JP4457790B2 - Work fixing base, work fixing method and machining method - Google Patents

Description

  The present invention relates to a workpiece fixing base, a workpiece fixing method, and a machining method, and is particularly suitable for use in precision machining of a workpiece having a thin plate thickness.

  Conventionally, when a workpiece (workpiece) is machined, there is a temporary fixing adhesive as a fixing agent that temporarily fixes the workpiece to a fixed base. (For example, refer to Patent Document 1).

The workpiece is machined in a state where it is temporarily fixed to the fixed base, and after processing, the adhesive is dissolved by applying hot water to the workpiece and the fixed base, and this allows the workpiece to be easily removed from the fixed base. It is.
JP-A-7-224270

  However, in the above prior art, even if the fixing agent is applied on the fixing table in a fluidized state, an adhesive layer having a thickness of several μm is formed at the interface between the fixing table and the workpiece, which is parallel to the workpiece with respect to the fixing table. The degree was kept constant. That is, it is difficult to perform precision machining with the conventional work fixing method.

  In view of the above points, the present invention provides a work fixing base and a work fixing method for obtaining a high degree of parallelism after work processing by eliminating the film thickness of the fixing agent at the interface between the work and a fixing base for fixing the work. And it aims at providing the machining method using this workpiece | work fixing stand.

In order to achieve the above object, according to the first aspect of the present invention, there is provided a work fixing base (1, 100) for fixing a work (4) by a fixing agent (5, 50) that melts and solidifies, and the work is mounted thereon. comprising a work fixing surface (2, 102) for location, the work fixing surface, flowable groove fixative in a molten state (3,3a, 3b, 30,31,31a, 103 ) are formed The depth of the groove from the work fixing surface gradually increases along the groove forming direction .

According to the present invention, since the groove is formed in the work fixing surface on which the work is placed, the fixing agent in the melted state does not easily enter the contact surface between the work and the work fixing surface, and this groove is given priority. It can be made to flow so as to satisfy. As a result, the workpiece and the workpiece fixing surface can be directly contacted at a portion other than the groove to make the gap zero, and when the fixing agent filled in the groove is solidified, the lower surface of the workpiece that comes into contact with the fixing agent The workpiece and the workpiece fixing surface can be fixed by joining the groove and the groove. At this time, the film of the fixing agent is not formed in the contact surface between the workpiece and the workpiece fixing surface, and the parallelism between the workpiece and the workpiece fixing surface is not impaired. In addition, since the groove depth is inclined along the groove forming direction, it is easy for the molten fixing agent to flow from the groove portion having a small depth to the groove portion having a large depth along the gradient. And can easily spread the fixing agent throughout the groove.

  In addition, as described in claim 2, by providing the groove formation range on the workpiece fixing surface in an area larger than the workpiece and smaller than the workpiece fixing surface, the entire contact range between the workpiece and the workpiece fixing surface is provided. A groove can be present, the contact area between the fixing agent that has entered the groove and the lower surface of the workpiece can be increased, the fixing strength can be increased, and the fixing agent can flow out of the workpiece fixing surface. Can be prevented.

Further, as described in claim 3 , the grooves can be formed radially on the work fixing surface. In this case, the depth from the workpiece fixing surface of the groove, as described in claim 4, if deeper closer to the center of the radiation (32), fixed agent melting state, the outer periphery of the groove of the radial It can easily flow from the portion toward the radiation center which is the gradient direction of the groove.

As described in claim 5 , by the heating means (9, 9a, 9b) for heating the workpiece fixing base according to any one of claims 1 to 4 , the temperature of the workpiece fixing surface is made higher than the melting point of the fixing agent. After the fixing agent is melted and poured into the groove, the workpiece and the fixing agent (5a, 5b, 50a, 50b) in the molten state are brought into close contact with each other. The workpiece can be fixed to the workpiece fixing surface by cooling the temperature below the melting point and solidifying the fixing agent.

The heating means can use a planar heater (9, 9a) in close contact with the work fixing base or an embedded heater (9b) embedded in the work fixing base as described in claim 6. .

Alternatively, as described in claim 7 , the temperature of the work fixing surface of the work fixing table according to any one of claims 1 to 4 is set to room temperature, and the melting point of the fixing agent is normal temperature and freezing point temperature (about Using a material in the temperature range of 0 ° C), after pouring the fixing agent into the groove of the workpiece fixing surface kept at room temperature in a molten state, the temperature of the workpiece fixing surface is cooled to below the melting point and the fixing agent By solidifying the workpiece, the workpiece can be fixed to the workpiece fixing surface. The normal temperature is a normal temperature at which neither heating nor cooling is performed, for example, a temperature in the range of 10 ° C. to 40 ° C.

  That is, if a fixing agent having a melting point lower than room temperature is used, the fixing agent can be in a molten state on the work fixing surface at room temperature without forcibly heating the fixing agent. Furthermore, the fixing agent in the molten state can be easily solidified by, for example, applying water lower than normal temperature and higher than the freezing point temperature to the work fixing base, and cooling the temperature of the work fixing surface below the melting point. In addition, the removal of the work from the work fixing base, for example, by placing water at room temperature on the work fixing base and making the temperature of the work fixing surface higher than the melting point of the fixing agent, the fixing agent is easily melted, The workpiece can be removed from the workpiece fixing surface.

As described in claim 8 , the melted fixing agent can be easily poured into the groove by promoting air flow by air blow (8 a).

Further, as described in claim 9 , a cooling liquid passage (6) through which the cooling liquid (7a) flows is formed on the outer periphery of the work fixing surface, and the temperature is lower than the melting point of the fixing agent. By causing the cooling liquid to flow through the cooling liquid passage, the temperature of the work fixing base can be lowered to solidify the molten fixing agent in the groove.

Alternatively, as described in claim 10 , the temperature of the workpiece fixing surface is lowered by applying a cooling liquid (7a) having a temperature lower than the melting point of the fixing agent to at least one of the workpiece fixing base and the workpiece. Thus, the molten fixing agent in the groove can be solidified.

There have also, as described in claim 11, the work, and further cooling the work fixing surface by placing the metal container (13) containing the liquid (14) lower than the melting point of the fixing agent temperature in the work Thus, the molten fixing agent in the groove can be solidified.

  As a result, the fixing agent can be cooled and solidified on the spot without moving the fixing base while the fixing agent is in a molten state and in close contact with the workpiece, so that the workpiece can be displaced on the workpiece fixing surface. It can be prevented from occurring, and does not hinder precision machining of the workpiece.

In addition, as described in claim 12 , after the workpiece is machined in a state of being fixed to the workpiece fixing surface by the solidified fixing agent, a liquid (7b) having a temperature higher than the melting point is applied to at least the workpiece fixing base and the workpiece. By applying to either one, the solidified fixing agent is melted by heat conduction, and the workpiece can be easily removed from the workpiece fixing base. As the liquid having a temperature higher than the melting point of the fixing agent, for example, a processing liquid such as high-temperature water (that is, hot water) or grinding water can be used.

In addition, as described in claim 13 , the workpiece fixed and machined by the workpiece fixing method according to claim 11 is removed from the workpiece fixing table, and then annealed (annealing treatment). ), Machining distortion can be removed.

According to a fourteenth aspect of the present invention, one work fixing base and the other work fixing base described in any one of the first to fourth aspects are respectively connected to a first fixing base (1) and a second fixing base. (100), the work fixing surface (2) of the first fixing table is heated to the first melting point or higher by the first heating step, and the first fixing agent (5) having the first melting point is added to the first fixing agent (5). After the first surface (4a) of the workpiece and the workpiece fixing surface of the first fixing table are bonded by pouring into the grooves (3, 3a, 3b) of the first fixing table, the workpiece is removed by the first cooling step. The first surface is fixed to the first fixing base by cooling to a temperature equal to or lower than the first melting point, and the second surface (4b) facing the first surface is machined, and then the second heating is performed. The work fixing surface (102) of the second fixing table is heated above the second melting point higher than the first melting point by the process, By pouring the second fixing agent (50) having a melting point of (2) into the groove (103) of the second fixing base, while maintaining the fixing state between the first surface of the workpiece and the first fixing base, The second surface of the workpiece and the workpiece fixing surface of the second fixing table are adhered, the workpiece is sandwiched between the first and second fixing tables, and the temperature of the workpiece is changed to the first melting point and the first melting point by a melting and solidifying process. By adjusting the temperature between the two melting points, the first surface and the first fixing table are separated from each other while maintaining the fixed state between the second surface and the second fixing table. Machining the surface of 1 and raising the temperature of the workpiece to the second melting point or higher by the remelting step to melt the second fixing agent and removing the second surface from the second fixing base. Features.

  According to the present invention, in the first heating step, the first fixing agent having the first melting point having a relatively low temperature is heated and melted to the first melting point or higher, and further, in the first cooling step, the first fixing agent is melted. By cooling to a temperature lower than the melting point and solidifying, the first surface of the workpiece in contact and the first fixing base are fixed, and the second surface facing the first surface is machined. Further, in the second heating step, the second fixing agent having the second melting point higher than the first melting point is heated to be melted to the second melting point or higher, and further, as the melting and solidifying step, from the second melting point. The second fixed agent is solidified by adjusting to an intermediate temperature lower and higher than the first melting point to fix the machined second surface in contact and the second fixing base, and And the first fixing base at an intermediate temperature under a molten state of the first fixing agent, and the exposed first surface is machined. In this way, machining can be performed while maintaining the state where the first and second surfaces of the workpiece facing each other are fixed to the fixed base, so that the surface roughness of both surfaces can be increased and the parallelism of both surfaces can be increased. Can be increased.

In the remelting step, as described in claim 15 , the second fixing is performed by applying a liquid (7b) having a temperature higher than the second melting point to at least one of the second fixing base and the workpiece. The agent can be melted.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a workpiece fixing base 1 and a workpiece 4 according to the first embodiment. The procedure for fixing and machining the workpiece 4 will be described later.

  The workpiece fixing base 1 has a rectangular parallelepiped shape made of a steel material S50C having a length of 100 mm, a width of 100 mm, and a thickness of 15 mm. The outermost peripheral portion of the workpiece fixing surface 2 is supplied with water from a cooling liquid supply port 7, for example, water A rectangular cooling liquid passage 6 is formed as a groove for flowing the cooling liquid 7a. Further, a drain port 6 a for discharging the cooling liquid from the cooling liquid passage 6 is formed on the outer wall of the cooling liquid passage 6.

  The work contact surface 2a is formed on the inner side of the cooling liquid passage 6 on the work fixing surface 2 in a size of 80 mm × 80 mm smaller than the work fixing surface 2, and the surface of the work contact surface 2a will be described later. A grid-like groove 3 for filling the fixing agent is formed by a rectangular outer periphery groove 3a and a lattice-like groove 3b connecting the opposite sides of the groove 3a on the inner side.

  One groove shape has a triangular cross section with an opening width of 3 mm and a depth of 0.5 mm, and the lattice spacing is 5 mm. Note that the groove depth does not have to be constant. For example, the groove depth may gradually increase along the direction in which the groove 3b is formed. Thereby, the fluidity | liquidity to the direction where the depth in the groove | channel 3b of the fixing agent 5a of the molten state mentioned later increases can be accelerated | stimulated.

  The adhesive strength (maximum load) between the workpiece contact surface 2a and the workpiece 4 depends on the shearing force as the material property of the fixing agent itself and the opening area of the groove 3 immediately below the workpiece 4 (≈opening width × groove length). Determined. That is, the opening area of the groove portion 3 is an area of a portion that is not in direct contact between the workpiece 4 and the workpiece contact surface 2a. Therefore, it can be said that the opening area of the groove portion 3 is proportional to the adhesive strength. However, since the amount of the fixing agents 5a and 5b to be used increases as the opening area of the groove 3 increases, it is not necessary to increase the opening area more than necessary, that is, to increase the number of the grooves 3b.

  A workpiece 4 is placed on the surface of the workpiece fixing surface 2 (specifically, the workpiece contact surface 2a). The workpiece 4 in the first embodiment is quartz glass having a diameter of 50 mm and a thickness of 0.5 mm. That is, the formation range of the groove portion 3 is larger than that of the work 4, and the lattice-like groove 3 b extends outward from the contact end portion of the work 4.

  FIG. 1 shows a situation where the work fixing base 1 is placed on a hot plate 9 as a heating means.

  FIG. 2 schematically shows a state in which the workpiece 4 is fixed on the workpiece fixing base 1 with fixing agents 5a and 5b as a cross section taken along line AB in FIG. One surface (first surface) 4a of the workpiece 4 and the workpiece contact surface 2a of the workpiece fixing surface 2 are in direct contact with each other. The grooves 3a and 3b formed on the work fixing surface 2 are filled with paraffin having a melting point of 75 ° C. as the fixing agent 5a by flowing in a molten state.

  That is, most of the molten paraffin 5a fills the groove 3b, and the excess paraffin 5b leaks and accumulates around the end of the workpiece 4. The fixing agents 5a and 5b cannot exist between the first surface 4a and the workpiece contact surface 2a. Therefore, the gap between the workpiece 4 and the workpiece fixing surface 2 can be made zero.

  The paraffin is solidified by cooling from a molten state to a temperature lower than the melting point, and becomes a fixing agent 5a for the groove 3b, thereby bonding and fixing the first surface 4a of the work 4 and the bottom surface of the groove 3b (the slope of the triangular prism in FIG. 2). . Further, the fixing agent 5b around the end portion of the work 4 also contributes to the adhesion and fixation between the work 4 and the work contact surface 2a.

  Next, the machining procedure of the workpiece 4 will be described. FIG. 3 is a diagram illustrating a schematic configuration of a processing machine used in the machining method according to the first embodiment.

  A rotating grindstone 22 having a hazard prevention grindstone cover 21 is provided on the processing machine main body 20 as a grinder, and the lower surface (first surface) 4a of the workpiece 4 is fixed to the workpiece via the fixing agents 5a and 5b. It is fixed to the fixed base 1. The work fixing base 1 formed of this steel material (S50C) is magnetically attracted to an electromagnetic chuck type table 23, and the table 23 is moved back and forth and left and right, whereby the upper surface of the work 4 fixed to the work fixing base 1 ( The second surface 4b is ground by the rotating grindstone 22.

  At this time, the coolant 29, which is a machining fluid, passes through the coolant hose 27, the coolant opening / closing cock 26 for adjusting the flow rate, and the coolant spraying port 25 from the coolant storage portion 28 on the second surface 4 b that is the processed portion of the workpiece 4. Be sprayed. In this way, the coolant 29 sprayed on the second surface 4b of the workpiece 4 flows down to the coolant receiver 24 under the table 23 while removing chips generated during processing, and from the coolant receiver 24 to the coolant storage section. Return to 28.

  Note that the coolant storage unit 28 includes a mechanism for removing chips, a pump for supplying the coolant 29 to the processing unit, and a temperature adjusting mechanism for adjusting the temperature of the coolant 29 (not shown).

  FIG. 4 is a diagram showing a machining procedure centering on the workpiece fixing base 1 and the workpiece 4. Before the work 4 is mounted on the processing machine, first, the work 4 is fixed to the work fixing base 1. Therefore, as shown in FIG. 4A, the work fixing base 1 on which nothing is placed is placed on a horizontal hot plate 9 and heated to 90 ° C. higher than the melting point (75 ° C.) of the fixing agent 5a. (FIG. 4A).

  Next, as shown in FIG. 4B, a quartz glass workpiece 4 is placed on the workpiece fixing surface 2 in detail, in a region where the lattice-like grooves 3b are formed, in a state where the workpiece fixing table 1 is heated. Thereafter, a weight is placed on the upper surface 4 b of the work 4 via silicon rubber 11 for protecting the work. Thereby, the lower surface (first surface) 4a of the workpiece 4 is in close contact with the workpiece fixing surface 2 of the workpiece fixing base 1 with no gap.

  Further, separately, paraffin as the fixing agent 5 heated to a melting point (75 ° C.) or higher to be liquid is poured into the lattice-shaped grooves 3 b around the work 4. At this time, the liquid fixing agent 5a quickly flows into the groove 3b below the lower surface 4a of the heated workpiece 4 and fills the groove 3b without a gap. Then, after all the fixing agent 5a is filled between the workpiece 4 and the groove 3b of the workpiece fixing surface 2, the power switch of the hot plate 9 is turned off.

  Next, as shown in FIG. 4 (c), normal temperature water (cooling liquid) 7 a is allowed to flow from the liquid supply port 7 to the cooling liquid passage 6 formed in the work fixing base 1, and the work fixing base 1. Is cooled to 75 ° C. or lower, which is the melting point of the fixing agent 5a, to solidify the fixing agents 5a and 5b (cooling step). At this time, the cooling time can be shortened by continuing to supply the cooling water 7a to the cooling liquid passage 6 while discharging the water 7a from the drain port 6a.

  Next, as shown in FIG. 4D, after the fixing agents 5a and 5b are solidified, the weight 10 and the like are removed, and the work fixing table 1 to which the work 4 is fixed is used as a table 23 of an electromagnetic chuck type grinding machine. As a machining process, the upper surface (second surface) 4b of the work 4 is subjected to surface grinding of about 50 μm as a machining process.

  After machining, as shown in FIG. 4 (e), the workpiece 4 is removed from the grinder table 23 while being fixed to the workpiece fixing base 1, and the melting points (75 ° C.) of the fixing agents 5a and 5b are removed from the liquid supply port 7. ) The 90 ° C. hot water 7b is applied to the workpiece 4 and the workpiece fixing surface 2 to remelt the fixing agents 5a and 5b, and the workpiece 4 is removed from the workpiece fixing base 1. In the remelting step of the fixing agents 5a and 5b, the work fixing base 1 may be placed on the hot plate 9 and heated by the hot plate 9 as in the case (a).

  In the first embodiment, since the thin plate (quartz glass plate having a thickness of 0.5 mm) is ground (50 μm), processing distortion occurs and the workpiece 4 is removed from the workpiece fixing base 1 when the workpiece 4 is removed from the workpiece fixing base 1. Warpage may occur. Therefore, in order to remove the strain after the workpiece 4 is processed, after degreasing with a hydrocarbon-based cleaning agent (for example, NS Clean (manufactured by Japan Energy)), the quartz glass workpiece 4 is sandwiched between alumina plates at 1150 ° C. Then, annealing treatment (annealing treatment) was performed in an electric furnace for 1 hour.

  As described above, even when the quartz glass workpiece 4 made of a non-metallic material is machined, the workpiece 4 can be easily detached from the workpiece fixing base 1 using the fixing agents 5a and 5b that can be melted and solidified. Further, when the workpiece 4 and the workpiece fixing base 1 are fixed, the gap between them can be made zero, so that the machining accuracy of the workpiece 4, particularly the parallelism can be increased.

(Second Embodiment)
Next, a machining procedure in the second embodiment of the present invention will be described. The second embodiment is different from the first embodiment mainly in the material and shape of the workpiece 4 and the melting point of the fixing agent 5, and the other configurations are the same. The following description will be made with reference to FIGS. 1 to 4 showing a configuration common to the first embodiment, focusing on parts different from the first embodiment. In FIG. 4 showing the processing procedure, the process shown in FIG. 5 is performed instead of the process shown in FIG. 4C in the second embodiment.

  The workpiece fixing base 1 in the second embodiment has the same configuration as that of the first embodiment. That is, S50C, the outer dimensions of 100 × 100 × 15 (mm), the region where the groove 3 is formed is 80 × 80 (mm), the opening width 3 mm × depth 0.5 mm of the grid-like grooves 3a, 3b, The groove interval is 5 mm or the like. Further, the point that the cooling liquid passage 6 and the drain port 6a are provided in the outer peripheral portion of the work fixing surface 2 is the same as that of the first embodiment.

  The work fixing base 1 is heated on the hot plate 9 to 70 ° C., which is higher than the melting point (51 ° C.) of the fixing agent 5 (FIG. 4A).

  In the second embodiment, a sapphire plate workpiece 4 having a diameter of 40 mm and a thickness of 0.4 mm is placed on the workpiece fixing surface 2 of the heated workpiece fixing table 1, and then the upper surface 4a of the workpiece 4 is placed. A metal weight 10 is put on the silicon rubber 11. Thereby, the lower surface (first surface) 4a of the workpiece 4 of the sapphire plate is in close contact with the workpiece fixing surface 2 of the workpiece fixing base 1 with no gap.

  In the heated state of the workpiece 4 and the workpiece fixing base 1, in the second embodiment, when solid paraffin (melting point 51 ° C.) as the fixing agent 5 is applied to the groove 3 b around the end of the workpiece 4, a solid is obtained. The shaped fixing agent 5 immediately melts to become a liquid, flows into the groove 3b, and fills the groove 3b immediately below the workpiece 4 without a gap (FIG. 4B).

  In order to cool the fixing agents 5a and 5b by turning off the power switch of the hot plate 9, in the second embodiment, as shown in FIG. Put water 14 and place it on a metal weight 10. Thereby, the heat of the workpiece 4 and the workpiece fixing table 1 is conducted to the water-filled container 13 through the silicon rubber 11 and the weight 10, and the workpiece 4 and the workpiece fixing table 1 in the vicinity thereof are cooled. The water-containing container 13 may be a container having an opening as shown in FIG. 5 or a sealed container.

  When the workpiece 4 is cooled to a temperature lower than the melting point 51 ° C. of the fixing agent 5, the fixing agents 5a and 5b are solidified. When the work 4 is fixed to the work fixing base 1 by this, the water-filled container 13, the weight 10 and the silicon rubber 11 are removed from the work 4, and the work fixing base 1 is placed on the electromagnetic chuck type grinder table 23, This is fixed, and a machining process for polishing the surface by 20 μm while applying the coolant 29 is performed (FIG. 4D).

  The workpiece fixing base 1 after processing is removed from the grinder table 23 while fixing the processed workpiece 4, and 70 ° C hot water 7b having a melting point (51 ° C) or more of the fixing agents 5a and 5b is supplied from the liquid supply port 7. Sprinkle on the workpiece 4 and workpiece fixing surface 2 to remelt the fixing agent 5 and remove the workpiece 4 from the workpiece fixing base 1 (FIG. 4E).

  In order to remove the strain after the work 4 is processed, also in the second embodiment, after completely degreased with a hydrocarbon-based cleaning agent, the sapphire work 4 is sandwiched with an alumina plate, and then in an electric furnace at 800 ° C. for 1 hour. Annealing treatment was performed.

(Third embodiment)
Next, a third embodiment of the present invention will be described. The third embodiment is different from the first and second embodiments in the shapes of the workpiece fixing base 1 and the groove 3 as shown in FIG. 6A is a top view of the work fixing base 1 in the third embodiment, and FIG. 6B is a cross-sectional view taken along line CD in FIG.

  The work fixing base 1 of the third embodiment is a rectangular parallelepiped block made of S50C having a length of 300 mm × width of 300 mm × thickness of 15 mm, and the work fixing surface 2 on the surface thereof has six radial grooves 30, An outermost circular groove 31 and a plurality of concentric grooves 31 a that connect the ends of the radial grooves 30 are formed. The opening width of each groove 30, 31, 31a is 3 mm.

  The radial groove 30 gradually increases in depth from the workpiece fixing surface 2 toward the radial center 32 from the outer periphery. That is, the outermost circumferential groove 31 has a diameter of 250 mm and a groove depth of 0.2 mm, and the outermost circumferential groove depth of the radial groove 30 is also 0.2 mm. The groove depth at the radiation center 32 is 1.5 mm, and the gradient of the groove depth from the outermost periphery to the radiation center 32 is a linear gradient. Each concentric groove 31 a is formed to be equal to the groove depth of the radial groove 31 at the intersection with the radial groove 31.

  As described above, the workpiece fixing base 1 in the third embodiment is provided with a gradient so that the radial groove 31 becomes deeper from the outer peripheral portion toward the central portion. It is easy to flow to the center. Therefore, when the contact area between the workpiece 4 and the workpiece fixing base 1 is large, it becomes easy for the fixing agent 5 to spread all over the groove portion 3 immediately below the workpiece 4. Also in the third embodiment, the size of the groove 3 (formation area on the workpiece fixing surface 2) is smaller than the size of the workpiece fixing surface 2 that is the surface of the workpiece fixing base 1, and is smaller than that of the workpiece 4. It is desirable to make it large.

  Note that a plurality of cooling liquid passages 1a such as water and machining liquid are provided on the bottom surface (surface facing the workpiece fixing surface 2) 2b of the workpiece fixing base 1 of the third embodiment.

  Next, the processing procedure of the workpiece 4 in the third embodiment will be described with reference to FIG. In the third embodiment, the grinding machine shown in FIG. 3 is used as in the first and second embodiments.

  First, as shown in FIG. 7A, the work fixing base 1 is placed on a heat insulating silicon rubber sheet 12 laid on an electromagnetic chuck type grinding machine table 23. Further, a magnet type silicon rubber heater 9a is attached to the workpiece fixing surface 2 which is the surface of the workpiece fixing table 1, and thereby the workpiece fixing surface 2 is heated to 70 ° C.

  Next, the silicon rubber heater 9 a is removed from the workpiece fixing surface 2, and a quartz workpiece 4 having a diameter of 200 mm and a thickness of 2 mm is placed on the workpiece fixing surface 2. At this time, it arrange | positions so that the circular center of the workpiece | work 4 and the radiation center 32 of the groove part 3 formed on the workpiece | work fixed surface 2 may correspond substantially. Further, a metal weight 10 is placed on the upper surface 4 b of the work 4 through a protective silicon rubber 11. Thereby, the quartz workpiece 4 is in close contact with the workpiece fixing surface 2 (specifically, the workpiece contact surface 2a) with no gap.

  And the paraffin (melting point 51 degreeC) as the fixing agent 5 made into the liquid form by heating is poured into the groove | channels 31 and 31a around a quartz workpiece | work. At this time, the liquid fixing agent 5 can easily flow from the outer peripheral side toward the central portion along the gradient of the radial groove 31 (FIG. 7B).

  When the fixing agent 5a, 5b is filled in the entire groove portion 3 (particularly, the groove immediately below the workpiece 4), the grinding water 29, which is a processing liquid whose temperature is adjusted to room temperature in the coolant storage portion 28, is discharged from the coolant spray port 25. Then, it flows into the cooling liquid passage 1a on the back surface 2b of the work fixing base 1, thereby cooling the work fixing base 1 and the work 4 (FIG. 7C).

  The temperature of the work fixing base 1 is cooled to 51 ° C. or lower, which is the melting point of the fixing agent 5, and the fixing agents 5 a and 5 b are solidified to fix the workpiece 4 to the workpiece fixing surface 2. Thereafter, the silicon rubber sheet 12 for heat insulation laid under the bottom surface 4a of the work 4 is removed, and the work fixing base 1 is directly placed and fixed on the electromagnetic chuck type grinding machine table 23, and the upper surface 4b of the work 4 is surface-polished. (FIG. 7m (d)).

  After the machining, as shown in FIG. 7 (e), the workpiece 4 is fixed to the workpiece fixing base 1 and removed from the grinder table 23, and the melting points (51 ° C.) of the fixing agents 5a and 5b are supplied from the liquid supply port 7. ) The above-mentioned 70 ° C. hot water 7b is applied to the workpiece 4 and the workpiece fixing surface 2, the fixing agents 5a and 5b are remelted, and the workpiece 4 is removed from the workpiece fixing base 1. If necessary, an annealing process for removing the distortion of the workpiece 4 can be performed as in the first and second embodiments.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described. The fourth embodiment uses a workpiece fixing base 1 in which a radial groove 30 and a plurality of concentric grooves 31, 31a are formed on the workpiece fixing surface 2, as in the third embodiment. Other than the above, the dimensions and material of the workpiece 4, the dimensions of the workpiece fixing base 1, the melting point of the fixing agent 5, and the like are different. The following description will be made with reference to FIGS. 3, 6, and 7 showing a configuration common to the third embodiment, with a focus on differences from the third embodiment. In FIG. 7 showing the processing procedure, the process shown in FIG. 8 is performed instead of the process shown in FIGS. 7A and 7B in the fourth embodiment.

  The workpiece fixing base 1 in the fourth embodiment has a rectangular parallelepiped shape of 500 mm long × 500 mm wide × 25 mm thick made of S50C. The groove portion 3 includes six radial grooves 30 and a plurality of concentric circular grooves 31 and 31a similar to the third embodiment shown in FIGS. 6A and 6B. The diameter is 450 mm. The groove opening width of each groove 30, 31, 31 a is 3 mm, the groove depth is 0.5 mm at the outermost circular position, and 3 mm at the radiation center 32, and the change of the groove depth between them is a linear gradient. ing.

  On the other hand, in the fourth embodiment, the fixing agent 5 uses paraffin having a melting point of 18 ° C. that is liquid at room temperature. Therefore, unlike the first to third embodiments, there is no need for a heating step for once melting the fixing agent 5 in order to fix the workpiece 4.

  Next, a processing procedure in the fourth embodiment will be described.

  First, the work fixing base 1 is placed on an electromagnetic chuck table 23 of a grinding machine, and a glass work 4 having a diameter of 400 mm and a thickness of 4 mm is substantially aligned on the work fixing surface 2. Put it like that. Further, a metal weight 10 is placed on the upper surface 4 a of the work 4 through a protective silicon rubber 11. Thereby, the glass workpiece 4 is in close contact with the workpiece fixing surface 2 (specifically, the workpiece contact surface 2a) with no gap.

  Then, paraffin (melting point: 18 ° C.) that is a liquid fixing agent 5 at room temperature is poured into the grooves 30 and 31 near the peripheral edge of the workpiece 4. At this time, since the area of the workpiece 4 is large, the liquid fixing agent 5 may not sufficiently reach the groove portion 3 immediately below the workpiece. In that case, as shown in FIG. 8, the air blow 8 a from the air blow nozzle 8 is blown to the groove 30 at the end of the work 4, and the liquid fixing agent 5 is forced to the radiation center 32 of the groove 30. By feeding in, the fixing agent 5a can be spread over the entire grooves 30 and 31a immediately below the workpiece 4.

  When the fixing agent 5a is filled in the entire grooves 30 and 31a immediately below the workpiece 4, the weight 10 and the workpiece 4 on which the grinding fluid 29 adjusted to 10 ° C. lower than the melting point (18 ° C.) is placed on the workpiece 4 and Sprinkling on the workpiece fixing surface 2, the workpiece 4 and the workpiece fixing surface 2 are cooled to a temperature of 18 ° C. or lower.

  Thus, after the fixing agents 5a and 5b are solidified, the weight 10 and the silicon rubber 11 are removed from the upper surface 4b of the workpiece 4, and the upper surface 4b is subjected to surface polishing on the grinder table 23 as it is (FIG. 7D). ).

  After machining, as shown in FIG. 7 (e), the workpiece 4 is fixed to the workpiece fixing base 1 and removed from the grinder table 23, and the melting points (18 ° C.) of the fixing agents 5a and 5b are supplied from the liquid supply port 7. ) The above water 7b at room temperature of 25 ° C. is applied to the workpiece 4 and the workpiece fixing surface 2 to remelt the fixing agents 5a and 5b, and the workpiece 4 is removed from the workpiece fixing base 1.

(Fifth embodiment)
Next, a fifth embodiment of the present invention will be described. The fifth embodiment is characterized in that both the front and back surfaces of the workpiece 4 made of a thin metal plate are fixed to the two workpiece fixing bases 1 and 100 of the present invention with fixing agents having different melting points and ground.

  Below, the process sequence of the workpiece | work 4 in this 5th Embodiment is demonstrated based on FIG. In addition, about the part which is common in the process sequence in the said 1st Embodiment, while omitting drawing, description is simplified using the same code | symbol.

  In the fifth embodiment, the workpiece 4 is an aluminum thin plate of material: A1050 material, size: length 70 mm × width 40 mm × plate thickness 2 mm. Further, both the work fixing bases 1 and 100 as the first and second fixing bases are rectangular parallelepipeds of 100 mm long × 100 mm wide × 15 mm thick made of S50C. A grid-like groove portion 3 (groove opening width 3 mm × depth 0.5 mm, groove interval 5 mm) similar to that in the first embodiment is formed.

  Note that a plurality of sheathed heaters 9b are embedded in the workpiece fixing bases 1 and 100 in the fifth embodiment in advance, so that other heating means such as a hot plate 9, a silicon rubber heater 9a, or hot water can be used. It is possible to heat the work 4 on the spot without using it, or with the work 4 placed on it or without moving the work fixing bases 1 and 100.

  FIG. 9A shows a first processing step in which the second surface 4b of the workpiece 4 is ground. Since the procedure for fixing the workpiece 4 to the workpiece fixing base 1 in order to perform the first machining step is substantially the same as that in the first embodiment, hereinafter, referring to FIGS. 4 (a) to (c). Briefly described.

  First, in a state where the workpiece 4 is placed so that the first surface 4a of the workpiece 4 is in contact with the workpiece fixing surface 2 of the first fixing table 1, a sheathed heater 9b embedded in the first fixing table 1 is used. Heat to a temperature (70 ° C.) higher than the melting point of the first fixative paraffin (first melting point, 51 ° C.).

  When the workpiece 4 reaches a predetermined temperature (70 ° C.), the first fixing agent 5 is applied to the first surface 4a of the workpiece 4 that has been in contact with the workpiece fixing surface 2, and the workpiece is heated again. When placed on the fixing surface 2, the first fixing base 5 is completely melted into a liquid state, and the first fixing agent 5 in the direct contact portion between the first surface 4a of the workpiece 4 and the workpiece contact surface 2a is formed in the groove 3b. (First heating step).

  When the groove 3b immediately below the workpiece 4 is all filled with the first fixing agent 5a and the remaining first fixing agent 5b is accumulated around the end of the workpiece 4, the heating by the sheath heater 9b is performed. Is stopped, and the workpiece 4 and the first fixed base 1 are cooled. For this cooling, water 7 a at a temperature not higher than the first melting point (51 ° C.) of the first fixing agent, for example, room temperature water 7 a is drained into the cooling liquid passage 6 provided on the outer peripheral portion of the work fixing base 1. It is performed by flowing while discharging from the mouth 6a (first cooling step).

  Thereby, the first fixing agents 5 a and 5 b are solidified, and the workpiece 4 is fixed to the first fixing base 1. In this state, the first fixing base 1 is fixed to the electromagnetic chuck type processing machine table 23, and the second surface 4b facing the first surface 4a of the workpiece 4 is surfaced by the end mill cutter 22a as a machining process. Processing is performed (FIG. 9A).

  At this time, the second fixing base 100 which is the other fixing base is heated to a temperature (90 ° C.) higher than the melting point of the second fixing agent 50 (second melting point, 75 ° C.). And the 2nd fixing agent 50 is apply | coated to the workpiece | work fixed surface 102 of the heated 2nd fixing stand 100, and this is fuse | melted.

  The workpiece 4 is fixed to the first fixing table so that the workpiece fixing surface 102 of the second fixing table 100 in which the second fixing agent 50 is melted and the second surface 4b of the machined workpiece 4 are brought into contact with each other. 1 and the second fixing base 100 (second heating step).

  At this time, the first fixed base 1 after machining is not heated, and the workpiece 4 is fixed by the first fixing agent 5a solidified with the first surface 4a, so that FIG. As shown in FIG. 3, the first fixing base 1 can be reversed while the work 4 is fixed, and can be placed on the second work fixing surface 102 of the second fixing base 100 placed below.

  At this time, the second surface 4b of the workpiece 4 and the workpiece of the second fixing table 100 are brought into contact with the workpiece fixing surface 102 of the second fixture 100 and the second surface 4b of the machined workpiece 4. The second fixing agent 50 melted in a liquid form at the site of direct contact with the contact surface 102a is provided with the work fixing surface of the second work fixing table 100 by the first fixing table 1 serving as a weight. It flows into the groove 103 formed in 102.

  When the groove 103 immediately below the second surface 4b of the work 4 is completely filled with the second fixing agent 50a, and the remaining second fixing agent 50b is accumulated around the end of the work 4. Then, heating by the sheathed heater 9b is stopped.

  In this manner, the temperature of the first fixing base 1 is set to the first melting point (51 ° C.) of the first fixing agent 5 with the workpiece 4 sandwiched between the first fixing base 1 and the second fixing base 100. And a second melting point (75 ° C.) of the second fixing agent 50 is heated to an intermediate temperature (60 ° C.). At this time, the heating of the second fixing base 100 is stopped, and the second fixing base 100 is heated to a temperature (90 ° C.) higher than its melting point to melt the second fixing agent 50, through the workpiece 4. It becomes the same intermediate temperature as the 1st fixing stand 1 by heat conduction.

  When the temperature of the workpiece 4 reaches an intermediate temperature (60 ° C.), the second fixing agent 50a filling the groove 103 between the second surface 4b and the second fixing base 100 is lower than the melting point (75 ° C.). The second surface 4b and the second fixing base 100 are fixed by solidifying at a temperature.

  On the other hand, the first fixing agent 5a filling the groove 3 between the first surface 4a and the first fixing base 1 has a melting point (51 ° C.) when the temperature of the workpiece 4 reaches an intermediate temperature (60 ° C.). ) Since it is at a higher temperature, it melts and becomes liquid. Therefore, it is possible to easily separate the first surface 4a and the first fixing table 1 while the second surface 4b and the second fixing table 100 are fixed (melting and solidifying step).

  After removing the first fixing base 1 from the work 4, the heating of the second fixing base 100 is stopped, and the second fixing base 100 and the work 4 fixed thereto are cooled. The second fixing base 100 is fixed to the electromagnetic chuck type processing machine table 23, and the first surface 4a of the workpiece 4 is subjected to surface processing by the end mill cutter 22a as a machining process (FIG. 9C).

  After the processing of the first surface 4a, in order to remove the work 4 from the second fixing base 100, the work 4 and the second fixing base 100 have a temperature higher than the melting point (75 ° C.) of the second fixing agent 50. The hot water 7b is applied to melt the second fixing agent 50a between the second surface 4b and the second fixing base 100, and this is poured off (remelting step).

  In this way, the first surface 4a of the workpiece 4 and the second surface 4b opposite to the first surface 4a are sequentially connected to the first fixed base 1 and the second fixed base 100, respectively, having first melting points different from each other. Since the surface processing can be performed while being fixed by the fixing agent 5 and the second fixing agent 50, there is no deviation between each fixing base and the workpiece 4, and the parallelism of the workpiece after processing can be increased.

(Other embodiments)
In each of the embodiments described above, the workpiece 4 is not limited to sapphire, quartz, glass, metal, or the like, and ceramic, resin, or the like may be used. Further, the machining method is not limited to surface grinding, surface polishing, and milling, and can be applied to cutting and drilling. Furthermore, the material of the fixing bases 1 and 100 is not limited to steel (S50C), and ferritic stainless steel, alumina, or the like that adheres to the magnet can be used, and can be appropriately selected according to the workpiece and processing method.

It is a perspective view of a work fixing stand and a work of a 1st embodiment of the present invention. It is the cross-sectional schematic between AB in FIG. It is a figure which shows schematic structure of the processing machine in 1st Embodiment. (A)-(e) is a figure which shows the procedure of the machining in 1st Embodiment. It is a figure which shows the cooling process in 2nd Embodiment. It is a figure which shows the workpiece fixing base in 3rd Embodiment, (a) is a top view, (b) is the cross-sectional schematic between CD in (a). (A)-(e) is a figure which shows the procedure of the machining in 3rd Embodiment. It is a figure which shows a part of procedure of the machining in 4th Embodiment. (A)-(c) is a figure which shows the procedure of the machining in 5th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Work fixing base (1st fixing base), 100 ... Work fixing base (2nd fixing base),
2, 102 ... Work fixing surface, 2a ... Work contact surface, 3 ... Groove, 3a ... Outer peripheral groove,
3b ... lattice-like grooves, 4 ... work, 4a ... first surface, 4b ... second surface,
5 ... Fixing agent (first fixing agent), 50 ... Second fixing agent, 6 ... Liquid passage for cooling,
6a ... Drainage port, 30 ... Radial groove, 31 ... Outer peripheral groove, 31a ... Concentric circular groove,
32 ... Radiation center.

Claims (15)

A workpiece fixing base (1, 100) for fixing the workpiece (4) by a fixing agent (5, 50) that melts and solidifies;
A workpiece fixing surface (2, 102) for placing the workpiece is provided, and grooves (3, 3a, 3b, 30, 31, 31a, 103) on which the fixing agent can flow in a molten state are provided on the workpiece fixing surface. ) Is formed ,
The workpiece fixing base, wherein a depth of the groove from the workpiece fixing surface is gradually increased along a forming direction of the groove .   2. The work fixing base according to claim 1, wherein a formation range of the groove on the work fixing surface is an area larger than the work and smaller than the work fixing surface.   The work fixing base according to claim 1, wherein the groove is formed in a radial pattern on the work fixing surface. The depth of the said groove | channel from the said workpiece fixing surface is formed so deeply that it is near the center (32) of the said radiation, The workpiece fixing stand of Claim 3 characterized by the above-mentioned. The heating means (9, 9a, 9b) for heating the workpiece fixing base according to any one of claims 1 to 4 , by heating the temperature of the workpiece fixing surface to a temperature equal to or higher than the melting point of the fixing agent. Then, after pouring the fixing agent into the groove in a molten state, the work and the fixing agent (5a, 5b, 50a, 50b) in the molten state are brought into close contact with each other, and then the temperature of the work fixing surface is set. A work fixing method, wherein the work is fixed to the work fixing surface by solidifying the fixing agent by cooling to below the melting point. The workpiece according to claim 5 , wherein the heating means is a planar heater (9, 9a) in close contact with the workpiece fixing base or an embedded heater (9b) embedded in the workpiece fixing base. Fixing method. The temperature of the workpiece fixing surface of the workpiece fixing table according to any one of claims 1 to 4 is set to room temperature, and a material having a melting point in a temperature range between room temperature and freezing point is used as the fixing agent. After pouring the fixing agent into the groove on the workpiece fixing surface at room temperature in a molten state, the workpiece fixing surface is solidified by cooling the temperature of the workpiece fixing surface to the melting point or less to solidify the workpiece. A work fixing method characterized by fixing to a surface. The work fixing method according to any one of claims 5 to 7 , wherein the melted fixing agent is poured into the groove by air blow (8a). A cooling liquid passage (6) for flowing a cooling liquid (7a) is formed on the outer periphery of the work fixing surface, and the cooling liquid having a temperature lower than the melting point is used as the cooling liquid passage. it allows the fixing method of the work according to any one of claims 5 to 8, wherein the coagulating fixative of the molten state to flow. By applying a liquid (7a) for cooling lower than the melting point temperature to at least one of the work fixing table and the work, to claims 5, characterized in that coagulating the fixing agent in the molten state 8 The work fixing method according to any one of the above. And cooling the workpiece by placing the metal container (13) containing the liquid (14) of lower than the melting point temperature of the workpiece, 5 to claim, characterized in that coagulating the fixing agent in the molten state The work fixing method according to any one of 8 . After the workpiece is machined while being fixed to the workpiece fixing surface by the solidified fixing agent, a liquid (7b) having a temperature higher than the melting point is applied to at least one of the workpiece fixing base and the workpiece. The work fixing method according to any one of claims 5 to 11 , wherein the solidified fixing agent is melted to remove the work from the work fixing base. The workpiece is fixed to the workpiece fixing table by the workpiece fixing method according to claim 11, and the machined workpiece is removed from the workpiece fixing table, and then subjected to an annealing process, whereby the machining distortion is obtained. Machining method characterized by taking. The one work fixing base and the other work fixing base according to any one of claims 1 to 4 are defined as a first fixing base (1) and a second fixing base (100), respectively.
In the first heating step, the work fixing surface (2) of the first fixing table is heated to a temperature equal to or higher than the first melting point, and the first fixing agent (5) having the first melting point is converted into the first fixing agent (5). After the first surface (4a) of the workpiece and the workpiece fixing surface of the first fixing table are bonded by pouring into the grooves (3, 3a, 3b) of the fixing table, the workpiece is fixed by the first cooling step. Was cooled to a temperature not higher than the first melting point, the first surface was fixed to the first fixing base, and the second surface (4b) facing the first surface was machined. rear,
In the second heating step, the work fixing surface (102) of the second fixing table is heated to a temperature equal to or higher than the second melting point higher than the first melting point, and the second fixing having the second melting point is performed. By pouring the agent (50) into the groove (103) of the second fixing table, the second surface of the workpiece is maintained while maintaining the fixed state of the first surface of the workpiece and the first fixing table. And the work fixing surface of the second fixing base are adhered, and the work is sandwiched between the first and second fixing bases,
By adjusting the temperature of the workpiece to a temperature between the first melting point and the second melting point by the melting and solidifying step, the fixed state of the second surface and the second fixing base is maintained. While separating the first surface and the first fixing base, machining the first surface,
The second fixing agent is melted by raising the temperature of the workpiece to the second melting point or higher by a remelting step, and the second surface is removed from the second fixing base. Machining method. In the remelting step, the second fixing agent is melted by applying a liquid (7b) having a temperature higher than the second melting point to at least one of the second fixing base and the workpiece. The machining method according to claim 14 , characterized in that:

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