JP4552768B2 - Movable element, and semiconductor device, module and electronic equipment incorporating the movable element - Google Patents

Description

  The present invention relates to a movable element such as a switching element or a capacitive element to which an element technology of MEMS (Micro Electro Mechanical Systems) is applied, and a semiconductor device, module, and electronic apparatus incorporating the movable element.

  With recent improvements in integration technology, electronic devices are rapidly becoming smaller and lighter, operating at lower voltage, lowering power consumption, and operating at higher frequencies. In particular, in the technical field of mobile communication terminal devices such as mobile phones, the above requirements are severe, and higher functionality is also demanded. MEMS is attracting attention as one of the technologies for solving these conflicting problems. ing. This MEMS is a system in which micro mechanical elements and electronic circuit elements are fused by silicon process technology, and is mainly called a micro machine in Japan. The MEMS technology can realize a small and low-cost SoC (System on a Chip) while supporting high functionality due to its excellent features such as precision workability.

  Therefore, in the technical field of mobile communication terminal devices, various semiconductor elements using the MEMS technology, such as Non-Patent Document 1 (thermal switch), Non-Patent Document 2 (thermal switch and electrostatic switch), Non-Patent Document 3 (Electromagnetic switch and electrostatic switch), Patent Document 1 (Electromagnetic switch), Patent document 2 (Electrostatic switch), Patent document 3 (Piezoelectric switch), switching elements described respectively have been developed.

Matsushita Electric Works Technical Report May 2001 “Thermal Driven Micro Relay Using Silicon Bimetal” RF MEMS and Switches for Communication Systems: 4th Annual Review of LETI, 26 Jun 2002 MEMS2005 Proceedings p32-35 US Patent No. 0196110, etc. US Pat. No. 0098613, etc. JP 2004-158769 A

  However, even in the switching elements of Non-Patent Document 1 and Patent Documents 1 to 3, the power consumption increases to, for example, about several hundred mW, or the drive voltage increases to, for example, more than 20 V. There is a problem that it is practically impossible to form the switching element integrally with a low voltage / low power consumption element having, for example, a driving voltage of several V level and power consumption of several mW level. Further, in the above non-patent document 2, there is a problem that the manufacturing process becomes complicated because it is necessary to introduce a new manufacturing process in order to give the mover “deflection” for stroke of the mover. . In Non-Patent Document 3 described above, since it is necessary to provide an element that generates a magnetic field adjacent to the switching element, the degree of freedom of layout on the substrate is limited, thereby preventing the package size from being reduced. There is a problem.

  The present invention has been made in view of the above problems, and its object is to make the manufacturing process easy and to prevent the package size from being reduced, and to be integrated with a low voltage / low power consumption element. It is an object of the present invention to provide a movable element with low voltage and low power consumption to such an extent that it can be formed, and a semiconductor device, a module, and an electronic apparatus incorporating the movable element.

  The movable element of the present invention includes a signal line for transmitting a signal, a connection means for mechanically connecting the signal line, a switching means for switching the connection means, and a connection on the semiconductor substrate. Holding means for holding the state after switching of the cutting means. These connection means, switching means and holding means each have a pair of movers and stators arranged opposite to each other, and the mover of the holding means is connected to the connection means and switching means via an elastic part. It is connected with each mover.

  The semiconductor device, module, and electronic apparatus of the present invention incorporate the above-described movable element.

  In the movable element, the semiconductor device, the module, and the electronic device of the present invention, the connection of the connection means and the holding of the state after the connection of the connection means are coordinated by the switching means and the holding means via the elastic portion. (Two-way drive). The elastic portion may be anything that can be formed using a normal manufacturing process, and is constituted by, for example, a meander spring. By interposing such an elastic part, it is possible to easily operate the connecting means, and therefore it is necessary to use a complicated manufacturing process such as providing “deflection” when forming the switching means and the holding means. There is no. Note that these switching means and holding means operate by receiving a current supply, and do not operate by receiving an electromagnetic field from the outside. Therefore, it is not necessary to dispose a driving unit for driving the movable element adjacent to the switching unit and the holding unit.

  The switching means is constituted by, for example, an electromagnetic actuator, and the holding means is constituted by, for example, an electrostatic actuator. Here, the electromagnetic actuator uses, for example, an electromagnetic force (attraction force) induced by applying a magnetic field generated from a stator including a thin film coil to a mover including the thin film coil. Thus, the mover is driven, and the mover can be stroked greatly at a low voltage. An electrostatic actuator, for example, drives a mover by using an electrostatic force generated by an induced charge of a capacitor composed of a conductive mover and a stator. It is possible to stroke and hold.

  According to the movable element, the semiconductor device, the module, and the electronic device of the present invention, the connection of the connection means and the holding of the state after the connection of the connection means are performed by the switching means and the holding means via the elastic portion. Since it is performed by cooperative operation, it can be formed using a normal manufacturing process. In addition, since it is not necessary to dispose a driving unit for driving the movable element adjacent to the switching unit and the holding unit, the degree of freedom of layout on the substrate is not limited. In addition, an optimum circuit configuration can be selected according to the purpose and application. For example, if you want to connect the signal line with a large stroke, select the electromagnetic actuator as the switching means. On the other hand, if you want to keep the state after switching the connection means for a long time, hold the electrostatic capacitor. It is also possible to select as a means. In this way, by selecting the optimum circuit configuration according to the purpose and application, low voltage and low power consumption that can be integrated with low voltage and low power consumption elements can be achieved. Both can be achieved. Accordingly, the manufacturing process is easy, the reduction in package size is not hindered, and the device can be formed integrally with a low voltage / low power consumption element.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  First, an embodiment of the present invention will be described. FIG. 1 shows the constituent elements of the switching element (movable element) according to the present embodiment for each functional block. FIG. 2 shows an example of the cross-sectional configuration of the switching element. FIGS. 1 represents an example of a planar configuration of the switching element. 2 shows a cross-sectional configuration in the direction of arrows AA in FIG. 3 or in the direction of arrows BB in FIG. This switching element is a minute structure (so-called micromachine) mounted in a transmission path for transmitting a signal from one element (not shown) to another element (not shown), and preferably another element. Are formed in the same package, and are more preferably packaged and packaged by SiP (System in Package) or mixedly mounted as a part of SoC. The switching element includes a switching structure 10 on a semiconductor substrate 1.

The semiconductor substrate 1 mainly supports elements constituting the switching element. For example, silicon (Si), silicon carbide (SiC), silicon germanium (SiGe), and silicon germanium carbon (SiGeC). Or a non-Si substrate such as glass, resin and plastic. An insulating layer 2 is provided on the surface of the semiconductor substrate 1. The insulating layer 2 electrically isolates the switching structure 10 from the substrate 10 and is made of, for example, an insulating material such as silicon oxide (SiO ₂ ) or silicon nitride (SiN).

  The switching structure 10 is an aggregate structure configured by arranging a plurality of microstructures formed using surface micromachining technology. The switching structure 10 includes a signal line 11, a connection part 12 (connection means), a switching part 13 (switching means), a holding part 14 (holding means), an elastic part 15, a support part 16, and an element driving part 17 ( Drive circuit) (see FIG. 1). The signal line 11 extends in the Y-axis direction in FIG. 2 and is connected to the connecting portion 12. The connection part 12, the switching part 13, the holding part 14, and the support part 16 are connected to each other via the elastic part 15 and arranged along the X-axis direction. Here, as shown in FIG. 3, the switching unit 12, the switching unit 13, the holding unit 14, and the support unit 16 include the switching unit 13 between the support units 16 and the holding unit 14 between the switching units 13. Each of the connecting portions 12 may be arranged between the holding portions 14 and may be arranged in the X-axis direction, or as shown in FIG. 4 so as to surround the connecting portion 12. Further, the holding unit 14 may be configured by arranging the switching unit 13 so as to surround the holding unit 14 and the support unit 16 so as to surround the switching unit 13.

  The connecting portion 12 constitutes a set of stators 12A and movers 12B constituting a predetermined space G, the switching portion 13 constitutes a mover 13B constituting a predetermined space G, and the holding portion 14 constitutes a predetermined space G. Each has a pair of stators 14A and movers 14B. Thus, the switching structure 10 has a both-supported beam-type cross-sectional structure in the X-axis direction.

  The stator 12 </ b> A and the movable element 12 </ b> B of the connection part 12 are configured by, for example, a flat plate made of a conductive material or a dielectric material.

  As illustrated in FIGS. 5A to 5C, the stator 13 </ b> A and the movable element 13 </ b> B of the switching unit 13 include the flat plates 13 </ b> A- 1 and 13 </ b> B- 1 made of an insulating material and a thin-film coil 13 </ b> A made of a conductive material. -2 and 13B-2.

  The stator 14A of the holding unit 14 has a structure in which a conductive layer 14A-1 and a high resistance layer 14A-2 are stacked in this order. The conductive layer 14A-1 is made of a conductive material, and the high resistance layer 14A- 2 is made of a high resistance material, and the movable element 14B of the holding portion 14 is made of a conductive material. Here, the conductive material is preferably a material that is compatible with a complementary metal oxide semiconductor (CMOS) process such as aluminum (Al) or copper (Cu). The high resistance material is a concept including a dielectric material and an insulating material. Further, instead of providing the high resistance layer 14A-2, or together with the high resistance layer 14A-2, a high resistance layer may be provided on the surface of the stator 14A on the space G side. This is because the disappearance of the induced charge when the stator 14A and the movable element 14B come into contact with each other can be prevented.

  As described above, the movable element 13B of the switching unit 13 is connected to the movable element 14B of the holding unit 14 via the elastic part 15, and is also connected to the movable element 12B of the connecting part 12 via the elastic part 15. Therefore, when the movable element 13B is driven, the movable element 14B is displaced even if the holding part 14 is not driven, and the gap of the holding part 14 is narrowed, and the movable element 12B is also displaced and the cut-off part. 12 gaps can be narrowed.

  Here, the thickness of the stator 12A of the connection part 12 is t1, the thickness of the stator 14A of the holding part 14 is t2, the thickness of the stator 13A of the switching part 13 is t3, and the off state (the switching part 13 and The size of the gap between the stator 12A and the movable element 12B of the connecting part 12 in the state where no electric power is applied to the holding part 14 is g1, and the stator 14A and the movable element 14B of the holding part 14 are If the size of the gap is g2, and the size of the gap between the stator 13A and the movable element 13B of the switching unit 13 is g3, it is preferable to satisfy the following expressions (1) and (2).

t3 ≧ t1 ≧ t2 (1)
g3 ≦ g1 ≦ g2 (2)

  The switching unit 13 uses the electromagnetic force induced in the mover 13B by the magnetic field generated from the stator 13A constituted by the thin film coil and the current flowing through the conductive mover 13B, by the configuration as described above. Thus, it has a function as an electromagnetic actuator for driving the mover 13B. In addition, the holding unit 14 is configured as an electrostatic actuator that drives the mover 14B using the electrostatic force generated by the induced charge of the capacitor formed by the conductive stator 14A and the mover 14B. It has the function of.

  By the way, the electromagnetic actuator and the electrostatic actuator have a force relationship as shown in FIG. 6 in an environment where the voltage consumption is about several volts and the current consumption is about several tens mA. FIG. 6 shows a comparison of the relationship between the gap and the generated force of the electromagnetic actuator and the electrostatic actuator.

  The electromagnetic actuator is electromagnetically driven. In an environment where the voltage consumption is about several volts and the current consumption is about several tens of mA, the electromagnetic actuator can be driven with a voltage lower than that of the electrostatic actuator and the movable element 13B. Can be stroked greatly. Thus, it can be confirmed that the movable element 13B can be attracted with a stronger force than the electrostatic actuator when the gap g3 is within the electromagnetic attracting area M. On the other hand, the electrostatic actuator is electrostatically driven, and can move or hold the mover 14B with little power consumption. Accordingly, it can be confirmed that the movable element 14B can be attracted with a stronger force than the electromagnetic actuator when the gap g2 is within the electrostatic attraction area S.

  Accordingly, the gap g3 of the switching unit 13 is set to be within the range of the electromagnetic attraction area M, and the gap when the gap of the holding unit 14 is narrowed by driving the movable element 13B of the switching unit 13 is electrostatically attracted. By setting the gap g2 of the holding portion 14 so as to be within the range S, only good characteristics of the electromagnetic actuator and the electrostatic actuator can be used.

  The signal line 11 is directly connected to the stator 12A of the connection part 12 and is made of a conductive material. The signal line 11 is electrically insulated from the mover 12B when the connecting portion 12 is in an off state (a state where no power is applied to the switching portion 13 and the holding portion 14, see FIG. 2). ing. On the other hand, when the connection part 12 is in an ON state (a state where electric power is applied to the switching part 13 and the holding part 14), it is electrically connected to the mover 12B via the stator 12A. .

  That is, the connection part 12 can connect the signal line 11 mechanically. Here, “mechanically connecting / disconnecting” means that a mechanical switch is turned on / off. Here, the on-operation means an operation of bringing the stator 12A and the movable element 12B of the connecting portion 12 into contact with each other by applying electric power to the switching portion 13 and the holding portion 14. The off operation means an operation of releasing the contact between the stator 12A and the mover 12B of the connecting portion 12 by stopping the supply of power to the switching portion 13 and the holding portion 14. In addition, examples of a mechanical switch contact method include a series method (FIG. 7A) and a shunt method (FIG. 7B). In this embodiment, any method can be used. Good. 7A shows a cross-sectional configuration in an on state (a state in which a signal from one element is transmitted to another element through the connection portion 12) in the series system. FIG. These represent the cross-sectional structure of an ON state (state in which the signal from one element is not transmitted to another element via the connection part 12) in a shunt system.

  The elastic portion 15 is made of, for example, single crystal silicon or polysilicon. For example, as shown in FIG. 8, the elastic portion 15 is a meander spring having a meandering shape on a plane. The meander spring is provided with a protrusion in the vicinity of the return of the meandering path. . Since this protrusion protrudes in the direction in which the spring contracts, when the spring contracts, it comes into contact with the adjacent meandering path and inhibits the spring from contracting. For this reason, the meander spring is configured such that the spring constant when expanding is smaller than the spring constant when contracting. Thereby, the response speed of the switch part 13 and the holding | maintenance part 14 can be improved. It is desirable that the spring constant of the meander spring is adjusted according to the role of each part sandwiched between the connection part 12, the switching part 13, the holding part 14 and the support part 16. For example, it is desirable that the spring constant of the meander spring disposed between the switching portion 13 and the support portion 16 is adjusted to be smaller than that of the other meander springs. This is because it is necessary to reliably stroke the mover 13B of the switching unit 13 to the surface of the stator 13A.

  The support portion 16 is made of, for example, single crystal silicon or polysilicon, and has a structure in which an insulating layer 16A and an insulating layer 16B are stacked in this order. This support part 16 supports the beam which consists of the needle | mover 12B, 13B, 14B of the connection part 12, the switching part 13, and the holding | maintenance part 14 at the both ends.

  The element driving unit 17 is for causing the switching unit 13 and the holding unit 14 to perform an on operation or an off operation.

  A switching element having such a configuration can be manufactured, for example, as follows. FIGS. 9A to 9C and FIGS. 10A to 10C are for explaining the manufacturing process of the switching element.

  When manufacturing the switching element, first, as shown in FIG. 9A, an insulating property such as SiN is formed on the semiconductor substrate 1 made of Si by using, for example, a low pressure CVD (Chemical Vapor Depositon) method. The insulating layer 2 is formed by depositing a material. Subsequently, the precursors 14D and 14d are formed by laminating a conductive material such as Cu and a high resistance material such as SiN in this order on the insulating layer 2 by using, for example, a low pressure CVD method. Let

  Next, by patterning the precursors 14D and 14d using a photolithography process and a dry etching process, as shown in FIG. 9B, the conductive layer 14A-1 and the high-resistance layer 14A-2 are formed. A stator 14A having a structure in which the layers are sequentially stacked is formed. Hereinafter, the patterning process using the photolithography process and the dry etching process described above is simply referred to as “patterning”.

  Next, after forming a conductive material such as Cu on the insulating layer 2 and the stator 14A using, for example, a low pressure CVD method, patterning is performed, as shown in FIG. A stator 12A and a stator 13A are formed.

  Next, the sacrificial layer T1 is formed by depositing, for example, LP-TEOS (Low Pressure TEtraethyl ORthosilicate) so as to embed a region where the space G is to be formed in a subsequent process by using, for example, a low pressure CVD method. Form. Subsequently, after forming a hole in a region where the insulating layer 16A is to be formed by patterning, an insulating material such as polysilicon is embedded in the hole by using, for example, a low pressure CVD method. Form. Thereafter, the entire surfaces of the sacrificial layer T1 and the insulating layer 16A are planarized by, for example, CMP (Chemical Mechanical Polishing).

  Subsequently, a conductive material such as Cu is formed on the sacrificial layer T1 and the insulating layer 16A by using, for example, a low pressure CVD method, and then patterned to form a sacrificial material as shown in FIG. On the surface of the layer T1, the mover 12B is formed in a region facing the stator 12A, the mover 13B is formed in a region facing the stator 13A, and the mover 14B is formed in a region facing the stator 14A.

  Next, for example, by using a low pressure CVD method, a material having excellent mechanical properties such as polysilicon is formed so as to cover the entire surface of the semiconductor substrate 1, and as shown in FIG. As described above, the precursor 16D is formed. Furthermore, the LP-TEOS film is formed so as to cover the entire surface of the semiconductor substrate 1 by using, for example, a low pressure CVD method, and then patterned, whereby the elastic portion 15 is formed in a subsequent process. A sacrificial layer T2 having an opening in a region facing the region is formed.

  Next, by patterning the movable element 12B, the movable element 13B, the movable element 14B and the support portion 16 to be connected to each other, as shown in FIG. A plurality of portions 15 are formed. The portion of the precursor 16D that remains on the insulating layer 16A that has not been patterned becomes the insulating layer 16B.

  Subsequently, the sacrificial layer T1 and the sacrificial layer T2 are selectively removed by dissolving the sacrificial layer T1 and the sacrificial layer T2 using a solution such as a diluted hydrogen fluoride (DHF) solution, for example. To do. As a result, as shown in FIG. 10C, the space G is formed at the position where the sacrificial layer T1 was provided, and therefore the stator 12A and the mover 12B are separated by the gap g3 via the gap g1. The stator 13A and the movable element 13B are disposed so as to face each other, and the stator 14A and the movable element 14B are disposed so as to face each other via the gap g2. In this way, a switching element is formed.

  Next, the operation of the switching element of the present embodiment will be described with reference to FIG. 2 and FIGS. FIG. 2 shows the state of the off state, and FIGS. 11A to 11C show the state of shifting from the off state to the on state.

  The switching element of the present embodiment has a two-state of an on state and an off state, and when an on operation command is sent from the element driving unit 17 to the switching unit 13 and the holding unit 14, the switching unit 13 When the off operation command is sent from the off state to the on state, the switching unit 13 and the holding unit 14 shift from the on state to the off state, respectively. In addition, unless any command for changing the state is sent from the element driving unit 17 to the switching unit 13 and the holding unit 14, the switching unit 13 and the holding unit 14 are in either the on state or the off state. Maintain the state. The on state indicates the state shown in FIG. 11C, and the off state indicates the state shown in FIG.

  The on-operation will be specifically described. First, the element driving unit 17 starts supplying power to the switching unit 13. Then, an electromagnetic force is generated in the movable element 13B, and the electromagnetic force becomes an attractive force, and the movable element 13B starts to be displaced toward the stator 13A against the elastic portion 15. At this time, the gap between the holding portion 14 and the connecting portion 12 is a size obtained by removing the displacement of the movable element 13B from the gaps g2 and g1 in the initial state.

  Next, as shown in FIG. 11A, the element driving unit 17 starts supplying power to the holding unit 14 after the movable element 13B comes into contact with the stator 13A. In addition, even when the power supply to the switching unit 13 is stopped, when the movable element 13B reaches a portion where the gap of the connecting portion 12 can be narrowed by the electrostatic force acting on the movable element 14B, Power supply may be started. Then, an electrostatic force is generated in the movable element 14B, and the electrostatic force becomes an attractive force, and the movable element 14B is displaced toward the stator 14A against the elastic portion 15. As a result, as shown in FIG. As described above, the mover 14B comes into contact with the stator 14A.

  At this time, the mover 12B of the connection part 12 is displaced together with the mover 13B of the switching part 13 and the mover 14B of the holding part 14 via the elastic part 15, but the thickness t2 of the stator 14A is 12A. When the thickness is less than the thickness t1, the gap g1 of the joint portion 12 is smaller than the gap g2 of the holding portion 14. For this reason, when the mover 14B is in contact with the stator 14A, the mover 12B is already in contact with the stator 12A. Further, when the mover 12B comes into contact with the stator 12A, a part of the electrostatic force generated in the mover 14B is also applied to the mover 12B via the elastic portion 15. As a result, the mover 12B presses the stator 12A with a force applied from the mover 14B in addition to its own weight, so that the contact resistance of the connecting portion 12 is simply the own weight of the mover 12B. Compared with the case of contact with the stator 12A, the size is significantly reduced.

  Next, the element driving unit 17 stops the power supplied to the switching unit 13 while supplying power to the holding unit 14. Note that the power supplied to the switching unit 13 may be stopped simultaneously with the start of power supply to the holding unit 14. Then, the electromagnetic force generated in the mover 13B disappears, and the mover 13B stops with a predetermined distance from the surface of the stator 13A as shown in FIG. Since the holding | maintenance part 14 is maintaining the contact state by the electrostatic force at this time, the connection part 12 is also maintaining the contact state. By such a series of operations, the on operation is completed and the on state is obtained.

  In the ON operation, the element driving unit 17 may supply power to the switching unit 13 and the holding unit 14 at the same time. In any case, in the ON state, the stator 12A and the movable element 12B of the connecting portion 12 need to be in reliable and stable contact.

  On the other hand, when specifically explaining the off operation, when the element driving unit 17 stops the supply of the power supplied to the holding unit 14 in the on state, the electrostatic force working on the holding unit 14 disappears. Thereby, as shown in FIG. 2, the mover 14 </ b> B of the holding part 14 is separated from the stator 14 </ b> A by the force of the elastic part 15 and is displaced upward to be turned off. At this time, it is not necessary to perform the operation of stopping the supply of power to the switching unit 13 again. This is because power is not supplied to the switching unit 13 in the on state.

  Thus, in the switching element of the present embodiment, the connection of the connection part 12 and the holding of the state after the connection of the connection part 12 are switched between the switching part 13 and the holding part 14 via the elastic part 15. This is performed by cooperative operation (two-way drive).

  Next, the effect of the switching element of this embodiment will be described.

  As described in detail in the description of the manufacturing method, the switching element of the present embodiment can be manufactured using a method used in a normal manufacturing process such as a low pressure CVD method or a patterning method. Is. Therefore, the consistency of the manufacturing process with other circuit elements is high, and it can be formed on the same substrate as the other circuit elements, so that it can be mounted together with other circuit elements in the same package. In addition, there is no possibility of complicating the manufacturing process because a specific manufacturing method such as providing “deflection” is not required. Therefore, the switching element of the present embodiment can be easily manufactured.

  Further, as described above, the switching unit 13 and the holding unit 14 operate by receiving a current supply, and do not operate by receiving an electromagnetic field from the outside. As a result, it is not necessary to dispose the driving means 17 adjacent to the switching element, so that the degree of freedom of layout on the semiconductor substrate 1 is not limited. Therefore, the switching element of this embodiment does not hinder the reduction of the package size.

  Next, element drive voltage and power consumption will be mentioned from the viewpoint of high frequency characteristics. Main parameters in the high-frequency characteristics include isolation (crosstalk) and insertion loss (insertion loss). The former corresponds to the insulation resistance of a general switching element (series system), and means that the larger the insulation resistance, the smaller the leakage. However, in order to increase the isolation of the switching element, the joint portion 12 is fixed. It is necessary to increase the gap g1 between the child 12A and the mover 12B to some extent. However, if the gap g1 is increased, the stroke of the mover 12B of the connecting portion 12 is also increased, which is equivalent to the case where there is no switching element made of a single actuator (the holding portion 14 of the present embodiment is not provided) as in the prior art. However, even if a sufficient stroke is obtained, the element drive voltage increases in proportion to the square of the stroke, so that the power consumption is, for example, several hundred mW, or the drive voltage is, for example, 20V. It gets bigger as it exceeds. As a result, it is difficult to use such a switching element, particularly in the technical field of electronic equipment where low voltage operation and low power consumption are common sense.

  The latter corresponds to the contact resistance of a general switching element (series system). The smaller the contact resistance, the smaller the signal loss between the contacts, and the more accurate signal transmission can be achieved. However, in order to reduce the insertion loss of the switching element, it is necessary to reduce the contact resistance between the stator 12A and the mover 12B of the connecting portion 12. However, in order to reduce the contact resistance, it is necessary to apply a constant pressure from the mover 12 to the stator 12A. Therefore, when a conventional switching element composed of a single actuator is used, the actuator Therefore, it is necessary to make the gap of the stator larger than that of the connecting portion or make the thickness of the stator of the actuator thinner than that of the stator of the connecting portion. As a result, the stroke of the actuator becomes large and the same problem as described above occurs, so it is difficult to use such a switching element from the viewpoint of insertion loss.

  On the other hand, in the switching element of the present embodiment, as described above, the connection of the connection part 12 and the maintenance of the state after the switching of the connection part 12 simultaneously satisfy the expressions (1) and (2). Since it is performed by the cooperative operation of the switching unit 13 and the holding unit 14 via the elastic portion 15 in the satisfied state, a sufficient stroke can be obtained and the contact resistance of the joint portion 12 can be lowered.

  As a result, high frequency characteristics such as insertion loss and isolation can be greatly improved, even compared to MMIC (Monolithic Microwave Integrated Circuit), which is considered to have good high frequency characteristics. It has excellent high frequency characteristics that are not inferior. The MMIC is integrated on a single compound semiconductor substrate (mainly GaAs (gallium arsenide), etc.) by integrating active elements such as transistors, passive elements such as resistors and capacitors, and signal distribution and synthesis circuits. This is an integrated circuit formed, and is mainly used in the microwave and millimeter wave bands. This MMIC is also used in mobile phones, amplifiers, mixers, antenna switches, etc.

  In the present embodiment, the electromagnetic actuator is selected as the switching unit 13 so that the signal line 11 can be disconnected with a large stroke, while the state after switching of the disconnecting unit 12 can be maintained for a long time. Since the electrostatic capacitor is selected as the holding unit 14, an optimum circuit configuration can be selected according to the purpose and application. This makes it possible to achieve both low voltage and low power consumption to the extent that it can be formed integrally with a low voltage / low power consumption element.

  From the above, according to the switching element of the present embodiment, the manufacturing process is easy, the reduction of the package size is not hindered, and it is formed integrally with the low voltage / low power consumption element. be able to.

[Application example]
Next, with reference to FIG. 12, the configuration of a communication device equipped with the switching element of the above embodiment will be described. FIG. 12 illustrates a block configuration of a communication device as an electronic device. In addition, since the semiconductor device and module which mount the switching element of this invention are embodied by the said communication apparatus, it demonstrates collectively below.

  The communication apparatus shown in FIG. 12 is one in which the switching element described in the above embodiment is mounted as a transmission / reception switch 301 (semiconductor device), for example, a mobile phone, a personal digital assistant (PDA), a wireless LAN device. Etc. The transmission / reception switch 301 is formed in a semiconductor device made of SoC. For example, as shown in FIG. 12, the communication apparatus includes a transmission system circuit 300A (module), a reception system circuit 300B (module), a transmission / reception switch 301 that switches transmission / reception paths, a high-frequency filter 302, and a transmission / reception circuit. The antenna 303 is provided.

  The transmission system circuit 300A includes two digital / analog converters (DACs) 311I and 311Q and two band-pass filters 312I and 312Q corresponding to I-channel transmission data and Q-channel transmission data, and modulation. 320, a transmission PLL (Phase-Locked Loop) circuit 313, and a power amplifier 314. The modulator 320 includes two buffer amplifiers 321I and 321Q and two mixers 322I and 322Q corresponding to the two bandpass filters 312I and 312Q, a phase shifter 323, an adder 324, and a buffer amplifier 325. It is comprised including.

  The reception system circuit 300B includes a high frequency unit 330, a band pass filter 341, a channel selection PLL circuit 342, an intermediate frequency circuit 350, a band pass filter 343, a demodulator 360, an intermediate frequency PLL circuit 344, and an I channel reception. Two band-pass filters 345I and 345Q and two analog / digital converters (ADC) 346I and 346Q corresponding to the data and Q-channel received data are provided. The high frequency unit 330 includes a low noise amplifier 331, buffer amplifiers 332 and 334, and a mixer 333. The intermediate frequency circuit 350 includes buffer amplifiers 351 and 353, and automatic gain adjustment (AGC; Auto Gain). Controller) circuit 352. The demodulator 360 includes a buffer amplifier 361, two mixers 362I and 362Q corresponding to the two bandpass filters 345I and 345Q, two buffer amplifiers 363I and 363Q, and a phase shifter 364. Yes.

  In this communication apparatus, when I-channel transmission data and Q-channel transmission data are input to the transmission system circuit 300A, each transmission data is processed in the following procedure. That is, first, analog signals are converted by the DACs 311I and 311Q, signal components other than the band of the transmission signal are subsequently removed by the bandpass filters 312I and 312Q, and then supplied to the modulator 320. Subsequently, the modulator 320 supplies the signals to the mixers 322I and 322Q via the buffer amplifiers 321I and 321Q, and subsequently mixes and modulates the frequency signal corresponding to the transmission frequency supplied from the transmission PLL circuit 313, The mixed signal is added in the adder 324 to obtain one transmission signal. At this time, with respect to the frequency signal supplied to the mixer 322I, the phase shifter 323 shifts the signal phase by 90 ° so that the I channel signal and the Q channel signal are orthogonally modulated. Finally, the signal is supplied to the power amplifier 314 via the buffer amplifier 325 to be amplified so as to have a predetermined transmission power. The signal amplified in the power amplifier 314 is supplied to the antenna 303 via the transmission / reception switch 301 and the high frequency filter 302, so that it is wirelessly transmitted via the antenna 303. The high-frequency filter 302 functions as a band-pass filter that removes signal components other than the frequency band of signals transmitted or received in the communication apparatus.

  On the other hand, when a signal is received from the antenna 303 via the high frequency filter 302 and the transmission / reception switch 301 to the reception system circuit 300B, the signal is processed in the following procedure. That is, first, in the high frequency unit 330, the received signal is amplified by the low noise amplifier 331, and subsequently, signal components other than the received frequency band are removed by the band pass filter 341, and then supplied to the mixer 333 via the buffer amplifier 332. Subsequently, the frequency signals supplied from the channel selection PPL circuit 342 are mixed, and a signal of a predetermined transmission channel is used as an intermediate frequency signal, which is supplied to the intermediate frequency circuit 350 via the buffer amplifier 334. Subsequently, in the intermediate frequency circuit 350, signal components other than the band of the intermediate frequency signal are removed by being supplied to the band pass filter 343 via the buffer amplifier 351, and subsequently, the AGC circuit 352 generates a substantially constant gain signal. And supplied to the demodulator 360 via the buffer amplifier 353. Subsequently, in the demodulator 360, the frequency signals supplied from the intermediate frequency PPL circuit 344 are mixed after being supplied to the mixers 362I and 362Q via the buffer amplifier 361, and the I-channel signal component and the Q-channel signal component are mixed. And demodulate. At this time, with respect to the frequency signal supplied to the mixer 362I, the phase shifter 364 shifts the signal phase by 90 ° to demodulate the I-channel signal component and the Q-channel signal component that are orthogonally modulated with each other. Finally, by removing the signal components other than the I channel signal and the Q channel signal by supplying the I channel signal and the Q channel signal to the band pass filters 345I and 345Q, respectively, the signals are supplied to the ADCs 346I and 346Q. Digital data. Thereby, I-channel received data and Q-channel received data are obtained.

  Since this communication device is equipped with the switching element described in each of the above-described embodiments as the reception switching device 301, the communication device has excellent high-frequency characteristics due to the operation described in the above-described embodiment.

  Similarly to the above-described embodiment, the movable element can be driven with a low voltage and low power consumption that can be formed integrally with a low voltage and low power consumption element. As a result, it can withstand practical use even in the technical field of mobile communication terminal devices where low voltage operation and low power consumption are common sense.

  In the communication apparatus illustrated in FIG. 12, the case where the switching element described in each of the above embodiments is applied to the reception switch 301 (semiconductor device) has been described. However, the present invention is not necessarily limited thereto. The switching element is a mixer 332I, 332Q, 333, 362I, 362Q, a bandpass filter 312I, 312Q, 341, 343, 346I, 346Q or a high frequency filter 302 (in the transmission system circuit 300A and the reception system circuit 300B (module)). You may apply to a semiconductor device. Even in this case, the same effect as described above can be obtained.

  As mentioned above, although the movable element of the present invention has been described with reference to the embodiment, the present invention is not limited to the above-described embodiment, and the configuration of the movable element of the present invention and the procedure relating to the manufacturing method thereof are described above. As long as it is possible to obtain the same effect as the embodiment, it can be freely modified.

  In the above-described embodiment, the case where the movable element of the present invention is applied to an electronic device typified by a communication device such as a mobile phone has been described. However, the present invention is not necessarily limited to this, and the electronic device other than the communication device is used. It is also possible to apply to. In any of these cases, the same effect as that of the above embodiment can be obtained.

It is a functional block diagram of the switching element concerning one embodiment of the present invention. It is a cross-sectional block diagram of the switching element of FIG. FIG. 2 is a planar configuration diagram illustrating an example of a planar configuration of the switching element in FIG. 1. FIG. 6 is a plan configuration diagram illustrating another example of a planar configuration of the switching element of FIG. 1. It is a cross-sectional block diagram for demonstrating the modification of the connection part of FIG. It is the schematic for demonstrating the relationship of the attraction force of an electromagnetic actuator and an electrostatic actuator. It is a section lineblock diagram for illustrating and explaining a joint part. It is a top view for illustrating and explaining an elastic part. FIG. 2 is a cross-sectional configuration diagram for explaining a manufacturing process of the switching element of FIG. 1. It is a cross-sectional block diagram for demonstrating the process following FIG. FIG. 2 is a cross-sectional configuration diagram for explaining an operation of the switching element of FIG. 1. It is a functional block diagram of the electronic device which concerns on the application example of the switching element of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Semiconductor substrate, 2, 16A, 16B ... Insulating layer, 10 ... Switching structure, 11 ... Signal line, 12 ... Connection part, 12A, 13A, 14A ... Stator, 12B, 13B, 14B ... Movable member, 13 ... switching part, 14 ... holding part, 14A-1 ... conductive layer, 14A-2 ... high resistance layer, 15 ... elastic part, 16 ... support part, 17 ... element driving part, g1, g2, g3 ... gap, t1, t2, t3: Stator thickness, G: space, M: electromagnetic attraction area, S: electrostatic attraction area.

Claims (9)

On the semiconductor substrate,
A signal line for transmitting signals;
A disconnecting means for mechanically disconnecting the signal line;
Switching means for switching the connection means;
Holding means for holding the state after switching of the connection means ;
A support means for supporting the connection means, the switching means and the holding means ,
The connection means, the switching means and the holding means each have a pair of movers and stators arranged to face each other,
The movers of the switching means, the holding means, and the connection means are supported by the support means via an elastic part, and from the support means side, the switching means, the holding means, and the connection means. Arranged in the order of means,
The switching means is constituted by an electromagnetic actuator,
The movable element is characterized in that the holding means is constituted by an electrostatic actuator . The thickness of the stator of the connection means is t1, the thickness of the stator of the holding means is t2, the thickness of the stator of the switching means is t3, and the gap between the stator and the mover of the connection means Is g1, the gap between the stator and the mover of the holding means is g2, and the gap between the stator and the mover of the switching means is g3. The movable element according to claim 1, wherein the movable element and the expression (2) are satisfied.
t3 ≧ t1 ≧ t2 (1)
g3 ≦ g1 ≦ g2 (2) A drive circuit configured to stop supplying power to the switching unit simultaneously with supplying electric power to the holding unit or after supplying electric power to the holding unit. The movable element according to claim 1 or claim 2 . The holding means is composed of two holding portions that sandwich the connecting means in a plane,
The switching means is composed of two switching parts that sandwich the connection means and the holding means in a plane.
The movable element according to claim 1 or 2, characterized by the above. The holding means has an annular shape surrounding the connecting means in a plane,
The switching means has an annular shape surrounding the connecting means and the holding means in a plane.
The movable element according to claim 1 or 2, characterized by the above. A semiconductor device containing a movable element connected to one element and another element,
The movable element includes a signal line for transmitting a signal from the one element to the other element on a semiconductor substrate, a connection means for mechanically connecting the signal line, and the connection A switching means for switching means, a holding means for holding the state after switching of the connection means, and a support means for supporting the connection means, the switching means and the holding means ,
The connection means, the switching means and the holding means each have a pair of movers and stators arranged to face each other,
The movers of the switching means, the holding means, and the connection means are supported by the support means via an elastic portion, and the switching means, the holding means, and the connection are disconnected from the support means side. Arranged in the order of means,
The switching means is constituted by an electromagnetic actuator,
The holding device is constituted by an electrostatic actuator . The semiconductor device according to claim 6, wherein the one element, the other element, and the movable element are formed in the same package. A module comprising the semiconductor device according to claim 6 or 7. An electronic apparatus comprising the semiconductor device according to claim 6 or 7.

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