JP4489853B2 - Semiconductor manufacturing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor manufacturing apparatus and a recipe editing method when a wafer is processed in the semiconductor manufacturing apparatus.
[0002]
[Prior art]
When processing a wafer with a semiconductor manufacturing apparatus, a recipe that records various processing conditions such as temperature, type of supply gas, pressure, and processing time is used.
[0003]
The schematic configuration of the semiconductor manufacturing apparatus will be described with reference to FIG. FIG. 10 shows a screen displayed on the monitor television, and this screen shows a schematic configuration of the semiconductor manufacturing apparatus.
[0004]
The semiconductor manufacturing apparatus is connected to a cassette stand 1, a transfer chamber 2 connected to the cassette stand 1, a loadock chamber 3 connected to the transfer chamber 2, and a load chamber 3 connected to the loadock chamber 3. A heating chamber 5 and a transfer chamber 6 are connected to the heating chamber 5, and processing chambers R 1 and R 2 are connected to the transfer chamber 6. The transfer chamber 6 has another transfer chamber 10 and a transfer chamber 11. Are arranged in a straight line, processing chambers R3, R4 are connected to the transfer chamber 10, and processing chambers R5, R6, R7 are connected to the transfer chamber 11 in a radial pattern. The chamber 10 is connected to the transfer chamber 6 via a buffer chamber 9, and the transfer chamber 11 is connected to the transfer chamber 10 via a buffer chamber 14. The substrate that has been processed in the processing chamber R 7 is returned to the cassette stand 1 by the transfer chamber 19 through the cooling chamber 18.
[0005]
The semiconductor manufacturing apparatus includes an input device such as a keyboard and a display device such as a CRT, and a program for performing recipe creation, setting, and the like is input to the storage medium of the main control device in advance. When creating a recipe or changing the created recipe, start the program, enter the recipe editing mode, load a file in which a predetermined recipe is set, and display it on the monitor screen, for example, FIG. Display the recipe setting screen as shown.
[0006]
The setting screen displays the reaction chamber and the setting items to be set for each reaction chamber. The setting items include, for example, processing time, supply power for plasma generation, reaction chamber pressure, supply gas type, supply flow rate, etc. It is.
[0007]
A predetermined condition is input by an input device such as a keyboard. In addition, a matter to be corrected or a matter to be set is designated and a numerical value is input or a numerical value is corrected.
[0008]
When the input is completed, the file in which the recipe is recorded is stored in the recording medium.
[0009]
When processing is performed, the process is executed by designating the created or modified recipe file for each processing chamber using the input device.
[0010]
The processing state during driving is displayed on the monitor television, and FIG. 10 shows a monitor screen displaying the processing state during driving.
[0011]
As described above, the monitor screen displays the configuration of the semiconductor manufacturing apparatus, the file name of the recipe designated for each processing chamber, and the remaining time required to complete the recipe. The progress of processing can be confirmed.
[0012]
[Problems to be solved by the invention]
In the conventional semiconductor manufacturing apparatus described above, one recipe is set for one processing chamber to perform processing. Accordingly, only one type of film quality can be processed at a time in one processing chamber. For this reason, when processing different types of films in one processing chamber, a plurality of recipe files are created, and each time the processing is completed, the operation of calling and setting different files is repeated. For this reason, the workability is poor, and the worker must always monitor the progress of processing, and there is a problem that the number of devices that the worker is in charge of is limited. Only the remaining time of the recipe is displayed, and which stage of the plurality of recipes to be set is performed is based on the memory judgment of the worker, which is one of the factors of human error.
[0013]
In view of such a situation, the present invention is intended to allow a plurality of processes to be performed continuously in one processing chamber, to improve the processing efficiency and to suppress the occurrence of human error during the processing.
[0014]
[Means for Solving the Problems]
In a semiconductor manufacturing apparatus having a plurality of processing chambers, the present invention performs processing in one processing chamber based on a processing chamber recipe and time-divides the processing in the processing chamber, for each divided section. A corresponding step recipe is created, the processing chamber recipe is configured by the step recipe, and the processing conditions are related to the semiconductor manufacturing method set for each step recipe, and an arbitrary step recipe of the processing chamber recipe is designated. The present invention relates to a semiconductor manufacturing method that starts processing, and the editing of the step recipe is related to a semiconductor manufacturing method that is created based on a copy of another step recipe, and the processing chamber recipe is created based on a copy of another processing chamber recipe. At least a recipe creation screen and a processing status screen for creating recipes related to processing conditions in a plurality of processing chambers and processing chambers are displayed. In a semiconductor manufacturing apparatus having at least a display device, a storage device in which a program such as a recipe execution program is recorded, and an arithmetic unit for executing the program, a plurality of step recipes in which the recipe is time-divided in each processing chamber The calculation unit is related to a semiconductor manufacturing apparatus that can start processing from an arbitrary step recipe of a recipe, and the display device has a step display bar that indicates the progress of processing steps. The display unit includes at least grids corresponding to the number of steps, and the grids relate to a semiconductor manufacturing apparatus that lights up according to the progress of the steps.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0016]
First, an outline of a semiconductor manufacturing apparatus in which the present invention is implemented will be described with reference to FIG.
[0017]
A load lock chamber 21, a heating chamber 22, and processing chambers R 1, R 2, R 3, R 4, R 5, and R 6 are radially connected to the vacuum transfer chamber 20, and a cassette stand 23 is connected to the load lock chamber 21. ing. A vacuum transfer robot 24 is provided in the vacuum transfer chamber 20, and an atmospheric transfer robot 25 is provided in the cassette stand 23.
[0018]
A substrate to be processed is transported to the cassette stand 23 in a state of being loaded in a cassette, and the atmospheric transfer robot 25 carries the substrate from the cassette of the cassette stand 23 into the load lock chamber 21. The vacuum transfer robot 24 transfers the substrate between the load lock chamber 21 and the heating chamber 22 and between the heating chamber 22 and the processing chambers R1, R2, R3, R4, R5, R6. . In the processing chambers R 1, R 2, R 3, R 4, R 5, R 6, processing according to the processing chamber recipe is performed, and the processed substrate is transferred to the load lock chamber 21, and further, the cassette stand is moved by the atmospheric transfer robot 25. It is conveyed in 23 cassettes.
[0019]
In the present invention, processing in the processing chamber is time-divided into required steps so that a plurality of different processings can be performed continuously in one processing chamber, a step recipe is set for each step, and a plurality of step recipes are set as recipes. These are connected by an execution program to constitute one processing chamber recipe. Further, the recipe execution program has a skip command so that the processing can be executed in units of step recipes when executing the processing chamber recipe, and the start step is designated when the recipe execution program is operated. Alternatively, the skip command is executed by designating a step name to be skipped halfway, and the process is started from the designated step or the process is skipped from the designated step.
[0020]
Also, a recipe copy program is provided so that a step recipe or processing chamber recipe can be created using a copy function. That is, when the same recipe is executed in other steps, the recipe can be copied to improve the efficiency of the recipe work. Copying is possible not only between step recipes but also between process chamber recipes.
[0021]
With reference to FIG. 2, the outline of the control apparatus 40 of the semiconductor manufacturing apparatus according to the present invention will be described.
[0022]
The control device 40 mainly includes a calculation unit 41 for performing various calculations and controls, a display device 42, a memory 43 for storing data necessary for calculation and display, instructions necessary for operating the semiconductor manufacturing apparatus, or recipe creation. Operating semiconductor manufacturing apparatuses such as an input device 44 for inputting necessary data, a sequence program 47 for operating the semiconductor manufacturing apparatus, a recipe execution program 48 for executing the created recipe, and a recipe copy program 49 The display device 42 and the input device 44 are connected to the arithmetic unit 41 via an input / output unit 46. The hard disk unit 45 and the like are recorded with various programs and semiconductor manufacturing recipes. Yes.
[0023]
Hereinafter, the operation of recipe setting will be described.
[0024]
FIG. 4 shows a screen at the time of recipe setting and correction, and FIG. 4 shows an example in which the process is time-divided into five steps, that is, step 1, step 2, step 3, step 4, and step 5. .
[0025]
The setting screen has a structure in which various parameters for determining processing conditions, such as discharge time, processing chamber pressure, high frequency power, gas flow rate, electrode interval, gas type and required divided steps are displayed in a matrix. In the case of setting one step recipe, step 1 is selected by the input device 44, and further, a predetermined discharge time, processing chamber pressure, high frequency power, gas flow rate, electrode interval, gas type, etc. in the column of step 1 are selected. Or select the parameter you want to modify and enter the value. When the input for step 1 is completed, the hard disk device 45 records and saves it.
[0026]
This setting operation is performed for every step for each step.
[0027]
In order to improve the efficiency of the recipe editing work, a copy function by the recipe copy program 49 is provided. A copy button 30 is displayed on the setting screen, and when the copy button 30 is clicked, the recipe copy program 49 is started. The copy function can be used for copying between step recipes in the same processing chamber recipe or copying between different processing chamber recipes.
[0028]
When using the copy function within the same processing chamber recipe, the setting values between steps may be very similar. For example, a case where a step recipe for step 1 in FIG. 4 is created and then copied to step 2 will be described with reference to FIG.
[0029]
FIG. 3 shows a flowchart of the recipe copy program 49 described above. First, the copy button 30 is clicked to activate the recipe copy program 49 to enter the copy processing state. Click the Step 2 button in the screen to specify Step 2 as the copy destination. By specifying the step 2, the step recipe copy mode is set. Next, click the button of Step 1 that is the copy source. Copying is executed, and the data of step 1 is loaded and displayed on the setting screen of step 2. If there is a different part, the item of that part is designated, the data is corrected by the input device 44, and after correction, the data is recorded in the hard disk device 45, and the recipe creation operation in step 2 is completed.
[0030]
Furthermore, when there is a parallel processing chamber that performs the same processing, a processing chamber recipe of an arbitrary processing chamber can be copied as a processing chamber recipe of another processing chamber. For example, when the processing chamber R1 and the processing chamber R2 perform the same processing, after the processing chamber recipe is edited in the processing chamber R1, the copy button 30 is clicked on the screen in FIG.
[0031]
The recipe copy program 49 shown in the flowchart of FIG. 3 is activated and enters a copy processing state. Click the processing chamber R2 button in the screen to specify the processing chamber R2 as the copy destination. By designating the processing chamber R2, the processing chamber recipe copy mode is set. Next, the button of the processing chamber R1, which is the copy source, is clicked. Copying is executed, and the processing chamber recipe of the processing chamber R1 is loaded and displayed on the setting screen of the processing chamber R2. If there is a different portion, the item of that portion is designated, the data is corrected by the input device 44, and after correction, the data is recorded in the hard disk device 45, and the processing chamber recipe creation work of the processing chamber R2 is completed.
[0032]
When creation of a recipe related to a series of processes is completed, a file name is set and recorded and stored in the hard disk device 45.
[0033]
In FIG. 4, 31 is a file call button, which is clicked when calling a file to be corrected or edited, or clicked when storing a created or corrected file.
[0034]
During the processing of the semiconductor manufacturing apparatus, the display device 42 displays the screen shown in FIG. On the display screen, an apparatus layout diagram 32 showing an outline of the semiconductor manufacturing apparatus, and display units D1, D2, D3, D4, D5, and D6 indicating the processing progress of each processing chamber are arranged. A display unit 33 for indicating different chambers, a file name display unit 34 for the processing chamber recipe, a remaining time display unit 35 for the recipe being executed, and a process progress status, that is, a step indicating which step is being processed. A display bar 36 is provided.
[0035]
The step display bar 36 is continuously provided with cells corresponding to the number of time divisions in the processing room recipe, and cells indicating each state such as preparatory processing, step processing, termination processing, and normal termination. It can be blinked for each cell and the display color is changed.
[0036]
The semiconductor manufacturing process using the edited step recipe will be described with reference to FIG.
[0037]
The input device 44 inputs and sets the name of a file in which a processing room recipe corresponding to the process is stored.
[0038]
A processing chamber is designated, an execution command for the recipe execution program 48 is issued, and a start step number is designated. The number of start steps is 1 when the previous process is normally performed.
[0039]
The start step number and the end step number of the recipe execution program 48 are compared. Here, the previous execution result of the processing chamber recipe is stored in the memory 43 through the arithmetic unit 41, and is stored in the memory 43 when the processing of the processing chamber recipe is normally completed and the process processing is completed. The number of steps is zero. If the processing of all the steps of the processing chamber recipe is not completed for some reason, the last number of steps completed normally is stored in the memory 43.
[0040]
As a result of the comparison between the start step number and the end step number, if the start step number is small, the step recipe of the start step number is taken from the hard disk device 45, the step recipe of the start step is executed, and the recipe The process is executed.
[0041]
It is determined whether or not the step recipe has been completed normally. If the step recipe has been completed normally, 1 is added to the number of steps of the corresponding completed step recipe to obtain a new start step number. And the end step are compared. If the newly designated start step number is equal to or smaller than the end step number, the step recipe of the next step is further taken in and the process continues. If the new start step number is larger than the end recipe step number as a result of the comparison, the process process ends.
[0042]
If it is determined that the process of the step recipe has not ended normally due to an abnormality or the like during the process process, the process is stopped and 1 is subtracted from the number of steps of the step recipe that has not ended normally. The number of steps is stored in the memory 43. When the process is resumed, the number of stored steps, that is, the sum of the last number of successfully completed steps is designated as the start step number. Accordingly, the step that has been normally completed is skipped, and the process is started from the step recipe that has not been normally completed.
[0043]
During the execution of the recipe execution program 48, a lighting command signal is issued to the step display bar drive control unit 51 described later. For example, the result of comparison between the number of process end steps and the number of next process steps, the progress status of the recipe process, the determination result of whether or not the step recipe has ended normally, and the signal related to the recipe process status are the step display bar drive control Input to the unit 51.
[0044]
Next, the step display bar drive control unit 51 that controls the step display bar 36 of the display device 42 will be described with reference to FIG.
[0045]
A step display bar 36-1, a step display bar 36-2,..., A step display bar 36-6 corresponding to each of the processing chambers R1, R2, R3, R4, R5, R6 are a display driver 53-1, a display, respectively. The driver 53-2,..., And the display driver 53-6 are lit in a predetermined color. The display driver 53-1, the display driver 53-2,..., And the display driver 53-6 are driven based on a control signal from the determination unit 52.
[0046]
As described above, a lighting command signal is issued during the execution of the recipe execution program 48. The lighting command signal is input to the determination unit 52. The determination unit 52 determines which processing chamber the lighting command signal relates to, and also determines the number of steps and whether it has been normally completed. The number corresponding to the number of steps is turned on, and a color corresponding to the progress state and end state of the process is developed.
[0047]
For example, the relationship between the processing in the processing chamber R1 and the display state of the step display bar 36 will be described with reference to FIG. 8. The first cell a of the step display bar 36 is a display indicating that the preparation process is in progress. Then, for example, it is lit in light blue and lit in green when processing is completed. When the preparation process is completed, the step recipe of step 1 is executed. In the state in which the step recipe of step 1 is being executed, the second cell b lights up in light blue, and further changes from light blue to green according to the progress state. Indicates that the process has been completed. Similarly, as the step progresses, the lighting of the cells increases sequentially, and when step 5 ends, the cell f lights up in green. Next, an end process is performed, and when completed, the cell g is lit green to indicate that the process chamber recipe has been completed normally.
[0048]
If the processing chamber recipe does not end normally, the lighting of the cell stops at the cell when there is an abnormality. Accordingly, the display of the step display bar 36 can visually determine at which point an abnormality has occurred. Further, when the vehicle stops due to an abnormality, the abnormal stop is further clarified by turning on the red of the cell at the time of stopping. Further, since the remaining step processing time is displayed on the remaining time display section 35 of the recipe, it can be determined in which state the abnormal stop has occurred.
[0049]
In the case of abnormal termination, it is possible to continue processing again after removing the cause of the abnormal termination. As described above, since it is known at which point the abnormal end has occurred, the process is started by designating the step next to the step that ended normally by the skip command. As a result, all steps can be completed without executing normally completed steps twice, and the occurrence of defective substrates can be prevented.
[0050]
【The invention's effect】
As described above, according to the present invention, since processing is executed by a plurality of step recipes for one processing chamber, a plurality of processing can be performed in one processing chamber, and it is not necessary to set a recipe each time. Therefore, workability and operation rate are improved. In addition, since a process can be started by specifying a step recipe, unnecessary processes can be omitted, generation of defective products can be prevented, and step recipes and process room recipes can be edited based on copies, and similar processes are performed. In this case, the recipe work can be performed much more easily and quickly. Furthermore, it is possible to confirm at a glance how far the processing has progressed with the step display bar, and to demonstrate various excellent effects such as easily grasping the processing status.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a semiconductor manufacturing apparatus in which the present invention is implemented.
FIG. 2 is a block diagram of a control device according to an embodiment of the present invention.
FIG. 3 is a flowchart for copying a recipe according to the embodiment of this invention.
FIG. 4 is an explanatory diagram showing a display screen according to the embodiment of the present invention.
FIG. 5 is an explanatory diagram showing a display screen according to the embodiment of the present invention.
FIG. 6 is a flowchart in the case of executing the recipe according to the embodiment of the present invention.
FIG. 7 is a block diagram of a step display bar drive control unit according to an embodiment of the present invention.
FIG. 8 is an explanatory diagram showing an operation of a step display bar in the display screen according to the embodiment of the present invention.
FIG. 9 is an explanatory diagram showing a display screen of a conventional example.
FIG. 10 is an explanatory diagram showing a display screen of a conventional example.
[Explanation of symbols]
20 Vacuum transfer chamber 24 Vacuum transfer robot 25 Atmospheric transfer robot 30 Copy button 31 File call button 36 Step display bar 40 Control device 42 Display device 43 Memory 45 Hard disk device 48 Recipe execution program 49 Recipe copy program 51 Step display bar drive controller 52 Determination unit R1 Processing chamber R2 Processing chamber R3 Processing chamber R4 Processing chamber R5 Processing chamber R6 Processing chamber D1 Display unit D2 Display unit D3 Display unit D4 Display unit D5 Display unit D6 Display unit

Claims (3)

A plurality of processing chambers, a recipe creation screen for creating a recipe regarding processing conditions in the processing chamber, a display device for displaying at least a processing status screen, a storage device in which a program such as a recipe execution program is recorded, and executing the program In a semiconductor manufacturing apparatus having at least a calculation unit that performs the above process, the recipe is composed of a plurality of step recipes time-divided in each processing chamber, and the recipe execution program is skipped so that the process can be executed in units of step recipes. Has a command,
The arithmetic unit executes the skip command by specifying the starting step, by which enables to start processing from any step recipe of the recipe, when the process at step recipe is judged not to be completed successfully A semiconductor manufacturing apparatus characterized in that the last step completed normally is designated as a start step, the step completed normally is skipped, and the process is started from a step recipe that did not end normally .   2. The semiconductor manufacturing apparatus according to claim 1, wherein the processing condition is at least one of temperature, type of supply gas, pressure, and processing time.   2. The semiconductor manufacturing apparatus according to claim 1, wherein parameters for determining the processing conditions are displayed, and at least one of discharge time, processing chamber pressure, high frequency power, gas flow rate, electrode interval, and gas type is set as the parameters.

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