JP4630719B2 - Inkjet recording head - Google Patents

Description

  The present invention relates to an ink jet recording head and a method for manufacturing the same, and more particularly to a bonding structure of an electric wiring member and an ink supply member of an ink jet recording head.

  An example of the configuration of an ink jet recording head used in an ink jet recording apparatus will be described with reference to the drawings (see Patent Document 1). FIG. 9 is an exploded perspective view showing an example of the configuration of a conventional inkjet recording head. FIG. 10 is an external perspective view of the inkjet recording head shown in FIG. 9 after assembly is completed.

  The ink jet recording head 101 includes an ink supply member 102, a recording element substrate 3 (two recording element substrates are provided in FIGS. 9 and 10, which are indicated as 3a and 3b, respectively), an electric wiring member 4, and the like. And an electrical contact substrate 5. The ink supply member 102 includes a main body 121, a flow path forming member 122, a joint seal member 123, a filter 124, a seal rubber 125, a first plate 126, and a second plate 127. A tank holder 6 that houses an ink tank is attached to the ink jet recording head 101.

  Such an ink jet recording head is assembled through the following steps. First, after the second plate 127 is bonded and fixed to the first plate 126, the recording element substrate 3 is fixed to the first plate 126 with a recording element substrate adhesive. Next, an electrical wiring member adhesive is applied and formed on the second plate 127, and the positions of the electrodes (not shown) of the recording element substrate 3 and the electrode leads (not shown) of the electrical wiring member 4 are aligned. The back surface of the wiring member 4 is bonded and fixed to the second plate 127. Next, bumps (not shown) on the electrodes of the recording element substrate 3 and the electrode leads of the electric wiring member 4 are electrically bonded by a thermal ultrasonic pressure bonding method, and the electric bonding portion is sealed. Next, the flow path forming member 122 and the ink communication port of the first plate 126 are fixed with screws so as to be pressure-bonded to each other via the joint seal member 123, thereby completing the ink supply member 102. Finally, the electrical contact substrate 5 is connected to the electrical wiring member 4 and fixed to the main body 121 to complete the ink jet recording head 101.

Now, since the first plate and the second plate are formed by pressing or cutting alumina (Al ₂ O ₃ ) material, the first plate and the second plate are expensive parts, and the cost of the ink jet recording head is reduced. It is pushing up. Therefore, in order to provide a more economical ink jet recording head, the use of resin for the first plate and the second plate has been studied. If the first plate and the second plate are made of resin, a member can be created by injection molding, and a necessary part shape can be formed instantaneously. Moreover, integral molding with a main body is attained, and a number of parts can be reduced. For this reason, the cost of the ink jet recording head can be reduced. Furthermore, there is an advantage that the degree of freedom in designing the part shape is expanded.

  On the other hand, since the heat distortion temperature is low, there is a problem that the kind of usable adhesive and the process conditions are limited. In selecting an adhesive, since ink resistance is also required, it is difficult to select an adhesive having a high adhesive strength as compared with the case where alumina is used as the material of each plate. If the adhesive force is reduced, the recording paper may come into contact with the outer peripheral portion of the electric wiring member of the inkjet recording head and the electric wiring member may be peeled off when a jam occurs due to the warp of the recording paper during image formation. . Further, the electric wiring member may be peeled off by repeating the operation of wiping and removing the ink attached to the recording element substrate during image formation many times.

As a countermeasure, as shown in FIG. 11, along the outer periphery of the electric wiring member 4, outside the electric wiring member fixing surface 150 of the ink supply member 102 b in which the first plate and the second plate are integrated. A technique for partially forming the outer peripheral wall 140 is disclosed (see Patent Document 2). 11 is a cross-sectional view taken along the 11-11 cross section of FIG. 10 (the recording element substrate 3b is not shown). Providing such an outer peripheral wall 140 makes it difficult for the recording paper to contact the electrical wiring member 4, thereby reducing the above-described problems.
JP 2002-19119 A Japanese Patent Laid-Open No. 06-293139

  However, there are several disadvantages with such a configuration. First, when a jam occurs due to warping of the recording paper during image formation, there is a slight possibility that the recording paper will come into contact with the outer periphery of the electric wiring member of the ink jet recording head and the electric wiring member will peel off. . This is because a gap is required between the electric wiring member and the outer peripheral wall due to assembly restrictions when fixing the electric wiring member to the ink supply member. If there is a gap, the end of the recording paper may enter the gap and come into contact with the electrical wiring member. Second, due to the thermal deformation temperature limitation of the ink supply member, a sufficient temperature cannot be applied to cure the electrical wiring member adhesive, and the time elapses when the outer periphery of the electrical wiring member is immersed in the ink. At the same time, the adhesive strength may be reduced.

  In view of the above problems, an object of the present invention is to provide an ink jet recording head capable of firmly bonding and fixing an electric wiring member to an ink supply member, and a manufacturing method thereof.

  The ink jet recording head of the present invention includes a recording element substrate that discharges ink, an electric wiring member that supplies an electric signal to the recording element substrate, and the recording element substrate and the electric wiring member that are bonded and fixed. And an ink supply member to be supplied. An outer peripheral groove is formed along at least a part of the outer peripheral portion of the fixing surface of the ink supply member with the electric wiring member. The electrical wiring member has a protruding portion in which at least a part of the outer peripheral portion protrudes into the outer peripheral groove, and the back surface facing the outer peripheral groove of the protruding portion is bonded to at least a part of the outer peripheral groove through an adhesive, An air layer is formed in a part of the outer circumferential groove.

In one embodiment, the ink supply member has an outer peripheral wall that constitutes an outer side surface of the outer peripheral groove, and the electric wiring member is connected to the protruding portion, extends beyond the outer peripheral groove, and is bent along the ink supply member. An outer peripheral wall is not provided in the outer peripheral groove that includes the bent portion and intersects the bent portion. In another embodiment, the ink supply member has an outer peripheral wall constituting the outer side surface of the outer peripheral groove, and the electric wiring member is connected to the protruding portion, extends beyond the outer peripheral groove, and is bent along the ink supply member. The outer peripheral wall of the outer peripheral groove that includes the bent portion and intersects with the bent portion is formed lower than the outer peripheral wall that does not intersect with the bent portion.

According to the ink jet recording heads of the present invention, the adhesive that has entered the circumferential groove because it has contact with the air layer, not easily escape applied heat becomes a higher temperature. For this reason, curing of the adhesive is promoted, and the electric wiring member is firmly bonded to the ink supply member. The adhesive that has entered the outer peripheral groove effectively fixes the outer peripheral portion of the electric wiring member and effectively resists the force applied in the in-plane direction of the electric wiring member. For this reason, it becomes possible to provide a more reliable inkjet recording head and inkjet recording apparatus.

  The ink jet recording head of the present invention is applied to a general printing apparatus, a copying machine, a facsimile having a communication system, a word processor having a printing unit, or a multifunction recording apparatus combining these apparatuses. be able to. The ink jet recording head of the present invention is an ink jet recording head of a type that generates thermal energy using an electrothermal transducer, and boiles ink in accordance with an electrical signal to eject micro droplets. This is a so-called side shooter type ink jet recording head disposed so as to face the ink discharge port. The ink jet recording head may be an ink jet recording head that employs an ink ejection method in which bubbles are made constant by causing bubbles to communicate with the atmosphere, thereby enabling the ejection of minute droplets. The ink jet recording head may be of other types, for example, using an electromechanical transducer such as a piezo element, or using an electromagnetic wave such as a laser as a heating means.

  Hereinafter, embodiments of an ink jet recording head of the present invention will be described with reference to the drawings. FIG. 1 shows an external perspective view of an ink jet recording head. FIG. 4A is a perspective view seen from the side (lower side) where the recording element substrate can be seen, and FIG. 4B is a perspective view seen from the upper side. The ink jet recording head 1 shown in these drawings is an ink tank integrated type, but may be an ink tank separation type. The ink jet recording head 1 is fixedly supported on a carriage (not shown) mounted on a main body of an ink jet recording apparatus (not shown) by positioning means and electrical contacts, and is detachable from the carriage. It has become. When the filled ink is not consumed, the inkjet recording head 1 can be replaced.

  FIG. 2 is an exploded perspective view of the ink jet recording head. FIG. 4A is a perspective view seen from the side where the recording element substrate can be seen, and FIG. 4B is a perspective view seen from above, corresponding to FIGS. 1A and 1B, respectively. The ink jet recording head 1 includes an ink supply member 2 that supplies ink to the recording element substrate 3. To the ink supply member 2, a recording element substrate 3 that ejects ink and an electric wiring member 4 that electrically connects the recording element substrate 3 and the ink jet recording apparatus are bonded and fixed. Although only one recording element substrate 3 is provided, two or more recording element substrates of black and color may be provided.

  Hereinafter, the constituent elements constituting the ink jet recording head will be described in detail. FIG. 3 is a partially broken perspective view of the recording element substrate 3. The recording element substrate 3 includes, for example, a long-groove through-hole ink supply port 32, which is an ink flow path, formed on a silicon substrate 31 having a thickness of 0.5 mm to 1 mm. It is formed by a method such as sandblasting.

  On the silicon substrate 31, electrothermal conversion elements 33 are arranged side by side on both sides of the ink supply port 32, and electric wiring made of aluminum or the like for supplying electric power to the electrothermal conversion elements 33 (see FIG. (Not shown) is formed. The electrothermal conversion element 33 and the electrical wiring can be formed by using an existing film forming technique. Each row | line | column of the electrothermal conversion element 33 is arranged so that it may become staggered mutually. That is, the positions of the ejection ports in each row are arranged so as not to line up in a direction orthogonal to the row direction. The silicon substrate 31 is provided with electrode portions 34 for supplying electric power to the electrical wiring and an electrical signal for driving the electrothermal transducer 33 along the sides on both ends of the row of electrothermal transducers 33. . A bump 35 made of gold or the like is formed on each electrode portion 34.

  Above the ink supply port 32 and the electrothermal conversion element 33, a structure made of a resin material is formed by photolithography. This structure has an ink flow path wall 36 that forms an ink flow path for each electrothermal conversion element 33 and a ceiling part 39 that covers the ink flow path wall 36. A discharge port 37 is formed in the ceiling part 39. . The discharge ports 37 are provided so as to face the corresponding electrothermal conversion elements 33, and form a discharge port group 38 as a whole. The ink supplied from the ink supply port 32 is discharged from the discharge port 37 facing each electrothermal conversion element 33 by the pressure of the bubbles generated by the heat generation of each electrothermal conversion element 33.

  The electrical wiring member 4 is a member that forms an electrical signal path for applying an electrical signal for ejecting ink to the recording element substrate 3, and is configured by forming a copper foil wiring pattern on a polyimide base material. Yes. As shown in FIG. 2A, an opening 41 for incorporating the recording element substrate 3 is provided, and an electrode lead 42 connected to the electrode portion 34 of the recording element substrate 3 is provided in the vicinity of the peripheral portion of the opening 41. Is formed. The electrical wiring member 4 and the recording element substrate 3 are electrically connected to each other by, for example, a bump 35 formed on the electrode portion 34 of the recording element substrate 3 and a corresponding electrode lead 42 being crimped by a thermosonic crimping method. Connected. The electric wiring member 4 is bent halfway, and an external signal input terminal 43 for receiving an electric signal from the ink jet recording apparatus is formed on the other bent surface. The external signal input terminal 43 and the electrode lead 42 are connected by a continuous copper foil wiring pattern formed on the electric wiring member 4. The surface of the electric wiring member 4 on which the external signal input terminal 43 is provided is fixed to the side surface of the ink supply member 2 that is substantially perpendicular to the bonding surface of the recording element substrate 3 by heat caulking or bonding.

  As shown in FIG. 2, the ink supply member 2 includes a main body 21 formed of a resin material. In order to improve the shape rigidity of the main body 21, it is desirable that 5-40% of glass filler is mixed in the resin material. An ink absorber 22 for holding ink and generating a negative pressure is provided inside the main body 21. As the ink absorber 22, a compressed polypropylene (PP) fiber is used, but a urethane fiber compressed may be used. An ink flow path (not shown) for guiding ink to the recording element substrate 3 is formed in the main body 21. One end of the main body 21 is provided with an engaging portion 211 for fixing the ink jet recording head 1 to the ink jet recording apparatus.

  A filter 23 that prevents dust from entering the inside of the recording element substrate 3 is joined to the boundary between the ink absorber 22 and the ink flow path by welding. The filter 23 is preferably a SUS metal fiber sintered type, but may be a SUS metal mesh type.

  The lid member 25 is a member that is welded to the upper opening of the ink supply member 2 and seals the inside of the main body 21 of the ink supply member 2. The lid member 25 is provided with a narrow port 251 for releasing pressure fluctuation inside the ink supply member 2 and a fine groove 252 communicating with the narrow port 251. An air communication port 254 is formed by covering most of the narrow opening 251 and the fine groove 252 with the seal member 253 and opening one end of the fine groove 252 (see FIG. 1). The lid member 25 is provided with an engaging portion 255 for fixing the ink jet recording head 1 to the ink jet recording apparatus.

  4 is a cross-sectional view of a joint portion between the ink supply member and the recording element substrate along line 4-4 in FIG. 1, and FIG. 5 is a detailed view of a portion A in FIG. As shown in FIG. 4, an ink supply port 26 that supplies ink to the recording element substrate 3 is formed on the downstream side of the ink flow path. The recording element substrate 3 is bonded and fixed to the ink supply member 2 with high positional accuracy so that the ink supply port 32 of the recording element substrate 3 communicates with the ink supply port 26 of the ink supply member 2. The recording element substrate adhesive A1 used for bonding is desirably a low viscosity, low curing temperature, cured in a short time, has a relatively high hardness after curing, and has ink resistance. Examples of the recording element substrate adhesive A1 include a thermosetting adhesive mainly composed of an epoxy resin. In this case, the thickness of the adhesive layer is preferably about 20 μm.

  On the recording element substrate 3, the back surface 46 of the electric wiring member 4 is bonded and fixed on the fixing surface 211 with the electric wiring member adhesive A2. The electrical connection portion between the recording element substrate 3 and the electrical wiring member 4 is sealed with the first sealant 51, and is protected from ink corrosion and external impact.

  In the ink supply member 2, an outer peripheral wall 212a is formed along the fixed surface 211, and an outer peripheral groove 213a is formed inside thereof. The outer peripheral wall 212a and the outer peripheral groove 213a can be, for example, rectangular or meandering. The outer peripheral groove 213a is formed by an inner side surface 214a on the recording element substrate 3 side, an outer side surface 215a on the outer peripheral wall 212a side, and a bottom surface 216a. The width w of the outer peripheral groove 213a is the distance between the inner side surface 214a and the outer side surface 215a, and the depth d of the outer peripheral groove 213a is the distance from the fixed surface 211 to the bottom surface 216a of the outer peripheral groove 213a. The width w of the outer peripheral groove 213a and the depth d of the outer peripheral groove 213a depend on the amount of the electric wiring member adhesive A2 protruding into the outer peripheral groove 213a. In one embodiment, the width w was 1 mm and the depth d was 0.5 mm.

  The outer peripheral portion of the electric wiring member 4 forms a protruding portion 44 that protrudes into the outer peripheral groove 213a. In one example, the gap between the protruding portion 44 and the outer peripheral wall 212a was about 0.5 mm when the positions of the electrode portion 34 of the recording element substrate 3 and the electrode lead 42 of the electrical wiring member 4 were aligned. That is, the protruding portion 44 protrudes to the outer circumferential groove 213 by about 0.5 mm, and the width w1 of the protruding portion 44 is about 0.5 mm.

  The electric wiring member adhesive A2 is cured by thermocompression bonding from the upper surface of the electric wiring member 4. Specifically, first, the electrical wiring member adhesive A <b> 2 is applied and formed on the fixed surface 211 of the ink supply member 2. Next, the electrode portion 34 of the recording element substrate 3 bonded to the ink supply member 2 and the position of the electrode lead 42 of the electric wiring member 4 are aligned, and thermocompression bonding is performed from the upper surface of the electric wiring member 4. As shown in FIG. 5, the electrical wiring member adhesive A2 hangs down along the inner side surface 214a of the outer peripheral groove 213a, and adheres to the inner side surface 214a as it is and is cured. The electric wiring member adhesive A2 may adhere to a portion on the inner side surface 214a side of the bottom surface 216a (not shown). In any case, the back surface 46 facing the outer peripheral groove 213a of the protruding portion 44 is bonded to at least the inner side surface 214a of the outer peripheral groove 213a via the electric wiring member adhesive A2. By adjusting the width w and the depth d of the outer peripheral groove 213a, the outer surface 215a is not attached to the portion on the outer side surface 215a side of the bottom surface 216a, and an air layer 217a is formed in the outer peripheral groove 213a.

  At this time, as shown in FIG. 4, the electric wiring member adhesive A2 formed in the film shape of the fixing surface 211 is sufficiently cured because the heat H1 transmitted through the electric wiring member 4 escapes to the ink supply member 2. Does not reach the required temperature. On the other hand, the electrical wiring member adhesive A2 that protrudes from the fixed surface 211 to the outer peripheral groove 213a becomes high temperature because there is no escape path for the heat H2 transmitted through the electrical wiring member 4 as shown in FIG. This is because the air layer 217a is formed in the outer peripheral groove 213a, so that the contact area between the electric wiring member adhesive A2 and the ink supply member 2 is reduced, and the heat from the electric wiring member adhesive A2 to the ink supply member 2 is reduced. This is because transmission is suppressed. As a result, the electrical wiring member adhesive A2 on the outer periphery of the electrical wiring member 4 has a high curing rate and is sufficiently cured. Further, since the hardened portion is the outer peripheral portion of the electric wiring member 4 that requires the most adhesive force, a jam occurs due to the warp of the recording paper during image formation, and a part of the recording paper is Even if it enters the groove 213a and contacts the outer peripheral portion (the protruding portion 44) of the electric wiring member 4, the possibility of peeling of the electric wiring member 4 is reduced. Further, since the electric wiring member adhesive A2 adheres to the inner side surface 214a of the outer peripheral groove 213a, the resistance force against the peeling force F acting in the in-plane direction (parallel direction) of the electric wiring member 4 increases. Furthermore, since the curing rate of the electrical wiring member adhesive A2 on the outer peripheral portion of the electrical wiring member 4 that is possibly in contact with the ink is increased, the ink resistance is improved. For this reason, even when the outer peripheral part of the electrical wiring member 4 is immersed in ink, there is little fall of adhesive force. From the above, it is possible to provide a highly reliable ink jet recording head with a simple configuration.

  As shown in FIG. 6, the outer peripheral groove may have a shape in which a recess 221 is provided on at least a part of the inner side surface 214a. The electric wiring member adhesive A2 protruding from the fixed surface 211 hangs down along the inner side surface 214a and enters the recess 221 by surface tension. For this reason, the air layer 217a is stably formed between the electrical wiring member adhesive A2 and the bottom surface 216a. Such a configuration is effective when the amount of the electrical wiring member adhesive A2 protruding from the fixed surface 211 varies or when the viscosity of the electrical wiring member adhesive A2 is low.

  FIG. 7 is a cross-sectional view of the joint portion between the ink supply member and the recording element substrate along the line 7-7 in FIG. 1, that is, in the direction in which the electric wiring member is bent. The cross-sectional shape of the ink supply member 2 is basically the same as the cross-sectional shape shown in FIG. However, the outer peripheral wall 212b on the bent portion 45 side of the electric wiring member 4 is formed lower than the outer peripheral wall 212a so that the bent portion 45 can be bent without receiving excessive deformation or force. A configuration in which the outer peripheral wall 212b is not provided is also possible. For example, a staircase shape as shown in FIG. 8 is possible. Furthermore, although not shown in figure, it can also be set as the step shape of two steps or more. In addition, in this specification, the shape without one side surface is also treated as the outer peripheral groove.

  The electrical connection portion between the recording element substrate 3 and the electrical wiring member 4 is sealed with the first sealing agent 51 and the second sealing agent 52, and is protected from ink corrosion and external impact. The first sealing agent 51 mainly seals the back surface side of the connection portion between the electrode lead 42 of the electric wiring member 4 and the bump 35 of the recording element substrate 3 and the outer peripheral portion of the recording element substrate 3. The sealing agent 52 seals the front side of the connection portion described above.

  Also in the joint structure of the ink supply member and the recording element substrate shown in FIGS. 7 and 8, the behavior of the electrical wiring member adhesive is the same as in the case of FIG. That is, since the air layers 217b and 217c are formed in a part of the outer peripheral grooves 213b and 213c, the electric wiring member adhesive A2 that protrudes into the outer peripheral grooves 213b and 213c has no escape route of heat and is sufficiently cured. It is done. Further, since the electric wiring member adhesive A2 adheres to the inner side surfaces 214b and 214c of the outer peripheral grooves 213b and 213c, the resistance force against the peeling force F acting in the in-plane direction (parallel direction) of the electric wiring member 4 increases. . The bending portion 45 of the electric wiring member 4 is not easily subjected to a force to be peeled off by contact with the recording paper, but is easily subjected to the reaction force of the electric wiring member 4 itself generated by bending. However, according to the joining structure described above, the adhesive force of the bent portion 45 is also improved.

  As shown on the right side of FIG. 7, a visual opening 218 for confirming the state of the electric wiring member adhesive A2 protruding into the outer peripheral groove 213a is formed in a part of the outer peripheral wall 212a. Accordingly, it is possible to confirm the adhesion between the electric wiring member 4 and the ink supply member 2 by visual inspection by sampling or automatic in-line inspection without measuring by destructive inspection. In this embodiment, only one location is formed on the outer peripheral wall 212a, but a plurality of locations may be formed on the outer peripheral wall 212a as necessary.

  Table 1 shows the measurement results of the adhesive strength of the conventional bonded portion structure and the bonded portion structure of the present embodiment. In both the prior art and the present invention, two cases were carried out, and the initial adhesive force immediately after bonding and the adhesive force after one week at 60 ° C. after ink contact were measured. It was confirmed that the adhesive strength of the ink jet recording head of the present invention was remarkably improved both before and after ink contact.

1 is an external perspective view of an ink jet recording head of the present invention. FIG. 2 is an exploded perspective view of the ink jet recording head shown in FIG. 1. FIG. 2 is a partially broken perspective view of a recording element substrate of the ink jet recording head shown in FIG. 1. FIG. 4 is a cross-sectional view of a joint portion between an ink supply member and a recording element substrate along line 4-4 in FIG. FIG. 5 is a detailed view of part A in FIG. 4. FIG. 6 is a diagram illustrating another embodiment of a joint portion between an ink supply member and a recording element substrate. FIG. 7 is a cross-sectional view of a joint portion between the ink supply member and the recording element substrate along line 7-7 in FIG. 1. FIG. 6 is a cross-sectional view illustrating a modification of a joint portion between an ink supply member and a recording element substrate. It is a disassembled perspective view which shows an example of a structure of the conventional inkjet recording head. FIG. 10 is an external perspective view after the assembly of the ink jet recording head shown in FIG. 9 is completed. It is sectional drawing along the 11-11 cross section of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inkjet recording head 2 Ink supply member 21 Main body 212a, 212b Outer peripheral wall 213a, 213b, 213c Outer peripheral groove 214a, 214b, 214c Inner side surface 215a Outer side surface 216a Bottom surface 217a, 217b, 217c Air layer 218 Visual opening 3 Recording element substrate 4 Electrical wiring member 44 Protruding part 45 Bending part

Claims (5)

A recording element substrate that ejects ink, an electric wiring member that supplies an electric signal to the recording element substrate, and an ink that bonds and fixes the recording element substrate and the electric wiring member and supplies the ink to the recording element substrate An outer peripheral groove is formed along at least a part of an outer peripheral part of a fixing surface of the ink supply member with the electric wiring member, and the electric wiring member has at least a part of the outer peripheral part. A protruding portion protruding into the outer circumferential groove, and a back surface of the protruding portion facing the outer circumferential groove is bonded to at least a part of the outer circumferential groove via an adhesive, and An air layer is formed ,
The ink supply member has an outer peripheral wall that forms an outer side surface of the outer peripheral groove, and the electric wiring member is connected to the protruding portion, extends beyond the outer peripheral groove, and is bent along the ink supply member. An ink jet recording head comprising the bent portion, wherein the outer peripheral wall intersecting the bent portion is not provided with the outer peripheral wall . A recording element substrate that ejects ink, an electric wiring member that supplies an electric signal to the recording element substrate, and an ink that bonds and fixes the recording element substrate and the electric wiring member and supplies the ink to the recording element substrate An outer peripheral groove is formed along at least a part of an outer peripheral part of a fixing surface of the ink supply member with the electric wiring member, and the electric wiring member has at least a part of the outer peripheral part. A protruding portion protruding into the outer circumferential groove, and a back surface of the protruding portion facing the outer circumferential groove is bonded to at least a part of the outer circumferential groove via an adhesive, and An air layer is formed,
The ink supply member has an outer peripheral wall that forms an outer side surface of the outer peripheral groove, and the electric wiring member is connected to the protruding portion, extends beyond the outer peripheral groove, and is bent along the ink supply member. An ink jet recording head comprising the bent portion, wherein the outer peripheral wall of the outer peripheral groove intersecting with the bent portion is formed lower than the outer peripheral wall not intersecting with the bent portion. Wherein at least a portion in the recess of the inner side of the outer peripheral groove is formed, an ink jet recording head according to claim 1 or 2. The inkjet recording head according to any one of claims 1 to 3, wherein a viewing opening that allows viewing of an inner state of the outer circumferential groove is formed in a part of the outer circumferential wall. The adhesive is a thermosetting adhesive, an ink jet recording head according to any one of claims 1 to 4.

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