JP4524388B2 - 光学計測機器用フランジ付き超高真空観測窓の気密方法 - Google Patents
光学計測機器用フランジ付き超高真空観測窓の気密方法 Download PDFInfo
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- JP4524388B2 JP4524388B2 JP2004150473A JP2004150473A JP4524388B2 JP 4524388 B2 JP4524388 B2 JP 4524388B2 JP 2004150473 A JP2004150473 A JP 2004150473A JP 2004150473 A JP2004150473 A JP 2004150473A JP 4524388 B2 JP4524388 B2 JP 4524388B2
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- 238000000034 method Methods 0.000 title claims description 11
- 230000003287 optical effect Effects 0.000 title claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 30
- 239000013078 crystal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- 238000007772 electroless plating Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Description
A.Nagashima （長島章）、 T. Nishitani （西谷建夫）、T. Fjisawa （藤沢恒夫） 、T. Sugie（杉江達夫）、 S. Kasai（河西敏）著、Review of Scientific Instruments, Vol. 70, No. 1、460〜463頁、1999年１月
２： リングはめ込み部
Claims (1)
- ガラス或いは結晶類の円板である窓の外周側面部とフランジの内周側面部との間に金属製柔軟構造のリングを設け、フランジにネジ止めできる押し板でこのリングを圧縮して、窓の外周側面部とフランジの内周側面部にリングの内周側と外周側を各々接触させてから、その接触させた部分に低温浴の無電解メッキを施し、そのメッキ層によって、気密を得る光学計測機器用フランジ付き超高真空観測窓の気密方法。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004150473A JP4524388B2 (ja) | 2004-05-20 | 2004-05-20 | 光学計測機器用フランジ付き超高真空観測窓の気密方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004150473A JP4524388B2 (ja) | 2004-05-20 | 2004-05-20 | 光学計測機器用フランジ付き超高真空観測窓の気密方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005331045A JP2005331045A (ja) | 2005-12-02 |
| JP4524388B2 true JP4524388B2 (ja) | 2010-08-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004150473A Expired - Fee Related JP4524388B2 (ja) | 2004-05-20 | 2004-05-20 | 光学計測機器用フランジ付き超高真空観測窓の気密方法 |
Country Status (1)
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| JP (1) | JP4524388B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101866039B (zh) * | 2010-07-29 | 2012-01-18 | 哈尔滨工业大学 | 耐高低温中波红外光学窗口及其制作方法 |
| US9651467B2 (en) * | 2013-05-09 | 2017-05-16 | Tokushima University | Raw material fluid density detector |
| JP5885699B2 (ja) * | 2013-05-09 | 2016-03-15 | 株式会社フジキン | 脆性破壊性光透過窓板の固定構造及びこれを用いた脆性破壊性光透過窓板の固定方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63221832A (ja) * | 1987-03-11 | 1988-09-14 | Mitsubishi Electric Corp | 超高真空用覗き窓装置 |
| JPH0198767A (ja) * | 1987-10-08 | 1989-04-17 | Mitsubishi Electric Corp | 圧力容器のシール構造 |
| JPH01206163A (ja) * | 1988-02-13 | 1989-08-18 | Japan Radio Co Ltd | 真空装置用光導入気密窓 |
| JPH03128172A (ja) * | 1989-10-13 | 1991-05-31 | Mitsubishi Alum Co Ltd | 真空機器用部材の接合方法 |
| JPH0780274A (ja) * | 1993-09-11 | 1995-03-28 | Asaka Shuji | 光透過窓取付け機構 |
-
2004
- 2004-05-20 JP JP2004150473A patent/JP4524388B2/ja not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63221832A (ja) * | 1987-03-11 | 1988-09-14 | Mitsubishi Electric Corp | 超高真空用覗き窓装置 |
| JPH0198767A (ja) * | 1987-10-08 | 1989-04-17 | Mitsubishi Electric Corp | 圧力容器のシール構造 |
| JPH01206163A (ja) * | 1988-02-13 | 1989-08-18 | Japan Radio Co Ltd | 真空装置用光導入気密窓 |
| JPH03128172A (ja) * | 1989-10-13 | 1991-05-31 | Mitsubishi Alum Co Ltd | 真空機器用部材の接合方法 |
| JPH0780274A (ja) * | 1993-09-11 | 1995-03-28 | Asaka Shuji | 光透過窓取付け機構 |
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| JP2005331045A (ja) | 2005-12-02 |
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