JP4582879B2 - Resistivity meter electrode - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
This invention is a resistivity meter used in semiconductor cleaning equipment, industrial machinery, agriculture, food, medical-related water quality management, insulation of cooling water in nuclear power plants, concentration management of various chemicals, etc. It relates to an electrode.
[0002]
[Prior art]
Purity of pure water and concentration of electrolyte in water quality management in semiconductor cleaning equipment, industrial machinery, agriculture, food, medical and other fields, insulation of cooling water in nuclear power plants, and concentration management of various chemicals In order to measure the above, a resistivity meter that measures the resistivity of the pure water or the electrolyte solution is used.
[0003]
For example, in a semiconductor manufacturing process, a semiconductor wafer as an object to be cleaned is inserted into a cleaning tank and cleaned with a cleaning liquid such as ammonia (cleaning process). Then, the ammonia is discharged, and pure water (water whose impurities are intentionally extremely reduced: also referred to as high-purity water) is put in a cleaning tank to rinse the semiconductor wafer (rinsing step). In the rinsing step, when measuring the purity of pure water replaced with ammonia, for example, a resistivity meter including the electrode 101 shown in FIGS. 13 and 14 is used.
[0004]
The electrode 101 of the resistivity meter illustrated in FIGS. 13 and 14 includes an inner electrode 102, an outer electrode 103, a support portion 104 that supports the inner electrode 102 and the outer electrode 103, and the inner electrode 102 electrically An inner electrode lead wire 106 connected to the outer electrode 103, and an outer electrode lead wire 107 electrically connected to the outer electrode 103.
[0005]
The inner electrode 102 is formed in a cylindrical shape. The outer electrode 103 is formed in a circular tube having an inner diameter larger than the outer diameter of the inner electrode 102. The inner electrode 102 and the outer electrode 103 are arranged coaxially with each other in a state where the inner electrode 102 is inserted into the outer electrode 103.
[0006]
The inner electrode 102 is disposed in a state in which a distal end surface 102 c located on the distal end portion 102 b side is located slightly behind the outer electrode 103 than the distal end surface 103 c located on the distal end portion 103 b side of the outer electrode 103. . The inner electrode 102 and the outer electrode 103 are both made of a non-metal such as a conductive metal or carbon.
[0007]
The support portion 104 supports base end portions 102a and 103a of the inner electrode 102 and the outer electrode 103, respectively. The support unit 104 includes an inner electrode holder 110, an outer electrode holder 111, and the like.
[0008]
The inner electrode holder 110 is formed in a circular tube having an inner diameter substantially equal to the outer diameter of the base end portion 102 a of the inner electrode 102. The inner electrode holder 110 is fitted on the outer periphery of the proximal end portion 102 a of the inner electrode 102. The inner electrode holder 110 is made of an insulating resin or the like.
[0009]
The inner electrode holder 110 includes a first concave groove 140 and a second concave groove 141. The first concave groove 140 is provided at an end portion of the inner electrode holder 110 located closer to the inner electrode 102 when the inner electrode holder 110 is fitted to the inner electrode 102. The first groove 140 is formed to be concave from the inner peripheral surface of the inner electrode holder 110. The first concave groove 140 is formed along the circumferential direction of the inner electrode holder 110. The first concave groove 140 is formed so as to expand the inner diameter of the inner electrode holder 110.
[0010]
The second concave groove 141 is provided at the center of the inner electrode holder 110 along the longitudinal direction of the inner electrode 102 when the inner electrode holder 110 is fitted to the inner electrode 102.
The second concave groove 141 is formed to be concave from the outer peripheral surface of the inner electrode holder 110. The second concave groove 141 is formed along the circumferential direction of the inner electrode holder 110. The first concave groove 141 is formed so as to reduce the outer diameter of the inner electrode holder 110.
[0011]
The outer electrode holder 111 is formed in a circular tube shape. The outer electrode holder 111 is made of a conductive metal or the like. The outer electrode holder 111 is fitted to the base end portion 103 a of the outer electrode 103 and the outer periphery of the inner electrode holder 110.
[0012]
An intermediate member 115 is provided between the inner electrode holder 110 and the outer electrode 103 in the direction along the longitudinal direction of the inner electrode 102. The intermediate member 115 is formed in an annular shape.
[0013]
The intermediate member 115 is fitted to the outer circumference of the inner electrode holder 110 and is fitted to the inner circumference of the outer electrode holder 111. The intermediate member 115 is made of an insulating resin or the like. The intermediate member 115 prevents the O-ring 143 from dropping off.
[0014]
Further, a retaining ring 119 is fitted on the outer periphery of the base end portion 102 a of the inner electrode 102. The retaining ring 119 is accommodated in the inner electrode holder 110. When the retaining ring 119 is fitted to the outer periphery of the base end portion 102 a, the retaining electrode 119 biases the inner electrode 102 and the inner electrode holder 110 in a direction in which the inner electrode 102 and the inner electrode holder 110 approach each other along the longitudinal direction of the electrodes 102 and 103.
[0015]
A space 116 surrounded by the inner peripheral surface of the outer electrode holder 111 and the end surface 110a of the inner electrode holder 110 is formed in the electrode 101 of the resistivity meter. In this space 116, a connection portion in which the inner electrode lead wire 106 is electrically connected to the inner electrode 102 and a connection portion in which the outer electrode lead wire 107 is electrically connected to the outer electrode 103 are accommodated.
[0016]
In addition, the electrode 101 of the resistivity meter includes a first O-ring 142 and a second O-ring 143. The first O-ring 142 is made of an elastic body such as rubber and is formed in an annular shape. The first O-ring 142 is accommodated in the first concave groove 140.
[0017]
The first O-ring 142 is accommodated in the first concave groove 140, and when the inner electrode holder 110 is fitted to the inner electrode 102, the first O-ring 142 is pressed from both the inner electrode 102 and the inner electrode holder 110 to be elastically deformed. . Then, the first O-ring 142 generates an elastic restoring force and keeps the space between the inner electrode 102 and the inner electrode holder 110 liquid-tight. The first O-ring 142 prevents an electrolyte solution such as pure water from entering the space 116.
[0018]
The second O-ring 143 is made of an elastic body such as rubber and is formed in an annular shape. The second O-ring 143 is accommodated in the second concave groove 141. When the second O-ring 143 is accommodated in the second concave groove 141 and the inner electrode holder 110 is fitted to the outer electrode holder 111, the second O-ring 143 is pressed from both the inner electrode holder 110 and the outer electrode holder 111 to be elastic. Deform.
[0019]
Then, the second O-ring 143 generates an elastic restoring force and keeps the space between the inner electrode holder 110 and the outer electrode holder 111 liquid-tight. The second O-ring 143 prevents an electrolyte solution such as pure water from entering the space 116.
[0020]
With the above-described configuration, the electrode 101 of the resistivity meter has at least the tip portions 102b and 103b of the inner electrode 102 and the outer electrode 103 disposed in the flow path of the electrolyte solution to be measured, and these electrodes 102 and 103 are arranged. The resistivity of the electrolyte solution is measured by measuring the electrical resistance between them. Based on the measured resistivity, the purity of an electrolyte solution such as pure water is obtained.
[0021]
[Problems to be solved by the invention]
The electrode 101 of the resistivity meter described above uses O-rings 142 and 143 made of an elastic body such as rubber in order to prevent the electrolyte solution from entering the space 116. The O-rings 142 and 143 are elastically deformed to keep both the inner electrode 102 and the inner electrode holder 110 and between the inner electrode holder 110 and the outer electrode holder 111 liquid-tight.
[0022]
As described above, since the O-rings 142 and 143 are elastically deformed, gaps 150 are often generated between the respective concave grooves 140 and 141 and the respective O-rings 142 and 143 as shown in FIG. In FIG. 14, the second concave groove 141 and the second O-ring 143 are shown as representatives.
[0023]
When the gap 150 described above is generated, in the semiconductor manufacturing process described above, a contaminant containing the chemical solution such as ammonia and impurities such as dust removed from the surface of the semiconductor wafer in the gap 150 due to a capillary phenomenon or the like. May invade.
[0024]
And as shown in FIG. 15, even if the impurities adhering to the object to be cleaned etc. are removed as the work progresses, the cleaning water that has entered the gap 150 is in a pure water state. Until then, the resistivity detected by the resistivity meter does not become the resistivity of clean pure water.
[0025]
In FIG. 15, the horizontal axis represents the elapsed time from the start of cleaning of the object to be cleaned, the vertical axis represents the resistivity measured at each elapsed time, and the high-purity water (pure water) resistivity is indicated by a one-dot chain line Q. ing. In the example shown in FIG. 15, for example, even when 40 minutes or more have elapsed after the start of cleaning, the cleaning water that has entered the gap 150 flows out little by little, so the measured resistivity does not overlap with the alternate long and short dash line Q.
[0026]
That is, the measured resistivity does not become the resistivity of pure water even after 40 minutes have passed since the start of cleaning. As described above, the electrode 101 of the conventional resistivity meter tends to have a large time delay until an accurate resistivity is measured when the resistivity of the electrolyte solution as the measurement object changes. It was difficult to accurately measure the resistivity of the electrolyte solution.
[0027]
For this reason, even when the impurities are actually removed from the object to be cleaned, the impurities accumulated in the gap 150 of the electrode 101 of the resistivity meter are released, and the resistivity meter completely releases the impurities and detects it. The object to be cleaned is cleaned until the resistivity of the pure water becomes that of the pure water. In this way, the object to be cleaned is continuously cleaned more than necessary.
[0028]
When the electrode 101 of the conventional resistivity meter described above is used in the above-described rinsing process or the like, a cleaning liquid such as pure water is consumed more than necessary. For this reason, resources such as pure water have been wasted and the cost for cleaning the objects to be cleaned tends to increase.
[0029]
Therefore, the object of the present invention is to suppress the time delay until the accurate resistivity is measured without retaining impurities when the resistivity of the electrolyte solution as the measurement object changes, and to accurately measure the electrolyte solution. An object of the present invention is to provide a resistivity meter electrode capable of measuring resistivity.
[0030]
[Means for Solving the Problems]
In order to solve the problems and achieve the object, the electrode of the resistivity meter of the present invention according to claim 1, A cylindrical electrode member and a circular tubular member having an inner diameter larger than the outer diameter of the cylindrical electrode member Electrode member When In the flow path of the electrolyte solution to be measured Are coaxial with each other In the electrode of the resistivity meter that is arranged at a predetermined interval and measures the resistivity of the electrolyte solution based on the electric resistance between the electrode members, the base end portion of each of the electrode members is supported and each of the electrode members A support portion having a space for accommodating a plurality of connected electric wires, and a seal member for preventing the electrolyte solution from entering the space. A biasing means for biasing at least one of the electrode member and the support portion in a direction in which a distance between a base end portion of the at least one electrode member and the support portion is narrowed; The seal member is made of a low elastomeric synthetic resin and has non-solute properties in the electrolyte solution, and is provided between the base end portions of the plurality of electrode members and the support portion. It is characterized in that at least one base end portion of the electrode member and the support portion are in close contact with each other without any gap and the at least one electrode member and the support portion are kept liquid-tight.
[0032]
Claim 2 The electrode of the resistivity meter of the present invention described in Claim 1 In the electrode of the resistivity meter described above, the at least one electrode member and the support portion are provided so as to be relatively displaceable along a direction from a distal end portion to a proximal end portion of the electrode member. It is characterized by.
[0033]
Claim 3 The electrode of the resistivity meter of the present invention described in Claim 2 In the electrode of the resistivity meter described above, the plurality of electrode members are arranged in the space and maintained at the predetermined interval, and a relative displacement between the at least one electrode member and the support portion is allowed. A holding member having a displacement allowing means is provided.
[0034]
Claim 4 The electrode of the resistivity meter of the present invention described in Claim 3 The electrode of the resistivity meter according to the above, wherein the holding member suppresses the relative displacement between the at least one electrode member and the support portion when the holding member expands due to the heat of the electrolyte solution. It is characterized by having.
[0035]
Claim 5 The electrode of the resistivity meter of the present invention described in Claim 1 Or Claim 4 The electrode of the resistivity meter according to any one of the above, wherein the seal member is made of a hard resin and the biasing means is a disc spring having a high spring constant.
[0036]
Claim 6 The electrode of the resistivity meter of the present invention described in Claim 1 Or Claim 4 The electrode of the resistivity meter according to any one of the above, wherein the seal member is made of a fluororesin, and the urging means has a low spring constant.
[0037]
Claim 7 The electrode of the resistivity meter according to the present invention described in claim 1, Claim 6 The electrode of the resistivity meter according to claim 1, further comprising: a second holding portion that is integrally formed with the seal member and that maintains the predetermined distance between a plurality of electrode members.
[0038]
Claim 8 The electrode of the resistivity meter according to the present invention described in claim 1, Claim 7 The electrode of the resistivity meter according to any one of the above, wherein at least one of the electric wires includes a bent portion arranged in a bent state in the space.
[0039]
Claim 9 The electrode of the resistivity meter according to the present invention described in claim 1, Claim 8 In the electrode of the resistivity meter according to any one of the above, the support portion includes a through hole extending in a direction from the distal end portion to the proximal end portion of the electrode member, and the electric wires are bundled together. The formed wire bundle is guided to the outside through the through-hole, and is made of an elastic body, and a first sealing means for keeping a liquid-tight space between the support portion and the wire bundle, and an elastic body And second sealing means filled in the space.
[0040]
Claim 10 The electrode of the resistivity meter according to the present invention described in claim 1, Claim 9 The electrode of the resistivity meter according to any one of claims 1 to 3, wherein when the seal member is plastically deformed by the temperature of the electrolyte solution, the seal member serves as a base end portion of the at least one electrode member and the support. An escape prevention means for preventing escape from the space is provided.
[0041]
According to the electrode of the resistivity meter of the present invention described in claim 1, since the sealing member is a low-elastomer synthetic resin, when the gap between the electrode member and the support portion is kept liquid-tight. Almost no elastic deformation. That is, the amount of elastic deformation when the seal member keeps the liquid-tight space between the electrode member and the support portion is so small as not to cause a problem. The seal member is in close contact with both the base end portion and the support portion of the electrode member without a gap. For this reason, there is no gap between the base end portion of the electrode member and the support portion where a contaminant including a chemical solution and impurities can enter.
[0042]
The sealing member is preferably a synthetic resin having almost no elastomer property, that is, having a high plastomer property. In this case, the amount of elastic deformation when the seal member keeps the liquid-tight space between the electrode member and the support portion is much smaller. For this reason, the seal member is in close contact with both the base end portion of the electrode member and the support portion without any gap, and no gap or the like is generated between the base end portion of the electrode member and the support portion.
[0043]
In addition, the following can be mentioned as a synthetic resin having a high plastomer property suitable for the sealing member. Polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), fluorinated ethylene propylene (FEP), ethylene-tetrafluoroethylene copolymer (Ethylene-tetrafluoroethylene copolymer: ETFE), Polychlorotrifluoroethylene (PCTFE), Ethylene-chlorotrifluoroethylene copolymer (ECTFE), Polyvinylidenefluoride (PVDF), Polyvinyl formal (Polyvinylformal: PVF), polyamide (Polyamide: PA), polyacetal (Polyacetal: POM), polycarbonate (Polycarbonate: PC), polyphenylene ether (PPE), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyphenylene sulfide (PPS), polysulfone (PSF), polysulfone: PSF Polyarylate, Polyetherimide (PEI), Polyethersulfone (PES), Polyetheretherketone (PEEK), Liquid crystalline polymer (LCP), Polyamide-imide ), Polyimide, Polyethylenenaphthalate (PEN), Polybenzimidazole (PBI), Acrylonitrile -Styrene copolymer (SAN), polyvinylidene chloride (PVDC), polymethylmethacrylate (PMMA), polyethylene oxide (PEO), polyphenylene oxide (PPO), etc. Engineering plastics, polyethylene (PE), polypropylene (Polypropylene: PP), methylpentene resin (PMP), polyvinyl chloride (PVC), ABS resin (Acrylonitrile-butadiene-styrene resin), polystyrene Resin (Polystyrene resin: PS), Methacrylate resin (MMA), Polyvinyl alcohol (Polyvinylalcohol: PVA), Ethylene-vinyl acetate copolymer (EVA), Unsaturated polyester resin (UP), Phenol resin, Urea resin, Melamine resin, Melamine-urea resin, Polyurethane resin ), Silicone resin, epoxy resin, and other polymer alloys that are high performance materials obtained by effective combination of polymers having different properties.
[0044]
One or two or more of the various synthetic resins (plastics) described above can be selectively used as the high plastomeric synthetic resin constituting the sealing member. Moreover, as long as it matches conditions, such as the temperature of the environment used, a pressure, and the kind of chemical | medical solution of a measuring object, things other than the synthetic resin mentioned above can be used.
[0045]
With Since the urging means urges at least one of the electrode member and the support portion in the direction in which they are brought closer to each other, a gap is less likely to be generated between the base end portion of the electrode member and the support portion. Of course, the synthetic resin having the above-described high plastomer property can be used as the synthetic resin constituting the seal member used for the electrode of the resistivity meter described in the claims.
[0046]
Further, as a synthetic resin constituting the sealing member described in the present claim, when the pressure of the environment used is relatively low, a synthetic resin having a low elastomer property is added to the above-described synthetic resin having a high plastomer property. In addition to the above-described synthetic resins having high plastomer properties and low-elastomeric properties, the synthetic resins having elastomeric properties can also be used when the environmental pressure used is low. The sealing member made of the synthetic resin having low elastomeric properties and the synthetic resin having elastomeric properties is cured depending on the temperature of the environment used. At this time, particularly when the spring constant of the urging means is small, the urging means causes the urging force between the base portion and the support portion of the electrode member to approach the substrate portion and the support portion of one electrode member. It becomes difficult for a gap to be formed. Therefore, the base end portion and the support portion are kept liquid tight.
[0047]
In this specification, the term “elastomeric” refers to a material that is elastically deformed, and the term “low elastomeric” refers to a material that is difficult to elastically deform. High plastomeric property indicates a material that hardly elastically deforms or does not elastically deform at all, and includes a material that slightly elastically deforms. Therefore, in the present specification, the elastic property is usually easily deformed in the order of the elastomeric property, the low elastomeric property, and the high plastomer property, and the high plastomer property is less likely to be elastically deformed than the low elastomeric property. In addition, low elastomeric properties include high plastomeric properties.
[0048]
Claim 2 According to the electrode of the resistivity meter of the present invention described in 1), the electrode member and the support portion are provided to be relatively movable. For this reason, even if the seal member is plastically deformed (creep) due to the temperature of the electrolyte solution, for example, at least one of the electrode member and the support portion is displaced in a direction approaching each other by the urging force of the urging means. Therefore, a gap is more unlikely to occur between the base end portion of the electrode member and the support portion.
[0049]
Claim 3 According to the electrode of the resistivity meter of the present invention described in 1. above, the holding member keeps the electrode members at a predetermined interval, so that the resistivity of the electrolyte solution can be accurately measured. Moreover, since the displacement permission means of the holding member allows the electrode member and the support portion to be relatively displaced, a gap is more unlikely to be generated between the base end portion of the electrode member and the support portion.
[0050]
Claim 4 According to the electrode of the resistivity meter of the present invention described in the above, when the holding member expands due to the heat of the electrolyte solution or the like, the suppression means prevents the relative displacement between the electrode member and the support portion from being hindered. To do. For this reason, it becomes harder to produce a clearance gap between the base end part of an electrode member, and a support part still more reliably.
[0051]
Claim 5 According to the electrode of the resistivity meter of the present invention described in 1., since the seal member is a hard resin, the seal member is hardly plastically deformed. Further, since the sealing member is hard to be plastically deformed and the biasing means is a disc spring having a large spring constant, the sealing member is surely brought into close contact with both the base end portion and the support portion of the electrode member without a gap. In addition, the disc spring described in this claim includes a so-called disc spring and a spring washer. Hereinafter, these are collectively referred to as a disc spring or the like.
[0052]
Claim 6 According to the electrode of the resistivity meter of the present invention described above, it is desirable to use a coil spring having a small spring constant as the biasing means, for example, the sealing member is made of fluororesin and the biasing means has a small spring constant. For this reason, even if the deformation amount when the seal member is plastically deformed is large, the urging means continues to urge the electrode member and the support portion in the direction in which they are brought closer to each other. Therefore, the seal member is more reliably brought into close contact with both the base end portion and the support portion of the electrode member without a gap.
[0053]
Claim 7 According to the electrode of the resistivity meter of the present invention described in (2), the second holding part keeps the electrode member at a predetermined interval, so that the resistivity, that is, the purity of the electrolyte solution can be measured more accurately.
[0054]
Claim 8 According to the electrode of the resistivity meter of the present invention described in 1), the electric wire is provided with the bent portion that is bent in the space. For this reason, when the seal member is thermally expanded, particularly when the seal member is deformed in a direction in which the gap between the electrode member and the support portion is widened, the electric wire is displaced so that the bending portion extends. Therefore, an electric wire does not prevent that an electrode member and a support part displace relatively.
[0055]
Claim 9 According to the electrode of the resistivity meter of the present invention described in 1), since the first sealing means keeps the space between the support portion and the wire bundle, the wire constituting the wire bundle and the electrode member are connected to each other. It is possible to prevent water condensed at a low temperature from entering the connecting portion. In addition, since the second sealing means filled in the space is made of an elastic body, the second sealing means does not prevent the electrode member and the support portion from being displaced relatively.
[0056]
Claim 10 According to the electrode of the resistivity meter of the present invention described above, the escape prevention means prevents the seal member from being plastically deformed and escaping from between the base end portion and the support portion of the electrode member. For this reason, even when the seal member is plastically deformed, the seal member can be reliably brought into close contact with both the base end portion and the support portion of the electrode member.
[0057]
DETAILED DESCRIPTION OF THE INVENTION
An electrode 1 of a resistivity meter according to a first embodiment of the present invention will be described with reference to FIGS. Electrode 1 of a resistivity meter shown in FIG. 1 and the like is used for semiconductor cleaning devices, industrial machinery, agriculture, food, medical related water quality management such as pure water, insulation power and electrolyte of nuclear power plant cooling water. It is used for concentration control of various chemicals as liquids.
[0058]
The electrode 1 measures, for example, the purity of pure water (corresponding to the electrolyte solution described in claims) as a cleaning liquid in a rinsing process in a semiconductor manufacturing process for cleaning an object to be cleaned such as a semiconductor wafer. Used to do. The resistivity meter using the electrode 1 is a device that measures the resistivity of the electrolyte solution in order to measure the purity of the electrolyte solution such as the pure water described above as a measurement object.
[0059]
As shown in FIG. 1, the electrode 1 of the resistivity meter includes an inner electrode 2 as an electrode member, an outer electrode 3 as an electrode member, a support portion 4 that supports the inner electrode 2 and the outer electrode 3, and a seal. A plate-shaped packing 8 as a member, a temperature detection unit 5, an inner electrode lead wire 6 as an electric wire electrically connected to the inner electrode 2, and an outer electrode as an electric wire electrically connected to the outer electrode 3 A lead wire 7.
[0060]
The inner electrode 2 is formed in a cylindrical shape. The inner electrode 2 is integrally provided with a small diameter portion 2a formed with a relatively small outer diameter and a large diameter portion 2b formed with a relatively large outer diameter. The small diameter portion 2a and the large diameter portion 2b are coaxial with each other and connected in series. The small diameter portion 2a is provided with a concave groove 2h formed concave from the outer surface. The concave groove 2h is formed along the circumferential direction of the small diameter portion 2a.
[0061]
The inner electrode 2 is arranged in a state where the large diameter portion 2b is located on the distal end side of the electrode 1 of the resistivity meter and the small diameter portion 2a is located on the proximal end side. The inner electrode 2 is formed with a temperature detecting portion insertion hole 2d that is concave from the end surface 2c located on the small diameter portion 2a side toward the large diameter portion 2b.
[0062]
The temperature detecting portion insertion hole 2d is coaxially arranged with the small diameter portion 2a and the large diameter portion 2b. The temperature detection portion insertion hole 2d extends from the end surface 2c toward the distal end side of the inner electrode 2. The temperature detecting portion insertion hole 2d is formed across the end surface 2c and the tip portion 2g of the inner electrode 2. The temperature detecting portion insertion 2d is open on the end face 2c, but is not open on the end face 2e located on the distal end 2g side of the inner electrode 2.
[0063]
The outer electrode 3 is formed in a circular tube having an inner diameter larger than the outer diameter of the large diameter portion 2 b of the inner electrode 2. The inner electrode 2 and the outer electrode 3 are arranged coaxially with each other in a state where the inner electrode 2 is inserted into the outer electrode 3. The inner electrode 2 is arranged in a state in which the end surface 2e of the large-diameter portion 2b is located slightly on the back side of the outer electrode 3 with respect to the end surface 3a located on the tip portion 3c side of the outer electrode 3. Both the inner electrode 2 and the outer electrode 3 are made of conductive metal or the like.
[0064]
The support portion 4 includes an end portion 2f (hereinafter referred to as a base end portion) near the small diameter portion 2a of the inner electrode 2 and an end portion 3b (hereinafter referred to as a base end portion) of the outer electrode 3 near the small diameter portion 2a. , Both are supported. The support portion 4 includes an inner electrode holder 10 as a holding member, an outer electrode holder 11, a proximal end cap 12, and the like.
[0065]
The inner electrode holder 10 is formed from an insulating resin or the like. The inner electrode holder 10 is formed in a bottomed cylindrical shape including a disc portion 10a and a cylindrical portion 10b.
[0066]
The disk portion 10a has a circular planar shape. The disk portion 10a has a substantially flat surface. A hole 10c is provided in the center of the disc portion 10a.
The hole 10c penetrates the disc part 10a. The hole 10c has a circular planar shape. The hole 10 c has an inner diameter that is substantially equal to the outer diameter of the small diameter portion 2 a of the inner electrode 2.
[0067]
The cylinder part 10b continues to the outer edge of the disk part 10a. The cylinder portion 10b is formed in a cylindrical shape. The cylinder part 10b is erected with respect to the disk part 10a. A low friction surface 10e as a displacement allowing means is formed on the outer surface 10d of the cylindrical portion 10b. The low friction surface 10e is formed so that the friction coefficient with respect to the inner peripheral surface 11d of the outer electrode holder 11 is small.
[0068]
The low friction surface 10e may be formed by coating the surface of the base material of the inner electrode holder 10 corresponding to the outer surface 10d with a fluororesin such as polytetrafluoroethylene (PTFE). It may be formed by applying a lubricant such as lubricating oil.
[0069]
The low friction surface 10e may be formed by forming the base material itself forming the inner electrode holder 10 from a resin such as the above-described fluororesin such as polytetrafluoroethylene.
[0070]
In the inner electrode holder 10, the disk portion 10a is opposed to the step surface 2i of the inner electrode 2 located between the small diameter portion 2a and the large diameter portion 2b, and the cylindrical portion 10b extends toward the end surface 2c of the small diameter portion 2a. It is arranged with the appearance that existed. At this time, the hole 10c is fitted and fixed to the outer periphery of the small-diameter portion 2a of the inner electrode 2, and the concave groove 2h is positioned on the proximal end portion 2f side from the disc portion 10a. The outer electrode holder 11 is accommodated in a cylinder portion 11f described later.
[0071]
Further, since the low friction surface 10e is formed on the outer surface 10d of the inner electrode holder 10, the inner electrode extends along the direction from the proximal end 2f to the distal end 2g of the inner electrode 2, that is, along the longitudinal direction of the inner electrode 2. 2 and the support part 4 are relatively displaceable. Thus, the low friction surface 10e allows the inner electrode 2 and the support portion 4 to be relatively displaced.
[0072]
The outer electrode holder 11 is made of a conductive metal or the like. The outer electrode holder 11 is formed in a bottomed cylindrical shape including a disc portion 11e and a cylindrical portion 11f. The disk portion 11e has a circular planar shape. The disc part 11 e faces the step surface 2 i of the inner electrode 2.
[0073]
The disk portion 11e has a substantially flat surface. A hole 11g is provided in the center of the disc portion 11e. The hole 11g penetrates the disc part 11e. The hole 11g has a circular planar shape. The hole 11g has an inner diameter larger than the outer diameter of the small diameter portion 2a of the inner electrode 2. Further, the disk portion 11 e is formed so that the outer diameter thereof is substantially equal to the inner diameter of the outer electrode 3. The base end portion 3b of the outer electrode 3 is fitted to the outer periphery of the disc portion 11e. In the illustrated example, the base end portion 3b of the outer electrode 3 is fitted to the outer periphery of the disc portion 11e, but the disc portion 11e and the outer electrode 3 may be welded and fixed to each other. Of course, the holder 11 and the outer electrode 3 may be integrally formed.
[0074]
The cylinder part 11f is continued to the outer edge of the disk part 11e. The cylinder part 11f is formed in a cylindrical shape. The cylinder part 11f is erected with respect to the disk part 11e. The cylindrical portion 11f is integrally provided with a small diameter portion 11a formed with a relatively small outer diameter and a large diameter portion 11b formed with a relatively large outer diameter. The small diameter portion 11a and the large diameter portion 11b are coaxial with each other and are connected in series with each other. The large diameter portion 11b is disposed closer to the disc portion 11e, and the small diameter portion 11a is disposed at a position away from the disc portion 11e.
[0075]
The base end cap 12 is formed in a bottomed cylindrical shape having a disc portion 12a and a cylindrical portion 12b. The disc part 12a is formed in a disc shape. The cylindrical part 12b is formed in a cylindrical shape and continues to the periphery of the disk part 12a.
[0076]
The base end cap 12 is formed from a synthetic resin such as a known polyamide resin (nylon). The base end cap 12 is arranged with the cylindrical portion 12a fitted on the outer periphery of the small diameter portion 11a of the outer electrode holder 11. The base end cap 12 is well known to the small diameter portion 11a. It is bonded and fixed by an epoxy adhesive.
[0077]
The proximal end cap 12 includes a round hole 12c that penetrates the disc portion 12a from the distal end portion 2g of the inner electrode 2 toward the proximal end portion 2f. The planar shape of the round hole 12c is formed in a substantially circular shape. The round hole 12c is arranged coaxially with the disk portion 12a. The round hole 12c is guided to the outside through an electric wire bundle 26, which will be described later, of the temperature detection unit 5 inside. The round hole 12c constitutes the through hole described in this specification.
[0078]
In the support portion 4 having the above-described configuration, the hole 10c is fitted to the outer circumference of the small diameter portion 2a and the cylindrical portion 10b is fitted to the inner circumference of the outer electrode holder 11, and the outer electrode 3 is fitted to the outer circumference of the disc portion 11e. The distance between the inner electrode 2 and the outer electrode 3 along the radial direction is kept at a predetermined distance t. Thus, the inner electrode holder 10 keeps the distance between the electrodes 2 and 3 at the predetermined distance t.
[0079]
Moreover, the support part 4 is provided with the retaining ring 19 and the coil spring 9 as an urging means. The retaining ring 19 is made of a well-known steel having conductivity, such as stainless steel, and is formed in an annular shape. The retaining ring 19 is accommodated in the cylindrical portion 10b of the inner electrode holder 10 with the small diameter portion 2a of the inner electrode 2 passing inside.
[0080]
The retaining ring 19 is in close contact with the surface of the disc portion 10a near the end surface 2c. The inner edge of the retaining ring 19 is fitted in the concave groove 2h of the small diameter portion 2a. The retaining ring 19 prevents the disc portion 10a from slipping out of the proximal end portion 2f of the small diameter portion 2 by fitting the inner edge into the concave groove 2h.
[0081]
The coil spring 9 has a relatively small spring constant. The coil spring 9 is made of a known steel such as stainless steel. The coil spring 9 is provided in the outer electrode holder 11 and between the disc portion 11 e of the outer electrode holder 11 and the disc portion 10 a of the inner electrode holder 10. The coil spring 9 is arranged in a state where the small diameter portion 2a of the inner electrode 2 passes inside.
[0082]
The coil spring 9 urges the holders 10 and 11 in a direction in which the disk portions 10a and 11e are separated from each other. The coil spring 9 is biased in the direction in which the disk portions 10a and 11e are separated from each other, and the disk portion 10a is prevented from coming out of the base end portion 2f by the retaining ring 19, so that the base of the inner electrode 2 is prevented. The end 2f is biased so as to be accommodated in the support 4. Then, both the inner electrode 2 and the outer electrode holder 11 are urged so that the stepped surface 2i and the disc portion 11e approach each other.
[0083]
As described above, the coil spring 9 biases the inner electrode 2 and the support portion 4 in the direction in which the distance between the base end portion 2 f of the inner electrode 2 and the support portion 4 becomes narrower.
[0084]
The plate-like packing 8 is made of an elastomeric or low elastomeric synthetic resin. The plate-like packing 8 is made of a polymer material having high plasticity. In the present embodiment, the plate-like packing 8 is made of a fluorine resin such as non-eluting polytetrafluoroethylene that is highly plastomeric and has little substance to elute with respect to the electrolyte solution described above. The plate packing 8 is non-eluting and hardly elastically deforms. That is, the plate-like packing 8 is so small that the amount of elastic deformation at the time of keeping the fluid tightness between the base end portion 2f and the support portion 4 does not become a problem as will be described later.
[0085]
As shown in FIGS. 1 and 2, the plate-like packing 8 is integrally provided with a disk portion 8 a and a cylindrical portion 8 b as a second holding portion. The disk part 8a is formed in a circular disk shape in plan view, and both surfaces of the disk part 8a are formed flat. The disc portion 8 a is formed so that the outer diameter is substantially equal to the outer diameter of the large diameter portion 2 b of the inner electrode 2. The disc portion 8a is formed with a constant thickness h.
[0086]
The disc portion 8a has a hole 8c in the center. The hole 8c passes through the disc portion 8a. The hole 8c has a circular planar shape. The hole 8 c has an inner diameter that is substantially equal to the outer diameter of the small diameter portion 2 a of the inner electrode 2.
[0087]
The cylinder part 8b is continued to the edge of the hole 8c. The cylinder portion 8b is formed in a cylindrical shape. The cylinder portion 8b is erected with respect to the disc portion 8a. The cylindrical portion 8 b is formed so that the inner diameter is substantially equal to the outer diameter of the small diameter portion 2 a of the inner electrode 2. The cylindrical portion 8 b is formed so that the outer diameter is substantially equal to the inner diameter of the hole 11 g of the outer electrode holder 11. The cylindrical portion 8b is fitted to both the outer periphery of the small diameter portion 2a and the inner periphery of the hole 11g, and keeps the interval between the electrodes 2 and 3 at the predetermined interval t described above.
[0088]
As shown in FIGS. 1 to 3, the plate-shaped packing 8 having the above-described structure is configured so that the inner electrode of the electrodes 2 and 3 is supported when the support portion 4 supports the base end portions 2 f and 3 b of the electrodes 2 and 3. 2 between the base end portion 2 f and the support portion 4. The plate-like packing 8 is arranged in a state where the disc portion 8a is located between the stepped surface 2i and the disc portion 11e and the cylindrical portion 8b is fitted to the outer periphery of the small diameter portion 2a.
[0089]
At this time, the plate-like packing 8 is hardly elastically deformed, and both surfaces of the disk portion 8a are formed flat, so that both surfaces are in contact with the stepped surface 2i, i.e., the inner electrode 2, without a gap and the disk portion 11e. And contact with no gap. Further, since the inner diameters of the hole 8c and the cylinder part 8b are substantially equal to the outer diameter of the small diameter part 2a and the outer diameter of the cylinder part 8b is substantially equal to the inner diameter of the hole 11g, the inner peripheral surface of the cylinder part 8b is the outer periphery of the small diameter part 2a. While being in contact with the surface without a gap, the outer peripheral surface of the cylindrical portion 8b is in contact with the inner peripheral surface of the hole 11g without a gap.
[0090]
In addition, since both the inner electrode 2 and the support portion 4 are urged so that the distance between them is reduced by the coil spring 9, both surfaces of the plate-like packing 8 have a step surface 2i and a disc portion 11e. And close to both sides without any gaps. That is, the plate-like packing 8 is in close contact with both the inner electrode 2 and the support portion 4 without a gap. And the plate-shaped packing 8 keeps between the inner electrode 2 and the support part 4 liquid-tight, and prevents that the pure water mentioned above penetrate | invades in the space 16 mentioned later.
[0091]
In the rinsing process described above, the pure water as the cleaning liquid may be at a temperature of, for example, 70 degrees Celsius or higher. At this time, since both the inner electrode 2 and the support portion 4 are urged so that the coil springs 9 are close to each other, the plate-like packing 8 may be plastically deformed in a direction in which the thickness h is reduced.
[0092]
The electrode 1 of the resistivity meter is provided with a plurality of prevention protrusions 13 as escape prevention means shown in FIG. The prevention protrusion 13 is provided in at least one of the outer edge of the disc part 11e and the outer edge of the level | step difference surface 2i. In the illustrated example, the prevention protrusions 13 are provided on both the outer edge of the disc portion 11e and the outer edge of the step surface 2i.
[0093]
The prevention protrusions 13 are arranged along the circumferential direction of both the disk portion 11e and the step surface 2i. The prevention protrusion 13 protrudes from both the disk part 11e and the level | step difference surface 2i in the direction which mutually approaches, and protrudes in the outer peripheral direction. That is, the prevention protrusion 13 provided on the outer edge of the disc portion 11e is formed so as to protrude outward from the disc portion 11e toward the step surface 2i. The prevention protrusion 13 provided on the outer edge of the step surface 2i is formed so as to protrude outward from the step surface 2i toward the disc portion 11e.
[0094]
The prevention protrusion 13 having the above-described configuration prevents the plate-like packing 8 from flowing out toward the outer periphery of the inner electrode 2 when the plate-like packing 8 is plastically deformed so that the thickness h becomes thin. That is, the prevention protrusion 13 prevents the plate-like packing 8 from escaping from between the inner electrode 2 and the support portion 4.
[0095]
Further, the support portion 4 is a space 16 surrounded by the disc portion 10a of the inner electrode holder 10, the cylindrical portion 10b, the inner peripheral surface 11d of the outer electrode holder 11, the disc portion 12a of the base end cap 12, and the like. Is formed inside. In the space 16, the temperature detecting portion insertion hole 2d is opened.
[0096]
The space 16 accommodates the ring 17 attached to the inner peripheral surface 11d of the outer electrode holder 11 and the retaining ring 19 described above. In the illustrated example, the ring 17 includes an annular ring main body 17a and a claw 17b protruding from the outer edge of the ring main body 17a toward the outer peripheral direction. A plurality of claws 17b are provided. The claws 17b are arranged at substantially equal intervals along the circumferential direction of the ring body 17a. The claw 17 b is fitted to the inner peripheral surface 11 d and fixed to the outer electrode holder 11. The ring 17 is made of a known steel such as stainless steel. Furthermore, the ring 17 may be fitted into a groove provided with a claw 17b on the inner peripheral surface 11d.
[0097]
The temperature detector 5 includes a pair of temperature sensor elements (not shown), a circular tube spring member 25, and the like. The temperature detector 5 is disposed in the temperature detector insertion hole 2d. The temperature sensor elements are respectively arranged in the temperature detection part insertion hole 2d and at the tip part 2g of the inner electrode 2. Each temperature sensor element includes a temperature sensing unit that measures temperature.
[0098]
Each of the temperature sensor elements is composed of a thermistor having a temperature-sensitive portion having a disk shape, a pellet shape, or a similar surface portion, and a thin film platinum temperature sensor. The temperature sensor elements are arranged so that the surface portions of the respective temperature sensing portions are substantially parallel to the flow path of the electrolyte solution in the temperature detection portion insertion hole 2d. An electric wire (not shown) is connected to each of these temperature sensor elements.
[0099]
One end of each of the electric wires is electrically connected to the temperature sensing portion of the temperature sensor element. The electric wire extends from the distal end portion 2g of the inner electrode 2 toward the proximal end portion 2f of the inner electrode 2. And disposed in the temperature detection portion insertion hole 2d. Each of these electric wires is electrically connected to an arithmetic device (not shown).
[0100]
A portion extending from the center portion along the longitudinal direction of the electric wire (not shown) to the other end portion, the inner electrode lead wire 6 and the outer electrode lead wire 7 are bundled together to form an electric wire bundle 26. When the temperature detection unit 5 is accommodated in the temperature detection unit insertion hole 2d, the wire bundle 26 is a round of the base end cap 12 located on the base end portions 2f and 3b side of the inner electrode 2 and the outer electrode 3. It is guided to the outside through the hole 12c.
[0101]
The circular tube spring member 25 is made of a well-known steel having conductivity. The circular tube spring member 25 is formed in a circular tube shape. A part of the circular tube spring member 25 is cut along the longitudinal direction. The circular tube spring member 25 has a C-shaped cross section that intersects the longitudinal direction thereof. The circular tube spring member 25 has elasticity that allows its outer diameter to be expanded and contracted. The circular tube spring member 25 has an outer diameter larger than the inner diameter of the small diameter portion 2a of the inner electrode 2 in the initial state.
[0102]
The circular tube spring member 25 is disposed near the temperature sensor element of the wire bundle 26.
The circular tube spring member 25 bundles the above-described electric wires (not shown). The circular tube spring member 25 is inserted into the small diameter portion 2a against its elastic restoring force. When the circular tube spring member 25 is inserted into the small diameter portion 2a, it generates an elastic restoring force and comes into close contact with the inner peripheral surface of the small diameter portion 2a.
[0103]
The inner electrode lead wire 6 is accommodated in the space 16 and one end thereof is electrically connected to the circular tube spring member 25. The inner electrode lead wire 6 is electrically connected to the inner electrode 2 by being electrically connected to the circular tube spring member 25. The inner electrode lead wire 6 is led to the proximal end cap 12 as a bundle of electric wires 26 together with the above-described electric wires (not shown), and led to the outside through the round hole 12c. The inner electrode lead wire 6 is electrically connected to the arithmetic unit (not shown) described above.
[0104]
The outer electrode lead wire 7 is accommodated in the space 16 and one end thereof is electrically connected to the ring 17. The outer electrode lead wire 7 is electrically connected to the outer electrode holder 11 and the outer electrode 3 by being electrically connected to the ring 17. The outer electrode lead wire 7 is led to the proximal end cap 12 as a bundle of electric wires 26 together with the above-described unillustrated electric wires and the like, and is led to the outside through the round hole 12c. The outer electrode lead wire 7 is electrically connected to the arithmetic device (not shown) described above.
[0105]
Further, an O-ring 30 made of an elastic material such as silicone rubber is provided in the base end cap 12. The O-ring 30 is formed in an annular shape. In the initial state, the O-ring 30 is formed so that the inner diameter is smaller than the outer diameter of the wire bundle 26 and the outer diameter is larger than the inner diameter of the small-diameter portion 11 a of the outer electrode holder 11.
[0106]
The O-ring 30 is disposed inside the small diameter portion 11 a of the outer electrode holder 11, that is, inside the cylindrical portion 12 b of the base end cap 12, through the wire bundle 26 on the inner peripheral side. When the O-ring 30 is provided in the base end cap 12, the O-ring 30 keeps a liquid-tight space between the wire bundle 26 and the inner peripheral surface of the small diameter portion 11 a of the outer electrode holder 11.
[0107]
For example, even when the temperature of the electrolyte solution is relatively low and the condensed condensed water adheres to the vicinity of the round hole 12c of the proximal end cap 12 or the like, the condensed water enters the space 16. To prevent. The O-ring 30 serves as the first sealing means described in this specification.
[0108]
Further, in the state where the temperature detection unit 5 is provided in the temperature detection unit insertion hole 2d and the ring 17 and the retaining ring 19 are accommodated in the space 16, an inelastic layer is provided in the space 16. 31 and elastic layers 32 and 33 are filled and laminated.
[0109]
The inelastic layer 31 is filled in the inner electrode holder 10. The inelastic layer 31 is formed from a synthetic resin made of an inelastic material such as an epoxy resin that does not have elasticity.
[0110]
One elastic layer 32 of the elastic layers 32 and 33 is filled in the central portion of the space 16 on the non-elastic layer 31 and along the longitudinal direction of the electrodes 2 and 3. The elastic layer 32 is made of a synthetic resin made of an elastic material such as sponge rubber.
[0111]
Furthermore, the other elastic layer 33 is filled on the elastic layer 32 and before the O-ring. The elastic layer 33 is formed of a synthetic resin made of an elastic body such as elastic silicone rubber or epoxy resin. These elastic layers 32 and 33 constitute the second sealing means described in this specification.
[0112]
The inelastic layer 31 and the elastic layers 32 and 33 prevent the condensed water adhering to the vicinity of the round hole 12c and the like from entering the space 16 and have elasticity, or the inner electrode holder 10 The movement does not prevent the inner electrode 2 and the support portion 4 from being relatively displaced.
[0113]
According to the configuration described above, the resistivity meter using the electrode 1 has at least the tip portions 2g and 3c of the inner electrode 2 and the outer electrode 3 arranged in the flow path of the electrolyte solution to be measured, and the lead The resistivity of the electrolyte solution is measured by measuring the electrical resistance between the electrodes 2 and 3 transmitted to the arithmetic unit or the like via the lines 6 and 7.
[0114]
At this time, information corresponding to the temperature of the electrolyte solution is transmitted from the temperature sensing portion of the temperature sensor element to the arithmetic device via the electric wire or the like. The arithmetic unit or the like compensates the temperature of the electrolyte solution, and calculates the resistivity of the electrolyte solution at a predetermined constant temperature. Then, the arithmetic unit or the like calculates the purity of the electrolyte solution based on the resistivity.
[0115]
Next, in order to confirm the effect of the electrode 1 of the resistivity meter described in this embodiment, the inventors actually measured the resistivity when the object to be cleaned was washed with pure water. The results are shown in FIG. A one-dot chain line Q in FIG. 4 indicates the resistivity of pure water used for cleaning. In the experiment whose result is shown in FIG. 4, the object to be cleaned was washed with a chemical solution such as ammonia, and then the chemical solution was discharged from the cleaning tank and pure water was put into the cleaning tank.
[0116]
According to FIG. 4, according to the present invention, the resistivity measured after about 7 to 8 minutes from the start of the experiment became the resistivity of pure water. As described above, the product of the present invention measures the resistivity of pure water promptly when the cleaning of the object to be cleaned is completed and the resistivity of the cleaning liquid becomes equal to that of pure water. For this reason, when the purity of the electrolyte solution, that is, the resistivity is changed, it has been clarified that the time delay required to accurately measure the resistivity is very short.
[0117]
In addition, since the resistivity of pure water was measured when the liquid in the cleaning tank was completely replaced with pure water from a chemical solution such as ammonia, the electrode of the resistivity meter of this embodiment was very accurate. It became clear that the rate could be measured.
[0118]
According to the electrode 1 of the resistivity meter of the present embodiment, both the inner electrode 2 and the support portion 4 are urged so that the plate-like packing 8 hardly undergoes elastic deformation and the coil spring 9 approaches each other. The plate-like packing 8 is in close contact with both the inner electrode 2 and the support portion 4 without a gap. For this reason, a gap or the like through which the electrolyte solution can enter does not occur between the base end portion 2 f of the inner electrode 2 and the support portion 4.
[0119]
Accordingly, since the electrolyte solution is difficult to enter between the inner electrode 2 and the support portion 4 and the like, as is clear from the experimental example shown in FIG. A time delay required for measuring the resistivity can be suppressed.
[0120]
Further, the electrolyte solution hardly enters between the inner electrode 2 and the support portion 4 and the cylindrical portion 8b of the inner electrode holder 10 and the plate packing 8 keeps the electrodes 2 and 3 at a predetermined interval t. As is clear from the experimental example shown in FIG. 4, the resistivity of the electrolyte solution can be accurately measured. Furthermore, since the cylindrical portion 8b of the plate packing 8 is disposed between the small diameter portion 2a and the outer electrode holder 11, the inner electrode 2 and the outer electrode holder 11 are reliably insulated from each other, and the resistivity of the electrolyte solution Can be measured reliably.
[0121]
Further, the inner electrode 2 and the support portion 4 are supported by the inner electrode holder 10 and the like so that the inner electrode 2 and the support portion 4 can be relatively displaced, and the low friction surface 10 e is relatively positioned between the inner electrode 2 and the support portion 4. It is allowed to be displaced. Moreover, even if the deformation amount when the plate-like packing 8 made of fluororesin is plastically deformed, the coil spring 9 having a small spring constant continues to urge the inner electrode 2 and the support portion 4 toward each other.
[0122]
For this reason, the plate-like packing 8 is plastically deformed (creeped) so that the electrolyte solution becomes hot and the thickness h is thin, and the plate-like packing 8 is urged by the urging force of the coil spring 9 even if the amount of deformation at this time is large. Reliably contacts both the inner electrode 2 and the support portion 4.
[0123]
Therefore, a gap is more unlikely to be generated between the base end portion 2f of the inner electrode 2 and the support portion 4, and the time taken to accurately measure the resistivity of the electrolyte solution when the resistivity of the electrolyte solution changes. Delay can be suppressed more reliably. Furthermore, the resistivity of the electrolyte solution can be accurately measured.
[0124]
The O-ring 30 prevents the condensed water from entering the space 16 from between the wire bundle 26 and the base end cap 12. Therefore, it is possible to prevent the dew condensation water from entering the connection portions where the electrodes 2 and 3 and the lead wires 6 and 7 are electrically connected to each other, and it is possible to suppress problems that occur when measuring the resistivity of the electrolyte solution.
[0125]
In addition, the condensed water adhered to the vicinity of the round hole 12c or the like with the elastic layers 32, 33 and the like is prevented from entering the space 16, and the inner electrode 2 and the support portion 4 are connected by the elasticity and the movement of the inner electrode holder 10. Does not prevent relative displacement. For this reason, the plate-shaped packing 8 more reliably keeps the space between the inner electrode 2 and the support part liquid-tight. Therefore, when the resistivity of the electrolyte solution changes, it is possible to surely suppress the time delay required to measure the resistivity of the electrolyte solution and to accurately measure the resistivity of the electrolyte solution.
[0126]
Further, the prevention protrusion 13 prevents the plate-like packing 8 from escaping from between the inner electrode 2 and the support portion 4 when the plate-like packing 8 is plastically deformed. It is possible to more reliably keep the space tight. Therefore, when the resistivity of the electrolyte solution changes, it is possible to surely suppress the time delay required to measure the resistivity of the electrolyte solution and to accurately measure the resistivity of the electrolyte solution.
[0127]
Next, an electrode 1 of a resistivity meter according to a second embodiment of the present invention will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment, and description is abbreviate | omitted. As shown in FIG. 5, the electrode 1 of the resistivity meter according to the present embodiment includes a second prevention protrusion 14 as escape prevention means in addition to the prevention protrusion 13.
[0128]
The 2nd prevention protrusion 14 is provided in both the said disc part 11e and the level | step difference surface 2i. The 2nd prevention protrusion 14 is provided in the inner edge of the disc part 11e. The 2nd prevention protrusion 14 provided in the inner edge of the disc part 11e is formed in the convex toward the level | step difference surface 2i from the disc part 11e. The 2nd prevention protrusion 14 provided in the inner edge of disc part 11e is distribute | arranged along the circumferential direction of disc part 11e.
[0129]
The second prevention protrusion 14 is provided on the inner edge of the step surface 2i. The second prevention protrusion 14 provided on the inner edge of the step surface 2i is formed to protrude from the step surface 2i toward the disc portion 11e. The second prevention protrusions 14 provided on the inner edge of the step surface 2i are arranged along the circumferential direction of the step surface 2i.
[0130]
Similarly to the above-described prevention protrusion 13, the above-described second prevention protrusion 14 also faces the outer periphery of the inner electrode 2 when the plate-like packing 8 is plastically deformed so that the thickness h becomes thin. To prevent spillage. That is, the second prevention protrusion 14 prevents the plate-like packing 8 from escaping from between the inner electrode 2 and the support portion 4.
[0131]
According to the electrode 1 of the resistivity meter of the present embodiment, since the second prevention protrusion 14 is provided in addition to the prevention protrusion 13, the plate-like packing 8 is formed when the plastic deformation is performed to reduce the thickness h. Escape from between the electrode 2 and the support portion 4 can be prevented more reliably. For this reason, the plate-like packing 8 is in intimate contact with both the inner electrode 2 and the support portion 4.
Therefore, when the resistivity of the electrolyte solution changes, it is possible to surely suppress the time delay required to measure the resistivity of the electrolyte solution and to accurately measure the resistivity of the electrolyte solution. Although FIG. 5 shows a semicircular protrusion, the same effect can be obtained by using a U-shaped or V-shaped protrusion.
[0132]
Next, an electrode 1 of a resistivity meter according to a third embodiment of the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment, and description is abbreviate | omitted.
[0133]
The electrode 1 of the resistivity meter of the present embodiment is formed from a hard resin whose plate-like packing 8 is difficult to plastically deform, such as polyphenylene sulfide (hereinafter referred to as PPS) or polyether ether ketone (hereinafter referred to as PEEK). Has been. Further, as shown in FIGS. 6 and 7, the plate-like packing 8 includes only the disk portion 8 a without including the cylindrical portion 8 b.
[0134]
A disc spring 41 shown in FIG. 7 or the like is used as a biasing means that biases both the inner electrode 2 and the support portion 4 in the direction in which they are brought closer. This type of disc spring 41 or the like has a large spring constant. The disc spring 41 is formed so that the inner diameter is larger than the outer diameter of the small diameter portion 2 a and the outer diameter is smaller than the inner diameter of the outer electrode holder 11.
[0135]
Further, the inner electrode holder 10 is integrally provided with a second cylindrical portion 10f. The second cylindrical portion 10 f is fitted into the outer periphery of the small diameter portion 2 a of the inner electrode 2 and is fitted into the hole 11 g of the outer electrode holder 11.
[0136]
In the initial state before the plate-shaped packing 8 is plastically deformed, a play 42 as a gap is provided between the tip edge of the second cylindrical portion 10 f and the plate-shaped packing 8.
The play 42 allows the inner electrode 2 and the support portion 4 to be displaced in a direction approaching each other. In order to fix the base end 2f of the inner electrode 2 and the inner electrode holder 10 to each other, a screw groove 43 and a nut 44 are used. The thread groove 43 is formed on the outer periphery of the small diameter portion 2a. The nut 44 is screwed into the screw groove 43.
[0137]
The electrode 1 of the resistivity meter having the above-described configuration is such that the plate-shaped packing 8 is disposed between the outer electrode holder 11 and the stepped surface 2i of the inner electrode 2, and the second cylindrical portion 10f has a hole 11g and a small diameter portion. The inner electrode holder 10 is disposed in the outer electrode holder 11 by being fitted to 2a. A disc spring 41 or the like 41 in which the small-diameter portion 2a is inserted on the inner electrode holder 10 is overlapped, and a nut 44 is screwed into the screw groove 43 for assembly. The disc spring 41 or the like 41 is attached between the inner electrode holder 10 and the nut 44 in a state in which an elastic restoring force that biases the inner electrode 2 and the support portion 4 is generated in a direction approaching each other.
[0138]
According to the electrode 1 of the resistivity meter of the present embodiment, the plate-like packing 8 is made of a hard resin that is difficult to plastically deform, and the disc spring 41 having a large spring constant is brought close to each other so that the inner electrode 2 and the support 4 And both sides. For this reason, the plate-like packing 8 is in close contact with both the disc portion 11e and the stepped surface 2i without a gap. Therefore, when the resistivity of the electrolyte solution changes, it is possible to surely suppress the time delay required to measure the resistivity of the electrolyte solution and to accurately measure the resistivity of the electrolyte solution.
[0139]
Further, since the play 42 is provided between the second cylindrical portion 10f of the inner electrode holder 10 and the plate packing 8 in the initial state of the plate packing 8, even when the plate packing 8 is plastically deformed. The inner electrode 2 and the support part 4 can approach reliably. For this reason, the plate-like packing 8 can be in close contact with both the disc portion 11e and the stepped surface 2i without a gap.
[0140]
Next, an electrode 1 of a resistivity meter according to a fourth embodiment of the present invention will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment and 3rd Embodiment, and description is abbreviate | omitted.
[0141]
As shown in FIG. 8, the electrode 1 of the resistivity meter according to the present embodiment is not provided with a low friction surface 10 e on the outer peripheral surface 10 d of the inner electrode holder 10, and the inner wall surface of the outer electrode holder 11 is used as a displacement allowing means. A sliding member 45 is provided. The sliding member 45 is formed in a circular tube shape.
[0142]
The sliding member 45 has an inner diameter that is substantially equal to the inner diameter of the outer electrode holder 11.
The sliding member 45 is formed from a fluorine resin having a small friction coefficient with respect to the inner electrode holder 10 or the like, for example, polytetrafluoroethylene described above. The sliding member 45 allows the inner electrode 2 and the support portion 4 to be relatively displaced along the longitudinal direction of the inner electrode 2. Moreover, the plate-shaped packing 8 of this embodiment consists of fluororesins, such as the polytetrafluoroethylene mentioned above.
[0143]
Also in this embodiment, since the plate-like packing 8 is in close contact with both the inner electrode 2 and the support portion 4 without a gap, a gap or the like through which the electrolyte solution can enter is formed between the base end portion 2f of the inner electrode 2 and the support portion 4. It doesn't happen in between. For this reason, it is difficult for the electrolyte solution to enter between the inner electrode 2 and the support portion 4. Therefore, when the resistivity of the electrolyte solution changes, it is possible to suppress the time delay required to measure the accurate resistivity of the electrolyte solution, and it is possible to accurately measure the resistivity of the electrolyte solution.
[0144]
Next, an electrode 1 of a resistivity meter according to a fifth embodiment of the present invention will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment and 3rd Embodiment, and description is abbreviate | omitted.
[0145]
As shown in FIG. 9, the electrode 1 of the resistivity meter according to the present embodiment includes the disk portion 10 a and the second cylinder portion 10 f described above in the inner electrode holder 10. Furthermore, in addition to the inner electrode holder 10, a second inner electrode holder 46 as a holding member is provided. The second inner electrode holder 46 includes an annular ring portion 46a and a cylindrical tube portion 46b.
[0146]
The annular portion 46 a has an outer diameter that is substantially equal to the inner diameter of the outer electrode holder 11.
The cylindrical portion 46b has an inner diameter that is substantially equal to the outer diameter of the small diameter portion 2a. The cylindrical part 46b is continued to the inner edge of the annular part 46a. A low friction surface 46c is formed on the inner peripheral surface of the cylindrical portion 46b as a displacement permitting means having a small friction coefficient with respect to the small diameter portion 2a.
[0147]
The low friction surface 46c may be formed by coating the surface of the base material of the second inner electrode holder 46 corresponding to the inner peripheral surface 46b with a fluororesin such as polytetrafluoroethylene. It may be formed by applying a lubricant such as. The low friction surface 46c may be formed by molding the base material itself of the second inner electrode holder 46 with a fluororesin such as polytetrafluoroethylene.
[0148]
The second inner electrode holder 46 having the above-described configuration is formed in the outer electrode holder 11 in a state where the annular portion 46a is opposed to the disc portion 10a of the inner electrode holder 10 and the small diameter portion 2a is inserted into the cylindrical portion 46b. Is housed in.
[0149]
Further, the electrode 1 of the resistivity meter of the present embodiment is in a space surrounded by the annular portion 46a of the second inner electrode holder 46, the outer peripheral surface of the cylindrical portion 46b, and the inner peripheral surface 11d of the outer electrode holder 11, A synthetic resin 47 such as silicone rubber or epoxy resin is filled.
Furthermore, the plate-like packing 8 of the present embodiment is made of a fluororesin such as polytetrafluoroethylene described above.
[0150]
According to the electrode 1 of the resistivity meter of the present embodiment, when the inner electrode holder 10 and the inner electrode 2 are integrally displaced with respect to the outer electrode holder 11, the small diameter portion 2a and the second inner electrode holder 46 are The cylindrical portion 46b slides with the inner peripheral surface. And the bottom friction surface 46c with a small friction coefficient with respect to the outer peripheral surface of the small diameter part 2a is formed in the internal peripheral surface of the cylinder part 46b of the 2nd electrode holder 46. As shown in FIG.
[0151]
For this reason, the second inner electrode holder 46 does not prevent relative displacement between the inner electrode 2 and the support portion 4. Therefore, the plate-like packing 8 is in close contact with both the disc portion 11e and the stepped surface 2i without a gap. There is no gap between the inner electrode 2 and the support portion 4 in which the electrolyte solution enters.
[0152]
Also in this embodiment, it is difficult for the electrolyte solution to enter between the inner electrode 2 and the support portion 4. Therefore, when the resistivity of the electrolyte solution changes, it is possible to suppress the time delay required to measure the accurate resistivity of the electrolyte solution, and it is possible to accurately measure the resistivity of the electrolyte solution.
[0153]
Next, an electrode 1 of a resistivity meter according to a sixth embodiment of the present invention will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment and 3rd thru | or 5th Embodiment, and description is abbreviate | omitted.
[0154]
As shown in FIG. 10, the electrode 1 of the resistivity meter of the present embodiment is provided with a packing 50 in the vicinity of the boundary between the small diameter portion 11 a and the large diameter portion 11 b of the outer electrode holder 11. The packing 50 is formed in a disc shape and includes a hole 51. The hole 51 is provided in the center of the packing 50.
[0155]
The hole 51 is formed so that the inner diameter of the hole 51 can pass through the second wire bundle 52 formed by bundling the electric wire connected to the temperature sensing portion of the temperature sensor element and the inner electrode lead wire 6. Yes. The packing 50 has an outer diameter that is substantially equal to the inner diameter in the vicinity of the boundary between the small diameter portion 11a and the large diameter portion 11b. Furthermore, the plate-like packing 8 of the present embodiment is made of a fluororesin such as polytetrafluoroethylene described above.
[0156]
In addition, the electrode 1 of the resistivity meter of the present embodiment is filled with an epoxy resin 53 in a space surrounded by the packing 50, the disc portion 12a of the base end cap 12, and the inner peripheral surface of the small diameter portion 11a. . The epoxy resin 53 prevents the electrolyte solution from entering the space 16 through the round hole 12c.
[0157]
Further, in the present embodiment, the inner electrode lead wire 6 is electrically connected to the inner electrode 2 by being tied to a retaining ring 19 or the like. The second wire bundle 52 includes a bent portion 54. The bending portion 54 is provided between the end surface 2c of the small diameter portion 2a and the packing 50 in an initial state before the plate-like packing 8 is plastically deformed.
[0158]
The bent portion 54 is formed by bending the second wire bundle 52 in the direction from the end surface 2 c toward the packing 50. The bending portion 54 is located in the space 16. In addition, since the 2nd electric wire 52 is provided with the bending part 54, the inner electrode lead wire 6 will also be provided with the bending part 54. FIG.
[0159]
According to the electrode 1 of the resistivity meter of the present embodiment, since the second wire bundle 52 includes the bending portion 54, the second wire bundle is formed when the support portion 4 and the inner electrode 2 are relatively displaced. 52, that is, the inner electrode lead wire 6 is deformed so as to shrink. For this reason, the 2nd electric wire bundle 52 does not prevent that the support part 4 and the inner electrode 2 displace relatively.
[0160]
The plate-like packing 8 is in close contact with both the disk portion 11e and the stepped surface 2i without any gap. Therefore, when the resistivity of the electrolyte solution changes, it is possible to reliably suppress the time delay required to measure the exact electrolyte solution resistivity, and it is possible to accurately measure the resistivity of the electrolyte solution.
[0161]
Next, an electrode 1 of a resistivity meter according to a seventh embodiment of the present invention will be described with reference to FIGS. 11 and 12. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment and 3rd thru | or 6th Embodiment, and description is abbreviate | omitted.
[0162]
The cylindrical portion 10b of the inner electrode holder 10 of the electrode 1 of the resistivity meter of the present embodiment shown in FIG. 11 is changed between the outer diameter in the longitudinal direction and the outer diameter of the annular portion is reduced. The outer diameter of the cylindrical portion is in close contact with the outer electrode holder 11, and the inside is filled with an elastic resin. Further, in the method shown in FIG. 12, a plurality of concave portions 55 and convex portions 56 are provided on the outer peripheral surface so that the thickness thereof changes along the circumferential direction. As shown in FIGS. 12A and 12B, the concave portions 55 and the convex portions 56 are alternately arranged along the circumferential direction of the cylindrical portion 10b.
[0163]
The concave portions 55 and the convex portions 56 suppress an increase in the coefficient of friction of the outer peripheral surface 10d with respect to the inner peripheral surface 11d of the outer electrode holder 11 when the cylindrical portion 10b expands due to heat of the electrolyte solution or the like.
[0164]
That is, the concave portion 55 and the convex portion 56 prevent the relative displacement between the inner electrode 2 and the support portion 4 when the inner electrode holder 10 expands due to the heat of the electrolyte solution. Suppress. In addition, the recessed part 55 and the convex part 56 have comprised the suppression means described in this specification. Furthermore, the plate-like packing 8 of the present embodiment is made of a fluororesin such as polytetrafluoroethylene described above.
[0165]
According to this embodiment, when the inner electrode holder 10 is expanded, the concave portion 55 and the convex portion 56 are prevented from obstructing relative displacement between the inner electrode 2 and the support portion 4, so that the plate shape The packing 8 is more reliably brought into close contact with both the disk portion 11e and the stepped surface 2i without a gap. Therefore, when the resistivity of the electrolyte solution changes, it is possible to reliably suppress the time delay required to measure the exact electrolyte solution resistivity, and it is possible to accurately measure the resistivity of the electrolyte solution.
[0166]
In the first to seventh embodiments described above, the plate-like packing 8 as a seal member is provided between the inner electrode 2 and the support portion 4, but in the present invention, three or more electrode members are provided. Of course, in the provided electrode, a seal member may be provided between at least one electrode member and the support portion.
[0167]
Furthermore, in the first to seventh embodiments described above, polytetrafluoroethylene (PTFE), PPS, PEEK, or the like is used as the high plastomeric synthetic resin constituting the plate packing 8. However, in this invention, what is shown below as a synthetic resin which comprises the plate-shaped packing 8 can be used.
[0168]
Polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), fluorinated ethylene propylene (FEP), ethylene-tetrafluoroethylene copolymer (Ethylene-tetrafluoroethylene copolymer: ETFE), Polychlorotrifluoroethylene (PCTFE), Ethylene-chlorotrifluoroethylene copolymer (ECTFE), Polyvinylidenefluoride (PVDF), Polyvinyl formal (Polyvinylformal: PVF), polyamide (Polyamide: PA), polyacetal (Polyacetal: POM), polycarbonate (Polycarbonate: PC), polyphenylene ether (PPE), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyphenylene sulfide (PPS), polysulfone (PSF), polysulfone: PSF Polyarylate, Polyetherimide (PEI), Polyethersulfone (PES), Polyetheretherketone (PEEK), Liquid crystalline polymer (LCP), Polyamide-imide ), Polyimide, Polyethylenenaphthalate (PEN), Polybenzimidazole (PBI), Acrylonitrile -Styrene copolymer (SAN), polyvinylidene chloride (PVDC), polymethylmethacrylate (PMMA), polyethylene oxide (PEO), polyphenylene oxide (PPO), etc. Engineering plastics, polyethylene (PE), polypropylene (Polypropylene: PP), methylpentene resin (PMP), polyvinyl chloride (PVC), ABS resin (Acrylonitrile-butadiene-styrene resin), polystyrene Resin (Polystyrene resin: PS), Methacrylate resin (MMA), Polyvinyl alcohol (Polyvinylalcohol: PVA), Ethylene-vinyl acetate copolymer (EVA), Unsaturated polyester resin (UP), phenol resin (Phenol resin), urea resin, melamine resin, melamine-urea co-condensation resin (Melamine-urea resin), polyurethane resin (Polyurethane resin) ), A silicone alloy, an epoxy resin, and other polymer alloys that are high performance materials obtained by effective combination of polymers having different properties.
[0169]
One or more of the various synthetic resins (plastics) described above can be selectively used as the high plastomeric synthetic resin constituting the plate packing 8. Furthermore, materials other than the above-described synthetic resins can be used as long as they meet the conditions such as the temperature and pressure of the environment in which they are used and the type of chemicals to be measured.
[0170]
Further, when the coil spring 9 having a small spring constant is used as the urging means as in the first and third to seventh embodiments described above, in addition to the above-described synthetic resin having a high plastomer property, rubber is used. A synthetic resin having an elastomeric property and a low elastomeric property such as can be used.
[0171]
In this case, the sealing member made of a synthetic resin having an elastomeric property and a low elastomeric property is cured depending on the temperature of the environment used. At this time, since the spring constant of the coil spring 9 is particularly small, the base end portion 2f and the support portion of the inner electrode 2 are urged by the biasing force that brings the substrate portion 2f and the support portion 4 of the inner electrode 2 of the coil spring 9 closer to each other. 4 is less likely to form a gap. Accordingly, the base end 2f and the support portion can be kept liquid-tight, and the time delay required to accurately measure the resistivity of the electrolyte solution when the resistivity of the electrolyte solution changes can be ensured. While being able to suppress, the resistivity of electrolyte solution can be measured correctly.
[0172]
【The invention's effect】
As described above, according to the first aspect of the present invention, since the seal member hardly deforms elastically when it is kept liquid-tight between the electrode member and the support portion, the base end portion of the electrode member and the support portion are supported. Close to both sides with no gaps. For this reason, there is no gap between the base end portion of the electrode member and the support portion where a chemical solution containing impurities can enter. Therefore, it is difficult for the electrolyte solution to enter between the base end portion of the electrode member and the support portion.Therefore, there is a time delay until the accurate resistivity of the electrolyte solution is measured when the resistivity of the electrolyte solution changes. While being able to suppress, the resistivity of electrolyte solution can be measured correctly.
[0173]
Mutual Since at least one of the electrode member and the support portion is biased in a direction approaching the distance, a gap is less likely to occur between the base end portion of the electrode member and the support portion. Therefore, when the resistivity of the electrolyte solution changes, a time delay required for measuring the accurate electrolyte solution resistivity can be further suppressed, and the electrolyte solution resistivity can be accurately measured.
[0174]
Claim 2 According to the present invention described above, even if the sealing member is plastically deformed (creep), the supporting portion and the electrode member are displaced in a direction in which they are brought closer to each other by the urging force of the urging means. For this reason, it becomes difficult to produce a clearance gap between the base end part of an electrode member, and a support part. Therefore, when the resistivity of the electrolyte solution changes, the time delay required to measure the accurate electrolyte solution resistivity can be more reliably suppressed, and the resistivity of the electrolyte solution can be measured more accurately.
[0175]
Claim 3 According to the present invention described in (2), since the displacement permitting means allows relative displacement between the electrode member and the support portion, a gap is hardly formed between the base end portion of the electrode member and the support portion. Become. For this reason, when the resistivity of the electrolyte solution changes, it is possible to more reliably suppress the time delay required to measure the accurate electrolyte solution resistivity. Furthermore, since the holding member keeps the electrode members at a predetermined interval, the resistivity of the electrolyte solution can be measured more accurately.
[0176]
Claim 4 According to the present invention, the base member and the support portion of the electrode member prevent the relative displacement between the electrode member and the support portion from being hindered when the holding member expands. A gap is more unlikely to occur between the two. Therefore, when the resistivity of the electrolyte solution changes, the time delay required to measure the exact electrolyte solution resistivity can be more reliably suppressed, and the resistivity of the electrolyte solution can be measured more accurately.
[0177]
Claim 5 According to the present invention described in (1), since the seal member is a hard resin, the seal member is difficult to be plastically deformed. Further, since the sealing member is hard to be plastically deformed and the biasing means is a disc spring having a large spring constant, the sealing member is surely brought into close contact with both the base end portion and the support portion of the electrode member without a gap. Accordingly, a gap between the base end portion of the electrode member and the support portion is more unlikely to be generated, and the time delay required to accurately measure the resistivity of the electrolyte solution can be more reliably suppressed, and the electrolyte The resistivity of the liquid can be measured more accurately.
[0178]
Claim 6 According to the present invention, the coil spring continues to urge the electrode member and the support portion toward each other even if the deformation amount when the seal member made of fluororesin is plastically deformed is large. For this reason, even if the deformation amount of the seal member is large, the seal member is in close contact with both the base end portion and the support portion of the electrode member without any gap. Therefore, it is possible to more reliably suppress the time delay required to measure the accurate electrolyte solution resistivity, and to measure the electrolyte solution resistivity more accurately.
[0179]
Claim 7 According to the present invention, the second holding part keeps the electrode members at a predetermined interval, so that it is possible to suppress the time delay required to accurately measure the resistivity of the electrolyte solution, and more accurately the electrolyte solution. Can be measured.
[0180]
Claim 8 According to the present invention, the electric wire does not prevent the electrode member and the support portion from being relatively displaced, so that the seal member is surely spaced by both the base end portion and the support portion of the electrode member. Not close. Therefore, it is possible to more reliably suppress the time delay required to measure the accurate electrolyte solution resistivity, and to measure the electrolyte solution resistivity more accurately.
[0181]
Claim 9 According to the present invention described above, the first sealing means prevents the dew condensation water from entering the connection portion where the electric wire and the electrode member constituting the electric wire bundle are connected to each other. For this reason, the malfunction which arises when measuring the resistivity of electrolyte solution can be prevented. In addition, since the second sealing means filled in the space is made of an elastic body, the second sealing means does not prevent the electrode member and the support portion from being displaced relatively.
[0182]
Therefore, the seal member is surely brought into close contact with both the base end portion and the support portion of the electrode member without a gap. It is possible to more reliably suppress the time delay required for measuring the accurate electrolyte solution resistivity, and to measure the electrolyte solution resistivity more accurately.
[0183]
Claim 10 According to the present invention, the seal member is prevented from escaping from between the base end portion of the electrode member and the support portion, so that the seal member is more reliably connected to the base end portion and the support portion of the electrode member. Close to both sides. Therefore, it is possible to more reliably suppress the time delay required to measure the accurate electrolyte solution resistivity, and to measure the electrolyte solution resistivity more accurately.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing the overall configuration of an electrode of a resistivity meter according to a first embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view of a portion M in FIG.
FIG. 3 is an enlarged cross-sectional view showing a main part of an electrode of the resistivity meter of the same embodiment.
FIG. 4 is an explanatory diagram showing an example in which the resistivity of the electrolyte solution is measured using the electrode of the embodiment.
FIG. 5 is an enlarged cross-sectional view showing a main part of an electrode of a resistivity meter according to a second embodiment of the present invention.
FIG. 6 is a cross-sectional view showing a part of an electrode of a resistivity meter according to a third embodiment of the present invention.
7 is a cross-sectional view showing a disc spring of the electrode shown in FIG. 6;
FIG. 8 is a cross-sectional view showing a part of an electrode of a resistivity meter according to a fourth embodiment of the present invention.
FIG. 9 is a cross-sectional view showing a part of an electrode of a resistivity meter according to a fifth embodiment of the present invention.
FIG. 10 is a cross-sectional view showing a part of an electrode of a resistivity meter according to a sixth embodiment of the present invention.
FIG. 11 is a cross-sectional view showing a part of an electrode of a resistivity meter according to a seventh embodiment of the present invention.
12A is a side view showing an inner electrode holder of the electrode shown in FIG. 11. FIG. (B) is the figure seen from arrow XIIB in FIG. 12 (A).
FIG. 13 is a cross-sectional view showing the overall configuration of an electrode of a conventional resistivity meter.
14 is an enlarged cross-sectional view showing a main part of the electrode shown in FIG.
15 is an explanatory diagram showing an example of measuring the resistivity of an electrolyte solution using the electrode shown in FIG.
[Explanation of symbols]
1 Electrodes of resistivity meter
2 Inner electrode (electrode member)
2f Base end
3 Outer electrode (electrode member)
3b Base end
4 support parts
6 Inner electrode lead wire (electric wire)
7 Outer electrode lead wire (electric wire)
8 Plate packing (seal member)
8b Tube part (second holding part)
9 Coil spring (biasing means)
10 Inner electrode holder (holding member)
10e Low friction surface (displacement permitting means)
12c Round hole (through hole)
13 Prevention protrusion (Escape prevention means)
14 Second prevention protrusion (escape prevention means)
26 Wire bundle
30 O-ring (first sealing means)
32, 33 Elastic layer (second sealing means)
41 Belleville spring (biasing means)
45 Sliding member (displacement permitting means)
46 Second inner electrode holder (holding member)
46c Low friction surface (displacement permitting means)
54 flexure
55 Concavity (suppression means)
56 Convex part (suppression means)
t Predetermined interval

Claims (10)

A cylindrical electrode member and a cylindrical electrode member having an inner diameter larger than the outer diameter of the cylindrical electrode member are arranged coaxially and at a predetermined interval in the flow path of the electrolyte solution to be measured. In the electrode of the resistivity meter that measures the resistivity of the electrolyte solution based on the electrical resistance between the members,
A support portion having a space for supporting a plurality of electric wires connected to each of the electrode members while supporting a base end portion of each of the electrode members;
A seal member for preventing the electrolyte solution from entering the space ;
A biasing means for biasing at least one of the electrode member and the support portion in a direction in which a distance between a base end portion of the at least one electrode member and the support portion is narrowed ;
The seal member is made of a low elastomeric synthetic resin and has non-solute properties in the electrolyte solution, and is provided between a base end portion of the plurality of electrode members and the support portion. An electrode of a resistivity meter, characterized in that the at least one base end portion and the support portion are in close contact with each other without a gap, and the space between the at least one electrode member and the support portion is kept liquid-tight. Wherein the at least one electrode member and the supporting portion, said from the tip of the electrode members along the direction toward the proximal end, according to claim 1, characterized in that provided relatively displaceable Resistivity electrode. A holding member disposed in the space and having a displacement permitting means for maintaining a predetermined distance between the plurality of electrode members and allowing a relative displacement between the at least one electrode member and a support portion; The electrode of the resistivity meter according to claim 2 , wherein the electrode is provided. The holding member includes suppression means that suppresses hindering relative displacement between the at least one electrode member and a support portion when the holding member expands due to heat of the electrolyte solution. The electrode of the resistivity meter according to claim 3 . The sealing member is made of hard resin, and the electrode resistivity meter according to any one of claims 1 to claim 4, characterized in that said biasing means is a disc spring having a high spring constant . The sealing member is made of fluorine resin, and the electrode resistivity meter according to any one of claims 1 to claim 4 wherein the biasing means is characterized by having a low spring constant. The resistivity according to any one of claims 1 to 6 , further comprising a second holding portion that is integrally formed with the seal member and that maintains a predetermined distance between a plurality of electrode members. Meter electrode. At least one of the wires, the resistivity according to any one of claims 1 to claim 7, characterized in that it comprises a arranged a deflection unit in a state flexed into the space Meter electrode. The support portion includes a through hole along a direction from the distal end portion to the proximal end portion of the electrode member,
The wire bundle formed by bundling the wires is led to the outside through the through hole,
A first sealing means made of an elastic body and keeping liquid-tight between the support portion and the wire bundle;
Electrode resistivity meter according to claim 1 to claim 8, characterized by comprising a second sealing means which is filled into an elastic body and the space, the. When the seal member is plastically deformed due to the temperature of the electrolyte solution, the seal member includes escape prevention means for preventing the seal member from escaping between the base end portion of the at least one electrode member and the support portion. The electrode of the resistivity meter according to any one of claims 1 to 9 , wherein the electrode is a resistivity meter.

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