JP4582311B2 - Signal transmission line, electronic component, and method for manufacturing signal transmission line - Google Patents

Signal transmission line, electronic component, and method for manufacturing signal transmission line Download PDF

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JP4582311B2
JP4582311B2 JP2005031620A JP2005031620A JP4582311B2 JP 4582311 B2 JP4582311 B2 JP 4582311B2 JP 2005031620 A JP2005031620 A JP 2005031620A JP 2005031620 A JP2005031620 A JP 2005031620A JP 4582311 B2 JP4582311 B2 JP 4582311B2
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dielectric substrate
conductor
signal transmission
transmission line
signal line
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JP2006222519A (en
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謙二 遠藤
重光 戸蒔
潔 畑中
晴雄 西野
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TDK Corp
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Description

本発明は、信号伝送線路、電子部品及び信号伝送線路の製造方法に関する。更に詳しくは、ストリップライン又はマイクロストリップラインなどの伝送線路、この伝送線路を回路要素の一部として用いた共振器、フィルタ、カプラ又はデュプレクサ等の電子部品、更には、これらの製造方法に係る。   The present invention relates to a signal transmission line, an electronic component, and a method for manufacturing a signal transmission line. More specifically, the present invention relates to a transmission line such as a strip line or a microstrip line, an electronic component such as a resonator, a filter, a coupler, or a duplexer using the transmission line as a part of a circuit element, and a manufacturing method thereof.

高周波回路で用いられる伝送線路としては、信号線の周囲に、誘電体を介して、断面円形の導体を配置した同軸線路と、誘電体中に信号線を一体に形成し、誘電体の少なくとも両面にグランドプレーンを形成したストリップ線路と、誘電体の片面に信号線を形成し、他面にグランドプレーンを形成したマイクロストリップ線路がよく知られている。   As a transmission line used in a high frequency circuit, a coaxial line in which a conductor having a circular cross section is disposed around a signal line through a dielectric, and a signal line are integrally formed in the dielectric, and at least both surfaces of the dielectric A strip line having a ground plane formed thereon and a microstrip line having a signal line formed on one side of a dielectric and a ground plane formed on the other side are well known.

このうち、同軸線路は、損失が少ないので、比較的長い伝送や鋭い共振特性を要求される共振器に用いられている。一方、ストリップ線路や、マイクロストリップ線路は、他の回路要素と組み合わせて容易に製造でき、かつ薄形化できるので、機器内部の回路に多く用いられる。   Among these, the coaxial line is used in a resonator that requires relatively long transmission and sharp resonance characteristics because of its low loss. On the other hand, the strip line and the microstrip line can be easily manufactured in combination with other circuit elements and can be thinned, so that they are often used for circuits inside devices.

しかし、ストリップ線路およびマイクロストリップ線路は、上述の利点はあるものの、電流が線路の両端部に集中してしまい、導体抵抗による伝送損失が比較的大きいという欠点がある。このため、機器内部での短い伝送には問題はないが、受信機の入力段や、鋭い共振が必要な共振器など、僅かな損失も許容できない用途には向かないという問題点があった。
特開平5−283911号公報
However, although the strip line and the microstrip line have the above-mentioned advantages, the current is concentrated at both ends of the line, and there is a disadvantage that the transmission loss due to the conductor resistance is relatively large. For this reason, there is no problem with short transmission inside the device, but there is a problem that it is not suitable for applications where a slight loss is not allowed, such as an input stage of a receiver or a resonator that requires sharp resonance.
JP-A-5-283911

本発明の課題は、導体抵抗による伝送損失を低減させ、受信機の入力段や、鋭い共振が必要な共振器など、僅かな損失も許容できない用途においても、十分に使用できる信号伝送線路、及び、それを用いた電子部品、更にはそのための製造方法を提供することである。   An object of the present invention is to reduce a transmission loss due to a conductor resistance, and a signal transmission line that can be sufficiently used even in an application where a slight loss is not allowed, such as an input stage of a receiver or a resonator that requires sharp resonance, and An electronic component using the same, and a manufacturing method therefor are also provided.

上述した課題を解決するため、本発明に係る伝送線路は、誘電体基体と、接地導体と、信号線とを含む。前記接地導体は、前記誘電体基体に設けられている。前記信号線は、導体膜で構成され、前記誘電体基体に設けられ、前記接地導体と平行して延び、導体幅が、幅方向の両端において、段階的に変化する。   In order to solve the above-described problem, a transmission line according to the present invention includes a dielectric substrate, a ground conductor, and a signal line. The ground conductor is provided on the dielectric substrate. The signal line is formed of a conductor film, is provided on the dielectric substrate, extends in parallel with the ground conductor, and the conductor width changes stepwise at both ends in the width direction.

上述したように、本発明に係る伝送線路では、接地導体が、誘電体基体に設けられており、信号線も誘電体基体に設けられ、接地導体と平行して延びているから、ストリップ線路またはたマイクロストリップ線路として機能する。   As described above, in the transmission line according to the present invention, the ground conductor is provided on the dielectric base, and the signal line is also provided on the dielectric base and extends in parallel with the ground conductor. It functions as a microstrip line.

上記ストリップ線路またはたマイクロストリップ線路において、信号線は、導体膜で構成され、導体幅が、幅方向の両端において、段階的に変化するから、線路の両端部における電流集中を回避し、電流集中による導体抵抗の増大と、それに伴う伝送損失の増大とを回避し得る。このため、受信機の入力段や、鋭い共振が必要な共振器など、僅かな損失も許容できない用途において有用な信号伝送線路を得ることができる。   In the strip line or the microstrip line, the signal line is composed of a conductor film, and the conductor width changes stepwise at both ends in the width direction, so that current concentration at both ends of the line is avoided and current concentration is avoided. It is possible to avoid an increase in the conductor resistance due to, and an increase in transmission loss associated therewith. For this reason, it is possible to obtain a signal transmission line that is useful in applications that cannot tolerate a slight loss, such as an input stage of a receiver or a resonator that requires sharp resonance.

一つの具体的態様として、信号線は、複数の導体膜を積層して構成できる。この場合、各層の導体膜は、幅方向の両端において、導体幅が段階的に変化するように構成する。   As one specific aspect, the signal line can be formed by laminating a plurality of conductor films. In this case, the conductor film of each layer is configured such that the conductor width changes stepwise at both ends in the width direction.

複数の導体膜のうち、最外側の導体膜が最大幅を持ち、他の導体膜は、前記最外側の導体膜の一面側に積層されていてもよい。この場合は、更に、最外側の導体膜は、表面が外部に露出し、他の導体膜は、誘電体基体の内部に埋設されている構造を採用することができる。   Of the plurality of conductor films, the outermost conductor film may have the maximum width, and the other conductor film may be laminated on one surface side of the outermost conductor film. In this case, it is possible to adopt a structure in which the outermost conductor film has a surface exposed to the outside and the other conductor film is embedded in the dielectric substrate.

別の態様として、複数の導体膜のうち、中間の導体膜が最大幅をもち、他の導体膜は、中間の導体膜の両面に積層されていてもよい。この場合は、複数の導体膜は誘電体基体の内部に埋設されていることが好ましい。   As another aspect, among the plurality of conductor films, the intermediate conductor film may have the maximum width, and the other conductor films may be laminated on both surfaces of the intermediate conductor film. In this case, the plurality of conductor films are preferably embedded in the dielectric substrate.

本発明に係る伝送線路は、それ自体、独立して用いることができるほか、高周波電子部品の回路要素として用いることもできる。電子部品の具体例としては、共振器、フィルタまたはカプラ等をあげることができる。伝送線路は、これらの電子部品の内部では、インダクタンス成分として用いられる。そして、これらの電子部品に通常備えられるキャパシタ成分とともに、LC回路を構成する。   The transmission line according to the present invention can itself be used independently, and can also be used as a circuit element of a high-frequency electronic component. Specific examples of the electronic component include a resonator, a filter, and a coupler. The transmission line is used as an inductance component inside these electronic components. And LC circuit is comprised with the capacitor component normally equipped in these electronic components.

本発明は、更に、上述した信号伝送線路の製造方法を開示する。この製造方法においては、まず、誘電体グリーンシートに予め形成されたスリットに、導電性シートから切り取られた導電片を嵌め込んで複合シートを製造する。この場合、複合シートは、前記スリット及び導電片の幅を段階的に異ならせた複数種のものを準備する。   The present invention further discloses a method for manufacturing the above-described signal transmission line. In this manufacturing method, first, a composite sheet is manufactured by fitting a conductive piece cut from a conductive sheet into a slit formed in advance in a dielectric green sheet. In this case, multiple types of composite sheets are prepared in which the widths of the slits and the conductive pieces are varied stepwise.

次に、上述した複合シートの複数枚を、前記導電片の重なりによる導体幅が、幅方向の両端において段階的に変化する関係で積層し、焼成する。上述した工程を含むことにより、本発明に係る信号伝送線路を容易に得ることができる。この製造方法は、共振器、フィルタまたはカプラ等の製造に当たっても適用できる。   Next, a plurality of the composite sheets described above are laminated and fired so that the conductor width due to the overlapping of the conductive pieces changes stepwise at both ends in the width direction. By including the steps described above, the signal transmission line according to the present invention can be easily obtained. This manufacturing method can also be applied to manufacturing resonators, filters, couplers, and the like.

以上説明した本発明に係る伝送線路は次のような効果がある。
(1)線路の両端部に集中する高周波電流を分散させて、伝送損失を軽減させることができる。
(2)このため本発明の伝送線を使用した電子デバイスは損失特性が改善される。
(3)本発明の信号伝送線路を用いて共振器を形成した場合、共振特性が鋭くなり、より大きな共振器、ないしは同軸線路による共振器を使用するべき用途にも適応できる。
The transmission line according to the present invention described above has the following effects.
(1) Transmission loss can be reduced by dispersing high-frequency current concentrated on both ends of the line.
(2) Therefore, the electronic device using the transmission line of the present invention has improved loss characteristics.
(3) When a resonator is formed using the signal transmission line of the present invention, the resonance characteristic becomes sharp, and it can be applied to an application where a larger resonator or a resonator using a coaxial line should be used.

本発明の他の特徴及びそれによる作用効果は、添付図面を参照し、実施例によって更に詳しく説明する。   Other features of the present invention and the operational effects thereof will be described in more detail by way of examples with reference to the accompanying drawings.

図1は本発明に係る信号伝送線路の断面図を示している。図示された伝送線路は、誘電体基体1と、接地導体3と、信号線2とを含む。誘電体基体1は、セラミック誘電体を用いることができるほか、有機誘電体を用いることもできる。図示の誘電体基体1は、板状などに成形されている。接地導体3は、誘電体基体1に設けられている。図では、接地導体3は、誘電体基体1の一面上に広く拡がっている。   FIG. 1 shows a cross-sectional view of a signal transmission line according to the present invention. The illustrated transmission line includes a dielectric substrate 1, a ground conductor 3, and a signal line 2. The dielectric substrate 1 can be a ceramic dielectric or an organic dielectric. The illustrated dielectric substrate 1 is formed into a plate shape or the like. The ground conductor 3 is provided on the dielectric substrate 1. In the figure, the grounding conductor 3 extends widely on one surface of the dielectric substrate 1.

信号線2は、導体膜で構成され、誘電体基体1に設けられ、接地導体3と平行して延び、導体幅が、幅方向の両端において、段階的に変化する。即ち、膜厚方向でみて、導体幅が、幅W1,W2,W3のように、段階的に変化する。   The signal line 2 is formed of a conductor film, is provided on the dielectric substrate 1, extends in parallel with the ground conductor 3, and the conductor width changes stepwise at both ends in the width direction. That is, when viewed in the film thickness direction, the conductor width changes stepwise like the widths W1, W2, and W3.

上述したように、本発明に係る伝送線路では、接地導体3が、誘電体基体1に設けられ、信号線2も誘電体基体1に設けられ、接地導体3と平行して延びているから、マイクロストリップ線路として機能する。   As described above, in the transmission line according to the present invention, the ground conductor 3 is provided on the dielectric base 1, and the signal line 2 is also provided on the dielectric base 1, and extends in parallel with the ground conductor 3. Functions as a microstrip line.

上記マイクロストリップ線路において、信号線2は、導体膜で構成され、導体幅が、幅方向の両端において、幅W1,W2,W3のように、段階的に変化するから、線路の両端部における電流集中を回避し、電流集中による導体抵抗の増大と、それに伴う伝送損失の増大とを回避し得る。このため、受信機の入力段や、鋭い共振が必要な共振器など、僅かな損失も許容できない用途において有用な信号伝送線路を得ることができる。   In the microstrip line, the signal line 2 is composed of a conductor film, and the conductor width changes stepwise at both ends in the width direction, such as the widths W1, W2, and W3. Concentration can be avoided, and increase in conductor resistance due to current concentration and accompanying increase in transmission loss can be avoided. For this reason, it is possible to obtain a signal transmission line that is useful in applications that cannot tolerate a slight loss, such as an input stage of a receiver or a resonator that requires sharp resonance.

図示の信号線2は、複数(3層)の導体膜21〜23を積層して構成されている。導体膜21〜23の層数は任意である。各層の導体膜21〜23は、幅方向の両端において、導体幅が、その膜厚の変化につれて、幅W1,W2,W3のように、段階的に変化する。図示の実施例では、導体膜21〜23のうち、最外側の導体膜23が最大幅W3(>W2>W1)を持ち、他の導体膜21、22は、最外側の導体膜23の一面側に積層されている。導体膜21〜23は、誘電体基体1の内部に埋設されており、最外側の導体膜23は、誘電体基体1の接地導体3を設けた面とは反対側の面と同一の平面を構成し、表面が外部に露出している。   The illustrated signal line 2 is configured by laminating a plurality (three layers) of conductor films 21 to 23. The number of layers of the conductor films 21 to 23 is arbitrary. As for the conductor films 21 to 23 of each layer, the conductor width changes stepwise at both ends in the width direction as widths W1, W2, and W3 as the film thickness changes. In the illustrated embodiment, of the conductor films 21 to 23, the outermost conductor film 23 has the maximum width W3 (> W2> W1), and the other conductor films 21 and 22 are one surface of the outermost conductor film 23. Laminated on the side. The conductor films 21 to 23 are embedded in the dielectric substrate 1, and the outermost conductor film 23 has the same plane as the surface opposite to the surface on which the ground conductor 3 of the dielectric substrate 1 is provided. Configured and the surface is exposed to the outside.

図2は本発明に係る信号伝送線路の別の実施例を示す断面図である。図において、図1に現れた構成部分に相当する部分については、同一の参照符号を付し、重複説明は省略する。この実施例では、最外側の導体膜23が、誘電体基体1の接地導体3を設けた面とは反対側の面の上に付着して設けられ、表面が外部に露出している。したがって、この実施例でも、接地導体3が、誘電体基体1に設けられ、信号線2も誘電体基体1に設けられ、接地導体3と平行して延びているから、マイクロストリップ線路として機能する。   FIG. 2 is a sectional view showing another embodiment of the signal transmission line according to the present invention. In the figure, parts corresponding to the constituent parts appearing in FIG. In this embodiment, the outermost conductor film 23 is provided on the surface of the dielectric substrate 1 opposite to the surface on which the ground conductor 3 is provided, and the surface is exposed to the outside. Therefore, also in this embodiment, the ground conductor 3 is provided on the dielectric substrate 1 and the signal line 2 is also provided on the dielectric substrate 1 and extends in parallel with the ground conductor 3, so that it functions as a microstrip line. .

図3は本発明に係る信号伝送線路の更に別の実施例を示す断面図である。図において、図1に現れた構成部分に相当する部分については、同一の参照符号を付し、重複説明は省略する。この実施例では、複数(5層)の導体膜21〜25を有しており、そのうち、中間の導体膜23が最大幅W3(>W2>W1)を持っている。他の導体膜21、22、24、25は、中間の導体膜23の両面に積層されている。これらの導体膜21〜25は誘電体基体1の内部に埋設されている。更に、誘電体基体1の厚み方向の両面に、接地導体31、32を設けてある。この実施例では、接地導体31、32が誘電体基体1の厚み方向の両面に設けられ、信号線2は誘電体基体1の厚み方向の略中間に埋没して設けられ、接地導体31、32と平行して延びているから、ストリップ線路として機能する。   FIG. 3 is a sectional view showing still another embodiment of the signal transmission line according to the present invention. In the figure, parts corresponding to the constituent parts appearing in FIG. In this embodiment, a plurality of (five layers) conductor films 21 to 25 are provided, and the intermediate conductor film 23 has the maximum width W3 (> W2> W1). The other conductor films 21, 22, 24 and 25 are laminated on both surfaces of the intermediate conductor film 23. These conductor films 21 to 25 are embedded in the dielectric substrate 1. Furthermore, ground conductors 31 and 32 are provided on both surfaces of the dielectric substrate 1 in the thickness direction. In this embodiment, the ground conductors 31 and 32 are provided on both surfaces in the thickness direction of the dielectric substrate 1, and the signal line 2 is provided so as to be buried substantially in the middle of the dielectric substrate 1 in the thickness direction. It functions as a strip line.

また、図2及び図3に示した実施例の場合も、信号線2は、導体膜で構成され、導体幅が、幅方向の両端において、幅W1,W2,W3のように、段階的に変化するから、線路の両端部における電流集中を回避し、電流集中による導体抵抗の増大と、それに伴う伝送損失の増大とを回避し得る。   In the case of the embodiment shown in FIGS. 2 and 3, the signal line 2 is formed of a conductor film, and the conductor width is stepwise like widths W1, W2, and W3 at both ends in the width direction. Therefore, current concentration at both ends of the line can be avoided, and increase in conductor resistance due to current concentration and accompanying increase in transmission loss can be avoided.

次に、図4及び図5を参照し、本発明に係る信号伝送線路の製造方法を説明する。この製造方法においては、まず、図4のステップA1,A2に示すように、誘電体グリーンシートに予め形成されたスリットを形成する。具体的には、ステップA1に示すように、誘電体ペーストをドクターブレード法などによって、支持体の上に均一厚みとなるように塗布し、かつ、乾燥させて、グリーンシート101を形成する。使用される誘電体材料は一般的な高周波用の誘電体で、Q値が高く、温度特性の良好なものであれば特に限定はない。もっとも、電極を形成する導体と同時焼成するために、導体材料と同程度の温度で焼結が可能なものであることが好ましい。   Next, with reference to FIG.4 and FIG.5, the manufacturing method of the signal transmission line which concerns on this invention is demonstrated. In this manufacturing method, first, a slit formed in advance in a dielectric green sheet is formed as shown in steps A1 and A2 of FIG. Specifically, as shown in step A1, a dielectric paste is applied on the support so as to have a uniform thickness by a doctor blade method or the like, and dried to form the green sheet 101. The dielectric material to be used is not particularly limited as long as it is a general high-frequency dielectric having a high Q value and good temperature characteristics. However, in order to co-fire with the conductor forming the electrode, it is preferable that sintering is possible at the same temperature as the conductor material.

次に、乾燥工程などの必要な工程を経た後、ステップA2に示すように、グリーンシート101にスリットSを入れる。   Next, after passing through necessary processes such as a drying process, a slit S is formed in the green sheet 101 as shown in Step A2.

他方、ステップB1に示すように、上記ステップA1、A2とは別工程で、支持体の上に電極ペーストを塗布し、かつ、乾燥させることにより、導電性シート200を形成する。   On the other hand, as shown in Step B1, the conductive sheet 200 is formed by applying an electrode paste on a support and drying it in a process separate from Steps A1 and A2.

電極ペーストに含まれる導電性材料は、一般的な高周波用のものであれば、特に限定はないが、収縮挙動が、誘電体シートと類似するものが好ましい。例えば、900℃程度で焼成可能な誘電体を用いればAg、Au、Cu、Ag-Pd等導電率の高い金属が使用できる。   The conductive material contained in the electrode paste is not particularly limited as long as it is a general high-frequency material, but preferably has a shrinkage behavior similar to that of the dielectric sheet. For example, if a dielectric that can be fired at about 900 ° C. is used, a metal having high conductivity such as Ag, Au, Cu, or Ag—Pd can be used.

次に、ステップB2に示すように、導電性シート200からスリットSと同形状の導電片201を切り取る。そして、ステップCに示すように、ステップA2で得られたグリーンシート101のスリットSに、導電性シート200から切り取られた導電片201を、嵌め込んで複合シートを製造する。この場合、複合シートは、スリットS及び導電片201の幅を段階的に異ならせた複数種のものを準備する。   Next, as shown in step B <b> 2, the conductive piece 201 having the same shape as the slit S is cut out from the conductive sheet 200. Then, as shown in Step C, a conductive sheet 201 cut from the conductive sheet 200 is fitted into the slit S of the green sheet 101 obtained in Step A2, and a composite sheet is manufactured. In this case, multiple types of composite sheets are prepared in which the widths of the slits S and the conductive pieces 201 are changed stepwise.

次に、図5に図示するように、上述の製造工程を経て得られた複数枚の複合シート101〜103を、導電片201〜203の重なりによる導体幅が、幅方向の両端において段階的に変化する関係で積層し、焼成する。複合シート101〜103は、接地導体300を予め付着させた誘電体基体100の一面上で積層する。   Next, as shown in FIG. 5, the composite widths 101 to 103 obtained through the above-described manufacturing steps are stepwise at the both ends in the width direction of the conductor width due to the overlapping of the conductive pieces 201 to 203. Laminated and fired in a changing relationship. The composite sheets 101 to 103 are laminated on one surface of the dielectric substrate 100 to which the ground conductor 300 is previously attached.

上述した工程によれば、本発明に係る信号伝送線路を容易に得ることができる。工法はグリーンシートを用いる工法ではなくても、印刷であってもよいし、また樹脂による多層基板であってもよい。   According to the steps described above, the signal transmission line according to the present invention can be easily obtained. The construction method may not be a construction method using a green sheet, but may be printing or a multilayer substrate made of resin.

本発明に係る伝送線路は、それ自体、独立して用いることができるほか、高周波電子部品の回路要素として用いることもできる。電子部品の具体例としては、共振器、フィルタまたはカプラ等を上げることができる。伝送線路は、これらの電子部品の内部では、インダクタンス成分として用いられる。そして、これらの電子部品に通常備えられるキャパシタ成分とともに、LC回路を構成する。   The transmission line according to the present invention can be used independently, and can also be used as a circuit element of a high-frequency electronic component. Specific examples of the electronic component include a resonator, a filter, a coupler, and the like. The transmission line is used as an inductance component inside these electronic components. And LC circuit is comprised with the capacitor component normally equipped in these electronic components.

図6は本発明に係る電子部品の一例を示す分解斜視図、図7は図6に示した電子部品の外観斜視図、図8は図6及び図7に示した電子部品の等価的電気回路図である。この電子部品は、フィルタとして用いられる。まず、図6を参照すると、接地導体31を形成した誘電体層111の上に、信号伝送線路211、212を有する誘電体層112、信号伝送線路213、214を有する誘電体層113、信号伝送線路215、216を有する誘電体層114、信号伝送線路217、218を有する誘電体層115及び信号伝送線路219、220を有する誘電体層116が、順次に積層されている。   6 is an exploded perspective view showing an example of the electronic component according to the present invention, FIG. 7 is an external perspective view of the electronic component shown in FIG. 6, and FIG. 8 is an equivalent electric circuit of the electronic component shown in FIGS. FIG. This electronic component is used as a filter. First, referring to FIG. 6, a dielectric layer 112 having signal transmission lines 211 and 212, a dielectric layer 113 having signal transmission lines 213 and 214, a signal transmission, on the dielectric layer 111 on which the ground conductor 31 is formed. A dielectric layer 114 having lines 215 and 216, a dielectric layer 115 having signal transmission lines 217 and 218, and a dielectric layer 116 having signal transmission lines 219 and 220 are sequentially laminated.

信号伝送線路211、212、信号伝送線路213、214、信号伝送線路215、216、信号伝送線路217、218及び信号伝送線路219、220は、図8のインダクタ成分L1,L2を構成するもので、中間の信号伝送線路215、216が最大幅を持っている。信号伝送線路211、212、信号伝送線路213、214、信号伝送線路217、218及び信号伝送線路219、220は、導体幅が、幅方向の両端において段階的に変化するように、信号伝送線路215、216の両面に順次に積層され、単一の信号伝送線路を構成する。従って、線路の両端部における電流集中を回避し、電流集中による導体抵抗の増大と、それに伴う伝送損失の増大とを回避し得る。   The signal transmission lines 211 and 212, the signal transmission lines 213 and 214, the signal transmission lines 215 and 216, the signal transmission lines 217 and 218, and the signal transmission lines 219 and 220 constitute the inductor components L1 and L2 in FIG. The intermediate signal transmission lines 215 and 216 have the maximum width. The signal transmission lines 211 and 212, the signal transmission lines 213 and 214, the signal transmission lines 217 and 218, and the signal transmission lines 219 and 220 have a signal transmission line 215 such that the conductor width changes stepwise at both ends in the width direction. 216 are sequentially laminated on both surfaces of 216 to form a single signal transmission line. Therefore, current concentration at both ends of the line can be avoided, and increase in conductor resistance due to current concentration and accompanying increase in transmission loss can be avoided.

誘電体層116の上には、減衰極形成用導体227を有する誘電体層117、キャパシタ電極228、229を有する誘電体層118、キャパシタ電極230、231を有する誘電体層119、接地導体32を有する誘電体層120、更には、保護層121が、この順序で、順次に積層されている。   On the dielectric layer 116, a dielectric layer 117 having an attenuation pole forming conductor 227, a dielectric layer 118 having capacitor electrodes 228 and 229, a dielectric layer 119 having capacitor electrodes 230 and 231 and a ground conductor 32 are provided. The dielectric layer 120 and further the protective layer 121 are sequentially stacked in this order.

誘電体層116に設けられた信号伝送線219、220は、ビアホール221〜226によって、誘電体層119に設けられたキャパシタ電極230、231に電気的に接続される。   The signal transmission lines 219 and 220 provided in the dielectric layer 116 are electrically connected to the capacitor electrodes 230 and 231 provided in the dielectric layer 119 through via holes 221 to 226.

キャパシタ電極228、229の一端は、それぞれ、入出力端子T1、T2(図7、図8参照)に接続され、接地導体31、32は、接地端子GND1,GND2に接続される。これにより、図8に示す回路構成を持つフィルタが得られる。   One ends of the capacitor electrodes 228 and 229 are connected to the input / output terminals T1 and T2 (see FIGS. 7 and 8), respectively, and the ground conductors 31 and 32 are connected to the ground terminals GND1 and GND2. Thereby, a filter having the circuit configuration shown in FIG. 8 is obtained.

但し、本発明に係る信号伝送線路は、図5〜図7に示したフィルタにのみ適用されるものではなく、他の構成を持つフィルタ、カプラ、共振器、デュプレクサなどにも、広く適用できるものである。   However, the signal transmission line according to the present invention is not only applied to the filters shown in FIGS. 5 to 7, but can be widely applied to filters, couplers, resonators, duplexers, and the like having other configurations. It is.

次に、本発明の具体的実施例を示す。   Next, specific examples of the present invention will be described.

実施例の試料として、図6、図7に示す構成のチップ型フィルタを、図4、図5に図示したシート工法により作製した。得られたフィルタの形状は2.0mm×1.2mm×1.0mmであり、使用した誘電体は誘電率εr=6である。使用した誘電体はアルミナ、バリウム、シリカを主成分とし、誘電率εr=6の誘電体シートを準備して、その伝送線路に該当する部分のみ、誘電体を除去し、除去跡に導体のシートをはめ込み、後は通常のシートと同様に必要に応じてビアホール用の孔を穿孔し、導体を適用し、積層した。ビアホールや各導体及び電極を形成する導電性材料はAgを使用した。伝送線路を形成するグリーンシートの厚さは各々40μmである。   As a sample of the example, a chip type filter having the configuration shown in FIGS. 6 and 7 was produced by the sheet method shown in FIGS. 4 and 5. The shape of the obtained filter is 2.0 mm × 1.2 mm × 1.0 mm, and the dielectric used has a dielectric constant εr = 6. The dielectric used is a dielectric sheet with alumina, barium, and silica as the main components and a dielectric constant εr = 6. The dielectric is removed only from the portion corresponding to the transmission line, and the conductor sheet is removed on the trace. After that, a hole for a via hole was drilled as necessary in the same manner as a normal sheet, and a conductor was applied and laminated. Ag was used as the conductive material for forming the via hole, each conductor, and the electrode. Each of the green sheets forming the transmission line has a thickness of 40 μm.

比較例は、帯域や中心周波数が同じになるようにするため、伝送線路以外の導電パターンは僅かに形状を変えたが、伝送線路部分以外は、実施例と同一の構造である。   In the comparative example, the conductive pattern other than the transmission line is slightly changed in shape so that the band and the center frequency are the same, but the structure is the same as that of the example except for the transmission line portion.

図9に実施例及び比較例の電気的特性を示す。図9において、横軸は周波数(GHz)を示し、縦軸は減衰量(dB)を示す。曲線L1が実施例の特性、曲線L2が比較例の特性をそれぞれ示している。   FIG. 9 shows the electrical characteristics of the examples and comparative examples. In FIG. 9, the horizontal axis represents frequency (GHz), and the vertical axis represents attenuation (dB). A curve L1 indicates the characteristics of the example, and a curve L2 indicates the characteristics of the comparative example.

特性L1及び特性L2の比較から明らかなように、実施例は、比較例よりも、挿入損失が0.06dB程度改善されている。   As is apparent from the comparison between the characteristics L1 and the characteristics L2, in the example, the insertion loss is improved by about 0.06 dB compared to the comparative example.

以上、好ましい実施例を参照して本発明の内容を具体的に説明したが、本発明の基本的技術思想及び教示に基づいて、当業者であれば、種々の変形態様を採り得ることは自明である。   Although the contents of the present invention have been specifically described above with reference to the preferred embodiments, it is obvious that those skilled in the art can take various modifications based on the basic technical idea and teachings of the present invention. It is.

本発明に係る信号伝送線路の断面図である。It is sectional drawing of the signal transmission line which concerns on this invention. 本発明に係る信号伝送線路の別の実施例を示す断面図である。It is sectional drawing which shows another Example of the signal transmission line which concerns on this invention. 本発明に係る信号伝送線路の別の実施例を示す断面図である。It is sectional drawing which shows another Example of the signal transmission line which concerns on this invention. 本発明に係る信号伝送線路の製造方法を説明する図である。It is a figure explaining the manufacturing method of the signal transmission line concerning the present invention. 図4に示した工程の後の工程を示す図である。It is a figure which shows the process after the process shown in FIG. 本発明に係る電子部品の一例を示す分解斜視図である。It is a disassembled perspective view which shows an example of the electronic component which concerns on this invention. 図6に示した電子部品の外観斜視図である。It is an external appearance perspective view of the electronic component shown in FIG. 図6及び図7に示した電子部品の等価的電気回路図である。FIG. 8 is an equivalent electric circuit diagram of the electronic component shown in FIGS. 6 and 7. フィルタの周波数―挿入損失特性データを示す図である。It is a figure which shows the frequency-insertion loss characteristic data of a filter.

符号の説明Explanation of symbols

1 誘電体基体
2 信号線
21〜23 導電膜
3 接地導体
1 Dielectric substrate
2 Signal lines 21-23 Conductive film
3 Grounding conductor

Claims (3)

インダクタンス成分と、キャパシタ成分とを含む電子部品であって、An electronic component including an inductance component and a capacitor component,
前記インダクタンス成分は、誘電体基体と、信号線とを含み、The inductance component includes a dielectric substrate and a signal line,
前記信号線は、複数の導体膜を積層して構成され、前記誘電体基体に設けられ、The signal line is configured by laminating a plurality of conductor films, provided on the dielectric substrate,
前記複数の導体膜は、幅方向の両端において、導体幅が膜厚の変化につれて階段状に段階的に変化しており、The plurality of conductor films, at both ends in the width direction, the conductor width changes stepwise as the film thickness changes,
前記キャパシタ成分は、誘電体基体に設けられたキャパシタ電極を有し、インダクタンス成分とともにLC回路を構成しており、The capacitor component has a capacitor electrode provided on a dielectric substrate, and constitutes an LC circuit together with an inductance component,
前記キャパシタ電極を設けた前記誘電体基体は、前記インダクタンス成分を構成する前記誘電体基体に積層され、The dielectric substrate provided with the capacitor electrode is laminated on the dielectric substrate constituting the inductance component,
更に、前記信号線は、長さ方向の一端が、前記誘電体基体の端面に導出されて接地端子に接続され、長さ方向の他端が、前記誘電体基体を通るビアホールにより前記キャパシタ電極に接続されている、Further, one end of the signal line in the length direction is led out to an end face of the dielectric substrate and connected to a ground terminal, and the other end in the length direction is connected to the capacitor electrode by a via hole passing through the dielectric substrate. It is connected,
電子部品。Electronic components.
インダクタンス成分と、キャパシタ成分とを含む電子部品であって、An electronic component including an inductance component and a capacitor component,
前記インダクタンス成分は、誘電体基体と、信号線とを含み、The inductance component includes a dielectric substrate and a signal line,
前記信号線は、複数の導体膜を積層して構成され、前記誘電体基体に設けられ、The signal line is configured by laminating a plurality of conductor films, provided on the dielectric substrate,
前記複数の導体膜は、幅方向の両端において、導体幅が膜厚の変化につれて階段状に段階的に変化しており、The plurality of conductor films, at both ends in the width direction, the conductor width changes stepwise as the film thickness changes,
前記複数の導体膜のうち、積層方向で見て最外側の導体膜が最大幅を持ち、Of the plurality of conductor films, the outermost conductor film has a maximum width when viewed in the stacking direction,
前記キャパシタ成分は、誘電体基体に設けられたキャパシタ電極を有し、インダクタンス成分とともにLC回路を構成しており、The capacitor component has a capacitor electrode provided on a dielectric substrate, and constitutes an LC circuit together with an inductance component,
前記キャパシタ電極を設けた前記誘電体基体は、前記インダクタンス成分を構成する前記誘電体基体に積層され、The dielectric substrate provided with the capacitor electrode is laminated on the dielectric substrate constituting the inductance component,
更に、前記信号線は、長さ方向の一端が、前記誘電体基体の端面に導出されて接地端子に接続され、長さ方向の他端が、前記誘電体基体を通るビアホールにより前記キャパシタ電極に接続されている、Further, one end of the signal line in the length direction is led out to the end face of the dielectric substrate and connected to the ground terminal, and the other end in the length direction is connected to the capacitor electrode by a via hole passing through the dielectric substrate. It is connected,
電子部品。Electronic components.
インダクタンス成分と、キャパシタ成分とを含む電子部品であって、An electronic component including an inductance component and a capacitor component,
前記インダクタンス成分は、誘電体基体と、信号線とを含み、The inductance component includes a dielectric substrate and a signal line,
前記信号線は、複数の導体膜を積層して構成され、前記誘電体基体に設けられ、The signal line is configured by laminating a plurality of conductor films, provided on the dielectric substrate,
前記複数の導体膜は、幅方向の両端において、導体幅が膜厚の変化につれて階段状に段階的に変化しており、The plurality of conductor films, at both ends in the width direction, the conductor width changes stepwise as the film thickness changes,
前記複数の導体膜のうち、積層方向で見て中間の導体膜が最大幅をもち、他の導体膜は、前記中間の前記導体膜の両面に積層されており、Among the plurality of conductor films, an intermediate conductor film has a maximum width when viewed in the stacking direction, and the other conductor films are stacked on both surfaces of the intermediate conductor film,
前記キャパシタ成分は、誘電体基体に設けられたキャパシタ電極を有し、インダクタンス成分とともにLC回路を構成しており、The capacitor component has a capacitor electrode provided on a dielectric substrate, and constitutes an LC circuit together with an inductance component,
前記キャパシタ電極を設けた前記誘電体基体は、前記インダクタンス成分を構成する前記誘電体基体に積層され、The dielectric substrate provided with the capacitor electrode is laminated on the dielectric substrate constituting the inductance component,
更に、前記信号線は、長さ方向の一端が、前記誘電体基体の端面に導出されて接地端子に接続され、長さ方向の他端が、前記誘電体基体を通るビアホールにより前記キャパシタ電極に接続されている、Further, one end of the signal line in the length direction is led out to an end face of the dielectric substrate and connected to a ground terminal, and the other end in the length direction is connected to the capacitor electrode by a via hole passing through the dielectric substrate. It is connected,
電子部品。Electronic components.
JP2005031620A 2005-02-08 2005-02-08 Signal transmission line, electronic component, and method for manufacturing signal transmission line Expired - Fee Related JP4582311B2 (en)

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Publication number Priority date Publication date Assignee Title
JPH1098315A (en) * 1996-07-15 1998-04-14 Matsushita Electric Ind Co Ltd Dielectric laminated device, its manufacture and mobile communication equipment
JPH10290105A (en) * 1997-04-14 1998-10-27 Toshiba Corp High frequency wiring board
JP2004120294A (en) * 2002-09-26 2004-04-15 Kyocera Corp High frequency component

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1098315A (en) * 1996-07-15 1998-04-14 Matsushita Electric Ind Co Ltd Dielectric laminated device, its manufacture and mobile communication equipment
JPH10290105A (en) * 1997-04-14 1998-10-27 Toshiba Corp High frequency wiring board
JP2004120294A (en) * 2002-09-26 2004-04-15 Kyocera Corp High frequency component

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