JP4601698B2 - Semiconductor manufacturing method and apparatus - Google Patents

Description

  The present invention relates to a semiconductor manufacturing method including a process of detecting a position of an orientation flat or a notch on a substrate and aligning it to a certain position, and a semiconductor manufacturing apparatus including a substrate alignment apparatus.

  Generally, an 8-inch cassette that contains a wafer (open cassette without a lid, and the lower part is also open) has an open structure, so that the lower part of the cassette can be opened by raising the cassette and placing the wafer vertically. Therefore, the wafer can be notched. However, a wafer container called a FOUP (Front Opening Unified Pod), which is a 12-inch cassette, has a hermetically sealed structure. Therefore, the wafer must be taken out of the FOUP when notching. Since the wafer in the hoop is normally in a horizontally placed state, in order to perform notch alignment in the vertically placed state, the hoop must be placed vertically or rotated by 90 °. Changing the posture of the hoop by placing the hoop vertically or rotating it 90 ° is very troublesome because the container may be large. In addition, when 25 12-inch wafers are stored, the hoop becomes very heavy and it is difficult to rotate it 90 degrees. Therefore, it is considered that it is easier to take out the wafer from the hoop in the horizontal position and align the notch of the wafer in the horizontal position than in the vertical position.

  Conventionally, a mechanism for positioning a wafer in a horizontally placed state has been proposed in, for example, Japanese Patent Laid-Open No. 6-13450. This is done by placing the wafer on an eccentricity correction jig having a bowl-shaped inclined surface and correcting the eccentricity of the wafer, then lowering the eccentricity correction jig and transferring the wafer from the eccentricity correction jig to the rotary stage. The wafer is mounted and vacuum-sucked, and the eccentric correction jig is further lowered and retracted. Then, the wafer is rotated by a rotary stage, and the notch of the wafer is detected and positioned by an optical sensor. After positioning, the wafer is recovered by the reverse operation. As a result, the amount of eccentricity of the wafer is corrected by one behavior, and the wafer is accurately positioned.

  However, in the positioning mechanism described above, since the back surface of the wafer is supported by vacuum suction when the notch position is detected, the generation of particles cannot be avoided, and there is a problem that the particles adhere to the back surface of the substrate.

  The positioning mechanism described above is only for one wafer, and although there is an effect of eliminating the accuracy of positioning per sheet and simplification of the mechanism, only one sheet can be detected. The positioning speed is slow, which becomes a bottleneck and the overall throughput of the apparatus is poor.

  In order to collectively position a plurality of wafers, it is possible to provide a plurality of the positioning mechanisms in parallel, but the mechanism becomes larger. In addition, if a plurality of substrates are to be aligned at once, a complicated operation is required in which the subsequent substrate must be aligned while maintaining the angular position of the previously aligned substrate. Various problems occur, and it becomes very complicated in terms of process and mechanism to eliminate them.

The object of the present invention is to eliminate the problem of the prior art that the adhesion of particles to the back surface is unavoidable because it supports the back surface of the substrate, and when the substrate is aligned, the adhesion of particles to the back surface of the substrate is prevented. An object of the present invention is to provide a semiconductor manufacturing method and a semiconductor manufacturing apparatus that can be prevented.

  Also, an object of the present invention is to provide a semiconductor manufacturing method and a semiconductor manufacturing apparatus capable of solving a problem of the prior art that only a single substrate unit can be aligned and aligning a plurality of substrates at once. It is to provide.

  Another object of the present invention is to provide a semiconductor manufacturing method and a semiconductor manufacturing apparatus capable of improving the throughput by aligning the substrate during the idle time of the substrate transfer machine for transferring the substrate to the processing chamber or the processing jig. is there.

  It is another object of the present invention to provide a semiconductor manufacturing method and a semiconductor manufacturing apparatus that can easily solve the problems that occur when a plurality of substrates are aligned at the same time.

  1st invention is a semiconductor manufacturing method which has the process of detecting the position of the orientation flat or notch of a board | substrate, and aligning to a fixed position, A board | substrate is moved to a processing chamber or a processing jig for the orientation flat or notch alignment of the said board | substrate. A semiconductor manufacturing method using a substrate transfer machine.

  When a substrate transfer machine that transfers a substrate to a processing chamber or a processing jig is used for orientation flat or notch alignment, it is easy to load and unload the substrate with respect to the substrate alignment apparatus that performs orientation flat or notch alignment. Further, since it is not necessary to prepare a transfer machine separately, the apparatus can be reduced in size and cost can be reduced.

  A second invention is the semiconductor manufacturing method according to the first invention, wherein the orientation flat or notch alignment of the substrate is performed in the transfer chamber in which the substrate transfer machine is installed.

  Since the orientation flat or notch alignment is performed in the transfer chamber, the substrate transfer machine can be used effectively. In addition, since the substrate alignment apparatus is installed in an empty space in the substrate transfer chamber, there is no need to separately prepare a chamber or the like for installing the substrate alignment apparatus, so that the apparatus can be reduced in size and cost can be reduced.

  According to a third aspect of the present invention, the substrate is taken out from the substrate storage container by the substrate transfer machine and is loaded into a substrate alignment device that performs orientation flat or notch alignment of the substrate. After alignment of the orientation flat or notch, the substrate is removed from the substrate alignment device. The semiconductor manufacturing method according to the first invention or the second invention, comprising a step of discharging by the substrate transfer machine and transferring to a processing chamber or a processing jig.

  When a substrate transfer machine that transfers a substrate to a processing chamber or a processing jig is used for orientation flat or notch alignment, it is easy to load and unload the substrate with respect to the substrate alignment apparatus that performs orientation flat or notch alignment. Further, since it is not necessary to prepare a transfer machine separately, the apparatus can be reduced in size and cost can be reduced.

The fourth invention is:
(A) The substrate is taken out from the substrate storage container by the substrate transfer machine and is loaded into a substrate alignment device that performs orientation flat or notch alignment of the substrate, and orientation flat or notch alignment is performed.
(B) The substrate subjected to orientation flat or notch alignment is taken out from the substrate alignment device by the substrate transfer machine and returned to the substrate storage container,
(C) Repeat (a) to (b) until the orientation flat or notch alignment processing of all the substrates in the substrate storage container is completed,
(D) The substrate storage container after orientation flat or notch alignment processing is stored in a storage shelf, the substrate storage container is replaced, and (a) to (d) are repeated, so that the orientation flat or notch alignment of the substrate is performed in advance. The semiconductor manufacturing method according to the first invention or the second invention performed.

  During the idle time of the substrate transfer machine that transfers the substrate to the processing chamber or processing jig while processing the substrate in the processing chamber, the orientation flat or notch alignment of the substrate to be processed in the processing chamber from the next time is performed. If the orientation flat or notch alignment is completed, the substrate can be transferred from the substrate storage container to the processing chamber as it is without newly aligning the orientation flat or notch, so that the substrate can be transferred more quickly. Can improve throughput.

  In the fifth invention, when the orientation flat or notch alignment of the substrate in the substrate storage container is performed in advance, the information is stored, and the orientation flat or notch alignment of the substrate to be transferred is performed based on the information. If the orientation flat or notch alignment of the substrate to be transferred has been performed in advance, the substrate is taken out from the substrate storage container by the substrate transfer device, and directly processed without going through the substrate alignment device. It is a semiconductor manufacturing method as described in 4th invention characterized by having the process of transferring to a chamber or a processing jig.

  When the orientation flat or notch alignment of the substrate to be processed is performed in advance, the transfer path for transferring the substrate directly from the substrate storage container to the processing chamber or processing jig without using the substrate alignment device is automatically selected. If the orientation flat or notch alignment of the substrate to be processed has not been performed in advance, the substrate is transferred from the substrate storage container to the substrate alignment device, and after the orientation flat or notch alignment, it is transferred to the processing chamber or processing jig. Since the transfer route to be loaded is automatically selected, the user does not need to be aware of whether the orientation flat or notch alignment of the substrate has been performed in advance (check whether the orientation flat or notch alignment of the substrate has been performed in advance. No need to perform troublesome operations such as selecting a transport route).

  According to a sixth aspect of the present invention, there is provided a semiconductor manufacturing method including a step of detecting a position of an orientation flat or notch on a substrate and aligning the orientation flat or notch with a predetermined position. This is a semiconductor manufacturing method that is carried out by rotating in a state where it is supported.

  When orientation flat or notch alignment is performed, not the back surface of the substrate but the outer peripheral portion of the substrate is supported, so that particles do not adhere to the back surface of the substrate. Since orientation flat or notch alignment can be performed in a horizontal position, when the substrate is transferred in the horizontal position, a complicated operation of changing the posture of the substrate is not required, and orientation flat or notch alignment is facilitated. In particular, when the substrate has a large diameter, it is difficult to change the posture, so the merit is great.

  In a seventh aspect of the invention, the substrate is temporarily retracted from the substrate support portion, the relative positions in the circumferential direction of the substrate and the substrate support portion are shifted, and then the retracted substrate is again supported by the substrate support It is a semiconductor manufacturing method as described in 6th invention characterized by having the process made to support in a part.

  Specifically, in performing the orientation flat or notch alignment of each substrate by rotating the substrate support portion around the substrate in a state where the outer peripheral portion of one or more substrates is horizontally supported by the substrate support portion, While holding the circumferential position of the substrate, each substrate is temporarily retracted from the substrate support by the substrate retracting mechanism, and the substrate support is rotated about the substrate while the substrate is retracted. It is preferable that the relative position of the substrate support portion with respect to the circumferential direction is shifted, and each substrate retracted by the shifted substrate support portion is returned and supported again.

  In the orientation flat or notch alignment process of the substrate or after the orientation flat or notch alignment, a problem may occur in the relative position between the substrate and the substrate support portion. In such a case, the substrate is temporarily retracted from the substrate support portion that supports each substrate, and the substrate support portion is moved in the circumferential direction of the substrate while the substrate is retracted so that the relative position of the substrate support portion with respect to the substrate is changed. Try to shift. If the position of the substrate support portion relative to the substrate is shifted by moving the substrate support portion while the substrate is retracted, the problem of the positional relationship between the substrate and the substrate support portion can be solved.

  The substrate retracting mechanism for retracting the substrate from the substrate support unit may be, for example, a substrate scooping mechanism provided with three scooping poles having scooping support pins for scooping up and supporting one or a plurality of substrates. Using this, the substrate may be raised so as not to interfere with the substrate support. During the retraction, the angular position in the circumferential direction of the substrate is held while being scooped up, and after the retraction, the substrate is lowered and transferred from the substrate retraction mechanism to the substrate support portion.

  According to an eighth aspect of the present invention, when the relative position of the substrate and the substrate support portion in the circumferential direction is shifted, the substrate support portion does not interfere with the orientation flat or the notch, or the substrate is transferred by the substrate transfer machine. In the semiconductor manufacturing method according to the seventh aspect of the invention, the position of the substrate support portion is corrected so that the approach path of the substrate transfer machine does not interfere with the substrate support portion when discharging.

  Specifically, in the semiconductor manufacturing method including the step of aligning the substrate, the substrate is picked up and retracted from the substrate support portion without moving the circumferential position of the substrate. Rotate the support unit around the substrate so that the substrate support unit does not overlap the orientation flat or notch of the substrate, or when the substrate transfer unit ejects the substrate from the substrate support unit after the substrate alignment, In this semiconductor manufacturing method, the position of the substrate support portion is corrected so that the substrate support portion does not block the approach path.

  When the orientation flat or notch of the substrate overlaps the substrate support part that supports the substrate before alignment (orientation flat or notch alignment), or when the substrate is discharged by the substrate transfer device after alignment of the substrate, the substrate transfer device enters. In some cases, the substrate support portion blocks the path. In such a case, the substrate is once picked up and retracted from the substrate support portion without moving the circumferential angular position of the substrate. In the case of the operation for eliminating the overlap between the orientation flat or the notch and the substrate support portion, the substrate before the notch alignment is also retracted while maintaining the angular position in the circumferential direction of the substrate. While retreating, rotate the substrate support portion around the substrate so that the substrate support portion does not overlap the orientation flat or notch of the substrate, or the substrate support portion does not block the entrance path of the substrate transfer machine Next, the position of the substrate support is corrected (in the latter case, this is referred to as returning to the origin). Performing the return to origin can solve the above problems.

  According to a ninth aspect of the present invention, when the substrate support portion and the orientation flat or notch interfere with each other when the substrate outer peripheral portion is supported by the substrate support portion, the substrate is temporarily retracted, and the substrate and the substrate support portion are The semiconductor manufacturing method according to an eighth aspect of the present invention, wherein the interference is avoided by shifting the relative position in the circumferential direction and then supporting the substrate again by the substrate support portion.

  Specifically, the orientation support or notch alignment of each substrate is performed by rotating the substrate support portion around the substrate in a state where one or more substrates are placed horizontally by supporting the outer peripheral portion of the substrate with the substrate support portion. In the semiconductor manufacturing method including the step of performing the step, when the substrate outer peripheral portion is supported by the substrate support portion, the orientation flat or notch cannot be detected due to interference between the substrate support portion and the orientation flat or notch formed on the substrate outer peripheral portion. The substrate scooping mechanism is used to scoop up the substrate from the substrate support portion and temporarily retract it. This is a semiconductor manufacturing method in which interference between an orientation flat or notch and the substrate support portion is avoided.

  Since the orientation flat or notch position of the substrate cannot be specified when the substrate is placed on the substrate support portion, the orientation flat or notch of the substrate may be applied to the substrate support portion. When the orientation flat or notch is applied to the substrate support portion, the detection sensor may be disturbed by the substrate support portion and may not be able to detect the orientation flat or notch. Therefore, in order to avoid interference between the substrate support portion and the orientation flat or the notch, the substrate support portion is moved relative to the substrate by scooping up and retracting the substrate once by the scooping mechanism, and rotating the substrate support portion by a predetermined amount during the retraction. To avoid the interference.

  In this way, while the substrate is being scooped up and retracted, the substrate support part is displaced with respect to the substrate so that the interference between the substrate support part and the orientation flat or notch is eliminated. Can be avoided.

  In a tenth aspect of the invention, after the orientation flat or notch alignment, the substrate is temporarily retracted, the substrate support portion is set at an allowable position allowing entry of a substrate transfer machine, and then the substrate support portion is again placed on the substrate support portion. This is a semiconductor manufacturing method according to the eighth aspect of the present invention.

  Specifically, the substrate alignment step of discharging one or more substrates to the substrate alignment apparatus by using the substrate transfer machine, aligning the substrate, and then discharging the substrate from the substrate alignment apparatus. In the semiconductor manufacturing method, the substrate support portion that supports the outer peripheral portion of the substrate provided in the substrate alignment apparatus when the orientation flat or notch alignment of the substrate is performed, the allowable position that allows the substrate transfer machine to enter The outer peripheral portion of the substrate that is put into the substrate alignment device is supported by the substrate support portion of the substrate alignment device, and the substrate supported by the substrate support portion is rotated together with the substrate support portion. The orientation flat or notch of the substrate is detected.

  The substrate is aligned based on the detection result, and the aligned substrate is removed from the substrate support portion while the aligned substrate is held by the substrate scooping mechanism provided in the substrate alignment apparatus. An allowable position for scooping up and temporarily retracting, while rotating the substrate support portion to avoid interference between the substrate transfer device and the substrate support portion, and allowing the substrate support portion to enter the substrate transfer device It is preferable that the substrate that has been retracted is returned to the substrate support portion after resetting (returning the origin).

  After the substrate support portion is rotated to align the orientation flat or the notch of the substrate, the substrate support portion may come to the substrate loading position of the substrate alignment apparatus that prevents the substrate transfer machine from entering. When the substrate support portion comes to the loading position, the substrate transfer machine and the substrate support portion interfere with each other and the substrate cannot be discharged. Therefore, in order to avoid interference between the substrate transfer device and the substrate support part, all the substrates are once picked up by the scooping mechanism and retracted while maintaining the alignment state, and the substrate support part is rotated by a predetermined amount during the retracting, thereby The support part is reset to the origin position so as to eliminate the interference.

  While the substrate is being scooped up and retracted, the substrate support that has been displaced in the orientation flat or notch alignment process is reset to the origin position, thus avoiding the problem that the substrate cannot be ejected after the orientation flat or notch alignment. Can do.

An eleventh aspect of the invention is a semiconductor manufacturing method including a step of detecting a position of an orientation flat or notch on a substrate and aligning it to a fixed position. The orientation flats or notches of all the substrates are detected in advance by the detection sensor by stacking and supporting and rotating the required angles at once, the detection information is stored, and the substrate support mechanism is rotated on the basis of the detection information. Each orientation flat or notch alignment of the substrate is performed and the substrate is retracted from the substrate support mechanism while maintaining the circumferential position of the substrate. After the orientation flat or notch alignment of all the substrates is completed, the retracted substrate is It is a semiconductor manufacturing method in which the substrate support mechanism is returned.

  Here, the detection information is position information of a deviation angle from the reference angle position when the orientation flat or the notch is detected. In the process of rotating a plurality of substrates at once and passing through the detection sensor, the orientation flats or notches of all the substrates are detected and the detection information is stored respectively. If the detection information is corrected according to the amount of rotation, the orientation flat or notch position can be accurately remembered. Here, the reason why the detection information needs to be corrected is as follows. For example, if the orientation flat or notch of the substrate overlaps with the substrate support part, all the substrates are temporarily retracted and the substrate support part is rotated by a predetermined amount in order to eliminate it. Even a substrate that has been completed rotates by a predetermined amount. Therefore, the detection information needs to be corrected.

  Alignment of flat substrates or notches of substrates one by one, and withdrawing substrates from the substrate support mechanism while maintaining the circumferential position of the substrates. Is returned to the substrate support mechanism, even if the substrate support position of the substrate support mechanism is changed, the orientation flat or notch position after the alignment is not changed, and appropriate orientation flat or notch alignment becomes possible.

  In a twelfth aspect of the present invention, when the orientation flat or notch position cannot be detected because the orientation flat or notch positions of the plurality of boards are away from the installation location of the detection sensor, the plurality of boards are rotated in advance at a certain angle in advance. The orientation flat or the notch position has a step of bringing the orientation flat or the notch position in the vicinity of the position where the position detection sensor can be detected by collectively rotating the required angle. It is a semiconductor manufacturing method as described in above.

  Unlike the required angle and the constant angle, when the substrate is rotated at a constant angle at a time, the orientation flat or the notch position can be detected for the first time by rotating the substrate by the predetermined angle and further rotating the required angle. When the orientation flat or notch position is far from the installation location of the detection sensor, if the orientation flat or notch position comes close to the location of the position detection sensor by rotating the substrate all at once by a certain angle, the orientation flat or notch position Detection can be easily performed.

  Since the substrate transfer machine enters the substrate loading side of the substrate alignment apparatus, the position detection sensor cannot be placed. Therefore, when the orientation flat or notch position is on the input side, the orientation flat or notch position is away from the sensor installation location. For this reason, it is necessary to rotate the substrate to bring the orientation flat or notch position near the sensor installation location. The same operation may be required even when there is no orientation flat or notch on the substrate loading side of the substrate alignment apparatus.

In a thirteenth aspect of the present invention, when the orientation flat or the notch cannot be detected even if the substrate support mechanism is rotated by a required angle, the following steps (a) to (d) are performed to detect the orientation flat or the notch. Or a twelfth aspect of the invention.
(A) retract the substrate from the substrate support mechanism;
(B) rotating the substrate support mechanism by a predetermined angle;
(C) return the substrate to the substrate support mechanism;
(D) The substrate support mechanism is rotated by a required angle to detect the orientation flat or notch position.
Here, the predetermined angle and the required angle are used in different meanings as will be described later.

Specifically, when the orientation flat or notch position of the substrate cannot be detected by the position detection sensor in the non-contact detection process, the following steps (a) to (d) are performed. Once this process is performed, the orientation flat or notch enters the detectable area from the undetectable area, and the notch can be detected.
(A) retract all substrates from the substrate support mechanism;
(B) rotating the substrate support mechanism by a predetermined amount in order to shift the circumferential relative position between the substrate and the substrate support mechanism;
(C) Return the retracted substrate to the substrate support mechanism rotated by the predetermined amount.
(D) The substrate is rotated by a required amount, and the orientation flat or notch position of the substrate returned to the substrate support mechanism by the sensor is detected.
When the orientation flat or notch position of the substrate can be detected, the plurality of substrates are aligned one by one sequentially by rotating the plurality of substrates based on the detection information, and each time the alignment is completed, In order to hold the alignment result, the substrate that has been aligned is retracted from the substrate support mechanism, and when all the substrates have been aligned, the retracted substrate is returned and supported by the substrate support mechanism. preferable.

  Unlike the required angle and the predetermined angle, there is a relationship of required angle> predetermined angle. Even if the orientation flat or notch position cannot be detected when the substrate support mechanism is rotated by the required angle, the position of the orientation flat or notch can be detected because the circumferential position of the substrate is detected by being shifted by a predetermined angle with respect to the substrate support mechanism. become.

In the fourteenth aspect of the invention, when the orientation flat or notch position is adjusted to a predetermined position after the orientation flat or notch position detection operation for all the substrates is completed, the orientation flat or notch position is away from the predetermined position. In the semiconductor manufacturing method according to the eleventh aspect of the invention, the following steps are repeated when the position cannot be adjusted to a predetermined position, and the orientation flat or notch is adjusted to the predetermined position.
(A) Rotate the substrate support mechanism by a required amount in the direction of the shortest path from the orientation flat or notch position to the predetermined position (b) Retreat the substrate from the substrate support mechanism (c) Reverse the substrate support mechanism to (a) (D) Return the substrate to the support mechanism.

  When the orientation flat or notch position is adjusted to the predetermined position after detecting the orientation flat or notch position of all the substrates, if the orientation flat or notch position is far from the predetermined position, it is not possible to rotate at a time because of the movable range of the device. In some cases, the orientation flat or notch cannot be adjusted to a predetermined position. In such a case, the above steps (a) to (d) are repeated, and the orientation flat or the notch position is gradually shifted to move to a predetermined position. At this time, the shortest path from the notch position to the predetermined position is selected from the stored detection information.

  A fifteenth invention is the semiconductor manufacturing method according to any one of the first to tenth inventions, in which orientation flats or notch alignment of a plurality of substrates is performed at once.

  Since the orientation flat or notch alignment of a plurality of substrates is performed at once, the throughput is greatly improved.

  According to a sixteenth aspect of the present invention, there is provided a semiconductor manufacturing apparatus including a substrate alignment apparatus that performs orientation flat or notch alignment of one or a plurality of substrates supported horizontally. The substrate alignment apparatus supports a substrate outer peripheral portion. And a substrate support mechanism that rotates the substrate by rotating the substrate support portion about the substrate center, and an orientation flat or a notch of the substrate that is supported by the substrate support mechanism and rotates. The semiconductor manufacturing apparatus provided with the detection sensor detected by (1).

  Since the substrate is supported not on the back surface but on the outer peripheral portion, particles generated by supporting the substrate do not adhere to the back surface. Further, when the orientation sensor or the notch is detected in a non-contact manner by the detection sensor, friction does not occur between the detection sensor and the substrate. Therefore, according to the present invention, since the orientation flat or the notch is detected without contact with the substrate and the outer peripheral portion of the substrate is supported, it is possible to effectively prevent the adhesion of particles to the back surface of the substrate.

  A seventeenth aspect of the invention is a semiconductor manufacturing apparatus according to the sixteenth aspect of the invention, wherein a support taper portion is provided in the support portion, and the outer periphery of the substrate is supported by the support taper portion.

  Since the substrate is supported on the support taper by line contact or point contact, the frictional force is reduced compared to those supported by surface contact, and the generation of particles during orientation flat or notch alignment is reduced. It is possible to more effectively prevent particles from adhering to the surface.

  An eighteenth aspect of the invention is a semiconductor manufacturing apparatus according to the sixteenth aspect or the seventeenth aspect of the invention, wherein the substrate support portion further has a tapered portion for correcting substrate eccentricity.

  When the substrate is supported by the support taper portion through the substrate eccentricity correction taper portion, the substrate is in a horizontal position, so that the center of the substrate is automatically adjusted by the weight of the substrate during the orientation flat or notch alignment process. Matching is done.

  A nineteenth invention is the semiconductor manufacturing apparatus according to any one of the sixteenth to eighteenth inventions, further comprising a substrate retracting mechanism for retracting the substrate from a substrate support portion of the substrate support mechanism.

  Specifically, in a semiconductor manufacturing apparatus provided with a substrate alignment apparatus that aligns one or more substrates supported horizontally, the substrate alignment apparatus has a tapered portion, and the tapered portion A substrate support mechanism for supporting the outer periphery of the substrate, wherein the substrate support portion is rotatably provided at the center of the substrate and rotates the substrate supported by the substrate support portion; and the substrate support mechanism A non-contact sensor for detecting an orientation flat or a notch formed on the outer periphery of the substrate that is supported and rotated, and a substrate locking portion for locking the outer periphery of the substrate; It is preferable that the semiconductor manufacturing apparatus has a substrate retracting mechanism that locks the one or a plurality of substrates temporarily from the substrate support portion of the substrate support mechanism.

  When the substrate retracting mechanism is provided, the substrate can be temporarily retracted from the substrate supporting portion, so that the problem of the positional relationship between the substrate supporting portion and the substrate can be solved.

  A twentieth aspect of the invention is the semiconductor manufacturing apparatus according to the nineteenth aspect of the invention, which includes a control unit that controls the substrate support mechanism and the substrate retracting mechanism as shown in the following (a) to (c). (A) The orientation flats or notches of a plurality of substrates are detected, and the rotation of the substrate support mechanism is controlled in order to perform orientation flats or notch alignment one by one. (B) The substrate retracting mechanism is controlled to sequentially retract from the substrate supporting mechanism one by one, and (c) the plurality of retracted substrates are returned to the substrate supporting mechanism after the orientation flat or notch alignment of all the substrates is completed. It controls the substrate retracting mechanism.

Specifically, in a semiconductor manufacturing apparatus provided with a substrate alignment apparatus that aligns a plurality of substrates that are supported horizontally, the substrate alignment apparatus can horizontally arrange a plurality of substrates in a stacked state. A substrate support mechanism that supports and rotates these substrates collectively, a sensor that detects the orientation flat or notch of each substrate that rotates together with the substrate support mechanism in a non-contact manner, and a substrate retract that temporarily retracts the substrate from the substrate support mechanism A mechanism, and a controller that controls the substrate support mechanism and the substrate retracting mechanism.

The controller is
(A) In order to detect the orientation flat or notch of each substrate by rotating a plurality of substrates at once, and to align each substrate one by one based on the detected value of the orientation flat or notch of each substrate Controls the rotation of the support mechanism and outputs an individual alignment end signal when the alignment of each substrate is completed.
(B) based on the individual alignment end signal, controlling the substrate retracting mechanism for sequentially retracting the aligned substrates one by one from the substrate support mechanism;
(C) When the alignment of all the substrates is completed, an all alignment end signal is output, and the substrate retracting mechanism is returned to return the plurality of substrates that have been retracted to the substrate support mechanism based on the all alignment end signal. It is preferable to control.

  By controlling the substrate support mechanism and the substrate retracting mechanism as described above by the control unit, the orientation flats or notches of the plurality of substrates can be smoothly performed by one rotation driving unit.

  In a twenty-first aspect, the substrate support mechanism includes a turntable, a plurality of support poles erected on the turntable, and a substrate support portion provided on each support pole for supporting the outer peripheral portions of the plurality of substrates. A semiconductor manufacturing apparatus according to any one of the sixteenth to twentieth inventions, further comprising: a rotation driving unit that rotates the turntable.

  Specifically, the substrate support mechanism includes a turntable, a plurality of support poles standing on the turntable and supporting a plurality of substrates, and a predetermined pitch along the axial direction of each support pole. A plurality of substrate support portions that support the outer peripheral portion of the substrate by the taper portion, and the support pole is erected. It is preferable that a rotation driving unit that rotates the turntable to rotate the plurality of substrates stacked and supported on the plurality of substrate support units at once is provided.

  Since only one turntable and one rotation driving unit for rotating the turntable are required, the structure can be simplified. The substrate support portion that supports the substrate is preferably composed of three support pins each having a tapered portion that supports the outer peripheral portion of the substrate. However, if the contact area is small, the substrate support portion need not be a pin.

  In a twenty-second aspect of the invention, the substrate retracting mechanism includes a base that can be moved up and down, a lift drive unit that lifts and lowers the base, and a base that is erected on the base. Any of 19th thru | or 20th invention provided with the several scooping pole scooped up from a board | substrate support part, and the board | substrate latching | locking part provided in each scooping pole and latching the outer peripheral part of a board | substrate. A semiconductor manufacturing apparatus.

  Specifically, the substrate retracting mechanism is erected on the base so as not to interfere with a base provided so as to be movable up and down, a lift driving unit that lifts and lowers the base, and the plurality of support poles. A plurality of scooping poles that temporarily pick up a plurality of substrates sequentially from the support poles by raising and lowering the base, and a predetermined pitch in the axial direction in order to scoop up a plurality of substrates sequentially from the bottom layer to each scooping pole. And a substrate locking portion that protrudes radially inward of the base and locks the outer peripheral portion of the substrate. The substrate supporting portion of the substrate support mechanism locks the outer peripheral portion of the substrate by raising the base. It is preferable that the apparatus includes a plurality of substrate locking portions that scoop up the substrate and return the scooped substrate to the substrate support portion by lowering the base.

  The substrate can be retracted from the substrate support mechanism while maintaining the circumferential position of the substrate with a simple structure in which the substrate locking portion is simply attached to the scooping pole.

  In a twenty-third aspect, the substrate support mechanism includes a turntable, a plurality of support poles erected on the turntable, and a substrate support portion provided on each support pole for supporting the outer peripheral portions of the plurality of substrates. The pitch P1 of the substrate locking portion provided on the scooping pole and the pitch P2 of the substrate supporting portion of the support pole are P1 <P2 The semiconductor manufacturing apparatus according to the twenty-second invention is characterized by satisfying the relationship:

  When the pitch P1 of the substrate locking portions and the pitch P2 of the substrate support portions satisfy the relationship of P1 <P2, a plurality of substrates supported by the substrate support portions provided on the support poles are used as scooping poles. By the provided substrate locking portion, it is possible to scoop up sequentially from the bottom one.

  In a twenty-fourth aspect of the present invention, when n substrates are sequentially picked up from the support pole by the scooping pole one by one, the pitch P1 of the substrate locking portion provided on the scooping pole and the substrate support portion of the support pole The semiconductor manufacturing apparatus according to the twenty-third invention, wherein the pitch P2 satisfies a relationship of (n-1) P1> (n-2) P2.

  If the above relationship is satisfied, the plurality of substrates supported by the substrate support portion provided on the support pole can be sequentially picked up from the bottom one by the substrate locking portion provided on the scooping pole. it can. Further, even if the support pole is rotated while the substrate is scooped up by the scooping pole, the substrate, the substrate locking portion provided on the scooping pole, and the substrate support portion provided on the support pole do not interfere.

  In a twenty-fifth aspect of the invention, the detection sensor is configured to advance inward in the radial direction of the substrate when an orientation flat or notch is detected, and to retreat outward in the radial direction of the substrate when not detected. A semiconductor manufacturing apparatus according to any of the inventions to 24th invention.

  Specifically, the sensor is provided so as to be able to advance and retract in the radial direction of each substrate supported by the lamination, and when the orientation flat or notch formed on the outer peripheral portion of the substrate is detected, the sensor moves forward inward in the radial direction of the substrate. It is preferable that the orientation flat or the notch of the substrate is detected, and when not detected, the substrate is retracted radially outward to avoid interference with the substrate support portion.

  When the orientation flat or notch formed on the outer periphery of the substrate is detected, the detection sensor moves inward in the radial direction of the substrate to detect the orientation flat or notch of the substrate, and recedes outward in the radial direction of the substrate when not detected. Thus, interference with the substrate support portion is avoided.

  According to a twenty-sixth aspect of the present invention, there is provided a semiconductor manufacturing apparatus including an orientation flat or notch alignment device for performing orientation flat or notch alignment of a plurality of substrates supported horizontally, wherein the substrate alignment device is laminated with a common rotation center. A plurality of turntables that are provided in a state and each substrate is placed one by one, a plurality of substrate support portions that are provided on each turntable and support the outer periphery of each substrate, and the plurality of turntables The semiconductor manufacturing apparatus includes a plurality of rotation driving units that rotate independently, and a detection sensor that detects the orientation flat or the notch in a non-contact manner.

  Since a plurality of turntables on which the substrates are placed one by one are provided, alignment can be performed individually and control is also easy.

  A twenty-seventh aspect of the invention is a semiconductor manufacturing apparatus according to the twenty-sixth aspect of the invention, further comprising a substrate retracting mechanism for retracting the substrate from the substrate support portion.

  Specifically, in a semiconductor manufacturing apparatus including a substrate alignment apparatus that aligns a plurality of substrates that are supported horizontally, the substrate alignment apparatus is provided in a stacked state with a common rotation center. A plurality of turntables for placing the substrates one by one, and a plurality of turntables attached to the plurality of turntables, supporting a plurality of outer peripheral portions of the substrates placed on the turntables, and taper portions on the support portions Are formed on the outer peripheral portion of the substrate supported by the taper portion of the substrate support portion, the plurality of drive portions that independently rotate the plurality of turntables, respectively. A fixed sensor for detecting the orientation flat or the notch in a non-contact manner and a substrate retracting mechanism are provided.

  If the substrate retracting mechanism is further provided, even if there is a problem in the positional relationship between the substrate support portion and the substrate, the above problem can be solved without canceling the orientation flat or notch alignment.

  In a twenty-eighth aspect of the present invention, the substrate retracting mechanism is provided on a plurality of scooping poles provided so as to be movable up and down, and on each scooping pole, and the substrate outer peripheral portion is locked by lifting to scoop up the substrate from the substrate supporting portion. The semiconductor manufacturing apparatus according to a twenty-seventh aspect of the present invention includes a plurality of substrate locking portions that return the scooped-up substrate to the substrate support portion by descending.

  The substrate retracting mechanism includes a base that can be moved up and down, a lift drive unit that lifts and lowers the base, and a substrate that is erected on the base and temporarily lifts a plurality of substrates from the substrate support unit. A plurality of scooping poles, and each scooping pole provided with a predetermined pitch in the axial direction for scooping up a plurality of substrates and projecting radially inward of the substrate to lock the outer periphery of the substrate A plurality of substrate latches having a latching portion, latching the substrate outer peripheral portion by raising the base, scooping up the substrate from the substrate support portion of the turntable, and returning the scooped substrate to the substrate support portion by lowering the base Part.

  If the substrate retracting mechanism is further provided, even if there is a problem in the positional relationship between the substrate support portion and the substrate, the above problem can be solved without canceling the orientation flat or notch alignment.

  In a twenty-ninth aspect of the invention, in the semiconductor device according to any one of the twenty-sixth to twenty-eighth aspects, the detection sensor and the substrate support portion are in a positional relationship that does not interfere when the substrate is rotated. It is a manufacturing device.

  If the detection sensor and the substrate support are in a positional relationship that does not interfere with each other, the rotation of the substrate support mechanism or the turntable is eliminated and the rotation becomes free. Therefore, the orientation flat or notch can be easily located no matter where the orientation flat or notch is. Can be detected, and orientation flat or notch alignment can be performed smoothly.

  In a thirtieth aspect of the present invention, a structure in which the detection sensor and the substrate support part are in a positional relationship in which the detection sensor is an optical sensor, the turntable having a diameter smaller than the diameter of the substrate, A substrate support portion that protrudes radially outward from the turntable to form a support portion that supports the outer peripheral portion of the substrate on the surface side, and is a radially outer side of the turntable, and the substrate is on the substrate support portion. A light receiving part or a light emitting part arranged on the back side of the outer peripheral part of the substrate that protrudes from the small-diameter turntable when supported, and a light emitting part arranged on the surface side of the outer peripheral part of the substrate facing the light receiving part or the light emitting part, or A semiconductor manufacturing apparatus according to a twenty-ninth aspect of the present invention, comprising an optical sensor having a light receiving portion.

When trying to detect the orientation flat or notch formed on the outer periphery of the substrate with an optical sensor, if the diameter of the substrate and the turntable are the same, the turntable will block the path of light passing through the orientation flat or notch. Or notch cannot be detected. Therefore, the diameter of the turntable is made smaller than the diameter of the substrate so that the outer peripheral portion of the substrate placed on the turntable protrudes radially outward from the turntable. This makes it possible to prevent the optical sensor and the substrate support portion from interfering with each other when the turntable is rotated with a simple structure in which the support portion that supports the outer peripheral portion of the substrate protruding from the turntable is formed on the substrate support portion. .

  A thirty-first invention is the semiconductor manufacturing apparatus according to any one of the twenty-sixth to thirtieth inventions, wherein no rotation driving unit for rotating the turntable is placed under the turntable.

  The rotation drive unit is, for example, a pulse motor. When the rotation drive unit and the turntable are connected with, for example, a belt and a pulley, and the rotation drive unit is arranged in parallel to the side of the turntable, the thickness of the turntable and the substrate supported on the turntable is increased. Since it is absorbed in the middle, the height of the device can be reduced in size as compared with the case where the rotary drive unit is arranged in series under the turntable. Since the rotary drive unit is not placed under the turntable, the height of the apparatus can be lowered and the apparatus can be miniaturized.

  A thirty-second invention is the semiconductor manufacturing apparatus according to the thirty-first invention in which the rotation drive units adjacent in the vertical direction are arranged so that the centers of rotation are different.

  Regarding the rotation drive units adjacent in the vertical direction, if the rotation drive units are distributed and arranged so that the rotation centers are different, interference between the rotation drive units can be avoided, so the interval between the turntables should be less than the desired interval. And further miniaturization of the apparatus can be promoted.

  A thirty-third invention is the semiconductor manufacturing apparatus according to any one of the twenty-sixth to thirty-second inventions, wherein the substrate support portion is transparent. The transparent member is a member that is transparent to light handled by the optical sensor.

  Since the substrate support portion is transparent, even if the orientation flat or notch is applied to the substrate support portion, light is not blocked by the substrate support portion, and the orientation flat or notch can be detected. Therefore, even if the orientation flat or notch is applied to the substrate support portion, it is not necessary to shift the substrate support portion with respect to the substrate, and the operability is improved.

  According to the present invention, since the substrate is supported not by the back surface but by the outer peripheral portion of the substrate, particles do not adhere to the back surface of the substrate. In addition, by having a support pole that can support a plurality of substrates, a plurality of substrates can be aligned at once. Further, by providing a plurality of turntables on which the substrates are placed, a plurality of substrates can be aligned at the same time. Further, throughput can be improved by aligning the substrates using the idle time of the substrate transfer device. In particular, by providing a substrate retracting mechanism, even if a problem such as an orientation flat or notch overlapping with a substrate support portion occurs, the problem can be resolved and the orientation flat or notch of the substrate can be aligned at a certain position. it can.

  Embodiments of the present invention will be described below. In the embodiment, a large 12-inch wafer is used as an alignment substrate, but the present invention is not limited to 12 inches. Moreover, although the case where the alignment mark of the substrate is a notch has been described, an orientation flat may be used. Furthermore, although the number of wafers for collectively detecting notches is five, the number is not limited to five and may be one or several.

  FIG. 30 shows a vertical CVD / diffusion apparatus which is an example of a semiconductor manufacturing apparatus of the embodiment, (a) is a plan view, (b) is a front view, and (c) is a perspective view of a hoop as a substrate storage container. The layout of the substrate alignment apparatus 100 provided in this apparatus is shown. The semiconductor manufacturing apparatus includes a loading chamber 251 for loading and unloading wafers in units of a hoop, a transfer chamber 252 for exchanging the wafer 104 between the loading chamber 251 and the processing chamber 253, and a processing chamber for performing a film forming process on the wafer 104. A substrate alignment apparatus 100 that mainly includes 253 and can align a plurality of wafers 104 at once is provided in a central transfer chamber 252. The carry-in chamber 251 is provided with an I / O stage (not shown), a hoop loader and a hoop shelf as a storage shelf, as well as a pod opener 255 for opening and closing the cover 254a of the hoop 254, as shown in the drawing. The lid 254a of the hoop 254 placed is opened so that the 12-inch wafer 104 can be taken out from the inside of the hoop 254 in the horizontal direction.

  Now, the FOUP 254 in which the wafer 104 is stored in a horizontal state is carried into the carry-in chamber 251 from the outside of the apparatus by a transfer device or manually. The lid 254a is opened by being transported through a predetermined path to the position where the pod opener 255 is provided. In the transfer chamber 252, a wafer transfer machine 256 that can transfer a plurality of wafers 104 at once, a substrate alignment apparatus 100 that aligns the notches of the plurality of wafers 104 described above, and A plurality of wafers 104 are batch-loaded into the substrate alignment apparatus 100 by a tweezer 257 of the wafer transfer device 256 from a hoop 254 with the lid 254a opened.

  After the substrate alignment, the wafer 104 discharged from the substrate alignment apparatus 100 by the wafer transfer device 256 is transferred to the boat 263 at the boat withdrawal position. Here, the boat withdrawal position refers to a position (unload position) where the boat 263 is withdrawn from the reaction tube 258 for performing wafer charge and discharge on the boat 263. The boat 263 serves as a processing jig. The boat 263 onto which the required number of wafers 104 have been transferred is carried into the reaction tube 258 at the top of the processing chamber 253. Thereafter, the reaction tube 258 is subjected to processing such as film formation, diffusion, and oxidation. When this wafer processing is completed, the boat 263 descends and is unloaded from the reaction tube 258, and the wafer 104 on the boat 263 is transferred from the processing chamber 253 to the loading chamber 251 by the reverse operation to the above (however, the substrate position) The alignment device 100 is not interposed), and is stored in the hoop 254 and carried out of the device.

  In FIG. 30, 259 is a transfer elevator, 260 is a transfer machine arm, 261 is a boat elevator, and 262 is a boat arm.

  In the semiconductor manufacturing apparatus according to the embodiment of the present invention, as described above, the substrate alignment apparatus is provided in the central transfer chamber 252, and the notch alignment is performed using the wafer transfer machine 256. Specifically, as described above, a plurality of wafers 104 are collectively loaded into the substrate alignment apparatus 100 from the hoop 254 by the wafer transfer device 256, and after the notch alignment, the substrate transfer is performed by the wafer transfer device 256. The wafer 104 taken out from the apparatus 100 is transferred to the boat 263 as it is. After the required number of wafers 104 are loaded into the boat 263, the wafer transfer device 256 is in a free state. This state continues not only during processing but also until the processed wafer 104 is discharged from the boat 263. In the meantime, since the drive system other than the reaction chamber, such as the transfer machine 256, the substrate alignment apparatus 100, and the pod opener 255, can be moved freely, notch alignment can be performed using this idle time.

Specifically, during this empty time (such as during film formation), the hoop 254 in which the wafer 104 before notch alignment is stored is carried from a storage shelf (not shown) to the position where the pod opener 255 is provided, and the lid 254a is moved. Can be opened. A plurality of wafers 104 are collectively transferred to the substrate alignment apparatus 100 by the tweezer 257 of the wafer transfer device 256 from the hoop 254 with the lid 254a opened. After the notch alignment, the wafer transfer device 256 collects the notched wafer 104 from the substrate alignment apparatus 100 to the hoop 254 at the position of the pod opener 255. Thereafter, this operation is repeated, and when notch alignment of all the wafers 104 in the FOUP 254 is completed, the lid 254a of the FOUP 254 is closed, and the FOUP 254 containing the notched wafers 104 is returned to a storage shelf (not shown). . This operation is performed as much as possible during the idle time of the wafer transfer device 256. As a result, the wafer 104 that has undergone notch alignment can be directly transferred from the hoop 254 to the boat 263 without using the substrate alignment apparatus 100.

  As described above, when the notch alignment of the wafer 104 is performed in advance, it is desirable to store the information. By doing so, when the wafer 104 is transferred, it is determined whether or not the wafer 104 to be transferred has been notch-adjusted based on the information, and the wafer 104 is notch-adjusted in advance. The wafer 104 can be directly transferred from the hoop 254 to the boat 263 without going through the substrate alignment apparatus 100. If the notch alignment of the wafer 104 to be transferred is not performed in advance, the wafer 104 is transferred from the hoop 254 to the substrate alignment apparatus 100 as described above, and then transferred to the boat 263 after the notch alignment. Like that. As described above, when the wafer 104 is transferred, an appropriate wafer transfer path is automatically selected based on the information, so that the user does not need to be aware of whether or not the wafer 104 is notched. This eliminates the need for troublesome operations such as selecting a wafer transfer path.

  In this way, by notching the unprocessed wafer 104 in advance using the idle time of the wafer transfer device 256, the notched wafer 104 is directly transferred to the boat without using the substrate alignment device. Since the transfer can be performed, the notch alignment process can be omitted, and the throughput is improved accordingly.

  Next, the substrate alignment apparatus 100 provided in the transfer chamber 252 will be described in detail.

  First Embodiment (FIGS. 1 to 14) This is an example of a substrate alignment apparatus that detects and aligns notches of a wafer in a horizontal state with a single motor at a time.

  FIG. 1 is a perspective view of a substrate alignment apparatus, and FIG. 2 is a front view. The substrate alignment apparatus 100 includes a pedestal 101, a ring-shaped base 102 provided on the pedestal 101 so as to be movable up and down, and is disposed above the ring-shaped base 102, but is also provided on the pedestal 101 so as to be rotatable. Turntable 103 is provided.

  A plurality of (in the illustrated example, five) wafers 104 have a substrate outer peripheral portion 104b lowered by a plurality of (three in the illustrated example) support poles 105 erected at a predetermined angle on the outer periphery of the turntable 103. It is supported from the side and is held at regular intervals in the vertical direction in a horizontally stacked state.

  The three support poles 105 are distributed and distributed in a substantially semicircular portion around the periphery of the turntable 103 that is reversibly rotated by a motor 106 as a rotation drive unit, and the standing direction thereof is the rotation axis of the turntable 103. It is parallel. Each support pole 105 has a support pin 107 as a substrate support portion that supports the outer peripheral portion 104 b of the wafer 104 from the lower side at a constant pitch in the length direction in an arm shape toward the radially inner side of the turntable 103. Projected. Accordingly, the wafer 104 is rotated by the turntable 103 while being supported by the support pole 105 in a horizontal state. The turntable 103 is attached to the pedestal 101 via a support base 108, and a motor 106 that rotates the turntable 103 is provided in the support base 108. A plate 109 that covers the surface of the wafer 104 is provided above the three support poles 105 so that particles do not adhere to the surface of the wafer 104.

  The substrate support mechanism of the present invention is mainly composed of the turntable 103, the support pole 105, the support pins 107, and one motor 106.

  Further, the five wafers 104 are picked up from the substrate support pins 107 by the three scooping poles 110 that can be moved up and down (in the direction of the arrow a) in order from the wafer 104 that has finished the notch alignment. It has become. Further, the scooped wafer 104 is returned to the substrate support pins 107 when the scooping pole 110 is lowered. At this time, the scooping pole 110 only moves up and down, and the base 102 supporting the scooping pole 110 does not rotate. Therefore, the circumferential angular position of the wafer 104 remains fixed and does not move.

  On the scooping pole 110, scooping support pins 111 as a substrate locking part that supports the outer peripheral portion 104 b of the wafer 104 at a constant pitch in the length direction and scoops up the wafer 104 are projected in an arm shape toward the center of rotation. Yes. As shown in the drawing, five scooping support pins 111 are provided at equal intervals corresponding to the number of wafers 104. The three scooping poles 110 are distributed at approximately 120 ° intervals on the periphery of the base 102 that moves up and down by a motor 112 and a slide mechanism 113 attached to the pedestal 101. It is parallel to the axis of rotation.

  The up-and-down movement is smoothly performed by a guide 114 provided between the base 101 and the base 102. Further, the scooping pole 110 is provided so as to be able to advance and retract in the radial direction (arrow b direction) in the standing state. When the wafer 104 is rotated, the scooping pole 110 is retracted and retracted so as not to interfere with the support pole 105, and is advanced when scooping up. The scooping support pins 111 reach the substrate outer peripheral portion 104b. For this purpose, each scooping pole 110 is attached to a corresponding air cylinder 115 fixed to the base 102.

  The substrate retracting mechanism of the present invention is mainly composed of the base 102, scooping pole 110, scooping support pin 111, air cylinder 115, and motor 112.

  Further, the substrate alignment apparatus 100 is provided with a sensor pole 117 having an optical sensor 116 for detecting the notches 104 a of the five wafers 104 supported by the substrate support pins 107. Similar to the scooping pole 110, the sensor pole 117 is provided so as to be able to advance and retract by a fixed stroke in the radial direction (the direction of the arrow c). When detecting the notch 104a of the wafer 104, the sensor pole 117 moves forward and the optical sensor 116 moves to the substrate outer peripheral portion 104b. When the object approaches without contact and is not detected, the object moves backward and retracts so as not to interfere with the support pole 105.

  Here, the dynamic relationship between the support pole 105, the scooping pole 110, and the sensor pole 117 is that the support pole 105 is rotatable (unless the scooping pole 110 is retracted and interferes with the support pole 105), but it can move forward and backward In contrast, the scooping pole 110 does not rotate, but moves forward and backward. The sensor pole 117 is only allowed to advance and retreat.

The positional relationship between the support pole 105 and the scooping pole 110 is concentrically arranged, and the support pole 105 is arranged on the circumference of the wafer outer periphery at intervals of about 90 ° and 90 ° 180 °. The scooping poles 110 are arranged at equal intervals of approximately 120 ° on the circumference slightly outside the support pole 105. Between the two support poles 105 opened 180 ° diagonally in front of the drawing is the entrance / exit of the wafer 104, the black arrow is the entry direction, and the opposite is the exit direction of the wafer 104. The sensor pole 117 is disposed on the opposite side of the wafer 104 loading / unloading port with the rotation axis of the turntable 103 interposed therebetween. The reason why the sensor pole 117 is provided on the opposite side is to prevent it from interfering with input / output. The five wafers 104 are put in the substrate alignment apparatus 100 by the wafer transfer machine 256 (FIG. 30) in the horizontal state, or extracted from the substrate alignment apparatus 100.

  As shown in FIG. 3A, the support portion for supporting the wafer 104 of the five substrate support pins 107 protruding from the support pole 105 has a first taper portion 118 having a relatively large taper angle. A second taper portion 99 having a taper angle smaller than that of the first taper portion 118 is continuously formed below the first taper portion 118.

  The support surface of the first taper portion 118 has a taper surface having an angle of θ = 60 °, and this is the first taper surface. The support surface of the second taper part 99 has a taper surface with an angle of θ = 6.6 °, which is the second taper surface. The first taper surface corrects the eccentricity of the wafer 104 by its own weight. The second tapered surface supports the wafer 104 at the outer periphery. The wafer 104 and the substrate support pins 107 are not brought into contact with each other on the surface, but are brought into contact with dots or lines to prevent the particles from adhering to the back surface of the wafer. An appropriate angle of the second tapered surface is 2 ° to 7 °. That is, the first taper portion 118 of the substrate support pin 107 is an eccentricity correction taper portion for correcting the eccentricity of the wafer 104, and the second taper portion 99 is a support taper portion for supporting the outer peripheral portion of the wafer 104. is there. The taper angle shown here is only an example, and any number may be used as long as it can correct the eccentricity of the substrate or hold the outer periphery. Further, the taper portion may be one as long as it can simultaneously correct the eccentricity of the substrate and hold the outer periphery.

  As shown in FIG. 3B, the wafer receiving edge 119 that supports the wafer 104 of the scooping support pins 111 of the scooping pole 110 is also slightly tapered. This is to prevent the particles from adhering to the back surface of the wafer during scooping by making point contact with the taper. Similar to the second tapered portion 99 of the substrate support pin 107 in FIG. 3A, the appropriate angle of the tapered surface may be 2 ° to 7 °.

  In the scooping support pin 111 of the scooping pole 110, since the wafer 104 after notch alignment (after eccentricity correction) is mounted, there is no need for eccentricity correction, and the contact area with the wafer is prevented in order to prevent adhesion of particles to the backside of the wafer. As described above, it is only necessary that the taper is slightly tapered.

  FIG. 4 shows the relationship between the scooping pole 110 and the wafer 104. The air cylinder 115 fixed to the base 102 is operated, and the scooping pole 110 is advanced to the wafer 104 side (radially inward side). The scooping pole 110 is lifted by lifting the base 102 via the slide mechanism 113 by the motor 112, so that the wafer 104 can be scooped in the vertical direction by the scooping support pins 111.

  Next, the optical sensor 116 will be described. FIG. 5 is a view showing a relationship between the sensor pole 117 to which the light emitting element 116a and the light receiving element 116b of the optical sensor 116 are attached and the wafer 104, and FIG. 5A is a state diagram in which the sensor pole 117 is retracted. FIG. 5B is a state diagram in which the sensor pole 117 is advanced to detect the notch position.

In order to detect the notch, the air cylinder 122 mounted on the support base 121 fixed to the base 101 is operated to move the sensor pole 117 (FIG. 5A) in the retracted position in the direction of the arrow. Then, the optical sensor 116 is fed into the outer peripheral portion 104b of the wafer 104 (FIG. 5B). When the wafer 104 is rotated by a certain angle in this state, the outer peripheral portion 104b of the wafer 104 passes through the gap 123 between the light emitting element 116a and the light receiving element 116b, so that the presence or absence of a notch can be detected. The angular position of the notch can be detected by an angle signal from the position detection encoder of the motor 106. The notch angle position of each wafer 104 is stored in a storage device (not shown). After detecting the notch angle position, before the scooping operation, the sensor pole 117 is retracted and retracted (FIG. 5A). This is to avoid the interference between the sensor and the wafer when the wafer is picked up in the state where the sensor is inserted.

  The principle of notch detection by the optical sensor 116 will be described with reference to FIG. FIG. 6A is a perspective view, and FIG. 6B is a light reception amount change characteristic diagram of the light receiving element.

  The optical sensor 116 includes a light emitting element 116a including a light emitting diode above the substrate outer peripheral portion 104b and a light receiving element 116b including a CCD camera below the substrate outer peripheral portion 104b, and receives light 125 from the light emitting element 116a. Light is received by the element 116b, and the notch is searched for by the change in the light amount. When the wafer 104 is rotated, the amount of light received from the light receiving element 116b changes as shown in FIG. 6B, but when the wafer 104 reaches the notch 104a, the light from the light emitting element 116a that has been blocked by the substrate outer peripheral portion 104b until then. Since the light 125 passes through the notch 104a, the amount of received light increases abruptly. The peak where the amount of received light increases rapidly becomes a notch. For example, by rotating the wafer 104, the distance from the rotation start point to the notch 104a and the amount of light received by the light receiving element 116b are investigated in the first round, and the rotation is stopped when the notch comes on the light receiving element 116b in the second round and thereafter Can align the notch.

  Next, the operation of the substrate alignment apparatus having the above-described configuration will be described with reference to FIGS. FIG. 7 is a plan view for explaining the behavior of the wafer 104 when the notch 104a is detected. FIG. 8 shows a notched wafer (hatched wafer) 104 when notching all five wafers at once. It is explanatory drawing which scoops up sequentially.

  FIG. 7A shows the time when the wafer is loaded. The wafer transfer machine 256 batch-loads five wafers into the substrate alignment apparatus from the direction of arrow a, and the loaded wafer 104 is loaded onto the substrate support pins of the wafer support pole 105. Support with 107. The sensor pole 117 is disposed behind the support pole 105. Further, the scooping pole 110 is retracted and retracted away from the wafer 104.

  At this time, the angular positions in the circumferential direction of the notches 104a of the five wafers supported by the substrate support pins 107 are in the range of the angle θ across the extension line AO of the line connecting the position B of the optical sensor 116 and the rotation center O, respectively. Suppose that In this apparatus, it is assumed that the notch 104a exists in the range of θ = 60 ° (± 30 °). This is because the wafer 104 handled by this apparatus has been subjected to the cleaning process, and the notch 104a slightly deviates during cleaning, but the position of the notch 104a is not random at all in the five wafers 104, and the deviation is generally ±. This is because the movable range of the apparatus is set to 60 ° (± 30 °) so as to cover the deviation. Here, the movable range of this apparatus is set to a relatively narrow range in accordance with the shift of the notch 104a in the cleaning process. However, the apparatus can actually move when the notch is detected and the support pole 105 and the sensor. The range is such that the pole 117 does not interfere, and at the time of notch alignment, the range is such that the support pole 105 and the scooping pole 110 do not interfere with each other. This is the shape and dimensions of the support pole 105, scooping pole 110, and sensor pole 117. It depends on the width position.

7A, the turntable 103 is rotated by the motor 106 and the support pole 105 is moved by rotating the turntable 103 by the motor 106, thereby rotating the five wafers counterclockwise as indicated by the 180 ° arrows. The state shown in FIG. 7B, which is the detection start position, is taken. In addition, since any rotation direction may be sufficient, you may rotate clockwise. In short, it is sufficient that the optical sensor 116 can detect notches. As a result, the support pole 105 comes to a position as shown in FIG. 5B, and the notch 104a approaches the optical sensor 116. The scooping pole 110 has a fixed movement in the circumferential direction, so there is no change in the angular position. The optical sensor 116 also has no change in the angular position in the circumferential direction. When the optical sensor 116 is advanced toward the wafer 104 in this state, the optical sensor 116 comes from the dotted line position to the solid line position. Here, the motor 106 is rotated to collectively search the angular position of the notch 104a of each wafer 104, and the angular position which is the detection information is stored in the storage means. The angle position can be detected by an angle signal from a position detection encoder of the motor 106.

  Next, the operation of sequentially aligning the notches 104a of the wafers 104 on the line OB based on the angular position data will be described. Although the operation of aligning the notch 104a on the line OB is described here, the notch 104a can be aligned at an arbitrary position.

  If the notch 104a of the first wafer 104 is on the left side of the optical sensor 116 as seen in FIG. 7B, the wafer 104 is rotated clockwise based on this angular position data, and the line The notch 104a is aligned with the position of OB, and the rotation of the motor 106 is stopped. In this way, the first notch alignment is completed. FIG. 8A shows a state in which the notch of the lowermost wafer 104 (indicated by hatching) among the five wafers 104 is aligned with the line OB, and then the scooping pole 110 is advanced inward in the radial direction of the wafer. A state in which the support pins 111 are slid down below the outer peripheral portion 104b of each wafer 104 is shown. Further, as shown in FIG. 8B, the scooping support pins 111 are lifted by the slide mechanism 113 to scoop up the first wafer 104 after the notch alignment, and the support poles 105 are separated from the substrate support pins 107.

  Next, with the first wafer 104 scooped up from below, the support pole 105 is rotated, and the notch 104a of the second wafer 104 from the bottom is aligned with the line OB based on the detected angular position data. When the second notch alignment is completed, the second wafer 104 is scooped up by the scooping support pins 111 as shown in FIG. In the same manner, notch alignment and scooping are sequentially repeated in the third, fourth, and fifth sheets. FIG. 8D shows a state in which the last wafer 104 is scooped up by scooping support pins 111 of the scooping pole 110. In this way, all the wafers 104 are picked up from the substrate support pins 107 and transferred to the support pins 111. When the above operation is finished, the notches 104a of all the wafers 104 come on the line OB.

  When the first wafer is notched, the scooping pole 110 is retracted, so that the support pole 105 can rotate freely without interfering with the scooping pole 110. However, after setting the scooping pole 110 to a scooping position, the wafer 104 can be rotated in order to keep the scooped state and perform the notch alignment of the next wafer 104. The support pole 105 and the scooping pole can be rotated. It is limited to a range (θ) that does not interfere with 110. However, since the deviation of the notch in the cleaning process is ± 30 °, the range needs to be at least a range that can cover it. The timing at which the scooping pole 110 is set to a scoopable position may be before the notch positioning operation for the first wafer after the notch position is detected.

To sequentially picked up the wafer 104 has ended the notch alignment one by one as described above, the pitch P ₂ of the substrate support pins 107 of the pitch P ₁ between the support poles 105 of the pick-up support pins 111 of the pick-up poles 110 In FIG. 8, it is necessary to have at least the following relationship.

P ₁ <P ₂ (1)
_{4P 1> 3P 2 ··· (2} )
However, Expression (2) is an expression that holds when there are five notch alignment target wafers. When the number of notch alignment target wafers is n, Expression (2) is as follows.
(N-1) P ₁ > (n-2) P ₂ (3)
Actually, when determining P ₁ and P ₂ , it is further necessary to consider the wafer deflection and the gaps between the wafer 104 and the scooping support pins 111 and the substrate support pins 107. For example, when the wafer deflection is 0.3, when the gap ΔL = 2 mm between the bottom-up scooping support pins 111 and the substrate support pins 107 shown in FIG. 8A, P ₁ = 19 mm, P ₂ = 23 mm, scooping pitch = 4 mm. This derivation will be described in detail in an embodiment described later.

  After the above-described series of operations, the three support poles 105 are out of the position shown in FIG. Therefore, the turntable 103 is rotated here to return the support pole 105 to the position state of FIG. Next, the scooping pole 110 is lowered, and all the five wafers 104 are returned from the scooping support pins 111 to the substrate support pins 107 of the support pole 105. After returning, the scooping pole 110 is retracted to the outside of the wafer 104. When the support pole 105 is rotated 180 ° in this state, the support pole 105 returns to the original origin position in FIG. Here, the five wafers 104 are collectively discharged from the substrate alignment apparatus 100 by the wafer transfer device 256.

  In the above description, the angle position of the notches 104a of the five wafers supported by the substrate support pins 107 is angle θ = 60 across the extension line AO of the line connecting the position B of the optical sensor 116 and the rotation center O, respectively. The case where it was limited to the range of ° was assumed. However, since the notch 104a may not be within the predetermined angle θ range, it is necessary to generalize this method so that notch detection can be performed even when the notch 104a is not within the predetermined angle θ range. Further, in order to rotate the wafer 104 supported by the support pole 105 while the arbitrary wafer 104 is being scooped by the scooping pole 110, interference between the support pole 105 and the scooping pole 110 occurs. It is also necessary to consider.

  The problem of interference between the support pole 105 and the scooping pole 110 will be described with reference to FIG. When each wafer 104 is finally placed on the scooping pole 110, it is desired that the notch position of each wafer 104 is located at the notch alignment position (photosensor position) S. At this time, if the notch position of the wafer 104 on the support pole 105 is not within the range of θ = 60 ° in FIG. 10A, the notch 104a cannot be moved to the notch alignment position S. This is because, in this apparatus, when the notch alignment operation is performed, the movable range in the wafer circumferential direction is limited. In the notch alignment operation, it is necessary to insert the scooping pole 110 inward in the wafer radial direction from the retracted position shown in FIG. 7B and set it in a scooping-up position as shown in FIG. For this reason, the movable range of the support pole 105 in the wafer circumferential direction is limited to a range in which the support pole 105 and the scooping pole 110 do not interfere with each other. In this apparatus, a sufficient margin is provided between the support pole 105 and the scooping pole 110, and the movable range is determined so as to cover at least the notch deviation (± 30 °) in the cleaning process. .

An apparatus that solves the above problem and can cope with the case where the notch 104a is not within the predetermined angle θ range will be described below. First, a region where notches can be searched in this apparatus and a region where notches cannot be searched will be described with reference to FIG. The wafer 104 is supported by three support poles 105 arranged at intervals of about 180 °, 90 °, and 90 °. When searching for the notch 104a of the wafer 104, it is necessary to insert the sensor pole 117 inward from the retracted position in the wafer radial direction and set it at a position where the notch can be searched as shown in FIG. Accordingly, the wafer 104 includes three searchable regions R1 to R3 surrounded by the support pole 105 that can perform notch position search within a range in which the sensor pole 117 and the support pole 105 do not interfere with each other, and the sensor pole. Three search impossible regions D1 to D3 are formed in the vicinity of the support pole 105 where the notch position search cannot be performed because the movable range is limited so that the 117 and the support pole 105 do not interfere with each other. The ranges of the notch position searchable regions R1 to R3 are 148 °, 81 °, and 81 °, respectively. The range of the notch position searchable area shown here is only an example, and the width and shape of the support pole 105 and sensor pole 117, the clearance between both poles to avoid interference between both poles, and the like are changed. It is also possible to make it wider.

  Next, an outline of the notch alignment method will be described. First, the notch 104a is searched for the searchable regions R1 to R3 of the wafer 104 at 148 °, 81 °, and 81 °. If the notch 104a is not found, the notch 104a is located somewhere in the unsearchable areas D1 to D3. In this case, all the wafers are once picked up by the pick-up pole 110, and only the support pole 105 is rotated by a predetermined angle to return the wafer 104 onto the support pole 105. By this operation, the notch position can be shifted with respect to the support pole 105, and the notch 104a enters any one of the searchable regions R1 to R3 from the non-searchable region. Thereafter, the searchable areas R1 to R3 are searched again. After the notches of all the wafers 104 are detected, an operation for adjusting the notches 104a to a predetermined position is started. First, it is determined whether or not the notch position is within the θ range. This determination is made based on the detected angular position data of the notch 104a. If within the θ range, the wafer 104 is rotated so that the notch 104a is positioned at the notch alignment position S and placed on the scooping pole 107. If it is not within the θ range, the notch 104a cannot be moved to the notch alignment position S by one rotation because of the movable range, so the notch position is shifted little by little. In practice, the wafer 104 is once picked up, the support pole 105 is rotated by a required angle in a direction opposite to the direction in which the notch position is moved, the wafer 104 is returned to the support pole 105, and the notch position of the support pole 105 is aligned with the notch. The notch position is shifted by rotating the required angle so as to approach the position S. By repeating this, the notch position falls within the θ range, so that the notch 104a can be aligned with the notch alignment position S. At this time, the notch 104a is moved in the direction of the shortest path. That is, in FIG. 10A, if the notch 104a is on the right half side, the notch 104a is moved in the clockwise direction, and if it is on the left half side, the notch 104a is moved in the direction opposite to the clockwise direction. In the case of this figure, since the notch 104a is on the left half side, it is moved in the opposite direction to the clock. The shortest path is selected based on the angular position data recorded.

  FIG. 9 is a block diagram of a control unit that controls the mechanism for performing the above-described notch alignment. The control unit includes a control circuit 150, drivers 151 and 152, and electromagnetic valves 153 and 154, and has the following functions.

Controlling the rotation of the motor 106 of the substrate support mechanism to detect notches of each wafer by rotating a plurality of wafers at once;
(A) controlling the rotation of the motor 106 of the substrate support mechanism in order to perform wafer alignment (notch alignment) one by one based on the detected value of the notch of each wafer;
(B) When the alignment of one wafer 104 is completed, an individual alignment end signal is output,
(C) Based on the individual alignment end signal, control the motor 112, the slide mechanism 113, and the air cylinder 115 of the substrate retracting mechanism in order to sequentially retract the wafers 104 that have been aligned from the substrate supporting mechanism one by one,
(D) After the alignment of the wafer 104 is withdrawn, the control of (a) to (c) is performed on the remaining wafer 104,
(E) When all wafers have been aligned, an all alignment end signal is output,
(F) Based on the all alignment end signal, the substrate support mechanism motor returns the substrate support mechanism to the initial state before the notch detection in a state where all the aligned substrates are retracted by the substrate retract mechanism. Control the rotation of 106,
(G) The motor 112, the slide mechanism 113, and the air cylinder 115 of the substrate retracting mechanism are controlled in order to return the plurality of aligned wafers that have been retracted to the substrate supporting mechanism.

  A series of detailed flows based on the control unit described above are shown in the flows of FIGS.

  The five wafers 104 are collectively loaded into the substrate alignment apparatus 100 by the wafer transfer machine 256 and transferred onto the three support poles 105 (step 201). After the transfer, in order to detect the notch, the support pole 105 is rotated 180 ° to the notch detection start position to change from the state of FIG. 7A to the state of FIG. 7B (step 202). The sensor pole 117 is advanced and the optical sensor 116 is inserted into a position where notch detection is possible (step 203). This is the preparation for notch detection.

  Next, the notch detection operation for the searchable area is started. In other words, five notches 104a are searched in a batch with respect to a range (first region R1) of an angle of 148 ° between the support poles 105 of the wafer 104 (step 204). After the notch search, the sensor pole 117 is retracted and the sensor 116 is removed (step 205). This is to avoid interference with the support pole 105 when moving to a search for another region and interference with the wafer 104 when scooping up the wafer 104.

  Here, it is determined whether or not the notches 104a of all the wafers 104 have been detected (step 206). If it is detected, the process proceeds to step 213, and the scooping pole 107 is inserted into the scooping position. If not detected, the process proceeds to step 207, and a notch detection operation is performed for the next area of the wafer having an angle of 81 ° (second area R2). It is determined whether the notches 104a of all the wafers 104 have been detected (step 208). If detected, the process proceeds to step 213 described above. If not detected, the process further proceeds to step 209, and a notch detection operation is performed for the remaining region of the wafer 104 having an angle of 81 ° (third region R3).

  It is determined whether notches have been detected for all wafers (step 210). If it is detected, the process proceeds to step 213 described above. If not detected, the process proceeds to step 211 on the assumption that the notch 104a is present in any one of the three non-searchable areas D1 to D3 described above, and the scooping pole 110 is inserted into the scoopable position. Then, the notch position is shifted with respect to the support pole so that the notches 104a in the unsearchable areas D1 to D3 enter the searchable areas R1 to R3 (step 212). After moving the notch 104a existing in the non-searchable area to the searchable area in this way, the process returns to step 203, and the above-described notch detection operation (steps 203 to 210) for the searchable area is performed again. . With the above operation, the notches 104a of all the wafers 104 can be detected.

  When the notch positions of all the wafers 104 are detected, the scooping pole 110 is inserted into the scooping position as described above (step 213). After the processing of step 213, the notch alignment and scooping operations are performed. Proceed to step 214. Here, it is determined whether or not the notch position of the wafer 104 that has not finished scooping operation and is in the lowest stage is within the range of θ (60 °) (step 214). This determination is made based on the stored angular position data of the notch. If it is not within the θ range, the relative position of the notch 104a with respect to the support pole is shifted by a required amount and the notch 104a is placed in the region within the θ range (step 218), and the process returns to step 214 described above.

If it is within the θ range, the support pole 105 is rotated so that the notch position of the wafer 104 in the lowermost stage is the notch position S to be finally aligned in the wafer 104 that has not finished scooping operation. (Step 215). Then, the wafer 104 after the notch alignment is scooped up (step 216). Next, it is determined whether there is a wafer 104 that has not been scooped up (step 217). If there is an unfinished wafer 104, the process returns to step 214 described above, and steps 214 to 217 are repeated until scooping of all the wafers is completed.

  When the scooping of all the wafers 104 is completed, the process proceeds to step 219, where the support pole 105 is moved to the notch detection start position (the state shown in FIG. 7B) while scooping the wafer 104 by the scooping pole 110. Rotate. Thereafter, the wafer 104 on the scooping pole 110 is placed on the support pole 105 (step 220), and the scooping pole 110 is retracted (step 221). Then, the support pole 105 is rotated to the origin position and returned to the position of FIG. 7A (step 222). Finally, the wafer transfer is performed by the wafer transfer device 256 (step 223).

Details of the individual processing steps 207, 209, 212, and 218 described above will be described with reference to FIG.
(A) Step 207 (notch detection operation for the second region)
The support pole 105 is rotated by a required amount so that the second region of the wafer 104 can be searched (step 2071). The optical sensor 116 is inserted (step 2072), and the notch 104a is searched only for the undetected wafer with respect to the 81 ° range between the support poles 105 of the wafer 104 (step 2073). After the search, the optical sensor 116 is moved backward (step 2074).

(B) Step 209 (notch detection operation for the third region)
The support pole 105 is rotated by a required amount so that the remaining third region of the wafer 104 can be searched (step 2091). The optical sensor 116 is inserted (step 2092), and the notch 104a is searched only for the undetected wafer with respect to the 81 ° range between the support poles 105 of the wafer 104 (step 2093). After the search, the optical sensor 116 is moved backward (step 2094).

(C) Step 212 (Operation for shifting the notch position so that the notch in the undetectable area enters the searchable area)
The wafer 104 on the support pole 105 is scooped up by the scooping pole 110 (step 2121). Thereafter, the support pole 105 is rotated by a predetermined amount so that the notch 104a enters the searchable region (148 °, 81 °, 81 °) from the non-searchable region. At this time, for the notch-detected wafer, the data is corrected so that the amount rotated here is reflected in the detected notch position data. Specifically, the amount of rotation is added to the detected notch position data (step 2122). The predetermined amount by which the support pole 105 is rotated is (360 ° − (148 ° + 81 ° + 81 °)) / 3 = 16.7 ° or more. After a predetermined amount of rotation, the scooping pole 110 is lowered to return the wafer 104 onto the support pole 105, and the scooping pole 110 is retracted (step 2123).

(D) Step 218 (operation to put the notch of the wafer into an area within the θ range)
The wafer 104 on which the scooping operation on the support pole 105 has not finished is scooped up and retracted by the scooping pole 110 (step 2181). The support pole 105 is rotated by a required amount in the direction opposite to the direction in which the notch 104a is moved (step 2182), the scooping pole 110 is lowered, and the wafer scooped in the previous step is returned to the supporting pole (step 2183). Thereafter, the support pole 105 is rotated in the direction (clockwise or counterclockwise) in which the notch 104a becomes the shortest path from the notch position to the notch alignment position (step 2181). As described above, the shortest path is determined by the stored angular position data of the notch 104a. That is, in FIG. 10A, when the notch 104a is on the left half side, the notch 104a is rotated in the opposite direction to the clock, and when it is on the right half side, it is rotated in the clockwise direction. Thereafter, the process returns to step 214 to determine whether the notch position is within the θ range. If not, steps 2181 to 2184 are performed again, and this step is repeated until the notch position falls within the θ range.

  FIG. 14 shows how the wafer 104 for which notch position detection has been completed is rotated by a required amount in steps 214 to 218 and the notch 104a is aligned on the line OB (see FIG. 7). The dotted line in the figure represents the rotational transition of the support pole 105. Also, the alternate long and short dash line in the figure is a straight line passing through the notch 104a and the center of the wafer, and represents the rotational transition of the wafer 104. The reason why the diameter of the wafer 104 is drawn with a dotted line or an alternate long and short dash line is for easy understanding of the rotational change of the wafer relative to the support pole. In the actual operation, the scooping pole 110 is inserted inward in the wafer radial direction, but the scooping pole 110 is drawn in a retracted state for easy understanding of the operation.

  After detecting the notch positions of all the wafers 104, whether or not the notch positions of the wafers 104 for which notch alignment is performed (wafers 104 that have not finished scooping operation and are in the lowest stage) are within the θ range. Is determined from the stored angular position data. If it is not within the θ range, it is determined from the stored angular position data whether it is on the right side or the left side of the line AB (see FIG. 7). When it is on the right side, the wafer 104 is rotated by the required amount in the direction opposite to the clockwise direction, and when it is on the left side, the wafer 104 is rotated clockwise by a required amount so that the shortest path is taken when moving the notch 104a onto the line OB.

  It is assumed that the notch position of the wafer 104 is in the lower left in the initial state (the state before notch alignment after notch detection) (FIG. 14A). In this case, since the notch 104a is not in the θ range and is on the left side of the line AB, the wafer 104 is rotated clockwise by a required amount so that the notch 104a moves on the line OB along the shortest path. Once the wafer 104 is picked up, only the support pole 105 is rotated by a required amount in the counterclockwise direction, which is the direction opposite to the direction in which the notch 104a is moved. Therefore, in this operation, the notch position of the wafer 104 does not move (FIG. 14B). The wafer 104 is returned to the support pole 105, and the support pole 105, that is, the wafer 104 is rotated by a predetermined amount in the clockwise direction. As a result, the notch position moves clockwise by the required amount (FIG. 14C). The wafer 104 is picked up again, and the support pole 105 is rotated by a required amount in the counterclockwise direction opposite to the direction in which the notch 104a is moved (FIG. 14D). The wafer 104 is returned to the support pole 105 and the wafer 104 is rotated clockwise. As a result, the notch position moves further clockwise (FIG. 14E). In this manner, the notch position is shifted so as to fall within the θ range, and finally aligned on the line OB.

  In the description so far, the wafer 104 is first picked up once and only the support pole 105 is rotated in a direction opposite to the direction in which the notch is shifted. However, the wafer 104 is placed before this operation. In this state, the support pole 105 may be rotated in the direction in which the notch position becomes the shortest path to the line OB.

  In the first embodiment, the wafer mounting turntable required for each wafer is eliminated, and instead of this, a support pole 105 is provided to support the wafer, and a scooping pole is provided to adjust the notch. Can be evacuated so that a plurality of wafer notches can be aligned together. Further, when aligning the notch, the substrate outer peripheral portion 104b is supported by the taper portion 99, so that it is supported in a line contact state or a point contact state. Since the generation of particles is reduced and the substrate outer peripheral portion 104b is supported, particle adhesion to the back surface of the wafer can be greatly reduced.

However, the operation of the substrate alignment apparatus of the first embodiment described above is still complicated,
The alignment speed is not so fast. Further, since the driving unit such as the motor 106 is installed below the wafer 104, there is a problem that the height of the apparatus becomes high. Therefore, in the second embodiment described below, the above-described problem is solved by introducing an individual turntable system.

  Second Embodiment (FIGS. 15 to 18) In this embodiment, five motors corresponding to the number of wafers are prepared and the notches of a plurality of wafers are hardly in contact with the wafers. This is a substrate alignment device capable of detection.

  As shown in FIG. 15, the substrate alignment apparatus includes a box 300 having five stages of shelves 301 to 305 including an upper plate 301 and a lower plate 306, and the front surface of the box 300 is opened and opened. It is a formula. Turntables 307 having the same rotation center are respectively attached to the upper surfaces of the five shelves 301 to 305 so that the notches of the five wafers can be detected. Each turntable 307 can be rotationally driven independently, and a timing belt 308 and a motor 309 are used for the drive mechanism. Each motor 309 is provided not on the side of the turntable 307 but on the side. Each of the shelves 301 to 305 has a function as a prevention plate for preventing generated particles from adhering to the lower wafer surface in addition to the function as a mounting plate for the turntable 307. Further, the front corner portions of the respective shelves 301 to 305 are cut and serve as the inlet / outlet of the wafer 104.

  In addition, in the illustrated example, the mounting state of each motor 309 is distributed such as the front and back surfaces of the shelves 301 to 305 or the left and right sides of the box body 300, but this has a motor length, so it fits in the minimum space. This is because of the arrangement. Here, the interval between the turntables is kept within 30 mm.

  Three support pins 310 are attached to the outer peripheral portion of the surface of each turntable 307 so as to be distributed at approximately 120 ° intervals so as to support the outer peripheral portion of the wafer. Further, an optical sensor 311 is attached to the back of each of the shelves 301 to 305 on the side opposite to the wafer insertion port so that the notches of the five wafers supported by the support pins 310 can be detected.

  FIG. 16 is a side view showing details of the drive mechanism of the turntable 307, and FIG. 16A is an embodiment (corresponding to the uppermost stage) in which the motor 309 is provided on the side of the turntable 307. FIG. 16B is a comparison diagram assuming a case where a motor 309 is provided directly below the turntable 307. However, FIG. 16B is upside down for convenience of comparison.

  As shown in FIG. 16A, the pulley 313 is engaged with the rotating shaft 314 of the turntable 307, while the pulley 312 is also engaged with the drive shaft 315 of the motor 309, and the timing belt 308 is stretched between the pulleys 312 and 313. Has been established. The timing belt 308 is placed along the gap between the turntable 307 and the shelf 301. When a motor 309 is provided on the side of the turntable 307 and the rotary shaft 314 and the drive shaft 315 are arranged in parallel, a part of the height (thickness) of the motor 309 including the drive shaft 315 is equal to the thickness of the turntable 307. Absorption and the fact that the drive shaft 315 and the rotary shaft 314 do not have to be connected in series cause the device height La to be reduced, and the size of the device can be reduced. On the other hand, when there is a motor 309 below the turntable 307 as shown in FIG. 16B, the connection length between the drive shaft 315 of the motor 309 and the rotation shaft 314 of the turntable 307, and the height of the motor 309. Protrudes as the height of the part as it is, so that the apparatus height Lb is increased and the apparatus is enlarged.

FIG. 17 shows details of the optical sensor 311 and the support pin 310. The optical sensor 311 has a U-shaped cross section, and the outer peripheral portion 104b of the wafer 104 is received in an opening 316 having a U-shaped cross section. The U-shaped upper part is provided with a light emitting part 311a and the lower part is provided with a light receiving part 311b. When the notch comes to the opening 316 and the amount of light received by the light receiving part 311b changes, the notch position can be detected.

  The diameter of the turntable 307 is slightly smaller than the diameter of the wafer 104 placed thereon, and the support pins 310 protrude radially outward from the outer periphery of the turntable 307 so as to support the outer periphery 104b of the wafer 104. It has become. By forming the support pins 310 that support the outer peripheral portion 104b of the wafer 104 in this way, the support pins 310 and the optical sensor 311 are prevented from interfering with each other, so that the wafer 104 can be rotated without restriction and the notch alignment is performed. Can be performed easily and at high speed.

  The support surface for supporting the wafer 104 of each support pin 310 is a tapered portion 317, whereby the wafer center and the rotation center of the turntable 307 can be easily aligned to automatically correct the eccentricity of the wafer 104. Further, by supporting the substrate outer peripheral portion 104b with the taper portion 317, adhesion of particles to the wafer back surface is prevented.

  Further, as shown in the figure, the support pin 310 has a substantially L shape, and is attached to the outer peripheral portion of the turntable 307 so as to be laid down with the bent portion 318 facing down. The recess of the L-shaped bent portion 318 serves as a relief portion of the light receiving portion 311b from which the optical sensor 311 protrudes. When such a relief portion is formed, the facing distance between the light emitting portion 311a and the light receiving portion 311b can be shortened, so that the apparatus can be miniaturized.

  The escape portion is not essential. Even if there is no escape portion for the sensor on the back surface side, the support pin 310 is provided between the light emitting portion 311a and the light receiving portion 311b of the optical sensor 311, and the support pin 310 may not interfere.

  Next, the operation procedure of the 5-sheet batch substrate alignment apparatus having the above-described configuration will be described using the flow of FIG.

  Five wafers 104 are put into a substrate alignment apparatus by a five-sheet batch wafer transfer machine and transferred to each turntable 307 (steps 401 and 402). Each turntable 307 is rotated independently, a notch is detected by each optical sensor 311 (step 403), and the notch is adjusted to a predetermined position (step 404). When the notch alignment of all five turntables 307 is completed, the wafer 104 is unloaded from the substrate alignment apparatus by the wafer transfer device. In the above-described notch alignment method, the wafer is rotated and the notch is detected in the first round. However, when the notch is detected, the notch is decelerated, the rotation is stopped, and the excessive amount is returned. At first glance, the operation is to detect and adjust the notch at the same time.

  As described above, in the second embodiment, the outer peripheral portion 104b of the wafer 104 is supported by the tapered portion 317 of the support pin 310 provided on the turntable 307, the wafer 104 is rotated, and the notch 104a of the wafer 104 is detected without contact. In addition, since they are aligned, the generation of particles can be reduced, and the adhesion of particles to the back surface of the wafer can be effectively prevented. In addition, since the motor 309 for rotating the turntable 307 is provided for each turntable 307 and operates independently, even if the notch positions are not uniform, the individual motors 309 are not restrained by other wafers for alignment. It can correspond to. In addition, the motor 309 is not disposed directly under the wafer 104 but is provided on the side of the turntable 307 so that the driving force is transmitted to the turntable 307 using the timing belt 308, so that the apparatus height can be lowered. Thus, the structure is relatively simple, the rotation is not restricted, and the notch position detection speed is very fast due to the batch alignment.

  However, even in the case of the second embodiment, there are the following problems when the notch is overlapped on the support pin 310 or when the support pin 310 comes to the tweezer insertion position after the notch alignment. For example, as shown in FIG. 19, if the support pin 310 overlaps the notch position, the support pin 310 blocks the optical path of the optical sensor, so that the notch position cannot be detected. Further, as shown in FIG. 20, since the turntable 307 is rotated for notch alignment, the position of the support pin 310 is shifted, and the support pin 310 comes to the entry position of the tweezer 257 of the wafer transfer device 256. May be an obstacle to entry. In such a case, it is necessary to make the origin of the turntable 307 to allow the tweezer 257 to enter, but this causes a problem that the alignment of the notches is disturbed even though the corner notches are aligned.

  Therefore, in the third embodiment described below, in the case described above, all the wafers are picked up and retracted, and the turntable is rotated by a predetermined amount to shift the position of the support pins to solve the above-described problem. ing. This scooping mechanism incorporates the concept of the first embodiment.

3rd Embodiment (FIGS. 21-29)
This is a substrate alignment apparatus capable of aligning the notch even when the notch of the wafer overlaps with the support pin of the turntable.

  The basic configuration shown in FIG. 21 is the same as that of the substrate alignment apparatus of the second embodiment shown in FIG. The difference is that a substrate retracting mechanism for scooping up and retracting the wafer used in the first embodiment is provided, and when the notch and support pins overlap, the wafer is once scooped up and retracted while only the turntable is shifted. In other words, the wafer is placed again on the shifted turntable to prevent the support pins from overlapping. In addition, even when the support pin closes the tweezer approach path after alignment, only the turntable is shifted to release the tweezer approach path.

  Three scooping poles 321 are provided upright on the outer periphery of a five-stage turntable 307 so as to be movable up and down. The standing direction is parallel to the rotation axis of the turntable 307. On the scooping pole 321, scooping support pins 322 that support the outer peripheral portion of the wafer at a constant pitch in the length direction and scoop the wafer are projected in the form of an arm toward the center of rotation. In FIG. 21, the scooping support pin 322 is illustrated as overlapping the support pin 310 provided on the turntable 307. The wafer support surface of the scooping support pins 322 is a wafer receiving edge surface with a slight taper angle as in the first embodiment.

  The three scooping poles 321 pass through the shelves 301 to 305 and are integrally attached to a base 323 provided in a space formed between the lower shelf 305 and the lower plate 306. The base 323 is moved up and down by an air cylinder 324. The scooping pole 321 simply moves up and down and does not rotate or advance. As the scooping pole 321 rises, scooping support pins 322 are locked to the outer peripheral portion of the substrate, and the wafer is scooped up from the substrate support pins 310. The scooped wafer is returned to the substrate support pins 310 when the scooping pole 321 is lowered.

The mounting situation of each motor 309 that rotates the turntable 307 is as described in the second embodiment, but here, another motor arrangement and mounting situation will be described. More specifically, it is as shown in FIG. Since the wafer 104 and the motor 309 interfere with each other at the time of loading, the motor 309 cannot be arranged on the arrow side from the line Z. As shown in FIG. 22B, the interval between the shelves 301 to 305, that is, the interval between the turntables 307 needs to be within 30 mm due to the restriction of the pitch changing mechanism of the transfer machine 256. When the upper motor (second motor (2)) 309 and the lower motor (fourth motor (4)) 309 are aligned with each other, the motors interfere with each other and are within 30 mm. Therefore, the motor positions are shifted from each other (FIG. 22A). The reason why the motor 309 is located at the corner is to take a distance so that the timing belt 308 connecting the center of the turntable 307 and the motor shaft can enter. The reason why the odd-numbered and even-numbered motors 309 are arranged separately on the left and right is to prevent the motors from interfering with each other so that each stage is within 30 mm.

  FIG. 23 is a detailed explanatory view of the substrate alignment apparatus of FIG. 21, (a) is a plan view, and (b) is a vertical sectional view of the lowermost stage. A support pin position sensor 325 shown in FIG. 23A is a sensor used to determine the origin of the turntable 307. As will be described later, the origin of the turntable 307 is obtained with this sensor signal. Interference between the upper support pin 310 and the tweezers can be prevented. As shown in FIG. 23B, the scooping cylinder 324 drives the base 323 to move the scooping pole 321 up and down, but the guide 327 is parallel to the lifting rod 326 of the cylinder 324. It is provided and the guide 327 is moved up and down smoothly. As shown in FIG. 24, the scooping poles 321 of the third embodiment are provided with scooping support pins 322 at equal intervals in the length direction, and when scooping up the wafer 104, five scooping pins are scooped together. Yes. Note that the wafer support surface of the scooping support pins 322 is a wafer receiving surface with a slight taper angle, as in the first embodiment, and supports the outer periphery of the wafer.

  Now, the notch alignment operation including the case where the notch position cannot be detected because the notch of the wafer 104 is placed on the support pins 310 in the above configuration will be described with reference to FIGS.

  As shown in FIG. 27, five wafers 104 are put into a substrate alignment apparatus by a five-sheet batch wafer transfer machine and transferred to each turntable 307 (steps 501 and 502). After the transfer, the turntable 307 is rotated to detect the notch 104a (step 503). After the notch detection, notch alignment is performed in parallel for the wafer 104 from which the notch 104a is detected (step 504). In the present embodiment, as in the second embodiment, when the notch 104a is detected, the turntable 307 is decelerated, stopped to rotate, and controlled to return the excess amount, so that the notch 104a is detected. At first glance, the wafer 104 is operated to detect the notch 104a and simultaneously align the notch 104a. Thereafter, it is determined whether the notches 104a of all the wafers 104 have been detected (step 505). Here, when the notches 104a of all the wafers 104 are detected, the notch alignment of all the wafers 104 is completed at this point, and the process jumps to step 509. If the notches 104a of all the wafers 104 are not detected, it means that there is a wafer 104 where the support pins 310 of the turntable 307 and the notches 104a overlap each other. Therefore, an operation for eliminating the overlap is performed on the wafer 104. First, the scooping pole 321 is raised by the operation of the air cylinder 324, and all the wafers 104 (FIG. 25A) supported by the support pins 310 of the turntable 307 are once scooped up and retracted by the scooping pole 321. (FIG. 25B, (step 506)).

While all the wafers 104 are retracted, the support pins 310 of the turntable 307 of the wafer 104 where the notch 104a is not detected are rotated by a predetermined amount to stop the turntable 307 (step 507). As shown in FIG. 26, when the turntable is stopped, the support pin 310 and the scooping support pin 322 are stopped at a position shifted by an angle δ. Therefore, the overlap between the support pin 310 and the notch can be eliminated. In this state, the air cylinder 324 is reversely operated, the scooping pole 321 is lowered (step 508), and the wafer 104 is transferred to the support pins 310 (FIG. 25A). As a result, the notch position can be detected.

  When the overlap between the support pin 310 and the notch 104a is eliminated and the notch 104a can be detected, the process returns to step 503, and the above-described series of notch detection and notch alignment operations are performed again on the wafer 104 where the notch 104a is not detected. (Steps 503 to 505). Through the above operation, notch alignment of all the wafers 104 can be performed.

  After aligning all the wafers, all the wafers 104 are retracted (step 509), and each turntable 307 is rotated by a necessary amount during the retracting to return the origin of all the turntables (step 510). This return to origin is always performed every time after notch alignment, so that the next notch alignment can be performed, regardless of whether there is a support pin at the tweezer loading position. Thereafter, the wafer is returned to the turntable 307 (step 511). Then, the wafer 104 is smoothly discharged using a wafer transfer machine (step 522).

  As described above, even when the notch of the wafer 104 taken out of the hoop by the wafer transfer machine is placed on the support pins of the substrate alignment apparatus, the substrate alignment having the substrate retracting mechanism can maintain a certain level. The notch can be aligned to the position. In addition, even after the notch alignment of all wafers, even if the support pin position of the turntable is in the entrance path of the tweezers, all the wafers are lifted once by the scooping mechanism, and the turntable on which nothing is placed, Rotate only the required amount and return the origin. Thereafter, the wafer lifting mechanism is lowered, and the wafer is placed again on the turntable on which the origin is aligned, so that there is no obstacle to the entry of the tweezers.

  In the third embodiment, when the notch cannot be detected because the notch overlaps with the substrate support pin, the overlap is eliminated using the substrate retracting mechanism, but the overlap remains as shown in FIG. However, if the support pin 330 is formed of a material that is transparent to the light of the optical sensor, the notch can be detected without using the substrate retracting mechanism. Even if the notch 104a overlaps the support pin 330, the support pin 330 is transparent, so that the notch 104a can be detected without blocking light. The material of the support pins 330 is preferably quartz glass or the like. The advantage of using a transparent material for the support pin 330 is that the notch 104a can be detected even when the notch 104a and the support pin 330 overlap with each other, and the operation of detecting the notch again becomes unnecessary. The time can be shortened. However, even in this case, there is a problem of interference between the support pins 330 on the turntable 307 and the transfer machine tweezers entering the substrate alignment apparatus, so that a substrate retracting mechanism is necessary.

  The first embodiment described above is based on the premise that the notch position is in the predetermined angle θ range in principle. However, the second and third embodiments do not have such a restriction and can detect where the notch is located. It is. In addition, although the flow of the control part of 2nd and 3rd embodiment was demonstrated, the control block diagram was abbreviate | omitted. The control block is basically configured similarly to the first embodiment (see FIG. 9).

In the first embodiment, the notch position is detected, and the notch is sequentially adjusted to a predetermined position one by one based on the detected angular position data of the notch. The notch alignment time is 36 seconds / 5. It was a sheet (7.2 seconds / sheet). In the second and third embodiments, the notch position is detected and the notches are collectively adjusted to a predetermined position based on the detected angular position data of the notch. In the second and third embodiments, 19 seconds / 5 sheets (3.8 seconds / sheet). ) And even better results. However, the value in the third embodiment is the case where the notch and the support pin do not overlap, or the support pin 330 is made of a transparent material, and the notch 104a and the support pin 330 overlap. It is the shortest time. If the material is not a transparent material and there is an overlap between the notch and the support pin, it is 30 + α seconds / 5 sheets (6 + α ′ / sheet). Note that the notch alignment time is only an example when this device is used, and it can be performed in a shorter time by changing the rotation speed, scooping speed, etc. within a range that does not cause defects such as wafer displacement. is there.

  Note that the number of support poles and scooping poles is preferably three in terms of stability of wafer support, but may be four or more. Further, in this embodiment, the substrate transfer machine is used at the time of loading and unloading the wafer with respect to the substrate alignment apparatus, but when the inter-wafer pitch of the substrate alignment apparatus is different from the inter-wafer pitch of the hoop or boat, Accordingly, it is necessary to change the pitch between the tweezers of the substrate transfer machine.

Here, the specific configuration of the substrate alignment apparatus of the first embodiment and the values of the pitches P1 and P2 in the case of detecting all five sheets will be described.
(1) Substrate Alignment Device FIG. 31 is a perspective view of a specific substrate alignment device according to the first embodiment.

  The substrate alignment apparatus has a two-story structure. The first floor is a mechanism chamber 601 that houses a mechanism for moving the scooping pole 610 up and down, and the second floor is an alignment mechanism portion 602 that performs notch alignment.

  The alignment mechanism unit 602 on the second floor is provided on a turntable 603 rotatably provided on the mechanism chamber 601, and is provided on the outer periphery of the turntable 603 so as to stack and support five wafers horizontally. Three support poles 605, a triangular plate 609 supported on the top of the three support poles 605 and covering the surface of the five wafers supported by the support poles 605, and forward and backward with respect to the radial direction of the turntable 603 The optical sensor 618 includes five optical sensors 618 for detecting notches. The optical sensor 616 detects a notch of the wafer, and a turntable driving motor 606.

  The mechanism room 601 on the first floor includes a housing 600 having a top plate 611 and a bottom plate 619 cut by one corner of a quadrangle and having an irregular pentagon, and two front surfaces of the housing 600 are open. Inside the opened housing 600 is a substantially disc-shaped horizontal plate 613 that can be moved up and down, and is erected on the outer periphery of the horizontal plate 613. The initial state is retracted in the mechanism chamber 601; At the time of notch alignment, three scooping poles 610 that rise to a scoopable position on the second floor, three cylinders 615 that advance and retract each scooping pole 610 in the radial direction, a ball screw 616 inserted through a horizontal plate 613, A ball nut (not shown) attached to the horizontal plate 613 and attached to the ball screw 616, and a motor 612 for rotating the ball screw 616 are provided.

  The scooping pole 610 is retracted in the mechanism room 601 on the first floor in the initial state because the scooping pole 610 interferes with the wafer when the wafer is loaded if the scooping pole 610 is in the scooping position on the second floor, in order to avoid this. It is. That is, as shown in FIG. 32, when the wafer is transferred, the scooping pole 610 exists within the operation range in which the wafer 104 is transferred, and therefore the scooping pole 610 must be retracted. For this reason, the above-described retraction operation of the scooping pole 610 is required, and the wafer transfer is always performed at the retraction position.

When the motor 612 is driven, the ball screw 616 rotates, and the horizontal support plate 613 rises along the ball screw 616. As the horizontal support plate 613 rises, the scooping pole 610 rises from the retracted position on the first floor and rises to a position where scooping can be done on the first floor. The cylinders 615 attached to the horizontal support plate 613 are operated to move each scooping pole 610 radially inward, and the scooping support pins are slid under the outer periphery of the wafer 104. When the motor 612 is driven again to raise the scooping pole 610, the wafer 104 supported by the support pole 605 is scooped up and transferred to the scooping pole 610.

  11 and 112 when the notch alignment is performed using the substrate alignment apparatus having the above-described configuration, in step 202, the support pole 605 is rotated to the notch position start position, and then the scooping pole 610 is further rotated. In step 221, the scooping pole 610 is retracted and then is further lowered and retracted to the first-floor mechanism chamber 601. Note that the operation of raising the scooping pole 610 to a scoopable position may be performed at any time as long as it is before step 201 and before 211.

  (2) Pitch P1, P2 When the wafers 104 are actually picked up sequentially one by one, in order to avoid interference between the wafer 104, the pick-up support pins 111, and the substrate support pins 107, the wafer deflection ε, the wafer 104 and the pick-up support pins 111, a gap between the substrate support pins 107 and the like need to be considered. Here, an example of a method for determining the pitch P1 of the scooping support pins 111 and the pitch P2 of the substrate support pins 107 for actually scooping up the wafers 104 one by one in consideration of them will be described.

  In FIG. 8, the scooping support pins 111 are arranged in order from the bottom, S1, S2,..., S5, the substrate support pins 107 are arranged in order from the bottom, K1, K2,. W2,..., W5, the thickness of the scooping support pins 111 is s, the thickness of the substrate support pins 107 is k, the thickness of the wafer 104 is w, and the deflection of the wafer is ε.

In FIG.
(1) The gap between the lowermost scooping support pins S1 and the lowermost wafer W1 in the initial state (FIG. 8A),
(2) In a state where the m-th wafer (m is a positive number from 1 to 4) is scooped up, the gap between the scooped wafer Wm and the substrate support pin Km, the next scooped wafer W (m + 1), and the wafer A gap with the scooping support pin S (m + 1) (m = 1 in FIG. 8B),
(3) The gap between the uppermost wafer W5 and the uppermost substrate support pin K5 in the state in which the final (fifth) wafer is scooped up, and the lowermost wafer W1 and the second lowest substrate support pin K2 When the gaps (FIG. 8 (d)) are respectively ΔL,
P2 = P1 + 2ΔL (4)
4P1 = 3P2 + k + w + 2ΔL (5)
The following equation holds.

  Here, the gap ΔL needs to be at least the wafer deflection amount ε so that the wafer 104, the substrate support pins 107, and the scooping support pins 111 do not interfere with each other (FIG. 33). Let L = ε + ΔL ′. The wafer deflection was assumed to be ε = 0.3 mm and a margin ΔL ′ ≧ 1 mm, and ΔL = 2 mm was set at the time of design.

The scooping pitch is 2ΔL = 4 mm from FIG. If s = k = 2 mm, w = 0.775 mm, and w = 0.775 mm is about 1 mm, equations (4) and (5) are as follows.
P2 = P1 + 44 P1 = 3P2 + 7,
Therefore, P1 = 19 mm and P2 = 23 mm, and the pitch P1 of the scooping support pin 111 of the scooping pole 110 and the pitch P2 of the substrate support pin 107 of the support pole 105 are determined.

  However, the values of the margin ΔL ′, the scooping support pin 111 thickness s, and the substrate support pin 107 thickness k shown here are just examples, and the wafer deflection amount ε and the wafer 104 thickness w are the wafers. Depending on conditions such as type, material, size, etc., it can be changed variously. Therefore, the pitch P1 of the scooping support pin 111 of the scooping pole 110 and the pitch P2 of the substrate support pin 107 of the support pole 105 can be set to various values.

  In relation to the deflection of the 12-inch wafer, it is not always clear how much the clearance ΔL with the wafer should be set when designing the notch aligner. Therefore, it was assumed that the interval at which the substrate support pole was rotated and not interfered when the wafer was picked up was 2 mm. This is because it is considered that the existence of the deflection becomes irrelevant if a gap of 6 times or more of 0.3 mm of the wafer deflection is taken.

  In addition, here, the spacing between the scooping support pins 111 and the spacing between the substrate support pins 107 is described as being constant. However, if the wafers after notch alignment can be scooped up one by one, the spacing is not equal. It doesn't matter.

1 is a perspective view of a substrate alignment apparatus of a semiconductor manufacturing apparatus according to a first embodiment. It is the same front view by 1st Embodiment. It is a front view of the principal part figure by 1st Embodiment, (a) shows a support pole, (b) shows a scooping pole. It is a front view of the principal part for demonstrating the relationship between the scooping pole and wafer by 1st Embodiment. It is explanatory drawing of the relationship between the sensor pole for detecting the notch by 1st Embodiment, and a wafer, (a) is a retracted state, (b) shows the state which sent the sensor toward the wafer. It is a principle explanatory drawing of the optical sensor by a 1st embodiment, (a) is a positional relationship of a wafer and an optical sensor, and (b) is a light reception amount change characteristic figure in a photo acceptance unit. FIG. 4 is a correlation diagram of a support pole, a scooping pole, an optical sensor, and a wafer according to the first embodiment, where (a) is a diagram when the wafer is loaded, and (b) is a diagram when the support pole is rotated 180 °. It is operation | movement explanatory drawing of the scooping pole by 1st Embodiment, (a) is the position alignment of the 1st sheet | seat, (b) is scooping up the 1st sheet | seat after the position alignment. (C) is a diagram when scooping up the second wafer after alignment, and (d) is a diagram when scooping up the fifth wafer after alignment. It is a block diagram of the control part which controls the mechanism of a 1st embodiment. (A) is explanatory drawing of interference of a support pole and a scooping pole, (b) is explanatory drawing of the notch search area | region of a wafer. It is a flowchart explaining operation | movement of 1st Embodiment when a notch exists in the predetermined angle (theta) range. It is a flowchart explaining operation | movement of 1st Embodiment when a notch is not in the predetermined angle (theta) range. It is detailed explanatory drawing of an individual process step, (a) shows step 207, (b) shows step 209, (c) shows step 212, (d) shows step 218. It is explanatory drawing which shows a mode that a notch position shifts | deviates gradually in the operation | movement of 1st Embodiment when a notch is not in the predetermined angle (theta) range. It is a perspective view of the substrate alignment apparatus of the semiconductor manufacturing apparatus by 2nd Embodiment. It is sectional drawing explaining the drive system of the turntable by 2nd Embodiment, (a) is the example of embodiment which has arrange | positioned the motor to the side of a wafer, (b) is the direct connection which has arrange | positioned the motor facing the wafer surface It is a comparative example of a mold. It is an arrangement | positioning figure which shows the relationship between the support pin and optical sensor for notch detection by 2nd Embodiment. It is a flowchart explaining the operation | movement by 2nd Embodiment. It is explanatory drawing by 2nd Embodiment which shows the case where a notch position overlaps with a support pin, (a) is a top view of a wafer, (b) is an enlarged view of the A section. It is explanatory drawing of 2nd Embodiment which shows interference with a tweezer and a support pin, (a) is when a support pin is located in the approach path of a tweezer, (b) is an approach path when a turntable is returned to an origin. Shows when the support pin does not come. It is a perspective view of the board | substrate alignment apparatus of the semiconductor manufacturing apparatus by 3rd Embodiment. It is explanatory drawing of the motor interference by 3rd Embodiment, (a) is a top view, (b) is a longitudinal cross-sectional view. It is explanatory drawing of the board | substrate alignment apparatus by 3rd Embodiment, (a) is a top view, (b) is a longitudinal cross-sectional view. It is a longitudinal cross-sectional view of the principal part explaining the scooping mechanism by 3rd Embodiment. It is explanatory drawing of the scooping of the wafer by 3rd Embodiment, (a) is before scooping, (b) shows after scooping. It is explanatory drawing by 3rd Embodiment which shows the turntable stop position with respect to a support pin. It is a flowchart explaining the operation | movement which avoids interference with the notch and support pin by 3rd Embodiment. It is a flowchart explaining the operation | movement which avoids interference with the tweezer and support pin by 3rd Embodiment. It is a perspective view of the principal part by 3rd Embodiment which comprised the support pin with the transparent member. It is explanatory drawing which shows arrangement | positioning of the board | substrate positioning apparatus in the semiconductor manufacturing apparatus by this Embodiment, (a) is a side view, (b) is a top view, (c) is a perspective view of a hoop. It is a perspective view of the concrete board | substrate alignment apparatus of the semiconductor manufacturing apparatus of 1st Embodiment by an Example. It is explanatory drawing which shows the interference of the scooping pole and tweezers of an Example. It is explanatory drawing which considered the wafer distortion of the Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Substrate alignment apparatus 103 Turntable 104 Wafer 104a Notch 104b Substrate outer peripheral part 105 Support pole 106 Motor (rotation drive part)
107 support pin 110 scooping pole 111 scooping support pin 116 optical sensor 117 sensor pole

Claims (9)

In the semiconductor manufacturing method including the step of detecting the position of the orientation flat or notch on the substrate and adjusting the position to a certain position,
When aligning orientation flats or notches on a plurality of substrates, the orientation flats or notches on all the substrates are detected by a detection sensor in advance by laminating and supporting the plurality of substrates on the substrate support mechanism and rotating the required angles at once. Memorize detection information,
Rotating the substrate support mechanism based on the detection information to align the orientation flats or notches of the substrates one by one and retreating the substrate from the substrate support mechanism while maintaining the circumferential position of the substrate,
A semiconductor manufacturing method in which after the orientation flat or notch alignment of all the substrates is completed, the retracted substrate is returned to the substrate support mechanism. In a semiconductor manufacturing apparatus equipped with an orientation flat or notch alignment device that performs orientation flat or notch alignment of a plurality of substrates supported horizontally.
The substrate alignment apparatus comprises:
A plurality of turntables that are provided in a stacked state with a common rotation center, and on which the substrates are placed one by one;
A plurality of substrate support portions provided on each turntable and supporting each substrate ;
A plurality of rotation driving units for independently rotating the plurality of turntables;
And a sensor for detecting said orientation flat or notch in a non-contact,
The substrate support portion is provided with a taper portion, and the center of the substrate supported by the substrate support portion and the rotation center of the turntable coincide with each other by supporting the outer peripheral portion of the substrate by the taper portion. the semiconductor manufacturing apparatus is. 3. The semiconductor manufacturing apparatus according to claim 2 , further comprising a substrate retracting mechanism for retracting the substrate from the substrate support portion. The substrate retracting mechanism is provided on a plurality of scooping poles that can be moved up and down, and on each scooping pole. When the substrate is lifted, the substrate outer peripheral portion is locked to scoop the substrate from the substrate support portion, and the scooped substrate is lowered. The semiconductor manufacturing apparatus according to claim 3 , further comprising: a plurality of substrate locking portions that are returned to the substrate support portion by the step. 5. The semiconductor manufacturing apparatus according to claim 2 , wherein when the substrate is rotated, the detection sensor and the substrate support portion are in a positional relationship that does not interfere with each other. When the detection sensor is an optical sensor, the structure in which the detection sensor and the substrate support part do not interfere with each other includes a turntable having a diameter smaller than the diameter of the substrate, and a radially outer side from the turntable. And a substrate support part that forms a support part that supports the outer peripheral part of the substrate on the surface side, and is radially outward of the turntable and has a small diameter when the substrate is supported by the substrate support part. An optical device having a light receiving portion or a light emitting portion arranged on the back side of the outer peripheral portion of the substrate protruding from the turntable and a light emitting portion or a light receiving portion arranged on the front surface side of the outer peripheral portion of the substrate facing the light receiving portion or the light emitting portion. The semiconductor manufacturing apparatus according to claim 5 , which has a structure including a sensor. The semiconductor manufacturing apparatus according to claim 2, wherein a rotation driving unit that rotates the turntable is not placed under the turntable. The semiconductor manufacturing apparatus according to claim 7 , wherein the rotation driving units adjacent in the vertical direction are arranged so as to have different rotation centers. The semiconductor manufacturing apparatus according to claim 2 , wherein the substrate support portion is transparent.

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