JP4478651B2 - IMAGING DEVICE, CCD TYPE SOLID-STATE IMAGING ELEMENT MOUNTED ON THE IMAGING DEVICE, AND ITS DRIVING METHOD - Google Patents

IMAGING DEVICE, CCD TYPE SOLID-STATE IMAGING ELEMENT MOUNTED ON THE IMAGING DEVICE, AND ITS DRIVING METHOD Download PDF

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JP4478651B2
JP4478651B2 JP2006016612A JP2006016612A JP4478651B2 JP 4478651 B2 JP4478651 B2 JP 4478651B2 JP 2006016612 A JP2006016612 A JP 2006016612A JP 2006016612 A JP2006016612 A JP 2006016612A JP 4478651 B2 JP4478651 B2 JP 4478651B2
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民 太田
俊介 田中
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Description

本発明は撮像装置及びこの撮像装置に搭載するCCD(Charge Coupled Devices:電荷結合素子)型固体撮像素子とその駆動方法に係り、特に、水平転送路(HCCD)における画素加算を容易に行うことが可能な撮像装置及びCCD型固体撮像素子並びにその駆動方法に関する。   The present invention relates to an image pickup apparatus, a CCD (Charge Coupled Device) type solid-state image pickup element mounted on the image pickup apparatus, and a driving method thereof. In particular, pixel addition in a horizontal transfer path (HCCD) can be easily performed. The present invention relates to a possible imaging device, a CCD solid-state imaging device, and a driving method thereof.

下記特許文献1に、水平転送路(HCCD)で画素加算を行うCCD型固体撮像素子が記載されている。このCCD型固体撮像素子は、複数列設けられた各垂直転送路の末端部分と水平転送路との接続箇所に信号電荷を一時蓄積するメモリ部(水平転送路に沿って設けられるため、ラインメモリ(LM)と呼ばれる。)を備えている。そして、ラインメモリが各垂直転送路から受け取った信号電荷を水平転送路に移動させるタイミングを、水平転送路における信号電荷の転送駆動に合わせて調整し、水平方向の画素加算を行っている。   Patent Document 1 below describes a CCD solid-state imaging device that performs pixel addition in a horizontal transfer path (HCCD). This CCD type solid-state imaging device is a memory unit that temporarily accumulates signal charges at the connection point between the end portion of each vertical transfer path provided in a plurality of rows and the horizontal transfer path (because it is provided along the horizontal transfer path, (Referred to as (LM)). Then, the timing at which the line memory moves the signal charge received from each vertical transfer path to the horizontal transfer path is adjusted in accordance with the signal charge transfer drive in the horizontal transfer path to perform horizontal pixel addition.

特開2002―112119号公報JP 2002-112119 A

従来のCCD型固体撮像素子では、ラインメモリ全体が1相駆動であるため、水平方向の転送駆動を複雑に行ってラインメモリの1相駆動に整合させないと、水平方向の画素加算を的確に行うことができず、撮像素子の駆動タイミングの作成が面倒で製造コストが嵩んでしまうという問題がある。   In the conventional CCD type solid-state imaging device, the entire line memory is driven in one phase. Therefore, if the horizontal transfer drive is complicated and not matched with the one-phase drive of the line memory, the pixel addition in the horizontal direction is performed accurately. In other words, it is difficult to create the drive timing of the image sensor and the manufacturing cost increases.

本発明の目的は、水平転送路の転送駆動を簡単にできしかも水平方向の画素加算を的確に行うことが可能な撮像装置及びこの撮像装置に搭載されるCCD型固体撮像素子並びにその駆動方法を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide an image pickup apparatus that can easily perform transfer driving of a horizontal transfer path and accurately perform pixel addition in the horizontal direction, a CCD solid-state image pickup device mounted on the image pickup apparatus, and a driving method thereof. It is to provide.

本発明のCCD型固体撮像素子は、半導体基板表面部にアレイ状に配列形成された複数のフォトダイオードから読み出された信号電荷を垂直方向に転送する複数の垂直転送路と、各垂直転送路によって転送されてきた前記信号電荷を受け取り水平方向に転送する水平転送路と、前記垂直転送路毎に設けられた信号電荷一時蓄積部がバリアを挟んで水平方向に連続することで構成され前記水平転送路と複数の前記垂直転送路の各端部との間に設けられたラインメモリであって各々の前記信号電荷一時蓄積部はパルス信号のハイレベルが印加されたとき対応する前記垂直転送路から受け取った前記信号電荷を一時蓄積し所要タイミングで前記パルス信号のローレベルが印加されたとき該信号電荷を前記水平転送路に移すラインメモリとを備えるCCD型固体撮像素子において、前記ラインメモリを、連続する2つの前記信号電荷一時蓄積部毎に水平方向に分割した分割ラインメモリで構成し、各分割ラインメモリを複数相の前記パルス信号で駆動すると共に、各分割ラインメモリの前記2つの前記信号電荷一時蓄積部に同じ前記パルス信号を印加する電極配線を設けたことを特徴とする。 The CCD type solid-state imaging device of the present invention includes a plurality of vertical transfer paths that transfer signal charges read from a plurality of photodiodes arrayed on the surface of a semiconductor substrate in the vertical direction, and each vertical transfer path. A horizontal transfer path that receives the signal charges transferred by the horizontal transfer path and transfers them in the horizontal direction, and a signal charge temporary storage section provided for each of the vertical transfer paths is continuous in the horizontal direction with a barrier interposed therebetween. A line memory provided between a transfer path and each end of the plurality of vertical transfer paths, wherein each of the signal charge temporary storage units corresponds to the vertical transfer path when a high level of a pulse signal is applied C and a line memory to transfer the signal charges to the horizontal transfer path when the low level of the pulse signal is applied by the temporary storage to the required timing the signal charge received from In the D-type solid-state imaging device, the line memory is constituted by dividing the line memory divided into a horizontal direction for each two of the signal charge temporary storage portion continuing to drive the divided line memory in the pulse signal of a plurality of phases In addition, an electrode wiring for applying the same pulse signal to the two signal charge temporary storage portions of each divided line memory is provided.

本発明のCCD型固体撮像素子は、前記半導体基板表面部に配列形成された奇数行の前記フォトダイオードが偶数行の前記フォトダイオードに対して1/2ピッチづつずらして形成されていることを特徴とする。   The CCD type solid-state imaging device of the present invention is characterized in that the odd-numbered photodiodes arrayed on the surface of the semiconductor substrate are formed so as to be shifted by 1/2 pitch with respect to the even-numbered photodiodes. And

本発明のCCD型固体撮像素子の駆動方法は、上記記載のCCD型固体撮像素子の駆動方法であって、前記分割ラインメモリを複数相のパルス信号で駆動して該水平転送路上で信号電荷の加算を行うことを特徴とする。 The driving method of the CCD solid-state imaging device of the present invention is a driving method of the CCD solid-state imaging device as described above, the driven front Symbol dividing line memories a pulse signal of a plurality of phases signal charge horizontal transfer path Is added.

本発明のCCD型固体撮像素子の駆動方法では、前記信号電荷の加算は、水平方向に隣接する同一色の信号電荷間で行うことを特徴とする。   In the method for driving a CCD solid-state imaging device according to the present invention, the addition of the signal charges is performed between signal charges of the same color adjacent in the horizontal direction.

本発明の撮像装置は、上記記載のCCD型固体撮像素子と、上記記載の駆動方法を実現するタイミングのパルス信号を発生させる駆動手段とを備えることを特徴とする。   An image pickup apparatus according to the present invention includes the CCD solid-state image pickup device described above and a drive unit that generates a pulse signal at a timing for realizing the drive method described above.

本発明によれば、ラインメモリを水平方向に複数に分割し、各分割ラインメモリを複数相のパルスで駆動するため、水平転送路を駆動する転送パルスを定周期パルスとすることができ、水平転送路上での画素加算が容易となる。   According to the present invention, the line memory is divided into a plurality of lines in the horizontal direction, and each divided line memory is driven with a plurality of phase pulses. Therefore, the transfer pulse for driving the horizontal transfer path can be set as a fixed period pulse. Pixel addition on the transfer path is facilitated.

以下、本発明の一実施形態について、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図1は、本発明の一実施形態に係るデジタルカメラの機能構成図である。このデジタルカメラは、撮像部1と、撮像部1から出力されるアナログの画像データを自動利得調整(AGC)や相関二重サンプリング処理等のアナログ処理するアナログ信号処理部2と、アナログ信号処理部2から出力されるアナログ画像データをデジタル画像データに変換するアナログデジタル変換部(A/D)3と、後述のシステム制御部(CPU)9からの指示によってA/D3,アナログ信号処理部2,撮像部1の駆動制御を行う駆動部(後述する読出パルスや垂直転送パルス、水平転送パルスφH1,φH2、ラインメモリ駆動パルスφLM1〜φLM4等を発生するタイミングジェネレータTGを含む)4と、CPU9からの指示によって発光するフラッシュ5とを備える。   FIG. 1 is a functional configuration diagram of a digital camera according to an embodiment of the present invention. The digital camera includes an imaging unit 1, an analog signal processing unit 2 that performs analog processing such as automatic gain adjustment (AGC) and correlated double sampling processing on analog image data output from the imaging unit 1, and an analog signal processing unit. 2, analog / digital conversion unit (A / D) 3 for converting analog image data output to digital image data, and A / D 3, analog signal processing unit 2, in response to an instruction from a system control unit (CPU) 9 described later. A drive unit (including a timing pulse TG that generates read pulses, vertical transfer pulses, horizontal transfer pulses φH1 and φH2, line memory drive pulses φLM1 to φLM4, etc., which will be described later) that controls the drive of the imaging unit 1, and a CPU 9 And a flash 5 that emits light according to instructions.

撮像部1は、被写界からの光を集光する光学レンズ系1aと、該光学レンズ系1aを通った光を絞る絞りやメカニカルシャッタ1bと、光学レンズ系1aによって集光され絞りによって絞られた光を受光し撮像画像データ(アナログ画像データ)を出力するCCD型固体撮像素子100とを備える。   The imaging unit 1 includes an optical lens system 1a that condenses light from the object scene, a diaphragm or a mechanical shutter 1b that condenses the light that has passed through the optical lens system 1a, and a diaphragm that is condensed by the optical lens system 1a. A CCD type solid-state imaging device 100 that receives the received light and outputs captured image data (analog image data).

本実施形態のデジタルカメラは更に、A/D3から出力されるデジタル画像データを取り込み補間処理やホワイトバランス補正,RGB/YC変換処理等を行うデジタル信号処理部6と、画像データをJPEG形式などの画像データに圧縮したり逆に伸長したりする圧縮/伸長処理部7と、メニューなどを表示したりスルー画像や撮像画像を表示する表示部8と、デジタルカメラ全体を統括制御するシステム制御部(CPU)9と、フレームメモリ等の内部メモリ10と、JPEG画像データ等を格納する記録メディア12との間のインタフェース処理を行うメディアインタフェース(I/F)部11と、これらを相互に接続するバス20とを備え、また、システム制御部9には、ユーザからの指示入力を行う操作部13が接続されている。   The digital camera according to the present embodiment further includes a digital signal processing unit 6 that takes in digital image data output from the A / D 3 and performs interpolation processing, white balance correction, RGB / YC conversion processing, and the like. A compression / expansion processing unit 7 that compresses or decompresses the image data, a display unit 8 that displays a menu or the like, displays a through image or a captured image, and a system control unit that performs overall control of the entire digital camera ( CPU) 9, an internal memory 10 such as a frame memory, and a media interface (I / F) unit 11 that performs an interface process between a recording medium 12 that stores JPEG image data and the like, and a bus that interconnects them. The system control unit 9 is connected to an operation unit 13 for inputting instructions from the user.

図2は、図1に示すCCD型固体撮像素子100の表面模式図である。図示する例のCCD型固体撮像素子の半導体基板上には、多数のフォトダイオード101が二次元アレイ状に配列形成され、奇数行のフォトダイオード101に対して偶数行のフォトダイオード101が1/2ピッチづつずらして配置され、所謂、ハニカム画素配列となっている。   FIG. 2 is a schematic view of the surface of the CCD solid-state imaging device 100 shown in FIG. A large number of photodiodes 101 are arranged in a two-dimensional array on the semiconductor substrate of the CCD type solid-state imaging device in the example shown in the figure, and even-numbered photodiodes 101 are ½ of odd-numbered photodiodes 101. They are arranged at different pitches to form a so-called honeycomb pixel array.

各フォトダイオード101上に図示した「R」「G」「B」は各フォトダイオード上に積層されたカラーフィルタの色(赤=R,緑=G,青=B)を表しており、各フォトダイオード101は、3原色のうちの1色の受光量に応じた信号電荷を蓄積する。   “R”, “G”, and “B” illustrated on each photodiode 101 represent the color of the color filter (red = R, green = G, blue = B) stacked on each photodiode. The diode 101 accumulates signal charges corresponding to the amount of received light of one of the three primary colors.

半導体基板表面の水平方向には、各フォトダイオード101を避けるように蛇行して垂直転送電極が敷設されている。半導体基板には垂直方向に並ぶフォトダイオード列の側部に図示しない埋め込みチャネルが、フォトダイオード101を避けるように垂直方向に蛇行して形成されている。この埋め込みチャネルと、この上に設けられ垂直方向に蛇行して配置される垂直転送電極とで、垂直転送路(VCCD)102が形成される。   In the horizontal direction of the semiconductor substrate surface, vertical transfer electrodes are laid to meander so as to avoid the photodiodes 101. In the semiconductor substrate, a buried channel (not shown) is formed to meander in the vertical direction so as to avoid the photodiode 101 at the side of the photodiode row arranged in the vertical direction. A vertical transfer path (VCCD) 102 is formed by the buried channel and a vertical transfer electrode provided on the buried channel and arranged in a meandering manner in the vertical direction.

半導体基板の下辺部には、水平転送路(HCCD)103が設けられている。この水平転送路103も、埋め込みチャネルとその上に設けられた水平転送電極とで構成され、この水平転送路103は、転送パルスφH1,φH2によって2相駆動される。   A horizontal transfer path (HCCD) 103 is provided on the lower side of the semiconductor substrate. This horizontal transfer path 103 is also composed of a buried channel and a horizontal transfer electrode provided thereon, and this horizontal transfer path 103 is driven in two phases by transfer pulses φH1 and φH2.

水平転送路103の出力側にはアンプ104が設けられ、水平転送路103の出力端まで転送されてきた信号電荷の電荷量に応じた電圧値信号がアンプ104によって出力される。   An amplifier 104 is provided on the output side of the horizontal transfer path 103, and a voltage value signal corresponding to the amount of signal charge transferred to the output end of the horizontal transfer path 103 is output by the amplifier 104.

尚、「垂直」「水平」という用語を用いているが、これは、半導体基板表面に沿う「1方向」「この1方向に対して略直角な方向」という意味である。   The terms “vertical” and “horizontal” are used, which means “one direction” along the surface of the semiconductor substrate and “a direction substantially perpendicular to the one direction”.

各垂直転送路102の端部と、水平転送路103との間には、ラインメモリ105が設けられる。このラインメモリ105は、垂直転送路102の端部まで転送されてきた信号電荷を受け取って一時蓄積し、所定タイミングで水平転送路103に出力する構成となっている。   A line memory 105 is provided between the end of each vertical transfer path 102 and the horizontal transfer path 103. The line memory 105 is configured to receive the signal charge transferred to the end of the vertical transfer path 102, temporarily store it, and output it to the horizontal transfer path 103 at a predetermined timing.

本実施形態のラインメモリ105は、特許文献1記載のラインメモリとほぼ同様の構成となっているが、特許文献1記載のラインメモリが1相駆動される構成であるのに対し、本実施形態のラインメモリ105は、4相駆動する構成となっている。   The line memory 105 of the present embodiment has substantially the same configuration as the line memory described in Patent Document 1, but the line memory described in Patent Document 1 is configured to be driven in one phase, whereas this embodiment The line memory 105 is configured to be driven in four phases.

即ち、ラインメモリ105には、垂直転送路1つに対して信号電荷一時蓄積部が1つ設けられ、この信号電荷一時蓄積部がバリアを挟んで水平方向に連続して設けられるが、本実施形態のラインメモリ105では、信号電荷一時蓄積部が2つ連続する毎に区切って第1分割ラインメモリ(LM1),第2分割ラインメモリ(LM2),第3分割ラインメモリ(LM3),第4分割ラインメモリ(LM4),第1分割ラインメモリ(LM1),……と分割し、第1分割ラインメモリを駆動パルスφLM1で、第2分割ラインメモリをφLM2で,第3分割ラインメモリをφLM3で、第4分割ラインメモリをφLM4で駆動する電極配線構造になっている。   That is, in the line memory 105, one signal charge temporary storage unit is provided for one vertical transfer path, and this signal charge temporary storage unit is continuously provided in the horizontal direction across the barrier. In the line memory 105 of the embodiment, the first divided line memory (LM1), the second divided line memory (LM2), the third divided line memory (LM3), the fourth divided, every time two signal charge temporary storage units continue. The divided line memory (LM4), the first divided line memory (LM1),... Are divided, the first divided line memory is driven by the drive pulse φLM1, the second divided line memory is φLM2, and the third divided line memory is φLM3. The fourth divided line memory has an electrode wiring structure for driving with φLM4.

この駆動パルスφLM1〜φLM4と、水平転送パルスφH1,φH2と、垂直転送パルスとは、図1の駆動部4によって発生され、CCD型固体撮像素子100に与えられる。   The drive pulses φLM1 to φLM4, the horizontal transfer pulses φH1 and φH2, and the vertical transfer pulse are generated by the drive unit 4 of FIG.

斯かる構成のCCD型固体撮像素子100では、各色毎の受光量に応じた信号電荷が各フォトダイオード101に蓄積され、読出電極兼用の垂直転送電極に読出パルスが印加されたとき、フォトダイオード101から垂直転送路102に信号電荷が読み出される。   In the CCD solid-state imaging device 100 having such a configuration, signal charges corresponding to the amount of light received for each color are accumulated in each photodiode 101, and when a readout pulse is applied to the vertical transfer electrode serving as the readout electrode, the photodiode 101 The signal charge is read out from the vertical transfer path 102.

垂直転送路102に読み出された信号電荷は、垂直転送路102に垂直転送パルスが印加される毎に垂直方向に転送され、垂直転送路102端部まで転送されてきた信号電荷がラインメモリ105の該当の信号電荷一時蓄積部に流れ込む。   The signal charge read to the vertical transfer path 102 is transferred in the vertical direction every time a vertical transfer pulse is applied to the vertical transfer path 102, and the signal charge transferred to the end of the vertical transfer path 102 is transferred to the line memory 105. Into the corresponding signal charge temporary storage section.

そして、ラインメモリ105の該当する分割ラインメモリ(LM1,LM2,LM3,LM4)に駆動パルスが印加されたとき、詳細は後述するようにして信号電荷一時蓄積部の信号電荷が水平転送路103に移されて水平方向の画素加算が行われる。画素加算された信号電荷は水平方向に転送され、信号電荷量に応じた電圧値信号がアンプ104から図1のアナログ信号処理部2に出力される。   Then, when a drive pulse is applied to the corresponding divided line memory (LM1, LM2, LM3, LM4) of the line memory 105, the signal charge of the signal charge temporary storage unit is transferred to the horizontal transfer path 103 as will be described in detail later. The pixel addition in the horizontal direction is performed. The signal charge obtained by pixel addition is transferred in the horizontal direction, and a voltage value signal corresponding to the signal charge amount is output from the amplifier 104 to the analog signal processing unit 2 in FIG.

図3は、水平転送路とラインメモリの要部拡大模式図である。水平転送路103は、埋め込みチャネル103aと、埋め込みチャネル上に交互に設けられた第1層水平転送電極103b及び第2層水平転送電極103cとでなる。   FIG. 3 is an enlarged schematic view of the main part of the horizontal transfer path and the line memory. The horizontal transfer path 103 includes buried channels 103a and first-layer horizontal transfer electrodes 103b and second-layer horizontal transfer electrodes 103c that are alternately provided on the buried channels.

連続する第1層,第2層水平転送電極103b,103cに第1相転送パルスφH1が印加され、これに連続する次の第1層,第2層水平転送電極103b,103cに第2相転送パルスφH2が印加され、更にこれに連続する次の第1層,第2層水平転送電極103b,103cに第1相転送パルスφH1が印加され、……、水平転送路103が2相駆動される。   The first phase transfer pulse φH1 is applied to the continuous first layer and second layer horizontal transfer electrodes 103b and 103c, and the second phase transfer is performed to the next successive first layer and second layer horizontal transfer electrodes 103b and 103c. The pulse φH2 is applied, and further, the first phase transfer pulse φH1 is applied to the succeeding first layer and second layer horizontal transfer electrodes 103b and 103c, and the horizontal transfer path 103 is driven in two phases. .

図4の上2段に、本実施形態で用いる水平転送パルスφH1,φH2のパルス波形を示す。転送パルスφH1は、時刻t1,t2,t3,…,t8のうち、偶数時刻でハイレベル、奇数時刻でローレベルとなる定周期パルスである。転送パルスφH2は、転送パルスφH1の逆相のパルスである。この様に、本実施形態では、水平転送路は単純な転送パルスによって2相駆動する。   The upper two stages of FIG. 4 show the pulse waveforms of the horizontal transfer pulses φH1 and φH2 used in this embodiment. The transfer pulse φH1 is a periodic pulse that becomes high level at an even time and low level at an odd time among the times t1, t2, t3,. The transfer pulse φH2 is a pulse having a phase opposite to that of the transfer pulse φH1. Thus, in this embodiment, the horizontal transfer path is driven in two phases by a simple transfer pulse.

図3に戻り、分割ラインメモリLM1,2,3,4の夫々は、隣接する第1層,第2層転送電極103b,103cの組が2つ連続した部分に対応して設けられる。そして、各分割ラインメモリLM1,LM2,LM3,LM4は、2つの信号電荷一時蓄積部105a,105bと、各信号電荷一時蓄積部間を区分けする2つのバリア部105c,105dと、当該分割ラインメモリ毎に駆動パルスφLM1,φLM2,φLM3,φLM4を印加する電極膜及び配線105eとを備えて構成される。   Returning to FIG. 3, each of the divided line memories LM1, 2, 3 and 4 is provided corresponding to a portion in which two sets of adjacent first layer and second layer transfer electrodes 103b and 103c are continuous. Each of the divided line memories LM1, LM2, LM3, and LM4 includes two signal charge temporary storage units 105a and 105b, two barrier units 105c and 105d that separate the signal charge temporary storage units, and the divided line memory. Each is configured to include an electrode film to which drive pulses φLM1, φLM2, φLM3, and φLM4 are applied and a wiring 105e.

斯かる構成により、分割ラインメモリLM1,LM3の各出力端側の信号電荷一時蓄積部105aにはB信号電荷とR信号電荷とが交互に入力される。他方の信号電荷一時蓄積部105bにはG信号電荷が入力される。分割ラインメモリLM2,LM4の各出力端側の信号電荷一時蓄積部105aにはR信号電荷とB信号電荷とが交互に入力され、他方の信号電荷一時蓄積部105bにはG信号電荷が入力される。   With such a configuration, the B signal charge and the R signal charge are alternately input to the signal charge temporary storage unit 105a on the output terminal side of the divided line memories LM1 and LM3. The G signal charge is input to the other signal charge temporary storage unit 105b. R signal charges and B signal charges are alternately input to the signal charge temporary storage unit 105a on each output end side of the divided line memories LM2 and LM4, and a G signal charge is input to the other signal charge temporary storage unit 105b. The

図4の下4段に、各分割ラインメモリLM1〜LM4を4相駆動する駆動パルスφLM1〜φLM4のパルス波形を示す。φLM1は、時刻t2,t3でローレベル、その他の時刻でハイレベルとなり、φLM2は、時刻t1,t4でローレベル、その他の時刻でハイレベルとなり、φLM3は、時刻t3,t6でローレベル、その他の時刻でハイレベルとなり、φLM4は、時刻t1,t8でローレベル、その他の時刻でハイレベルとなる波形となっている。   The lower four stages of FIG. 4 show the pulse waveforms of the drive pulses φLM1 to φLM4 for driving the divided line memories LM1 to LM4 in four phases. φLM1 is at low level at times t2 and t3, and is at high level at other times, φLM2 is at low level at times t1 and t4, and is at high level at other times, and φLM3 is at low level at times t3 and t6, and others The waveform of LM4 becomes a low level at times t1 and t8 and becomes a high level at other times.

図5は、図4に示す水平転送パルスφH1,φH2及びラインメモリ駆動パルスφLM1〜φLM4を用いて行う水平方向の画素加算を説明する図であり、水平転送路上のR,G,B信号電荷とその転送の様子を順に示している。   FIG. 5 is a diagram for explaining horizontal pixel addition using the horizontal transfer pulses φH1 and φH2 and the line memory drive pulses φLM1 to φLM4 shown in FIG. 4, and the R, G, and B signal charges on the horizontal transfer path and The state of the transfer is shown in order.

図2に示す垂直転送路102の垂直方向の転送に従って、各分割ラインメモリLM1〜LM4の各信号電荷一時蓄積部105a,105bには、順次、R信号電荷,G信号電荷,B信号電荷が転送されてきている。   According to the vertical transfer of the vertical transfer path 102 shown in FIG. 2, the R signal charges, the G signal charges, and the B signal charges are sequentially transferred to the signal charge temporary storage units 105a and 105b of the divided line memories LM1 to LM4. Has been.

この分割ラインメモリLM1〜LM4にハイレベル信号が印加されている間は当該分割ラインメモリ部に電位井戸が形成され、信号電荷(この例では電子)はこの電位井戸内に保持される。そして、分割ラインメモリにローレベル信号が印加されると、電位井戸の底が持ち上がって電位井戸が無くなり、同一タイミングで水平転送路上の隣接電極がハイレベルになってその下に電位井戸が形成されると、この電位井戸内に分割ラインメモリの信号電荷が移動する。   While a high level signal is applied to the divided line memories LM1 to LM4, a potential well is formed in the divided line memory portion, and signal charges (electrons in this example) are held in the potential well. When a low level signal is applied to the divided line memory, the bottom of the potential well is lifted and the potential well disappears, and the adjacent electrode on the horizontal transfer path becomes high level at the same timing, and a potential well is formed thereunder. Then, the signal charges of the divided line memory move into the potential well.

図5の時刻t1では、分割ラインメモリLM2,LM4の信号電荷一時蓄積部105aには未だR信号電荷またはB信号電荷は移動してきておらず、空である。しかし、他方の信号電荷一時蓄積部105bには、G信号電荷が保存されている。   At time t1 in FIG. 5, the R signal charge or the B signal charge has not yet moved to the signal charge temporary storage unit 105a of the divided line memories LM2 and LM4, and is empty. However, the G signal charge is stored in the other signal charge temporary storage unit 105b.

この時刻t1で、分割ラインメモリLM2,LM4がローレベルとなり、水平転送パルスφH2がハイレベルになると、分割ラインメモリLM2,LM4内のG信号電荷が水平転送路に移動する。   At time t1, when the divided line memories LM2 and LM4 become low level and the horizontal transfer pulse φH2 becomes high level, the G signal charge in the divided line memories LM2 and LM4 moves to the horizontal transfer path.

次の時刻t2になると、水平転送路における転送が出力側に1ステップ(隣接する第1層,第2層転送電極103b,103c分)進み、同時に分割ラインメモリLM1がローレベルとなる。これにより、分割ラインメモリLM1内のR信号電荷が、水平転送路上の先ほどのG信号電荷の後の電位井戸内に移動する。   At the next time t2, the transfer on the horizontal transfer path advances to the output side by one step (adjacent first layer and second layer transfer electrodes 103b and 103c), and at the same time, the divided line memory LM1 becomes low level. As a result, the R signal charge in the divided line memory LM1 moves into the potential well after the G signal charge on the horizontal transfer path.

次の時刻t3になると、水平転送路における転送が出力側に1ステップ進み、同時に分割ラインメモリLM1,LM3がローレベルとなる。これにより、分割ラインメモリLM1内のG信号電荷が、水平転送路上の先ほどのG信号電荷を保持した電位井戸内に移動して2つのG信号電荷が加算される。即ち、図2の水平方向に隣接するG画素201,202の信号電荷が加算され、同じくG画素203,204の信号電荷が加算される。   At the next time t3, the transfer on the horizontal transfer path advances one step to the output side, and at the same time, the divided line memories LM1 and LM3 become low level. As a result, the G signal charge in the divided line memory LM1 moves into the potential well holding the previous G signal charge on the horizontal transfer path, and the two G signal charges are added. That is, the signal charges of the G pixels 201 and 202 adjacent in the horizontal direction in FIG. 2 are added, and the signal charges of the G pixels 203 and 204 are also added.

次の時刻t4になると、水平転送路における転送が出力側に1ステップ進み、同時に分割ラインメモリLM2がローレベルとなる。これにより、分割ラインメモLM2内のB信号電荷が、水平転送路上の空の電位井戸内に移動する。   At the next time t4, the transfer on the horizontal transfer path advances one step to the output side, and at the same time, the divided line memory LM2 becomes low level. As a result, the B signal charge in the division line memo LM2 moves into an empty potential well on the horizontal transfer path.

次の時刻t5では、水平転送路における転送が出力側に1ステップ進むが、分割ラインメモリはいずれもハイレベルに維持されるため、ラインメモリから水平転送路への信号電荷の移動はない。   At the next time t5, the transfer in the horizontal transfer path advances one step to the output side, but since all the divided line memories are maintained at the high level, there is no movement of signal charges from the line memory to the horizontal transfer path.

次の時刻t6では、水平転送路における転送が出力側に1ステップ進み、分割ラインメモリL3がローレベルとなる。これにより、分割ラインメモリLM3内のR信号電荷が、先ほど水平転送路上に移されたR信号電荷に加算される。即ち、図2に示すR画素の水平ラインは…―R―B―R―B―R―B―…と並ぶが、B画素の両脇の2つのR画素の信号電荷が加算されることになる。   At the next time t6, the transfer on the horizontal transfer path advances one step to the output side, and the divided line memory L3 becomes low level. As a result, the R signal charge in the divided line memory LM3 is added to the R signal charge previously transferred onto the horizontal transfer path. That is, the horizontal line of the R pixel shown in FIG. 2 is arranged in the order of —R—B—R—B—R—B—, but the signal charges of the two R pixels on both sides of the B pixel are added. Become.

次の時刻t7では、水平転送路における転送が出力側に1ステップ進むが、分割ラインメモリはいずれもハイレベルに維持されるため、ラインメモリから水平転送路への信号電荷の移動はない。   At the next time t7, the transfer in the horizontal transfer path advances one step to the output side, but since all the divided line memories are maintained at the high level, there is no movement of signal charges from the line memory to the horizontal transfer path.

次の時刻t8では、水平転送路における転送が出力側に1ステップ進み、分割ラインメモリLM4がローレベルとなる。これにより、分割ラインメモリLM4内のB信号電荷が、先ほど水平転送路上に移されたB信号電荷に加算される。即ち、図2に示すR画素の水平ラインは…―R―B―R―B―R―B―…のうち、R画素の両脇の2つのB画素の信号電荷が加算されることになる。   At the next time t8, the transfer on the horizontal transfer path advances one step to the output side, and the divided line memory LM4 becomes low level. As a result, the B signal charge in the divided line memory LM4 is added to the B signal charge previously transferred onto the horizontal transfer path. That is, in the horizontal line of the R pixel shown in FIG. 2, the signal charges of the two B pixels on both sides of the R pixel are added out of —R—B—R—B—R—B—. .

以上により、水平転送路上の各電位井戸内には、水平方向に2画素加算された信号電荷が格納され、以後、水平転送パルスφH1,φH2に従って、出力アンプ104側に転送される。   As described above, the signal charge obtained by adding two pixels in the horizontal direction is stored in each potential well on the horizontal transfer path, and thereafter transferred to the output amplifier 104 side according to the horizontal transfer pulses φH1 and φH2.

この様に、本実施形態によれば、水平転送路は単純な定周期パルスφH1,φH2で転送駆動できるため、既存のラインメモリを持たないCCD型固体撮像素子の駆動タイミングの設計をそのまま流用でき、分割ラインメモリの駆動パルスだけをCCD型固体撮像素子の画素配列等に合わせ且つどの様な画素加算を行うかによって新たに作成すれば済むことになる。   As described above, according to the present embodiment, the horizontal transfer path can be transferred and driven by simple fixed-period pulses φH1 and φH2, so that the design of the drive timing of the CCD solid-state imaging device having no existing line memory can be used as it is. Thus, it is only necessary to newly create the division line memory according to the pixel arrangement of the CCD solid-state image pickup device and the like, and only the pixel addition.

尚、上述した実施形態では、ハニカム画素配列のCCD型固体撮像素子を例に分割ラインメモリを4相駆動したが、CCD型固体撮像素子はハニカム画素配列に限るものではなく、また、分割ラインメモリも4相駆動ではなく他の複数相駆動で画素加算する構成としても良いことはいうまでもない。   In the above-described embodiment, the divided line memory is driven in four phases by taking a CCD solid-state image pickup device having a honeycomb pixel arrangement as an example. However, the CCD solid-state image pickup device is not limited to the honeycomb pixel arrangement, and the divided line memory is also used. Needless to say, the pixel addition may be performed not by four-phase driving but by other plural-phase driving.

本発明に係る撮像装置及びそのCCD型固体撮像素子は、容易に水平方向の画素加算が行えるため、例えば、静止画像を撮像し出力する場合には従来と同様にラインメモリを1相駆動して画素加算を行わず、動画像を撮像して出力する場合には画素加算を行うデジタルカメラ等に有用である。   Since the image pickup apparatus according to the present invention and its CCD solid-state image pickup device can easily perform pixel addition in the horizontal direction, for example, when picking up and outputting a still image, the line memory is driven in one phase as in the prior art. This is useful for a digital camera or the like that performs pixel addition when a moving image is captured and output without pixel addition.

本発明の一実施形態に係るデジタルカメラの機能構成図である。It is a functional block diagram of the digital camera which concerns on one Embodiment of this invention. 図1に示すCCD型固体撮像素子の表面模式図である。It is a surface schematic diagram of the CCD type solid-state imaging device shown in FIG. 図2に示す水平転送路及びラインメモリの一部拡大模式図である。FIG. 3 is a partially enlarged schematic diagram of a horizontal transfer path and a line memory shown in FIG. 2. 本実施形態で用いる水平転送パルスと分割ラインメモリ駆動パルスを示す図である。It is a figure which shows the horizontal transfer pulse and division line memory drive pulse which are used by this embodiment. 本実施形態による水平方向の画素加算の説明図である。It is explanatory drawing of the pixel addition of the horizontal direction by this embodiment.

符号の説明Explanation of symbols

4 駆動部(タイミングジェネレータを含む)
100 CCD型固体撮像素子
101 フォトダイオード(画素)
102 垂直転送路(VCCD)
103 水平転送路(HCCD)
104 出力アンプ
105 ラインメモリ
LM1,LM2,LM3,LM4 分割ラインメモリ
φLM1,φLM2,φLM3,φLM4 分割ラインメモリ駆動パルス
φH1,φH2 水平転送パルス
4 Drive unit (including timing generator)
100 CCD type solid-state image sensor 101 Photodiode (pixel)
102 Vertical transfer path (VCCD)
103 Horizontal transfer path (HCCD)
104 Output amplifier 105 Line memory LM1, LM2, LM3, LM4 Divided line memory φLM1, φLM2, φLM3, φLM4 Divided line memory drive pulse φH1, φH2 Horizontal transfer pulse

Claims (5)

半導体基板表面部にアレイ状に配列形成された複数のフォトダイオードから読み出された信号電荷を垂直方向に転送する複数の垂直転送路と、各垂直転送路によって転送されてきた前記信号電荷を受け取り水平方向に転送する水平転送路と、前記垂直転送路毎に設けられた信号電荷一時蓄積部がバリアを挟んで水平方向に連続することで構成され前記水平転送路と複数の前記垂直転送路の各端部との間に設けられたラインメモリであって各々の前記信号電荷一時蓄積部はパルス信号のハイレベルが印加されたとき対応する前記垂直転送路から受け取った前記信号電荷を一時蓄積し所要タイミングで前記パルス信号のローレベルが印加されたとき該信号電荷を前記水平転送路に移すラインメモリとを備えるCCD型固体撮像素子において、前記ラインメモリを、連続する2つの前記信号電荷一時蓄積部毎に水平方向に分割した分割ラインメモリで構成し、各分割ラインメモリを複数相の前記パルス信号で駆動すると共に、各分割ラインメモリの前記2つの前記信号電荷一時蓄積部に同じ前記パルス信号を印加する電極配線を設けたことを特徴とするCCD型固体撮像素子。 A plurality of vertical transfer paths for vertically transferring signal charges read from a plurality of photodiodes arranged in an array on the surface of the semiconductor substrate, and the signal charges transferred by the respective vertical transfer paths are received. A horizontal transfer path for transferring in the horizontal direction and a signal charge temporary storage section provided for each vertical transfer path are arranged in a horizontal direction across a barrier, and are formed by the horizontal transfer path and the plurality of vertical transfer paths. Each of the signal charge temporary storage units is a line memory provided between each end and temporarily stores the signal charge received from the corresponding vertical transfer path when a high level of a pulse signal is applied. in a CCD type solid-state imaging device and a line memory to transfer the signal charges to the horizontal transfer path when the low level of the pulse signal is applied at a required timing, the The in-memory, together constitute a split line memory divided horizontally every time two of the signal charge one continuous accumulation unit, and drives each of the divided line memory by the pulse signal of a plurality of phases, said respective divided line memory A CCD type solid-state imaging device, wherein electrode wiring for applying the same pulse signal is provided in two signal charge temporary storage portions . 前記半導体基板表面部に配列形成された奇数行の前記フォトダイオードが偶数行の前記フォトダイオードに対して1/2ピッチづつずらして形成されていることを特徴とする請求項1に記載のCCD型固体撮像素子。   2. The CCD type according to claim 1, wherein the odd-numbered photodiodes arranged on the surface of the semiconductor substrate are formed so as to be shifted by ½ pitch with respect to the even-numbered photodiodes. 3. Solid-state image sensor. 請求項1または請求項2に記載のCCD型固体撮像素子の駆動方法であって、前記分割ラインメモリを複数相のパルス信号で駆動して該水平転送路上で信号電荷の加算を行うことを特徴とするCCD型固体撮像素子の駆動方法。 A driving method of the CCD solid-state imaging device according to claim 1 or claim 2, drives the front Symbol dividing line memories a pulse signal of a plurality of phases in the horizontal transfer path to make the addition of the signal charges A driving method of a CCD type solid-state image pickup device characterized. 前記信号電荷の加算は、水平方向に隣接する同一色の信号電荷間で行うことを特徴とする請求項3に記載のCCD型固体撮像素子の駆動方法。   4. The method of driving a CCD type solid-state imaging device according to claim 3, wherein the addition of the signal charges is performed between signal charges of the same color adjacent in the horizontal direction. 請求項1または請求項2に記載のCCD型固体撮像素子と、請求項3または請求項4に記載の駆動方法を実現するタイミングのパルス信号を発生させる駆動手段とを備えることを特徴とする撮像装置。   An imaging device comprising: the CCD solid-state imaging device according to claim 1 or 2; and a driving unit that generates a pulse signal at a timing for realizing the driving method according to claim 3 or 4. apparatus.
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