JP4451540B2 - Light irradiation type static eliminator with cooling function - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a static eliminator that removes static electricity generated in an object to be processed such as a glass substrate for liquid crystal contained in a box by X-ray irradiation.
[0002]
[Prior art]
In a process of manufacturing a liquid crystal element or a semiconductor element, static electricity is generated on the substrate when the liquid crystal substrate or the semiconductor substrate is transported, and thus static electricity may be removed (also referred to as static elimination) by a static electricity removing device. As such a static eliminator, a corona discharge ionizer and a light (X-ray) irradiation ionizer are known. In particular, an X-ray irradiation ionizer can supply ions by irradiating X-rays through a window even in a sealed environment.
[0003]
[Problems to be solved by the invention]
However, when removing electricity with an X-ray irradiation ionizer in an environment where the environmental temperature exceeds the heat resistance temperature of ordinary electrical equipment or resin, such as a high temperature furnace, the heat in the high temperature furnace In order to prevent the X-ray generator from being destroyed, it is necessary to dispose the X-ray generator away from the high temperature furnace in which the liquid crystal substrate or the like is accommodated. In this case, the charge removal efficiency of the liquid crystal substrate or the like is lowered.
[0004]
An object of the present invention is to provide a static eliminator capable of effectively removing static electricity from an object to be processed even in a severe environment for an X-ray generator.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a static eliminator that removes static electricity generated in an object accommodated in a box by irradiating X-rays from an X-ray generator. An X-ray transmission member that is fixed and contains an X-ray generator, an X-ray transmission member that is provided in the box and transmits X-rays emitted from the X-ray generator, and an X-ray generator and an X-ray transmission member And a gas flow means for flowing gas between them.
[0006]
In the present invention, for example, when the box is composed of a high-temperature furnace, the X-ray generator is disposed between the X-ray generator and the X-ray transmitting member even if the X-ray generator is disposed adjacent to the box. By flowing cooling air as a gas, the transfer of heat in the high-temperature furnace to the X-ray generator is suppressed to some extent, so that the X-ray generator can be prevented from being destroyed by the heat in the high-temperature furnace. Therefore, it is possible to use the X-ray generator in a state where it is adjacent to the box, and thereby the static electricity of the workpiece can be effectively removed.
[0007]
Preferably, the X-ray transmissive members are made of a pair, these X-ray transmissive members are arranged opposite to each other in the X-ray irradiation direction, and the gas flow means flows gas between the pair of X-ray transmissive members. It is configured. As described above, when the box is constituted by a high-temperature furnace, the cooling air can be effectively insulated by flowing the cooling air between the pair of X-ray transmitting members.
[0008]
In order to achieve the above object, the present invention provides a static eliminator for removing static electricity generated in an object accommodated in a box by irradiating X-rays from an X-ray generator. A housing that contains the X-ray generator, an X-ray transmitting member that is provided in the housing and transmits X-rays emitted from the X-ray generator, and an X-ray generator and an X-ray transmitting member And a gas flow means for flowing gas between them.
[0009]
In the present invention, for example, when the box is composed of a high-temperature furnace, the X-ray generator and the X-ray transmitting member are disposed even if the casing containing the X-ray generator is arranged in the box. By flowing cooling air as a gas between the heat transfer to the X-ray generator to a certain extent, the X-ray generator is prevented from being destroyed by the heat in the high-temperature furnace. it can. Therefore, the X-ray generator can be used in a state of being accommodated in the box, and thereby the static electricity of the workpiece can be effectively removed.
[0010]
Preferably, the X-ray generator is arranged so that the X-ray irradiation part faces the object to be processed with the X-ray transmission member interposed therebetween. In this case, since the X-ray from the X-ray generator is directly irradiated toward the object to be processed, a blower or the like for directing ions generated in the air to the object to be processed by the X-ray irradiation. It becomes unnecessary. As a result, the structure is simplified and the cost can be reduced.
[0011]
Preferably, the gas flow means includes an air supply system that supplies cooling air between the X-ray generator and the X-ray transmission member, and an air discharge system that discharges the cooling air to the outside. Accordingly, the X-ray generator can be used in a state where the X-ray generator is adjacent to the box or accommodated in the box under the high temperature environment as described above.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a preferred embodiment of a static eliminator according to the invention will be described with reference to the drawings.
[0013]
FIG. 1 is a configuration diagram illustrating a static eliminator according to a first embodiment of the present invention. In the figure, a static eliminating device 1 of the present embodiment is a device for removing static electricity generated on a glass substrate 2 for liquid crystal, and this glass substrate 2 for liquid crystal is a high-temperature furnace which is a box formed of a heat insulating material. 3 is accommodated. The liquid crystal glass substrate 2 is put into and out of the high temperature furnace 3 from the opening / closing door 5 in a state where a plurality of glass substrates 2 are accommodated in the rack 4. The high-temperature furnace 3 is provided with a blower 6 that sends air toward the opening / closing door 5 side.
[0014]
The static eliminator 1 has a casing 7 fixed to one outer surface of the high-temperature furnace 3, and an X-ray generator 8 that generates X-rays is accommodated in the casing 7. A specific configuration of the X-ray generator 8 is shown in FIG.
[0015]
In the figure, an X-ray generator 8 has a Koval glass cylindrical bulb 9, and a stem 10 is formed at the end of the bulb 9. A cylindrical output window holder 11 made of Kovar metal is provided at the open end of the valve 9. An output window 12 is fixed to the output window holding portion 11, and a target 13 for generating X-rays by electron beam collision is deposited on the inner surface side of the output window 12. Further, two stem pins 14 are fixed to the stem 10, and these stem pins 14 are connected to a power supply unit (not shown) via a power supply line 15. The stem pin 14 is provided with a filament 16 as a cathode that emits an electron beam at a predetermined voltage. In such an X-ray generator 8, a high potential (for example, −9.5 kV) is supplied to the stem pin 14 from a power supply unit (not shown), and an electron beam is irradiated from the filament 16 toward the ground potential target 13. To do. At this time, X-rays are emitted from the target 13 due to the collision of the electron beam, and the X-rays are emitted from the output window 12.
[0016]
Returning to FIG. 1, a pair of X-ray transmission plates 17 </ b> A that transmit the X-rays irradiated from the X-ray irradiation unit 8 a of the X-ray generator 8 to the opening 3 a formed on one side of the high-temperature furnace 3. 17B is provided facing the X-ray irradiation direction. These X-ray transmissive plates 17A and 17B block the heated air in the high temperature furnace 3 and form a heat insulating layer having a heat insulating action. For example, beryllium or carbon is used as the material of the X-ray transmission plates 17A and 17B.
[0017]
The housing 7 is provided with a cooling fan 18 for cooling the X-ray generator 8. An air supply path 19 and an air discharge path 20 are connected to the space between the X-ray transmission plates 17A and 17B, and cooling air from an air source (not shown) such as a blower is supplied to the air supply path 19. Is supplied to the space between the X-ray transmissive plates 17A and 17B via the air and the cooling air is exhausted to the outside via the air discharge path 20. Thus, since the cooling air is introduced between the X-ray transmission plates 17A and 17B, the heat insulation effect by the X-ray transmission plates 17A and 17B is further promoted, and heat transfer from the high temperature furnace 3 to the X-ray generator 8 is achieved. It can be suppressed to some extent. For this reason, even if the X-ray generator 8 is disposed adjacent to the high-temperature furnace 3, it is avoided that the X-ray generator 8 is destroyed by the heat in the high-temperature furnace 3. That is, even in a high temperature environment, the X-ray generator 8 can be used in a state of being adjacent to the high temperature furnace 3.
[0018]
In such a static eliminator 1, X-rays from the X-ray generator 8 are irradiated into the high-temperature furnace 3 through the X-ray transmission plates 17 </ b> A and 17 </ b> B and flow through the X-ray irradiation region R in the high-temperature furnace 3 by the blower 6. + Ions and-ions are generated in the heated air. These ions are adsorbed on the liquid crystal glass substrate 2 to neutralize the charged charges, whereby static electricity generated on the liquid crystal glass substrate 2 is removed. At this time, since the X-ray generator 8 is disposed adjacent to the high-temperature furnace 3 as described above, the static elimination efficiency of the glass substrate 2 for liquid crystal is not reduced.
[0019]
In the present embodiment, two X-ray transmission plates 17A and 17B are provided in the opening 3a of the high-temperature furnace 3, but only one X-ray transmission plate is used. You may make it flow cooling air between the X-ray irradiation parts 8a of the generator 8. FIG.
[0020]
FIG. 3 is a configuration diagram illustrating a static eliminator according to a second embodiment of the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
[0021]
In the figure, a static eliminating device 31 according to the present embodiment is a device for removing electricity from the liquid crystal glass substrate 2 accommodated in a high temperature furnace 32. In the high temperature furnace 32, a housing 33 that houses the X-ray generator 8 described above is disposed. The X-ray generator 8 is arranged so that the X-ray emission part 8 a faces the side surfaces of the plurality of glass substrates for liquid crystal 2. An X-ray transmitting plate 34 that transmits X-rays is provided on the surface of the housing 33 that faces the X-ray emitting portion 8a. In this case, since the X-rays from the X-ray generator 8 are directly irradiated toward the liquid crystal glass substrate 2, it is possible to perform charge removal on the plurality of liquid crystal glass substrates 2 almost evenly. . Further, since the blower as in the first embodiment is not necessary, the structure is simplified.
[0022]
A pipe 35 extending through the high temperature furnace 32 is connected to the rear surface (surface opposite to the X-ray transmission plate 34) of the housing 33, and the power line 15 of the X-ray generator 8 is connected to the pipe 35. Has been inserted.
[0023]
In addition, an air supply path 36 and an air discharge path 37 extending through the high temperature furnace 32 are connected to the rear side of the housing 33. The cooling air introduced into the housing 33 by the air supply path 36 passes through the side surface side of the X-ray generator 8 and passes between the X-ray emission part 8 a of the X-ray generator 8 and the X-ray transmission plate 34. And is exhausted to the outside by the air discharge passage 37. Since this cooling air suppresses the heat in the high temperature furnace 32 to the X-ray generator 8 to some extent, even if the X-ray generator 8 is arranged in the high temperature furnace 32, the X-ray generator 8 is kept at a high temperature. The destruction in the furnace 32 by heat is avoided. That is, even in a high-temperature environment, the X-ray generator 8 can be used while being housed in the high-temperature furnace 33, and therefore, the static elimination efficiency of the liquid crystal glass substrate 2 is not lowered.
[0024]
In addition, the X-ray generator 8 itself is cooled by configuring the cooling air to flow on the side surface side of the X-ray generator 8. For this reason, it is not necessary to provide a cooling fan as in the first embodiment. In this respect as well, the structure is simplified and the cost can be reduced.
[0025]
The static eliminator according to the present invention is not limited to the embodiment described above. For example, the above embodiment is for removing static electricity generated in a glass substrate for liquid crystal, but the present invention is also applicable to removing static electricity from other liquid crystal substrates and semiconductor substrates.
[0026]
Moreover, although the said embodiment accommodates a to-be-processed substrate in the high temperature furnace which is a high temperature environment, this invention has high density | concentration of corrosive gas like a wet etching apparatus etc., for example, and X-ray generator The present invention can also be applied in an environment where it may corrode itself. In this case, corrosion of the X-ray generator can be reduced by flowing a corrosion-preventing gas between the X-ray generator and the X-ray transmission plate. Furthermore, the present invention can be applied in an environment where sublimation gas such as a photo process processing device is generated and the sublimate may damage the electric circuit inside the X-ray generator. In this case as well, damage to the X-ray generator can be reduced by flowing an appropriate purge gas between the X-ray generator and the X-ray transmission plate.
[0027]
【The invention's effect】
According to the present invention, since the gas is allowed to flow between the X-ray generator and the X-ray transmitting member, the object to be processed can be obtained even in a severe environment for the X-ray generator such as a high temperature environment. Static electricity can be effectively removed.
[Brief description of the drawings]
FIG. 1 is a configuration diagram illustrating a static eliminator according to a first embodiment of the present invention.
FIG. 2 is a configuration diagram showing details of the X-ray generator shown in FIG. 1;
FIG. 3 is a configuration diagram illustrating a static eliminator according to a second embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Static electricity removal apparatus, 2 ... Glass substrate for liquid crystal (to-be-processed object), 3 ... High temperature furnace (box body), 7 ... Case, 8 ... X-ray generator, 8a ... X-ray irradiation part, 17A, 17B ... X-ray transmissive plate (X-ray transmissive member), 19 ... Air supply path (gas flow means), 20 ... Air discharge path (gas flow means), 31 ... Static eliminator, 32 ... High temperature furnace (box body), 33 ... A casing, 34 ... an X-ray transmission plate (X-ray transmission member), 36 ... an air supply path (gas flow means), 37 ... an air discharge path (gas flow means).

Claims (5)

In the static eliminator which removes the static electricity which arose in the to-be-processed object accommodated in the box body by irradiating X-rays from an X-ray generator,
A housing that is fixed to the outer surface of the box and contains the X-ray generator;
An X-ray transmitting member provided in the box and transmitting X-rays irradiated from the X-ray generator;
A static electricity removing apparatus comprising gas flow means for flowing gas between the X-ray generator and the X-ray transmitting member. The X-ray transmissive member consists of a pair, and these X-ray transmissive members are arranged to face each other in the X-ray irradiation direction,
The static electricity removing apparatus according to claim 1, wherein the gas flow means is configured to flow a gas between the pair of X-ray transmitting members. In the static eliminator which removes the static electricity which arose in the to-be-processed object accommodated in the box body by irradiating X-rays from an X-ray generator,
A housing disposed within the box and containing the X-ray generator;
An X-ray transmitting member that is provided in the housing and transmits X-rays emitted from the X-ray generator;
A static electricity removing apparatus comprising gas flow means for flowing gas between the X-ray generator and the X-ray transmitting member. 4. The static eliminator according to claim 3, wherein the X-ray generator is disposed such that an X-ray irradiation part faces the object to be processed with the X-ray transmission member interposed therebetween. The gas flow means has an air supply system that supplies cooling air between the X-ray generator and the X-ray transmission member, and an air discharge system that discharges the cooling air to the outside. The static eliminating device according to any one of claims 1 to 4.

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