JP4515706B2 - 空洞部の結合による波長フィルタリングを備えた光電子デバイス - Google Patents
空洞部の結合による波長フィルタリングを備えた光電子デバイス Download PDFInfo
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
- Optical Filters (AREA)
- Electrodes Of Semiconductors (AREA)
Description
1)選択した波長範囲で複数の共振透過モード(resonant transmission mode)が可能になるようにその厚みと成分が選択された、第1の(厚い)共振空洞部を画定する第1手段と、
2)選択した波長範囲で単一の共振透過モードが可能になるようにその厚みと成分が選択された、第2の(薄い)共振空洞部を画定する第2手段と、
を有する光電子デバイスを提供し、当該デバイスは、前記第1及び第2手段を光学的に結合する手段と、前記第2手段に電圧を印加可能な静電的手段とを具備することを特徴とし、前記電圧は、第2空洞部の共振モードが第1空洞部の共振モードのいずれか1つと一致するように、第2空洞部の厚み及びその共振モードのスペクトル位置を変化させることができる(前記モードは可能性のあるものの中から選択される)。当該デバイスは、このように、薄い空洞部及び厚い空洞部に共通の共振モード波長を有する入射光波を透過することができる。
O (3H L)*3 5H 2L 5H 3L (3H L)*2 3H L 1936H O S O
ここで、Hは1/4波長のInP層に、Lは1/4波長の空気層に、Sは1/4波長のシリコン(Si)層に、Oは1/4波長の二酸化珪素(SiO2)層である。
Claims (10)
- 第1共振空洞部を画定する第1手段と、第2共振空洞部を画定する第2手段と、前記第1共振空洞部と前記第2共振空洞部とを光学的に結合する手段と、前記第2共振空洞部の厚みを変化させるために前記第2手段に電圧を印加するように構成された静電手段とを有して構成され、多重化光通信システムの規格化された透過チャネルにそれぞれが一致するように等間隔に離散的に配置された複数の波長に対して同調可能である光電子フィルタデバイスにおいて、
少なくとも前記第1手段の温度を制御可能な態様で変化させるように構成されて、前記第1共振空洞部の複数の共振透過モードを周波数遷移する手段を含み、
前記第1共振空洞部が、選択された波長範囲において複数の共振透過モードを示すことができて、複数の共振透過モードの位置がそれぞれ規格化された透過チャネルの位置に一致するとともに共振透過モード間の間隔が規格化された透過チャネル間の間隔に一致して、前記第1手段の温度を調整することで複数の共振透過モードの位置がそれぞれ規格化された透過チャネルの波長に正確に一致するように選定された厚み及び成分を有し、
前記第2共振空洞部が、選択された波長範囲において単一の共振透過モードを示すことができる厚み及び成分を有し、
光学的に連結された2つの共振空洞部を有して前記第1共振空洞部のいずれか1つの選択された共振透過モードの位置によりスペクトル位置が定められるフィルタを形成するために、前記第2共振空洞部の単一の共振透過モードが前記第1共振空洞部の前記選択された共振透過モードと一致するように、前記静電手段により前記第2共振空洞部の単一の共振透過モードのスペクトル位置が変えられることを特徴とする光電子フィルタデバイス。 - 前記第1手段は、前記第1共振空洞部の共振透過モードの位置を画定し、前記第1共振空洞部を共振させる厚みを有する第1物質層により隔てられたほぼ平行な2つの部分反射体を有することを特徴とする請求項1に記載のデバイス。
- 前記第2手段は、前記第2共振空洞部の共振透過モードの位置を画定し、前記第2共振空洞部を共振させる厚みを有する第2物質層により隔てられたほぼ平行な少なくとも2つの部分反射体を有することを特徴とする請求項1に記載のデバイス。
- 前記第2物質層は空気層であり、前記部分反射体がスペーサにより隔てられていることを特徴とする請求項3に記載のデバイス。
- 前記部分反射体は、異なる屈折率を有する2物質の1/4波長型の互層からなるブラッグ反射体であることを特徴とする請求項2または請求項3に記載のデバイス。
- 前記光学的に結合する手段は、前記第1手段と前記第2手段との間に介在され、前記第1共振空洞部と前記第2共振空洞部との間に光学的な結合を確保するように選択された寸法を有する第3手段を有することを特徴とする請求項1に記載のデバイス。
- 前記静電手段は、それぞれが、前記第2手段の部分反射体に接触し、前記部分反射体間に位置する空気空洞部の厚みを変化させるように選択された異なる電位で配設されるのに適した第1電極と第2電極とを有することを特徴とする請求項3に記載のデバイス。
- 前記第2手段は、前記第1電極及び前記第2電極それぞれにより逆方向バイアス又は順方向バイアスが加えられた、pin又はnip接合型の少なくとも1つの基礎構造を画定し、一方の部分反射体がn型ドーピングを有する半導体層を含み、他方の部分反射体がp型ドーピングを有する半導体層を含み、前記第2共振空洞部を画定するスペーサが自然にi型ドーピングされることを特徴とする請求項7に記載のデバイス。
- 前記第1手段及び前記第2手段の少なくとも一部を構成する半導体層が、特にヒ化ガリウム(GaAs)又はリン化インジウム(InP)等の第3〜5類の物質からなることと、スペーサが、特にInGaAs等の第3〜5類の物質からなることとを特徴とする請求項1に記載のデバイス。
- 前記第1手段及び前記第2手段の少なくとも一部を構成する半導体層とスペーサが、エピタキシ及び選択的エッチング技術により形成されることを特徴とする請求項1に記載のデバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0101520A FR2820513B1 (fr) | 2001-02-05 | 2001-02-05 | Dispositif optoelectronique a filtrage de longueur d'onde par couplage de cavites |
PCT/FR2002/000402 WO2002063256A2 (fr) | 2001-02-05 | 2002-02-01 | Dispositif optoelectronique a filtrage de longueur d'onde par couplage de cavites |
Publications (2)
Publication Number | Publication Date |
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JP2004530146A JP2004530146A (ja) | 2004-09-30 |
JP4515706B2 true JP4515706B2 (ja) | 2010-08-04 |
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JP2002562954A Expired - Fee Related JP4515706B2 (ja) | 2001-02-05 | 2002-02-01 | 空洞部の結合による波長フィルタリングを備えた光電子デバイス |
Country Status (9)
Country | Link |
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US (1) | US6768097B1 (ja) |
EP (1) | EP1364190B1 (ja) |
JP (1) | JP4515706B2 (ja) |
AT (1) | ATE408808T1 (ja) |
AU (1) | AU2002234722A1 (ja) |
CA (1) | CA2437433C (ja) |
DE (1) | DE60228938D1 (ja) |
FR (1) | FR2820513B1 (ja) |
WO (1) | WO2002063256A2 (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2844602B1 (fr) | 2002-09-13 | 2005-01-14 | Atmel Grenoble Sa | Composant de filtrage optique en creneau |
US7781850B2 (en) | 2002-09-20 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Controlling electromechanical behavior of structures within a microelectromechanical systems device |
US20040234198A1 (en) * | 2003-03-21 | 2004-11-25 | Aegis Semiconductor, Inc. | Tunable and switchable multiple-cavity thin film optical filters |
TW570896B (en) | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
WO2004113887A2 (en) * | 2003-06-20 | 2004-12-29 | Aegis Semiconductor, Inc. | Thermo-optic filter and infrared sensor using said filter. |
US7221495B2 (en) * | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
KR20070020166A (ko) * | 2003-08-26 | 2007-02-20 | 레드시프트 시스템즈 코포레이션 | 적외선 카메라 시스템 |
TWI231865B (en) | 2003-08-26 | 2005-05-01 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
US7221827B2 (en) * | 2003-09-08 | 2007-05-22 | Aegis Semiconductor, Inc. | Tunable dispersion compensator |
TW593126B (en) * | 2003-09-30 | 2004-06-21 | Prime View Int Co Ltd | A structure of a micro electro mechanical system and manufacturing the same |
WO2005036240A1 (en) * | 2003-10-07 | 2005-04-21 | Aegis Semiconductor, Inc. | Tunable optical filter with heater on a cte-matched transparent substrate |
US7269325B2 (en) * | 2003-11-03 | 2007-09-11 | Jidong Hou | Tunable optical device |
US7161730B2 (en) * | 2004-09-27 | 2007-01-09 | Idc, Llc | System and method for providing thermal compensation for an interferometric modulator display |
US7684104B2 (en) | 2004-09-27 | 2010-03-23 | Idc, Llc | MEMS using filler material and method |
US7417783B2 (en) * | 2004-09-27 | 2008-08-26 | Idc, Llc | Mirror and mirror layer for optical modulator and method |
NO20051851A (no) * | 2005-04-15 | 2006-10-02 | Sinvent As | Justerbart interferensfilter |
NO20051850A (no) * | 2005-04-15 | 2006-09-25 | Sinvent As | Infrarød deteksjon av gass - diffraktiv. |
CN1306288C (zh) * | 2005-04-27 | 2007-03-21 | 中国科学院上海技术物理研究所 | 具有平整谐振腔层的滤光片列阵 |
US7795061B2 (en) * | 2005-12-29 | 2010-09-14 | Qualcomm Mems Technologies, Inc. | Method of creating MEMS device cavities by a non-etching process |
US20070228156A1 (en) * | 2006-03-28 | 2007-10-04 | Household Corporation | Interoperability facilitator |
US7643203B2 (en) * | 2006-04-10 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Interferometric optical display system with broadband characteristics |
US7417784B2 (en) * | 2006-04-19 | 2008-08-26 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing a porous surface |
US7711239B2 (en) * | 2006-04-19 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing nanoparticles |
US7321457B2 (en) * | 2006-06-01 | 2008-01-22 | Qualcomm Incorporated | Process and structure for fabrication of MEMS device having isolated edge posts |
US7763546B2 (en) | 2006-08-02 | 2010-07-27 | Qualcomm Mems Technologies, Inc. | Methods for reducing surface charges during the manufacture of microelectromechanical systems devices |
JP4561728B2 (ja) * | 2006-11-02 | 2010-10-13 | セイコーエプソン株式会社 | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
FR2935845B1 (fr) | 2008-09-05 | 2010-09-10 | Centre Nat Rech Scient | Cavite optique amplificatrice de type fabry-perot |
ITMI20092137A1 (it) * | 2009-12-03 | 2011-06-04 | Ribes Ricerche E Formazione S R L | Sensore di gas ad assorbimento ottico |
DE102014014983A1 (de) * | 2014-10-07 | 2016-04-07 | Technische Universität Dresden | Optisches Filterelement für spektroskopische Einrichtungen zur Umwandlung von spektralen Informationen in Ortsinformationen |
US11693164B2 (en) | 2019-10-09 | 2023-07-04 | Viavi Solutions Inc. | Multi-transmission optical filter |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5103340A (en) * | 1989-02-21 | 1992-04-07 | International Business Machines Corporation | Multiple-cavity optical filter using change of cavity length |
US5225930A (en) * | 1990-05-10 | 1993-07-06 | The United States Of America As Represented By The Secretary Of The Air Force | Comb optical interference filter |
FI108581B (fi) * | 1996-10-03 | 2002-02-15 | Valtion Teknillinen | Sähköisesti säädettävä optinen suodin |
EP0934501B1 (en) * | 1996-10-18 | 2005-05-04 | Micron Optics, Inc. | A multi-wavelength reference |
US6545739B1 (en) * | 1997-09-19 | 2003-04-08 | Nippon Telegraph And Telephone Corporation | Tunable wavelength filter using nano-sized droplets of liquid crystal dispersed in a polymer |
US5914804A (en) * | 1998-01-28 | 1999-06-22 | Lucent Technologies Inc | Double-cavity micromechanical optical modulator with plural multilayer mirrors |
JP3506077B2 (ja) * | 1999-11-24 | 2004-03-15 | 株式会社村田製作所 | 多重モード誘電体共振器装置、フィルタ、デュプレクサおよび通信装置 |
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2001
- 2001-02-05 FR FR0101520A patent/FR2820513B1/fr not_active Expired - Fee Related
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2002
- 2002-02-01 JP JP2002562954A patent/JP4515706B2/ja not_active Expired - Fee Related
- 2002-02-01 AU AU2002234722A patent/AU2002234722A1/en not_active Abandoned
- 2002-02-01 CA CA2437433A patent/CA2437433C/fr not_active Expired - Fee Related
- 2002-02-01 DE DE60228938T patent/DE60228938D1/de not_active Expired - Lifetime
- 2002-02-01 AT AT02701387T patent/ATE408808T1/de not_active IP Right Cessation
- 2002-02-01 EP EP02701387A patent/EP1364190B1/fr not_active Expired - Lifetime
- 2002-02-01 WO PCT/FR2002/000402 patent/WO2002063256A2/fr active IP Right Grant
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2003
- 2003-08-05 US US10/635,713 patent/US6768097B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2437433A1 (fr) | 2002-08-15 |
EP1364190A2 (fr) | 2003-11-26 |
EP1364190B1 (fr) | 2008-09-17 |
FR2820513B1 (fr) | 2004-05-21 |
US6768097B1 (en) | 2004-07-27 |
ATE408808T1 (de) | 2008-10-15 |
AU2002234722A1 (en) | 2002-08-19 |
WO2002063256A2 (fr) | 2002-08-15 |
JP2004530146A (ja) | 2004-09-30 |
CA2437433C (fr) | 2012-12-18 |
WO2002063256A3 (fr) | 2003-09-25 |
FR2820513A1 (fr) | 2002-08-09 |
DE60228938D1 (de) | 2008-10-30 |
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