JP4770845B2 - Liquid jet head - Google Patents

Description

  The present invention relates to a liquid ejecting head.

  As liquid ejecting heads for ejecting pressurized liquid as liquid droplets from nozzle openings, those for various liquids are known. Such a liquid ejecting head is mainly used as a recording head for an image recording apparatus such as a printer or a plotter. Recently, various types of liquid ejecting heads can be used by taking advantage of the ability to accurately supply a very small amount of liquid to a predetermined position. Applied to manufacturing equipment. For example, a color material ejecting head for a manufacturing apparatus for manufacturing a color filter such as a liquid crystal display, an electrode material ejecting head for a manufacturing apparatus for forming an electrode such as an organic EL (Electro Luminescence) display or FED (surface emitting display), bio It is applied to a bio-organic matter ejecting head for a manufacturing apparatus for producing a chip (biochemical element). The recording head ejects liquid ink, and the color material ejecting head ejects a solution of each color material of R (Red), G (Green), and B (Blue). The electrode material ejecting head ejects a liquid electrode material, and the bioorganic matter ejecting head ejects a bioorganic solution.

  A typical example is an ink jet recording head, and the prior art will be described by taking the ink jet recording head as an example.

  There are various types of ink jet recording heads (hereinafter referred to as recording heads), but the so-called on-demand type that has been widely used is a series from a common ink chamber to a nozzle opening through a pressure generating chamber. A plurality of flow paths are provided corresponding to the nozzle openings. In order to reduce the size, each pressure generating chamber needs to be formed with a fine pitch corresponding to the recording density. For this reason, the wall thickness of the partition wall that partitions adjacent pressure generation chambers is extremely thin. In addition, the ink supply port that connects the pressure generation chamber and the common ink chamber uses the ink pressure in the pressure generation chamber more efficiently for ejecting ink droplets, so that the flow path width is further narrowed than the pressure generation chamber. Yes. From the viewpoint of producing such a fine pressure generating chamber and an ink supply port with high dimensional accuracy, a silicon substrate is preferably used in the conventional recording head. That is, the crystal plane is exposed by anisotropic etching of silicon, and the pressure generation chamber and the ink supply port are defined by the crystal plane.

  Further, the nozzle plate in which the nozzle openings are formed is made of a metal plate because of demands for workability and the like. And the diaphragm part for changing the volume of a pressure generation chamber is formed in the elastic board. This elastic plate has a double structure in which a resin film is bonded to a metal support plate, and is produced by removing a portion of the support plate corresponding to the pressure generating chamber.

Japanese Patent Laid-Open No. 55-14283 (page 2, FIG. 6) JP 2000-263799 A (page 6-8, FIG. 4-14)

  By the way, in the above-described conventional recording head, since the partition wall portion is extremely thin, it is difficult to accurately determine the recess shape of the pressure generation chamber and to uniformly set the liquid storage volume of the pressure generation chamber or the like. there were. In particular, this hollow shape is generally an elongated shape, and it is important to precisely determine the shape of the end of the hollow shape as viewed in the longitudinal direction in order to finish the shape of the partition wall clearly. is there.

  Further, since the difference in linear expansion coefficient between silicon and metal is large, it is necessary to bond the silicon substrate, the nozzle plate, and the elastic plate over a long period of time at a relatively low temperature. For this reason, it is difficult to improve productivity, which is a cause of increasing manufacturing costs.

  Therefore, in this type of liquid jet head, an attempt is made to provide a liquid flow path in a metal pressure chamber forming plate in order to improve productivity (for example, see Patent Documents 1 and 2). That is, these patent documents describe a supply port that communicates between a reservoir and a pressure chamber, a recess groove that serves as a pressure chamber, and a pressure chamber and a nozzle by plastic working (surface pressing or pressing) on a metal plate. A method of forming a communication port communicating with the opening is disclosed.

  However, processing is difficult because the pressure generation chamber is extremely fine and the flow path width of the ink supply port needs to be narrower than the pressure generation chamber, and it is difficult to improve production efficiency. There was a point.

  On the other hand, this type of liquid jet head is required to extremely reduce the amount of liquid droplets to be ejected. For example, in an ink jet recording head, by reducing the amount of ink droplets, the number of dots that can be landed within a unit area can be increased compared to the conventional case, and a high-quality image with less graininess can be recorded. It is. Further, in the color material ejecting head, the area of one pixel can be further reduced by extremely reducing the discharge amount, and a display (filter) with high resolution can be manufactured. Also, in the electrode material ejection head, an extremely thin conductor can be produced in a desired pattern by extremely reducing the amount of the electrode material.

  The above-mentioned patent document 1 is Japanese Patent Laid-Open No. 55-14283 (page 2, FIG. 6), and the patent document 2 is Japanese Patent Laid-Open No. 2000-263799 (page 6-8, FIG. 4-). 14).

  However, it has been found that some problems arise when trying to manufacture a liquid jet head that can meet the current requirements by the methods of the above-mentioned patent documents. One of them is the problem of air bubble discharge.

  That is, in order to produce a liquid jet head capable of discharging a very small amount of liquid droplets, the width dimension of a groove-like depression (hereinafter referred to as a groove-like depression) serving as a pressure chamber becomes extremely small. . It is also necessary to provide a plurality of groove-like recesses close to the groove width direction. In this case, it is difficult to provide all the communication ports at one end in the longitudinal direction of the groove-like recess by the methods of the above-mentioned patent documents. For example, as shown in FIG. 25 (a), each communication port 34 must be provided at a position separated from the longitudinal side end face (depression end face) 70 of the groove-like depression 33 in the groove longitudinal direction. This is due to the positional variation of the recessed portion end surface 70.

  In this case, when the plurality of groove-like recesses 33 are produced by press working, the position of the recess end surface 70 varies between the groove-like recesses 33. For this reason, as shown in FIG. 25 (b), if the communication port 34 is provided in the longitudinal direction of the groove-like recess 33, a part of the punch punches out a thick part of the metal plate. Become. Since this punch is extremely thin, there is a risk of bending or buckling if a thick portion is punched. Therefore, when manufacturing each communication port 34..., It is necessary to perform alignment with a margin so that all punches are located in the groove-like recess 33. As a result, the punch is disposed away from the recess end surface 70 in the groove longitudinal direction, and the communication port 34 is also provided away from the recess end surface 70.

  As described above, when the communication port 34 is provided away from the recess end surface 70, a flat portion 71 is formed between the recess end surface 70 and the communication port 34. The flat portion 71 causes bubbles to stay and becomes a factor that inhibits the removal of the bubbles. That is, the presence of the flat portion 71 causes stagnation in the liquid flowing in the pressure chamber, and bubbles in the liquid stagnate in the stagnation, making it difficult to remove. Further, when the bubbles grow and become larger, there is a possibility that the ejection characteristics (for example, flight speed and ejection amount) of the droplets may be affected, and the flow of the liquid may be hindered.

  As described above, when the pressure generating chamber is formed by plastic processing of a metal substrate, depending on the shape of the pressure generating chamber inner surface and the shape around the communication port that connects the pressure generating chamber and the nozzle opening, turbulent flow to the ink Or the stagnation of bubbles may occur, which may adversely affect the liquid ejection characteristics.

  The present invention has been made in view of such circumstances, and the partition wall portion is precisely formed including both ends thereof, and the recess shape for the pressure generating chamber or the like is processed under high accuracy. The first object is to smooth the flow of ink in the pressure generating chamber and prevent the stagnation of the bubbles, that is, to improve the bubble discharging property by devising the end shape of the groove-like recess. It is said.

  Furthermore, the second object of the present invention is to precisely mold the partition wall including its both ends and to process the recess shape for the pressure generating chamber or the like with high accuracy.

In order to achieve the above object, a groove-shaped recess serving as a pressure generating chamber, and a metal pressure generating chamber-forming plate provided with a communication port at an end of the groove-shaped recess, the groove-shaped recess An inclined molding surface having a different rising angle with respect to the bottom of the groove-like recess is provided at the longitudinal end, and the inclined molding surface is continuous with the first inclined molding surface and one end of the first inclined molding surface, A second inclined molding surface that is farther from the bottom of the groove-shaped recess than the first inclined molding surface, and the rising angle of the second inclined molding surface is higher than the rising angle of the first inclined molding surface. A finish molding surface which is large and is continuous with the other end of the first inclined molding surface is formed at a rising angle larger than the rising angle of the inclined molding surface .

Thus, the longitudinal ends of the elongated recess portion, different tilt forming surface of the standing angle are provided for the bottom of the groove-like recess portion, the finish molding surface that is continuous to the inclined shaping surfaces of the inclined molding surface Since it is formed at a rising angle larger than the rising angle , the metal flows smoothly when the punch is pushed in, and even if it is a groove-shaped recess of an extremely fine shape, the dimensional accuracy of the end can be improved, A sufficient height of the partition wall can be secured.

In addition , since a plurality of inclined molding surfaces having different rising angles with respect to the bottom of the groove-shaped recess are provided at the longitudinal end of the groove-shaped recess , the liquid flows along the inclined molding surface at the end of the pressure generating chamber. It flows without hesitation. Furthermore, the standing angle of the finished molding surface that is continuous to the inclined forming surface is greater than the standing angle of the inclined forming surface, to be effectively prevented stagnation of air bubbles at the ends of the pressure generating chamber, it enters the pressure generating chamber The trapped bubbles can be reliably discharged on the liquid flow.

Further, the inclined forming surface, which is configured of two inclined molding surface having different upright angle, the liquid at the end of the pressure generating chamber, to flow without stagnating two inclined molding surface along the finished molding surface The stagnation of the bubbles at the end can be prevented, and the bubbles that have entered the pressure generating chamber can be reliably discharged by placing them on the liquid flow.

Also, two inclined molding surface of different standing angle, a first tilt forming surface, a second tilt forming surface away from the bottom of the groove-like recess portion than the first tilt forming surface, the first inclined molding surface since finish forming surface is continuously formed, the liquid at the end of the pressure generating chamber, a first tilt forming surface, stagnation flow without along the second tilt forming surface and the finished molding surface, bubbles in the end Can be prevented, and the air bubbles that have entered the pressure generating chamber can be reliably discharged on the liquid flow.

Moreover, since than the standing angle of the first tilt forming surface toward the upright angle of the second inclined molding surface large, Ri Do a relatively gentle slope close inclined molding surface at the bottom of the recess, indentation of the second punch Sometimes the burden on the second punch when driving into at least a part of the inclined molding surface is small.
For this reason, the second punch can be pushed in adjacent to the inclined lower end of the end face while maintaining the durability of the second punch. Also, for driving a second punch against the inclined forming surface, occurs bottom and parallel to the plane of the recess between the inclined shaping surfaces formed by the first punch and finish forming surface formed by the second punch Therefore, the stagnation of bubbles that have entered the pressure generating chamber is prevented. Furthermore, since the rising angle of the inclined molding surface is increased for the portion near the recess opening on the end surface, the volume at the end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced. .

In the liquid jet head according to the aspect of the invention, when the finish molding surface continuous with the inclined molding surface forms a communication port , the liquid jet head further includes a nozzle plate having a nozzle opening formed therein, and the communication port includes the nozzle Even when it is provided so as to correspond to the position of the opening, it is possible to prevent the stagnation of bubbles in the part from the end of the pressure generation chamber to the communication port, and the bubbles that have entered the pressure generation chamber are put on the liquid flow. Can be discharged reliably.

In the liquid jet head according to the present invention, a liquid flow path extending from the pressure generation chamber to the nozzle opening is formed inside, and a pressure fluctuation is generated in the liquid in the pressure generation chamber by the pressure generation element so that the liquid droplets are discharged from the nozzle opening. The flow path unit is provided with a plurality of groove-like recesses that serve as the pressure generating chambers, and a communication port is provided at the longitudinal end of each groove-like recess. At least one metal pressure generation chamber forming plate provided and the nozzle opening are formed, and the communication port and the nozzle opening are joined to the pressure generation chamber formation plate so as to communicate with each other. A plurality of inclined surfaces having different rising angles with respect to the bottom of the groove-like recesses are widened toward the opening of the recesses. And the inclined surface is The includes a lower inclined surface of the bottom side of the elongated recess portion and an upper inclined surface than the lower inclined surface away from the bottom of the elongated recess portion than said standing angle of the lower inclined surface The standing angle of the upper inclined surface is larger, and the communication port is opened adjacent to the inclined lower end of the communication port side end.

In the liquid jet head according to the aspect of the invention, the standing angle may be set to 45 degrees or more and less than 90 degrees.

  Here, the “standing angle” means a standing angle from a reference line set in parallel with the bottom of the recess toward the outside in the longitudinal direction of the groove.

Further, the liquid jet head of the present invention, the communication mouth end, may be constituted by the inclined surfaces of the plurality of stages of said upright angle increases enough away from the bottom of the groove-like recess portion.

In the liquid jet head according to the aspect of the invention, the distance in the longitudinal direction of the groove-like recess from the inclined upper end of the recess opening at the end of the communication port to the opening edge on the one end of the communication port It may be shorter than the depth of the recess.

In the liquid ejecting head according to the aspect of the invention, the pressure generating chamber may be provided with a supply port at an end opposite to the end where the communication port is provided, and the end surface on the supply port side may be disposed on the recess. You may comprise by the inclined surface which expands toward a part opening.

In the liquid jet head according to the aspect of the invention, the rising angle of the end surface on the supply side with respect to the bottom of the groove-like recess may be set to 45 degrees or more and less than 90 degrees.

Further, the liquid jet head of the present invention, the end face of the supply side, standing angle relative to the bottom portion of the elongated recess portion may be constituted by the inclined surfaces of different stages.

Further, the liquid jet head of the present invention, the end face of the supply side, constituted by the inclined surfaces of the plurality of stages upright angle increases relative to the bottom portion of the elongated recess portion enough away from the bottom of the groove-like recess portion May be.

  In order to achieve the above object, a fine forging method of the present invention is a fine forging method for forming recesses arranged at a predetermined pitch, and each recess is formed in a material with a first punch in which temporary forming punches are arranged. The gist of the present invention is that after the part is temporarily formed, finish forming is performed with the second punch in which finish forming punches are arranged in the temporarily formed recess.

  That is, after each recess is temporarily formed in the material by the first punch in which the temporary forming punches are arranged, the fine molding is performed by the second punch in which the finish forming punch is arranged in the temporarily formed recesses. This is a forging method.

  For this reason, in the temporary molding by the first punch, the molding is first performed until the stage that does not reach the final shape, and then the final molding is performed following the temporary molding by the second punch. Therefore, since the gradual plastic working is performed step by step, that is, by the first punch and the second punch, there is a problem that even if the shape is fine, it becomes an abnormal shape or the material is cracked. The predetermined machining shape is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each recess can be processed uniformly, for example, in the case of forming a liquid jet head pressure generation chamber or the like, it is very effective in terms of stabilizing the jet characteristics of the liquid jet head. .

  In the fine forging method of the present invention, the partition wall is disposed between the recesses by the gap between the temporary forming punches arranged on the first punch and the gap between the finish forming punches arranged on the second punch. In the case of forming the portion, the first punch is temporarily formed until the shape of the partition portion that does not reach the final shape, and then the second punch is followed by the temporary forming of the partition portion. Finish molding is performed. Therefore, since the gradual plastic working is performed stepwise, that is, by the first punch and the second punch, even if the partition wall is thin, an abnormal shape or a crack occurs in the material. There is no problem, and the machining shape as prescribed can be obtained accurately.

  In the fine forging method of the present invention, when the indentation depth with respect to the material at the time of finish forming of the second punch is indented deeper than the indentation depth with respect to the material at the time of temporary forming of the first punch, the second in the finish forming. Since the indentation depth of the punch is deeper than that of the first punch, the shape of the temporary molding by the first punch can be surely deformed and can be changed to finish molding, and a predetermined shape can be obtained reliably. Become.

  In the method for fine forging according to the present invention, the temporary forming punch of the first punch and the finish forming punch of the second punch are ridges arranged in parallel, and the recesses are parallel to each other by these ridges. When formed as an array of groove-shaped recesses, various dimensions and shapes such as the width, length, and depth of the elongated groove-shaped recesses are obtained by provisional molding of the first punch and finish molding of the second punch. Can be processed precisely.

  In the fine forging method according to the present invention, when the width and length of each of the protrusions of the first punch and the second punch are set to be substantially equal, the second punch following the temporary forming of the first punch Since the finish molding is performed by the ridges having substantially the same dimensions, the shape formed by the temporary molding can be shifted to the finish molding without being abnormally deformed. Finally, a precise groove-like recess is obtained.

  In the fine forging method of the present invention, when a chamfered inclined surface having a different angle is provided at the longitudinal end portion of the protrusion of the first punch, by selecting the angle of the inclined surface, By optimizing the amount and range of the material that can be flowed by the longitudinal ends of the ridges, the shape of the end of the groove-like recess can be accurately determined. Such material flow increases the material flow component in the width direction of the groove-like recess at the end of the groove-like recess, so that the thickness and shape of the partition wall near the end of the groove-like recess is the same as that of the groove-like recess. It can be molded clearly to the end.

  In the fine forging method according to the present invention, the inclined surface is composed of a first inclined surface arranged close to the tip portion of the ridge portion and a second inclined surface arranged apart from the tip portion of the ridge portion. When the inclination angle of the first inclined surface and the second inclined surface with respect to the pushing direction of the first punch is set to be larger in the first inclined surface, the first inclined surface having a larger inclination angle is the groove. Since it is pushed into the material at a location separated from the end of the groove-like recess, the initial forming of the groove-like recess is started in a state where there is little influence of the flow of the material on the end of the groove-like recess. Therefore, in this initial stage, there is little movement of the material in the longitudinal direction in the vicinity of the end of the groove-like recess, but rather the material movement in the width direction of the groove-like recess is positively promoted.

  After that, when the first inclined surface is pushed into the material, the second inclined surface having a small inclination angle on the side close to the end of the groove-like recess is pushed into the material, so this time the width of the groove-like recess The material movement toward the end of the groove-like recess is performed rather than the material movement in the direction. In this case, since the inclination angle of the second inclined surface is small, the movement amount of the material with respect to the longitudinal direction of the groove-like recess is kept as small as possible, and the movement amount of the material near the end of the groove-like depression is also reduced. The shape of the end of the groove-like depression is clearly formed by being suppressed. That is, even in the stage where the second inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the end of the groove-like recess is also increased, so that the partition wall in the vicinity of the groove-like recess end The thickness and shape can be clearly formed up to the end of the groove-like recess.

  In the fine forging method of the present invention, a chamfered finish inclined surface is formed at the longitudinal end of the protrusion of the second punch, and the inclination angle of the finish inclined surface with respect to the pressing direction of the second punch is: When it is set smaller than the inclination angle of the second inclined surface, the material movement toward the end of the groove-like recess at the stage of the finishing push stroke is due to the small inclination angle of the finishing inclined surface. Since it is suppressed as much as possible, the movement amount of the material in the longitudinal direction of the groove-shaped recess near the end of the groove-shaped recess is also suppressed, and the shape of the end of the groove-shaped recess is clearly formed. That is, even in the stage where the finish inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the groove-like recess end is increased, so that the partition wall portion near the groove-like recess end is Thickness and shape can be clearly molded up to the end of the groove-like recess.

  In the fine forging method according to the present invention, the first temporary forming surface and the second temporary forming surface are formed on the material by the first inclined surface and the second inclined surface during the temporary forming of the first punch, and the second punch is formed. In the case where finish molding is performed with the second punch after the tip of the finish inclined surface is pressed against the first temporary molding surface, the portion deeper than the second temporary molding surface when viewed in the depth direction of the groove-like recess. In addition, the tip of the second punch is pressed against the first temporary molding surface located at a position farther from the end of the groove-shaped recess than the second temporary molding surface when viewed in the longitudinal direction of the groove-shaped recess. And plastic deformation is performed. Therefore, the finish forming by the second punch is performed with little influence on the end of the groove-like recess in terms of material movement, and the shape of the end of the groove-like recess is clearly formed.

  Further, since the inclination angle of the finish inclined surface of the second punch is set small, the surface portion of the first temporary forming surface is moved toward the inside of the material, and so-called “return” does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess.

  In the fine forging method according to the present invention, the final finish shape of the groove-shaped recess is formed by at least the second temporary molding surface and the finish molding surface formed by the finish molding by the finish molding of the second punch. In the case of being formed, the finishing process is performed with the finishing inclined surface of the second punch having an inclination angle smaller than the inclination angle of the first temporary forming surface and the second temporary forming surface. Even after the metal is pushed and disappears, the finished inclined surface does not come into surface contact with the surface of the second temporary molding surface, and the material of the end of the second temporary molding surface is moved in the pushing direction by the finished inclined surface. It will be. Therefore, at least the second temporary molding surface and the finish molding surface continuous therewith are reliably formed at the end of the groove-like recess, and the shape of the end of the groove-like recess can be configured accurately.

  In the fine forging method of the present invention, a final finished shape is formed at the end of the groove-like recess by the second temporary forming surface, the first temporary forming surface, and the finish forming surface formed by the finish forming. In this case, since the finishing is performed with the finish inclined surface of the second punch having an inclination angle smaller than the inclination angle of the first temporary forming surface, the finish inclined surface may come into surface contact with the surface of the first temporary forming surface. Instead, the material at the end of the first temporary molding surface is moved in the pushing direction by the finish inclined surface. And by this movement, a part of the first temporary molding surface is left without disappearing, so that the second temporary molding surface, the first temporary molding surface, and a finish molding surface continuous with the second temporary molding surface are surely provided at the end of the groove-like recess. And the shape of the end of the groove-like recess can be configured accurately.

  In the fine forging method according to the present invention, wedge-shaped tip portions are formed on the protrusions of the first punch and the second punch by chevron-shaped slopes formed at the tips thereof, and both side surfaces of the protrusion and the above-mentioned When the boundary with the slope is smoothly connected, the lower part of the groove-like recess is V-shaped to ensure the volume of the groove-like recess as large as possible. In addition, the rigidity of the base portion of the partition wall can be increased to form a partition wall that is stable in strength.

  In the fine forging method according to the present invention, when the pitch between the ridges of the second punch is set larger than the pitch between the ridges of the first punch, finish molding with the second punch. In this case, the final finished shape can be obtained smoothly and reliably. That is, the material pressure-molded by the protrusions of the first punch has a phenomenon that the dimensions of each part of the material that has been temporarily formed and released are slightly increased when the first punch is retracted from the material. Along with such a phenomenon, the pitch of the groove-like recesses formed by the first punch is also slightly larger than the pitch of the protrusions of the first punch. Therefore, by setting the pitch between the ridges in accordance with the pitch of the groove-like recesses thus increased in the second punch, the pitch between the ridges of the second punch suitable for the temporary molding dimensions can be obtained. Accurate finish molding can be performed smoothly and reliably without excessive material deformation. By setting the pitch between the protrusions of the second punch to 0.3 mm or less, for example, it is possible to achieve a more suitable finish in processing parts such as a liquid jet head.

  Next, in order to achieve the above-described object, according to the method of manufacturing a liquid jet head of the present invention, groove-like recesses serving as pressure generation chambers are arranged, and one end of each groove-like recess penetrates in the plate thickness direction. Sealing the metal pressure generating chamber forming plate formed with the communication port, the metal nozzle plate with the nozzle opening formed at the position corresponding to the communication port, and the opening surface of the groove-shaped recess, A metal-made sealing plate having a liquid supply port formed at a position corresponding to the other end of the groove-shaped recess, and the sealing plate on the groove-shaped recess side of the pressure generation chamber forming plate, on the opposite side A method of manufacturing a liquid jet head in which nozzle plates are joined to each other, wherein the groove-like depression of the pressure generating chamber forming plate is formed by the fine forging method described above.

  Therefore, the groove-like recess is processed in the pressure generating chamber forming plate as a raw material by making full use of the advantageous effects of the fine forging method described above. Examples of processing of the pressure generating chamber forming plate based on the above advantageous effects are listed as follows.

  That is, the groove-shaped recess of the pressure generating chamber forming plate of the liquid jet head is formed by the fine forging method described above. For example, the first punch is first formed to a shape that does not reach the final shape, and then the second punch is subjected to finish forming following the temporary forming. Therefore, since the gradual plastic working is performed step by step, that is, by the first punch and the second punch, there is a problem that even if the shape is fine, it becomes an abnormal shape or the material is cracked. The predetermined machining shape is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each recess can be processed uniformly, for example, in the case of forming a liquid jet head pressure generation chamber or the like, it is very effective in terms of stabilizing the jet characteristics of the liquid jet head. .

  Alternatively, a chamfered inclined surface having a different angle is provided at a longitudinal end portion of the protrusion portion of the first punch, and the inclined surface is disposed close to a tip portion of the protrusion portion and the protrusion. The first inclined surface is configured to have a larger inclination angle than the first inclined surface and the second inclined surface with respect to the pushing direction of the first punch. As a result, the first inclined surface having a large inclination angle is pushed into the pressure generating chamber forming plate at a location separated from the end of the groove-like recess, so that the influence of the material flow on the end of the groove-like recess is affected. The initial forming of the groove-like recess is started in a small state. Therefore, in this initial stage, there is little movement of the material in the longitudinal direction in the vicinity of the end of the groove-like recess, but rather the material movement in the width direction of the groove-like recess is positively promoted.

  After that, when the first inclined surface is pushed into the pressure generating chamber forming plate, the second inclined surface having a small inclination angle on the side close to the end of the groove-like recess is pushed into the material. The material is moved toward the end of the groove-like recess rather than the material movement in the width direction of the recess. In this case, since the inclination angle of the second inclined surface is small, the movement amount of the material with respect to the longitudinal direction of the groove-like recess is kept as small as possible, and the movement amount of the material near the end of the groove-like depression is also reduced. The shape of the end of the groove-like depression is clearly formed by being suppressed. That is, even in the stage where the second inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the end of the groove-like recess is also increased, so that the partition wall in the vicinity of the groove-like recess end The thickness and shape can be clearly formed up to the end of the groove-like recess. Therefore, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess, and a precisely finished shape such as a pressure generating chamber is obtained.

  Further, the first temporary forming surface and the second temporary forming surface are formed on the pressure generating chamber forming plate by the first inclined surface and the second inclined surface during the temporary forming of the first punch, and the finished inclined surface of the second punch is formed. In the case of performing the finish molding with the second punch after the front end portion is pressed against the first temporary molding surface, it is at a location deeper than the second temporary molding surface when viewed in the depth direction of the groove-shaped recess, In addition, the tip of the second punch is pressed against the first temporary molding surface at a location farther away from the end of the groove-shaped recess than the second temporary molding surface when viewed in the longitudinal direction of the groove-shaped recess. A transformation is made. Therefore, the finish forming by the second punch is performed with little influence on the end of the groove-like recess in terms of material movement, and the shape of the end of the groove-like recess is clearly formed. Therefore, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess, and a precisely finished shape such as a pressure generating chamber is obtained.

  Further, in the second method of manufacturing a liquid jet head according to the present invention, groove-like recesses serving as pressure generation chambers are arranged, and a communication port penetrating in the thickness direction is formed at one end of each groove-like recess. The metal pressure generation chamber forming plate, the metal nozzle plate having a nozzle opening formed at a position corresponding to the communication port, the opening surface of the groove recess, and the groove recess A metal-made sealing plate with a liquid supply port drilled at a position corresponding to the other end, and a sealing plate is joined to the groove-shaped recess side of the pressure generating chamber forming plate, and a nozzle plate is joined to the opposite side And a first step of forming the groove-like recess using a first punch so as to provide at least one inclined molding surface at the longitudinal end thereof, and the first step At least a second step of press-fitting the second punch into the inclined molding surface after the first step. It is characterized in.

  Thus, the first step of forming the groove-like recess using the first punch so as to provide at least one inclined forming surface at the longitudinal end thereof, and the inclined forming surface after the first step. A second step of press-fitting the second punch, and the second punch is press-fitted with respect to the inclined molding surface. Therefore, the molding by the second punch is performed on the end of the groove-like recess by moving the material. This is done almost without any influence, and the shape of the end of the groove-like recess is clearly formed. The surface portion of the inclined molding surface is moved toward the inside of the material, and so-called “return” does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess. In this way, the final finish shape of the end of the groove-like depression can be ensured in a uniform and non-returned state, so that the volume and shape of each pressure generating chamber are constant, and the ink ejection characteristics are kept constant. In addition, turbulent flow does not occur in the ink flow at the end of the groove-like recess and bubbles do not stagnate due to the shape characteristics without “return” or the like.

  In the liquid jet head manufacturing method, the first punch used in the first step has a protrusion that forms a groove-like recess, and a gap that forms a partition wall disposed between the groove-like recesses. Can be precisely processed various dimensions and shapes such as the width, length, depth, etc. of the elongated groove-shaped recess, even if the partition wall is thin, There is no problem such as an abnormal shape or cracking in the material, and a predetermined processing shape is accurately obtained.

  In the method of manufacturing the liquid ejecting head, a chamfered inclined surface is provided at a longitudinal end portion of the projecting portion of the first punch, and an inclined molding surface is formed by the inclined surface in the first step. When the second punch is press-fitted into the inclined molding surface in the process, the amount and range of the material that can be flowed by the longitudinal end of the ridge portion are optimized by selecting the angle of the inclined surface, and the groove The shape of the end of the concave portion can be accurately determined.

  In the method of manufacturing the liquid jet head, a chamfered inclined surface having a different angle is provided at a longitudinal end portion of the protruding portion of the first punch, and a plurality of inclined molding surfaces are formed by the inclined surface in the first step. In the second step, when the second punch is press-fitted into one of the inclined molding surfaces in the second step, the amount of the material that is made to flow by the longitudinal end of the ridge by selecting the angle of the inclined surface The range can be optimized and the shape of the end of the groove-like recess can be accurately determined. Such material flow increases the material flow component in the width direction of the groove-like recess at the end of the groove-like recess, so that the thickness and shape of the partition wall near the end of the groove-like recess is the same as that of the groove-like recess. It can be molded clearly to the end.

  In the method of manufacturing the liquid ejecting head, the inclined surface includes a first inclined surface arranged close to a tip portion of the ridge portion and a second inclined surface arranged apart from the tip portion of the ridge portion. When the inclination angle of the first inclined surface and the second inclined surface with respect to the pushing direction of the first punch is set to be larger in the first inclined surface, the first inclined surface having a larger inclination angle is the groove. Since it is pushed into the material at a location separated from the end of the groove-like recess, the initial forming of the groove-like recess is started in a state where there is little influence of the flow of the material on the end of the groove-like recess. Therefore, in this initial stage, there is little movement of the material in the longitudinal direction in the vicinity of the end of the groove-like recess, but rather the material movement in the width direction of the groove-like recess is positively promoted.

  After that, when the first inclined surface is pushed into the material, the second inclined surface having a small inclination angle on the side close to the end of the groove-like recess is pushed into the material, so this time the width of the groove-like recess The material movement toward the end of the groove-like recess is performed rather than the material movement in the direction. In this case, since the inclination angle of the second inclined surface is small, the movement amount of the material with respect to the longitudinal direction of the groove-like recess is kept as small as possible, and the movement amount of the material near the end of the groove-like depression is also reduced. The shape of the end of the groove-like depression is clearly formed by being suppressed. That is, even in the stage where the second inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the end of the groove-like recess is also increased, so that the partition wall in the vicinity of the groove-like recess end The thickness and shape can be clearly formed up to the end of the groove-like recess.

  In the manufacturing method of the liquid jet head, the first inclined molding surface and the second inclined molding surface are formed on the material by the first inclined surface and the second inclined surface of the first punch in the first step, and the second inclined step is performed in the second step. When the second punch is press-fitted into the first inclined molding surface, the amount and range of the material that can be flowed by the longitudinal end portion of the ridge portion is optimized, and the molding shape of the groove-like recess end portion is accurately determined. I can find it. Such material flow increases the material flow component in the width direction of the groove-like recess at the end of the groove-like recess, so that the thickness and shape of the partition wall near the end of the groove-like recess is the same as that of the groove-like recess. It can be molded clearly to the end.

  In the method of manufacturing the liquid jet head, a protrusion that forms a groove-like recess in the second punch used in the second step, and a gap that forms a partition wall disposed between the groove-like recesses, When the groove-shaped recess is temporarily formed in the material with the first punch in the first step and the groove-shaped recess is temporarily formed in the second step, In the temporary molding with one punch, the molding is first performed until the final shape is reached, and then the final molding is performed following the temporary molding with the second punch. Therefore, since the gradual plastic working is performed step by step, that is, by the first punch and the second punch, there is a problem that even if the shape is fine, it becomes an abnormal shape or the material is cracked. The predetermined machining shape is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each recess can be processed uniformly, for example, in the case of forming a liquid jet head pressure generation chamber or the like, it is very effective in terms of stabilizing the jet characteristics of the liquid jet head. .

  In the method of manufacturing the liquid ejecting head, when the indentation depth of the second punch in the second step is greater than the indentation depth of the first punch in the first step, the second punch is indented. When the depth is deeper than that of the first punch, the shape of molding by the first punch can be surely deformed, and a predetermined shape can be reliably obtained.

  In the manufacturing method of the liquid jet head, a chamfered finish inclined surface is formed at a longitudinal end portion of the projecting portion of the second punch, and an inclination angle of the finish inclined surface with respect to a pressing direction of the second punch is When it is set smaller than the inclination angle of the second inclined surface, the material movement toward the end of the groove-like recess at the stage of the finishing push stroke is due to the small inclination angle of the finishing inclined surface. Since it is suppressed as much as possible, the movement amount of the material in the longitudinal direction of the groove-shaped recess near the end of the groove-shaped recess is also suppressed, and the shape of the end of the groove-shaped recess is clearly formed. That is, even in the stage where the finish inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the groove-like recess end is increased, so that the partition wall portion near the groove-like recess end is Thickness and shape can be clearly molded up to the end of the groove-like recess.

  In the method of manufacturing the liquid jet head, a finish shape is formed at the end of the groove-shaped recess by at least the second temporary molding surface and the finish molding surface formed by the finish molding by the finish molding of the second punch. In this case, since the finishing process is performed with the finishing inclined surface of the second punch having an inclination angle smaller than the inclination angle of the first temporary forming surface and the second temporary forming surface, the first temporary forming surface is formed on the finishing inclined surface. The finished inclined surface does not come into surface contact with the surface of the second temporary molding surface even after it has been pushed away, and the material at the end of the second temporary molding surface is moved in the pushing direction by the finished inclined surface. It becomes. Therefore, at least the second temporary molding surface and the finish molding surface continuous therewith are reliably formed at the end of the groove-like recess, and the shape of the end of the groove-like recess can be configured accurately.

  In the manufacturing method of the liquid jet head, when a finish shape is formed at an end of the groove-like recess portion by the second temporary molding surface, the first temporary molding surface, and the finish molding surface formed by the finish molding. In this case, since the finishing process is performed with the finish inclined surface of the second punch having an inclination angle smaller than the inclination angle of the first temporary forming surface, the finish inclined surface does not come into surface contact with the surface of the first temporary forming surface. The material at the end of the first temporary molding surface is moved in the pushing direction by the finish inclined surface. And by this movement, a part of the first temporary molding surface is left without disappearing, so that the second temporary molding surface, the first temporary molding surface, and a finish molding surface continuous with the second temporary molding surface are surely provided at the end of the groove-like recess. And the shape of the end of the groove-like recess can be configured accurately.

  In the method for manufacturing a liquid jet head, the second punch used in the second step is a punch for opening a communication port, and the second step communicates with the groove-shaped recess formed in the first step. When the opening is opened, the above-mentioned communication port is formed by press-fitting a punch into the inclined molding surface, so the formation of the communication port has almost no influence on the material movement surface at the end of the groove-like recess. This is done without any problem, and the shape of the end of the groove-like recess is clearly formed. The surface portion of the inclined molding surface is moved toward the inside of the material, and so-called “return” does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess. In this way, since the finish shape around the communication port at the end of the groove-like recess can be ensured in a state where there is no “return”, turbulence occurs in the ink flow at the communication port, or bubbles are stagnant Ink discharge characteristics can be kept constant.

  In the manufacturing method of the liquid jet head, in the first step, the groove-shaped recess is temporarily formed on the material with a temporary processing punch in which protrusions for forming the groove-shaped recess are arranged, and then the temporary molding is performed. Finishing molding is performed with a finishing punch in which protrusions for forming the groove-like recesses are arranged with respect to the groove-like recesses. In the second step, the groove-like recesses formed in the first step are In the case where the communication port is opened by the punching punch, the molding is first performed to a stage where the final shape is not reached by the temporary molding, and then the final molding is performed following the temporary molding. Therefore, since the plastic processing is performed gradually in stages, there is no problem such as an abnormal shape or cracking in the material even if the shape is fine, and the processed shape as specified is accurate. Is required. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each recess can be processed uniformly, for example, in the case of forming a liquid jet head pressure generation chamber or the like, it is very effective in terms of stabilizing the jet characteristics of the liquid jet head. .

  In addition, since the communication port is formed by press-fitting a punch with respect to the inclined molding surface, the molding of the communication port is performed with little influence on the material movement surface at the end of the groove-like recess, The shape of the end of the groove-like recess is clearly formed. The surface portion of the inclined molding surface is moved toward the inside of the material, and so-called “return” does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess. In this way, since the finish shape around the communication port at the end of the groove-like recess can be ensured in a state where there is no “return”, turbulence occurs in the ink flow at the communication port, or bubbles are stagnant Ink discharge characteristics can be kept constant.

  In the manufacturing method of the liquid jet head, in the case where the indentation depth with respect to the material at the time of finish forming of the finishing punch is deeper than the indentation depth with respect to the material at the time of temporary forming of the temporary working punch, the finishing punch is pushed in When the depth is deeper than that of the temporary punch, the shape of the molding by the temporary punch can be surely deformed, and a predetermined shape can be obtained with certainty.

  In the manufacturing method of the liquid jet head, when chamfered inclined surfaces having different angles are provided at the longitudinal end portions of the protrusions of the temporary machining punch, by selecting the angle of the inclined surface, By optimizing the amount and range of the material that can be flowed by the longitudinal ends of the ridges, the shape of the end of the groove-like recess can be accurately determined. Such material flow increases the material flow component in the width direction of the groove-like recess at the end of the groove-like recess, so that the thickness and shape of the partition wall near the end of the groove-like recess is the same as that of the groove-like recess. It can be molded clearly to the end.

  In the method of manufacturing the liquid ejecting head, the inclined surface includes a first inclined surface arranged close to a tip portion of the ridge portion and a second inclined surface arranged apart from the tip portion of the ridge portion. When the inclination angle of the first inclined surface and the second inclined surface with respect to the pushing direction of the temporary machining punch is set to be larger in the first inclined surface, the first inclined surface having a larger inclination angle is a groove. Since it is pushed into the material at a location separated from the end of the groove-like recess, the initial forming of the groove-like recess is started in a state where there is little influence of the flow of the material on the end of the groove-like recess. Therefore, in this initial stage, there is little movement of the material in the longitudinal direction in the vicinity of the end of the groove-like recess, but rather the material movement in the width direction of the groove-like recess is positively promoted.

  After that, when the first inclined surface is pushed into the material, the second inclined surface having a small inclination angle on the side close to the end of the groove-like recess is pushed into the material, so this time the width of the groove-like recess The material movement toward the end of the groove-like recess is performed rather than the material movement in the direction. In this case, since the inclination angle of the second inclined surface is small, the movement amount of the material with respect to the longitudinal direction of the groove-like recess is kept as small as possible, and the movement amount of the material near the end of the groove-like depression is also reduced. The shape of the end of the groove-like depression is clearly formed by being suppressed. That is, even in the stage where the second inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the end of the groove-like recess is also increased, so that the partition wall in the vicinity of the groove-like recess end The thickness and shape can be clearly formed up to the end of the groove-like recess.

  In the manufacturing method of the liquid jet head, a chamfered finish inclined surface is formed at a longitudinal end portion of the ridge portion of the finishing punch, and the inclination angle of the finishing inclined surface with respect to the pushing direction of the finishing punch is: When it is set smaller than the inclination angle of the second inclined surface, the material movement toward the end of the groove-like recess at the stage of the finishing push stroke is due to the small inclination angle of the finishing inclined surface. Since it is suppressed as much as possible, the movement amount of the material in the longitudinal direction of the groove-shaped recess near the end of the groove-shaped recess is also suppressed, and the shape of the end of the groove-shaped recess is clearly formed. That is, even in the stage where the finish inclined surface is pushed in, the material flow component in the width direction of the groove-like recess at the groove-like recess end is increased, so that the partition wall portion near the groove-like recess end is Thickness and shape can be clearly molded up to the end of the groove-like recess.

  In the method of manufacturing the liquid jet head, the first temporary forming surface and the second temporary forming surface are formed on the material by the first inclined surface and the second inclined surface during the temporary forming of the temporary processing punch, and the finishing punch of the finishing punch is formed. In the case where finish forming is performed with a finishing punch after the tip of the finish inclined surface is pressed against the first temporary forming surface, a portion deeper than the second temporary forming surface when viewed in the depth direction of the groove-like recess. In addition, the tip of the finishing punch presses against the first temporary molding surface located at a location farther away from the end of the groove-shaped recess than the second temporary molding surface when viewed in the longitudinal direction of the groove-shaped recess. And plastic deformation is performed. Therefore, the finish forming by the finishing punch is performed without substantially affecting the end of the groove-like recess in terms of material movement, and the shape of the end of the groove-like recess is clearly formed.

  Further, since the inclination angle of the finish inclined surface of the finishing punch is set small, the surface portion of the first temporary forming surface is moved toward the inside of the material, and so-called “return” does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess.

  In the manufacturing method of the liquid jet head, an end of the groove-like recess is formed by the finish molding of the finishing punch by the second temporary molding surface, the first temporary molding surface, and the finish molding surface formed by the finish molding. When the finished shape is formed on the part, the finishing is performed on the finishing inclined surface of the finishing punch having an inclination angle smaller than the inclination angle of the first temporary forming surface. The inclined surface does not come into surface contact, and the material at the end of the first temporary molding surface is moved in the pushing direction by the finished inclined surface. And by this movement, a part of the first temporary molding surface is left without disappearing, so that the second temporary molding surface, the first temporary molding surface, and a finish molding surface continuous with the second temporary molding surface are surely provided at the end of the groove-like recess. And the shape of the end of the groove-like recess can be configured accurately.

  In the liquid ejecting head manufacturing method, in the second step, the first temporary molding surface, the second temporary molding surface, and the finish in the finished shape formed at the end of the groove-shaped recess formed in the first step. When the communication port is opened by press-fitting a punch into one of the molding surfaces, the communication port is formed by press-fitting the punch into the inclined molding surface. This is performed with almost no influence on the end of the groove-like recess in terms of material movement, so that the shape of the end of the groove-like recess is clearly formed. The surface portion of the inclined molding surface is moved toward the inside of the material, and so-called “return” does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess. In this way, since the finish shape around the communication port at the end of the groove-like recess can be ensured in a state where there is no “return”, turbulence occurs in the ink flow at the communication port, or bubbles are stagnant Ink discharge characteristics can be kept constant.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  As described above, the liquid ejecting head to be manufactured in the present invention can function for various liquids. In the illustrated embodiment, as a typical example, this liquid ejecting head is used. Is applied to an ink jet recording head. The present invention can be similarly applied to other liquid ejecting heads, for example, a color material ejecting head, an electrode material ejecting head, a bioorganic matter ejecting head, and the like.

  As shown in FIGS. 1 and 2, the recording head 1 includes a case 2, a vibrator unit 3 housed in the case 2, a flow path unit 4 joined to the front end surface of the case 2, and a front end surface It is roughly comprised from the connection board | substrate 5 arrange | positioned on the attachment surface of the case 2 on the opposite side, and the supply needle unit 6 etc. which are attached to the attachment surface side of the case 2.

  As shown in FIG. 3, the vibrator unit 3 includes a piezoelectric vibrator group 7 composed of comb-like piezoelectric vibrators 10, a fixed plate 8 to which the piezoelectric vibrator group 7 is joined, and a piezoelectric vibrator. A flexible cable 9 for supplying a driving signal to the group 7 is schematically configured.

  The piezoelectric vibrator group 7 includes a plurality of piezoelectric vibrators 10 formed in a row. Each of the piezoelectric vibrators 10 is a kind of pressure generating element and a kind of electromechanical conversion element. Each of these piezoelectric vibrators 10 is composed of a pair of dummy vibrators 10a and 10a located at both ends of the row and a plurality of drive vibrators 10b arranged between the dummy vibrators 10a and 10a. Has been. Each of the drive vibrators 10b is cut into, for example, a comb-like shape having an extremely narrow width of about 50 μm to 100 μm. In this example, 180 are provided per unit. The dummy vibrator 10a is sufficiently wider than the drive vibrator 10b, and has a protection function for protecting the drive vibrator 10b from impact and the like, and a guide function for positioning the vibrator unit 3 at a predetermined position. .

  Each of the piezoelectric vibrators 10... Has its free end protruding outward from the front end surface of the fixed plate 8 by bonding its fixed end onto the fixed plate 8. That is, each piezoelectric vibrator 10 is supported on the fixed plate 8 in a so-called cantilever state. The free ends of the piezoelectric vibrators 10 are configured by alternately stacking piezoelectric bodies and internal electrodes, and expand and contract in the longitudinal direction of the element by applying a potential difference between the opposing electrodes.

  The flexible cable 9 is a flexible tape-shaped wiring member for supplying a drive signal to each piezoelectric vibrator 10. The flexible cable 9 is electrically connected to the piezoelectric vibrator 10 on the side surface of the fixed end opposite to the fixed plate 8. A control IC 11 for controlling driving of the piezoelectric vibrator 10 and the like is mounted on the surface of the flexible cable 9. Further, the fixing plate 8 that supports the piezoelectric vibrators 10 is a plate-like member having rigidity capable of receiving a reaction force from the piezoelectric vibrators 10, and a metal plate such as a stainless steel plate is preferably used.

  Said case 2 is a block-shaped member shape | molded, for example with thermosetting resins, such as an epoxy resin. Here, the case 2 is molded with a thermosetting resin. This thermosetting resin has higher mechanical strength than a general resin, and the linear expansion coefficient is higher than that of a general resin. This is because the deformation due to a change in ambient temperature is small. In the case 2, a storage space 12 that can store the vibrator unit 3 and an ink supply path 13 that forms a part of the ink flow path are formed. In addition, a front end recess 15 serving as a common ink chamber (reservoir) 14 is formed on the front end surface of the case 2.

  The storage space 12 is a space having a size capable of storing the transducer unit 3. The inner wall of the case protrudes partially toward the side of the front end side portion of the housing empty portion 12, and the upper surface of the protruding portion functions as a fixed plate contact surface. The vibrator unit 3 is housed in the housing space 12 in a state where the tip of each piezoelectric vibrator 10 faces the opening on the front end side of the housing space 12. The piezoelectric vibrators 24 are housed and fixed in the housing space 17 with the front end faces from the openings. In this stored state, the front end surface of the fixed plate 8 is bonded in a state of being in contact with the fixed plate contact surface. And the tip end surface of each piezoelectric vibrator 10 ... is joined to the island part 47 of the flow path unit 4 in this accommodation state. Therefore, when the piezoelectric vibrator 10 expands and contracts, the island portion 47 is pushed or pulled, and the diaphragm portion 44 is deformed.

  The tip recess 15 is produced by partially denting the tip surface of the case 2. The tip recess 15 is sealed by an elastic plate 32 of the flow path unit 4 to be a reservoir (common ink chamber) 14 as will be described later. The end portion on the attachment surface side of the ink supply path 13 faces the tip recess 15. The front-end | tip recessed part 15 of this embodiment is a substantially trapezoidal recessed part formed in the left-right outer side rather than the storage empty part 12, and is formed so that the trapezoid lower bottom may be located in the storage empty part 12 side.

  The ink supply path 13 is formed so as to penetrate the height direction of the case 2, and the tip communicates with the tip recess 15. Further, the end portion on the attachment surface side in the ink supply path 13 is formed in a connection port 16 protruding from the attachment surface.

  The connection board 5 is a wiring board on which electrical wiring for various signals to be supplied to the recording head 1 is formed and a connector 17 to which a signal cable can be connected is attached. And this connection board | substrate 5 is arrange | positioned on the attachment surface in case 2, and the electrical wiring of the flexible cable 9 is connected by soldering etc. FIG. In addition, the tip of a signal cable from a control device (not shown) is inserted into the connector 17.

  The supply needle unit 6 is a portion to which an ink cartridge (not shown) storing ink (a liquid ink and a kind of the liquid of the present invention) is connected. An ink supply needle 19 and a filter 20 are roughly configured.

  The ink supply needle 19 is a portion inserted into the ink cartridge, and introduces ink stored in the ink cartridge. The tip of the ink supply needle 19 has a conical shape and is easy to insert into the ink cartridge. In addition, a plurality of ink introduction holes communicating with the inside and outside of the ink supply needle 19 are formed at the tip portion. The recording head 1 of the present embodiment is capable of ejecting two types of ink, and thus includes two ink supply needles 19.

  The needle holder 18 is a member for attaching the ink supply needle 19, and two pedestals 21 for fixing the base portion of the ink supply needle 19 are formed side by side on the surface thereof. The pedestal 21 is formed in a circular shape that matches the shape of the bottom surface of the ink supply needle 19. In addition, an ink discharge port 22 that penetrates the needle holder 18 in the plate thickness direction is formed substantially at the center of the pedestal bottom surface. The needle holder 18 has a flange extending laterally.

  The filter 20 is a member that blocks the passage of foreign matter in the ink such as dust or burrs during molding, and is configured by a fine metal mesh, for example. The filter 20 is bonded to a filter holding groove formed in the pedestal 21.

  The supply needle unit 6 is disposed on the mounting surface of the case 2 as shown in FIG. In this arrangement state, the ink discharge port 22 of the supply needle unit 6 and the connection port 16 of the case 2 communicate with each other in a liquid-tight state via the packing 23.

  In the recording head 1 having such a configuration, the ink stored in the ink cartridge is guided to the ink supply path 13 via the ink supply needle 19. This ink fills the common ink chamber 14, the pressure generation chamber 29, and the communication port 34. When the piezoelectric vibrator 10 expands and contracts in the longitudinal direction of the element, the diaphragm portion 44 is deformed and the volume of the pressure generating chamber 29 changes. This volume fluctuation causes a pressure fluctuation in the ink stored in the pressure generating chamber 29, and an ink droplet is ejected from the nozzle opening 48. For example, when the pressure generating chamber 29 in the intermediate volume is once expanded and then rapidly contracted, the ink from the common ink chamber 14 is supplied to the pressure generating chamber 29 by the decompression accompanying the expansion, and the pressure generated by the contraction is used. Ink droplets are ejected from the nozzle openings 48.

  Next, the flow path unit 4 will be described. The flow path unit 4 has a configuration in which a nozzle plate 31 is bonded to one surface of the pressure generating chamber forming plate 30 and an elastic plate 32 is bonded to the other surface of the pressure generating chamber forming plate 30.

  The flow path unit 4 forms a series of ink flow paths (a type of liquid flow path in the present invention) extending from the ink supply port 45 (a type of liquid supply port) through the pressure generation chamber 29 to the nozzle opening 48. It is a member. This flow path unit 4 is made of a metal-like pressure generating chamber forming plate 30 in which a groove-like recess 33 serving as a pressure generating chamber 29 and a communication port 34 are formed, and a plurality of nozzle openings 48. A nozzle plate 31 and an elastic plate 32 (a kind of sealing plate in the present invention) provided with a diaphragm portion 44 and an ink supply port 45 are provided.

  The flow path unit 4 is manufactured by joining an elastic plate 32 to one surface of a pressure generation chamber forming plate 30 and joining a nozzle plate 31 to the other surface. Here, for example, a sheet-like adhesive is suitably used for joining the members 32, 30, and 31. Then, by joining the members, the opening of the groove-like recess 33 (hereinafter referred to as the recess opening) is sealed by the diaphragm portion 44 of the elastic plate 32, and the pressure generating chamber 29 is defined. The one end portion of the pressure generating chamber 29 and the nozzle opening 48 communicate with each other through the communication port 34, and the ink supply port 45 faces the other end portion of the pressure generating chamber 29.

  The flow path unit 4 is joined to the front end surface of the case with the elastic plate 32 facing the case 2 side. For example, it is bonded by a sheet-like adhesive. As a result, the common ink chamber 14 is partitioned and the common ink chamber 14 and the pressure generating chamber 29 communicate with each other through the ink supply port 45.

  As shown in FIG. 4, the pressure generation chamber forming plate 30 is a metal plate-like member in which a groove-like recess 33, a communication port 34, and an escape recess 35 are formed. In this embodiment, the pressure generating chamber forming plate 30 is produced by plastic working a nickel substrate having a thickness of 0.35 mm.

  Here, the reason why nickel is selected as the substrate will be described. The first reason is that the linear expansion coefficient of nickel is substantially equal to the linear expansion coefficient of the metal (stainless steel as will be described later in the present embodiment) constituting the main part of the nozzle plate 31 and the elastic plate 32. In other words, when the linear expansion coefficients of the pressure generation chamber forming plate 30, the elastic plate 32, and the nozzle plate 31 that constitute the flow path unit 4 are aligned, the respective members expand evenly when these members are heat bonded. For this reason, it is difficult for mechanical stress such as warpage due to the difference in expansion rate to occur. As a result, each member can be bonded without hindrance even if the bonding temperature is set to a high temperature. Further, when the recording head 1 is operated, the piezoelectric vibrator 10 generates heat, and even when the flow path unit 4 is heated by this heat, the members 30, 31, 32 constituting the flow path unit 4 are evenly expanded. For this reason, even if the heating accompanying the operation of the recording head 1 and the cooling due to the operation stop are repeatedly performed, problems such as peeling hardly occur in each of the members 30, 31, 32 constituting the flow path unit 4.

  The second reason is that it is excellent in rust prevention. That is, since this type of recording head 1 uses water-based ink suitably, it is important that no deterioration such as rust occurs even if water contacts over a long period of time. In that respect, nickel is excellent in rust prevention property like stainless steel, and is unlikely to be altered such as rust.

  The third reason is that it is highly malleable. That is, in producing the pressure generation chamber forming plate 30, in this embodiment, plastic working (for example, forging) is performed as described later. The groove-like recess 33 and the communication port 34 formed in the pressure generating chamber forming plate 30 are extremely fine and require high dimensional accuracy. When nickel is used for the substrate, the groove-like recess 33 and the communication port 34 can be formed with high dimensional accuracy even in plastic processing because of excellent malleability.

  The pressure generating chamber forming plate 30 may be made of a metal other than nickel as long as it satisfies the above-described requirements, that is, the linear expansion coefficient requirement, the rust prevention property requirement, and the malleability requirement. .

  The groove-shaped recess 33 is a groove-shaped recess that serves as the pressure generating chamber 29, and is configured by a linear groove as shown in an enlarged view in FIG. In the present embodiment, 180 grooves having a width of about 0.1 mm, a length of about 1.5 mm, and a depth of about 0.1 mm are arranged in the groove width direction. The bottom surface of the groove-like recess 33 is reduced in width as it advances in the depth direction (that is, the back side) and is recessed in a V shape. The reason why the bottom surface is recessed in a V shape is to increase the rigidity of the partition wall 28 that partitions the adjacent pressure generating chambers 29 and 29 from each other. That is, by denting the bottom surface in a V shape, the thickness of the base portion (bottom side portion) of the partition wall portion 28 is increased and the rigidity of the partition wall portion 28 is increased.

  If the rigidity of the partition wall portion 28 increases, it becomes difficult to be affected by pressure fluctuations from the adjacent pressure generation chamber 29. That is, the ink pressure fluctuation from the adjacent pressure generation chamber 29 is hardly transmitted. Further, by recessing the bottom surface in a V shape, the groove-like recess 33 can be formed with high dimensional accuracy by plastic working (described later). The V-shaped angle is defined by the processing conditions and is, for example, around 90 degrees. Furthermore, since the thickness of the tip portion of the partition wall 28 is extremely thin, a necessary volume can be ensured even if the pressure generating chambers 29 are formed densely.

  Further, with respect to the groove-like recess 33 in the present embodiment, both longitudinal end portions thereof are inclined downward toward the inner side as proceeding to the back side. That is, both ends in the longitudinal direction of the groove-like recess 33 are formed in a chamfered shape. The reason for this configuration is to form the groove-like recess 33 with high dimensional accuracy by plastic working. The step of forming the groove-like recess 33 by plastic working and the shape of the groove-like recess 33 will be described in detail later.

  Further, one dummy recess 36 wider than the groove recess 33 is formed adjacent to the groove recesses 33 at both ends. The dummy recess 36 is a groove-like recess that serves as a dummy pressure generating chamber that is not involved in ink droplet ejection. The dummy recess 36 of this embodiment is constituted by a groove having a width of about 0.2 mm, a length of about 1.5 mm, and a depth of about 0.1 mm. The bottom surface of the dummy recess 36 is recessed in a W shape. This is also for increasing the rigidity of the partition wall 28 and for forming the dummy recess 36 with high dimensional accuracy by plastic working.

  Each groove-like recess 33... And the pair of dummy recesses 36, 36 constitute a recess array. In the present embodiment, two rows of the recess portions are formed side by side.

  The communication port 34 is formed as a through hole penetrating from one end of the groove-like recess 33 in the thickness direction. The communication port 34 is formed for each groove-like depression 33, and 180 pieces are formed in one depression row. The communication port 34 of the present embodiment has a rectangular opening shape, a first communication port 37 formed from the groove-shaped recess 33 side of the pressure generating chamber forming plate 30 to the middle in the plate thickness direction, and a groove-shaped recess. It is comprised from the 2nd communicating port 38 formed from the surface on the opposite side to 33 to the middle of the plate | board thickness direction.

  The first communication port 37 and the second communication port 38 have different cross-sectional areas, and the inner dimension of the second communication port 38 is set slightly smaller than the inner dimension of the first communication port 37. This is because the communication port 34 is produced by press working. That is, since the pressure generating chamber forming plate 30 is manufactured by processing a nickel plate having a thickness of 0.35 mm, the length of the communication port 34 can be reduced by subtracting the depth of the groove-like recess 33. It becomes 0.25 mm or more. And since it is necessary to make the width | variety of the communicating port 34 narrower than the groove width of the groove-shaped recessed part 33, it is set to less than 0.1 mm. For this reason, if it tries to punch out the communication port 34 by one process, a male type | mold (punch) will buckle by the relationship of an aspect ratio. Therefore, in the present embodiment, the processing is divided into two times, and the first communication port 37 is formed halfway in the plate thickness direction in the first processing, and the second communication port 38 is formed in the second processing. The processing procedure for the communication port 34 will be described later.

  A dummy communication port 39 is formed in the dummy recess 36. Similar to the communication port 34, the dummy communication port 39 includes a first dummy communication port 40 and a second dummy communication port 41. The inner dimension of the second dummy communication port 41 is the first dummy communication port. The inner dimension of the mouth 40 is set smaller.

  In the present embodiment, the communication port 34 and the dummy communication port 39 described above are exemplified by a rectangular through hole, but the present invention is not limited to this shape. For example, you may comprise by the through-hole opened circularly.

  The escape recess 35 forms a working space for the compliance portion in the common ink chamber 14. In the present embodiment, it is configured by a trapezoidal recess having substantially the same shape as the tip recess 15 of the case 2 and the depth being equal to the groove-shaped recess 33. The escape recess 35 may be a through-hole that penetrates the pressure generation chamber forming plate 30 in the thickness direction.

  Next, the elastic plate 32 will be described. The elastic plate 32 is a kind of sealing plate, and is made of, for example, a double-layer composite material (a kind of metal material of the present invention) in which an elastic film 43 is laminated on a support plate 42. In this embodiment, a stainless steel plate is used as the support plate 42, and PPS (polyphenylene sulfide) is used as the elastic film 43.

  As shown in FIG. 6, the elastic plate 32 is formed with a diaphragm portion 44, an ink supply port 45, and a compliance portion 46.

  The diaphragm portion 44 is a portion that is deformed by expansion / contraction (deformation) of the piezoelectric vibrator 10, and is a portion that divides a part of the pressure generation chamber 29. That is, the diaphragm portion 44 seals the opening surface of the groove-like recess portion 33 and partitions the pressure generating chamber 29 together with the groove-like recess portion 33. As shown in FIG. 7A, the diaphragm portion 44 has an elongated shape corresponding to the groove-like recess portion 33, and each groove-like recess portion 33 with respect to the sealing region for sealing the groove-like recess portion 33. ... is formed every time. Specifically, the width of the diaphragm portion 44 is set to be substantially equal to the groove width of the groove-like recess portion 33, and the length of the diaphragm portion 44 is set to be slightly shorter than the length of the groove-like recess portion 33. Regarding the length, in this embodiment, it is set to about 2/3 of the length of the groove-like recess 33. Then, with respect to the formation position, as shown in FIG. 2, one end of the diaphragm portion 44 is aligned with one end of the groove-like recess portion 33 (end portion on the communication port 34 side).

  As shown in FIG. 7B, the diaphragm portion 44 is produced by removing the support plate 42 corresponding to the groove-like recess portion 33 in an annular shape by etching or the like to make only the elastic film 43, An island portion 47 is formed in the ring. That is, the elastic film 43 serving as the deforming portion is provided around the island portion 47 serving as the rigid body portion. As described above, the tip surface of the piezoelectric vibrator 10 is joined to the island portion 47, and the island portion 47 moves and the elastic film 43 is deformed by the expansion and contraction of the piezoelectric vibrator 10. The deformation of the elastic film 43 causes the pressure generating chamber 29 to expand or contract.

  The ink supply port 45 is a hole for communicating the pressure generating chamber 29 and the common ink chamber 14, and penetrates the elastic plate 32 in the plate thickness direction. The ink supply port 45 is also formed for each groove-like recess 33... At a position corresponding to the groove-like recess 33, similarly to the diaphragm 44. As shown in FIG. 2, the ink supply port 45 is formed at a position corresponding to the other end of the groove-like recess 33 on the side opposite to the communication port 34. The diameter of the ink supply port 45 is set to be sufficiently smaller than the groove width of the groove-like recess 33. In this embodiment, it is constituted by a fine through hole of 23 microns.

  The reason why the ink supply port 45 is formed as a fine through hole in this manner is to provide a flow path resistance between the pressure generation chamber 29 and the common ink chamber 14. That is, in the recording head 1, ink droplets are ejected using pressure fluctuation applied to the ink in the pressure generation chamber 29. For this reason, in order to eject ink droplets efficiently, it is important that the ink pressure in the pressure generating chamber 29 is not released to the common ink chamber 14 as much as possible. From this point of view, in this embodiment, the ink supply port 45 is constituted by a fine through hole.

  If the ink supply port 45 is configured by a through-hole as in this embodiment, there are advantages that processing is easy and high dimensional accuracy can be obtained. That is, since the ink supply port 45 is a through hole, it can be manufactured by laser processing. Therefore, even a minute diameter can be produced with high dimensional accuracy and the operation is easy.

  The compliance unit 46 is a part that divides a part of the common ink chamber 14.

  That is, the common ink chamber 14 is partitioned by the compliance portion 46 and the tip recess 15. The compliance portion 46 has a trapezoidal shape that is substantially the same as the opening shape of the tip recess 15, and is produced by removing the portion of the support plate 42 by etching or the like so that only the elastic film 43 is formed. The compliance portion 44 is deformed according to the ink pressure in the common ink chamber 14 and has an effect of absorbing pressure fluctuation.

  Note that the support plate 42 and the elastic film 43 constituting the elastic plate 32 are not limited to this example. For example, polyimide may be used as the elastic film 43. Moreover, the elastic plate 32 can also be comprised only with a metal plate. For example, a metal plate provided with a thick wall portion that is difficult to deform and a thin wall portion that is thin enough to have elasticity is used, and the island portion 47 of the diaphragm portion 44 is constituted by the above thick wall portion, and the deformation of the diaphragm portion 44 The compliance portion 46 may be constituted by the thin portion described above.

  Next, the nozzle plate 31 will be described. The nozzle plate 31 is a metal plate-like member in which nozzle openings 48 are arranged. In this embodiment, a stainless steel plate is used, and a plurality of nozzle openings 48 are opened at a pitch corresponding to the dot formation density. In the present embodiment, a total of 180 nozzle openings 48 are arranged to form a nozzle row, and this nozzle row is formed side by side. When the nozzle plate 31 is joined to the other surface of the pressure generating chamber forming plate 30, that is, the surface opposite to the elastic plate 32, each nozzle opening 48 faces the corresponding communication port 34.

  When the elastic plate 32 is joined to one surface of the pressure generation chamber forming plate 30, that is, the formation surface of the groove-like recess 33, the diaphragm portion 44 seals the opening surface of the groove-like recess 33. Thus, the pressure generation chamber 29 is defined. Similarly, the opening surface of the dummy recess 36 is also sealed to form a dummy pressure generating chamber. When the nozzle plate 31 is joined to the other surface of the pressure generating chamber forming plate 30, the nozzle opening 48 faces the corresponding communication port 34. When the piezoelectric vibrator 10 bonded to the island portion 47 is expanded or contracted in this state, the elastic film 43 around the island portion is deformed, and the island portion 47 is pushed toward the groove-like recess 33 side or the groove-like recess 33 side. It is pulled away from the direction. Due to the deformation of the elastic film 43, the pressure generating chamber 29 expands or contracts, and pressure fluctuation is applied to the ink in the pressure generating chamber 29.

  Furthermore, when the elastic plate 32 (that is, the flow path unit 4) is joined to the case 2, the compliance portion 46 seals the tip recess 15. The compliance unit 46 absorbs pressure fluctuations in the ink stored in the common ink chamber 14. That is, the elastic film 43 expands or contracts according to the pressure of the stored ink and deforms. The escape recess 35 forms a space for the elastic film 43 to expand when the elastic film 43 expands.

  The recording head 1 configured as described above has a common ink flow path from the ink supply needle 19 to the common ink chamber 14 and an individual ink flow path from the common ink chamber 14 through the pressure generation chamber 29 to each nozzle opening 48. Have. The ink stored in the ink cartridge is introduced from the ink supply needle 19 and stored in the common ink chamber 14 through the common ink flow path. The ink stored in the common ink chamber 14 is discharged from the nozzle opening 48 through the individual ink flow path.

  For example, when the piezoelectric vibrator 10 is contracted, the diaphragm portion 44 is pulled toward the vibrator unit 3 and the pressure generating chamber 29 expands. Due to this expansion, the inside of the pressure generation chamber 29 is reduced to a negative pressure, so that the ink in the common ink chamber 14 flows into the pressure generation chambers 29 through the ink supply ports 45. Thereafter, when the piezoelectric vibrator 10 is expanded, the diaphragm portion 44 is pushed toward the pressure generating chamber forming plate 30 side, and the pressure generating chamber 29 contracts. Due to this contraction, the ink pressure in the pressure generating chamber 29 rises, and ink droplets are ejected from the corresponding nozzle openings 48.

  In the recording head 1, the bottom surface of the pressure generating chamber 29 (groove-shaped recess 33) is recessed in a V shape. For this reason, the partition wall portion 28 that partitions the adjacent pressure generation chambers 29 and 29 is formed such that the thickness of the base portion is thicker than the thickness of the tip portion. Thereby, the rigidity of the partition wall portion 28 can be increased as compared with the prior art. Therefore, even when the ink pressure fluctuates in the pressure generation chamber 29 when ink droplets are ejected, the pressure fluctuation can be hardly transmitted to the adjacent pressure generation chamber 29. As a result, so-called adjacent crosstalk can be prevented and ink droplet ejection can be stabilized.

  In the present embodiment, the ink supply port 45 that communicates the common ink chamber 14 and the pressure generation chamber 29 is configured by a fine hole that penetrates the thickness direction of the elastic plate 32. Therefore, high dimensional accuracy is achieved by laser processing or the like. Is easily obtained. Thereby, the inflow characteristics (inflow speed, inflow amount, etc.) of the ink into each pressure generating chamber 29 can be aligned at a high level. Further, when processing is performed with a laser beam, processing is also easy.

  In this embodiment, a dummy pressure generating chamber (that is, a space defined by the dummy recess 36 and the elastic plate 32) is adjacent to the pressure generating chambers 29, 29 at the end of the row and is not involved in ink droplet ejection. ), The adjacent pressure generating chambers 29 are formed on one side and the dummy pressure generating chambers are formed on the opposite side. Thereby, with respect to the pressure generation chambers 29 and 29 at the column end, the rigidity of the partition walls defining the pressure generation chambers 29 can be made equal to the rigidity of the partition walls in the other pressure generation chambers 29. As a result, the ink droplet ejection characteristics of all the pressure generating chambers 29 in one row can be made uniform.

  Further, with respect to the dummy pressure generating chambers, the width in the row direction is made wider than the width of each pressure generating chamber 29. In other words, the width of the dummy recess 36 is wider than the width of the groove-like recess 33. Thereby, the discharge characteristics of the pressure generating chamber 29 at the end of the row and the pressure generating chamber 29 in the middle of the row can be aligned with higher accuracy.

  Further, in the present embodiment, the front end surface of the case 2 is partially recessed to form the front end concave portion 15, and the common ink chamber 14 is defined by the front end concave portion 15 and the elastic plate 32. A dedicated member for forming the chamber 14 is not required, and the configuration can be simplified. Further, since the case 2 is manufactured by resin molding, it is relatively easy to manufacture the tip recess 15.

  Next, a method for manufacturing the recording head 1 will be described. In addition, since this manufacturing method has the characteristic in the manufacturing process of said pressure generation chamber formation board 30, it demonstrates centering on the manufacturing process of the pressure generation chamber formation board 30. FIG. The pressure generating chamber forming plate 30 is produced by forging using a progressive die. Moreover, the strip used as a material of the pressure generating chamber forming plate 30 is made of nickel as described above.

  The manufacturing process of the pressure generating chamber forming plate 30 includes a groove-shaped recess forming process for forming the groove-shaped recess 33 and a communication port forming process for forming the communication port 34, and is performed by a progressive feed mold. In addition, shaping | molding of the longitudinal direction edge part of the groove-shaped recessed part 33 is mentioned later.

  In the groove-shaped recess forming step, a male mold 51 shown in FIG. 8 and a female mold 52 shown in FIG. 9 are used. The male mold 51 is a mold for forming the groove-shaped recess 33. In this male mold, the same number of ridges 53 for forming the groove-like depressions 33 as the groove-like depressions 33 are arranged. Further, dummy ridges (not shown) for forming the dummy recesses 36 adjacent to the ridges 53 at both ends in the row direction are also provided. The tip 53a of the protrusion 53 has a tapered mountain shape, and is chamfered at an angle of about 45 degrees from the center in the width direction, for example, as shown in FIG. 8 (b). That is, a wedge-shaped tip portion 53 a is formed by a mountain-shaped slope formed at the tip of the protrusion 53. Thereby, it is sharp in V shape seeing from the longitudinal direction. Further, both ends in the longitudinal direction of the tip portion 53a are chamfered at an angle of about 45 degrees as shown in FIG. For this reason, the front-end | tip part 53a of the protrusion part 53 becomes a shape which chamfered both ends of the triangular prism.

  The female mold 52 has a plurality of streak projections 54 formed on the upper surface thereof. The streak 54 assists the formation of a partition partitioning the adjacent pressure generating chambers 29, 29, and is located between the groove-like recesses 33, 33. The streak-like projection 54 has a quadrangular prism shape, and its width is set to be slightly narrower than the distance between adjacent pressure generating chambers 29 and 29 (thickness of the partition wall), and the height is about the same as the width. Further, the length of the streak-like projection 54 is set to be approximately the same as the length of the groove-like recess 33 (the ridge 53).

  In the groove-shaped recess forming step, first, as shown in FIG. 10A, a band plate 55 which is a material and is a pressure generation chamber forming plate is placed on the upper surface of the female mold 52, and the band plate 55 The male mold 51 is disposed above the. Next, as shown in FIG. 10 (b), the male mold 51 is lowered and the tip of the protrusion 53 is pushed into the band plate 55. At this time, since the tip portion 53a of the ridge portion 53 is sharpened in a V shape, the tip portion 53a can be reliably pushed into the band plate 55 without buckling the ridge portion 53. As shown in FIG. 10C, the protrusion 53 is pushed halfway in the thickness direction of the strip 55.

  When the protrusion 53 is pushed in, a part of the strip 55 flows to form the groove-like recess 33. Here, since the tip end portion 53a of the ridge 53 is pointed in a V shape, even the groove-shaped recess 33 having a fine shape can be manufactured with high dimensional accuracy. That is, since the portion pressed by the tip portion 53 a flows smoothly, the formed groove-like recess 33 is formed in a shape that follows the shape of the protrusion 53. At this time, the material that has flowed so as to be pushed by the tip portion 53 a flows into the gap portion 53 b provided between the protrusions 53, and the partition wall portion 28 is formed. Furthermore, since both ends in the longitudinal direction of the tip portion 53a are also chamfered, the band plate 55 pressed by the portion also flows smoothly. Therefore, both end portions in the longitudinal direction of the groove-like recess 33 can be manufactured with high dimensional accuracy.

  Moreover, since pushing of the protrusion part 53 is stopped on the way of the plate | board thickness direction, the strip | belt board 55 thicker than the case where it forms as a through-hole can be used. As a result, the rigidity of the pressure generating chamber forming plate 30 can be increased, and the ink droplet ejection characteristics can be improved. In addition, the pressure generation chamber forming plate 30 can be easily handled.

  Further, as a result of being pressed by the ridge portion 53, a part of the belt plate 55 is raised in the space between the adjacent ridge portions 53, 53. Here, since the streak 54 provided in the female mold 52 is disposed at a position corresponding to between the protrusions 53, 53, the flow of the strip 55 into this space is assisted. Thereby, the strip 55 can be efficiently introduced into the space between the protrusions 53, and the raised portions can be formed high.

  The formation of the groove-like recess 33 which is a premise of the present invention is basically as described above.

  The first embodiment of the present invention will be described based on the above assumption.

  Here, the molding accuracy of the groove-like recess 33, particularly the molding process at the end in the longitudinal direction of the groove-like recess 33, is important for clearly molding the vicinity of the end of the partition wall 28. In order to meet such a demand, the present invention divides the above-described processing step into a temporary molding step (one aspect of the first step of the present invention) and a finish molding step, and chamfers the end of the protrusion 53. The shape is a special shape adapted to the temporary forming step and the finish forming step (one aspect of the second step of the present invention).

  FIGS. 11 to 14 show an embodiment of a fine forging method, a liquid jet head manufacturing method, and a liquid jet head as described above. In addition, about the site | part which performs the same function as the site | part already demonstrated, the same code | symbol is described in the figure.

  When plastic working is performed on the strip (material) 55 by the male mold 51 and the female mold 52 described above, it is under normal temperature conditions, and also in the plastic working described below, under normal temperature conditions. We are doing plastic working.

  A number of temporary forming punches 51b are arranged on the male mold 51a for temporary forming, that is, the first punch. In order to form the groove-shaped recess 33, the temporary forming punch 51b is elongated and formed into a protrusion 53c. In order to mold the partition wall 28, a gap 53b (see FIGS. 8 and 10) is provided between the temporary molding punches 51b. FIG. 12A shows a state where the first punch 51a is pushed into the pressure generating chamber forming plate 55, which is a material.

  On the other hand, although not shown in the perspective view as shown in FIG. 11, as shown in FIG. 12B, a large number of finish forming punches 51d are provided on the male die 51c for finishing forming, that is, the second punch. They are arranged in the same manner as the molding punch 51b. In order to finish-mold the groove-like recess 33, the finish-forming punch 51d is elongated and formed into a protrusion 53d. Further, in order to mold the partition wall 28, a gap 53e (not shown) is provided between the finish molding punches 51d. FIG. 12B shows a state where the second punch 51c is pushed into the pressure generation chamber forming plate 55 which is a material. As indicated by reference numeral S in FIG. 12 (B), the pressing depth of the second punch 51c is set deeper than the pressing depth of the first punch 51a.

  The protrusions 53c and 53d of the first punch 51a and the second punch 51c are set to have substantially the same width and length.

  A chamfered inclined surface with a different angle is disposed at the longitudinal end of the protrusion 53c of the first punch 51a. As shown in FIG. 13A, the inclined surface is continuously provided with a first inclined surface 63 arranged close to the tip portion 53a and a second inclined surface 64 arranged apart from the tip portion 53a. . As shown in FIG. 14A, the inclination angle of the first inclined surface 63 with respect to the pressing direction of the first punch 51a (the pressing direction line L) is represented by θ1, and similarly, the inclination angle of the second inclined surface 64 is represented by θ2. The magnitude relationship between the two angles is θ1> θ2.

  On the other hand, the second punch 51c for finish molding is provided with a chamfered finish inclined surface 65 at the longitudinal end portion of the protrusion 53d, and as shown by a two-dot chain line in FIG. The inclination angle of the finish inclined surface 65 with respect to the pressing direction of the punch 51c (the pressing direction line L) is represented by θ3, and θ2> θ3. Therefore, the inclination angles of the first inclined surface 63, the second inclined surface 64, and the finished inclined surface 65 are in a magnitude relationship of θ1> θ2> θ3. In addition, the 1st inclined surface 63, the 2nd inclined surface 64, and the finishing inclined surface 65 are comprised by a flat surface, as shown to FIG. 13 (A) (B), and the thickness of each protrusion part 53c, 53d. It is arranged in a direction parallel to the direction.

  When the first punch 51a is pushed into the nickel material 55 as provisional molding and then the first punch 51a is retracted, as shown in FIG. A molding surface 64A is molded. A portion where the finish inclined surface 65 and the tip end portion 53 a intersect is a tip portion 66 of the finish inclined surface 65. When the second punch 51c is pushed in with a finishing stroke, the relative position between the first temporary molding surface 63A and the tip is set so that the tip 66 is first pressed against the first temporary molding surface 63A. (See FIG. 14B).

  Next, the processing operation for the material 55 of the first punch 51a and the second punch 51c will be described.

  First, the first punch 51a is preliminarily formed until a shape that does not reach the final shape is formed first, and then the second punch 51c is followed by the above-described temporary forming and finish forming. Therefore, since the gradual plastic processing is performed stepwise, that is, by the first punch 51a and the second punch 51c, even if the shape is fine, an abnormal shape or a crack occurs in the material. There is no problem, and a predetermined machining shape is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each recess can be processed uniformly, for example, in the case of forming a liquid jet head pressure generation chamber or the like, it is very effective in terms of stabilizing the jet characteristics of the liquid jet head. .

  In the temporary forming step, when the first punch 51a is pressed against the material 55, the material 55 flows into the gap 53b between the temporary forming punches 51b, and the partition wall portion 28 is temporarily formed. In the subsequent finish molding step, the material 55 flows into the gap 53e between the finish molding punches 51d arranged in the second punch 51c, and the partition wall 28 is finished. Also in the formation of the partition wall 28, the first punch 51a is temporarily formed until the shape of the partition wall 28 that does not reach the final shape is first temporarily formed, and then the second punch 51c is used for the temporary forming. Subsequently, finish molding of the partition wall portion 28 is performed. Therefore, since the gradual plastic working is performed step by step, that is, by the first punch 51a and the second punch 51c, even the thin partition wall 28 has an abnormal shape or cracks in the material. There is no problem such as, or the like, and a predetermined machining shape is accurately obtained.

  In the above molding operation, as shown in FIG. 12B, the indentation depth of the second punch 51c with respect to the material 55 at the time of finish molding is deeper than the indentation depth of the first punch 51a with respect to the material 55 at the time of temporary molding. The operation stroke of the second punch 51c is set so as to be pushed deeply by S. Then, the temporary forming punch 51b of the first punch 51a and the finish forming punch 51d of the second punch 51c are pushed into the material 55 in the state of the protruding portions 53c and 53d arranged in parallel. Further, both the punches are pushed in with the widths and lengths of the protrusions 53c and 53d of the first punch 51a and the second punch 51c set to be substantially equal.

  Accordingly, the protrusions 53c and 53d are formed as groove-like recesses 33 in which the recesses are arranged in parallel, and the pressing depth of the second punch 51c in the finish molding is deeper than that of the first punch 51a. The shape of the temporary molding by the first punch 51a can be surely deformed to start the finish molding. In addition, the finish forming of the second punch 51c following the temporary forming of the first punch 51a is performed by the protruding portions 53c and 53d having substantially the same dimensions. Without being deformed abnormally, it is possible to shift to finish molding, and finally a precise groove-shaped recess 33 is obtained.

  On the other hand, the pitch between the protrusions 53d of the second punch 51c is set larger than the pitch between the protrusions 53c of the first punch 51a. That is, when the first punch 51a is retracted from the material 55, the material 55 that has been press-formed by the protrusions 53c of the first punch 51a has a phenomenon that the dimensions of each part of the material that has been temporarily formed and released are slightly increased. is there. As a result of this phenomenon, the pitch of the groove-like recesses 33 formed by the first punch 51a is also slightly larger than the pitch of the protrusions 53c of the first punch 51a. Therefore, by setting the pitch between the protrusions 53d in accordance with the pitch of the groove-shaped recess 33 thus increased in the second punch 51c, the protrusion of the second punch 51c suitable for the temporary forming dimension is set. Accurate finish molding with a pitch between the portions 53d can be smoothly and reliably performed without excessive material deformation.

  By setting the pitch between the protrusions 53d of the second punch 51c to 0.3 mm or less, for example, it is possible to achieve a more suitable finish in processing parts such as a liquid jet head. This pitch is preferably 0.2 mm or less, more preferably 0.15 mm or less.

  The temporary forming by the first punch 51a includes a first inclined surface 63 arranged close to the tip portion 53a of the ridge and a second inclined surface 64 arranged apart from the tip portion 53a of the ridge. The first inclined surface 63 is first brought into pressure contact with the material 55 by the pressing of the first punch 51a. At this time, since the inclination angle θ1 of the first inclined surface 63 is set larger than the inclination angle θ2 of the second inclined surface, the first inclined surface 63 having a large inclination angle is separated from the end of the groove-like recess 33. Initial molding of the groove-shaped recess 33 is started in a state where the material 55 is pushed into the material 55 at a location and the influence of the flow of the material 55 on the end of the groove-shaped recess 33 is small. Therefore, in this initial stage, there is little material movement in the longitudinal direction in the vicinity of the end of the groove-like recess 33, but rather material movement in the width direction of the groove-like recess 33 is positively promoted.

  Thereafter, when the first inclined surface 63 is pushed into the material 55, the second inclined surface 64 having a small inclination angle near the end of the groove-like recess 33 is pushed into the material 55. The material movement toward the end of the groove-like depression 33 is performed rather than the movement of the material in the width direction of the depression-like depression 33. In this case, since the inclination angle θ2 of the second inclined surface 64 is small, the movement amount of the material 55 with respect to the longitudinal direction of the groove-like recess 33 is kept as small as possible. The amount of movement of the material 55 is also suppressed, and the shape of the end of the groove-like recess 33 is clearly formed. That is, even when the second inclined surface 64 is pushed in, the material flow component in the width direction of the groove-like recess 33 at the end of the groove-like recess 33 is also increased. The thickness and shape of the partition wall 28 in the vicinity are clearly formed up to the end of the groove-like recess.

  When the first punch 51a is temporarily formed, the first inclined surface 63 and the second inclined surface 64 cause the material 55 to have a first temporary forming surface (an inclined forming surface of the present invention, that is, one aspect of the first inclined forming surface) 63A and the second. After the temporary molding surface (an inclined molding surface of the present invention, that is, one aspect of the second inclined molding surface) 64A is molded, and the tip 66 of the finish inclined surface 65 of the second punch 51c is pressed against the first temporary molding surface 63A. Finish molding is performed by the second punch 51c. In this operation, it is located at a location deeper than the second temporary molding surface 64A when viewed in the depth direction of the groove-shaped recess 33, and from the end of the groove-shaped recess 33 when viewed in the longitudinal direction of the groove-shaped recess 33. The tip portion 66 of the second punch is pressed against the first temporary molding surface 63A located at a location separated from the second temporary molding surface 64A, and plastic deformation is performed.

  Therefore, the finish forming by the second punch 51c is performed with almost no influence on the end of the groove-like recess 33 in terms of material movement, and the shape of the end of the groove-like recess 33 is clearly formed. The inclination angle θ3 of the finishing inclined surface 65 is smaller than the inclination angle of the second temporary forming surface 64A and the first temporary forming surface 63A (the same angle as the above θ2 and θ1). The amount of movement of the groove 55 in the longitudinal direction of the material 55 due to the pressing displacement of the surface 65 can be extremely reduced, and it functions effectively for accurate molding of the end of the groove 33.

  As shown in FIGS. 14B and 14C, when the distal end portion 66 of the second punch 51c is pushed into the first temporary molding surface 63A and the deformation further proceeds, the final finished shape 67 becomes the second temporary molding. The surface 64A, the first temporary molding surface 63A, and the finish inclined surface 65 are formed by the finish molding surface 68 newly formed. This is because finishing is performed with the finishing inclined surface 65 of the second punch 51c having an inclination angle θ3 smaller than the inclination angle θ1 of the first temporary forming surface 63A, and thus the above-described finishing inclined surface 65 is formed on the surface of the first temporary forming surface 63A. The material 55 at the end of the first temporary molding surface 63A is moved in the pushing direction by the finish inclined surface 65 without surface contact. Therefore, when the first temporary molding surface 63A disappears by this pushing, at least the second temporary molding surface 64A and the finish molding surface 68 continuous thereto are reliably formed at the end of the groove-like recess 33.

  Further, when the first temporary molding surface 63A continuous to the second temporary molding surface 64A does not disappear and remains partially, the second temporary molding surface 64A, the first temporary molding surface 63A, and the finish molding surface 68 are used. The final finished shape 67 is obtained. Thus, the shape of the end of the groove-like recess 33 can be accurately configured by setting the inclination angle θ3 of the finish inclined surface 65 to be the smallest.

  As indicated by reference numeral C in FIG. 14C, a gap C exists when the second punch 51c has finally been pushed. This is because the inclination angle θ3 of the finish inclined surface 65 is set to be smaller than the inclination angle θ2 of the second temporary molding surface 64A, so that the end opening side of the groove-like recess 33 is the longitudinal direction of the groove-like recess 33. Since a force that spreads in the direction does not act, it is beneficial for accurately finishing the shape of the end of the groove-like recess 33.

  As described above, when the finish inclined surface 65 pushes the first temporary molding surface 63A, the surface portion of the first temporary molding surface 63A moves so as to be pushed toward the inside of the material 55. Therefore, when the second punch 51c is retracted, a shape without “return” is obtained at the end of the groove-like recess 33.

  As shown in FIGS. 13C and 13D, the first inclined surface 63, the second inclined surface 64, and the finished inclined surface 65 are formed in a mountain shape so that as much material as possible is formed in the width direction of the groove-like recess 33. The shape of the end of the groove-like recess 33 can be precisely finished by moving. These illustrated chevron shapes are composed of an inclination and a ridgeline, but the same effect can be obtained by making this a rounded convex curved surface.

  The ridges 53c and 53d of the first punch 51a and the second punch 51c are formed with wedge-shaped tip portions 53a by mountain-shaped slopes formed at the tips thereof, and both the side surfaces of the ridges 53c and 53d and the above-mentioned The boundary 69 with the slope is a rounded and smooth connection shape. For this reason, the shape of the partition wall 28 is easily required by smoothing the fluidity of the material to the gaps 53b and 53e. In addition, the lower portion of the groove-like recess 33 is formed in a V shape so that the volume of the groove-like recess 33 is as large as possible, and the rigidity of the base portion of the partition wall 28 is increased to stabilize the strength. The partition part 28 can be comprised.

  Next, a method for manufacturing a liquid jet head using the fine forging method will be described.

  In the method for manufacturing a liquid jet head according to the present invention, the groove-like recesses 33 that serve as the pressure generating chambers 29 are arranged, and the communication port 34 penetrating in the thickness direction is formed at one end of each groove-like recess 33. The metal pressure generation chamber forming plate 30, the metal nozzle plate 31 having a nozzle opening 48 formed at a position corresponding to the communication port 34, and the opening surface of the groove-like recess 33 are sealed, and the groove A metal-made sealing plate having an ink supply port 45 formed at a position corresponding to the other end of the recess 33, and a sealing plate on the groove-like recess 33 side of the pressure generation chamber forming plate 30. In the method of manufacturing the liquid jet head 1 in which the nozzle plate 31 is bonded to the opposite side, the groove-shaped recess 33 of the pressure generating chamber forming plate 30 is formed by each of the fine forging methods described above. Yes.

  Therefore, the groove-like recess 33 is processed in the pressure generating chamber forming plate 30 which is a raw material by making full use of the advantageous effects of the fine forging method described above. Examples of processing of the pressure generating chamber forming plate 30 based on the above advantageous operation effects are listed as follows.

  For example, in the temporary molding by the first punch 51a, the molding is first performed until the final shape is reached, and then the final molding is performed by the second punch 51c following the temporary molding. Therefore, since the gradual plastic processing is performed stepwise, that is, by the first punch 51a and the second punch 51c, even if the shape is fine, an abnormal shape or a crack occurs in the material. There is no problem, and the processed shape of the groove-like recess 33 as required is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each groove-like recess 33 can be processed uniformly, it is very effective in terms of stabilizing the ejection characteristics of the liquid ejection head 1.

  Alternatively, a chamfered inclined surface having a different angle is provided at the longitudinal end of the protrusion 53c of the first punch 51a, and the inclined surface is disposed close to the tip of the protrusion 53c. And the inclined angle θ1 of the first and second inclined surfaces 63 and 64 with respect to the pushing direction of the first punch 51a. , Θ2 is set to be larger on the first inclined surface 63, so that the first inclined surface 63 having a larger inclination angle is pushed into the pressure generating chamber forming plate 30 at a location separated from the end of the groove-like recess 33. Therefore, the initial molding of the groove-like recess 33 is started in a state where the influence of the material flow on the end of the groove-like recess 33 is small. Therefore, in this initial stage, there is little material movement in the longitudinal direction in the vicinity of the end of the groove-like recess 33, but rather material movement in the width direction of the groove-like recess 33 is positively promoted.

  Thereafter, when the first inclined surface 63 is pushed into the pressure generating chamber forming plate 30, the second inclined surface 64 having a small inclination angle θ2 on the side close to the end of the groove-like recess 33 is pushed into the material (30). Therefore, this time, the material movement toward the end of the groove-shaped recess 33 is performed rather than the material movement in the width direction of the groove-shaped recess 33. In this case, since the inclination angle θ2 of the second inclined surface 64 is small, the movement amount of the material (30) with respect to the longitudinal direction of the groove-like recess 33 is kept as small as possible. The amount of movement of the nearby material (30) is also suppressed, and the shape of the end of the groove-like recess 33 is clearly formed. That is, even when the second inclined surface 64 is pushed in, the material flow component in the width direction of the groove-like recess 33 at the end of the groove-like recess 33 is also increased. The thickness and shape of the partition wall 28 in the vicinity can be clearly formed up to the end of the groove-like recess 33. Therefore, the partition wall 28 between the groove-like recesses 33 is accurately formed up to the end of the groove-like recess 33, and the shape of the pressure generating chamber 29 that is precisely finished is obtained.

  Further, the first temporary forming surface 63A and the second temporary forming surface 64A are formed on the pressure generating chamber forming plate 30 by the first inclined surface 63 and the second inclined surface 64 during the temporary forming of the first punch 51a, and the first When finishing forming with the second punch 51c after the front end portion 66 of the finish inclined surface 65 of the two punch 51c is pressed against the first temporary forming surface 63A, it is viewed in the depth direction of the groove-like recess 33. The first temporary molding is located at a location deeper than the second temporary molding surface 64A, and is further away from the end of the groove-shaped recess 33 than the second temporary molding surface 64A when viewed in the longitudinal direction of the groove-shaped recess 33. The tip portion 66 of the second punch 51c is pressed against the surface 63A, and plastic deformation is performed. Therefore, the finish forming by the second punch 51c is performed with almost no influence on the end of the groove-like recess 33 in terms of material movement, and the shape of the end of the groove-like recess 33 is clearly formed. Therefore, the partition wall 28 between the groove-like recesses 33 is accurately formed up to the end of the groove-like recess 33, and the shape of the pressure generating chamber 29 that is precisely finished is obtained.

  Next, the liquid ejecting head obtained by the fine forging method will be described.

  The liquid jet head 1 according to the present invention is a first punch in which groove-shaped recesses 33 arranged at a predetermined pitch are formed on a pressure generation chamber forming plate 30 as a material, and a temporary punch 51b is arranged. After each groove-shaped recess 33 is temporarily formed in the pressure generating chamber forming plate 30 by 51a, finish molding is performed by a second punch 51c in which finish forming punches 51d are arranged with respect to the temporarily formed groove-shaped recess 33. Has been done.

  Therefore, as described in the fine forging method and the liquid jet head manufacturing method, there is no problem that the groove-shaped recess 33 having a fine shape becomes an abnormal shape or the material is cracked. A predetermined processing shape is accurately obtained. Furthermore, since the manufacturing method is simpler than the usual anisotropic etching method, it is advantageous in terms of manufacturing cost.

  Furthermore, since the volume of each groove-like recess 33 can be processed uniformly, the partial accuracy of the pressure generating chamber 29 is remarkably improved, and this is very effective in terms of stabilizing the ejection characteristics of the liquid ejecting head 1. Further, if the pressure generating chamber forming plate 30 is made of, for example, nickel, the linear expansion coefficients of the pressure generating chamber forming plate 30, the elastic plate 32, and the nozzle plate 31 constituting the flow path unit are substantially uniform. When each member is heat-bonded, each member expands evenly. For this reason, it is difficult for mechanical stress such as warpage due to the difference in expansion rate to occur. As a result, each member can be bonded without hindrance even if the bonding temperature is set to a high temperature. Further, even when the piezoelectric vibrator 7 generates heat when the recording head 1 is operated and the flow path unit is heated by this heat, each member constituting the flow path unit expands evenly. For this reason, even if the heating accompanying the operation of the recording head 1 and the cooling accompanying the operation stop are repeatedly performed, problems such as peeling are less likely to occur in each member constituting the flow path unit.

  In finish molding, the groove-shaped recess 33 is located at a location deeper than the second temporary molding surface 64A when viewed in the depth direction, and from the end of the groove-shaped recess 33 when viewed in the longitudinal direction of the groove-shaped recess 33. The tip portion 66 of the second punch 51c is pressed against the first temporary molding surface 63A located at a location separated from the second temporary molding surface 64A, and plastic deformation is performed. Therefore, the finish forming by the second punch 51c is performed with almost no influence on the end of the groove-like recess 33 in terms of material movement, and the shape of the end of the groove-like recess 33 is clearly formed. Further, since the inclination angle θ3 of the finish inclined surface 65 of the second punch 51c is set small, the surface portion of the first temporary molding surface 63A is moved toward the inside of the material (30), so-called “ "Return" does not occur. Accordingly, the partition wall between the groove-like recesses is accurately formed up to the end of the groove-like recess.

  As described above, since the final finish shape 67 at the end of the groove-like recess 33 can be ensured in a uniform and non-returned state, the volume of each pressure generating chamber 29 becomes constant, and the ink ejection characteristics can be maintained constant. Further, since there is no “return”, turbulent flow does not occur in the ink flow at the end of the groove-like depression 33 and bubbles do not stagnate.

  Further, by setting the respective inclination angles θ1, θ2, and θ3 as described above, at the end of the groove-like recess 33 at least by the second temporary forming surface 64A and the finish forming surface 68 in the finish forming of the second punch 51c. A final finished shape 67 is formed. In addition to the molding surfaces 64A and 68, a final finished shape 67 including the first temporary molding surface 63A is obtained. Since these final finished shapes 67 can be obtained uniformly by setting the inclination angle, the processing quality of the end shape of the groove-like recess 33 is improved, and it is effective for stabilizing the ejection characteristics of the ink droplets.

  As described above, the groove-like recess 33 is formed in the pressure generating chamber forming plate 30 by a processing method with an emphasis on the movement of the material in the width direction of the groove-like recessed portion 33. Directional material deformation is reduced as much as possible. Therefore, since the surface flatness of the pressure generating chamber forming plate 30 after processing is remarkably improved, a liquid jet head that is advantageous in terms of cost can be obtained in which the final finishing polishing process is simplified.

  Furthermore, in the liquid ejecting head, the end surface of the groove-shaped recess 33 is configured by an inclined surface that expands toward the opening of the groove-shaped recess 33, so that the liquid is inclined to the inclined surface at one end of the pressure generating chamber 29. It is possible to prevent the stagnation of the bubbles at the one end, and the bubbles that have entered the pressure generating chamber 29 can be reliably discharged on the liquid flow. In addition, since the end surface is made of an inclined surface that expands toward the opening of the groove-shaped recess 33, the metal flows smoothly when the punch is pushed in, and the groove-shaped recess 33 has an extremely fine shape. However, the dimensional accuracy of the end face can be increased, and the height of the partition wall portion 28 can be sufficiently secured.

  In addition, since the end surface of the groove-shaped recess 33 is configured by a plurality of inclined surfaces whose rising angles with respect to the bottom of the recess become steep enough to be separated from the bottom of the groove-shaped recess 33, an inclined surface close to the bottom of the recess is formed. Since the slope is relatively gentle, the burden on the second punch 51c is small even if at least a part of the inclined surface is punched during the processing with the second punch 51c. For this reason, the durability of the second punch 51c can be maintained. Furthermore, since the slope of the portion close to the opening of the groove-like recess 33 on the end surface becomes steep, the volume at one end of the groove-like recess 33 can be reduced as much as possible, and the stagnation of the liquid is reduced. Can do.

  In this case, the end surface can be configured by a curved inclined surface whose rising angle with respect to the bottom of the recess becomes steep as it is separated from the bottom of the groove-like recess. In such a case, since the inclined surface near the bottom of the recess has a relatively gentle gradient, even if at least a part of the inclined surface is punched when the communication port is manufactured, the burden on the second punch 51c is small. . For this reason, the durability of the second punch 51c can be maintained. Furthermore, since the slope of the portion near the opening of the recess on the end surface becomes steep, the volume at one end of the groove-like recess 33 can be reduced as much as possible, and the stagnation of the liquid can be reduced.

  Next, a second embodiment of the present invention will be described. Note that the groove-shaped recess 33 as a premise is basically the same as that in the first embodiment described above.

  In this example, the groove-shaped recess 33 is formed in the first step, and the communication port 34 is opened by the punching punch in the second step.

  As shown in FIG. 15 (A), the first punch 72 has chamfered inclined surfaces having different angles at the longitudinal ends of the protrusions 53c. The inclined surface is provided with a first inclined surface 63 arranged close to the tip end portion 53a and a second inclined surface 64 arranged separately from the tip end portion 53a. The inclination angle of the first inclined surface 63 with respect to the pressing direction of the first punch 72 is set so that the inclination angle of the second inclined surface 64 is larger than that of θ1.

  In the first step, the first punch 72 is pushed into the material to form the groove-like recess 33. In this first step, the end surface of the groove-shaped recess 33 formed by pressing the first punch 72 into the material has a plurality of steps in which the rising angle with respect to the bottom of the recess becomes steep as the distance from the bottom of the groove-shaped recess 33 increases. The first inclined molding surface 75A and the second inclined molding surface 75B.

  Next, in the second step, as shown in FIG. 15B, the punching punch (A) 73 is made to have a thickness of the material so that the end of the punching punch (A) 73 comes into contact with the first inclined molding surface 75A. After indenting halfway to form the recess 76, as shown in FIG. 15C, a punching hole (B) 74 is driven into the bottom of the recess 76 to form the communication port 34. Thus, the drilling in the second step is intended to include the case where the communication port 34 is formed by two-stage processing.

  At this time, the end surface on the communication port 34 side of the groove-shaped recess 33 is constituted by an inclined surface that expands toward the opening of the recess, and the communication port 34 is opened adjacent to the inclined lower end of the end surface on the communication port 34 side. Therefore, at one end of the pressure generating chamber 29, the liquid flows without stagnation from the end surface on the communication port 34 side toward the communication port 34 along the inclined surface. For this reason, the stagnation of the bubbles at the one end can be prevented, and the bubbles that have entered the pressure generating chamber 29 can be reliably discharged on the liquid flow.

  Moreover, since the end surface on the communication port 34 side is made of an inclined surface that expands toward the opening of the recess, the metal flows smoothly when the punching punches 73 and 74 are pushed. Thereby, even if it is the groove-shaped recessed part 33 of a very fine shape, the dimensional accuracy of the end surface by the side of the communicating port 34 can be raised, and the height of the partition part 28 can fully be ensured.

  In addition, since the end surface on the communication port 34 side is composed of a plurality of inclined surfaces whose rising angles with respect to the bottom of the recess become steep enough to be separated from the bottom of the recess, the inclined surface near the bottom of the recess is a relatively gentle gradient. Therefore, even if at least a part of the inclined surface is punched when the communication port 34 is manufactured, the burden on the punching punch (A) 73 is small. For this reason, the communication port 34 can be opened adjacent to the inclined lower end of the end surface on the communication port 34 side while maintaining the durability of the punching punch (A) 73. Furthermore, since the slope of the portion close to the recess opening on the end surface on the communication port 34 side is steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced. .

  Further, in this case, the end surface on the communication port 34 side can be configured as a curved inclined surface whose rising angle with respect to the bottom of the recess becomes steep as the distance from the bottom of the recess is increased. In this case, since the inclined surface near the bottom of the recess has a relatively gentle gradient, even if at least a part of the inclined surface is punched when the communication port 34 is manufactured, the punching punch (A) 73 is given. There is little burden. For this reason, the communication port 34 can be opened adjacent to the inclined lower end of the end surface on the communication port 34 side while maintaining the durability of the punching punch (A) 73. Furthermore, since the slope of the portion close to the recess opening on the end surface on the communication port 34 side is steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced. .

  In the second embodiment, only the characteristics of the end portion on the communication port side of the groove-like recess portion 33 have been described, but the same applies to the end portion on the opposite side of the groove-like recess portion 33, that is, the supply port side. Thus, the processed shape is obtained, and the same characteristics as the end on the communication port side are exhibited.

  Next, a third embodiment of the present invention will be described. Note that the groove-shaped recess 33 as a premise is basically the same as that in the first embodiment described above.

  In this example, in the first step, the groove-like recess 33 is formed by two stages of temporary processing and finishing as in the first embodiment, and the communication port 34 is opened by a punching hole in the second step. It is what you do.

  First, in the first step, after temporary molding is performed by the first punch 51a as shown in FIG. 16A, finish molding is performed by the second punch 51c as shown in FIG. The part 33 is formed. The first punch 51a and the second punch 51c used for these are basically the same as those described in the first embodiment.

  That is, as for the 1st punch 51a, the chamfered inclined surface from which an angle differs is arrange | positioned in the longitudinal direction edge part of the protrusion 53c. The inclined surface is provided with a first inclined surface 63 arranged close to the tip end portion 53a and a second inclined surface 64 arranged separately from the tip end portion 53a. The inclination angle θ2 of the second inclined surface 64 is set to be larger than the inclination angle θ1 of the first inclined surface 63 with respect to the pressing direction of the first punch 51a.

  Then, in the temporary forming in the first step, the first punch 51a is pushed into the material to temporarily form the groove-like recess 33. The end surface of the groove-like recess 33 formed by pressing the first punch 51a into the raw material in this temporary forming step has a plurality of steps where the rising angle with respect to the bottom of the recess becomes steep as the distance from the bottom of the groove-like recess 33 increases. The first inclined molding surface 75A and the second inclined molding surface 75B.

  Next, the second punch 51c is provided with a chamfered finish inclined surface 65 at the longitudinal end portion of the protrusion 53d, and the inclination angle θ3 of the finish inclined surface 65 with respect to the pressing direction of the second punch 51c is the above-described first angle. It is set to be smaller than the inclination angle θ2 of the second inclined surface of the punch 51a. Therefore, the inclination angles of the first inclined surface 63, the second inclined surface 64, and the finished inclined surface 65 are in a magnitude relationship of θ1> θ2> θ3.

  In the finish molding of the first step, the first inclined molding surface 75A and the second inclined molding surface 75B formed on the material 55 by the first punch 51a are molded, and the end of the finished inclined surface 65 of the second punch 51c. After the portion 66 is pressed against the first inclined molding surface 75A, finish molding is performed by the second punch 51c.

  The processing behavior in the temporary molding and finish molding in the first step is the same as that described in the first embodiment.

  Next, in the second step, as shown in FIG. 16C, the punching punch (A) 73 is made of a material so that the end of the punching punch (A) 73 hits the first inclined molding surface 75A. After indenting partway through the thickness 76 to form the recess 76, as shown in FIG. 16D, a punching hole (B) 74 is driven into the bottom of the recess 76 to form the communication port 34. Thus, the drilling in the second step is intended to include the case where the communication port 34 is formed by two-stage processing.

  At this time, the end surface on the communication port 34 side of the groove-shaped recess 33 is constituted by an inclined surface that expands toward the opening of the recess, and the communication port 34 is opened adjacent to the inclined lower end of the end surface on the communication port 34 side. Therefore, at one end of the pressure generating chamber 29, the liquid flows without stagnation from the end surface on the communication port 34 side toward the communication port 34 along the inclined surface. For this reason, the stagnation of the bubbles at the one end can be prevented, and the bubbles that have entered the pressure generating chamber 29 can be reliably discharged on the liquid flow.

  Moreover, since the end surface on the communication port 34 side is made of an inclined surface that expands toward the opening of the recess, the metal flows smoothly when the punching punches 73 and 74 are pushed. Thereby, even if it is the groove-shaped recessed part 33 of a very fine shape, the dimensional accuracy of the end surface by the side of the communicating port 34 can be raised, and the height of the partition part 28 can fully be ensured.

  In addition, since the end surface on the communication port 34 side is composed of a plurality of inclined surfaces whose rising angles with respect to the bottom of the recess become steep enough to be separated from the bottom of the recess, the inclined surface near the bottom of the recess is a relatively gentle gradient. Therefore, even if at least a part of the inclined surface is punched when the communication port 34 is manufactured, the burden on the punching punch (A) 73 is small. For this reason, the communication port 34 can be opened adjacent to the inclined lower end of the end surface on the communication port 34 side while maintaining the durability of the punching punch (A) 73. Furthermore, since the slope of the portion close to the recess opening on the end surface on the communication port 34 side is steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced. .

  Further, in this case, the end surface on the communication port 34 side can be configured as a curved inclined surface whose rising angle with respect to the bottom of the recess becomes steep as the distance from the bottom of the recess is increased. In this case, since the inclined surface near the bottom of the recess has a relatively gentle gradient, even if at least a part of the inclined surface is punched when the communication port 34 is manufactured, the punching punch (A) 73 is given. There is little burden. For this reason, the communication port 34 can be opened adjacent to the inclined lower end of the end surface on the communication port 34 side while maintaining the durability of the punching punch (A) 73. Furthermore, since the slope of the portion close to the recess opening on the end surface on the communication port 34 side is steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced. .

  In the third embodiment, only the characteristics of the end portion on the communication port side of the groove-shaped recess portion 33 have been described, but the same applies to the end portion on the opposite side of the groove-shaped recess portion 33, that is, on the supply port side. Thus, the processed shape is obtained, and the same characteristics as the end on the communication port side are exhibited.

  Next, a fourth embodiment of the present invention will be described. Note that the groove-shaped recess 33 as a premise is basically the same as that in the first embodiment described above.

  The groove-like recess 33 is a groove-like recess that becomes the pressure generating chamber 29, and as shown in FIG. 17A, the opening shape is constituted by a rectangular groove. In this embodiment, 180 grooves having a width CW of about 0.1 mm, a length CL of about 1.6 mm, and a depth CD of about 0.1 mm are arranged in parallel in the groove width direction. A part row is provided, and two rows of the recessed portions are provided. Then, as shown in FIG. 17C, the bottom surface of the groove-like recess 33 is reduced in width as it proceeds in the depth direction (that is, the back side) and is recessed in a V shape. That is, the groove-like recess 33 is formed in a substantially home-base pentagonal cross section. The reason why the bottom surface is recessed in a V shape is that the groove-shaped recess 33 is formed by plastic processing (press processing) using a punch. That is, by sharpening the tip of the punch in a chevron shape, the flow of nickel is promoted and the groove-like recess 33 can be manufactured with high dimensional accuracy. In this groove-like recess 33, the V-shaped valley 33a is the deepest place in the groove-like recess 33 and corresponds to the bottom of the recess in the present invention.

  Further, as shown in FIG. 17B, in the groove-like recess 33, both end surfaces in the longitudinal direction, that is, the communication port side end surface 81 close to the communication port 34 and the supply side close to the ink supply port 45 side. With respect to the end face 82, these both end faces 81, 82 are constituted by inclined surfaces that expand toward the recess opening. In other words, it is produced by an inclined surface that is inclined downward inward in the longitudinal direction as it proceeds to the depth side in the depth direction. In this embodiment, these both end surfaces 81 and 82 are constituted by two-step inclined surfaces in which the rising angle with respect to the valley portion 33a becomes steep as the distance from the V-shaped valley portion 33a increases. That is, it is constituted by the lower inclined surfaces 81a and 82a that are on the valley 33a side and have a gentle inclination, and the upper inclined surfaces 81b and 82b that are on the recess opening side and have a steep inclination.

  Note that the standing angle is the standing angle from the reference line L1 set so as to be parallel to the valley portion 33a and pass through the valley portion 33a toward the outside in the longitudinal direction of the groove. The standing angle can also be expressed as an angle (intersection angle) formed by the reference line L1 and the communication port side end face 81.

  The communication port 34 is opened for each groove-like recess 33 as a through hole penetrating from one end of the groove-like recess 33 in the thickness direction. That is, 180 pieces are provided for one recess row. Since the communication port 34 of this embodiment is produced by plastic working (press work) similarly to the groove-like recess 33, the opening shape is rectangular. Here, since the plate thickness at the bottom surface of the groove-like recess 33 is thinner than the surrounding plate thickness, by forming the communication port 34 in the opening of the groove-like recess 33, the load on the punch is reduced, and the seat Bending can be prevented. In the present embodiment, the communication port 34 is exemplified by a through hole having a rectangular opening, but is not limited to this shape. For example, you may comprise by the through-hole opened circularly.

  The communication port 34 is provided at the lower end of the communication port side end surface 81 located on one side in the longitudinal direction of the groove-like recess 33, specifically, at a position adjacent to the lower end of the lower inclined surface 81a. The reason for this is to improve the discharge of bubbles in the pressure generation chamber 29 while ensuring the dimensional accuracy by plastic working.

  That is, by opening the communication port 34 adjacent to the inclined lower end of the communication port side end surface 81, the downwardly inclined lower inclined surface 81a and the communication port 34 are connected in series. For this reason, the flow path is continuously reduced toward the communication port 34 in the portion, that is, the outer portion of the groove-like recess 33 in the longitudinal direction of the groove with respect to the communication port 34, and the ink stagnation. It flows without. In the following description, this portion, specifically, the range indicated by reference sign D in FIG. 17B, that is, the range from the one end side opening edge of the communication port 34 to the inclined upper end of the communication port side end surface 81. For convenience, it will be referred to as an outer bulge.

  Since the ink flows without stagnation, it is possible to prevent the bubbles from staying at the outer bulge portion. Even if bubbles enter the pressure generating chamber 29, the bubbles can be prevented from stagnation, and the bubbles can be discharged on the ink flow.

  Further, since this communication port side end face 81 is inclined downward inward in the longitudinal direction of the groove as it advances in the depth direction of the groove, the longitudinal end of the punch used for producing the groove-like recess 33 is also provided. Beveled at an angle. For this reason, when the punch is pushed into the metal substrate (strip) to form the groove-shaped recess 33, the flow of the metal in contact with the end in the longitudinal direction of the punch becomes smooth, and the communication port side end surface 81 is dimensional accuracy. It can be manufactured well.

  By the way, for the purpose of preventing ink stagnation in the pressure generating chamber 29, the volume of the outer bulging portion should be as small as possible. In view of this point, in the present embodiment, the standing angle with respect to the V-shaped valley portion 33a of the communication port side end surface 81 is set to 45 degrees or more and less than 90 degrees. Specifically, the standing angle θ1 with respect to the valley 33a of the lower inclined surface 81a is set to 45 degrees, and the rising angle θ2 with respect to the valley 33a of the upper inclined surface 81b is set to 65 degrees. Further, the upper end of the lower inclined surface 81a is set lower than half of the depth CD of the groove-like recess 33 (on the valley 33a side), more specifically, at a position about 1/4 of the groove depth CD. Yes. Thereby, the distance d from the inclination upper end of the communicating port side end surface 81 to the one end side opening edge of the communicating port 34 is made as short as possible. Experimentally, it has been found that the distance d is preferably set to ½ or less of the groove depth CD. For this reason, in this embodiment, this distance d is set to 0.05 mm which is 1/2 of the groove depth CD.

  The reason why the rising angle θ1 of the lower inclined surface 81a is set to be gentler than the rising angle θ2 of the upper inclined surface 81b is to increase the durability of the punch for forming the communication port 34. As will be described in detail later, the communication port 34 is produced by punching the bottom surface of the groove-like recess 33 in the thickness direction. In this case, the formation position of the communication port side end face 81 varies somewhat in the groove longitudinal direction.

  Therefore, at the time of manufacturing the communication port 34, a portion on one end side (one end side in the longitudinal direction of the groove) of the punch is positioned above the lower inclined surface 81a and a part of the lower inclined surface 81a is punched out. To do. In this case, since the rising angle θ1 of the lower inclined surface 81a is gently reduced to about 45 degrees, even if a part of the lower inclined surface 81a is punched out, the burden on the punch is small and durability can be improved. .

  Thus, in this embodiment, the dimensional accuracy of the groove-like recess 33 is enhanced by using the communication port side end surface 81 as an inclined surface, and this inclined surface is relatively compared with the relatively gentle lower inclined surface 81a. By comprising the steep upper inclined surface 81b, the durability of the punch is enhanced to increase the efficiency of the production of the communication port 34, and the volume of the outer bulging portion is made as small as possible to increase the bubble discharge performance. ing.

  On the other hand, as described above, the supply-side end surface 82 opposite to the communication port-side end surface 81 is also configured by a plurality of inclined surfaces. This is intended to increase the dimensional accuracy in the portion, to reduce ink stagnation, and to allow ink to actively flow to the communication port 34 side (one end side of the groove-like recess 33).

  In the present embodiment, the standing angle of the supply-side end face 82 with respect to the V-shaped valley portion 33a is also set to 45 degrees or more and less than 90 degrees. Specifically, the rising angle θ3 (an angle formed by the reference line L1 ′ and the lower inclined surface 82a) with respect to the valley portion 33a of the lower inclined surface 82a is set to 45 degrees, and the rising angle with respect to the valley portion 33a of the upper inclined surface 82b is set. θ4 is set to 60 degrees. Thus, by producing the supply-side end surface 82 with an inclined surface, when the punch is pushed into the strip, the flow of metal becomes smooth and the supply-side end surface 82 can be produced with high dimensional accuracy.

  Further, the ink supply port 45 is located at a position corresponding to the supply-side end surface 82, specifically, within a range indicated by reference symbol E (within a projection range in which the supply-side end surface 82 is projected when viewed from the recess opening side). Therefore, the ink that has flowed into the pressure generation chamber 29 from the reservoir 14 side flows along the supply-side end face 82. As a result, ink stagnation can be reduced, and ink can be actively flowed to the communication port 34 side.

  Further, since the rising angle θ3 of the lower inclined surface 82a far from the ink supply port 45 is set more gently than the rising angle θ4 of the upper inclined surface 82b close to the ink supply port 45, in other words, a groove-like recess Since the inclination of the supply-side end face 82 is gradually set as it approaches the valley 33a of the part 33, the ink stagnation can also be reduced in this respect.

  Next, a method for manufacturing the recording head 1 will be described. In addition, since this manufacturing method has the characteristic in the manufacturing process of said pressure generation chamber formation board 30, it demonstrates centering on the manufacturing process of the pressure generation chamber formation board 30. FIG. The pressure generating chamber forming plate 30 is produced by plastic working (press working) using a progressive die. Moreover, the strip used as a material of the pressure generating chamber forming plate 30 is made of nickel as described above.

  The manufacturing process of the pressure generating chamber forming plate 30 includes a groove-shaped recess forming step for forming the groove-shaped recess 33 (one aspect of the first step of the present invention), and a communication port forming process for forming the communication port 34 (this book). And an aspect of the second step of the invention.

  As shown schematically in FIGS. 18 and 19, the groove-shaped recess forming step is performed by pressing the tip-shaped first punch (male) 72 corresponding to the groove-shaped recess 33 twice into the same place. The First, as shown in FIG. 18, the first punch 72 is pushed into the band plate 55 halfway through the depth of the recess (the states of FIGS. 18A to 18B). By the pushing operation of the first punch 72, that is, punching, the band plate 55 partially flows and plastically deforms, and a shallow groove portion 33 'shallower than the groove portion depth is formed.

  Here, since the tip portion of the first punch 72 is pointed in a V shape when viewed from the width direction, the portion pushed by this tip portion flows smoothly, and the shallow groove portion 33 ′ formed follows the tip shape. It is made into a different shape. Furthermore, since both ends in the longitudinal direction of the distal end portion are chamfered in the shapes of the communication port side end surface 81 and the supply side end surface 82, the portion pressed by the portion flows smoothly. Therefore, both ends in the longitudinal direction of the shallow groove portion 33 ′ are also formed in a shape following the tip shape.

  Next, the pushed first punch 72 is moved up and once separated from the strip 55 (the state shown in FIG. 18C), and then the second punching is performed. That is, the punch having the same shape (referred to as the first punch 72 for convenience) is pushed again into the same position on the belt plate 55 (the state shown in FIGS. 19A to 19B). In this second punching, the tip portion of the first punch 72 is pushed down to the groove depth CD (see FIG. 17C) of the groove-like recess 33.

  By the pressing of the first punch 72, the first punch 72 is again pressed into the shallow groove portion 33 'formed by the first punching, and the groove-shaped recess portion 33 is formed in the band plate 55. In this case, since punching is performed twice, a deeper recess can be produced than in the case of producing by one punching.

  When the groove-like recess 33 is formed in this way, the communication port 34 is formed by moving to the communication port forming step. In this communication port forming step, first, as shown in FIG. 20, the second punch 85, which is a punch having a tip shape corresponding to the communication port 34, is removed from the surface of the belt plate 55 on the groove-like recess 33 side in the thickness direction. The upper half portion 34 ′ of the communication port 34 is produced by pushing it halfway through. At this time, as shown in FIG. 20B, the portion of the second punch 85 on one end side in the longitudinal direction of the groove is positioned above the lower inclined surface 81a (that is, within the inclined range indicated by G). Therefore, in the punching by the second punch 85, a part of the lower inclined surface 81a is also punched out. In this case, as described above, since the rising angle θ1 of the lower inclined surface 81a is about 45 degrees, even if a part of the lower inclined surface 81a is punched out, the burden on the second punch 85 is small. As a result, the durability of the second punch 85 can be enhanced.

  Since a part of the lower inclined surface 81a (inclined lower end portion) is punched out by the second punch 85, the lower inclined surface 81a even if the formation position of the communication port side end surface 81 slightly varies in the groove longitudinal direction. By punching out the inclination range G, a flat portion that causes stagnation of bubbles is not formed. Note that the lower inclined surface 81a having such a function can also be referred to as “an inclined surface including a plastic working portion that is plastically deformed by the second punch 85”.

  If the upper half portion 34 ′ of the communication port 34 is formed, the lower half portion of the communication port 34 is subsequently produced. The lower half is produced using a third punch 86 having a tip shape slightly narrower than the second punch 85. That is, as shown in FIG. 21, the third punch 86 is inserted and pushed into the upper half portion 34 ′ made by the second punch 85, and the bottom portion of the upper half portion 34 ′ is punched out. When the communication port 34 is manufactured in this way, the surface on the groove-like recess 33 side and the surface on the opposite side of the band plate 55 are polished and flattened.

  If the pressure generating chamber forming plate 30 is manufactured through the above steps, the elastic plate 32 and the nozzle plate 31 separately manufactured are joined to the pressure generating chamber forming plate 30 to manufacture the flow path unit 4. In this embodiment, these members are joined by bonding. When the flow path unit 4 is manufactured, the flow path unit 4 is bonded to the tip end surface of the separately manufactured case 2, and then the vibrator unit 3 is housed and fixed in the case 2. If the vibrator unit 3 and the flow path unit 4 are joined to the case 2, the flexible cable 9 of the vibrator unit 3 and the connection substrate 5 are soldered, and then the supply needle unit 6 is attached.

  By the way, the present invention is not limited to the above-described embodiment, and various modifications can be made based on the description of the scope of claims.

  For example, with respect to the inclined surfaces constituting the communication port side end surface 81 and the supply side end surface 82, the rising angle with respect to the valley portion 33a may be changed. Moreover, about the supply side end surface 82, you may comprise the part by the side of a recessed part opening by the perpendicular surface orthogonal to the V-shaped trough part 33a.

  For example, in the fifth embodiment shown in FIG. 22, the upright angle θ <b> 2 ′ with respect to the valley portion 33 a is set to 80 degrees with respect to the upper inclined surface 81 b constituting a part of the communication port side end surface 81. Thereby, the volume of the outer bulging portion (the portion of the range D) is set as small as possible. The supply-side end surface 82 is constituted by a lower inclined surface 82a on the side close to the trough 33a and an upper vertical surface 82b ′ formed upward from the upper end edge of the lower inclined surface 82a. The standing angle θ3 ′ with respect to the inclined surface 82a and the valley portion 33a is set to 60 degrees, and the standing angle θ4 ′ with respect to the upper vertical surface 82b ′ and the valley portion 33a is set to 90 degrees.

  Also in the fifth embodiment, since the communication port 34 is formed at the inclined lower end of the communication port side end surface 81 (lower inclined surface 81a), it is possible to make it difficult to squeeze ink and prevent stagnation of bubbles. . In addition, since the volume of the outer bulging portion can be made as small as possible, it is possible to prevent ink stagnation, and even if bubbles enter the pressure generating chamber 29, the bubbles can be reliably discharged. Can do.

  Further, since the ink supply port 45 faces the supply side end face 82 in the projection area of the lower inclined face 82a (in the area indicated by symbol E in FIG. 22), the ink supply port 45 faces the common ink chamber 14 as a reservoir. Ink can flow to the communication port 34 side without stagnation.

  Further, the communication port side end surface 81 and the supply side end surface 82 are not limited to the two-step inclined surfaces having different rising angles with respect to the valley portion 33a. For example, the communication port side end surface 81 may be configured by a single inclined surface 81A as shown in FIG. In this example, the communication port side end surface 81 is configured by a single inclined surface 81A in which the standing angle θ5 with respect to the valley portion 33a is set to 60 degrees.

  The standing angle θ5 is not limited to 60 degrees and can be set as appropriate. From the viewpoint of reducing the burden on the first punch 72, the rising angle θ5 is preferably gentle, and from the viewpoint of reducing the volume of the outer bulging portion, the rising angle θ5 is preferably steep. In consideration of these requirements, it is preferable to set the standing angle θ5 in the range of 45 degrees to 60 degrees.

  Moreover, you may comprise the communicating port side end surface 81 and the supply side end surface 82 by three or more graded inclined surfaces from which the standing angle with respect to the trough part 33a differs. For example, with respect to the communication port side end surface 81, as shown in FIG. 23 (b), the three-step inclined surface 81B in which the rising angle with respect to the valley portion 33a becomes steep as the distance from the valley portion 33a increases, that is, the rising angle. The lower inclined surface 81c of θ6, the intermediate inclined surface 81d of the rising angle θ7, and the upper inclined surface 81e of the rising angle θ8 may be used.

  In this example, the rising angle θ6 is 45 degrees, the rising angle θ7 is 60 degrees, and the rising angle θ8 is 80 degrees, but the present invention is not limited to this. For example, the rising angle θ6 may be 30 degrees, the rising angle θ7 may be 45 degrees, and the rising angle θ8 may be 60 degrees. Further, as shown in FIG. 23C, the rising angle θ7 ′ of the middle inclined surface 81d is gentler than the rising angles θ6 ′ and θ8 ′ of the other inclined surfaces (the lower inclined surface 81c and the upper inclined surface 81d). You may comprise by 3 steps | paragraphs of inclined surfaces 81C.

  Moreover, you may comprise the communicating port side end surface 81 and the supply side end surface 82 by the curved inclined surface where the standing angle with respect to the trough part 33a becomes so steep that it separates from the trough part 33a. For example, as shown in FIG. 23 (d), the end surface on the communication port side may be formed by a curved inclined surface 81D in which the rising angle with respect to the valley portion 33a becomes gradually steeper as the distance from the valley portion 33a increases. . Also in this configuration, it is preferable that the rising angle θ9 of the portion in contact with the communication port 34 is 45 degrees or more.

  Further, the shape of the bottom surface of the groove-like recess 33 is not limited to the V shape. For example, the bottom of the groove-like recess 33 may be recessed in an inverted trapezoidal shape whose lower bottom is shorter than the upper bottom.

  Further, regarding the pressure generating element, an element other than the piezoelectric vibrator 10 may be used. For example, an electromechanical transducer element such as an electrostatic actuator or a magnetostrictive element may be used. Further, a heat generating element may be used as the pressure generating element.

  Each of the above-described embodiments is an ink jet recording head. However, the liquid ejecting head according to the present invention is not limited to ink for an ink jet recording apparatus, but is a glue, nail polish, conductive liquid (liquid metal). ) Etc. can be injected.

  A recording head 1 ′ illustrated in FIG. 24 is an example to which the present invention can be applied, and uses a heating element 61 as a pressure generating element. In this example, a sealing substrate 62 provided with a compliance portion 46 and an ink supply port 45 is used in place of the elastic plate 32, and the groove-like recess 33 in the pressure generating chamber forming plate 30 is formed by the sealing substrate 62. The side is sealed. In this example, the heating element 61 is attached to the surface of the sealing substrate 62 in the pressure generation chamber 29. The heating element 61 is supplied with power through the electrical wiring and generates heat. Note that other configurations such as the pressure generation chamber forming plate 30 and the nozzle plate 31 are the same as those in the above embodiment, and thus the description thereof is omitted.

  In the recording head 1, the ink in the pressure generation chamber 29 bumps due to the power supply to the heating element 61, and the bubbles generated by the bumping pressurize the ink in the pressure generation chamber 29. By this pressurization, ink droplets are ejected from the nozzle openings 48. In this recording head 1 as well, the pressure generating chamber forming plate 30 is produced by metal plastic working, and the communication port side end surface 81 and the supply side end surface 82 of the groove-shaped recess 33 are expanded toward the recess opening. Since the communication port 34 is formed by an inclined surface and is adjacent to the inclined lower end of the communication port side end surface 81, the same effects as those of the above embodiment can be obtained.

  Moreover, although the example provided in the one end part of the groove-shaped recessed part 33 was demonstrated in the said embodiment regarding the communication port 34, it is not restricted to this. For example, the communication port 34 may be formed at substantially the center in the longitudinal direction of the groove-like recess 33, and the ink supply port 45 and the common ink chamber 14 communicating with the ink supply port 45 may be disposed at both ends in the longitudinal direction of the groove-like recess 33. This is preferable because it is possible to prevent ink stagnation in the pressure generating chamber 29 from the ink supply port 45 to the communication port 34.

  As described above, according to the fine forging method and the method of manufacturing a liquid jet head of the present invention, the first punch is temporarily formed to the stage of the shape that does not reach the final shape, and then the first punch is performed. Finish molding is performed following the temporary molding with two punches. Therefore, since the gradual plastic working is performed step by step, that is, by the first punch and the second punch, there is a problem that even if the shape is fine, it becomes an abnormal shape or the material is cracked. The predetermined machining shape is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, the above-described fine forging method greatly reduces the number of processing steps and is extremely advantageous in terms of cost. Furthermore, since the volume of each recess can be processed uniformly, for example, in the case of forming a liquid jet head pressure generation chamber or the like, it is very effective in terms of stabilizing the jet characteristics of the liquid jet head. .

  Further, according to the liquid jet head of the present invention, the first punch is temporarily formed until the final shape is reached, and then the second punch is followed by the above-mentioned temporary forming and finish forming. Is done. Therefore, since the gradual plastic working is performed step by step, that is, by the first punch and the second punch, there is a problem that even if the shape is fine, it becomes an abnormal shape or the material is cracked. The predetermined machining shape is accurately obtained. In addition, an anisotropic etching method is generally employed for processing and forming such a fine structure. However, since this method requires a large number of processing steps, the manufacturing cost is reduced. It is disadvantageous. On the other hand, with the present liquid ejecting head, the number of processing steps is greatly reduced, and the cost is extremely advantageous.

  Furthermore, since the volume of each recess can be processed uniformly, the partial accuracy of the pressure generating chamber or the like is remarkably improved, and this is very effective in terms of stabilizing the ejection characteristics of the liquid ejection head. In addition, if the pressure generation chamber forming plate is made of, for example, nickel, the linear expansion coefficients of the pressure generation chamber forming plate, the elastic plate, and the nozzle plate constituting the flow path unit are substantially uniform. When heated and bonded, each member expands evenly. For this reason, it is difficult for mechanical stress such as warpage due to the difference in expansion rate to occur. As a result, each member can be bonded without hindrance even if the bonding temperature is set to a high temperature. Further, even if the piezoelectric vibrator generates heat when the recording head is operated and the flow path unit is heated by this heat, each member constituting the flow path unit expands evenly. For this reason, even if the heating accompanying the operation of the recording head and the cooling accompanying the operation stop are repeatedly performed, problems such as peeling are less likely to occur in each member constituting the flow path unit.

  Moreover, according to this invention, there exist the following effects.

  That is, the end surface of the groove-shaped recess is formed by an inclined surface that expands toward the opening of the recess, and the second punch is pushed in and formed adjacent to the inclined lower end of the end surface. The liquid flows without stagnation along the inclined surface. For this reason, the stagnation of the bubbles at the one end can be prevented, and the bubbles that have entered the pressure generating chamber can be reliably discharged by being put on the liquid flow.

  Moreover, since the end surface is made of an inclined surface that expands toward the recess opening, the metal flows smoothly when the punch is pushed. Thereby, even if it is a groove-shaped recessed part of a very fine shape, the dimensional accuracy of a communicating port side end surface can be improved, and the height of a partition part can fully be ensured.

  In addition, when the end surface is formed of a plurality of inclined surfaces whose rising angle with respect to the bottom of the recess becomes steep enough to be separated from the bottom of the recess, the inclined surface near the bottom of the recess has a relatively gentle slope. Therefore, even if at least a part of the inclined surface is punched when the second punch is pushed, the burden on the second punch is small. For this reason, the second punch can be pushed in adjacent to the inclined lower end of the end face while maintaining the durability of the second punch. Furthermore, since the slope of the portion close to the opening of the recess on the end surface becomes steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced.

  In addition, when the end surface is formed of a curved inclined surface whose rising angle with respect to the bottom of the recess becomes steep enough to be separated from the bottom of the recess, the inclined surface near the bottom of the recess has a relatively gentle slope. Even if at least a part of the inclined surface is punched when the second punch is pushed, the burden on the second punch is small. For this reason, the second punch can be pushed in adjacent to the inclined lower end of the end face while maintaining the durability of the second punch. Furthermore, since the slope of the portion close to the opening of the recess on the end surface becomes steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced.

  Furthermore, the present invention has the following effects.

  That is, the end surface on the communication port side in the groove-shaped recess is configured by an inclined surface that expands toward the opening of the recess, and the communication port is opened adjacent to the inclined lower end of the communication port side end surface. At one end of the liquid, the liquid flows without stagnation from the communication port side end surface toward the communication port along the inclined surface. For this reason, the stagnation of the bubbles at the one end can be prevented, and the bubbles that have entered the pressure chamber can be reliably discharged on the liquid flow.

  Moreover, since the end surface on the communication port side is made of an inclined surface that expands toward the opening of the recess, the metal flows smoothly when the punch is pushed. Thereby, even if it is a very fine groove-shaped recess, the dimensional accuracy of the end surface on the communication port side can be increased, and the height of the partition wall portion 28 can be sufficiently secured.

  In addition, when the end surface on the communication port side is constituted by a plurality of inclined surfaces whose rising angles with respect to the bottom of the recess become steep enough to be separated from the bottom of the recess, the inclined surface near the bottom of the recess is relatively gentle. Therefore, even if at least a part of the inclined surface is punched when the communication port is formed, the burden on the punch is small. For this reason, the communication port can be opened adjacent to the inclined lower end of the communication port side end surface while maintaining the durability of the punch. Furthermore, since the slope of the portion close to the recess opening on the end surface on the communication port side becomes steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced.

  In addition, when the end surface on the communication port side is formed by a curved inclined surface whose rising angle with respect to the bottom of the recess becomes steep enough to be separated from the bottom of the recess, the inclined surface near the bottom of the recess is a relatively gentle slope. Therefore, even if at least a part of the inclined surface is punched when the communication port is manufactured, the burden on the punch is small. For this reason, the communication port can be opened adjacent to the inclined lower end of the communication port side end surface while maintaining the durability of the punch. Furthermore, since the slope of the portion close to the recess opening on the end surface on the communication port side becomes steep, the volume at one end of the recess can be reduced as much as possible, and the stagnation of the liquid can be reduced.

FIG. 2 is an exploded perspective view of an ink jet recording head. FIG. 3 is a cross-sectional view of an ink jet recording head. (A) And (B) is a figure explaining a vibrator | oscillator unit. The top view of a pressure generation chamber formation board. It is explanatory drawing of a pressure generation chamber formation board, (a) is an enlarged view of the X section in FIG. 4, (b) is AA sectional drawing in (a), (c) is BB sectional drawing in (a). Figure. The top view of an elastic board. It is explanatory drawing of an elastic board, (a) is an enlarged view of the Y part in FIG. 6, (b) is CC sectional drawing in (a). (A) And (b) is a figure explaining the male type | mold used for formation of a groove-shaped recessed part. (A) And (b) is a figure explaining the female type | mold used for formation of a groove-shaped recessed part. (A)-(c) is a schematic diagram explaining formation of a groove-shaped recessed part. The perspective view which shows the relationship between a 1st punch and a raw material. It is a figure which shows the 1st punch and 2nd punch in the 1st Embodiment of this invention, (A) is sectional drawing which shows the state in which the 1st punch was pushed in to the raw material, (B) is the 2nd punch (C) is a side view of the first punch, (D) is a side view of the second punch, and (E) is a (E)-(E) cross section of (C). The figure and (F) are (F)-(F) sectional drawings of (D). The perspective view which shows the shape of the protrusion part edge part of a temporary shaping punch and a finish shaping | molding punch. The longitudinal side view which shows the inclined surface of each protrusion part edge part, and the deformation | transformation state of a raw material. It is a figure which shows the 2nd Embodiment of this invention, (A) is the state which shape | molds a groove-shaped recessed part at a 1st process, (B) and (C) are the states which shape | mold a communicating port at a 2nd process. . It is a figure which shows the 3rd Embodiment of this invention, (A) and (B) are the states which shape | mold a groove-shaped recessed part at a 1st process, (C) and (D) are communication openings in a 2nd process. The state to mold. It is a figure explaining the groove-shaped recessed part in the 4th Embodiment of this invention, (a) is the figure seen from the recessed part opening side, (b) is sectional drawing cut | disconnected in the groove longitudinal direction, (c) ) Is a cross-sectional view along CC in (b). It is a figure explaining a groove-shaped hollow part formation process, (a)-(c) is a figure explaining the first punching. It is a figure explaining a groove-shaped hollow part formation process, (a)-(c) is a figure explaining the second punching. It is a figure explaining a communicating port formation process, (a)-(d) is a figure explaining the formation process of the upper half part. It is a figure explaining a communicating port formation process, (a)-(c) is a figure explaining the formation process of a lower half part. The figure explaining the 5th Embodiment of this invention. (A)-(d) is a figure explaining the modification of a communicating port side end surface, respectively. FIG. 5 is a diagram for explaining an application example to a recording head using a heat generating element as a pressure generating element. (A), (b) is a figure explaining a prior art.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ', 1 ... Recording head, 2 ... Case, 3 ... Vibrator unit, 4 ... Flow path unit, 5 ... Connection board, 6 ... Supply needle unit, 7 ... Piezoelectric vibrator group, 8 ... Fixed plate, 9 ... Flexible Cables 10, 24 ... piezoelectric vibrators, 10a ... dummy vibrators, 10b ... drive vibrators, 11 ... control ICs, 12 ... housing spaces, 13 ... ink supply paths, 14 ... common ink chambers as reservoirs, 15 Denoted at the tip, 16 ... Connection port, 18 ... Needle holder, 19 ... Ink supply needle, 20 ... Filter, 21 ... Base, 22 ... Ink discharge port, 23 ... Packing, 28 ... Partition, 29 ... Pressure generating chamber, 30 55 ... Pressure generating chamber forming plate, 31 ... Nozzle plate, 32 ... Elastic plate, 33 '... Shallow groove portion, 33 ... Groove-shaped recess portion, 33a ... Valley portion, 34' ... Upper half portion, 34 ... Communication port, 35 , 76 ... recess, 36 ... dummy recess, 37 ... DESCRIPTION OF SYMBOLS 1 communication port, 38 ... 2nd communication port, 39 ... Dummy communication port, 40 ... 1st dummy communication port, 41 ... 2nd dummy communication port, 42 ... Support plate, 43 ... Elastic body film as a deformation | transformation part, 44 ... Diaphragm part, 45 ... Ink supply port, 46 ... Compliance part, 47 ... Island part as rigid part, 48 ... Nozzle opening, 51 ... Male mold, 51a, 72 ... First punch, 51c, 85 ... Second punch, 51d ... finish molding punch, 52 ... female mold, 53, 53c, 53d ... ridge, 53a ... tip portion, 53b, 53e ... gap, 54 ... streaks, 61 ... heating element, 62 ... sealing substrate, 63 ... 1st inclined surface, 64 ... 2nd inclined surface, 65 ... finished inclined surface, 66 ... tip portion, 67 ... final finished shape, 68 ... finished molding surface, 69 ... boundary portion, 75A ... first inclined molding surface, 75B ... 2nd inclined molding surface, 81 ... Communication port side end 81A, 81B, 81C ... inclined surface, 81a, 81c, 82a ... lower inclined surface, 81b, 81e, 82b ... upper inclined surface, 81d ... middle inclined surface, 81D ... curved inclined surface, 82 ... supply side end surface, 82b '... Upper vertical surface, 86 ... Third punch, L ... Pushing direction line, L1', L1 ... Reference line, θ1, θ2, θ3 ... Inclination angle, Standing angle, θ2 ', θ3', θ4 ', θ4, θ5 , Θ6 ′, θ6, θ7 ′, θ7, θ8 ′, θ8, θ9.

Claims (11)

A groove-shaped recess that serves as a pressure generating chamber and a metal pressure generating chamber-forming plate provided with a communication port at an end of the groove-shaped recess,
An inclined molding surface having a different standing angle with respect to the bottom of the groove-like recess is provided at the longitudinal end of the groove-like recess,
The inclined molding surface includes a first inclined molding surface and a second inclined molding surface that is continuous with one end of the first inclined molding surface and is further away from the bottom of the groove-shaped recess than the first inclined molding surface. Including
The rising angle of the second inclined molding surface is larger than the rising angle of the first inclined molding surface,
A liquid jet head, wherein a finish molding surface continuous to the other end of the first inclined molding surface is formed at an upstanding angle larger than an upright angle of the inclined molding surface. The liquid ejecting head according to claim 1, wherein the communication port is formed in the finish molding surface continuous with the inclined molding surface. It further comprises a nozzle plate with a nozzle opening,
The liquid ejecting head according to claim 2 , wherein the communication port is provided so as to correspond to a position of the nozzle opening. A liquid flow path that passes through the pressure generation chamber to reach the nozzle opening is formed inside, and a flow path configured to cause a pressure fluctuation to occur in the liquid in the pressure generation chamber by the pressure generation element so that liquid droplets can be discharged from the nozzle opening. With units,
The channel unit is
A plurality of groove-like depressions serving as the pressure generation chambers, and at least one metal pressure generation chamber forming plate provided with a communication port at a longitudinal end of each of the groove-like depressions;
The nozzle opening is provided with a nozzle plate joined to the pressure generation chamber forming plate so that the communication opening and the nozzle opening communicate with each other.
A plurality of inclined surfaces having different standing angles with respect to the bottom of the groove-like recess are provided at the end of the groove-like recess in the longitudinal direction so as to expand toward the recess opening,
The inclined surface includes a lower inclined surface on the bottom side of the groove-shaped recess, and an upper inclined surface farther from the bottom of the groove-shaped recess than the lower inclined surface, The upright angle of the upper inclined surface is larger than the upright angle,
The liquid ejecting head, wherein the communication port is opened adjacent to an inclined lower end of the communication port side end. The liquid ejecting head according to claim 4 , wherein the standing angle is set to 45 degrees or more and less than 90 degrees. The said communication port side edge part is comprised with the said several inclined surface from which the said standing angle becomes large, so that it separates from the bottom part of the said groove-shaped recessed part, The Claim 4 or Claim 5 characterized by the above-mentioned. The liquid jet head described. The distance in the longitudinal direction of the groove-shaped recess from the inclined upper end of the recess opening at the communication-port-side end to the one-end opening edge of the communication port is shorter than the depth of the groove-shaped recess. The liquid jet head according to any one of claims 4 to 6 . The pressure generating chamber is provided with a supply port at an end opposite to the end provided with the communication port, and an inclined surface that expands the end surface on the supply port side toward the recess opening. liquid jet head according to any one of claims 4 to 7, characterized in that it is constituted by. The liquid ejecting head according to claim 8 , wherein an upright angle of the end surface on the supply side with respect to a bottom portion of the groove-like recess is set to 45 degrees or more and less than 90 degrees. Wherein an end face of the supply side, the liquid jet head according to claim 8 or claim 9, characterized in that the standing angle relative to the bottom portion of the groove-like recess portion is constituted by the inclined surfaces of different stages. Claim 8, characterized in that it constitutes the end face of the supply side, the inclined surface of the plurality of stages upright angle increases with respect to the bottom of the groove-like recess enough away from the bottom of the groove-like recess portion Alternatively, the liquid ejecting head according to claim 9 .

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