JP4514913B2 - Visual inspection apparatus, visual inspection method and manufacturing apparatus for color display member - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a color display member inspection apparatus and inspection method using a UV-excited phosphor such as a plasma display, and a manufacturing apparatus.
[0002]
[Prior art]
Color displays include self-luminous type and passive type. A self-luminous display usually enables color display by forming phosphors emitting red, blue, and green in a predetermined pattern on a light emitting surface and exciting them by a method such as ultraviolet rays or electron beams. Unevenness and defects of the phosphor pattern cause display defects. Since phosphors are usually white under visible light, in order to detect these defects, phosphors are excited by an excitation means such as ultraviolet light after they have been commercialized and can be displayed. Thereafter, it is necessary to take a method by image processing or the like every time each color is formed, and a method for simple and more accurate evaluation during the manufacturing process is required.
[0003]
[Problems to be solved by the invention]
An object of the present invention is to provide an inspection apparatus, inspection method, and manufacturing apparatus for a color display member for easily detecting a phosphor coating defect of a color display member in a visual inspection during a manufacturing process.
[0004]
[Means for Solving the Problems]
The object of the present invention can be achieved by adopting the following configuration. That is,
(1) An observation window that transmits only red light, an observation window that transmits only green light, an observation window that transmits only blue light, a mechanism that arbitrarily selects any one of the observation windows, and an ultraviolet ray further comprising a mechanism for irradiating the inspected member inspection device for color display member having a ultraviolet excitation phosphors, wherein a.
[0006]
( 2 ) The visual inspection apparatus for a color display member as described in (1 ) above, comprising a mechanism for transporting a planar substrate.
[0007]
( 3 ) The visual inspection apparatus for a color display member according to (1) or (2) above, wherein the observation window is provided on a plurality of surfaces on the side surface of the inspection apparatus.
[0008]
( 4 ) The visual inspection apparatus for a color display member according to any one of (1) to ( 3 ), wherein the observation window is provided on all sides of the inspection apparatus.
[0009]
( 5 ) The visual inspection apparatus for a member for color display as described in ( 4 ) above, comprising a mechanism capable of observing observation images from a plurality of surfaces from the same direction.
[0010]
( 6 ) The visual inspection apparatus for a color display member according to any one of (1) to ( 5 ), further comprising a mechanism for holding the planar substrate in an inclined state at an arbitrary angle.
[0011]
( 7 ) A visual display of the color display member according to any one of (1) to ( 6 ), wherein a mechanism is provided to keep the relative positional relationship between the ultraviolet light source and the member to be inspected constant at all times. Inspection device.
[0012]
( 8 ) The visual inspection apparatus for a color display member according to any one of (1) to ( 7 ), wherein a main wavelength region of ultraviolet rays is 200 to 300 nm.
[0013]
( 9 ) The visual inspection apparatus for a color display member according to any one of (1) to ( 8 ), wherein the ultraviolet light source is a low-pressure mercury lamp.
[0014]
( 10 ) The visual inspection apparatus for a color display member according to any one of (1) to ( 9 ), wherein the atmosphere in the apparatus is replaced with nitrogen.
[0015]
(1 1 ) A color display in which inspection is performed by passing through the visual inspection apparatus for a member for color display according to any one of (1) to (1 0 ) continuously after passing through the phosphor forming step. Visual inspection method for structural members.
[0017]
(1 2 ) an observation window that transmits only red light, an observation window that transmits only green light, an observation window that transmits only blue light, and a mechanism that arbitrarily selects any one of the observation windows; apparatus for manufacturing a color display member used to form the ultraviolet excitation phosphors, characterized in that it has a visual inspection means and a mechanism for irradiating ultraviolet rays to the inspection member.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of an inspection apparatus according to the present invention, in particular, a schematic view of an apparatus for inspecting a planar color display member. FIG. 2 shows a substrate in a phosphor visual inspection apparatus. It is the schematic of the state which shows the arrangement | positioning for inclining and observing. The inspection apparatus observes a substrate support 4 for supporting a phosphor forming member (substrate) 3, a light source 2 for irradiating the phosphor forming surface of the phosphor forming member 3 with ultraviolet rays, and a phosphor forming surface. It is comprised from the observation window 1 for doing. In the embodiment of FIGS. 1 and 2, the substrate support 4 for supporting the member (substrate) 3 is composed of a transport roller, but is not limited to this. A fixed support may be used. An example of an ultraviolet lamp is used as the light source 2 for irradiating the phosphor-forming surface of the member 3 with ultraviolet rays.
[0019]
The observation window 1 is made of a material that transmits only one of red, blue, and green light, and has a mechanism that includes all the red , blue, and green windows and that can arbitrarily select any one of the windows. with Ru.
[0020]
This is because by observing through the observation window 1 described above, only the coating state of each color can be observed even on a substrate coated with phosphors of three colors. This is because even a phosphor with low emission intensity can be observed without being affected by the light emission of other phosphors.
[0021]
As a specific example, in the case of a plasma display panel which is a self-luminous type flat color display, as phosphors that are usually used, red (Y, Gd) BO ₃ : Eu, green ZnSiO ₄ : Mn, blue BaMgAl ₁₄ O ₂₃ : Eu ²⁺ may be mentioned.
[0022]
Examples of light sources that excite them include mercury lamps and excimer UV lamps, but mercury lamps are more preferred because they are inexpensive and have stable emission intensity. The main emission wavelength of the mercury lamp is 254 nm. When excited at this wavelength, (Y, Gd) BO ₃ : Eu among the phosphors listed above has a weak emission intensity, and therefore, when three colors are emitted at the same time, red It is difficult to detect defects in the phosphor. By using the apparatus of the present invention, such a defect can be detected.
[0023]
Furthermore, by providing a mechanism for arbitrarily selecting a window that transmits light of each color, it becomes possible to observe the light emission state of each color with one device, and the device installation area can be reduced.
[0024]
3 to 5 show an example of a mechanism for arbitrarily selecting a window that transmits light of each color, but the mechanism of the present invention is not limited to this mechanism.
[0025]
Hereinafter, this mechanism will be described with reference to the drawings. The observation surface 1 is provided with three types of windows that transmit light of each color of 5 to 7 having a vertical movement mechanism. It is possible to arbitrarily select a window by lowering only the window that transmits only the light of the color actually desired to be observed to the observation surface. 3, 4, and 5 are examples in which observation windows that transmit red, blue, and green light are selected.
[0026]
When the object to be inspected is a planar member, it is desirable that the support base 4 has a structure that can be inclined at an arbitrary angle.
[0027]
An example of a structure that can be tilted at an arbitrary angle is a structure in which one side of the substrate support is fixed and the support is movable about the side as a central axis. However, the structure of the present invention is not limited to this structure.
[0028]
Usually, the planar member is conveyed and installed in the apparatus with the surface to be observed facing upward. This is because in order for the observer to observe from the side of the apparatus, it is desirable to observe the member 3 in an inclined state as shown in FIG.
[0029]
In addition, in order to observe light emission unevenness, it is also necessary to observe the substrate from an arbitrary direction such as an oblique direction. In addition, when multiple screens are configured on a single substrate, depending on the imposition direction Since the direction suitable for observation is different, it is preferable to have the above structure.
[0030]
In order to observe from an arbitrary direction, observation windows may be provided on a plurality of surfaces of the inspection apparatus. Assuming the case of observing a rectangular substrate, it is more preferable to have observation windows on four surfaces parallel to each side. Furthermore, as shown in FIG. 6, by arranging an observation window on one of the four surfaces and a mirror 8 on the remaining three surfaces, a structure that allows observation images from a plurality of surfaces to be observed from the same direction. It is further preferable that the inspector need not move.
[0031]
In the inspection apparatus having the above mechanism, as shown in FIG. 7, the light source mounting base 9 is connected to the substrate support base 4, and the light source mounting base 9 moves in conjunction with the movement of the substrate support base 4. It is desirable to have a mechanism that keeps the positional relationship between the object 3 and the light source 2 constant. This is because the irradiation state of ultraviolet rays such as the intensity distribution in the substrate can always be kept constant regardless of the angle of the substrate, and observation can always be performed under the same conditions.
[0032]
The main wavelength range of the ultraviolet light source used in the inspection apparatus of the present invention is desirably 200 nm to 300 nm. This is because, in an oxygen atmosphere, ozone harmful to the human body is generated mainly by ultraviolet rays having a wavelength of 200 nm or less. Generation of ozone can be prevented by irradiating ultraviolet rays having the wavelength.
[0033]
Furthermore, it is desirable that the atmosphere in the inspection apparatus is substituted with nitrogen. This is because generation of ozone can also be prevented by irradiating ultraviolet rays in a nitrogen atmosphere.
[0034]
This device should be installed immediately after the phosphor formation process, specifically immediately after the phosphor coating process and drying process. This is because it becomes possible to provide feedback.
[0035]
Furthermore, an ultraviolet irradiation mechanism and an observation window used in the inspection apparatus of the present invention may be provided at an appropriate location of a phosphor coating apparatus such as a screen printing machine or a nozzle coating apparatus or a drying apparatus.
[0036]
Furthermore, the same effect as when the inspection apparatus is used can be obtained by inspecting a member irradiated with ultraviolet rays by using an eyeglass that transmits one of red, blue, and green light.
[0037]
【The invention's effect】
According to the present invention, a visual inspection of a color display member using an ultraviolet-excited phosphor can be accurately and easily performed.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an example of a phosphor visual inspection apparatus according to the present invention.
FIG. 2 is a perspective view showing an example of a state showing an arrangement for inclining and observing a substrate in the phosphor visual inspection apparatus according to the present invention.
FIG. 3 is a diagram showing an example of a cross section when a red observation window is selected.
FIG. 4 is a diagram showing an example of a cross section when a blue observation window is selected.
FIG. 5 is a diagram showing an example of a cross section when a green observation window is selected.
FIG. 6 is a diagram illustrating an example of a mechanism capable of observing observation images from a plurality of surfaces from the same direction.
FIG. 7 is a diagram illustrating an example of a mechanism that maintains a constant positional relationship between an object to be inspected and a light source.
[Explanation of symbols]
1: Observation window 2: Light source (ultraviolet lamp)
3: Phosphor forming member (substrate)
4: Substrate support 5: Red observation window 6: Blue observation window 7: Green observation window 8: Mirror 9: Light source mount

Claims (12)

An observation window that transmits only red light, an observation window that transmits only green light, an observation window that transmits only blue light, a mechanism that arbitrarily selects one of the observation windows, and an ultraviolet ray to be inspected And a mechanism for irradiating the member. A visual inspection apparatus for a member for color display comprising an ultraviolet-excited phosphor . The visual inspection apparatus for a color display member according to claim 1, further comprising a mechanism for conveying a planar substrate. Visual inspection device of a color display member according to claim 1 or 2, characterized in that it has a viewing window in the plurality of surfaces of the test apparatus side. The visual inspection apparatus for a color display member according to any one of claims 1 to 3 , further comprising an observation window on each side of the inspection apparatus. The visual inspection apparatus for a color display member according to claim 4 , further comprising a mechanism capable of observing observation images from a plurality of surfaces from the same direction. Visual inspection device of a color display member according to planar substrate to any one of claims 1 to 5, characterized in that it comprises a mechanism for holding at an arbitrary angle inclined state. The visual inspection apparatus for a color display member according to any one of claims 1 to 6 , further comprising a mechanism that always maintains a relative positional relationship between the ultraviolet light source and the member to be inspected. The visual inspection apparatus for a color display member according to any one of claims 1 to 7 , wherein a main wavelength region of ultraviolet rays is 200 to 300 nm. Ultraviolet light source for visual inspection device for color display member according to any one of claims 1 to 8, characterized in that a low pressure mercury lamp. Visual inspection device of a color display member according to any one of claims 1 to 9, through the device in an atmosphere characterized by nitrogen. A visual inspection method for a color display member, wherein the inspection is performed by passing the visual display device for a color display member according to any one of claims 1 to 10 continuously after passing through the phosphor forming step . An observation window that transmits only red light, an observation window that transmits only green light, an observation window that transmits only blue light, a mechanism that arbitrarily selects one of the observation windows, and an ultraviolet ray to be inspected apparatus for manufacturing a color display member used to form the ultraviolet excitation phosphors, characterized in that it has a visual inspection means and a mechanism for irradiating the member.

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