JP4550594B2 - Method and apparatus for manufacturing flexible polyimide metal laminate - Google Patents

Description

  The present invention relates to a method and apparatus for producing a polyimide laminated film in which a thin metal plate is fixed to one surface of a polyimide resin film.

  A film-like (thin plate-like) flexible polyimide metal laminated plate in which a polyimide resin film and a metal thin plate or metal foil are fixed to each other is also known as a flexible printed circuit board. For example, it is a flexible copper clad laminate (FCCL) in which a copper foil of about 5 to 20 μm and a polyimide resin layer of about 5 to 100 μm are laminated. Such a flexible polyimide metal laminated plate is a tape that can be separated into individual IC packages with lead wires made of thin metal plates, for example, by processing the thin metal plates into a predetermined circuit pattern by etching or the like. As an automated bonding (TAB) product, a flexible connection cable, etc., it is widely used in electronic devices, digital cameras, mobile phones and the like.

The flexible polyimide metal laminate has a three-layer structure obtained by laminating a polyimide resin film and a metal thin plate using an adhesive, and a resin precursor applied to one surface of the metal thin plate. And a two-layer structure obtained by a casting method in which it is thermally cured. The two-layer structure is more advantageous than the three-layer structure in heat resistance, fine pitch, lightening and multilayering, and the demand is increasing rapidly. One type of method for producing a flexible polyimide metal laminate having a two-layer structure is a casting method in which a polyimide resin precursor solution is coated and heated to imidize (cyclization polycondensation). For example, it is described in Patent Document 1.
JP 2000-169581

  By the way, in the production of the flexible polyimide metal laminate by the conventional casting method, after the polyamic acid solution in which the polyamic acid which is the precursor of the polyimide resin is dissolved in a solvent is applied to one surface of the metal foil, for example, It is cured by heat treatment at a treatment temperature up to about 250 ° C. and imidized to produce a polyimide resin, but it is heated by hot air from the surface of the polyimide resin precursor coating. The temperature difference between the coating surface and the inside is large, and the curing and imidization proceed from the coating surface first, so the removal of the solvent inside is delayed or the cyclization polycondensation difference between the inside and the inside There is a problem that long-time heat treatment is required due to gentle heating. In addition, there has been a problem that the heat equipment becomes large when trying to increase production efficiency for such a long-time heat treatment.

  The present invention has been made against the background of the above circumstances, and its object is to produce a flexible polyimide metal laminate that can be efficiently heat-treated for imidization of a coating film, and To provide an apparatus.

In order to achieve the above object, the gist of the present invention is a method for producing a flexible polyimide metal laminate in which a polyimide resin film and a metal thin plate are fixed to each other, and (a) the polyimide resin A resin precursor coating step for coating a resin precursor for producing a film on one surface of the metal thin plate; and (b) the resin coated on one surface of the metal thin plate in the resin precursor coating step. A heat treatment step of generating a polyimide resin film on one surface of the metal thin plate by generating condensation polymerization in the resin precursor by heating the precursor using far infrared rays, and (c) the heat treatment step Thermal radiation radiated from a heating plate that emits far-infrared rays toward one surface of the thin metal plate, and an inert gas that is sprayed toward one surface of the thin metal plate from an injection hole provided in the heating plate And (d), further, the heat treatment step is performed on a furnace wall in a furnace body for heating the resin precursor. In the enclosed space, the heating plate is arranged at a predetermined distance on one side and the other side of the thin metal plate, thereby forming a tunnel-like central space surrounded by the heating plate. Heating the resin precursor while replacing the inside of the central space with the inert gas in a state where a simple muffle in which an exhaust space is interposed between the space and the furnace wall is configured. Features.

Preferably, the metal thin plate is a longitudinal metal thin plate having a predetermined width, and a plurality of the heating plates are arranged adjacent to each other with a predetermined gap along the longitudinal direction of the metal thin plate. In the heat treatment step, by injecting the inert gas from the injection hole, the volatile matter generated from the resin precursor and staying in the central space is sent to the exhaust space side through the gap. Features .

Preferably, the heating plate is provided with a far-infrared radiator layer so that far-infrared rays are emitted toward the metal thin plate, and the far-infrared radiator layer includes the resin precursor. And a far-infrared radiator that radiates far-infrared rays having an effective wavelength band corresponding to the wavelength band absorbed by the light . The effective wavelength band may be a wavelength band of 2 μm to 20 μm.

Also, preferably, the metal sheet is elongated sheet metal having a predetermined width drawn out from a state of being wound into a roll, the thermal treatment process, the longitudinal of said resins precursor is applied on one surface The thin metal sheet is heat-treated in the process of moving in the longitudinal direction along the conveying path that is chevron-shaped on the one surface side.

Also, preferably, the resin precursor, characterized in that it comprises a polyamic acid which is synthesized by the reaction of an acid anhydride and a diamine.

Another aspect of the invention for achieving the above object is an apparatus for producing a flexible polyimide metal laminate in which a polyimide resin film and a metal thin plate are fixed to each other, (a) A resin precursor coating device that coats one surface of the metal thin plate with a resin precursor for producing the polyimide resin film; and (b) the resin precursor coating device was applied to one surface of the metal thin plate. wherein by heating with a far infrared resin precursor to generate condensation polymerization in the resin precursor, and a heat treatment apparatus for generating the polyimide resin film on one surface of the sheet metal, seen including, (c) the The heat treatment apparatus includes a heating plate that radiates far infrared rays toward one surface of the metal thin plate, and an injection hole provided in the heating plate for injecting an inert gas toward one surface of the metal thin plate, Application to one surface of the metal thin plate using heat radiation radiated from the heating plate toward one surface of the metal thin plate and the inert gas sprayed from the injection holes toward one surface of the metal thin plate. (D) Further, the heat treatment apparatus includes a furnace body for heating the resin precursor having a space surrounded by a furnace wall, The heating plate is disposed at a predetermined distance on one side and the other side of the thin metal plate, and a tunnel-shaped central space surrounded by the heating plate is formed, and the central space, the furnace wall, A simple muffle in which an exhaust space is interposed is formed, and the resin precursor is heated while replacing the inside of the central space with the inert gas .

Preferably, the metal thin plate is a longitudinal metal thin plate having a predetermined width, and a plurality of the heating plates are arranged adjacent to each other with a predetermined gap along the longitudinal direction of the metal thin plate. The heat treatment apparatus is configured to inject the inert gas from the injection hole to send the volatile matter generated from the resin precursor and staying in the central space to the exhaust space through the gap. Features.

Preferably, the heating plate is provided with a far-infrared radiator layer so that far-infrared rays are emitted toward the metal thin plate, and the far-infrared radiator layer includes the resin precursor. And a far-infrared radiator that radiates far-infrared rays having an effective wavelength band corresponding to the wavelength band absorbed by the light . The effective wavelength band may be a wavelength band of 2 μm to 20 μm.

Also, preferably, (a) the metal sheet is elongated sheet metal having a predetermined width drawn out from a state wound into a roll, (b) the heat treatment apparatus, wherein the resins precursor one side A transport device that moves the longitudinal thin metal sheet coated on the surface while supporting it with a transport roller disposed on one surface side so as to form a chevron-shaped transport path. in the process of transporting the path, the resin precursor on the one side and said and Turkey to heat treating the elongated sheet metal which is Nurigi.

Further, preferably, before Symbol resin precursor, a polyamic acid which is synthesized by the reaction of an acid anhydride and a diamine, characterized in the early days free.

According to the method for producing a flexible polyimide metal laminate of the present invention, the resin precursor coated on one surface of a metal thin plate is heated using far infrared rays, and thus the resin precursor undergoes polycondensation. Thus, a polyimide resin film is formed on one surface of the thin metal plate. In the production of this polyimide resin film, condensation polymerization is carried out by heating with far infrared rays, but the far infrared rays penetrate into the coating film of the resin precursor and the radiation energy of far infrared rays is absorbed, and the entire coating film is absorbed. Is heated efficiently and imidization is carried out, so that a homogeneous polyimide resin film is produced in a short time. Therefore, the heat treatment is efficiently performed in a short time, and the heat equipment becomes small.

Moreover, according to the method for producing a flexible polyimide metal laminate of the present invention, after the resin precursor of the polyimide resin film is applied to one surface of the metal thin plate in the resin precursor coating step, in the heat treatment step, The resin precursor coated on one surface of the metal thin plate is heated using far infrared rays to cause condensation polymerization of the resin precursor, and a polyimide resin film is generated on one surface of the metal thin plate. In the production of this polyimide resin film, condensation polymerization is carried out by heating with far infrared rays, but the far infrared rays penetrate into the coating film of the resin precursor and the radiation energy of far infrared rays is absorbed, and the entire coating film is absorbed. Is heated efficiently and imidization is carried out, so that a homogeneous polyimide resin film is produced in a short time. Therefore, the heat treatment is efficiently performed in a short time, and the heat equipment becomes small.

According to the present invention, in the heat treatment step, thermal radiation radiated from a heating plate that radiates far infrared rays toward one surface of the metal thin plate, and an injection hole provided in the heating plate, the metal thin plate Since the resin precursor applied to one surface of the metal thin plate is heated using an inert gas injected toward one surface, heat treatment is performed more efficiently. In addition, since the evaporant and sublimate from the coating film such as the solvent are quickly removed by the injection of the inert gas from the injection hole, the evaporant and sublimate that convects on one surface of the metal thin plate are applied to the coating film. The arrival of heat radiation and the drying of the coating are not hindered. In addition, since the oxidation of the metal thin plate is suitably prevented by the inert gas, the wettability of the solder is not impaired even when a layer surface treatment is not performed when a metal such as copper is used.

Further, according to the present invention, in the heat treatment step, the longitudinal metal thin plate coated with the resin precursor of the polyimide resin film is moved in the longitudinal direction along the conveyance path having a mountain shape on the one surface side. Since heat treatment is performed in the process, there is an advantage that curving due to a difference in thermal expansion between the polyimide resin film and the metal thin plate is suppressed.

Further, according to the present invention, the resin precursor contains a polyamic acid synthesized by a reaction between an acid anhydride and a diamine. Therefore, the ring opening of the polyamic acid is closed, so that a polyimide resin film is obtained. Is suitably generated.

Moreover, according to the manufacturing apparatus of a flexible polyimide metal laminate of another invention, in the heat treatment apparatus, the resin precursor coated on one surface of the metal thin plate is heated by using far infrared rays, and the resin is obtained. Polycondensation is generated in the precursor, and a polyimide resin film is formed on one surface of the metal thin plate. In the production of this polyimide resin film, condensation polymerization is carried out by heating with far infrared rays, but the far infrared rays penetrate into the coating film of the resin precursor and the radiation energy of far infrared rays is absorbed, and the entire coating film is absorbed. Is heated efficiently and imidization is carried out, so that a homogeneous polyimide resin film is produced in a short time. Therefore, the heat treatment is efficiently performed in a short time, and the heat equipment becomes small.

Further, according to the flexible polyimide metal laminate manufacturing apparatus of another invention, prior to the heat treatment by the heat treatment apparatus, the resin precursor of the polyimide resin film is placed on one surface of the metal thin plate in the resin precursor coating apparatus. Then, in the heat treatment apparatus, the resin precursor coated on one surface of the metal thin plate is heated using far infrared rays to cause condensation polymerization of the resin precursor, and the metal thin plate A polyimide resin film is formed on one side. In the production of this polyimide resin film, condensation polymerization is carried out by heating with far infrared rays, but the far infrared rays penetrate into the coating film of the resin precursor and the radiation energy of far infrared rays is absorbed, and the entire coating film is absorbed. Is heated efficiently and imidization is carried out, so that a homogeneous polyimide resin film is produced in a short time. Therefore, the heat treatment is efficiently performed in a short time, and the heat equipment becomes small.

According to another aspect of the present invention, in the heat treatment apparatus, the metal thin plate is formed from heat radiation radiated from a heating plate that radiates far infrared rays toward one surface of the metal thin plate, and an injection hole provided in the heating plate. Since the resin precursor applied to one surface of the metal thin plate is heated using an inert gas sprayed toward one surface, heat treatment is performed more efficiently. In addition, since the evaporant and sublimate from the coating film such as the solvent are quickly removed by the injection of the inert gas from the injection hole, the evaporant and sublimate that convects on one surface of the metal thin plate are applied to the coating film. The arrival of heat radiation and the drying of the coating are not hindered. In addition, since the oxidation of the metal thin plate is suitably prevented by the inert gas, the wettability of the solder is not impaired even when a layer surface treatment is not performed when a metal such as copper is used.

According to another aspect of the invention, the thin metal plate is a long thin metal plate having a predetermined width, the heat treatment apparatus is drawn out from a state wound in a roll shape, and the resin precursor of the polyimide resin film is Since the longitudinal metal thin plate coated on one surface is moved while being supported by a conveying roller disposed on one surface side so as to be a chevron-shaped conveying path, In the process of being transported on the transport path, the longitudinal metal thin plate coated with the resin precursor on one surface is heat-treated, so that heat treatment is performed in a state of being chevron on the one surface side, so polyimide resin There is an advantage that bending due to a difference in thermal expansion between the film and the metal thin plate is suppressed.

According to another invention, since the resin precursor includes a polyamic acid synthesized by a reaction between an acid anhydride and a diamine, a polyimide resin is formed by the ring opening of the polyamic acid being closed. A film is suitably produced.

  Here, preferably, the polyimide resin is a polymer substance having an acid imide bond in the main chain, for example, an acid anhydride such as pyromellitic acid anhydride, tetracarboxylic acid anhydride, and m-phenylene, for example. A polyamic acid synthesized by a polymerization reaction with a diamine such as diamine is produced by further ring-closing the ring by a reaction such as heating. Therefore, this polyamic acid is a precursor of polyimide resin. The polyimide resin may be one that generates condensed water and volatile components in the curing process, but may be an addition polymerization type that does not generate volatile components in the curing process. As the addition polymerization type, nadic acid terminal reaction type, bismaleimide (BMI) type, acetylene terminal type and the like are used.

  The resin precursor is the polyamic acid and is soluble in a solvent. This resin precursor is preferably applied to one surface of a thin metal plate in a state of being made into a fluid (polyamic acid solution) by being dissolved in a solvent, and then the solvent is removed to some extent by drying. Painted on one side. Various additives can be added to the fluid resin precursor in order to improve adhesiveness, adhesive strength, production yield, production cost, and the like. For example, a polyamic acid solution as described in Patent Document 1 may be used.

  The heating plate includes a metal plate having an electric heater and a far-infrared radiator layer fixed to the radiation surface of the metal plate, and a far-infrared ray having a radiation energy having a magnitude corresponding to the temperature of the metal plate. Radiation mainly including far infrared rays is emitted from the radiator layer. As the metal plate, a metal having a relatively high thermal conductivity such as an aluminum alloy, a copper alloy, carbon steel, or stainless steel is preferably used. The far-infrared radiator layer is made of, for example, a group II-IV such as SiO2, ZnO2, SnO2, TiO2, Y2 O3, BeO, Al2 O3, 2MgO.2Al2 O3 .5SiO2, CoO, NiO, CrO3, Fe2 O3. Non-oxide ceramics such as metal oxide ceramics, SiC, ZrC, TaC, ZrB2 and Si3 N4, composite materials containing them, and the like are included as far-infrared emitters.

  Preferably, the heating plate includes a gas passage that guides the inert gas, and an injection hole that opens in a radiation surface of the metal plate so as to communicate with the gas passage. Is configured to spray toward one surface of the metal thin plate being conveyed. This inert gas is for preventing the surface oxidation of the metal thin plate, and it is not always necessary when the metal thin plate is configured not to be surface oxidized, but it is inexpensive and highly conductive copper. When foil or the like is used as a thin metal plate, nitrogen gas, argon gas, or the like is used.

  Preferably, the gap is formed in the furnace in order to quickly remove volatiles generated from the resin precursor applied to one surface of the metal thin plate and staying between the heating plate and one surface of the metal thin plate. A gap communicated with the exhaust pipe connected to the body is provided between the heating plates.

  Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the following embodiments, the drawings are appropriately simplified or modified, and the dimensional ratios, shapes, and the like of the respective parts are not necessarily drawn accurately.

  FIG. 1 shows a cross section of a flexible polyimide metal laminate 10 according to an embodiment of the present invention. The flexible polyimide metal laminate 10 is a two-layer type, and is formed on one surface of a metal thin plate 12 made of copper, nickel, a clad material or the like, for example, having a thickness of 5 to 20 μm, preferably 9 to 18 μm. A sheet-like polyimide resin film (polyimide resin layer) 14 having a thickness of about 100 μm is directly fixed. In FIG. 2, the three-layer flexible polyimide metal laminate 16 has a two-layer flexibility because the metal thin plate 12 and the polyimide resin film 14 are fixed to each other via an adhesive layer 18. The polyimide metal laminate 10 is configured to be thinner, which is advantageous in heat resistance, fine pitch, lightening and multilayering.

  FIG. 3 is a process diagram illustrating the main part of the method for producing the flexible polyimide metal laminate 10. In FIG. 3, in the adjustment step 20, for example, an acid anhydride such as pyromellitic acid anhydride or tetracarboxylic acid anhydride and a diamine such as m-phenylenediamine are polymerized by a low temperature solution polymerization method of, for example, 100 ° C. or less. A polyamic acid is synthesized by this, and the polyamic acid is dissolved in a solvent, whereby a resin precursor (polyamic acid solution) P having fluidity with a predetermined viscosity is prepared in advance.

  In the subsequent coating step 22, the fluid resin precursor is applied to the upper surface of the long metal sheet 12 drawn out from the cylindrical roll 24 around which the metal sheet 12 is wound using, for example, a coating device 26 shown in FIG. 4. The body P is continuously applied to a predetermined thickness. Next, in the drying step 28, the body P is dried by a drying device 30 provided adjacent to the coating device 26, and then wound again to form a cylindrical roll 32. can get. The roll 32 is obtained by winding the metal thin plate 12 on which the resin precursor P is coated on one surface. In this embodiment, the coating process 22 and the drying process 28 constitute a resin precursor coating process 34 for coating the resin precursor P on one surface of the metal thin plate 12.

  In FIG. 4, the long metal thin plate 12 drawn out from the cylindrical roll 24 is sent so as to pass through the coating device 26 and the drying device 30, and then wound again to form the cylindrical roll 32. Is done. The coating device 26 includes, for example, a coating roll, and continuously applies the fluid resin precursor P to the upper surface of the long metal thin plate 12 passing through the coating roll. Further, when the drying device 30 is wound again to form a cylindrical roll 30, at least the applied resin precursor P does not adhere to the lower surface of the metal thin plate 12. The solvent is removed by drying. In this embodiment, the coating device 26 and the drying device 30 constitute a resin precursor coating device 35.

  Next, in the heat treatment step 36, for example, in the heat treatment apparatus 40 shown in FIG. 5, the resin precursor P coated on one surface of the metal thin plate 12 in the resin precursor coating step 34 is heated using far infrared rays. As a result, condensation polymerization, that is, imidization (cyclization or ring closure) is generated in the resin precursor P, and a polyimide resin film 14 is formed on one surface of the metal thin plate 12.

  In FIG. 5, the heat treatment apparatus 40 includes an unwinding device 42 for unwinding the metal thin plate 12 coated with the resin precursor P on one surface from a roll 32 at a predetermined speed, and a metal thin plate fed from the unwinding device 42. 12 is pulled out along a straight line while maintaining a predetermined tension through the heat treatment apparatus 40, and is wound up into a roll 44, and a resin precursor P applied to one surface of the metal sheet 12 to be passed. Is provided with a tunnel-shaped furnace main body 48 that heats the steel sheet to a temperature of about 350 to 400 ° C. for a predetermined time, and a cooling device 50 for cooling the metal thin plate 12 that has come out of the furnace main body 48. In this embodiment, the unwinding device 42 and the winding device 46 constitute a conveying device for the metal thin plate 12. In the furnace main body 48 or the cooling device 50, when the thin metal plate 12 being conveyed does not sag and become linear, a conveyance roller that supports the lower surface of the thin metal plate 12 may be used.

  As shown in detail in FIG. 6, the furnace body 48 is separated by a predetermined distance from the upper surface side and the lower surface side of the thin metal plate 12 conveyed in a horizontal direction along a straight line in the space surrounded by the furnace wall 51. A plurality of plate-like heating plates (far infrared heaters) 52 that are located and are adjacent to each other with a slight gap A along the metal thin plate 12 are arranged.

  The heating plate 52 includes a plate body 54 made of a metal, for example, an aluminum alloy, having a longitudinal shape in a direction perpendicular to the feeding direction of the thin metal plate 12, and the entire radiation surface of the plate body 54 on the side facing the thin metal plate 12. A far-infrared radiator layer 56 fixed to the plate body, a plurality of electric heaters 58 embedded in the plate body 54 in the longitudinal direction thereof, and the electric heaters 58 for introducing an inert gas such as nitrogen gas. And a plurality of injection holes 62 perforated so as to communicate with the gas path 60 on the radiation surface of the plate main body 54. That is, the heating plate 52 is provided with a far-infrared radiator layer 56 so that far-infrared rays are emitted toward the upper surface and the lower surface of the thin metal plate 12, and the inert gas heated by the heating plate 52 is conveyed. A gas passage 60 and an injection hole 62 are provided so as to inject toward the front and back surfaces of the thin metal plate 12 therein. Therefore, in this heat treatment apparatus 40, that is, the heat treatment step 36, the heat radiation radiated from the heating plate 52 radiating far infrared rays toward one surface of the metal thin plate 12 and the metal thin plate 12 from the injection holes 62 provided in the heating plate. The resin precursor P applied to one surface of the metal thin plate 12 is heated using an inert gas sprayed toward one surface.

  The far-infrared radiator layer 56 includes a far-infrared radiator that mainly emits radiation including far-infrared rays, such as II-IV group metal oxide ceramics, non-oxide ceramics, and composite materials containing them. Yes. FIG. 7 shows the radiation wavelength and radiant energy of the far-infrared radiator layer 56 when the heating plate 52 is at 300.degree. In the far-infrared radiator layer 56 of the present embodiment, a wavelength band of 2 μm to 20 μm is an effective wavelength band. FIG. 8 shows the absorptance curves of the resin precursor P and the polyimide resin, and the far-infrared wavelength band, particularly the effective wavelength band of 2 μm to 20 μm is effectively absorbed, and highly efficient heating is performed.

  In the furnace body 48, a plurality of flat heating plates (far infrared heaters) 52 are disposed adjacent to each other, so that an exhaust space 64 surrounded by the furnace wall 51 and the plurality of heating plates. The exhaust pipe 66 connected to the furnace body 48 is communicated with the exhaust space 64. As a result, when the inert gas heated by the heating plate 52 is sprayed from the spray hole 62 toward the resin precursor P coated on one surface of the metal thin plate 12, it is generated from the resin precursor P and heated. Volatile matter staying between the plate 52 and one surface of the thin metal plate 12 is sent to the exhaust space 64 side through the gap A between the thin metal plates 12 together with the inert gas, and is removed through the exhaust pipe 66. ing.

  As described above, the exhaust space is provided between the tunnel-shaped central space 68 and the furnace wall 51 formed by being surrounded by the heating plate 52 in the furnace body 48 so as to allow the thin metal plate 12 to be heated to pass therethrough. Since a simple muffle is formed by interposing 64, the replacement of the inert gas may be substantially within the central space 68. Therefore, the replacement time and consumption are compared with those of the conventional heat treatment apparatus. Is greatly reduced. FIG. 9 shows changes in the oxygen concentration when the initial flow rate of the inert gas is 200 l / min and several tens of l / min after 35 minutes. 40 ppm (film loading state) was achieved in less than 50 minutes.

  The heat treatment apparatus 40 configured as described above has, for example, the temperature (heat curve) shown in FIG. 10 based on the temperature of each part in the furnace body 48 detected from a plurality of temperature sensors (not shown). A temperature adjusting device 70 for controlling the output of each heating plate 52 is provided. With this temperature adjusting device 70, when the flow rate of the inert gas was 200 l / min, the holding temperature in the width direction of the film had an accuracy of 380 ° C. ± 2 ° C.

  FIG. 11 is a diagram showing the heat curve of the heat treatment apparatus 40 of the present embodiment compared with the heat curve of a conventional heat treatment apparatus using hot air heating. In the heat treatment apparatus 40 of the present embodiment, since far infrared heating is used, the inside of the coating film of the resin precursor P is also heated at the same time, and the solvent in the inside can be quickly removed, so that the temperature can be rapidly raised. I was able to save a lot of time. On the other hand, in the conventional heat treatment apparatus using hot air heating, the coating film surface of the resin precursor P is hardened first, and the internal solvent is difficult to escape, so a gentle heat curve must be made by temperature control by zone division. Therefore, the processing time was about twice as long as that of the heat treatment apparatus 40 of this embodiment. In FIG. 11, tIN indicates the time when the thin metal plate 12 is carried in, and tOUT indicates the time when the thin metal plate 12 is carried out.

  As described above, according to the method or apparatus for manufacturing the flexible polyimide metal laminate 10 of the present embodiment, the resin precursor P applied to one surface of the metal thin plate 12 in the heat treatment step 36 or the heat treatment apparatus 40. Is heated using far infrared rays to cause condensation polymerization in the resin precursor P, and a polyimide resin film 14 is formed on one surface of the metal thin plate 12. When the polyimide resin film 14 is produced, condensation polymerization is performed by heating with far infrared rays. The far infrared rays penetrate into the coating film of the resin precursor P, and far infrared radiation energy is absorbed. Since the entire film is efficiently heated and imidization is performed, a homogeneous polyimide resin film 14 is generated in a short time. Therefore, the heat treatment is efficiently performed in a short time, and the heat equipment becomes small.

  Moreover, according to the manufacturing method or manufacturing apparatus of the flexible polyimide metal laminate 10 of the present embodiment, the resin precursor P of the polyimide resin film 14 in the resin precursor coating step 34 or the resin precursor coating apparatus 35. Is applied to one surface of the thin metal plate 12, and in the heat treatment step 36, the resin precursor P applied to one surface of the thin metal plate 12 is heated using far-infrared rays to be reduced to the resin precursor P. Polymerization is generated, and a polyimide resin film 14 is generated on one surface of the metal thin plate 1. When the polyimide resin film 14 is produced, the far infrared rays penetrate into the coating film of the resin precursor P, the far infrared radiation energy is absorbed, and the entire coating film is efficiently heated in a short time to imidize. Is called.

  Moreover, according to the manufacturing method or manufacturing apparatus of the flexible polyimide metal laminated plate 10 of the present embodiment, in the heat treatment step 36 or the heat treatment apparatus 40, the heating plate 52 radiating far infrared rays is directed toward one surface of the metal thin plate 12. The resin precursor applied to one surface of the thin metal plate 12 using the radiated heat radiation and the inert gas sprayed from one of the injection holes 62 provided in the heating plate 52 toward the one surface of the thin metal plate 12. Since the body P is heated, the heat treatment is performed more efficiently. Further, since the evaporant and sublimate from the coating film such as the solvent are quickly removed by the injection of the inert gas from the injection hole 62, the coating film is formed by the evaporant and sublimation convection on one surface of the metal thin plate 12. The arrival of heat radiation to the film and the drying of the coating are not hindered. In addition, since the oxidation of the metal thin plate is suitably prevented by the inert gas, the wettability of the solder is not impaired even when a layer surface treatment is not performed when a metal such as copper is used.

  In this example, since the resin precursor P contains a polyamic acid synthesized by a reaction between an acid anhydride and a diamine, the polyimide resin film is formed by the ring opening of the polyamic acid being closed. Preferably generated.

  Next, another embodiment of the present invention will be described. In the following description, parts common to those in the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

  FIG. 12 is a diagram illustrating a configuration of a main part of a heat treatment apparatus 80 as another example of the heat treatment apparatus 40 described above. In FIG. 12, in order to support the thin metal plate 12 from the lower surface side, a plurality of transport rollers 82 for receiving the thin metal plate 12 are provided in the furnace body 48. The plurality of transport rollers 82 are disposed at positions that are higher at the center in the longitudinal direction of the furnace body 48 and lower toward the both ends of the furnace body 48, that is, closer to the inlet and outlet. The thin metal plate 12 is conveyed on the upper surface side, that is, the resin precursor P application side, on a conveyance path having a mountain shape or a convex curve. Note that only one transport roller 82 may be provided at the longitudinal center of the furnace body 48. In the present embodiment, the unwinding device 42, the conveying roller 82, and the winding device 46 constitute a conveying device for the thin metal plate 12.

  In this example, in addition to obtaining the same effect as the above-described example, the resin precursor P is formed on one side in the process of being conveyed on the conveyance path having a mountain shape on the upper surface side of the thin metal plate 12 by the conveyance device. Since the coated longitudinal thin metal plate 12 is heat treated, the heat treatment is performed in a state of being chevron on one side, so that the bending due to the difference in thermal expansion between the polyimide resin film 14 and the thin metal plate 12 is performed. Is suitably suppressed.

  As mentioned above, although this invention was demonstrated in detail with reference to drawings, this invention can be implemented also in another aspect, A various change can be added in the range which does not deviate from the main point.

It is sectional drawing which shows the 2 layer type flexible polyimide metal laminated board of one Example of this invention. It is sectional drawing which shows a 3 layer type flexible polyimide metal laminated board. It is process drawing explaining the principal part of the manufacturing method of the flexible polyimide metal laminated board of FIG. Prior to manufacturing the flexible polyimide metal laminate of FIG. 1, a coating apparatus for continuously applying a fluid resin precursor P to one surface of a thin metal plate, and for drying the applied resin precursor P It is a figure which shows this drying apparatus. It is a figure which shows the heat processing apparatus for heat-processing to the resin precursor P coated on the one surface of the metal thin plate. It is sectional drawing which expands and shows the principal part of the heat processing apparatus of FIG. It is a figure which shows the spectrum of the far infrared rays radiated | emitted from the heating plate of FIG. It is a figure which shows the absorption spectrum of the resin precursor P heated by the heating plate of FIG. 6, and a polyimide resin. It is a time chart which shows the substitution state of the inert gas in the starting time of the heat processing apparatus of FIG. It is a figure which shows the heat curve by which temperature control was carried out in the heat processing apparatus of FIG. It is a figure which shows the heat curve of the heat processing apparatus of FIG. 5 in contrast with the heat curve of the conventional heat processing apparatus which heat-processes the resin precursor P using a hot air. It is sectional drawing which shows the principal part of the heat processing apparatus of the other Example of this invention.

Explanation of symbols

10: Flexible polyimide metal laminate 12: Metal thin plate 14: Polyimide resin film 34: Application process 36: Heat treatment process 40: Heat treatment apparatus 52: Heating plate 62: Injection hole 82: Conveying roller

Claims (10)

A method for producing a flexible polyimide metal laminate comprising a polyimide resin film and a metal thin plate fixed to each other,
A resin precursor coating step of coating a resin precursor for generating the polyimide resin film on one surface of the metal thin plate;
To generate a condensation polymerization in the resin precursor by heating with a far infrared said resin precursors coated on one surface of the sheet metal in the resin precursor the coating step, the one surface of the sheet metal A heat treatment step for producing a polyimide resin film ,
The heat treatment step includes heat radiation radiated from a heating plate that emits far-infrared rays toward one surface of the metal thin plate, and non-injection that is jetted toward one surface of the metal thin plate from an injection hole provided in the heating plate. Using the active gas, the resin precursor applied to one surface of the metal thin plate is heated,
Further, in the heat treatment step, the heating plates are respectively arranged at a predetermined distance on one side and the other side of the thin metal plate in a space surrounded by a furnace wall in a furnace body for heating the resin precursor. In this state, a tunnel-shaped central space surrounded by the heating plate is formed, and a simple muffle is formed in which an exhaust space is interposed between the central space and the furnace wall. A method for producing a flexible polyimide metal laminate, comprising heating the resin precursor while replacing the inside of the central space with the inert gas . The metal sheet is a longitudinal metal sheet with a predetermined width,
A plurality of the heating plates are arranged adjacent to each other with a predetermined gap along the longitudinal direction of the thin metal plate,
The heat treatment step is for injecting the inert gas from the injection hole to send volatile matter generated from the resin precursor and staying in the central space to the exhaust space through the gap. The manufacturing method of 1 flexible polyimide metal laminated plates. The heating plate is provided with a far-infrared radiator layer so that far-infrared radiation is emitted toward the metal thin plate,
Wherein the far-infrared emitting material layer, according to claim 1 or 2 in which contains far-infrared radiator for radiating far infrared rays having an effective wavelength band corresponding to the wavelength band which is absorbed into the resin precursor A method for producing a flexible polyimide metal laminate. 4. The method for producing a flexible polyimide metal laminate according to claim 3 , wherein the effective wavelength band is a wavelength band of 2 to 20 [ mu] m. The thin metal plate is a long thin metal plate having a predetermined width drawn from a state wound in a roll shape,
Claim wherein the heat treatment step, the tree said elongated thin metal plate fat precursor is applied on one surface is for the heat treatment in the process of moving longitudinally along the conveying path to be chevron on the one side A method for producing a flexible polyimide metal laminate according to any one of 1 to 4 . An apparatus for producing a flexible polyimide metal laminate comprising a polyimide resin film and a metal thin plate fixed to each other,
A resin precursor coating apparatus for coating a resin precursor for producing the polyimide resin film on one surface of the metal thin plate;
The resin precursor applied to one surface of the metal thin plate by the resin precursor coating apparatus is heated using far infrared rays to cause condensation polymerization in the resin precursor, and the polyimide on one surface of the metal thin plate and a heat treatment apparatus for generating a resin film, seen including,
The heat treatment apparatus includes a heating plate that radiates far infrared rays toward one surface of the metal thin plate, and an injection hole provided in the heating plate for injecting an inert gas toward one surface of the metal thin plate. Using the heat radiation radiated from the heating plate toward one surface of the thin metal plate and the inert gas sprayed from the injection hole toward one surface of the thin metal plate. Heating the applied resin precursor,
Further, the heat treatment apparatus includes a furnace body having a space surrounded by a furnace wall for heating the resin precursor, and a predetermined distance between the one surface side and the other surface side of the metal thin plate in the space. The heating plates are arranged separately, a tunnel-shaped central space surrounded by the heating plates is formed, and a simple muffle is formed in which an exhaust space is interposed between the central space and the furnace wall. An apparatus for producing a flexible polyimide metal laminate, wherein the resin precursor is heated while replacing the inside of the central space with the inert gas . The metal sheet is a longitudinal metal sheet with a predetermined width,
A plurality of the heating plates are arranged adjacent to each other with a predetermined gap along the longitudinal direction of the thin metal plate,
The heat treatment apparatus is configured to send volatile substances generated from the resin precursor and staying in the central space to the exhaust space through the gap by injecting the inert gas from the injection holes. 6. An apparatus for producing a flexible polyimide metal laminate of 6. The heating plate is provided with a far-infrared radiator layer so that far-infrared radiation is emitted toward the metal thin plate,
Wherein the far-infrared emitting material layer, according to claim 6 or 7 wherein in which far-infrared radiator for radiating far infrared rays having an effective wavelength band corresponding to the wavelength band that is absorbed in the resin precursor is contained An apparatus for producing a flexible polyimide metal laminate. 9. The apparatus for producing a flexible polyimide metal laminate according to claim 8 , wherein the effective wavelength band is a wavelength band of 2 μm to 20 μm . The thin metal plate is a long thin metal plate having a predetermined width drawn from a state wound in a roll shape ,
The heat treatment apparatus is provided with a conveying device for moving the elongated metal sheet where the resins precursor is coated on one side, while supported by the conveying rollers arranged such that the mountain-shaped transporting path, in the process of conveying the conveyance path as a chevron on the one side by the transport device, one of the claims 6 to 9 wherein the resin precursor on the one surface in which heat treating the elongated sheet metal which is Nurigi Or 1 flexible polyimide metal laminate production apparatus.

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