JP4498971B2 - Spacer member, cold cathode FPD panel substrate using the spacer member, cold cathode FPD panel, and manufacturing method of spacer member for cold cathode FPD panel - Google Patents

Description

  The present invention relates to a spacer member for a cold cathode FPD panel and a manufacturing method thereof, and a cold cathode FPD panel, and more particularly to a spacer member for a cold cathode FPD panel having a laminated structure and a manufacturing method thereof.

Progress in the information-oriented society has accelerated, the need for FPD (Flat Panel Display, Flat Panel Display) has increased, and various alternatives to CRT (Cathode-Ray Tube, CRT) and LCD (Liquid Crystal Display, Liquid Crystal Display) FPD has been developed and put into practical use.
PDPs (Plasma Display Panels), which are easy to increase in size because phosphors emit light by electric discharge, have started mass production in the age of digital high-definition TV.

Under such circumstances, various cold cathode FPDs have been developed as the same electron beam excitation type as that of a CRT, while maintaining its excellent advantages and enabling reduction in power consumption, reduction in thickness and size.
The cold cathode FPD simply has a cold cathode electron source as an electron-emitting device, and basically causes the electrons from the cold cathode electron source to collide with a phosphor coated on the anode by the same light emission principle as the CRT. In Japan, Canon, Futaba Electronics Industry, NEC, Sony, Toshiba, etc. are conducting research and development for practical application of cold shade FPD.
Cadcent Technologies, PixTech, Motorola, etc. are listed as key companies that are leading research and development in the US and are entering the market.
Incidentally, the main technical problem of the cold cathode FPD is to improve the reliability of the emitter. In order to commercialize the cold cathode FPD, further research and development are required regarding the stability of the electron emission characteristics of the emitter.
At present, medium-sized panels for portable information devices are the closest application field, but if cold cathode electron sources such as carbon nanotubes are developed, they can be applied to large displays. .

For example, a cold cathode FPD having a cross-sectional structure as shown in FIG. 8 described in Japanese Patent Laid-Open No. 6-124669 (Patent Document 1) can be given.
In this case, the microchip 425 is a cold cathode cathode that emits electrons, and the electrons generated from the many microchips 425 through the gate 440 that concentrates the electric field by inducing electron emission are phosphors. It collides with 460 and emits light.
In such a cold cathode FPD, the distance between the cathode 420 and the transparent electrode (also referred to as an anode) 470 is usually about 2 mm from the viewpoint of image quality, discharge sustainability, etc., and the cathode 420 and the transparent electrode (also referred to as the anode). ) A voltage of 10 kV is applied across 470.
In order to maintain a distance between the cathode 420 and the transparent electrode (also referred to as an anode) 470, a spacer 450 is provided particularly for a large size.
A surface conduction electron-emitting device as described in JP-A-7-235255 is also used as the cold cathode FPD.
In addition to this, various cold cathode FPDs having electron emission sources with different electron emission methods are known.
JP-A-6-124669 JP 7-235255 A

In any of the above-described cold cathode FPDs, particularly in the case of a large size, the inside of the vacuum can withstand atmospheric pressure, and a spacer is required to maintain the distance between the cathode and the anode. A cubic structure having a high aspect ratio with a width of 50 μm or a spacer having a crossing structure has been used.
However, it has a high aspect ratio and takes time to manufacture, and when it is used for an FPD, it is difficult to align the position, which causes a problem in manufacturing the FPD.

As described above, in recent years, various cold cathode FPDs have been developed as the same electron beam excitation type as the CRT, while maintaining its excellent advantages and capable of reducing power consumption, thinning, and downsizing. In the case of a cold cathode FPD, especially in a large size, a spacer is required to maintain the distance between the cathode and the anode. However, it takes a lot of time to manufacture the FPD with a high aspect ratio. When used, alignment is difficult, which causes a problem in the production of FPD, and its countermeasure has been demanded.
This invention respond | corresponds to this, and it aims at providing the spacer member for cold cathode FPD which is easy to produce, and when using for FPD, and its manufacturing method. At the same time, a cold cathode FPD panel substrate and a cold cathode FPD panel using such a spacer member are to be provided.

The spacer member of the present invention is a spacer member for a cold cathode FPD panel, which is formed by etching and is formed by dividing the spacer portion to be formed into a plane perpendicular to the thickness direction in the thickness direction. Using a metal thin plate formed by integrally connecting a metal processing part for forming a spacer part, which has a shape corresponding to a part of the spacer corresponding to the thickness of the thin plate, the metal processing part is Corresponding to the display area of the panel on which the spacer is formed, the metal thin plate is arranged in a predetermined arrangement shape and is supported by the metal thin plate, and each metal processed portion is placed in the spacer portion. A plurality of the thin metal plates, a part of the spacer portions of the thin metal plates are bonded and laminated via a glass layer therebetween, and a part of the spacer portions of the thin metal plates and the respective glass layers And space Parts are formed, and the glass layer is characterized in that is obtained by forming by etching a glass sheet.
And it is said spacer member, Comprising: The insulation process which coat | covers an insulator on the surface is performed, The said insulator surface is 1 * 10 < ⁵ > ohm / square-1 * 10 A conductive layer having a resistance value in the range of ⁶ Ω / □ is formed.
Also, in any one of the spacer members described above, the width of the metal processed portion of each thin metal plate is made different so that the width of the spacer is gradually increased toward the cathode side when used in a panel. It is characterized by.
Further, in any of the spacer members described above, each of the metal thin plates has a thermal expansion coefficient close to that of the substrate of the cold cathode FPD panel.
Further, in any of the above spacer members, the substrate of the cold cathode FPD panel is a glass material, and each of the metal thin plates is made of 48 alloy (48Ni-52% Fe alloy), 426 alloy (42Ni-6% Cr). -52% Fe alloy), Invar material (36% Ni-64% Fe alloy), or SUS material (stainless steel).
Also, any one of the spacer members described above is characterized in that a corner portion of the outer side surface of the outermost metal thin plate in the thickness direction of the spacer is chamfered.
In any of the above spacer members, each of the metal thin plates has a thickness in the range of 0.020 mm to 0.300 mm.

The substrate for a cold cathode FPD panel of the present invention is characterized in that the spacer member according to any one of claims 1 to 8 is used.

The cold cathode FPD panel of the present invention is characterized in that the spacer member is formed by using the spacer member according to any one of claims 1 to 8 .

The manufacturing method of a spacer member for a cold cathode FPD panel according to the present invention uses a plurality of thin metal plates that are externally processed by etching, and a part of the spacer portions of each thin metal plate is bonded and laminated via a glass layer therebetween. A method of manufacturing a spacer member for a cold cathode FPD panel in which a spacer portion is formed by a part of the spacer portion of each metal thin plate and each glass layer, and in order, (A) a metal plate An etching process step, in which a resist pattern having a predetermined shape is disposed on both surfaces of the material, and each resist pattern is etched from both surfaces of the metal material as an anti-etching mask to form an outer shape, thereby producing each metal thin plate. (B) After the etching process, the metal thin plates are subjected to cleaning treatment and drying treatment as necessary, and the metal thin plates are aligned, and Laminating a sheet glass for forming the glass layer between the metal thin plates, and laminating them together to produce a laminated monolith, and (C) for each of the laminated monoliths, The exposed portion of the plate glass is subjected to a glass etching step of etching and removing the metal thin plate as an anti-etching and mask.

(Function)
By adopting such a configuration, the spacer member of the present invention can provide a spacer member for a cold cathode FPD that is easy to manufacture and can be easily aligned when used in an FPD.
Specifically, the outer shape is processed by etching, and the spacer portion to be formed is divided in the thickness direction by a plane perpendicular to the thickness direction, and the shape corresponding to a part of the spacer corresponding to the thickness of the metal thin plate, The metal working portion for forming the spacer portion is formed by integrally connecting and forming a metal thin plate, and the metal working portion corresponds to a display area of the panel on which the spacer is formed, and has a predetermined size. In an array shape, disposed on the metal thin plate, while being supported by the metal thin plate, each metal processed portion is a part of the spacer portion, and a plurality of the metal thin plates are used, and the spacer of the metal thin plate A part of each part is bonded and laminated through a glass layer therebetween, and a spacer part is formed by a part of the spacer part of each metal thin plate and each glass layer, and the glass layer Etch plate glass By those formed by ring machining, we have achieved this.
That is, by using metal thin plates that are integrally connected to each other and that are arranged in a predetermined arrangement corresponding to the display area of the panel on which the spacer is formed, By just aligning the thin plate, it is not necessary to align each metal processing portion that becomes a part of the spacer disposed on the thin plate, and the alignment for forming the spacer can be simplified after all.
Etching is used as an outer shape forming a thin metal plate provided with a metal processed portion. Each metal processed portion can be accurately formed in a desired shape, and can be manufactured with high productivity.
Although it is the form which laminates | stacks a glass layer on both sides of a metal thin plate, it is not limited to the 3 layer structure of a metal thin plate, a glass layer, and a metal thin plate in order.
A spacer member having more than three layers is also a spacer member of the present invention.
As a spacer member, a plurality of thin metal plates are used, and a spacer portion is provided integrally connected to a laminated plate-like material obtained by integrally laminating these, and insulation is provided on the surface of the spacer portion of the laminated plate-like material. By adopting a form in which an object is coated and an insulating treatment is applied, the spacer member can be manufactured more easily, accurately, and in a mass-productive structure.
In particular, the metal thin plates of the laminated plate-like material are laminated in a state where they are joined by diffusion bonding, so that the spacer member can be manufactured more easily, accurately, and mass-productive. It is said.
In the case where the spacer member is formed by laminating only the thin metal plates, here, it means two or more metal thin layers, but preferably about 10 layers or more are also used in the spacer member of the present invention. is there.
The above-mentioned “the laminated thin plate-like metal thin plates are laminated in a state of being joined by diffusion bonding” means that the metal thin plates are easily diffused directly or on the surface of these thin metal plates. It means that laminated metal sheets are formed by joining metal thin plates plated with metal (also referred to as easily diffusible metal) by diffusion bonding.
Examples of the easily diffusible metal include copper, silver, gold and alloys thereof, aluminum and alloys thereof, and examples of the plating method include electroplating, chemical plating, hot dipping, vacuum deposition, and sputtering. Etc.
For heating for diffusion bonding, for example, a heat furnace such as a vacuum annealing furnace, a hydrogen furnace, or an electric furnace can be used.
By forming a conductive layer having a resistance value in the range of 1 × 10 ⁵ Ω / □ to 1 × 10 ⁶ Ω / □ on the insulator surface, charges are accumulated on the insulator surface of the spacer portion. It is supposed to be able to prevent that.
In addition, in the case where the width of the metal working portion of each thin metal plate is made different and the width of the spacer is gradually increased toward the cathode side when used in the panel, the metal is emitted from the cooling electron source. Fixing of the spacer portion to the gate side can be made stronger and more stable without hindering the progress of electrons.
In addition, each thin metal plate has a coefficient of thermal expansion close to that of the cold cathode FPD panel substrate, so that it can withstand a high temperature (typically about 500 ° C.) temperature change applied to the panel during sealing. Yes.
When the substrate of the cold cathode FPD panel is a glass material, each of the metal thin plates preferably has a thermal expansion coefficient close to that of the glass material, for example, 48 alloy (48Ni-52% Fe alloy). 426 alloy (42Ni-6% Cr-52% Fe alloy), etc., and by using any one of these, the temperature changes to a high temperature (usually around 500 ° C.) applied to the panel during sealing. Can also withstand.
From the aspect of being hard to be rusted and easy to handle, Invar material (36% Ni-64% Fe alloy) and SUS material (stainless steel) can be mentioned.
Also, any one of the above spacer members,
By adopting a chamfered shape in the thickness direction of the spacer and on the outer side of the outermost metal thin plate, a structure in which abnormal discharge is unlikely to occur at the corner is provided.
Preferably, the corner is chamfered with a radius of 0.003 mm or more.
In addition, each metal thin plate can be made to have a form in which the thickness is in the range of 0.020 mm to 0.300 mm, so that the cross-sectional shape can be improved particularly accurately by etching.

  The substrate for a cold cathode FPD panel of the present invention has such a configuration, and thus the spacer portion can be easily disposed on the substrate with high positional accuracy.

  By adopting such a configuration, the cold cathode FPD panel of the present invention makes it possible to easily arrange the spacer portion on the panel with high positional accuracy.

  According to the spacer member manufacturing method of the present invention, it is possible to provide a spacer member manufacturing method for a cold cathode FPD that can be easily manufactured and easily aligned when used in an FDP. Yes.

As described above, the present invention makes it possible to provide a spacer member for a cold cathode FPD that is easy to manufacture and easy to align when used in an FPD, and a manufacturing method thereof.
Then, it is possible to provide a cold cathode FPD panel substrate and a cold cathode FPD panel using the spacer member.

Embodiments of the present invention will be described with reference to the drawings.
1 (a) is a plan view of a portion of a first example of spacer members according to the present invention, a sectional view of a spacer portion in the A1-A2 of FIG. 1 (b) Fig. 1 (a), 1 ( c) is a sectional view corresponding to FIG. 1 (b) modification of the first example, FIG. 2 (a) is a sectional view of the spacer portion of the second example of the spacer member according to the present invention, FIG. 2 (b ) Is a cross-sectional view corresponding to FIG. 1C of a modification of the second example , FIG. 3 is a cross-sectional view of the spacer portion of the first example of the embodiment of the spacer member of the present invention, and FIG. FIG. 5 is a plan view of a part of a modification of the first example of the spacer member related to the invention, FIG. 5 is a view for explaining a region where the spacer portion is disposed, and FIG. 6A is a spacer member related to the present invention. in one cross-sectional view of a cold cathode FPD panel using the spacer member of the first example, the space of the first example of the embodiment of the spacer member of Fig. 6 (b) the invention In one cross-sectional view of a cold cathode FPD panel using the member, FIG. 7 is an example of a first example of a method for manufacturing a cold cathode FPD panel using the manufacturing method and the spacer member of the spacer member of the spacer member according to the present invention FIG.
FIG. 5 schematically shows the spacer portion region, and S11 to S17 in FIG. 7 show processing steps.
1 to 7, 110, 110A and 110a are spacer members, 111 is a metal thin plate (unit), 115 is an insulator, 117 is a conductive layer, 120 is a display unit (pixel), and 121 to 123 are sub-units. Pixel (R, G, and B display units), 130 is a black matrix area, 200 is an FPD, 200S is an entire display area (210), 210 is a rear glass substrate, 220 is an emitter, 230 is a gate electrode, 240 is a focusing electrode, 250 is a phosphor, 255 black matrix (also called BM), 270 is a transparent electrode (also called an anode), 280 is a front glass substrate, and 290 is an electron.

First, the 1st example of the spacer member in connection with this invention is demonstrated based on FIG.
The spacer member of the first example is a spacer member for a cold cathode FPD panel, and is externally processed by an etching process, and the spacer portion to be formed is divided in a plane perpendicular to the thickness direction in the thickness direction. A thin metal plate 111 made of stainless steel formed by integrally connecting metal processing portions having a shape corresponding to a part of the spacer corresponding to the thickness of the thin plate is used. A plurality of aligned, laminated sheet-like objects laminated in a state where the metal thin plates 111 are heat diffusion bonded are integrally connected to each other, and a spacer portion is provided. Insulating treatment is performed in which an insulating material is coated on the surface of the spacer portion.
As shown in FIG. 1A, the spacer member 110 of this example is provided with a spacer portion in a black matrix shape in the black matrix forming region 130 and across the boundary of the display unit portion (pixel) 120.
The cross-sectional shape of the spacer member 110 is as shown in FIG. 1B at A1-A2 in FIG.
In addition, the thing of the state which remove | excluded the film | membrane of the insulator 115 shown in FIG.1 (b) and the electroconductive layer 117 from the spacer member 110 is called the laminated board form here.
The thin metal plate 111 is subjected to outer shape processing by etching, and by reducing the plate thickness, the outer shape and the cross-sectional shape can be manufactured with sufficiently high accuracy and mass productivity. Laminated plate-like objects can be laminated with high positional accuracy simply by aligning the entire thin metal plate with, for example, alignment pins, etc., and each metal processing to be a part of a plurality of spacers arranged on each thin metal plate It is not necessary to align the parts individually.
The spacer member 110 of this example can be easily and accurately manufactured with good mass productivity, and when the spacer member 110 of this example is used for FPD manufacturing, the formation of the spacer portion is simple and accurate. It can be improved and can be mass-produced.
And the spacer member of this example is provided to the cold cathode FPD as shown in FIG.

Next, each part of the spacer member 110 of this example will be described.
The metal thin plate 111 is preferably one having good etching processability and capable of thermal diffusion bonding by thermocompression bonding of the metal thin plates 111, and has a thermal expansion coefficient close to that of the substrate of the cold cathode FPD panel.
The substrate of the cold cathode FPD panel to which the spacer member 110 of this example is applied is a glass material, and a SUS material (stainless steel) is used for laminating the metal thin plates 111 in a heat diffusion bonded state by thermocompression bonding.
In addition, the thickness of the thin metal plate is preferably in the range of 20 μm to 300 μm from the viewpoint of the processing accuracy of the outer shape and the cross-sectional shape.
As the film of the insulator 115, it is possible to ensure insulation from the gate, the focusing electrode, or the anode electrode, and silicon oxide, alumina oxide or the like is used.
The conductive layer 117 has a resistance value in the range of 1 × 10 ⁵ Ω / □ to 1 × 10 ⁶ Ω / □, and includes, for example, a thin ITO layer.

The cross-sectional shape of the spacer portion of the spacer member 110 is not limited to the shape shown in FIG.
For example, as shown in FIG. 1C, the width of the metal processed portion of each thin metal plate 111 is made different so that the width of the spacer is gradually increased toward the cathode side on the cathode side when used in the panel. A form is also mentioned.
In this case, as compared with the first example of spacer members according to the present invention, electrons are less likely to collide with the surface of the spacer portion.
Further, as a modification of the spacer member 110 of this example, there is a configuration in which the corners of the outer side surface of the outermost metal thin plate in the thickness direction of the spacer are chamfered.
By chamfering the corner portion, the corner portion has a structure in which abnormal discharge hardly occurs.
The corner is preferably chamfered with a radius of 0.003 mm or more.
Further, in this example, as shown in FIG. 1 (b), the number of the thin metal plates is seven, but the present invention is not limited to this, and a mode in which only the thin metal plates are laminated to form the spacer member is two thin metal layers. The above corresponds to the spacer member of the present invention.
Those having about 10 layers or more are also spacer members according to the present invention.

  In this example, as shown in FIG. 5 (a), the region 111S in which the spacer portion of the spacer member is disposed covers the entire display region 200S of the FPD. As shown in FIG. 5C and FIG. 5D, the display area may be divided into one area or a plurality of divided areas instead of the entire display area 200S.

Here, an example of a manufacturing method of the spacer member 110 of this example and an example of a manufacturing method of a cold cathode FPD panel using the spacer member 110 of this example shown in FIG. A simple explanation.
First, the spacer member 110 of this example is manufactured.
First, each metal thin plate 111 made of stainless steel is trimmed by etching as follows. (S11)
For example, both surfaces of a metal material for a metal thin plate are degreased and washed with an alkaline solution or the like, dried, and then coated with a photoresist on both surfaces and dried.
A casein resist or a dry film resist is used as the photoresist. Next, a mask (original plate) is overlaid on both sides (hereinafter also referred to as the front and back sides) of a metal material coated with a photoresist, exposure is performed, development processing is performed, and a resist pattern with a predetermined shape is formed on both sides of the metal material. Form.
The resist patterns formed on both surfaces of the metal material have the same shape and the same dimensions.
Next, using the resist patterns on both sides of the metal material as an etching resistant mask, etching is performed from the front and back with a ferric chloride solution (40 to 90 ° C., 30 to 60 Baume) or the like to form through holes.
Next, the resist is peeled off with an alkaline solution or the like, washed and dried.
In this way, the metal thin plate 111 is produced.
Next, the manufactured thin metal plates 111 are aligned and stacked, and stacked in a state where they are bonded by diffusion bonding. (S12)
For heating for diffusion bonding, for example, a heat furnace such as a vacuum annealing furnace, a hydrogen furnace, or an electric furnace can be used.
After joining, in order to prevent leakage current, etching is performed for a short time with a ferric chloride solution (40 to 90 ° C., 30 to 60 Baume), and the angular portion is rounded.
Next, the surface is coated with an insulating material 115 such as silicon oxide by spraying or dipping to insulate it. (S13)
Then, the surface of the insulator 115 is coated with a conductive layer having a surface resistance of only a little conductivity, preferably having a resistance value in the range of 1 × 10 ⁵ Ω / □ to 1 × 10 ⁶ Ω / □ . (S14)
For example, the conductive layer 117 made of ITO is formed on the surface of the insulator 115 by dipping in an ITO liquid.
Thus, the spacer member of the first example of the spacer member according to the present invention is manufactured.

Next, a cold cathode FPD panel using the spacer member 110 of this example is manufactured as follows.
The manufactured spacer member of the first example of the spacer member according to the present invention is a cold cathode FPD panel substrate, for example, a front glass substrate 280 shown in FIG. The substrate 250, the black matrix 255, and the like are aligned and bonded and fixed to the substrate. (S15)
Next, the cold cathode FPD panel substrate in which the spacer member of the first example is disposed, and the cold cathode FPD panel substrate in which the emitter 220, the gate 230, the focusing electrode 240, and the like are formed on the rear glass substrate 210 are combined. The sealing is performed in a state where the space is evacuated. (S16)
In this manner, a cold cathode FPD panel using the spacer member 110 of this example shown in FIG. 6A is manufactured.

Next, the spacer member of the 2nd example of the spacer member in connection with this invention is given .
The second example has a cross section of the spacer portion shown in FIG. 2A, and has a configuration without the conductive layer on the surface of the insulator 115 in the first example of the spacer member according to the present invention .
The spacer member of this example is a case where it is not necessary to consider the charging of the spacer portion when it is used in a cathode FPD panel.
Except this, it is the same as the first example, and the description is omitted.
Of course, as a modification of this example, as shown in FIG. 2 (b), the width of the metal processed portion of each thin metal plate 111 is made different so that the cathode side when used in a panel is gradually moved toward the cathode side. The thing of the form which made the width | variety of the spacer wide is also mentioned.
In this case, compared with the second example , electrons do not collide with the surface of the spacer portion, and as a result, electrons are less accumulated on the surface of the spacer portion.

Subsequently, the spacer member of the 1st example of embodiment of the spacer member of this invention is given.
As in the first example of the spacer member according to the present invention, the first example is a spacer member for a cold cathode FPD panel. The spacer member is externally processed by etching and the spacer portion to be formed is formed in the thickness direction in the thickness direction. A thin metal plate 111 made of stainless steel is used, which is formed by integrally connecting metal processed portions having a shape corresponding to a part of the spacer corresponding to the thickness of the thin metal plate, which is divided by a plane orthogonal to A plurality of such thin metal plates 111 are aligned, and a part of the spacer portions of the thin metal plates are bonded and laminated through the glass layer 112 therebetween, and A spacer portion is formed by a part of the spacer portion and each glass layer 112.
Here, in the first example as well, the planar shape of the thin metal plate is the same as that of the first example of the spacer member according to the present invention shown in FIG.
The spacer member 110A of this example is used for a cold cathode FPD as shown in FIG. 6B, for example.
For example, the spacer member 110A of the present example is manufactured in the same manner as in the first example of the spacer member according to the present invention, by aligning the thin metal plates 111 and forming a glass plate for forming the glass layer 112. After the thin metal plates 111 are bonded to each other and laminated to form a laminated monolithic product, the exposed portions of the respective plate glasses are etched against the laminated monolithic product using the thin metal plate 111 as an etching resistant mask. Etched away.
In the first example, the thin metal plates 111 are insulated from each other by the glass layer 112, but in some cases, the surface of the spacer member 110A of the first example is coated with an insulator, and further, the insulation. A modification in which the conductive surface having a resistance value in the range of 1 × 10 ⁵ Ω / □ to 1 × 10 ⁶ Ω / □ is coated on the surface of the object is also a modification of the first example.

Space Sa member, a first example of a spacer member according to the present invention, the second example, the first example of the embodiment of the spacer member of the present invention is not limited to the modifications thereof.
In each of the above examples, as shown in FIG. 1A, the spacer portion is provided in a black matrix shape in the black matrix formation region 130 and across the boundary of the display unit portion (pixel) 120. However, the present invention is not limited to this. For example, as shown in FIG. 4, black is formed over the entire boundary of each subpixel (R, G, and B display units) 121 to 123 in the black matrix formation region 130. The form provided in the matrix shape is also mentioned.
Further, in the first example of the spacer member according to the present invention , the metal thin plates 111 are joined to each other by direct diffusion bonding, but copper, silver, gold and their alloys, A laminated plate-like product formed by joining metal thin plates plated with a metal having an easily diffusing property such as aluminum or an alloy thereof by diffusion bonding is replaced with the laminated plate-like product of the first example. Also mentioned.
Examples of the plating method here include electroplating, chemical plating, hot dipping, vacuum deposition, and sputtering.
Moreover, the form which laminates | stacks the metal thin plate 111 using an adhesive material, and the form performed by welding joining are also mentioned.
When the substrate for the cold cathode FPD panel is a glass substrate, the material of the metal thin plate 111 is 48 alloy (48Ni-52% Fe alloy), 426 alloy (42Ni-6% Cr-52) in terms of linear expansion coefficient. % Fe alloy) is particularly preferred.
Invar material (36% Ni-64% Fe alloy) is used in addition to stainless steel because it is hard to rust and is easy to handle.

1 (a) is a plan view of a portion of a first example of spacer members according to the present invention, a sectional view of a spacer portion in the A1-A2 of FIG. 1 (b) Fig. 1 (a), 1 ( c) is a cross-sectional view corresponding to FIG . 1B of a modification of the first example . 2 (a) is a sectional view of the spacer portion of the second example of the spacer member according to the present invention, FIG. 2 (b) is a sectional view corresponding to FIG. 1 (c) modification of the second embodiment. It is sectional drawing of the spacer part of the 1st example of embodiment of the spacer member of this invention. It is a plan view of a portion of a modified example of the first example of the spacer member according to the present invention. It is a figure for demonstrating the area | region which arrange | positions a spacer part. 6 (a) is in one cross-sectional view of a cold cathode FPD panel using the spacer member of the first example of the spacer member according to the present invention, FIG. 6 (b) the first embodiment of the spacer member of the present invention It is one sectional drawing of the cold cathode FPD panel using the spacer member of the example of. It is a process flow figure of one example of the manufacturing method of the spacer member of the 1st example of the spacer member concerning this invention , and the manufacturing method of the cold cathode FPD panel using this spacer member. It is the figure which showed the cross-sectional structure of one example of the conventional cold cathode FPD.

Explanation of symbols

110, 110A, 110a Spacer member 111 Metal thin plate 115 (unit) Insulator 117 Conductive layer 120 Display unit (pixel)
121-123 sub-pixels (R, G, B display units)
130 Black matrix area 200 FPD
200S (FPD) total display area 210 Rear glass substrate 220 Emitter 230 Gate electrode 240 Focusing electrode 250 Phosphor 255 Black matrix (also referred to as BM)
270 Transparent electrode (also called anode)
280 Front glass substrate 290 Electron 410 Rear glass substrate 420 Cathode 425 Microchip 430 Insulating layer 440 Gate 450 Spacer 460 Phosphor 470 Transparent electrode (also referred to as anode)
480 Front glass substrate

Claims (11)

  A spacer member for a cold cathode FPD panel, the outer shape of which is processed by etching, and the spacer portion to be formed is divided by a plane perpendicular to the thickness direction in the thickness direction. A metal thin plate formed by integrally connecting metal working portions for forming a spacer portion having a shape corresponding to a part of the metal working portion is used. Corresponding to the display area, the metal thin plate is disposed in the metal thin plate in a predetermined arrangement shape and is supported by the metal thin plate, and each metal processed portion is a part of the spacer portion. And a part of the spacer part of the thin metal plate is bonded and laminated through a glass layer therebetween, and a part of the spacer part of each thin metal plate and each glass layer form a spacer part. And The glass layer, a spacer member, characterized in that those formed by etching the glass sheet. A spacer member according to claim 1, coating the insulator on the front surface, the spacer member, wherein an insulating treatment is applied. The spacer member according to claim 2, wherein a conductive layer having a resistance value in a range of 1 × 10 ⁵ Ω / □ to 1 × 10 ⁶ Ω / □ is formed on the surface of the insulator. A spacer member.   The spacer member according to any one of claims 1 to 3, wherein the width of the metal processed portion of each thin metal plate is made different so that the cathode side when used in the panel is gradually moved toward the cathode side. A spacer member having a wide width.   5. The spacer member according to claim 1, wherein each of the metal thin plates has a thermal expansion coefficient close to that of the substrate of the cold cathode FPD panel.   The spacer member according to any one of claims 1 to 5, wherein a substrate of the cold cathode FPD panel is a glass material, and each of the metal thin plates is made of 48 alloy (48Ni-52% Fe alloy), 426 A spacer member characterized by being one of an alloy (42Ni-6% Cr-52% Fe alloy), Invar material (36% Ni-64% Fe alloy), and SUS material (stainless steel).   The spacer member according to any one of claims 1 to 6, wherein a corner portion of the outer side surface of the outermost metal sheet is chamfered in the thickness direction of the spacer.   The spacer member according to any one of claims 1 to 7, wherein each of the metal thin plates has a thickness in a range of 0.020 mm to 0.300 mm.   A substrate for a cold cathode FPD panel, wherein the spacer member according to any one of claims 1 to 8 is used.   A cold cathode FPD panel, wherein the spacer member is formed using the spacer member according to claim 1.   Using a plurality of thin metal plates that have been externally processed by etching, a portion of the spacer portions of each thin metal plate are bonded and laminated through a glass layer therebetween, and a portion of the spacer portions of each thin metal plate and each of the above A method for producing a spacer member for a cold cathode FPD panel in which a spacer portion is formed by a glass layer, and in order, (A) a resist pattern having a predetermined shape is disposed on each side of a metal plate material, Etching from both sides of the metal material using the resist pattern as an etching-resistant mask to process the outer shape to produce each of the metal thin plates, and (B) after the etching processing step, to each of the metal thin plates If necessary, washing treatment and drying treatment are performed, the thin metal plates are aligned, and a plate glass for forming the glass layer is interposed between the thin metal plates. Then, these are bonded to each other and laminated to produce a laminated integrated product, and (C) the exposed portion of each plate glass is etched using the metal thin plate as an etching resistant mask with respect to the laminated integrated product. The manufacturing method of the spacer member for cold cathode FPD panels characterized by performing the glass etching process of removing.

Images