JPS63188980A - Slab-shaped solid-state laser device - Google Patents
Slab-shaped solid-state laser deviceInfo
- Publication number
- JPS63188980A JPS63188980A JP2100987A JP2100987A JPS63188980A JP S63188980 A JPS63188980 A JP S63188980A JP 2100987 A JP2100987 A JP 2100987A JP 2100987 A JP2100987 A JP 2100987A JP S63188980 A JPS63188980 A JP S63188980A
- Authority
- JP
- Japan
- Prior art keywords
- laser medium
- heat insulating
- sealing material
- pair
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003566 sealing material Substances 0.000 claims abstract description 28
- 239000011810 insulating material Substances 0.000 claims abstract description 25
- 238000007789 sealing Methods 0.000 abstract description 12
- 230000002093 peripheral effect Effects 0.000 abstract description 5
- 239000013013 elastic material Substances 0.000 abstract description 2
- 229920001971 elastomer Polymers 0.000 abstract description 2
- 229920003002 synthetic resin Polymers 0.000 abstract description 2
- 239000000057 synthetic resin Substances 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000002826 coolant Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
この発明はレーザ媒質が板状をなしたスラブ形固体レー
ザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a slab-type solid-state laser device in which a laser medium is plate-shaped.
（従来の技術）
固体レーザ装置にはそのレーザ媒質に断面が矩形の細長
い板状のものを用いたスラブ形固体レーザ装置がある。(Prior Art) Among solid-state laser devices, there is a slab-type solid-state laser device that uses an elongated plate-like material with a rectangular cross section as a laser medium.
このようなスラブ形固体レーザ装置はロッド状のレーザ
媒質を用いた場合のように熱影響によるレンズ作用が生
じずらいので、高出力のレーザ光を高繰返しで発振させ
ることができるという特徴を有する。しかしながら、上
記レーザ媒質を励起ランプによって光励起すれば、やは
りその熱影響を避けることができないから、ロッド状の
レーザ媒質と同様に冷却する必要がある。This type of slab-type solid-state laser device is characterized by being able to oscillate high-output laser light at high repetition rates because it is less likely to produce a lens effect due to thermal effects, unlike when a rod-shaped laser medium is used. . However, if the laser medium is optically excited by an excitation lamp, its thermal influence cannot be avoided, so it must be cooled in the same manner as the rod-shaped laser medium.
その際、冷却媒体がレーザ媒質の端面に流れると、発振
されるレーザ光が不安定となるから、上記冷却媒体がレ
ーザ媒質の端面に流れないようにシールする必要がある
。At this time, if the cooling medium flows to the end face of the laser medium, the oscillated laser light becomes unstable, so it is necessary to seal the cooling medium so that it does not flow to the end face of the laser medium.
従来、上記冷却媒体がレーザ媒質の端面に流れないよう
にシールするには、レーザ媒質とこれを支持する支持体
とのシールを要する箇所に接着剤を塗布したり、上記レ
ーザ媒質の端部外周面にリング状のシール材を取着し、
このシール材を介して上記支持体に支持するなどのこと
が行われていた。Conventionally, in order to seal the cooling medium so that it does not flow to the end face of the laser medium, adhesive is applied to the area where sealing is required between the laser medium and the support that supports it, or the outer periphery of the end of the laser medium is sealed. Attach a ring-shaped sealant to the surface,
It has been supported on the support body through this sealing material.
しかしながら、前者の手段によると、レーザ媒質を支持
体から取外すことが困難となるから、レーザ媒質の修理
、点検に際して非常に不便であり、実用的でない。また
、後者の手段によると、レーザ媒質の断面が矩形である
から、そのエツジ状の角部のシールが良好に行なえなか
ったり、シール材がレーザ媒質の角部によって早期に損
傷してしまうなどのことがあった。However, according to the former method, it is difficult to remove the laser medium from the support, which is extremely inconvenient and impractical when repairing or inspecting the laser medium. In addition, according to the latter method, since the cross section of the laser medium is rectangular, the edge-shaped corners may not be well sealed, and the sealing material may be damaged early by the corners of the laser medium. Something happened.
そこで、このような欠点を除去するため、実開昭６１−
１４２４６９号公報に示される先行技術が提案されてい
る。この先行技術はレーザ媒質を角部が丸みをおびた矩
形の断面形状にし、この外周面にリング状のシール材を
取着するようにしている。このようにすれば、確かに角
部がエツジ状でなくなるから、外周面全体を良好にシー
ルすることができるばかりか、シール材が損傷しやすい
ということもない。しかしながら、レーザ媒質の角部を
アール部にすると、その角部においてレーザ光が内部全
反射しなくなるから、レーザ媒質全体をレーザ光の発振
に有効に利用することができない、つまり発振効率が低
下するということがある。Therefore, in order to eliminate such drawbacks,
A prior art technique disclosed in Japanese Patent No. 142469 has been proposed. In this prior art, the laser medium has a rectangular cross-sectional shape with rounded corners, and a ring-shaped sealing material is attached to the outer peripheral surface of the laser medium. By doing this, the corners are certainly not edge-like, so not only can the entire outer circumferential surface be sealed well, but the sealing material will not be easily damaged. However, if the corners of the laser medium are rounded, the laser light will not be totally internally reflected at the corners, so the entire laser medium cannot be effectively used for laser light oscillation, which will reduce the oscillation efficiency. That's what happens.
また、シール材をレーザ媒質の外周面の全周に押付ける
ことになるから、この部分においてレーザ媒質に大きな
機械的応力が生じ、これによってレーザ媒質中を通過す
るレーザ光の波面が大きく乱れるということも生じる。In addition, since the sealing material is pressed against the entire circumference of the laser medium, large mechanical stress is generated on the laser medium in this area, which greatly disturbs the wavefront of the laser light passing through the laser medium. It also happens.
（発明が解決しようとする問題点）
この発明は上記事情にもとず゛きなされたもので、その
目的とするところは、レーザ媒質の角部をアール部にし
なくとも、シール材によるシールを良好に行なえ、しか
もそのシールによってレーザ媒質に機械的応力を生じさ
せることがないようにしたスラブ形固体レーザ装置を提
供することにある。(Problems to be Solved by the Invention) This invention has been made based on the above circumstances, and its purpose is to achieve sealing with a sealing material without making the corners of the laser medium rounded. It is an object of the present invention to provide a slab-type solid-state laser device which can be operated satisfactorily and which does not generate mechanical stress in the laser medium due to its sealing.
し発明の構成］
（問題点を解決するための手段及び作用）上記問題点を
解決するためにこの発明は、矩形断面で一対の側面がほ
ぼ平行に対向する光学的平滑面に形成されたレーザ媒質
と、このレーザ媒質の上記一対の平滑面と異なる一対の
側面に接合固定された断熱材と、上記レーザ媒質の平滑
面と上記断熱材の側面とがなす平面の周辺部全長にわた
って設けられた環状のシール材と、このシール材を介し
て上記レーザ媒質を支持する支持体とを具備する。そし
て、上記レーザ媒質の平滑面と断熱材の側面とに接合す
るシール材によってシールを良好に行なえ、しかもレー
ザ媒質に大きな応力が加わらないようにする。[Structure of the Invention] (Means and Effects for Solving the Problems) In order to solve the above problems, the present invention provides a laser beam formed on an optically smooth surface with a rectangular cross section and a pair of side surfaces substantially parallel to each other. A medium, a heat insulating material bonded and fixed to a pair of side surfaces different from the pair of smooth surfaces of the laser medium, and a heat insulating material provided over the entire length of a peripheral portion of a plane formed by the smooth surface of the laser medium and the side surfaces of the heat insulating material. The device includes an annular sealing material and a support that supports the laser medium via the sealing material. The sealing material bonded to the smooth surface of the laser medium and the side surface of the heat insulating material provides good sealing, and also prevents large stress from being applied to the laser medium.
（実施例） 以下、この発明の一実施例を図面を参照して説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.
第１図に示す固体レーザ装置はスラブ形のレーザ媒質１
を有する。つまり、このレーザ媒質１は断面が矩形で、
対向する一対の側面が光学的な平滑面２に形成され、両
端面が上記平滑面２に対して所定の角度で傾斜した傾斜
面３に形成されている。このように形成されたレーザ媒
質１の上記一対の平滑面２と異なる一対の側面４にはそ
れぞれ断熱材５が接合固定されている。この断熱材５は
シリコンゴムやテフロンなどの材料によって上記レーザ
媒質１と同じ厚さの断面矩形状に形成されていて、その
−側面を上記レーザ媒質１の側面４に接着剤で固定され
ている。したがって、レーザ媒質１の一対の平滑面２と
同一方向に位置する断熱材５の一対の側面６とはほぼ面
一をなしている。The solid-state laser device shown in Fig. 1 has a slab-shaped laser medium 1.
has. In other words, this laser medium 1 has a rectangular cross section,
A pair of opposing side surfaces are formed as optically smooth surfaces 2, and both end surfaces are formed as inclined surfaces 3 inclined at a predetermined angle with respect to the smooth surface 2. A heat insulating material 5 is bonded and fixed to a pair of side surfaces 4 different from the pair of smooth surfaces 2 of the laser medium 1 thus formed. This heat insulating material 5 is made of a material such as silicone rubber or Teflon and has a rectangular cross section with the same thickness as the laser medium 1, and its negative side is fixed to the side surface 4 of the laser medium 1 with adhesive. . Therefore, the pair of smooth surfaces 2 of the laser medium 1 and the pair of side surfaces 6 of the heat insulating material 5 located in the same direction are substantially flush with each other.
し゛−ザ媒質１の両側面４に断熱材５を接合すると、レ
ーザ媒質１の平滑面２が光励起されたときに受ける熱が
その幅方向両端から放散しずらくなる。したがって、上
記断熱材５によりレーザ媒質１の幅方向に沿う温度勾配
をほぼ一定にし、出力の安定化を計ることができるとい
う点で極めて有効である。When the heat insulating material 5 is bonded to both sides 4 of the laser medium 1, the heat received when the smooth surface 2 of the laser medium 1 is optically excited is difficult to dissipate from both ends in the width direction. Therefore, the heat insulating material 5 is extremely effective in that the temperature gradient along the width direction of the laser medium 1 can be made almost constant and the output can be stabilized.
このように両側面４に断熱材５が接合されたレーザ媒質
１は、その平滑面２と断熱材５の側面６とがなす一対の
平面の周辺部に沿ってそれぞれゴムや合成樹脂などの弾
性材料によって矩形環状に形成されたシール材７が接合
され、これらシール材７を介して支持体８に支持されて
いる。この支持体８はレーザ媒質１と断熱材５とがなす
断面形状よりもやや大きな相似形の中空断面を有する筒
状をなすよう一対のカバー９をねじ１１で接合固定して
形成され、その内部に上記レーザ媒質１が挿通されてい
る。そして、上記シール材７は上記一対のカバー９の内
面によって押圧され、このカバー９の内面と上記レーザ
媒質１の平滑面２および断熱材５の側面６とがなす平面
との間の気密を保っている。The laser medium 1, which has the heat insulating material 5 bonded to both side surfaces 4 in this way, has an elastic material such as rubber or synthetic resin along the periphery of the pair of planes formed by the smooth surface 2 and the side surface 6 of the heat insulating material 5. Sealing members 7 formed into a rectangular ring shape made of material are joined and supported by a support body 8 via these sealing members 7. This support body 8 is formed by joining and fixing a pair of covers 9 with screws 11 so as to form a cylindrical shape having a similar hollow cross section that is slightly larger than the cross-sectional shape formed by the laser medium 1 and the heat insulating material 5. The laser medium 1 is inserted through. The sealing material 7 is pressed by the inner surfaces of the pair of covers 9 to maintain airtightness between the inner surfaces of the covers 9 and the plane formed by the smooth surface 2 of the laser medium 1 and the side surface 6 of the heat insulating material 5. ing.
なお、上記支持体８を形成する一対のカバー９には、レ
ーザ媒質１の平滑面２と対抗する部分にそれぞれ窓１２
が形成されている。これらの窓１２は図示せぬ励起ラン
プによって上記レーザ媒質１を光励起したり、液体や気
体などの冷却媒体を上記支持体８内に流して上記レーザ
媒質１を冷却するために利用される。なお、支持体８と
上記励起ランプとはともに図示せぬ装置本体に支持され
るようになっている。The pair of covers 9 forming the support body 8 are provided with windows 12 at portions facing the smooth surface 2 of the laser medium 1.
is formed. These windows 12 are used to optically excite the laser medium 1 with an excitation lamp (not shown) and to cool the laser medium 1 by flowing a cooling medium such as liquid or gas into the support 8. Incidentally, both the support body 8 and the excitation lamp are supported by a device main body (not shown).
このような構造の固体レーザ装置によれば、両側面４に
断熱材５が接合されたレーザ媒質１は、その平滑面２と
断熱材５の側面６とがなす平面の周辺部がシール材７に
よって気密にシールされている。したがって、このレー
ザ媒質１を冷却するための冷却媒体がレーザ媒質１の傾
斜面３に流れて出力が不安定になるようなことがない。According to the solid-state laser device having such a structure, the laser medium 1 has the heat insulating material 5 bonded to both side surfaces 4, and the peripheral portion of the plane formed by the smooth surface 2 and the side surface 6 of the heat insulating material 5 is the seal material 7. is hermetically sealed. Therefore, the cooling medium for cooling the laser medium 1 does not flow onto the inclined surface 3 of the laser medium 1 and the output becomes unstable.
上記シール材７はたとえばＯリング（シリコン０リング
）あるいは矩形断面のガスケットを用いるとよい。As the sealing material 7, for example, an O-ring (silicon O-ring) or a gasket with a rectangular cross section may be used.
ところで、上記シール材７はレーザ媒質１と断熱材５と
がなす平面に密着して上記レーザ媒質１をシールしてい
る。したがって、シール材７によるシール部位にはエツ
ジ部がないから、シールを良好に行うことができ、また
シール材７はレーザ媒質１のエツジ部に当たることがな
いから、早期に損傷するようなことがない。さらに、レ
ーザ媒質ｌの角部を丸くせずにシールを良好に行うこと
ができるので、レーザ媒質１の断面全体をレーザ発振に
有効に利用することができる。また、レーザ媒質１を接
着剤によらず、シール材によって支持体８に気密に支持
することができるから、修理点検時にレーザ媒質１を支
持体８から簡単に取外すことができる。By the way, the sealing material 7 seals the laser medium 1 by closely contacting the plane formed by the laser medium 1 and the heat insulating material 5. Therefore, since there are no edges in the area sealed by the sealing material 7, good sealing can be achieved, and since the sealing material 7 does not come into contact with the edges of the laser medium 1, early damage can be avoided. do not have. Furthermore, since the corners of the laser medium 1 can be well sealed without rounding the corners, the entire cross section of the laser medium 1 can be effectively used for laser oscillation. Further, since the laser medium 1 can be airtightly supported on the support body 8 using a sealing material without using an adhesive, the laser medium 1 can be easily removed from the support body 8 at the time of repair or inspection.
さらに、シール材７はレーザ媒質１の平滑面２の幅方向
に圧接するだけで、レーザ媒質１に大きな機械的応力を
与えないから、レーザ媒質１を通過するレーザ光の波面
が乱れ、レーザ光の品質が低下するというようなことが
ない。Furthermore, since the sealing material 7 only presses against the smooth surface 2 of the laser medium 1 in the width direction and does not apply a large mechanical stress to the laser medium 1, the wavefront of the laser light passing through the laser medium 1 is disturbed and the laser light There is no such thing as a drop in quality.
［発明の効果］
以上述べたようにこの発明は、矩形断面のレーザ媒質の
側面のうちの、一対の光学的平滑面と異なる一対の側面
に断熱材を接合固定し、上記平滑面と断熱材の側面とが
なす平面の周辺部の全周にわたってシール材を設け、こ
のシール材を介してレーザ媒質を支持体に支持するよう
にした。したがって、シール材をレーザ媒質のエツジ部
に接触させずにシールをすることができるので、上記シ
ール材によるシールを確実に、かつシール材を損傷させ
ることなく行なえる。しかも、従来のようにレーザ媒質
の角部をアール部にせずにすむから、レーザ媒質の断面
全体をレーザ動作にを効に利用することができる。さら
に、シール材はレーザ媒質の平滑面の幅方向に沿って圧
接するだけで、従来のように外周面全体に圧接しないか
ら、レーザ媒質に与える機械的応力が少なくなり、この
レーザ媒質を通過するレーザ光の波面の歪みを軽減する
ことができる。[Effects of the Invention] As described above, the present invention has a heat insulating material bonded and fixed to a pair of side surfaces of a laser medium having a rectangular cross section that are different from a pair of optically smooth surfaces, and the smooth surface and the heat insulating material A sealing material was provided all around the periphery of the plane formed by the side surface of the laser medium, and the laser medium was supported on the support body through this sealing material. Therefore, since sealing can be performed without bringing the sealing material into contact with the edge portion of the laser medium, sealing using the sealing material can be performed reliably and without damaging the sealing material. Furthermore, since the corners of the laser medium do not need to be rounded as in the conventional case, the entire cross section of the laser medium can be effectively utilized for laser operation. Furthermore, since the sealing material is only pressed along the width direction of the smooth surface of the laser medium, and not the entire outer circumferential surface as in conventional methods, the mechanical stress applied to the laser medium is reduced, and the light passing through the laser medium is Distortion of the wavefront of laser light can be reduced.
図面はこの発明の一実施例を示し、第１図はミ半禾＝±
＝平面図、第２図は端面図、第３図は第１図■−■線に
沿う断面図、第４図はレーザ媒質の平面図である。
１・・・レーザ媒質、２・・・平滑面、５・・・断熱材
、７・・・シール材、８・・・支持体。The drawings show an embodiment of the present invention, and FIG.
= plan view, FIG. 2 is an end view, FIG. 3 is a sectional view taken along line 1--2 in FIG. 1, and FIG. 4 is a plan view of the laser medium. DESCRIPTION OF SYMBOLS 1... Laser medium, 2... Smooth surface, 5... Heat insulating material, 7... Seal material, 8... Support body.
Claims (1)
面に形成されたレーザ媒質と、このレーザ媒質の上記一
対の平滑面と異なる一対の側面に接合固定された断熱材
と、上記レーザ媒質の平滑面と上記断熱材の側面とがな
す平面の周辺部全長にわたって設けられた環状のシール
材と、このシール材を介して上記レーザ媒質を支持する
支持体とを具備したことを特徴とするスラブ形固体レー
ザ装置。a laser medium formed into an optically smooth surface with a rectangular cross section and a pair of side surfaces substantially parallel to each other; a heat insulating material bonded and fixed to a pair of side surfaces of the laser medium different from the pair of smooth surfaces; and the laser medium. and a support member that supports the laser medium via the sealing material. Slab-type solid-state laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2100987A JPS63188980A (en) | 1987-01-31 | 1987-01-31 | Slab-shaped solid-state laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2100987A JPS63188980A (en) | 1987-01-31 | 1987-01-31 | Slab-shaped solid-state laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188980A true JPS63188980A (en) | 1988-08-04 |
Family
ID=12043065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2100987A Pending JPS63188980A (en) | 1987-01-31 | 1987-01-31 | Slab-shaped solid-state laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188980A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372687A (en) * | 1988-06-22 | 1991-03-27 | Fuji Electric Co Ltd | Solid-state laser device |
| DE4433888C2 (en) * | 1993-09-24 | 2001-08-09 | Mitsubishi Electric Corp | Solid state laser with cooling device |
-
1987
- 1987-01-31 JP JP2100987A patent/JPS63188980A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372687A (en) * | 1988-06-22 | 1991-03-27 | Fuji Electric Co Ltd | Solid-state laser device |
| DE4433888C2 (en) * | 1993-09-24 | 2001-08-09 | Mitsubishi Electric Corp | Solid state laser with cooling device |
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