JP4556692B2 - Electro-optical device manufacturing method and droplet discharge device - Google Patents

Description

  The present invention relates to a composition dot forming method for ejecting droplets from a nozzle opening to form a composition dot on a medium, an electro-optical device manufacturing method, and a droplet discharge device.

In recent years, the droplet discharge device has been used in various fields. For example, the droplet discharge device can apply various kinds of organic functional materials corresponding to each color on a substrate for an organic electroluminescence (EL / Electroluminescence) display device. After performing a droplet discharge step of discharging droplets of a liquid material for dot formation blended in an organic solvent into dots, by performing a heating step of evaporating the solvent by applying heat treatment to the droplets on the substrate, It has been proposed to form a light emitting layer of each color EL element in each pixel formation region on a substrate (see, for example, Patent Document 1).
JP 2003-229256 A

  However, the conventional manufacturing method has a problem in that the evaporation rate of the solvent from the droplets on the substrate varies during the heating process, and the thickness of the light emitting layer of the EL element varies within the pixel. That is, when the composition of the liquid material for forming dots corresponding to red (R), green (G), and blue (B) is different as in the technique disclosed in Patent Document 1, droplets of each color are placed on the substrate. In the case of batch heating after discharging, among the dot forming liquids corresponding to red (R), green (G), and blue (B), in the dot forming liquid using a solvent having a low boiling point, Since the evaporation rate of the solvent is too high, the film thickness of the light emitting layer varies within the pixel, and such variations cause luminance variations. Therefore, in the technique described in Patent Document 1, a droplet discharge process and a heating process are performed for each color, but such a method has a problem that productivity is poor. Further, even if the evaporation rate of the solvent of each droplet is the same, the heating conditions vary depending on the position on the substrate, whereby the evaporation rate of the solvent of the droplet varies depending on the position on the substrate, thereby The thickness may vary within the pixel.

  In view of the above problems, an object of the present invention is to discharge liquid droplets onto a medium and then dry the droplets in a stable state even when productivity is increased by heating. An object of the present invention is to provide a method for producing a composition that can be produced, a method for producing an electro-optical device employing this method, and a droplet discharge device.

In order to solve the above problems, an electro-optical device manufacturing method according to the present invention includes a droplet discharge step of discharging a droplet from a nozzle opening to each of a plurality of pixels, and drying the droplet to form the plurality of droplets. In the method of manufacturing an electro-optical device including a drying step of forming a pixel component in each pixel, the droplet discharge step includes droplets of a first liquid material containing a constituent material of the pixel component. A first liquid droplet ejecting step for ejecting each of the pixels; and a second liquid material liquid droplet for adjusting a drying speed of the first liquid material liquid droplets to each of the plurality of pixels. And a droplet discharge step.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein at least the first liquid material includes a constituent material of the composition, and the second liquid material is It is a liquid material having a boiling point higher than that of the first liquid material.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein the second liquid material has a higher boiling point than the solvent used in the first liquid material. It consists of a solvent.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, characterized in that the second liquid material contains an organic solvent having a boiling point of 200 ° C. or higher.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein the first liquid material is formed by dissolving or dispersing the composition in a solvent.
In order to solve the above problems, an electro-optical device manufacturing method according to the present invention includes a droplet discharge step of discharging a droplet from a nozzle opening to each of a plurality of pixels, and drying the droplet to form the plurality of droplets. In the method of manufacturing an electro-optical device having a drying process for forming a pixel component in each pixel, the droplet discharge process includes applying a first liquid droplet to the first pixel of the plurality of pixels. The step of discharging, the step of discharging a second liquid material having a composition different from that of the first liquid material to a second pixel different from the first pixel, and the drying speed of the first pixel are adjusted. And a step of discharging droplets of the third liquid material.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein the first liquid material has a higher drying speed than the second liquid material.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein the first liquid material has a boiling point lower than that of the second liquid material.
In order to solve the above problems, an electro-optical device manufacturing method according to the present invention includes a droplet discharge step of discharging a droplet from a nozzle opening to each of a plurality of pixels, and drying the droplet to form the plurality of droplets. In the method of manufacturing an electro-optical device including a drying step of forming a pixel component in each pixel, the droplet discharge step includes droplets of a first liquid material containing a constituent material of the pixel component. A first liquid droplet discharging step for discharging each of the pixels, and a second liquid droplet for adjusting a drying speed of the liquid droplet of the first liquid is discharged to a predetermined pixel among the plurality of pixels. And a second droplet discharge step, wherein in the drying step, a difference in drying speed between a pixel different from the predetermined pixel and the predetermined pixel is adjusted.
Further, the electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein the film thickness of each composition is measured after the heating step, and based on the measurement result of the film thickness. And determining at least one of a position and an amount of the liquid droplets to be ejected.
The electro-optical device manufacturing method of the present invention is the above-described electro-optical device manufacturing method, wherein the electro-optical device is an organic electroluminescent device, and the pixel component is an organic electroluminescent light emitting layer. It is characterized by being.
In order to solve the above problems, in the present invention, a composition having a droplet discharge step of discharging a droplet from a nozzle opening and a heating step of drying the droplet to form a composition on a medium. In the manufacturing method, the droplet discharging step includes a first droplet discharging step of discharging a first liquid droplet including the constituent material of the composition to a plurality of positions on the medium, and the first liquid. A second droplet discharge step for discharging a second liquid droplet for adjusting a drying speed of the first liquid droplet at the same position as each position where the droplet of the material is discharged. It is characterized by.

  In the present invention, after the droplets of the first liquid material are ejected onto the medium in the form of dots, when the composition dots are formed by collectively heating and drying the droplets, in the droplet ejection step, the composition of the composition A first droplet discharge step of discharging a first liquid droplet including a material to a plurality of positions on the medium; and the same position as each position where the first liquid droplet is discharged; In order to perform the second droplet discharge step of discharging the second liquid droplet for adjusting the drying speed of the first liquid droplet, the first liquid droplet is appropriately set during the heating process. Can be dried at a high speed. Therefore, variations in the film thickness of the composition can be prevented.

  In the present invention, in the second droplet discharge step, the second liquid droplet is discharged to the same position as a predetermined droplet discharge position among the first liquid droplets. You may adjust the drying rate difference of a predetermined droplet and another droplet. If comprised in this way, when performing a heating process, the difference (drying solvent difference) of the drying speed of each droplet can be compressed. Therefore, even when the productivity is increased by discharging the first liquid droplets onto the medium in the form of dots, the drying speed of each droplet is equal, so that the droplets are in a stable state. Can be dried. Therefore, it is possible to prevent the thickness variation in the dots in the composition dots.

  In the present invention, the first liquid material is formed, for example, by dissolving or dispersing the composition in a solvent. Especially in such a case, since the kind of solvent is restricted, it is preferable to adjust the drying speed with the second liquid material.

  In the present invention, it is possible to adopt a configuration in which at least the first liquid material includes a constituent material of the composition, and the second liquid material is a liquid material having a boiling point higher than that of the first liquid material. If comprised in this way, a drying rate can be adjusted by delaying the drying rate of a predetermined droplet.

  In the present invention, the second liquid material is preferably a high boiling point solvent having a higher boiling point than the solvent used in the first liquid material. With this configuration, even when the liquids for adjusting the drying speed are ejected to the same position on the medium with the liquid droplets of the plurality of types of dot forming liquids having different solutes, the liquids for adjusting the drying speed are common. Can be used.

  In the present invention, as the second liquid material, for example, a configuration containing an aromatic organic solvent having a boiling point of 200 ° C. or higher can be employed.

  In the present invention, in the first droplet discharge step, as the first liquid material, a plurality of types of first liquid materials having different compositions may be discharged to different positions on the medium. In the second droplet discharge step, the second liquid droplet is discharged to the same position as a predetermined first liquid droplet discharge position among the plurality of types of first liquid droplets. A configuration can be employed. In this case, in the second droplet discharging step, the second liquid material is discharged to the same position on the medium as the first liquid material having a high drying speed among the plurality of types of first liquid materials. To do. The second liquid material may be discharged to the same position on the medium as the first liquid material having a low boiling point among the plurality of types of first liquid materials. In general, a solvent having a lower boiling point has a higher evaporation rate. Therefore, in the second droplet discharge step, the liquid droplets of the first liquid material having a lower boiling point among the plurality of types of first liquid materials and the medium. The second liquid material may be discharged at the same position.

  In the present invention, after the heating step, the film thickness of each composition is measured, and thereafter, based on the measurement result of the film thickness, out of the position and amount to which the droplet of the second liquid material should be ejected A configuration for determining at least one of the above may be adopted. With this configuration, for example, even when the evaporation rate of the solvent of each droplet is the same, the heating conditions vary depending on the position on the substrate, so that the evaporation rate of the solvent of the droplet varies depending on the position on the substrate. Such variation can be eliminated by the liquid for adjusting the drying speed.

  The method for producing a composition according to the present invention can be applied to a method for producing an electro-optical device. In this case, the medium is a substrate for an electro-optical device, and a pixel component is formed as the composition. Here, the substrate for an electro-optical device is, for example, a substrate for an organic electroluminescence device, and an organic electroluminescence light emitting layer is formed as the composition.

  In the present invention, a liquid material storing part for storing a liquid material, a nozzle opening opened in a pressure generating chamber communicating with the liquid material storing part, and expanding and contracting the pressure generating chamber from the nozzle opening In a droplet discharge device having a droplet discharge mechanism including a pressure generating element that discharges a liquid droplet onto a medium, a plurality of first liquid droplets on the medium are used as the droplet discharge mechanism. A first liquid discharge mechanism that discharges to the position of the second liquid, and a liquid of the second liquid that adjusts the drying speed of the first liquid drop to the same position on the medium as the first liquid drop And a second droplet discharge mechanism for discharging droplets.

  In the present invention, the second droplet discharge mechanism discharges the second liquid droplet to the same position on the medium as a predetermined droplet among the droplets of the first liquid. Is preferred.

  In the present invention, the first droplet discharge mechanism may discharge a plurality of types of first liquid materials having different compositions as the first liquid material. In this case, the second droplet discharge mechanism may be discharged. May adopt a configuration in which droplets of the second liquid material are ejected to the same position on the medium as a predetermined first liquid material droplet among the plurality of types of first liquid materials.

  Hereinafter, an example of a droplet discharge device to which the present invention is applied will be described with reference to the drawings.

(Overall configuration of droplet discharge device)
FIG. 1 is a perspective view showing the overall configuration of a droplet discharge apparatus according to an embodiment of the present invention. Note that when color printing or a color display device is manufactured by a droplet discharge device, it is usually necessary to form three color R, G, and B picture elements. Accordingly, with regard to the droplet discharge device, one droplet can be configured to discharge droplets corresponding to each color or a plurality of droplets corresponding to a predetermined color will be prepared. Will be described as an example.

  In FIG. 1, a droplet discharge device 10 discharges various liquid materials in the form of dots as droplets at desired positions on a medium such as a substrate, and a nozzle that discharges liquid materials as droplets onto various media. A droplet discharge head 22 having an opening and a common carriage 26 that holds the droplet discharge head 22 are provided. The droplet discharge device 10 includes a head position control device 17 that controls the position of the droplet discharge head 22, a substrate position control device 18 that controls the position of the substrate 12 as a medium, and the droplet discharge head 22 as a substrate. A main scanning drive unit 19 as a main scanning driving unit for main scanning movement with respect to 12, a sub scanning driving unit 21 as a sub scanning driving unit for moving the droplet discharge head 22 with respect to the substrate 12, and a substrate 12 is provided with a substrate supply device 23 for supplying 12 to a predetermined work position in the droplet discharge device 10 and a control device 24 for controlling the droplet discharge device 10 in general. The position control device 18, the main scanning drive device 19, and the sub-scanning drive device 21 constitute moving means for relatively moving the droplet discharge head 22 (carriage 26) and the substrate 12. That. The head position control device 17, the substrate position control device 18, the main scanning drive device 19, and the sub-scanning drive device 21 are installed on the base 9, and each of these devices is covered with a cover 14 as necessary.

  The head position control device 17 includes an α motor (not shown) that rotates the droplet discharge head 22 in-plane, and a β motor that swings and rotates the droplet discharge head 22 about an axis parallel to the sub-scanning direction Y (see FIG. A γ motor (not shown) that swings and rotates the droplet discharge head 22 about an axis parallel to the main scanning direction, and a Z motor that translates the droplet discharge head 22 in the vertical direction (not shown). Not shown). The substrate position control device 18 includes a table 49 on which the substrate 12 is placed, and a θ motor (not shown) that rotates the table 49 in-plane. The main scanning drive device 19 includes an X guide rail 52 extending in the main scanning direction X, and an X slider 53 incorporating a pulse-driven linear motor. The X slider 53 translates in the main scanning direction along the X guide rail 52 when the built-in linear motor operates. The sub-scanning driving device 21 includes a Y guide rail (not shown) extending in the sub-scanning direction Y and a Y slider 56 incorporating a pulse-driven linear motor. The Y slider 56 translates in the sub-scanning direction Y along the Y guide rail when the built-in linear motor operates. The linear motor that is pulse-driven in the X slider 53 and the Y slider 56 can finely control the rotation angle of the output shaft by the pulse signal supplied to the motor. Therefore, the droplet supported by the X slider 53 The position of the ejection head 22 in the main scanning direction X and the position of the table 49 in the sub-scanning direction Y can be controlled with high definition. The position control of the droplet discharge head 22 and the table 49 is not limited to the position control using the pulse motor, and can be realized by feedback control using a servo motor or any other control method.

  The substrate supply device 23 includes a substrate accommodating portion 57 that accommodates the substrate 12 and a robot 58 that conveys the substrate 12. The robot 58 includes a base 59 placed on an installation surface such as a floor, the ground, a lift shaft 61 that moves up and down relative to the base 59, a first arm 62 that rotates about the lift shaft 61, and a first arm. A second arm 63 that rotates with respect to 62 and a suction pad 64 provided on the lower surface of the front end of the second arm 63 are provided. The suction pad 64 can suck the substrate 12 by air suction or the like.

  A head camera 79 that moves integrally with the droplet discharge head 22 is disposed in the vicinity of the droplet discharge head 22. A support device (not shown) provided on the base 9 is provided with a substrate camera (not shown), and the substrate camera can photograph the substrate 12.

  Here, a capping mechanism 76 and a cleaning mechanism 77 are arranged under the trajectory of the droplet discharge head 22 that is driven by the main scanning driving device 19 and moves in the main scanning direction, at one side of the sub-scanning driving device 21. The capping mechanism 76 is a mechanism for preventing the nozzle from drying when the droplet discharge head 22 is in a standby state. The cleaning mechanism 77 is a mechanism for cleaning the droplet discharge head 22. In addition, an electronic balance 78 for measuring the weight of droplets ejected from the individual nozzles 27 in the droplet ejection head 22 is disposed at the other side position of the sub-scanning drive device 21.

(Configuration of droplet discharge head)
2A and 2B are explanatory views showing the configuration of the droplet discharge head 22, respectively. 3A, 3 </ b> B, and 3 </ b> C are explanatory diagrams schematically showing the internal structure of the droplet discharge head 22, explanatory diagrams of a pressure generating element in a bending vibration mode, and pressure generation in a longitudinal vibration mode, respectively. It is explanatory drawing of an element.

  As shown in FIG. 2A, the droplet discharge head 22 is connected to a liquid material storage unit 37 such as a tank shape or a cartridge shape for storing the liquid material M to be discharged as droplets. The droplet discharge head 22 includes a nozzle row 28 formed by arranging a large number of nozzle openings 27 in a row. The number of nozzle openings 27 is, for example, 180, the hole diameter of the nozzle openings 27 is, for example, 28 μm, and the nozzle pitch between the nozzle openings 27 is, for example, 141 μm. The main scanning direction X of the droplet discharge head 22 with respect to the substrate 12 and the sub-scanning direction Y orthogonal thereto are as illustrated. That is, the droplet discharge head 22 is positioned so that the nozzle row 28 extends in a direction intersecting with the main scanning direction X, and the liquid material is transferred to the plurality of nozzle openings 27 while moving in parallel in the main scanning direction X. The liquid droplets are made to land at a predetermined position in the substrate 12 by selectively ejecting them. Further, the droplet discharge head 22 can be moved in parallel in the sub-scanning direction Y by a predetermined distance, so that the main scanning position by the droplet discharge head 22 can be shifted at a predetermined interval.

  As shown in FIGS. 3A and 3B, the droplet discharge head 22 includes, for example, a stainless steel nozzle plate 29, an elastic plate 31 facing the nozzle plate 29, and a plurality of partition members 32 that join them together. have. A plurality of pressure generating chambers 33 and a liquid reservoir 34 are formed between the nozzle plate 29 and the elastic plate 31 by the partition member 32, and the plurality of pressure generating chambers 33 and the liquid reservoir 34 are connected via a liquid flow inlet 38. Communicate with each other. A liquid material supply hole 36 is formed at an appropriate position of the elastic plate 31, and a liquid material storage part 37 is connected to the liquid material supply hole 36. Accordingly, the liquid material storage unit 37 supplies the liquid material M to be discharged to the liquid material supply hole 36. The supplied liquid material M fills the liquid reservoir 34, and further fills the pressure generating chamber 33 through the liquid flow inlet 38. In this way, the liquid material storage portion 37 and each pressure generating chamber 33 communicate with each other.

  The nozzle plate 29 is provided with a nozzle opening 27 for ejecting the liquid M from the pressure generating chamber 33 as a droplet M0, and the nozzle forming surface 271 where the nozzle opening 27 is open is a flat surface. ing. In this way, the nozzle opening 27 is opened in the pressure generating chamber 33. A pressure generating element 39 is attached to the back surface of the surface of the elastic plate 31 forming the pressure generating chamber 33 so as to correspond to the pressure generating chamber 33. For example, as shown in FIG. 3B, the pressure generating element 39 is a piezoelectric element in a flexural vibration mode including a piezoelectric element 41 and a pair of electrodes 42 a and 42 b that sandwich the piezoelectric element 41. The vibration direction is indicated by an arrow C. As shown in FIG. 3C, the pressure generating element 39 may be a longitudinal vibration mode piezoelectric element. This longitudinal vibration mode piezoelectric element (pressure generating element 39) is configured by alternately laminating piezoelectric materials and conductive materials in parallel to the extension direction, with the tip fixed to the elastic plate 31 and the other end based on the base. It is fixed to the base 20. Such a pressure generating element 39 contracts in a direction perpendicular to the stacking direction of the conductive layers in a charged state, and extends in a direction perpendicular to the conductive layer when the charged state is released.

  When any piezoelectric element is used, it is deformed by a drive signal applied between the electrodes, and the pressure generating chamber 33 is expanded and contracted. In addition, a liquid repellent layer 43 made of, for example, a Ni-tetrafluoroethylene eutectoid plating layer is provided around the nozzle opening 27 in order to prevent the flying of the droplet M0 and the clogging of the nozzle opening 27. It is done.

(Configuration of control system and drive system)
FIG. 4 is a block diagram showing a control system of the droplet discharge device shown in FIG. 5 and 6 are an explanatory diagram showing an electrical configuration of a head drive unit of a droplet discharge head used in the droplet discharge apparatus shown in FIG. 1 and an explanatory diagram of elements constituting the head drive unit. In the example shown in FIG. 4, an example in which the control system is configured on the computer main body side is shown, but a part of the control system may be configured on the droplet discharge device main body side.

  The control device 24 shown in FIG. 1 has a computer main body 66 containing a processor, a keyboard as an input device 67, and a CRT display 68 as a display device. As shown in FIG. 4, the processor includes a CPU (Central Processing Unit / head control means) 69 that performs processing such as computation, and a memory that stores various information, that is, an information storage medium 71. The head position control device 17, the substrate position control device 18, the main scanning drive device 19, the sub-scanning drive device 21, and the pressure generating element 39 (see FIGS. 3B and 3B) in the droplet discharge head 22. The head driving unit 8 or the like for driving (see C) is connected to the CPU 69 via the input / output interface 73 and the bus 74.

  The head drive unit 8 operates the pressure generating element 39 based on a predetermined bitmap in conjunction with the relative movement of the plurality of droplet discharge heads 22 and the display device substrate 12, and each of the droplet discharge heads 22. A droplet is ejected from the nozzle opening 27 to draw a predetermined pattern on the display device substrate 12. The substrate supply device 23, the input device 67, the CRT display 68, the electronic balance 78, the cleaning device 77 and the capping device 76 are also connected to the CPU 69 via the input / output interface 73 and the bus 74.

  The memory as the information storage medium 71 is a concept including a semiconductor memory such as a RAM (Random Access Memory) and a ROM (Read Only Memory) and an external storage device such as a hard disk, a CD-ROM reader, and a disk storage medium. Yes, functionally, a storage area for storing program software in which a procedure for controlling the operation of the droplet discharge device 10 is described, and a discharge position (bitmap) of the liquid material on the display device substrate 12 is stored as coordinate data. Various storage such as a bitmap storage area for storage, a storage area for storing the sub-scan movement amount of the display device substrate 12 in the sub-scanning direction Y, a work area for the CPU 69, an area that functions as a temporary file, etc. The area is set.

  The CPU 69 performs control for discharging the liquid material to a predetermined position on the surface of the display device substrate 12 in accordance with program software stored in a memory which is the information storage medium 71. As a specific function realization unit, a cleaning calculation unit that performs a calculation for realizing a cleaning process, a capping calculation unit for realizing a capping process, and a weight measurement that performs a calculation for realizing a weight measurement using an electronic balance A calculation unit, a drawing calculation unit that performs a calculation for drawing a predetermined pattern by droplet discharge, and the like are provided. If this drawing calculation unit is divided in detail, the drawing start position calculation unit for setting the droplet discharge head 22 to the initial position for drawing and the droplet discharge head 22 are scanned and moved in the main scanning direction X at a predetermined speed. A main scanning control calculating unit that calculates control for causing the display device substrate 12 to calculate, a sub-scanning control calculating unit that calculates control for shifting the display device substrate 12 in the sub-scanning direction Y by a predetermined sub-scanning amount, and a droplet discharge head Various functional calculations such as a bitmap calculation unit (nozzle discharge control calculation unit) that performs a calculation for forming a bitmap to control which of the plurality of nozzle openings 27 is operated to discharge the liquid material Has a part.

  As shown in FIG. 5, the head drive unit 8 is driven based on a power supply generation unit 87 that generates a predetermined power supply, a control signal output from the computer main unit 66, and a power supply supplied from the power supply generation unit 87. And a drive signal generating circuit 88 (drive signal generating means) for generating the signal COM. The head driving unit 8 includes a shift register 80, a latch circuit 81, a level shifter 82, and a switch circuit 84, and the pressure generating element 22 is connected to the switch circuit 84. Here, the shift register 80, the latch circuit 81, the level shifter 82, the switch circuit 83, and the pressure generating element 39 are each provided for each nozzle opening 27 of the droplet discharge head 22, as shown in FIG. 80A to 80N, latch elements 81A to 81N, level shifter elements 82A to 82N, switch elements 83A to 83N, and pressure generating elements 39A to 39N. Shift register 80, latch circuit 81, level shifter 82, switch circuit 83, pressure generating element They are electrically connected in the order of 39.

  A description will be given of the control for applying the drive signal COM to the pressure generating element 39 and ejecting the droplets by the head driving unit 8 as described above. In the following description, the case where the ejection data (corresponding to one dot data) constituting the dot pattern data is composed of a plurality of bits will be described. First, the head drive unit 8 synchronizes with a clock signal (CLK) from an oscillation circuit (not shown) of the computer main unit 66 and outputs the highest data among the ejection data (SI) output from the computer main unit 66. Bit data is sequentially set in the shift register elements 80A to 80N. When the discharge data for all the nozzle openings is set in the shift register elements 80A to 80N, the computer main body 66 outputs a latch signal (LAT) to the latch circuit 81, that is, the latch elements 81A to 81N at a predetermined timing. . In response to the latch signal, the latch elements 81A to 81N latch the ejection data set in the shift register elements 80A to 80N. The latched ejection data is supplied to a level shifter 82 that is a voltage amplifier, that is, level shifter elements 82A to 82N. When the discharge data is “1”, for example, each level shifter element 82A to 82N boosts the discharge data up to a voltage that can be driven by the switch circuit 43, for example, several tens of volts. The boosted discharge data is applied to the switch circuit 83, that is, the switch elements 83A to 83N, and the switch elements 83A to 83N are connected by the discharge data. Here, a drive signal (COM) is applied to each of the switch elements 83A to 83N from the drive signal generation circuit 88. When the switch elements 83A to 83N are connected, the switch elements 83A to 83N are connected to the switch elements 83A to 83N. A drive signal is supplied to the pressure generating elements 39A to 39N. If the ejection data is “0”, for example, the corresponding level shifter elements 39A to 39N do not boost. Then, when a drive signal is applied based on the most significant bit data, the computer main body 66 then serially transmits 1 bit lower data and sets the data in the shift register elements 80A to 80N. When data is set in the shift register elements 80A to 80N, a latch signal is applied to latch the set data, and drive signals are supplied to the pressure generating elements 39A to 39N. Thereafter, the same operation is repeated until the least significant bit while shifting the ejection data bit by bit to the least significant bit.

  In this way, whether or not to supply a drive signal to the pressure generating element 39 can be controlled by the ejection data. That is, the drive signal COM can be supplied to the pressure generating element 39 by setting the discharge data to “1”, and the supply of the drive signal COM to the pressure generating element 39 can be cut off by setting the discharge data to “0”. it can. When the discharge data is set to “0”, the pressure generating element 39 holds the previous charge (potential).

(Waveform of drive signal COM)
FIG. 7 is a waveform diagram showing an example of a drive signal used in the droplet discharge device shown in FIG. In FIG. 3A and FIG. 7, the drive signal COM applied to the pressure generating element 39 is set to an optimum waveform according to the viscosity of the liquid M to be ejected. The discharge expansion element S1 that expands the pressure generation chamber 33 from the initial state by changing the potential from the intermediate potential Vm to the maximum potential VPS, and the discharge that maintains the expansion state of the pressure generation chamber 33 while maintaining the maximum potential VPS. Hold element S2, discharge contraction element S3 that changes the potential from maximum potential VPS to minimum potential VLS, contracts pressure generating chamber 33 in an expanded state to discharge droplet M0, and holds minimum potential VLS. The damping element S4 for holding the contracted state of the pressure generating chamber 33 and the pressure generating chamber 33 in the contracted state are restored to the initial state by changing from the lowest potential VLS to the intermediate potential Vm. A vibration damping expansion element S5, to, and a hold element S6 described holding the intermediate potential Vm.

  In such a drive signal COM, when the discharge expansion element S1 is applied to the pressure generating element 39, the pressure generating element 39 is deformed in the direction of expanding the volume of the pressure generating chamber 33, and the pressure generating chamber 39 is negatively charged. Generate pressure. Such a state is maintained while the discharge hold element S2 is being applied. As a result, the meniscus is drawn into the pressure generating chamber 33, and the pressure generating chamber 33 is reliably filled with the liquid material M. Next, when the discharge contraction element S3 is applied to the pressure generating element 39, the pressure generating element 39 is deformed in a direction in which the volume of the pressure generating chamber 33 contracts and generates a positive pressure in the pressure generating chamber 39. . As a result, the meniscus rises from the nozzle opening 27 and is discharged as a droplet M0. Thereafter, when the damping hold element S4 and the damping expansion element S5 are applied to the pressure generating element 39, the meniscus is stopped and drawn into the pressure generating chamber 33 accordingly. Further, the liquid material M0 is supplied from the liquid flow inlet 38 to the pressure generating chamber 33.

(Series of droplet discharge system)
As described above, in the droplet discharge device 10 of the present embodiment, the droplet discharge mechanism is configured by the liquid material storage unit 37, the pressure generation chamber 33, the nozzle opening 27, the pressure generation element 39, and the like. Then, as shown in FIG. 2 (A), it is arranged into four series of droplet discharge mechanisms 11R, 11G, 11B, and 11T. 5 and part of the drive circuit shown in FIG. 6 are also grouped. Here, liquid substances MR, MG, MB, and MT having different compositions are stored as liquid substances M in the liquid substance storage portions 37 of the respective droplet discharge mechanisms 11R, 11G, 11B, and 11T. The nozzle openings 27 of the droplet ejection mechanisms 11R, 11G, 11B, and 11T respectively eject droplets MR0, MG0, MB0, and MT0 having different compositions as the droplet M0. As will be described below, of the four series of droplet discharge mechanisms 11R, 11G, 11B, and 11T, the droplet discharge mechanisms 11R, 11G, and 11B are for forming a light emitting layer (composition) to be described later. The droplet discharge mechanism 11T is a first droplet discharge mechanism that discharges a composition (first composition). The droplet discharge mechanism 11T includes a predetermined droplet out of the droplets discharged by the droplet discharge mechanisms 11R, 11G, and 11B. It is a 2nd droplet discharge mechanism which discharges the composition (2nd composition) for adjusting a drying rate.

In this embodiment, in order to form the light emitting layers of the respective colors of the organic EL element, the liquid material storage part 37, the pressure generation chamber 33, the nozzle opening 27, and the pressure generation element 39 of the first droplet discharge mechanism 11R are, for example, Red (R) dot forming liquid MR (first composition) having the following composition
This is used as a series for discharging a 1,2,3,4-tetramethylbenzene solution of a red (R) light emitting layer forming material.

The liquid reservoir 37, the pressure generating chamber 33, the nozzle opening 27, and the pressure generating element 39 of the first droplet discharge mechanism 11G are, for example, a green (G) dot-forming liquid MG (first) having the following composition: Composition)
It is used as a series for discharging a cyclohexylbenzene solution of a green (G) light emitting layer forming material.

The liquid material storage portion 37, the pressure generation chamber 33, the nozzle opening 27, and the pressure generation element 39 of the first droplet discharge mechanism 11B are, for example, a blue (B) dot forming liquid material MB (first) having the following composition. Composition)
It is used as a series for discharging a cyclohexylbenzene solution of a blue (B) light emitting layer forming material.

  Further, the liquid material storage portion 37, the pressure generation chamber 33, the nozzle opening 27, and the pressure generation element 39 of the second droplet discharge mechanism 11T are made of, for example, isopropyl biphenyl (an aromatic organic solvent having a boiling point of 200 ° C. or higher). This is used as a series for discharging the drying speed adjusting liquid MT (second liquid).

  Here, the dot forming liquid materials MR, MG, and MB (first liquid material) are obtained by dissolving or dispersing the light emitting layer (composition) in a solvent. That is, as the light emitting layer forming material, for example, a polymer material having a molecular weight of 1000 or more is used. Specifically, a polyfluorene derivative, a polyphenylene derivative, a polyvinyl carbazole, a polythiophene derivative, or a polymer material thereof, a perylene dye, a coumarin dye, a rhodamine dye such as rubrene, perylene, 9,10-diphenylanthracene, What doped tetraphenyl butadiene, Nile red, coumarin 6, quinacridone, etc. is used. As such a polymer material, a π-conjugated polymer material in which π electrons of a double bond are non-polarized on a polymer chain is also a conductive polymer, and thus has excellent light emitting performance. Preferably used. In particular, a compound having a fluorene skeleton in the molecule, that is, a polyfluorene compound is more preferably used. In addition to such materials, for example, a composition for an organic EL device disclosed in JP-A-11-40358, that is, a precursor of a conjugated polymer organic compound, and at least one kind for changing light emission characteristics A composition for an organic EL device comprising the above fluorescent dye can also be used as a light emitting layer forming material. As an organic solvent that dissolves or disperses such a light emitting material, a nonpolar solvent is preferable. In particular, since the light emitting layer is formed on the hole injection layer, it is insoluble in the hole injection layer. Things are used. Specifically, xylene, cyclohexylbenzene, dihydrobenzofuran, trimethylbenzene, tetramethylbenzene and the like are preferably used. In addition, the formation of the light emitting layer by discharging the light emitting layer forming material includes a light emitting layer forming material that emits red colored light, a light emitting layer forming material that emits green colored light, and a light emitting layer that emits blue colored light. The forming material is discharged and applied to the corresponding pixels.

  Here, the same solvent is used for the light emitting layer forming material that emits red colored light, the light emitting layer forming material that emits green colored light, and the light emitting layer forming material that emits blue colored light. However, from the standpoints of solubility, viscosity of the resulting solution, and change in viscosity over time, the optimum solvent is used for the light emitting layer forming material. MG, MB often have a difference in boiling point (evaporation rate).

For example, in the case of the above composition, when the dot forming liquids MR, MG, MB and the drying speed adjusting liquid MT are compared, the boiling point of 1,2,3,4-tetramethylbenzene is 203 ° C. and cyclohexylbenzene. Has a boiling point of 240 ° C. and isopropyl biphenyl has a boiling point of 290 ° C., so that the boiling points of the liquid substances MR, MG, MB, and MT are
Liquid material MR <Liquid material MG, MB <Liquid material MT
And
The evaporation rate of the solvent used for each liquid is:
Liquid material MR> Liquid material MG, MB> Liquid material MT
It is.

(Modified example of droplet discharge system series)
In the form shown in FIG. 2A, the pressure generating chambers 33, the nozzle openings 27, and the pressure generating elements 39 of the four series of droplet discharging mechanisms 11R, 11G, 11B, and 11T are all configured as a common droplet discharging head 22. As an example, as shown in FIG. 2B, each of the four series of droplet discharge mechanisms 11R, 11G, 11B, and 11T includes a pressure generating chamber 33, a nozzle opening 27, and a pressure generating element 39, respectively. You may employ | adopt the structure comprised by the droplet discharge heads 22R, 22G, 22B, and 22T. In this case as well, the four droplet discharge heads 22R, 22G, 22B, and 22T may be mounted on the common carriage 26 (see FIG. 1). In addition, each of the four droplet discharge heads 22R, 22G, 22B, and 22T is mounted on another carriage 26, and each of the four droplet discharge heads 22R, 22G, 22B, and 22T. Alternatively, a configuration in which a drive system or a control system is configured may be employed. In the present embodiment, the liquid substances MR, MG, MB, and MT are all organic solvents, but the present invention may be applied when water is used as part of the solvent.

(Example of production method of composition dots)
Hereinafter, an example of forming a light emitting layer (composition dot) of an organic EL device (electro-optical device) will be described as an example of a method for producing a composition dot using the droplet discharge device 10 described above.

  FIGS. 8A and 8B are a block diagram of an organic EL device including an EL element using a charge injection type organic thin film as an electro-optical material, and a cross-sectional view illustrating a configuration of the pixel. 9 and 10 are manufacturing process cross-sectional views showing the steps of the manufacturing process of the organic EL device, and correspond to a cross section of one pixel of the organic EL device shown in FIG. 8B.

  In FIG. 8A, an organic EL device 500p is a display device that drives and controls an EL element that emits light when a drive current flows through an organic semiconductor film, and any of the light-emitting elements used in this type of display device. Since the self-light-emitting device also emits light, there is an advantage that a backlight is not required and the viewing angle dependency is small. In the electro-optical device 500p shown here, a plurality of scanning lines 563p, a plurality of data lines 564 extending in a direction intersecting with the extending direction of the scanning lines 563p, and the data lines 564 are arranged in parallel. A plurality of common power supply lines 505 and pixels 515p corresponding to the intersections of the data lines 564 and the scanning lines 563p are configured, and the pixels 515p are arranged in a matrix in the image display area. A data line driving circuit 551p including a shift register, a level shifter, a video line, and an analog switch is configured for the data line 564. A scanning line driving circuit 554p including a shift register and a level shifter is configured for the scanning line 563p. Each of the pixels 515p has a switching thin film transistor 509 to which a scanning signal is supplied to the gate electrode via the scanning line 563p, and a storage capacitor for holding an image signal supplied from the data line 564 via the switching thin film transistor 509. 533p, a current thin film transistor 510 to which an image signal held by the storage capacitor 533p is supplied to the gate electrode, and a drive current from the common power supply line 505 when electrically connected to the common power supply line 505 via the current thin film transistor 510. The light emitting element 513 into which the liquid flows is configured.

  As shown in FIG. 8B, the light-emitting element 513 includes an organic functional layer including a hole injection layer 513a and a light-emitting layer 513b on the upper side of the pixel electrode 511 serving as an anode. The counter electrode 512 is formed on the upper layer.

  In order to manufacture the organic EL device 500p having such a configuration, a substrate (medium / substrate for electro-optical device / substrate for organic EL device) is prepared. Here, in the organic EL device 500p, it is possible to take out light emitted from a light emitting layer, which will be described later, from the substrate side, and to take out light from the side opposite to the substrate. In the case where the emitted light is extracted from the substrate side, a transparent or translucent material such as glass, quartz, or resin is used as the substrate material, and glass is particularly preferably used. Alternatively, a color filter film, a color conversion film containing a fluorescent material, or a dielectric reflection film may be disposed on the substrate to control the emission color. In the case where the emitted light is extracted from the side opposite to the substrate, the substrate may be opaque. In that case, a ceramic sheet such as alumina, a metal sheet such as stainless steel that has been subjected to an insulation treatment such as surface oxidation, A curable resin, a thermoplastic resin, or the like can be used.

  In this example, as shown in FIG. 9A, a transparent substrate 502 made of glass (corresponding to the substrate 12 shown in FIG. 1) is prepared as a substrate, and TEOS (corresponding to the transparent substrate 502 as needed). A base protective film (not shown) made of a silicon oxide film having a thickness of about 200 to 500 nm is formed by a plasma CVD method using tetraethoxysilane) or oxygen gas as a raw material.

Next, the temperature of the transparent substrate 502 is set to about 350 ° C., and a semiconductor film 520a made of an amorphous silicon film having a thickness of about 30 to 70 nm is formed on the surface of the base protective film by plasma CVD. Next, a crystallization process such as laser annealing or solid phase growth is performed on the semiconductor film 520a to crystallize the semiconductor film 520a into a polysilicon film. In the laser annealing method, a line beam having a beam length of 400 mm is used with, for example, an excimer laser, and the output intensity is set to, for example, 200 mJ / cm ² . With respect to the line beam, the line beam is scanned so that a portion corresponding to 90% of the peak value of the laser intensity in the short dimension direction overlaps each region.

  Next, as shown in FIG. 9B, the semiconductor film (polysilicon film) 520a is patterned to form an island-shaped semiconductor film 520b, and a plasma CVD method using TEOS, oxygen gas, or the like as a raw material on the surface thereof. As a result, a gate insulating film 521a made of a silicon oxide film or a nitride film having a thickness of about 60 to 150 nm is formed. Note that the semiconductor film 520b serves as a channel region and a source / drain region of the current thin film transistor 510 illustrated in FIG. 8A, but the channel region and the source / drain region of the switching thin film transistor 509 are different from each other at different cross-sectional positions. A semiconductor film is also formed. That is, in the manufacturing process, two types of transistors 509 and 510 are manufactured at the same time, but are manufactured in the same procedure. Therefore, in the following description, only the current thin film transistor 510 will be described with respect to the transistor, and the description of the switching thin film transistor 509 will be described. Is omitted.

  Next, as shown in FIG. 9C, a conductive film made of a metal film such as aluminum, tantalum, molybdenum, titanium, or tungsten is formed by sputtering, and then patterned to form a gate electrode 510g. Next, high-concentration phosphorus ions are implanted in this state, and source / drain regions 510a and 510b are formed in the semiconductor film 520b in a self-aligned manner with respect to the gate electrode 510g. Note that a portion where impurities are not introduced becomes a channel region 510c.

  Next, as shown in FIG. 9D, after an interlayer insulating film 522 is formed, contact holes 523 and 524 are formed, and relay electrodes 526 and 527 are embedded in these contact holes 523 and 524. Next, a signal line, a common power supply line, and a scanning line (not shown) are formed over the interlayer insulating film 522. Here, the relay electrode 527 and each wiring may be formed in the same process, and in this case, the relay electrode 526 is formed of an ITO film described later.

  Next, as illustrated in FIG. 9E, an interlayer insulating film 530 is formed so as to cover the upper surface of each wiring, and then a contact hole 532 is formed in the interlayer insulating film 530 at a position corresponding to the relay electrode 526. To do. Next, an ITO film is formed so as to fill the contact hole 532, and the ITO film is further patterned to electrically connect the source / drain region 510a to a predetermined position surrounded by the signal line, the common power supply line, and the scanning line. A pixel electrode 511 connected to is formed. Here, a portion sandwiched between the signal line, the common power supply line, and the scanning line is a place where a hole injection layer and a light emitting layer to be described later are formed.

  Next, as illustrated in FIG. 9F, a partition 505 is formed so as to surround a formation place of the hole injection layer and the light emitting layer. This partition 505 functions as a partition member, and is preferably formed of an insulating organic material such as polyimide. About the film thickness of the partition 505, it forms so that it may become the height of 1-2 micrometers, for example. Further, the partition wall 505 is preferably one that exhibits liquid repellency with respect to the liquid material discharged from the droplet discharge head 22 described above. In order to make the partition 505 exhibit liquid repellency, for example, a method of treating the surface of the partition 505 with a fluorine compound or the like is employed. Examples of the fluorine compound include CF4, SF5, and CHF3. Examples of the surface treatment include plasma treatment and UV irradiation treatment. In this manner, a sufficiently high step 535 is formed between the hole injection layer and the light emitting layer formation place, that is, between the application position of these forming materials and the surrounding partition 505.

  Next, as shown in FIG. 9G, the hole injection layer forming material 540a is applied to the droplet discharge head 22 of the droplet discharge apparatus 10 described above with the upper surface of the transparent substrate 502 facing upward. A similar droplet discharge head is used to selectively apply the coating position surrounded by the partition 505, ie, the partition 505. At that time, the forming material 540a tends to spread in the horizontal direction due to its high fluidity. However, since the partition wall 505 is formed so as to surround the applied position, the forming material 540a extends beyond the partition wall 505 to the outside thereof. It does not spread. Here, as the hole injection layer forming material 540a, 3,4-polyethylenediosithiophene / polystyrene sulfonic acid (PEDOT / PSS), which is a polyolefin derivative, is used as a hole injection material, and an organic solvent is used as a main solvent. A dispersion obtained by dispersing as is preferably used. However, the hole injecting material is not limited to those described above, but polyphenylene vinylene whose polymer precursor is polytetrahydrothiophenylphenylene, 1,1-bis- (4-N, N-ditolylaminophenyl) ) Cyclohexane, tris (8-hydroxyquinolinol) aluminum and the like can also be used.

  In this way, after the forming material 540a is discharged from the droplet discharge head 22 and disposed at a predetermined position, the liquid forming material 540a is dried to evaporate the dispersion medium in the forming material 540a. As a result, as shown in FIG. 9H, a solid hole injection layer 513a is formed over the pixel electrode 511.

  Next, as shown in FIG. 2A and FIG. 10A, in the dot forming droplet discharge step (first droplet discharge step), with the upper surface of the transparent substrate 502 facing upward, A green (G) light emitting layer is formed on the hole injection layer 513a in the partition wall 505 corresponding to each green (G) pixel 515p from the nozzle opening 27 of the first droplet discharge mechanism 11G of the droplet head 22. A droplet MG0 of a liquid MG for dot formation made of a cyclohexylbenzene solution of the material is discharged. Similarly, the blue (B) color is transferred from the nozzle opening 27 of the first droplet discharge mechanism 11B of the droplet head 22 onto the hole injection layer 513a in the partition wall 505 corresponding to each blue (B) pixel 515p. A droplet MB0 of a liquid MB for dot formation made of a cyclohexylbenzene solution as a light emitting layer forming material is discharged. Similarly, on the hole injection layer 513a in the partition wall 505 corresponding to each red (R) pixel 515p from the nozzle opening 27 of the first droplet discharge mechanism 11R of the droplet head 22, the red (R) A droplet MR0 of a liquid material MR for forming dots made of a 1,2,3,4-tetramethylbenzene solution of a light emitting layer forming material is discharged.

  Next, as shown in FIGS. 2A and 10B, in the droplet discharge step for adjusting the drying speed (second droplet discharge step), the transparent substrate 502 is faced up. , Each pixel at the same position as each of the positions where the droplet MR0 of the red (R) dot forming liquid material MR is ejected from the nozzle opening 27 of the second droplet ejection mechanism 11T of the droplet head 22. A droplet MT0 of the liquid MT for drying speed adjustment made of isopropyl biphenyl is discharged only in the partition wall 505 corresponding to 515p. As a result, in the red (R) pixel 515p, the red (R) dot forming liquid material MR and the drying speed adjusting liquid material MT are mixed.

  Note that the order of the droplet forming droplet discharging step shown in FIG. 10A and the drying rate adjusting droplet discharging step shown in FIG. 10B may be interchanged.

  Next, the transparent substrate 10 is vacuum-dried and heated in a heat treatment process to perform a drying process, and the organic solvent mixed in each liquid material is evaporated and dried. As shown in FIG. 10C, any of the red (R), green (G), and blue (B) pixels 515p has a solid light emitting layer 513b (pixel constituent element) on the hole layer injection layer 513a. Is formed. At this time, in each of the red (R) pixels 515p, the droplet (MR) of the red (R) dot forming liquid material MR having the lowest boiling point and the drying having a higher boiling point than the dot forming liquid materials MR, MG, and MB. Since the droplet MT0 of the liquid MT for speed adjustment is mixed, the drying speed of the droplet is the same as that of the other pixels 515p (green (G) and blue (B) pixels 515p). .

  In addition, about the drying process of a liquid substance, it is preferable to dry by heating at the temperature below the glass transition point of the material mix | blended with it, for example, the temperature below 100 degrees. By drying at such a temperature, the evaporation rate of the organic solvent can be kept relatively low, and the light emitting layer 513b can be formed to a uniform thickness. In addition, thermal damage caused by the drying process for forming the light emitting layer 513b is reduced not only to the light emitting layer 513b but also to the hole injection layer 513a, and display performance deterioration due to reduction in initial luminance or the like is suppressed. .

  Next, as shown in FIG. 8B, LiF / Al (a laminated film of LiF and Al), MgAg, or LiF / Ca / Al (LiF and Ca) are formed on the entire surface of the transparent substrate 502 or in the form of stripes. A counter electrode 512 is formed by depositing a film of Al and Al) by a vapor deposition method or the like. Then, after sealing, the organic EL device 500p (electro-optical device) including the organic EL element is manufactured by further forming various elements such as wiring.

(Main effects of this form)
As described above, in this embodiment, the liquid droplet M0 is ejected from the nozzle opening 27 in the form of dots onto the transparent substrate 502, and the liquid M droplet is ejected onto the transparent substrate 502. In the method of manufacturing the organic EL device 10 having a heating step of drying M0 and fixing the light emitting layer 513b (composition) on the transparent substrate 502 in the form of dots, in the droplet discharge step, the dot forming liquid material MR, A dot forming droplet discharge step (step shown in FIG. 10A) for discharging MG and MB droplets MR0, MG0, MB0 in different positions on the transparent substrate 502, and a dot forming liquid material MR. , MG, MB droplets MR0, MG0, MB0, a predetermined droplet MR0 (red (R) dot forming liquid material MR droplet MR0 having a low boiling point and a high drying speed) and transparent substrate 502 Same on A droplet discharge step for adjusting the drying rate for discharging the droplet MT0 of the liquid MT for adjusting the drying rate to compress the difference in the drying rate of each droplet in the heating step (shown in FIG. 10B). Step). For this reason, when performing a heating process, the difference in the drying speed of each droplet MR0, MG0, MB0 is compressed. For this reason, even when the droplet forming liquid materials MR, MG, MB droplets MR0, MG0, MB0 are ejected in a dot shape onto the transparent substrate 502 and then heated collectively, Since the drying speeds of MR0, MG0, and MB0 are equal, the droplets MR0, MG0, and MB0 can be dried and fixed in a stable state. Therefore, even if the temperature of the heating process is too high with the droplet MR0 of the red (R) dot-forming liquid material MR alone, the thickness variation within the pixel in the red (R) light-emitting layer 513b is reduced. Occurrence can be prevented.

  Further, in this embodiment, the drying rate adjusting liquid MT is composed of only a high boiling point solvent having a higher boiling point than any of the solvents used in the dot forming liquids MR, MG, and MB, and therefore has different solutes. Even when the liquid material MT for adjusting the drying speed is ejected to the same position as the liquid droplets of a plurality of types of liquid materials, the same liquid material MT for adjusting the drying speed can be used.

(Modification)
In the above embodiment, the amount of droplet MT0 of the liquid MT for drying speed adjustment to be discharged is set in advance. However, after the heating process, the film thickness distribution of the light emitting layer 513b in the pixel is determined by a stylus inspection device or the like. In the subsequent manufacturing process of the light emitting layer 513b, the amount to be discharged of the droplet MT0 of the liquid MT for drying speed adjustment may be determined based on the measurement result. When such a method is employed, the discharge rate of the droplet MT0 of the drying rate adjusting liquid MT can be optimized, so that the drying rate of each droplet can be reliably made equal. Therefore, the droplets can be dried in a stable state.

  In the above embodiment, the target for discharging the droplet MT of the liquid MT for drying speed adjustment is fixed to the dot forming liquid having a low boiling point. However, depending on the position of the heat source in the heating process, the transparent substrate Since the heating condition varies at a position on the substrate 502, and the evaporation rate of the solvent of the droplet may vary depending on the position on the substrate, the pixel in the region where the evaporation rate of the solvent of the droplet is too fast on the transparent substrate 502 On the other hand, the droplet MT0 of the liquid MT for drying speed adjustment may be ejected to equalize the drying speed of each droplet. With this configuration, for example, even when the boiling points of the liquid materials MR, MG, and MB for dot formation are equal, even if the heating conditions vary depending on the position on the substrate, the difference in evaporation rate due to such variation is determined as the drying rate. This can be solved by discharging the adjustment liquid MT. Also in this case, it is preferable to determine the position and amount at which the droplet MT0 of the drying speed adjusting liquid material MT should be ejected in the subsequent steps based on the measurement result of the film thickness distribution after the heating step.

  Further, from the viewpoint of eliminating the difference in drying speed, the liquid material MT for adjusting the drying speed having a low boiling point is discharged to the same position as the liquid droplet having a low drying speed, and the drying speed of each liquid droplet is controlled. The difference may be eliminated.

(Other application examples)
In the above embodiment, the present invention is an example in which the present invention is used in a manufacturing process of an organic EL device. Further, the present invention may be applied to a droplet discharge device called an ink jet printer.

  The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention, and the specific materials and configurations described in the embodiment are included. These are merely examples, and can be changed as appropriate. Therefore, in addition to EL devices and liquid crystal devices, the present invention is used for manufacturing various electro-optical devices such as plasma display devices, electrophoretic display devices, devices using electron-emitting devices (Field Emission Display, Surface-Conduction Electron-Emitter Display, etc.), etc. The invention may be applied. In addition, the electro-optical device to which the present invention is applied can be used as a display device in various electronic devices such as a mobile phone, a personal computer, and a PDA.

1 is a perspective view showing an overall configuration of a droplet discharge device according to an embodiment of the present invention. (A), (B) is explanatory drawing which respectively shows the structure of the droplet discharge head used for the droplet discharge apparatus. (A), (B), and (C) are explanatory diagrams schematically showing an internal structure of a droplet discharge head used in the droplet discharge device, an explanatory diagram of a pressure generating element in a bending vibration mode, and longitudinal vibration, respectively. It is explanatory drawing of the pressure generation element of a mode. FIG. 2 is an explanatory diagram illustrating a configuration of a control system and a drive system of a droplet discharge head used in the droplet discharge apparatus illustrated in FIG. 1. FIG. 2 is an explanatory diagram illustrating an electrical configuration of a head driving unit of a droplet discharge head used in the droplet discharge apparatus illustrated in FIG. 1. It is explanatory drawing of the element which comprises the head drive part shown in FIG. It is a wave form diagram of the drive signal used for the droplet discharge device shown in FIG. FIGS. 2A and 2B are a block diagram of an organic EL device including an EL element using a charge injection type organic thin film as an electro-optical material, and a cross-sectional view illustrating a configuration of the pixel. It is sectional drawing which shows the procedure of the manufacturing process of an organic electroluminescent apparatus. It is sectional drawing which shows the procedure of the manufacturing process of an organic electroluminescent apparatus.

Explanation of symbols

10 droplet ejection device, 11R, 11G, 11B, first droplet ejection mechanism, 11T second droplet ejection mechanism (drying speed adjusting droplet ejection mechanism), 12, 502 substrate (medium), 22 droplets Discharge head, 27 Nozzle opening, 33 Pressure generating chamber, 37 Liquid material reservoir, 39 Pressure generating element, COM drive signal, M liquid material, MR, MG, MB Dot forming liquid material (first liquid material), MT drying Liquid for adjusting speed (second liquid), M0 droplet, MR0, MG0, MB0 Liquid droplet for forming dot, Liquid droplet for adjusting MT0 drying speed

Claims (14)

Manufacture of an electro-optical device having a droplet discharge step of discharging a droplet from each nozzle opening to a plurality of pixels, and a drying step of drying the droplets to form pixel components in each of the plurality of pixels In the method
The droplet discharge step includes
A first liquid droplet ejecting step for ejecting a liquid droplet of a first liquid material containing a constituent material of the pixel constituent element to each of the plurality of pixels;
A second liquid droplet ejection step for ejecting a second liquid material droplet for adjusting a drying speed of the first liquid material droplet to each of the plurality of pixels;
A method for manufacturing an electro-optical device. In claim 1, at least the first liquid material includes a constituent material of the composition,
The method of manufacturing an electro-optical device, wherein the second liquid material is a liquid material having a boiling point higher than that of the first liquid material.   3. The method of manufacturing an electro-optical device according to claim 2, wherein the second liquid material is a high-boiling solvent having a boiling point higher than that of the solvent used for the first liquid material.   4. The method for manufacturing an electro-optical device according to claim 2, wherein the second liquid material includes an organic solvent having a boiling point of 200 ° C. or higher.   5. The method of manufacturing an electro-optical device according to claim 1, wherein the first liquid material is obtained by dissolving or dispersing the composition in a solvent. Manufacture of an electro-optical device having a droplet discharge step of discharging a droplet from each nozzle opening to a plurality of pixels, and a drying step of drying the droplets to form pixel components in each of the plurality of pixels In the method
The droplet discharge step includes
Discharging a first liquid droplet to a first pixel of the plurality of pixels;
Discharging a second liquid material having a composition different from that of the first liquid material to a second pixel different from the first pixel;
Discharging a droplet of a third liquid material for adjusting a drying speed to the first pixel;
A method for manufacturing an electro-optical device.   The method of manufacturing an electro-optical device according to claim 6, wherein the first liquid material has a drying rate faster than that of the second liquid material.   The method of manufacturing an electro-optical device according to claim 6, wherein the first liquid material has a boiling point lower than that of the second liquid material. Manufacture of an electro-optical device having a droplet discharge step of discharging a droplet from each nozzle opening to a plurality of pixels, and a drying step of drying the droplets to form pixel components in each of the plurality of pixels In the method
The droplet discharge step includes
A first liquid droplet ejecting step for ejecting a liquid droplet of a first liquid material containing a constituent material of the pixel constituent element to each of the plurality of pixels;
A second droplet discharge step of discharging a second liquid droplet to adjust a drying speed of the first liquid droplet to a predetermined pixel of the plurality of pixels;
The method of manufacturing an electro-optical device, wherein, in the drying step, a drying speed difference between a pixel different from the predetermined pixel and the predetermined pixel is adjusted.   After the heating step, the film thickness of each composition is measured, and at least one of the position and the amount at which the droplet of the second liquid material is to be ejected is determined based on the measurement result of the film thickness. The method of manufacturing an electro-optical device according to claim 9. The electro-optical device is an organic electroluminescence device,
The method of manufacturing an electro-optical device according to claim 1, wherein the pixel constituent element is an organic electroluminescence light emitting layer. A liquid material storing part for storing a liquid material, a nozzle opening opened in a pressure generating chamber communicating with the liquid material storing part, and expanding and contracting the pressure generating chamber to allow the liquid material liquid to be discharged from the nozzle opening. In a droplet discharge device having a droplet discharge mechanism including a pressure generating element that discharges droplets onto a medium,
As the droplet discharge mechanism, a first droplet discharge mechanism that discharges a first liquid droplet to a plurality of positions on the medium; and a first liquid droplet and the same position on the medium. A droplet discharge apparatus comprising: a second droplet discharge mechanism that discharges a second liquid droplet that adjusts a drying speed of the first liquid droplet.   13. The second liquid droplet ejection mechanism according to claim 12, wherein the second liquid droplet ejection mechanism ejects the second liquid droplet at the same position on the medium as a predetermined droplet among the droplets of the first liquid. A droplet discharge apparatus characterized by the above. In Claim 13, the first droplet discharge mechanism discharges a plurality of types of first liquid materials having different compositions as the first liquid material,
The second droplet discharge mechanism discharges the second liquid droplet to the same position on the medium as the predetermined first liquid droplet among the plurality of types of first liquid materials. A droplet discharge device characterized by the above.

Images