JP4447898B2 - Gas flow restrictor for nozzle flapper valve - Google Patents

Description

  The present invention relates to a gas flow path throttle device for a nozzle flapper valve, and more particularly to a gas flow path throttle device for a nozzle flapper valve used in a device for precisely controlling air pressure.

  A control valve device incorporating a feedback mechanism is used to perform pressure control and flow rate adjustment of a pipeline in a pneumatic circuit and a gas supply circuit. For example, in Patent Document 1, by combining a torque motor and a pilot valve, the armature is rotationally driven based on application of an input command voltage, and the pilot valve opening / closing action by the nozzle flapper mechanism is obtained by the torque generated at this time. A configuration for driving and supplying a desired fluid pressure to an actuator is disclosed. This pilot valve is sometimes referred to as a nozzle flapper valve because it includes a flapper that is displaced by the rotation of the armature and a pair of nozzles that are arranged to face both side surfaces of the flapper.

  A gas flow is supplied to each nozzle of the nozzle flapper mechanism. In order to supply a gas flow to each nozzle, a throttle device, for example, an orifice, for supplying a primary pressure gas to a nozzle flapper valve on the secondary side is provided. An example is shown in FIG. FIG. 24 shows a portion of the nozzle flapper mechanism extracted from the servo valve disclosed in Patent Document 2. Patent Document 2 relates to hydraulic control, but will be described below by replacing with pneumatic control.

  In the nozzle flapper mechanism 10 of FIG. 24, a coil 16 is wound around an armature 14 to which a flapper 12 is attached at the tip, and a permanent magnet (not shown) is disposed around the armature 14. The armature 14 is provided with a torsion spring 18, and when a drive current corresponding to the input command voltage is supplied to the coil 16, the armature 14 is moved to a position that balances with the spring force of the torsion spring 18 by electromagnetic force with the permanent magnet. The flapper 12 at the front end is displaced from the neutral position.

  The pair of nozzles 30 and 32 are arranged with their front end openings facing the flapper 12, and high-pressure working gas is supplied to the nozzles 30 and 32 via fixed orifices 34 and 36. As shown in FIG. 24, the fluid of the pressure Ps is supplied to the fixed orifices 34 and 36, respectively, and is then supplied to the pneumatic actuators (not shown) and to the nozzles 30 and 32. Therefore, the pressures Pa and Pb after passing through the fixed orifices 34 and 36 change according to the gaps between the nozzles 30 and 32 and the flapper 12.

The gas circuit in FIG. 24 is shown in FIG. 25 using the similarity with the electric circuit. In general, the pressure p can be associated with the voltage V, the flow velocity v can be associated with the current I, and the fluid resistance can be associated with the electrical resistance. Therefore, in FIG. 24, the fluid resistance due to the restriction in the fixed orifices 34 and 36 is R ₁ and R ₂ , and the nozzles 30 and 32. When the fluid resistance due to the gap between the valve 12 and the flapper 12 is R ₃ and R ₄ , it can be seen that these four fluid resistances constitute a bridge circuit. That is, if the characteristics of the fixed orifices 34 and 36 are the same, R ₁ = R ₂ , and if the flapper 12 is in the neutral position, R ₃ = R ₄ , so Pa = Pb, which is supplied to the pneumatic actuator. There is no bias between the two input pressures Pa and Pb. When the flapper 12 is displaced, the bridge circuit is unbalanced and a bias is generated between Pa and Pb, and the pneumatic actuator can be driven in accordance with the bias pressure.

  In this way, by providing a throttle device, that is, a fixed orifice, in the gas circuit for supplying the primary pressure gas to the throttle-side nozzle flapper valve, a bridge circuit is formed in the gas circuit, and the operation of the nozzle flapper valve is stable and precise. It has been done to output.

U.S. Pat. No. 3,302,782 JP-A-57-5102

  However, when the gas is squeezed by the orifice, turbulent flow or vortex flow may occur. In particular, when handling high-pressure and high-speed gas, shock waves may be generated from the edge of the orifice (for example, Shirakura et al. (See "Engineering Complete Book 12, Fluid Mechanics", Corona Co., Ltd., July 1, 1982, First Printing, p181, p200, etc.). Such turbulent flow, vortex flow, particularly shock waves become noise with respect to the pressure of the gas after being squeezed by the orifice. Therefore, an error may occur in the operation of the bridge circuit, or the operation may be unstable, which may affect the operation of the precision pneumatic nozzle flapper valve.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the prior art and provide a throttling device that can suppress noise in output pressure in a throttling device for a gas flow path that supplies a nozzle flapper valve.

In order to achieve the above object, a gas flow restrictor for a nozzle flapper valve according to the present invention is a gas flow restrictor for supplying a primary side pressure gas to a secondary side nozzle flapper in a gas pressure circuit. while having a supply port in the end, the housing having an output port at the other end, a stop portion that is provided in the housing, a plurality of small in the gap holding the upper surface of the base connected to the output port on the outer peripheral side Using the step between the fan-shaped part and the concave part, the lower surface of the gap forming lid centering on the through-hole connected to the supply port is in contact with the upper surface of the plurality of small fan-shaped parts , along the gas flow direction A throttle part that forms a parallel gap having a predetermined interval, and the throttle part is formed by connecting a plurality of small fan-shaped parts at the center, and the size of the joint part at the center part is the diameter of the through hole of the gap forming lid. It is set smaller than the write gas flows Characterized in that it comprises a parallel gap extending radially toward the outer peripheral side of the gas flows out from the central portion.

In addition, the throttle portion is formed by connecting the disk portion having the flat upper surface of the gap holding base portion and a plurality of small fan-shaped portions at the center, and the size of the joint portion at the center portion is smaller than the diameter of the through hole of the gap forming lid. and a spacer portion that will be set, it is preferable to place the spacer on the flat upper surface of the disc portion corresponding to the thickness of the spacer portion includes a parallel gap a predetermined distance is formed.

In addition, instead of the disk portion having a flat upper surface of the gap holding base portion and the small fan-shaped portion , the throttle portion is connected to each other at the center side and the size of the portion connected to each other at the center side is the gap forming lid. The straight leg portion set smaller than the diameter of the through-hole has a radially extending spacer portion on the outer peripheral side, and the spacer portion is arranged on the flat upper surface of the disk portion to correspond to the thickness of the spacer portion. It is preferable to include a parallel gap in which a predetermined interval is formed.

  According to at least one of the above configurations, the throttle device includes a throttle portion including a parallel gap having a predetermined interval in a housing having a supply port and an output port, and the gas flowing through the throttle portion is disturbed by a rectifying action of the parallel gap. Form without. The gas formed without turbulence does not include turbulence and vortex, and does not generate shock waves. Therefore, noise in the output pressure of the expansion device can be suppressed.

  As described above, according to the gas flow path throttle device for a nozzle flapper valve according to the present invention, it is possible to suppress output pressure noise. According to the three-way valve type precision pneumatic nozzle flapper valve according to the present invention, it is possible to suppress noise in the nozzle portion.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. First, an example of a precision pneumatic nozzle flapper valve to which the throttle device according to the present invention is applied is shown in FIGS. The precision pneumatic nozzle flapper valve 50 in FIG. 1 uses an I-type torque motor, and a coil 56 is wound around an I-type armature 54 to which a flapper 52 is attached. A right yoke 62 and a left yoke 63 are provided around the I-type armature 54, and permanent magnets (not shown) are connected to the right yoke 62 and the left yoke 63. For example, the N pole side of the permanent magnet is connected to the right yoke 62 and the S pole side is connected to the left yoke 63. A torsion spring 58 is provided in a part of the armature 54, and a flexible O-ring 60 is attached near the root of the flapper 52. The yokes 62 and 63 are attached and fixed to the main body block 64.

  Therefore, when a driving current corresponding to the input command voltage is supplied to the coil 56, the armature 54 rotates to a position that balances with the spring force of the torsion spring 58 by the electromagnetic force between the permanent magnet and the flapper 52 at the tip. It can be displaced from the neutral position.

  The flapper 52 is inserted into a gas passage provided in the center of the main body block 64. In the gas passage, the tip openings of the pair of nozzles 70 and 72 are arranged toward both side surfaces of the flapper 52. As shown in FIG. 1, the primary pressure gas of pressure Ps is supplied to the throttle devices 100 and 101 to be throttled, supplied to precision pneumatic actuators not shown, and supplied to the nozzles 70 and 72. Is done.

  Here, a bridge circuit similar to that described with reference to FIG. 25 is formed by the fluid resistance of the expansion devices 100 and 101 and the fluid resistance of the gap between the nozzles 70 and 72 and the flapper 52. Therefore, the supply pressures Pa and Pb to the precision pneumatic actuator (not shown) can be varied by the displacement of the flapper 52, that is, can be controlled by the coil drive current or the input command voltage to the precision pneumatic nozzle flapper valve 50.

  The precision pneumatic nozzle flapper valve 80 in FIG. 2 uses a T-type torque motor whose armature has a T-shape. The configuration on the main body block 64 side is the same as the precision pneumatic nozzle flapper valve 50 of FIG. In FIG. 2, a coil 86 is wound around a T-type armature 84 to which a flapper 82 is attached at the tip. An upper yoke 92 and a lower yoke 93 are provided above and below the arm portion of the T armature 84, and permanent magnets (not shown) are connected to the upper yoke 92 and the lower yoke 93, respectively. For example, the N pole side of the permanent magnet is connected to the upper yoke 92 and the S pole side is connected to the lower yoke 93. The upper yoke 92 and the lower yoke 93 are attached and fixed to the main body block 64 on the lower surface of the lower yoke 93. A flanged flexible tube 90 made of an elastic material is attached to the outer periphery of the shaft portion of the T-type armature 84. The flange portion of the flexible tube 90 is fixedly supported by the main body block 64, and a flapper 82 is fixed to the inner wall surface of the tip portion opposite to the flange portion of the flexible tube 90, and an armature 84 is fixed to the outer peripheral surface thereof.

  Therefore, by passing a driving current according to the input command voltage to the coil 86, the armature 84 rotates to a position that balances with the spring force due to the elasticity of the flexible tube 90 by the electromagnetic force with the permanent magnet, and the flapper at the tip end. 82 can be displaced from the neutral position. Then, a pair of nozzles 70 and 72 arranged on the main body block 64 so as to face both side surfaces of the flapper 82, and a throttle device 100 according to the present invention for supplying primary side pressure gas to the throttle side secondary nozzle flapper valve, In cooperation with 101, supply pressures Pa and Pb to a precision pneumatic actuator (not shown) can be controlled.

  Next, a gas circuit throttle device for a nozzle flapper valve (hereinafter simply referred to as a throttle device) according to an embodiment of the present invention will be described in detail. FIG. 3 is a cross-sectional view of the throttle device 100 incorporated in the precision pneumatic nozzle flapper valve. The throttle device 100 is incorporated in a main body block of a precision pneumatic nozzle flapper valve, and includes an upper lid block 110, a lower case block 120, an O-ring 130, and a throttle unit 140 housed in the lower case block 120, which are part of the main body block. Including.

  The upper lid block 110 and the lower case block 120 have a function of a housing that holds the throttle portion 140 together with the O-ring 130, supplies the primary pressure gas, and outputs the gas supplied to the secondary nozzle flapper. The upper lid block 110 and the lower case block 120 are made of a material having sufficient strength to form a high-pressure gas circuit, and machining suitable for obtaining a desired gas holding property, for example, precision hole machining, precision surface, is used for the material. It can be obtained by processing.

  The upper lid block 110 has a flat mating surface 112, and a primary-side pressure gas channel 114 is provided therein, and the channel 114 opens at the mating surface 112. This opening serves as a supply port for the primary pressure gas to the throttle unit 140.

  The lower case block 120 has a flat mating surface 122 corresponding to the mating surface 112 of the upper lid block 110, and a secondary-side pressure gas channel 124 is provided therein. The lower case block 120 is provided with a cylindrical concave portion 126 for accommodating the throttle portion 140 and a concave portion 128 for accommodating the O-ring. On the bottom surface of the cylindrical recess 126, a flow path 124 for the secondary pressure gas is opened, and this opening serves as an output port for the secondary pressure gas from the throttle 140. As shown in FIG. 3, the recess 128 for accommodating the O-ring is provided close to the mating surface 122 and outside the cylindrical recess 126. When the mating surface 122 is disposed inside and tightly fixed to the mating surface 112 of the upper lid block 110, the O-ring 130 is set to a size that can be deformed to sufficiently exhibit the airtight function. That is, in order to prevent gas leakage between the outer peripheral portion of the narrowed portion 140 and the lower case block 120, and to prevent gas leakage between the mating surface 122 of the lower case block 120 and the mating surface 112 of the upper lid block 110. The size is set such that sufficient deformation is possible.

  The restricting portion 140 is a part of the gas circuit, and has a function of restricting the primary-side pressure gas and forming the gas flowing at that time without disturbance. Specifically, it is composed of a gap forming lid 142, a gap holding base 144, and an outer ring 146, which are combined with each other and housed in the lower case block 120 as shown in FIG. FIGS. 4 to 8 show perspective views of elements constituting the diaphragm 140 and how the elements are combined. FIG. 9 is a perspective view showing a state where the throttle unit 140 is housed in the lower case block 120. With these elements, the gas flow path is like “flow path 114 of the upper lid block 110—through hole 150—parallel gap 152—outer window portion 154—inner window portion 156—hole 158—flow passage 124 of the lower case block 120”. The gas is squeezed in the parallel gap 152 and formed without any disturbance.

In the gas flow path other than the parallel gap 152, the size of the flow path is set so that the fluid resistance is negligible compared to the fluid resistance in the parallel gap 152. For example, when the pressure of the primary pressure gas is 5 × 10 ⁵ Pa and the flow velocity is 30 m / sec, and this is restricted to a laminar flow with a flow velocity of 300 m / sec and output to the secondary side, as an example, parallel It is preferable that the gap 152 has a gap of about 50 μm, a length of about 5-10 mm, and a gas flow path other than the parallel gap 152 has a dimension of about several mm.

  A gap forming lid 142 shown in FIG. 4 is a ring having a through hole 150 in the center, and the upper surface is a surface facing the mating surface 112 of the upper lid block 110 and the lower surface is a surface facing the gap holding base 144. Therefore, the throttle unit 140 has a function of guiding the primary pressure gas to the gap holding base 144 through the through hole 150. In the above example, the gap forming lid 142 can have an outer diameter of about 10 mm, a thickness of about 2 mm, and a through hole 150 having a diameter of about 3 mm.

  The gap holding base 144 shown in FIG. 5 is a member including an upper disk portion 162, a lower ring portion 164 of the disk portion 162, and four support legs 166 that connect the disk portion 162 and the ring portion 164. It is. The outer diameter is about 10 mm, which is the same size as the outer diameter of the gap forming lid 142. Further, the overall height of the gap holding base 144 can be about 4 mm, and the thickness of the disk portion 162 can be about 0.8 mm. The gap holding base 144 may be formed by integrally forming the disk portion 162, the supporting leg portion 166, and the ring portion 164 by machining or the like, or may be an assembly in which these are individually manufactured and combined.

  The disk portion 162 includes four partial fan-shaped portions 168 on the upper surface side. The four partial fan-shaped portions 168 have an outer diameter of about 10 mm, which is the same as the diameter of the disk portion 162, and an inner diameter of about 3 mm, which is the same as the diameter of the through hole 150 of the gap forming lid 142. The upper surface of the partial fan-shaped portion 168 is a surface that contacts the lower surface of the gap forming lid 142, and the height thereof can be about 50 μm in the above example. This step of about 50 μm can be obtained by machining. Therefore, from another viewpoint, the upper surface side of the disk portion 162 has a cylindrical concave portion 170 that is approximately 50 μm lower than the surrounding partial fan-shaped portion 168 in the central portion, and from the concave portion 170 toward the outer periphery, it is also approximately 50 μm. Four concave portions 172 spreading in a low radial shape are provided.

  FIG. 6 is a view showing a state in which the upper surface of the gap holding base 144 and the lower surface of the gap forming lid 142 are combined together, and the gap between the concave portion of the disk portion 162 and the lower surface of the gap forming lid 142 is about 50 μm. It can be seen that four parallel gaps 152 are formed. The through hole 150 of the gap forming lid 142 communicates with the parallel gap 152 via a cylindrical recess 170 in the center of the disk portion 162.

  The ring portion 164 is a ring having the same outer diameter, inner diameter, and height as the gap forming lid 142. In the above example, the outer diameter can be about 10 mm, the inner diameter can be about 3 mm, and the height can be about 2 mm. Each support leg 166 has an outer diameter, an inner diameter, and a sector shape corresponding to each segment sector portion 168, and the height thereof can be about 1.2 mm in the above example. Accordingly, from another viewpoint, the ring portion 164 and each support leg portion 166 are provided at the bottom of the disk portion 162 and at the positions corresponding to the four parallel gaps 152 on the upper surface side of the disk portion 162. The inner window portion 156 is opened from the outer periphery of the gap holding base 144 toward the inside, and further, the lower portion of the disk portion 162 is abutted inside, and the lower surface of the ring portion 164 Is provided with a hole 158 having an opening. The diameter of the hole 158 is the same as the diameter of the through hole 150 of the gap forming lid 142 as described above.

  The outer ring 146 shown in FIG. 7 has a height obtained by adding the height of the gap forming lid 142 to the height of the gap holding base 144 and corresponds to the inner diameter of the cylindrical recess 126 in the lower case block 120. The ring has an outer diameter and an inner diameter corresponding to the outer diameter of the gap forming lid 142 and the gap holding base 144. In the above example, the height can be about (4 + 2) = 6 mm, the inner diameter can be about 10 mm, and the outer diameter can be about 12 mm. On the outer periphery of the ring, four outer window portions 154 are provided corresponding to the parallel gap 152 and the inner window portion 156 formed when the gap forming lid 142 and the gap holding base 144 are combined. The size of each outer window 154 is set to a size that allows the parallel gap 152 and the inner window 156 to be sufficiently expected. In the above example, the inner window portion 156 has a height of about 1.2 mm, and the disc portion 162 has a thickness of about 0.8 mm. Therefore, the outer window portion 154 has a height of about (1.2 mm + 0.8 mm). = 2mm which is sufficiently larger than 2mm.

  In FIG. 8, the gap holding base 144 is housed inside the outer ring 146, a gap forming lid 142 is installed thereon, and each outer window 154 is desired to have a corresponding inner window 156 and parallel gap 152. It is a figure which shows the state positioned and arrange | positioned in a position, The thing of this assembly state is the aperture | diaphragm | squeeze part 140. FIG.

  The aperture 140 is housed in the lower case block 120 as shown in FIG. As can be seen from FIG. 9, the outer windows 154 of the throttle 140 are respectively covered by the inner wall of the cylindrical recess that houses the throttle 140 of the lower case block 120. Is not an open end but a closed flow path. Thus, a flow path of “parallel gap 152 -outer window portion 154 -inner window portion 156 -hole 158” is formed. Therefore, the upper cover block 110 is firmly aligned with the lower case block 120 via the O-ring 130, so that the gas flow path becomes “the flow path 114 of the upper cover block 110—the through hole 150—the parallel gap 152—the outer window portion 154—the inner side. A window portion 156-a hole 158-a flow path 124 of the lower case block 120 "is configured.

  In this manner, the primary pressure gas supplied to the flow path 114 passes through this gas flow path and is throttled in the parallel gap 152. Since this parallel gap 152 is a gap of about 50 μm and has a length of several mm, the gas flowing therethrough is formed without any disturbance by the rectifying action, and is supplied to the secondary nozzle flapper valve. Further, since the parallel gap 152 is formed by the four concave portions 172 that radiate from the cylindrical concave portion 170 in the central portion of the disc portion 162 toward the outer peripheral side of the disc portion 162, the flow does not rapidly expand. It spreads gradually and can be made a smoother flow. The gas formed without turbulence in this way does not include turbulent flow and vortex flow, and does not generate shock waves. Therefore, in the expansion device 100, noise in the output pressure of the high pressure gas can be suppressed.

  As described above, in the diaphragm device 100 of FIG. 3, the parallel gap 152 is formed between the lower surface of the gap forming lid 142 and the concave portion 172 that radiates out of the upper surface of the gap holding base 144. The predetermined interval of the parallel gap 152 (about 50 μm in the above example) uses a step between the partial sector 168 and the recess 172 on the upper surface of the gap holding base 144 to form a gap on the upper surface of the partial sector 168. This is ensured by contacting the lower surface of the lid 142. The step for securing the parallel gap 152 can be obtained by machining or the like on the upper surface of the gap holding base 144 as described above, but a spacer can also be used.

  10-12 is a figure which shows a mode that the parallel gap 152 is formed using the spacer 400 to which the four small fan-shaped parts are tied in the center. Elements common to FIGS. 3 to 9 are denoted by the same reference numerals, and detailed description thereof is omitted. FIG. 10 shows a spacer 400 having a thickness of about 50 μm, and the diameter connecting the four small fan-shaped outer shapes of the spacer 400 is set to be the same as the diameter of the gap holding base 444. Further, the size of the central joint is set sufficiently smaller than the diameter of the through hole 150 of the gap forming lid 142. The spacer 400 can be obtained by etching or precision pressing a metal plate having a predetermined thickness.

  The gap holding base 444 has the same configuration except that there is no partial fan-shaped portion 168 in the disk portion 162 above the gap holding base 144 described with reference to FIG. That is, the gap holding base 144 is different from the gap holding base 144 of FIG. 5 in that the upper surface of the disk portion 462 of the gap holding base 444 is flat. FIG. 11 is a diagram illustrating a state in which the spacer 400 is combined with the gap holding base 444 having a flat upper surface. The spacer 400 is disposed on the flat upper surface of the disk portion 462 so that the small fan-shaped outer shape matches the outer shape of the upper disk portion 462 of the gap holding base 444. Thus, the non-fan-shaped portion 472 of the spacer 400 is lowered by about 50 μm when viewed from the upper surface of the spacer 400.

  FIG. 12 is a diagram illustrating a state in which the gap forming lid 142 is disposed on the spacer 400 and the parallel gap 152 is formed. The parallel gap 152 is formed corresponding to the portion 472 of the spacer 400 having no small fan shape. With this configuration, the gas flow path is formed as “-through hole 150—parallel gap 152 corresponding to the non-fan-shaped portion 472 of the spacer 400—the outer window portion 154 described with reference to FIG.

  In the gap holding base 144 of FIG. 5, the highest precision is required for processing the four recesses 172. On the other hand, in the configuration shown in FIGS. 10 to 12, the gap holding base 444 only needs to be processed to have a sufficiently flat upper surface, and the parallel gap 152 that requires high accuracy only manages the thickness of the spacer 400. It's okay. Therefore, the predetermined parallel gap 152 can be easily obtained without requiring complicated processing.

  FIG. 13 is a diagram illustrating an example of the spacer 410 having another shape. In this example, four straight arms are connected at the center. The thickness of the spacer 410 corresponds to a predetermined interval of the parallel gap, the diameter connecting the outer shapes of the four arm portions is set to be the same as the diameter of the gap holding base 444, and the size of the joint portion at the center is It is the same as the spacer 400 in FIG. 10 that the diameter is set sufficiently smaller than the diameter of the through hole 150 of the gap forming lid 142.

  FIG. 14 is a diagram showing an example in which four partial fan-shaped spacers 420 are used and are disposed on the flat upper surface of the gap holding base 444 by pasting or the like. In this case, the thickness of each spacer 420 corresponds to a predetermined interval of the parallel gap, and when the four spacers 420 are arranged in accordance with the outer shape of the gap holding base 444, the portion without the partial fan shape in the central portion is It is preferable to substantially correspond to the diameter of the through hole 150 of the gap forming lid 142.

  15-17 is a figure which shows a mode that the parallel gap 152 is formed using the spacer 500 to which the four small sector parts are connected by the outer peripheral part. Elements common to FIGS. 3 to 9 are denoted by the same reference numerals, and detailed description thereof is omitted. When using the spacer 500 to which the outer peripheral portion is connected, the gas flow path flows from the center side to the outside of the spacer 500, so that the outer shape of the disk portion 562 of the gap holding base 544 needs to be devised. That is, the upper surface of the disk portion 562 is flat, which is the same as the disk portion 462 of the gap holding base 444 described in FIG. 11, but the radial dimension of the disk portion 462 is partially different. That is, the portion corresponding to the four small fan-shaped portions of the spacer 500 is the same as the outer diameter of the spacer 500, but in the portion where the small fan-shaped portion of the spacer 500 is not present, in order to secure a gas flow path, The dimensions are small.

  FIG. 15 is a diagram illustrating a state in which the spacer 500 is disposed on the gap holding base 544. As shown in detail in FIG. 17, the spacer 500 has four small fan-shaped portions connected at the outer peripheral portion. The thickness corresponds to the interval between the parallel gaps, and is about 50 μm in the above example. The upper disk portion 562 of the gap holding base 544 has a portion 572 where the spacer 500 does not have the four small fan portions, the outer diameter 574 becomes smaller than the other portions, and the spacer 500 does not have the four small fan portions. An opening 576 is formed in the downward direction at the outer peripheral side. This opening 576 ensures a gas flow path.

FIG. 16 is a diagram illustrating a state in which the gap forming lid 142 is disposed on the spacer 500 and the parallel gap 152 is formed. The parallel gap 152 is formed corresponding to the portion 572 of the spacer 500 having no small fan shape. With this configuration, the gas flow path is formed as “-the through hole 150 -the parallel gap 152 corresponding to the non-fan-shaped portion 572 of the spacer 500 -the opening 576 -the inner window 156 described with reference to FIG. 3". The

  FIG. 17 is a diagram illustrating the relationship between the spacer 500, the outer shape of the upper disk portion 562, and the through hole 150. As described above, the spacer 500 has four small fan-shaped portions, the outer periphery thereof is connected by a thin ring-shaped portion, and the portion without the small fan-shaped portion in the center portion has a size corresponding to the diameter of the through hole 150. Set to The outer shape of the upper disk portion 562 is set to be the same as the outer diameter of the spacer 500 where it corresponds to the small fan-shaped portion of the spacer 500, and is set to a smaller diameter when there is no small fan-shaped portion. A gap s between the inner side of the ring portion of the spacer and the outer shape of the disk portion 562 is set to be sufficiently larger than the interval of the parallel gap. In the above example, for example, s = about 1-2 mm.

  Thus, by using a spacer having an appropriate shape, it is possible to easily obtain a predetermined parallel gap without requiring complicated and high-precision processing of the upper surface of the gap holding base. In the above description, the four parallel gaps are formed by the spacers. However, the number is not limited to four, and may be less or more.

  In the above description, the throttling device has been described as being incorporated in the main body block of the precision pneumatic nozzle flapper valve. That is, the aperture portion of the aperture device is disposed in a storage space between the lower case block and the upper lid block forming a part of the main body block, and the lower case block and a part of the upper lid block function as a housing for storing the aperture portion. have. In addition to this, it is possible to configure a diaphragm device by arranging a throttle section inside an independent housing. FIG. 18 and FIG. 19 are schematic views showing a throttling device having a configuration in which a disc is arranged in an independent housing and a parallel gap is provided between the inner wall of the housing and the disc to form a flow without disturbance. is there.

  18 has a disk 208 disposed inside a housing 206 having a supply port 202 at one end and an output port 204 at the other end. The disk 208 is arranged coaxially with the housing 206 and has an outer diameter larger than the diameter of the supply port 202. The housing 206 has a supply port side inner wall 210 parallel to the upper surface of the disk 208. A parallel gap 212 between the supply port side inner wall 210 of the housing 206 and the upper surface of the disk 208 is set to about 50 μm, for example. In order to install the disk 208 in the housing 206 under such conditions, an appropriate support or spacer not shown can be used. By setting the parallel gap 212 and setting the length of the parallel gap 212 of the disk to about several millimeters, the gas flowing therethrough can be formed without disturbance by the rectifying action of the parallel gap 212.

  19 has three disks 228, 230, and 232 disposed in a housing 226 having a supply port 222 at one end and an output port 224 at the other end. Each disk 228, 230, 232 is arranged coaxially with the housing 226 and has an outer diameter larger than the diameter of the supply port 222. The disk 232 arranged on the most downstream side when viewed from the supply port 222 is a disk, and the other disks 228 and 230 are donut-shaped disks having an opening 234 having the same size as the supply port 222 at the center. is there. The parallel gaps 236, 238 between the disks 228, 230, 232 are set to about 50 μm, respectively. The housing 226 has a supply port side inner wall 240 parallel to the upper surface of the disk 228. The gap of the parallel gap 242 between the supply port side inner wall 240 of the housing 226 and the upper surface of the disk 228 is also set to about 50 μm. By setting the length of each parallel gap 236, 238, 242 to about several millimeters, the gas flowing therethrough can be formed without disturbance by the rectifying action of each parallel gap 236, 238, 242. It is possible to further increase the number of donut-shaped disks and increase the number of parallel gaps.

  In the above description, the gap between the parallel plates is used to form the flow without any disturbance. However, the gap between the parallel plates may not be used to form the flow without any disturbance. 20 to 23 are schematic diagrams illustrating the configuration of another diaphragm unit. A throttle unit 250 shown in FIG. 20 has a plurality of pipes 252 having different diameters arranged coaxially, a gap between the pipes is a parallel gap, the gap is, for example, about 50 μm, and a length thereof is several mm. . A throttle section 260 shown in FIG. 21 is formed of a spirally wound tube 262, and the adjacent gaps of the spiral pipes are parallel gaps, the gap is, for example, about 50 μm, and the length is several mm. A diaphragm unit 270 shown in FIG. 22 has a plurality of parallel flat plates 272 arranged in a direction parallel to the axial direction of the diaphragm unit 270, a gap between the parallel flat plates is set to, for example, about 50 μm, and a length thereof is set to several mm. is there.

  As in these configurations, if the flow path has a length of several millimeters with a gap of about 50 μm, the flow can be formed without disturbance. For example, in FIG. 22, a plurality of parallel flat plates are arranged in a direction parallel to the axial direction of the aperture portion 270. The size may be, for example, 50 μm square. The cross-sectional shape may be a polygon. The throttle unit 280 shown in FIG. 23 has a circular cross section, that is, a plurality of elongated pipes 282 having a diameter of about 50 μm are bundled to form a throttle unit.

  In the above description, the size of the gap is about 50 μm and the length is several mm. However, the size of the gap and the length of the gap that can prevent the gas flowing therethrough from being disturbed are the pressure of the gas flowing therethrough. The above values are examples, depending on the flow rate and the like.

  In the above, the precision pneumatic nozzle flapper valve includes a primary pressure gas supply port (indicated by Ps) as shown in FIGS. 1 and 2, and two load ports (Pa, Pb) to a precision pneumatic actuator not shown. ) And four gas input / output ports of an exhaust port. In this respect, the precision pneumatic nozzle flapper valve shown in FIGS. 1 and 2 is called a four-way valve. On the other hand, there is a precision pneumatic nozzle flapper valve having three gas input / output ports including a supply port, one load port, and an exhaust port, which is called a three-way valve type.

  As shown in FIGS. 27 and 28, which will be described later, there are some precision pneumatic nozzle flapper valves called three-way valve types in which nozzles are arranged on both sides of the flapper, and one is the supply side and the other is the exhaust side. Alternatively, a nozzle can be arranged on one side of the configuration shown in FIG. 1 or FIG. 2, that is, one side of the flapper to form a three-way valve type. In the latter case, the above-described diaphragm device can be used. FIG. 26 is a view showing an example in which the throttling device 101 is used for such a three-way valve type precision pneumatic nozzle flapper valve 600. 1 and 2 are omitted, and the same elements are denoted by the same reference numerals. As shown in FIG. 26, the primary pressure gas having the pressure Ps is supplied and throttled to the expansion device 101, and the gas flowing therethrough is formed without turbulence by the rectifying action of the parallel gap, and the supply side pressure gas having the pressure Pa Is supplied to a precision pneumatic actuator and nozzle 70 not shown as. The supply-side pressure gas emitted from the nozzle 70 passes through a gap between the nozzle 70 and the flapper 52 and is exhausted to the outside. In this way, the above-described throttling device can be used for a three-way valve type precision pneumatic nozzle flapper valve, and the same operation and effect as those used for the three-way valve type precision pneumatic nozzle flapper valve of FIGS. Obtainable.

  27 and 28 are diagrams showing the configuration of a three-way valve type precision pneumatic nozzle flapper valve. Elements common to FIGS. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted. A three-way valve type precision pneumatic nozzle flapper valve 300 shown in FIG. 27 includes an I-type torque motor corresponding to FIG. 1, and a three-way valve type precision pneumatic nozzle flapper valve 310 shown in FIG. 28 corresponds to FIG. Is provided. In the three-way valve type precision pneumatic nozzle flapper valves 300 and 310, one side of two nozzles having openings on both sides of the flapper 52 is used as a supply side nozzle 370 and the other side is used as an exhaust side nozzle 374. Accordingly, the pressure gas is supplied to the supply side nozzle 370 from the supply port 380, and the gas is discharged from the exhaust side nozzle 374 through the exhaust port 384. The pressure gas supplied to the flapper 52 is output to a precision pneumatic actuator (not shown) using the flow path in which the flapper 52 is disposed as a load port 382.

  Conventionally, in a three-way valve type pneumatic nozzle flapper valve, the same shape is used for the supply side nozzle and the exhaust side nozzle. FIG. 29 is an enlarged view of the vicinity of a flapper 352 in a conventional three-way valve type pneumatic nozzle flapper valve. Thus, both the supply-side nozzle 350 and the exhaust-side nozzle 32 are tapered nozzles that have a hole with a constant diameter inside the nozzle and taper as the outside goes to the tip.

  In this case, paying attention to the gas flow at the tip of each nozzle, in the supply-side nozzle 350, when the pressure gas from the supply port 380 exits from the inside of the nozzle to the outside and outputs to the load port 382 side, the flow path gradually increases. To spread. On the other hand, for the exhaust side nozzle 352, the flow path suddenly expands when the pressure gas enters from the outside of the nozzle to the inside from the load port 382 side and flows to the exhaust port 384 side. In such a portion where the flow path suddenly changes, noise is likely to be generated. Therefore, when the pneumatic nozzle flapper valve is used for precise pneumatic control, there may be a problem in precise control.

  A three-way valve type precision pneumatic nozzle flapper valve that solves the problems of the prior art and can suppress noise in the nozzle portion is provided. FIG. 30 is an enlarged view of the vicinity of the flapper 52 in the precision pneumatic nozzle flapper valves 300 and 310 shown in FIG. 27 and FIG. The tip shape of the supply-side nozzle 370 and the tip shape of the exhaust-side nozzle 372 are different depending on how the gas flows. The tip shape 374 of the supply-side nozzle 370 can be a conventionally used shape, that is, a tapered shape having a hole with a constant diameter inside the nozzle and tapering as the outside goes to the tip. On the other hand, the tip shape 376 of the exhaust side nozzle 372 is inclined such that the inside of the nozzle is inclined and the tip of the nozzle gradually tapers from both the outside and inside of the nozzle. As shown in FIG. 31, the inclination inside the nozzle is preferably about 15 to 60 degrees with respect to the flapper 52. It is preferable that the inclination of the nozzle outer side is a reverse inclination and is about 15 to 60 degrees.

  As a result, when the pressure gas flows from the load port to the exhaust port on the inside of the nozzle, the flow path does not change suddenly but gradually changes, preventing sudden expansion of the flow. it can. Therefore, the generation of noise due to the rapid expansion of the flow can be suppressed.

It is a figure which shows the example of the precision pneumatic nozzle flapper valve to which the diaphragm | throttle device of embodiment which concerns on this invention is applied. It is a figure which shows the example of the other precision pneumatic nozzle flapper valve to which the aperture | throttle device of embodiment which concerns on this invention is applied. It is sectional drawing of the diaphragm | throttle device of embodiment concerning this invention. It is a perspective view of the clearance gap formation lid in the diaphragm | throttle device of embodiment which concerns on this invention. It is a perspective view of the clearance gap holding base in the diaphragm | throttle device of embodiment which concerns on this invention. It is a figure which shows the state which combined the clearance gap maintenance base and the clearance gap formation cover in the aperture_diaphragm | restriction apparatus of embodiment which concerns on this invention. It is a perspective view of the outer ring in the diaphragm | throttle device of embodiment which concerns on this invention. It is a perspective view which shows the aperture | diaphragm | squeezing part of the aperture_diaphragm | restriction apparatus of embodiment which concerns on this invention. It is a perspective view which shows a mode that the aperture | diaphragm | squeeze part is accommodated in the lower case block in the aperture_diaphragm | restriction apparatus of embodiment which concerns on this invention. It is a figure which shows an example of the spacer in the aperture_diaphragm | restriction apparatus of embodiment concerning this invention. In the diaphragm | throttle device of embodiment which concerns on this invention, it is a figure which shows a mode that the spacer was combined with the clearance gap holding base with a flat upper surface. In the diaphragm | throttle device of embodiment which concerns on this invention, it is a figure which shows a mode that a clearance gap formation cover is arrange | positioned on a spacer and a parallel clearance gap is formed. It is a figure which shows the example of the spacer of another shape. It is a figure which shows the example using a partial fan-shaped spacer. It is a figure which shows a mode that the spacer of another shape is arrange | positioned on a gap | interval holding | maintenance base. Furthermore, it is a figure which shows a mode that the clearance gap formation cover is arrange | positioned on the spacer of another shape, and a parallel clearance gap is formed. It is a figure which shows the relationship between the spacer of another shape, the external shape of an upper disk part, and a through-hole. It is a schematic diagram which shows another diaphragm | throttle device. It is a schematic diagram which shows another diaphragm | throttle device. It is a schematic diagram which shows the other example of an aperture part. It is a schematic diagram which shows the further another example of an aperture part. It is a schematic diagram which shows the further another example of an aperture part. It is a schematic diagram which shows the further another example of an aperture part. It is a figure explaining schematic structure of a nozzle flapper mechanism. It is the figure which represented the gas circuit in FIG. 24 using the similarity with an electric circuit. It is a figure which shows a mode that the throttle apparatus of embodiment which concerns on this invention is used for a three-way valve type | mold precision pneumatic nozzle flapper valve. It is a figure which shows the structure of the three-way valve type | mold precision pneumatic nozzle flapper valve in embodiment which concerns on this invention. It is a figure which shows the structure of the three-way valve type | mold precision pneumatic nozzle flapper valve in other embodiment. It is a partially enlarged view of a conventional three-way valve type pneumatic nozzle flapper valve. It is a partially enlarged view of the three-way valve type precision pneumatic nozzle flapper valve in the embodiment according to the present invention. It is the further enlarged view of the three-way valve type | mold precision pneumatic nozzle flapper valve in embodiment which concerns on this invention.

Explanation of symbols

  10 Nozzle flapper mechanism, 12, 52, 82 Flapper, 14, 54, 84 Armature, 30, 32, 70, 72 Nozzle, 34, 36 Fixed orifice, 50, 80, 600 Precision pneumatic nozzle flapper valve, 100, 101, 200, 220 Diaphragm device, 140, 250, 260, 270, 280 Diaphragm part, 142 Gap forming lid, 144, 444, 544 Gap holding base, 152, 212, 236, 238, 242 Parallel gap, 162, 462, 562 Disk part, 172 Recess, 202, 222 Supply port, 204, 224 Output port, 206, 226 Housing, 208, 228, 230, 232 Disc, 210, 240 Supply port side inner wall, 272 Parallel flat plate, 282 Pipe line, 300, 310 Three-way valve Type precision pneumatic nozzle flapper valve, 3 70 Supply side nozzle, 372 Exhaust side nozzle, 380 Supply port, 382 Load port, 384 Exhaust port, 400, 410, 420, 500 Spacer, 472, 572 Spacer-free part, 574 Disc part outer diameter, 576 opening.

Claims (3)

In the gas pressure circuit, a throttle device for a gas flow path for supplying primary side pressure gas to a secondary side nozzle flapper,
A housing having a supply port at one end and an output port at the other end;
A throttle portion that is provided in the housing, through which utilize the step between the plurality of small fan-shaped portion and the recess in the gap holding the upper surface of the base connected to the output port on the outer peripheral side, is connected to the supply port The lower surface of the gap forming lid having the hole at the center is in contact with the upper surfaces of the plurality of small fan-shaped portions, so that a constricted portion in which a parallel gap having a predetermined interval is formed along the gas flow direction;
With
The throttle part is connected to the center of a plurality of small fan-shaped parts, the size of the joint part of the central part is set smaller than the diameter of the through hole of the gap forming lid, on the outer peripheral side where the gas flows from the central part where the gas flows A gas flow path throttle device for a nozzle flapper valve, characterized by including parallel gaps that radiate outward. The gas flow path throttle device for a nozzle flapper valve according to claim 1,
The throttle part is set so that the disk part with a flat upper surface of the gap holding base part and a plurality of small fan-shaped parts are connected at the center, and the size of the joint part at the center part is smaller than the diameter of the through hole of the gap forming lid. A gas flow for a nozzle flapper valve, comprising a parallel gap that is arranged on the flat upper surface of the disk portion and has a predetermined interval corresponding to the thickness of the spacer portion. Road throttle device. The gas flow path throttle device for a nozzle flapper valve according to claim 1,
Instead of the disk part with a flat upper surface of the gap holding base part and the small fan-shaped part, the throttle part is connected to each other on the center side, and the size of the part connected to each other on the center side penetrates the gap forming lid. The straight leg portion set smaller than the diameter of the hole has a spacer portion extending radially on the outer peripheral side, and the spacer portion is disposed on the flat upper surface of the disk portion, and a predetermined length corresponding to the thickness of the spacer portion is provided. A gas flow path throttle device for a nozzle flapper valve, comprising a parallel gap in which an interval is formed.

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