JP4637505B2 - Magnetic sensor device - Google Patents

Description

  The present invention relates to an electronic component storage package for storing an electronic component for detecting a change in a magnetic field, and a magnetic device in which an electronic component is stored in the electronic component storage package and a permanent magnet is disposed below the electronic component. The present invention relates to a sensor device.

  A function to automatically detect and identify a magnetic recording medium such as a vending machine such as a ticket or an ATM (Automated Teller Machine), for example, a bill in which magnetic powder is mixed in printing ink. In a required apparatus, a magnetic sensor device is used as a device for automatically detecting and identifying a magnetic recording medium.

  In general, a magnetic sensor device stores an electronic component that detects a change in a magnetic field in an electronic component storage package (hereinafter also referred to as a package) together with a permanent magnet (an iron magnet, a ferrite magnet, or the like) that generates a magnetic field. It is formed by.

  The package generally used in this case is made of an electrically insulating material such as resin, and has a magnet mounting portion for mounting a magnet on one main surface and an electronic component on the other main surface. It consists of a substrate with a mounting part, a wiring conductor drawn from the mounting part of the board to one main surface, etc., and a metal material with wear-resistant processing on the surface, and is bonded to the outer peripheral part of the other main surface of the substrate And a lid that covers the mounting portion.

  An electronic component made of In-Sb, In-As, Ge-Si, or the like is mounted on the mounting portion of the package, and the electrode is connected to the exposed portion of the wiring conductor via a bonding wire or the like. After electrically connecting and mounting and fixing a magnet on the other main surface of the substrate via a resin adhesive or the like, the electronic component is covered with a lid and hermetically sealed to complete the magnetic sensor device.

  When the magnetic recording medium is moved along the upper surface of the lid of the magnetic sensor device, the magnetic recording medium moves in the magnetic field generated by the permanent magnet, and the magnetic field changes with the movement. By detecting this change with an electronic component, detection and identification of the magnetic recording medium, for example, confirmation of the type of banknote, and the like are performed.

  The magnetic recording medium is transferred in a state of being placed on a transfer belt (endless belt) or the like, and is sequentially sent to the upper surface of the lid of the magnetic sensor device arranged at the same height as the transfer surface of the transfer belt.

Note that the lid is made of a wear-resistant metal material, etc., so that the surface of the lid can be made as smooth as possible so that the magnetic recording medium can move smoothly, and the lid can be made conductive. This is because, for example, inductive noise due to a change in the magnetic field is prevented and identification errors are prevented.
JP 1998-227845 A Japanese Patent No. 1995-244141

  However, in the above-described conventional package and magnetic sensor device, since the lid is formed of a metal material, the upper surface of the lid is easily worn by contact with the magnetic recording medium during use, and is stable over a long period of time. There was a problem that it was difficult to use.

  In addition, the electronic component is hermetically sealed, and a certain distance is secured between the upper surface of the electronic component and the lid to secure the bonding wire loop height that connects the electrode of the electronic component to the wiring conductor. In order to prevent deformation of the lid and to allow the magnetic recording medium to move smoothly on the top surface of the lid over a long period of time, it is necessary to increase the thickness of the lid to ensure rigidity. For some reasons, it is difficult to reduce the thickness.

  The present invention has been completed in view of the above-described conventional problems, and its object is to stably detect and identify a magnetic recording medium over a long period of time, and is excellent in long-term reliability and easy to reduce in thickness. Another object of the present invention is to provide an electronic component storage package and a magnetic sensor device.

The magnetic sensor device according to the present invention includes an insulating base made of ceramics in which an electronic component for detecting a change in a magnetic field is housed in a recess formed in the central portion of one main surface, and an electrode pad formed on the bottom surface of the recess. , the one with the outer peripheral portion derived wiring conductors of the main surface of the insulating substrate from a bottom surface of said recess, said formed in the outer peripheral portion of the one main surface of the insulating substrate, electrically connected to said wiring conductor And the insulating base has an electronic component storage package in which the arithmetic mean roughness of the surface of the other main surface is 0.5 μm or less, and the electrode is stored in the recess and the electrode is the electrode pad. The electronic component electrically connected to the electronic component, and a permanent magnet disposed below the electronic component, according to the magnetic information of the magnetic recording medium moving along the other main surface of the insulating base Permanent The change in the magnetic field generated between the stone and the magnetic information and detects by the electronic component.

In the magnetic sensor device of the present invention, it is preferable that the insulating base is formed with a chamfered portion having an arc shape with a sectional radius of 0.05 to 1 mm at a corner portion between the other main surface and the side surface. It is characterized by being.

In the magnetic sensor device of the present invention, it is preferable that the insulating base has a chamfered portion having a width of 0.05 to 1 mm at a corner between the other main surface and the side surface. .

In the magnetic sensor device of the present invention, it is preferable that the wiring conductor is made of a metallized layer of a nonmagnetic metal.

The magnetic sensor device of the present invention is preferably characterized in that a magnetic metal layer is formed on the inner surface of the recess.

In the magnetic sensor device of the present invention, it is preferable that the wiring conductor is coated with a nickel plating layer having a phosphorus content of 3 to 10% by mass in a portion exposed on the bottom surface of the recess. Features.

According to the magnetic sensor device of the present invention, in an electronic component sealing package, an insulating substrate made of ceramics in which an electronic component for detecting a change in a magnetic field is housed in a concave portion formed in the central portion of one main surface, and the concave portion The electrode pad formed on the bottom surface of the insulating substrate, the wiring conductor led out from the bottom surface of the concave portion to the outer peripheral portion of the one main surface of the insulating base, and formed on the outer peripheral portion of the one main surface of the insulating base, And the insulating base has an arithmetic average roughness of the surface of the other main surface of 0.5 μm or less. When a magnetic recording medium such as a bill is moved along the other main surface of the insulating base when a permanent magnet is arranged below the component to generate a magnetic field and the change in the magnetic field is detected by the electronic component, Magnetic recording media by electronic components Knowledge, it is possible to identify stably.

  That is, since the insulating base is made of ceramics, the wear resistance can be increased as compared with the metal material, and therefore the magnetic recording medium can be stably moved without the insulating base being worn over a long period of time. Further, since the arithmetic mean roughness (Ra) of the surface of the other main surface of the insulating substrate is as smooth as 0.5 μm or less, the magnetic recording medium can move smoothly along the other main surface, and magnetic recording It is possible to accurately detect and identify the medium.

  In addition, since the electrode pad is formed on the bottom surface of the concave portion of the insulating base and the electrode formed on the main surface of the electronic component can be directly connected to the electrode pad via solder or the like, the loop height of the bonding wire can be reduced. It is not necessary to consider securing, etc., and the magnetic recording medium can be detected and identified by moving the magnetic recording medium in direct contact with the other main surface of the insulating substrate. It can also be.

In the magnetic sensor device of the present invention, preferably, the insulating base is formed with a chamfered portion having a circular shape with a radius of curvature of 0.05 to 1 mm at a corner portion between the other main surface and the side surface. Therefore, the magnetic recording medium transferred on the transfer belt or the like is not caught by the corner of the insulating substrate, and smoothly along the other main surface of the insulating substrate along the surface of the chamfered portion. moving to can Rukoto.

In the magnetic sensor device of the present invention, it is preferable that the insulating base has a chamfered portion having a width of 0.05 to 1 mm at the corner between the other main surface and the side surface. the magnetic recording medium that has been transported aboard it without that could get caught on the corner portion of the insulating substrate, can you to move along the other main surface of the smooth insulating substrate along the surface of the chamfer.

In the magnetic sensor device of the present invention, preferably, the wiring conductor is made of a metallized layer of a nonmagnetic metal, so that the wiring conductor through which the magnetic detection electric signal is transmitted is present in the magnetic field. It is possible to more effectively prevent the magnetic recording medium from changing, and to detect and identify the magnetic recording medium with higher accuracy.

  Further, the insulating base made of ceramic and the wiring conductor made of the metallized layer are formed by simultaneous firing, for example, by applying a metal paste that becomes the metallized layer to an unfired ceramic green sheet that becomes the insulating base. Therefore, the bonding between the insulating base and the wiring conductor can be strengthened, and the long-term reliability can be further improved.

In addition, since the magnetic sensor device of the present invention preferably has a magnetic metal layer formed on the inner side surface of the recess, noise such as inductive noise due to external radio waves is blocked by the magnetic metal layer on the inner side surface of the recess. is, it is possible to more effectively prevent the occurring in the electronic component, more detection accuracy magnetic recording medium, identifying can cause I rows.

In the magnetic sensor device of the present invention, it is preferable that the wiring conductor has a nickel plating layer having a phosphorus content of 3 to 10% by mass, which is exposed on the bottom surface of the recess. The plating layer can improve solder wettability with respect to the electrode pad, and the electrode of the electronic component can be more reliably electrically connected to the electrode pad via the solder. Moreover, the phosphorus content of the nickel plating layer is 3 to 10% by mass, and the crystallinity of the nickel plating layer can be reduced by the action of the phosphorus component to make it nonmagnetic. As a result, the electrode pad can be made more reliable in electrical connection with the electrode, better in solder wettability and less magnetized, and can be used as an electrical signal generated in electronic components in response to changes in the magnetic field. An electric signal can be more reliably transmitted to an external electric circuit without causing noise or the like.

  The magnetic sensor device of the present invention is arranged in the electronic component storage package having the above-described configuration of the present invention, the electronic component that is stored in the recess and the electrode is electrically connected to the electrode pad, and is disposed below the electronic component. The magnetic information of the magnetic recording medium that moves along the other main surface of the insulating substrate is detected by the electronic component, and the change in the magnetic field generated between the permanent magnet and the magnetic information is detected by the electronic component. It is possible to provide a magnetic sensor device excellent in long-term reliability, which can detect and identify a magnetic recording medium stably over a long period of time.

It will be described in detail based on the magnetic sensor device in the accompanying drawings of the electronic component storing package and the present invention in the present invention. FIG. 1 is a cross-sectional view showing an example of an embodiment of a package according to the present invention and a magnetic sensor device according to the present invention . In FIG. 1, 1 is an insulating substrate, 2 is an electrode pad, 3 is a wiring conductor, and 4 is a connection pad. The insulating substrate 1, electrode pad 2, wiring conductor 3 and connection pad 4 mainly constitute a package 9.

  The insulating substrate 1 is formed of ceramics such as an aluminum oxide sintered body, a glass ceramic sintered body, an aluminum nitride sintered body, and a mullite sintered body. The insulating base 1 has a concave portion 1a for accommodating the electronic component 5 on one main surface, and a mounting portion 1b for the electronic component 5 is formed on the bottom surface of the concave portion 1a.

  When such an insulating substrate 1 is made of, for example, an aluminum oxide sintered body, raw powders such as aluminum oxide and silicon oxide are formed into a sheet shape together with an organic solvent and a binder to obtain a plurality of green sheets. Appropriate drilling is performed and the layers are stacked one above the other and fired at about 1600 ° C.

  The electronic component 5 has a function of detecting a change due to the external magnetism of the magnetic field generated by the permanent magnet and transmitting an electric signal according to the change. As will be described later, this electric signal is transmitted to an external electric circuit (not shown) through the electrode pad 2, the wiring conductor 3, and the connection pad 4.

  The electronic component 5 as a magnetic detection element that detects a change in a magnetic field is made of a semiconductor material having a high electron mobility such as In—Sb, In—As, or Ge—Si. The electronic component 5 has electrodes (not shown) formed on the main surface.

  In the insulating base 1, a wiring conductor 3 is led out from the mounting portion 1b to the outer peripheral portion of one main surface. An electrode pad 2 is formed on the mounting portion 1 b of the insulating base 1, and a connection pad 4 electrically connected to the wiring conductor 3 is formed on the outer peripheral portion of one main surface of the insulating base 1. .

  The wiring conductor 3, the electrode pad 2, and the connection pad 4 function as conductive paths that lead out the electrodes of the electronic component 5 to the outside of the insulating base 1 and are electrically connected to an external electric circuit.

  The electrode of the electronic component 5 mounted on the mounting portion 1b is electrically connected to the electrode pad 2 via a conductive material such as solder 6, and the connection pad 4 is connected to a predetermined part of the external electric circuit via the solder 6 or the like. Thus, the electrodes of the electronic component 5 are electrically connected to an external electric circuit via the electrode pad 2, the wiring conductor 3, and the connection pad 4, and an electric signal is transmitted from the electronic component 5 to the external electric circuit. Is transmitted.

  The wiring conductor 3, the electrode pad 2, and the connection pad 4 are formed of a metal material such as tungsten, molybdenum, copper, silver, or palladium. The wiring conductor 3, the electrode pad 2 and the connection pad 4 are preferably made of the same metal material in consideration of productivity, for example, and when made of tungsten, a metal prepared by kneading tungsten powder with an organic solvent and a resin binder The paste is formed by printing on a green sheet to be the substrate 1 by a screen printing method.

  The wiring conductor 3, the electrode pad 2, and the connection pad 4 are preferably coated with a plating layer such as nickel or gold on the exposed surface. Thereby, oxidative corrosion of the wiring conductor 3 etc. can be prevented more effectively, and the wettability of the solder 6 with respect to the wiring conductor 3 etc. can be improved.

  The mounting part 1b on which the electronic component 5 is mounted has the sealing resin 7 filled at least between the electronic component 5 and the surface of the mounting part 1b after the electronic component 5 is mounted. It is preferable that the electrode pad 2, the solder 6, etc. are covered with the sealing resin 7. As a result, deterioration such as oxidative corrosion of the electrode, electrode pad 2, solder 6 and the like can be more reliably prevented over a long period of time, and the mechanical connection between the electronic component 5 and the mounting portion 1b is further strengthened. The connection reliability of the electronic component 5 can be further improved.

  A contact surface 1c in contact with the magnetic recording medium is formed on the other main surface of the insulating substrate 1, and the arithmetic average roughness (Ra) of the surface of the contact surface 1c is 0.5 μm or less.

  Then, for example, a permanent magnet (not shown) is arranged below the electronic component 5 by means such as attaching to the lower surface of the electronic component 5 to generate a magnetic field, and the change in the magnetic field is detected by the electronic component 5. When the magnetic recording medium such as a banknote is moved along the contact surface 1c of the other main surface, the magnetic field changes, and the change in the magnetic field is detected by the electronic component 5 to detect the magnetic recording medium. Detection and identification can be performed.

  In order to feed the magnetic recording medium to the other main surface of the insulating substrate 1, for example, a transfer belt (endless belt or the like) (not shown) is set so that the other main surface of the insulating substrate 1 and the transfer surface are at the same height. And a means for sequentially transferring and feeding the magnetic recording medium from the transfer belt can be used.

  In this case, since the insulating base 1 is made of ceramics and can have higher wear resistance than the metal material, the magnetic recording medium can be stably moved without the contact surface 1c being worn for a long time. .

  Further, since the Ra of the contact surface 1c is as smooth as 0.5 μm or less, the magnetic recording medium can move smoothly along the surface of the contact surface 1c, and the magnetic recording medium can be detected and identified with high accuracy. be able to.

  As the ceramic constituting the insulating substrate 1 having the contact surface 1c, it is preferable to use an aluminum oxide sintered body because it is necessary to have excellent wear resistance.

  In order to set Ra of the surface of the contact surface 1c to 0.5 μm or less, for example, a means such as applying mechanical polishing to the other main surface of the insulating substrate 1 can be used.

  If the Ra of the surface of the contact surface 1c exceeds 0.5 μm, there is a problem that the magnetic recording medium to be detected is damaged.

  The roughness of the contact surface 1c is preferably as small as 0.5 μm or less for smooth movement of the magnetic recording medium. However, when the roughness is smaller than 0.005 μm, the magnetic recording medium is moved smoothly. The effect of the process does not improve any more, and on the contrary, it takes a long time for processing such as polishing, and it is also necessary to increase the processing accuracy. Therefore, the productivity of the package 9 is reduced. In addition, the cost increases. Therefore, the surface roughness of the contact surface 1c is more preferably in the range of 0.005 to 0.5 μm in terms of arithmetic average roughness (Ra).

Also, the package 9 in the present invention, the electrode pads 2 are formed on the bottom surface (mounting portion 1b) of the recess 1a of the insulating substrate 1, the solder 6 or the like to the electrode pad 2 an electrode formed on the main surface of the electronic component 5 Therefore, it is not necessary to consider securing the loop height of the bonding wire as in the prior art, while the magnetic recording medium is in direct contact with the other main surface of the insulating substrate 1. detected the moved, since such that it is possible to perform identification, it is possible to make the thickness of the magnetic sensor device formed using this package 9 easily.

Further, in the package 9 according to the present invention, the insulating substrate 1 has a chamfered portion 1d having a circular arc shape with a radius of curvature of 0.05 to 1 mm at the corner between the other main surface and the side surface. It is preferable.

Further, in the package 9 according to the present invention, the insulating substrate 1 has a chamfered 1e portion having a width (width in a longitudinal section as shown in FIG. 1) of 0.05 to 1 mm at a corner between the other main surface and the side surface. It is preferable that

With the configuration in which the chamfered portions 1d and 1e are formed, the magnetic recording medium transferred on the transfer belt or the like is not caught by the corners of the insulating substrate 1 and smoothly along the surfaces of the chamfered portions 1d and 1e. can it to move along the other main surface of the insulating substrate 1 in.

  The chamfered portion 1e is formed by chamfering a corner portion between the other main surface and the side surface of the insulating substrate 1 by a processing means such as polishing or cutting. Such processing may be performed by chamfering the corresponding corners of the green sheet when the insulating base 1 made of ceramics is manufactured by laminating the green sheets.

  Then, the chamfered portions 1d and 1e are sufficiently large by forming the chamfered portion 1d having an arc shape with a curvature radius of 0.05 to 1 mm or the chamfered 1e portion having a width of 0.05 to 1 mm. As a result, the smooth movement of the magnetic recording medium can be ensured. Further, the chamfered portions 1d and 1e can be easily processed and formed, and the productivity of the package 9 can be improved.

Also, the package 9 in the present invention, the wiring conductors 3 are preferably made of metallized layers of non-magnetic metal. Thereby, it is possible to more effectively prevent the magnetic field from being changed due to the presence of the wiring conductor 3 through which a relatively weak electrical signal is transmitted in the magnetic field, and to detect and identify the magnetic recording medium more effectively. It can row a Ukoto with a high degree of accuracy.

  The insulating base 1 made of ceramic and the wiring conductor 3 made of a metallized layer can be simultaneously fired by, for example, applying a metal paste that becomes a metallized layer to an unfired ceramic green sheet that becomes the insulating base 1. Since it can be formed, the bonding between the insulating substrate 1 and the wiring conductor 3 can be strengthened, and the long-term reliability can be further improved.

  As the nonmagnetic metal metallization layer, a metallization layer of a metal material such as tungsten or molybdenum can be used.

The package 9 according to the present invention preferably has a magnetic metal layer (not shown) formed on the inner surface of the recess 1a. This makes it possible to absorb and block radio waves and the like that enter the recess 1a with the magnetic metal layer, thereby more effectively preventing noise such as inductive noise from external radio waves from being generated in the electronic component. Thus, the magnetic recording medium can be detected and identified with higher accuracy.

  The magnetic metal layer is made of a metal material such as nickel or cobalt, and can be formed by a plating method or a vapor deposition method.

Further, in the package 9 according to the present invention, the electrode pad 2 has a nickel plating layer (not shown) having a phosphorus content of 3 to 10% by mass attached to a portion exposed to the mounting portion 1b. Is preferred. This nickel plating layer can improve solder wettability and the like with respect to the electrode pad 2, and the electrodes of the electronic component 5 can be more reliably electrically connected to the electrode pad 2 via solder.

  In addition, since the phosphorus content of the nickel plating layer is 3 to 10% by mass, the crystallinity of the nickel plating layer can be reduced by the action of the phosphorus component to make it nonmagnetic. As a result, the electrode pad 2 has much better solder wettability and less magnetism, and the electric signal generated in the electronic component 5 in response to a change in the magnetic field is more reliably externally generated without causing noise or the like. Can be transmitted to an electrical circuit.

  In this case, if the phosphorus content is less than 3% by mass, the nickel plating layer has magnetism, and noise is likely to occur in the electrode pad 2 part when transmitting an electric signal. If the content exceeds 10% by mass, the nickel plating layer There is a tendency that the bonding stress of the nickel plating layer with respect to the electrode pad 2 is deteriorated due to an increase in the internal stress.

  If the wiring conductor 3 and the connection pad 4 are also covered with the same nickel plating layer as that of the electrode pad 2, the generation of noise and the like can be prevented more reliably, and the accuracy of detection and identification of the magnetic recording medium can be prevented. Is more preferable because it can be further increased.

  And while mounting the electronic component 5 in the mounting part 1b, it joins to the mounting part 1b via brazing material, glass, resin adhesive, etc., and the electrode of the electronic component 5 is electrically connected to the electrode pad 2 via the solder 6 etc. The magnetic sensor device according to the present invention is configured by connecting them together and disposing a permanent magnet below the electronic component 5.

  In order to dispose the permanent magnet below the electronic component 5, a method of attaching the permanent magnet to the main surface (the lower surface in the example of FIG. 1) opposite to the main surface on which the electrodes of the electronic component 5 are formed, or magnetic A method such as a method of attaching a permanent magnet to a portion below the electronic component 5 in the external circuit board on which the sensor device is mounted can be used.

  A permanent magnet (not shown) disposed below the electronic component 5 is a rare earth permanent magnet such as Nd—Fe—B or Sm—Co, and the main surface of the electronic component 5 or an external substrate. Etc. are bonded and fixed by an adhesive means such as a resin adhesive.

  The permanent magnet is for generating a magnetic field that is magnetically coupled to the external magnetism, and can easily and firmly adhere to the main surface of the electronic component 5 and has a large coupling with the external magnetism. Rare-earth permanent magnets such as B-based and Sm-Co-based materials are preferably used.

  The magnetic sensor device detects changes in the magnetic field generated between the permanent magnet and the magnetic information by the electronic component 5 in the magnetic information of the magnetic recording medium that moves along the contact surface 1c. The detected change in the magnetic field is converted into an electric signal by the electronic component 5 and transmitted to the external electric circuit via the wiring conductor 3. With the transmitted electrical signal, operations such as ticket sales are performed in a device (such as a vending machine) incorporating an external electrical circuit.

  According to the magnetic sensor device of the present invention, the electronic component 5 and the permanent magnet are mounted and accommodated in the package 9 having the above-described configuration. It is possible to provide a magnetic sensor device excellent in long-term reliability that can stably detect and identify a magnetic recording medium.

  In the present invention, the other main surface of the insulating substrate 1 may be a curved surface such as a convex arc. In this case, the magnetic recording medium can be further prevented from being caught on the other main surface.

The insulating substrate 1 is formed of an aluminum oxide sintered body, the arithmetic average roughness Ra of the surface of the contact surface 1c is changed as shown in Table 1, and the magnetic recording medium is moved along the surface of the contact surface 1c. The presence or absence of defects such as scratches on the magnetic recording medium was confirmed. Ra of the surface of the contact surface 1c was adjusted by the roughness of the polishing plate to be surface-polished, and Ra was measured using a general surface roughness meter that measures the roughness by mechanical contact. Bills were used as the magnetic recording medium. And after moving a banknote 1000 times along the contact surface 1c, it was confirmed visually whether the crack | damage which interferes in the reading of magnetism had generate | occur | produced on the surface of the banknote.

  From Table 1, when Ra of the contact surface 1c exceeds 0.5 μm, there is a problem that the magnetic recording medium to be detected is damaged.

  On the other hand, in the range of the present invention in which Ra of the contact surface 1c is 0.5 μm or less, the banknote was not damaged. Moreover, the banknote could be reliably and smoothly moved along the surface of the contact surface 1 c of the insulating base 1.

  Further, if Ra of the contact surface 1c of the insulating substrate 1 is 0.005 to 0.5 μm, the polishing cost for polishing the surface of the contact surface 1c to make Ra 0.5 μm or less is not so much, The manufacturing cost of the package 9 did not become too high. Accordingly, it has been found that Ra of the contact surface 1c needs to be 0.5 μm or less, and is preferably in the range of 0.005 to 0.5 μm.

Further, when the Ra of the other main surface (contact surface 1c) of the insulating substrate 1 is 0.3 μm, an arc-shaped chamfered portion 1e is formed at the corner between the other main surface and the side surface of the insulating substrate 1. And a flat chamfered portion 1e having a certain width is produced, and the magnetic recording medium is transferred to the other main surface (contact surface 1c) via the transfer belt, and the magnetic recording medium is transferred to the other main surface. It was confirmed whether or not it was transported smoothly without being caught at the corners. The number of tests is 1000 for each condition. The results are shown in Tables 2 and 3.

  From Tables 2 and 3, the magnetic recording medium was able to move the surface of the contact surface 1c without any trouble when the radius of curvature or width of the chamfered portion 1e was in the range of 0.05 to 1 mm.

  Further, when the radius of curvature or the width is less than 0.05 mm, the magnetic recording medium was not caught by the corner of the insulating substrate 1 and stopped, but the magnetic recording medium was once or twice. There was a phenomenon that the movement of stagnation was stopped at the corner.

  Further, when the radius of curvature or the width exceeds 1 mm, the time required for processing the chamfered portion 1e is increased, and the productivity tends to decrease.

  Therefore, the insulating substrate 1 has a chamfered portion 1d having an arc shape with a radius of curvature of 0.05 to 1 mm or a chamfered portion having a width of 0.05 to 1 mm at the corner between the other main surface and the side surface. It has been found preferable to form 1e.

It is sectional drawing which shows an example of embodiment of the electronic component storage package in this invention, and the magnetic sensor apparatus of this invention .

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 1a ... Concave part 1b ... Mounting part 1d, 1e ... Chamfer part 2 ... Electrode pad 3 ... Wiring conductor 4 ... Connection pad 5 ... Electronic component 9 ... Electronic component storage packages

Claims (6)

On the other hand, an insulating base made of ceramics in which an electronic component for detecting a magnetic field change is housed in a recess formed in the central portion of the main surface, an electrode pad formed on the bottom surface of the recess, and the insulation from the bottom surface of the recess. a wiring conductor which is led out to the outer peripheral portion of the one main surface of the substrate, the formed on the outer peripheral portion of the one main surface of the insulating substrate, and includes and electrically connected to connection pads on the wiring conductor the insulating substrate is an arithmetic mean roughness package der Ru electronic components housed below 0.5μm on the surface of the other main surface, the electrode while being housed in the recess are electrically connected to the electrode pad The electronic component and a permanent magnet disposed below the electronic component, and the permanent magnet and the magnetic field are detected by magnetic information of a magnetic recording medium that moves along the other main surface of the insulating base. Between information The magnetic sensor device and detects a change in Jill magnetic field by the electronic component. 2. A chamfered portion having a cross-sectional shape of an arc having a radius of curvature of 0.05 to 1 mm is formed at a corner between the other main surface and the side surface of the insulating base. Magnetic sensor device . 2. The magnetic sensor device according to claim 1, wherein the insulating base has a chamfered portion with a width of 0.05 to 1 mm formed at a corner between the other main surface and the side surface. 4. The magnetic sensor device according to claim 1, wherein the wiring conductor is made of a non-magnetic metal metallization layer. The magnetic sensor device according to claim 1, wherein a magnetic metal layer is formed on an inner surface of the recess. 6. The wiring conductor according to claim 1, wherein a nickel plating layer having a phosphorus content of 3 to 10% by mass is applied to a portion exposed on the bottom surface of the recess. A magnetic sensor device according to claim 1 .

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