JP4471606B2 - Cutting method of ceramic laminate and laminated actuator - Google Patents

Description

  The present invention relates to a method for cutting a ceramic laminated body that suppresses mixing of impurities into the ceramic laminated body during continuous cutting of the ceramic laminated body and enables continuous and highly accurate cutting.

  Piezoelectric ceramics have an inverse piezoelectric effect that expands and contracts when a voltage is applied. At this time, since the expansion / contraction amount (displacement amount) of each piezoelectric ceramic plate is very small, conventionally, a multilayer actuator using a ceramic laminate formed by laminating a plurality of layers to obtain a high displacement amount is used. Etc. have been formed. The ceramic laminate used for the laminated actuator or the like generally has a structure in which 10 to 900 green sheets are laminated. Here, as a cutting method used when manufacturing the ceramic laminate, there is a method using dicing, cutting, or water jet.

  In dicing, grinding powder dust is generated from the ceramic laminate that is cut at any time, and the dust adheres to a high-temperature cutter used for cutting. Unevenness occurred. In addition, since cutting uses a high-temperature blade, the cutting surface sinks and undesirably deforms on the cutting surface.

On the other hand, since the water jet blows and cuts a high-pressure water jet from the thin jet nozzle to the workpiece, it can suppress the action due to heat like the dicing, so the alteration and distortion of the cut surface, In addition, cutting was possible without generating dust due to grinding, and it was suitable for cutting soft materials such as resin, cloth, and paper. Further, when abrasive grains having a certain degree of hardness are included in the water jet, the grinding ability is improved, so that it is possible to easily cut a hard material such as a ceramic laminate (see Patent Document 1). .
JP 2003-158310 A

  However, the conventional cutting method of the ceramic laminate using a water jet as described in Patent Document 1 contains abrasive grains made of garnet in the water jetted at a high pressure, so that the cut The garnet abrasive grains remained in the ceramic laminate by mixing the garnet abrasive grains into the cut surface of the ceramic laminate. Further, the garnet abrasive grains could not be removed by cleaning the cut surface of the ceramic laminate. When the ceramic laminate containing such impurities is fired, due to the difference in density between the ceramic particles and the garnet particles constituting the ceramic laminate, a difference occurs in the degree of shrinkage of the ceramic laminate during firing. Cracks and peeling occurred in the subsequent ceramic laminate. In addition, the multilayer actuator using the ceramic laminate has a problem that it cannot have a high displacement required for practical use.

  The present invention relates to a method for cutting a ceramic laminate by jetting a high-pressure liquid, even when abrasive grains contained in the liquid remain inside the ceramic laminate, It aims at providing the cutting method of the ceramic laminated body which can suppress a crack and peeling.

The method for cutting a ceramic laminate according to the present invention is a ceramic that constitutes the ceramic layer as an abrasive for cutting a ceramic laminate formed by alternately laminating a plurality of ceramic layers and a plurality of internal electrode layers. By spraying a high-pressure liquid jet using a liquid having an average particle size of 10 to 500 μm made of ceramic particles having the same composition as the above and a liquid having an electric conductivity of 1.0 μS / cm or less from a jet nozzle. The ceramic laminate is cut.

  Moreover, the cutting method of the ceramic laminated body of this invention is the distance from the said ejection nozzle to the said ceramic laminated body being 0.1-3.0 mm, or the ejection pressure of the said liquid jet is 100-400 MPa. Alternatively, the amount of the ceramic particles supplied from the ejection nozzle is 100 to 400 g / min.

The method for cutting a ceramic laminate of the present invention is characterized in that a plurality of the ejection nozzles are installed and a plurality of lines are simultaneously cut.

The method for cutting a ceramic laminate according to the present invention is characterized in that a grinding machine on which the ceramic laminate is placed at the time of cutting has a grid-like drainage groove.
The method for cutting a ceramic laminate according to the present invention is characterized in that the ceramic particles have the same composition as the ceramic constituting the ceramic laminate.
The multilayer actuator of the present invention is obtained by firing the ceramic laminate cut by any one of the above-described methods for cutting a ceramic laminate of the present invention.

  Such a method for cutting a ceramic laminate suppresses the mixing of foreign ceramic particles inside the ceramic laminate to be cut, thereby improving the workability of the ceramic laminate and improving the ceramic laminate after firing. Cracks and peeling can be suppressed, and the multilayer actuator using the fired ceramic laminate can have a high displacement necessary for practical use.

As described above, according to the method for cutting a ceramic laminate of the present invention, the ceramic layer is configured as an abrasive for a ceramic laminate formed by alternately laminating a plurality of ceramic layers and a plurality of internal electrode layers. A high-pressure liquid jet using a liquid containing an abrasive having an average particle size of 10 to 500 μm made of ceramic particles having the same composition as the ceramic being processed, and having an electric conductivity of 1.0 μS / cm or less By spraying from, the cut ceramic laminate does not mix abrasive grains of a composition different from the ceramic laminate on the cut surface, it is possible to suppress cracks and delamination of the fired ceramic laminate, In addition, a multilayer actuator derived from a ceramic laminate using the cutting method of the present invention can have a high amount of displacement required for practical use. .

Moreover, cutting with high accuracy without an average particle size of the abrasive grains made of ceramic particles of the ceramic layer and the same quality is 10~500μm der Runode, grinding power of the liquid jet sprayed from the spray nozzle, and the flow rate is reduced be able to.

Furthermore, the electrical conductivity of the liquid jet of liquid is 1.0 .mu.s / cm or less der Runode, since a large amount of the electrolyte as an impurity is not mixed into the cut surface of the ceramic laminate, cracking or delamination of the ceramic laminated body after firing Can be suppressed.

Furthermore, when the distance from the jet nozzle to the ceramic laminate Ru 0.1~3.0mm Dare, it is possible to suppress the diffusion of the liquid jet, the ceramic laminate without reducing the grinding power with the liquid jet The body can be cut.

Alternatively, if the ejection pressure of the liquid jet Ru 100~400MPa der has a grinding force required when cutting the ceramic laminate, and smooth cut surface unimpeded cut by grinding powder generated It can be set as the ceramic laminated body which has.

Alternatively, if the amount of the abrasive grains consisting of xenon ceramic particles before being supplied from the ejection nozzle Ru Ah with 100 to 400 g / min, has a grinding force required when cutting the ceramic laminate, and the liquid Since the straightness of the jet flow can be maintained, the ceramic laminate can be cut with high accuracy.

  Furthermore, the ceramic laminate can be cut in a short time by installing a plurality of ejection nozzles and simultaneously cutting a plurality of lines.

Further, if the grinding machine for placing the ceramic laminate during cutting has a lattice-shaped gutter, liquid jets sprayed from the ejection nozzle, after cutting the ceramic laminate, be reflected impinges on the grinding machine to flow out in a grid of drainage ditch without, it is possible to suppress the reduction in the linearity of the liquid injection stream due to collision of the reflected liquid jet and the subsequent jet of liquid.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view for illustrating a method for cutting a ceramic laminate of the present invention, and FIG. 2 is a side view. A ceramic laminate 1 in which a plurality of ceramic layers and a plurality of internal electrode layers are alternately laminated is provided with a plurality of drain grooves 2 and provided with a servo motor for moving in the x-axis direction set in FIG. Place on the grinding machine 3. Further, the cutting mark 4 installed on the upper surface of the ceramic laminate 1 is recognized by the image recognition camera 5, and the ejection nozzle 6 provided with a servo motor for moving in the y and z axis directions set in FIG. It is installed at the cutting start location of the ceramic laminate 1.

  Next, the liquid supplied from the liquid tank 10 is pressurized by the pressure intensifier 11 and mixed into the liquid in which the abrasive grains are pressurized from the abrasive tank 12 via the pump 13, thereby producing the liquid jet 7.

  Next, the liquid jet 7 is ejected at a high pressure from an ejection nozzle 6 formed of stainless steel or the like, sprayed onto a cutting mark 4 installed on the upper surface of the ceramic laminate 1, and ceramic laminated along the line of the opposing cutting mark 4 Cut the body 1. Further, when the ceramic laminate 1 is cut, the ceramic laminate 1 is placed at an arbitrary position by turning the grinding machine 3 and then cut.

  Although not shown in the drawings, the liquid jet 7 after the cutting is separated into liquid and abrasive grains after flowing into the grid-like drainage grooves 2 installed in the grinding machine 3, and the liquid tank 10 and It is reused by being collected in the abrasive tank 12 respectively.

And in the cutting method of the ceramic laminated body of this invention, the high pressure liquid jet 7 which contains the abrasive grain which consists of ceramic particles of the same composition as the ceramic which forms the ceramic laminated body 1 sprayed from the ejection nozzle 6 as an abrasive. The ceramic laminate 1 must be cut by using. This is because, when abrasive grains made of ceramic particles that are different from the ceramics constituting the workpiece are used as the abrasive, the abrasive grains are mixed into the cut surface of the ceramic laminate 1 to be cut. The abrasive grains remain inside. When such a ceramic laminate 1 is fired, a difference in the degree of shrinkage of the ceramic laminate 1 occurs during firing due to the difference in density between the ceramics constituting the ceramic laminate 1 and the particles different from the ceramics. Cracks and delamination occur in the ceramic laminate, and the multilayer actuator using the ceramic laminate cannot have a high displacement required for practical use.

  On the other hand, when the ceramic laminate 1 is cut by using a high-pressure liquid jet 7 containing abrasive grains made of ceramic particles of the same quality as the ceramic laminate 1 as an abrasive, the ceramic laminate is applied to the cut surface. Even when ceramic particles having the same quality as 1 are mixed, the composition constituting the ceramic laminate 1 does not change, and therefore, the fired ceramic laminate does not crack or peel. Here, the abrasive grains made of ceramic particles of the same quality as the ceramic laminate 1 mean that the main component is the same as the ceramic constituting the ceramic laminate 1. In particular, it is preferable to cut the ceramic laminate 1 by using a liquid jet 7 containing abrasive grains having the same composition as the ceramic constituting the ceramic laminate 1 as an abrasive.

  In addition, a multilayer actuator using a ceramic laminate manufactured by this cutting method can have a high amount of displacement required for practical use.

Furthermore, the average particle diameter of the abrasive grains made of ceramic particles having the same composition as the ceramic constituting the ceramic laminate 1 contained in the liquid jet 7 is set to 10 to 500 μm. This is because when the average grain size of the abrasive grains is less than 10 μm, the portion of the liquid jet 7 in contact with the ceramic laminate 1 of the abrasive grains becomes narrow, so that the grinding force of the liquid jet 7 decreases, and the ceramic laminate 1 Can not be cut. Further, if the average particle size of the abrasive grains exceeds 500 μm, the flow velocity of the liquid jet 7 sprayed from the jet nozzle 6 decreases, and the straightness of the liquid jet 7 cannot be maintained. It becomes impossible to cut.

Furthermore, you electrical conductivity of the liquid in the liquid jet 7 or less 1.0 .mu.s / cm. This is because the liquid having a high electrical conductivity contains a large amount of electrolyte, and therefore, when the electrolyte cuts the ceramic laminate 1, it is mixed into the cut surface as an impurity. Due to the difference between the density of the ceramic particles and the impurities, a difference occurs in the degree of shrinkage of the ceramic laminate 1 during firing, and cracks and peeling occur in the fired ceramic laminate. In addition, the multilayer actuator using the ceramic laminate 1 manufactured by this cutting method cannot have a high amount of displacement required for practical use.

  Furthermore, it is desirable that the distance t from the ejection nozzle 6 to the ceramic laminate 1 is 0.1 to 3.0 mm. This is because, when the distance t is less than 0.1 mm, the thickness variation caused by technical factors at the time of forming the ceramic laminate 1 occurs on the laminate surface of the ceramic laminate 1, and thus the thickness variation of the laminate surface of the ceramic laminate 1 This is because the projecting portion caused by the contact with the ejection nozzle 6 prevents the spraying of the liquid ejection 7. Further, if the distance t exceeds 3.0 mm, the diffusion of the jetted liquid jet 7 increases until reaching the ceramic laminate 1, and the grinding force is reduced. The cutting width becomes wide and the lower surface of the ceramic laminate 1 becomes difficult to cut.

  Alternatively, it is desirable that the ejection pressure of the liquid ejection 7 is 100 to 400 MPa. Since this cuts using the liquid jet 7 containing the abrasive grain which consists of ceramic particles of the same quality as the ceramic laminate 1, cutting becomes difficult if the jet pressure is less than 100 MPa. Further, when the ejection pressure exceeds 400 MPa, the grinding force of the liquid jet 7 becomes strong, so that the particle size of the grinding powder of the ceramic laminate 1 generated when grinding is increased, and the grinding powder is mixed. When the ceramic laminate 1 is cut with the liquid jet 7 that has been made, the cut surface has irregularities, so that the cutting accuracy of the liquid jet 7 falls.

  Alternatively, it is desirable that the amount of abrasive grains made of the ceramic particles supplied from the ejection nozzle 6 is 100 to 400 g / min. This is because when the amount of the abrasive grains is less than 100 g / min, the portion of the liquid jet 7 in contact with the ceramic laminate 1 of the abrasive grains becomes narrow, so the grinding force of the liquid jet 7 is reduced and the ceramic laminate 1 Can not be cut. Further, when the amount of the abrasive grains exceeds 400 g / min, the flow velocity of the liquid jet 7 sprayed from the jet nozzle 6 decreases, and the straightness of the liquid jet 7 cannot be maintained. It becomes impossible to cut.

  Furthermore, it is preferable to install a plurality of ejection nozzles 6 and simultaneously cut a plurality of lines. This enables cutting at a plurality of locations at the same time, and enables efficient cutting of the ceramic laminate 1 in a short time.

  Furthermore, it is preferable that the grinding machine 3 has a grid-like drainage groove 2 on which the ceramic laminate 1 is placed at the time of cutting. This is because, when the grinder 3 does not have the grid-like drainage grooves 2, the liquid jet 7 sprayed from the ejection nozzle 6 collides with the grinder 3 and reflects after cutting the ceramic laminate 1. Therefore, when the reflected liquid jet 7 collides with the subsequent liquid jet 7, the straightness of the liquid jet 7 of the subsequent liquid jet 7 is reduced, and high-precision cutting is prevented. On the other hand, if the grinder 3 has the grid-shaped drain grooves 2, the liquid jet 7 after cutting the ceramic laminate 1 flows into the grid-shaped drain grooves 2, so that it collides with the grinder 3. Thus, the ceramic laminate 1 can be cut with high accuracy without reducing the grinding force of the liquid jet 7 by the reflection.

  Further, the arrangement of the drainage grooves 2 is not limited to the lattice shape, and may be any position as long as the liquid jet 7 after cutting the ceramic laminate 1 can flow out.

The ceramic layer constituting the ceramic laminate 1 is made of a piezoelectric ceramic material mainly composed of lead zirconate titanate (Pb (Zr, Ti) O ₃ ) or barium titanate (BaTiO ₃ ). but may be any ceramics having piezoelectricity, also, the internal electrode silver - is formed of a conductive paste mainly composed of palladium alloy.

Next, the method for producing the ceramic laminate of the present invention will be described. The ceramic laminate of the present invention is prepared by first mixing a calcined powder of piezoelectric ceramic such as zirconium titanate, a binder composed of an organic polymer, and a plasticizer. A slurry is prepared, and a ceramic green sheet is prepared from the slurry by a molding method such as a doctor blade method, a calender roll method, and a slip casting method.

  Next, a silver-palladium powder is mixed with a binder and a plasticizer to prepare a conductive paste, and the conductive paste is formed on the upper surface of each ceramic green sheet so as to have a predetermined thickness by screen printing or the like. Print.

  Then, the ceramic green sheets on which the conductive paste is printed are laminated on the upper surface, and the laminated ceramic green sheets are integrated by pressing while heating at 50 to 200 ° C., thereby cutting the ceramic laminate of the present invention. After cutting into an arbitrary size using the method, the binder is removed at 400 to 800 ° C. and fired at 900 to 1200 ° C. to produce a ceramic laminate. This ceramic laminated body can be used as a laminated actuator.

  The ceramic laminate of the present invention was produced as follows.

First, a binder composed of calcined powder and an organic polymer lead zirconate titanate (Pb (Zr, Ti) O 3), to prepare a slurry obtained by mixing a plasticizer, a slip castellations I ing method, thickness 150μm A ceramic green sheet was prepared.

  On one side of this green sheet, a conductive paste mainly composed of silver-palladium serving as the internal electrode 2 is printed by a screen printing method to a thickness of 5 μm, and after the conductive paste is dried, the conductive paste is applied. A plurality of green sheets 400 were laminated, and 10 green sheets to which no conductive paste was applied were laminated at both ends in the lamination direction of the laminated body to produce a ceramic laminated body 1.

  In the examples of the present invention shown below, except for Example 3, pure water having an electric conductivity of 1.0 μS / cm or less was used as the liquid of the liquid jet 7.

  (Example 1) In the cutting of the ceramic laminate 1 of the present invention produced by using the above manufacturing method, the material of the abrasive grains to be contained in the liquid jet 7 is composed of ceramic particles of the same quality as the ceramic laminate 1 Then, impurities mixed during cutting and the state of the cut surface of the fired ceramic laminate 1 were verified.

  As a comparative example, the ceramic laminate 1 was cut with a liquid jet 7 containing garnet abrasive grains having an average particle diameter of 100 μm and a liquid jet 7 containing no abrasive grains.

この表１から、比較例である試料番号２は、ガーネット砥粒を含有した液体噴流７で切断したため、セラミック積層体１の切断面に前記ガーネット砥粒が混入してセラミック層内に残留した。そして、前記ガーネット砥粒残留部位は前記セラミック層と主成分の異なる組成であるため、前記ガーネット砥粒が残留したセラミック積層体１を焼成すると、焼成時に周囲の部材との収縮差が生じ、焼成後のセラミック積層体１の積層面に剥離が発生した。 The ceramic laminate 1 cut as described above was evaluated for its cutting ability, mixing of impurities, and the presence or absence of cracks and peeling. Here, the term “cutability” refers to a sample that could be cut accurately by penetrating to the lower layer of the ceramic laminate 1, and a sample that could not be cut as “x”. In addition, the contamination was observed by observing the cut surface with a binocular microscope and confirming the presence or absence of particles having different compositions. Furthermore, about the crack and peeling, the cut surface of the ceramic laminated body 1 after baking was observed with the binocular microscope, and the presence or absence was confirmed. The results are as shown in Table 1.

From Table 1, Sample No. 2, which is a comparative example, was cut with the liquid jet 7 containing garnet abrasive grains, so that the garnet abrasive grains were mixed into the cut surface of the ceramic laminate 1 and remained in the ceramic layer. And since the garnet abrasive grain residual site has a composition different from that of the ceramic layer, firing the ceramic laminate 1 with the garnet abrasive grains remaining causes a shrinkage difference with surrounding members during firing, and firing. Peeling occurred on the laminated surface of the subsequent ceramic laminate 1.

  Moreover, since the sample number 3 which is a comparative example used only the liquid which does not contain an abrasive grain, the grinding force was very low and the ceramic laminated body 1 could not be cut | disconnected.

  On the other hand, in sample No. 1 which is an embodiment of the present invention, when the liquid jet 7 containing abrasive grains made of ceramic particles of the same quality as the ceramic layer constituting the ceramic laminate 1 is cut, the ceramic layer and the main layer are separated. Since abrasive grains having different compositions were not mixed, cracks and peeling did not occur in the fired ceramic laminate 1.

  (Example 2) In the cutting of the ceramic laminate 1 of the present invention produced using the above manufacturing method, the cutting workability by the particle diameter of the abrasive grains contained in the liquid jet 7 was verified.

  The ceramic laminate 1 was cut with a liquid jet 7 containing abrasive grains made of ceramic particles of the same quality as the ceramic layer prepared in the range of an average particle diameter of 5 to 700 μm.

この表２から、試料番号１では、砥粒の平均粒径が小さかったために、切断の際に前記砥粒のセラミック積層体１と接する部位が狭くなることによって液体噴流７の研削力が低下し、セラミック積層体１を切断できなかった。 As for the cutting workability of the sample cut as described above, the surface roughness (Ra) after firing of the cut surface is confirmed, a sample having a surface roughness (Ra) of 1 μm or less is described as ◯, and exceeds 1 μm. Each sample was evaluated as x. The results are as shown in Table 2.

From Table 2, in Sample No. 1, since the average grain size of the abrasive grains was small, the grinding force of the liquid jet 7 was reduced by narrowing the portion of the abrasive grains in contact with the ceramic laminate 1 during cutting. The ceramic laminate 1 could not be cut.

  In Sample No. 8, since the average grain size of the abrasive grains was large, the flow velocity of the liquid jet 7 sprayed from the ejection nozzle 6 was reduced, and the straightness of the liquid jet 7 could not be maintained, so the surface of the cut surface Thus, the ceramic laminate 1 could not be cut with high accuracy.

  On the other hand, the abrasive grains of Sample Nos. 2 to 7 have good cutting properties and smooth cut surfaces and can cut the ceramic laminate 1 with high accuracy by setting the average particle size to 10 to 500 μm. It was. Therefore, it is desirable that the average grain size of the abrasive grains made of ceramic particles of the same quality as the ceramic layers constituting the ceramic laminate 1 is 10 to 500 μm.

(Example 3) In the ceramic laminate 1 of the present invention produced by using the above-described manufacturing method, the electric conductivity of the liquid of the liquid jet 7, the impurities mixed during cutting, and the cutting of the ceramic laminate 1 after firing. The aspect of the surface was verified.

  The ceramic laminate 1 was cut with a liquid jet 7 using tap water having an electric conductivity exceeding 1.0 μS / cm and pure water having an electric conductivity of 1.0 μS / cm or less as the liquid of the liquid jet 7.

この表３から、試料番号１では、電気伝導率が１．０μＳ／ｃｍを超える水道水を使用したため、液体噴流７は電解質を多量に含有しているので、セラミック積層体１を切断すする際に、前記電解質が不純物として切断面に混入し、セラミック積層体１の焼成時の収縮度合いに差が生じ、クラックや剥離が発生した。 The contamination of the ceramic laminate 1 cut as described above and the cut surface of the fired ceramic laminate 1 are observed with a binocular microscope, and the presence or absence of particles having different compositions and cracks in the cut surface after firing. The presence or absence of peeling was confirmed. The results are as shown in Table 3.

From Table 3, in Sample No. 1, since tap water having an electric conductivity exceeding 1.0 μS / cm was used, the liquid jet 7 contains a large amount of electrolyte. Therefore, when cutting the ceramic laminate 1 In addition, the electrolyte was mixed as impurities into the cut surface, causing a difference in the degree of shrinkage when the ceramic laminate 1 was fired, resulting in cracks and peeling.

  On the other hand, in Sample No. 2, since pure water having an electric conductivity of 1.0 μS / cm or less was used, a large amount of electrolyte was not mixed into the cut surface of the ceramic laminate 1 as an impurity. Cracks and peeling did not occur in the ceramic laminate 1. Therefore, it is desirable that the electric conductivity of the liquid of the liquid jet 7 is 1.0 μS / cm or less.

(Example 4) In the ceramic laminated body 1 of the present invention produced by using the above-described manufacturing method, the distance t from the ejection nozzle 6 to the ceramic laminated body 1, the ejection pressure of the liquid jet 7, and the supply from the ejection nozzle 6 Cutting workability according to the amount of abrasive grains to be tested was verified. As for the cutting workability of the sample cut as follows, the surface roughness (Ra) after firing of the cut surface is confirmed, and a sample having a surface roughness (Ra) of 1 μm or less is described as ◯ and exceeds 1 μm. Each sample was evaluated as x.

この表４から、試料番号６では、噴出ノズル６からセラミック積層体１までの距離ｔが大きかったために、液体噴流７の拡散が増大し、併せて、研削力が低下し、セラミック積層体上面の切断幅が広くなることによってセラミック積層体１の下面に切断できない部分が生じた。 First, the distance t between the ejection nozzle 6 and the ceramic laminate 1 was adjusted within a range of 0.1 to 4.0 mm, and the ceramic laminate 1 was cut. The results are as shown in Table 4.

From Table 4, in Sample No. 6, since the distance t from the ejection nozzle 6 to the ceramic laminate 1 was large, the diffusion of the liquid jet 7 increased, and at the same time, the grinding force was reduced, and the upper surface of the ceramic laminate was reduced. As the cutting width was increased, a portion that could not be cut was generated on the lower surface of the ceramic laminate 1.

  In addition, when the distance t is 0.1 mm or less, thickness variations caused by technical factors during the formation of the ceramic laminate 1 occur on the laminate surface of the ceramic laminate 1, and therefore, due to the thickness variations of the laminate surface of the ceramic laminate 1. Since the produced convex part contacts the jet nozzle 6, the distance t could not be made 0.1 mm or less.

  On the other hand, in the sample numbers 2 to 5, the diffusion t of the liquid jet 7 can be suppressed by setting the distance t from the ejection nozzle 6 to the ceramic laminate 1 to 0.1 to 4.0 mm. The ceramic laminate 1 can be cut without reducing the grinding force of the jet 7. Therefore, the distance t from the ejection nozzle 6 to the ceramic laminate 1 is preferably 0.1 to 4.0 mm.

この表５から、試料番号１では、液体噴流７の噴出圧力が小さかったため、研削力が低く、セラミック積層体１の下面に切断できない部分が生じた。 Next, the jet pressure of the liquid jet 7 was adjusted in the range of 50 to 500 MPa, and the ceramic laminate 1 was cut. The results are as shown in Table 5.

From Table 5, in Sample No. 1, since the jet pressure of the liquid jet 7 was small, a grinding force was low, and a portion that could not be cut on the lower surface of the ceramic laminate 1 was generated.

  Moreover, in the sample number 6, since the jet pressure of the liquid jet 7 was large, the grinding force of the liquid jet 7 was increased, so that the particle size of the grinding powder of the ceramic laminate 1 generated when grinding was increased. Since the ceramic laminate is cut by the liquid jet 7 in which the grinding powder is mixed, the cut surface becomes uneven, the cut surface becomes rough, and further processing is required after firing.

  On the other hand, in Sample Nos. 2 to 5, the grinding pressure generated when the ejection pressure of the liquid jet 7 is set to 100 to 400 MPa has the grinding force necessary for cutting the ceramic laminate 1. The ceramic laminate 1 having a smooth cut surface could be cut without being interrupted by cutting. Therefore, it is desirable that the jet pressure of the liquid jet 7 be 100 to 400 MPa.

この表６から、試料番号１では、砥粒の量が少なかったため、液体噴流７中の前記砥粒のセラミック積層体と接する部位が狭くなるため、液体噴流７の研削力が低下し、セラミック積層体１の下面に切断できない部分が生じた。 Next, the amount of abrasive grains supplied from the ejection nozzle 6 was adjusted in the range of 50 to 500 g / min, and the ceramic laminate 1 was cut. The results are as shown in Table 6.

From Table 6, in Sample No. 1, since the amount of abrasive grains was small, the portion of the liquid jet 7 in contact with the ceramic laminate of the abrasive grains was narrowed, so that the grinding force of the liquid jet 7 was reduced and the ceramic laminate was reduced. A portion that could not be cut was formed on the lower surface of the body 1.

  In Sample No. 6, since the amount of abrasive grains is large, the flow velocity of the liquid jet 7 sprayed from the ejection nozzle 6 is reduced, and the straightness of the liquid jet 7 cannot be maintained, so that the surface of the cut surface becomes rough. The ceramic laminate 1 could not be cut with high accuracy.

  On the other hand, in sample numbers 2 to 5, the amount of abrasive grains supplied from the ejection nozzle 6 is set to 100 to 400 g / min, so that the grinding force necessary for cutting the ceramic laminate 1 is provided. In addition, since the straightness of the liquid jet 7 can be maintained, the ceramic laminate 1 can be cut with high accuracy.

(Embodiment 5) In the ceramic laminate 1 of the present invention produced by using the above-described manufacturing method, the cutting process is performed depending on the presence or absence of the grid-like drainage grooves 2 included in the grinding machine 3 on which the ceramic laminate 1 is placed when cutting. The sex was verified.

  The ceramic laminate 1 was placed on a grinding machine 3 having a grid-like drainage groove 2, and the ceramic laminate 1 was cut.

この表７から、試料番号１では、研削盤３が格子状の排水溝２を有していなかったため、噴出ノズル６から吹き付けられる液体噴流７が、セラミック積層体１を切断した後、研削盤３に衝突して反射し、液体噴流７が後続の液体噴流７と衝突することによって、液体噴流７の直進性を保持できなくなるため、切断面の表面が粗くなり、高精度にセラミック積層体１を切断することができなかった。 As for the cutting workability of the sample cut as described above, the surface roughness (Ra) after firing of the cut surface is confirmed, a sample having a surface roughness (Ra) of 1 μm or less is described as ◯, and exceeds 1 μm. Each sample was evaluated as x. The results are as shown in Table 7.

From Table 7, in Sample No. 1, since the grinding machine 3 did not have the grid-like drainage grooves 2, the liquid jet 7 sprayed from the ejection nozzle 6 cuts the ceramic laminate 1, and then the grinding machine 3 Since the liquid jet 7 collides with the subsequent liquid jet 7 and the straightness of the liquid jet 7 cannot be maintained, the surface of the cut surface becomes rough, and the ceramic laminate 1 can be formed with high accuracy. Could not cut.

  On the other hand, in the sample number 2, since the grinding machine 3 has the grid-like drainage grooves 2, the liquid jet 7 is not reflected by colliding with the grinding machine 3 after cutting the ceramic laminated body 1. Since the liquid flows out into the grid-like drain grooves 2, the straightness of the liquid jet 7 caused by the collision between the reflected liquid jet 7 and the subsequent liquid jet 7 can be maintained, so that the ceramic laminate 1 can be cut with high accuracy. It was. Therefore, it is desirable that the grinding machine 3 on which the ceramic laminate 1 is cut has the grid-shaped drainage grooves 2.

It is a perspective view for demonstrating the cutting method of the ceramic laminated body of this invention. It is a side view for demonstrating the cutting method of the ceramic laminated body of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Ceramic laminated body 2 ... Drainage groove 3 ... Grinding machine 4 ... Cutting mark 5 ... Image recognition camera 6 ... Jet nozzle 7 ... Liquid jet

Claims (5)

For a ceramic laminate formed by alternately laminating a plurality of ceramic layers and a plurality of internal electrode layers, the average particle size of ceramic particles having the same composition as the ceramic constituting the ceramic layer as an abrasive is 10 A ceramic containing the abrasive grains of ˜500 μm and cutting the ceramic laminate by blowing a high-pressure liquid jet using a liquid having an electric conductivity of 1.0 μS / cm or less from an ejection nozzle A method for cutting a laminate.   The distance from the ejection nozzle to the ceramic laminate is 0.1 to 3.0 mm, or the ejection pressure of the liquid jet is 100 to 400 MPa, or the ceramic particles supplied from the ejection nozzle 2. The method for cutting a ceramic laminate according to claim 1, wherein the amount is 100 to 400 g / min.   The method for cutting a ceramic laminate according to claim 1, wherein a plurality of the ejection nozzles are installed and a plurality of lines are simultaneously cut.   2. The method for cutting a ceramic laminate according to claim 1, wherein a grinder for mounting the ceramic laminate at the time of cutting has a grid-like drainage groove. It claims 1 to multilayer actuator, characterized by comprising firing the cut ceramic laminate cutting method according to any one of 4.

Images