CN100390576C - Optical filter and optical apparatus - Google Patents
Optical filter and optical apparatus Download PDFInfo
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- CN100390576C CN100390576C CNB2004800076503A CN200480007650A CN100390576C CN 100390576 C CN100390576 C CN 100390576C CN B2004800076503 A CNB2004800076503 A CN B2004800076503A CN 200480007650 A CN200480007650 A CN 200480007650A CN 100390576 C CN100390576 C CN 100390576C
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Abstract
An optical filter comprising a thin film (19) which is formed by alternately laminating low-refractive-index layers (20) relatively low in refractive index and high-refractive-index layers (21) relatively high in refractive index, and which has a first laminate (22) where the refractive indexes of high-refractive-index layers (21) change to be gradually higher from a substrate (18) side, a second laminate (23) where refractive indexes of high-refractive-index layers (21) are equal to or higher than the highest refractive index of high-refractive-index layers (21) constituting the first laminate (22), and a third laminate (24) where the refractive indexes of high-refractive-index layers (21) change to be gradually lower from the second laminate (23) side, wherein high-refractive-index-changing layer units (25), where the refractive index of a high-refractive-index layer (21) is set to be lower than those of other high-refractive-index layers (21) provided on the opposite sides thereof and adjoining to each other via a low-refractive-index layer (20), are inserted into this thin film (19).
Description
Technical field
The present invention relates to optical filter and optical device.The application serves as for 2003-299223 number the basis application with special hope of Jap.P. 2003-084984 number and special hope, and has quoted its content.
Background technology
The optical device that uses in the observation of biosome test portion etc. is a fluorescent microscope, when the test portions such as cell that make after exciting light shines dyed processing, by observing the fluorescence that test portion produces, the structure and the character of coming analysis specimen.
In recent years for the analyzing gene group, need to for example by the exciting light excitation with 502nm wavelength and observe at the fluorescence that the 526nm wavelength has a peak value.In this case, because the wavelength of excitation light wavelength and fluorescence is approaching, so in order to detect fluorescence effectively, optical filter is used as the mensuration sensitivity of definite fluorescence and the very important critical component of precision, this optical filter utilizes stop band to cut off exciting light, and the light that makes the Fluirescence observation wavelength is in the transmission of transmission frequency band.
This optical filter requires boundary at transmission frequency band and stop band to have the rapid rising of dichroism and in the performance of the light of the basic transmission 100% of transmission frequency band.In addition, wish not have the cyclic swing (pulsation) of the transmissivity of relative wavelength increase and decrease at the transmission frequency band.
Like this, cut off the light of provision wavelengths frequency band and the promptly negative wave filter of optical filter of the light of other wavelength of transmission, shown in Figure 10 A, the multilayer film formation by formed alternative stacked on substrate high refractive index layer and low-index layer forms.In Figure 10 A, transverse axis is represented blooming, and the longitudinal axis is represented the refractive index of film.In Figure 10 B, be shown dichroism through the light wavelength of film and the relation table of transmitance during the formation film.
This optical filter increases the above-mentioned number of plies more, and the rising of the boundary of transmission frequency band and stop band is become sharply.And, shown in Figure 11 A, also can reduce the film design of pulsation by the blooming that changes each layer.Figure 11 B has represented to reduce the situation of pulsation.
Shown in Figure 12 A, the refractive index of film is periodically changed continuously at film thickness direction, make its index distribution form the shape that is called as wave beam (Wavelet), shown in Figure 12 B, can eliminate the pulsation (for example, with reference to non-patent literature 1: " W.H.Southwell, Using Apodization Function to Reduce Sidelobes inRugate Filters; Appl.Opt., Vol.28 (1989) are P.5091-5094 ") of transmission frequency band from principle.
In addition, also proposing has example as shown in FIG. 13A, by continuous refractive index being divided into stepped its approximate method that makes respectively, setting make the refractive index separately of the high refractive index layer of center section in cycle and low-index layer be certain layer repeatedly structure etc. (for example, Fig. 1 with reference to No. 3290629 communique of Jap.P., non-patent literature 2: " P.G.Very; J.A.Dobrowolski; W.J.Wild, and R.L.Burton, Synthesis of high rejection filters withthe Fourier transform method; Appl.Opt.; Vol.28 (1989) P.2864-2875 ", non-patent literature 3: " HAND BOOK OF OPTICS, Second Edition; Vol.1, Fundamentals, Techniques, and Design, OPTICAL SOCIETY OFAMERICA, McGRAW-Hill, 1995, p42.50).
Summary of the invention
Optical filter of the present invention has substrate and the film that is formed on the described substrate, described film has a plurality of laminate part, described a plurality of laminate part has the high refractive index layer that is higher than this low-index layer from the low-index layer of described substrate-side alternative stacked and refractive index respectively, as described a plurality of laminate part, be formed with: the 1st laminate part that the refractive index of described high refractive index layer uprises gradually from described substrate-side; With the 1st laminate part adjacency, the highest the 2nd roughly the same laminate part of refractive index in the high refractive index layer of the refractive index of described high refractive index layer and described the 1st laminate part of formation; With the 2nd laminate part adjacency, the refractive index of described high refractive index layer is from described the 2nd laminate part side the 3rd laminate part of step-down gradually, from described the 1st laminate part to described the 3rd laminate part at least one laminate part, insert high index of refraction change layer portion, the refractive index that described high index of refraction changes layer portion is set to other high refractive index layers that are lower than the both sides of adjacency by described low-index layer.
Also can be near the boundary of described the 2nd laminate part and described the 1st laminate part or described the 3rd laminate part or its, insert described high index of refraction change layer portion.
Also can make the refractive index of the refractive index of described low-index layer and described substrate roughly the same.
When the design wavelength of the centre wavelength (λ) of the wavelength band that stops transmission relatively is made as λ/n (n is an integer), also can be set at roughly n/4 times of described design wavelength to the blooming of described high refractive index layer, described low-index layer and described high index of refraction change layer portion respectively.
Also can be set at roughly n/2 times of described design wavelength to the blooming of one deck at least of the final area of the prime area of formation and described substrate adjacency in the described film and opposition side thereof.
Optical filter of the present invention has substrate and the film that is formed on the described substrate, described film has a plurality of laminate part, described a plurality of laminate part has the high refractive index layer that is higher than this low-index layer from the low-index layer of described substrate-side alternative stacked and refractive index respectively, as described a plurality of laminate part, be formed with: the 1st laminate part that the refractive index of described high refractive index layer uprises gradually from described substrate-side; With the 1st laminate part adjacency, the highest the 2nd roughly the same laminate part of refractive index in the high refractive index layer of the refractive index of described high refractive index layer and described the 1st laminate part of formation; With the 2nd laminate part adjacency, the refractive index of described high refractive index layer is from described the 2nd laminate part side the 3rd laminate part of step-down gradually, from described the 1st laminate part to described the 3rd laminate part at least one laminate part, insert low-refraction change layer portion, the refractive index that described low-refraction changes layer portion is set to other low-index layers that are higher than the both sides of adjacency by described high refractive index layer.
Also can make the refractive index of the refractive index of described high refractive index layer and described substrate roughly the same.
Optical filter of the present invention has substrate and the film that is formed on the described substrate, described film has a plurality of laminate part, described a plurality of laminate part has the high refractive index layer that is higher than this low-index layer from the low-index layer of described substrate-side alternative stacked and refractive index respectively, as described a plurality of laminate part, be formed with: the refractive index of described high refractive index layer uprises gradually from described substrate-side, and the refractive index of described low-index layer is from described substrate-side the 1st laminate part of step-down gradually; With the 1st laminate part adjacency, refractive index the highest in the high refractive index layer of the refractive index of described high refractive index layer and described the 1st laminate part of formation is roughly the same, and the 2nd roughly the same laminate part of lowest refractive index in the low-index layer of the refractive index of described low-index layer and described the 1st laminate part of formation; With the 2nd laminate part adjacency, the refractive index of described high refractive index layer is from described the 2nd laminate part side step-down gradually, and the 3rd laminate part that the refractive index of described low-index layer uprises gradually from described the 2nd laminate part side, at least one laminate part from described the 1st laminate part to described the 3rd laminate part, insert at least one side in high index of refraction change layer portion and the low-refraction change layer portion, the refractive index that described high index of refraction changes layer portion is set to other described high refractive index layers that are lower than the both sides of adjacency by described low-index layer, and the refractive index that described low-refraction changes layer portion is set to other described low-index layers that are higher than the both sides of adjacency by described high refractive index layer.
Also can be near the boundary of described the 2nd laminate part and described the 1st laminate part or described the 3rd laminate part or its, insert described high index of refraction change layer portion and described low-refraction and change at least one side in the layer portion.
When the design wavelength of the centre wavelength (λ) of the wavelength band that stops transmission relatively is made as λ/n (n is an integer), also can be set at roughly n/4 times of described design wavelength to the blooming of described high refractive index layer, described low-index layer, described high index of refraction change layer portion and described low-refraction change layer portion respectively.
Also can be set at roughly n/2 times of described design wavelength to the blooming of one deck at least of the final area of the prime area of formation and described substrate adjacency in the described film and opposition side thereof.
Optical device of the present invention has described optical filter.
Description of drawings
Fig. 1 is that the 1st embodiment of optical device that expression has an optical filter of the present invention is the figure of the overview of fluorescent microscope.
Fig. 2 A and Fig. 2 B are that the optical filter that this fluorescent microscope of expression has is the curve map of the membrane structure and the dichroism of absorbing filter.
Fig. 3 is the curve map of the relation of expression wavelength of this fluorescent microscope and transmissivity.
Fig. 4 A and Fig. 4 B are that the 2nd embodiment of expression optical filter of the present invention is the curve map of the membrane structure and the dichroism of absorbing filter.
Fig. 5 A and Fig. 5 B are that the 3rd embodiment of expression optical filter of the present invention is the curve map of the membrane structure and the dichroism of absorbing filter.
Fig. 6 A and Fig. 6 B are the figure of other examples of above-mentioned the 1st embodiment of expression, are the membrane structure of expression absorbing filter and the curve map of dichroism.
Fig. 7 A and Fig. 7 B are the figure of other examples of above-mentioned the 1st embodiment of expression, are the membrane structure of expression absorbing filter and the curve map of dichroism.
Fig. 8 A and Fig. 8 B are the figure of other examples of above-mentioned the 3rd embodiment of expression, are the membrane structure of expression absorbing filter and the curve map of dichroism.
Fig. 9 A and Fig. 9 B are the figure of other examples of above-mentioned the 3rd embodiment of expression, are the membrane structure of expression absorbing filter and the curve map of dichroism.
Figure 10 A and Figure 10 B are the curve maps of representing the membrane structure and the dichroism of absorbing filter in the past.
Figure 11 A and Figure 11 B are the curve maps of representing the membrane structure and the dichroism of absorbing filter in the past.
Figure 12 A and Figure 12 B are the membrane structure of absorbing filter in the past of the described non-patent literature of expression 1 record and the curve map of dichroism.
Figure 13 A and Figure 13 B are the curve maps of representing the membrane structure and the dichroism of absorbing filter in the past.
Figure 14 A and Figure 14 B are the membrane structure of expression optical filter of the present invention other embodiments that are absorbing filter and the curve map of dichroism.
Figure 15 A and Figure 15 B are the membrane structure of expression optical filter of the present invention other embodiments that are absorbing filter and the curve map of dichroism.
Figure 16 A and Figure 16 B are the membrane structure of expression optical filter of the present invention other embodiments that are absorbing filter and the curve map of dichroism.
Embodiment
Below, with reference to Fig. 1～Fig. 3 the 1st embodiment of the present invention is described.
As shown in Figure 1, the fluorescent microscope of present embodiment (optical device) 10 has: excitation filter 11, dichronic mirror 12, absorbing filter (optical filter) 13, eyepiece 14 and object lens 15.
Shown in Fig. 2 A, film 19 by from substrate 18 sides alternately the relatively low relative higher high refractive index layer 21 of low-index layer 20 of lamination refractive index with refractive index constitute, have: the 1st laminate part 22 that the refractive index of high refractive index layer 21 uprises gradually from substrate 18 sides; With the 1st laminate part 22 adjacency, the highest the 2nd roughly the same laminate part 23 of refractive index in the high refractive index layer 21 of the refractive index of high refractive index layer 21 and formation the 1st laminate part 22; With the 2nd laminate part 23 adjacency, the refractive index of high refractive index layer 21 is from the 2nd laminate part 23 sides the 3rd laminate part 24 of step-down gradually.
In addition, described " roughly the same " be meant the identical or refractive index of refractive index deviation 0.2 with interior scope.
Low-index layer 20 mainly is made of monox, and high refractive index layer 21 mainly is made of niobium oxide.
In the present embodiment, the refractive index of establishing substrate 18 and light incident side medium 18A is 1.52, and the refractive index from 1.98 to 2.3 of high refractive index layer 21 is changed, and the refractive index of establishing low-index layer 20 is a certain value, promptly 1.72.
In film 19, in the 1st laminate part 22 and the 3rd laminate part 24 and be boundary with the 2nd laminate part 23, each inserts one deck high index of refraction change layer portion 25, and the refractive index of high refractive index layer 21 wherein is set to other high refractive index layers 21 that are lower than the both sides of adjacency by low-index layer 20.
In the present embodiment, the refractive index of the high refractive index layer 21 of the 2nd laminate part 23 be the mxm. in the refractive index with the high refractive index layer 21 of the 1st laminate part 22 identical 2.3, the refractive index of high index of refraction change layer portion 25 is made as 2.2.
In the present embodiment, because λ is set at 600nm, so each blooming is respectively 150nm, 300nm.
In addition, Fig. 2 B represents to establish lamination and adds up to 45 layers, as the analog result that does not have the refractive index dispersion from the prime area 26 of film 19 to final area 27 each layers.
Below, the observational technique of the fluorescent microscope 10 of present embodiment is described.
As shown in Figure 1, the light that penetrates from light source 16 becomes the exciting light of specific wavelength by excitation filter 11, projects then on the dichronic mirror 12.This exciting light makes the light path bending by dichronic mirror 12, and shines on the sample 17 behind object lens 15 optically focused.By this irradiation, produce fluorescence from sample 17.Fluorescence becomes directional light by object lens 15, and arrives dichronic mirror 12, further arrives absorbing filter 13 after the transmission.
The fluorescence that arrives absorbing filter 13 after the 3rd laminate part the 24, the 2nd laminate part the 23, the 1st laminate part 22 shown in Fig. 2 A, once more injects to outside from substrate shown in Figure 1 18 sides from the incident of light incident side medium 18A side.
Exciting light etc. with the wavelength beyond the fluorescence also is mixed into and is mapped to absorbing filter 13.But, because film 19 has the 1st above-mentioned laminate part 22～the 3rd laminate part 24, so it is that light in the stop band 28 injects to the outside that absorbing filter 13 one side stops wavelength band under the exciting light etc., it is transmittance in the transmission frequency band 29 that one side makes wavelength band under the fluorescence.
At this moment, owing to be inserted with high index of refraction change layer portion 25, the blooming of high refractive index layer 21 and low-index layer 20 is set to 1/4 times of design wavelength, has a stable optical characteristics so the film thickness monitoring of the light of transmission during because of film forming is good.
In addition, because the blooming of each one deck of the final area 27 that constitutes prime area 26 and opposition side thereof is set at 1/2 times of design wavelength,, can suppress the pulsation of transmissivity so want to detect the wavelength of fluorescence relatively.
Fluorescence from absorbing filter 13 penetrates sees through eyepiece 14 and optically focused, and arrives the observation side.
By adopting absorbing filter 13, for example shown in Fig. 2 B, the rising of the dichroism of the boundary of stop band 28 and transmission frequency band 29 is rapid, and almost can be suppressed at the pulsation 29a of transmission frequency band 29 fully.And, owing to be the membrane structure of the control when carrying out film forming easily, so can improve the stability of optical characteristics.In addition, according to this fluorescent microscope 10, because absorbing filter 13 has the optical characteristics near ideal filter shown in Figure 3, thus can undamped ground transmission if wave filter in the past then can form the light quantity (light quantity increase part) of the wavelength region may of transmission light quantity reduction.As a result, can significantly improve the detection sensitivity in the fluorometric assay, and can improve analysis precision, the accuracy of detection of genome analysis etc., shorten observing time.
Below, with reference to Fig. 4 A the 2nd embodiment of the present invention is described.In addition, in the following description, give same-sign to the key element identical, and omit its explanation with the inscape that illustrates in above-mentioned the 1st embodiment.
The difference of present embodiment and above-mentioned the 1st embodiment is, in the film 30 of present embodiment, insert low-refraction change layer portion 31 rather than high index of refraction change layer portion 25, the refractive index of the low-index layer 20 that constitutes the 1st laminate part 22 and the 3rd laminate part 24 is also changed.
Promptly, in film 30, the refractive index that constitutes the low-index layer 20 of the 1st laminate part 22 forms from substrate 18 sides step-down gradually, the refractive index that constitutes the low-index layer 20 of the 2nd laminate part 23 form with the low-index layer 20 that constitutes the 1st laminate part 22 in lowest refractive index roughly the same, the refractive index that constitutes the low-index layer 20 of the 3rd laminate part 24 forms from the 2nd laminate part 23 sides and uprises gradually.
And at the boundary of the 2nd laminate part 23 and the 1st laminate part 22 and the 3rd laminate part 24, each inserts one deck low-refraction change layer portion 31, and the refractive index of its low-index layer 20 is set to the low-index layer 20 that is higher than by the both sides of high refractive index layer 21 adjacency.
In addition, in the present embodiment, shown in Fig. 4 A, make the refractive index of the low-index layer 20 of the 1st laminate part 22 change to 1.72 from 1.5, the refractive index of the low-index layer 20 of the 2nd laminate part 23 be made as lowest refractive index in the low-index layer 20 with the 1st laminate part 22 identical 1.5, the refractive index of low-refraction change layer portion 31 is made as 1.53.
And Fig. 4 B is illustrated on the basis of said structure, establishes lamination and adds up to 45 layers, as 26 analog results that do not have refractive index to disperse to final area 27 each layers from the prime area.
According to the absorbing filter and the fluorescent microscope of present embodiment, for example shown in Fig. 4 B, identical with above-mentioned the 1st embodiment, can reduce the pulsation 29a of fluorescence at the transmission frequency band, can stablize the light quantity that obtains abundance.
Below, with reference to Fig. 5 A the 3rd embodiment of the present invention is described.In addition, in the following description, to the above-mentioned the 1st and the 2nd embodiment in the identical key element of inscape that illustrates give same-sign, and omit its explanation.
The difference of present embodiment and above-mentioned the 2nd embodiment is to insert high index of refraction change layer portion 25 in film 32.
Promptly, in film 32, in the 1st laminate part 22 and be with the boundary of the 2nd laminate part 23 and in the 3rd laminate part 24 and be boundary with the 2nd laminate part 23, each inserts one deck high index of refraction change layer portion 25, and the refractive index of its high refractive index layer 21 is set to other high refractive index layers 21 that are lower than by the both sides of low-index layer 20 adjacency.
And, in the 2nd laminate part 23 and be boundary with the 1st laminate part 22 and the 3rd laminate part 24, each inserts one deck low-refraction change layer portion 31, and the refractive index of its low-index layer 20 is set to the low-index layer 20 that is higher than by the both sides of high refractive index layer 21 adjacency.
And, in the present embodiment, shown in Fig. 5 A, make the refractive index of low-index layer 20 and high refractive index layer 21 carry out the variation identical, and the refractive index of high index of refraction change layer portion 25 and low-refraction change layer portion 31 is made as the value identical with the respective embodiments described above with the respective embodiments described above.
And Fig. 5 B is illustrated on the basis of said structure, establishes lamination and adds up to 45 layers, as 26 analog results that do not have refractive index to disperse to final area 27 each layers from the prime area.
According to the absorbing filter and the fluorescent microscope of present embodiment, for example shown in Fig. 5 B, compare with the respective embodiments described above, can suppress the pulsation of the fluorescence of transmission frequency band more well, can stablize the light quantity that obtains abundance.
In addition, in the present embodiment, if n=1, if design wavelength is all 600nm mutually with centre wavelength, if the blooming of high refractive index layer 21 and low-index layer 20 is 1/4 times of design wavelength, and the blooming of each one deck of the final area 27 of a formation prime area 26 and opposition side thereof is set at its 2 times promptly 1/2 times.But, if establish n=2, if design wavelength is 300nm, if the blooming of high refractive index layer 21 and low-index layer 20 is 1/2 times of design wavelength, and the blooming of each one deck of the final area 27 of a formation prime area 26 and opposition side thereof is set at its 2 times promptly 1/1 times, form film 32 thus, also can obtain to have absorbing filter with the identical dichroism of Fig. 5 B.
In addition, relative centre wavelength 600nm, design wavelength is made as 600/n (n is an integer) nm, it is the blooming of high refractive index layer 21 and low-index layer 20 1/4 times of design wavelength, and the blooming of each one deck of the final area 27 that constitutes prime area 26 and opposition side thereof be set at its 2 times be n/2 doubly, form film thus, also can obtain to have the absorbing filter of identical dichroism.
In addition, technical scope of the present invention is not limited to the respective embodiments described above, can apply various changes without departing from the spirit and scope of the present invention.
For example,, as shown in Figure 6A, also can adopt and in membrane structure shown in Fig. 2 A, not insert low-refraction change layer portion 31 as other examples of above-mentioned the 1st embodiment, and the film 33 that the refractive index of low-index layer 20 is gradually changed.In addition, shown in Fig. 7 A, also can adopt in the 2nd laminate part 23 and be that boundary vicinity with the 1st laminate part 22 and the 3rd laminate part 24 respectively inserts the film 34 of one deck high index of refraction change layer portion 25.In either case, as the analog result of having used each film, shown in Fig. 6 B and Fig. 7 B, can obtain effect, the effect identical with above-mentioned the 1st embodiment.
And,, shown in Fig. 8 A, also can adopt the film 35 that in the 1st laminate part 22 and the 3rd laminate part 24, respectively inserts one deck high index of refraction change layer portion 25 as other examples of above-mentioned the 3rd embodiment.Equally, Fig. 8 B represents analog result.According to this film 35, compare with the 1st embodiment and can suppress pulsation more.
And, shown in Fig. 9 A, also can adopt 1/4 times the film 36 that whole bloomings of high refractive index layer 21 and low-index layer 20 is set at design wavelength.Equally, Fig. 9 B represents analog result.In this film 36, also can reduce the 29a of pulsing.
Under this situation, relative centre wavelength 600nm, design wavelength is made as 600/n (n is an integer) nm, the n/4 that the blooming of high refractive index layer 21 and low-index layer 20 is made as design wavelength doubly, form film thus, also can obtain to have absorbing filter with the identical dichroism of Fig. 9 B.
In addition, as other embodiments, also can adopt structure shown in Figure 14 A, the refractive index of the substrate 18 that forms film 37 had been made as 1.8 o'clock, it is 1.8 that the refractive index of low-index layer 20 is all certain value mutually with the refractive index of substrate 18, make the refractive index of the high refractive index layer 21 of the 1st laminate part 22 become big form gradually and uprise 2.2 gradually from 1.82, make form that the refractive index of the high refractive index layer 21 of the 3rd laminate part 24 diminishes gradually with rate of change from 2.2 step-downs to 1.82 gradually with rate of change.At this moment, in the 1st laminate part 22 and be with the boundary of the 2nd laminate part 23 and in the 3rd laminate part 24 and be boundary with the 2nd laminate part 23, each inserts one deck refractive index is 2.12 high index of refraction change layer portion 25.
In addition, the blooming of film 37 is 1/4 times of design wavelength, and λ=600nm is 150nm relatively, establishes lamination and adds up to 70 layers.
Figure 14 B represents as 26 analog results that do not have refractive index to disperse to final area 27 each layers from the prime area.
As shown in Figure 14B, this film 37 also can obtain effect, the effect identical with above-mentioned the 1st embodiment, can suppress pulsation.And, also can fully stop optical transmission at stop band, make the light transmission more well of transmission frequency band.
And, as other examples, also can adopt structure shown in Figure 15 A, the refractive index of the substrate 18 that forms film 38 was made as 1.5 o'clock, it is 1.5 that the refractive index of low-index layer 20 is all certain value mutually with substrate 18, make the refractive index of the high refractive index layer 21 of the 1st laminate part 22 uprise 2.3 from 1.6 with the rectilinearity rate of change, the refractive index of high refractive index layer 21 that makes the 3rd laminate part 24 with the rectilinearity rate of change from 2.3 step-downs to 1.6.At this moment, in the 1st laminate part 22 and be with the boundary of the 2nd laminate part 23 and in the 3rd laminate part 24 and be boundary with the 2nd laminate part 23, each inserts one deck refractive index is 2.18 high index of refraction change layer portion 25.
In addition, the blooming of film 38 is 1/4 times of design wavelength, and λ=600nm is 150nm relatively, establishes lamination and adds up to 47 layers.
Figure 15 B represents as 26 analog results that do not have refractive index to disperse to final area 27 each layers from the prime area.
Shown in Figure 15 B, this film 38 also can obtain effect, the effect identical with above-mentioned the 1st embodiment, can suppress pulsation.
As described above, irrelevant with the change of refractive rate of high refractive index layer 21, in either case can both suppress pulsation.And, can reduce the loss between substrate 18 and the film 38, make the light transmission more well of transmission frequency band.
In addition, as other embodiments, also can adopt structure shown in Figure 16 A, the refractive index of the substrate 18 that forms film 39 had been made as 1.8 o'clock, the refractive index that makes high refractive index layer 21 and the refractive index of substrate 18 are all certain value promptly 1.8 mutually, the refractive index of low-index layer 20 that makes the 1st laminate part 22 from 1.76 step-downs to 1.4, makes the refractive index of the low-index layer 20 of the 3rd laminate part 24 uprise 1.76 with the orthoscopic rate of change from 1.4 with the orthoscopic rate of change.
At this moment, in the 1st laminate part 22 and be with the boundary of the 2nd laminate part 23 and in the 3rd laminate part 24 and be boundary with the 2nd laminate part 23, each inserts one deck refractive index is 1.48 low-refraction change layer portion 31.
In addition, the blooming of film 39 is that 1/4 times of design wavelength lambda=600nm is 150nm, establishes lamination and adds up to 57 layers.
Figure 16 B represents as 26 analog results that do not have refractive index to disperse to final area 27 each layers from the prime area.
Shown in Figure 16 B, this film 39 also can obtain effect, the effect identical with above-mentioned other embodiments, can suppress pulsation.And, can reduce the loss between substrate 18 and the film 39, make the light transmission more well of transmission frequency band.
In addition, centre wavelength (λ) is not limited to 600nm, and according to the wavelength of excitation light wavelength and the fluorescence of wanting to detect, the value by suitable change λ can obtain desired optical characteristics.
And the material of substrate is not limited to glass, also can adopt plastics.In addition, also can send out the multilayer low-refraction change layer portion 31 of putting, high index of refraction change layer portion 25 and low-refraction change layer portion 31 insert one deck at least and get final product.
Wherein, when the insertion position of above-mentioned high index of refraction change layer portion 25 is near the position (being in 4 layers apart from the border for example) of the boundary of the 2nd laminate part 23 and the 1st laminate part 22 or the 3rd laminate part 24 or its, can obtain better effect.
The change of refractive rate of the high refractive index layer 21 of low-index layer the 20, the 1st laminate part 22 of the 1st laminate part 22, the change of refractive rate of the high refractive index layer 21 of low-index layer the 20, the 3rd laminate part 24 of the 3rd laminate part 24, can be that orthoscopic also can be curvilinear style, can both obtain identical effect, effect.
As described above, the present invention can bring into play following effect.
According to optical filter of the present invention, when making transmittance, near the light of the stop band the wavelength that prevention is equivalent to stipulate, make the transmittance of the transmission frequency band of the wavelength that is equivalent in addition, according to this filtering characteristic, can make the border steepening of transmission frequency band and stop band high, increase transmission light quantity, and suppress the pulsation of transmission frequency band.That is, owing to have the 1st laminate part to the 3 laminate part and insert the change of the refractive index at least one laminate part layer portion from the 1st laminate part to the 3 laminate part, so can make the rising of dichroism of the boundary of stop band and transmission frequency band become rapid.And, can almost completely be suppressed at the pulsation of transmission frequency band, form the membrane structure of the film thickness monitoring when carrying out film forming easily, can obtain the clearer and more definite high performance filtering characteristic in border of stop band and transmission frequency band.
And, under the identical situation of the refractive index of refractive index that makes low-index layer and substrate, can fully stop light at stop band, and further increase transmission light quantity at the transmission frequency band.
And when the blooming of high refractive index layer, low-index layer, high index of refraction change layer portion being made as roughly n/4 times of design wavelength, the film thickness monitoring performance raising in the time of can making actual film forming obtains stable optical characteristics.
And, in the prime area of handle and substrate adjacency and the blooming of one deck at least of the final area of opposition side when being made as roughly n/2 times of design wavelength, can further be suppressed at the pulsation of transmission frequency band, improve dichroism.
Optical device of the present invention has optical filter, this optical filter the wavelength that makes transmission and the wavelength that stops transmission near the time, between transmission frequency band and stop band, has steep border, can make thus the transmission frequency band wavelength the effective transmission of light quantity and can not be cut down, can bring into play the good filtering performance of dichroism.That is,, can when observing, cut off unwanted light, and effectively select the light of desired wavelength, compare, can improve the detection sensitivity of light such as fluorescence with technology in the past by having optical filter of the present invention.
The present invention relates to optical filter and optical device.According to optical filter of the present invention, have from the 1st laminate part to the 3 laminate part and insert the change of the refractive index at least one laminate part layer portion from the 1st laminate part to the 3 laminate part, so can make the rising of dichroism of the boundary of stop band and transmission frequency band become rapid.And, can almost completely be suppressed at the pulsation of transmission frequency band, form the membrane structure of the film thickness monitoring when carrying out film forming easily, can obtain the clearer and more definite high performance filtering characteristic in border of stop band and transmission frequency band.
And, according to optical device of the present invention, owing to have the optical filter that the present invention relates to, thus when observing, can cut off unwanted light, and effectively select the light of desired wavelength, compare with conventional art, can improve the detection sensitivity of light such as fluorescence.
Claims (12)
1. an optical filter has substrate and the film that is formed on the described substrate,
Described film has a plurality of laminate part, and described a plurality of laminate part have the high refractive index layer that is higher than this low-index layer from the low-index layer of described substrate-side alternative stacked and refractive index respectively,
As described a plurality of laminate part, be formed with: the 1st laminate part that the refractive index of described high refractive index layer uprises gradually from described substrate-side; With the 1st laminate part adjacency, the highest the 2nd roughly the same laminate part of refractive index in the high refractive index layer of the refractive index of described high refractive index layer and described the 1st laminate part of formation; With the 2nd laminate part adjacency, the refractive index of described high refractive index layer is from described the 2nd laminate part side the 3rd laminate part of step-down gradually,
From described the 1st laminate part to described the 3rd laminate part, at least one laminate part, insert high index of refraction change layer portion,
The refractive index that described high index of refraction changes layer portion is set to other high refractive index layers that are lower than the both sides of adjacency by described low-index layer.
2. optical filter according to claim 1, described high index of refraction change layer portion is inserted near the boundary of described the 2nd laminate part and described the 1st laminate part or described the 3rd laminate part or its.
3. optical filter according to claim 1, the refractive index of described low-index layer and the refractive index of described substrate are roughly the same.
4. optical filter according to claim 1, when the design wavelength of the central wavelength lambda of the wavelength band that relatively stops transmission being made as λ/n, the blooming of described high refractive index layer, described low-index layer and described high index of refraction change layer portion, the roughly n/4 that is set to described design wavelength respectively doubly, wherein, n is an integer.
5. optical filter according to claim 4, the blooming of one deck at least of the prime area of formation in the described film and described substrate adjacency and the final area of opposition side thereof, the roughly n/2 that is set to described design wavelength is doubly.
6. an optical filter has substrate and the film that is formed on the described substrate,
Described film has a plurality of laminate part, and described a plurality of laminate part have the high refractive index layer that is higher than this low-index layer from the low-index layer of described substrate-side alternative stacked and refractive index respectively,
As described a plurality of laminate part, be formed with: the 1st laminate part that the refractive index of described high refractive index layer uprises gradually from described substrate-side; With the 1st laminate part adjacency, the highest the 2nd roughly the same laminate part of refractive index in the high refractive index layer of the refractive index of described high refractive index layer and described the 1st laminate part of formation; With the 2nd laminate part adjacency, the refractive index of described high refractive index layer is from described the 2nd laminate part side the 3rd laminate part of step-down gradually,
From described the 1st laminate part to described the 3rd laminate part, at least one laminate part, insert low-refraction change layer portion,
The refractive index that described low-refraction changes layer portion is set to other low-index layers that are higher than the both sides of adjacency by described high refractive index layer.
7. optical filter according to claim 6, the refractive index of described high refractive index layer and the refractive index of described substrate are roughly the same.
8. an optical filter has substrate and the film that is formed on the described substrate,
Described film has a plurality of laminate part, and described a plurality of laminate part have the high refractive index layer that is higher than this low-index layer from the low-index layer of described substrate-side alternative stacked and refractive index respectively,
As described a plurality of laminate part, be formed with: the refractive index of described high refractive index layer uprises gradually from described substrate-side, and the refractive index of described low-index layer is from described substrate-side the 1st laminate part of step-down gradually; With the 1st laminate part adjacency, refractive index the highest in the high refractive index layer of the refractive index of described high refractive index layer and described the 1st laminate part of formation is roughly the same, and the 2nd roughly the same laminate part of lowest refractive index in the low-index layer of the refractive index of described low-index layer and described the 1st laminate part of formation; With the 2nd laminate part adjacency, the refractive index of described high refractive index layer is from described the 2nd laminate part side step-down gradually, and the 3rd laminate part that uprises gradually from described the 2nd laminate part side of the refractive index of described low-index layer,
At least one laminate part from described the 1st laminate part to described the 3rd laminate part, insert at least one side in high index of refraction change layer portion and the low-refraction change layer portion,
The refractive index that described high index of refraction changes layer portion is set to other described high refractive index layers that are lower than the both sides of adjacency by described low-index layer,
The refractive index that described low-refraction changes layer portion is set to other described low-index layers that are higher than the both sides of adjacency by described high refractive index layer.
9. according to claim 6 or 8 described optical filters, described high index of refraction change layer portion and described low-refraction change at least one side in the layer portion, are inserted near the boundary of described the 2nd laminate part and described the 1st laminate part or described the 3rd laminate part or its.
10. according to claim 6 or 8 described optical filters, when the design wavelength of the central wavelength lambda of the wavelength band that relatively stops transmission being made as λ/n, the blooming of described high refractive index layer, described low-index layer, described high index of refraction change layer portion and described low-refraction change layer portion, the roughly n/4 that is set at described design wavelength respectively doubly, wherein, n is an integer.
11. optical filter according to claim 10 the blooming of one deck at least of the final area of the prime area of formation and described substrate adjacency in the described film and opposition side thereof, is set at roughly n/2 times of described design wavelength.
12. an optical device has any described optical filter in the claim 1,6,8.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP84984/2003 | 2003-03-26 | ||
| JP2003084984 | 2003-03-26 | ||
| JP299223/2003 | 2003-08-22 |
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| Publication Number | Publication Date |
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| CN1761891A CN1761891A (en) | 2006-04-19 |
| CN100390576C true CN100390576C (en) | 2008-05-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004800076503A Expired - Fee Related CN100390576C (en) | 2003-03-26 | 2004-03-23 | Optical filter and optical apparatus |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5559825A (en) * | 1995-04-25 | 1996-09-24 | The United States Of America As Represented By The Secretary Of The Army | Photonic band edge optical diode |
| JP2000009928A (en) * | 1998-06-22 | 2000-01-14 | Alps Electric Co Ltd | Optical multilayered filter |
| EP1258745A2 (en) * | 2001-05-09 | 2002-11-20 | Alps Electric Co., Ltd. | Optical filter |
-
2004
- 2004-03-23 CN CNB2004800076503A patent/CN100390576C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5559825A (en) * | 1995-04-25 | 1996-09-24 | The United States Of America As Represented By The Secretary Of The Army | Photonic band edge optical diode |
| JP2000009928A (en) * | 1998-06-22 | 2000-01-14 | Alps Electric Co Ltd | Optical multilayered filter |
| EP1258745A2 (en) * | 2001-05-09 | 2002-11-20 | Alps Electric Co., Ltd. | Optical filter |
Non-Patent Citations (2)
| Title |
|---|
| Using Apodization Function to ReduceSidelobes in Regate Filters. William H. Southwell.Applied Optical,Vol.28 No.23. 1989 |
| Using Apodization Function to ReduceSidelobes in Regate Filters. William H. Southwell.Applied Optical,Vol.28 No.23. 1989 * |
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| CN1761891A (en) | 2006-04-19 |
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