JP4601240B2 - stage - Google Patents

Description

[0001]
[Technical field to which the invention belongs]
The present invention relates to a stage, and more particularly to a device devised so as to reduce the size and the structure.
[0002]
[Prior art]
As a stage for positioning with high accuracy, there is a stage using a so-called “ultrasonic motor”. As such a thing, there exists a thing as shown in Unexamined-Japanese-Patent No. 2000-58269, for example. The stage disclosed here is configured by laminating a second stage (Y-axis direction stage) using another ultrasonic motor on a first stage (X-axis direction stage) using an ultrasonic motor. It is a thing.
[0003]
However, in such a configuration, since separate stages using ultrasonic motors are stacked, the height of the entire stage increases, and the overall size of the apparatus increases, resulting in a complicated configuration. There was a problem of becoming.
[0004]
In order to solve this type of problem, for example, stages as disclosed in Japanese Patent Application Laid-Open Nos. 8-23686 and 11-233503 have been proposed.
First, the stage described in JP-A-8-23686 is provided with four piezoelectric elements attached to an elastic body, and provided with driving force extraction portions at four locations of the elastic body. By applying a predetermined voltage, a driving force in the X-axis direction or the Y-axis direction is output, thereby moving the moving element in the X-axis direction or the Y-axis direction.
[0005]
In the stage described in Japanese Patent Laid-Open No. 11-235063, four ultrasonic motors are arranged on the fixed side, and a moving plate is placed on these four ultrasonic motors. By appropriately controlling the individual ultrasonic motors, the moving plate is moved in the X-axis direction or the Y-axis direction.
[0006]
[Problems to be solved by the invention]
The conventional configuration has the following problems.
First, in the case of the stage described in either Japanese Patent Application Laid-Open No. 8-23686 and Japanese Patent Application Laid-Open No. 11-233503, basically, an ultrasonic motor is installed on the fixed side, and the movable element installed there For this reason, there is a problem that the moving range of the moving element is limited to a range that does not deviate from the ultrasonic motor on the fixed side, thereby narrowing the moving range.
In addition, in the case of the ultrasonic motor disclosed in any of JP-A-8-23686 and JP-A-11-233503, it can be moved in any direction within a two-dimensional plane by itself. It was not a thing and could only move in the X-axis direction or the Y-axis direction.
The same applies to the case where the movable element is caused to perform a rotational motion. In the first place, there is a problem that the rotational motion is impossible or a dedicated ultrasonic motor is required.
[0007]
The present invention has been made on the basis of the above points. The object of the present invention is to expand the movement range and to operate in an arbitrary direction in an XY two-dimensional plane with a simple configuration. It is another object of the present invention to provide a stage that can perform a rotary motion with a simple configuration.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, a stage according to claim 1 of the present invention includes a stator, a movable element arranged to be movable with respect to the stator, and a drive for moving the movable element attached to the movable element. An ultrasonic motor that exerts a force, and a vibrator attached to an end of the ultrasonic motor opposite to the moving element, the moving element is a rigid body, and the ultrasonic motor is A thickness longitudinal effect piezoelectric element pair that generates deformation in the Z-axis direction, a thickness-slip effect piezoelectric element pair that generates slip in the X-axis direction orthogonal to the Z-axis direction, and a Y-axis that is orthogonal to the Z-axis direction and the X-axis direction A thickness-slip effect piezoelectric element pair that generates a slip in the direction is laminated, or the ultrasonic motor has a thickness-longitudinal effect piezoelectric element pair that generates a deformation in the Z-axis direction and an X-axis direction orthogonal to the Z-axis direction. A thickness-longitudinal effect piezoelectric element pair that generates a driving force to the layer and a thickness-longitudinal effect piezoelectric element pair that generates a driving force in the Y-axis direction orthogonal to the Z-axis direction and the X-axis direction. It can be driven in any direction alone, By simultaneously deforming the thickness-longitudinal effect piezoelectric element pair and the thickness-slip effect piezoelectric element pair, or By simultaneously deforming, an elliptical motion along an arbitrary direction is output via the vibrator, and the moving element is moved by the thrust generated by the elliptical motion. In the XY two-dimensional plane It is made to move in the said arbitrary directions, It is characterized by the above-mentioned.
According to a second aspect of the present invention, in the stage according to the first aspect, at least three ultrasonic motors are attached.
The stage according to claim 3 is the stage according to claim 1 or claim 2, The ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and at least two thickness slip effect piezoelectric elements, and the polarization directions of the at least two thickness slip effect piezoelectric elements are orthogonal or intersect at an arbitrary angle. It is possible to move in any direction within the X and Y two-dimensional plane. It is characterized by.
Further, the stage according to claim 4 is the claim 1. Or claim 2 In the stage described, The ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and at least two thickness slip effect piezoelectric elements, and intersects the electrode directions of the at least two thickness slip effect piezoelectric elements at right angles or at an arbitrary angle. It is possible to move in any direction in the X and Y two-dimensional plane. It is characterized by this.
Further, the stage according to claim 5 is the claim 1. Or claim 2 In the stage described, The ultrasonic motor includes a stack of at least two thickness-longitudinal effect piezoelectric elements, and the polarization is divided and contradictory within the at least two thickness-longitudinal effect piezoelectric elements, and the division of the polarization is orthogonal or arbitrary. It is possible to move in any direction in the X and Y two-dimensional plane. It is characterized by this.
Further, the stage according to claim 6 is the claim 1. Or claim 2 In the stage described, The ultrasonic motor includes a stack of at least two thickness-longitudinal effect piezoelectric elements, and the electrodes are divided and contradictory in the at least two thickness-longitudinal effect piezoelectric elements, and the division of the electrodes is orthogonal or arbitrary. It is possible to move in any direction in the X and Y two-dimensional plane. It is characterized by this.
Further, the stage according to claim 7 is the claim 1. Or claim 2 In the stage described, The ultrasonic motor is formed by laminating thickness longitudinal effect piezoelectric elements. In the thickness longitudinal effect piezoelectric element, electrodes are divided and different voltages are applied, and there are two or more pairs of electrodes to which different voltages are applied. Can move in any direction in the X and Y two-dimensional plane. It is characterized by this.
Further, the stage according to claim 8 is the claim 1. Or claim 2 In the stage described, The ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and a thickness slip effect piezoelectric element. In the thickness longitudinal effect piezoelectric element, electrodes are divided, different voltages are applied, and electrode pairs to which different voltages are applied are formed. There are two or more sets, so that they can move in any direction in the X and Y two-dimensional plane. It is characterized by this.
Further, the stage according to claim 9 is characterized in that claims 1 to Claim 8 In the stage described in any of The above ultrasonic motor can be controlled independently. It is characterized by.
A stage according to claim 10 is the stage according to any one of claims 1 to 9, The ultrasonic motor includes a vibrator in a protruding shape, and the vibrator has a cylindrical shape or a spherical shape. It is characterized by this.
[0009]
That is, a stage according to the present invention includes a stator, a mover arranged to be movable with respect to the stator, and an ultrasonic motor that is attached to the mover and exhibits a driving force for moving the mover. A vibrator attached to an end of the ultrasonic motor on the side opposite to the movable element, the movable element is a rigid body, and the ultrasonic motor includes a thickness longitudinal effect piezoelectric element and / or a thickness slip effect piezoelectric element. It is configured and can be driven independently in any direction, and simultaneously deforms the thickness longitudinal effect piezoelectric element and the thickness slip effect piezoelectric element. By Or through the vibrator by simultaneously deforming at least two kinds of thickness longitudinal effect piezoelectric elements Along any direction Output an elliptical motion, By the thrust generated by the elliptic motion The above mover the above Since the movement is made in an arbitrary direction, the movement range is not limited because the movement is away from the ultrasonic motor provided on the stator side as in the prior art.
At this time, since the moving element is a rigid body, the restriction on the shape is eliminated.
In addition, it is conceivable to attach at least three ultrasonic motors, thereby providing stable operation.
Further, it is conceivable that the ultrasonic motor is composed of a thickness longitudinal effect piezoelectric element and / or a thickness slip effect piezoelectric element, and is movable in an arbitrary direction within an XY two-dimensional plane.
Further, the ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and at least two thickness slip effect piezoelectric elements, and the polarization direction of the at least two thickness slip effect piezoelectric elements is orthogonal or intersects at an arbitrary angle. It is conceivable that the direction can be moved in an arbitrary direction in the XY two-dimensional plane.
Further, the ultrasonic motor is formed by laminating a thickness-longitudinal effect piezoelectric element and at least two thickness-slip effect piezoelectric elements, and the electrode directions of the at least two thickness-slip effect piezoelectric elements are orthogonal or intersecting at an arbitrary angle. Direction, and thereby
It can be considered that it can move in an arbitrary direction in the X-Y two-dimensional plane. Further, the ultrasonic motor is provided with at least two thickness-longitudinal effect piezoelectric elements stacked, and the polarization is divided and contradictory in the at least two thickness-longitudinal effect piezoelectric elements. It is conceivable that the direction intersects perpendicularly or at an arbitrary angle so that it can move in an arbitrary direction within the XY two-dimensional plane.
Further, the ultrasonic motor is provided with at least two thickness-longitudinal effect piezoelectric elements stacked, and the electrodes are divided and contradictory in the at least two thickness-longitudinal effect piezoelectric elements. It is conceivable that the direction intersects perpendicularly or at an arbitrary angle so that it can move in an arbitrary direction in the XY two-dimensional plane.
Further, the ultrasonic motor is a laminate of thickness longitudinal effect piezoelectric elements, the electrodes are divided and different voltages are applied in the thickness longitudinal effect piezoelectric elements, and there are two or more electrode pairs to which different voltages are applied, Accordingly, it can be considered that it can be moved in an arbitrary direction in the XY two-dimensional plane.
The ultrasonic motor is a laminate of a thickness longitudinal effect piezoelectric element and a thickness slip effect piezoelectric element. In the thickness longitudinal effect piezoelectric element, electrodes are divided and applied with different voltages, and electrode pairs to which different voltages are applied. Can be moved in any direction within the XY two-dimensional plane.
It is also conceivable that the ultrasonic motor can be controlled independently.
It is also conceivable that the ultrasonic motor is provided with a vibrator in a protruding shape, and the vibrator has a cylindrical shape or a spherical shape.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. FIG. 1A is a front view showing the configuration of the mover 1 constituting the stage according to this embodiment, and FIG. 1B is a view taken along the line bb in FIG. First, there is a movable body 3 having a flat plate shape, and ultrasonic motors 5 are attached to the four corners on the lower surface side of the movable body 3. The mover 1 moves on the stator 7 in an arbitrary direction in the X / Y two-dimensional plane by the driving force of the four ultrasonic motors 5.
The movable body 3 is a rigid body.
[0011]
The ultrasonic motor 5 has the following configuration. That is, as shown in FIG. 2A, the thickness longitudinal effect piezoelectric element pair 9 and the thickness slip effect piezoelectric element pairs 11 and 13 are stacked. First, the thickness longitudinal effect piezoelectric element pair 9 has a configuration in which a pair of piezoelectric elements 9a and 9b are stacked in the thickness direction (up and down direction in the figure), and a Z-axis direction (up and down in the figure) is applied by applying a voltage. (Direction).
The thickness-slip effect piezoelectric element pair 11 has a configuration in which a pair of piezoelectric elements 11a and 11b are stacked in the thickness direction, and slipping in the X-axis direction (the left-right direction in the figure) occurs when a voltage is applied. It is configured as follows. Further, the thickness-slip effect piezoelectric element pair 13 has a configuration in which a pair of piezoelectric elements 13a and 13b are laminated in the thickness direction, and the Y-axis direction (the direction perpendicular to the paper surface in the figure) is applied by applying a voltage. It is comprised so that slip may generate | occur | produce.
[0012]
The piezoelectric elements 9a, 9b, 11a, 11b, 13a, and 13b are made of, for example, barium titanate, lead zirconate titanate, etc. On the surface, for example, an electrode made of gold or copper is formed by means such as vapor deposition. Although not shown in the drawing, each ultrasonic motor 5 is connected to a power supply cable or the like so that a predetermined voltage can be applied to each of the piezoelectric elements 9a, 9b, 11a, 11b, 13a, 13b. It is configured.
The arrows shown in the figure indicate the polarization directions of the piezoelectric elements 9a, 9b, 11a, 11b, 13a, 13b.
[0013]
A vibrator 15 is attached to the lower surface of the ultrasonic motor 5. The vibrator 15 has a hemispherical shape and vibrates in direct contact with the stator 7 already described.
[0014]
For example, as shown in FIG. 2A, the vibration in the Z-axis direction as shown in the thickness longitudinal effect piezoelectric element pair 9 occurs, and at the same time, the vibration is shown in the thickness slip effect piezoelectric element pair 11. When such slips in the X-axis direction occur, they are combined and an elliptical motion is output from the vibrator 15 of each ultrasonic motor 5 as shown in FIG. Due to such elliptical motion, the movable element 1 moves to the right side in the X-axis direction as shown in FIG.
[0015]
Hereinafter, the slider 1 can move in the Y-axis direction by synthesizing the motions of the thickness longitudinal effect piezoelectric element pair 9 and the thickness slip effect piezoelectric element pair 13 by the same reasoning. Further, the combination of the thickness longitudinal effect piezoelectric element pair 9, the thickness slip effect piezoelectric element pair 11, and the thickness slip effect piezoelectric element pair 13 makes it possible to move in any direction in the XY two-dimensional plane. That is, by controlling the magnitude of the slip in the thickness-slip effect piezoelectric element pair 11 and the thickness-slip effect piezoelectric element pair 13 by the applied voltage, it can move in any direction between the X-axis direction and the Y-axis direction. It is something that can be done.
In the case of this embodiment, each of the four ultrasonic motors 5 has the above function.
[0016]
As described above, according to the first embodiment, the following effects can be obtained.
First, when the entire stage is viewed, the ultrasonic motor 5 is attached and moved on the movable element 1 side, so that it is possible to move on the stator 7 without limitation in a wide range. That is, when the ultrasonic motor is arranged on the stator side, the movable element cannot move within the range away from it, but in the case of the present embodiment, there is no such limitation.
In addition, the movable element 1 according to the present embodiment can move in any direction within an XY two-dimensional plane, and the configuration for that is also simple.
Further, in the case of the present embodiment, the moving element 1 can be rotated by controlling the moving directions of the four ultrasonic motors 5. That is, as shown in FIG. 1 (a), when the moving element 1 is caused to perform a rotational movement as indicated by a circle a (indicated by a virtual line in the figure), each ultrasonic motor 5 is tangential to the circle a. What is necessary is just to perform the movement operation | movement to the (direction shown by the arrow b), and it becomes possible to make the moving element 1 perform a desired rotational movement easily by it.
In addition, since the ultrasonic motor 5 in the present embodiment has a function of moving in an arbitrary direction in an XY two-dimensional plane as a single unit, for example, the number of ultrasonic motors 5 is one. However, a desired operation can be executed except for the rotational motion. In addition, if it is desired to execute the rotational motion, two or more ultrasonic motors may be used.
In addition, since the vibrator 15 in this embodiment has a hemispherical shape and is configured to make point contact with the stator 7 side, resistance during movement is reduced, and smoother and more stable operation is achieved. Is realized.
[0017]
Next, a second embodiment of the present invention will be described with reference to FIGS. In the case of the second embodiment, the configuration of the piezoelectric element pair in the ultrasonic motor is different from that in the case of the first embodiment. The configuration of the ultrasonic motor according to the second embodiment will be described below.
The ultrasonic motor 51 according to the second embodiment includes a thickness longitudinal effect piezoelectric element pair 53, and the thickness longitudinal effect piezoelectric element pair 53 is configured by laminating a pair of piezoelectric elements 53a and 53b in the thickness direction. It has become. When a voltage is applied to the pair of piezoelectric elements 53a and 53b, deformation in the Z-axis direction occurs.
[0018]
Another thickness longitudinal effect piezoelectric element pair 55 and 57 is laminated so as to sandwich the thickness longitudinal effect piezoelectric element pair 53. The thickness-longitudinal effect piezoelectric element pair 55 has a configuration in which a pair of piezoelectric element portions 55a and 55b are adjacently arranged by applying a predetermined polarization process to one disk-shaped piezoelectric element. Similarly, the thickness longitudinal effect piezoelectric element pair 57 has a configuration in which a pair of piezoelectric element portions 57a and 57b are adjacently arranged by applying a predetermined polarization process to one disk-shaped piezoelectric element. When a voltage is applied to the piezoelectric element portions 55a and 55b of the thickness longitudinal effect piezoelectric element pair 55, deformation in the vertical direction occurs. Similarly, by applying a voltage to each of the piezoelectric element portions 57a and 57b of the thickness longitudinal effect piezoelectric element pair 57, expansion / compression in the vertical direction occurs. Due to the expansion / compression in the vertical direction and the deformation in the Z-axis direction by the thickness longitudinal effect piezoelectric element pair 53, vibration along the X-axis direction (left-right direction in the figure) as shown in FIG. The elliptical motion of the child 63 occurs. Such elliptical motion generates a driving force in the X-axis direction.
[0019]
Further, as shown in FIG. 5A, another thickness-longitudinal effect piezoelectric element pair 59, 61 is laminated so as to sandwich the thickness-longitudinal effect piezoelectric element pair 55, 57. A vibrator 63 is attached to the lower surface side of the thickness longitudinal effect piezoelectric element pair 61. The vibrator 63 is the same as the vibrator 15 in the first embodiment.
FIG. 5 (a) is a side view of the ultrasonic motor 51 shown in FIG. 4 (a) as viewed from the right in the drawing.
The thickness-longitudinal effect piezoelectric element pair 59 has a configuration in which a pair of piezoelectric element portions 59a and 59b are adjacently arranged by applying a predetermined polarization process to one disk-shaped piezoelectric element. Similarly, the thickness longitudinal effect piezoelectric element pair 61 has a configuration in which a pair of piezoelectric element portions 61a and 61b are disposed adjacent to each other by applying a predetermined polarization process to a single disk-shaped piezoelectric element.
When a voltage is applied to the piezoelectric element portions 59a and 59b of the thickness longitudinal effect piezoelectric element pair 59, deformation in the vertical direction occurs. Similarly, by applying a voltage to each of the piezoelectric element portions 61a and 61b of the thickness longitudinal effect piezoelectric element pair 61, expansion / compression in the vertical direction occurs. Due to the extension / compression in the vertical direction and the deformation in the Z-axis direction by the thickness longitudinal effect piezoelectric element pair 53, the ellipse of the vibrator 63 along the Y-axis direction (left-right direction in the figure) orthogonal to the X-axis direction. Movement occurs. Such elliptical motion generates a driving force in the Y-axis direction.
[0020]
Then, by appropriately combining the operation in the X-axis direction and the operation in the Y-axis direction, it can move in any direction within the X / Y biaxial plane.
[0021]
As described above, also in the case of the second embodiment, the same effects as in the case of the first embodiment can be obtained.
In the second embodiment, only the configuration of the ultrasonic motor 51 is illustrated and described. However, it is possible to configure a stage as shown in FIG. 1 using such an ultrasonic motor 51. Of course.
In the second embodiment, for example, the polarization direction of each piezoelectric element portion 55a and the polarization direction of 57a of the thickness longitudinal effect piezoelectric element pair 55 and 57, the polarization direction of each piezoelectric element portion 55b, and the polarization direction of 57b. Although the direction is reversed, it is also possible to obtain the same deformation by making the direction the same and replacing the direction of the voltage to be applied instead.
[0022]
Next, a third embodiment of the present invention will be described with reference to FIG. In the case of the first embodiment, the description has been given by taking the mover 1 in which four ultrasonic motors 5 are attached to the mover body 3 having a rectangular shape as an example. In the case of the third embodiment, Shows an example in which the shape of the movable body and the number of ultrasonic motors are changed.
That is, the mover 101 in the third embodiment includes a disc-like mover main body 103, and there are superordinately arranged three places on the lower surface side of the mover main body 103. A sonic motor 105 is attached. The configuration of the ultrasonic motor 105 is the same as that of the first embodiment or the second embodiment, and includes a plurality of piezoelectric element pairs and a vibrator 107. .
[0023]
In the case of the third embodiment, the same effect as in the case of the first embodiment can be obtained, and more stable operation can be realized by using three ultrasonic motors 105. It is. That is, since there are three ultrasonic motors 105, each vibrator 107 is surely grounded to a stator side (not shown). For example, as in the case of four, any one of them is provided. This is because the vibrator does not float with respect to the stator side.
[0024]
The present invention is not limited to the first to third embodiments.
For example, when viewed as an entire stage, the number of ultrasonic motors used therein is not particularly limited. In addition to the four and three shown in the embodiment, there may be one, two, five or more.
In addition, regarding the configuration of the ultrasonic motor itself, the configuration and arrangement of the piezoelectric element pair may be arbitrarily set.
Further, it is not always necessary to configure the piezoelectric element pair, and the piezoelectric element pair may be configured and laminated as a single piezoelectric element.
In each of the above embodiments, the polarization directions of the thickness-slip effect piezoelectric element pairs are orthogonal to each other. However, the polarization directions are not necessarily orthogonal, and may be intersected at an arbitrary angle.
Further, instead of making the polarization direction orthogonal or intersecting at an arbitrary angle, the electrode direction may be orthogonal or intersecting at an arbitrary angle.
It is also conceivable that a single thickness longitudinal effect piezoelectric element has a polarization structure or an electrode structure that can be deformed in the X and Y biaxial directions. Specifically, two or more electrode pairs to which different voltages are applied are provided.
In each of the above embodiments, the vibrator is hemispherical, but it may have a cylindrical shape or the like. An example of this is shown in FIG. In the case of such a vibrator 201, line contact is made with respect to the stator side, which also reduces the resistance during movement.
[0025]
【The invention's effect】
As described above in detail, according to the stage and the ultrasonic motor according to the present invention, the stator, the mover arranged to be movable with respect to the stator, and the mover attached to the mover side move. And an ultrasonic motor that exerts the driving force of the motor, and is basically configured to be moved by attaching the ultrasonic motor to the movable element side. In addition, the movement range is not limited because it is out of the ultrasonic motor, and the movement range of the moving element can be expanded, thereby expanding the application of the stage.
At that time, the moving element is a rigid body. Because Thereby, there is no restriction on the shape.
In addition, it is conceivable to attach at least three ultrasonic motors, thereby providing stable operation.
When the ultrasonic motor is composed of a thickness longitudinal effect piezoelectric element and / or a thickness slip effect piezoelectric element and can be driven independently in any direction, a desired ultrasonic wave can be obtained with a relatively simple structure. A motor can be obtained.
The same applies to the case where the ultrasonic motor is composed of a thickness-longitudinal effect piezoelectric element and / or a thickness-slip effect piezoelectric element and is movable in an arbitrary direction within an XY two-dimensional plane. For example, a desired operation can be realized even if the number of ultrasonic motors is one.
Further, since each ultrasonic motor can be controlled independently, the driving force balance between the ultrasonic motors can be easily controlled, and a more stable operation can be easily realized.
In addition, when the vibrator provided on the ultrasonic motor in the form of a protrusion has a cylindrical shape or a spherical shape, a smoother and more stable operation can be provided.
[Brief description of the drawings]
FIG. 1 is a diagram showing a first embodiment of the present invention, in which FIG. 1 (a) is a front view showing the configuration of a mover constituting a stage, and FIG. 1 (b) is FIG. It is a bb arrow line view of).
FIG. 2 is a diagram showing a first embodiment of the present invention, and FIG. 2 (a) is a diagram of one ultrasonic motor among a plurality of ultrasonic motors provided on a moving element constituting a stage. FIG. 2 (b) is a front view showing the configuration, and is a view taken along the line bb of FIG. 2 (a).
FIG. 3 is a diagram showing a first embodiment of the present invention, showing a relationship between a mover and a stator showing a configuration of a stage, and a schematic front view showing an elliptical motion as a driving force.
FIG. 4 is a diagram showing a second embodiment of the present invention, in which FIG. 4 (a) is a front view of an ultrasonic motor, and FIG. 4 (b) is a bb arrow in FIG. 4 (a). FIG. 4 (c) is a front view showing the operation.
FIG. 5 is a diagram showing a second embodiment of the present invention, in which FIG. 5 (a) is a side view of the ultrasonic motor, and FIG. 5 (b) is a bb arrow in FIG. 5 (a). FIG.
6A and 6B are diagrams showing a third embodiment of the present invention, in which FIG. 6A is a front view showing a configuration of a moving element constituting the stage, and FIG. 6B is a diagram showing FIG. It is a bb arrow line view of).
[Explanation of symbols]
1 mover
3 Mover body
5 Ultrasonic motor
7 Stator
9 Thickness longitudinal effect piezoelectric element pair
9a Piezoelectric element
9b Piezoelectric element
11 Thickness-slip effect piezoelectric element pair
11a Piezoelectric element
11b Piezoelectric element
13 Thickness-slip effect piezoelectric element pair
13a Piezoelectric element
13b Piezoelectric element
15 vibrator

Claims (10)

A stator,
A mover arranged to be movable with respect to the stator;
An ultrasonic motor that is attached to the moving element and exhibits a driving force for moving the moving element;
A vibrator attached to an end of the ultrasonic motor on the side opposite to the movable element;
Comprising
The mover is a rigid body,
The ultrasonic motor includes a thickness-longitudinal effect piezoelectric element pair that generates deformation in the Z-axis direction, a thickness-slip effect piezoelectric element pair that generates slip in the X-axis direction orthogonal to the Z-axis direction, the Z-axis direction, and the X-axis direction. Or a thickness-slip effect piezoelectric element pair that generates a slip in the Y-axis direction perpendicular to the Z-axis direction. A laminated structure of a thickness longitudinal effect piezoelectric element pair that generates a driving force in the orthogonal X-axis direction and a thickness longitudinal effect piezoelectric element pair that generates a driving force in the Z-axis direction and the Y-axis direction orthogonal to the X-axis direction. And can be driven in any direction by itself,
By deforming the thickness-longitudinal-effect piezoelectric element pair and the thickness-slip-effect piezoelectric element pair at the same time, or simultaneously deforming the plurality of thickness-longitudinal effect piezoelectric element pairs , along any direction via the vibrator A stage characterized in that an elliptical motion is output, and the moving element is moved in the arbitrary direction in an XY two-dimensional plane by a thrust generated by the elliptical motion. The stage according to claim 1, wherein
At least three ultrasonic motors are attached to the stage. In the stage according to claim 1 or claim 2,
The ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and at least two thickness slip effect piezoelectric elements, and the polarization directions of the at least two thickness slip effect piezoelectric elements intersect at right angles or at an arbitrary angle. A stage characterized in that it can be moved in any direction in an X / Y two-dimensional plane . In the stage according to claim 1 or claim 2 ,
The ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and at least two thickness slip effect piezoelectric elements, and intersects the electrode directions of the at least two thickness slip effect piezoelectric elements at right angles or at an arbitrary angle. A stage characterized in that it can be moved in any direction in an X / Y two-dimensional plane . In the stage according to claim 1 or claim 2 ,
The ultrasonic motor includes a stack of at least two thickness-longitudinal effect piezoelectric elements, and the polarization is divided and contradictory within the at least two thickness-longitudinal effect piezoelectric elements, and the division of the polarization is orthogonal or arbitrary. A stage characterized in that it can be moved in an arbitrary direction in an X-Y two-dimensional plane . In the stage according to claim 1 or claim 2 ,
The ultrasonic motor includes a stack of at least two thickness-longitudinal effect piezoelectric elements, and the electrodes are divided and contradictory in the at least two thickness-longitudinal effect piezoelectric elements, and the division of the electrodes is orthogonal or arbitrary. A stage characterized in that it can be moved in an arbitrary direction in an X-Y two-dimensional plane . In the stage according to claim 1 or claim 2 ,
The ultrasonic motor is formed by laminating thickness longitudinal effect piezoelectric elements. In the thickness longitudinal effect piezoelectric element, electrodes are divided and different voltages are applied, and there are two or more pairs of electrodes to which different voltages are applied. The stage can be moved in an arbitrary direction within an XY two-dimensional plane . In the stage according to claim 1 or claim 2 ,
The ultrasonic motor is formed by laminating a thickness longitudinal effect piezoelectric element and a thickness slip effect piezoelectric element. In the thickness longitudinal effect piezoelectric element, electrodes are divided, different voltages are applied, and electrode pairs to which different voltages are applied are formed. A stage characterized in that there are two or more sets, and the stage is movable in an arbitrary direction in an XY two-dimensional plane . The stage according to any one of claims 1 to 8 , wherein the ultrasonic motor is controllable independently . In the stage according to any one of claims 1 to 9,
The ultrasonic motor includes a vibrator in a protruding shape, and the vibrator has a cylindrical shape or a spherical shape .

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