JP4524100B2 - Method for forming molded body for plasma generating electrode, and method for manufacturing plasma generating electrode - Google Patents

Description

The present invention is a molding method of the plasma generating electrode molded product, and a method for manufacturing a plasma generating electrode. More specifically, the present invention relates to a method for forming a molded body for a plasma generating electrode and a method for manufacturing the plasma generating electrode that can effectively prevent damage to the electrode due to temperature change.

  Silent discharge is generated by placing a dielectric between two electrodes and applying a high-voltage AC or periodic pulse voltage. In the resulting plasma field, active species, radicals, and ions are generated, and gas reactions occur. It is known to promote decomposition, and it is known that this can be used to remove harmful components contained in engine exhaust gas and various incinerator exhaust gases.

For example, by passing engine exhaust gas and various incinerator exhaust gases through the plasma field, for example, NOx, carbon particulates, HC, CO, etc. contained in the engine exhaust gas and various incinerator exhaust gases are contained. The plasma reactor etc. which process are disclosed (for example, refer patent document 1).
JP 2001-164925 A

  However, when trying to adopt a structure that stably and uniformly generates plasma with as low power as possible, it is necessary to reduce the distance between each electrode (unit electrode) constituting the plasma generating electrode, and the number of parts increases. There was a problem that assembly was complicated and productivity was low. In order to reduce the pressure loss when the exhaust gas passes through the plasma generating electrode, it is necessary to make the unit electrode itself thin. However, since the thin unit electrode is easily deformed, the unit electrodes may be loosened due to looseness of the unit electrodes. Since the distances are partially different and are not constant as a whole, there is a problem that the plasma becomes non-uniform. Furthermore, when thermal stress is applied to the plasma generating electrode, there is a problem that the plasma generating electrode may be damaged by the thermal stress.

The present invention has been made in view of the above-described problems, has high productivity, can generate uniform and stable plasma, and effectively breaks electrodes due to temperature changes and high voltage loads. An object of the present invention is to provide a method for forming a molded article for a plasma generating electrode excellent in heat resistance that can be prevented, and a method for producing a plasma generating electrode.

  In order to achieve the above object, the present invention provides the following molded article for a plasma generating electrode, a molding method thereof, and a plasma generating electrode.

[1] With one extruder, the first molded sheet made of a dielectric material having comb-shaped protrusions disposed on the surface of the flat plate portion is integrally extruded and conveyed on the first conveyance line, When the second molding sheet made of a flat plate-like dielectric material is extruded by the other extrusion molding machine arranged in parallel with the extrusion molding machine and conveyed by the second conveyance line, the first molding sheet or the first After the conductive film is formed in a predetermined pattern on the flat surface of the second molded sheet, the first molded sheet and the second molded sheet are brought into close contact with each other, and the first molded sheet and the second molded sheet A piece in which the conductive film is embedded and crimped and integrated using a roll having a guide groove while the conductive film is interposed, and a comb-shaped protrusion is disposed on the surface of the flat plate portion. Comb-shaped laminated sheet Method of forming a plasma generating electrode molded body cut by law.

[2] Plasma generation according to [1], wherein a twin roll having a guide groove is used so that the comb-shaped protrusions are not crushed as a method of bringing the first molded sheet and the second molded sheet into close contact with each other. A method for forming a molded article for an electrode.

[3] The extrusion speeds of the respective molded sheets in the one extrusion molding machine and the other extrusion molding machine arranged in parallel therewith are synchronized with each other, and the pattern formation time of the conductive film is ensured. The method for forming a molded body for a plasma generating electrode according to [1] or [2], which is a possible speed.

[4] While extruding the first molded sheet made of a dielectric material having a comb-shaped protrusion on the surface of the flat plate portion by one extruder and transporting it in the first transport line, A second molding machine arranged in parallel with the extrusion molding machine integrally extrudes a third molding sheet made of a dielectric material having a comb-shaped protrusion on the back surface of the flat plate portion, and is secondly extruded. When the conductive film is conveyed on the flat surface of either the first molded sheet or the third molded sheet, the conductive film is formed in a predetermined pattern, and then the first molded sheet and the third molded sheet are conveyed. The conductive film was embedded by pressing and integrating the first molded sheet and the third molded sheet using a roll having guide grooves while closely contacting the molded sheet and interposing the conductive film. Place the comb-like laminated sheet Method of forming a plasma generating electrode molded body is cut at dimensions.

[5] Plasma generation as described in [4], wherein a twin roll having a guide groove is used so that the comb-shaped protrusions are not crushed as a method of bringing the first molded sheet and the third molded sheet into close contact with each other. A method for forming a molded article for an electrode.

[6] The extrusion speeds of the respective molded sheets in the one extrusion molding machine and the other extrusion molding machine arranged in parallel therewith are synchronized with each other, and the pattern formation time of the conductive film is ensured. The method for forming a molded body for a plasma generating electrode according to [4] or [5], which is a speed capable of being produced.

[7] When the second molded sheet made of a flat dielectric material is extruded by the first extruder and conveyed by the conveying line, a conductive film is formed in a predetermined pattern on the surface of the second molded sheet. Thereafter, the sheet is conveyed into a second extrusion molding machine, and a fourth molded sheet made of a dielectric material having comb-shaped protrusions disposed on the surface of the flat plate portion is integrally extruded onto the second molded sheet. On the other hand, the conductive film is embedded by pressing and integrating with the second molded sheet using a roll having a guide groove, and a comb-shaped protrusion is disposed on the surface of the flat plate portion. A method for forming a molded body for a plasma generating electrode, wherein a comb-shaped laminated sheet is obtained integrally, and the obtained laminated sheet is cut with a predetermined dimension.

[8] A predetermined pattern is formed between the dielectric material in which the protrusions are arranged in a comb shape on the surface of the flat plate portion extruded from each of the supply passages, and the dielectric material provided in the flat plate shape. And having a structure in which the conductive material is embedded in the dielectric material by simultaneously extruding the dielectric material and the conductive material from a base disposed so that the conductive material disposed in the thickness is interposed, and A method for forming a plasma generating electrode molded body, wherein a plasma generating electrode molded body having a comb-shaped protrusion disposed on one side of a flat plate portion is formed .

[9] The molded bodies molded by the molding method according to [8] are connected to each other between an interface between the protrusions disposed in the comb shape of one molded body and a flat portion of the other molded body. A method for producing a plasma generating electrode, wherein lamination is performed so that there is no gap, and a flat molded body in which a conductive film is embedded is placed on the uppermost surface or the lowermost surface of the obtained laminated body, followed by firing and integration.

[10] Dielectric material in which the protrusions are arranged in a comb shape on the surface of the flat plate portion extruded from each feeding flow path, and the dielectric material in which the protrusions are arranged in a comb shape on the back surface of the flat plate portion By simultaneously extruding the dielectric material and the conductive material from a die arranged so that the conductive material arranged in a predetermined pattern and thickness is interposed between the conductive material and the material, the conductive material becomes a dielectric material. A method for forming a plasma generating electrode molded body, wherein the plasma generating electrode molded body has an embedded structure and has comb-shaped protrusions disposed on both sides of a flat plate portion.

[11] The molding method according to claim 10, while mounting a flat molded body with a conductive film embedded on one side and / or both sides of the molded body molded by the molding method according to [10]. After laminating so that there is no interface or gap between the protrusions arranged in the comb shape of the molded body formed by the above and the flat portion of the flat plate-shaped molded body in which the conductive film is embedded, A method for producing a plasma generating electrode to be integrated .

[12] A dielectric material in which protrusions are arranged in a comb shape on the surface of a flat plate portion extruded from each feeding flow path, and a flat protrusion material in a comb shape on the back surface of the flat plate dielectric material or the flat plate portion Extrusion molding is performed simultaneously from a die in which a plurality of conductive materials arranged in a predetermined pattern and thickness intervene between the dielectric material in which the material is arranged and a plurality of pieces arranged in parallel in the vertical direction. A method for producing a plasma generating electrode in which a unit molded body obtained by previously laminating a plurality of molded bodies is obtained, and then fired and integrated.

Method of forming a plasma generating electrode molded product of the present invention, and manufacturing method of the plasma generating electrode has a high productivity, together it is possible to generate uniform and stable plasma, due to temperature changes and high voltage load It is possible to effectively prevent the electrode from being damaged.

Hereinafter, embodiments of a method for forming a molded body for a plasma generating electrode and a method for manufacturing a plasma generating electrode according to the present invention will be described in detail with reference to the drawings. However, the present invention is interpreted as being limited thereto. However, various changes, modifications, and improvements can be made based on the knowledge of those skilled in the art without departing from the scope of the present invention.

  1 and 2 show examples of embodiments of the molded body for plasma generating electrode according to the present invention. (A) is a sectional view of the molded body, and (b) is a molded body of (a). Sectional drawing of the 1st shaping | molding member and 2nd shaping | molding member to comprise, (c) is sectional drawing of the plasma generating electrode (electrode unit) produced using the molded object of (a).

  As shown in FIGS. 1 (a) and 1 (b), an example of the molded body of the present invention is the back surface of the first molded member 10 made of a dielectric material in which protrusions are arranged in a comb shape on the surface of the flat plate portion. And the second molded member 12 made of a plate-like dielectric material, the conductive film 20 is interposed between the first molded member 12 and the first molded member 12, and the first conductive member 20 is embedded. The flat plate portion 6 and the ridge portion 2 of the molded member 10 are integrally molded.

  1A. Using a molded body 15 shown in FIG. 1A, for example, as shown in FIG. 1C, the molded bodies 15 are laminated with each other, and a conductive film is embedded on the uppermost surface of the obtained laminated body. After the shaped molded body 30 is placed, the plasma generating electrode (unit electrode) 40 can be obtained by firing and integration. The plasma generating electrode can also be obtained from a laminate of molded bodies 15 or a plate-shaped molded body 30 in which a conductive film is embedded on the surface of the molded body 15.

  In addition, as shown in FIGS. 2 (a) and 2 (b), another example of the molded body of the present invention is a first molding made of a dielectric material in which protrusions are arranged in a comb shape on the surface of a flat plate portion. The back surfaces of the member 10 and the second molded member 11 are bonded and integrated with the conductive film 20 interposed therebetween, whereby the conductive film 20 is embedded, and the first molded member 10 and the first molded member 10 The flat plate portion 6 and the protrusion portion 2 of the second molded member 11 may be integrally formed.

  Using the molded body 16 shown in FIG. 2A, for example, as shown in FIG. 2C, a flat molded body 30 in which a conductive film is embedded on one side and / or both sides of the molded body 16 is used. The plasma generating electrode (unit electrode) 42 can be obtained by stacking the molded body 16 while placing it, followed by firing and integration.

  At this time, the main feature of the molded body of the present invention is that the flat plate portion 6 and the protruding portion 2 of the molded member are integrally molded as shown in FIGS. 1 (a) and 2 (a).

  For example, as shown in FIGS. 14A and 14B, the back surface of the first molded member 103 in which the flat plate portion 101 and the protruding portion 102 are formed separately, and the second made of a flat dielectric material. FIG. 14C obtained by stacking the plasma generating electrode molded body 100 in which the conductive film 20 is embedded by interposing the conductive film 20 between the molded member 104 and pressing and integrating the conductive film 20. The plasma generating electrode (unit electrode) 36 shown in FIG. 2 is high because if there is an interface or gap between the flat plate portion 101 and the protruding portion 102, a discharge is generated intensively at that portion and the discharge is spread over the entire space. It was necessary to input energy. In addition, since both ends of the ridge are fired and bonded, the parallelism and flatness of the formed product of the ridge are not accurate, and the reliability of the bonded ends on both sides is inferior, and thermal shock In the test, the electrode part was cracked or a dielectric breakdown sometimes occurred in a discharge test under a high voltage.

  On the other hand, the molded body shown in FIG. 1 (a) and FIG. 2 (a) is an interface between the flat plate portion 6 and the protruding portion 2 of the molded member at the time of firing, as compared with the molded body shown in FIG. 14 (a). And gaps can be eliminated (see FIGS. 1A and 2A). This is because only one side of the ridge portion is fired and joined, so that the flatness and parallelism of the end surface of the ridge portion in the molded body can be easily controlled, and the occurrence of defects at the joint portion is small.

  Accordingly, the plasma generating electrodes (unit electrodes) 40 and 42 shown in FIGS. 1C and 2C can alleviate distortion of the plasma generating electrodes (unit electrodes) due to thermal stress during actual use. In addition, the distance between the conductive films (electrodes) can be made constant as a whole (over the entire surface), and compared with the plasma generating electrode (unit electrode) 36 shown in FIG. Since dropout and damage of the strip can be greatly suppressed, high reliability can be obtained against dielectric breakdown.

  The molding method of the molded body 15 shown in FIG. 1 (a) is, for example, as shown in FIG. 3, with one (upper) extrusion molding machine 50 having protrusions arranged in a comb shape on the surface of the flat plate portion. A first molded sheet 90 made of a dielectric material is integrally extruded and conveyed by a first conveying line 56, and a flat dielectric material is formed by another (lower) extrusion molding machine 52 arranged in parallel therewith. When the second molded sheet 92 made of is extruded and conveyed by the second conveying line 57, the conductive film 20 is formed in a predetermined pattern on the flat surface of the second molded sheet 12 by the conductive film forming device 53. Further, after the bonding layer 24 made of the bonding material is formed by the bonding layer forming device 54, the first molded sheet 90 and the second molded sheet 92 are brought into close contact with the twin rolls 58a and 58b, and the conductive film 20 is interposed. Let the first A single comb in which a conductive film is embedded by pressing and integrating the shaped sheet 90 and the second molded sheet 92 with pressure-bonding rolls 59a and 59b, and protrusions are arranged in a comb shape on the surface of the flat plate portion. A laminated sheet 95 is obtained, and the obtained laminated sheet 95 is cut by a blade 80 with a predetermined dimension.

  The twin rolls 58a and 58b and the pressure-bonding rolls 59a and 59b preferably have guide grooves so that the comb-shaped ridges of the first molded sheet are not crushed. Moreover, it is preferable that the twin rolls 58a and 58b are rolls that rotate with a structure in which one side rotates with no load and the other side loads with pressure. Furthermore, when the comb-shaped ridge is wide and has a large area, it is crimped and integrated in two stages: a double roll that presses and contacts the flat plate part and a double roll that presses and contacts the ridge part. It is more preferable.

  2A, for example, as shown in FIG. 3, the protrusions are arranged in a comb shape on the surface of the flat plate portion by one (upper) extruder 50 as shown in FIG. The first molded sheet 90 made of the dielectric material is integrally extruded and conveyed by the first conveying line 56, and the other (lower) extrusion molding machine 52 arranged in parallel to the first molded sheet 90 is used for the flat plate portion. When the third molded sheet 94 made of a dielectric material having comb-like protrusions disposed on the back surface is integrally extruded and conveyed by the second conveyance line 57, the first molded sheet 90 or the third molded sheet 90 is conveyed. After the conductive film 20 is formed in a predetermined pattern on the flat surface of any one of the molded sheets 94 by the conductive film forming device 53, and further, the bonding layer 24 made of the bonding material is formed by the bonding layer forming device 54. , First molded sheet 90 and third component The sheet 94 is brought into close contact with the twin rolls 58a and 58b, and the first molded sheet 90 and the third molded sheet 94 are pressure-bonded and integrated with the pressure-bonding rolls 59a and 59b while interposing the conductive film. A buried comb-like laminated sheet 96 is obtained, and the obtained laminated sheet 96 is cut into a predetermined size by a blade 80.

  The twin rolls 58a and 58b and the pressure-bonding rolls 59a and 59b preferably have guide grooves so that the comb-shaped protrusions of the first molded sheet 90 and the third molded sheet 94 are not crushed. Moreover, it is preferable that the twin rolls 58a and 58b are rolls that rotate with a structure in which one side rotates with no load and the other side loads with pressure. Furthermore, when the comb-shaped ridge is wide and has a large area, it is crimped and integrated in two stages: a double roll that presses and contacts the flat plate part and a double roll that presses and contacts the ridge part. More preferably.

  At this time, as shown in FIG. 3, the extrusion speeds of the respective molded sheets in one (upper) extruder and the other (lower) extruder arranged in parallel with each other are synchronized with each other. At the same time, it is preferable that the speed be sufficient to ensure the pattern formation time of the conductive film.

  In FIG. 3, the extrusion molding machine 50 is arranged at the upper part and the extrusion molding machine 52 is arranged at the lower part. However, there is no particular limitation, and the extrusion molding machines 50 and 52 are turned upside down. It is also possible to arrange 50 and 52 on the left and right.

  Further, when the conductive film is formed in a predetermined pattern on the molded sheet, it is preferable to employ ink jet printing as the conductive film forming means of the conductive film forming apparatus 53 as shown in FIG. For example, screen printing, calender roll, spray, electrostatic coating, dip, knife coater, chemical vapor deposition, physical vapor deposition and the like can be suitably used. When forming a conductive film by inkjet printing, it is preferable to use a slurry containing a conductor. When forming a conductive film by screen printing, it is preferable to use a paste containing a conductor. As the binder of the paste, ethyl cellulose, polyvinyl butyral, or acrylic resin can be used.

  Furthermore, when forming a bonding layer on a molded sheet in which the conductive film is formed in a predetermined pattern, as shown in FIG. 3, it is simple to employ ink jet printing as the bonding layer forming means of the bonding layer forming apparatus 54. This is preferable. In addition, it is more preferable that the bonding layer is formed on the surface of the molded sheet excluding the patterned conductive film because an interface and a gap at the time of bonding of the molded sheets can be eliminated.

  Still another example of the molded body of the present invention is, for example, as shown in FIGS. 4 (a) and 4 (b), a comb-shaped protrusion is disposed on the surface of the flat plate portion, and the back surface of the flat plate portion. A second molding member 14 made of a flat dielectric material having a complementary relationship with the cavity 3 and having a conductive film 20 formed on the surface thereof is formed on the first molding member 13 made of a dielectric material having a cavity 3 on the surface. By fitting and integrating, the conductive film 20 may be embedded, and the flat plate portion 6 and the ridge portion 2 of the first molded member 13 may be integrally molded.

  4A. Using the molded body 17 shown in FIG. 4A, for example, as shown in FIG. 4C, the molded bodies 17 are laminated with each other, and a conductive film is embedded in the uppermost surface of the obtained laminated body. A plasma generating electrode (unit electrode) 43 can be obtained by placing and firing and integrating the shaped molded body. The plasma generating electrode can also be obtained from a laminate of molded bodies 17 or an electrode having a flat molded body 30 in which a conductive film is embedded on the surface of the molded body 17.

  Also, the molding method for continuously molding the molded body 17 shown in FIG. 4 is, for example, as shown in FIG. 5, by extruding a second molded sheet 92 made of a flat dielectric material by a second extruder. When the conductive line 20 is transported by the transport line 56, the conductive film 20 is formed in a predetermined pattern on the surface of the second molded sheet 92, and then transported into the third extrusion molding machine 60, on the second molded sheet 92. The conductive film 20 is embedded by pressing and integrating with the second molding sheet 92 while integrally extruding the fourth molding sheet 97 having comb-shaped protrusions disposed on the surface of the flat plate portion. In addition, a single comb-shaped laminated sheet 98 having comb-like protrusions arranged on the surface of the flat plate portion is integrally obtained, and the obtained laminated sheet 98 is cut with a predetermined dimension.

  In addition, it is preferable that the thickness of each shaping | molding member or shaping | molding sheet used by this invention is the same or comparable. Moreover, about the thickness of each shaping | molding member or a shaping | molding sheet, although it does not specifically limit, it is preferable that it is 0.1-3 mm. This is because when the thickness of each molded member or molded sheet is less than 0.1 mm, electrical insulation between the conductive films (electrodes) may not be ensured. On the other hand, when the thickness of each molded member or molded sheet exceeds 3 mm, it may hinder space saving beyond the thickness required for the dielectric.

  Further, the thickness of the conductive film used in the present invention is 0 for reasons such as reducing the size of the plasma generating electrode and reducing the resistance of the fluid to be processed that passes between the electrodes when processing exhaust gas or the like. 0.001 to 0.1 mm is preferable, and 0.01 to 0.03 mm is more preferable. This is because when it is thinner than 0.001 mm, it is difficult to obtain a uniform conductive film that can secure a withstand voltage. When it is thicker than 0.1 mm, the adhesion of the dielectric sandwiched between both sides is inferior, and a highly reliable electrode is required. It is difficult to obtain.

  As another example of the molded body of the present invention, as shown in FIG. 6A and FIGS. 7 to 11, on the surface of the flat plate portion extruded from the dielectric material supply hole 70 to the first supply flow path 71. A conductive material supply hole 74 (see FIG. 5) is formed between the dielectric material in which the protrusions are arranged in a comb shape and the flat dielectric material extruded from the dielectric material supply hole 70 to the second supply flow path 72. 7) and simultaneously extruding from a base 62 (base outlet 78) disposed so that a conductive material disposed in a predetermined pattern and thickness extruded to the third feeding flow path 76 is interposed. Thus, as shown in FIG. 6B, the conductive material is embedded in the dielectric material, and the protrusions are arranged in a comb shape on one side of the flat plate portion.

  Using the molded body 18 shown in FIG. 6B, for example, as shown in FIG. 6C, the molded bodies 18 are laminated with each other, and a flat plate in which a conductive film is embedded in the uppermost surface of the obtained laminated body. After the shaped molded body 30 is placed, the plasma generating electrode (unit electrode) 44 can be obtained by firing and integration. The plasma generating electrode can also be obtained from a laminate of molded bodies 18 or a flat molded body 30 in which a conductive film is embedded on the surface of the molded body 18.

  Further, as still another example of the molded body of the present invention, as shown in FIG. 12A, a comb-like shape is formed on the surface of the flat plate portion extruded from the dielectric material supply hole 70 to the first supply passage 71. Conductive material supply hole (not shown) between the dielectric material in which the protrusions are arranged on the flat plate and the flat dielectric material pushed out from the dielectric material supply hole 70 to the second feed channel 72 By simultaneously extruding from a base 63 (base outlet 78) arranged so that a conductive material arranged in a predetermined pattern and thickness pushed out from the third feed flow path 76 is interposed, As shown in FIG. 12B, a conductive material has a structure embedded in a dielectric material, and comb-shaped protrusions are disposed on both surfaces of the flat plate portion.

  Using the molded body 19 shown in FIG. 12B, for example, as shown in FIG. 12C, a flat molded body 30 in which a conductive film is embedded on one side and / or both sides of the molded body 19 is used. The plasma generating electrode (unit electrode) 46 can be obtained by stacking the molded body 19 while placing it, followed by firing and integration.

  At this time, as shown in FIGS. 6A and 6B and FIGS. 12A and 12B, the main feature of the molded body of the present invention is that a plurality of types of extruded materials are formed in a predetermined shape or a predetermined shape within the die. And extruding at the same time while being guided so as to be a combination of extruding materials.

  For example, as shown in FIGS. 14A and 14B, the back surface of the first molded member 103 in which the flat plate portion 101 and the protruding portion 102 are formed separately, and the second made of a flat dielectric material. FIG. 14C obtained by stacking the plasma generating electrode molded body 100 in which the conductive film 20 is embedded by interposing the conductive film 20 between the molded member 104 and pressing and integrating the conductive film 20. The plasma generating electrode (unit electrode) 36 shown in FIG. 2 is high because if there is an interface or gap between the flat plate portion 101 and the protruding portion 102, a discharge is generated intensively at that portion and the discharge is spread over the entire space. It was necessary to input energy. In addition, since both ends of the ridge are fired and bonded, the parallelism and flatness of the formed product of the ridge are not accurate, and the reliability of the bonded ends on both sides is inferior, and thermal shock In the test, the electrode part was cracked or a dielectric breakdown sometimes occurred in a discharge test under a high voltage.

  On the other hand, the molded body shown in FIG. 6B and FIG. 12B is an interface between the flat plate portion 101 and the protruding portion 102 of the molded member during firing, as compared with the molded body shown in FIG. And gaps can be eliminated (see FIGS. 6B and 12B). This is because only one side of the ridge portion is fired and joined, so that the flatness and parallelism of the end surface of the ridge portion in the molded body can be easily controlled, and the occurrence of defects at the joint portion is small.

  Accordingly, the plasma generating electrodes (unit electrodes) 44 and 46 shown in FIGS. 6C and 12C can alleviate distortion of the plasma generating electrodes (unit electrodes) due to thermal stress during actual use. In addition, the distance between the conductive films (electrodes) can be made constant as a whole (over the entire surface). Further, compared to the plasma generating electrode (unit electrode) 36 shown in FIG. 14 (c), dropout and breakage of the protrusions can be greatly suppressed, so that high reliability is obtained against dielectric breakdown. be able to. Furthermore, the molded body shown in FIGS. 6 (b) and 12 (b) has a first molded member and a second molded member as compared with the molded body shown in FIGS. 1 (a) and 2 (a). This eliminates the interface and gaps between the conductive material and the conductive film, making it possible to improve the integrity of the conductive film and to produce a molded body by a single extrusion process. ing.

  Furthermore, in the present invention, as shown in FIG. 13A, comb-shaped protrusions are disposed on the surface of the flat plate portion extruded from the dielectric material supply hole 70 to the first supply flow path 71. Between the dielectric material and the flat dielectric material extruded from the dielectric material supply hole 70 to the second supply flow path 72, the third supply flow path 76 from the conductive material supply hole (not shown). Simultaneously extrude a plurality of discharge passages 77 arranged so as to interpose a conductive material arranged in a predetermined pattern and thickness extruded to a base 64 (base outlet 78) arranged in parallel in the vertical direction. By molding, a unit molded body in which a plurality of molded bodies are laminated in advance can be obtained. Further, by firing the obtained unit molded body, a plasma generating electrode (unit electrode) shown in FIG. 48 can also be obtained.

  In addition, the dielectric material and the conductive material used in the present invention are added with an appropriate amount of a molding binder to a dielectric (in the case of a dielectric material) or a conductor (in the case of a conductive material), and as a molding aid, a surfactant and A kneaded clay (extruded material) adjusted to an appropriate hardness by adding water. At this time, it is preferable that the said shaping | molding binder is a gelation type organic binder, for example, methylcellulose, polyvinyl alcohol, and glycerol can be used suitably.

  The dielectric used in the present invention is not particularly limited, but magnesium oxide, aluminum oxide, silicon oxide, zirconium oxide, titanium oxide, mullite, spinel, cordierite, silicon nitride, aluminum nitride, barium titanate, glass and the like are preferable. Can be used.

  In addition, the dielectric used in the present invention is used by covering the conductive film with the dielectric, thereby reducing the amount of discharge such as sparks and reducing small discharge compared to the case where the conductive film alone is discharged. It can be generated at a plurality of locations. Such a plurality of small discharges can reduce power consumption because less current flows than discharges such as sparks, and further, the current flowing between the dielectric films due to the presence of the dielectric. Is limited, and non-thermal plasma with less energy consumption without temperature rise can be generated.

  The conductor (conductive film) used in the present invention preferably contains a metal having excellent conductivity as a main component. For example, the main component is tungsten, molybdenum, manganese, chromium, titanium, zirconia, nickel, iron, It is preferably at least one metal selected from the group consisting of silver, copper, platinum, and palladium.

  EXAMPLES Hereinafter, although this invention is demonstrated further in detail based on an Example, this invention is not limited to these Examples.

Example 1
The plasma electrode molded body shown in FIG. 1A was molded by the molding method shown in FIG.
More specifically, water is added to 3% by weight of the heat-gelled organic binder and 0.1 part by weight of the surfactant with respect to 100 parts by weight of aluminum oxide, and the water content is 20 parts by weight. The prepared kneaded clay (dielectric material) was prepared. A kneaded clay (dielectric material) was degassed into a rod shape and extruded. The upper part of the base was set in a comb shape, and the lower part of the base was set to be a flat plate-shaped molding port.

  Both molding sheets 90 and 92 are synchronized at a molding speed of 1500 mm / min, and slurry containing tungsten (conductor) is formed on the lower flat plate-shaped molding sheet (second molding sheet 92) by an ink jet in a predetermined pattern. And pressed with a comb-shaped molded sheet (first molded sheet 90) extruded from above (see FIG. 3).

  The obtained molded body (see FIG. 1 (a)) is dried, then processed to a width of 100 mm × 55 mm, a bonding material is applied on the flat surface side, and bonded to a molded body having an uncoated comb portion processed with the same dimensions. Then, 25 sheets were laminated by the same operation. An embedded plasma electrode unit molded product was obtained by drying in a dryer at 100 ° C. for 30 minutes. The obtained molded product was reduced and fired at 1600 ° C. for 1 hr to obtain an integrally laminated electrode unit (plasma generating electrode) (see FIG. 1C).

(Comparative Example 1)
The flat plates 101 and 104 and the protrusions 102 shown in FIG. 14B are made of the same dielectric material as in the first embodiment. After the conductive film 20 is printed on the flat plate 104 by the same method as in the first embodiment, the plates are integrally added. It pressure-molded and obtained the molded object shown to Fig.14 (a). In the same manner as in Example 1, 25 integrated laminated electrode units (plasma generating electrodes) were obtained (see FIG. 14C).

  Although the dielectric breakdown did not occur in the electrode unit of Example 1 even with a continuous energization pulse load of 8 kV for 100 hours, the electrode unit of Comparative Example 1 had a protruding portion in 30 hours in an 8 kV continuous energization pulse load test. Dielectric breakdown occurred at the edge.

(Example 2)
7% by weight of methylcellulose as a molding binder and 0.1% of MW-17 as a surfactant are added to 100 parts by weight of a blended raw material of 90% by weight of silicon nitride, 5% by weight of magnesium oxide and 5% by weight of yttrium oxide. 25% by weight of water was added to 5% by weight and kneaded to prepare a dielectric extruded material (dielectric material) having a hardness of 20.

  Kneading by adding 5% by weight of methylcellulose, 0.5% by weight of MW-17, and 20% by weight of water to 100 parts by weight of the blended raw material of 95% by weight of molybdenum and 5% by weight of silicon nitride, A conductive film extrusion material (conductive material) having a hardness of 25 was prepared.

  By extruding the material from the conductive film integrated extrusion die (die 63) shown in FIG. 12A, the both-comb integrated extrusion electrode molding (plasma generating electrode molding 19) shown in FIG. ) Was produced. A molded body 19 shown in FIG. 12B is embedded in a conductive film 20 having a thickness of 45 × 8 mm and a thickness of 0.02 mm, and has a height of 1 mm on both sides of the flat plate portion 8 having a thickness of 50 × 90 mm and a thickness of 0.5 mm. The protrusions 2 having a width of 0.65 mm are arranged at intervals of 5 mm. In addition, a 50 × 90 mm, flat-plate, integrally-extruded electrode molded body (a flat molded body with a conductive film embedded) having a thickness of 50 × 90 mm in which a conductive film having a thickness of 45 × 80 mm and a thickness of 0.02 mm is embedded is manufactured. did.

  Next, both comb-structured electrodes (plasma generating electrode molded body 19) and flat plate electrodes (flat molded body 30 with a conductive film embedded therein) were alternately laminated and laminated at 1700 ° C. in nitrogen for 4 hours. Was fired to obtain a 20-stage integrated laminated electrode unit (plasma generating electrode) (see FIG. 12C). In the lamination, a bonding material having the same composition as that of the dielectric material and having a moisture content adjusted to 60% by weight was applied to the lamination location.

(Comparative Example 2)
Using the dielectric material of Example 2, the flat plates 101 and 104 and the protrusion members 102 shown in FIG. 14B are produced in the same manner as in Comparative Example 1, and molybdenum paste is used on one side of the flat plate 104 as in Example 2. After printing the conductive film 20 having a pattern, it was integrally fired to obtain an integrated laminated electrode unit (plasma generating electrode) having the same size as that of Example 2 (see FIG. 14C).

  The electrode unit of Example 2 was subjected to a 30G vibration test at 600 ° C. for 100 hours, but no damage was found in the electrode unit. On the other hand, the electrode unit of Comparative Example 2 was subjected to a vibration test under the same conditions, but microcracks were observed at the end of the ridge portion in 3 hours.

(Example 3)
The plasma electrode molded body 17 shown in FIG. 4A was molded by the molding method shown in FIG. More specifically, 5% by weight of methylcellulose and 0.5% by weight of MW-17 were kneaded with 100 parts by weight of the cordierite raw material to prepare a dielectric extrusion material (dielectric material).

  1.0% by weight of cordierite, 7% by weight of ethyl cellulose as a binder, and 20% by weight of butyl carbitol as a solvent with respect to 100 parts by weight of a raw material in which 25% by weight of tungsten is mixed with 75% by weight of molybdenum. In addition to the above, a conductive film paste was prepared.

  A conductive film having a width of 90 mm and a length of 45 mm was printed at equal intervals on an extruded flat sheet (second molded sheet) having a width of 100 mm and a thickness of 0.4 mm made of a dielectric material.

  As shown in FIG. 5, the flat sheet (second molded sheet 92) on which the conductive film 20 is printed is rearward with respect to the extrusion direction of the extrusion die (mounted on the third extrusion molding machine 60). The conductor-embedded integral electrode molded body (plasma) having a comb-shaped protrusion on one side is inserted by extruding the fourth molded sheet 97 made of the dielectric material integrally at a speed synchronized with the extrusion speed of the dielectric material. A molded body for generating electrode) was obtained. In addition, the used extrusion die has a structure for extruding a molded body in which protrusions having a width of 120 mm, a flat plate portion thickness of 0.8 mm, and a width of 0.5 mm and a height of 0.5 mm are arranged at intervals of 5 mm. It is what you have.

  In order to provide the end surface terminal, a position a of 5 mm was cut from one end surface, and the embedded conductive film 20 end was exposed to the electrode end surface (see FIG. 4A). By applying a conductive film paste on the side, stacking 30 integrated electrodes, and firing at 1400 ° C. in a nitrogen-hydrogen reducing atmosphere, a 30-layer integrated stacked electrode unit (plasma generating electrode) can be obtained. (See FIG. 4 (c)).

(Comparative Example 3)
Using the dielectric material of Example 3, as in Comparative Example 1, the flat plates 101 and 104 and the protrusion member 102 shown in FIG. 14B were produced, and the same conductive material as in Example 3 was formed on one side of the flat plate 104. After the conductive film having the same pattern was printed, it was integrally fired to obtain an integrated laminated electrode unit (plasma generating electrode) having the same size as that of Example 3 (see FIG. 14C).

The electrode unit of Example 3 was subjected to 100 thermal cycle tests in which a high-temperature gas at 900 ° C. and a cooling gas at room temperature were alternately flowed at ³ Nm ³ / min at intervals of 10 minutes, but no damage was observed in the electrode unit. . On the other hand, the electrode unit of Comparative Example 2 was subjected to a thermal cycle test under the same conditions. However, at the fifteenth time, a crack starting from the ridge was found.

  The molded body for plasma generating electrode of the present invention, the molding method thereof, and the plasma generating electrode remove harmful components such as NOx, carbon fine particles, HC and CO contained therein from engine exhaust gas and various incinerator exhaust gases. However, it can be used to clean these exhaust gases discharged to the outside. And because it is possible to generate a uniform and stable plasma, it is possible to efficiently remove harmful components of exhaust gas, and because it has excellent heat resistance, it can be used at high temperatures for a long time. is there.

BRIEF DESCRIPTION OF THE DRAWINGS It shows an example of embodiment in the molded object for plasma generation electrodes of this invention, (a) is sectional drawing of a molded object, (b) is the 1st molded member which comprises the molded object of (a), and Sectional drawing of a 2nd shaping | molding member, (c) is sectional drawing of the plasma generating electrode (electrode unit) produced using the molded object of (a). The other example of embodiment in the molded object for plasma generation electrodes of this invention is shown, (a) is sectional drawing of a molded object, (b) is the 1st shaping | molding which comprises the molded object of (a). Sectional drawing of a member and a 2nd molded member, (c) is sectional drawing of the plasma generation electrode (electrode unit) produced using the molded object of (a). It is explanatory drawing which shows an example of the shaping | molding method of the molded object shown in FIG.1 and FIG.2. The further another example of embodiment in the molded object for plasma generation electrodes of this invention is shown, (a) is sectional drawing of a molded object, (b) is the 1st which comprises the molded object of (a). Sectional drawing of a shaping | molding member and a 2nd shaping | molding member, (c) is sectional drawing of the plasma generating electrode (electrode unit) produced using the molded object of (a). It is explanatory drawing which shows an example of the shaping | molding method of the molded object shown in FIG. The other example (1) of embodiment in the molded object for plasma generating electrodes of this invention is shown, (a) is sectional drawing of the nozzle | cap | die used at the time of shaping | molding, (b) is sectional drawing of a molded object, c) is a cross-sectional view of a plasma generating electrode (electrode unit) produced using the molded product of (a). It is AA sectional drawing of Fig.6 (a). It is BB sectional drawing of Fig.6 (a). It is CC sectional drawing of Fig.6 (a). It is DD sectional drawing of Fig.6 (a). It is EE sectional drawing of Fig.6 (a). The other example (2) of embodiment in the molded object for plasma generation electrodes of this invention is shown, (a) is sectional drawing of the nozzle | cap | die used at the time of shaping | molding, (b) is sectional drawing of a molded object, ( c) is a cross-sectional view of a plasma generating electrode (electrode unit) produced using the molded article of (b). Another example (3) of embodiment in the molded object for plasma generation electrodes of this invention is shown, (a) is sectional drawing of the nozzle | cap | die used at the time of shaping | molding, (b) is produced using (a). It is sectional drawing of the made plasma generating electrode (electrode unit). 1 shows an example of an embodiment of a molded body for a plasma generating electrode, in which (a) is a cross-sectional view of the molded body, and (b) is a separate flat plate portion and protruding portion from the molded body of (a). Sectional drawing of the 1st molded member and the 2nd molded member formed with the body, (c) is sectional drawing of the plasma generation electrode (electrode unit) produced using the molded object of (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 ... Projection part, 6,8 ... Flat plate part, 10 ... 1st shaping | molding member, 11, 12 ... 2nd shaping | molding member, 15-19 ... Molded object for plasma generating electrodes, 20 ... Conductive film, 30 ... Conductivity Plate-like molded body in which a film is embedded, 36, 40, 42, 43, 44, 46, 48 ... Plasma generating electrode (electrode unit), 50 ... Upper extruder, 52 ... Lower extruder, 53 ... conductive film forming device, 54 ... bonding layer forming device, 56 ... first transport line (transport line), 57 ... second transport line, 58a, 58b ... double roll, 59a, 59b ... crimp roll, 60 ... first Three extruders, 62, 63, 64 ... cap, 70 ... dielectric material supply hole, 71 ... first feed channel, 72 ... second feed channel, 74 ... conductive material feed hole, 76 ... Third feed flow path, 77 ... discharge flow path, 78 ... mouth outlet, 80 ... blade, 90 ... One molded sheet, 92 ... second molded sheet, 94 ... third molded sheet, 95, 96 ... laminated sheet, 97 ... fourth molded sheet, 98 ... laminated sheet, 100 ... molded article for plasma generating electrode, DESCRIPTION OF SYMBOLS 101 ... Flat plate part (flat plate), 102 ... Projection part (projection member), 103 ... 1st shaping | molding member, 104 ... 2nd shaping | molding member (flat plate).

Claims (12)

One extrusion molding machine integrally extrudes a first molded sheet made of a dielectric material having comb-shaped protrusions disposed on the surface of the flat plate portion, conveys the first molded sheet on the first conveyance line, and performs the extrusion molding. When the second molding sheet made of a flat plate-like dielectric material is extruded by the other extrusion molding machine arranged in parallel with the machine and conveyed on the second conveyance line, the first molding sheet or the second molding After the conductive film is formed in a predetermined pattern on the flat surface of the sheet, the first molded sheet and the second molded sheet are brought into close contact with each other, and the first molded sheet and the second molded sheet are connected to the conductive film. By pressing and integrating with a roll having a guide groove while interposing a film, the conductive film is embedded, and the surface of the flat plate part is a comb-like protrusion with a ridge part disposed in a comb shape. Cut the laminated sheet to the specified dimensions Method of forming a plasma generating electrode molded body. As a method for adhering said second molding seat of said first molding seat, forming a plasma generating electrode according to claim 1 using a twin roll having a guide groove so that ridges of the comb shape does not collapse Body molding method. The extrusion speeds of the respective molded sheets in the one extrusion molding machine and the other extrusion molding machine arranged in parallel therewith are synchronized with each other at a speed that can ensure the pattern formation time of the conductive film. A method for forming a molded body for a plasma generating electrode according to claim 1 or 2 . One extrusion molding machine integrally extrudes a first molded sheet made of a dielectric material having comb-shaped protrusions disposed on the surface of the flat plate portion, conveys the first molded sheet on the first conveyance line, and performs the extrusion molding. A second conveying line is formed by integrally extruding a third molding sheet made of a dielectric material having a comb-shaped protrusion on the back surface of the flat plate portion by another extrusion molding machine arranged in parallel with the machine. When the conductive film is formed in a predetermined pattern on the flat surface of either the first molded sheet or the third molded sheet, the first molded sheet and the third molded sheet are A comb-like shape in which the conductive film is embedded by pressing and integrating the first molded sheet and the third molded sheet using a roll having guide grooves while closely contacting and interposing the conductive film The laminated sheet of the predetermined dimensions Method of forming a plasma generating electrode molded body cutting. 5. The plasma generating electrode molding according to claim 4 , wherein a twin roll having a guide groove is used as a method for bringing the first molded sheet and the third molded sheet into close contact with each other so that the comb-shaped protrusions are not crushed. Body molding method. The extrusion speeds of the respective molded sheets in the one extrusion molding machine and the other extrusion molding machine arranged in parallel therewith are synchronized with each other at a speed that can ensure the pattern formation time of the conductive film. A method for forming a molded body for a plasma generating electrode according to claim 4 or 5 . When the second molding sheet made of a flat dielectric material is extruded by the first extruder and conveyed by the conveying line, the conductive film is formed in a predetermined pattern on the surface of the second molded sheet, A guide is formed by integrally extruding a fourth molded sheet made of a dielectric material , which is conveyed into a second extrusion molding machine, and has a comb-shaped protrusion on the surface of the flat plate portion on the second molded sheet. By pressing and integrating with the second molded sheet using a roll having a groove, the conductive film is embedded, and a comb-like protrusion is disposed on the surface of the flat plate portion. A method for forming a molded body for a plasma generating electrode, wherein a laminated sheet is integrally obtained, and the obtained laminated sheet is cut with a predetermined dimension. A predetermined pattern and thickness between the dielectric material in which the protrusions are arranged in a comb shape on the surface of the flat plate portion extruded from each feeding flow path and the dielectric material provided in the flat plate shape. The dielectric material and the conductive material are simultaneously extruded from a base disposed so that the conductive material disposed in the gap is interposed, and the conductive material is embedded in the dielectric material, and the flat plate portion A method for forming a plasma generating electrode molded body, wherein a plasma generating electrode molded body having a comb-shaped protrusion on one side is formed . The molded bodies molded by the molding method according to claim 8 do not have an interface or a gap between the protruding portion disposed in the comb shape of one molded body and the flat portion of the other molded body. A method for producing a plasma generating electrode , in which a flat molded body having a conductive film embedded in the uppermost surface or the lowermost surface of the obtained laminate is placed and then fired and integrated. A dielectric material having a comb-shaped protrusion on the surface of the flat plate portion extruded from each feed flow path, and a dielectric material having a comb-shaped protrusion on the back surface of the flat plate portion. The conductive material is embedded in the dielectric material by simultaneously extruding the dielectric material and the conductive material from a die disposed so that the conductive material arranged in a predetermined pattern and thickness is interposed therebetween. A method for forming a plasma generating electrode molded body, wherein the plasma generating electrode molded body has a structure and is formed with comb-shaped protrusions on both sides of a flat plate portion. On one side and / or both sides of the molded body formed by the molding method according to claim 10, while placing a conductive film buried plate-shaped molded body is molded by the molding method according to claim 10 a protruding portion disposed on the comb shape of the molded article, after the conductive film was laminated such interface or gap is not the flat portion of the buried plate-shaped body is fired and integrated A method for manufacturing a plasma generating electrode. Dielectric material with comb-shaped protrusions arranged on the surface of the flat plate part extruded from each feeding flow path, and comb-shaped protrusions arranged on the flat plate dielectric material or the back surface of the flat plate part By simultaneously extruding a plurality of pieces arranged in parallel with each other in the vertical direction, with a conductive material arranged in a predetermined pattern and thickness interposed between the dielectric material and the formed dielectric material. A method for producing a plasma generating electrode , wherein a unit molded body obtained by previously laminating a plurality of molded bodies is obtained and then fired and integrated .

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