JP4541194B2 - Coating liquid supply apparatus and pattern forming apparatus - Google Patents

Description

  The present invention relates to a coating liquid supply apparatus and a pattern forming apparatus that supply a coating liquid to discharge holes.

  Conventionally, there has been an ink jet type pattern forming apparatus (for example, Patent Document 1) that applies a coating liquid to a pattern forming body such as a glass substrate to produce, for example, a color filter. In such a pattern forming apparatus, a coating liquid supply source that supplies a coating liquid and a discharge hole that discharges the coating liquid are connected by a pipe, and the coating liquid is pumped and supplied at a predetermined pressure.

FIG. 7 is a diagram schematically showing the periphery of a head unit of a conventional pattern forming apparatus. FIG. 7A shows the head unit moving to the left end of the moving range, and FIG. 7B shows the right end. It is a figure which shows the state which moved.
As shown in FIG. 7A, the head unit 150 is movably installed on the frame 114. The head unit 150 is a combination of a plurality (one or more) of ink heads that eject ink. The head unit 150 is provided with a moving mechanism (not shown), and moves parallel to the pattern forming surface of the pattern forming body P placed on the moving table 130. The head unit 150 is provided with a discharge hole 150b for discharging the coating liquid provided on the coating liquid discharge surface 150a, and a head piping portion 150c for supplying the coating liquid to the discharge hole 150b. And this head piping part 150c and the coating liquid supply source which supplies a coating liquid are connected via the piping 170. FIG. The coating liquid supply source delivers the coating liquid at a predetermined pressure, a drive signal is appropriately applied to the head unit 150, and the discharge hole 150b discharges the coating liquid.
The pipe 170 is disposed so as to face the upper side in the vertical direction where the slack absorbing device 179 is disposed from the head unit 150, and is further guided by the slack absorbing device 179 toward the coating liquid supply source. The slack absorbing device 179 is, for example, a cable bear (registered trademark), and absorbs slack in the pipe 170 that occurs as the head unit 150 moves.

However, since the conventional pattern forming apparatus has the structure described above, the slack absorbing device 179 is arranged on the upper side in the vertical direction of the head unit 150, and the slack absorbing device 170 operates as the head unit 150 moves. For this reason, the length of the piping 170 around the head unit 150 is increased due to the routing. When the length of the pipe 170 is increased, a loss of pressure for pumping the coating liquid increases, and there is a possibility that stable coating liquid cannot be discharged. Further, when a larger pressure is applied to compensate for the pressure loss, there is a problem that the control for adjusting the delicate pressure becomes complicated.
JP 2002-361852 A

  An object of the present invention is to provide a coating liquid supply apparatus and a pattern forming apparatus that can improve pressure loss in a pipe for supplying a coating liquid to a discharge hole and can stably supply the coating liquid.

The present invention solves the above problems by the following means. In order to facilitate understanding, description will be made with reference numerals corresponding to the embodiments of the present invention, but the present invention is not limited to this.
The invention of claim 1 has a discharge hole (50b) for discharging the coating liquid to the pattern formation body (P) and has a predetermined movement with respect to the pattern formation surface (P1) of the pattern formation body (P). Range (D1) The coating liquid is supplied to the moving head (50), the discharge hole (50b), and has a flexible coating liquid supply pipe (70) and the coating liquid supply pipe (70). In the coating liquid supply apparatus including a coating liquid supply source (60) for pumping the coating liquid to the discharge hole (50b), the coating liquid supply pipe (70) corresponds to the movement of the head (50). The first coating liquid supply pipe (70a) that does not move and the first coating liquid supply pipe (70a) are arranged closer to the head (50) than the first coating liquid supply pipe (70a), and move according to the movement of the head (50). A second coating liquid supply pipe (70b, 70c); A range (D2) narrower than the movement range (D1) of the head (50) in the direction (A2) along the movement direction (A, A1) of the head (50) in accordance with the movement of the head (50). The first support portion (79d) that moves and supports the second coating liquid supply pipe (70b, 70c) is provided, and the head (50) moves according to the (50) movement of the head. A coating liquid supply apparatus comprising a slack absorbing portion (79b, 79c, 80) that absorbs slack in the second coating liquid supply pipe (70b, 70c) generated accordingly.

According to a second aspect of the present invention, in the coating liquid supply apparatus according to the first aspect, the slack absorbing portion (80) includes at least two rollers (82, 82) around which the second coating liquid supply pipe (70c) is wound. 83) is a coating liquid supply device characterized in that the distance between the axes is held to be changeable and the slack is absorbed.
A third aspect of the present invention is the coating liquid supply apparatus according to the second aspect, wherein the second coating liquid supply pipe (70c) is provided in a range from the head (50) to the slack absorbing portion (80). A second support portion (87) that movably supports the second coating liquid supply pipe (70c), and a distance (D3) from the head (50) to the second support portion (87). And a guide portion (85) for guiding the second coating solution supply pipe (70c) so as to be constant.
According to a fourth aspect of the present invention, there is provided the coating liquid supply apparatus according to the third aspect, wherein the second support portion (87) has a moving direction (E) and a moving direction (A, A1) of the head (50). The axis of the second coating liquid supply pipe (70c) is bent in a direction perpendicular to the axis, and the second coating liquid supply pipe (70c) is bent according to the movement of the head (50) ( F) A coating liquid supply apparatus characterized in that it is a bending support section that is twisted around.
A fifth aspect of the present invention is the coating liquid supply apparatus according to the first aspect, wherein the first support portion (79d) holds the second coating liquid supply pipe (70b, 70c) in a predetermined place. The slack absorbing portion is a first slack absorbing mechanism that absorbs slack in the second coating liquid supply pipe (70b) closer to the coating liquid supply source (60) than the first support portion (79d). 79b, 79c) and a second slack absorbing mechanism (80) for absorbing slack in the second coating liquid supply pipe (70c) closer to the head (50) than the first support portion (79d). It is a coating liquid supply apparatus characterized by providing.

  According to a sixth aspect of the present invention, the pattern forming body (P) has a discharge hole (50b) for discharging the coating liquid and has a predetermined movement with respect to the pattern forming surface (P1) of the pattern forming body (P). Range (D1) The coating liquid is supplied to the moving head (50), the discharge hole (50b), and has a flexible coating liquid supply pipe (70) and the coating liquid supply pipe (70). And a coating liquid supply source (60) for pumping the coating liquid to the discharge hole (50b), the coating liquid supply pipe (70) is moved according to the movement of the head (50). A first coating liquid supply pipe (70a) that does not move, and a first coating liquid supply pipe (70a) that is disposed closer to the head (50) than the first coating liquid supply pipe (70a), and that moves according to the movement of the head (50). 2 coating liquid supply pipes (70b, 70c), In accordance with the movement of the head (50), the range (D2) is narrower than the movement range (D1) of the head (50) in the direction (A2) along the movement direction (A, A1) of the head (50). ) The first support portion (79d) that moves and supports the second coating liquid supply pipe (70b, 70c) is provided, and the head (50) moves according to the (50) movement of the head. The pattern forming apparatus includes a slack absorbing portion (79b, 79c, 80) that absorbs slack in the second coating liquid supply pipe (70b, 70c) generated according to the above.

According to a seventh aspect of the present invention, in the pattern forming apparatus according to the sixth aspect, the slack absorbing portion (80) includes at least two rollers (82, 83) around which the second coating liquid supply pipe (70c) is wound. ) In such a manner that the distance between the axes can be changed and the slack is absorbed.
Invention of Claim 8 is provided in the range from the said head (50) in the said 2nd coating liquid supply pipe | tube (70c) to the said slack absorption part (80) in the pattern formation apparatus of Claim 7. A second support portion (87) that movably supports the second coating liquid supply pipe (70c) and a distance (D3) from the head (50) to the second support portion (87) are constant. And a guide portion (85) for guiding the second coating liquid supply pipe (70c).
According to a ninth aspect of the present invention, in the pattern forming apparatus according to the eighth aspect, the second support portion (87) includes a movement direction (E) and a movement direction (A, A1) of the head (50). The axis of the second coating liquid supply pipe (70c) is bent in a direction perpendicular to the axis, and the second coating liquid supply pipe (70c) is bent according to the movement of the head (50) (F The pattern forming apparatus is characterized in that it is a bending support portion that is twisted around.
A tenth aspect of the present invention is the pattern forming apparatus according to the sixth aspect, wherein the first support portion (79d) holds the second coating liquid supply pipe (70b, 70c) in a predetermined place, The slack absorbing section absorbs a slack of the second coating liquid supply pipe (70b) closer to the coating liquid supply source (60) than the first support section (79d). 79c) and a second slack absorbing mechanism (80) for absorbing slack in the second coating liquid supply pipe (70c) closer to the head (50) than the first support portion (79d). This is a pattern forming apparatus.

According to the present invention, the following effects can be obtained.
(1) In the present invention, the coating liquid supplied by the coating liquid supply source is supplied to the discharge hole by the flexible coating liquid supply pipe, and the discharge hole is applied to the pattern forming body. The coating liquid supply pipe has a first coating liquid supply pipe that does not move in accordance with the movement of the head, and a second coating liquid supply pipe that is disposed closer to the head than this and moves in accordance with the movement of the head. is doing. The first support portion moves in a direction narrower than the moving range of the head in a direction along the moving direction of the head according to the movement of the head, and supports the second coating liquid supply pipe. The slack absorbing portion absorbs slack in the second coating liquid supply pipe that occurs in accordance with the movement of the head.
Thereby, the length of the second coating liquid supply pipe can be shortened by arranging the second coating liquid supply pipe from the first support portion toward the range where the head is disposed, Loss of pressure when supplying the coating liquid can be prevented, and the coating liquid can be stably discharged.

(2) In the present invention, the slack absorbing portion supports at least two rollers around which the coating liquid supply pipe is wound so that the distance between the axes can be changed, and absorbs slack.
Thereby, for example, by providing a dancer roller, it is possible to absorb the slack of the second coating liquid supply pipe.

(3) In the present invention, the second support part provided in the range from the head to the slack absorbing part in the second coating liquid supply pipe supports the second coating liquid supply pipe in a movable manner. The guide part guides the second coating liquid supply pipe so that the distance from the head to the second support part is constant.
As a result, the deflection angle of the second coating liquid supply pipe accompanying the movement of the head can be reduced, and a change in pressure due to a change in the internal volume in the second coating liquid supply pipe can be prevented.

(4) In the present invention, the second support portion bends the axis of the second coating liquid supply pipe in a direction perpendicular to the moving direction of the head and the moving direction of the head, and performs the second coating according to the movement of the head. This is a bending support portion in which the liquid supply pipe is twisted around its bent axis.
Thereby, the change of the internal volume due to the shake of the second coating liquid supply pipe accompanying the movement of the head can be further reduced.

(5) In the present invention, the first support portion holds the second coating liquid supply pipe at a predetermined location. In the slack absorbing section, the first slack absorbing mechanism absorbs the slack of the second coating liquid supply pipe on the coating liquid supply source side with respect to the first support section, and the second slack absorbing mechanism is the first slack absorbing mechanism. Absorbs slack in the second coating liquid supply pipe on the head side with respect to the support portion.
Thereby, for example, the first and second slack absorbing mechanisms can disperse the slack absorbing direction, reduce the stroke of the dancer roller, and reduce the slack absorbing portion.

  An object of the present invention is to provide a coating liquid supply apparatus and a pattern forming apparatus capable of improving pressure loss in a pipe for supplying a coating liquid to a discharge hole and capable of supplying a stable coating liquid. The slack absorption device absorbs slack in the pipe on the side of the coating solution supply side than the pipe support, and the carriage absorbs slack in the pipe on the head side relative to the pipe support, This was realized by guiding and supporting the piping from the head unit to the carriage by using the mover and guide rail, and shortening the piping length.

Hereinafter, the present invention will be described in more detail with reference to the drawings and the like.
FIG. 1A is a perspective view showing a pattern forming apparatus 1 according to an embodiment of the present invention.
The pattern forming apparatus 1 according to the present embodiment is an ink jet type apparatus that applies a coating liquid to a glass substrate or the like (patterned body) to produce, for example, a color filter.
The pattern forming apparatus 1 includes a base unit 10, a moving table 30, a head unit 50, a coating liquid supply source 60, and a pipe 70 (coating liquid supply pipe).

The base unit 10 includes a base frame 11, a stage 13, and a frame 14.
The base frame 11 is a gantry provided at the lowermost part of the pattern forming apparatus 1.
The stage 13 is a surface plate member on which the moving table 30 is placed. The size of the stage 13 of this embodiment is, for example, about 4000 mm × 2500 mm × 350 mm. The stage 13 includes two X-axis rails 13b parallel to the X axis on the upper surface 13a, and a movable table 30 described later is movably mounted thereon.
The frame 14 is a framework provided so as to straddle the stage 13 in order to hold a head unit 50 described later in a movable manner.

  The moving table 30 is a moving stage that is movably mounted on the stage 13. The moving table 30 includes a suction table, can move in the X-axis direction, and can rotate around the axis with respect to the Z-axis. Thereby, the movement table 30 can align the to-be-patterned body P mounted on the suction table.

  The head unit 50 includes a plurality of ink heads that discharge red, green, and blue coating liquids, each of which has a discharge hole that discharges the coating liquid. The head unit 50 is movable about the frame 14 in the Y-axis direction (arrow A direction shown in FIG. 1A) and is rotatable about an axis Z1 parallel to the vertical direction (Z-axis direction). (The direction of rotation is indicated by the direction of the arrow θ in FIG. 1A). As the ink jet method, a piezo method, a thermal method, and the like are widely known, but any of them can be used in this apparatus. The mechanism and operation of the head unit 50 will be described later.

The coating liquid supply source 60 is a device that supplies red, green, and blue coating liquids to be supplied to the head unit 50 and stores these coating liquids.
FIG. 1B is a diagram schematically showing a structure for pumping a red coating solution in the coating solution supply source 60. The coating liquid supply source 60 includes an ink tank 61, a delivery pipe 62, an air pressure source 63, and a pressure pipe 64 in order to supply a red coating liquid to the ink head.
The ink tank 61 is a sealed container that stores a red coating liquid. A predetermined amount of red coating liquid is stored in the ink tank 61, and the red coating liquid is replenished when the ink tank 61 falls below a certain level.
The delivery pipe 62 is a pipe for delivering the red coating liquid stored in the ink tank 61 to a pipe 70R described later. The delivery pipe 62 and the pipe 70R are connected by a connection ring 62a. The delivery pipe 62 is arranged such that the suction hole 62b is below the liquid surface of the red coating liquid.

The air pressure source 63 is a compressor that generates compressed air. The air pressure source 63 is connected to the ink tank 61 via a pressure pipe 64 described later.
The pressurizing pipe 64 is a pipe for sending the air pressurized by the air pressure source 63 to the ink tank 61. The pressurizing pipe 64 is arranged so that the opening hole 64a on the ink tank 61 side is located above the liquid surface of the red coating liquid.
The operation of pumping the red coating liquid by the coating liquid supply source 60 will be described. First, the air compressed by the air pressure source 63 is discharged to the ink tank 61 through the pressurizing pipe 64. The ink tank 61 is a sealed container, the opening hole 64a of the pressurizing pipe 64 is above the liquid surface of the red coating liquid, and the suction hole 62b of the delivery pipe 62 is higher than the liquid surface of the red coating liquid. It is arranged to be on the lower side. For this reason, the stored red coating liquid is pumped to the pipe 70 </ b> R via the pressurization pipe 64.
The coating liquid supply source 60 has the same structure as the red coating liquid in order to pump blue and green coating liquids to the ink head.

  The pipe 70 is a flexible pipe that connects the head unit 50 and the coating liquid supply source 60. The pipe 70 includes pipes 70R, 70G, and 70B that supply red, blue, and green coating liquids to the head unit 50, respectively. The pipes 70R, 70G, and 70B are each provided with a similar structure for pressure-feeding the coating liquid, and are simply described as the pipe 70 for the sake of simplicity. A pipe 70 from the coating liquid supply source 60 is disposed on the upper side of the frame 14 and connected to the head unit 50 via a carriage 80 and the like which will be described later. As will be described later, the pipe 70 includes a pipe 70a (first coating liquid supply pipe) that does not move in accordance with the movement of the head unit 50, the carriage 80, and the like, and pipes 70b and 70c that move in accordance with the movement of the carriage 80 and the like. (Second coating liquid supply pipe).

FIG. 2 is a front view schematically showing the periphery of the head unit 50 of the pattern forming apparatus 1, and is a view shown from the direction of arrow B shown in FIG. The state of FIG. 2 is a state in which the head unit 50 is disposed at the left end of the movement range.
As shown in FIG. 2, the pattern forming apparatus 1 includes a slack absorbing device 79, a carriage 80 (second slack absorbing mechanism), a guide rail 85 (guide portion), and a mover 87 (around the head unit 50). 2nd support part), and the piping 70 is guided.

  In the head unit 50, a discharge hole 50 b for discharging the coating liquid to the pattern forming surface P <b> 1 is provided on the surface 50 a on the pattern forming body P side mounted on the moving table 30. The head unit 50 has a head pipe portion 50c that is connected to the pipe 70c and supplies the coating liquid to the discharge hole 50b. When the drive signal is appropriately applied to the head unit 50, the discharge hole 50 b discharges the coating liquid sent out at a predetermined pressure by the coating liquid supply source 60. The head unit 50 is held in the frame 14 by a moving mechanism (not shown) provided in the frame 14 so as to be movable in a range D1 in parallel to the pattern forming surface P1 (the positions after the movement are two points). (Indicated by a chain line).

  The slack absorbing device 79 is a device that guides the piping 70 from the coating liquid supply source 60 and absorbs slackness of the piping 70b that is caused by the movement of the carriage 80 described later. The slack absorbing device 79 is, for example, a cable bear (registered trademark), in which the pipe 70 from the coating liquid supply device 60 is folded 180 degrees into a U-turn shape by the bent portion 79b on the upper side of the frame 14. The slack absorbing device 79 moves with the movement of the pipe 70 and guides the pipe 70b in a state where the bent portion maintains a predetermined curvature.

The slack absorbing device 79 includes a lower flat portion 79a, a bent portion 79b, an upper flat portion 79c, and a pipe support portion 79d.
The lower flat portion 79a holds a pipe 70a (first coating liquid supply pipe) disposed in this portion. The lower flat portion 79a and the pipe 70a are portions that do not move with the movement of the head unit 50, a carriage 80 described later, and the like.
A portion (first slack absorbing mechanism) composed of the bent portion 79b and the upper flat portion 79c moves with the movement of the carriage 80 and the like, and holds and guides the piping 70b of this portion. Further, since the bent portion 79b and the upper flat portion 79c move in a state where the curvature thereof is maintained as the carriage 80 moves, it is possible to prevent a change in internal pressure due to a change in the curvature of the pipe 70b.
The pipe support portion 79 d is a portion that holds the pipe 70 so as to be integrally movable, and is provided at the distal end portion of the slack absorbing device 79. The pipe 70c closer to the head unit 50 than the pipe support portion 79d is arranged toward the range where the head unit 50 is arranged.

The carriage 80 is a device that guides the piping 70 c from the piping support portion 79 d and absorbs slackness of the piping 70 c that occurs as the head unit 50 moves. The carriage 80 includes a dancer roller 82, a fixed roller 83, and a carriage case 84.
The dancer roller 82 is a roller for absorbing slack in the pipe 70c. The dancer roller 82 is held by a carriage case 84 (described later) so that the rotation shaft 82a thereof is movable. The dancer roller 82 is wound around the lower outer peripheral portion 82b by a pipe 70c arranged on the lower side in the vertical direction from the slack absorbing device 79, and led to a fixed roller 83 (described later) arranged on the upper side. Yes. As shown in FIG. 2, the dancer roller 82 absorbs the slackness of the pipe 70c that occurs when the head unit 50 moves in the direction opposite to the coating liquid supply source 60 side (the direction of arrow A1 shown in FIG. 2). Next, it moves downward in the vertical direction (in the direction of arrow C1 shown in FIG. 2). The operation of the dancer roller 82 will be described later.

The fixed roller 83 is a roller that guides the pipe 70c from the dancer roller 82 to a guide rail 85 (described later) disposed further below. The fixed roller 83 has a rotation shaft 83a fixed to a carriage case 84 (described later) and is rotatably held.
The carriage case 84 is a case that houses the dancer roller 82 and the fixed roller 83, and moves together with these in the range D2 following the movement of the head unit 50 (the position after movement is indicated by a two-dot chain line). The carriage case 84 supports the dancer roller 82 and the fixed roller 83 so that the distance between the rotation shafts 82a and 83a can be changed, and absorbs slackness of the pipe 70c. The carriage case 84 is provided with a moving mechanism (not shown) and moves in a direction (arrow A2 direction) along the moving direction (arrow A1 direction) of the head unit 50. The carriage case 84 has an arm 84 a that is connected to the leading end portion of the slack absorbing device 79, and the leading end portion of the slack absorbing device 79 moves integrally as the carriage case 84 moves. The range D2 in which the carriage case 84 moves is set to be narrower than the range D1 described above.

The guide rail 85 is a guide that guides the pipe 70 c disposed on the lower side in the vertical direction from the fixed roller 83 to the head unit 50.
FIG. 3 is a front view schematically showing the shape of the right half of the guide rail 85. 4 is a view showing the structure of the guide rail 85, FIG. 4 (a) is a perspective view, and FIG. 4 (b) is a sectional view taken along the line G-G in FIG. 4 (a). is there.
The front shape of the guide rail 85 is defined as follows.
As shown in FIG. 3, first, in a state where the head unit 50 is disposed at the center position, a point between the guide rail 85 supporting the pipe 70 c (hereinafter referred to as “center support point 85 a”) and the head unit 50. The distance D3 is set according to design conditions such as an arrangement space. When the head unit 50 moves to the right side, the head unit 50 at that position and the central support point 85a are connected with a straight line, and further, a point 85b is set on the straight line so as to be a distance D3 from the head unit 50. . This point 85b is a point that supports the pipe 70c when the head unit 50 moves to this position. Even when the head unit 50 moves to another position, the point where the guide rail 85 supports the pipe 70c is defined similarly, and the locus of this point is the front shape of the guide rail 85.

As shown in FIG. 4A, the guide rail 85 includes two rail members 85c. The two rail members 85c have a U-shaped cross section (see FIG. 4B), and are disposed so that the concave portions 85d face the inside.
As shown in FIG. 4A, the moving element 87 is a member that supports the pipe 70c so as to be movable in the direction along the guide rail 85 (the direction of arrow E shown in FIG. 4A). In addition, the moving element 87 has the axis of the pipe 70c in the moving direction of the moving element 87 (the direction of arrow E shown in FIG. 4A) and the moving direction of the head unit 50 (the direction of arrow A1 shown in FIG. 2). It is a bending support part that bends to an axis F in a vertical direction. The moving element 87 is provided with four sliding pins 87a that are in sliding contact with the recess 85d of the rail member 85c (see a partial cross section). The moving element 87 is provided with two retaining rings 87b on the upper surface thereof, and restricts movement of the pipe 70 in the direction along the axis F.

The mover 87 supports the pipe 70c so that the pipe 70c can be deformed so as to be twisted around its axis F when the pipe 70c is swung in the direction of the arrow θ1 shown in FIG. Yes. As shown by a two-dot chain line 71 in FIG. 2, when the pipe 70c is directly connected to the head unit 50 from the fixed roller 83, the pipe 70c is swung in the direction of the arrow θ2 in accordance with the movement of the head unit 50. The amount wound around the fixed roller 83 changes. This is not preferable because the internal pressure of the pipe 70c changes and the internal pressure changes. The pipe 70c of the present embodiment absorbs the vibration accompanying the movement of the head unit 50 by the torsion around the axis F, and makes it possible to stably discharge the coating liquid by reducing the change of the internal volume and the change of the internal pressure. ing.
Note that the retaining ring 87b may be provided with a rolling bearing or the like so that the pipe 70c can rotate around its axis F to disperse the twist.

Next, operations of the slack absorbing device 79, the carriage 80, and the like will be described with reference to FIG.
FIG. 5 is a view showing the operations of the slack absorbing device 79 and the carriage 80 as the head unit 50 moves. FIG. 5A shows a state in which the head unit 50 is arranged at the left end, and FIG. FIG. 5C shows a state in which the head unit 50 is arranged at the center, and FIG. 5C shows a state in which the head unit 50 is arranged at the right end.
When the head unit 50 moves from the left end (state of FIG. 5A) to the right side (in the direction of arrow A1) and is arranged at the center (state of FIG. 5B), the carriage 80 is moved to the right side accordingly. Move in the direction of arrow A2.

At this time, since the movement of the pipe 70c from the head unit 50 to the guide rail 85 in the direction of the axis F is restricted by the mover 87 (see FIG. 4), the guide rail 85 is maintained so as to maintain its length. Guided by The piping 70 c in the carriage 80, that is, the piping 70 c from the guide rail 85 to the piping support portion 79 d of the slack absorbing device 79 is slackened by the movement of the head unit 50, but the dancer roller 82 is on the lower side in the vertical direction (in the direction of arrow C 1). ) To absorb this slack. The pipe 70b closer to the coating liquid supply source 60 than the pipe support 79d is loosened by the movement of the carriage 80, but the bent part 79b and the upper flat part 79c of the slack absorbing device 79 absorb this slack.
When the head unit 50 moves further from the center (the state shown in FIG. 5B) to the right side and is disposed at the right end (the state shown in FIG. 5C), the dancer roller 82 moves upward in the vertical direction (arrow C2). The pipe 70c is guided to prevent stress from being applied in the axial direction of the pipe 70c.

Further, as shown in FIG. 5C, in the pattern forming apparatus 1 of this embodiment, the pipe 70c is arranged obliquely upward to the left from the head unit 50, and the length from the head unit 50 to the slack absorbing device 79. Has been shortened. Thereby, the pressure loss of the pressure feeding from the coating liquid supply source 60 in the piping 70 can be effectively prevented. For reference, a pipe disposed from the head unit 50 in the conventional apparatus toward the upper side in the vertical direction is indicated by a two-dot chain line 170 in FIG.
On the other hand, when the head unit 50 moves from the right end (state of FIG. 5 (c)) to the left side, the slack absorbing device 79, the carriage 80, etc. operate according to the reverse process to the above, and the slack generated in the pipe 70, Prevent stress.

As explained above, in the pattern forming apparatus 1 of the present embodiment, the flexible pipe 70 (coating liquid supply pipe) supplies the coating liquid pumped by the coating liquid supply source 60 to the discharge hole 50b. The pipe 70 is disposed on the side of the head unit 50 from the pipe part 70a (first coating liquid supply pipe) that does not move according to the movement of the head unit 50 (head), and according to the movement of the head unit 50. It has the piping 70b and 70c (2nd coating liquid supply pipe) which move. The pipe support portion 79d (first support portion) of the slack absorbing device 79 (first slack absorbing mechanism) is a direction along the moving direction (arrow A direction) of the head unit 50 according to the movement of the head unit 50. Then, the pipe 70 is supported by moving in a range (D2) narrower than the moving range (D1). The carriage 80 (second slack absorbing mechanism) includes a dancer roller 82 and a fixed roller 83 around which the pipe 70 c is wound, and absorbs slack in the pipe 70 c that occurs as the head unit 50 moves. The pipe 70c is arranged from the pipe support portion 79d toward the range where the head unit 50 is arranged.
Thereby, the length of the pipe 70 can be shortened, pressure loss when supplying the coating liquid can be prevented, and the coating liquid can be stably discharged. By using the above-described structure, for example, the pipe length around the head unit of the pattern forming apparatus corresponding to the G4 size (about 700 mm × about 900 mm) can be shortened by 30% to 40%.

In the pattern forming apparatus 1 of this embodiment, the moving element 87 (second support portion) supports the pipe 70c from the head unit 50 to the carriage 80 so as to be movable. The guide rail 85 (guide portion) guides the pipe 70c so that the distance from the head unit 50 to the moving element 87 is constant. The moving element 87 bends the shaft of the pipe 70c in a direction perpendicular to the moving direction and the moving direction of the head unit 50, so that the pipe 70c can bend the vibration caused by the movement of the head unit 50. It absorbs by twisting around the axis F.
Thereby, the deflection angle of the piping 70c accompanying the movement of the head unit 50 can be made small, and the change of the pressure by the change of the internal volume in the piping 70 can be prevented.

Furthermore, in the pattern forming apparatus 1 according to the present embodiment, the pipe support portion 79d (first support portion) of the slack absorbing device 79 holds the pipes 70b and 70c in a predetermined place. Then, the bending portion 79b of the slack absorbing device 79 that absorbs slack in the pipe 70b closer to the coating liquid supply source 60 than the pipe supporting portion 79d, the upper flat portion 79c (first slack absorbing mechanism), and the pipe supporting portion 79d. In addition, a slack absorbing portion including a carriage 80 (second slack absorbing mechanism) for absorbing slack in the pipe 70c on the head unit 50 side is provided.
Thereby, the pattern formation apparatus 1 can disperse | distribute the direction which absorbs slack with the piping 70b and 70c, and can make a slack absorption part compact.

(Modification)
The present invention is not limited to the embodiments described above, and various modifications and changes are possible, and these are also within the equivalent scope of the present invention.
(1) In the present embodiment, the head unit 50 is an ink jet type, but is not limited thereto. For example, a dispenser may be used.

(2) In the present embodiment, the pattern forming apparatus 1 is provided with two slack absorbing mechanisms (carriage 80, slack absorbing device 79) in order to absorb slack in the pipe 70. It is not limited. For example, like the carriage 80A shown in FIG. 6, a fixed roller 83A (first support portion) that can rotate around the axis is provided, and the slack of the pipe that occurs in accordance with the movement of the head unit 50 is reduced in the vertical direction of the dancer roller 82A. Absorption may be performed only by movement in the direction of arrow C. Also by this, the effect similar to the effect mentioned above can be acquired, and the number of parts and cost can be reduced.

It is a perspective view which shows the pattern formation apparatus 1 of the Example to which this invention is applied. It is a front view which shows the structure of the head unit 50 periphery in a present Example. It is a front view which shows the shape of the guide rail 85 in a present Example. It is a figure which shows the structure of the guide rail 85 in a present Example. It is a figure which shows operation | movement of the slack absorption apparatus 79, the carriage 80, etc. in a present Example. It is a front view which shows the slack absorption apparatus 180 of the Example to which this invention is applied. It is a front view which shows the conventional slack absorption apparatus 179.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pattern formation apparatus 10 Base part 14 Frame 30 Moving table 50 Head unit 60 Coating liquid supply source 70,70a, 70b, 70c Piping 79 Slack absorption apparatus 79a Lower flat part 79b Bending part 79c Upper flat part 79d Piping support part 80, 80A Carriage 82, 82A Dancer roller 83, 83A Fixed roller 85 Guide rail 87 Mover

Claims (10)

A head having a discharge hole for discharging the coating liquid to the pattern forming body and moving in a predetermined moving range with respect to the pattern forming surface of the pattern forming body;
Supplying the coating liquid to the discharge hole, and having a flexible coating liquid supply pipe;
In a coating liquid supply apparatus comprising: a coating liquid supply source that pumps the coating liquid to the discharge hole through the coating liquid supply pipe;
The coating liquid supply pipe is disposed closer to the head than the first coating liquid supply pipe and does not move according to the movement of the head, and moves according to the movement of the head. Having a second coating liquid supply pipe
In accordance with the movement of the head, a first support portion that moves in a direction narrower than the movement range of the head in a direction along the movement direction of the head and supports the second coating liquid supply pipe is provided. ,
A slack absorbing portion that absorbs slack in the second coating liquid supply pipe that occurs in response to the movement of the head;
A coating liquid supply apparatus characterized by the above. In the coating liquid supply apparatus according to claim 1,
The slack absorbing portion holds at least two rollers around which the second coating liquid supply pipe is wound so that the distance between the axes can be changed, and absorbs the slack.
A coating liquid supply apparatus characterized by the above. In the coating liquid supply apparatus according to claim 2,
A second support portion provided in a range from the head to the slack absorbing portion in the second coating liquid supply pipe, and movably supporting the second coating liquid supply pipe;
A guide portion for guiding the second coating liquid supply pipe so that a distance from the head to the second support portion is constant;
A coating liquid supply apparatus comprising: In the coating liquid supply apparatus according to claim 3,
The second support portion bends the axis of the second coating liquid supply pipe in a direction perpendicular to the moving direction of the head and the moving direction of the head, and the second coating portion is moved according to the movement of the head. The liquid supply pipe is a bending support portion that is twisted about its bent axis;
A coating liquid supply apparatus characterized by the above. In the coating liquid supply apparatus according to claim 1,
The first support portion holds the second coating solution supply pipe in a predetermined place,
The slack absorbing part is
A first slack absorbing mechanism that absorbs slack in the second coating liquid supply pipe on the side of the coating liquid supply source with respect to the first support portion;
A second slack absorbing mechanism for absorbing slack in the second coating liquid supply pipe on the head side with respect to the first support portion;
A coating liquid supply apparatus characterized by the above. A head having a discharge hole for discharging the coating liquid to the pattern forming body and moving in a predetermined moving range with respect to the pattern forming surface of the pattern forming body;
Supplying the coating liquid to the discharge hole, and having a flexible coating liquid supply pipe;
In a pattern forming apparatus comprising: a coating liquid supply source that pumps the coating liquid to the discharge hole through the coating liquid supply pipe;
The coating liquid supply pipe is disposed closer to the head than the first coating liquid supply pipe and does not move according to the movement of the head, and moves according to the movement of the head. Having a second coating liquid supply pipe
In accordance with the movement of the head, a first support portion that moves in a direction narrower than the movement range of the head in a direction along the movement direction of the head and supports the second coating liquid supply pipe is provided. ,
A slack absorbing portion that absorbs slack in the second coating liquid supply pipe that occurs in response to the movement of the head;
A pattern forming apparatus. In the pattern formation apparatus of Claim 6,
The slack absorbing portion holds at least two rollers around which the second coating liquid supply pipe is wound so that the distance between the axes can be changed, and absorbs the slack.
A pattern forming apparatus. In the pattern formation apparatus of Claim 7,
A second support portion provided in a range from the head to the slack absorbing portion in the second coating liquid supply pipe, and movably supporting the second coating liquid supply pipe;
A guide portion for guiding the second coating liquid supply pipe so that a distance from the head to the second support portion is constant;
A pattern forming apparatus comprising: The pattern forming apparatus according to claim 8, wherein
The second support section bends the axis of the second coating liquid supply pipe in a direction perpendicular to the moving direction of the head and the moving direction of the head, and supplies the second coating liquid according to the movement of the head. A bend support that allows the tube to twist about its bent axis;
A pattern forming apparatus. In the pattern formation apparatus of Claim 6,
The first support portion holds the second coating solution supply pipe in a predetermined place,
The slack absorbing part is
A first slack absorbing mechanism that absorbs slack in the second coating liquid supply pipe on the side of the coating liquid supply source with respect to the first support portion;
A second slack absorbing mechanism for absorbing slack in the second coating liquid supply pipe on the head side with respect to the first support portion;
A pattern forming apparatus.

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