JP4531108B2 - Optical filter and optical apparatus - Google Patents

Optical filter and optical apparatus Download PDF

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JP4531108B2
JP4531108B2 JP2009173522A JP2009173522A JP4531108B2 JP 4531108 B2 JP4531108 B2 JP 4531108B2 JP 2009173522 A JP2009173522 A JP 2009173522A JP 2009173522 A JP2009173522 A JP 2009173522A JP 4531108 B2 JP4531108 B2 JP 4531108B2
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refractive index
index layer
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JP2009258748A (en
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順雄 和田
延好 豊原
健 川俣
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Olympus Corp
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Description

本発明は、光学フィルタ及び光学機器に関する。   The present invention relates to an optical filter and an optical apparatus.

生体試料の観察などに用いられる光学機器である蛍光顕微鏡は、染色処理した細胞などの試料へ励起光を当てた際に試料が発する蛍光を観察することにより、試料の構造や性質を解析することができる。
近年のゲノム解析用としては、例えば、502nmの波長を有する励起光で526nmにピーク波長を有する蛍光を観察するというニーズがある。この場合、励起光と蛍光の波長が近いので、蛍光を効率よく検出するために励起光を阻止帯域でカットし蛍光観察波長の光を透過帯域で透過させる光学フィルタが、蛍光測定の感度と精度を決める非常に重要なキーパーツとして用いられている。
A fluorescence microscope, an optical instrument used to observe biological samples, analyzes the structure and properties of a sample by observing the fluorescence emitted by the sample when excitation light is applied to a sample such as a stained cell. Can do.
For recent genome analysis, for example, there is a need to observe fluorescence having a peak wavelength at 526 nm with excitation light having a wavelength of 502 nm. In this case, since the excitation light and the fluorescence wavelength are close to each other, an optical filter that cuts the excitation light in the stop band and transmits the light of the fluorescence observation wavelength in the transmission band in order to efficiently detect the fluorescence is sensitive and accurate in fluorescence measurement. It is used as a very important key part.

この光学フィルタには、透過帯域と阻止帯域の境界で分光特性の急峻な立ち上がりをもち、かつ、透過帯域で略100%の光を透過する性能が要求されている。さらに、透過帯域においては波長の増減に対する透過率の周期的な変動(リップル)が無いことが望ましい。
このように、所定の波長帯域の光を遮断し、その他の波長の光を透過する光学フィルタであるマイナスフィルタは、図8(a)に示すように、基板上に高屈折率層と低屈折率層を交互に積層した多層膜で作製される。ここで、横軸は光学膜厚で、縦軸は膜の屈折率を表す。また、この膜構成のときの膜を透過する光の波長と透過率との関係を分光特性として図8(b)に示す。
This optical filter is required to have a sharp rise in spectral characteristics at the boundary between the transmission band and the stop band and to transmit almost 100% of light in the transmission band. Furthermore, in the transmission band, it is desirable that there is no periodic fluctuation (ripple) of the transmittance with respect to the increase or decrease of the wavelength.
Thus, the minus filter, which is an optical filter that blocks light of a predetermined wavelength band and transmits light of other wavelengths, has a high refractive index layer and a low refractive index on the substrate as shown in FIG. It is made of a multilayer film in which rate layers are alternately stacked. Here, the horizontal axis represents the optical film thickness, and the vertical axis represents the refractive index of the film. Further, FIG. 8B shows the relationship between the wavelength of light transmitted through the film and the transmittance in this film configuration as spectral characteristics.

この光学フィルタは、上述の層数を増やすほど透過帯域と阻止帯域の境界の立ち上がりを急峻にすることができる。しかし、層数を増やすほど透過帯域におけるリップルも増大してしまうという問題があった。また、図9(a)に示すように、各層の光学膜厚を変化させてリップルを少なくする膜設計も可能であるが、図9(b)に示すようにリップルを完全になくすことは困難である。さらにこの場合、多層膜の各層の膜厚が全て異なる設計となるため、実際の成膜時の膜厚制御性が非常に悪く、安定した光学特性を得ることがきわめて困難であるという課題も有していた。   In this optical filter, the rising of the boundary between the transmission band and the stop band can be made steep as the number of layers is increased. However, there is a problem that the ripple in the transmission band increases as the number of layers increases. Further, as shown in FIG. 9A, it is possible to design a film that reduces the ripple by changing the optical film thickness of each layer, but it is difficult to completely eliminate the ripple as shown in FIG. 9B. It is. Furthermore, in this case, since the film thicknesses of the respective layers of the multilayer film are all different, there is a problem that the film thickness controllability during actual film formation is very poor and it is extremely difficult to obtain stable optical characteristics. Was.

これに対し、図10(a)に示すように、膜の屈折率を膜厚方向に周期的かつ連続的に変化させ、その屈折率分布をWavelet(波束)と呼ばれる形状にすると、図10(b)に示すように、透過帯域におけるリップルを原理的になくすことができる(例えば、非特許文献1参照。)。
ただし、実際の成膜時に膜の屈折率を連続的に変化させるのは非常に困難である。そこで、例えば図11に示すように、連続的な屈折率分布を階段状に分割して近似したものが各種提案されている(例えば、特許文献1、非特許文献2、及び非特許文献3参照。)。
On the other hand, as shown in FIG. 10A, when the refractive index of the film is periodically and continuously changed in the film thickness direction and the refractive index distribution is changed to a shape called a wavelet (wave packet), FIG. As shown in b), ripples in the transmission band can be eliminated in principle (for example, see Non-Patent Document 1).
However, it is very difficult to continuously change the refractive index of the film during actual film formation. Thus, for example, as shown in FIG. 11, various types of approximations obtained by dividing a continuous refractive index distribution into steps are proposed (see, for example, Patent Document 1, Non-Patent Document 2, and Non-Patent Document 3). .)

特許第3290629号公報 (第1図)Japanese Patent No. 3290629 (FIG. 1)

W.H.Southwell,Using Apodization Function to Reduce Sidelobes in Rugate Filters,Appl.Opt.,1989,Vol.28W.H.Southwell, Using Apodization Function to Reduce Sidelobes in Rugate Filters, Appl.Opt., 1989, Vol. 28 P.G.Very,J.A.Dobrowolski,W.J.Wild,and R.L.Burton,Synthesis of high rejection filters with the Fourier transform method,APPLIEDOPTICS,15 July(1989),Vol.28,No.14,p2867-2874P.G.Very, J.A.Dobrowolski, W.J.Wild, and R.L.Burton, Synthesis of high rejection filters with the Fourier transform method, APPLIEDOPTICS, 15 July (1989), Vol.28, No.14, p2867-2874 HANDBOOK OF OPTICS,Second Edition,Vol.1,Fundamentals,Techniques,and Design,OPTICAL SOCIETY OF AMERICA,McGRAW-Hill,1995,p42.50HANDBOOK OF OPTICS, Second Edition, Vol.1, Fundamentals, Techniques, and Design, OPTICAL SOCIETY OF AMERICA, McGRAW-Hill, 1995, p42.50

しかしながら、上記従来の光学フィルタにおいては、屈折率分布を階段状に分割して成膜しても、依然として透過帯域でのリップルが少なからず残存する問題があった。また、成膜時の膜厚制御が困難であった。
本発明は上記事情に鑑みて成されたものであり、阻止帯域と透過帯域との境界における分光特性の立ち上がりが急峻で透過帯域でのリップルを抑制し、成膜時の膜厚制御が容易な膜構成で光学特性が安定した光学フィルタ、及び検出感度を向上した光学機器を提供することを目的とする。
However, the conventional optical filter has a problem that even if the refractive index distribution is divided into steps, the ripples in the transmission band still remain. In addition, it is difficult to control the film thickness during film formation.
The present invention has been made in view of the above circumstances, and the rising of the spectral characteristics at the boundary between the stop band and the transmission band is steep and the ripple in the transmission band is suppressed, and the film thickness can be easily controlled during film formation. It is an object of the present invention to provide an optical filter having a stable optical characteristic with a film configuration, and an optical apparatus with improved detection sensitivity.

本発明は、上記課題を解決するため以下の手段を採用する。
本発明に係る光学フィルタは、基板と、該基板上に形成された薄膜とから構成される光学フィルタであって、前記薄膜が、屈折率が相対的に低い低屈折率層と屈折率が相対的に高い高屈折率層とが前記基板側から交互に積層されて構成され、前記高屈折率層の屈折率が前記基板に向かって直線的に漸次高く変化する第1の積層部と、該第1の積層部に隣接し、前記高屈折率層の屈折率が第1の積層部を構成する高屈折率層のうち最も高い屈折率と略同一である第2の積層部と、該第2の積層部および前記基板に隣接し、前記高屈折率層の屈折率が第2の積層部側から前記基板に向かって直線的に漸次低く変化する第3の積層部とを備え、前記第1から第3の積層部を構成する低屈折率層の屈折率が、前記基板の屈折率と略同一であると共に、前記第1の積層部を構成する高屈折率層の屈折率勾配の絶対値が前記第3の積層部を構成する高屈折率層の屈折率勾配の絶対値よりも小さいことを特徴とする。
この発明によれば、各屈折率勾配が異なっていても各屈折率勾配が等しいときと略同様の分光特性とすることができ、成膜精度に優れた膜構造となる。
The present invention employs the following means in order to solve the above problems.
The optical filter according to the present invention is an optical filter composed of a substrate and a thin film formed on the substrate, wherein the thin film has a relatively low refractive index layer and a relatively low refractive index layer. High refractive index layers are alternately stacked from the substrate side, and the first stacked portion in which the refractive index of the high refractive index layer linearly and gradually increases toward the substrate, A second laminated portion adjacent to the first laminated portion, wherein the refractive index of the high refractive index layer is substantially the same as the highest refractive index of the high refractive index layers constituting the first laminated portion; 2 and a third stacked portion adjacent to the substrate, the refractive index of the high refractive index layer linearly and gradually decreasing from the second stacked portion side toward the substrate, with the refractive index of the first low-refractive index layer constituting the third multilayer portion is substantially the same as the refractive index of the substrate, Absolute value of the refractive index gradient of the high refractive index layer constituting the serial first laminated portion and said smaller than the absolute value of the refractive index gradient of the high refractive index layer constituting the third laminated portion.
According to the present invention, even if the refractive index gradients are different, the spectral characteristics can be made substantially the same as when the refractive index gradients are equal, and a film structure with excellent film forming accuracy is obtained.

本発明は、基板と、該基板上に形成された薄膜とから構成される光学フィルタであって、前記薄膜が、屈折率が相対的に低い低屈折率層と屈折率が相対的に高い高屈折率層とが前記基板側から交互に積層されて構成され、前記高屈折率層の屈折率が前記基板に向かって直線的に漸次高く変化する第1の積層部と、該第1の積層部に隣接し、前記高屈折率層の屈折率が第1の積層部を構成する高屈折率層のうち最も高い屈折率と略同一である第2の積層部と、該第2の積層部および前記基板に隣接し、前記高屈折率層の屈折率が第2の積層部側から前記基板に向かって直線的に漸次低く変化する第3の積層部とを備え、前記第1から第3の積層部を構成する低屈折率層の屈折率が、前記基板の屈折率と略同一であると共に、前記第1の積層部を構成する高屈折率層の屈折率勾配の絶対値が前記第3の積層部を構成する高屈折率層の屈折率勾配の絶対値よりも大きいことを特徴とする。
この発明によれば、各屈折率勾配が異なっていても各屈折率勾配が等しいときと略同様の分光特性とすることができ、成膜精度に優れた膜構造となる。
The present invention is an optical filter comprising a substrate and a thin film formed on the substrate, wherein the thin film has a low refractive index layer having a relatively low refractive index and a high refractive index. A first laminated portion in which a refractive index layer is alternately laminated from the substrate side, and a refractive index of the high refractive index layer linearly and gradually increases toward the substrate; and the first laminated layer A second laminated portion that is adjacent to a portion and has a refractive index of the high refractive index layer that is substantially the same as the highest refractive index of the high refractive index layers constituting the first laminated portion, and the second laminated portion And a third stacked portion that is adjacent to the substrate and in which the refractive index of the high refractive index layer changes linearly gradually from the second stacked portion side toward the substrate, the first to third The refractive index of the low refractive index layer constituting the laminated portion is substantially the same as the refractive index of the substrate, and the first laminated portion is Absolute value of the refractive index gradient of the high refractive index layer formed to being larger than the absolute value of the refractive index gradient of the high refractive index layer constituting the third laminated portion.
According to the present invention, even if the refractive index gradients are different, the spectral characteristics can be made substantially the same as when the refractive index gradients are equal, and a film structure with excellent film forming accuracy is obtained.

本発明では、透過を阻止する波長帯域の中心波長(λ)に対して設計波長をλ/n(nは整数)とするとき、前記高屈折率層及び前記低屈折率層の光学膜厚が、前記設計波長の略n/4倍に設定されていることが好ましい。
この発明によれば、光学膜厚が設計波長の略n/4倍なので、実際に成膜する際の膜厚制御性が向上して安定した光学特性を得ることができる。
In the present invention, when the design wavelength is λ / n (n is an integer) with respect to the center wavelength (λ) of the wavelength band for preventing transmission, the optical film thickness of the high refractive index layer and the low refractive index layer is It is preferably set to approximately n / 4 times the design wavelength.
According to the present invention, since the optical film thickness is approximately n / 4 times the design wavelength, the film thickness controllability during actual film formation is improved, and stable optical characteristics can be obtained.

本発明に係る光学機器は、本発明に係る光学フィルタを備えていることを特徴とする。
この発明によれば、透過させる波長と透過を阻止する波長とが近い場合でも、透過帯域と阻止帯域との間に急峻な境界を有する光学フィルタにより、透過帯域の波長の光量を削減することなく効率良く透過させて、分光特性に優れるフィルタ性能を有することができる。
An optical apparatus according to the present invention includes the optical filter according to the present invention.
According to the present invention, even when the wavelength to be transmitted and the wavelength to prevent transmission are close, the optical filter having a steep boundary between the transmission band and the stop band without reducing the light amount of the wavelength in the transmission band. It can transmit efficiently and can have filter performance with excellent spectral characteristics.

本発明の光学フィルタによれば、阻止帯域の幅を変更することができると共にリップルを抑制することができる。
また、本発明の光学機器によれば、本発明に係る光学フィルタを備えているので、所望する入射光の選択性能を向上することができ、従来よりも検出感度をより向上することができる。
According to the optical filter of the present invention, the width of the stop band can be changed and the ripple can be suppressed.
Further, according to the optical instrument of the present invention, since the optical filter according to the present invention is provided, the selection performance of desired incident light can be improved, and the detection sensitivity can be further improved than before.

本発明に係る第1の実施形態の蛍光顕微鏡の概要を示す図である。It is a figure which shows the outline | summary of the fluorescence microscope of 1st Embodiment which concerns on this invention. 本発明に係る第1の実施形態における吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the absorption filter in 1st Embodiment based on this invention. 本発明に係る第2の実施形態における吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the absorption filter in 2nd Embodiment which concern on this invention. 本発明に係る第3の実施形態における吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the absorption filter in 3rd Embodiment based on this invention. 本発明に係る第4の実施形態における吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the absorption filter in 4th Embodiment based on this invention. 本発明に係る第5の実施形態における吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the absorption filter in 5th Embodiment based on this invention. 本発明に係る第6の実施形態における吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the absorption filter in 6th Embodiment based on this invention. 従来の吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the conventional absorption filter. 従来の吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the conventional absorption filter. 非特許文献1に記載されている従来の吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the conventional absorption filter described in the nonpatent literature 1. 従来の吸収フィルタの膜構成及び分光特性を示すグラフである。It is a graph which shows the film | membrane structure and spectral characteristic of the conventional absorption filter.

次に、本発明の第1の実施形態について、図1から図2を参照して説明する。
本実施形態に係る図1に示す蛍光顕微鏡(光学機器)10は、励起フィルタ11と、ダイクロイックミラー12と、吸収フィルタ(光学フィルタ)13と、接眼レンズ14と、対物レンズ15とを備える。
Next, a first embodiment of the present invention will be described with reference to FIGS.
A fluorescence microscope (optical apparatus) 10 shown in FIG. 1 according to the present embodiment includes an excitation filter 11, a dichroic mirror 12, an absorption filter (optical filter) 13, an eyepiece lens 14, and an objective lens 15.

励起フィルタ11は、光源16から発生した光のうち特定波長のみを選択的に励起光として透過させるように光源16の光路上に配設されている。
ダイクロイックミラー12は、半透過鏡であって、励起フィルタ11を透過した光の光路を載置された、例えば、生体細胞等の標本17上に照射するように変更するとともに、この照射によって標本17から発生した蛍光を観察側に透過するように設定されている。
接眼レンズ14及び対物レンズ15は、上記蛍光を観察できるように調整するものとして配設されている。
The excitation filter 11 is disposed on the optical path of the light source 16 so as to selectively transmit only a specific wavelength of the light generated from the light source 16 as excitation light.
The dichroic mirror 12 is a semi-transmission mirror, and changes the light path of the light transmitted through the excitation filter 11 so as to irradiate the sample 17 such as a living cell, for example. Is set so as to transmit the fluorescence generated from the light to the observation side.
The eyepiece 14 and the objective lens 15 are arranged so as to be adjusted so that the fluorescence can be observed.

吸収フィルタ13は、ガラス製の基板18と、この基板18上に形成された薄膜19と、薄膜19上に設けられた入射媒質18’とから構成され、上記蛍光のみを選択的に透過させる。この入射媒質18’は、基板18と同じ屈折率を有する部材、例えばガラス板からなっている。
薄膜19は、図2(a)に示すように、屈折率が相対的に低い低屈折率層20と屈折率が相対的に高い高屈折率層21とが基板18側から交互に積層されて構成され、高屈折率層21の屈折率が基板18に向かって漸次高く変化する第1の積層部22と、第1の積層部22に隣接し、高屈折率層21の屈折率が第1の積層部22を構成する高屈折率層21のうち最も高い屈折率と略同一である第2の積層部23と、第2の積層部23に隣接し、高屈折率層21の屈折率が第2の積層部23側から漸次低く変化する第3の積層部24とを備えている。
第2の積層部の低屈折率層20には低屈折率層20の屈折率が基板18に向かって漸次低く変化する低屈折率層低下部25が設けられており、低屈折率層低下部25の前後には低屈折率層20の屈折率が略一定である低屈折率層一定部26が設けられている。
低屈折率層20は主に酸化シリコンで構成され、高屈折率層21は主に酸化ニオブで構成されている。
本実施形態では、基板18の屈折率を1.8とし、高屈折率層21の屈折率を1.81から2.2まで変化させ、低屈折率層20の屈折率を低屈折率低下部25において2.0から1.8まで変化させている。
The absorption filter 13 includes a glass substrate 18, a thin film 19 formed on the substrate 18, and an incident medium 18 ′ provided on the thin film 19, and selectively transmits only the fluorescence. The incident medium 18 ′ is made of a member having the same refractive index as that of the substrate 18, for example, a glass plate.
As shown in FIG. 2A, the thin film 19 is formed by alternately laminating a low refractive index layer 20 having a relatively low refractive index and a high refractive index layer 21 having a relatively high refractive index from the substrate 18 side. The first stacked unit 22 is configured such that the refractive index of the high refractive index layer 21 gradually increases toward the substrate 18, and the refractive index of the high refractive index layer 21 is adjacent to the first stacked unit 22. Of the high refractive index layer 21 constituting the laminated portion 22, the second laminated portion 23, which is substantially the same as the highest refractive index, and adjacent to the second laminated portion 23, the refractive index of the high refractive index layer 21 is And a third stacked portion 24 that gradually decreases from the second stacked portion 23 side.
The low refractive index layer 20 of the second stacked portion is provided with a low refractive index layer lowering portion 25 in which the refractive index of the low refractive index layer 20 gradually decreases toward the substrate 18. Before and after 25, a low refractive index layer constant portion 26 in which the refractive index of the low refractive index layer 20 is substantially constant is provided.
The low refractive index layer 20 is mainly composed of silicon oxide, and the high refractive index layer 21 is mainly composed of niobium oxide.
In this embodiment, the refractive index of the substrate 18 is set to 1.8, the refractive index of the high refractive index layer 21 is changed from 1.81 to 2.2, and the refractive index of the low refractive index layer 20 is changed to a low refractive index lowering portion. 25 is changed from 2.0 to 1.8.

この薄膜19は、透過を阻止する波長帯域の中心波長(λ)に対して設計波長をλ/n(nは整数)とするとき、例えば、n=1として、高屈折率層21及び低屈折率層20の光学膜厚が設計波長の1/4倍に設定されている。
本実施形態ではλを600nmと設定しているので、各光学膜厚は、150nmとなる。
なお、上記の構成に加え、積層総数を68層とし、薄膜19の入射媒質18’側にも屈折率2.0を有する基板があるものとし、各層の屈折率分散はないものとしてシミュレーションした結果を図2(b)に示す。
When the design wavelength is λ / n (n is an integer) with respect to the center wavelength (λ) of the wavelength band for preventing transmission, the thin film 19 has, for example, n = 1 and the high refractive index layer 21 and the low refractive index. The optical film thickness of the rate layer 20 is set to 1/4 times the design wavelength.
In this embodiment, since λ is set to 600 nm, each optical film thickness is 150 nm.
In addition to the above-described configuration, the total number of stacked layers is 68, and the simulation is performed assuming that there is a substrate having a refractive index of 2.0 on the incident medium 18 ′ side of the thin film 19 and there is no refractive index dispersion of each layer. Is shown in FIG.

次に、本実施形態に係る蛍光顕微鏡10による観察方法について説明する。
光源16から出射された光を励起フィルタ11を通過させて特定波長の励起光としてダイクロイックミラー12に投射させる。
上記励起光は、ダイクロイックミラー12によって光路を曲げられ、対物レンズ15で集光されて標本17に照射される。このとき、この照射によって標本17から蛍光が発生する。この蛍光は、対物レンズ15を介して平行光となってダイクロイックミラー12に到達し、これを透過して吸収フィルタ13に至る。
Next, an observation method using the fluorescence microscope 10 according to the present embodiment will be described.
The light emitted from the light source 16 passes through the excitation filter 11 and is projected onto the dichroic mirror 12 as excitation light having a specific wavelength.
The excitation light has its optical path bent by the dichroic mirror 12, condensed by the objective lens 15, and applied to the specimen 17. At this time, fluorescence is generated from the specimen 17 by this irradiation. The fluorescent light becomes parallel light through the objective lens 15 and reaches the dichroic mirror 12, passes through the dichroic mirror 12, and reaches the absorption filter 13.

吸収フィルタ13に至った蛍光は、第1の積層部22から入射して、第2の積層部23及び第3の積層部24を透過して基板18側から再び外部へ射出される。
吸収フィルタ13には、蛍光以外の波長を有する励起光等も混入されて入射する。しかし、薄膜19が上述した第1の積層部22から第3の積層部24を有する構成とされているので、吸収フィルタ13は、励起光等が属する波長帯域である阻止帯域28における光を外部へ射出させるのを阻止しながら、蛍光が属する波長帯域である透過帯域29における光を透過させる。
このとき、高屈折率層21及び低屈折率層20の光学膜厚が設計波長の1/4倍に設定されているので、この透過する光は、成膜時の膜厚制御性のよさから安定した光学特性を有している。
こうして、吸収フィルタ13から射出した蛍光は、接眼レンズ14を透過して集光されて観察側に至る。
The fluorescence that reaches the absorption filter 13 is incident from the first laminated portion 22, passes through the second laminated portion 23 and the third laminated portion 24, and is emitted again from the substrate 18 side.
Excitation light having a wavelength other than fluorescence is also mixed and incident on the absorption filter 13. However, since the thin film 19 has the above-described first laminated portion 22 to third laminated portion 24, the absorption filter 13 externally transmits light in the stop band 28, which is a wavelength band to which excitation light or the like belongs. The light in the transmission band 29, which is the wavelength band to which the fluorescence belongs, is transmitted while preventing the light from being emitted to the light.
At this time, since the optical film thicknesses of the high refractive index layer 21 and the low refractive index layer 20 are set to ¼ times the design wavelength, the transmitted light has good film thickness controllability at the time of film formation. Has stable optical properties.
Thus, the fluorescence emitted from the absorption filter 13 passes through the eyepiece 14 and is collected to reach the observation side.

この吸収フィルタ13によれば、例えば図2(b)に示すように、阻止帯域28と透過帯域29との境界における分光特性の立ち上がりが急峻であるとともに、透過帯域29でのリップル29aを略完全に抑えることができる。また、成膜時の制御が容易な膜構成なので、光学特性の安定性を向上することができる。   According to this absorption filter 13, for example, as shown in FIG. 2B, the rising of the spectral characteristics at the boundary between the stop band 28 and the transmission band 29 is steep, and the ripple 29 a in the transmission band 29 is substantially complete. Can be suppressed. In addition, since the film configuration is easy to control during film formation, the stability of optical characteristics can be improved.

次に、本発明に係る第2の実施形態について、図3(a)を参照して説明する。なお、以下の説明において、上記実施形態において説明した構成要素には同一符号を付し、その説明は省略する。
第2の実施形態が第1の実施形態と異なる点は、第2の実施形態に係る薄膜40が、第1の積層部22の先端側に低屈折率層低下部25が設けられているとした点である。
Next, a second embodiment according to the present invention will be described with reference to FIG. In the following description, the same reference numerals are given to the components described in the above embodiment, and the description thereof is omitted.
The second embodiment is different from the first embodiment in that the thin film 40 according to the second embodiment is provided with the low refractive index layer lowering portion 25 on the tip side of the first stacked portion 22. This is the point.

すなわち、薄膜40は、第1の積層部22の低屈折率層20には低屈折率層低下部25が設けられており、第1及び第2の積層部22、23を構成する低屈折率層20の内、低屈折率層低下部25から基板18側に向かって低屈折率層一定部26が設けられている。
この薄膜40には、高屈折率層21の屈折率が低屈折率層20を介して隣接する両側の他の高屈折率層21よりも低く設定された高屈折率変動層部41が、第1及び第3の積層部22、24内であって第2の積層部23との境界にそれぞれ1層ずつ挿入されている。
また、低屈折率層20の屈折率が高屈折率層21を介して隣接する両側の他の低屈折率層20よりも高く設定された低屈折率変動層部42が、第1及び第3の積層部22、24内であって第2の積層部23との境界にそれぞれ1層ずつ挿入されている。
That is, in the thin film 40, the low refractive index layer lowering portion 25 is provided in the low refractive index layer 20 of the first laminated portion 22, and the low refractive index constituting the first and second laminated portions 22 and 23. Among the layers 20, a low refractive index layer constant portion 26 is provided from the low refractive index layer lowering portion 25 toward the substrate 18 side.
The thin film 40 includes a high refractive index varying layer portion 41 in which the refractive index of the high refractive index layer 21 is set lower than the other high refractive index layers 21 on both sides adjacent to each other through the low refractive index layer 20. One layer is inserted in each of the first and third stacked portions 22 and 24 at the boundary with the second stacked portion 23.
Further, the low refractive index variation layer portion 42 in which the refractive index of the low refractive index layer 20 is set higher than those of the other low refractive index layers 20 on both sides adjacent to each other through the high refractive index layer 21 includes the first and third layers. In each of the stacked portions 22 and 24, one layer is inserted at the boundary with the second stacked portion 23.

本実施形態では、第2の積層部23における高屈折率層21の屈折率2.2に対して、高屈折率変動層部41の屈折率を2.15に設定しており、第2の積層部23における低屈折率層20の屈折率1.4に対して、低屈折率変動層部42の屈折率を1.42に設定している。
また、上記の構成に加え、積層総数を75層とし、薄膜40は、屈折率1.8を有する入射媒質18’と屈折率1.4を有する基板18とに挟み込まれ、各層の屈折率分散はないものとしてシミュレーションした結果を図3(b)に示す。
In the present embodiment, the refractive index of the high refractive index variable layer portion 41 is set to 2.15 with respect to the refractive index 2.2 of the high refractive index layer 21 in the second stacked portion 23, and the second The refractive index of the low refractive index variation layer portion 42 is set to 1.42 with respect to the refractive index 1.4 of the low refractive index layer 20 in the stacked portion 23.
In addition to the above configuration, the total number of stacked layers is 75, and the thin film 40 is sandwiched between the incident medium 18 ′ having a refractive index of 1.8 and the substrate 18 having a refractive index of 1.4, and the refractive index dispersion of each layer. FIG. 3 (b) shows the result of simulation assuming that there is no device.

この本実施形態に係る吸収フィルタ及び蛍光顕微鏡によれば、例えば図3(b)に示すように、低屈折率層低下部25の位置を変更することで阻止帯域28の幅を変更することができる。また、高屈折率変動層部41及び低屈折率変動層部42が設けられているため、よりリップルを抑制する第1の実施形態と同様に蛍光の透過帯域におけるリップル29aを小さくして、十分な光量を安定的に得ることができる。   According to the absorption filter and the fluorescence microscope according to this embodiment, for example, as shown in FIG. 3B, the width of the stop band 28 can be changed by changing the position of the low refractive index layer lowering portion 25. it can. Further, since the high refractive index variation layer portion 41 and the low refractive index variation layer portion 42 are provided, the ripple 29a in the fluorescence transmission band can be made small and sufficient as in the first embodiment for suppressing ripples. A sufficient amount of light can be obtained stably.

次に、本発明に係る第3の実施形態について、図4(a)を参照して説明する。なお、以下の説明において、上記実施形態において説明した構成要素には同一符号を付し、その説明は省略する。   Next, a third embodiment according to the present invention will be described with reference to FIG. In the following description, the same reference numerals are given to the components described in the above embodiment, and the description thereof is omitted.

第3の実施形態に係る薄膜50は、低屈折率層20の屈折率が基板18に向かって漸次低く変化すると共に高屈折率層21の屈折率が基板18に向かって漸次高く変化する第1の積層部51と、第1の積層部51に隣接し、低屈折率層20の屈折率が第1の積層部51のうち最も低い屈折率と略同一であると共に高屈折率層21の屈折率が第1の積層部51から漸次高く変化する第2の積層部52と、低屈折率層20の屈折率が第2の積層部52と略同一であると共に高屈折率層21の屈折率が第2の積層部51から漸次低く変化する第3の積層部53と、低屈折率層20の屈折率が第3の積層部53から漸次高く変化すると共に高屈折率層21の屈折率が第3の積層部52から漸次低く変化する第4の積層部54とを備えている。
本実施形態では、基板18の屈折率を1.8とし、高屈折率層21の屈折率を1.81から2.2まで変化させ、低屈折率層20の屈折率を1.4から1.8まで変化させている。
In the thin film 50 according to the third embodiment, the refractive index of the low refractive index layer 20 changes gradually toward the substrate 18 and the refractive index of the high refractive index layer 21 changes gradually toward the substrate 18. The refractive index of the low refractive index layer 20 is substantially the same as the lowest refractive index of the first laminated portions 51 and the refractive index of the high refractive index layer 21 is adjacent to the first laminated portion 51. The refractive index of the second refractive index of the high refractive index layer 21 and the refractive index of the second laminated portion 52 whose refractive index gradually changes from the first laminated portion 51 and the refractive index of the low refractive index layer 20 are substantially the same as those of the second laminated portion 52. Of the low refractive index layer 20 gradually increases from the third stacked portion 53 and the refractive index of the high refractive index layer 21 increases. And a fourth laminated portion 54 that gradually decreases from the third laminated portion 52.
In this embodiment, the refractive index of the substrate 18 is 1.8, the refractive index of the high refractive index layer 21 is changed from 1.81 to 2.2, and the refractive index of the low refractive index layer 20 is 1.4 to 1. .8 is changed.

上記の構成に加え、積層総数を45層とし、薄膜32の入射媒質18’側にも屈折率1.8を有する基板があるものとし、各層の屈折率分散はないものとしてシミュレーションした結果を図4(b)に示す。   In addition to the above configuration, the total number of stacked layers is 45, the substrate having a refractive index of 1.8 is also present on the incident medium 18 ′ side of the thin film 32, and the simulation results are shown assuming that there is no refractive index dispersion in each layer. Shown in 4 (b).

この本実施形態に係る吸収フィルタ及び蛍光顕微鏡によれば、例えば図4(b)に示すように、上記他の実施形態と同様にリップル29aを抑制すると共に第2及び第3の積層部52、53を構成する低屈折率層20の屈折率が一定であるため、成膜時の屈折率制御が容易となる。   According to the absorption filter and the fluorescence microscope according to the present embodiment, for example, as shown in FIG. 4B, the ripple 29a is suppressed and the second and third laminated portions 52, as in the other embodiments, Since the refractive index of the low refractive index layer 20 constituting 53 is constant, it is easy to control the refractive index during film formation.

次に、本発明に係る第4の実施形態について、図5(a)を参照して説明する。なお、以下の説明において、上記実施形態において説明した構成要素には同一符号を付し、その説明は省略する。   Next, a fourth embodiment according to the present invention will be described with reference to FIG. In the following description, the same reference numerals are given to the components described in the above embodiment, and the description thereof is omitted.

第4の実施形態に係る薄膜60は、高屈折率層21の屈折率が基板18に向かって漸次高く変化する第1の積層部22と、第1の積層部22に隣接し、高屈折率層21の屈折率が第1の積層部22を構成する高屈折率層21のうち最も高い屈折率と略同一である第2の積層部23と、第2の積層部23に隣接し、高屈折率層21の屈折率が第2の積層部23側から漸次低く変化する第3の積層部24とを備え、第1から第3の積層部22〜24を構成する低屈折率層20の屈折率が略同一とされている。
ここで、第1の積層部22を構成する高屈折率層21の屈折率勾配の絶対値が、第3の積層部24を構成する高屈折率層21の屈折率勾配の絶対値よりも小さくなるように形成されている。
本実施形態では、基板18の屈折率を1.5とし、高屈折率層21の屈折率を1.55から2.4まで変化させ、低屈折率層20の屈折率を1.5の一定値としている。
The thin film 60 according to the fourth embodiment is adjacent to the first stacked unit 22 in which the refractive index of the high refractive index layer 21 gradually increases toward the substrate 18, and the first stacked unit 22. A second laminated portion 23 having a refractive index of the layer 21 that is substantially the same as the highest refractive index of the high refractive index layers 21 constituting the first laminated portion 22, and a second laminated portion 23 adjacent to the second laminated portion 23; Of the refractive index layer 21 and the third laminated portion 24 that gradually decreases from the second laminated portion 23 side, and the low refractive index layer 20 constituting the first to third laminated portions 22 to 24 The refractive index is substantially the same.
Here, the absolute value of the refractive index gradient of the high refractive index layer 21 constituting the first laminated portion 22 is smaller than the absolute value of the refractive index gradient of the high refractive index layer 21 constituting the third laminated portion 24. It is formed to become.
In the present embodiment, the refractive index of the substrate 18 is 1.5, the refractive index of the high refractive index layer 21 is changed from 1.55 to 2.4, and the refractive index of the low refractive index layer 20 is constant at 1.5. Value.

上記の構成に加え、積層総数を63層とし、薄膜32の入射媒質18’側にも屈折率1.5を有する基板があるものとし、各層の屈折率分散はないものとしてシミュレーションした結果を図5(b)に示す。   In addition to the above configuration, the total number of stacked layers is 63, the substrate having a refractive index of 1.5 is also present on the incident medium 18 ′ side of the thin film 32, and the simulation results are shown assuming that there is no refractive index dispersion in each layer. Shown in 5 (b).

成膜時の屈折率制御は、膜厚制御以上に困難である。第1の積層部22を構成する高屈折率層21の屈折率勾配の絶対値が、第3の積層部24を構成する高屈折率層21の屈折率勾配の絶対値よりも小さくても、等しいときと略同じ光学特性が得られる。したがって、成膜時に屈折率が変動しても特性への影響が少ないので、成膜精度に優れた膜構造となる。   Refractive index control during film formation is more difficult than film thickness control. Even if the absolute value of the refractive index gradient of the high refractive index layer 21 constituting the first laminated portion 22 is smaller than the absolute value of the refractive index gradient of the high refractive index layer 21 constituting the third laminated portion 24, Approximately the same optical characteristics as when equal are obtained. Therefore, even if the refractive index fluctuates during film formation, there is little influence on the characteristics, so that the film structure is excellent in film formation accuracy.

次に、本発明に係る第5の実施形態について、図6(a)を参照して説明する。なお、以下の説明において、上記実施形態において説明した構成要素には同一符号を付し、その説明は省略する。
第5の実施形態が第4の実施形態と異なる点は、第5の実施形態にかかる薄膜70が、第1の積層部22を構成する高屈折率層21の屈折率勾配の絶対値が、第3の積層部24を構成する高屈折率層21の屈折率勾配の絶対値よりも大きくなるように形成されている点である。
Next, a fifth embodiment according to the present invention will be described with reference to FIG. In the following description, the same reference numerals are given to the components described in the above embodiment, and the description thereof is omitted.
The fifth embodiment differs from the fourth embodiment in that the thin film 70 according to the fifth embodiment has an absolute value of the refractive index gradient of the high refractive index layer 21 constituting the first stacked unit 22. This is that the high refractive index layer 21 constituting the third stacked portion 24 is formed to be larger than the absolute value of the refractive index gradient.

上記の構成に加え、積層総数を63層とし、薄膜32の入射媒質18’側にも屈折率1.5を有する基板があるものとし、各層の屈折率分散はないものとしてシミュレーションした結果を図6(b)に示す。   In addition to the above configuration, the total number of stacked layers is 63, the substrate having a refractive index of 1.5 is also present on the incident medium 18 ′ side of the thin film 32, and the simulation results are shown assuming that there is no refractive index dispersion in each layer. It is shown in 6 (b).

本実施形態における薄膜70は、第4の実施形態に係る薄膜60と同様の作用、効果を有する。   The thin film 70 in the present embodiment has the same operations and effects as the thin film 60 according to the fourth embodiment.

次に、本発明に係る第6の実施形態について、図7(a)を参照して説明する。なお、以下の説明において、上記実施形態において説明した構成要素には同一符号を付し、その説明は省略する。   Next, a sixth embodiment according to the present invention will be described with reference to FIG. In the following description, the same reference numerals are given to the components described in the above embodiment, and the description thereof is omitted.

第6の実施形態に係る薄膜80は、低屈折率層20の屈折率が基板18に向かって漸次低く変化する第1の積層部22と、第1の積層部22に隣接し、低屈折率層20の屈折率が第1の積層部22を構成する低屈折率層20のうち最も低い屈折率と略同一である第2の積層部23と、第2の積層部23に隣接し、低屈折率層20の屈折率が第2の積層部23側から漸次高く変化する第3の積層部24とを備え、第1から第3の積層部22〜24を構成する高屈折率層21の屈折率が略同一とされている。
本実施形態では、基板18の屈折率を1.8とし、高屈折率層21の屈折率を1.8の一定値とし、低屈折率層20の屈折率を1.4から1.75まで変化させている。
The thin film 80 according to the sixth embodiment includes a first stacked unit 22 in which the refractive index of the low refractive index layer 20 gradually decreases toward the substrate 18, and is adjacent to the first stacked unit 22 and has a low refractive index. A second laminated portion 23 having a refractive index of the layer 20 that is substantially the same as the lowest refractive index of the low refractive index layers 20 constituting the first laminated portion 22; The refractive index layer 20 includes a third laminated portion 24 that gradually increases from the second laminated portion 23 side, and the high refractive index layer 21 constituting the first to third laminated portions 22 to 24 is provided. The refractive index is substantially the same.
In the present embodiment, the refractive index of the substrate 18 is 1.8, the refractive index of the high refractive index layer 21 is a constant value of 1.8, and the refractive index of the low refractive index layer 20 is 1.4 to 1.75. It is changing.

上記の構成に加え、積層総数を45層とし、薄膜70の入射媒質18’側にも屈折率1.8を有する基板があるものとし、各層の屈折率分散はないものとしてシミュレーションした結果を図7(b)に示す。   In addition to the above configuration, the total number of stacked layers is 45, the substrate having a refractive index of 1.8 is also present on the incident medium 18 ′ side of the thin film 70, and the simulation results are shown assuming that there is no refractive index dispersion in each layer. 7 (b).

この本実施形態に係る吸収フィルタ及び蛍光顕微鏡によれば、例えば図7(b)に示すように、上記他の実施形態と同様に、透過帯域における蛍光のリップルを抑制して、十分な光量を安定的に得ることができる。また、高屈折率層21の屈折率が一定であるため、成膜時の屈折率制御が容易となる。   According to the absorption filter and the fluorescence microscope according to this embodiment, as shown in FIG. 7B, for example, as in the other embodiments described above, the fluorescence ripple in the transmission band is suppressed and a sufficient amount of light is obtained. It can be obtained stably. In addition, since the refractive index of the high refractive index layer 21 is constant, the refractive index can be easily controlled during film formation.

なお、上記の実施形態では、n=1として設計波長を中心波長と同じ600nmとし、高屈折率層21及び低屈折率層20の光学膜厚を設計波長の1/4倍に設定しているが、n=2として設計波長を300nmとし、高屈折率層21及び低屈折率層20の光学膜厚を設計波長の1/2倍に設定して薄膜を形成しても、全く同様な分光特性を有する吸収フィルタを得ることができる。
さらに、中心波長600nmに対して、設計波長を600/n(nは整数)nmとし、高屈折率層21及び低屈折率層20の光学膜厚を設計波長のn/4倍に設定して薄膜を形成しても、同様な分光特性を有する吸収フィルタを得ることができる。
In the above embodiment, n = 1, the design wavelength is 600 nm, which is the same as the center wavelength, and the optical film thicknesses of the high refractive index layer 21 and the low refractive index layer 20 are set to 1/4 times the design wavelength. However, even if n = 2, the design wavelength is 300 nm, and the optical film thicknesses of the high refractive index layer 21 and the low refractive index layer 20 are set to ½ times the design wavelength, a thin film is formed in exactly the same manner. An absorption filter having characteristics can be obtained.
Furthermore, the design wavelength is set to 600 / n (n is an integer) nm with respect to the center wavelength of 600 nm, and the optical film thicknesses of the high refractive index layer 21 and the low refractive index layer 20 are set to n / 4 times the design wavelength. Even if a thin film is formed, an absorption filter having similar spectral characteristics can be obtained.

なお、本発明の技術範囲は上記実施の形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
例えば、中心波長(λ)は600nmに限らず、励起光の波長や検出したい蛍光の波長に応じてλの値を適宜変えることで、所望の光学特性を得ることができる。
また、基板の材質はガラスに限らずプラスチックでもよい。
The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the center wavelength (λ) is not limited to 600 nm, and desired optical characteristics can be obtained by appropriately changing the value of λ according to the wavelength of excitation light and the wavelength of fluorescence to be detected.
The material of the substrate is not limited to glass but may be plastic.

10 蛍光顕微鏡(光学機器)
13 吸収フィルタ(光学フィルタ)
18 基板
19、40、50、60、70、80 薄膜
20 低屈折率層
21 高屈折率層
22、51 第1の積層部
23、52 第2の積層部
24、53 第3の積層部
25 低屈折率層低下部
26 低屈折率層一定部
41 高屈折率変動層部
42 低屈折率変動層部
54 第4の積層部
10 Fluorescence microscope (optical equipment)
13 Absorption filter (optical filter)
18 Substrate 19, 40, 50, 60, 70, 80 Thin film 20 Low refractive index layer 21 High refractive index layer 22, 51 First laminated portion 23, 52 Second laminated portion 24, 53 Third laminated portion 25 Low Refractive index layer lowering portion 26 Low refractive index layer constant portion 41 High refractive index varying layer portion 42 Low refractive index varying layer portion 54 Fourth laminated portion

Claims (4)

基板と、該基板上に形成された薄膜とから構成される光学フィルタであって、
前記薄膜が、屈折率が相対的に低い低屈折率層と屈折率が相対的に高い高屈折率層とが前記基板側から交互に積層されて構成され、
前記高屈折率層の屈折率が前記基板に向かって直線的に漸次高く変化する第1の積層部と、
該第1の積層部に隣接し、前記高屈折率層の屈折率が第1の積層部を構成する高屈折率層のうち最も高い屈折率と略同一である第2の積層部と、
該第2の積層部および前記基板に隣接し、前記高屈折率層の屈折率が第2の積層部側から前記基板に向かって直線的に漸次低く変化する第3の積層部とを備え、
前記第1から第3の積層部を構成する低屈折率層の屈折率が、前記基板の屈折率と略同一であると共に、
前記第1の積層部を構成する高屈折率層の屈折率勾配の絶対値前記第3の積層部を構成する高屈折率層の屈折率勾配の絶対値よりも小さいことを特徴とする光学フィルタ。
An optical filter comprising a substrate and a thin film formed on the substrate,
The thin film is configured by alternately laminating a low refractive index layer having a relatively low refractive index and a high refractive index layer having a relatively high refractive index from the substrate side,
A first stacked portion in which the refractive index of the high refractive index layer gradually increases linearly toward the substrate;
A second laminated part adjacent to the first laminated part, wherein the refractive index of the high refractive index layer is substantially the same as the highest refractive index of the high refractive index layers constituting the first laminated part;
A third laminated portion adjacent to the second laminated portion and the substrate, and having a refractive index of the high refractive index layer that gradually decreases linearly from the second laminated portion side toward the substrate;
The refractive index of the low refractive index layer constituting the first to third stacked portions is substantially the same as the refractive index of the substrate,
Optical, wherein the absolute value of the refractive index gradient of the high refractive index layer constituting the first multilayer portion is smaller than the absolute value of the refractive index gradient of the high refractive index layer constituting the third laminate portion filter.
基板と、該基板上に形成された薄膜とから構成される光学フィルタであって、
前記薄膜が、屈折率が相対的に低い低屈折率層と屈折率が相対的に高い高屈折率層とが前記基板側から交互に積層されて構成され、
前記高屈折率層の屈折率が前記基板に向かって直線的に漸次高く変化する第1の積層部と、
該第1の積層部に隣接し、前記高屈折率層の屈折率が第1の積層部を構成する高屈折率層のうち最も高い屈折率と略同一である第2の積層部と、
該第2の積層部および前記基板に隣接し、前記高屈折率層の屈折率が第2の積層部側から前記基板に向かって直線的に漸次低く変化する第3の積層部とを備え、
前記第1から第3の積層部を構成する低屈折率層の屈折率が、前記基板の屈折率と略同一であると共に、
前記第1の積層部を構成する高屈折率層の屈折率勾配の絶対値前記第3の積層部を構成する高屈折率層の屈折率勾配の絶対値よりも大きいことを特徴とする光学フィルタ。
An optical filter comprising a substrate and a thin film formed on the substrate,
The thin film is configured by alternately laminating a low refractive index layer having a relatively low refractive index and a high refractive index layer having a relatively high refractive index from the substrate side,
A first stacked portion in which the refractive index of the high refractive index layer gradually increases linearly toward the substrate;
A second laminated part adjacent to the first laminated part, wherein the refractive index of the high refractive index layer is substantially the same as the highest refractive index of the high refractive index layers constituting the first laminated part;
A third laminated portion adjacent to the second laminated portion and the substrate, and having a refractive index of the high refractive index layer that gradually decreases linearly from the second laminated portion side toward the substrate;
The refractive index of the low refractive index layer constituting the first to third stacked portions is substantially the same as the refractive index of the substrate,
Optics being larger than the absolute value of the refractive index gradient absolute value of the third high refractive index layer constituting the laminated portion of the refractive index gradient of the high refractive index layer constituting the first laminated portion filter.
透過を阻止する波長帯域の中心波長(λ)に対して設計波長をλ/n(nは整数)とするとき、
前記高屈折率層及び前記低屈折率層の光学膜厚が、前記設計波長の略n/4倍に設定されていることを特徴とする請求項1または2に記載の光学フィルタ。
When the design wavelength is λ / n (n is an integer) with respect to the center wavelength (λ) of the wavelength band that prevents transmission,
The optical filter according to claim 1 or 2, the optical thickness of the high refractive index layer and the low refractive index layer, characterized in that it is set to substantially n / 4 times the design wavelength.
請求項1からの何れか一つに記載の光学フィルタを備えていることを特徴とする光学機器。 An optical apparatus comprising the optical filter according to any one of claims 1 to 3 .
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0772328A (en) * 1993-05-06 1995-03-17 Hughes Aircraft Co Wide-band rugate filter
JPH07128521A (en) * 1993-05-06 1995-05-19 Hughes Aircraft Co Rugate filter having suppressed higher marmonic wave
JP2002333519A (en) * 2001-05-09 2002-11-22 Alps Electric Co Ltd Optical filter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0772328A (en) * 1993-05-06 1995-03-17 Hughes Aircraft Co Wide-band rugate filter
JPH07128521A (en) * 1993-05-06 1995-05-19 Hughes Aircraft Co Rugate filter having suppressed higher marmonic wave
JP2002333519A (en) * 2001-05-09 2002-11-22 Alps Electric Co Ltd Optical filter

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