JP4482659B2 - 誘電特性測定評価方法 - Google Patents
誘電特性測定評価方法 Download PDFInfo
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- JP4482659B2 JP4482659B2 JP2004113178A JP2004113178A JP4482659B2 JP 4482659 B2 JP4482659 B2 JP 4482659B2 JP 2004113178 A JP2004113178 A JP 2004113178A JP 2004113178 A JP2004113178 A JP 2004113178A JP 4482659 B2 JP4482659 B2 JP 4482659B2
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Description
GPS信号を受信して恒温型水晶発振器に位相固定し、基準周波数信号を発生する工程と、
前記基準周波数信号を用いるネットワークアナライザにより、前記測定試料及び標準試料が空洞共振器に未挿入状態の基準共振周波数を測定する工程と、
比誘電率値が既知の標準試料を前記空洞共振器に挿入して、前記ネットワークアナライザにより共振周波数を測定する工程と、
前記測定した標準試料の測定共振周波数と、前記空洞共振器に測定試料及び標準試料が未挿入状態の基準共振周波数との差分から、前記標準試料の比誘電率実測値を下記数1により算出する工程と、
前記算出した標準試料の比誘電率実測値と、該標準試料の既知の比誘電率値とから補正係数を算出する工程と、
前記測定試料を前記空洞共振器に挿入し、前記ネットワークアナライザにより共振周波数を測定する工程と、
前記測定した測定試料の測定共振周波数と前記空洞共振器に測定試料及び標準試料が未挿入状態の前記基準共振周波数との差分と、前記補正係数とを用いて該測定試料の比誘電率値を下記数2により算出する工程と、
を含むことを特徴としている。
なお、εT'は測定試料Tの比誘電率、F0は測定試料なしの共振周波数、FTは測定試料T挿入時の共振周波数、αは共振モード係数、SCは共振器の断面積、STは測定試料Tの断面積、K'は比誘電率補正係数である。また、εT''は測定試料Tの誘電損失、Q0は測定試料なしのQ値、QTは測定試料T挿入時のQ値、αは共振モード係数、SCは共振器の断面積、STは測定試料Tの断面積、K''は誘電損失補正係数である。
この補正係数K'の値を表2に示す。
2 ネットワークアナライザ
3 アッテネータ
4 基準信号発生器(GPS周波数基準信号発生器)
5 同軸ケーブル
6 同軸ケーブル
Claims (2)
- 標準試料及び有機絶縁材料の測定試料が挿入可能に形成され、入力された周波数信号に対し共振周波数を返す空洞共振器と、受信したGPS信号を恒温型水晶発振器に位相固定することにより発生された基準周波数信号を用いると共に、前記空洞共振器から返された共振周波数を測定するネットワークアナライザとを備えた誘電特性測定評価システムを用いて、該有機絶縁材料の比誘電率値を測定評価する誘電特性測定評価方法であって、
GPS信号を受信して恒温型水晶発振器に位相固定し、基準周波数信号を発生する工程と、
前記基準周波数信号を用いるネットワークアナライザにより、前記測定試料及び標準試料が空洞共振器に未挿入状態の基準共振周波数を測定する工程と、
比誘電率値が既知の標準試料を前記空洞共振器に挿入して、前記ネットワークアナライザにより共振周波数を測定する工程と、
前記測定した標準試料の測定共振周波数と、前記空洞共振器に測定試料及び標準試料が未挿入状態の基準共振周波数との差分から、前記標準試料の比誘電率実測値を下記数1により算出する工程と、
前記算出した標準試料の比誘電率実測値と、該標準試料の既知の比誘電率値とから補正係数を算出する工程と、
前記測定試料を前記空洞共振器に挿入し、前記ネットワークアナライザにより共振周波数を測定する工程と、
前記測定した測定試料の測定共振周波数と前記空洞共振器に測定試料及び標準試料が未挿入状態の前記基準共振周波数との差分と、前記補正係数とを用いて該測定試料の比誘電率値を下記数2により算出する工程と、
を含むことを特徴とする誘電特性測定評価方法。
- 前記標準試料は、石英、サファイア、MgO、AlNのいずれかの基板を加工形成した試料であることを特徴とする請求項1に記載された誘電特性測定評価方法。
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Cited By (3)
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CN103308778A (zh) * | 2013-07-03 | 2013-09-18 | 四川大学 | 介电常数测量装置 |
CN105954595A (zh) * | 2016-04-20 | 2016-09-21 | 中国科学院遥感与数字地球研究所 | 一种叶片介电常数测量装置及测量方法 |
CN105974205A (zh) * | 2016-07-22 | 2016-09-28 | 四川大学 | 同轴一维钢筋混凝土构件混凝土介电常数测量设备和方法 |
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JP2016148627A (ja) * | 2015-02-13 | 2016-08-18 | 日新電機株式会社 | 高分子材料の劣化診断方法、及び高分子材料の劣化診断装置 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103308778A (zh) * | 2013-07-03 | 2013-09-18 | 四川大学 | 介电常数测量装置 |
CN103308778B (zh) * | 2013-07-03 | 2015-08-19 | 四川大学 | 介电常数测量装置 |
CN105954595A (zh) * | 2016-04-20 | 2016-09-21 | 中国科学院遥感与数字地球研究所 | 一种叶片介电常数测量装置及测量方法 |
CN105954595B (zh) * | 2016-04-20 | 2020-07-03 | 中国科学院遥感与数字地球研究所 | 一种叶片介电常数测量装置及测量方法 |
CN105974205A (zh) * | 2016-07-22 | 2016-09-28 | 四川大学 | 同轴一维钢筋混凝土构件混凝土介电常数测量设备和方法 |
CN105974205B (zh) * | 2016-07-22 | 2018-08-14 | 四川大学 | 同轴一维钢筋混凝土构件混凝土介电常数测量设备和方法 |
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