JP4626083B2

JP4626083B2 - Columnar member holding portion and method for manufacturing vibrating gyroscope using the same

Info

Publication number: JP4626083B2
Application number: JP2001121533A
Authority: JP
Inventors: 克己藤本; 雅人小池
Original assignee: Murata Manufacturing Co Ltd
Current assignee: Murata Manufacturing Co Ltd
Priority date: 2001-04-19
Filing date: 2001-04-19
Publication date: 2011-02-02
Anticipated expiration: 2021-04-19
Also published as: JP2002310665A

Description

【０００１】
【発明の属する技術分野】
本発明は、柱状部材保持部およびそれを用いた振動ジャイロの製造方法、具体的には柱状部材保持部を用いて振動子と支持部材を高精度で位置決めして固定する振動ジャイロの製造方法に関する。
【０００２】
【従来の技術】
図９に、従来の振動ジャイロにおける振動子部の斜視図を示す。図９において、振動子部１は振動子２と金属製の支持部材９、１０から構成されている。
【０００３】
このうち、振動子２は、厚み方向に分極されるとともに一方主面に第１の電極４と第２の電極５が形成された圧電体基板３と、厚み方向に分極されるとともに一方主面に第３の電極７が形成された圧電体基板６が、互いに分極の方向が逆になるように、第４の電極８を介して他方主面同士で貼り合わされて構成されている。支持部材９、１０は、それぞれ２つのＺ字状の屈曲部を有するように形成されており、圧電体基板６の一方主面上において、第３の電極７に例えばハンダや導電性接着剤によって電気的かつ機械的に固定されている。なお、最終的には圧電体基板３の一方主面上においても、支持部材９、１０と同様に第１の電極４と第２の電極５にまたがるように２つの支持部材が固定されるが、ここでは省略している。
【０００４】
図１０に、振動子２に支持部材９、１０を固定する方法を示すための展開斜視図を示す。
【０００５】
図１０に示すように、支持部材９、１０は、樹脂からなる枠状の振動子ベース１１の枠の内部に、振動子ベース１１の一方の内側面から対向する他方の内側面へと張り渡されている。ここで、振動子ベース１１は、支持部材９、１０を介して振動子２を中空に保持するとともに、振動子２の振動のエネルギーを枠内に閉じこめるためのもので、射出成形によって支持部材９、１０と一体に形成されている。
【０００６】
振動子２は振動子ベース１１の枠の内部において、支持部材９、１０の上に載せられて、その接触部において例えばハンダや導電性接着剤などによって接着・固定される。このとき、振動子２は圧電体基板６の一方主面が支持部材９、１０と接触するため、実際にはそこに形成された第３の電極７と金属製の支持部材９、１０が電気的かつ機械的に接続されることになる。
【０００７】
振動子２の振動が極力妨げられることが無く、しかも振動子２の振動が振動子ベース１１から外に極力漏れることが無いように、振動子２に支持部材９、１０を固定する際には、振動子２は支持部材９、１０の所定の位置、実際には中央部に位置決めする必要がある。そこで、振動子ベース１１の対向する２つの側壁の内側には、振動子２の両端を保持して支持部材９、１０に対して位置決めする柱状部材保持部１２、１３が設けられている。
【０００８】
ここで、図１１に柱状部材保持部１２の拡大斜視図を示す。柱状部材保持部１２は、振動子２の一方の端面に当接する長手方向当接片１２ａ、振動子２の一方の端部の幅方向両側面に当接する幅方向当接片１２ｂおよび１２ｃ、振動子２の一方の端部の底面に当接する底面当接片１２ｄ、腕部１２ｅおよび１２ｆを一体にして構成されている。腕部１２ｅおよび１２ｆは、それぞれ一端が幅方向当接片１２ｂおよび１２ｃに接続され、他端が振動子ベース１１の側壁の内側面に接続されることによって、長手方向当接片１２ａ、幅方向当接片１２ｂおよび１２ｃ、底面当接片１２ｄを振動子ベース１１の側壁の内側の中空に保持している。
振動子ベース１１の長手方向当接片１２に近接する部分には、両者が接触しないように、逃げのための凹部が形成されている。なお、詳細な説明は省略するが、柱状部材保持部１３も柱状部材保持部１２と全く同様に構成されている。
【０００９】
振動子２は、このように構成された柱状部材保持部１２、１３によって支持部材９、１０上の所定の場所に位置決めされ、その状態で支持部材９、１０に固定される。そして、振動子２と支持部材９、１０の固定後は、振動子２の振動の妨げにならないように、腕部１２ｅ、１２ｆを振動子ベース１１との接続部あるいは適当な位置で切断することによって、柱状部材保持部１２は取り除かれる。柱状部材保持部１３についても同様に取り除かれる。
【００１０】
【発明が解決しようとする課題】
図１１に示した柱状部材保持部１２、１３の場合、柱状部材保持部１２の長手方向当接片１２ａと柱状部材保持部１３の長手方向当接片の間隔は、振動子２の長さが多少ばらついても収納できるように、振動子２の長さよりわずかに大きく形成されている。また、柱状部材保持部１２の幅方向当接片１２ｂと１２ｃの間隔も、振動子２の幅が多少ばらついても収納できるように、振動子２の幅よりわずかに大きく形成されている。柱状部材保持部１３における幅方向当接片についても同様に形成されている。
【００１１】
そのため、振動子２は柱状部材保持部１２と１３で保持された状態においても、長手方向および幅方向にわずかながら移動可能となり、それによって振動子２と支持部材９、１０との位置決め精度が十分に得られないという問題がある。また、接着剤の硬化時の熱や振動によって、硬化の前後において振動子２と支持部材９、１０との位置関係が変化する可能性もある。そして、振動子２と支持部材９、１０との位置決め精度が不十分な場合には、振動子２の振動が不安定になったり、振動が外部に漏れるということがおきる。
【００１２】
また、振動子２の位置決め精度を改善するために、振動子２を柱状部材保持部内において長手方向や幅方向における１つの方向に押しつけるような機構を設けることも考えられるが、その場合には振動子２のばらつきに偏りが生じ、特に振動ジャイロの温度特性に何らかの傾きを与えてしまう可能性がある。
【００１３】
さらに、振動子２は自重によって支持部材９、１０に押しつけられているだけであるため、振動子の小型化・軽量化が進むことによって振動子を支持部材に押しつける力が不足し、接着剤の硬化時に振動子２が支持部材９、１０から浮いて導通不良が発生しやすくなるという問題もある。
【００１４】
本発明は上記の問題点を解決することを目的とするもので、振動子と支持部材を高い位置精度で安定に固定することのできる振動ジャイロの製造方法およびそれに用いられる柱状部材保持部を提供する。
【００１５】
【課題を解決するための手段】
上記目的を達成するために、本発明の柱状部材保持部は、所定の長さと幅を有する柱状部材の両端部を保持して所定の位置に位置決めする柱状部材保持部であって、前記柱状部材の２つの端部を、前記柱状部材の長さより短い間隔をあけて前記柱状部材の長手方向から挟むように配置されるとともに、それぞれ前記柱状部材の幅方向に２つに分けて構成される合計４つの長手方向当接片と、前記柱状部材の２つの端部を、それぞれ前記柱状部材の端部の幅より狭い間隔をあけて前記柱状部材の幅方向から挟むように配置される４つの幅方向当接片と、外部からの圧力が印加される４つの押圧部とを備え、前記柱状部材の２つの端部に対応する位置において、互いに隣接して配置されるそれぞれ１つの前記長手方向当接片と前記幅方向当接片と前記押圧部が一体に形成されるとともに、前記４つの押圧部に圧力を加えて弾性変形させることによって前記４つの押圧部にそれぞれ一体に形成される前記長手方向当接片と前記幅方向当接片が移動して、互いに対向する２つの前記長手方向当接片の間隔と互いに対向する２つの前記幅方向当接片の間隔がそれぞれ一時的に前記柱状部材の長さおよび前記柱状部材の端部の幅より拡大するように形成されていることを特徴とする。
【００１６】
また、本発明の柱状部材保持部は、前記４つの長手方向当接片、前記４つの幅方向当接片、および前記４つの押圧部が、前記柱状部材が位置決めされる位置決め対象とともに１つの金属板を加工してなるリードフレームとして形成されていることを特徴とする。
【００１７】
また、本発明の信号ジャイロの製造方法は、上記の前者の柱状部材保持部を用い、前記柱状部材である振動子に、該振動子を支持する支持部材を固定する振動ジャイロの製造方法であって、前記柱状部材保持部の押圧部に圧力を加えて弾性変形させることによって、互いに対向する２つの前記長手方向当接片の間隔と互いに対向する２つの前記幅方向当接片の間隔を、それぞれ一時的に前記振動子の長さおよび前記振動子の端部の幅より広げる第１の工程と、前記第１の工程によって広がった互いに対向する２つの前記長手方向当接片の間であって、かつ互いに対向する２つの前記幅方向当接片の間に、前記振動子を配置する第２の工程と、前記柱状支持部材保持部の押圧部に加えていた圧力を取り去ることによって、互いに対向する２つの前記長手方向当接片および２つの前記幅方向当接片で前記振動子を挟持して、前記振動子を前記支持部材に対して位置決めする第３の工程と、前記支持部材を前記振動子に固定する第４の工程と、前記振動子から前記柱状部材保持部を取り除く第５の工程と、を有することを特徴とする。
【００１８】
また、本発明の振動ジャイロの製造方法は、リードフレームとして形成された上記の後者の柱状部材保持部および前記位置決め対象である支持部材を用い、前記柱状部材である振動子に、該振動子を支持する前記支持部材を固定する振動ジャイロの製造方法であって、前記リードフレームの前記柱状部材保持部の押圧部に圧力を加えて弾性変形させることによって、互いに対向する２つの前記長手方向当接片の間隔と互いに対向する２つの前記幅方向当接片の間隔を、それぞれ一時的に前記振動子の長さおよび前記振動子の端部の幅より広げる第１の工程と、前記第１の工程によって広がった互いに対向する２つの前記長手方向当接片の間であって、かつ互いに対向する２つの前記幅方向当接片の間に、前記振動子を配置する第２の工程と、前記柱状支持部材保持部の押圧部に加えていた圧力を取り去ることによって、互いに対向する２つの前記長手方向当接片および２つの前記幅方向当接片で前記振動子を挟持して、前記振動子を前記支持部材に対して位置決めする第３の工程と、前記支持部材を前記振動子に固定する第４の工程と、前記リードフレームから前記支持部材を切り離すことによって、前記振動子から前記柱状部材保持部を取り除く第５の工程と、を有することを特徴とする。
【００１９】
このように構成および実施することにより、本発明の柱状部材保持部およびそれを用いた振動ジャイロの製造方法においては、振動子と支持部材を高い位置精度で安定に固定することができる。
【００２０】
【発明の実施の形態】
図１に、本発明の柱状部材保持部の一実施例の拡大斜視図を示す。また、図２にその平面図を、図３にその正面図を示す。図１ないし３において、図１１と同一の部分には同じ記号を付し、その説明を省略する。
【００２１】
図１において、柱状部材保持部２０は、振動子２の一方の端面に当接する長手方向当接片２０ａおよび２０ｂ、振動子２の一方の端部の幅方向両側面に当接する幅方向当接片２０ｃおよび２０ｄ、振動子２の一方の端部の底面に当接する底面当接片２０ｅおよび２０ｆ、腕部２０ｇおよび２０ｈ、固定部２０ｉおよび２０ｊから構成されている。このうち、長手方向当接片２０ａ、幅方向当接片２０ｃ、底面当接片２０ｅ、腕部２０ｇ、固定部２０ｉが一体に形成されている。また、長手方向当接片２０ｂ、幅方向当接片２０ｄ、底面当接片２０ｆ、腕部２０ｈ、固定部２０ｊも一体に形成されている。固定部２０ｉ、２０ｊは振動子ベース１１の１つの側壁の内側面に接続され、固定部２０ｉと幅方向当接片２０ｃは腕部２０ｇを介して、固定部２０ｊと幅方向当接片２０ｄは腕部２０ｈを介してそれぞれ接続されている。すなわち、固定部２０ｉと腕部２０ｇで長手方向当接片２０ａ、幅方向当接片２０ｃ、底面当接片２０ｅを振動子ベース１１の内側面中空に保持している。また、固定部２０ｊと腕部２０ｈで長手方向当接片２０ｂ、幅方向当接片２０ｄ、底面当接片２０ｆを振動子ベース１１の側壁の内側の中空に保持している。
【００２２】
この柱状部材保持部２０においては、長手方向当接片２０ａと２０ｂが従来の柱状部材保持部１２における長手方向当接片１２ａに相当する。また、底面当接片２０ｆと２０ｇが従来の柱状部材保持部１２における底面当接片１２ｄに相当する。
【００２３】
なお、振動子ベース１１の柱状部材保持部２０が設けられた側壁と対向するもう１つの側壁の内側にも同様の構成のもう１つの柱状部材保持部が設けられている。
【００２４】
柱状部材保持部２０の長手方向当接片２０ａおよび２０ｂと対向するもう１つの柱状部材保持部の２つの長手方向当接片との間隔は、振動子２の長さよりわずかに短く形成されている。また、柱状部材保持部２０の幅方向当接片２０ｃと２０ｄの間隔は、振動子２の幅よりわずかに短く形成されている。対向するもう１つの柱状部材保持部における幅方向当接片についても同様に形成されている。
【００２５】
固定部２０ｉ、２０ｊは四角形の板状に形成され、その一辺が振動子ベース１１の側壁に接続されている。そのため、固定部２０ｉ、２０ｊの振動子ベースに接続されていない方の２つのコーナー部分は、上下方向からの圧力に対して変形しやすくなっている。さらに、内部に略三角形状の穴が設けられているため、特に腕部２０ｇ、２０ｈとの接続位置に近いコーナー部分が変形しやすくなっている。本発明においては、この部分を押圧部と呼び、固定部２０ｉ、２０ｊの押圧部の符号をそれぞれ２０ｍ、２０ｎとする。なお、対向するもう１つの側壁に接続して設けられた柱状部材保持部においても同様に押圧部を有している。
【００２６】
このように構成された柱状部材保持部２０を用いた振動ジャイロの製造方法について以下に説明する。
【００２７】
まず第１の工程として、振動子ベース１１に設けられた柱状部材保持部２０の２つの固定部２０ｉ、２０ｊの押圧部２０ｍ、２０ｎに下から上に向かう圧力を加える。実際には押圧部２０ｍ、２０ｎをピンのようなもので下から突き上げる。それによって、固定部２０ｉ、２０ｊは上方に反るように弾性変形する。このとき、押圧部２０ｍ、２０ｎの近傍に接続されている腕部２０ｇ、２０ｆも、特に幅方向当接片２０ｃ、２０ｄと接続されている方の端部が大きく上方に移動する。ただ、この場合、固定部２０ｉ、２０ｊの振動子ベース１１との接続部が変形の支点になるため、腕部２０ｇ、２０ｆの幅方向当接片２０ｃ、２０ｄと接続されている方の端部は単に上方に移動するだけではなく、互いに離れ、しかも振動子ベース１１の固定部２０ｉ、２０ｊが接続されている側壁に近づくように移動する。これに従って、腕部２０ｇに接続されている長手方向当接片２０ａと幅方向当接片２０ｃと底部当接片２０ｅ、および腕部２０ｈに接続されている長手方向当接片２０ｂと幅方向当接片２０ｄと底部当接片２０ｆも、上方に移動するとともに、互いに離れ、しかも振動子ベース１１の固定部２０ｉ、２０ｊが接続されている側壁に近づくように移動する。なお、柱状部材保持部２０と対向するもう１つの柱状部材保持部においても、押圧部に同様の圧力が加えられ、長手方向当接片と幅方向当接片と底部当接片が同様の動きをする。
【００２８】
図４および図５に、このときの柱状部材保持部２０の動作を示す正面図とＡ−Ａ断面図を示す。図４および図５において、（ａ）は押圧部に圧力を加える前の状態、（ｂ）は圧力を加えている状態をそれぞれ示している。
【００２９】
図４（ａ）に示すように、押圧部２０ｍ、２０ｎに圧力を加える前の柱状部材保持部２０の２つの幅方向当接片２０ｃと２０ｄの間隔はＷ１で、振動子２の一端の幅より狭くなるように設定されている。そして、図４（ｂ）に示すように、押圧部２０ｍ、２０ｎに圧力を加えて固定部２０ｉ、２０ｊを弾性変形させることによって、２つの幅方向当接片２０ｃと２０ｄの間隔はＷ２に拡がる。この間隔ｗ２が振動子の端部の幅より大きくなるように、押圧部２０ｍ、２０ｎに加える圧力をあらかじめ決めてある。なお、図４（ｂ）において、２つの白抜き矢印は、押圧部２０ｍ、２０ｎに加える圧力とその方向を示している。
【００３０】
また、図５（ａ）に示すように、押圧部２０ｍ、２０ｎに圧力を加える前の柱状部材保持部２０の長手方向当接片２０ａおよび２０ｂと対向するもう１つの柱状部材保持部の２つの長手方向当接片との間隔はＬ１で、振動子２の長さよりわずかに短くなるように設定されている。そして、図５（ｂ）に示すように、押圧部２０ｍ、２０ｎに圧力を加えて固定部２０ｉ、２０ｊを弾性変形させることによって、それぞれ２つずつの長手方向当接片の間隔はＬ２に拡がる。この間隔Ｌ２が振動子の長さより大きくなるように、押圧部２０ｍ、２０ｎに加える圧力をあらかじめ決めてある。
【００３１】
このように、第１の工程として押圧部２０ｍ、２０ｎに圧力を加えることによって、簡単に柱状部材保持部２０の長手方向当接片２０ａおよび２０ｂと、対向するもう１つの柱状部材保持部の長手方向当接片の間隔を振動子２の長さより大きくすることができる。また、柱状部材保持部２０の幅方向当接片２０ｃと２０ｄの間隔、およびもう１つの柱状部材保持部の２つの幅方向当接片の間隔を振動子２の幅より大きくすることができる。
【００３２】
次に、第２の工程として、第１の工程によって広がった互いに２つの柱状部材保持部の対向する２つずつの長手方向当接片の間であって、かつ互いに対向する２つずつの幅方向当接片の間であって、しかも対向する２つの底部当接片の上に振動子２を配置する。この状態においては振動子２は水平方向に移動し得るため、その位置精度は十分ではない。
【００３３】
次に、第３の工程として、柱状部材保持部２０の押圧部２０ｍ、２０ｎおよびもう１つの柱状部材保持部の押圧部に加えていた圧力を取り去る。これによって柱状部材保持部２０の固定部２０ｉ、２０ｊおよびもう１つの柱状部材保持部の固定部の変形が解消され、長手方向当接片および幅方向当接片および底部当接片が元の位置に戻る。その際、振動子２は４つの長手方向当接片によって長手方向から挟まれ、それぞれ２つの幅方向当接片によってその端部が幅方向から挟まれて支持部材９、１０に対して位置決めされる。その際、振動子２にはいずれかの方向から偏った圧力が加えられているわけではないので、対向するそれぞれ４つの長手方向当接片および幅方向当接片の略中央部に位置することになり、支持部材９、１０に対して高い精度で位置決めされる。しかも、振動子２には水平方向四方から力が加わっている状態であるため、外部からの力が加わらない限り水平方向への移動の自由度はない。
【００３４】
さらに、振動子２は、支持部材９、１０に対して位置決めされるだけではなく、長手方向当接片や幅方向当接片によって挟まれ、しかも弾性変形した固定部が元に戻ろうとする力によって、下の方向に力が加えられている。すなわち支持部材９、１０に押しつけられている。そのため、振動子２の自重によって支持部材９、１０と接触する場合に比較して両者が互いに押しつけられる力が強く、接触部の位置が安定する。
【００３５】
なお、このとき振動子２と支持部材９、１０の接触部の少なくとも一方側にはハンダや導電性接着剤が塗布されているものとする。
【００３６】
次に、第４の工程として、ハンダを溶かしたり導電性接着剤に熱を加えて硬化させるなどして振動子２と支持部材９、１０を固定する。その際、振動子２と支持部材９、１０が互いに押しつけられているために、両者の位置関係が変化したり導通不良が発生したりする可能性はほとんど無い。
【００３７】
最後に、第５の工程として、振動子ベース１１の側壁と２つの柱状部材保持部の４つの固定部との接続部、あるいは２つの柱状部材保持部の４つの腕部の適当な位置が切断されることによって、２つの柱状部材保持部が取り除かれる。
【００３８】
このように、本発明の振動ジャイロの製造方法においては、柱状部材保持部２０を備えた振動子ベース１１を用いることによって、支持部材９、１０を振動子２に高い位置精度で安定に固定することができる。また、柱状部材保持部には振動子を支持部材に押しつける機能を持っているため、振動子が軽量化しても支持部材との接続が不安定になることがなく、導通不良の発生を防止することができる。そして、支持部材と振動子との位置精度を高め、安定に固定することによって、振動子の振動の安定性を向上させ、しかも振動が外部に漏れるのを防止することができる。
【００３９】
ところで、振動ジャイロの製造方法において、振動子を固定する支持部材は必ずしもあらかじめ振動子ベースと一体に形成されているわけではない。例えばフープ状のリードフレームの一部として支持部材が供給され、リードフレームの状態で支持部材と振動子を固定し、その後でリードフレームから振動子ごと支持部材をカットして振動子ベースに固定するという製造方法も考えられる。その際、リードフレームに支持部材とともに柱状部材保持部が一体に形成されていれば、支持部材と振動子との位置精度をさらに向上させることができる。
【００４０】
図６に、このようなリードフレームに支持部材と一体に形成された、本発明の柱状部材保持部の別の実施例の斜視図を示す。
【００４１】
図６において、リードフレーム３３は、枠部３１と、１つの金属板を加工して枠部３１と一体に連続して形成された柱状部材保持部３０および支持部材３２から構成されている。なお、１つの振動子に対応する柱状部材保持部は、振動子の２つの端部に対応して２つ存在するが、ここでは１つの端部に対応する柱状部材保持部３０のみを図示し、全く同じ構成のもう１つの柱状部材保持部の図示を省略している。また、１つの振動子の１つの面に固定する支持部材も２つ存在するが、ここでは１つの支持部材３２のみを図示し、もう１つの支持部材の図示を省略している。
【００４２】
図６に示す柱状部材保持部３０は、振動子２の一方の端面に当接する長手方向当接片３０ａおよび３０ｂ、振動子２の一方の端部の幅方向両側面に当接する幅方向当接片３０ｃおよび３０ｄ、振動子２の一方の端部の底面に当接する底面当接片３０ｅおよび３０ｆ、腕部３０ｇおよび３０ｈ、固定部３０ｉおよび３０ｊから構成されている。このうち、長手方向当接片３０ａ、幅方向当接片３０ｃ、底面当接片３０ｅ、腕部３０ｇ、固定部３０ｉが一体に形成されている。また、長手方向当接片３０ｂ、幅方向当接片３０ｄ、底面当接片３０ｆ、腕部３０ｈ、固定部３０ｊも一体に形成されている。固定部３０ｉ、３０ｊはリードフレーム３３の枠部３１に接続され、固定部３０ｉと底面当接片３０ｅは腕部３０ｇを介して、固定部３０ｊと底面当接片３０ｄは腕部３０ｈを介してそれぞれ接続されている。すなわち、固定部３０ｉと腕部３０ｇで長手方向当接片３０ａ、幅方向当接片３０ｃ、底面当接片３０ｅをリードフレーム３３の枠内の中空に保持している。また、固定部３０ｊと腕部３０ｈで長手方向当接片３０ｂ、幅方向当接片３０ｄ、底面当接片３０ｆをリードフレーム３３の枠内の中空に保持している。
【００４３】
柱状部材保持部３０の長手方向当接片３０ａおよび３０ｂと対向するもう１つの柱状部材保持部の２つの長手方向当接片との間隔は、振動子２の長さよりわずかに短く形成されている。また、柱状部材保持部３０の幅方向当接片３０ｃと３０ｄの間隔は、振動子２の幅よりわずかに短く形成されている。対向するもう１つの柱状部材保持部における幅方向当接片についても同様に形成されている。
【００４４】
固定部３０ｉ、３０ｊは、枠部３１と部分的に接続されているだけなので、腕部３０ｇ、３０ｈと固定部３０ｉ、３０ｊとの接続部に上下方向から加わる圧力によって上下方向に弾性変形しやすくなっている。固定部３０ｉ、３０ｊが変形すると、腕部３０ｇ、３０ｈはそれに接続して形成されている長手方向当接片３０ａ、幅方向当接片３０ｃ、底面当接片３０ｅ、および長手方向当接片３０ｂ、幅方向当接片３０ｄ、底面当接片３０ｆとともに上下方向に移動する。本発明においては、この上下方向から圧力が加わる腕部３０ｇ、３０ｈと固定部３０ｉ、３０ｊとの接続部を押圧部と呼び、押圧部の符号をそれぞれ３０ｍ、３０ｎとする。ただし、図６においては押圧部３０ｎは幅方向当接片３０ｄの陰になっているために表示を省略している。
【００４５】
このように構成された柱状部材保持部３０においても、押圧部３０ｍ、３０ｎに下から上に向かう圧力を加えることによって、腕部３０ｇに接続されている長手方向当接片３０ａと長手方向当接片３０ｂは、上方に移動するとともに、互いに離れ、しかも対向するもう１つの柱状部材保持部の長手方向当接片との間隔が振動子２の長さより少し拡がる。また、幅方向当接片３０ｃ、３０ｄも上方に移動するとともに、その間隔が振動子２の幅より少し拡がる。そして、互いに２つの柱状部材保持部の対向する２つずつの長手方向当接片の間であって、かつ互いに対向する２つずつの幅方向当接片の間であって、しかも対向する２つの底部当接片の上に振動子２を配置して押圧部に加えていた圧力を取り去ることによって、振動子２は４つの長手方向当接片によって長手方向から挟まれ、それぞれ２つの幅方向当接片によってその端部が幅方向から挟まれて２つの支持部材に対して位置決めされる。その際、振動子２にはいずれかの方向から偏った圧力が加えられているわけではないので、対向するそれぞれ４つの長手方向当接片および幅方向当接片の略中央部に位置し、支持部材に対して高い精度で位置決めされる。しかも、振動子２には水平方向四方から力が加わっている状態であるため、外部からの力が加わらない限り水平方向への移動の自由度もない。
【００４６】
さらに、振動子２は、支持部材に対して位置決めされるだけではなく、長手方向当接片や幅方向当接片によって挟まれ、しかも長手方向当接片や幅方向当接片の元に戻ろうとする力によって、下の方向に力が加えられる。すなわち支持部材に押しつけられる。そのため、振動子２の自重によって支持部材と接触する場合に比較して両者が押しつけられる力が強く、安定する。
【００４７】
なお、このとき振動子２と２つの支持部材の接触部の少なくとも一方側にはハンダや導電性接着剤が塗布されているものとする。
【００４８】
振動子２と支持部材を固定した後は、支持部材を振動子ベースに固定する。そして、その状態で例えば柱状部材保持部３０の腕部３０ｇ、３０ｈと固定部３０ｉ、３０ｊとの接続部を切り離し、同時に、支持部材をリードフレーム３３の枠部３１から切り離すことによって、振動子２からリードフレーム３３の枠部３１と柱状部材保持部３０を取り除くことができる。このようにして、振動子２は支持部材によって振動子ベースの内側の中空に保持される。
【００４９】
このように、本発明の柱状部材保持部を用いることによって、支持部材３２を含む２つの支持部材を振動子２に高い位置精度で安定に固定することができる。しかも、図１に示した柱状部材保持部２０の場合と異なり、柱状部材保持部と支持部材が同じリードフレーム３３に一体に形成されているため、柱状部材保持部と支持部材との間の位置精度をさらに高くすることができ、柱状部材保持部２０を用いる場合よりさらに高い位置精度で支持部材を振動子２に固定することができる。また、柱状部材保持部には振動子を支持部材に押しつける機能を持っているため、振動子が軽量化しても支持部材との接続が不安定になることがない。そして、支持部材と振動子との位置精度を高めることによって、振動子の振動の安定性をさらに向上させ、しかも振動が外部に漏れるのを防止することができる。
【００５０】
なお、上記の各実施例においては、支持部材の端部を振動子ベースに固定するタイプの振動ジャイロを示したが、枠状の振動子ベースを用いず、支持部材の端部を下に曲げて部品搭載基板に直接固定するタイプの振動ジャイロでも構わない。
【００５１】
図７に、このようなリードフレームに、端部を部品搭載基板に直接固定する支持部材と一体に形成された、本発明の柱状部材保持部のさらに別の実施例の斜視図を示す。図７において、図６と同一もしくは同等の部分には同じ記号を付し、その説明を省略する。
【００５２】
図７において、リードフレーム４０の、図６に示したリードフレーム３３との違いは、支持部材３２を支持部材４１に変えた点だけで、リードフレーム３３と同様に１つの金属板を加工して形成されている。リードフレーム４０における柱状部材保持部３０の役割はリードフレーム３３の場合と全く同じであるため説明を省略するが、全く同様の作用効果を奏するものである。
【００５３】
図８に、リードフレーム４０を用いて製造された振動ジャイロの斜視図を示す。図８において、図７と同一もしくは同等の部分には同じ記号を付し、その説明を省略する。
【００５４】
図８において、振動ジャイロ５０は、振動子２を４つの支持部材４１、４２、４３、４４を介して部品搭載基板４５上の中空に保持して構成されている。４つの支持部材４１、４２、４３、４４は、振動子２の厚み方向および幅方向の振動を抑制しないように、いくつもの屈曲部を備えている。そして、振動子２の各電極は支持部材４１、４２、４３、４４を介して部品搭載基板４５上に形成される振動子２を厚み方向に屈曲振動させる駆動回路やコリオリ力を検出するための回路（図示は省略）と接続されている。なお、部品搭載基板４５上には振動子２や各回路を覆うカバーが設けられるが、ここでは省略している。
【００５５】
このように構成された振動ジャイロ５０においては、リードフレーム４０に形成された柱状部材保持部３０を用いて振動子２と支持部材との固定を行うため、振動子の振動の安定性を向上させ、しかも振動が外部に漏れるのを防止することができる。
【００５６】
【発明の効果】
本発明の柱状部材保持部およびそれを用いた振動ジャイロの製造方法においては、柱状部材保持部が柱状部材である振動子の２つの端部を水平方向から挟むそれぞれ４つの長手方向当接片と幅方向当接片を備え、これらを圧力による弾性変形を利用して広げたところに振動子を配置し、その後圧力を除去することによって振動子を所定の位置に配置し、その状態で振動子と支持部材を固定することによって、振動子と支持部材を高い位置精度で安定に固定することができ、振動ジャイロの性能の向上を図ることができる。
【図面の簡単な説明】
【図１】本発明の柱状部材保持部の一実施例を示す斜視図である。
【図２】図１の柱状部材保持部を示す平面図である。
【図３】図１の柱状部材保持部を示す正面図である。
【図４】図１の柱状部材保持部の弾性変形を説明するための正面図である。
【図５】図１の柱状部材保持部の弾性変形を説明するための断面図である。
【図６】本発明の柱状部材保持部の別の実施例を示す斜視図である。
【図７】本発明の柱状部材保持部のさらに別の実施例を示す斜視図である。
【図８】図７の柱状部材保持部を用いて製造した振動ジャイロを示す斜視図である。
【図９】従来の振動ジャイロの振動子部を示す斜視図である。
【図１０】従来の振動子に支持部材を固定する方法を説明するための展開斜視図である。
【図１１】従来の柱状部材保持部を示す斜視図である。
【符号の説明】
２…振動子
９、１０、３２、４１、４１、４３、４４…支持部材
１１…振動子ベース
２０、３０…柱状部材保持部
２０ａ、２０ｂ、３０ａ、３０ｂ…長手方向当接片
２０ｃ、２０ｄ、３０ｃ、３０ｄ…幅方向当接片
２０ｅ、２０ｆ、３０ｅ、３０ｆ…底面当接片
２０ｇ、２０ｈ、３０ｇ、３０ｈ…腕部
２０ｉ、２０ｊ、３０ｉ、３０ｊ…固定部
２０ｍ、２０ｎ、３０ｍ、３０ｎ…押圧部
３１…枠部
３３、４０…リードフレーム
４５…部品搭載基板
５０…振動ジャイロ[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a columnar member holding portion and a method for manufacturing a vibrating gyroscope using the same, and more specifically to a method for manufacturing a vibrating gyroscope that uses a columnar member holding portion to position and fix a vibrator and a support member with high accuracy. .
[0002]
[Prior art]
FIG. 9 is a perspective view of a vibrator unit in a conventional vibration gyro. In FIG. 9, the vibrator unit 1 includes a vibrator 2 and metal support members 9 and 10.
[0003]
Among these, the vibrator 2 is polarized in the thickness direction and has a piezoelectric substrate 3 having the first electrode 4 and the second electrode 5 formed on one main surface, and the one main surface while being polarized in the thickness direction. In addition, the piezoelectric substrate 6 on which the third electrode 7 is formed is bonded to the other main surface via the fourth electrode 8 so that the directions of polarization are opposite to each other. The support members 9 and 10 are each formed to have two Z-shaped bent portions. On one main surface of the piezoelectric substrate 6, the third electrode 7 is made of, for example, solder or conductive adhesive. It is fixed electrically and mechanically. In the end, two support members are fixed on one main surface of the piezoelectric substrate 3 so as to straddle the first electrode 4 and the second electrode 5 as well as the support members 9 and 10. This is omitted here.
[0004]
FIG. 10 is an exploded perspective view for illustrating a method of fixing the support members 9 and 10 to the vibrator 2.
[0005]
As shown in FIG. 10, the support members 9, 10 are stretched inside the frame of the resin-like frame-shaped vibrator base 11 from one inner side surface of the vibrator base 11 to the other inner side surface facing each other. Has been. Here, the vibrator base 11 is used to hold the vibrator 2 in a hollow state via the support members 9 and 10 and to confine the vibration energy of the vibrator 2 in the frame. The support member 9 is formed by injection molding. 10 are formed integrally.
[0006]
The vibrator 2 is placed on the support members 9 and 10 inside the frame of the vibrator base 11, and is bonded and fixed at the contact portion with, for example, solder or a conductive adhesive. At this time, since one main surface of the piezoelectric substrate 6 is in contact with the support members 9 and 10 in the vibrator 2, the third electrode 7 formed on the piezoelectric substrate 6 and the metal support members 9 and 10 are actually electrically connected. And mechanically connected.
[0007]
When fixing the support members 9 and 10 to the vibrator 2 so that the vibration of the vibrator 2 is not hindered as much as possible and the vibration of the vibrator 2 does not leak out of the vibrator base 11 as much as possible. The vibrator 2 needs to be positioned at a predetermined position of the support members 9 and 10, actually at the center. Therefore, columnar member holding portions 12 and 13 that hold both ends of the vibrator 2 and are positioned with respect to the support members 9 and 10 are provided inside the two opposing side walls of the vibrator base 11.
[0008]
Here, an enlarged perspective view of the columnar member holding portion 12 is shown in FIG. The columnar member holding portion 12 includes longitudinal contact pieces 12a that contact one end face of the vibrator 2, width contact pieces 12b and 12c that contact both side faces of the vibrator 2 in the width direction, vibrations A bottom surface contact piece 12d that contacts the bottom surface of one end of the child 2 and arm portions 12e and 12f are integrally formed. The arm portions 12e and 12f have one end connected to the width direction contact pieces 12b and 12c and the other end connected to the inner side surface of the side wall of the transducer base 11, whereby the longitudinal direction contact pieces 12a and the width direction The contact pieces 12 b and 12 c and the bottom face contact piece 12 d are held in the hollow inside the side wall of the transducer base 11.
A recess for escape is formed in a portion of the vibrator base 11 adjacent to the longitudinal contact piece 12 so that they do not contact each other. Although detailed description is omitted, the columnar member holding portion 13 is configured in exactly the same manner as the columnar member holding portion 12.
[0009]
The vibrator 2 is positioned at a predetermined location on the support members 9 and 10 by the columnar member holding portions 12 and 13 thus configured, and is fixed to the support members 9 and 10 in this state. Then, after fixing the vibrator 2 and the support members 9 and 10, the arm portions 12e and 12f are cut at a connection portion with the vibrator base 11 or at an appropriate position so as not to hinder the vibration of the vibrator 2. Thus, the columnar member holding portion 12 is removed. The columnar member holding portion 13 is similarly removed.
[0010]
[Problems to be solved by the invention]
In the case of the columnar member holding portions 12 and 13 shown in FIG. 11, the distance between the longitudinal contact piece 12 a of the columnar member holding portion 12 and the longitudinal contact piece of the columnar member holding portion 13 is the length of the vibrator 2. It is formed slightly larger than the length of the vibrator 2 so that it can be accommodated even if it varies somewhat. The interval between the width direction contact pieces 12b and 12c of the columnar member holding portion 12 is also slightly larger than the width of the vibrator 2 so that it can be accommodated even if the width of the vibrator 2 varies somewhat. The width direction abutting piece in the columnar member holding portion 13 is formed in the same manner.
[0011]
Therefore, even when the vibrator 2 is held by the columnar member holding portions 12 and 13, the vibrator 2 can move slightly in the longitudinal direction and the width direction, and thereby the positioning accuracy between the vibrator 2 and the support members 9 and 10 is sufficient. There is a problem that cannot be obtained. Further, the positional relationship between the vibrator 2 and the support members 9 and 10 may change before and after curing due to heat and vibration during curing of the adhesive. When the positioning accuracy between the vibrator 2 and the support members 9 and 10 is insufficient, the vibration of the vibrator 2 becomes unstable or the vibration leaks to the outside.
[0012]
Further, in order to improve the positioning accuracy of the vibrator 2, it is conceivable to provide a mechanism for pressing the vibrator 2 in one direction in the longitudinal direction or the width direction in the columnar member holding portion. There is a possibility that the variation of the child 2 is biased, and in particular, some inclination may be given to the temperature characteristic of the vibrating gyroscope.
[0013]
Further, since the vibrator 2 is only pressed against the support members 9 and 10 by its own weight, the force to press the vibrator against the support member is insufficient due to the downsizing and weight reduction of the vibrator, and the adhesive There is also a problem that the vibrator 2 is likely to float from the support members 9 and 10 during curing to easily cause poor conduction.
[0014]
The present invention aims to solve the above-described problems, and provides a method for manufacturing a vibrating gyroscope capable of stably fixing a vibrator and a supporting member with high positional accuracy, and a columnar member holding portion used therein. To do.
[0015]
[Means for Solving the Problems]
In order to achieve the above object, the columnar member holding portion of the present invention is a columnar member holding portion that holds both ends of a columnar member having a predetermined length and width and positions the columnar member at a predetermined position. Are arranged so as to be sandwiched from the longitudinal direction of the columnar member with an interval shorter than the length of the columnar member, and divided into two in the width direction of the columnar member. Four widths arranged such that the four longitudinal contact pieces and the two end portions of the columnar member are sandwiched from the width direction of the columnar member with an interval narrower than the width of the end portion of the columnar member. Each of the direction abutting pieces and four pressing portions to which pressure from the outside is applied, and arranged adjacent to each other at positions corresponding to the two end portions of the columnar member. A contact piece and the width direction contact piece; The pressing portion is integrally formed, and the longitudinal contact piece and the width direction contact are formed integrally with the four pressing portions by applying pressure to the four pressing portions to be elastically deformed. The distance between the two longitudinal contact pieces facing each other and the distance between the two width direction contact pieces facing each other are temporarily set to the length of the columnar member and the end of the columnar member. It is characterized by being formed so as to be larger than the width of the part.
[0016]
Further, the columnar member holding portion according to the present invention includes the four longitudinal contact pieces, the four width direction contact pieces, and the four pressing portions, together with a positioning object on which the columnar member is positioned. It is formed as a lead frame formed by processing a plate.
[0017]
The signal gyro manufacturing method of the present invention is a vibrating gyro manufacturing method in which the former columnar member holding portion is used, and a support member that supports the vibrator is fixed to the vibrator that is the columnar member. Then, by applying pressure to the pressing portion of the columnar member holding portion and elastically deforming, an interval between the two longitudinal contact pieces facing each other and an interval between the two width direction contact pieces facing each other are obtained. The first step of temporarily extending the length of the vibrator and the width of the end of the vibrator, and the two abutting pieces extending in the first step and facing each other in the longitudinal direction. And removing the pressure applied to the pressing portion of the columnar support member holding portion between the second step of arranging the vibrator between the two width direction abutting pieces facing each other, and Two opposite A third step of sandwiching the vibrator between the longitudinal contact piece and the two width direction contact pieces and positioning the vibrator with respect to the support member; and the support member as the vibrator A fourth step of fixing, and a fifth step of removing the columnar member holding portion from the vibrator.
[0018]
Further, the method for manufacturing a vibrating gyroscope according to the present invention uses the latter columnar member holding portion formed as a lead frame and the supporting member that is the positioning target, and the vibrator is attached to the vibrator that is the columnar member. A method for manufacturing a vibrating gyroscope for fixing the supporting member to be supported, wherein two longitudinal contact portions facing each other by applying pressure to the pressing portion of the columnar member holding portion of the lead frame to be elastically deformed A first step of temporarily increasing a distance between two width direction abutting pieces opposed to each other between a length of the vibrator and a width of an end portion of the vibrator; A second step of disposing the vibrator between the two longitudinal contact pieces facing each other and spread between the two longitudinal contact pieces spread by the process; By removing the pressure applied to the pressing portion of the columnar support member holding portion, the vibrator is held between the two longitudinal contact pieces and the two width contact pieces facing each other, and the vibration A third step of positioning a child with respect to the support member; a fourth step of fixing the support member to the vibrator; and detaching the support member from the lead frame to thereby remove the columnar from the vibrator. And a fifth step of removing the member holding portion.
[0019]
By configuring and implementing in this way, in the columnar member holding portion of the present invention and the method of manufacturing a vibrating gyroscope using the same, the vibrator and the supporting member can be stably fixed with high positional accuracy.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
In FIG. 1, the expanded perspective view of one Example of the columnar member holding | maintenance part of this invention is shown. 2 is a plan view thereof, and FIG. 3 is a front view thereof. 1 to 3, the same parts as those in FIG. 11 are denoted by the same reference numerals, and the description thereof is omitted.
[0021]
In FIG. 1, a columnar member holding portion 20 includes longitudinal contact pieces 20 a and 20 b that contact one end surface of the vibrator 2, and a width direction contact that contacts both side surfaces in the width direction of one end portion of the vibrator 2. It consists of pieces 20c and 20d, bottom contact pieces 20e and 20f that contact the bottom of one end of the vibrator 2, arm portions 20g and 20h, and fixed portions 20i and 20j. Among these, the longitudinal contact piece 20a, the width contact piece 20c, the bottom contact piece 20e, the arm portion 20g, and the fixing portion 20i are integrally formed. The longitudinal contact piece 20b, the width contact piece 20d, the bottom contact piece 20f, the arm portion 20h, and the fixing portion 20j are also integrally formed. The fixing portions 20i and 20j are connected to the inner side surface of one side wall of the transducer base 11, and the fixing portion 20i and the width direction abutting piece 20c are connected via the arm portion 20g, and the fixing portion 20j and the width direction abutting piece 20d are Each is connected via the arm 20h. That is, the fixing portion 20 i and the arm portion 20 g hold the longitudinal contact piece 20 a, the width contact piece 20 c, and the bottom contact piece 20 e in the hollow inner surface of the transducer base 11. Further, the fixing portion 20j and the arm portion 20h hold the longitudinal contact piece 20b, the width contact piece 20d, and the bottom contact piece 20f in the hollow inside the side wall of the transducer base 11.
[0022]
In this columnar member holding portion 20, the longitudinal contact pieces 20 a and 20 b correspond to the longitudinal contact pieces 12 a in the conventional columnar member holding portion 12. The bottom contact pieces 20f and 20g correspond to the bottom contact piece 12d in the conventional columnar member holding portion 12.
[0023]
Note that another columnar member holding portion having the same configuration is also provided on the inner side of the other side wall facing the side wall on which the columnar member holding portion 20 of the vibrator base 11 is provided.
[0024]
The distance between the two longitudinal contact pieces of the other columnar member holding part facing the longitudinal contact pieces 20 a and 20 b of the columnar member holding part 20 is slightly shorter than the length of the vibrator 2. . Further, the interval between the width direction contact pieces 20 c and 20 d of the columnar member holding portion 20 is formed slightly shorter than the width of the vibrator 2. The width direction abutting pieces in the other opposing columnar member holding portions are also formed in the same manner.
[0025]
The fixing portions 20 i and 20 j are formed in a rectangular plate shape, and one side thereof is connected to the side wall of the transducer base 11. For this reason, the two corner portions that are not connected to the vibrator bases of the fixing portions 20i and 20j are easily deformed with respect to the pressure from the vertical direction. Further, since a substantially triangular hole is provided inside, a corner portion close to the connection position with the arm portions 20g and 20h is particularly easily deformed. In this invention, this part is called a press part, and the code | symbol of the press part of the fixing | fixed part 20i and 20j is 20m and 20n, respectively. Note that the columnar member holding portion provided connected to the other opposite side wall also has a pressing portion.
[0026]
A method for manufacturing a vibrating gyroscope using the columnar member holding portion 20 configured as described above will be described below.
[0027]
First, as a first step, pressure from the bottom to the top is applied to the pressing portions 20m and 20n of the two fixing portions 20i and 20j of the columnar member holding portion 20 provided on the vibrator base 11. Actually, the pressing portions 20m and 20n are pushed up from the bottom with something like a pin. Accordingly, the fixing portions 20i and 20j are elastically deformed so as to warp upward. At this time, the end portions of the arm portions 20g and 20f connected in the vicinity of the pressing portions 20m and 20n, particularly those connected to the width direction abutting pieces 20c and 20d, move greatly upward. However, in this case, since the connecting portion of the fixing portions 20i and 20j to the transducer base 11 serves as a fulcrum for deformation, the end portion of the arm portion 20g or 20f connected to the width direction abutting piece 20c or 20d. Does not simply move upward, but also moves away from each other and closer to the side wall to which the fixing portions 20i and 20j of the transducer base 11 are connected. Accordingly, the longitudinal contact piece 20a, the width direction contact piece 20c and the bottom contact piece 20e connected to the arm portion 20g, and the longitudinal contact piece 20b connected to the arm portion 20h and the width direction contact piece 20c. The contact piece 20d and the bottom contact piece 20f also move upward, move away from each other, and move closer to the side wall to which the fixing parts 20i and 20j of the transducer base 11 are connected. In the other columnar member holding portion facing the columnar member holding portion 20, the same pressure is applied to the pressing portion, and the longitudinal contact piece, the width contact piece, and the bottom contact piece move similarly. do.
[0028]
4 and 5 are a front view and an AA cross-sectional view showing the operation of the columnar member holding portion 20 at this time. 4 and 5, (a) shows a state before pressure is applied to the pressing portion, and (b) shows a state where pressure is applied.
[0029]
As shown in FIG. 4A, the interval between the two widthwise contact pieces 20c and 20d of the columnar member holding part 20 before applying pressure to the pressing parts 20m and 20n is W1, and the width of one end of the vibrator 2 It is set to be narrower. And as shown in FIG.4 (b), the space | interval of the two width direction contact pieces 20c and 20d expands to W2 by applying pressure to the press parts 20m and 20n and elastically deforming the fixing parts 20i and 20j. . The pressure applied to the pressing portions 20m and 20n is determined in advance so that the interval w2 is larger than the width of the end portion of the vibrator. In FIG. 4B, the two white arrows indicate the pressure applied to the pressing portions 20m and 20n and the direction thereof.
[0030]
Further, as shown in FIG. 5A, two columnar member holding portions facing the longitudinal contact pieces 20a and 20b of the columnar member holding portion 20 before pressure is applied to the pressing portions 20m and 20n. The distance from the longitudinal contact piece is L1, and is set to be slightly shorter than the length of the vibrator 2. And as shown in FIG.5 (b), by applying a pressure to the press parts 20m and 20n and making the fixing | fixed part 20i and 20j elastically deform, the space | interval of each two longitudinal direction contact pieces spreads to L2. . The pressure applied to the pressing portions 20m and 20n is determined in advance so that the distance L2 is larger than the length of the vibrator.
[0031]
Thus, by applying pressure to the pressing portions 20m and 20n as the first step, the longitudinal contact pieces 20a and 20b of the columnar member holding portion 20 and the length of the other columnar member holding portion facing each other can be easily obtained. The interval between the directional contact pieces can be made larger than the length of the vibrator 2. Further, the interval between the width direction contact pieces 20c and 20d of the columnar member holding portion 20 and the interval between the two width direction contact pieces of the other columnar member holding portion can be made larger than the width of the vibrator 2.
[0032]
Next, as a second step, two widths between two opposing longitudinal contact pieces of the two columnar member holding portions spread in the first step and facing each other. The vibrator 2 is arranged between two directional contact pieces and on two opposing bottom contact pieces. In this state, since the vibrator 2 can move in the horizontal direction, its positional accuracy is not sufficient.
[0033]
Next, as a third step, the pressure applied to the pressing portions 20m and 20n of the columnar member holding portion 20 and the pressing portion of the other columnar member holding portion is removed. This eliminates the deformation of the fixing portions 20i and 20j of the columnar member holding portion 20 and the fixing portion of the other columnar member holding portion, and the longitudinal contact piece, the width direction contact piece, and the bottom contact piece are in their original positions. Return to. At that time, the vibrator 2 is sandwiched from the longitudinal direction by the four longitudinal contact pieces, and the ends thereof are sandwiched from the width direction by the two lateral contact pieces, respectively, and are positioned with respect to the support members 9 and 10. The At that time, the vibrator 2 is not applied with a pressure biased in any direction, and therefore is located at substantially the center of the four longitudinal contact pieces and the width contact pieces facing each other. Thus, the positioning with respect to the support members 9 and 10 is performed with high accuracy. In addition, since force is applied to the vibrator 2 from four directions in the horizontal direction, there is no freedom of movement in the horizontal direction unless external force is applied.
[0034]
Furthermore, the vibrator 2 is not only positioned with respect to the support members 9 and 10, but is also sandwiched between the longitudinal contact pieces and the width contact pieces, and the elastically deformed fixed portion tries to return to the original state. The force is applied in the downward direction. That is, it is pressed against the support members 9 and 10. Therefore, compared with the case where the vibrator 2 is brought into contact with the support members 9 and 10 by its own weight, the force with which both are pressed against each other is strong, and the position of the contact portion is stabilized.
[0035]
At this time, it is assumed that solder or conductive adhesive is applied to at least one side of the contact portion between the vibrator 2 and the support members 9 and 10.
[0036]
Next, as a fourth step, the vibrator 2 and the support members 9 and 10 are fixed by melting the solder or applying heat to the conductive adhesive to cure it. At that time, since the vibrator 2 and the support members 9 and 10 are pressed against each other, there is almost no possibility that the positional relationship between them changes or a conduction failure occurs.
[0037]
Finally, as a fifth step, an appropriate position of the connection portion between the side wall of the vibrator base 11 and the four fixing portions of the two columnar member holding portions or the four arm portions of the two columnar member holding portions is cut. By doing so, the two columnar member holding portions are removed.
[0038]
As described above, in the method for manufacturing the vibrating gyroscope according to the present invention, the support members 9 and 10 are stably fixed to the vibrator 2 with high positional accuracy by using the vibrator base 11 including the columnar member holding portion 20. be able to. In addition, since the columnar member holding portion has a function of pressing the vibrator against the support member, the connection with the support member does not become unstable even if the vibrator is reduced in weight, and the occurrence of poor conduction is prevented. be able to. Further, by increasing the positional accuracy between the support member and the vibrator and fixing the vibrator stably, it is possible to improve the vibration stability of the vibrator and prevent the vibration from leaking to the outside.
[0039]
By the way, in the method for manufacturing a vibration gyro, the support member for fixing the vibrator is not necessarily formed integrally with the vibrator base in advance. For example, a support member is supplied as part of a hoop-shaped lead frame, the support member and the vibrator are fixed in the state of the lead frame, and then the support member is cut together with the vibrator from the lead frame and fixed to the vibrator base. A manufacturing method such as this is also possible. At this time, if the columnar member holding portion is integrally formed with the support member along the lead frame, the positional accuracy between the support member and the vibrator can be further improved.
[0040]
FIG. 6 shows a perspective view of another embodiment of the columnar member holding portion of the present invention formed integrally with the support member on such a lead frame.
[0041]
In FIG. 6, the lead frame 33 is composed of a frame portion 31, a columnar member holding portion 30 and a support member 32 that are formed integrally with the frame portion 31 by processing one metal plate. Note that there are two columnar member holding portions corresponding to one vibrator corresponding to two end portions of the vibrator, but only the columnar member holding portion 30 corresponding to one end portion is illustrated here. The illustration of another columnar member holding portion having the same configuration is omitted. There are also two support members that are fixed to one surface of one vibrator. Here, only one support member 32 is shown, and the other support member is not shown.
[0042]
The columnar member holding portion 30 shown in FIG. 6 has longitudinal contact pieces 30a and 30b that contact one end surface of the vibrator 2 and width direction contact that contacts both side surfaces in the width direction of one end portion of the vibrator 2. It consists of pieces 30c and 30d, bottom contact pieces 30e and 30f that contact the bottom of one end of the vibrator 2, arm portions 30g and 30h, and fixed portions 30i and 30j. Of these, the longitudinal contact piece 30a, the width contact piece 30c, the bottom contact piece 30e, the arm part 30g, and the fixed part 30i are integrally formed. Further, the longitudinal contact piece 30b, the width contact piece 30d, the bottom contact piece 30f, the arm part 30h, and the fixing part 30j are also integrally formed. The fixing portions 30i and 30j are connected to the frame portion 31 of the lead frame 33. The fixing portion 30i and the bottom contact piece 30e are connected via the arm portion 30g, and the fixing portion 30j and the bottom contact piece 30d are connected via the arm portion 30h. Each is connected. That is, the fixing portion 30i and the arm portion 30g hold the longitudinal contact piece 30a, the width contact piece 30c, and the bottom contact piece 30e in a hollow space within the lead frame 33. Further, the fixing portion 30j and the arm portion 30h hold the longitudinal contact piece 30b, the width contact piece 30d, and the bottom contact piece 30f in a hollow space inside the lead frame 33.
[0043]
The interval between the two longitudinal contact pieces of the other columnar member holding part facing the longitudinal contact pieces 30 a and 30 b of the columnar member holding part 30 is formed slightly shorter than the length of the vibrator 2. . Further, the interval between the width direction contact pieces 30 c and 30 d of the columnar member holding portion 30 is formed slightly shorter than the width of the vibrator 2. The width direction abutting pieces in the other opposing columnar member holding portions are also formed in the same manner.
[0044]
Since the fixing portions 30i and 30j are only partially connected to the frame portion 31, the fixing portions 30i and 30j are easily elastically deformed in the vertical direction by the pressure applied from the vertical direction to the connecting portions of the arm portions 30g and 30h and the fixing portions 30i and 30j. It has become. When the fixing portions 30i, 30j are deformed, the arm portions 30g, 30h are connected to the longitudinal contact pieces 30a, the width contact pieces 30c, the bottom contact pieces 30e, and the longitudinal contact pieces 30b. It moves in the vertical direction together with the width direction contact piece 30d and the bottom face contact piece 30f. In the present invention, the connecting portions between the arm portions 30g and 30h to which pressure is applied from above and below and the fixing portions 30i and 30j are referred to as pressing portions, and the reference numerals of the pressing portions are 30 m and 30 n, respectively. However, in FIG. 6, since the pressing part 30n is behind the width direction contact piece 30d, the display is omitted.
[0045]
Also in the columnar member holding portion 30 configured as described above, the longitudinal contact piece 30a connected to the arm portion 30g and the longitudinal contact piece are applied to the pressing portions 30m and 30n by applying pressure from the bottom to the top. As the piece 30b moves upward, the distance from the longitudinal contact piece of the other columnar member holding portion that is separated from and opposed to each other is slightly larger than the length of the vibrator 2. Further, the width direction abutting pieces 30 c and 30 d are also moved upward, and the interval thereof is slightly larger than the width of the vibrator 2. And between the two longitudinal contact pieces facing each other of the two columnar member holding portions, and between the two width direction contact pieces facing each other, the two facing each other By disposing the vibrator 2 on the two bottom contact pieces and removing the pressure applied to the pressing portion, the vibrator 2 is sandwiched from the longitudinal direction by the four longitudinal contact pieces, and each has two width directions. The end portions of the contact pieces are sandwiched from the width direction and positioned with respect to the two support members. At that time, the vibrator 2 is not applied with pressure biased in any direction, and therefore is located at the substantially central portion of the four longitudinal contact pieces and the width contact pieces facing each other, It is positioned with high accuracy with respect to the support member. Moreover, since force is applied to the vibrator 2 from four directions in the horizontal direction, there is no freedom of movement in the horizontal direction unless external force is applied.
[0046]
Furthermore, the vibrator 2 is not only positioned with respect to the support member, but is also sandwiched between the longitudinal contact piece and the width contact piece, and returned to the original of the longitudinal contact piece and the width contact piece. The force to be applied will apply a force in the downward direction. That is, it is pressed against the support member. Therefore, compared with the case where the vibrator 2 is in contact with the support member by its own weight, the force with which both are pressed is strong and stable.
[0047]
At this time, it is assumed that solder or conductive adhesive is applied to at least one side of the contact portion between the vibrator 2 and the two support members.
[0048]
After fixing the vibrator 2 and the support member, the support member is fixed to the vibrator base. In this state, for example, the connection portion between the arm portions 30g and 30h of the columnar member holding portion 30 and the fixing portions 30i and 30j is disconnected, and at the same time, the support member is disconnected from the frame portion 31 of the lead frame 33, thereby Thus, the frame part 31 and the columnar member holding part 30 of the lead frame 33 can be removed. In this way, the vibrator 2 is held in the hollow inside the vibrator base by the support member.
[0049]
As described above, by using the columnar member holding portion of the present invention, the two support members including the support member 32 can be stably fixed to the vibrator 2 with high positional accuracy. Moreover, unlike the columnar member holding portion 20 shown in FIG. 1, the columnar member holding portion and the support member are integrally formed on the same lead frame 33, so that the position between the columnar member holding portion and the support member is the same. The accuracy can be further increased, and the support member can be fixed to the vibrator 2 with higher positional accuracy than when the columnar member holding portion 20 is used. Further, since the columnar member holding portion has a function of pressing the vibrator against the support member, the connection with the support member does not become unstable even if the vibrator is lightened. Further, by increasing the positional accuracy between the support member and the vibrator, it is possible to further improve the vibration stability of the vibrator and prevent the vibration from leaking to the outside.
[0050]
In each of the above embodiments, the vibration gyro of the type in which the end of the support member is fixed to the vibrator base is shown. However, the end of the support member is bent downward without using the frame-like vibrator base. Alternatively, a vibration gyro that is directly fixed to the component mounting board may be used.
[0051]
FIG. 7 shows a perspective view of still another embodiment of the columnar member holding portion of the present invention, which is integrally formed with such a lead frame and a support member for directly fixing the end portion to the component mounting board. 7, parts that are the same as or equivalent to those in FIG. 6 are given the same reference numerals, and descriptions thereof are omitted.
[0052]
7, the lead frame 40 is different from the lead frame 33 shown in FIG. 6 only in that the support member 32 is changed to the support member 41, and a single metal plate is processed in the same manner as the lead frame 33. Is formed. Since the role of the columnar member holding portion 30 in the lead frame 40 is exactly the same as that of the lead frame 33, description thereof will be omitted, but the same operational effects can be achieved.
[0053]
FIG. 8 is a perspective view of a vibration gyro manufactured using the lead frame 40. 8, parts that are the same as or equivalent to those in FIG. 7 are given the same reference numerals, and descriptions thereof are omitted.
[0054]
In FIG. 8, the vibrating gyroscope 50 is configured to hold the vibrator 2 in a hollow space on the component mounting board 45 via four support members 41, 42, 43, 44. The four support members 41, 42, 43, 44 are provided with a number of bent portions so as not to suppress vibration in the thickness direction and width direction of the vibrator 2. Each electrode of the vibrator 2 detects a drive circuit and Coriolis force for bending and vibrating the vibrator 2 formed on the component mounting board 45 in the thickness direction via the support members 41, 42, 43, and 44. It is connected to a circuit (not shown). A cover that covers the vibrator 2 and each circuit is provided on the component mounting board 45, but is omitted here.
[0055]
In the vibration gyro 50 configured as described above, the vibrator 2 and the support member are fixed using the columnar member holding portion 30 formed in the lead frame 40, so that the vibration stability of the vibrator is improved. Moreover, it is possible to prevent vibration from leaking to the outside.
[0056]
【The invention's effect】
In the columnar member holding portion of the present invention and the method of manufacturing a vibrating gyroscope using the columnar member holding portion, four longitudinal contact pieces sandwiching two ends of the vibrator whose columnar member holding portion is a columnar member from the horizontal direction, and A vibrator is arranged in a position where the width direction abutting pieces are provided and these are spread using elastic deformation caused by pressure, and then the vibrator is arranged at a predetermined position by removing the pressure. By fixing the support member, the vibrator and the support member can be stably fixed with high positional accuracy, and the performance of the vibration gyro can be improved.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an embodiment of a columnar member holding portion of the present invention.
2 is a plan view showing a columnar member holding portion of FIG. 1. FIG.
3 is a front view showing a columnar member holding portion of FIG. 1; FIG.
4 is a front view for explaining elastic deformation of the columnar member holding portion of FIG. 1. FIG.
5 is a cross-sectional view for explaining elastic deformation of the columnar member holding portion of FIG. 1. FIG.
FIG. 6 is a perspective view showing another embodiment of the columnar member holding portion of the present invention.
FIG. 7 is a perspective view showing still another embodiment of the columnar member holding portion of the present invention.
8 is a perspective view showing a vibrating gyroscope manufactured using the columnar member holding portion of FIG. 7. FIG.
FIG. 9 is a perspective view showing a vibrator portion of a conventional vibrating gyroscope.
FIG. 10 is an exploded perspective view for explaining a method of fixing a support member to a conventional vibrator.
FIG. 11 is a perspective view showing a conventional columnar member holding portion.
[Explanation of symbols]
2 ... vibrator
9, 10, 32, 41, 41, 43, 44 ... support member
11 ... vibrator base
20, 30 ... Columnar member holding portion
20a, 20b, 30a, 30b ... longitudinal contact piece
20c, 20d, 30c, 30d ... width direction contact piece
20e, 20f, 30e, 30f ... bottom contact piece
20g, 20h, 30g, 30h ... arm
20i, 20j, 30i, 30j ... fixed part
20m, 20n, 30m, 30n ... Pressing part
31 ... Frame part
33, 40 ... Lead frame
45. Component mounting board
50 ... vibrating gyro

Claims

A columnar member holding portion that holds both ends of a columnar member having a predetermined length and width and positions the columnar member at a predetermined position,
The two end portions of the columnar member are arranged so as to be sandwiched from the longitudinal direction of the columnar member with an interval shorter than the length of the columnar member, and divided into two in the width direction of the columnar member. A total of four longitudinal abutment pieces,
Four width direction abutting pieces arranged so as to sandwich the two end portions of the columnar member from the width direction of the columnar member with an interval narrower than the width of the end portion of the columnar member,
And four pressing parts to which pressure from the outside is applied,
In the positions corresponding to the two end portions of the columnar member, the one longitudinal contact piece, the width contact piece, and the pressing portion, which are arranged adjacent to each other, are integrally formed, and By applying pressure to the four pressing portions to cause elastic deformation, the longitudinal contact pieces and the width direction contact pieces integrally formed with the four pressing portions respectively move to move the two pressing portions facing each other. The interval between the two abutting pieces in the width direction opposed to the interval between the abutting pieces in the longitudinal direction is formed so as to be temporarily larger than the length of the columnar member and the width of the end of the columnar member, respectively. The columnar member holding part characterized by this.

The four longitudinal contact pieces, the four width direction contact pieces, and the four pressing portions are formed as a lead frame formed by processing one metal plate together with a positioning target on which the columnar member is positioned. The columnar member holding portion according to claim 1, wherein the columnar member holding portion is provided.

A method for manufacturing a vibrating gyroscope using the columnar member holding part according to claim 1, wherein a supporting member that supports the vibrator is fixed to the vibrator that is the columnar member,
By applying pressure to the pressing portion of the columnar member holding portion to cause elastic deformation, the interval between the two longitudinal contact pieces facing each other and the interval between the two width contact pieces facing each other are temporarily set. A first step of extending the length of the vibrator and the width of the end of the vibrator,
The vibrator is disposed between the two longitudinal contact pieces facing each other and spread in the first step, and between the two width direction contact pieces facing each other. Process,
By removing the pressure applied to the pressing portion of the columnar support member holding portion, the vibrator is sandwiched between the two longitudinal contact pieces and the two width contact pieces facing each other, and the vibration A third step of positioning the child with respect to the support member;
A fourth step of fixing the support member to the vibrator;
And a fifth step of removing the columnar member holding portion from the vibrator.

A vibration gyro that uses the columnar member holding portion according to claim 2 formed as a lead frame and the support member that is the positioning target, and that fixes the support member that supports the transducer to the transducer that is the columnar member. A manufacturing method of
By applying pressure to the pressing portion of the columnar member holding portion of the lead frame to cause elastic deformation, the distance between the two longitudinal contact pieces facing each other and the distance between the two width direction contact pieces facing each other A first step of temporarily extending the length of the vibrator and the width of the end of the vibrator,
The vibrator is disposed between the two longitudinal contact pieces facing each other and spread in the first step, and between the two width direction contact pieces facing each other. Process,
By removing the pressure applied to the pressing portion of the columnar support member holding portion, the vibrator is sandwiched between the two longitudinal contact pieces and the two width contact pieces facing each other, and the vibration A third step of positioning the child with respect to the support member;
A fourth step of fixing the support member to the vibrator;
And a fifth step of removing the columnar member holding portion from the vibrator by separating the support member from the lead frame.