JP2006051412A - Method and apparatus for film formation, substrate for picture element, electro-optical apparatus and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for film formation capable of preventing unevenness of the film thickness in film formation regions without leaving unnecessary film fractions in formed-film-free regions, a substrate for picture elements, an electro-optical apparatus and electronic equipment. <P>SOLUTION: In the method, while or before droplets of a functional solution are discharged onto a film formation region 1 on a substrate W, a solvent having a vapor pressure equal or nearly equal to that of the liquid medium of the functional solution is applied to a formed-film-free region 8 surrounding the film formation region 1. The solvent is applied so that the solvent remains until the liquid medium has been transpired in a drying process for evaporation of the liquid medium in the functional solution. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a film forming method and apparatus using an inkjet method, a pixel substrate, an electro-optical device, and an electronic apparatus.

  As a pixel substrate used in an electro-optical device, partition walls are arranged in a matrix on a transparent substrate, and a dispersion solution in which a color material is dispersed in a film formation region (pixel formation region) partitioned by the partition wall ( A color filter substrate in which a color layer made of a color material is formed by discharging colored ink) as droplets by an inkjet method is known.

  In such a film forming method of the color filter substrate, after coloring ink is applied to a pixel forming region formed in a large number of sections on a transparent substrate, a solvent in the ink is evaporated in a drying process to form a color layer made of a color material. Form a film. At this time, the drying speed of the solvent in the ink is different between one pixel formation region on the transparent substrate or the pixel formation region located at the peripheral portion of the transparent substrate, and as a result, the film thickness unevenness of the color layer may occur. When such film thickness unevenness of the color layer on the same substrate occurs, problems such as color unevenness, color tone unevenness, and contrast unevenness of the electro-optical device occur.

  As a film formation method for improving the film thickness unevenness of the pixel formation region as described above, a pixel formation region in which a plurality of pixels are continuously formed with a predetermined interval and a non-formation region in which no pixels are formed over a predetermined interval (non-film formation region) A step of discharging a predetermined liquid material to each of the pixels on the substrate, and discharging the liquid material in a part of the non-forming region so as to surround the pixel formation region, and drying the discharged liquid material There is known a method for manufacturing an electro-optical device component including the above (Patent Document 1).

  In this case, if the liquid material discharged to each pixel and a part of the non-formation region is a color filter substrate, it is colored ink and the color of the ink is not particularly limited.

JP 2001-188117 A

  In the pixel substrate formed by the above conventional film formation method, a liquid film discharged in the non-film formation region remains, and this film may become an obstacle in the subsequent manufacture of the electro-optical device. For example, when a color filter substrate and an element substrate on which an element opposite to the color filter substrate is bonded using a sealing material in a non-film forming region, if there is an unnecessary film in the non-film forming region, adhesion failure occurs. There is. Moreover, if this is removed, an extra processing step will increase, leading to an increase in manufacturing cost.

  The present invention has been made in view of the above problems, and a film forming method and a film forming method capable of preventing film thickness unevenness in the film forming region without leaving an unnecessary object (film) in the non-film forming region. An object is to provide a device, a pixel substrate, an electro-optical device, and an electronic apparatus.

  A film forming method of the present invention is a film forming method for forming a film made of a functional material in a film forming region on a substrate, and a discharging step of discharging a functional liquid as a droplet to the film forming region on the substrate; A solvent application step of applying a solvent having a vapor pressure equal to or substantially equivalent to the liquid medium of the functional liquid around the film forming region, and a drying step of evaporating the liquid medium of the discharged functional liquid It is characterized by.

  According to this method, in the ejection step, the functional liquid is ejected as droplets onto the film formation region on the substrate. In the solvent application step, a solvent having the same or substantially the same vapor pressure as the liquid medium of the functional liquid is applied to the peripheral area of the film forming area. Therefore, in the drying process, the functional liquid discharged in the film formation region exists and the solvent applied in the peripheral region of the film formation region exists. Therefore, the evaporation rate of the liquid medium in the functional liquid in the film formation region in one substrate or the film formation region located at the peripheral edge of the substrate is kept constant as compared with the case where no solvent exists in the peripheral region of the film formation region. It can be leveled evenly. After drying, a film made of a functional material with little film thickness unevenness can be formed. In addition, after drying, the solvent applied to the peripheral area of the film forming area also evaporates, so that the functional material in the film forming area does not leave an unnecessary object (film) in the peripheral area of the film forming area. A film can be formed.

  In the solvent application step, it is preferable to apply the solvent so that the liquid medium of the functional liquid is evaporated in the drying step.

  According to this method, in the solvent application step, the solvent having the same or substantially the same vapor pressure as the liquid medium of the functional liquid is applied to the peripheral area of the film formation region so that the liquid medium remains until the liquid medium evaporates in the drying step. . Therefore, since the solvent remains around the functional liquid until the drying process is completed, the evaporation rate of the liquid medium in the functional liquid can be kept constant until the drying process is completed, and leveling can be performed more uniformly. it can.

  In the solvent application step, it is preferable that the solvent is applied to the peripheral region of the film forming region substantially simultaneously or before the functional liquid is applied. According to this, since the solvent is applied to the peripheral region of the film forming region almost simultaneously or before the functional liquid is applied, the solvent exists around the discharged functional liquid even during film formation. The evaporation rate of the liquid medium in the functional liquid can be kept more constant and leveled more uniformly.

  In the solvent application step, it is preferable to apply the solvent by discharging it as droplets. According to this, by ejecting the solvent as droplets as well as ejecting the functional liquid as droplets, the amount of solvent corresponding to the ejected functional liquid droplets can be precisely ejected as droplets. Can do. Therefore, the necessary amount of solvent can be precisely applied to the peripheral area of the film forming area.

  In the solvent application step, the difference in evaporation rate between the functional liquid discharged to the film forming region located in the central portion of the substrate and the functional liquid discharged to the film forming region located in the outer peripheral portion of the substrate is alleviated. Furthermore, it is preferable to apply by gradually increasing the solvent application amount from the center of the substrate toward the outer periphery. Since the functional liquid applied on the substrate tends to increase in evaporation rate as it is located on the outer peripheral side of the substrate, the solvent is applied by gradually increasing the solvent application amount from the central part of the substrate toward the outer periphery. The difference between the evaporation rate of the liquid medium in the functional liquid discharged to the film formation region located in the central part of the substrate and the evaporation rate of the liquid medium in the functional liquid discharged to the film formation region located in the outer peripheral part Can be efficiently reduced.

  Further, in the solvent application step, an airflow that flows in substantially the same direction in parallel with the upper surface of the substrate may be generated, and the solvent may be applied to the peripheral area on the windward side of the airflow with respect to the film formation region. According to this, since there is an airflow flowing in substantially the same direction on the upper surface of the substrate, if the solvent is applied to the peripheral area of the film formation region so as to be located on the windward side of this airflow, the applied solvent The vapor evaporated from the air is caused to flow by an air flow so as to cover the film formation region. Therefore, as compared with the case where the solvent is applied to the entire peripheral region of the film forming region, it is possible to efficiently apply the solvent and level the functional liquid discharged to the film forming region.

  The substrate may have a recess or a groove in the peripheral region of the film formation region, and in the solvent application step, a solvent may be applied to the recess or the groove. According to this, it is possible to apply the solvent to the recesses or grooves formed in the peripheral region of the film formation region and spread it wet. Therefore, even if the coating unevenness of the solvent occurs, the solvent wets and spreads along the concave portion or the groove portion, so that the solvent can be surely arranged in the peripheral region of the film forming region.

  In addition, the film forming method of the present invention is characterized in that a film serving as a pixel partitioned in a film forming region is formed using a film material constituting a pixel of an electro-optical device as a functional liquid.

  According to this method, the film material that constitutes the pixel formed in the film formation region is formed using the film material that constitutes the pixel of the electro-optical device as the functional liquid. A film that becomes a small number of uniform pixels can be formed.

  In addition, a transparent resin material may be used as the functional liquid to form a protective film that covers and protects the pixels of the electro-optical device partitioned in the film formation region or the wiring portion partitioned in the film formation region. .

  According to this method, a transparent resin material is used as a functional liquid to form a protective film that covers and protects the pixels of the electro-optical device partitioned in the film formation region or the wiring portion partitioned in the film formation region. Therefore, it is possible to form a uniform protective film with little film thickness non-uniformity covering the pixels or wiring portions partitioned and formed in one substrate.

  In addition, using the film material that constitutes the pixel of the electro-optical device as the functional liquid, after forming a film that becomes the pixel partitioned in the film formation region, the film is formed using the transparent resin material as the functional liquid A protective film that covers and protects the formed region may be formed. According to this, the film to be a pixel and the protective film for protecting the film can be uniformly laminated with little film thickness unevenness.

  It is preferable that a plurality of films serving as the pixels are formed and arranged in the film forming region, and in the solvent application step, the solvent is applied to the peripheral area of the film forming region at a pitch substantially equal to the pixel arrangement pitch. According to this, since the arrangement pitch of the functional liquid discharged to form the pixel film and the arrangement pitch of the solvent are substantially equal to each other, the evaporation amount of the liquid medium in the functional liquid per unit area And the amount of evaporation of the solvent can be made substantially equal. Therefore, more uniform leveling can be performed.

  A film forming apparatus of the present invention is a film forming apparatus for forming a film made of a functional material in a film forming region on a substrate, and includes a droplet discharge unit that discharges a functional liquid as droplets, and a liquid medium of the functional liquid For controlling a solvent application unit that applies a solvent having the same or substantially the same vapor pressure, a drying unit that evaporates the liquid medium of the discharged functional liquid, and a droplet discharge unit, a solvent application unit, and a drying unit And the controller controls the application of the solvent from the solvent application unit to the peripheral region of the film forming region so that the solvent remains until the liquid medium evaporates by the drying means.

  According to this configuration, the control unit removes the solvent from the solvent application unit in the film formation region so that the solvent having the same or substantially the same vapor pressure as the liquid medium of the functional liquid remains until the liquid medium is evaporated by the drying unit. Control to apply to surrounding area. Accordingly, the functional liquid discharged from the droplet discharge portion exists in the film forming area, and the applied solvent exists in the peripheral area of the film forming area, and the functional liquid discharged in the film forming area The evaporation rate of the liquid medium is kept constant and can be leveled uniformly. Therefore, after drying by the drying means, a film made of a functional material with little film thickness unevenness can be formed. In addition, after drying, the solvent applied to the peripheral area of the film forming area also evaporates, so that the functional material in the film forming area does not leave an unnecessary object (film) in the peripheral area of the film forming area. A film can be formed.

  The control unit preferably controls the solvent application unit to apply the solvent substantially simultaneously or before the droplet discharge unit discharges the functional liquid. According to this, since the solvent is applied to the peripheral area of the film forming region substantially simultaneously or before the functional liquid is discharged, the solvent exists around the discharged functional liquid even during film formation. Thus, the evaporation rate of the liquid medium in the functional liquid can be kept constant, and leveling can be performed more uniformly. Therefore, after drying by the drying means, a film made of a functional material with little film thickness unevenness can be formed.

  The solvent application unit is preferably applied by discharging the solvent as droplets. According to this, since the solvent is ejected as droplets in the same manner as the functional liquid is ejected as droplets, an amount of solvent corresponding to the ejected functional liquid droplets can be precisely ejected as droplets. Can do. Further, a discharge pattern for discharging the functional liquid as droplets can be used for discharging the solvent. Furthermore, if the solvent is discharged from a droplet discharge section that discharges the functional liquid as droplets, the apparatus can be simplified.

  The pixel substrate of the present invention is a pixel substrate having a plurality of pixels constituting an electro-optical device, and a film to be a pixel partitioned and formed in a film formation region using a film material constituting the pixel as a functional liquid. A film is formed using the film forming method of the above invention.

  According to this configuration, since the film to be a pixel is formed by using the film forming method of the present invention, a pixel substrate on which a film to be a uniform pixel with little film thickness unevenness can be formed. .

  An electro-optical device according to the present invention includes the pixel substrate according to the above-described invention. According to this, since the pixel substrate on which a film that becomes a uniform pixel with little film thickness unevenness is formed is provided, an electro-optical device with little variation in electro-optical characteristics can be obtained.

  An electronic apparatus according to the present invention includes the electro-optical device according to the present invention. According to this, since an electro-optical device with little variation in electro-optical characteristics is mounted, it is possible to provide an electronic apparatus that can display and confirm information such as images with a good-looking electro-optical device.

  In an embodiment of the present invention, a color layer (film) made of a color material, which is a functional material, is ejected as a droplet by discharging a solution in which a color material is dispersed or dissolved in a liquid medium as a functional liquid in a film formation region on a substrate. The color filter film forming method, the film forming apparatus, and the color filter substrate as the pixel substrate will be described as examples.

  FIG. 1 is a schematic plan view showing the arrangement of film formation regions on the substrate. On the substrate W, a plurality of film forming regions 1 having substantially rectangular regions are arranged in a matrix in parallel with the side portions of the substrate W. The film forming regions 1 are arranged at a predetermined interval from each other, and this predetermined interval, that is, a peripheral region surrounding the film forming region 1 will be referred to as a non-film forming region hereinafter.

  FIG. 2 is a schematic plan view showing the arrangement of the elements (pixels) of the color filter. A color filter used in an electro-optical device such as a liquid crystal display device is partitioned in the film formation region 1 shown in FIG. As shown in FIG. 2, it has at least three color layers of R (red), G (green), and B (blue). Further, one picture element 3 is constituted by three pixels 2 corresponding to three color layers (R, G, B). There are several methods for arranging the pixels 2 in which one color layer is accommodated, and typical examples will be described below.

  2A is a schematic plan view showing a pixel arrangement of a stripe type color filter, FIG. 2B is a schematic plan view showing a pixel arrangement of a mosaic type color filter, and FIG. It is a schematic plan view which shows the pixel arrangement | sequence of a color filter of a system.

  In the stripe method, as shown in FIG. 2A, the pixels 2 having three color layers (R, G, B) are linearly arranged in the same direction for each color layer having the same color. The rows of three color layers (R, G, B) are arranged repeatedly. In the mosaic method, as shown in FIG. 2B, the pixels 2 having three color layers (R, G, and B) are arranged vertically and horizontally as in the stripe method. , Arranged in an oblique direction between adjacent rows. In the delta method, as shown in FIG. 2C, the three color layers (R, G, B) are arranged at the positions of the vertices of the triangle (triangle), and the color layers of the adjacent pixels 2 are necessarily different from each other. Has been. In any case, a plurality of pixels 2 that are color layers are arranged in the film forming region 1 to form a color filter. It should be noted that how to actually arrange the color layers (R, G, B) may be determined by appropriately designing from the drive circuit configuration and wiring of the electro-optical device.

  Next, the film forming apparatus will be described with reference to FIGS. FIG. 3 is a schematic perspective view showing the structure of the film forming apparatus. The film forming apparatus 10 according to the present embodiment discharges, as droplets, colored ink in which a color material is dispersed or dissolved as a functional liquid in a film formation region 1 on a substrate W, thereby forming a color layer (a color layer made of a color filter color material). Film). As illustrated in FIG. 3, the film forming apparatus 10 includes, as droplets, a droplet discharge unit that discharges colored ink as droplets, and a solvent (organic solvent) having the same or substantially the same vapor pressure as the liquid medium of the colored ink. A head unit 21 having a solvent application part to be applied is provided. Further, a heater 19 is provided as a drying means for evaporating the liquid medium in the colored ink and the applied solvent, and a head unit 21 and a control unit 18 for controlling the heater 19 are provided.

  The film forming apparatus 10 drives the X-direction guide shaft 12 for driving the head unit 21 in the sub-scanning direction (X direction) and the mounting table 11 on which the substrate W is placed in the main scanning direction (Y direction). A Y-direction guide shaft 15 is provided with a base 20 disposed in the upper part. The X-direction guide shaft 12 and the Y-direction guide shaft 15 are respectively provided with an X-direction drive motor 13 and a Y-direction drive motor 14 that rotate the shaft. The control unit 18 is disposed below the base 20. Furthermore, a cleaning mechanism unit 17 having a Y-direction drive motor 16 for cleaning the head unit 21 is provided.

  The X-direction drive motor 13 is, for example, a stepping motor or the like. When a drive pulse signal in the X-axis direction is supplied from the control unit 18, the head that rotates the X-direction guide shaft 12 and engages the X-direction guide shaft 12. The unit 21 is moved in the X direction.

  Similarly, the Y-direction drive motors 14 and 16 are, for example, stepping motors or the like. When a drive pulse signal in the Y-axis direction is supplied from the control unit 18, the Y-direction guide shaft 15 is rotated and the Y-direction guide shaft 15 is rotated. The engaged mounting table 11 and cleaning mechanism unit 17 are moved in the Y-axis direction.

  When cleaning the head unit 21, the cleaning mechanism unit 17 moves to a position facing the head unit 21, and closes the nozzle surface of a droplet discharge head 24 to be described later. A wiping operation is performed to wipe off the nozzle surface to which the colored ink is adhered. Details of the cleaning mechanism are omitted.

  Here, for example, the heater 19 is a means for heat-treating the substrate W by lamp annealing. The heater 19 evaporates and dries the colored ink and the solvent discharged onto the substrate W, and also applies the colored ink that has landed on the pixels 2 and spreads wet. Heat treatment for converting into a film is performed. The controller 18 also controls the turning on and off of the heater 19.

  FIG. 4 is a schematic plan view showing a head group attached to the head unit. Specifically, it is a view observed from the substrate W side. As shown in FIG. 4, the head unit 21 has two rows of 15 droplet discharge heads 24 arranged in the Y-axis direction. The two rows of 15 droplet discharge heads 24 are classified into five sets of head groups 26 (two head groups 26A, head group 26R, head group 26G, and head group 26B). That is, the head group 26R in which the droplet discharge head 24 is filled with red colored ink, which is a droplet discharge portion, the head group 26G in which the droplet discharge head 24 is filled with green colored ink, and the blue group A head group 26B in which the droplet discharge head 24 is filled with colored ink. In addition, a solvent having a vapor pressure that is the same or substantially the same as that of the liquid medium that disperses or dissolves the color material, which is a solvent application unit disposed one by one before and after the Y direction (main scanning direction) of these droplet discharge units. Two head groups 26 </ b> A filled in the droplet discharge head 24.

  Each head group 26 is composed of a total of six droplet discharge heads 24 in which three are displaced in the longitudinal direction and arranged in two rows along the Y direction. The six droplet discharge heads 24 are called a droplet discharge head 24a, a droplet discharge head 24b, and a droplet discharge head 24c in order from the upper surface in the Y direction. The droplet discharge head 24a of the head group 26A, the droplet discharge head 24a of the head group 26R, the droplet discharge head 24a of the head group 26G, and the droplet discharge head 24a of the head group 26B are at the same position on the coordinates in the X direction. Is arranged. Similarly, the droplet discharge head 24b and the droplet discharge head 24c of each head group 26 are also arranged at the same position on the coordinates in the X direction. These droplet discharge heads 24 can individually discharge colored ink and solvent according to the discharge voltage supplied from the control unit 18.

  In the film forming apparatus 10, the control unit 18 sends a predetermined drive pulse signal to the X direction drive motor 13 and the Y direction drive motor 14, the head unit 21 is moved in the sub-scanning direction (X direction), and the mounting table 11 is subjected to main scanning. Relative movement in the direction (Y direction). In addition, the control unit 18 supplies a discharge voltage to the head unit 21 during the relative movement, and discharges colored ink as droplets from the head unit 21 into the film formation region of the substrate W, and a solvent is applied to the non-film formation region. Apply. Since the head unit 21 reciprocates in the main scanning direction (Y direction) relative to the substrate W to perform ejection, the solvent application unit is arranged before and after the droplet ejection unit in the Y direction as shown in FIG. The solvent can be ejected immediately before the colored ink is ejected at the position.

  FIG. 5 is a schematic plan view showing the nozzle arrangement of the droplet discharge head. The droplet discharge head 24 of this embodiment is a so-called piezo-type inkjet head that pressurizes a discharge chamber filled with a liquid by a piezo (piezoelectric element) and discharges the liquid as a droplet from a nozzle 28 communicating with the discharge chamber. is there. The nozzle plate 27 is provided with two nozzle rows 1A and 1B in which 180 nozzles 28 are perforated at a constant interval P1 of about 140 μm. The nozzle row 1A and the nozzle row 1B are shifted so that the nozzles 28 are arranged in a staggered manner at a constant interval P2 of about 70 μm. Several nozzles 28 at both ends of each of the nozzle arrays 1A and 1B are set to “pause nozzles” that do not discharge liquid, and the other nozzles 28 are set to “discharge nozzles” that discharge liquid. Each of these nozzles 28 is independently provided with a piezoelectric element. That is, the discharge amount, discharge time, and the like of the droplets discharged from each nozzle 28 can be controlled according to the type of electric signal supplied to the piezoelectric element.

  FIG. 6 is a block diagram illustrating an electrical configuration of the control unit and each unit related to the control unit. The control unit 18 includes an input buffer memory 200. The input buffer memory 200 receives discharge data of colored ink and solvent from the external information processing apparatus. The ejection data includes data representing the relative positions of all the film forming regions 1 on the substrate W, and the number of relative scans required to apply the colored ink to all the film forming regions 1 to a predetermined thickness. , Data specifying the nozzle 28 functioning as an on-nozzle, and data specifying the nozzle 28 functioning as an off-nozzle. The input buffer memory 200 supplies the ejection data to the processing unit 204, and the processing unit 204 stores the ejection data in the storage unit 202. In FIG. 6, the storage means 202 is a RAM.

  The processing unit 204 gives data indicating the relative position of the nozzle 28 to the film forming region 1 to the scan driving unit 206 based on the ejection data in the storage unit 202. The scanning drive unit 206 gives a drive signal corresponding to this data and the ejection cycle EP to the X-direction drive motor 13 and the Y-direction drive motor 14 shown in FIG. As a result, the droplet discharge head 24 is scanned relative to the film formation region 1. On the other hand, the processing unit 204 provides the head driving unit 208 with a selection signal SC for designating ON / OFF of the nozzles at each ejection timing based on the ejection data stored in the storage unit 202 and the ejection cycle EP. Based on the selection signal SC, the head drive unit 208 gives the droplet ejection head 24 an ejection signal ES necessary for ejecting colored ink or solvent. As a result, colored ink or solvent is ejected as droplets from the corresponding nozzle 28 of the droplet ejection head 24. In this case, the solvent is controlled to be discharged to the peripheral area (non-film forming area) of the film forming area 1 of the substrate W immediately before the colored ink is discharged.

  Next, a method for forming a color filter using the film forming apparatus 10 will be described with reference to FIGS. The color filter film forming method according to the present embodiment includes a bank forming process for forming partition walls (banks) for partitioning and forming pixels 2 on the substrate W, and a film forming region 1 (partitioned and formed on the substrate W). A step of discharging colored ink as a functional liquid as droplets in a region where the pixel 2 is formed), a drying step of evaporating the liquid medium in the discharged colored ink to form a color layer, and the same as the liquid medium or A solvent application step of applying a solvent having substantially the same vapor pressure to the peripheral region (non-film formation region) of the film formation region 1 so that the solvent remains until the liquid medium evaporates in the drying step. In the solvent application step, the solvent is applied as droplets to the non-film forming region immediately before the colored ink is ejected. Furthermore, a protective layer forming step for forming a protective layer (protective film) for covering and protecting the film forming region 1 on which the color layer is formed, and an electrode forming step for forming an electrode corresponding to the color layer of each color are provided. ing.

  FIG. 7 is a schematic cross-sectional view showing the structure of the color filter substrate taken along line AA in FIG. FIG. 7A is a schematic cross-sectional view showing a partition wall (bank) formed on the substrate, FIG. 7B is a schematic cross-sectional view showing a state where colored ink is discharged from a nozzle, and FIG. FIG. 4D is a schematic cross-sectional view showing a state in which the discharged colored ink is dried to form a color layer, and FIG. 4D is a schematic cross-sectional view showing a state in which three color layers are formed. e) is a schematic cross-sectional view showing a state in which a protective layer is laminated on the formed color layer, and FIG. 5 (f) is a schematic cross-sectional view showing a state in which electrodes corresponding to each pixel are formed on the protective layer. It is.

(Bank formation process)
In the bank forming step, as shown in FIG. 7A, first, a metal film such as Cr is deposited on a substrate W made of transparent glass, plastic film, resin plate or the like by a vapor deposition method or a sputtering method to a thickness of about 0.2 μm. After film formation, the light shielding layer 4 is formed by photolithography. The light shielding layer 4 has an opening corresponding to the pixel 2 in the film formation region 1. Next, a negative transparent acrylic photosensitive resin composition is applied onto the substrate W on which the light shielding layer 4 is formed by a spin coating method. Then, after prebaking at 100 ° C. for 20 minutes, ultraviolet exposure is performed using a mask having a predetermined pattern for forming the partition walls 5. The unexposed portion is developed with an alkaline developer, and after baking at 200 ° C. for 30 minutes, the resin portion is sufficiently cured to form the partition wall portion 5. The formed partition wall 5 has a thickness (height) of about 2 to 3 μm.

  As another method for forming the partition wall portion 5, a black pigment containing carbon particles or the like, a monomer of an acrylic resin or the like, and a polymerization initiator as a main component are formed on the substrate W by a spin coat method or the like. After applying a negative resist, the resist is temporarily baked. Next, the resist at a predetermined position is exposed using a photomask in which the pattern of the partition wall 5 is formed. The exposed resist undergoes a polymerization reaction of monomers, and becomes a resin insoluble in a solvent. Finally, by developing the resist, only a portion that is unnecessary after exposure remains, and a method of forming the partition wall portion 5 having a predetermined pattern may be used. In this way, since the partition wall 5 has light shielding properties, the light shielding layer 4 need not be formed.

(Discharge process)
In the discharging step, the substrate W on which the partition wall 5 is formed is placed on the mounting table 11 of the film forming apparatus 10 and fixed by a method such as vacuum suction. Then, as shown in FIG. 7B, colored ink (red) is ejected as an ink droplet 30 from the droplet ejection head 24 to the region where the pixel 2 is formed, and does not protrude into the region where the adjacent pixel 2 is formed. Thus, the ink layer 31 is formed so as to rise from the partition wall 5. As the colored ink, a pigment, a binder resin, and a high boiling point solvent (an organic solvent as a liquid medium) are essential components, and optionally further contain a polyfunctional monomer, a photopolymerization initiator, or other additives. preferable. In this case, butyl carbitol acetate (BCTAC) is used as the high boiling point solvent.

Examples of other high-boiling solvents include, for example, the formula R ¹ —O (CH ₂ CH ₂ O) ₂ —R ² (wherein R ¹ and R ² are each independently an alkyl group having 4 to 10 carbon atoms). Diethylene glycol dialkyl ether solvent represented by the formula: R ³ —O (CH ₂ CH ₂ O) ₃ —R ⁴ (wherein R ³ and R ⁴ are each independently an alkyl group having 1 to 10 carbon atoms) A triethylene glycol dialkyl ether solvent represented by the formula: R ⁵ —O (CH ₂ CH ₂ O) _i —R ⁶ (wherein R ⁵ and R ⁶ are independently of each other from 1 to 10 carbon atoms) A polyethylene glycol dialkyl ether solvent represented by the formula: R ⁷ —OCH (CH ₃ ) CH ₂ OR ⁸ (wherein R ⁷ and R ⁸ are Propylene glycol dialkyl ether solvents represented by C 4-10 alkyl groups independently of each other; glycerin triacetate, male Di-n-butyl fate, di-n-butyl fumarate, n-butyl benzoate, dimethyl phthalate, diethyl phthalate, di-n-propyl phthalate, di-i-propyl phthalate, di-phthalate Examples thereof include ester solvents such as n-butyl and i-amyl salicylate. The high boiling point solvent means a solvent having a boiling point of 250 ° C. or higher at 1 atmosphere.

  An organic solvent having a boiling point of less than 250 ° C. (hereinafter referred to as a low boiling point solvent) can be used in combination with the high boiling point solvent. Examples of the low boiling point solvent include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; ethylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate; diethylene glycol monoalkyl such as diethylene glycol monomethyl ether Ethers; diethylene glycol monoalkyl ether acetates such as diethylene glycol monomethyl ether acetate; propylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate; other ethers such as diethylene glycol dimethyl ether; alcohols such as 1-octanol; methyl ethyl ketone and the like The ketone Carboxylic acids such as caproic acid; alkyl lactates of methyl 2-hydroxypropionate; other esters such as ethyl 2-hydroxy-2-methylpropionate; aromatic hydrocarbons such as toluene and xylene be able to. The use ratio of the low boiling point solvent is usually 20% by weight or less, preferably 5% by weight or less, based on the total of the high boiling point solvent and the low boiling point solvent.

  The color tone is not particularly limited as the pigment, and is appropriately selected according to the use of the color filter to be obtained, and may be any of a pigment, a dye, or a natural colorant. In particular, an organic pigment or an inorganic pigment is used.

  Examples of the organic pigment include compounds classified as Pigment in the Color Index (CI; issued by The Society of Dyers and Colorists), specifically, C.I. I. Pigment Yellow 1, 3, 12, etc., C.I. I. Pigment orange 1, 5, 13 etc., C.I. I. Pigment red 1, 2, 3, etc., C.I. I. Pigment Blue 15, 15: 3, 15: 4, etc. are preferable. These organic pigments can be used alone or in admixture of two or more.

  Examples of inorganic pigments include titanium oxide, barium sulfate, calcium carbonate, zinc white, lead sulfate, yellow lead, zinc yellow, red bean (red iron (III) oxide), cadmium red, ultramarine blue, bitumen, and chromium oxide green. , Cobalt green, amber, titanium black, synthetic iron black, carbon black and the like.

  The binder resin is a polymer containing a carboxyl group, and particularly an ethylenically unsaturated monomer having one or more carboxyl groups (hereinafter simply referred to as “carboxyl group-containing unsaturated monomer”). And other copolymerizable ethylenically unsaturated monomers (hereinafter referred to as “other unsaturated monomers (b1)”) (hereinafter referred to as “carboxyl group-containing copolymer (B1)”. ") Is preferred. Examples of the carboxyl group-containing unsaturated monomer include acrylic acid, methacrylic acid, and crotonic acid. Furthermore, as other unsaturated monomer (b1), for example, aromatic vinyl compounds such as styrene, vinyl toluene, methoxy styrene, vinyl benzyl methyl ether; unsaturated carboxylic acid esters such as methyl acrylate, methyl methacrylate, etc. Can be mentioned. As the carboxyl group-containing copolymer (B1), acrylic acid and / or methacrylic acid and styrene, methyl acrylate, methyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, polystyrene macromonomer And a copolymer with at least one selected from the group of polymethyl methacrylate macromonomers.

(Drying process)
In the drying process, as shown in FIG. 7C, the ink layer 31 is heated by the heater 19 of the film forming apparatus 10, and the liquid medium in the ink layer 31 is evaporated and dried, whereby the color layer that becomes the pixel 2 is formed. (2R) is formed. In this case, the heating temperature of the substrate W is 150 to 270 ° C.

  By repeating the discharge process and the drying process for each colored ink, three color layers (2R, 2G, 2B) are formed as shown in FIG. The color layers (2R, 2G, 2B) may be formed by discharging the colored inks from the head groups 26R, 26G, 26B almost simultaneously and then drying them.

(Protective layer forming step)
Then, the protective layer 6 is formed so as to cover each color layer (2R, 2G, 2B) formed as shown in FIG. The protective layer 6 is formed by using the above-described film forming apparatus 10, and using a solution containing a transparent acrylic resin as a functional liquid as a functional material as droplets from the droplet discharge head 24, each color layer (2 R, 2 G). , 2B) is formed by discharging so as to cover the film forming region 1 on which the film is formed. And if it dries with the heater 19, the protective layer 6 can be formed.

  As another film forming method, a transparent photosensitive acrylic resin is coated on the substrate W by a spin coat method, a bar coat method, or the like, and then exposed and developed so that only a necessary portion remains as the protective layer 6. A film may be formed.

(Electrode formation process)
Further, as shown in FIG. 7F, transparent electrodes 7 corresponding to the respective color layers (2R, 2G, 2B) are formed on the upper surface of the protective layer 6. The transparent electrode 7 is formed by depositing ITO (Indium Tin Oxide) by vapor deposition, sputtering, or the like, and etching by photolithography.

(Solvent application process)
In the color filter film forming method of the present embodiment, the solvent application step applies the solvent substantially simultaneously with the discharge of the colored ink or before the discharge step. FIG. 8 is a schematic plan view showing a state in which a solvent is applied to the non-film formation region. FIG. 8A is a schematic plan view showing a state in which a solvent is applied in a frame shape, FIG. 8B is a schematic cross-sectional view showing the evaporation state of the colored ink and the solvent in FIG. c) is a schematic plan view showing a state in which the solvent is applied by changing the coating density between the central part and the outer periphery of the substrate, and FIG. 4D is a state in which the solvent is applied so as to be located on the windward side of the airflow. It is a schematic plan view which shows.

  Before describing the solvent application step, the evaporation rate of the liquid medium contained in the colored ink as the functional liquid applied to the film forming region 1 in the conventional color filter film forming method will be described with reference to FIG. FIG. 15A is a schematic cross-sectional view showing the evaporation state of the liquid medium contained in the colored ink, and FIG. 15B is a schematic cross-sectional view showing the color layer after drying.

  As shown in FIG. 15 (a), the liquid medium contained in the colored ink spreading in the film forming region 1 evaporates in the direction of the arrow in the figure when the above-described drying process is performed. At this time, the evaporation speed of the peripheral edge 1b is higher than that of the central part of the film forming region 1, and the liquid medium moves so as to be replenished toward the peripheral edge 1b having a high evaporation speed. Accordingly, the color material contained in the liquid medium also moves to the peripheral edge portion 1b. Therefore, as shown in FIG. 15B, the color layer after drying causes film thickness unevenness so that the film thickness becomes thick at the peripheral edge 1b. In the solvent application step, a solvent is applied to the peripheral region (non-film formation region) of the film formation region 1 so that the film thickness unevenness of the color layer is reduced. It should be noted that similar film thickness unevenness occurs when the protective layer 6 (see FIG. 7) is formed using a transparent acrylic resin as the functional liquid.

  In the solvent application step, as shown in FIG. 8A, a solvent is applied from the head group 26A to the peripheral area 8 surrounding the film forming area 1 on the substrate W. In this case, the same butyl carbitol acetate (BCTAC) as the liquid medium of the colored ink is used as the solvent. The vapor pressure of butyl carbitol acetate (BCTAC) is 5.3 Pa (0.0398 mmHg) at 20 ° C. Therefore, a solvent having a vapor pressure substantially equal to that of butyl carbitol acetate, such as butyl carbitol diacetate, may be used.

  As shown in FIG. 8B, since BCTC which is the same as the liquid medium of the colored ink exists in the peripheral area 8 surrounding the colored ink ejected to the film forming area 1, evaporation of BCTAC in the film forming area 1 The speed can be constant. Therefore, the film thickness unevenness of the color layer after the drying process can be reduced.

  Further, when a large number of film forming regions 1 are arranged in a matrix on the substrate W, as shown in FIG. 8C, the coating amount of the solvent is gradually increased from the center of the substrate W toward the outer periphery. Apply to. In this case, the region 8a where the solvent is applied in the vertical direction in the plan view and the region 8b where the solvent is applied in the horizontal direction in the plan view are combined in a lattice shape so that the amount of the solvent increases toward the outer periphery of the substrate W. It is applied. In this way, it is possible to reduce the difference in leveling of the colored ink between the film formation region 1 located in the center by efficiently applying the solvent and the film formation region 1 located in the outer periphery of the substrate W.

  In addition, since the solvent finally evaporates in the drying process and no unnecessary matter (film) remains after evaporating, the solvent is applied onto the mounting table 11 on which the substrate W is mounted beyond the outer periphery of the substrate W. May be. For example, when the protective layer 6 is formed on the entire surface of the entire surface of the substrate W with the film formation region 1, the leveling of the protective layer 6 is made uniform by employing a method of applying a solvent on the mounting table 11. It can be carried out.

  Further, as shown in FIG. 8D, an airflow that flows substantially in the same direction in parallel with the upper surface of the substrate W is generated, and the periphery of the film formation region 1 located on the windward side of the airflow with respect to the film formation region 1 A solvent may be applied to the region (non-film formation region 8c). In this way, the solvent applied to the non-film formation region 8c evaporates in the drying process and flows so as to wrap the film formation region 1 by the air current, so that the colored ink discharged into the film formation region 1 The liquid medium can be leveled at a constant evaporation rate. That is, it is possible to level the colored ink that has been applied to the film forming region 1 by applying the solvent more efficiently.

  In the solvent application step, the solvent need not be applied using the droplet discharge head 24. For example, a dispenser, which is one of the quantitative discharge devices, is filled with a solvent, and the dispenser is engaged with the X-direction guide shaft 12 in a state in which the dispenser can move in the sub-scanning direction (X direction). Then, the solvent may be applied to the non-film formation region from the dispenser between the main scan of the substrate W and the sub-scan of the dispenser.

  A characteristic solvent discharge pattern using the droplet discharge head 24 in the solvent application step of the present embodiment will be described with reference to FIG. FIG. 9 is a schematic plan view showing a solvent discharge pattern. FIG. 4A is a schematic plan view showing a discharge pattern of a solvent as a droplet in a non-film formation region, and FIG. 4B is a discharge of a solvent as a droplet in an unformed pixel formation region and a non-film formation region. It is a schematic plan view which shows a pattern. FIG. 9 is an enlarged view of a portion surrounded by a circle 1a in FIG. Moreover, the code | symbol 41 in a figure has shown the state of the landed solvent.

  As shown in FIG. 9A, when the arrangement of the color layers (2R, 2G, 2B) to be the pixel 2 of the color filter is the delta system, the color layers (2R, 2G, 2B) is misaligned. Therefore, since the vertical direction in plan view of the film forming region 1 is not linear, when the solvent is applied using the dispenser as described above, the main scanning of the substrate W or the sub-scanning of the dispenser becomes complicated and difficult to control. . On the other hand, if the droplet discharge head 24 is used and a solvent is discharged by using a discharge pattern for discharging colored ink to a region for forming the pixel 2 (hereinafter referred to as “pixel formation region”), the pixel formation region is formed. The solvent can be ejected and landed on the non-film-forming region at the same arrangement pitch as the arrangement pitch of the discharged colored ink. That is, leveling of the colored ink can be performed more uniformly by equally disposing the solvent in the non-film forming region as in the case of the colored ink.

  Also, as shown in FIG. 9B, when the color layer (2R, 2G, 2B) is formed in order by repeating the discharge step and the drying step, for example, red (R) colored ink is discharged, If the solvent is ejected as droplets from the droplet ejection head 24 to the undeposited pixel region, that is, the region where the color layers (2G, 2B) are deposited and the non-film formation region, the solvent is evenly distributed in the film formation region 1 as well. Can be arranged. Therefore, leveling of the red (R) colored ink can be performed uniformly.

  In addition, if the droplet discharge head 24 is used to discharge the solvent to the non-film formation region so that it slightly increases corresponding to the amount of the color ink discharged to the pixel formation region, the liquid medium in the color ink is removed in the drying process. An appropriate amount of solvent can be dispensed such that the solvent remains until transpiration.

  Further, the evaporation state of the solvent in the drying process may be monitored, and if necessary, the solvent may be additionally discharged from the droplet discharge head 24 during the drying. That is, if the solvent is applied so that the liquid medium in the colored ink evaporates slightly before the solvent evaporates in the drying step, there is no waste and the colored ink can be efficiently leveled.

  Next, another solvent coating method will be described with reference to FIG. Another solvent application method is a method in which a recess or groove is formed in the peripheral region of the film formation region 1 of the substrate W, and in the solvent application step, a solvent is applied to the recess or groove. FIG. 10 is a schematic cross-sectional view showing a method of applying a solvent to the groove formed in the non-film formation region. As shown in FIG. 10, a groove 50 having a width of about 10 μm and a depth of about 30 μm is provided in a non-film forming region on the substrate W to which a solvent is applied. For example, if the substrate W is a glass substrate, before the bank forming step for forming the light shielding layer 4 and the partition wall portion 5, a portion other than the location where the groove portion 50 in the non-film formation region of the substrate W is formed is covered with an etching resist by photolithography. Next, if the surface of the substrate W is etched using hydrofluoric acid or the like, the grooves 50 can be formed with a fine width and pitch. Then, after forming the light shielding layer 4 and the partition wall portion 5 in the bank forming step, for example, in the discharging step, red colored ink is discharged from the head group 26R to the pixel forming region as ink droplets 30, and the solvent is removed from the head group 26A. The droplets 40 are discharged toward the groove 50. The landed solvent spreads out so as to fill the groove 50, and the solvent can be surely disposed in the non-film forming region.

  In addition, the groove part 50 may be a recessed part appropriately arranged. Further, as shown in FIG. 1, when a plurality of film forming regions 1 are partitioned on the substrate W, a portion serving as a boundary for dividing the plurality of film forming regions 1 later by a method such as dicing or scribing. The groove portion 50 may be formed in advance to serve as a guide for division.

  Next, the above-mentioned solvent coating process can be applied to the above-mentioned protective layer forming process. In the protective layer forming step of this embodiment, a transparent acrylic resin is used as a material for forming the protective layer 6, and this is dissolved in diethylene glycol methyl ethyl ether as a liquid medium to prepare an overcoat solution (OC solution). . The OC solution is filled in the droplet discharge head 24 and discharged so as to cover the film formation region 1 in which the color layers (2R, 2G, 2B) are formed. Further, substantially simultaneously with or before the discharge of the OC solution, it is applied to the non-film forming region using diethylene glycol methyl ethyl ether, which is the liquid medium of the OC solution, as a solvent. As a result, the protective layer 6 can be uniformly leveled to reduce film thickness unevenness. The vapor pressure of diethylene glycol methyl ethyl ether is 133 Pa (0.997 mmHg) at 20 ° C. In this case, for example, diethylene glycol diethyl ether or the like having a substantially equivalent vapor pressure may be used as the solvent.

  Such a protective layer 6 not only covers and protects the film (color layer) that becomes the pixel 2 but also a wiring portion such as a metal wiring formed using a conductive metal material as a functional material. It can also be used as a covering insulating film.

  The arrangement of the film forming apparatus 10 for realizing the color filter film forming method will be described with reference to FIG. FIG. 11 is a schematic view showing the arrangement of the film forming apparatus. FIG. 4A is a schematic view showing the case where two film forming apparatuses are used, FIG. 5B is a schematic view showing the case where four film forming apparatuses are used, and FIG. It is the schematic which shows the case where a solvent coating apparatus is arrange | positioned between the film-forming apparatuses of a stand.

  As shown in FIG. 11A, after the color layer (2R, 2G, 2B) is formed by one film forming apparatus 10 using the color filter forming method, another film forming apparatus 10 is used. Then, the protective layer 6 is formed. According to this, the number of film forming apparatuses 10 can be reduced as much as possible, and the color filter can be formed in a space-saving manner.

  As shown in FIG. 11B, the color layers (2R, 2G, 2B) are formed separately using three film forming apparatuses 10, and then the protective layer 6 is formed using another film forming apparatus 10. To do. According to this, it is possible to form a color filter with higher productivity than in FIG.

  As shown in FIG. 11C, a dedicated coating device 60 for coating the solvent is prepared separately. As described above, the coating device 60 may be a device that uses a quantitative discharge device such as a dispenser for the type in which the solvent is discharged from the droplet discharge head 24. The coating apparatus 60 is disposed in the previous stage of each film forming apparatus 10 shown in FIG. According to this, the structure of the film-forming apparatus 10 can be made simpler by providing the exclusive application apparatus 60 which apply | coats a solvent.

  The color filter substrate formed by using the film forming method and the film forming apparatus 10 according to the present embodiment is a pixel substrate using an inorganic or organic color material as a film material to be a pixel, and is used in an electro-optical device. . Further, for example, when an inorganic or organic EL light emitting material is used as a film material for a pixel and a light emitting layer is formed in a pixel formation region on the substrate W, an EL element substrate as a pixel substrate of an EL display device as an electro-optical device, and can do.

  Next, an electro-optical device according to an embodiment of the present invention will be described with reference to FIGS. FIG. 12 is a schematic exploded perspective view showing a liquid crystal display device as an electro-optical device. FIG. 13 is a schematic cross-sectional view of a main part of the liquid crystal display device taken along line DD in FIG. The liquid crystal display device 100 of this embodiment includes a first substrate 70 as a color filter substrate formed as a pixel substrate using the color filter film forming method. In the present specification, the liquid crystal layer 90 side in each component of the liquid crystal display device 100 is referred to as an inner side.

  As shown in FIG. 12, the liquid crystal display device 100 is configured by sandwiching a liquid crystal layer 90 between a first substrate 70 and a second substrate 80. A nematic liquid crystal or the like is used for the liquid crystal layer 90, and a twisted nematic (TN) mode is used as an operation mode of the liquid crystal display device 100. Note that liquid crystal materials other than those described above can be employed, and operation modes other than those described above can be employed. Hereinafter, an active matrix liquid crystal display device 100 using a TFD element as a switching element will be described as an example. However, the present invention is applied to other active matrix liquid crystal display devices and passive matrix liquid crystal display devices. It is also possible to apply.

As shown in FIG. 12, in the liquid crystal display device 100, the 1st board | substrate 70 and the 2nd board | substrate 80 which consist of transparent materials, such as glass, are opposingly arranged. A plurality of data lines 81 are formed inside the second substrate 80. A plurality of pixel electrodes 82 made of a transparent conductive material such as ITO are arranged in a matrix on the side of the data line 81. A pixel region (pixel) is formed by the formation region of each pixel electrode 82. The pixel electrode 82 is connected to each data line 81 via the TFD element 83. The TFD element 83 includes a first conductive film mainly composed of Ta formed on the surface of the substrate, an insulating film mainly composed of Ta ₂ O ₃ formed on the surface of the first conductive film, and an insulation thereof. A second conductive film mainly composed of Cr formed on the surface of the film (so-called MIM structure). The first conductive film is connected to the data line 81 and the second conductive film is connected to the pixel electrode 82. Accordingly, the TFD element 83 functions as a switching element that controls energization to the pixel electrode 82.

  On the other hand, a color filter film 72 formed using the above-described color filter film forming method is formed inside the first substrate 70. The color filter film 72 is configured by color filters 72R, 72G, 72B having a substantially rectangular shape in plan view. Each of the color filters 72R, 72G, 72B is composed of a pigment or the like that transmits only different color light, and is arranged in a matrix corresponding to each pixel region. Further, in order to prevent light leakage from adjacent pixel regions, a light shielding film 77 is formed on the peripheral edge of each color filter 72R, 72G, 72B. The light shielding film 77 is formed in a frame shape from black metal chrome having light absorptivity. Further, a transparent insulating film 79 as a protective layer is formed in the protective layer forming step in the color filter film forming method so as to cover the color filter film 72 and the light shielding film 77.

  A plurality of scanning lines are formed inside the insulating film 79. The scanning lines are formed in a substantially band shape by a transparent conductive material such as ITO and extend in a direction intersecting with the data lines 81 of the second substrate 80. The scanning line is formed so as to cover the color filters 72R, 72G, 72B arranged in the extending direction, and functions as the counter electrode 86. When a scanning signal is supplied to the counter electrode 86 serving as a scanning line and a data signal is supplied to the data line 81, an electric field is applied to the liquid crystal layer 90 sandwiched between the pixel electrode 82 and the counter electrode 86. It has become.

  As shown in FIG. 13, alignment films 74 and 84 are formed so as to cover the pixel electrode 82 and the counter electrode 86. The alignment films 74 and 84 control the alignment state of the liquid crystal molecules when no electric field is applied, and are made of an organic polymer material such as polyimide, and the surface thereof is rubbed. As a result, when no electric field is applied, the liquid crystal molecules in the vicinity of the surfaces of the alignment films 74 and 84 are aligned substantially parallel to the alignment films 74 and 84 with the major axis direction coinciding with the rubbing treatment direction. . The alignment films 74 and 84 are rubbed so that the alignment direction of the liquid crystal molecules in the vicinity of the surface of the alignment film 74 and the alignment direction of the liquid crystal molecules in the vicinity of the surface of the alignment film 84 intersect at a predetermined angle. Processing has been applied. Thereby, the liquid crystal molecules constituting the liquid crystal layer 90 are stacked so as to rotate (twist) in the thickness direction of the liquid crystal layer 90.

  Further, the peripheral edge of the first substrate 70 and the second substrate 80 is bonded by a sealing material 92 made of an adhesive such as a thermosetting type or an ultraviolet curable type. The liquid crystal layer 90 is sealed in a space surrounded by the first substrate 70, the second substrate 80, and the sealing material 92. Note that the thickness (cell gap) of the liquid crystal layer 90 is regulated by the spacer particles 91 arranged between the two substrates. On the other hand, a polarizing plate (not shown) is disposed outside the first substrate 70 and the second substrate 80. Each polarizing plate is arranged such that the mutual polarization axis (transmission axis) corresponds to the angle of the rubbing process. Further, a backlight (not shown) is disposed outside the incident side polarizing plate.

  The light emitted from the backlight is converted into linearly polarized light along the polarization axis of the incident-side polarizing plate and enters the liquid crystal layer 90 from the first substrate 70. This linearly polarized light is rotated by a predetermined angle along the twist direction of the liquid crystal molecules in the process of passing through the liquid crystal layer 90 in a state where no electric field is applied, and is transmitted through the output side polarizing plate. Thereby, white display is performed when no electric field is applied (normally white mode). On the other hand, when an electric field is applied to the liquid crystal layer 90, liquid crystal molecules are aligned in a direction substantially perpendicular to the alignment films 74 and 84 along the electric field direction. In this case, since the linearly polarized light incident on the liquid crystal layer 90 does not rotate, it does not pass through the output side polarizing plate, that is, is shielded from light. Thereby, a so-called black display that is shielded from light when an electric field is applied is performed. Note that gradation display can also be performed depending on the strength of an applied electric field. The liquid crystal display device 100 is configured as described above.

  Next, an electronic apparatus according to an embodiment of the present invention will be described with reference to FIG. FIG. 14 is a perspective view showing an example of an electronic apparatus according to the invention. A cellular phone 1300 as an electronic apparatus shown in this figure includes the above-described electro-optical device as a small-size display unit 1301 and includes a plurality of operation buttons 1302, a reception mouth 1303, and a mouthpiece 1304. . The electro-optical device described above is not limited to the cellular phone 1300, but is an electronic book, a personal computer, a digital still camera, a liquid crystal television, a viewfinder type or a monitor direct-view type video tape recorder, a car navigation device, a pager, an electronic notebook, a calculator. It can be suitably used as an image display means for a device such as a word processor, workstation, videophone, POS terminal, touch panel, etc. In any case, an electronic device with excellent display quality can be provided.

  The technical scope of the present invention is not limited to the above-described embodiments, and includes those in which various modifications are made to the above-described embodiments without departing from the spirit of the present invention. That is, the specific materials and configurations described in the embodiments are merely examples, and can be changed as appropriate.

The effects in the present embodiment are as follows.
(1) In the method for forming a color filter according to the present embodiment, in the solvent application step, a solvent having a vapor pressure that is the same or substantially the same as that of the colored ink liquid medium is left until the liquid medium evaporates in the drying process. It is applied to the peripheral area (non-film forming area 8) of the film forming area 1. Therefore, in the drying process, the ink layer 31 of the colored ink ejected to the pixel formation region 2 partitioned and formed in the film formation region 1 exists, and the solvent applied to the peripheral region of the film formation region 1 exists. The evaporation rate of the liquid medium in the colored ink in the film formation region 1 in one substrate or the film formation region 1 located at the peripheral edge of the substrate W is kept constant, and can be leveled uniformly. Therefore, after drying, a color filter having color layers (2R, 2G, 2B) made of a color material with little film thickness unevenness can be formed. Further, after drying, the solvent applied to the peripheral area of the film forming area 1 also evaporates, so that no color is left in the film forming area 1 without leaving an unnecessary object (film) in the peripheral area of the film forming area 1. Layers (2R, 2G, 2B) can be deposited.
(2) In the solvent application step, since the solvent is applied to the peripheral region of the film forming region 1 at the same time or before the discharge of the colored ink, the discharged color is discharged from the discharge step of discharging the colored ink to the drying step. A solvent always exists around the ink, and the leveling of the colored ink can be performed more uniformly.
(3) In the solvent application step, the solvent is ejected as droplets from the head group 26A composed of the droplet ejection heads 24. Therefore, the solvent is applied to the non-film forming region 8 at the same arrangement pitch as the arrangement pitch of the discharged colored ink. Can be discharged and arranged. Therefore, it is possible to suppress unevenness in the evaporation rate of the liquid medium of the colored ink and achieve more uniform colored ink leveling.
(4) In the solvent application step, the coating is performed so that the amount of the solvent applied gradually increases from the central portion of the substrate W toward the outer periphery, so that the coloring discharged to the film forming region 1 located at the central portion of the substrate W is performed. The difference between the evaporation speed of the liquid medium in the ink and the evaporation speed of the liquid medium in the colored ink discharged to the film forming region 1 located at the peripheral edge can be reduced more efficiently. Therefore, it is possible to reduce the leveling difference between the film forming region 1 located in the central portion and the film forming region 1 located in the peripheral portion by efficiently applying the solvent.
(5) In the solvent application step, an airflow that flows in substantially the same direction in parallel with the upper surface of the substrate W is generated, and in a peripheral region (non-film formation region 8c) located on the windward side of the airflow with respect to the film formation region 1. Apply solvent. In this way, the solvent applied to the non-film formation region 8c evaporates in the drying process and flows so as to wrap the film formation region 1 by the air current, so that the colored ink discharged into the film formation region 1 The liquid medium can be leveled at a constant evaporation rate. That is, it is possible to level the colored ink that has been applied to the film forming region 1 by applying the solvent more efficiently.
(6) In another solvent application method, a recess or groove 50 is formed in the peripheral region of the film formation region 1 of the substrate W. In the solvent application step, a solvent is applied to the recess or groove 50. According to this, it is possible to apply the solvent to the concave portion or the groove portion 50 formed in the peripheral region of the film forming region 1 and spread it wet. Therefore, even if the coating unevenness of the solvent occurs, the solvent wets and spreads along the concave portion or the groove portion 50, so that the solvent can be surely arranged in the peripheral region of the film forming region 1.
(7) The solvent coating step can also be applied to a protective layer forming step for forming the protective layer 6. A solvent having the same or substantially the same vapor pressure as the liquid medium of the functional liquid is used at the same time or before the liquid discharge medium 24 is discharged from the droplet discharge head 24 so as to cover the film forming region 1 using a transparent acrylic resin as the functional liquid. If the coating is applied from the group 26A to the non-film formation region, the protective layer 6 with little film thickness unevenness can be formed covering the film formation region 1.
(8) In the film forming apparatus 10, the control unit 18 causes the colored ink to be ejected as droplets from the head groups 26 </ b> R, 26, G, and 26 </ b> B to the pixel region partitioned and formed in the film forming region 1 on the substrate W. Further, a film having a vapor pressure equal to or substantially the same as the liquid medium of the colored ink from the head group 26A is formed until the liquid medium evaporates in a subsequent drying step, substantially simultaneously with or before the discharge of the colored ink. Discharge to the peripheral area of area 1. Then, the heater 19 heats and drys the colored ink and the solvent discharged and applied onto the substrate W. Thereby, the color layers (2R, 2G, 2B) made of the color material contained in the colored ink are formed. Therefore, since the solvent remains in the peripheral area of the applied colored ink until the drying is completed, the evaporation rate of the liquid medium can be kept constant and leveling can be performed. Therefore, a color filter composed of a color layer with little film thickness unevenness can be formed. As a result, it is possible to provide a color filter substrate as a pixel substrate having a color filter with little film thickness unevenness.
(9) The liquid crystal display device 100 includes the first substrate 70 which is a color filter substrate formed using the color filter film forming method and the film forming apparatus 10 of the present embodiment. Therefore, it is possible to provide the liquid crystal display device 100 as an electro-optical device that has high display quality with little color unevenness, color tone unevenness, and contrast unevenness, with little film thickness unevenness of the color filters (72R, 72G, 72B).
(10) Since the mobile phone 1300 includes the liquid crystal display device 100 as a small-sized electro-optical device as the display unit 1301, the information such as an image is confirmed by the electro-optical device having good display quality and high display quality. It is possible to provide a mobile phone 1300 as an electronic device that can be used.

Modifications other than the present embodiment are as follows.
(Modification 1) In the droplet discharge head 24, one of the two nozzle rows 1A and 1B may discharge the solvent, and the other one may discharge the colored ink. According to this, the droplet discharge mechanism can be further simplified.
(Modification 2) In the head unit 21, the head group 26 </ b> A that discharges the solvent is disposed before and after the Y direction (main scanning direction), but may be configured on only one side. When the color layers (2R, 2G, 2B) are formed by reciprocating in the main scanning direction by using colored ink, if a mechanism for rotating the head unit 21 or the substrate W by 180 degrees is provided, it is substantially the same as discharging colored ink. The solvent can be discharged simultaneously or before.
(Modification 3) In the color filter film forming method of this embodiment, in the solvent application step, the application amount is changed by changing the areas of the regions 8a and 8b to which the solvent is applied between the central portion and the outer periphery of the substrate W. However, the application amount may be changed by changing the number of landings of the solvent landing on the outer periphery with respect to the central portion using the head group 26A.

The technical idea grasped from this embodiment and the modification is as follows.
(1) A film forming method for forming a film made of a functional material in a film forming region on a substrate, the step of applying a solution in which the functional material is dispersed or dissolved to the film forming region on the substrate; A film forming method comprising: a step of applying a solvent having an evaporation rate substantially equal to that of a solution to a peripheral region of the film forming region; and a drying step of heating and drying the substrate on which the solution and the solvent are applied.
(2) The film forming method of applying the solvent to the peripheral area of the film forming region so that the solution is slightly dried earlier in the drying step in (1).

The schematic plan view which shows arrangement | positioning of the film formation area on a board | substrate. The schematic plan view which shows the arrangement | sequence of the element (pixel) of a color filter. The schematic perspective view which shows the structure of the film-forming apparatus. FIG. 3 is a schematic plan view showing a head group attached to the head unit. FIG. 2 is a schematic plan view showing a nozzle arrangement of a droplet discharge head. The block diagram which shows the electrical structure with each part relevant to a control part and a control part. The schematic sectional drawing which shows the structure of the color filter board | substrate cut | disconnected by the AA line of FIG. The schematic plan view which shows the state which apply | coated the solvent to the non-film formation area. The schematic plan view which shows a solvent discharge pattern. The schematic sectional drawing which shows the method of apply | coating a solvent to the groove part formed in the non-film formation area. Schematic which shows arrangement | positioning of the film-forming apparatus. 1 is a schematic exploded perspective view showing a liquid crystal display device as an electro-optical device. The principal part schematic sectional drawing of the liquid crystal display device cut | disconnected by the DD line | wire of FIG. FIG. 11 is a perspective view illustrating an example of an electronic apparatus according to the invention. (A) is a schematic sectional drawing which shows the evaporation state of the liquid medium contained in colored ink, (b) is a schematic sectional drawing which shows the color layer after drying.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Film formation area, 2 ... Color layer as pixel or film, 6 ... Protection layer as a protective film, 8 ... Peripheral area (non-film formation area) of film formation area, 10 ... Film-forming apparatus, 18 ... Control part , 19 ... heater as drying means, 24 ... droplet discharge head as droplet discharge section, 26A ... head group as solvent application section, 30 ... colored ink as functional liquid, 40 ... solvent, 50 ... groove section, 70 DESCRIPTION OF SYMBOLS 1st board | substrate which is a color filter board | substrate as a pixel board | substrate, 79 ... Insulating film as a protective film, 100 ... Liquid crystal display device as an electro-optical device, 1300 ... Mobile phone as an electronic device, W ... Substrate.

Claims (17)

A film forming method for forming a film made of a functional material in a film forming region on a substrate,
A discharge step of discharging a functional liquid as droplets onto the film forming region on the substrate;
A solvent application step of applying a solvent having a vapor pressure equal to or substantially equivalent to the liquid medium of the functional liquid to a peripheral region of the film forming region;
A drying step of evaporating the liquid medium of the discharged functional liquid;
A film forming method comprising:   2. The film forming method according to claim 1, wherein, in the solvent application step, the solvent is applied so as to remain until the liquid medium of the functional liquid evaporates in the drying step.   3. The film forming method according to claim 1, wherein, in the solvent application step, the solvent is applied to a peripheral region of the film formation region substantially simultaneously or before the functional liquid is applied.   The film forming method according to claim 1, wherein in the solvent application step, the solvent is ejected as droplets and applied.   In the solvent application step, the evaporation rate of the functional liquid discharged to the film forming region located in the central part of the substrate and the functional liquid discharged to the film forming region located in the outer peripheral part of the substrate 5. The film forming method according to claim 1, wherein the coating is performed by gradually increasing the coating amount of the solvent from the center of the substrate toward the outer periphery so as to reduce the difference. .   In the solvent application step, an airflow that flows in substantially the same direction in parallel with the upper surface of the substrate is generated, and the solvent is applied to a peripheral area on the windward side of the airflow with respect to the film formation region. The film-forming method as described in any one of Claims 1 thru | or 5. The substrate has a recess or a groove in a peripheral region of the film formation region,
The film forming method according to claim 1, wherein, in the solvent application step, the solvent is applied to the concave portion or the groove portion.   8. The film serving as the pixel partitioned and formed in the film formation region is formed using a film material that constitutes a pixel of an electro-optical device as the functional liquid. The film forming method according to item.   Using a transparent resin material as the functional liquid, forming a protective film that covers and protects the pixels of the electro-optical device partitioned in the film formation region or the wiring portion partitioned in the film formation region The film forming method according to claim 1, wherein the film forming method is characterized in that:   Using a film material that constitutes a pixel of an electro-optical device as the functional liquid, after forming a film that becomes the pixel partitioned in the film formation region, using a transparent resin material as the functional liquid, The film forming method according to claim 1, wherein a protective film that covers and protects the region where the film is formed is formed.   A plurality of films to be the pixels are arranged in the film forming area, and in the solvent application step, the solvent is applied to the peripheral area of the film forming area at a pitch substantially equal to the arrangement pitch of the pixels. The film forming method according to claim 8 or 10, wherein: A film forming apparatus for forming a film made of a functional material in a film forming region on a substrate,
A droplet discharge unit that discharges the functional liquid as droplets;
A solvent application unit for applying a solvent having the same or substantially the same vapor pressure as the liquid medium of the functional liquid;
Drying means for evaporating the liquid medium of the discharged functional liquid;
A controller that controls the droplet discharge unit, the solvent application unit, and the drying unit;
The control unit controls to apply the solvent from the solvent application unit to a peripheral region of the film formation region so that the solvent remains until the liquid medium is evaporated by the drying unit. Membrane device.   The film formation according to claim 12, wherein the control unit controls the solvent application unit to apply the solvent substantially simultaneously or before the droplet discharge unit discharges the functional liquid. apparatus.   The film forming apparatus according to claim 12, wherein the solvent application unit applies the solvent by discharging the solvent as droplets. A pixel substrate having a plurality of pixels constituting an electro-optical device,
The film material that constitutes the pixel is used as the functional liquid, and the film that becomes the pixel partitioned and formed in the film formation region is formed using the film forming method according to claim 8. A pixel substrate characterized by being filmed.   An electro-optical device comprising the pixel substrate according to claim 15. An electronic apparatus comprising the electro-optical device according to claim 16.

Images