JP4456725B2 - Transport device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrying apparatus in which torsional rigidity can be increased without increasing the dimension, difference of torsional rigidity can be reduced among a plurality of shafts, vibration due to accuracy of a bearing is not accumulated, and a vacuum chamber and an apparatus using it can be made compact while ensuring strength. SOLUTION: The carrying apparatus 1G comprises a carrying arm assembly 30, a fixed shaft 10, a set of hollow working shafts 21, 22, and a motor M interposed between the fixed shaft and each working shaft. One end of the fixed shaft is fixed airtightly to the inner surface at the wall 51 of a vacuum chamber 50, and the set of working shafts is fixed to the fixed shaft. The carrying arm assembly is disposed at one end of the working shaft 22 located on one end side of the fixed shaft to extend in a direction substantially perpendicular to the fixed shaft. The motor comprises rotors R provided on respective working shafts and a stator S contained in a recess 13 made in the outer circumferential surface of the fixed shaft.

Description

[0001]
BACKGROUND OF THE INVENTION
The invention according to this application relates to a transfer device for transferring a workpiece such as a silicon wafer.
[0002]
[Prior art]
For example, for wafer etching and CVD, it is necessary to transport the wafer in a clean and ultra-high vacuum environment multi-chamber, and the transport device operates in such an environment. In order to prevent the environment in the chamber from being deteriorated, a transfer device that does not require the use of a magnetic fluid seal, that is, a transfer device in which a partition is provided between a rotor and a stator of a motor has been devised. For example, conveying apparatuses such as those described in the patent publication of Japanese Patent No. 2,761,438 and US Pat. No. 5,720,590 are examples. FIG. 9 is a longitudinal sectional view of a transport apparatus 101 having the same basic configuration as the transport apparatus described in the publication. The transport device 101 includes a coaxial shaft mechanism including a first shaft 121 and a second shaft 122 that can be independently rotated, and a transport arm assembly 130 attached to the upper ends of the shafts 121 and 122. The first shaft 121 extends below the lower end portion of the second shaft 122 and penetrates the second shaft 122. A rotor R ′ is attached to the outer peripheral sides of the first shaft 121 and the second shaft 122, and a stator S ′ is attached to the housing 190 that houses the first shaft 121 and the second shaft 122. The rotor R ′ and the stator S ′ constitute a motor M ′. By controlling the rotation of the motor M ′, the expansion / contraction / turning of the transfer arm assembly 130 can be controlled. Reference numeral 145 denotes an optical encoder for detecting the rotation of the first shaft 121 and the second shaft 122.
[0003]
[Problems to be solved by the invention]
In the transport apparatus 101 having such a configuration, there is a demand to enable quick positioning of the transport arm assembly 130 to the transport position and to quickly set the transport arm assembly 130 at the transport position. For this purpose, the shafts 121 and 122 are required to have certain characteristics. FIG. 10 is a diagram showing a process of shaft rotation control, in which the vertical axis indicates the angular velocity of the shaft and the horizontal axis indicates time. In general, as shown in FIG. 10, the shaft is rotationally controlled so that the shaft enters the stop stage e through the stop stage a, the acceleration stage b, the constant speed stage c, and the deceleration stage d. In order to quickly position the transfer arm assembly 130 at the transfer position in the transfer device 101, it is necessary to rapidly accelerate and decelerate the shafts 121 and 122, that is, to increase the angular acceleration at the acceleration stage b and the deceleration stage d in FIG. There is. In addition, the vibration of the angular velocity is recognized in the initial stage of the constant speed stage c and the initial stage of the stop stage e in FIG. 10, but the vibrating angular speed converges to a constant value in order to quickly set the transport arm assembly 130 at the transport position. Time to t ₁ , t ₂ That is, it is necessary to shorten the settling time. In addition, with the increase in size of workpieces, a conveyance device is required to have a characteristic that a conveyance distance is long and can withstand a large load. In order to satisfy these requirements, the torsional rigidity of the shafts 121 and 122 must be increased. In order to increase the torsional rigidity of the shafts 121 and 122, it is necessary to shorten the shafts 121 and 122 or increase the section modulus of the shafts 121 and 122.
[0004]
Further, when driving the transfer arm assembly 130 connected to the two shafts 121 and 122, the two shafts 121 and 122 need to be operated synchronously. For this purpose, it is necessary to reduce the difference in torsional rigidity between the two shafts 121 and 122. In order to reduce the difference in torsional rigidity between the two shafts 121 and 122, it is necessary to reduce the difference in length between the two shafts 121 and 122, or to reduce the difference in section modulus between the shafts 121 and 122.
[0005]
However, in the conveying apparatus 101, the first shaft 121 extends downward from the lower end portion of the second shaft 122 and passes through the second shaft 122, so that the length of the inner shaft 121 is particularly shortened. It is difficult to increase the outside diameter. When the outer diameter is increased, the inner and outer diameters of the second shaft 122 must be increased. As a result, the outer diameters of both shafts 121 and 122 are increased in size and weight, and a large motor is required for the expansion / contraction / swing control of the transfer arm assembly 130. In addition, the outer diameter of the housing 190 is inevitably increased.
[0006]
Further, in the structure of the conveying device 101, the shaft 121 is longer than the shaft 122 and the sectional modulus is small, so that the difference in torsional rigidity between the two shafts 121 and 122 is large. Cannot be synchronized with rapid acceleration / deceleration.
[0007]
Further, in order to perform highly accurate positioning, it is necessary that the shaft run out is small. In the transport device 101, the shaft 122 is shaken due to the accuracy of the bearing 100B when rotating. Similarly, when the shaft 121 is rotated relative to the shaft 122, the shaft 121 is relatively shaken with respect to the shaft 122 due to the accuracy of the bearing 100B ′. Therefore, in the conveying device 101, when the shaft 121 and the shaft 122 rotate simultaneously, the shaft 121 is caused by accumulated vibration due to the accuracy of the bearing 100B and the bearing 100B ′, and cannot be positioned with high accuracy. .
[0008]
The transfer device 101 is configured to control the operation of one transfer arm assembly 130 by a set of shafts 121 and 122. However, if the operation control of a plurality of transfer arm assemblies is performed by a plurality of sets of shafts, the above problem is further increased. It will be remarkable. For example, when two transport arm assemblies are controlled by two sets of shafts, four shafts are arranged coaxially, one transport arm assembly is controlled by two inner shafts, and two outer shafts are controlled by two outer shafts. The other transfer arm assembly is controlled to operate. In such a configuration, it is difficult to shorten the length or increase the section modulus of the inner shaft, and the torsional rigidity cannot be increased. In addition, since the innermost shaft and the outermost shaft have very large differences in length and section modulus, the difference in torsional rigidity becomes very large. In particular, since the innermost shaft is attached to the housing via a larger number of bearings, the accumulation of deflection due to the accuracy of the bearing is large, and the deflection is very large and the positioning accuracy is poor.
[0009]
In order to solve such a problem, it is desirable to make the vacuum chamber and the apparatus (here, a semiconductor manufacturing apparatus) in which the vacuum chamber is used as compact as possible. Furthermore, the transport device is required to have sufficient strength.
[0010]
As techniques related to such a problem, for example, there are those disclosed in Japanese Patent Application Laid-Open Nos. 11-220863 and 2000-69741, respectively. However, none of these techniques provide a vacuum chamber and a device in which the vacuum chamber is used, and the strength of the transfer device is ensured.
[0011]
The invention of the present application was made in view of the above points, and can increase the torsional rigidity of the shaft without increasing the dimensions of the conveying device, and can reduce the difference in torsional rigidity of the plurality of shafts. It is an object of the present invention to provide a transport apparatus that does not accumulate vibrations due to bearing accuracy, and that can make the vacuum chamber and the apparatus using the vacuum chamber compact and ensure the strength of the transport apparatus.
[0012]
[Means for Solving the Problems]
The transfer device according to this application is connected to a transfer arm assembly, a fixed shaft, and the transfer arm assembly. , The transfer arm assembly is controlled by each rotation. A set of hollow operating shafts and a motor interposed between the fixed shafts and the respective operating shafts, and one end of the fixed shaft is hermetically attached to the inner surface of the wall of the vacuum chamber. An operating shaft is attached to the fixed shaft so that the outer side of the fixed shaft can rotate coaxially with the fixed shaft and aligned in the axial direction of the fixed shaft. To extend in a direction perpendicular to the fixed axis, Of the operating shaft located on one end side of the fixed shaft. Arranged at the end of one end of the fixed shaft The motor is configured by a stator provided on the fixed shaft and a rotor provided on each operating shaft so as to face the stator on the outer peripheral side of the stator, and the stator is fixed It is housed in a recess formed in the outer peripheral surface of the shaft (claim 1). In this way, by arranging the operating shaft outside the fixed shaft, the outer diameter of the operating shaft is increased and the section modulus is increased. Even if the outer diameter increases, the operating shaft is hollow and has an annular cross-sectional shape, so that the weight is relatively small. In addition, since it is not necessary to pass another operating shaft through one operating shaft, any operating shaft can be shortened. Thus, the torsional rigidity of the operating shaft can be increased without increasing the size of the transport device. In addition, the length and the cross-sectional shape of both operating shafts can be formed in substantially the same manner. And the difference of the torsional rigidity of both operation shafts can be made small. In general, a bearing can be used to hold the operating shaft so that it can rotate. Then, when holding each operating shaft, it can be directly held by a bearing attached to a fixed shaft without using a bearing attached to another operating shaft. Therefore, the deflection can be reduced without accumulating the deflection of the operating shaft. Further, since the rotor serving as the operating point of the motor is located at a point further away from the rotation center, the necessary torque can be obtained even if the height of the rotor is reduced. Therefore, the operating shaft can be shortened to increase the torsional rigidity, and the height of the conveying device can be reduced. Further, since the torsional rigidity of the operating shaft is increased, the resonance frequency can be made higher than the frequency included in the motor drive signal, and resonance can be avoided.
[0013]
Further, the fixed shaft is generally attached to the lower wall of the vacuum chamber. In this case, when the upper and lower walls of the vacuum chamber are moved closer to the transfer arm assembly except for the periphery of the motor arrangement portion of the transfer device, the area of the vacuum chamber is reduced, so that the vacuum chamber is made compact. be able to.
[0014]
(1) For example, in the case of a transfer apparatus as described in the patent publication of Patent No. 2,761,438 and US Pat. No. 5,720,590, the upper wall and lower wall of the vacuum chamber may be brought close to the transfer arm assembly. The area of the vacuum chamber is reduced. However, the lower wall of the vacuum chamber is usually positioned at a predetermined height from the installation floor, and the space formed between the lower wall of the vacuum chamber and the installation floor is necessary for the apparatus in which the vacuum chamber is used. Other equipment is arranged. For example, when the apparatus is a semiconductor manufacturing apparatus, a vacuum pump, various gas supply apparatuses, a high-frequency power matching apparatus, and the like are arranged in this space. On the other hand, in the above-mentioned transport device, since the motor installation part occupies a part of this space, this space cannot be used effectively.
[0015]
(2) In addition, the transfer arm assembly is not attached to the vacuum chamber of the fixed shaft using the technique described in, for example, Japanese Patent Laid-Open Nos. 11-220863 and 2000-69741 If it is arranged at the upper end, that is, the upper end, the flange attached to the attachment hole formed in the lower wall is formed in a concave shape so as to cover the peripheral part of the part to which the fixed shaft is attached. If the upper and lower walls of the vacuum chamber are brought closer to the transfer arm assembly, the area of the vacuum chamber becomes smaller.
[0016]
However, as in the case of (1), since the flange portion of the transfer device occupies a part of the space formed between the lower wall of the vacuum chamber and the installation floor, the space cannot be used effectively.
[0017]
On the other hand, when the transfer arm assembly is arranged at the end of the fixed shaft attached to the vacuum chamber, that is, the lower end, as described above, the upper wall of the vacuum chamber is arranged on the motor arrangement of the transfer device. When approaching the transfer arm assembly except for the periphery of the installation part, the area of the vacuum chamber can be reduced and the flange portion of the transfer device does not enter the space formed between the lower wall of the vacuum chamber and the installation floor So this space can be used effectively. That is, since a lot of other equipment necessary for the apparatus in which the vacuum chamber is used can be accommodated in a small installation area, not only the vacuum chamber can be made compact, but also the apparatus in which the vacuum chamber is used can be made compact.
[0018]
Further, in this case, the portion of the upper wall of the vacuum chamber that covers the motor mounting portion of the transfer device protrudes upward. Usually, however, there is an empty space above the vacuum chamber. Is more convenient.
[0019]
Furthermore, since the concave portion is formed on the outer peripheral surface of the fixed shaft and the stator is accommodated therein, a columnar portion extending over the entire length exists in the central portion of the fixed shaft. Therefore, the weight of the transport device itself can be supported. Therefore, the strength of the transfer device can be ensured.
[0020]
In addition, the transfer device according to this application 1 transfer arm assembly and 2nd A transfer arm assembly, a fixed shaft, and the First Each connected to a transfer arm assembly, First Transfer arm assembly A first set of operations controlled by each rotation With a hollow operating shaft A second set of hollow operating shafts for controlling the operation of the second transfer arm assembly by each rotation; The fixed shaft and the Each of the first set and the second set A motor interposed between the operating shaft and one end of the fixed shaft is hermetically attached to the inner surface of the wall of the vacuum chamber, Each of the first set and the second set The operating shaft is rotatable so that the outside of the fixed shaft can be rotated coaxially with the fixed shaft, and each It is attached to the fixed shaft side by side in the axial direction of the fixed shaft for each set, First The transfer arm assembly To extend in a direction perpendicular to the fixed axis, The For the second set of operating shafts Adjacent to each other The first set Operating shaft The second set of operating shafts Side edge Arranged Established, The second transport arm assembly extends in a direction perpendicular to the fixed shaft, and the end of the second set of working shafts adjacent to the first set of working shafts on the first working shaft side. Arranged in The motor includes a stator provided on the fixed shaft, and a rotor provided on each operating shaft so as to face the stator on the outer peripheral side of the stator, and the stator has an outer periphery of the fixed shaft. It is accommodated in a recess formed in the surface (claim 2). With this configuration, as described above, the torsional rigidity of the shaft can be increased without increasing the dimensions of the conveying device, and the difference in torsional rigidity of the plurality of shafts can be reduced, resulting in bearing accuracy. The vibration to be accumulated is not accumulated and resonance can be avoided.
[0021]
Note that, for example, in the case of a transport device such as that described in the patent publication of Patent No. 2,761,438 and US Pat. No. 5,720,590, there is an operating shaft inside the fixed shaft. The arm assembly cannot be configured to be disposed at the end portions of the operation shafts adjacent to each other on the side adjacent to each other.
[0022]
In addition, since the two transfer arm assemblies are located in the central portion of the fixed shaft, the wall portion to which the fixed shaft of the vacuum chamber is attached and the opposite wall portion are arranged around the motor installation portion of the transfer device. The area of the vacuum chamber can be made as small as possible by approaching each transfer arm assembly. As a result, the vacuum chamber can be made as compact as possible.
[0023]
Further, since the concave portion is formed on the outer peripheral surface of the fixed shaft and the stator is accommodated therein, a columnar portion extending over the entire length exists in the central portion of the fixed shaft. Therefore, the weight of the transport device itself can be supported, and therefore the strength of the transport device can be ensured.
[0024]
In this case, the fixed shaft may be configured by two fixed shaft portions corresponding to each set of the operating shafts, and a connecting portion that connects the two fixed shaft portions (claim 3). . With such a configuration, it is possible to configure a transfer device having two transfer arm assemblies by combining two transfer devices having one transfer arm assembly, so that maintenance costs can be reduced.
[0025]
In addition, since it can be separated into individual transport devices, maintenance workability such as motor replacement is improved as compared with the case where the fixed shaft is formed as a single unit.
[0026]
In addition, it is preferable that the connecting portion is as thick as possible in order to support the weight of the conveying device itself and to ensure the strength of the conveying device.
[0027]
In the above case, the opening of each recess may be closed by a partition wall member, and a passage leading to each recess may be formed on the end surface of the fixed shaft attached to the vacuum chamber. ).
[0028]
In the above case, the fixed shaft may include a thick cylindrical portion extending over the entire length at least in the central portion. With such a configuration, it is possible to favorably support the weight of the transfer device itself and ensure the strength of the transfer device.
[0029]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a longitudinal sectional view of a conveying apparatus 1A according to the first embodiment of the present invention. The transfer device 1A is mainly configured by a transfer arm assembly 30, a fixed shaft 10, a pair of operating shafts 21, 22, a motor M, and a resolver type position detector 40. The transfer arm assembly 30 is attached to the upper ends of the operation shafts 21 and 22. The operation control of the transfer arm assembly 30 requires two operation shafts. In this embodiment, the two operation shafts 21 and 22 are set as one set to control the operation of the transfer arm assembly 30. The lower end of the fixed shaft 10 is integrated with the flange portion 11, and the flange portion 11 is fixed to an attachment hole formed in the wall portion 51 of the vacuum chamber 50. That is, the fixed shaft 10 is airtightly attached to the wall portion 51 of the vacuum chamber 50 via the flange portion 11. In this way, the transfer arm assembly 30 is placed in a vacuum environment within the vacuum chamber 50.
[0030]
The operating shafts 21 and 22 have a hollow structure, and are arranged coaxially with the fixed shaft 10 so that the fixed shaft 10 is accommodated therein, that is, positioned outside the fixed shaft 10. The operating shafts 21 and 22 are rotatably attached to the fixed shaft 10 via bearings B. The operating shaft 21 and the operating shaft 22 are attached so as to be stacked in the vertical direction, that is, arranged in two stages in the axial direction of the fixed shaft 10.
[0031]
The motor M includes a permanent magnet rotor R and an electromagnetic stator S, and is interposed between the fixed shaft 10 and the operating shafts 21 and 22. The rotor R is fixed to the inner peripheral side of the operating shafts 21 and 22, and the stator S is provided at a position corresponding to the rotor R on the outer peripheral side of the fixed shaft 10. In the figure, the upper motor M is for controlling the rotation of the operating shaft 21, and the lower motor M is for controlling the rotation of the operating shaft 22. A recess 13 is formed in the fixed shaft 10. The concave portion 13 opens on the outer peripheral surface of the fixed shaft 10 and forms a ring around the outer periphery along the circumferential direction of the fixed shaft 10. The opening of the recess 13 is closed by the partition member 14. The partition member 14 has a cylindrical shape, and upper and lower ends thereof are welded to the opening peripheral edge of the recess 13. The opening of the recess 13 is hermetically closed by the partition member 14, thereby forming a stator housing space that is isolated from the outer peripheral surface of the fixed shaft 10. The stator S is accommodated in this stator accommodating space.
[0032]
A center hole 17 and lateral holes 18 and 19 are formed in the fixed shaft 10. The center hole 17 is formed so as to open to the lower end surface of the fixed shaft 10 and along the central axis of the fixed shaft 10. The horizontal holes 18 and 19 are formed in the fixed shaft 10 so as to communicate with the recesses 13 and 15 from the center hole 17. That is, the center hole 17 and the lateral hole 18 are combined to function as a passage from the lower end surface of the fixed shaft 10 to the stator S. Similarly, the center hole 17 and the lateral hole 19 are combined to function as a passage from the lower end surface of the fixed shaft 10 to the electromagnet 42.
[0033]
The transfer arm assembly 30 includes a pulley 31 and an arm 32. The pulley 31 is fixed to the upper end of the operating shaft 21, and the arm 32 is fixed to the upper end of the operating shaft 22. A belt 33 is wound around the pulley 31. The belt 33 is also wound around a pulley at the tip of an arm 32 (not shown). When the operation shaft 22 is controlled to rotate with the operation shaft 21 fixed, the transfer arm assembly 30 expands and contracts, and when both the operation shafts 21 and 22 are rotated in the same direction at the same angular velocity, the transfer arm assembly 30 turns.
[0034]
The resolver type position detector 40 includes a permanent magnet 41, an electromagnet 42, and the like, and is interposed between the fixed shaft 10 and the operating shafts 21 and 22. Then, it functions as a rotation detection unit that can detect the rotation of the operating shafts 21 and 22. Similarly to the stator S, the electromagnet 42 is accommodated in an annular recess 15 formed in the fixed shaft 10, and the opening of the recess 15 is hermetically closed with a cylindrical partition member 16.
[0035]
2A and 2B are external views of the transfer apparatus 1A. FIG. 2A shows a state where the transfer arm assembly 30 is contracted, and FIG. 2B shows a state where the transfer arm assembly 30 is extended. The arrow Y in the figure indicates the turning direction of the transfer arm assembly 30. A workpiece W such as a silicon wafer is placed on the workpiece transfer section 34 of the transfer arm assembly 30 and moves in the vacuum chamber 50.
[0036]
Referring to FIG. 1 again, in this transfer apparatus 1A, both operating shafts 21 and 22 have substantially the same shape. Since the operating shafts 21 and 22 accommodate the fixed shaft 10 in the hollow portion thereof, the inner diameter thereof becomes relatively large, and the outer diameter also increases accordingly. However, the operating shafts 21 and 22 have a hollow structure, and the cross-sectional shape thereof is annular. Therefore, even if the outer diameter is large, the operating shafts 21 and 22 can be configured to be lightweight, and since the outer diameter is large, the section modulus is increased and the torsional rigidity is also increased. In addition, in this conveying apparatus 1A, the section modulus and torsional rigidity of both of the pair of operating shafts 21 and 22 can be increased.
[0037]
In addition, since it is not necessary to pass the other operation shaft through one operation shaft as in the case of the conventional transport device, both the operation shafts 21 and 22 can be made relatively short. This also increases the torsional rigidity of the operating shafts 21 and 22.
[0038]
Moreover, since the bearing B which hold | maintains each of the operating shafts 21 and 22 is attached to the fixed shaft 10, a shake can be made small.
[0039]
In general, the position where the rotor is arranged is the operating point of the motor. However, the outer rotor type motor such as the motor M of the conveying device 1A is centered on the rotor as compared with the inner rotor type motor. Can be further away from. Therefore, it becomes easy to obtain a large torque. In other words, the required torque can be obtained even if the height of the rotor R (the length of the rotor R in the axial direction of the operating shafts 21 and 22) is reduced, so that the operating shafts 21 and 22 can be formed shorter. This contributes to improvement of the torsional rigidity of the operating shafts 21 and 22.
[0040]
In general, when resonance occurs in the operating shaft, the accuracy of positioning control of the transfer arm assembly is adversely affected. However, in this conveying apparatus 1A, the torsional rigidity of the operating shafts 21 and 22 can be increased as described above, and the resonance frequency of the operating shafts 21 and 22 is made higher than the frequency included in the drive signal of the motor M. Is easy. Then, resonance of the operating shafts 21 and 22 is prevented, and the accuracy of positioning control of the transfer arm assembly 30 is improved.
[0041]
In addition, since the length and the cross-sectional shape of both the operating shafts 21 and 22 can be formed substantially the same, the torsional rigidity of both the operating shafts 21 and 22 can be made substantially the same.
[0042]
By reducing the weight of the operating shafts 21 and 22 and improving the torsional rigidity of the operating shafts 21 and 22 as described above, the transfer arm assembly 30 can be quickly positioned at the transfer position, and quickly settled at the transfer position. Will be able to. Further, by making the torsional rigidity of both the operating shafts 21 and 22 the same, the speed of the synchronous operation can be increased.
[0043]
Furthermore, although the diameter of the operating shaft is larger than that of the conventional conveying device, the size of the conveying device 1A is not increased because the motor M is an outer rotor type.
[0044]
In addition, as described above, in the conveying device 1A, since the motor M is an outer rotor type and the rotor can be further away from the center of rotation, the operating shafts 21 and 22 can be formed shorter. The height of the transfer device 1A can be reduced. For this reason, even if the flange portion 11 for fixing to the wall portion 51 of the vacuum chamber 50 is formed in the vicinity of the lower end of the fixed shaft 10 as in the transfer device 1A of FIG. 1, the transfer arm into the vacuum chamber 50 is formed. The protrusion height of the assembly 30 can be small. Therefore, a sufficient drive space for the transfer arm assembly 30 can be secured. Such a configuration is advantageous when it is desired to make the outward protrusion from the wall 51 of the vacuum chamber 50 as small as possible.
[0045]
Further, the stator housing space formed by airtightly closing the opening of the recess 13 with the partition wall member 14 is a space isolated from the outer peripheral surface of the fixed shaft 10, and the stator S housed in this space includes the operating shaft 21, 22 and the environment where the transfer arm assembly 30 exists, that is, the vacuum environment of the vacuum chamber 50 is cut off. Therefore, the vacuum environment of the vacuum chamber 50 is not deteriorated by dust or the like generated from the stator S side, and gas is not mixed into the vacuum chamber 50 from the stator S side.
[0046]
Further, the space around the stator S and the space around the electromagnet 42 communicate with the atmosphere via the lateral holes 18 and 19 and the center hole 17. As a result, heat generated by the stator S and the electromagnet 42 is released to the atmosphere. The recesses 13 and 15 communicate with the atmosphere due to the central hole 17 and the lateral holes 18 and 19, but the openings of the recesses 13 and 15 are hermetically closed by the partition members 14 and 16, and thus the vacuum chamber 50 The vacuum environment is isolated from the atmosphere. Note that C in the figure is an electric wire for supplying electric power to the stator S and the electromagnet 42, and is wired from the center hole 17 to the stator S and the electromagnet 42 through the horizontal holes 18 and 19. As described above, the passage formed by the center hole 17 and the lateral holes 18 and 19 can also be used for wiring to the stator S and the electromagnet 42.
[0047]
FIG. 3 is a longitudinal sectional view of a transport apparatus 1B according to the second embodiment of the present invention. This transport device 1B has a longer fixed shaft 10B than the transport device 1A shown in FIG. 1, and is provided with two sets of operating shafts 21, 22, 23, 24. The operation is controlled by these operating shafts 21, 22, 23, 24. Two transfer arm assemblies 30 and 60 are provided.
[0048]
The four operating shafts 21, 22, 23, 24 have substantially the same shape, and are coaxial with the fixed shaft 10B and in the axial direction of the fixed shaft 10B so as to accommodate the fixed shaft 10B in the hollow space. It is mounted in multiple rows.
[0049]
The transfer arm assembly 30 is attached to the upper ends of the operation shafts 21 and 22, and the transfer arm assembly 60 is attached to the upper ends of the operation shafts 23 and 24, respectively. The transfer arm assembly 30 is extended / retracted and swiveled by the rotation control of the operating shafts 21 and 22, and the transfer arm assembly 60 is extended / retracted and turned by the rotation control of the operating shafts 23 and 24.
[0050]
The configuration of the motor M, the transport arm assemblies 30, 60, and the resolver type position detector 40 of the transport apparatus 1B is the same as that of the transport apparatus 1A in FIG.
[0051]
4A and 4B are external views of the transfer apparatus 1B. FIG. 4A shows a state in which both transfer arm assemblies 30 and 60 are contracted, and FIG. 4B shows a state in which the transfer arm assembly 60 is extended from the state in FIG. (C) shows a state in which the transfer arm assembly 30 is turned from the state of (a), and (d) shows a state in which the transfer arm assembly 30 is extended from the state of (c).
[0052]
Referring to FIG. 3 again, this transport device 1B has four operating shafts 21, 22, 23, 24, but all of the operating shafts 21, 22, 23, 24 have substantially the same shape. ing. As with the case of the conveying apparatus 1A shown in FIG. 1, all four operating shafts 21, 22, 23, and 24 can be reduced in weight and improved in torsional rigidity. Further, the torsional rigidity of the four operating shafts 21, 22, 23, and 24 can be made identical. As described above, even when the transfer arm assembly is attached to each set of the plurality of operation shafts, the synchronous operation can be speeded up, and the transfer operation of the transfer arm assembly to the transfer position can be performed quickly. It can be carried out.
[0053]
Further, it can be seen that this conveying apparatus 1B is compared with the conveying apparatus 1A in FIG. 1, but the shape and dimensions of the flange portion 11B are notwithstanding that the conveying apparatus 1B has a multi-axis configuration having a plurality of sets of operating shafts. This is the same as the shape and dimension of the flange portion 11 of the transfer device 1A. This is due to the configuration in which the plurality of operating shafts 21, 22, 23, 24 are arranged in multiple stages so as to be stacked in the axial direction of the fixed shaft 10B without being arranged coaxially. In this way, the size of the mounting portion can be made the same regardless of whether it is a transfer device that controls the operation of only one transfer arm assembly or a transfer device that controls the operation of a plurality of transfer arm assemblies. There is no need to change the size of the wall mounting holes.
[0054]
Further, since all the operating shafts 21, 22, 23, 24 are directly held by the bearings B attached to the fixed shaft 10, the deflection due to the accuracy of the bearings is not accumulated.
[0055]
FIG. 5 is a longitudinal sectional view of a conveying apparatus 1C according to the third embodiment of the present invention. Unlike the transport apparatus 1A shown in FIG. 1, the transport apparatus 1C includes a rotation detection unit that can detect the rotation of the operating shafts 21C and 22C by an optical encoder 45. Other configurations are substantially the same as those of the transfer apparatus 1A of FIG. As described above, not only the resolver type position detector but also an optical encoder can be used as the rotation detecting unit.
[0056]
FIG. 6 is a longitudinal sectional view of a transfer apparatus 1D according to the fourth embodiment of the present invention. Unlike the transfer apparatus 1A shown in FIG. 1, the transfer apparatus 1D includes an elevating mechanism 70. The lifting mechanism 70 is mainly composed of a housing 71, a motor 72, a ball screw mechanism 73, and a support member 74. The ball screw mechanism 73 includes a screw part 73a and a nut part 73b. A flange portion 71 a is formed on the outer periphery of the housing 71, and the flange portion 71 a is fixed to a mounting hole formed in the wall portion 51 of the vacuum chamber 50. A motor 72 is accommodated in the housing 71. When the motor 72 rotates, the screw portion 73a connected to the motor 72 via the pulleys 75 and 76 and the belt 77 rotates. A nut portion 73b that is screwed into the screw portion 73a is fixed to the support member 74. Therefore, the support member 74 can be moved up and down by the rotation control of the motor 72. The upper end portion of the support member 74 supports the lower end portion of the fixed shaft 10, and when the support member 74 moves up and down, the transfer arm assembly 30 also moves up and down. Reference numeral 78 denotes a guide mechanism including a guide column 78a fixed to the housing 71 and a sliding portion 78b fixed to the support member 74 so that the guide column 78a passes therethrough.
[0057]
In the transport apparatus 1A in FIG. 1, the fixed shaft 10 is directly attached to the wall 51 of the vacuum chamber 50 only through the flange portion 11, but in the transport apparatus 1D in FIG. It is indirectly attached to the wall 51 of the vacuum chamber 50 via the mechanism 70. A bellows 80, which is a flexible seal member, is interposed between the fixed shaft 10 and the wall 51 of the vacuum chamber 50, and the vacuum environment of the vacuum chamber 50 is maintained by the bellows 80. Place in a vacuum environment. Note that not only the bellows 80 but also the housing 71 and the support member 74 are interposed between the fixed shaft 10 and the wall portion 51 of the vacuum chamber 50, and these members all maintain the vacuum environment of the vacuum chamber 50. Is functioning.
[0058]
The various embodiments of the transport device according to the present invention have been described above with reference to FIGS. In the above-described embodiment, the concave portion is formed so as to open to the outer peripheral surface of the fixed shaft, and the opening of the concave portion is hermetically closed with the partition member to form the stator accommodating space. A center hole and a lateral hole formed in the fixed shaft form a passage from the end surface of the fixed shaft to the stator. However, the stator accommodating space can have various configurations other than the above configuration. FIG. 7 shows a configuration example other than the above-described configuration for forming the stator housing space. FIG. 7A shows the lid member 10E. ₁ And two cylinder members 10E ₂ , 10E _Three A fixed shaft 10E composed of Tube member 10E ₂ And cylinder member 10E _Three Is connected up and down so that the inside of them communicates with each other, and the cylindrical member 10E ₂ The top opening of the lid member 10E ₁ It is blocked by. And the cylindrical member 10E ₂ , 10E _Three A stator S is fixed to the inner peripheral surface of the. In this case, the internal space 17E of the fixed shaft 10E functions as a stator housing space. Further, since this space 17E communicates with the atmosphere through the opening at the lower end of the fixed shaft 10E, it also functions as a passage for heat dissipation and wiring of the stator S. In FIG. 7B, the lid member 10F ₁ And cylinder member 10F ₂ And solid shaft 10F _Three And cylinder member 10F _Four And hollow shaft 10F _Five The fixed shaft 10F comprised by these is shown. Tube member 10F ₂ And cylinder member 10F _Four Is connected up and down so that their interiors communicate with each other, the cylindrical member 10F ₂ The top opening of the lid member 10F ₁ It is blocked by. Solid shaft 10F _Three And hollow shaft 10F _Five Is connected in the vertical direction, the lid member 10F ₁ And cylinder member 10F _Four And the cylindrical member 10F ₂ , 10F _Four It is fixed so that it is located inside. Hollow shaft 10F _Five The hollow space is hollow shaft 10F _Five A cylindrical member 10F is formed by a hole opened on the outer surface of _Four It communicates with the interior space. Also, hollow shaft 10F _Five The hollow space of the cylinder member 10F _Four It communicates with the external atmospheric space through the hole in the center of the bottom. Solid shaft 10F _Three And hollow shaft 10F _Five A stator S is fixed to the outer peripheral surface of the. In this case, the cylinder member 10F ₂ , 10F _Four Inner surface and solid shaft 10F _Three Hollow shaft 10F _Five A space 17F surrounded by the outer peripheral surface of the rotor serves as a stator housing space. This space 17F is a hollow shaft 10F _Five Hollow space and cylindrical member 10F _Four Since it communicates with the atmosphere through a hole provided at the bottom of the shaft, that is, an opening at the lower end of the fixed shaft 10F, it also functions as a passage for heat dissipation and wiring of the stator S.
[0059]
In addition, the transfer arm assembly of the above-described embodiment, particularly shown in FIGS. 2 and 4, is merely an example of the transfer arm assembly for configuring the transfer device according to the present invention, and there are various other forms. The transfer arm assembly can be applied. FIG. 8 shows another example of the transfer arm assembly. FIG. 8A shows a scalar-type transfer arm assembly 30G. The transfer arm assembly 30G is controlled to be expanded and contracted by two operating shafts. That is, one of the two operating shafts is fixed and the other is rotated to expand and contract, and both the operating shafts rotate at the same rotation speed in the same direction. In the drawing, an arrow X indicates the expansion / contraction direction of the transfer arm assembly 30G, and an arrow Y indicates the turning direction. FIG. 8B shows a frog-leg type transfer arm assembly 30H. The transfer arm assembly 30H is also extended and swiveled by two operating shafts, but both operating shafts expand and contract by rotating in the opposite direction at the same time, and both operating shafts are rotated at the same rotational speed. It turns by turning in the same direction. In the drawing, an arrow X indicates the expansion / contraction direction of the transfer arm assembly 30H, and an arrow Y indicates the turning direction.
[0060]
FIG. 11 is a longitudinal sectional view of a transfer apparatus 1G according to the fifth embodiment of the present invention. This transfer device is different from the transfer device 1A of FIG. 1 in that the transfer arm assembly 30 is an end of the fixed shaft 10 on the fixed end side of the operating shaft 22 positioned on the fixed end side of the vacuum chamber lower wall 51b. It is arranged in the part. That is, the transfer arm assembly 30 is disposed at the lower end portion of the operating shaft 22 located on the lower side. The pulley 31 of the transfer arm assembly 30 is fixed to the operating shaft 22, and the arm 32 of the transfer arm assembly 30 is connected to the operating shaft 21 located on the upper side. Further, the motor M and the resolver type position detector 40 corresponding to each of the operating shafts 21 and 22 have an up-down positional relationship opposite to that of the transport apparatus 1A in FIG.
[0061]
The lower wall portion 51b of the vacuum chamber 50 is arranged as close to the transfer arm assembly 30 as possible. Further, the upper wall 51a of the vacuum chamber 50 is provided with a convex portion 51c so as to accommodate the upper half of the transfer device 1G, and the other portion of the upper wall 51a extends in the horizontal direction. It is arranged to be as close to the assembly 30 as possible. Reference numerals 92 and 93 denote seal members for sealing the inside and the outside of the vacuum chamber 50.
[0062]
On the other hand, in the transfer apparatus 1A of FIG. 1, the transfer arm assembly 30 is disposed at the upper end portion of the operating shaft 21 located on the upper side. In this case, the flange portion attached to the attachment hole formed in the lower wall portion of the vacuum chamber 50 is formed in a concave shape so as to cover the periphery of the portion to which the fixed shaft is attached, and the upper wall of the vacuum chamber If the portion and the lower wall portion are brought close to the transfer arm assembly, the area of the vacuum chamber becomes small, and the vacuum chamber can be made compact.
[0063]
However, the lower wall portion of the vacuum chamber 50 is usually positioned at a predetermined height from the installation floor, and the space formed between the lower wall portion of the vacuum chamber and the installation floor is necessary for the semiconductor manufacturing apparatus. Other devices such as a vacuum pump, various gas supply devices, a high-frequency power matching device, and the like are arranged in this space. On the other hand, in the conveying apparatus 1A of FIG. 1, since the flange occupies a part of this space, this space cannot be used effectively.
[0064]
In this regard, in this transfer apparatus 1G, when the upper wall portion of the vacuum chamber is brought close to the transfer arm assembly except for the periphery of the motor arrangement portion of the transfer apparatus, the area of the vacuum chamber can be reduced, Since the transfer device does not enter the space formed between the installation floor, this space can be used effectively. That is, since many other devices necessary for the semiconductor manufacturing apparatus can be accommodated in a small installation area, not only the vacuum chamber can be made compact, but also the semiconductor manufacturing apparatus including the vacuum chamber can be made compact.
[0065]
Further, in this case, the upper wall portion of the vacuum chamber 50, which covers the motor installation part of the transfer device, projects upward, but usually there is an empty space above the vacuum chamber 50, This form is more convenient.
[0066]
Further, since the concave portion 13 is provided on the outer peripheral surface of the fixed shaft 10 and the stator S is accommodated therein, a thick cylindrical portion extending over the entire length exists in the central portion of the fixed shaft 10. Therefore, the weight of the transfer device 1G itself can be supported. Therefore, the strength of the transfer device 1G can be ensured. In addition, this effect can be similarly obtained in the above-described transport apparatuses 1A to 1D according to the first to fourth embodiments.
[0067]
12A and 12B are external views of the transfer device 1G. FIG. 12A shows a state where the transfer arm assembly 30 is contracted, and FIG. 12B shows a state where the transfer arm assembly 30 is extended.
[0068]
FIG. 13 is a longitudinal sectional view of a transfer apparatus 1H according to the sixth embodiment of the present invention. This transport device is different from the transport device 1B of FIG. 3 in that two of the two operating shafts (21, 22), (23, 24) are adjacent to each other on the adjacent side of the operating shafts 22, 23 between the sets. Two transfer arm assemblies 30 and 60 are respectively disposed at the ends. That is, the transfer arm assembly 30 located on the upper side is disposed at the lower end of the lower operation shaft 22 located on the upper side.
[0069]
The fixed shaft 10H includes a fixed shaft portion 10H ′ corresponding to the set of the operating shafts 21 and 22 positioned on the upper side, a fixed shaft portion 10H ″ corresponding to the set of the operating shafts 23 and 24 positioned on the lower side, and It is comprised with the connection part 94 which connects between both fixed shaft part 10H 'and 10H ". Accordingly, the transport apparatus 1H includes a first transport unit 1H ′ composed of a fixed shaft portion 10H ′, operating shafts 21 and 22, and a transport arm assembly 30, a fixed shaft portion 10H ″, operating shafts 23 and 24, The second transfer unit 1H ″ configured by the transfer arm assembly 60 is connected by the connecting portion 94. Reference numeral 95 denotes a sealing member for sealing the inside of the vacuum chamber 50 and the passage 17.
[0070]
A convex portion 51c is provided on the upper wall portion 51a of the vacuum chamber 50 so as to accommodate the upper half portion of the first transfer unit 1H ', and the other portion of the upper wall portion 51a is extended in the horizontal direction. It is arranged so as to be as close as possible to the existing transfer arm assembly 30. Further, a cylindrical flange 11H that accommodates the lower half of the second transport unit 1H ″ is formed at the lower end of the fixed shaft portion 10H ″ of the second transport unit 1H ″, and the lower wall of the vacuum chamber 50 is formed. A hole 51d for fitting the flange 11H into the portion 51b is provided, and the other portion of the lower wall portion 51b is disposed as close as possible to the transfer arm assembly 60, and the flange 11H is fitted into the hole 51d. It is fixed in an airtight manner (not shown).
[0071]
Comparing the conveying apparatus 1H configured as described above with the conveying apparatus 1B in FIG. 3, in the conveying apparatus 1B in FIG. 3, the upper operating shaft 21 of the set of operating shafts in which the conveying arm assembly 30 is positioned on the upper side. Since the movable arm assembly 30 needs to have a movable area because it is disposed at the upper end, the transport arm assembly 30 is arranged at the lower end of the lower operating shaft 22 in the transport device 1H. Therefore, the vacuum area secured in the vacuum chamber can be reduced as compared with the transfer device 1B.
[0072]
Therefore, as shown in FIG. 13, the lower wall portion 51b and the upper wall portion 51a of the vacuum chamber 50 are made to approach the transfer arm assemblies 30 and 60, respectively, except for the periphery of the motor arrangement portion of the transfer device 1H. Thus, the area of the vacuum chamber can be made as small as possible. As a result, the vacuum chamber 50 can be made as compact as possible.
[0073]
Further, in this transport apparatus 1H, the first transport unit 1H ′ and the second transport unit 1H ″ are connected by the connecting portion 94, so that the two transport units 1H ′ and 1H ″ are combined. Thus, the conveying device 1H can be configured. Therefore, maintenance costs can be reduced. Furthermore, since it can be separated into the individual transport units 1H ′ and 1H ″, the workability of maintenance such as motor replacement is improved as compared with the case where the fixed shaft 10H is formed as a single body. 94 is preferably as thick as possible in order to support the weight of the transfer device itself and to ensure the strength of the transfer device.
[0074]
Further, since the concave portion 13 is provided on the outer peripheral surface of the fixed shaft 10H and the stator S is accommodated therein, a thick cylindrical portion extending over the entire length exists in the central portion of the fixed shaft 10H. Therefore, the weight of the transfer device 1H itself can be supported. Therefore, the strength of the transfer device 1H can be ensured.
[0075]
In this embodiment, the fixed shaft 10H is composed of the two fixed shaft portions 10H ′ and 10H ″ and the connecting portion 94, but this may be formed as a single body.
[0076]
14A and 14B are external views of the transfer device 1H, in which FIG. 14A shows a state where both transfer arm assemblies 30 and 60 are contracted, and FIG. 14B shows a state where the transfer arm assembly 60 is extended from the state shown in FIG. (C) shows a state in which the transfer arm assembly 30 is turned from the state of (a), and (d) shows a state in which the transfer arm assembly 30 is extended from the state of (c).
[0077]
In the above embodiment, the two operating shafts are set as one set. However, depending on the type of the transfer arm assembly, there is a type in which the operation is controlled by three or more operation shafts. In this case, the number of operation shafts necessary for the operation control of the transfer arm assembly is one set.
[0078]
Further, in the above, an embodiment in which one set of operating shafts is provided and a transfer arm assembly is attached to the upper part thereof, and an embodiment in which two sets of operating shafts are provided and a transfer arm assembly is attached to each set are shown. However, more operating shafts and transfer arm assemblies can be provided. Even in this case, the operating shaft can be reduced in weight, torsional rigidity, and torsional rigidity can be made uniform.
[0079]
In the above embodiment, the transfer device is attached to the wall portion forming the bottom surface of the vacuum chamber. However, the transfer arm assembly is disposed in the vacuum chamber so that the wall portion and the inner surface forming the top surface of the vacuum chamber are arranged. It is also possible to attach a transport device to the wall portion forming
[0080]
In the above-described embodiment, the magnetic and optical rotation detection units are shown as the rotation detection unit. However, various other known detection means can be used as the rotation detection unit.
[0081]
In the above-described embodiment, the ball screw mechanism is used as the lifting mechanism for lifting the transport arm assembly. However, various known mechanisms such as a crank mechanism can be employed as the lifting mechanism.
[0082]
【The invention's effect】
The present invention is implemented in the form as described above, and has the effects described below.
(1) Since the torsional rigidity of the operating shaft can be increased without increasing the size of the transfer device, it is possible to rapidly accelerate and decelerate the operating shaft, and to reduce the difference in torsional rigidity of multiple operating shafts. The speed of the synchronous operation is increased, and the transfer arm assembly can be quickly positioned at the transfer position. Furthermore, even if the angular velocity of the operating shaft vibrates, the convergence is quick and the settling time at the transfer position of the transfer arm assembly can be shortened. As a result, the positioning operation of the transfer arm assembly to the transfer position is performed quickly. be able to.
(2) Since the operating shaft length can be shortened, the height of the conveying device can be reduced.
(3) Even in a multi-axis configuration having two or more sets of operating shafts, it is possible to avoid a decrease in torsional rigidity of the operating shafts and to avoid a large difference in torsional rigidity among a plurality of operating shafts.
(4) Regardless of the number of transfer arm assemblies to be controlled, the transfer device can be configured with the same dimensions of the mounting portion. That is, compatibility can be improved.
(5) Since all the operating shafts can be configured to be directly held by the bearings attached to the fixed shaft, the deflections of all the operating shafts can be reduced to the same extent without accumulating fluctuations related to the accuracy of the bearings.
(6) When the stator is accommodated in the stator accommodating space that is isolated from the outer peripheral surface of the fixed shaft, the stator can be placed in a space that is isolated from the space where the operating shaft exists, particularly when attached to a vacuum chamber. In addition, the vacuum environment is not degraded. In addition, if a passage extending from the end face of the fixed shaft to the recess is formed in the fixed shaft, it is effective for heat radiation from the stator and wiring to the stator.
(7) The vacuum chamber and the apparatus in which the vacuum chamber is used can be made compact.
(8) The strength of the transport device can be ensured.
(9) It is configured to have two sets of operating shafts, and the fixed shaft is composed of two fixed shaft portions corresponding to each set of the operating shafts, and a connecting portion that connects between the two fixed shaft portions. Maintenance costs can be reduced, and maintenance workability such as motor replacement can be improved.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a conveying apparatus according to a first embodiment of the present invention.
2A and 2B are external views of the transfer device of FIG. 1, in which FIG. 2A shows a state where the transfer arm assembly is contracted, and FIG. 2B shows a state where the transfer arm assembly is extended.
FIG. 3 is a longitudinal sectional view of a transport apparatus according to a second embodiment of the present invention.
4 is an external view of the transfer device of FIG. 3, in which (a) shows a state in which both transfer arm assemblies are contracted, and (b) shows a state in which one transfer arm assembly is extended from the state in (a). (C) shows a state in which one arm assembly is turned from the state (a), and (d) shows a state in which one transfer arm assembly is extended from the state (c).
FIG. 5 is a longitudinal sectional view of a conveying apparatus according to a third embodiment of the present invention.
FIG. 6 is a longitudinal sectional view of a conveying apparatus according to a fourth embodiment of the present invention.
FIG. 7 is a longitudinal sectional view of a fixed shaft for illustrating various configuration examples for forming a stator housing space, and FIG. 7 (a) is a diagram illustrating a case where an internal space of the fixed shaft composed of a cylindrical member and a lid member is a stator. (B) shows an example in which the space surrounded by the inner peripheral surface of the cylindrical member and the outer peripheral surface such as a solid shaft is the stator accommodating space.
8A and 8B are external views showing various examples of the transfer arm assembly, in which FIG. 8A shows a SCARA type transfer arm assembly, and FIG. 8B shows a frog-leg type transfer arm assembly.
FIG. 9 is a longitudinal sectional view of a conventional transport device.
FIG. 10 is a diagram showing a process of shaft rotation control.
FIG. 11 is a longitudinal sectional view of a conveying apparatus according to a fifth embodiment of the present invention.
12A and 12B are external views of the transfer device of FIG. 11, in which FIG. 11A shows a state where the transfer arm assembly is contracted, and FIG. 12B shows a state where the transfer arm assembly is extended. FIG.
FIG. 13 is a longitudinal sectional view of a transport apparatus according to a sixth embodiment of the present invention.
14A and 14B are external views of the transfer device of FIG. 13, in which FIG. 13A shows a state where both transfer arm assemblies are contracted, and FIG. 14B shows a state where one transfer arm assembly is extended from the state shown in FIG. (C) shows a state in which one arm assembly is turned from the state (a), and (d) shows a state in which one transfer arm assembly is extended from the state (c).
[Explanation of symbols]
1A, 1B, 1C, 1D, 1H Transfer device
1H '1st transport unit
1H ”second transport unit
10, 10B, 10E, 10F, 10H Fixed shaft
10H ', 10H ”fixed shaft
11, 11B, 11H Flange
13,15 recess
14,16 Bulkhead member
17 Center hole
18,19 Horizontal hole
21, 21C, 22, 22C, 23, 24 Actuating shaft
30, 30G, 30H Transfer arm assembly
31 pulley
32 arms
33 belts
34 Work transfer section
40 Resolver type position detector
41 Permanent magnet
42 electromagnet
45 Encoder
50 vacuum chamber
51 Wall
51a Upper wall
51b Lower wall
51c Convex
51d hole
60 Transfer arm assembly
70 Lifting mechanism
71 housing
71a Flange
72 motor
73 Ball screw mechanism
73a Screw part
73b Nut
74 Support member
75, 76 pulley
77 belts
78 Guide mechanism
78a Guide pillar
78b Sliding part
80 Bellows
92 Seal material
93 Seal member
94 Connection
95 Seal material
B bearing
C wire
M motor
R rotor
S stator
W Work

Claims (5)

A transport arm assembly, a fixed shaft, a pair of hollow operating shafts connected to the transport arm assembly and controlling the transport arm assembly by each rotation , and between the fixed shaft and the respective operating shafts And a motor interposed in the
One end of the fixed shaft is hermetically attached to the inner surface of the wall of the vacuum chamber;
The set of operating shafts is attached to the fixed shaft so that the outside of the fixed shaft can be rotated coaxially with the fixed shaft and aligned in the axial direction of the fixed shaft.
The transfer arm assembly so as to extend in a direction perpendicular to the fixed shaft, is arranged on the end of the one end of the fixed shaft of the actuating shaft positioned at one end of said fixed shaft,
The motor includes a stator provided on the fixed shaft, and a rotor provided on each operating shaft so as to face the stator on the outer peripheral side of the stator, and the stator has an outer periphery of the fixed shaft. A conveying device housed in a recess formed on the surface. A first transfer arm assembly and a second transfer arm assembly, and the fixed shaft, respectively connected to the first transfer arm assembly, the operation of the first set of hollow controlling operation by the rotation of each of said first transfer arm assembly interposed between the shaft and a second set of hollow actuating shaft to control operation by the rotation of each of the second transfer arm assembly, and the fixed shaft and said first and second sets of each operating shaft With a motor,
One end of the fixed shaft is hermetically attached to the inner surface of the wall of the vacuum chamber;
The first and second sets of each actuating shaft, the outer side of the fixed shaft as may be rotated with the fixed shaft coaxially and in line in the axial direction of the fixed shaft for each pair, the fixed Attached to the shaft,
The first transfer arm assembly, said as fixed shaft extending in a direction perpendicular, the second set of phases adjacent to the actuating shaft the first set of operating shaft said two sets of actuating shaft side end of the is arranged to,
The second transport arm assembly extends in a direction perpendicular to the fixed shaft, and the end of the second set of working shafts adjacent to the first set of working shafts on the first working shaft side. Arranged in
The motor includes a stator provided on the fixed shaft, and a rotor provided on each operating shaft so as to face the stator on the outer peripheral side of the stator, and the stator has an outer periphery of the fixed shaft. A conveying device housed in a recess formed on the surface.   The conveying device according to claim 2, wherein the fixed shaft is configured by two fixed shaft portions corresponding to each set of the operating shafts, and a connecting portion that connects the two fixed shaft portions. The opening of the respective recess is closed by the partition member, and passages communicating with respective recesses in the end face which is attached to the vacuum chamber of the fixed shaft are formed, to one of claim any of claims 1 to 3 The conveying apparatus as described.   The conveying device according to any one of claims 1 to 4, wherein the fixed shaft includes a thick cylindrical portion extending over the entire length in a central portion.

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