JP4519517B2 - Precision high speed moving method and apparatus using composite piezo element - Google Patents

Description

  The present invention relates to a precision moving mechanism, and more particularly to a precise high speed moving method and apparatus using a composite piezo element that can be used as a moving mechanism of a sample in a microscope.

So far, the following has been disclosed as a mechanism for moving a moving body by rapid deformation of a shear piezoelectric element (see Non-Patent Document 1 below).
FIG. 19 is a schematic view of a mechanism for moving a moving body by rapid deformation of such a conventional shear piezoelectric element.
As shown in this figure, conventionally, a piezo element 103 that is displaced in a shearing direction is sandwiched between a main body 101 and a leg 102 and a sawtooth wave voltage is applied to the piezo element 103 to cause movement. .
Ph. Niedermann, R.A. Emch, and P.M. Descouts, Rev. Sci. Instrum. 59, 368, (1988).

However, the above-described mechanism for moving the moving body by rapid deformation of the shear piezoelectric element has problems such as a narrow selection range of the pressing pressure on the sliding surface and a low moving speed.
In view of the above situation, the present invention combines a piezo element that causes shear deformation and a piezo element that causes longitudinal deformation, and uses a composite piezo element that can move even when pressure is applied to a large sliding surface. An object is to provide a high-speed moving method and apparatus.

In order to achieve the above object, the present invention provides
[ 1 ] A fixed body, a laminated piezo element that is disposed so as to be in contact with the fixed body, and is formed by bonding a piezo element that undergoes shear deformation and a piezo element that undergoes longitudinal deformation, and a movable body provided in the laminated piezo element And a precision high-speed moving method using a composite piezo element using the driving means of the laminated piezo element that moves the moving body with respect to the fixed body, so that the fixed body forms a wall surface and a ceiling surface. A movable body that is disposed and fixed to the laminated piezoelectric element corresponding to the wall surface and the ceiling surface is disposed .

[ 2 ] In the precision high-speed movement method using the composite piezo element according to [1] above, the movement of the moving body is a shear deformation movement or ultrasonic motor mode movement by generation of an elliptic wave.
[ 3 ] A fixed body, a laminated piezo element which is disposed so as to be in contact with the fixed body and which is bonded to a piezo element which causes shear deformation and a piezo element which causes longitudinal deformation, and a movable body provided in the laminated piezo element And a precision high-speed moving device using a composite piezo element comprising the driving means for the laminated piezo element that moves the movable body relative to the fixed body, so that the fixed body forms a wall surface and a ceiling surface. And a movable body that is disposed and fixed to the laminated piezo element corresponding to the wall surface and the ceiling surface.

  Since the present invention can select a surface pressure with respect to a larger sliding surface as compared with a moving mechanism that moves a moving body by rapid deformation of a conventional shear piezoelectric element, a larger load can be moved. In addition, by generating elliptical vibration using a shear piezoelectric element and a longitudinally deformed piezoelectric element, high-speed displacement as an ultrasonic motor is possible.

A fixed body, a laminated piezo element that is disposed in contact with the fixed body, and is formed by bonding a piezo element that causes shear deformation and a piezo element that causes longitudinal deformation; a movable body provided in the laminated piezo element; In a precision high-speed moving device using a composite piezo element comprising a driving means for the laminated piezo element that moves a moving body relative to the fixed body, the fixed body is disposed so as to form a wall surface and a ceiling surface. A movable body fixed to the laminated piezoelectric element corresponding to each of the wall surface and the ceiling surface; As a result, it is possible to move even when pressing pressure is applied to a large sliding surface, and by adjusting the mutual phase of piezo elements that are displaced vertically and horizontally, a laminated piezo that can also be used as a bidirectional ultrasonic motor. An element is provided.

  A positioning resolution of 1 nm order and a high moving speed of cm / s order can be realized.

Hereinafter, embodiments of the present invention will be described in detail.
FIG. 1 is a schematic view of a precise high-speed moving mechanism using a composite piezo element showing a first reference example of the present invention.
In this figure, 1 is a fixed body (base), 2 is a laminated piezo element in which a shear piezo element 2A and a longitudinally deformed piezo element 2B are bonded together, and 3 is a moving body (load) fixed on the laminated piezo element 2. Reference numeral 4 denotes a driving means for driving the laminated piezo element 2. For example, a laminated piezo element is applied with a sawtooth drive pulse (see FIGS. 2 and 4 to be described later) or a Mt. Fuji-shaped drive pulse (see FIG. 6 to be described later). 2 is applied to the laminated piezo element 2 to perform a step operation by rapid deformation.

In addition, as will be described in detail, an elliptic wave is generated by applying a sine wave and a cosine wave to the laminated piezo element 2 by the driving means 4, and the moving body 3 is fixed to the fixed body 1 by the ultrasonic motor mode. It can also be moved at high speed.
Although not shown, a laminated piezo element in which a piezo element causing shear deformation and a piezo element causing longitudinal deformation are bonded to the fixed body shown in FIG. 1 is provided, and the moving body is driven by driving the laminated piezo element. You may make it move with respect to a fixed body.
(First driving mode of precision high-speed moving mechanism)
FIG. 2 is a diagram showing an example of a driving pulse of a composite piezo element by a precise high speed moving mechanism using the composite piezo element, and FIG. 3 is a schematic diagram showing a moving mode of a moving body of the precise high speed moving mechanism.

In this reference embodiment, a case will be described in which the longitudinally deforming piezo element 2B first performs an extending operation.
First, as shown in FIG. 3A, the moving body 3 is provided on the laminated piezo element 2 in which the shear piezo element 2 </ b> A and the longitudinally deformed piezo element 2 </ b> B are bonded, and is placed on the fixed body 1.
Next, when a drive pulse as shown in FIG. 2 (a) is applied to the shear piezoelectric element 2A and a drive pulse as shown in FIG. 2 (b) is applied to the longitudinally deformed piezoelectric element 2B, FIG. 3 (b). As shown in FIG. 3, first, the moving body 3 moves in accordance with the deformation of the shear piezoelectric element 2A, and then the longitudinal deformation piezoelectric element 2B extends to lift the moving body 3.

Then, as shown in FIG. 3C, first, the longitudinally deforming piezo element 2B rapidly shrinks, and the shearing piezo element 2A rapidly deforms to the right when the movable body 3 falls, so that the original shape, Or, it returns to the preparation posture for the next operation (cycle), and the movement of one step is completed.
According to the first reference example of the present invention described above, the moving speed and load resistance can be greatly improved as compared with the moving mechanism using the shear deformation of the conventional piezo element, and the positioning resolution of 1 nm order and cm A high moving speed on the order of / s can be realized.

(Second driving mode of precision high-speed moving mechanism)
FIG. 4 is a diagram showing an example of a driving pulse of a composite piezo element by a precision high-speed movement mechanism using the composite piezo element, and FIG. 5 is a schematic diagram showing a movement mode of the precision high-speed movement mechanism.
In this reference embodiment, a case where the longitudinally deforming piezo element 2B first performs a contracting operation will be described.

First, as shown in FIG. 5A, the moving body 3 is provided on the laminated piezo element 2 in which the shear piezo element 2 </ b> A and the longitudinally deformed piezo element 2 </ b> B are bonded, and is placed on the fixed body 1.
Next, when a drive pulse as shown in FIG. 4 (a) is applied to the shear piezoelectric element 2A and a drive pulse as shown in FIG. 4 (b) is applied to the longitudinally deformed piezoelectric element 2B, FIG. 3 (b) shows. As shown, first, the moving body 3 moves with the deformation of the shear piezo element 2A to the left, and the longitudinally deformed piezo element 2B contracts.

And as shown in FIG.5 (c), when the vertical deformation | transformation piezoelectric element 2B expand | extends rapidly and the mobile body 3 raises, the shear piezoelectric element 2A deform | transforms to the right, or an original shape or Returning to the preparation posture for the next operation (cycle), the movement of one step is completed.
As described above, this moving mode is such that the moving body 3 is slowly displaced to the left by the shear piezo element 2A, and the longitudinally deformed piezo element 2B is shrunk, thereby creating a place where it can be said to fly, and suddenly the longitudinally deformed piezo element suddenly changes. The element 2B is extended, and the sheared piezoelectric element 2A is returned to the original posture. The relative displacement of the sliding surface is caused at the moment when the surface pressure increases or weakens due to the time difference between the two operations.

FIG. 6 is a diagram showing drive pulses showing another reference example of the present invention.
In the above reference example, an example in which a sawtooth pulse is applied as a drive pulse has been shown. However, as in this reference example, as a drive pulse for a precision high-speed movement mechanism, Mt. Fuji with the apex upward and downward as shown in FIG. The moving body 3 can be moved even when the drive pulses 18 and 18 ′ having the shapes are applied. The Mt. Fuji-shaped drive pulses 18, 18 'have a steep slope toward the top, and the summit has a folded shape that is not flat.

By applying such a drive pulse (sawtooth shape, Mt. Fuji shape), as shown in FIG. 7, the shear deformation by the shear piezoelectric element 2A and the vertical deformation by the longitudinal deformation piezoelectric element 2B are performed rapidly and with an appropriate time difference. Accordingly, a driving force F ₁ that generates a sudden drag F ₁ obliquely downward, for example, like a kite fly, and thus has a high surface pressure on the sliding surface of the fixed body (base) 1, is against the drag F _1. F ₂ is added to the moving body 3 so that the moving body 3 can be moved in the right direction.

FIG. 8 is a schematic view of a precision high-speed moving mechanism using a composite piezoelectric element showing a second reference example of the present invention.
In this figure, 11 is a fixed body (base), 12 is a laminated piezo element in which a shear piezo element 12A and a longitudinally deformed piezo element 12B are bonded together, 13 is a movable body fixed to those laminated piezo elements 12, and 14 is The stud bolt is fixed to the moving body 13 and has a spring 15 disposed at the end thereof, and constitutes a load applying device for applying a load to the moving body 13 when the moving body 13 is stationary. The fixed body (base) 11 is formed with a vertical hole (not shown) that allows the stud bolt 14 to move. Reference numeral 16 denotes a driving means for driving the laminated piezo element 12 so that a sawtooth pulse signal is applied to the laminated piezo element 12.

FIG. 9 is a schematic view of a precision high-speed moving mechanism using a composite piezo element showing a third reference example of the present invention.
In this figure, 21 and 22 are fixed bodies (bases), 23 and 24 are laminated piezoelectric elements obtained by bonding shear piezoelectric elements 23A and 24A and longitudinally deformed piezoelectric elements 23B and 24B, respectively, and 25 is a laminated piezoelectric element 23 thereof. The movable bodies 26 and 28 fixed so as to be sandwiched between the springs 24 and 24 are stud bolts which are fixed to the movable body 25 and have springs 27 and 29 arranged at their ends, and move when the movable body 25 is stationary. A load applying device for applying a load to the body 25 is configured. Reference numeral 30 denotes a driving means for driving the laminated piezo elements 23, 24, and applies a sawtooth pulse signal to the laminated piezo elements 23, 24.

In this reference example, a moving body 25 having laminated piezo elements 23 and 24 is arranged on opposite surfaces so as to be sandwiched between a pair of fixed bodies 21 and 22 that are vertically opposed to each other, and the moving body 25 is chucked. Thus, the shear deformation movement is performed so that the movement in the vertical direction can be performed. Note that vertical holes (not shown) that allow the stud bolts 26 and 28 to move are formed in the fixed bodies (bases) 21 and 22.

In the above-described reference example, the fixed portion is shown as opposed fixed bodies (bases) 21 and 22. However, the fixed portion is, for example, a polyhedron such as a triangular prism or a hexagonal prism inner surface, or a cylinder, You may make it make it a mechanism in which a mobile body goes up and down, such as a triangular prism and a hexagonal column inner surface.
Furthermore, instead of the load applying device including the stud bolts 26 and 28 and the springs 27 and 29, a load applying device as shown in FIG. 10 may be used.

  In FIG. 10, 31 and 32 are fixed bodies (bases), 33 and 34 are laminated piezoelectric elements obtained by bonding shear piezoelectric elements 33A and 34A and longitudinally deformed piezoelectric elements 33B and 34B, and 35 is a laminated piezoelectric element thereof. A hollow moving body 36 in which two members 35A and 35B fixed so as to be sandwiched between 33 and 34 are fitted, and a spring 36 is mounted in the hollow moving body 35, and when the moving body 35 is stationary. A load applying device for applying a load to the moving body 35 is configured. Reference numeral 37 denotes a driving means for driving the laminated piezo elements 33 and 34 so that a sawtooth pulse signal is applied to the laminated piezo elements 33 and 34.

Here, the load applying device can be configured only by incorporating the spring 36 inside the hollow movable body 35 divided into two.
Figure 11 is a schematic view of a precise high-speed moving mechanism using a composite piezoelectric element showing a real施例of the present invention.
In this figure, 41 and 42 are fixed bodies (bases), 43 and 44 are laminated piezoelectric elements obtained by bonding shear piezoelectric elements 43A and 44A and longitudinally deformed piezoelectric elements 43B and 44B, and 45 is a laminated piezoelectric element 43 thereof. And the movable bodies 46 and 48 fixed to the movable body 45 are stud bolts which are fixed to the movable body 45 and have springs 47 and 49 arranged at the ends thereof. The load applying device for applying the load is configured. Reference numeral 50 denotes a driving means for driving the laminated piezo elements 43 and 44, and a sawtooth pulse signal is applied to the laminated piezo elements 43 and 44.

  In this embodiment, the fixed bodies 41 and 42 are arranged so that the wall surface 41A and the ceiling surface 42A are formed, and are moved by the laminated piezoelectric element 43 corresponding to the wall surface 41A and the laminated piezoelectric element 44 corresponding to the ceiling surface 42A. The moving body 45 is arranged with the body 45 fixed. Note that holes (not shown) that allow the stud bolts 46 and 48 to move are formed in the fixed bodies 41 and 42.

In the said Example, although the stud bolt which arrange | positions a spring was shown as a load provision apparatus, you may make it apply a load by making it adsorb | suck to a fixed part using a magnet as follows.
FIG. 12 is a schematic view of a precision high-speed moving mechanism using a composite piezo element according to a fourth reference example of the present invention. FIG. 12 (a) shows a case where a sliding surface is provided below the magnet, and FIG. Indicates a case where the magnet is directly slid. In addition, glass, a bearing ball, a ruby ball, etc. can be used as a sliding surface.

In FIG. 12A, the lower part of the laminated piezoelectric element 12 in which the shearing piezoelectric element 12A and the longitudinally deformed piezoelectric element 13 are bonded to a fixed body (base: magnetic body) 51 via a sliding surface 52. The moving body 13 is applied with a load to the fixed body (base: magnetic body) 51 by the magnet 53.
In FIG. 12B, the magnet 53 is provided below the laminated piezo element 12 in which the shear piezo element 13A and the longitudinally deformed piezo element 13B are bonded together, and the magnet 53 is directly adsorbed to fix the fixed body (base: A load is applied to the magnetic body 51.

FIG. 13 is a schematic view of a precision high-speed moving mechanism using a composite piezo element showing a fifth reference example of the present invention. FIG. 13A shows a case where a sliding surface is provided below the magnet, and FIG. Indicates a case where the magnet is directly slid.
In FIG. 13A, magnets 64, 66 are connected to fixed bodies (bases: magnetic bodies) 61, 62 via sliding surfaces 63, 65, and shear piezoelectric elements 23A, 24A and longitudinally deformed piezoelectric elements 23B, 24B are arranged. It is provided below the laminated piezoelectric elements 23 and 24 that are bonded together, and a load is applied to the fixed body (base: magnetic body) 61 and 62 by the magnets 64 and 66.

In FIG. 13B, the magnets 64 and 66 are provided below the laminated piezoelectric elements 23 and 24 in which the shear piezoelectric elements 23A and 24A and the longitudinally deformed piezoelectric elements 23B and 24B are bonded, and the magnets 64 and 66 are provided. It is directly adsorbed and a load is applied to the fixed bodies (base: magnetic body) 61 and 62.
In this reference example, a moving body 25 having laminated piezoelectric elements 23 and 24 is arranged on opposing surfaces so as to be sandwiched between a pair of fixed bodies 61 and 62 that are vertically opposed to each other, and the moving body 25 is chucked. Thus, the shear deformation movement is performed so that the movement in the vertical direction can be performed. Magnets 64 and 66 were used for applying the load.

FIG. 14 is a schematic view of a precision high-speed moving mechanism using a composite piezo element according to a sixth reference example of the present invention. FIG. 14 (a) shows a case where a sliding surface is provided below the magnet, and FIG. Indicates a case where the magnet is directly slid.
In FIG. 14A, magnets 74 and 76 are connected to fixed bodies (bases: magnetic bodies) 71 and 72 via sliding surfaces 73 and 75, and shear piezoelectric elements 33A and 34A and longitudinally deformed piezoelectric elements 33B and 34B, respectively. Provided below the laminated piezoelectric elements 33 and 34 that are bonded together, a load is applied to the fixed body (base: magnetic body) 71 and 72 by the magnets 74 and 76.

14B, the magnets 74 and 76 are provided below the laminated piezoelectric elements 33 and 34 in which the shear piezoelectric elements 33A and 34A and the longitudinally deformed piezoelectric elements 33B and 34B are bonded, and the magnets 74 and 76 are provided. It is directly adsorbed and a load is applied to the fixed bodies (base: magnetic body) 71 and 72.
Here, the spring 36 is built in the hollow movable body 35 divided into two, and the load applying device is configured by the magnets 74 and 76.

Figure 15 is a schematic view of a precise high-speed moving mechanism using a composite piezoelectric element showing a real施例of the present invention, FIG. 15 (a) when it has a sliding surface at the bottom of the magnet, FIG. 15 (b) The case where the magnet is slid directly is shown.
In FIG. 15A, the magnets 84 and 86 are vertically deformed with the shear piezoelectric elements 43A and 44A through the sliding surfaces 83 and 85 on the wall surface 81A and the ceiling surface 82A of the fixed bodies (bases: magnetic bodies) 81 and 82, respectively. Provided below the laminated piezo elements 43 and 44 to which the piezo elements 43B and 44B are bonded, and the moving body 45 is applied to the fixed bodies (bases: magnetic bodies) 81 and 82 by the magnets 84 and 86. Yes.

In FIG. 15B, magnets 84 and 86 are provided below laminated piezoelectric elements 43 and 44 in which shear piezoelectric elements 43A and 44A and longitudinally deformed piezoelectric elements 43B and 44B are bonded, and magnets 84 and 86 are provided. It is directly adsorbed and a load is applied to the fixed bodies (base: magnetic body) 81 and 82.
It will now be described in detail for an ultrasonic motor mode movement by elliptical wave generator precision fast moving mechanism using a composite piezoelectric element showing a real施例of the present invention.

FIG. 16 is a diagram showing a macro moving direction of the moving body by the ultrasonic motor mode precision high-speed moving mechanism of the present invention, and FIG. 17 is a diagram showing a waveform applied to the multilayer piezoelectric element of the ultrasonic motor mode of the present invention. FIG. 18 is a diagram showing the behavior of the moving element by the precision high-speed moving mechanism.
As shown in FIG. 16, a shear piezoelectric element 2A of a laminated piezoelectric element 2 in which a shear piezoelectric element 2A and a longitudinally deformed piezoelectric element 2B are bonded on a fixed body (base) 91 is a sine as shown in FIG. By applying a sine wave as shown in FIG. 17 (b) to the longitudinally deformed piezo element 2B, the sliding surface moves in a clockwise or elliptical motion from the direction of viewing the figure as shown in FIG. In FIG. 16, the moving body 3 moves to the right in the macro. The displacement in both directions is possible by changing the mutual phase difference of the sine waves applied to 2A and 2B.

  The ultrasonic motor mode shown in this embodiment has an advantage that the moving speed is faster than the other embodiments. In other words, in the ultrasonic motor mode, movement is caused by applying a sine wave signal in the order of MHz to the piezo element, whereas in the drive mode due to rapid deformation of the piezo element, a sawtooth wave or Mt. Fuji type The repetition frequency of this wave is on the order of several tens of kHz. In other words, displacement occurs only at the moment when a sudden acceleration change occurs.

The moving body described above is not only a moving body itself, but also can be used as a table such as a sample and a control member.
Further, the present invention is not limited to the above-described embodiments, and various modifications can be made based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

  The precise high-speed moving method and apparatus using the composite piezoelectric element of the present invention can be used as a precision moving mechanism and a sample moving mechanism in a microscope.

It is a schematic diagram of the precise high-speed moving mechanism using the composite piezoelectric element which shows the 1st reference example of this invention. It is a figure which shows an example of the drive pulse of the composite piezo element by the precision high-speed moving mechanism using the composite piezo element which shows the 1st aspect of the 1st reference example of this invention. It is a schematic diagram which shows the movement aspect of the moving body by the precise high-speed moving mechanism using the composite piezo element which shows the 1st aspect of the 1st reference example of this invention. It is a figure which shows an example of the drive pulse of the composite piezo element by the precision high-speed moving mechanism using the composite piezo element which shows the 2nd aspect of the 1st reference example of this invention. It is a schematic diagram which shows the movement aspect of the moving body by the precise high-speed moving mechanism using the composite piezoelectric element which shows the 2nd aspect of the 1st reference example of this invention. It is a figure which shows the drive pulse which shows the other reference example of this invention. It is a schematic diagram which shows the force added to a moving body by the drive pulse shown in FIG. It is a schematic diagram of the precision high-speed moving mechanism using the composite piezoelectric element which shows the 2nd reference example of this invention. It is a schematic diagram of the precision high-speed moving mechanism using the composite piezoelectric element which shows the 3rd reference example of this invention. It is a schematic diagram which shows the load application apparatus of the precision high-speed moving mechanism using the composite piezoelectric element of this invention. It is a schematic view of a precise high-speed moving mechanism using a composite piezoelectric element showing a real施例of the present invention. It is a schematic diagram of the precision high-speed moving mechanism using the composite piezoelectric element which shows the 4th reference example of this invention. It is a schematic diagram of the precision high-speed moving mechanism using the composite piezoelectric element which shows the 5th reference example of this invention. It is a schematic diagram of the precision high-speed moving mechanism using the composite piezoelectric element which shows the 6th reference example of this invention. It is a schematic view of a precise high-speed moving mechanism using a composite piezoelectric element showing a real施例of the present invention. It is a figure which shows the macro moving direction of the moving body by the precision high-speed moving mechanism of the ultrasonic motor mode of this invention. It is a figure which shows the waveform applied to the laminated piezoelectric element of the ultrasonic motor mode of this invention. It is a figure which shows the behavior of the slider by the precision high-speed moving mechanism in FIG. It is a schematic diagram of a mechanism for moving a moving body by rapid deformation of a conventional shear piezo element.

1, 11, 21, 22, 31, 32, 41, 42, 91 Fixed body (base)
2, 12, 23, 24, 33, 34, 43, 44 Laminated piezo elements 2A, 12A, 23A, 24A, 33A, 34A, 43A, 44A Shear piezo elements 2B, 12B, 23B, 24B, 33B, 34B, 43B, 44B Longitudinal deformation piezo element 3, 13, 25, 45 Moving object (load)
4, 16, 30, 37, 50 Driving means for driving the laminated piezo element 14, 26, 28, 46, 48 Stud bolt 15, 27, 29, 47, 49 Spring 18, 18 'Mounted drive pulse 35 Hollow moving body 35A, 35B Two members 36 Spring 41A, 81A Wall surface 42B, 82A Ceiling 51, 61, 62, 71, 72, 81, 82 Fixed body (base: magnetic body) )
52, 63, 65, 73, 75, 83, 85 Sliding surface 53, 64, 66, 74, 76, 84, 86 Magnet

Claims (3)

A fixed body, a laminated piezoelectric element that is arranged in contact with the fixed body, and is formed by bonding a piezoelectric element that causes shear deformation and a piezoelectric element that causes longitudinal deformation; a moving body provided in the laminated piezoelectric element; In a precise high-speed moving method using a composite piezo element using a driving means of the laminated piezo element that moves a moving body with respect to the fixed body , the fixed body is arranged to form a wall surface and a ceiling surface, A precision high-speed moving method using a composite piezo element, wherein a moving body fixed to the laminated piezo element corresponding to the wall surface and the ceiling surface is disposed .   2. A precision high-speed moving method using a composite piezo element according to claim 1, wherein the moving body is moved by shear deformation movement or ultrasonic motor mode movement by generation of elliptic waves. Fast moving method. A fixed body, a laminated piezoelectric element that is arranged in contact with the fixed body, and is formed by bonding a piezoelectric element that causes shear deformation and a piezoelectric element that causes longitudinal deformation; a moving body provided in the laminated piezoelectric element; in precision high-speed mobile equipment using a composite piezoelectric element having a driving means of the laminated piezoelectric element to move the movable body relative to the fixed body, the fixed body are arranged so as to form a wall and a ceiling surface A precision high-speed moving device using a composite piezo element comprising a moving body fixed to the laminated piezo element corresponding to the wall surface and the ceiling surface.

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