JP4601778B2 - Clean room equipment motor - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optimal motor for use in clean room equipment.
[0002]
[Prior art]
In recent years, motors for clean room equipment have been required to suppress the outflow of dust and gas therein, and those described in JP-A-9-225240 are known.
[0003]
Conventionally, the motor of this type of clean room equipment generally has a structure as shown in FIG. The configuration will be described below with reference to FIG.
[0004]
As shown in the figure, a suction branch pipe 104 is connected to a motor casing 103 of a fan motor 102 of a blower 101, and a vacuum pump connected to the suction branch pipe 104 is provided to keep the inside of the motor casing 103 at a predetermined negative pressure. As a result, air flows from the outside to the inside of the motor casing 103 through the gap between the motor casing 103 and the shaft 105 or the bearing 106.
[0005]
Even if the bearing grease of the bearings 106 and 107 becomes gaseous impurities due to the operation of the fan motor 102, it is discharged out of the system through the suction branch pipe 104 and is not diffused into the clean room air. It was.
[0006]
[Problems to be solved by the invention]
In such a conventional motor for a clean room device, if the inside of the motor casing 103 is not maintained at a predetermined negative pressure level with a vacuum pump connected to the suction branch pipe 104, it is pulled out from the shaft 105, the bearing 106 and the stator 108. The cylindrical body 103c for forming the outlet 109 of the wire 109 and the motor casing 103 is sandwiched between the lower lid 103a and the upper lid 103b, and contamination gas is prevented from leaking from the gap between the bolt nut 103d for fastening them. For this reason, since the vacuum pump must always be operated, there is a problem that the running cost is high, and there is a demand for a motor for a clean room device that does not always have to operate the vacuum pump.
[0007]
SUMMARY OF THE INVENTION The present invention solves the above-described problems, and an object thereof is to provide a motor for a clean room device that does not require power for discharging gas and air harmful to the clean room to the outside of the clean room device.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, the motor for a clean room device according to the present invention has a vertically split motor housing disposed on the blower side of the blower , a shaft through hole of the rotor and a hole for taking out the lead wire of the winding, and receiving hole for receiving the air generated by the blower, the provided discharge hole for discharging, to seal the holes for the lead wire outlet of the winding with an adhesive, detrimental comprises a tube into the discharge hole It is configured to discharge gas and air to the outside.
[0009]
In another aspect, the upper and lower split type motor housing arranged on the blower side of the blower is provided with a shaft through hole for the rotor, a hole for taking out the lead wire of the winding, and a discharge hole for discharging, the place casing and the filter so as to surround receives air generated by the blower at the hole for the lead wire outlet of said winding, a harmful gas or air comprises a tube on the discharge hole to discharge to the outside It is composed .
[0010]
Another means is configured such that a tube having a punching metal-like resistance is connected to the receiving hole.
[0011]
Thereby, the motor for clean room equipment which does not leak harmful gas and dust to a clean room is obtained.
[0012]
Another means is to provide a rotor shaft through-hole, a winding lead-out hole, a receiving hole for receiving air, and a discharging hole for discharging in the motor housing of the upper and lower division type. , The hole for taking out the lead wire of the winding is sealed with an adhesive, and the exhaust hole is provided with a tube so that harmful gas and air are discharged to the outside. a tube, between the receiving hole is obtained by a structure connected with the tube.
[0013]
Thereby, even if there is no air generated by a blower serving as a positive pressure source in the vicinity of the motor, it is possible to provide a motor for a clean room device that does not leak harmful gas and dust to the clean room.
[0014]
The other means is configured such that a positive pressure adjusting valve and a pressure gauge are provided on a tube arranged so as to be connected to a blower pipe maintained at a positive pressure in a clean room.
[0015]
As a result, even when the positive pressure level inside the air duct of the clean room is abnormally high, the positive pressure level inside the motor housing can be maintained appropriately, and a motor for clean room equipment that does not leak harmful gases and dust into the clean room can be provided. .
[0016]
DETAILED DESCRIPTION OF THE INVENTION
According to a first aspect of the present invention, occurs in the vertical split of the motor housing disposed on the blowoff side of the blower, a shaft through-hole of the rotor, and holes for the lead wire outlet of winding, by the blower Provided with a receiving hole for receiving the air and a discharging hole for discharging, and sealing the hole for taking out the lead wire of the winding with an adhesive. It is configured so as to be discharged to the outside, and has the effect of preventing harmful gas and dust from leaking into the internal clean room.
[0017]
Also, the motor housing of the upper and lower division type arranged on the blower side of the blower is provided with a rotor shaft penetration hole, a winding lead extraction hole, and a discharge hole for discharging, so as to surround the blower A casing and a filter are arranged , the air generated by the blower is received by a hole for taking out the lead wire of the winding , and the discharge hole is provided with a tube to discharge harmful gas and air to the outside. It has the effect of preventing harmful gases and dust from leaking into the internal clean room.
[0018]
Also, a tube with punched metal resistance inside is connected to the receiving hole, and the pressure inside the motor housing can always be lower than the positive pressure in the space around the motor. And has the effect of discharging dust.
[0019]
Further, the upper and lower split motor housing is provided with a rotor shaft penetrating hole, a winding lead-out hole, a receiving hole for receiving air, and a discharging hole for discharging. of the hole for the lead wire outlet sealed with adhesive, constitute a harmful gas or air comprises a tube on the discharge hole to discharge to the outside, a blower tube maintained at a positive pressure of the clean room, the It is configured to connect the receiving hole with a tube, and even if there is no air generated by a blower that is a positive pressure source in the vicinity of the motor, it can prevent harmful gas and dust from leaking inside the clean room Has an effect.
[0020]
In addition, the tube arranged to be connected to the blower pipe maintained at the positive pressure in the clean room is equipped with a positive pressure adjusting valve and a pressure gauge, and the positive pressure degree inside the clean room blower pipe Even when the pressure is abnormally high, the positive pressure inside the motor housing can be properly maintained, and harmful gas and dust can be prevented from leaking into the clean room.
[0021]
【Example】
Embodiments of the present invention will be described below with reference to the drawings.
[0022]
Example 1
As shown in FIG. 1, a motor 1 for a clean room device includes a rotor 4 having a shaft 3 on which a bearing 2 is mounted, a stator 6 around which a winding 5 is wound, and a hole for taking out a lead wire of the winding. 7, a bearing house 8 that receives the bearing 2, a vertically split motor housing 10 having a shaft through hole 9, a bolt 11 and a nut 12 that fasten the upper motor housing 10 a and the lower motor housing 10 b, and a blower A receiving hole 13 for receiving the generated air and a discharging hole 14 for discharging are provided, and a tube 15 is connected to the discharging hole 14.
[0023]
The motor 1 is disposed in a space surrounded by a blower 16, a casing 17, and a clean room filter 18, and is positively pressurized by this space.
[0024]
Moreover, the hole 7 for taking out the lead wire of the winding is sealed with an adhesive that is not harmful to the clean room.
[0025]
With the above configuration, even if harmful gas or dust is generated in the clean room by the power of the blower, it can be discharged out of the clean room through the tube.
[0026]
In the present embodiment, the receiving hole is provided in the lower motor housing. However, the receiving hole may be provided in the upper motor housing, and there is no difference in operational effects.
[0027]
(Example 2)
As shown in FIG. 2, a motor 1 for a clean room device includes a rotor 4 having a shaft 3 on which a bearing 2 is mounted, a stator 6 around which a winding 5 is wound, and a hole for taking out a lead wire of the winding. 7, a bearing house 8 that receives the bearing 2, a vertically divided motor housing 10 having a shaft through hole 9, a bolt 11 and a nut 12 that fasten the lower motor housing 10 b and the upper motor housing 10 a, and a discharge hole 14 And a tube 15 connected to the discharge hole 14, and is arranged in a space surrounded by the blower 16, the casing 17, and the clean room filter 18.
[0028]
With the above configuration, there is no need to seal the hole 7 for taking out the lead wire of the winding with an adhesive that is not harmful to the clean room, and gas and dust harmful to the clean room can be discharged through the tube by the power of the blower.
[0029]
(Example 3)
As shown in FIG. 3, in order to arrange so as to receive only the static pressure of the air generated by the blower 16 that has been positively pressurized by the space in which the casing 17 and the filter 18 are disposed so as to surround the blower 16, A tube 32 provided with a punching metal resistor 31 is connected to the receiving hole 13.
[0030]
With the above configuration, the pressure in the motor housing 10 can always be made smaller than the positive pressure in the space around the motor 1, so that gas and dust harmful to the clean room can be discharged by the power of the blower.
[0031]
In the present embodiment, the receiving hole is provided in the lower motor housing. However, the receiving hole may be provided in the upper motor housing, and there is no difference in operational effects.
[0032]
Example 4
As shown in FIG. 4, a tube 41 is connected to a receiving hole 13 for receiving positive pressure air provided in the motor housing 10, and the tube 41 is further connected to a blower pipe 42 maintained at a positive pressure in a clean room. It is.
[0033]
With the above configuration, even if there is no air generated by a blower serving as a positive pressure source in the vicinity of the motor, gas and dust harmful to the clean room can be discharged.
[0034]
In the present embodiment, the receiving hole is provided in the lower motor housing. However, the receiving hole may be provided in the upper motor housing, and there is no difference in operational effects.
[0035]
(Example 5)
As shown in FIG. 5, a positive pressure adjusting tube 41 is provided between a receiving hole 13 provided in the motor housing 10 for receiving positive pressure air and a blower pipe 42 maintained at a positive pressure in the clean room. A valve 51 and a pressure gauge 52 are provided.
[0036]
With the above configuration, even if the positive pressure inside the blast pipe of the clean room is abnormally high, the positive pressure inside the motor housing can be maintained properly by adjusting the valve, and harmful gases and dust are discharged to the clean room. can do.
[0037]
In the present embodiment, the receiving hole is provided in the lower motor housing. However, the receiving hole may be provided in the upper motor housing, and there is no difference in operational effects.
[0038]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a motor for a clean room device that does not leak gas or dust harmful to the clean room to the outside of the clean room.
[0039]
Further, according to the present invention, since the pressure in the motor housing can always be smaller than the positive pressure in the space around the motor, it is possible to provide a motor for a clean room device capable of discharging harmful gases and dust to the clean room by the power of the blower.
[0040]
Further, according to the present invention, it is possible to provide a motor for a clean room device that does not leak harmful gas and dust to the clean room even if there is no air generated by a blower serving as a positive pressure source in the vicinity of the motor.
[0041]
In addition, according to the present invention, even when the positive pressure inside the blast pipe of the clean room is abnormally high, the positive pressure inside the motor housing can be properly maintained, and for clean room equipment that does not leak harmful gases and dust into the clean room. Can provide motor.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a configuration of a clean room equipment motor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view showing a configuration of a clean room equipment motor according to a second embodiment of the present invention. Sectional drawing which shows the structure of the motor for clean room equipment of Example 3 of invention (b) The elements on larger scale which show the content of the tube FIG. 4 is sectional drawing which shows the system configuration of the clean room of Example 4 of this invention. FIG. 6 is a sectional view showing a system configuration of a clean room according to a fifth embodiment of the present invention. FIG. 6 is a sectional view showing a configuration of a conventional motor for a clean room device.
4 Rotor 7 Lead wire extraction hole 9 Shaft penetration hole 10 Motor housing 10a Upper motor housing 10b Lower motor housing 13 Reception hole 14 Discharge hole 15 Tube 16 Blower 17 Casing 18 Filter 31 Resistor 32 Tube 41 Tube 42 Air blower 51 Valve 52 Pressure gauge

Claims (5)

The upper and lower split motor housing disposed on the blowoff side of the blower, a shaft through-hole of the rotor, and holes for the lead wire outlet of the winding, the receiving hole for receiving the air generated by the blower discharges A discharge hole for
Seal the hole for taking out the lead wire of the winding with an adhesive,
A motor for a clean room device configured to have a tube in the discharge hole and discharge harmful gas and air to the outside. The upper and lower split type motor housing arranged on the blower side of the blower is provided with a shaft through hole of the rotor, a hole for taking out the lead wire of the winding, and a discharge hole for discharging,
A casing and a filter are arranged so as to surround the blower ,
The air generated by the blower is received by a hole for taking out the lead wire of the winding ,
Clean room equipment motor configured harmful gas or air comprises a tube on the discharge hole to discharge to the outside.   2. The motor for a clean room device according to claim 1, wherein a tube provided with a punching metal resistor is connected to the receiving hole. The upper and lower split type motor housing is provided with a shaft through hole for the rotor, a hole for taking out the lead wire of the winding, a receiving hole for receiving air, and a discharging hole for discharging,
Seal the hole for taking out the lead wire of the winding with an adhesive,
Constructed to discharge harmful gas and air to the outside with a tube in the discharge hole
The motor for a clean room device according to claim 1, wherein a tube is connected between the blower pipe maintained at a positive pressure in the clean room and the receiving hole.   5. The motor for a clean room device according to claim 4, wherein a tube arranged so as to be connected to a blower pipe maintained at a positive pressure in the clean room is provided with a positive pressure adjusting valve and a pressure gauge.

Images