beam. There is a high possibility of having to rely on processing, and it is not efficient to produce in large quantities. Therefore, a shape that can be formed using photolithography and etching is desirable.

  An example of the cross-sectional shape of the storage hole is shown in FIG. FIG. 17A shows an example of a storage hole 1701 having a rectangular hole shape. In this case, in consideration of the re-extraction of the micro sample 110, the depth is formed slightly shallower than the micro sample 110. By doing so, the posture of the micro sample 110 can be maintained. In addition, a parallelogram-shaped storage hole 1702 as shown in FIG. 17B enables a more stable storage by using an inclined surface having a large area instead of a vertical surface of a minute sample as a contact surface. Also in this case, the depth of the storage hole 1702 is shallower than that of the minute sample 110 so that the posture can be maintained. In addition, the uppermost surface of the micro sample 110 protrudes from the surface of the micro sample storage device 109, and when it is dangerous, the upper surface of the micro sample 110 is protected as shown in FIG. It is desirable that the guard part 1703 exist. By doing so, a safe micro sample storage device can be easily formed.

  As a material of the micro sample storage device, a material that does not contaminate the micro sample is desirable. For this reason, for example, if the sample substrate is a silicon wafer, contamination can be suppressed if the minute sample holder is also made of silicon. Further, since silicon is suitable for microfabrication by photolithography and etching, it is optimal for forming the storage hole as described above.

  The micro sample storage device 109 (micro sample 110) is more efficiently managed with the same micro sample storage device for one wafer (or one lot). It is desirable to manage the same as the wafer. As an example of this, an example of management attached to the wafer case (cassette) will be described with reference to FIG.

  The wafer cassette 1802 is for storing and moving a wafer group 1801 to be processed in the same lot. It is assumed that a storage tool fixing portion 1803 on which the micro sample storage tool 109 can be installed is provided on this side surface. By doing so, it becomes easy to associate the wafer process with the minute sample.

  Further, as another method for managing the micro sample 110 (micro sample storage device) in the same manner as the original wafer, a wafer type sample storage device shown in FIG. 19 will be described.

  FIG. 19A shows a state in which the micro sample 110 is extracted from the wafer 108 with the probe 728. The wafer 108 has a processing mark 1902 obtained by taking out a minute sample. The wafer 108 is returned to the wafer cassette 1802. One of the wafer cassettes 1802 is not a wafer but a micro sample storage 1901 having the same shape as the wafer. After the wafer 108 returns, the micro sample storage 1901 is introduced into the sample stage 702 next.

  The micro sample storage tool 1901 is formed with a micro sample storage hole 1903 and the like. The size of this hole is the same as that shown in FIG. 16 and is depicted in a large size for the purpose of illustration, but in reality, it is several tens of μm for a wafer size, for example, 200 mm or 300 mm. As shown in FIG. 19B, the micro sample 110 is stored in the storage hole 1903. Thereafter, the micro sample storage 1901 is returned to a predetermined position of the wafer cassette 1802 as shown in FIG. Of course, when set in the process apparatus, the micro sample storage tool 1901 is managed so as not to be erroneously introduced into the process apparatus.

  This wafer-type micro sample storage tool is disadvantageous in terms of time because when a micro sample is extracted from several places after a certain process from one wafer, the wafer is loaded and unloaded every time it is extracted. When extracting only a part, it is effective at the point that it is easy to manage in the same way as a wafer.

  As described above, mass productivity of the micro sample storage tool is improved by selecting the hole shape, and management is facilitated by adopting a configuration in which the micro sample storage tool can be transported in the same manner as the wafer.

  Next, a process in the defect analysis system according to the present invention and a method for managing minute sample data will be described.

  As described in the above-described embodiment, a number is assigned to the micro sample storage device 109 in order to identify the micro sample. For example, this is performed on the surface of the micro sample storage device 109 as shown in FIG. Corresponding wafer lot number 2001, for example, “Lot # 0123” may be stamped, or a unique number may be assigned. In addition, for each storage hole, for example, “01” or the like is imprinted on the storage hole 811 as the minute sample storage hole number 2002 for easy management.

  Further, as a data management method of the minute sample storage device 109, there is also a method as shown in FIG. FIG. 21 (a) shows a form having a process tag holder 2102 for attaching a process tag 2101 describing process information and where to extract a micro sample in the micro sample storage tool 109 itself. This allows the process operator to know at a glance which process the minute sample should be extracted after.

  Further, as shown in FIG. 21B, when the process tag holder 2103 is provided in the storage tool fixing portion 1803 as shown in FIG. And be safe. If the micro sample storage tool can be managed in the same manner as the wafer cassette, the process tag 2101 may be fixed to the wafer cassette 1802 with the process tag holder 2104 as shown in FIG.

  Also, information corresponding to the process tag is written in a memory card such as a flash memory instead of the process tag, and FIGS. 22 (a), (c) corresponding to the forms of FIGS. 21 (a), (b), and (c), respectively. It is good also as a form which has the memory card holder 2202, 2203, 2204 which hold | maintains the memory card 2201 of b) and (c). In this case, a terminal such as a reader or writer capable of reading and writing process information of the memory card 2201 is prepared where the process operator can access.

  Similarly, there is a method of using the non-contact IC chip 2301 of FIGS. 23A, 23B, and 23C corresponding to the forms of FIGS. 21A, 21B, and 21C, respectively. . This non-contact IC chip is a chip having a size of about 0.4 mm and integrated with a high-frequency analog circuit and a memory. This non-contact IC chip has a single (non-overlapping) numerical value recorded, and this numerical value and minute sample information (process flow, each process condition (temperature, time, etc.), process date, wafer lot number, minute value. Sample extraction process, micro sample extraction lot, micro sample extraction wafer, micro sample extraction chip, micro sample extraction bit address, micro sample extraction direction, micro sample storage tool number, micro sample storage hole number, etc.) Build a database that supports. By doing this, it is possible to immediately take out information on the micro sample simply by reading the numerical value written in the non-contact IC chip.

  Since this non-contact type IC is small and inexpensive, as shown in FIG. 24, the micro sample storage unit (for example, 110) is not provided for one micro sample storage tool 2403, but for each micro sample (for example, 110). For example, 2401) may be provided, and a non-contact IC chip (for example, 2402) may be attached to each minute sample storage unit. In this case, since the minute sample and the storage data correspond one-to-one as the hardware and the data, the management is ensured.

  As described above, by managing wafer process information and micro sample extraction information, determining the observation position based on inspection information, and preparing an observation sample, the reliability of defect analysis data management is increased, and the cause of the defect can be easily identified. It becomes.

  Next, the efficient shape of the probe that transports the micro sample in the defect analysis system according to the present invention will be described.

  In the example described above, the case where ion beam assisted deposition is used for fixing the probe and the minute sample has been described. In this case, the probe is damaged by ion beam sputtering during separation. On the other hand, there is a tweezer probe 2501 shown in FIG. This probe has a form in which the tip is separated, and a minute sample is sandwiched by this elastic deformation.

  Thus, the micro sample 110 extracted as shown in FIG. 25A is transported to the micro sample storage tool 109 shown in FIG. 25B and inserted into the storage hole 811. Here, the tweezer probe 2501 is separated by being pulled out in the direction of the arrow 2502, and the micro sample 110 remains in the storage hole 811. When the micro sample 110 is taken out again, it is held again by the elastic deformation of the tip of the tweezer probe 2501 and transported to the micro sample holder.

  By using the tweezers type probe in this way, it is possible to store and re-extract a micro sample efficiently with a non-destructive probe.

  Hereinafter, a procedure for applying the failure analysis system according to the present invention to the product history survey will be described.

  FIG. 26 shows the configuration of the failure analysis system and the information flow. Although the configuration is the same as in FIG. 1, in this example, since defects after product shipment are targeted, the micro sample storage device 103 also stores all micro samples extracted from the original wafers of chips already shipped as products. Keep it. When a defect is found in the product device after shipment, when product defect information 2602 is input to the product database 2601, the corresponding product and wafer name, and the process and observation position (for example, wiring process) that are more likely to cause the defect. The gate vertical section after the process is determined, and this sorting information 2603 is input to the storage sample data recording device 104. The storage sample data recording device 104 determines the storage position of the corresponding micro sample from the micro sample database.

  Thus, the failure analysis is performed and the cause of the failure is identified in the same manner as in the embodiment according to the present invention. This analysis information (including images and the like) is also transmitted to the stored sample data recording device 104 and stored. The analysis information 2604 is transmitted to the product database 2601 and is managed in combination with the initial product defect information 2602. The cause of failure identified in this way is used for explanation to the product customer.

  As described above, the failure analysis system can investigate the cause of failure of the corresponding process even after product shipment, and is effective for explaining the situation to the customer.

  Next, a procedure for applying the failure analysis system according to the present invention to support data acquisition for advanced process control will be described.

  Advanced process control (APC, Advanced Process Control) is a method for managing yield changes by waving multi-variable process parameters and predicting and optimizing process conditions that improve yields. In this case, depending on how the parameters are assigned, there is a possibility that the optimum process control will not be achieved due to a significant deviation from the optimum condition. For this reason, in order to limit the direction and range of the process parameter to be assigned, support data is acquired by the failure analysis system as described below.

  FIG. 27 shows the configuration of the failure analysis system and the information flow. The flow up to the storage of the micro sample is the same as in the above-described embodiment. Thereafter, the wafer is inspected by an inspection apparatus 2701, a wafer determined to be defective from a preset threshold value, a process and an observation position where the possibility of further failure being observed is determined, and this sorting information 2703 is stored as sample data. Input to the recording device 104. The storage sample data recording device 104 determines the storage position of the corresponding minute sample from the database.

  In this way, the failure analysis is performed and the cause of the failure is identified in the same manner as in the previous embodiment. This analysis information (including images and the like) is also transmitted to the stored sample data recording device 104 and stored. The analysis information 2704 is transmitted to the defect database recording device 2702 together with the process information 114 and inspection information 2705 of the defective sample, and stored. From this defect database 2702, it becomes easy to specify process parameters that are likely to cause defects.

  As described above, the present failure analysis system makes it easy to specify process parameters that are likely to cause defects, so that the direction in which the parameters should be assigned in advanced process control can be limited, leading to efficiency.

  Next, an example of a failure analysis system for monitoring the circumstances at which a position that is found to be an abnormal part by an initial wafer inspection causes a failure in a subsequent process will be described.

  FIG. 28 shows the configuration of the failure analysis system and the information flow. In the embodiment described above, the extraction position of the micro sample is set in advance as described with reference to FIG. 13. In this example, the extraction position is determined from the inspection result of the inspection apparatus 2805. To do.

  This position determination will be described with reference to FIG. For example, FIG. 29A shows the result of wafer foreign matter inspection, and X marks such as points 2901 and 2902 are positions where foreign matter is observed. Here, it concentrates on the foreign material considered to be the same especially from viewpoints, such as a shape and size. Information 119 is input to the storage sample data recording device 104 by setting these positions as positions for extracting a minute sample after the subsequent selection process. According to this information, for example, a region 2903 including a point 2901 is extracted from a wafer after a certain process, as shown in FIG. An area 2904 including a point 2902 is extracted from the wafer after the next selection process, as shown in FIG. In this way, minute samples are stored sequentially. Thereafter, according to the defect analysis request 2801, fine sample selection information 2803 is input to the storage sample data recording device 104. The storage sample data recording device 104 determines the storage position of the corresponding minute sample from the database.

  In this way, the failure analysis is performed and the cause of the failure is identified in the same manner as in the previous embodiment. This analysis information (including images and the like) is also transmitted to the stored sample data recording device 104 and stored. This analysis information 2804 is transmitted to the defect database recording device 2802 and stored. From this defect database 2802, information on what kind of defect the abnormal part of the initial inspection causes in the corresponding process can be obtained.

  As described above, the failure analysis system can identify the cause of the failure with attention to the initial abnormal portion, so that the process management conditions can be easily grasped.

  As described above in detail, the present invention can secure an in-situ sample for a process that has been completed previously, so that an observation image of a target position that is not affected by the subsequent process. Can be obtained, and the cause of the defect can be investigated more efficiently.

The figure explaining the whole structure of one Example of the failure analysis system by this invention. The figure explaining the conventional sample separation method (conventional example 1). The figure explaining the conventional sample separation method (conventional example 2, 3). The figure explaining the method (conventional example 4) which extracts a micro sample for every conventional process. The figure explaining the influence on the observation cross-sectional structure by a post process. The figure explaining the micro sample extraction selection process in a device process flow. The figure explaining the structural example of a micro sample extraction apparatus. The figure explaining an example of a micro sample extraction flow. The figure explaining an example of the backfilling method of a process hole. The figure explaining another structural example of a micro sample storage apparatus. The figure explaining an example of taking out from a storage tool of a micro sample, and an additional process. The figure explaining an example of the size required for a micro sample with respect to a device repetition pattern. The figure explaining the example of a micro sample extraction position in a wafer. The figure explaining an example of the marking for coordinate identification. The figure explaining the structure of the micro sample extraction apparatus by an inclination ion beam optical system. The figure explaining an example of the shape of a micro sample storage tool. The figure explaining an example of the storage hole shape of a micro sample storage tool. The figure explaining the example which manages the same micro sample storage tool as a wafer cassette. The figure explaining an example of a wafer type micro sample storage tool. The figure explaining an example of the management number stamp of a micro sample storage tool. The figure explaining an example of the information management of the micro sample storage tool by a process tag. The figure explaining an example of the information management of the micro sample storage tool by a memory card. The figure explaining an example of the information management of the micro sample storage tool by a non-contact IC chip. The figure explaining an example of the individual micro sample management by a non-contact IC chip. The figure explaining an example of the micro sample conveyance by a tweezers type probe. The figure explaining the structural example of the defect analysis system in the case of applying to a product history survey. The figure explaining the structural example of the defect analysis system in the case of applying to process control support database preparation. The figure explaining the example of composition of the failure analysis system in the case of monitoring the circumstances which become the cause of failure paying attention to the abnormal part. The figure explaining selection of a micro sample extraction position in the case of extracting a micro sample paying attention to an abnormal part.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 101 ... Defect analysis system, 102 ... Micro sample extraction apparatus, 103 ... Micro sample storage apparatus, 104 ... Storage sample data recording apparatus, 105 ... Micro sample additional processing apparatus, 106 ... Defect analysis apparatus, 107 ... Process apparatus, 108 ... Wafer 109 ... Minute sample storage tool, 110 ... Minute sample, 113 ... Defect analysis sample, 114 ... Process information, 115 ... Information, 116 ... Storage position information, 117 ... Information, 118 ... Analysis information, 119 ... Information, 120 ... Defect Analysis request, 121 ... Defect analysis information, 201 ... FIB, 202 ... Sample substrate, 203 ... Probe, 204 ... Ion beam assisted deposition film, 205 ... Depositionable gas, 206 ... Small sample, 207 ... Square hole, 208 ... Bottom Hole, 209 ... notch groove, 210 ... gas nozzle, 301 ... FIB, 307 ... sample thin film, 308 ... wafer, 09 ... Mesh, 401 ... Lot, 402 ... Sample for inspection, 403 ... Remaining sample, 404 ... Location to be inspected, 405 ... Small sample, 406 ... Various analyzers, 407 ... Calculator, 501 ... Metal wiring, 502 ... Insulating layer, 503 ... Cap layer, 504 ... Poor gap part, 505 ... Insulating layer, 601 to 607 ... Process, 702 ... Sample stage, 703 ... Sample position controller, 704 ... Ion beam, 705 ... Ion beam optical system 706 ... Electron beam, 707 ... Electron beam optical system, 708 ... Secondary electron detector, 715 ... Ion source, 716 ... Acceleration power supply, 717 ... Current supply for heating, 718 ... Extraction electrode, 719 ... Extraction power supply, 720 ... Aperture 721 ... Focusing power source 722 ... Focusing lens 723 ... Deflection power source 724 ... Deflector 725 ... Objective power source 726 ... Objective lens 727 ... Ion beam optical system control device, 728 ... Probe, 729 ... Probe drive device, 730 ... Probe position control device, 731 ... Deposition gas source, 732 ... Deposition gas source control device, 733 ... Electron beam optical system control Device, 734 ... Display device, 735 ... Central processing unit, 737 ... Vacuum vessel, 801, 802 ... Rectangular hole, 805 ... Supporting part, 806 ... Rectangular groove, 808 ... Oblique groove, 809 ... Ion beam assisted deposition film, 811 , 812 ... Storage hole, 901 ... Processing hole, 902 ... Deposition gas, 903 ... Deposit, 1001 ... Load / unload mechanism, 1002 ... Device connection part, 1101 ... Micro sample holder, 1102 ... Micro sample fixing surface, 1103 ... longitudinal direction, 1104 ... ion beam assisted deposition film, 1105 ... probe, 1106 ... Ion beam, 1201, 1202, 1203, 1204 ... Device pattern, 1205 ... Ion beam processing region, 1302-1309 ... Point, 1310 ... Chip, 1401 ... Analysis position, 1402 ... Notch, 1403 ... Coordinate origin, 1404 ... Horizontal direction Coordinates, 1405 ... Longitudinal coordinates, 1406 ... Planned processing area, 1407, 1408 ... Mark, 1409 ... Area, 1410 ... Ion beam processing area, 1501 ... Sample stage, 1502 ... Ion beam optical system, 1602 ... Groove, 1701, 1702 ... Storage hole, 1703 ... Guard part, 1801 ... Wafer group, 1802 ... Wafer cassette, 1803 ... Storage tool fixing part, 1901 ... Small sample storage tool, 1902 ... Processing mark, 1903 ... Storage hole, 2001 ... Wafer lot number, 2002 ... micro sample storage hole number, 2 01 ... Process tag, 2102, 2103, 2104 ... Process tag holder, 2201 ... Memory card, 2202, 2203, 2204 ... Memory card holder, 2301 ... Non-contact IC chip, 2401 ... Micro sample storage unit, 2402 ... Non-contact IC chip, 2403 ... micro sample storage tool, 2501 ... tweezer probe, 2502 ... arrow, 2601 ... product database, 2602 ... product defect information, 2603 ... selection information, 2604 ... analysis information, 2701 ... inspection apparatus, 2702 ... defect database Recording device, 2703 ... selection information, 2704 ... analysis information, 2705 ... inspection information, 2801 ... defect analysis request, 2802 ... defect database recording device, 2803 ... selection information, 2804 ... analysis information, 2805 ... inspection information, 2901, 2902 ... Dot, 2903, 2 04 ... area.

Claims (10)

A sample extraction device for extracting a part of the substrate as a sample by ion beam processing after completion of an arbitrary processing process on the substrate;
A storage sample data recording device for recording management data of the sample for performing additional processing on the sample;
A sample storage tool for storing the extracted sample before the additional machining;
The sample storage device is stored before the additional processing, and when a failure analysis request is input, a sample storage device that selects and takes out the sample storage device corresponding to the failure analysis request based on the management data ;
When the failure analysis request is input from the screened retrieved the sample storage device, and a sample additional processing device performs additional processing removed before Symbol sample based on the failure analysis request and the management data,
A failure analysis system comprising: a failure analysis device that analyzes the sample subjected to the additional machining. A sample extracting device for extracting a part of the substrate from the substrate as a sample by ion beam processing each time an arbitrary processing process for forming a desired pattern on the substrate is completed and transporting the sample to a sample storage device; ,
A storage sample data recording device for constructing a database that associates at least the product name, substrate name, processing process name of the substrate with the storage position of the sample;
The sample storage tool is stored in correspondence with the database of the storage sample data recording device, and the sample storage tool corresponding to the storage position of the sample to be analyzed for failure transmitted from the storage sample data recording device is selected and taken out. A sample storage device;
A sample additional processing device for taking out the selected sample from the sample storage tool and performing additional processing based on additional processing information;
A failure analysis system comprising: a failure analysis device for analyzing the additionally processed sample. A sample extraction device for irradiating the substrate with an ion beam and extracting a part of the substrate as a sample at the end of one processing process for forming a desired pattern on the substrate;
A sample storage device for storing the extracted sample;
A storage sample data recording device for recording management data of the sample;
Sample addition for performing additional processing to a desired shape corresponding to the defect information on the sample selected and taken out from the sample storage device based on the defect information obtained in the inspection process after the end of the one processing process A failure analysis system comprising a processing device. In the failure analysis system according to claim 1 or 3,
The storage sample data recording device stores information on the sample extracted from the substrate and / or position information on the sample in the sample storage device as the management data. In the failure analysis system according to any one of claims 1 to 3,
The sample extraction device includes a probe for extracting the sample from the substrate;
A failure analysis system comprising: a sample holder on which the extracted sample is placed. In the failure analysis system according to any one of claims 1 to 3,
The defect extraction system, wherein the sample extraction device and the sample additional processing device are the same device. In the failure analysis system according to any one of claims 1 to 3,
The defect analysis system, wherein the substrate is a semiconductor wafer. In the failure analysis system according to claim 5,
A failure analysis system comprising means for rotating the sample holder and / or the probe. The defect analysis system according to claim 4,
The defect analysis system characterized in that the sample information is managed by a process tag or an IC chip. The failure analysis system according to claim 1,
In the inspection process after completion of the arbitrary processing process, the defect analysis request is input after the process to be analyzed for failure and the content of failure analysis are determined.

Images