JP4466207B2 - Drawing system - Google Patents

Description

  The present invention relates to a drawing system for drawing a circuit pattern directly on a mask (reticle) or a substrate, and more particularly to data processing of a drawing pattern before drawing processing.

  In the drawing system, CAD / CAM design pattern data is created in a workstation or the like and output to the drawing apparatus. The drawing apparatus converts the received pattern data into drawing data such as raster data. The operator places a substrate, which is a blank having no pattern formed, at a predetermined position in the drawing apparatus, and then operates the drawing apparatus. The drawing apparatus scans the laser beam based on the raster data, and as a result, a circuit pattern is formed on the substrate.

As a method for verifying pattern data before a drawing process, a method of displaying a sectional shape of an aperture mask in a drawing apparatus using a partial batch exposure method is known (see, for example, Patent Document 1). By using the information of the aperture mask that does not exist in the drawing data, the pattern can be verified.
Japanese Patent Laid-Open No. 7-130596 (FIG. 1)

  The pattern formation position of the substrate follows the created pattern data, and the orientation of the substrate mounted in the drawing apparatus also follows the pattern data. On the other hand, the place where the workstation main body for creating the drawing pattern is arranged and the work process place where the drawing apparatus is located are separated from each other, and the worker on the drawing apparatus side cannot directly check the drawing pattern. Therefore, when the substrate is directly installed in the drawing apparatus, the operator must confirm the mounting direction of the substrate in a state where no pattern is formed. In particular, in a drawing system that directly draws, since there is no mask unlike an exposure apparatus, the operator cannot obtain pattern information.

  The drawing system of the present invention is a system capable of displaying a drawing pattern designed in a computer system such as a workstation to an operator of a drawing apparatus located away from the computer system.

  A drawing system includes a pattern data creation device that stores drawing pattern data that is vector data, a drawing control unit that converts pattern data sent from the pattern data creation device into drawing data for drawing processing, and the drawing processing And a drawing device that performs drawing processing based on the data. The drawing device and the drawing control unit are arranged at a work process place, and are arranged at a place away from the pattern data creating apparatus. In the drawing apparatus, a stage on which a substrate is mounted is provided. For example, the stage is configured to move in a predetermined direction.

  The pattern data creation device includes a data conversion processing unit that converts the pattern data into image data corresponding to a pixel arrangement, and a data transmission unit that transmits the image data together with the pattern data to a drawing control unit. For example, it is converted into image data as bitmap data. The drawing control unit has display means for displaying a pattern image based on the pixel data.

  When there are a plurality of substrates and a plurality of pattern data corresponding to the plurality of substrates, the data transmission means transmits the pattern data together with at least alignment data and substrate size data, and associates the pixel data with the pattern data. It is good to send it. In the drawing control unit, a pattern image corresponding to the prepared substrate is displayed.

  The drawing data processing method of the present invention converts drawing pattern data, which is vector data created by a pattern data creation device, into image data corresponding to a pixel arrangement, and the image data together with the pattern data is converted into the pattern data. It transmits to the drawing control part in the place away from the production apparatus.

  According to the present invention, an operator of a drawing apparatus located away from the pattern data creating apparatus can easily check the drawing pattern without complicated work, and the board is mounted in a correct manner. Can do.

  Below, the drawing apparatus which is embodiment of this invention is demonstrated with reference to drawings.

  FIG. 1 is a diagram schematically showing a drawing system according to the present embodiment. FIG. 2 shows the substrate. FIG. 3 shows a displayed pattern.

  The drawing system includes a host computer 10 that is a main body of a workstation, a drawing control unit 20, and a drawing device 30. Unlike the host computer 10, the drawing control unit 20 and the drawing apparatus 30 are arranged at a work process place and are connected to the host computer 10 via a network. The monitor 40 is connected to the drawing control unit 20 and is installed adjacent to the drawing apparatus 30.

  The host computer 10 stores pattern data designed as CAD data. The pattern data is vector data, and the data is represented by pattern position coordinates (coordinates such as start point, end point, and contour). The host computer 10 displays an image of the designed circuit pattern on the monitor 10A based on the vector data.

  The pattern data is transmitted to the drawing control unit 20 as drawing data together with alignment data relating to alignment such as positioning holes formed on the substrate, substrate size data, and the like. Further, as will be described later, the pattern data is converted into two-dimensional image data for display, and is transmitted in association with the pattern data.

  In the drawing control unit 20, the transmitted pattern data is converted into raster data for drawing processing. Further, setting items for drawing processing are determined based on alignment data and substrate size data. When the operator performs a predetermined operation, the pattern image BD to be formed on the substrate SW is displayed on the monitor 20A of the drawing control unit 20 and the monitor 40 installed adjacent to the drawing device 30.

  As shown in FIG. 2, alignment holes P1 to P4 are formed at the four corners of the substrate SW, and alignment marks AM1 to AM3 are printed. As can be seen from the pattern image BD, the patterns P1, P2, and P3 are positioned according to the alignment marks AM1 to AM3, respectively. The mounting direction of the substrate SW is confirmed by this pattern image BD. That is, the longitudinal direction L of the substrate SW is parallel to the approach direction, and the alignment marks AM1, AM2 are arranged so that the end piece N opposite to the end piece M positioned on the left side along the approach direction faces the approach direction. The arrangement direction of the substrate SW is determined. At the work process place where the drawing apparatus 30 is arranged, the operator mounts the substrate SW in a predetermined direction after confirming the pattern image PD displayed on the monitor 20A (40).

  FIG. 4 is a flowchart showing data processing in the host computer 10. FIG. 5 is a diagram showing pattern display processing in the drawing control unit.

  In step S101, the vector data is converted into image data. Here, image data corresponding to a two-dimensional array of pixels such as bitmap data is generated. In step S102, the image data is transmitted to the drawing control unit 20 together with the pattern data and the alignment data. At this time, the image data is transmitted as compressed data such as JPEG. Further, the image data is subjected to a file editing process so as to be associated with the corresponding pattern data and transmitted. Specifically, a name corresponding to the pattern corresponding to the image data is set.

  In step S201, it is determined whether or not an operation for selecting a pattern image to be displayed has been performed by the operator. The operator can perform a selection operation of a pattern to be formed on the substrate by a keyboard operation or the like. When a pattern is selected, image data corresponding to the pattern is set in step S202. In step S203, a pattern image is displayed on the monitors 20A and 40 based on the image data.

  As described above, in the present embodiment, in the drawing system including the host computer 10, the drawing control unit 20, and the drawing device 30, the host computer 10 converts drawing pattern data, which is vector data such as CAD data, into image data, and is separated. The image data is transmitted together with the pattern data to the drawing control unit 20 arranged at the location. The drawing control unit 20 displays a pattern image on the monitors 20A and 40 based on the sent image data.

It is the figure which showed typically the drawing system which is this embodiment. It is the top view which looked at the board | substrate from the top. It is the figure which showed the pattern image displayed. It is the flowchart which showed the data processing in a host computer. It is the figure which showed the pattern display process in a drawing control part.

Explanation of symbols

10 Host computer (pattern data creation device)
20 Drawing Control Unit 20A Monitor 30 Drawing Device 40 Monitor

Claims (4)

A pattern data creation device for creating and saving pattern data for drawing which is vector data;
A drawing control unit that converts pattern data sent from the pattern data creation device into drawing data for drawing processing;
A drawing apparatus having a stage for supporting a substrate and performing drawing processing based on the drawing processing data;
The pattern control unit, the pattern data creation device arranged at a place away from the work process place where the drawing device is arranged ,
Data conversion processing means for converting the pattern data into image data corresponding to a pixel arrangement;
Data transmission means for transmitting the image data to the drawing control unit in association with corresponding pattern data;
The drawing control unit
A drawing system comprising display means for displaying a pattern image on a monitor connected to the drawing control unit based on image data of a pattern selected by an operator's selection operation performed in the drawing control unit . Drawing system according to claim 1, wherein the data transmitting unit, together with the pattern data, and transmits by accompanying least alignment data, the board size data. The drawing system according to claim 1, wherein the data conversion processing unit generates image data of a pattern image including an alignment mark that determines a position of each of a plurality of patterns formed on the substrate . The drawing system according to claim 1, wherein the monitor is disposed adjacent to the drawing control unit.

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