JP4639531B2 - Sealed gas laser device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a sealed gas laser device used for medical and industrial purposes.
[0002]
[Prior art]
In recent years, sealed gas laser devices do not require replacement of gas cylinders and are small and light, so they have been widely used in medical treatment devices such as laser scalpels and industrial manufacturing devices such as laser marking on members. .
[0003]
A conventional sealed gas laser device will be described below.
[0004]
FIG. 7 shows a partial sectional view of a conventional sealed gas laser apparatus. In FIG. 7, reference numeral 1 denotes a laser optical component which is a reflecting mirror, and is coupled so as to be integrated with the metal flange 2a. The metal flange 2b is engaged with the metal flange 2a by biting the gasket 5 for preventing vacuum leakage (coupling bolts are not shown). Reference numerals 3a and 3b denote adjustment screws for finely moving the integrated metal flange 2. A spring 4 is inserted between the adjusting screw 3 b and the metal flange 2. The tip of the adjustment screw 3 a is in contact with the fixed flange 7, and the fixed flange 7 is connected to the metal flange 2 via the bellows 6. Reference numerals 8a and 8b denote laser tubes. Note that electrodes and the like that should be provided in the gas laser device are omitted in FIG.
[0005]
The operation of the sealed gas laser device configured as described above will be described below. As is well known, precise adjustment of the relative angle of a pair of reflecting mirrors by several mrad (milliradian) is necessary for laser oscillation. The laser optical component 1 is one of the reflecting mirrors. When the adjustment screw 3a having a precise pitch is tightened, the tip does not move by hitting the fixed flange 7, so that an upward force is applied to the metal flange 2.
Since the metal flange 2 is joined by the fixed flange 7 and the bellows 6, it moves easily. At the same time, due to the elasticity of the spring 4 inserted between the adjustment screw 3b on the opposite side and the metal flange 2, the metal flange 2 is unlikely to be distorted unevenly. For this reason, the laser optical component 1 can also be adjusted at a minute angle with little mechanical distortion. In this case, the characteristics of the sealed gas laser device depend on the airtight performance. In particular, since the laser optical component 1 and the metal flange 2 cannot be welded, they greatly depend on the sealing performance. As a conventional sealing method, a method is known in which gold is attached in advance to the end face of the laser tube and the surface of the optical component for laser, and then the adhesive surface and indium are heated and fused. Further, in many cases, airtightness is obtained by biting the gasket 5 for vacuum with mountain-shaped protrusions processed into the metal flanges 2a and 2b.
[0006]
[Problems to be solved by the invention]
However, in the above-described conventional configuration, the stability of the sealing property between the laser optical component 1 and the metal flange 2 and the thermal stability of the metal flange due to non-uniform tightening of the gasket 5 may be impaired. There was a problem that the life of the tube tends to be shortened.
[0007]
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems, and to provide a long-life sealed gas laser device that has improved hermeticity and excellent thermal stability.
[0008]
[Means for Solving the Problems]
In order to achieve this object, the sealed gas laser apparatus of the present invention has a metal flange in which a laser optical component is fused with an indium alloy seal so that a fillet is formed at a joint boundary, and finely moves the metal flange. It has a configuration in which an adjustment screw, a bellows welded to a metal flange, and a spring that absorbs distortion due to fine movement are provided.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Example 1
An embodiment of the present invention will be described below with reference to the drawings.
[0010]
In FIG. 1, reference numeral 1 denotes a laser optical component, which is sealed with an indium alloy seal so as to be integrated with the metal flange 2. Reference numerals 3a and 3b denote adjustment screws for finely moving the metal flange 2. A spring 4 is inserted between the adjusting screw 3 b and the metal flange 2. The tip of the adjustment screw 3 a is in contact with the fixed flange 7, and the fixed flange 7 is connected to the metal flange 2 via the bellows 6. Reference numerals 8a and 8b denote laser tubes. The above is the same as the conventional configuration shown in FIG. The difference from the conventional example shown in FIG. 7 is that the sealed portion of the laser optical component 1 and the metal flange 2 by the indium alloy seal forms a brazed joint fillet at the boundary. Further, the gasket 5 is eliminated as a single metal flange 2.
[0011]
The operation of the sealed gas laser device configured as described above will be described. In order to oscillate the laser, it is necessary to precisely adjust the relative angle of the pair of reflecting mirrors to several mrad (milliradian). The laser optical component 1 is one of the reflecting mirrors. When the adjustment screw 3a having a precise pitch is tightened, the metal flange 2 is applied upward because the tip does not move by hitting the fixed flange 7. Since the metal flange 2 is joined by the fixed flange 7 and the bellows 6, it moves easily. At the same time, due to the elasticity of the spring 4 inserted between the adjustment screw 3b on the opposite side and the metal flange 2, the metal flange 2 is unlikely to be distorted unevenly. For this reason, the laser optical component 1 can also be adjusted at a minute angle with little mechanical distortion. The above is the same as the conventional sealed gas laser device shown in FIG.
[0012]
FIG. 2 is a cross-sectional comparison view of the indium alloy seal of the sealed gas laser device according to this embodiment and the indium alloy seal of the conventional sealed gas laser device. For easy comparison, this embodiment is shown in the left half of the figure, and the conventional example is shown in the right half. It is the same as that of the prior art that gold 11 is attached in advance to the joint surface between the laser optical component 1 and the metal flange 2 and indium A is inserted and heated and melted. The difference from the prior art is that the gold 21 attached to the metal flange 2 is attached not only to the joint surface (horizontal plane) but also to the wall surface (vertical surface). When heated and melted in this way, fillet B as shown in FIG. 2 is easily formed uniformly on the entire circumference of the indium alloy seal. As a result, an excellent effect can be expected in that the reliability of the airtightness of the indium alloy seal portion is greatly improved.
[0013]
As described above, according to the present embodiment, by providing the fillet at the boundary between the laser optical component 1 and the metal flange 2 by the indium alloy seal, the reliability of the hermeticity of the laser tube is increased. It is possible to extend the service life.
[0014]
(Example 2)
A second embodiment of the present invention will be described below with reference to the drawings.
[0015]
In FIG. 3, the same reference numerals as those in FIG. 1 are the same as those in FIG. 1 is that the laser optical component 1 and the metal flange 2 are sealed with an indium alloy seal, and a resin-filled seal is further used on the outside thereof.
[0016]
The operation of the sealed gas laser device configured as described above will be described. In order to oscillate the laser, it is necessary to precisely adjust the relative angle of the pair of reflecting mirrors to several mrad (milliradian). The laser optical component 1 is one of the reflecting mirrors. When the adjustment screw 3a having a precise pitch is tightened, the metal flange 2 is applied upward because the tip does not move by hitting the fixed flange 7. Since the metal flange 2 is joined by the fixed flange 7 and the bellows 6, it moves easily. At the same time, due to the elasticity of the spring 4 inserted between the adjustment screw 3b on the opposite side and the metal flange 2, the metal flange 2 is unlikely to be distorted unevenly. For this reason, the laser optical component 1 can also be adjusted at a minute angle with little mechanical distortion. The following is the same as in Example 1.
[0017]
FIG. 3 shows an enlarged cross-sectional view of a joint portion between the laser optical component 1 and the metal flange 2 of the sealed gas laser apparatus according to the second embodiment. In addition to the indium alloy seal with fillet B of Example 1, a groove is provided in the outer periphery of the metal flange 2 and filled with a vacuum resin to form a resin-filled seal C. According to the second embodiment, even if a slight vacuum leak occurs due to the indium alloy seal, the reliability is improved by the double sealing by the resin-filled seal reinforced on the outer peripheral portion. In this case, if the inside of the laser tube is evacuated and a resin-filled seal is applied, the resin-filled seal is strongly attracted to the spot even if there is a microdefect in the indium alloy seal. It can be secured.
[0018]
As described above, according to the second embodiment, the laser optical component 1 and the metal flange 2 are sealed not only with an indium alloy seal but also with a resin-filled seal. Therefore, the laser tube can have a longer life.
[0019]
(Example 3)
A third embodiment of the present invention will be described below with reference to the drawings.
[0020]
In FIG. 5, the same reference numerals as those in FIG. 1 are the same as those in FIG. 1 is that the metal flange 2 is divided into two parts, and a vacuum metal C-ring 35 is inserted into a groove provided in at least one of the metal flanges 2a and 2b. Although the structure is slightly complicated by dividing the metal flange 2 into two parts, there is an advantage that partial replacement is possible when the optical component 1 is damaged.
[0021]
The operation of the sealed gas laser device configured as described above will be described. In order to oscillate the laser, it is necessary to precisely adjust the relative angle of the pair of reflecting mirrors to several mrad (milliradian). The laser optical component 1 is one of the reflecting mirrors. When the adjusting screw 3a having a precise pitch is tightened, the tip does not move by hitting the fixed flange 7, so that an upward force is applied to the metal flanges 2a and 2b. Since the metal flange 2 is joined by the fixed flange 7 and the bellows 6, it moves easily. At the same time, the metal flange 2 is unlikely to be distorted unevenly due to the elasticity of the spring 4 inserted between the adjustment screw 3b on the opposite side and the metal flanges 2a, 2b. For this reason, the laser optical component 1 can also be adjusted at a minute angle with little mechanical distortion. The above is the same as in the first embodiment.
[0022]
FIG. 6 shows a cross-sectional comparison between the metal flange portion of the sealed gas laser device according to the third embodiment and the metal flange portion of the conventional sealed gas laser device. Here, components other than the laser optical component 1, the metal flanges 2a and 2b, and the vacuum sealing material 35 are omitted. As shown in FIG. 6, the gasket 5 conventionally used in a vacuum apparatus has been bitten by mountain-shaped protrusions processed into metal flanges 2a and 2b. In this case, a strong force is required and uniform tightening is difficult, and it is difficult to apply a uniform load to the metal flanges 2a and 2b without a gap. For this reason, it was easy to produce a clearance gap between the metal flanges 2a and 2b. If there is a gap or uneven distortion, an abnormal inclination of the metal flange 2a is likely to occur when a vibration or thermal cycle is applied, and the laser optical component 1 is displaced, which adversely affects the laser characteristics. On the other hand, according to the third embodiment, since the metal C-ring 35 is used as the vacuum sealing material as shown in FIG. 6, the groove processing provided in the metal flanges 2a and 2b is simple and has a relatively small force. Makes it easy to tighten evenly without gaps. As a result, even when a vibration or thermal cycle is applied, abnormal inclination of the metal flange 2a due to gaps or non-uniform mechanical strain is less likely to occur, and the laser optical component 1 is displaced and has an effect on laser characteristics. Extremely less.
[0023]
As described above, according to the third embodiment, by providing the metal C ring 35 by dividing the metal flange into two parts, the laser tube having high stability against vibration and thermal disturbance can be easily replaced. Long life can be achieved.
[0024]
In the third embodiment, the vacuum sealing material is the metal C ring 35, but may be a metal O ring.
[0025]
【The invention's effect】
As described above, the present invention is welded to a metal flange in which a laser optical component is fused with an indium alloy seal so that a fillet is formed at a joint boundary, an adjustment screw that finely moves the metal flange, and the metal flange. By providing the bellows and the spring that absorbs the distortion caused by the fine movement, the reliability of the hermeticity of the laser tube is increased, and an excellent sealed gas laser device that can achieve a long life of the laser tube can be realized. Is.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a sealed gas laser device according to a first embodiment of the present invention. FIG. 2 is a comparison of an indium alloy seal portion before heating between the first embodiment and a conventional sealed gas laser device. FIG. 3 is a block diagram of a sealed gas laser apparatus in a second embodiment of the present invention. FIG. 4 is an enlarged view of an optical component sealing portion of the sealed gas laser apparatus in a second embodiment of the present invention. FIG. 5 is a configuration diagram of a sealed gas laser apparatus according to a third embodiment of the present invention. FIG. 6 is a schematic configuration diagram of a metal flange portion of the sealed gas laser apparatus according to a third embodiment of the present invention. FIG. 7 is a block diagram of a conventional sealed gas laser device.
DESCRIPTION OF SYMBOLS 1 Optical component 2 Metal flange 3a, 3b Adjustment screw 35 C ring 4 Spring 6 Bellows 7 Fixing flange 8 Laser tube

Claims (4)

A metal flange to which a laser optical component is bonded is provided at the end of the laser tube, and a bonding surface between the laser optical component and the metal flange is bonded with an indium alloy seal formed by heating and melting gold and indium. A stationary gas laser apparatus, wherein the laser is bonded to gold bonded in advance to each of the bonding surfaces of the laser optical component and the metal flange and a bonding boundary on the inner peripheral side of the laser tube in the bonding surface. Formed at the joint boundary with an indium alloy seal formed on the joint surface formed by heating and melting gold and pre-attached in the vicinity of the joint boundary between the optical component and the metal flange A sealed gas laser device in which the inside of the laser tube is sealed with a fillet of an indium alloy seal . The gold that has been pre-adhered in the vicinity of the joining boundary adheres to one end of the wall surface of the metal flange that extends substantially perpendicularly from the joining boundary and to a part of the optical component for the laser from the joining boundary toward the inside of the laser tube. The sealed gas laser device according to claim 1, wherein the sealed gas laser device is made of gold. Sealing type gas laser device according to claim 1 or claim 2 in combination with resin-filled seal the junction boundary of the laser tube outer peripheral side in addition to the indium alloy seal. 4. The sealed gas laser device according to claim 1, wherein the metal flange is divided into two parts, and a metal C ring is used as a seal between the divided flanges. 5.

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