JP2002289092A - Manufacturing method of gas discharge type display apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a gas discharge type display apparatus of which process is simple in forming dielectric layer or partition substrate layer or partition, using green sheet, and which allow restraining generation of bubble in dielectric layer formed without necessity of much energy when burning. SOLUTION: A process forming dielectric layer 13 comprised a first laminate step laminating a first green sheet 110 in a closed room 103 of reduced pressure atmosphere, a second laminate step laminating a second green sheet 120, and a burning step burning the second green sheet 120.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a gas discharge type display device such as a plasma display panel.

[0002]

2. Description of the Related Art A typical plasma display panel (hereinafter, referred to as a PDP) as a gas discharge type display device.
Is manufactured, for example, as follows. A display electrode is formed on a front glass substrate, and a dielectric layer made of dielectric glass and a protective film are formed thereon.

On the other hand, an address electrode is formed on a rear glass substrate, a dielectric layer also serving as a partition base layer is formed thereon, and a partition is further formed thereon. And between the partitions,
Each color phosphor paste is applied and baked to remove resin components and the like in the paste, so that each color phosphor layer (R, G,
Form B). After the phosphor is fired, a sealing glass frit is applied to the outer peripheral portion of the front glass substrate or the rear glass substrate to form a sealing glass layer, and both substrates are stacked and heated to be sealed. Then, after exhausting the internal space, the discharge gas is sealed.

As a method of forming a dielectric layer, a method of applying a paste containing a dielectric glass material by a screen printing method or a die coating method and baking the applied film has been widely used. However, a method of laminating and firing a green sheet containing a dielectric material is also known. When forming the dielectric layer, when comparing the case of using the printing method or the die coating method and the case of using the green sheet method, in the case of the printing method or the die coating method,
While the three steps of the coating step, the drying step, and the baking step are required, the green sheet method is simple because it requires only two steps of the laminating step and the baking step. Further, the green sheet method is easier to form a dielectric layer having a uniform film thickness, and the green sheet is easier to store than the paste.

As a method of forming the partition walls, a method of applying a glass paste at a predetermined pitch and baking it is known. In addition, a green sheet containing a partition wall material is laminated and unnecessary by sandblasting. There is also known a method of forming a partition by removing a portion and firing the portion.

[0006]

However, since there is a step at the electrode edge on the substrate on which the electrode is formed, when the green sheet is laminated over the electrode, air is drawn into the edge. Cheap. When air is entrained, bubbles are generated between the electrodes in the formed dielectric layer and the partition walls, which causes problems such as poor withstand voltage and attenuated transmittance of discharge light.

In order to solve such a problem, for example, as disclosed in Japanese Patent Application Laid-Open No. H11-65481, a liquid or semi-liquid dielectric material is applied to a substrate in advance, and a dielectric green sheet is formed. There is also a lamination technique, which is effective in suppressing the generation of air bubbles. However, in this case, a step of applying a flowable dielectric material is required, so that the simplicity of the step is lost.

On the other hand, it is thought that the generation of bubbles can be suppressed by increasing the plasticizer content in the green sheet to increase the flexibility. It requires a lot of time and energy. In view of these problems, the present invention provides a simple process for forming a dielectric layer, a partition base layer, or a partition using a green sheet, and does not require much energy during firing. An object of the present invention is to provide a method of manufacturing a gas discharge display device that can suppress generation of bubbles in a body layer or the like.

[0009]

In order to achieve the above object, in the method for manufacturing a gas discharge type display device according to the present invention, a green sheet is laminated on a substrate provided with electrodes so as to cover the electrodes. In the process of forming a dielectric layer, a partition underlayer or a partition, which comprises a stacking step of performing and a firing step of firing the stacked green sheets,
The laminating step was performed under a reduced pressure atmosphere.

In the laminating step, when laminating the green sheets a plurality of times, at least the first lamination of the green sheets during the lamination is performed in a reduced pressure atmosphere. Thus, if the laminating step is performed under a reduced pressure atmosphere, even if air is involved in laminating the green sheet on the substrate provided with the electrodes, when the air is returned to the atmospheric pressure atmosphere, it is involved. Since the volume of the generated air is reduced, generation of bubbles in the formed dielectric layer, partition base layer, or partition can be suppressed.

Here, in order to obtain a sufficient effect, it is preferable that the pressure of the reduced pressure atmosphere is 1/10 or less of the atmospheric pressure.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [Embodiment 1] A method for manufacturing a gas discharge type display device according to the present invention will be described with reference to an AC surface discharge type PDP.
An example of the method will be described. FIG. 1 is a perspective view showing an AC surface discharge type PDP according to this embodiment. This PDP is manufactured as follows.

(Overall manufacturing method) A photosensitive silver paste is applied to the front glass substrate 11 and exposed, developed,
The display electrode 12 is formed by firing, and a dielectric layer 13 made of dielectric glass and a protective film 14 are formed thereon. On the other hand, a silver paste is applied and baked on a rear glass substrate 21 to form an address electrode 22, and a dielectric layer 23 is formed thereon.
Is formed, and a partition 24 is further formed thereon. Then, a phosphor paste of each color is applied between the partition walls 24, and 500 ° C.
The phosphor layers 25 (R, G, B) of the respective colors are formed by removing the resin components and the like in the paste by baking at a degree.

After the phosphor is fired, a sealing glass frit is applied to the outer peripheral portion of the front glass substrate 11 or the rear glass substrate 21 to form a sealing glass layer, and the substrates are superposed and heated to be sealed. . And the internal space 30
After exhausting the gas, a discharge gas is sealed. The dielectric layer 2
Reference numeral 3 also plays a role as an underlayer for forming a partition thereon. In addition, the dielectric layer 23 contains titanium oxide, which is a white pigment, in addition to the dielectric glass, and also serves as a reflective layer that reflects visible light.

(Regarding Method of Forming Dielectric Layer 13 and Dielectric Layer 23) The dielectric layer 13 and the dielectric layer 23 are basically formed of a green sheet containing dielectric glass so as to cover an electrode on a substrate. Is formed by laminating under a reduced pressure atmosphere, and firing the laminated green sheet. Hereinafter, a method of forming the dielectric layer 13 on the front glass substrate 11 on which the display electrodes 12 are formed will be described in detail.
The method for forming the dielectric layer 23 on the substrate 1 is the same.

The step of forming the dielectric layer 13 is shown in FIG.
As shown in FIG. 2A, a first laminating step of laminating the first green sheet 110, as shown in FIG. 2B, a second laminating step of laminating the second green sheet 120, and as shown in FIG. And a firing step of firing the first green sheet 110 and the second green sheet 120 laminated on each other.

(Description of First Green Sheet and Second Green Sheet) First, the first green sheet 110 used in the first laminating step and the second green sheet 120 used in the second laminating step will be described. The first green sheet 110 and the second green sheet 120 have the same composition as a conventionally used green sheet, and include a glass powder, a thermoplastic resin,
The mixture obtained by mixing the plasticizer is formed into a sheet.

Glass powder is a main component for forming a dielectric layer. In addition to PbO—B ₂ O ₃ —SiO ₂ , Pb
O—B ₂ O ₃ —SiO ₂ —ZnO system, PbO—B ₂ O ₃ —S
iO ₂ —ZnO— (BaO + CaO) system, ZnO—Bi ₂
An O ₃ —B ₂ O ₃ —SiO ₂ — (CaO + SrO + BaO) system or the like may be used, or a mixture of these may be used.

The thermoplastic resin is used to form a sheet and enable lamination.
In addition to the polybutyl methacrylate resin, a polymethyl methacrylate resin, a polyvinyl butyral resin, an ethyl cellulose resin, or the like can be used, and these may be used as a mixture. The plasticizer plays a role of imparting flexibility to the sheet.In addition to dioctyl phthalate, butylbenzyl phthalate, diisooctyl phthalate, dicapryl phthalate, dibutyl phthalate, and the like can also be used. May be used.

Here, different types of glass powder, thermoplastic resin, and plasticizer may be used for the first green sheet 110 and the second green sheet 120. Here, the same type is used. Specifically, the dielectric glass has a composition of PbO-
B ₂ O ₃ —SiO ₂ having a softening point of 560 ° C. is used, a polybutyl methacrylate resin is used as a thermoplastic resin, and dioctyl phthalate is used as a plasticizer.

(Description of Each Step) First Laminating Step: In this step, the first green sheet 110 is laminated under a reduced pressure atmosphere on the front glass substrate 11 on which the display electrodes 12 are formed. Specifically, this is performed using a laminating apparatus as shown in FIG.

This laminating apparatus is configured such that a pair of laminator rollers 101 and 102 are housed in a closed chamber 103, and the inside of the closed chamber 103 can be set to a reduced pressure atmosphere by a vacuum pump 104. Although not shown, the first green sheet is wound in a roll shape in the closed chamber 103, and the first green sheet 110 is supplied from there. Further, as the vacuum pump 104, a vacuum pump generally used in industry, for example, a rotary vacuum pump may be used.

Then, the front glass substrate 11 on which the display electrodes 12 are formed is heated to 80 ° C. to 120 ° C., placed in a closed chamber 103, and the closed chamber 103 is set to a reduced-pressure atmosphere, and the first green sheet 110 Is pressed at a pressure of 2.5 kg / cm ² by passing between a pair of laminator rollers 101 and 102 at a speed of 1 m / min.

Second laminating step: FIG. 2 (b)
It is a figure showing a situation of this 2nd lamination. In the second lamination, the second green sheet 1 is placed on the front glass substrate 11 on which the first green sheet 110 is laminated.
Laminate 20. Specifically, it is the same as the first laminating step, in which the front glass substrate 11 on which the first green sheet 110 is laminated is heated, and FIG.
As shown in (b), the second green sheet 120
While laminating a pair of laminator rollers 101.1
It is pressed by passing through the space between the two.

The second laminating step is performed under atmospheric pressure, but may be performed under a reduced pressure atmosphere as in the first laminating step. Firing step: FIG. 2 (c) is a view showing the state of firing. First green sheet 110, second green sheet 1
The front glass substrate 11 on which 20 is laminated is fired by heating in the air.

The firing temperature is higher than both the softening point of the dielectric glass contained in the first green sheet and the softening point of the dielectric glass contained in the second green sheet. The time is sufficient for the resin component to be burned off. If the softening point of the dielectric glass contained in the green sheet is 550 ° C., the firing is performed at a firing temperature of 570 ° C. for 10 minutes, for example.

By firing as described above, the resin components in the first green sheet 110 and the second green sheet 120 are burned off, and the dielectric glass is sintered.
The dielectric layer 13 is formed as shown in FIG. In addition,
Since the green sheet contracts in this firing step, the thickness of the dielectric layer 13 is usually about half of the total thickness of the first and second green sheets. In consideration of this point, for example, when the thickness of the dielectric layer 13 is set to 30 μm, the thickness of the first green sheet 110 to be used and the thickness of the second
The total thickness of the green sheets 120 is set to be about 60 μm.

(Explanation of Effect) According to the method of forming the dielectric layer 13 as described above, as described below,
The process is relatively simple, does not require much energy during firing, and can suppress generation of bubbles in the dielectric layer due to entrainment of air. FIG. 3 is a view showing a process of forming the dielectric layer 313 by a conventional general green sheet method.

In this case, a green sheet 310 mainly composed of a dielectric material is laminated on the front glass substrate 11 on which the display electrodes 12 are formed as shown in FIG. The dielectric layer 1 as shown in FIG.
3, the edge 12a of the display electrode 12 has a step corresponding to the thickness of the display electrode 12. Therefore, when the green sheet 310 is laminated as shown in FIG. It is easy to get caught up and create a gap.

And the air entrapped in this way is
Since it is hard to come out even during the firing shown in (b),
The formed dielectric layer 313 also remains as bubbles 310a. Here, for example, the green sheet 31
If the flexibility is increased by setting the content of the plasticizer 0 to be large, it is possible to suppress the air from being entrained. Sometimes it takes a lot of time and energy.

On the other hand, in the dielectric layer forming method of the present embodiment, the first laminating step is performed under a reduced pressure atmosphere, so that the first green layer is temporarily provided on the front glass substrate 11 on which the display electrodes 12 are provided. Even if air is entrained when the sheets 110 are stacked, the volume is reduced when the sheet 110 is returned to the atmospheric pressure atmosphere, so that generation of bubbles is suppressed.

In laminating the second green sheet 120 in the second laminating step, the first green sheet 110 is already covered on the electrode, and there is a step on the surface of the first green sheet 110. Even at low atmospheric pressure, no air is trapped. Therefore, bubbles are not easily generated in the dielectric layer 13 formed by this method.

The first green sheet 110 and the second green sheet 110
Even if the green sheet 120 has the same composition as a conventionally used green sheet, a sufficient effect can be obtained, and in that respect, it is practical. In addition, in terms of the device, it is only necessary to add a device for forming a vacuum atmosphere to the conventional laminating device, and the burden on the device is relatively small.

(Consideration of Decompression Degree, Green Sheet Composition, and Modifications) In the first laminating step, the degree of depressurization of the closed chamber 103 must be reduced with respect to atmospheric pressure in order to obtain a sufficient bubble generation suppressing effect. 1/10
It is necessary to do the following. A higher effect can be obtained by setting the vacuum as high as possible. However, considering the degree of vacuum that can be achieved by a commonly used vacuum pump, 10
It is considered preferable to reduce the pressure to about 0 Pa to 1000 Pa.

Further, in order to further improve the bubble suppressing effect, the first green sheet 110 is set so that the mixing ratio of the plasticizer is larger than the mixing ratio of the plasticizer in the second green sheet 120, whereby the first green sheet 110 is formed. It is also preferable to adjust so that the flexibility of the sheet 110 is increased. This is because the flexibility of the first green sheet 110 is increased to prevent air from being trapped in the first laminating step, and the plasticizer content in the second green sheet 120 is suppressed to a relatively low level. This is because the content of the plasticizer contained in the entire sheet can be kept low, and the consumption of much time and energy during firing can be suppressed. In this case, by setting the thickness of the second green sheet 120 to be larger than the thickness of the first green sheet 110,
The plasticizer content contained in the entire green sheet can be further reduced.

In the above description, the first laminating step and the second laminating step and the two laminating steps are performed. First, the first green sheet 110 and the second
The same effect can be obtained by laminating the green sheet 120 to produce a laminated green sheet, and laminating the laminated green sheet on a glass substrate on which electrodes are formed under a reduced pressure atmosphere. Play.

In the above description, a plurality of green sheets (a first green sheet and a second green sheet) are used. However, on a glass substrate on which electrodes are formed,
Even in the case of laminating only one green sheet, if the lamination is performed under a reduced pressure atmosphere, the effect of suppressing bubble generation can be obtained as compared with the case where the lamination is performed under a normal atmospheric pressure. (Consideration of atmosphere during firing) The firing step is performed in a firing furnace, and oxygen or dry air is forcibly flowed into the firing furnace to form an atmosphere containing sufficient oxygen during firing. Is preferred.

The reason is as follows. Generally, most of the organic matter in the green sheet is burned when the temperature is raised, but in an atmosphere where oxygen is insufficient, the combustion of the organic matter becomes insufficient, so that the organic matter and carbon remain or tar on the inner wall of the furnace. May adhere. On the other hand, when an atmosphere containing sufficient oxygen is formed at the time of firing, the combustion of organic substances is promoted, and the organic substances and carbon hardly remain in the dielectric layer after firing. A dielectric layer with a high voltage can be formed. Further, since tar adhering to the inner wall of the firing furnace can be reduced, the management of the firing furnace is also facilitated.

The flow rate of oxygen and dry air flowing through the firing furnace depends on the size of the firing furnace. In addition, oxygen and dry air are at a temperature between room temperature and the completion temperature of combustion of the plasticizer (5
It is preferable that the gas is circulated only in an atmosphere at a temperature of 50 ° C.) and not circulated in a range exceeding the combustion completion temperature without waste. Further, when oxygen or dry air is supplied while the inside of the firing furnace is pressurized to a pressure higher than the atmospheric pressure, the oxygen partial pressure can be increased. Therefore, the combustion reaction is promoted, and the effect of reducing organic substances and carbon remaining in the dielectric layer after firing is enhanced. [Second Embodiment] In the first embodiment, the case where the dielectric layer is formed has been described. In the present embodiment, the case where the partition wall is formed will be described.

That is, conventionally, a method of laminating a green sheet containing a partition wall material, removing unnecessary portions by sandblasting, and baking to form a partition wall is known. When laminating the green sheet, the first embodiment is used.
The method described in can be applied. In this case, the process is relatively simple, and a large amount of energy is not required at the time of firing, and it is possible to suppress generation of air bubbles in the partition layer due to entrainment of air.

Hereinafter, the method for forming the partition wall will be specifically described. First, in the same manner as described in the first embodiment, as shown in FIG. 4A, a first green sheet 210 and a second green sheet are formed on a back glass substrate 21 on which an address electrode 22 is formed. Laminate 220. The first green sheet 210 and the second green sheet 220 are formed by mixing partition wall material powder, a thermoplastic resin, a plasticizer, and the like, like the first green sheet 110 and the second green sheet 120 used in the above embodiment. In addition to the glass powder, a filler powder (aggregate) made of alumina and a pigment powder made of titanium oxide (TiO2) are added to the partition wall material powder.

In the first green sheet 210, the plasticizer content is set large to increase flexibility, and the second green sheet 210
The green sheet 220 has a smaller plasticizer content than the first green sheet 210. The first green sheet 210 and the second green sheet 2 used
The total thickness of 20 is set according to the height of the partition to be formed. Normally, the height of the partition wall is considerably larger than that of the dielectric layer. Therefore, the total thickness is set to be much larger than the total thickness of the first green sheet 110 and the second green sheet 120 used in the first and second embodiments. Will be.

However, in order to keep the overall plasticizer content as low as possible, the thickness of the first green sheet 210 is
As with the first green sheet 110, it is preferable that the thickness is set as thin as possible, and the second green sheet 120 is set as thick as possible. Next, as shown in FIG. 4B, a coating film 230 is formed by laminating a photosensitive dry film resist (hereinafter, referred to as DFR) on the green sheets 210 and 220 laminated as described above. Is formed, and a photomask 240 that covers only the portion corresponding to the partition pattern is placed on the coating film 230, and exposure is performed by irradiating ultraviolet light (UV light).

Next, development is performed using a developing solution of a 1% aqueous solution of sodium carbonate, and washing is performed immediately after development. As a result, as shown in FIG.
The portion irradiated with V is removed, and only the portion corresponding to the partition pattern remains. After the patterning of the coating film 230 as described above, unnecessary portions are scraped off by sandblasting the green sheets 210 and 220.

More specifically, as shown in FIG. 4D, while the abrasive (eg, glass bead material) 251 is jetted from the blast nozzle 250,
Is scanned over the entire surface along the surface of the coating film 230 as shown by the white arrow in the figure. As a result, the green sheets 210 and 220 are blasted only in the area where the coating film 230 has been removed, and are cut off.

Although the blasting depth is reduced to the vicinity of the boundary between the first green sheet 210 and the second green sheet 220 in the figure, the blasting depth may be reduced to a lower part of the green sheet 220. Then, the cutting may be performed until the first green sheet 210 penetrates further deeply. The backing glass substrate 21 that has been blasted as described above is immersed in a stripping solution (for example, a 5% aqueous sodium hydroxide solution) to strip the coating film 230. FIG. 4E shows the green sheet 21 thus obtained.
0, 220 shows a state of being patterned into a partition shape (partition layer before firing).

Next, in the firing step, the rear glass substrate 21 from which the coating film has been peeled off is heated to a temperature at which the peak temperature is slightly higher than the softening temperature of the glass powder in the partition wall material (about 55 ° C.).
(0 ° C.) in a firing furnace in which a profile is formed. Thereby, the partition wall material in the patterned green sheets 210 and 220 (pre-fired partition layer) is sintered, and a partition layer 224 is formed as shown in FIG.

The partition layer 224 thus formed is formed as follows.
Corresponds to the combination of the dielectric layer 23 and the partition 24 in FIG. According to the above-described partition wall forming method of the present embodiment, it is difficult for air to be caught in the edge portion of the address electrode 22 during lamination, and a large amount of energy is not required during firing.

In this embodiment, an example is shown in which the sand blast method is used to form the partition wall shape. However, the same applies to the case where the partition wall shape is formed by photolithography using a photosensitive green sheet. can do. Also,
The consideration of the degree of reduced pressure, the composition of the green sheet, and the like, the modification, and the consideration of the atmosphere during firing described in the first embodiment can be applied to the present embodiment as it is. (Other Matters) In the above embodiment, the firing temperature is set to be about 10 ° C. higher than the softening point of the glass material.
If firing is performed at a temperature as high as about ° C., air can easily escape from the film during firing, so that it can be expected that bubbles can be further reduced. However, in this case, the energy consumption in the firing furnace is increased, and the firing time is required longer.

In the above embodiment, the AC surface discharge type PDP
However, the present invention is directed to a facing discharge type PD
P, DC type PDP, etc.

[0051]

As described above, the present invention provides a laminating step of laminating a green sheet on a substrate provided with electrodes so as to cover the electrodes, and a firing step of firing the laminated green sheets. The laminating step is performed under reduced pressure atmosphere in the process of forming the dielectric layer, the partition underlayer or the partition comprising the steps, or in the case of laminating the green sheets a plurality of times in the laminating step, By performing the process under a reduced pressure atmosphere at least at the time of stacking the green sheets for the first time, it is possible to suppress the generation of bubbles in the formed dielectric layer, partition base layer or partition.

In particular, using this method for forming a dielectric layer is advantageous in that a dielectric layer having a high withstand voltage can be formed relatively easily.

[Brief description of the drawings]

FIG. 1 is a perspective view of an AC type PDP according to an embodiment.

FIG. 2 is a diagram illustrating a dielectric forming method according to the first embodiment;

FIG. 3 is a view showing a conventional method of forming a dielectric layer by a green sheet method.

FIG. 4 is a diagram illustrating a dielectric forming method according to a second embodiment;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Front glass substrate 12 Display electrode 13 Dielectric layer 14 Protective film 21 Back glass substrate 22 Address electrode 23 Dielectric layer 24 Partition 101, 102 Laminator roller 103 Sealed room 104 Vacuum pump 110, 210 First green sheet 120, 220 Second Glee sheet 224 Partition layer

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Kazuya Hasegawa 1006 Kazuma Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. F term (reference) 5C027 AA05 AA09 5C040 GD09 GF19 JA09 JA17 JA22 JA28 LA17 MA23 MA26

Claims (9)

[Claims] 1. A dielectric material comprising: a laminating step of laminating a green sheet containing a dielectric material on a base material provided with electrodes so as to cover the electrodes; and a firing step of firing the laminated green sheets. A method for manufacturing a gas discharge type display device comprising a layer forming step, wherein the laminating step is performed in a reduced pressure atmosphere. 2. A laminating step of laminating a green sheet containing a dielectric material a plurality of times on a substrate on which electrodes are provided so as to cover the electrodes, and a firing step of firing the laminated green sheets. A method for manufacturing a gas discharge type display device comprising a dielectric layer forming step, wherein the laminating step is performed in a reduced-pressure atmosphere when at least the first green sheet is laminated among a plurality of laminated green sheets. A method for manufacturing a gas discharge type display device, comprising: 3. A dielectric material comprising: a laminating step of laminating a green sheet containing a partition wall base material on a substrate provided with electrodes so as to cover the electrodes; and a firing step of firing the laminated green sheets. A method for manufacturing a gas discharge type display device comprising a base layer forming step, wherein the laminating step is performed in a reduced pressure atmosphere. 4. A laminating step of laminating a green sheet containing a partition wall base material a plurality of times on a substrate provided with electrodes so as to cover the electrodes, and a firing step of firing the laminated green sheets. A method for manufacturing a gas discharge display device, comprising: forming a partition underlayer forming step, wherein the laminating step is performed in a reduced-pressure atmosphere when at least the first green sheet is laminated among a plurality of laminated green sheets. A method for manufacturing a gas discharge type display device, comprising: 5. A laminating step of laminating a green sheet containing a barrier rib material on a substrate provided with electrodes so as to cover the electrodes, and a removing step of removing unnecessary portions in the laminated green sheets. A method for manufacturing a gas discharge type display device comprising a partition wall forming step comprising a firing step of firing a laminated green sheet, wherein the laminating step is performed in a reduced pressure atmosphere. Manufacturing method. 6. A laminating step of laminating a green sheet including a partition wall material a plurality of times on a substrate provided with electrodes so as to cover the electrodes, and a removing step of removing unnecessary portions in the laminated green sheets. And a baking step of baking the stacked green sheets. The method of manufacturing a gas discharge display device, further comprising: a baking step of baking the stacked green sheets. A method for manufacturing a gas discharge type display device, comprising: stacking sheets under a reduced pressure atmosphere. 7. The gas discharge type display device according to claim 1, wherein the pressure of the reduced pressure atmosphere in the laminating step is 1/10 or less with respect to the atmospheric pressure. Production method. 8. The method for manufacturing a gas discharge display device according to claim 1, wherein in the firing step, firing is performed in an atmosphere containing more oxygen than in the air. . 9. The method according to claim 1, wherein in the firing step, firing is performed in dry air.