JP4517778B2 - Fine hole drilling method and liquid jet head manufacturing apparatus - Google Patents

Description

  The present invention relates to a fine hole drilling method for punching a circular hole or a rectangular hole having a diameter and long side of about 0.5 mm or less on a metal substrate by press working, and a tool used therefor and manufacturing of a liquid jet head The present invention relates to a method and an apparatus for manufacturing a liquid jet head.

  An ink jet recording head (hereinafter referred to as “recording head”) used as an example of a liquid ejecting head has a plurality of flow paths corresponding to the nozzle openings from a common ink chamber to a nozzle opening through a pressure generation chamber. I have. In order to reduce the size, each pressure generating chamber needs to be formed with a fine pitch corresponding to the recording density. For this reason, the wall thickness of the partition wall that partitions adjacent pressure generation chambers is extremely thin. In addition, the ink supply port that connects the pressure generation chamber and the common ink chamber uses the ink pressure in the pressure generation chamber more efficiently for ejecting ink droplets, so that the flow path width is further narrowed than the pressure generation chamber. Yes.

The pressure generating chambers and the communication ports that connect the pressure generating chambers to the nozzle openings are formed by performing plastic working on the metal substrate. In particular, the communication port is processed after the pressure generating chamber is formed, and therefore processing suitable for the deformation state of the pressure generating chamber forming plate generated at the time of forming the pressure generating chamber is desired.
JP 2004-98164 A

  By the way, the pressure generating chamber forming plate is arranged between the male mold and the female mold, and the state in which the operation stroke between the male mold and the female mold becomes the maximum value and the plastic deformation of the metal substrate is completed, When the female mold returns to the original position, the pressure generation chamber forming plate released from the male mold and the female mold becomes a gentle curved shape when viewed in the direction in which the pressure generation chambers are arranged due to internal stress. When the pressure generation chamber forming plate is in a substantially horizontal state with the open side of the pressure generation chamber on the upper side and the bottom of the pressure generation chamber on the lower side, this curved shape is arranged in a row. The end portion is located at the upper portion, and the shape gradually becomes lower from the row end portion toward the central portion.

  Thus, in order to form the communication port at the bottom of the pressure generating chambers arranged along the curved shape, a row of punches having the same pitch as the row pitch of the pressure generating chambers is prepared. However, since the tip positions of so-called punch rows arranged in multiple rows are arranged in a straight line, when the punch is pushed in the depth direction of the groove-like recess, punches at or near the end of the punch row First, the punches bite into the bottom of the groove-like recesses at or near the row end, and then each punch sequentially bites into the bottom of the central groove-like recess.

  Such punch encroachment acts on a punch near the end or in the vicinity of the end to exert a force toward the center of the punch row. For this reason, there exists a possibility that the punch of an edge part or an edge part may bend or break to the center part side of a punch row | line | column. When the punch is bent in this manner, the processing position of the communication port is shifted, and the processing accuracy is lowered. Further, the durability of the punch at or near the end is lowered, and the life as a punch is shortened, which is uneconomical. Furthermore, when the punch breaks, production is temporarily suspended for replacement and various processing costs are incurred, which is uneconomical. In addition, since the size of the communication port provided in the pressure generating chamber is remarkably fine, each punch is very thin, and the predetermined length becomes long, and accordingly, the rigidity against the processing resistance is likely to be insufficient, The above problems become even more important.

  The above problem relates to the rigidity of the punches in the direction in which the groove-like recesses are arranged. On the other hand, it is also important to ensure the rigidity of each punch in the longitudinal direction of the groove-like recesses, that is, the pressure generating chamber. It is a problem.

  The present invention has been made in view of such circumstances, and a method for drilling a microhole capable of accurately forming a microhole by plastic working, a tool used therefor, a method for manufacturing a liquid jet head, and a liquid An object is to provide an apparatus for manufacturing an ejection head.

  In order to achieve the above-described object, the micro-hole drilling method of the present invention is a method of drilling micro-holes in a metal substrate by press working, wherein the micro-holes are drilled in rows, A male punch having a row of punches arranged in a row and having an inclined surface in which the central side of the punch row is retracted with respect to the pushing-in direction of the punch at the tip end surface of the punch at least near the end of the punch row. The gist is to prepare a mold and advance a male mold toward the metal substrate, thereby drilling fine holes in the metal substrate to form a row of fine holes arranged in a row on the metal substrate. .

  In order to achieve the above object, the fine hole drilling tool of the present invention is a tool for punching a fine hole in a metal substrate by press working, and a punch is provided at a predetermined pitch at the tip of the male mold. The punch line is formed in a row, and at the tip end surface of the punch in the vicinity of at least the end part of the punch line, an inclined surface in which the central part side of the punch line recedes with respect to the pushing direction of the punch is formed. To do.

  Furthermore, in order to achieve the above object, according to the method of manufacturing a liquid jet head of the present invention, groove-like recesses serving as pressure generation chambers are arranged in parallel and penetrate through one end of each groove-like recess in the thickness direction. A metal pressure generating chamber forming plate having a communication port, a metal nozzle plate having a nozzle opening formed at a position corresponding to the communication port, and a metal material for sealing the opening surface of the groove-like recess A pressure-generating chamber forming plate, and a pressure-sensitive chamber forming plate having a sealing plate on the groove-like recess side and a nozzle plate on the opposite side. The gist is that the communication port of the generation chamber forming plate is formed by the fine hole drilling method according to any one of claims 1 to 15.

  Furthermore, in order to achieve the above object, in the liquid jet head manufacturing apparatus of the present invention, groove-like recesses serving as pressure generation chambers are arranged in parallel and penetrate through one end of each groove-like recess in the thickness direction. A metal pressure generating chamber forming plate having a communication opening, a metal nozzle plate having a nozzle opening formed at a position corresponding to the communication opening, and a metal sealing the opening surface of the groove-shaped recess. A liquid ejecting head manufacturing apparatus in which the sealing plate is joined to the groove-like recess side of the pressure generating chamber forming plate and the nozzle plate is joined to the opposite side. A first mold for supporting a pressure generating chamber forming plate in which a hollow is formed, and a second mold having a punch line in which punches are formed in the groove-shaped hollow to form a communication port. A punch line on the tip surface of the punch near at least the end of the punch line. The punch center portion side is formed an inclined surface retracted relative to the push-in direction of the punch and gist of pushing it into the groove-like recess portion.

  That is, according to the fine hole drilling method of the present invention, for example, when the depressions aligned in a row at a predetermined pitch are formed on the metal substrate, the metal substrate is molded. The internal stress generated in the local portion is accumulated by being in a row, and the row-like arrangement form of the depression-like portions is a deformed shape in which the metal substrate is curved when viewed in the direction of arrangement of the depression-like portions. May present. However, since at least the tip end surface of the punch row near the end of the punch row is provided with an inclined surface in which the central portion side of the punch row is retracted with respect to the pushing direction of the punch, Even if a bending force is applied to the center of the punch line, a bending force opposite to the bending force is generated. Therefore, since the bending force obtained by the inclined surface cancels or greatly reduces the bending force, the bending force acting on the punch can be reduced to a level that does not cause a problem. In this way, since no inclination or the like occurs in the punches near the end of the punch row, the fine hole row can be accurately formed at a predetermined location on the metal substrate.

  Accordingly, it is possible to prevent a decrease in machining accuracy due to the irregular shape and obtain a good accuracy quality. Further, since the bending load on the punch in the vicinity of the end portion is reduced, the punch in a specific portion is not bent or broken, and the durability of the punch can be improved. The above advantages are particularly effective when, for example, the fine holes in the liquid ejecting head are provided in a line.

  In the fine hole drilling method according to the present invention, when the hollow portions formed in a line at a predetermined pitch are formed on the metal substrate, and punches having the same pitch as the pitch are pushed into the hollow portions, A minute hole can be accurately formed also in the depression-like portion located in the vicinity of the arrangement end portion with respect to the predetermined position of the depression-like portion arranged in a dense manner.

  In the fine hole drilling method of the present invention, when the punch tip row in the punch row has an inclination that protrudes toward the male advance direction as the vicinity of the end portion of the punch row goes to the end portion As a result, the punch near the end can be machined with high accuracy with the advancement of the male mold. With the advance of the male mold, bending force acts on the punch in the vicinity of the end of the punch near the end, or the punch in the vicinity of the end is first pushed into the metal substrate, resulting in a longer processing time and a processing load. Even if it becomes larger, the bending force acting on the punch near the end is relaxed by the inclined surface, so that a fine hole can be accurately formed at a predetermined position on the metal substrate, and only the punch near the end is formed. Is not worn out at an early stage, and the durability of the punch can be improved.

  In the fine hole drilling method according to the present invention, when the punch tip row in the punch row protrudes in the vicinity of the end portion from the center portion of the punch row in the male advance direction, the metal substrate Even if the above-mentioned deformed form occurs, the punch near the end starts processing prior to the punch in the center of the punch line, and then the entire punch line is processed. Hole drilling is performed.

  In the fine hole drilling method according to the present invention, when the punch front end row in the punch row has a smooth curved shape, the punch in the vicinity of the end portion of the punch row can be continuously drilled. As a result, the drilling process gradually shifts to the center of the punch row, and smooth continuous processing can be performed, which is effective for improving the durability of the punch.

  In the punching method for fine holes according to the present invention, when the punch tip row in the punch row is formed in a straight line in which the portion near the end of the punch row is inclined, the punch near the end is processed. After starting, the processing gradually shifts to the center of the punch row in accordance with the linear inclination degree. In this way, by selecting the linear inclination degree to a predetermined angle, the punching load near the end can be set according to the punch durability and processing depth, improving the punch durability. It is effective for.

  In the fine hole drilling method according to the present invention, the punch tip row in the punch row is formed in a straight line in which the vicinity of the end of the punch row is inclined, and the vicinity of the center of the punch row is a straight line extending in the row direction. In the case where the punch is formed in a shape, after the punch near the end starts processing, the processing gradually moves toward the center of the punch row in accordance with the linear inclination degree. In this way, by selecting the linear inclination degree to a predetermined angle, the processing load of the punch near the end can be set according to the durability and processing depth of the punch, and the inclined straight line Since the processing shifts from the shape portion to the straight portion having no inclination, the entire punch row can be processed smoothly.

  In the punching method for fine holes according to the present invention, the punch leading end row in the punch row is formed in a smooth curved shape in the vicinity of the end portion of the punch row, and the vicinity of the center of the punch row is a straight line extending in the row direction. In the case where the punch is formed in a shape, the punch gradually moves toward the center of the punch row in accordance with the curved state after the punch near the end starts processing. By selecting the curved state as a predetermined curvature in this way, the machining load of the punch near the end can be set according to the durability and machining depth of the punch. Since the processing shifts to the shape portion, the entire punch row can be processed smoothly.

  In the fine hole drilling method according to the present invention, when the length of the punch is set so that the vicinity of the end portion of the punch row becomes closer to the end portion, the end of the punch is advanced with the advancement of the male mold. Even if a punching force is applied to the punch near the center of the punch, or when the punch near the end is first pushed into the metal substrate and the processing time is increased and the processing load is increased, the inclined surface causes an end. Since the bending force acting on the punch near the part is relaxed, it is possible to accurately form a fine hole at a predetermined location on the metal substrate, and only the punch near the end is worn out early. The durability of the punch can be improved.

  In the fine hole drilling method of the present invention, when the length of the punch is set so that the punch in the vicinity of the end of the punch row is longer than the punch in the substantially central portion of the punch row, Even if the above-mentioned deformed shape is generated on the metal substrate, the punch near the end starts processing before the punch on the center side of the punch row, and then the entire punch row is processed. A fine hole is drilled.

  In the fine hole drilling method of the present invention, the length of the punch is set so that the vicinity of the end portion of the punch row becomes longer toward the end portion, and the vicinity of the center portion of the punch row is pushed by the punch. When the length is set to protrude in the direction, a bending force acts on the punch near the end as the male die advances, or the punch near the end Even if it is pushed into the metal substrate and the processing time becomes longer and the processing load increases, the bending force acting on the punch near the end is relaxed by the inclined surface, so that it can be accurately applied to a predetermined location on the metal substrate. A minute hole can be formed, and only the punch near the end portion is not worn out at an early stage, and the durability of the punch can be improved. Then, since the vicinity of the central portion of the punch row is set to a length that protrudes in the pushing direction, the processing in the vicinity of the central portion proceeds in a substantially continuous state after the processing in the vicinity of the end is completed. Uneven processing can be performed over the entire line.

  In the fine hole drilling method according to the present invention, when the cross-sectional shape of the punch is rectangular, high-precision processing is performed at the initial stage of processing by the punch in the vicinity of the end of the punch row. High rectangular fine holes are obtained.

  In the fine hole drilling method of the present invention, the first step of forming a non-penetrating recess in the metal substrate by the first punch, and the bottom of the recess is bulged by the second punch so as to be non-penetrating. When the second step of forming the recess and the third step of cutting out the bulged portion are included, the processing by the punch near the end of each punch row is executed with high accuracy. Therefore, each recess in the first step and the second step has an accurate shape, and the bulge amount at the bulge portion is substantially uniform. Therefore, the excision thickness in the third step is also constant for each recess, the excision step is simplified, and the lengths of the fine holes are uniform.

  In the fine hole drilling method of the present invention, when the hollow portion is a groove-like recess portion, the drilling process in the vicinity of the end portion of the punch row is performed with high accuracy in advance for the groove-like recess portion. The process is performed originally, and subsequently, the fine holes can be accurately formed in a row at a predetermined position of the groove-like recess by adapting to the pitch of the groove-like recess.

  In the fine hole drilling method according to the present invention, when the groove-shaped recess has a V-shaped bottom, the micro-hole is formed in the groove-shaped recess having the V-shaped bottom. In this case, if the groove-like recesses are irregularly shaped in the row direction, the punching is likely to bend or escape due to the V-shaped inclined surface, but the machining accuracy tends to be lowered. In the groove-like recess, accurate drilling is executed in advance at a predetermined position on the V-shaped inclined surface having an abnormal inclination angle, so that such a problem of processing accuracy can be solved. .

  According to the fine hole drilling tool of the present invention, even if the metal substrate has, for example, a curved deformed shape, the inclined surface in which the central portion side of the punch row recedes with respect to the punch pressing direction. Therefore, even if a bending force toward the center of the punch row acts on the punch in the vicinity of the end due to the deformed shape, a bending force opposite to this bending force is generated. Therefore, since the bending force obtained by the inclined surface cancels or greatly reduces the bending force, the bending force acting on the punch can be reduced to a level that does not cause a problem. In this way, since no inclination or the like occurs in the punches near the end of the punch row, the fine hole row can be accurately formed at a predetermined location on the metal substrate. Accordingly, it is possible to prevent a decrease in machining accuracy due to the irregular shape and obtain a good accuracy quality. Further, since the bending load on the punch in the vicinity of the end portion is reduced, the punch in a specific portion is not bent or broken, and the durability of the punch can be improved. The above advantages are particularly effective when, for example, the fine holes in the liquid ejecting head are provided in a line.

  Furthermore, according to the method for manufacturing a liquid jet head of the present invention, the communication port of the pressure generating chamber forming plate is formed by the microhole drilling method according to any one of claims 1 to 15. Therefore, even if the above-mentioned deformed form occurs in the pressure generating chamber forming plate, the communication port of the groove-like recess that is a precision structure can be formed with extremely high accuracy, and the ejection characteristics as a liquid ejection head are excellent. Can keep.

  Furthermore, according to the apparatus for manufacturing a liquid jet head of the present invention, a punch in which an inclined surface in which the central portion side of the punch row recedes with respect to the pushing direction of the punch is formed on the front end surface of the punch in the vicinity of at least the end portion of the punch row. Therefore, even if the arrangement of the groove-like recesses is irregular, the punches near the end of the punch row can be pushed into the groove-like recesses in advance. Therefore, the communication port of the groove-like recess that is a precision structure portion can be formed with extremely high accuracy, and the ejection characteristics as the liquid ejection head can be kept good.

  Next, the best mode for carrying out the fine hole drilling method of the present invention, the tool used therefor, the method of manufacturing the liquid jet head, and the apparatus for manufacturing the liquid jet head will be described. Hereinafter, as an embodiment of the present invention, a method for manufacturing a liquid jet head using the micro-hole drilling method of the present invention will be described. In the following description, an ink jet recording head is exemplified as the liquid ejecting head, but it goes without saying that the present invention is not limited to this.

  1 and 2 are diagrams showing an ink jet recording head (hereinafter referred to as “recording head”). The recording head 1 includes a case 2, a vibrator unit 3 housed in the case 2, and a case 2. From the flow path unit 4 joined to the front end surface, the connection substrate 5 disposed on the attachment surface of the case 2 opposite to the front end surface, the supply needle unit 6 attached to the attachment surface side of the case 2, and the like. It is roughly structured.

  As shown in FIG. 3, the vibrator unit 3 includes a piezoelectric vibrator group 7, a fixed plate 8 to which the piezoelectric vibrator group 7 is joined, and a drive signal for supplying the piezoelectric vibrator group 7. The flexible cable 9 is schematically configured.

  The piezoelectric vibrator group 7 includes a plurality of piezoelectric vibrators 10 formed in a row. Each of the piezoelectric vibrators 10 is a kind of the pressure generating element of the present invention, and is also a kind of electromechanical conversion element. Each of these piezoelectric vibrators 10 is composed of a pair of dummy vibrators 10a and 10a located at both ends of the row and a plurality of drive vibrators 10b arranged between the dummy vibrators 10a and 10a. Has been. Each of the drive vibrators 10b... Is divided into, for example, comb teeth having a very narrow width of about 50 μm to 100 μm, and 180 are provided.

  The dummy vibrator 10a is sufficiently wider than the drive vibrator 10b, and has a protection function for protecting the drive vibrator 10b from impact and the like, and a guide function for positioning the vibrator unit 3 at a predetermined position. .

  Each of the piezoelectric vibrators 10... Has its free end protruding outward from the front end surface of the fixed plate 8 by bonding its fixed end onto the fixed plate 8. That is, each piezoelectric vibrator 10 is supported on the fixed plate 8 in a so-called cantilever state. The free ends of the piezoelectric vibrators 10 are configured by alternately stacking piezoelectric bodies and internal electrodes, and expand and contract in the longitudinal direction of the element by applying a potential difference between the opposing electrodes.

  The flexible cable 9 is electrically connected to the piezoelectric vibrator 10 on the side surface of the fixed end opposite to the fixed plate 8. A control IC 11 for controlling driving of the piezoelectric vibrator 10 and the like is mounted on the surface of the flexible cable 9. Further, the fixing plate 8 that supports the piezoelectric vibrators 10 is a plate-like member having rigidity capable of receiving a reaction force from the piezoelectric vibrators 10, and a metal plate such as a stainless steel plate is preferably used.

  Said case 2 is a block-shaped member shape | molded, for example with thermosetting resins, such as an epoxy resin. Here, the case 2 is molded with a thermosetting resin. This thermosetting resin has higher mechanical strength than a general resin, and the linear expansion coefficient is higher than that of a general resin. This is because the deformation due to a change in ambient temperature is small. In the case 2, a storage space 12 that can store the vibrator unit 3 and an ink supply path 13 that forms a part of the ink flow path are formed. In addition, a front end recess 15 serving as a common ink chamber (reservoir) 14 is formed on the front end surface of the case 2.

The storage space 12 is a space having a size capable of storing the transducer unit 3. The inner wall of the case protrudes partially toward the side of the front end side portion of the housing empty portion 12, and the upper surface of the protruding portion functions as a fixed plate contact surface. The vibrator unit 3 is housed in the housing space 12 with the tip of each piezoelectric vibrator 10 facing the opening.
In this stored state, the front end surface of the fixed plate 8 is bonded in a state of being in contact with the fixed plate contact surface.

  The tip recess 15 is produced by partially denting the tip surface of the case 2. The front-end | tip recessed part 15 of a present Example is a substantially trapezoid-shaped recessed part formed in the left-right outer side rather than the storage empty part 12, and is formed so that the trapezoid lower bottom may be located in the storage empty part 12 side.

  The ink supply path 13 is formed so as to penetrate the height direction of the case 2, and the tip communicates with the tip recess 15. Further, the end portion on the attachment surface side in the ink supply path 13 is formed in a connection port 16 protruding from the attachment surface.

  The connection board 5 is a wiring board on which electrical wiring for various signals to be supplied to the recording head 1 is formed and a connector 17 to which a signal cable can be connected is attached. And this connection board | substrate 5 is arrange | positioned on the attachment surface in case 2, and the electrical wiring of the flexible cable 9 is connected by soldering etc. FIG. In addition, the tip of a signal cable from a control device (not shown) is inserted into the connector 17.

  The supply needle unit 6 is a part to which an ink cartridge (not shown) is connected, and is generally constituted by a needle holder 18, an ink supply needle 19, and a filter 20.

  The ink supply needle 19 is a portion inserted into the ink cartridge, and introduces ink stored in the ink cartridge. The tip of the ink supply needle 19 has a conical shape and is easy to insert into the ink cartridge. In addition, a plurality of ink introduction holes communicating with the inside and outside of the ink supply needle 19 are formed at the tip portion. Since the recording head 1 of this embodiment can eject two types of ink, the recording head 1 includes two ink supply needles 19.

  The needle holder 18 is a member for attaching the ink supply needle 19, and two pedestals 21 for fixing the base portion of the ink supply needle 19 are formed side by side on the surface thereof. The pedestal 21 is formed in a circular shape that matches the shape of the bottom surface of the ink supply needle 19. In addition, an ink discharge port 22 that penetrates the needle holder 18 in the plate thickness direction is formed substantially at the center of the pedestal bottom surface. The needle holder 18 has a flange extending laterally.

  The filter 20 is a member that blocks the passage of foreign matter in the ink such as dust or burrs during molding, and is configured by a fine metal mesh, for example. The filter 20 is bonded to a filter holding groove formed in the pedestal 21.

  The supply needle unit 6 is disposed on the mounting surface of the case 2 as shown in FIG. In this arrangement state, the ink discharge port 22 of the supply needle unit 6 and the connection port 16 of the case 2 communicate with each other in a liquid-tight state via the packing 23.

  Next, the flow path unit 4 will be described. The flow path unit 4 has a configuration in which a nozzle plate 31 is bonded to one surface of the pressure generating chamber forming plate 30 and an elastic plate 32 is bonded to the other surface of the pressure generating chamber forming plate 30.

  As shown in FIG. 4, the pressure generation chamber forming plate 30 is a metal plate-like member in which a groove-like recess 33, a communication port 34, and an escape recess 35 are formed. In this embodiment, the pressure generating chamber forming plate 30 is manufactured by processing a nickel metal substrate having a thickness of 0.35 mm.

  Here, the reason why nickel is selected as the metal substrate will be described. The first reason is that the linear expansion coefficient of nickel is substantially equal to the linear expansion coefficient of the metal (stainless steel as will be described later in this embodiment) that constitutes the main part of the nozzle plate 31 and the elastic plate 32. That is, when the linear expansion coefficients of the pressure generating chamber forming plate 30, the elastic plate 32, and the nozzle plate 31 that constitute the flow path unit 4 are aligned, the respective members expand evenly when these members are heat bonded. For this reason, it is difficult for mechanical stress such as warpage due to the difference in expansion rate to occur. As a result, each member can be bonded without hindrance even if the bonding temperature is set to a high temperature. Further, when the recording head 1 is operated, the piezoelectric vibrator 10 generates heat, and even when the flow path unit 4 is heated by this heat, the members 30, 31, 32 constituting the flow path unit 4 are evenly expanded. For this reason, even if the heating associated with the operation of the recording head 1 and the cooling associated with the operation stop are repeated, problems such as peeling are unlikely to occur in the members 30, 31, and 32 constituting the flow path unit 4.

  The second reason is that it is excellent in rust prevention. That is, since this type of recording head 1 uses water-based ink suitably, it is important that no deterioration such as rust occurs even if water contacts over a long period of time. In that respect, nickel is excellent in rust prevention property like stainless steel, and is unlikely to be altered such as rust.

  The third reason is that it is highly malleable. That is, in producing the pressure generating chamber forming plate 30, in this embodiment, plastic working (for example, forging) is performed as described later. The groove-like recess 33 and the communication port 34 formed in the pressure generating chamber forming plate 30 are extremely fine and require high dimensional accuracy. When nickel is used for the metal substrate, the groove-like recess 33 and the communication port 34 can be formed with high dimensional accuracy even in plastic processing because of excellent malleability.

  The pressure generation chamber forming plate 30 may be made of a metal other than nickel as long as it satisfies the above-described requirements, that is, the linear expansion coefficient requirement, the rust prevention property requirement, and the malleability requirement. .

  The groove-shaped recess 33 is a groove-shaped recess that serves as the pressure generating chamber 29, and is configured by a linear groove as shown in an enlarged view in FIG. In this embodiment, 180 grooves having a width of about 0.1 mm, a length of about 1.5 mm, and a depth of about 0.1 mm are arranged in the groove width direction. The bottom surface of the groove-like recess 33 is reduced in width as it advances in the depth direction (that is, the back side) and is recessed in a V shape. The reason why the bottom surface is recessed in a V shape is to increase the rigidity of the partition wall 28 that partitions the adjacent pressure generating chambers 29 and 29 from each other. That is, by denting the bottom surface in a V shape, the thickness of the base portion (bottom side portion) of the partition wall portion 28 is increased and the rigidity of the partition wall portion 28 is increased. If the rigidity of the partition wall portion 28 increases, it becomes difficult to be affected by pressure fluctuations from the adjacent pressure generation chamber 29. That is, the ink pressure fluctuation from the adjacent pressure generation chamber 29 is hardly transmitted. Further, by recessing the bottom surface in a V shape, the groove-like recess 33 can be formed with high dimensional accuracy by plastic working (described later). The V-shaped angle is defined by the processing conditions and is, for example, around 90 degrees.

  Furthermore, since the thickness of the tip portion of the partition wall 28 is extremely thin, a necessary volume can be ensured even if the pressure generating chambers 29 are formed densely.

  Moreover, regarding the groove-like recess 33 in the present embodiment, both end portions in the longitudinal direction are inclined downward inward as proceeding to the back side. That is, both ends in the longitudinal direction of the groove-like recess 33 are formed in a chamfered shape. The reason for this configuration is to form the groove-like recess 33 with high dimensional accuracy by plastic working.

  Further, one dummy recess 36 wider than the groove recess 33 is formed adjacent to the groove recesses 33 at both ends. The dummy recess 36 is a groove-like recess that serves as a dummy pressure generating chamber that is not involved in ink droplet ejection. The dummy recess 36 of this embodiment is constituted by a groove having a width of about 0.2 mm, a length of about 1.5 mm, and a depth of about 0.1 mm. The bottom surface of the dummy recess 36 is recessed in a W shape. This is also for increasing the rigidity of the partition wall 28 and for forming the dummy recess 36 with high dimensional accuracy by plastic working.

  Each groove-like recess 33... And the pair of dummy recesses 36, 36 constitute a recess array. In the present embodiment, two rows of the recess portions are formed side by side.

  The communication port 34 is formed as a fine through-hole penetrating in the thickness direction from one end of the bottom of the groove-like recess 33. The communication port 34 is formed for each groove-like depression 33, and 180 pieces are formed in one depression row. As shown in FIG. 5, the communication port 34 of the present embodiment has a rectangular opening shape, and is formed from the groove-shaped recess 33 side of the pressure generation chamber forming plate 30 to the middle in the plate thickness direction. 37 and a second communication port 38 that is continuous with the first communication port 37 and opens on the back surface of the pressure generating chamber forming plate 30.

  The first communication port 37 and the second communication port 38 have different cross-sectional areas, and the inner dimension of the second communication port 38 is set slightly smaller than the inner dimension of the first communication port 37. This is because the communication port 34 is produced by press working. That is, since the pressure generating chamber forming plate 30 is manufactured by processing a nickel plate having a thickness of 0.35 mm, the length of the communication port 34 can be reduced by subtracting the depth of the groove-like recess 33. It becomes 0.25 mm or more. And since it is necessary to make the width | variety of the communicating port 34 narrower than the groove width of the groove-shaped recessed part 33, it is set to less than 0.1 mm. For this reason, if it tries to punch out the communication port 34 by one process, a male type | mold (punch) will buckle by the relationship of an aspect ratio.

  Therefore, in this embodiment, the processing is divided into two times, the first communication port 37 is formed partway in the plate thickness direction in the first processing, and the second communication port 38 is formed in the second processing. The processing procedure for the communication port 34 will be described later.

  A dummy communication port 39 is formed in the dummy recess 36. Similar to the communication port 34, the dummy communication port 39 includes a first dummy communication port 40 and a second dummy communication port 41. The inner dimension of the second dummy communication port 41 is the first dummy communication port. The inner dimension of the mouth 40 is set smaller.

  In the present embodiment, the communication port 34 and the dummy communication port 39 described above are exemplified by a rectangular through-hole, but the present invention is not limited to this shape. For example, you may comprise by the through-hole opened circularly and the polygonal through-hole.

  As shown in FIGS. 2 and 4, the escape recess 35 forms a working space for the compliance portion in the common ink chamber 14. In the present embodiment, it is constituted by a trapezoidal recess having substantially the same shape as the tip recess 15 of the case 2 and the depth being equal to the groove-shaped recess 33.

  Next, the elastic plate 32 will be described. The elastic plate 32 is a kind of sealing plate, and is made of, for example, a double-layer composite material (a kind of metal material of the present invention) in which an elastic film 43 is laminated on a support plate 42. In the present embodiment, a stainless steel plate is used as the support plate 42, and PPS (polyphenylene sulfide) is used as the elastic film 43.

  As shown in FIG. 6, the elastic plate 32 is formed with a diaphragm portion 44, an ink supply port 45, and a compliance portion 46.

  The diaphragm portion 44 is a portion that divides a part of the pressure generating chamber 29. That is, the diaphragm portion 44 seals the opening surface of the groove-like recess portion 33 and partitions the pressure generating chamber 29 together with the groove-like recess portion 33. As shown in FIG. 7A, the diaphragm portion 44 has an elongated shape corresponding to the groove-like recess portion 33, and each groove-like recess portion 33 with respect to the sealing region for sealing the groove-like recess portion 33. ... is formed every time. Specifically, the width of the diaphragm portion 44 is set to be substantially equal to the groove width of the groove-like recess portion 33, and the length of the diaphragm portion 44 is set to be slightly shorter than the length of the groove-like recess portion 33. In this embodiment, the length is set to about 2/3 of the length of the groove-like recess 33. Then, with respect to the formation position, as shown in FIG. 2, one end of the diaphragm portion 44 is aligned with one end of the groove-like recess portion 33 (an end portion on the communication port 34 side).

  As shown in FIG. 7B, the diaphragm portion 44 is produced by removing the support plate 42 corresponding to the groove-like recess portion 33 in an annular shape by etching or the like to make only the elastic film 43, An island portion 47 is formed in the ring. The island portion 47 is a portion to which the tip surface of the piezoelectric vibrator 10 is joined.

  The ink supply port 45 is a hole for communicating the pressure generating chamber 29 and the common ink chamber 14, and penetrates the elastic plate 32 in the plate thickness direction. The ink supply port 45 is also formed for each groove-like recess 33... At a position corresponding to the groove-like recess 33, similarly to the diaphragm 44. As shown in FIG. 2, the ink supply port 45 is formed at a position corresponding to the other end of the groove-like recess 33 on the side opposite to the communication port 34. The diameter of the ink supply port 45 is set to be sufficiently smaller than the groove width of the groove-like recess 33. In this embodiment, it is constituted by a fine through hole of 23 microns.

  The reason why the ink supply port 45 is formed as a fine through hole in this manner is to provide a flow path resistance between the pressure generation chamber 29 and the common ink chamber 14. That is, in the recording head 1, ink droplets are ejected using pressure fluctuation applied to the ink in the pressure generation chamber 29. For this reason, in order to eject ink droplets efficiently, it is important that the ink pressure in the pressure generating chamber 29 is not released to the common ink chamber 14 as much as possible. From this point of view, in this embodiment, the ink supply port 45 is constituted by a fine through hole.

  If the ink supply port 45 is constituted by a through hole as in this embodiment, there are advantages that processing is easy and high dimensional accuracy can be obtained. That is, since the ink supply port 45 is a through hole, it can be manufactured by laser processing. Therefore, even a minute diameter can be produced with high dimensional accuracy and the operation is easy.

  The compliance unit 46 is a part that divides a part of the common ink chamber 14. That is, the common ink chamber 14 is partitioned by the compliance portion 46 and the tip recess 15. The compliance portion 46 has a trapezoidal shape that is substantially the same as the opening shape of the tip recess 15, and is produced by removing the portion of the support plate 42 by etching or the like so that only the elastic film 43 is formed.

  Note that the support plate 42 and the elastic film 43 constituting the elastic plate 32 are not limited to this example. For example, polyimide may be used as the elastic film 43. Further, the elastic plate 32 may be formed of a metal plate provided with a thick portion that becomes the diaphragm portion 44, a thin portion around the thick portion, and a thin portion that becomes the compliance portion 46.

  Next, the nozzle plate 31 will be described. The nozzle plate 31 is a metal plate-like member in which nozzle openings 48 are arranged. In this embodiment, a stainless plate is used, and a plurality of nozzle openings 48 are opened at a pitch corresponding to the dot formation density. In this embodiment, a total of 180 nozzle openings 48 are arranged to form a nozzle row, and two nozzle rows are formed side by side.

  When this nozzle plate 31 is joined to the other surface of the pressure generating chamber forming plate 30, that is, the surface opposite to the elastic plate 32, each nozzle opening 48 is in communication with the corresponding communication port 34.

  When the elastic plate 32 is joined to one surface of the pressure generation chamber forming plate 30, that is, the formation surface of the groove-like recess 33, the diaphragm portion 44 seals the opening surface of the groove-like recess 33. Thus, the pressure generation chamber 29 is defined. Similarly, the opening surface of the dummy recess 36 is also sealed to form a dummy pressure generating chamber. When the nozzle plate 31 is joined to the other surface of the pressure generating chamber forming plate 30, the nozzle opening 48 faces the corresponding communication port 34. When the piezoelectric vibrator 10 bonded to the island portion 47 is expanded or contracted in this state, the elastic film 43 around the island portion is deformed, and the island portion 47 is pushed toward the groove-like recess 33 side or the groove-like recess 33 side. It is pulled away from the direction. Due to the deformation of the elastic film 43, the pressure generating chamber 29 expands or contracts, and pressure fluctuation is applied to the ink in the pressure generating chamber 29.

  Furthermore, when the elastic plate 32 (that is, the flow path unit 4) is joined to the case 2, the compliance portion 46 seals the tip recess 15. The compliance unit 46 absorbs pressure fluctuations in the ink stored in the common ink chamber 14. That is, the elastic film 43 expands or contracts according to the pressure of the stored ink and deforms. The escape recess 35 forms a space for the elastic film 43 to expand when the elastic film 43 expands.

  The recording head 1 configured as described above has a common ink flow path from the ink supply needle 19 to the common ink chamber 14 and an individual ink flow path from the common ink chamber 14 through the pressure generation chamber 29 to each nozzle opening 48. Have. The ink stored in the ink cartridge is introduced from the ink supply needle 19 and stored in the common ink chamber 14 through the common ink flow path. The ink stored in the common ink chamber 14 is discharged from the nozzle opening 48 through the individual ink flow path.

  For example, when the piezoelectric vibrator 10 is contracted, the diaphragm portion 44 is pulled toward the vibrator unit 3 and the pressure generating chamber 29 expands. Due to this expansion, the inside of the pressure generation chamber 29 is reduced to a negative pressure, so that the ink in the common ink chamber 14 flows into the pressure generation chambers 29 through the ink supply ports 45. Thereafter, when the piezoelectric vibrator 10 is expanded, the diaphragm portion 44 is pushed toward the pressure generating chamber forming plate 30 side, and the pressure generating chamber 29 contracts. Due to this contraction, the ink pressure in the pressure generating chamber 29 rises, and ink droplets are ejected from the corresponding nozzle openings 48.

  In the recording head 1, the bottom surface of the pressure generating chamber 29 (groove-shaped recess 33) is recessed in a V shape. For this reason, the partition wall portion 28 that partitions the adjacent pressure generation chambers 29 and 29 is formed such that the thickness of the base portion is thicker than the thickness of the tip portion. Thereby, the rigidity of the partition wall portion 28 can be increased as compared with the prior art. Therefore, even when the ink pressure fluctuates in the pressure generation chamber 29 when ink droplets are ejected, the pressure fluctuation can be hardly transmitted to the adjacent pressure generation chamber 29. As a result, so-called adjacent crosstalk can be prevented and ink droplet ejection can be stabilized.

  In this embodiment, since the ink supply port 45 that communicates the common ink chamber 14 and the pressure generation chamber 29 is formed by a fine hole that penetrates the thickness direction of the elastic plate 32, high dimensional accuracy is achieved by laser processing or the like. Is easily obtained. Thereby, the inflow characteristics (inflow speed, inflow amount, etc.) of the ink into each pressure generating chamber 29 can be aligned at a high level. Furthermore, when processing is performed with a laser beam, processing is also easy.

  Further, in this embodiment, a dummy pressure generating chamber (that is, an empty portion defined by the dummy recess 36 and the elastic plate 32) adjacent to the pressure generating chambers 29, 29 at the end of the row and not involved in ink droplet ejection. ), The adjacent pressure generating chambers 29 are formed on one side and the dummy pressure generating chambers are formed on the opposite side. Thereby, regarding the pressure generation chambers 29 and 29 at the end of the row, the rigidity of the partition walls defining the pressure generation chamber 29 can be made equal to the rigidity of the partition walls in the other pressure generation chambers 29. As a result, the ink droplet ejection characteristics of all the pressure generating chambers 29 in one row can be made uniform.

  Further, with respect to the dummy pressure generating chambers, the width in the row direction is made wider than the width of each pressure generating chamber 29. In other words, the width of the dummy recess 36 is wider than the width of the groove-like recess 33. Thereby, the discharge characteristics of the pressure generating chamber 29 at the end of the row and the pressure generating chamber 29 in the middle of the row can be aligned with higher accuracy.

  Furthermore, in the present embodiment, the front end surface of the case 2 is partially recessed to form the front end concave portion 15, and the common ink chamber 14 is defined by the front end concave portion 15 and the elastic plate 32. A dedicated member for forming the chamber 14 is not required, and the configuration can be simplified. Further, since the case 2 is manufactured by resin molding, it is relatively easy to manufacture the tip recess 15.

  Next, a method for manufacturing the recording head 1 will be described. In addition, since this manufacturing method has the characteristic in the manufacturing process of said pressure generation chamber formation board 30, it demonstrates centering on the manufacturing process of the pressure generation chamber formation board 30. FIG.

  The pressure generating chamber forming plate 30 is produced by forging using a progressive die. Further, the band-shaped metal substrate 55 (see FIG. 10) used as a material for the pressure generating chamber forming plate 30 is made of nickel as described above.

  The manufacturing process of the pressure generating chamber forming plate 30 includes a groove-shaped recess forming process for forming the groove-shaped recess 33 that is a recess-shaped part, and a communication port forming process for forming the communication port 34 at the bottom of the groove-shaped recess 33. It consists of and is performed by a progressive feed type.

  In the groove-shaped recess forming step, a first male mold 51 shown in FIG. 8 and a female mold 52 shown in FIG. 9 are used. The first male mold 51 is a mold for forming the groove-like recess 33. In this male mold, the same number of ridges 53 for forming the groove-like depressions 33 as the groove-like depressions 33 are arranged. Further, dummy ridges (not shown) for forming the dummy recesses 36 adjacent to the ridges 53 at both ends in the row direction are also provided. The tip 53a of the ridge 53 is tapered, and is chamfered at an angle of about 45 degrees from the center in the width direction as shown in FIG. 8B, for example. Thereby, it is sharp in V shape seeing from the longitudinal direction. Further, both ends in the longitudinal direction of the tip portion 53a are chamfered at an angle of about 45 degrees as shown in FIG. For this reason, the front-end | tip part 53a of the protrusion part 53 becomes a shape which chamfered both ends of the triangular prism.

  Further, as shown in FIG. 9, the female mold 52 has a plurality of streak projections 54 formed on the upper surface thereof. The streak 54 assists the formation of a partition partitioning the adjacent pressure generating chambers 29 and 29, and is provided at a position facing the protrusion 53 in the same direction as the longitudinal direction of the protrusion 53. It has been. As shown in FIGS. 9 and 10, the streak 54 is wedge-shaped in cross section and has a pointed portion facing the tip portion 53 a of the ridge 53. Further, the length of the streak-like projection 54 is set to be approximately the same as the length of the groove-like recess 33 (the ridge 53).

  In the groove-like recess forming step, first, as shown in FIG. 10A, the metal substrate 55 is placed on the upper surface of the female die 52, and the first male die 51 is placed above the metal substrate 55. . Next, as shown in FIG. 10B, the first male mold 51 is lowered and the tip of the protrusion 53 is pushed into the metal substrate 55. At this time, since the tip portion 53a of the ridge portion 53 is sharpened in a V shape, the tip portion 53a can be surely pushed into the metal substrate 55 without buckling the ridge portion 53. As shown in FIG. 10C, the protrusion 53 is pushed halfway in the thickness direction of the metal substrate 55.

  Due to the pushing of the protrusion 53, a part of the metal substrate 55 flows and the groove-like recess 33 is formed. Here, since the tip end portion 53a of the ridge 53 is pointed in a V-shape, even the fine groove-shaped recess 33 can be formed with high dimensional accuracy. That is, since the portion pressed by the tip portion 53 a flows smoothly, the formed groove-like recess 33 is formed in a shape that follows the shape of the protrusion 53. Furthermore, since both ends in the longitudinal direction of the tip portion 53a are also chamfered, the metal substrate 55 pressed by the portion also flows smoothly. Therefore, both end portions in the longitudinal direction of the groove-like recess 33 can be formed with high dimensional accuracy.

  When the tip portion 53a bites into the metal substrate 55 as described above, the metal material is sandwiched between the streak-like projection 54 facing the tip portion 53a and the tip portion 53a, and the flow of the material accompanying this is projected. It is made in the space between the strips 53, 53.

  Moreover, since pushing of the protrusion 53 is stopped in the middle of the plate thickness direction, a metal substrate 55 that is thicker than when formed as a through hole can be used. As a result, the rigidity of the pressure generating chamber forming plate 30 can be increased, and the ink droplet ejection characteristics can be improved. In addition, handling of the pressure generating chamber forming plate 30 is facilitated, and it is advantageous for improving the planar accuracy.

  Further, as a result of being pressed by the ridge 53, a part of the metal substrate 55 is raised in the space between the adjacent ridges 53, 53. Here, the streak 54 provided on the female mold 52 is arranged so as to face the protrusions 53, 53, and therefore assists the flow of the metal substrate 55 into this space. Thereby, the metal board | substrate 55 can be efficiently introduce | transduced with respect to the space between the protrusion parts 53, and a raised part can be formed highly.

  Next, the deformation behavior of the metal substrate when a large number of depressions are formed on the metal substrate will be described.

  FIG. 10C shows a state in which the first male mold 51 has advanced to the maximum stroke. In this state, the metal substrate 55 is completely restrained between the first male mold 51 and the female mold 52. Here, when the first male mold 51 returns to the original position, the metal substrate 55 is opened. At this time, due to the internal stress of the metal substrate 55, the pressure generating chamber forming plate 30 exhibits a smooth curved deformation such that the center portion is low and the end portion side is high as shown in FIG. This deformation is substantially arcuate. The reason why the metal plate 55 is curved as described above is that the thick portions 55a of the metal substrate 55 extend in the direction in which the groove-like recesses 33 are arranged due to internal stress, and the groove-like recesses 33 located above the thick portions 55a This phenomenon is considered to occur in combination with the phenomenon that the extension in the row direction cannot be restricted.

  In other words, as described above, the curved shape is such that the pressure generating chamber forming plate 30 is in a substantially horizontal state with the side where the groove-like recess 33 is open on the upper side and the bottom of the groove-like recess 33 on the lower side. In this case, the lined end portions of the line-shaped groove-like recesses 33 are positioned at the upper level, and the shape gradually decreases from the lined end toward the center.

  When the groove-like recess 33 is formed in this way, the process proceeds to a communication port forming step, and the communication port 34 that is a fine hole is formed at the bottom of the groove-like recess 33.

  In this communication port forming step, a second male mold 57 and a third male mold 59 are used as shown in FIG. Here, the second male die 57 is provided with a plurality of prismatic first punches 56 corresponding to the shape of the first communication port 37 in a comb tooth shape, that is, a plurality of first punches 56. Are arranged at a predetermined pitch. And the front end surface 56f of this punch 56 is formed so that it may become perpendicular | vertical with respect to the pushing direction line O1, as shown in FIG.11 (d). The third male mold 59 is formed by forming a plurality of prismatic second punches 58 corresponding to the shape of the second communication port 38 in a comb-teeth shape. Similarly, a plurality of second punches 58. The base members are arranged at a predetermined pitch. And the front end surface 58f of this punch 58 is formed so that it may become perpendicular | vertical with respect to the pushing direction line O1, as shown in FIG.11 (b). The second punch 58 is formed in a shape that is slightly thinner than the first punch 56.

  As shown in FIG. 10 (d), since the bottom of the groove-like recess 33 is also arranged on a substantially arc-shaped line, the end of the row-like recess 33 is shown in FIG. 11 (d). As shown, the center line O2 of the groove-like recess 33 is inclined by the angle θ with respect to the pushing direction line O1 of the punch 56. Therefore, when the punch 56 is pushed in the direction of the pushing direction line O1 in the state shown in FIG. 11D, only one corner of the punch tip surface 56f is the one-side inclined surface of the V-shaped bottom of the groove-like recess 33. Therefore, a bending force indicated by an arrow P1 acts on the punch 56. The bending force P1 acts from the end of the punch row 56a toward the center of the punch row 56a. Therefore, bending stress concentrates on the root portion of one punch 56.

  When such a bending force P1 acts, the pushing position of the punch 56 with respect to the bottom of the groove-like recess 33 is shifted to the right in FIG. 4D, and the accuracy of the opening position of the first communication port 37 is lowered. It will be. Such a phenomenon occurs remarkably at a position where the angle θ is large, and becomes more prominent as it goes to the end of the row of the groove-like depressions 33, and conversely, it is not regarded as a problem near the center of the punch row 56a. . That is, since the angle θ is large in the vicinity of the end portion of the groove-like recess 33, a shift in the pushing position of the punch 56 in the vicinity of the end portion becomes a problem. In such a phenomenon, the angle θ is gradually reduced toward the center line of the groove-like recesses 33, so that the bending force P1 is also gradually reduced. The positional deviation of the punch 56 may cause the punch 56 to be elastically deformed or plastically deformed, and in any case, the accuracy of the opening position of the first communication port 37 is lowered. Since the phenomenon as described above appears strongly at or near the end of the punch row 56a, the punch 56 near the end of the punch row is likely to be worn out, and the durability as a tool is reduced.

  In order to solve the above problem, as shown in FIG. 11 (e), the center side of the punch row 56 a faces the pushing direction of the punch 56 on the tip surface of the punch 56 near the end of the punch row 56 a. A receding inclined surface 56g was formed. As shown in FIG. 11 (f), the inclined surface 56 g is provided with an inclination that protrudes toward the traveling direction of the male mold (punch 56) as the vicinity of the end of the punch row 56 a goes to the end. Further, the punch front end row 56b formed by the front end surface of each punch 56 of the punch row 56a has an inclination that protrudes toward the advancing direction of the male mold 57 as the vicinity of the end of the punch row 56a goes to the end. Yes. That is, the two-dot chain line shown in FIG. 5 (f) is a virtual plane S that exists in a state perpendicular to the pushing direction of the punch 56 (male), and the central portion side (the right side in the drawing) of the punch row 56a. The distance between the virtual plane S and the inclined surface 56g increases as the distance increases. The punch tip row 56b means a shape line formed by connecting the tip portions of the punches 56 in the punch arrangement direction.

  As shown in FIG. 11G, by forming the inclined surface 56g, an acute angle portion 56h is formed at the corner portion of the tip surface of the punch 56. When the acute angle portion 56h hits the slope of the bottom of the groove-like recess 33, the bending force P1 as described above is generated. At the same time, the acute angle portion 56h bites into the bottom of the groove-like recess 33, so that a bending force P2 that opposes the bending force P1 is generated. Due to the generation of the bending force P2, the opposing bending force P1 is canceled out entirely or partially, so that the bending force P1 that tries to bring the punch 56 closer to the center of the punch row 56a disappears or is reduced. The generation of the bending force P <b> 2 is considered to be caused by the reaction of the inclined surface 56 g biting into the metal substrate 55 from the metal substrate 55.

  Each punch 56 shown in FIG. 11 (f) has the same pitch as the arrangement pitch of the groove-like recesses 33, and when the male mold 57 advances, each punch 56 becomes a predetermined position at the bottom of the groove-like recess 33. Is pushed into. As described above, the punch front end row 56b formed by the front end surface of each punch 56 of the punch row 56a has an inclination that protrudes toward the advancing direction of the male mold 57 as the vicinity of the end of the punch row 56a goes to the end. Have. In accordance with such a principle, the following various modifications can be made in the shape of the punch leading end row 56b. That is, in FIG. 11H, the punch tip end row 56b has a smooth curved shape, and in this example, the punch tip end row 56b draws an arc line. In FIGS. 11 (h) to 11 (l), the groove-shaped recess 33 formed in advance on the pressure generating chamber forming plate 30 (metal substrate 55) is illustrated by arranging short lines finely. .

  In FIG. 11 (i), the punch front end row 56b is a straight portion 56c in which the vicinity of the end of the punch row 56a is inclined, and the vicinity of the center of the punch row is a linear portion 56d extending in the row direction. Yes. In the example of FIG. (I), the linear portion 56d can be formed into a smooth curved shape. This curved portion is formed in the same manner as an arc-shaped portion 56i shown in FIG. Further, FIG. (J) shows a case where the linear portion 56d in the vicinity of the center of (i) protrudes in the pushing direction of the punch 56. In the drawing (k), the punch tip row 56b near the end of the punch row 56a is an arc-shaped portion 56i, and the vicinity of the center is a straight portion 56d.

  The modification of the punch tip row 56b is as described above. The length of the punch 56 is set according to the shape of the punch tip row 56b. That is, as shown in each example, the length of the punch is set so that the vicinity of the end of the punch row 56a becomes longer toward the end. Further, the punch 56 in the vicinity of the end portion of the punch row 56a is set to be longer than the punch 56 in the substantially central portion of the punch row 56a (FIGS. 11 (h), (i), (l), etc.). Further, the vicinity of the end portion of the punch row 56a is set so as to become longer toward the end portion, and the length in the vicinity of the center portion of the punch row 56a is set to protrude in the pushing direction of the punch 56 ( FIG. 11 (j), (k), etc.). Note that, as shown in FIG. 11 (m), the bending force P2 can be obtained by arranging the front ends of the punches 56 on the virtual plane S.

  In this communication port forming step, the first punch 56 and the second punch 58 arranged in a row by raising and lowering the base member are moved up and down all at once, and the communication ports 34 that are fine holes arranged in a row are simultaneously drilled. To do. That is, first, as shown in FIG. 11 (a), the first punch 56 of the second male mold 57 is pushed in from the bottom of the metal substrate 55 on the groove-like recess 33 side to the middle in the plate thickness direction. A non-penetrating recess that becomes 37 is formed (first communication port forming step). In this first communication port forming step, as shown in FIG. 11G, the punch leading end row 56b is opposed to the bending forces P1 and P2, thereby preventing the punch 56 from being bent and the pushing position from being displaced. Yes.

  As described above, the bending forces P1 and P2 face each other to prevent the punch 56 from bending and to prevent the pushing position from being displaced, so that the communication port 34 is accurately formed at a predetermined location. Further, since the bending force against the punch 56 is offset or greatly reduced by the opposing bending forces P1 and P2, durability of the punch 56 is improved.

  Also in the second punch 58 of the third male mold 59, as shown in FIG. 11B, a punch tip row 58b formed by the punch row 58a and the tip portion of each punch 58 is formed as in the punch 56. Has been. The shape of the punch tip row 58b and the length of the punch are configured in the same manner as the length of the punch tip row 56b and the punch 56. As described above, when the recess serving as the first communication port 37 is formed, the second punch 58 of the third male mold 59 is pushed in from the groove-like recess 33 side as shown in FIG. It pushes into the bottom part of the 1st communicating port 37, and the non-penetrating recessed part used as the 2nd communicating port 38 is formed (2nd communicating port formation process). In the second communication port forming step, the bulging portion 38 a is formed on the back surface of the metal substrate 55.

  Thereafter, the bulging portion 38a is polished to a virtual plane 30a indicated by a two-dot chain line in FIG. 11B, and the second communication port 38 is opened to the back side of the pressure generating chamber forming plate 30 (third Communication port forming process).

  It is as follows when the effect of the Example of the said fine hole drilling processing method is listed.

  That is, according to the fine hole drilling method of the present invention, when the groove-like recesses 33 arranged in a row at a predetermined pitch are formed on the metal substrate 55 for some reason, for example, The internal stress generated in the forming local part of the substrate 55 is accumulated in a row, and the row-like arrangement form of the groove-like recesses 33 is viewed in the direction in which the groove-like recesses 33 are arranged. May have a deformed shape such as 55 curved. However, since the inclined surface 56g in which the central portion side of the punch row 56a recedes with respect to the pushing direction of the punch 56 is provided at least on the front end surface of the punch 56 in the vicinity of the end portion of the punch row 56a, the end shape is changed according to the above-described variant. Even if a bending force P1 toward the center of the punch row acts on the punch 56 in the vicinity of the portion, a bending force P2 opposite to the bending force P1 is generated. Therefore, since the bending force P2 obtained by the inclined surface 56g cancels or greatly reduces the bending force P1, the bending force P1 acting on the punch 56 can be reduced to a level that does not cause a problem. In this way, since no inclination or the like occurs in the punches 56 near the ends of the punch rows 56a, the communication ports 34 can be accurately formed in rows at predetermined locations on the bottom of the groove-like recesses 33.

  Accordingly, it is possible to prevent a decrease in machining accuracy due to the irregular shape and obtain a good accuracy quality. Furthermore, since the bending load on the punch 56 in the vicinity of the end portion is reduced, the punch 56 in a specific portion is not bent or broken, and the durability of the punch tool can be improved. The above advantages are particularly effective when, for example, the communication ports 34 in the liquid ejecting head are provided in a line.

  Groove-shaped recesses 33 arranged in a row at a predetermined pitch are formed on the metal substrate 55, and punches 56 having the same pitch as the pitch are pushed into the groove-shaped recesses 33, so that they are closely arranged. With respect to the predetermined position of the groove-like recess 33, the communication port 34 can be accurately formed also in the groove-like recess 33 located in the vicinity of the row end.

  The punch leading end row 56b in the punch row 56a has an inclination that protrudes toward the advancing direction of the male die 57 as the vicinity of the end of the punch row 56a goes to the end portion. At the same time, the punch 56 near the end can be processed with high accuracy at the initial stage. Then, as the male mold 57 advances, a bending force P1 toward the center of the punch row acts on the punch 56 near the end, or the punch 56 near the end is first pushed into the groove-like recess 33, and the processing time is increased. Since the bending force P1 acting on the punch 56 in the vicinity of the end portion is alleviated by the inclined surface 56g even if the machining load increases and the machining load increases, the communication port can be accurately connected to a predetermined portion of the groove-like recess 33. 34 can be formed, and only the punch 56 in the vicinity of the end portion is not worn out at an early stage, and the durability of the punch tool can be improved.

  In the punch row 56a, the punch leading end row 56b protrudes toward the advancing direction of the male mold 57 in the vicinity of the end portion of the punch row 56a rather than the central portion, so that the deformed shape is generated in the pressure generating chamber forming plate 30. Even if the punch 56 in the vicinity of the end portion starts processing prior to the punch 56 in the center of the punch row, the entire punch row is processed, and the communication port 34 is accurately positioned at a predetermined position of the groove-like recess 33. Is drilled.

  Since the punch leading end row 56b in the punch row 56a has a smooth curved shape, the punch 56 in the vicinity of the end of the punch row 56a is continuously drilled accurately and gradually in the center of the punch row. The drilling process shifts and smooth continuous machining can be performed, which is effective for improving the durability of the punch 56.

  Since the punch leading end row 56b in the punch row 56a is formed in the linear portion 56c in which the portion in the vicinity of the end of the punch row 56a is inclined, the straight line after the punch 56 in the vicinity of the end starts processing. The processing gradually moves toward the center of the punch row in accordance with the degree of inclination of the shaped portion 56c. Thus, by selecting the inclination of the linear portion 56c to a predetermined angle, the machining load of the punch 56 near the end can be set in accordance with the durability and machining depth of the punch 56. This is effective for improving the durability of the tool.

  The punch leading end row 56b of the punch row 56a is formed as a linear portion 56c in which a portion near the end of the punch row 56a is inclined, and the vicinity of the center of the punch row 56a is formed as a linear portion 56d extending in the row direction. Therefore, after the punch 56 in the vicinity of the end portion starts processing, the processing gradually shifts to the center side of the punch row according to the inclination degree of the linear portion 56c. Thus, by selecting the inclination of the linear portion 56c at a predetermined angle, the processing load of the punch 56 near the end can be set according to the durability and processing depth of the punch 56, and Since the processing shifts from the inclined linear portion 56c to the linear portion 56d having no inclination, the entire punch row can be processed smoothly.

  The punch leading end row 56b in the punch row 56a is formed into a smooth arc-shaped portion 56i in the vicinity of the end portion of the punch row 56a, and the central portion of the punch row 56a is formed in a linear portion 56d extending in the row direction. Therefore, after the punch 56 in the vicinity of the end portion starts processing, the processing gradually moves toward the center of the punch row in accordance with the curved state of the arc-shaped portion 56i. Thus, by selecting the curved state of the arc-shaped portion 56i to a predetermined curvature, the processing load of the punch 56 near the end can be set in accordance with the durability and processing depth of the punch 56, and Since the processing shifts from the arc-shaped portion 56i to the linear portion 56d, the processing of the entire punch row can be performed smoothly.

  The length of the punch 56 is set so that the vicinity of the end portion of the punch row 56a becomes longer toward the end portion, so that the punch 56 in the vicinity of the end portion moves toward the center of the punch row as the male mold 57 advances. Even if the bending force P1 is applied to the punch 56 or the punch 56 in the vicinity of the end is first pushed into the pressure generating chamber forming plate 30 and the processing time becomes longer and the processing load increases, the inclined surface 56g increases the vicinity of the end. Since the bending force P1 acting on the punch 56 is relaxed, the communication port 34 can be accurately formed at a predetermined position of the pressure generating chamber forming plate 30, and only the punch 56 in the vicinity of the end portion is in an early stage. Therefore, the durability of the punch tool can be improved.

  The length of the punch 56 is set so that the punch 56 in the vicinity of the end of the punch row 56a is longer than the punch 56 in the substantially central portion of the punch row 56a. Even if a deformed shape is generated, the punch 56 near the end starts processing before the punch 56 in the center of the punch row, and then processing is performed over the entire punch row, and at a predetermined position at the bottom of the groove-like recess 33. Drilling of the communication port 34 is performed accurately.

  The length of the punch 56 is set so that the vicinity of the end portion of the punch row 56 a becomes longer toward the end portion, and the length in which the vicinity of the center portion of the punch row 56 a protrudes in the pushing direction of the punch 56. Accordingly, the bending force P1 toward the center of the punch row acts on the punch 56 near the end as the male mold 57 advances, or the punch 56 near the end first forms a pressure generating chamber. Even if the processing time is increased due to being pushed into the plate 30 and the processing load is increased, the bending force P1 acting on the punch 56 in the vicinity of the end is relieved by the inclined surface 56g. The communication port 34 can be accurately formed at a predetermined location, and only the punch 56 in the vicinity of the end portion is not worn out at an early stage, and the durability of the punch tool can be improved. And, since the vicinity of the central portion of the punch row 56a is set to a length that protrudes in the pushing direction, the processing in the vicinity of the central portion proceeds in a substantially continuous state to finish the processing in the vicinity of the end portion, Uneven processing can be performed over the entire punch row 56a.

  Even if the cross-sectional shape of the punch 56 is a rectangle whose shape accuracy is difficult to obtain at a predetermined value, the punch 56 in the vicinity of the end of the punch row 56a performs high-precision machining at an early stage of machining. The communication port 34 is obtained.

  A first step of forming a non-penetrating recess 37 in the pressure generating chamber forming plate 30 by the first punch 56, and a non-penetrating recess 38 by expanding the bottom of the recess 37 by the second punch 58. 2 and the third step of cutting out the bulged portion 38a, the machining by the punches 56 and 58 in the vicinity of the end portions of the punch rows 56a and 58a is advanced and highly accurate. In the first step and the second step, the recesses 37 and 38 have an accurate shape, and the bulging amount of the bulging portion 38a is substantially uniform. Therefore, the excision thickness in the third process is also constant for each recess, the excision process is simplified, and the length of the communication port 34 is uniform.

  Since the recess-like portion is the groove-like recess portion 33, the drilling process in the vicinity of the end portion of the punch row 56a is performed on the groove-like recess portion 33 with high accuracy in advance, and subsequently. The communication ports 34 can be accurately formed in rows at predetermined positions of the groove-like recess 33 so as to be adapted to the pitch of the groove-like recess 33.

  Since the groove-shaped recess 33 has a V-shaped bottom, when the communication port 34 is formed in the groove-shaped recess 33 having the V-shaped bottom, the groove-shaped recess 33 is arranged in a line. If the shape is irregularly shaped, the punch 56 is likely to bend or escape due to the V-shaped inclined surface, and the processing accuracy tends to be reduced. However, in the groove-like recess 33 near the end of the punch row 56a, Since accurate drilling is executed in advance at a predetermined location on the V-shaped inclined surface having an abnormal inclination angle, such a problem of processing accuracy can be solved.

  Further, according to the fine hole drilling tool of the present invention, even if the pressure generating chamber forming plate 30 has a curved shape, the central portion side of the punch row 56a retreats with respect to the pushing direction of the punch 56. Since the inclined surface 56g is provided, even if the bending force P1 toward the center of the punch row acts on the punch 56 in the vicinity of the end due to the above-described irregular shape, the bending force P2 opposite to the bending force P1 is generated. To do. Therefore, since the bending force P2 obtained by the inclined surface 56g cancels or greatly reduces the bending force P1, the bending force P1 acting on the punch 56 can be reduced to a level that does not cause a problem. In this way, no inclination or the like occurs in the punches 56 in the vicinity of the ends of the punch rows 56a, so that the communication ports 34 can be accurately formed in rows at predetermined locations of the groove-like recesses 33. Accordingly, it is possible to prevent a decrease in machining accuracy due to the irregular shape and obtain a good accuracy quality. Furthermore, since the bending load on the punch 56 in the vicinity of the end portion is reduced, the punch 56 in a specific portion is not bent or broken, and the durability of the punch tool can be improved. The above advantages are particularly effective when, for example, the communication ports 34 in the liquid ejecting head are provided in a line.

  Next, as shown in FIG. 12, in the first communication port forming step and the second communication port forming step in which the communication port 34 is formed by press working in the comb-like punches 56 and 58, Processing is performed while the punch 56 and the second punch 58 are sandwiched and guided by the guide members 70a and 70b, respectively. Hereinafter, this point will be described.

  FIG. 12A is a schematic diagram showing punches 56 and 58 arranged in a comb shape at a predetermined pitch, and guide members 70a and 70b for guiding the punches 56 and 58, respectively. A state in which this is applied to an actual punch is shown in FIG.

  13A is a cross-sectional view of FIG. 12A, and FIG. 13B is a vertical cross-sectional view in the row direction. Although only five punches 56 and 58 are shown in the figure, in practice, the same number of grooves 33 as the pressure generating chambers 29 are arranged.

  As shown in FIG. 14, the first and second punches 56 and 58 each have a rectangular cross-sectional shape, and the surfaces A and B including two parallel sides of the rectangle are along the row direction L, respectively. They are arranged at a predetermined pitch. Then, both side surfaces A and B along the direction in which the punches 56 and 58 are arranged are sandwiched and guided by guide members 70a and 70b from two directions (see FIG. 13A).

  The guide members 70a and 70b have a pair of square bars extending in the direction L in which the punches 56 and 58 are arranged, and both sides of the inner surfaces facing the guide members 70a and 70b along the direction in which the punches 56 and 58 are arranged. The surfaces A and B are guided.

  Each of the guide members 70a and 70b is provided with a protrusion 71 that guides the side surfaces C and D (see FIG. 14) of the punches 56 and 58 facing the gap 72 between the punches 56 and 58 arranged in a row. . The protrusion 71 is formed on the inner surfaces of the guide members 70a and 70b facing each other so as to extend in the vertical direction from the upper end to the lower end of the guide members 70a and 70b. In addition, the protrusions 71 that guide the outer surfaces of the punches 56 and 58 in the row direction L of the punches 56 and 58 that are located at both ends of the punches 56 and 58 that are arranged in a row are formed in a step shape rather than a so-called convex shape. In the present embodiment, the protrusions 71 that guide the side surfaces C and D of the punches 56 and 58 facing the gap 72 include the protrusions 71 at both ends.

  Such a protrusion 71 is formed by a protrusion left between the grooves by performing groove processing by grinding the facing inner surfaces of the guide members 70a and 70b. Thus, by forming the protrusion 71 by grooving by grinding, which is a relatively inexpensive processing means, the processing cost of the guide members 70a and 70b can be reduced, and the overall processing cost can be reduced. In addition, the projection 71 can be machined with high machining accuracy, the guide accuracy of the punches 56 and 58 can be sufficiently secured, and the machining accuracy of the communication port 34 can also be secured.

  The protrusion 71 is provided in every other gap 72 between the punches 56 and 58 arranged in a row in one guide member 70a, and is provided in every other gap 72 in the other guide member 70b. It has been. And the said every other protrusion 71 is provided with one guide member 70a arrange | positioned at the one side A side of the punches 56 and 58 arranged in a row, and the other guide arrange | positioned at the other side B side. Between the members 70b, they are arranged in a staggered manner.

  In one guide member 70a, two punches 56 and 58 are disposed between the protrusions 71, and in the other guide member 70b, two punches are similarly provided at a position shifted by one from the one guide member 70a. Has been placed.

  By combining the following functions and effects of the guide members 70a and 70b and the functions and effects of the punch rows 56a and 58a and the punch tip rows 56b and 58b according to the present invention, further finer hole drilling is achieved. Thus, a method and a tool can be ensured, and furthermore, the recording head 1 can be manufactured and its apparatus can be obtained with stable quality.

  By arranging the protrusions 71 in such an arrangement, the punches are not only guided from the two directions of the two surfaces A and B along the arrangement direction L, but by the protrusions 71 arranged in a staggered manner, The guides can be guided from four directions including the surfaces C and D corresponding to the gap 72 between the punches 56 and 58, and the bending and escape of the punches 56 and 58 during processing are greatly suppressed, and the shape of each communication port 34 Accuracy, dimensional accuracy, and arrangement accuracy of the communication ports 34 can be dramatically improved.

  Moreover, by providing the protrusions 71 at every other gap 72 between the punches 56 and 58, the number of protrusions 71 formed on the guide members 70a and 70b can be reduced accordingly. Grinding of the guide members 70a and 70b for forming the shape can be simplified, the processing cost of the grinding with a relatively low processing cost can be further reduced, and the overall cost can be reduced.

  With such guide members 70a and 70b, both side surfaces A and B along the arrangement direction L of the arranged punches 56 and 58 are sandwiched by the guide members 70a and 70b. The four surfaces are guided by the inner surfaces of the guide members 70a and 70b and the projections 71, and the punches 56 and 58 are pushed into the metal substrate 55 in the guided state, so that the rectangular communication in the form of openings arranged in a line is formed. Mouth 34 is formed.

  As described above, the press working is performed while guiding the side faces A and B along the arranging direction L of the punches 56 and 58 and the faces C and D corresponding to the gap 72, so that the stress generated by the processing Therefore, it is possible to improve the shape accuracy and dimensional accuracy of each communication port 34 and the arrangement accuracy of the communication ports 34 arranged in a row. Further, since the punches 56 and 58 can be machined in a state in which the punches 56 and 58 are prevented from being bent, the wear and damage of the punches 56 and 58 can be greatly reduced, the tool life can be greatly extended, and the accuracy of the communication port 34 can be greatly improved. Can be maintained over a long period of time, which is advantageous in terms of process control and accuracy control. And it can process with high dimensional accuracy without impairing the processing shape of the adjacent groove-shaped recess 33 or V-shaped bottom, and it is highly accurate to form a large number of micro holes arranged at a predetermined pitch, which is relatively difficult to perform with high accuracy. Can be processed.

  Further, in the communication port forming step, the V-shaped bottom portion of the groove-like recess 33, which is a processed portion by plastic processing in the metal substrate 55, is punched out by press working to form a fine communication port 34. As described above, the workability of the processed portion by plastic working is lowered by work hardening, and it is more difficult to increase the accuracy and mold life when performing the processing to form the fine communication port 34. By machining while guiding the guide, bending or escape of the punch can be prevented and high-precision machining can be performed. Further, when the fine communication port 34 is formed in the groove-shaped recess 33 having the V-shaped bottom portion, the punches 56 and 58 are likely to bend and escape and the processing accuracy tends to be lowered. According to the example, the punch can be prevented from bending or escaping and high-precision machining can be performed.

  Further, when the punches 56 and 58 having a rectangular cross section are guided by the guide member 73 which forms the guide portion 75 by the round hole 74 which is a general method shown in FIG. 15, the sliding area of the guide portion 75 is extremely small. The guide portion 75 is severely worn and damaged, and the life of the guide member 73 is extremely short. However, the punches 56 and 58 arranged in the same manner as in this embodiment are paired from both sides along the arrangement direction L. By sandwiching and guiding between the members 70a and 70b, a large sliding area of the guide surface can be secured, and the life of the guide members 70a and 70b can be greatly extended.

  Further, when trying to guide the punches 56 and 58 arranged by the guide by the round hole 74 as described above, a pitch dimension P is required to some extent, and it is possible to simultaneously drill holes arranged in a line at a minute pitch. However, according to this embodiment, even if the pitch dimension P is small, it is possible to guide stably and to ensure high processing accuracy.

  In the present embodiment, the pitch dimension P of the first and second punches 56 and 58 is set to 0.3 mm or less, which is effective when forming the communication ports 34 arranged at this pitch. The pitch dimension P is more effective when it is 0.25 mm or less, and more effective when it is 0.2 mm or less.

  Further, in this embodiment, in particular, when the communication opening 34 having an opening size of 0.2 mm or less is formed, or the ratio of the thickness of the metal substrate 55, that is, the penetration dimension to the opening dimension of the communication opening 34 is 0.5 or more This is effective when forming a fine hole. Moreover, it is still effective if a fine hole of 0.8 or more is formed as the above ratio, and it is more effective if processing of one or more fine holes. In the above embodiment, the opening size of the communication port 34 is a rectangle of 0.095 mm × 0.16 mm.

  Furthermore, in the present embodiment, the communication ports 34 are produced by a plurality of processes using punches 56 and 58 having different thicknesses, so that even the extremely fine communication ports 34 are produced with high dimensional accuracy. Can do. In addition, since the first communication port 37 manufactured from the groove-shaped recess 33 side is only manufactured up to the middle of the plate thickness direction, the partition wall portion 28 of the pressure generating chamber 29 is excessively formed when the first communication port 37 is manufactured. The problem of being pulled can be prevented. As a result, the V-shaped bottom portion of the groove-like recess portion 33 and the shape of the partition wall portion 28 can be manufactured with good dimensional accuracy without impairing the shape.

  In addition, although the process which produced the communicating port 34 by two processes was illustrated in a present Example, you may produce the communicating port 34 by three or more processes. Further, if the above problem does not occur, the communication port 34 may be manufactured by a single process.

  If the communication port 34 is produced, the surface of the metal substrate 55 on the groove-like recess 33 side and the surface on the opposite side are polished and flattened (polishing step). That is, as shown by the alternate long and short dash line in FIG. 11C, the surface on the groove-like recess 33 side and the surface on the opposite side to the groove-like recess 33 are polished to flatten each of these surfaces. The plate thickness is adjusted to a predetermined thickness (0.3 mm in this embodiment).

  The groove-shaped recess forming step and the communication port forming step may be performed on separate stages or on the same stage. And when it carries out on the same stage, since the metal substrate 55 does not move in both processes, the communication port 34 can be produced in the groove-like recess 33 with high positional accuracy.

  If the pressure generating chamber forming plate 30 is manufactured through the above steps, the elastic plate 32 and the nozzle plate 31 separately manufactured are joined to the pressure generating chamber forming plate 30 to manufacture the flow path unit 4. In this embodiment, these members are joined by bonding. At the time of bonding, the surface of the pressure generating chamber forming plate 30 is flattened in the above polishing step, so that the elastic plate 32 and the nozzle plate 31 can be bonded securely.

  Further, since the elastic plate 32 is a composite material using a stainless steel plate as a support plate 42, the linear expansion coefficient is defined by the stainless steel as the support plate 42. The nozzle plate 31 is also made of a stainless steel plate. Furthermore, as described above, nickel constituting the pressure generating chamber forming plate 30 has a linear expansion coefficient substantially equal to that of stainless steel. From the above, even when the bonding temperature is increased, no warpage due to the difference in linear expansion coefficient occurs. As a result, the bonding temperature can be increased more than when a silicon substrate is used, the bonding time can be shortened, and the manufacturing efficiency is improved.

  If the flow path unit 4 is manufactured, the vibrator unit 3 and the flow path unit 4 are joined to the separately manufactured case 2. Also in this case, these members are joined by bonding. Therefore, even if the bonding temperature is increased, the flow path unit 4 is not warped, and the bonding time can be shortened.

  If the vibrator unit 3 and the flow path unit 4 are joined to the case 2, the flexible cable 9 and the connection substrate 5 of the vibrator unit 3 are soldered, and then the supply needle unit 6 is attached to the liquid jet head. Is obtained.

  FIG. 16 shows a second example of the communication port forming step. In this example, the protrusions 71 on the inner surfaces of the guide members 70a and 70b are not provided in every other gap 72 between the punches 56 and 58, but are provided in all the gaps 72. By doing so, the four side surfaces of each of the punches 56 and 58 having a rectangular cross section can be firmly guided, and processing with higher accuracy is possible.

  FIG. 17 shows a third example of the communication port forming step. In this example, the protrusions 71 are not formed on the inner surfaces of the guide members 70a and 70b, and the two surfaces A and B along the arrangement direction L of the punches 56 and 58 having a rectangular cross section are guided. According to this example, by sandwiching both side surfaces of the arranged punches 56 and 58 along the arrangement direction L from two directions, each punch is formed even if the guide surfaces of the guide members 70a and 70b are planar. Since the side surfaces A and B, which are guided surfaces of 56 and 58, are in surface contact, the shape of the guide members 70a and 70b can be simplified and the cost can be reduced while ensuring the guide effect.

  A groove-like recess 33 is arranged on the metal substrate 55, that is, the pressure generating chamber forming plate 30 as described above, and the communication port 34 is formed by the above-described processing methods for the arranged groove-like recess 33. By being formed, the manufacturing method of the recording head 1 of the present invention is carried out. Therefore, even if the above-described irregular shape is generated in the pressure generating chamber forming plate 30, the communication port 34 of the groove-like recess 33, which is a precision structure portion, can be formed with extremely high accuracy, and the ink ejection characteristics as the recording head 1 can be achieved. Can be kept good.

  Next, an apparatus for manufacturing a liquid jet head for carrying out the above-described method for drilling a communication port will be described.

  19 to 23 show a first embodiment of a liquid jet head manufacturing apparatus according to the present invention.

  Reference numeral 76 is a sectional view showing the entire manufacturing apparatus of the recording head 1 or the recording head 1 'shown in FIG. The manufacturing apparatus 76 includes an upper operation unit 77 and a lower operation unit 78 that mainly form a press device, a first mold 79 fixed to the lower operation unit 78, and a first mold fixed to the upper operation unit 77. The second die 80, a male die fixed to the second die 80, and a guide member 82 that guides the male die 81 and is attached to the second die 80.

  The press device composed of the upper operation unit 77 and the lower operation unit 78 is of a commonly used type, and the upper operation unit 77 moves forward and backward by a drive device (not shown).

  The first die 79 positions and supports the pressure generating chamber forming plate 30 corresponding to the metal substrate 55 at a predetermined position with a positioning pin 83 fixed to the first die 79, as shown in FIG. A recess 84 is provided to form the bulging portion 38a shown. Note that a groove-like recess 33 is formed in the pressure generating chamber forming plate 30 in advance in the groove-like recess forming step shown in FIG.

  The second mold 80 includes the base member 85 coupled to the upper operation unit 77 and the punch plate 86 coupled to the base member 85. A male die 81 is attached to the punch plate 86 via a fixing piece 87. Two male molds 81 are attached in order to form communication ports in the two rows of the groove-like recesses 33 arranged in a row.

  The guide member 82 is formed by integrating a guide plate 88 and a guide base member 89, and is provided with a space portion 90 that avoids interference with the fixed piece 87 and allows relative displacement described later. The guide member 82 corresponds to the above-described guide members 70a and 70b, and has a structure in which two members of the guide plate 88 and the guide base member 89 are integrated with the illustrated bolt. A single member may be used, or three or more members may be used.

  The guide member 82 is attached to the second mold 80 in a state in which the guide member 82 can be relatively moved in the same direction as the forward and backward movement of the male mold 81. An advancing / retracting shaft 91 having a circular cross section, which is an advancing / retracting member, is fixed to the guide base member 89 in the same direction as the advancing / retreating direction of the upper operation portion 77, and its upper part is advanced into an advancing / retreating chamber 92 formed in the base member 85. . The advance / retreat chamber 92 is a cylindrical space having a circular cross section, and its inner diameter is set larger than the diameter of the advance / retreat shaft 91. A stopper piece 93 is fixed to the upper end of the advance / retreat shaft 91, and the stopper piece 93 can slide up and down in the advance / retreat chamber 92 like a piston. A compression coil spring 94 as an urging means is inserted into the advance / retreat chamber 92, and the spring force acts on the stopper piece 93. The spring force acts in a direction in which the guide member 82 is separated from the second mold. In order to adjust the spring force acting on the stopper piece 93, an adjustment bolt 96 for adjusting the position of the spring seat 95 and the spring seat 95 is provided. An elastic rubber piece may be used instead of the compression coil spring 94.

  In order to cause the guide member 82 to move relative to the second mold 80, a displacement space S is provided between the second mold 80 and the guide member 82. In addition, a similar displacement space S is provided also in the space portion 90 between the lower surface of the fixed piece 87 and the upper surface of the guide plate 88.

  22 and 23 are perspective views showing the overall shape of the male mold 81 and the punched portion. The male mold 81 corresponds to the second male mold 57 or the third male mold 59 described above, and a large number of punches 97 are provided in a row at the front end portion thereof, and is continuous with the fixed portion side of the punch 97 so as to have high rigidity. A portion 98 is provided. The cross-sectional area of the high-rigidity portion 98 is set larger than the cross-sectional area of the punch 97 portion. Further, a fixed base 99 is provided continuously to the fixed portion side of the high-rigidity portion 98. The cross-sectional area of the fixed base 99 is set larger than the cross-sectional area of the high-rigidity portion 98. The male mold 81 incorporated here is the same as that shown in FIG. In order to show the punch row and the punch tip row in FIG. 22, the same reference numerals as in FIG. 12, ie, punch rows 56a and 58a, punch tip rows 56b and 58b, a straight portion 56c and a straight portion 56d are attached.

  A pressing surface 100 is formed on the fixed base 99 in a direction substantially perpendicular to the advancing / retreating direction of the male mold 81. The fixing piece 87 (see FIG. 19) is provided with an elongated insertion hole 101 into which the fixing base 99 is inserted and a fixing surface 102 for pressing the pressing surface 100. Further, between the punch 97 and the high-rigidity portion 98 and between the high-rigidity portion 98 and the fixed base 99, the curved surfaces 103 and 104 are smoothly continuous as shown in FIG.

  As shown in FIG. 23, separation slits 105 are provided between adjacent punches 97, and the pitch of each punch 97 is the same as the pitch of the groove-like recesses 33 arranged in a row.

  The mounting position of the male mold 81 is set so that the end of the groove-like recess 33 in which the punch 97 is arranged is pushed, that is, the row of the punch 97 is orthogonal to the longitudinal direction of the groove-like recess 33. Yes. In this example, the portion that guides the male die 81 is a portion of the punch 97, and therefore, as shown in FIG. 21, a slit hole 106 through which the punch 97 passes is provided. The opposing inner surfaces of the slit hole 106 are the restricting surfaces 107a and 107b, and the punch 97 is prevented from being displaced in the longitudinal direction of the groove-like recess 33. In order to reliably achieve this deterring function, the restricting surfaces 107 a and 107 b slide on both sides of the punch 97. Alternatively, a slight gap is provided between the restricting surfaces 107 a and 107 b and both sides of the punch 97. In FIG. 19 and FIG. 21 and the like, the gap is shown to be quite large, but in actuality, the sliding relationship is as described above. The guide plate 88 is formed with a long and narrow groove 108 that receives the high-rigidity portion 98 so as to communicate with the slit hole 106.

  FIG. 19 shows a state before the molding operation of the guide member 82 and the male die 81 is started. In this state, the stopper piece 93 is brought into close contact with the lower surface of the advance / retreat chamber 92 by the spring force of the compression coil spring 94. A relative position between the guide plate 88 and the punch 97 is set. In this example, the state before the start of the molding operation is such that the lower surface of the guide plate 88 and the end surface of the front end portion of the punch 97 are on one virtual plane.

  FIG. 24 shows a case where the formation location of the pressing surface 100 is changed to both end portions of the male die 81.

  The operation of the recording head manufacturing apparatus 76 will be described.

  When the second mold 80 advances from the state shown in FIG. 19 and the guide plate 88 and the punch 97 move with the relative position of the second mold 80 unchanged, the guide plate 88 first comes into close contact with the pressure generating chamber forming plate 30. Then, the guide member 82 stops. Thereafter, when the second die 80 is further advanced, the punch 97 is relatively projected from the guide plate 88 while the compression coil spring 94 is compressed, and is pushed into the end of the groove-like recess 33. When the push-in length of the punch 97 reaches a predetermined length, the second die 80 starts to return, and the punch 97 generates pressure while the guide plate 88 pressurizes the pressure generating chamber forming plate 30 with the compression coil spring 94. The chamber forming plate 30 is pulled out.

  According to the recording head manufacturing apparatus 76, the center side of the punch rows 56 a, 58 a is at the front end surface of the punches 56, 58 near at least the ends of the punch rows 56 a, 58 a with respect to the pushing direction of the punches 56, 58. Since the punches 56 and 58 having the inclined surfaces 56g that are retracted are pushed into the groove-like recesses 33, the punches near the ends of the punch rows 56a and 58a even if the groove-like recesses 33 are arranged in an irregular shape. 56 and 58 can be pushed into the bottom of the groove-shaped recess 33 in advance. Therefore, the communication port 34 of the groove-like recess 33, which is a precision structure, can be formed with extremely high accuracy, and the ink ejection characteristics of the recording heads 1 and 1 'can be kept good.

  Furthermore, according to the present apparatus, the punch 97 has a structure in which press working is performed while guiding both side portions of the punch 97 with the restriction surfaces 107a and 107b of the slit hole 106 formed in the guide plate 88. Bends and escapes can be prevented, and the shape accuracy and dimensional accuracy of each minute communication port 34 can be improved, and the alignment accuracy of the communication ports 34 arranged in a row can also be improved. Further, since the punch 97 can be machined in a state in which the punch 97 is prevented from being bent and escaped, the wear and damage of the punch 97 can be greatly reduced, the tool life can be greatly extended, and the accuracy of the communication port 34 can be extended over a long period of time. This is advantageous in terms of process control and accuracy control. And it can process with sufficient dimensional accuracy, without impairing the adjacent communicating port 34 or a process shape, and can process the communicating port 34 arranged in many rows by the predetermined pitch which is comparatively difficult to process with high precision.

  In addition, the groove-shaped recess 33 formed in advance is deteriorated in workability due to work hardening by plastic working, and it is more difficult to increase accuracy and mold life when processing to form a fine communication port 34 is performed. However, when the punch 97 is processed while being guided, the punch 97 is prevented from being bent or escaped, and high-precision processing can be performed.

  Since the punch 97 of the male mold 81 is guided by a guide plate 88 which can be moved back and forth, even if the pushing length of the punch 97 with respect to the pressure generating chamber forming plate 30 is increased, the guide plate 88 is used as the pressure generating chamber forming plate 30. Or close to the pressure generating chamber forming plate 30. For this reason, the guide function of the guide plate 88 is fulfilled at a place as close as possible to the place where the stress generated by the machining is generated, and the bending and escape of the punch 97 due to the machining stress can be prevented more reliably.

  The restricting surfaces 107 a and 107 b prevent the punch 97 from being displaced in the longitudinal direction of the groove-like recess 33. Therefore, the punch 97 is likely to bend and escape in the longitudinal direction substantially orthogonal to the arrangement direction of the punch 97, but by suppressing such displacement of the punch 97 by the regulating surfaces 107a and 107b. Therefore, the punch 97 is prevented from being bent or escaping, and the communication port 34 is formed with high processing accuracy.

  Since the regulating surfaces 107a and 107b are formed by the opposed inner surfaces of the slit hole 106, the inner surfaces exist with high rigidity capable of withstanding a large load. Therefore, a stable guide function can be performed on the regulating surfaces 107a and 107b. Further, since the regulation surfaces 107a and 107b can be secured immediately by forming the slit hole 106, the regulation surfaces 107a and 107b can be obtained with a simple configuration.

  When the second mold 80 is advanced and the guide plate 88 is pressed against the pressure generating chamber forming plate 30, the punch 97 is relatively protruded from the guide plate 88 and pressed into the pressure generating chamber forming plate 30, and the pressure generating chamber forming plate is pressed. Even if the length of pushing of the punch 97 with respect to 30 is increased, the guide plate 88 is in close contact with the surface of the pressure generating chamber forming plate 30 or is located very close to the pressure generating chamber forming plate 30. For this reason, the guide function of the guide plate 88 is fulfilled at a place as close as possible to the place where the stress generated by the machining is generated, and the bending and escape of the punch 97 due to the machining stress can be prevented more reliably.

  The cross-sectional area from the punch 97 to the high-rigidity portion 98 and the fixed base portion 99 sequentially increases, so that the rigidity of the entire male die 81 is set to be the largest in the fixed base portion 99. Therefore, since the rigidity system of the male mold 81 gradually increases toward the fixed portion, the stress does not abnormally concentrate on a specific portion of the male mold 81 when pushing or withdrawing, and the entire male mold 81 is The durability of the structure can be improved. In addition, the mounting rigidity of the male mold 81 with respect to the second mold 80 can be secured in a stable state, and sufficient durability can be obtained for pressure molding that is frequently performed.

  Since the male die 81 is attached in a state where the pressing surface 100 is strongly pressed by the fixing piece 87, the attachment rigidity of the male die 81 to the second die 80 can be increased. In particular, when the punch 97 pushed into the pressure generating chamber forming plate 30 is pulled out, it is necessary to transmit a large pulling force from the second mold 80 to the male mold 81. In such a case, the pressing surface 100 is fixed to the fixed piece. Since the fixing surface 102 of 87 is pressed down, the male mold 81 and the second mold 80 can be pulled out with certainty, and the manufacturing apparatus 76 with good operation stability can be obtained from such a surface.

  With the plurality of male dies 81, the communication ports 34 can be formed at a time in each of the rows of the plurality of groove-shaped recess portions 33 arranged in one molding stroke, thereby improving productivity. . Further, when two male molds are arranged so that the communication ports can be formed in two rows in parallel, productivity can be improved in the same manner.

  The guide plate 88 is provided with two functional parts, that is, a slit hole 106 that performs a guide function and a surface that presses the pressure generation chamber forming plate 30, so that a multi-functionality is achieved with a guide member having a simple structure. be able to.

  25 and 26 show a second embodiment of the liquid jet head manufacturing apparatus of the present invention.

  In this embodiment, an inclined surface 109 is formed at the end of the groove-like recess 33, and the punch 97 is pushed into the inclined surface 109. In order to form the inclined surface 109, the inclined surface forming portion 53b is chamfered at the longitudinal end portion of the tip portion 53a of the ridge portion 53 shown in FIG. When the protrusion 53 is pushed into the pressure generating chamber forming plate 30, a groove-like recess 33 having an inclined surface 109 at the end in the longitudinal direction is formed. The pressure generating chamber forming plate 30 having the inclined surface 109 is supported at a predetermined position of the first mold 79, and the punch 97 and the pressure generating chamber forming plate 30 are positioned relative to each other so that the punch 97 is press-fitted into the inclined surface 109. Is set. In this state, the male die 81 is advanced to form the communication port 34 on the inclined surface 109. Other than that, it is the same as that of the said Example, and attaches | subjects the same code | symbol to the same part.

  With the above configuration, the tip of the punch 97 is pressed against the inclined surface 109 at the initial stage of pushing, so that a large bending moment acts on the punch 97, but the portion of the punch 97 is guided by the guide plate 88. Therefore, the bending moment is reliably received by the guide plate 88, and even if the inclined surface 109 is as described above, the communication port 34 does not bend or escape in the punch 97 in a normal state. Can be formed. Furthermore, since the punch can be accurately press-fitted into the inclined surface 109 as described above, the material that flows by the press-fitting is smoothly pushed from the inclined surface 109 and protrudes into the space portion of the groove-like recess 33, etc. Can be prevented, the bubbles in the ink flow down smoothly, and the ink ejection state of the ink ejection head can be maintained normally. Other than that, there exists an effect similar to the said Example.

  Since the groove-like recess 33 has a V-shaped cross-sectional shape, when the punch 97 having a square cross section is pushed into the end of the groove-like recess 33, as shown in FIG. Is pushed into both the V-shaped inclined surface and the inclined surface 109. Accordingly, the occurrence of the “return” as described above can be prevented even on the V-shaped inclined surface.

  FIG. 27 shows a third embodiment of the liquid jet head manufacturing apparatus of the present invention.

  In this embodiment, the high rigidity portion 98 is guided by a guide plate 88. Other than that, it is the same as that of each said Example, and attaches | subjects the same code | symbol to the same part.

  With the above configuration, the high rigidity portion 98 that is a highly rigid portion of the male mold 81 is guided, so that the guide state of the male mold 81 becomes stable. At the same time, it is only necessary to secure the punch length required for press-fitting the punch 97 in the punch portion without securing the length required for the guide, so that the length of the punch 97 can be substantially shortened. Thus, the rigidity of the punch 97 itself against bending, escape, etc. can be increased. Other than that, there exists an effect similar to each said Example.

  By the way, the present invention is not limited to the above embodiments, and various modifications can be made based on the description of the scope of claims.

  For example, regarding the partition wall portion 28, if the base portion is thicker than the tip portion, the rigidity of the partition wall portion 28 can be increased as compared with the related art, and a necessary volume as the pressure generating chamber 29 can be secured. From this point of view, the shape of the recess at the bottom of the groove-like recess is not limited to the V shape. For example, the bottom surface of the groove-shaped recess 33 may be recessed in an arc shape. In order to produce such a bottom-shaped groove-like recess 33, the first male mold 51 having the protruding portion 53 whose tip is tapered in an arc shape may be used.

  Further, regarding the pressure generating element, an element other than the piezoelectric vibrator 10 may be used. For example, an electromechanical transducer element such as an electrostatic actuator or a magnetostrictive element may be used. Further, a heat generating element may be used as the pressure generating element.

  The recording head 1 ′ illustrated in FIG. 18 uses a heating element 61 as a pressure generating element. In this example, instead of the elastic plate 32, a sealing substrate 62 (a kind of the sealing plate of the present invention) provided with a compliance portion 46 and an ink supply port 45 is used, and pressure is generated by the sealing substrate 62. The groove-shaped recess 33 side of the chamber forming plate 30 is sealed. In this example, the heating element 61 is attached to the surface of the sealing substrate 62 in the pressure generation chamber 29. The heating element 61 is supplied with power through the electrical wiring and generates heat.

  Since the other components such as the pressure generating chamber forming plate 30 and the nozzle plate 31 are the same as those in the above embodiment, the description thereof is omitted.

  In the recording head 1 ′, the ink in the pressure generating chamber 29 bumps due to the power supply to the heating element 61, and the bubbles generated by the bumping pressurize the ink in the pressure generating chamber 29. By this pressurization, ink droplets are ejected from the nozzle openings 48.

  Also in this recording head 1 ′, since the pressure generating chamber forming plate 30 is produced by metal plastic working, the same operational effects as the above-described embodiments can be obtained.

  In each of the above-described embodiments, the fine hole drilling method, the pressure generating chamber forming plate 30 in the pressure generating chamber forming step, and the plastic forming such as press forming performed in the communication port forming step have a desired accuracy. In order to obtain high temperature, it is preferable to perform cold working, and in order to perform highly accurate machining, it is preferable to perform temperature management so that the temperature of the workpiece is within a certain range.

  In addition, regarding the processing of the pressure generating chamber forming plate 30, in the above-described embodiment, an example of manufacturing by forging which is a kind of plastic processing has been described, but the present invention is not limited thereto. Further, the material for producing the pressure generating chamber forming plate 30 is not limited to a single metal plate in terms of forming the base portion of the partition wall portion 28 thicker than the tip portion. For example, a laminated plate material produced by laminating a plurality of plate materials may be used, or a coated plate material obtained by coating the surface of a metal substrate with a resin.

  Moreover, although the example provided in the one end part of the groove-shaped recessed part 33 was demonstrated in the said Example regarding the communication port 34, it is not restricted to this. For example, the communication port 34 may be formed at substantially the center in the longitudinal direction of the groove-like recess 33, and the ink supply port 45 and the common ink chamber 14 communicating with the ink supply port 45 may be disposed at both ends in the longitudinal direction of the groove-like recess 33. This is preferable because it is possible to prevent ink stagnation in the pressure generation chamber 29 from the ink supply port 45 to the communication port 34.

  Each of the above embodiments is directed to an ink jet recording apparatus. However, the liquid ejecting head obtained according to the present invention is not only intended for ink for an ink jet recording apparatus, but includes glue, nail polish, Conductive liquid (liquid metal) or the like can be ejected. Furthermore, in the above-described embodiments, the ink jet recording head using ink that is one of the liquids has been described. However, the colors used for the manufacture of color filters such as recording heads and liquid crystal displays used in image recording apparatuses such as printers. Applied to all liquid ejecting heads for ejecting liquids, such as material ejecting heads, organic EL displays, electrode material ejecting heads used for electrode formation such as FED (surface emitting display), and bio-organic ejecting heads used in biochip manufacturing. Is also possible.

  Furthermore, in each of the above-described embodiments, an example in which the fine hole drilling method of the present invention is applied to the manufacture of a liquid jet head has been described. However, the scope of the present invention is not limited to this. Needless to say.

2 is an exploded perspective view of an ink jet recording head. FIG. 2 is a cross-sectional view of an ink jet recording head. FIG. It is a figure explaining a vibrator unit. It is a top view of a pressure generation chamber formation board. It is explanatory drawing of a pressure generation chamber formation board, (a) is an enlarged view of the X section in FIG. 4, (b) is AA sectional drawing in (a), (c) is BB sectional drawing in (a). FIG. It is a top view of an elastic board. It is explanatory drawing of an elastic board, (a) is an enlarged view of the Y part in FIG. 6, (b) is CC sectional drawing in (a). It is a figure explaining the 1st male type | mold used for formation of a groove-shaped recessed part. It is a figure explaining the female type | mold used for formation of a groove-shaped recessed part. It is a schematic diagram explaining the process of forming a groove-shaped recessed part. It is a schematic diagram of the punch behavior and tool shape of the process of forming the communication port. It is a perspective view explaining the formation process of the communicating port to which the drilling method for fine holes is applied. It is a figure explaining the said process, (a) is a cross-sectional view, (b) is a longitudinal cross-sectional view. It is a figure explaining a to-be-guided surface. It is a figure which shows the guide member by a round hole. It is a cross-sectional view explaining the 2nd example of the drilling method of the micro hole of this invention. It is a cross-sectional view explaining the 3rd example of the drilling method of the fine hole of this invention. It is sectional drawing explaining the inkjet recording head of a modification. It is sectional drawing which shows the manufacturing apparatus of an ink jet head. It is [20]-[20] sectional drawing of FIG. It is a partial expanded sectional view of a guide part. It is a perspective view of a male simple substance. It is a partial expansion perspective view of a punch part. It is a perspective view of another male type simple substance. It is a figure explaining the 1st male type | mold used for formation of a groove-shaped recessed part. It is the top view and sectional drawing of the groove-shaped recessed part by which the inclined surface was shape | molded. It is sectional drawing at the time of guiding a highly rigid part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 recording head, 1 'recording head, 2 case, 3 vibrator unit, 4 flow path unit, 5 connection board, 6 supply needle unit, 7 piezoelectric vibrator group, 8 fixing plate, 9 flexible cable, 10 piezoelectric vibrator, 10a dummy vibrator, 10b drive vibrator, 11 control IC, 12 storage empty part, 13 ink supply path, 14 common ink chamber, 15 tip recess, 16 connection port, 17 connector, 18 needle holder, 19 ink supply needle, 20 Filter, 21 Base, 22 Ink discharge port, 23 Packing, 28 Bulkhead, 29 Pressure generating chamber, 30 Pressure generating chamber forming plate, 30a Virtual plane, 31 Nozzle plate, 32 Elastic plate, 33 Grooved recess, 34 Communication Mouth, 35 relief recess, 36 dummy recess, 37 first communication port, 38 second communication port, 38a bulge, 39 dummy communication 40, first dummy communication port, 41 second dummy communication port, 42 support plate, 43 elastic film, 44 diaphragm portion, 45 ink supply port, 46 compliance portion, 47 island portion, 48 nozzle opening, 51 first Male type, 52 Female type, 53 Projection part, 53a Tip part, 53b Slope forming part, 54 Streaks, 55 Metal substrate, 55a Succulent part, 56 First punch, 56a Punch row, 56b Punch tip row, 56c Straight line , 56d linear portion, 56f punch tip surface, 56g inclined surface, 56h acute angle portion, 56i arc-shaped portion, 57 second male type, 58 second punch, 58a punch row, 58b punch tip row, 58f punch tip surface 59 third male type, 61 heating element, 62 sealing substrate, 70a guide member, 70b guide member, 71 protrusion, 72 gap, 7 3 guide member, 74 round hole, P pitch size, 75 guide portion, 76 ink jet head manufacturing apparatus, 77 upper operation portion, 78 lower operation portion, 79 first type, 80 second type, 81 male type, 82 Guide member, 83 Positioning pin, 84 Recess, 85 Base member, 86 Punch plate, 87 Fixed piece, 88 Guide plate, 89 Guide base member, 90 Space part, S Displacement space, 91 Advance / retract shaft, 92 Advance / retreat chamber, 93 Stopper piece , 94 Compression coil spring, 95 Spring seat, 96 Adjustment bolt, 97 Punch, 98 High rigidity part, 99 Fixed base, 100 Press surface, 101 Insertion hole, 102 Fixed surface, 103 Curved surface, 104 Curved surface, 105 Separation slit, 106 slit Hole, 107a Restricting surface, 107b Restricting surface, 108 Groove, 109 Inclined surface, O1 push Viewed direction line, O2 centerline, P1 bending force, P2 bending force, S imaginary plane

Claims (4)

A method of drilling fine holes in a metal substrate by pressing,
It has a metal substrate on which fine holes are formed in a row, and punch rows of punches arranged in a row, and at the end of the punch row at the end of the punch row, the central portion side of the punch row pushes the punch. A male mold having an inclined surface that recedes with respect to the direction is prepared, and the male mold is advanced toward the metal substrate so that fine holes are formed in the metal substrate and arranged in rows on the metal substrate. Forming fine hole rows,
A method of drilling fine holes in which depressions arranged in a row at a predetermined pitch are formed on the metal substrate, and the punches having the same pitch as the pitch are pushed into the depressions.   The method for drilling fine holes according to claim 1, wherein the hollow portion is a groove-like hollow portion. 3. The method for drilling fine holes according to claim 2 , wherein the groove-like recess has a V-shaped bottom.   Corresponding to the metal pressure generating chamber forming plate in which groove-like recesses to be pressure generation chambers are arranged and a communication port penetrating in the thickness direction is formed at one end of each groove-like recess. A grooved recess in the pressure generating chamber forming plate, and a metal sealing plate that seals the opening surface of the grooved recess. A liquid ejecting head manufacturing apparatus in which a sealing plate is joined to the side and a nozzle plate is joined to the opposite side, the first mold supporting the pressure generating chamber forming plate in which the groove-like recess is formed; A second die attached with a male die having a punch row in which punches are formed in the groove-shaped recess to form a communication port, and the punch row is formed on the front end surface of the punch at least at the end of the punch row; The central part side of the above formed an inclined surface that recedes with respect to the pushing direction of the punch Apparatus for manufacturing a liquid-jet head, characterized in pushing it into the groove-like recesses the wrench.

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