CN107725519B - Small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve and using method thereof - Google Patents
Small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve and using method thereof Download PDFInfo
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- CN107725519B CN107725519B CN201711059236.2A CN201711059236A CN107725519B CN 107725519 B CN107725519 B CN 107725519B CN 201711059236 A CN201711059236 A CN 201711059236A CN 107725519 B CN107725519 B CN 107725519B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/16—Special measures for feedback, e.g. by a follow-up device
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/04—Special measures taken in connection with the properties of the fluid
- F15B21/041—Removal or measurement of solid or liquid contamination, e.g. filtering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/60—Circuit components or control therefor
- F15B2211/615—Filtering means
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Abstract
The invention discloses a small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve. It comprises a shell; the upper surface of the shell is provided with a shell jet hole, a shell left receiving hole, a shell right receiving hole and a shell center hole, a primary seat assembly is arranged above the shell center hole, the primary seat assembly comprises a primary seat, an upper pressing block, a jet piece, a locating pin and a lower pressing block, the jet piece is positioned between the upper pressing block and the lower pressing block, the jet piece, the upper pressing block and the lower pressing block are concentrically arranged, and the locating pin sequentially and fixedly connects the jet piece, the upper pressing block and the lower pressing block at the center of the primary seat; the center of the primary seat assembly is provided with an armature assembly which consists of an armature, a spring tube and a deflection plate feedback rod, wherein the armature is perpendicular to the top end of the spring tube, two arms of the armature are symmetrically positioned on two sides of the spring tube, and the deflection plate feedback rod is positioned at the lower end of the spring tube. Has the advantages of small volume, light weight and small internal leakage. The invention also discloses a use method of the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve.
Description
Technical Field
The invention relates to the technical field of electrohydraulic servo valves. More specifically, it is a small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve. The invention also relates to a use method of the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve.
Background
Along with the progress of science and technology, hydraulic servo systems are increasingly widely applied, and electrohydraulic servo valves are very important and indispensable elements of the hydraulic servo systems, and the static and dynamic performances of the electrohydraulic servo valves directly influence the performances of the hydraulic servo systems.
Since the electrohydraulic servo valve of the nozzle baffle plate is successfully researched and applied to the fields of industry, aviation and the like, the stability of a hydraulic servo system is greatly improved, but the valve has high requirements on the cleanliness of working media, and if the working media are slightly polluted or the filtering precision is not high, the valve is blocked and loses the working capacity.
Meanwhile, the jet pipe type electrohydraulic servo valve adopts electric feedback to cause the volume increase of the valve, is not suitable for severe environments such as humid environment, and the like, and has a small number of types of force feedback structures (the servo valve part of Shanghai seven-zero research institute balance and topology industry development finite company, jet pipe electrohydraulic servo valve special lecture seat [ J ]. Hydraulic and pneumatic, 2009 (11): 86-88.), but the feedback rod is of a single rod type, is unbalanced in stress and affects the movement of the jet pipe.
The existing application number is 201520887029.6, the patent names are an electric feedback deflection plate jet electrohydraulic servo valve and 201510750433.3, and the patent names are a deflection plate jet electrohydraulic servo valve based on a piezoelectric structure, which have the defects of large weight, large volume and large internal leakage.
In summary, the following problems exist in the field of electrohydraulic servo valves: (1) The requirement on working medium is high, the servo valve is easy to be blocked, the internal leakage is large, and the service life is short; (2) The servo valve has large volume, large weight and narrow application range; and (3) slow dynamic response and poor linearity.
In order to ensure the stability of the hydraulic servo system, an electrohydraulic servo valve with smaller volume, lighter weight, small internal leakage, long service life, strong pollution resistance and higher frequency response is needed.
Disclosure of Invention
The first object of the invention is to provide a small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve which has long service life, strong pollution resistance, higher frequency response, smaller volume, lighter weight, smaller internal leakage, higher reliability, better stability, higher linearity, lower maintenance cost and reduced total cost.
The second purpose of the invention is to provide a method for using the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve.
In order to achieve the first object of the present invention, the present invention has the following technical solutions: the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve comprises a shell, a valve core and an armature assembly; the method is characterized in that: the upper surface of the shell is provided with a shell jet hole, a shell left receiving hole, a shell right receiving hole and a shell center hole, a primary seat assembly is arranged above the shell center hole, the primary seat assembly comprises a primary seat, an upper pressing block, a jet piece, a locating pin and a lower pressing block, the jet piece is positioned between the upper pressing block and the lower pressing block, the jet piece, the upper pressing block and the lower pressing block are concentrically arranged, and the locating pin is used for fixedly connecting the jet piece, the upper pressing block and the lower pressing block in sequence at the center of the primary seat;
an armature assembly is arranged at the center of the primary seat assembly, the armature assembly consists of an armature, a spring tube and a deflection plate feedback rod, the armature is perpendicular to the top end of the spring tube, two arms of the armature are symmetrically positioned at two sides of the spring tube, and the deflection plate feedback rod is positioned at the lower end of the spring tube;
coil assemblies are arranged on two arms of an armature of the armature assembly, and magnetic steel and a magnetizer are arranged outside the coil assemblies; the lower end of a deflector plate feedback rod of the armature assembly sequentially passes through the primary seat assembly and the central hole of the shell, and the lower end of the deflector plate feedback rod is embedded into the middle annular groove of the valve core;
the side surface of the shell is provided with an upper horizontal cavity and a lower horizontal cavity of the shell, the upper horizontal cavity of the shell is internally provided with an oil filter and an oil filter plug, and the upper horizontal cavity of the shell is communicated with the jet hole of the shell;
the valve core is arranged in a lower horizontal cavity of the shell, and the lower horizontal cavity of the shell is provided with a valve core left end face control cavity, a first left control cavity, a second left control cavity, a central cavity, a first right control cavity, a second right control cavity and a valve core right end face control cavity from left to right;
a left oil duct and a right oil duct are symmetrically arranged in the shell, one oil hole of the left oil duct is communicated with the left end face control cavity of the valve core, the other oil hole of the left oil duct is communicated with a left receiving hole of the shell, and the left receiving hole of the shell is communicated with a left receiving hole of the jet piece; one oil hole of the right oil duct is communicated with the control cavity of the right end face of the valve core, the other oil hole of the right oil duct is communicated with the right receiving hole of the shell, and the right receiving hole of the shell is communicated with the right receiving hole of the jet piece;
the oil inlet hole of the shell is divided into three-way oil ways, the two-way oil ways are respectively communicated with the main control cavity of the valve core, the one-way oil way is communicated with the horizontal cavity on the shell, and the horizontal cavity on the shell is communicated with the jet hole of the shell;
the bottom of the shell is provided with an oil return hole R, a left oil inlet hole Ps1 and a first working oil hole are sequentially arranged from the left side of the oil return hole R to the central cavity, a right oil inlet hole Ps2, a second working oil hole and a right oil inlet hole Ps3 are sequentially arranged from the right side of the oil return hole R to the central cavity, the right oil inlet hole Ps2 and the left oil inlet hole Ps1 are symmetrically arranged about the axial center of the oil return hole R, and the second working oil hole and the first working oil hole are symmetrically arranged about the axial center of the oil return hole R;
an annular groove is arranged at the middle position of the valve core; the annular groove to the left end face of the valve core are sequentially provided with a first left annular boss, a first left control cavity, a second left annular boss, a second left control cavity and a third left annular boss, the right end face of the annular groove to the valve core are sequentially symmetrically provided with a first right annular boss, a first right control cavity, a second right annular boss, a second right control cavity and a third right annular boss, the first left annular boss is provided with two pressure equalizing grooves, and the second left annular boss is provided with one pressure equalizing groove; the third right annular boss is provided with two pressure equalizing grooves, the second right annular boss is provided with one pressure equalizing groove, and the diameters of the first left annular boss, the second left annular boss, the third left annular boss, the first right annular boss, the second right annular boss and the third right annular boss are equal;
the diameter of the valve core rod is 1/2-4/5 times of the diameter of the valve core, and the diameter of the valve core is the same as the nominal size of the diameter of the horizontal cavity under the shell.
In the above technical scheme, the center hole of the shell on the shell and the center line of the jet hole of the shell are on the same axis, and the center lines of the left receiving hole of the shell and the right receiving hole of the shell are on the same axis.
In the technical scheme, the shell is made of high-carbon chromium stainless steel bearing steel.
In the technical scheme, the valve core is made of high-carbon chromium stainless steel bearing steel, the diameter of the valve core is 4-6 mm, and the diameter of the valve core rod is 2-5 mm; the magnetic steel is made of an alnico permanent magnet alloy; the magnetizer is made of Fe-Ni soft magnetic alloy.
In the technical scheme, an armature in the armature assembly is double-arm, and a small ball is arranged at the lower end of a feedback rod of the deflection plate; the material of the pellet is high-elasticity alloy, the pellet is subjected to nitriding treatment on the surface, and the thickness of the nitriding layer of the pellet is 0.02-0.03 mm;
in the technical scheme, the upper end of the feedback rod of the deflection plate is the deflection plate, the lower end of the feedback rod is the feedback rod, the spout of the deflection plate is V-shaped, the large opening of the V-shaped spout corresponds to the oil inlet surface of the servo valve, the small opening of the V-shaped spout corresponds to the oil return surface, and the spout of the deflection plate is made of soft magnetic high-elasticity alloy.
In the technical scheme, the width of the annular groove of the valve core is 0-0.01 mm longer than the diameter of the small ball, and the depth of the annular groove is 0.6-1 times of the diameter of the small ball;
in the technical scheme, the volume of the electrohydraulic servo valve is smaller than or equal to 41.5mm multiplied by 42.5mm multiplied by 48.5mm, and the mass is smaller than or equal to 260g.
In order to achieve the second object of the present invention, the present invention has the following technical scheme: the application method of the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve is characterized by comprising the following steps of: the method comprises the following steps:
step 1: the pressure oil enters from the shell oil inlet hole, the pressure oil reaches a horizontal cavity on the shell through the shell oil inlet hole, the pressure oil in the horizontal cavity on the shell is divided into three flow directions, the flow directions of the pressure oil comprise a first flow direction pressure oil, a second flow direction pressure oil and a third flow direction pressure oil, the first flow direction pressure oil flow direction oil filter is communicated with a shell jet hole, the pressure oil of the first flow direction reaches a jet piece jet hole through the shell jet hole and then reaches a jet piece left receiving hole and a jet piece right receiving hole through a nozzle of the deflection plate, the jet piece left receiving hole is communicated with the shell left receiving hole, the jet piece right receiving hole is communicated with a valve core left end face control cavity, and the shell right receiving hole is communicated with a valve core right end face control cavity; the second flow direction pressure oil flows to the first left control cavity and is communicated with the third flow direction pressure oil flows to the second right control cavity;
step 2: when the armature of the armature assembly is not stressed, the feedback rod of the deflection plate is positioned in the middle position of the jet flow sheet, and the first flow direction pressure oil emitted by the nozzle of the deflection plate is equally received by the left receiving hole of the jet flow sheet and the right receiving hole of the jet flow sheet, so that the pressure generated by the control cavity of the left end face of the valve core and the control cavity of the right end face of the valve core are equal, and the valve core is positioned at a zero position; the left oil inlet Ps1 is positioned between the first left annular boss and the second left annular boss, the right oil inlet Ps2 is positioned between the first right annular boss and the second right annular boss, the first working oil hole and the second working oil hole are respectively blocked by the second left annular boss and the second right annular boss, the left oil inlet Ps1, the first working oil hole, the oil return hole R, the second working oil hole and the right oil inlet Ps2 are not communicated with each other, and no pressure oil is output;
when the armature of the armature assembly generates clockwise force, the feedback rod of the deflection plate deflects leftwards by an angle which is 1-10 degrees in proportion to the force, and the pressure oil ejected from the nozzle of the deflection plate is ejected to the left receiving hole of the jet sheet and more than the oil ejected to the right receiving hole of the jet sheet, so that the pressure of the left end face control cavity of the valve core is larger than that of the right end face control cavity of the valve core, and the pressure difference between the left end face control cavity of the valve core and the right end face control cavity of the valve core pushes the valve core to move rightwards along the axial direction; at this time, the left oil inlet Ps1 is communicated with the first working oil hole, the first working oil hole is communicated with the second working oil hole, and the second working oil hole is communicated with the oil return hole R; the movement of the valve core causes the deflection plate feedback rod to deform, the deformation is fed back to the armature of the armature assembly in a moment form and is balanced with electromagnetic moment generated by the armature, at the moment, the deflection plate rightwards returns to a zero position, the pressure difference between the left end face control cavity of the valve core and the right end face control cavity of the valve core and the force generated by the deformation of the deflection plate feedback rod are balanced, the valve core and the output window form an opening, the flow corresponding to input current is output to generate feedback moment for driving the deflection plate feedback rod to return to the zero position, the deflection plate feedback rod rightwards deflects to the zero position, so that the flow of pressure oil entering the left receiving hole of the shell and the oil duct entering the right receiving hole of the shell are equal, the pressure acting on the right end face control cavity of the valve core and the left end face control cavity of the valve core are equal, at the moment, the valve core is at the balanced position, and the small-volume high-frequency high-linearity jet deflection plate electrohydraulic servo valve outwards outputs flow and pressure oil in proportion to the current;
when the armature of the armature assembly generates anticlockwise force, the feedback rod of the deflection plate deflects rightwards by an angle which is in direct proportion to the force of 1-10 degrees, and the oil ejected from the nozzle of the deflection plate is ejected to the left receiving hole of the jet sheet and is smaller than the oil ejected to the right receiving hole of the jet sheet, so that the pressure of the control cavity of the left end face of the valve core is smaller than that of the control cavity of the right end face of the Yu Faxin, and the pressure difference between the control cavity of the left end face of the valve core and the control cavity of the right end face of the valve core pushes the valve core to move leftwards along the axial direction; at this time, the left oil inlet Ps2 is communicated with the second working oil hole, the second working oil hole is communicated with the first working oil hole, and the first working oil hole is communicated with the oil return hole R; the valve core moves to deform the feedback rod of the deflection plate, the deformation is fed back to the armature of the armature assembly in a moment mode and is balanced with electromagnetic moment generated by the armature, at the moment, the deflection plate returns to the zero position leftwards, the pressure difference between the control cavity of the left end face of the valve core and the control cavity of the right end face of the valve core and the force generated by deformation of the feedback rod of the deflection plate are balanced, so that the valve core and an output window form an opening, the flow corresponding to input current is output to generate feedback moment for driving the feedback rod of the deflection plate to return to the zero position, the feedback rod of the deflection plate deflects leftwards to the zero position, so that the flow of pressure oil entering into a left receiving hole of a shell and the oil duct entering into the right receiving hole of the shell are equal, the pressure acting on the control cavity of the right end face of the valve core and the control cavity of the left end face of the valve core are equal, at the moment, the valve core is in an equilibrium position, and the flow and the pressure oil are output outwards in proportion to the current by the jet deflection plate electrohydraulic servo valve with small volume and high linearity.
In the technical scheme, the upper end of the deflector plate feedback rod is a deflector plate, the lower end of the deflector plate feedback rod is a feedback rod, and the tail end of the feedback rod is provided with a small ball; the valve core is directly coupled with the shell, and the movement of the valve core enables the deflection plate feedback rod to generate feedback moment returning to zero position and act on the deflection plate of the deflection plate feedback rod.
The invention has the following advantages:
(1) The valve core is directly coupled with the shell, the movement of the valve core enables the feedback rod of the deflection plate to generate feedback moment returning to zero position, the feedback force of the feedback rod acts on the jet deflection plate, the valve sleeve is omitted structurally, all flow channels are integrated on the shell, the volume of the flow channels is reduced, the weight of the flow channels is lightened, the internal leakage is controlled, and the application range of the valve is effectively widened;
(2) The actual volume (length multiplied by width multiplied by height) of the electrohydraulic servo valve is smaller than or equal to 41.5mm multiplied by 42.5mm multiplied by 48.5mm, and the weight is smaller than or equal to 260g;
(3) In the invention, the armature in the armature component adopts a double-arm shape, the shape is similar to that of two arms extending outwards, so that the feedback rod of the jet deflection plate is uniformly stressed, and the reliability is high and the service life is long; the defect of uneven stress of the single feedback rod is overcome;
(4) The valve core is additionally provided with a plurality of control cavities, the boss is also provided with a plurality of equalizing grooves, the diameter of the valve core is small, the diameter of a valve core rod is 1/2-4/5 times of the diameter of the valve core, the weight is effectively reduced, the motion inertia is reduced, and the frequency response of the valve is improved;
(5) The pressure oil is filtered by the oil filter and then enters the armature assembly and the primary seat assembly, so that the clamping stagnation and the blockage caused by the pressure oil to the primary seat assembly under the pollution condition are avoided, and the pollution resistance of the valve is effectively improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention.
FIG. 2 is a schematic view of the deflector plate of FIG. 1.
Fig. 3 is a schematic cross-sectional view of the housing of fig. 1.
Fig. 4 is a schematic top view of the housing of fig. 1.
Fig. 5 is a schematic view of the valve core in fig. 1.
Fig. 6 is a schematic structural diagram of the primary seat assembly of fig. 1.
Fig. 7 is a schematic view of the armature assembly of fig. 1.
In the figure, a 1-shell, a 2-valve core left end face control cavity, a 3-valve core, a 4-oil filtering plug, a 5-deflection plate nozzle, a 6-armature assembly, a 7-magnetizer, an 8-coil assembly, a 9-primary seat assembly, a 10-deflection plate feedback rod, a 10.1-deflection plate, a 10.2-feedback rod, a 11-oil filtering, a 12-valve core right end face control cavity, a 13-second right control cavity, a 14-first right control cavity, a 15-central cavity, a 16-small ball, a 17-second left control cavity, a 18-first left control cavity, a 19-jet piece jet hole, a 20-jet piece, a 21-jet piece right receiving hole, a 22-jet piece left receiving hole, a 23-shell lower horizontal cavity and a 24-left oil duct are shown, 25-upper horizontal cavity of shell, 26-right oil duct, 27-right oil inlet hole Ps3, 28-right oil inlet hole Ps2, 29-second working oil hole, 30-oil return hole R, 31-first working oil hole, 32-left oil inlet hole Ps1, 33-shell jet hole, 34-shell center hole, 35-shell left receiving hole, 36-shell right receiving hole, 37-annular groove, 38-first right annular boss, 39-second right annular boss, 40-third right annular boss, 41-equalizing groove, 42-third left annular boss, 43-second left annular boss, 44-valve core rod, 45-first left annular boss, 46-upper press block, 47-locating pin, 48-lower press block, 49-first stage seat, 50-spring tube, 51-armature.
Detailed Description
The following detailed description of the invention is, therefore, not to be taken in a limiting sense, but is made merely by way of example. While making the advantages of the present invention clearer and more readily understood by way of illustration.
As can be seen with reference to the accompanying drawings: a small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve comprises a shell 1, a valve core 3 and an armature assembly 6; the method is characterized in that: the upper surface of the shell 1 is provided with a shell jet hole 33, a shell left receiving hole 35, a shell right receiving hole 36 and a shell central hole 34, a primary seat assembly 9 is arranged above the shell central hole 34, the primary seat assembly 9 comprises a primary seat 49, an upper pressing block 46, a jet piece 20, a positioning pin 47 and a lower pressing block 48, the jet piece 20 is positioned between the upper pressing block 46 and the lower pressing block 48, the jet piece 20, the upper pressing block 46 and the lower pressing block 48 are concentric, and the positioning pin 47 sequentially fixedly connects the jet piece 20, the upper pressing block 46 and the lower pressing block 48 at the center of the primary seat 49;
the center of the primary seat assembly 9 is provided with an armature assembly 6, the armature assembly 6 comprises an armature 51, a spring tube 50 and a deflection plate feedback rod 10, the armature 51 is perpendicular to the top end of the spring tube 50, two arms of the armature 51 are symmetrically positioned on two sides of the spring tube 50, and the deflection plate feedback rod 10 is positioned at the lower end of the spring tube 50;
the side surface of the shell 1 is provided with an upper shell horizontal cavity 25 and a lower shell horizontal cavity 23, an oil filter 11 and an oil filter plug 4 are arranged in the upper shell horizontal cavity 25, and the upper shell horizontal cavity 25 is communicated with a shell jet hole 33;
the valve core 3 is arranged in a lower horizontal cavity 23 of the shell, and the lower horizontal cavity 23 of the shell is provided with a left end face control cavity 2 of the valve core, a first left control cavity 18, a second left control cavity 17, a central cavity 15, a first right control cavity 14, a second right control cavity 13 and a right end face control cavity 12 of the valve core from left to right;
a left oil duct 24 and a right oil duct 26 are symmetrically arranged in the shell 1, one oil hole of the left oil duct 24 is communicated with the left end face control cavity 2 of the valve core, the other oil hole of the left oil duct 24 is communicated with a left shell receiving hole 35, and the left shell receiving hole 35 is communicated with a left jet piece receiving hole 22; one oil hole of the right oil duct 26 is communicated with the valve core right end face control cavity 12, the other oil hole of the right oil duct 26 is communicated with the shell right receiving hole 36, and the shell right receiving hole 36 is communicated with the jet piece right receiving hole 21;
the oil inlet hole of the shell 1 is divided into three-way oil ways, the two-way oil ways are respectively communicated with the main control cavity of the valve core 3, the one-way oil way is communicated with the upper horizontal cavity 25 of the shell, and the upper horizontal cavity 25 of the shell is communicated with the jet hole 33 of the shell;
the bottom of the shell 1 is provided with an oil return hole R30, a left oil inlet hole Ps132 and a first working oil hole 31 are sequentially arranged from the left side of the oil return hole R30 to the central cavity 15, a right oil inlet hole Ps228, a second working oil hole 29 and a right oil inlet hole Ps3 27 are sequentially arranged from the right side of the oil return hole R30 to the central cavity 15, the right oil inlet hole Ps228 and the left oil inlet hole Ps132 are symmetrically arranged about the axial center of the oil return hole R30, and the second working oil hole 29 and the first working oil hole 31 are symmetrically arranged about the axial center of the oil return hole R30;
an annular groove 37 is arranged at the middle position of the valve core 3; the annular groove 37 to the left end face of the valve core 3 are sequentially provided with a first left annular boss 45, a first left control cavity 18, a second left annular boss 43, a second left control cavity 17 and a third left annular boss 42, the annular groove 37 to the right end face of the valve core 3 are sequentially symmetrically provided with a first right annular boss 38, a first right control cavity 14, a second right annular boss 39, a second right control cavity 13 and a third right annular boss 40, the first left annular boss 45 and the third right annular boss 40 are axially and symmetrically arranged about the annular groove 37, the first left control cavity 18 and the second right control cavity 13 are axially and symmetrically arranged about the annular groove 37, the second left annular boss 43 and the second right annular boss 39 are axially and symmetrically arranged about the annular groove 37, the second left control cavity 17 and the first right control cavity 14 are axially and symmetrically arranged about the annular groove 37, and the third left annular boss 42 and the first right annular boss 38 are axially and symmetrically arranged about the annular groove 37; the first left annular boss 45 is provided with two pressure equalizing grooves 41, and the second left annular boss 43 is provided with one pressure equalizing groove 41; the third right annular boss 40 is provided with two equalizing grooves 41, the second right annular boss 39 is provided with one equalizing groove 41, and the diameters of the first left annular boss 45, the second left annular boss 43, the third left annular boss 42, the first right annular boss 38, the second right annular boss 39 and the third right annular boss 40 are equal;
the diameter of the valve core rod 44 is 1/2-4/5 times of the diameter of the valve core 3, and the diameter of the valve core 3 is the same as the nominal size of the diameter of the horizontal cavity 23 under the shell.
The center line of the housing center hole 34 and the center line of the housing jet hole 33 on the housing 1 are on the same axis, and the center lines of the housing left receiving hole 35 and the housing right receiving hole 36 are on the same axis.
The shell 1 is made of high-carbon chromium stainless steel bearing steel.
The valve core 3 is made of high-carbon chromium stainless steel bearing steel, the diameter of the valve core 3 is 4-6 mm, and the diameter of the valve core rod 44 is 2-5 mm; the magnetic steel is made of an alnico permanent magnet alloy; the material of the magnetizer 7 is iron-nickel soft magnetic alloy.
The armature 51 in the armature assembly 6 is double-arm, and the lower end of the deflector feedback rod 10 is provided with a small ball 16; the material of the small ball 16 is high-elasticity alloy, the small ball 16 is a small ball with the surface subjected to nitriding treatment, and the thickness of a nitriding layer of the small ball is 0.02-0.03 mm;
the upper end of the deflector plate feedback rod 10 is provided with a deflector plate 10.1, the lower end of the deflector plate feedback rod 10.2 is provided with a deflector plate 10.1, the spout 5 of the deflector plate 10.1 is V-shaped, the large opening of the V-shaped spout 5 of the deflector plate 10.1 corresponds to the oil inlet surface of the servo valve, the small opening of the V-shaped spout 5 corresponds to the oil return surface, and the spout material of the deflector plate 10.1 is soft magnetic high-elasticity alloy.
The width of the annular groove 37 of the valve core 3 is 0-0.01 mm longer than the diameter of the small ball 16, and the depth of the annular groove 37 is 0.6-1 times of the diameter of the small ball 16;
the volume (length x width x height) of the electrohydraulic servo valve is less than or equal to 41.5mm x 42.5mm x 48.5mm, and the mass is less than or equal to 260g.
As can be seen with reference to the accompanying drawings: the application method of the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve is characterized by comprising the following steps of: the method comprises the following steps:
step 1: pressure oil enters from an oil inlet hole of the shell 1, the pressure oil reaches a horizontal cavity 25 on the shell through the oil inlet hole of the shell 1, the pressure oil in the horizontal cavity 25 on the shell is divided into three flow directions, the flow directions of the pressure oil comprise a first flow direction pressure oil, a second flow direction pressure oil and a third flow direction pressure oil, the first flow direction pressure oil flows into the oil filter 11 and the shell jet hole 33, the pressure oil of the first flow direction reaches the jet sheet jet hole 19 through the shell jet hole 33 and then reaches the jet sheet left receiving hole 22 and the jet sheet right receiving hole 21 through the nozzle 5 of the deflector 10.1, the jet sheet left receiving hole 22 is communicated with the shell left receiving hole 35, the jet sheet right receiving hole 21 is communicated with the shell right receiving hole 36, the shell left receiving hole 35 is communicated with the valve core left end face control cavity 2, and the shell right receiving hole 36 is communicated with the valve core right end face control cavity 12; the second flow direction pressure oil flows to the first left control chamber 18, and the third flow direction pressure oil flows to the second right control chamber 13;
step 2: when the armature 51 of the armature assembly 6 is not stressed, the deflector feedback rod 10 is positioned at the middle position of the jet piece 20, and the first flow direction pressure oil emitted by the nozzle 5 of the deflector 10.1 is equally received by the jet piece left receiving hole 22 and the jet piece right receiving hole 21, so that the pressures generated by the valve core left end face control cavity 2 and the valve core right end face control cavity 12 are equal, and the valve core 3 is positioned at a zero position; the left oil inlet hole Ps132 is positioned between the first left annular boss 45 and the second left annular boss 43, the right oil inlet hole Ps228 is positioned between the first right annular boss 38 and the second right annular boss 39, the first working oil hole 31 and the second working oil hole 29 are respectively blocked by the second left annular boss 43 and the second right annular boss 39, the left oil inlet hole Ps132, the first working oil hole 31, the oil return hole R30, the second working oil hole 29 and the right oil inlet hole Ps228 are not communicated with each other, and no pressure oil is output;
when the armature 51 of the armature assembly 6 generates clockwise force, the deflection plate feedback rod 10 deflects leftwards by an angle which is proportional to the force and is 1-10 degrees, the pressure oil ejected from the nozzle 5 of the deflection plate 10.1 is ejected to the oil ejected to the left receiving hole 22 of the jet piece and more to the right receiving hole 21 of the jet piece, so that the pressure of the left end face control cavity 2 of the valve core is larger than the pressure of the right end face control cavity 12 of the valve core, and the pressure difference between the left end face control cavity 2 of the valve core and the right end face control cavity 12 of the valve core pushes the valve core 3 to move rightwards along the axial direction; at this time, the left oil inlet Ps132 communicates with the first working oil hole 31, the first working oil hole 31 communicates with the second working oil hole 29, and the second working oil hole 29 communicates with the oil return hole R30; the movement of the valve core 3 causes the deflection plate feedback rod 10 to deform, the deformation is fed back to the armature 51 of the armature assembly 6 in a moment mode and is balanced with electromagnetic moment generated by the armature 51, at the moment, the deflection plate returns to a zero position, the pressure difference between the left end face control cavity 2 of the valve core and the right end face control cavity 12 of the valve core and the force generated by the deformation of the deflection plate feedback rod 10 are balanced, the valve core 3 and an output window form an opening, the flow corresponding to input current is output to generate feedback moment for driving the deflection plate feedback rod 10 to return to the zero position, the deflection plate feedback rod 10 deflects to the right to the zero position, so that the pressure oil flow entering the left receiving hole 35 of the shell and the oil duct entering the right receiving hole 36 of the shell are equal, the pressure acting on the right end face control cavity 12 of the valve core and the left end face control cavity 2 of the valve core is equal, at the moment, the valve core 3 is at the balanced position, and a small-volume high-frequency high-linearity jet deflection plate electrohydraulic servo valve outputs flow and pressure oil in proportion to the current to the outside;
when the armature 51 of the armature assembly 6 generates anticlockwise force, the deflection plate feedback rod 10 deflects rightwards by an angle which is proportional to the force and is 1-10 degrees, the oil ejected from the nozzle 5 of the deflection plate 10.1 is ejected to the left receiving hole 22 of the jet sheet and is less than the oil ejected to the right receiving hole 21 of the jet sheet, so that the pressure of the left end face control cavity 2 of the valve core is smaller than the pressure of the right end face control cavity 12 of Yu Faxin, and the pressure difference between the left end face control cavity 2 of the valve core and the right end face control cavity 12 of the valve core pushes the valve core 3 to move leftwards along the axial direction; at this time, the left oil inlet Ps228 communicates with the second working oil hole 29, the second working oil hole 29 communicates with the first working oil hole 31, and the first working oil hole 31 communicates with the oil return hole R30; the movement of the valve core 3 causes the deflection plate feedback rod 10 to deform, the deformation is fed back to the armature 51 of the armature assembly 6 in a moment mode and is balanced with electromagnetic moment generated by the armature 51, at the moment, the deflection plate returns to the zero position leftwards, the pressure difference between the left end face control cavity 2 of the valve core and the right end face control cavity 12 of the valve core and the force generated by the deformation of the deflection plate feedback rod 10 are balanced, so that the valve core 3 and an output window form an opening, the flow corresponding to input current generates feedback moment for driving the deflection plate feedback rod 10 to return to the zero position, the deflection plate feedback rod 10 deflects to the zero position leftwards, so that the pressure oil flow entering the left receiving hole 35 of the shell and the oil duct entering the right receiving hole 36 of the shell is equal, the pressure acting on the right end face control cavity 12 of the valve core and the left end face control cavity 2 of the valve core is equal, at the moment, the valve core 3 is at the balanced position, and the small-volume high-frequency high-linearity jet deflection plate electrohydraulic servo valve outputs flow and pressure oil proportional to the current.
The upper end of the deflector plate feedback rod 10 is provided with a deflector plate 10.1, the lower end of the deflector plate feedback rod is provided with a feedback rod 10.2, and the tail end of the feedback rod 10.2 is provided with a small ball 16; the valve element 3 is directly coupled to the housing 1, and the movement of the valve element 3 causes the deflector feedback lever 10 to generate a feedback moment returning to the neutral position and to act on the deflector 10.1 of the deflector feedback lever 10.
Other non-illustrated parts are known in the art.
Claims (10)
1. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve comprises a shell (1), a valve core (3) and an armature assembly (6); the method is characterized in that: the upper surface of the shell (1) is provided with a shell jet hole (33), a shell left receiving hole (35), a shell right receiving hole (36) and a shell center hole (34), a primary seat assembly (9) is arranged above the shell center hole (34), the primary seat assembly (9) comprises a primary seat (49), an upper pressing block (46), a jet sheet (20), a locating pin (47) and a lower pressing block (48), the jet sheet (20) is positioned between the upper pressing block (46) and the lower pressing block (48), the jet sheet (20), the upper pressing block (46) and the lower pressing block (48) are concentrically arranged, and the locating pin (47) is used for fixedly connecting the jet sheet (20), the upper pressing block (46) and the lower pressing block (48) at the center of the primary seat (49) in sequence;
an armature assembly (6) is arranged at the center of the primary seat assembly (9), the armature assembly (6) consists of an armature (51), a spring tube (50) and a deflection plate feedback rod (10), the armature (51) is perpendicular to the top end of the spring tube (50), two arms of the armature (51) are symmetrically positioned at two sides of the spring tube (50), and the deflection plate feedback rod (10) is positioned at the lower end of the spring tube (50);
coil assemblies (8) are arranged on two arms of an armature (51) of the armature assembly (6), and magnetic steel and a magnetizer (7) are arranged outside the coil assemblies (8); the lower end of a deflection plate feedback rod (10) of the armature assembly (6) sequentially passes through the primary seat assembly (9) and the central hole (34) of the shell, and the lower end of the deflection plate feedback rod (10) is embedded into a middle annular groove (37) of the valve core (3);
the side surface of the shell (1) is provided with an upper shell horizontal cavity (25) and a lower shell horizontal cavity (23), an oil filter (11) and an oil filter plug (4) are arranged in the upper shell horizontal cavity (25), and the upper shell horizontal cavity (25) is communicated with a shell jet hole (33);
the valve core (3) is arranged in a lower horizontal cavity (23) of the shell, and the lower horizontal cavity (23) of the shell is provided with a left end face control cavity (2), a first left control cavity (18), a second left control cavity (17), a central cavity (15), a first right control cavity (14), a second right control cavity (13) and a right end face control cavity (12) of the valve core from left to right;
a left oil duct (24) and a right oil duct (26) are symmetrically arranged in the shell (1), one oil hole of the left oil duct (24) is communicated with the left end face control cavity (2) of the valve core, the other oil hole of the left oil duct (24) is communicated with a left shell receiving hole (35), and the left shell receiving hole (35) is communicated with a left jet piece receiving hole (22); one oil hole of the right oil duct (26) is communicated with the right end face control cavity (12) of the valve core, the other oil hole of the right oil duct (26) is communicated with a right receiving hole (36) of the shell, and the right receiving hole (36) of the shell is communicated with a right receiving hole (21) of the jet piece;
the oil inlet hole of the shell (1) is divided into three-way oil ways, the two-way oil ways are respectively communicated with a main control cavity of the valve core (3), the two-way oil ways are communicated with a horizontal cavity (25) on the shell, and the horizontal cavity (25) on the shell is communicated with a shell jet hole (33);
the bottom of the shell (1) is provided with an oil return hole R (30), the left side of the oil return hole R (30) is sequentially provided with a left oil inlet hole Ps1 (32) and a first working oil hole (31) from the left side of the oil return hole R (30) to the central cavity (15), the right side of the oil return hole R (30) is sequentially provided with a right oil inlet hole Ps2 (28), a second working oil hole (29) and a right oil inlet hole Ps3 (27), the right oil inlet hole Ps2 (28) and the left oil inlet hole Ps1 (32) are symmetrically arranged about the axial center of the oil return hole R (30), and the second working oil hole (29) and the first working oil hole (31) are symmetrically arranged about the axial center of the oil return hole R (30);
an annular groove (37) is arranged at the middle position of the valve core (3); the annular groove (37) to the left end face of the valve core (3) are sequentially provided with a first left annular boss (45), a first left control cavity (18), a second left annular boss (43), a second left control cavity (17) and a third left annular boss (42), the annular groove (37) to the right end face of the valve core (3) are sequentially symmetrically provided with a first right annular boss (38), a first right control cavity (14), a second right annular boss (39), a second right control cavity (13) and a third right annular boss (40), the first left annular boss (45) is provided with two pressure equalizing grooves (41), and the second left annular boss (43) is provided with one pressure equalizing groove (41); the third right annular boss (40) is provided with two pressure equalizing grooves (41), the second right annular boss (39) is provided with one pressure equalizing groove (41), and the diameters of the first left annular boss (45), the second left annular boss (43), the third left annular boss (42), the first right annular boss (38), the second right annular boss (39) and the third right annular boss (40) are all equal;
the diameter of the valve core rod (44) is 1/2-4/5 times of the diameter of the valve core (3), and the diameter of the valve core (3) is the same as the nominal size of the diameter of the horizontal cavity (23) under the shell.
2. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve according to claim 1, wherein: a shell center hole (34) on the shell (1) and the center line of the shell jet hole (33) are on the same axis, and the center lines of a shell left receiving hole (35) and a shell right receiving hole (36) are on the same axis.
3. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve according to claim 1 or 2, characterized in that: the shell (1) is made of high-carbon chromium stainless steel bearing steel.
4. A small volume high frequency high linearity jet deflection plate type electrohydraulic servo valve according to claim 3, wherein: the valve core (3) is made of high-carbon chromium stainless steel bearing steel, the diameter of the valve core (3) is 4-6 mm, and the diameter of the valve core rod (44) is 2-5 mm; the magnetic steel is made of an alnico permanent magnet alloy; the material of the magnetizer (7) is iron-nickel soft magnetic alloy.
5. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve of claim 4 wherein: an armature (51) in the armature assembly (6) is double-arm, and a small ball (16) is arranged at the lower end of a deflector feedback rod (10); the material of the pellet (16) is high-elasticity alloy, the pellet (16) is a pellet with the surface subjected to nitriding treatment, and the thickness of the nitriding layer of the pellet is 0.02-0.03 mm.
6. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve of claim 5 wherein: the upper end of the deflector feedback rod (10) is provided with a deflector (10.1) and the lower end of the deflector feedback rod is provided with a feedback rod (10.2), a spout (5) of the deflector (10.1) is V-shaped, a large opening of the V-shaped spout (5) corresponds to an oil inlet surface of the servo valve, a small opening of the V-shaped spout (5) corresponds to an oil return surface, and the spout (5) of the deflector (10.1) is made of soft magnetic high-elasticity alloy.
7. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve of claim 6 wherein: the width of the annular groove (37) of the valve core (3) is 0-0.01 mm longer than the diameter of the small ball (16), and the depth of the annular groove (37) is 0.6-1 times of the diameter of the small ball (16).
8. The small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve of claim 7 wherein: the volume of the electrohydraulic servo valve is less than or equal to 41.5mm multiplied by 42.5mm multiplied by 48.5mm, and the mass is less than or equal to 260g.
9. The application method of the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve is characterized by comprising the following steps of: the method comprises the following steps:
step 1: pressure oil enters from an oil inlet hole of the shell (1), the pressure oil reaches a horizontal cavity (25) on the shell through the oil inlet hole of the shell (1), the pressure oil in the horizontal cavity (25) on the shell is divided into three flow directions, the flow directions of the pressure oil comprise a first flow direction pressure oil, a second flow direction pressure oil and a third flow direction pressure oil, the first flow direction pressure oil flows to an oil filter (11) and a shell jet hole (33), the first flow direction pressure oil reaches a jet piece jet hole (19) through the shell jet hole (33), and then reaches a jet piece left receiving hole (22) and a jet piece right receiving hole (21) through a nozzle (5) of a deflection plate (10.1), the jet piece left receiving hole (22) is communicated with the shell left receiving hole (35), the jet piece right receiving hole (21) is communicated with a shell right receiving hole (36), the shell left receiving hole (35) is communicated with a valve core left end face control cavity (2), and the shell right receiving hole (36) is communicated with a valve core right end face control cavity (12); the second flow direction pressure oil flows to the first left control chamber (18), and the third flow direction pressure oil flows to the second right control chamber (13);
step 2: when the armature (51) of the armature assembly (6) is not stressed, the deflector feedback rod (10) is positioned at the middle position of the jet piece (20), and first flow direction pressure oil emitted by the nozzle (5) of the deflector (10.1) is equally received by the left jet piece receiving hole (22) and the right jet piece receiving hole (21), so that the pressure generated by the left end face control cavity (2) and the right end face control cavity (12) of the valve core is equal, and the valve core (3) is positioned at a zero position; the left oil inlet hole Ps1 (32) is positioned between the first left annular boss (45) and the second left annular boss (43), the right oil inlet hole Ps2 (28) is positioned between the first right annular boss (38) and the second right annular boss (39), the first working oil hole (31) and the second working oil hole (29) are respectively blocked by the second left annular boss (43) and the second right annular boss (39), the left oil inlet hole Ps1 (32), the first working oil hole (31), the oil return hole R (30), the second working oil hole (29) and the right oil inlet hole Ps2 (28) are not communicated with each other, and no pressure oil is output;
when the armature (51) of the armature assembly (6) generates clockwise force, the deflection plate feedback rod (10) deflects leftwards by an angle which is proportional to the force and is 1-10 degrees, the oil with pressure ejected from the nozzle (5) of the deflection plate (10.1) is ejected to the left receiving hole (22) of the jet sheet, and more oil is ejected to the right receiving hole (21) of the jet sheet, so that the pressure of the left end face control cavity (2) of the valve core is larger than the pressure of the right end face control cavity (12) of the valve core, and the pressure difference between the left end face control cavity (2) of the valve core and the right end face control cavity (12) of the valve core pushes the valve core (3) to move rightwards along the axial direction; at this time, the left oil inlet hole Ps1 (32) is communicated with the first working oil hole 31, the first working oil hole 31 is communicated with the second working oil hole 29, and the second working oil hole 29 is communicated with the oil return hole R (30); the movement of the valve core (3) enables the deflection plate feedback rod (10) to deform, the deformation is fed back to an armature (51) of the armature assembly (6) in a moment mode and is balanced with electromagnetic moment generated by the armature (51), at the moment, the deflection plate rightwards returns to a zero position, the pressure difference between the left end face control cavity (2) of the valve core and the right end face control cavity (12) of the valve core and the force generated by deformation of the deflection plate feedback rod (10) are balanced, the valve core (3) and an output window form an opening, the flow corresponding to input current is output to generate feedback moment for driving the deflection plate feedback rod (10) to return to the zero position, the deflection plate feedback rod (10) rightwards deflects back to the zero position, so that the flow of pressure oil entering an oil duct of a left receiving hole (35) of a shell and a right receiving hole (36) of the shell is equal, the pressure acting on the left end face control cavity (12) of the valve core is equal, at the moment, the valve core (3) is at a balanced position, and the flow and the pressure oil are output in proportion to the output flow of the external flow of the small-volume high-frequency high-linearity deflection plate electrohydraulic servo valve;
when the armature (51) of the armature assembly (6) generates anticlockwise force, the deflection plate feedback rod (10) deflects rightwards by an angle which is proportional to the force and is 1-10 degrees, the oil ejected from the nozzle (5) of the deflection plate (10.1) is ejected to the left receiving hole (22) of the jet sheet, and the oil ejected to the right receiving hole (21) of the jet sheet is less than the oil ejected to the right receiving hole (21) of the jet sheet, so that the pressure of the left end face control cavity (2) of the valve core is smaller than the pressure of the right end face control cavity (12) of the Yu Faxin, and the pressure difference between the left end face control cavity (2) of the valve core and the right end face control cavity (12) of the valve core pushes the valve core (3) to move leftwards along the axial direction; at this time, the left oil inlet hole Ps2 (28) is communicated with the second working oil hole (29), the second working oil hole (29) is communicated with the first working oil hole (31), and the first working oil hole (31) is communicated with the oil return hole R (30); the movement of the valve core (3) enables the deflection plate feedback rod (10) to deform, the deformation is fed back to the armature (51) of the armature assembly (6) in the form of moment and is balanced with electromagnetic moment generated by the armature (51), at the moment, the deflection plate returns to the left to the zero position, the pressure difference between the left end face control cavity (2) of the valve core and the right end face control cavity (12) of the valve core and the force generated by the deflection plate feedback rod (10) are balanced, the valve core (3) and the output window form an opening, the flow corresponding to the input current is output to generate feedback moment for driving the deflection plate feedback rod (10) to return to the zero position, the deflection plate feedback rod (10) deflects to the left to the zero position, so that the flow of pressure oil entering the oil duct of the left receiving hole (35) of the shell and the right receiving hole (36) of the shell is equal, the pressure acting on the left end face control cavity (12) of the valve core is equal, at the moment, the valve core (3) is at the balance position, and the flow and the pressure oil in proportion to the output flow of the external flow are deflected by the small-volume high-frequency high linearity plate electrohydraulic servo valve.
10. The method for using the small-volume high-frequency high-linearity jet deflection plate type electrohydraulic servo valve according to claim 9, wherein the method is characterized by comprising the following steps: the upper end of the deflection plate feedback rod (10) is a deflection plate (10.1) and the lower end of the deflection plate feedback rod is a feedback rod (10.2), and a small ball (16) is arranged at the tail end of the feedback rod (10.2); the valve core (3) is directly coupled with the shell (1), and the movement of the valve core (3) enables the deflection plate feedback rod (10) to generate feedback moment returning to zero position and act on the deflection plate (10.1) of the deflection plate feedback rod (10).
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| CN108716489B (en) * | 2018-08-07 | 2020-04-10 | 上海航天控制技术研究所 | Power stage structure of electro-hydraulic pressure servo valve |
| CN109519431A (en) * | 2018-11-28 | 2019-03-26 | 中国航空工业集团公司西安飞行自动控制研究所 | Deflecting plates jet servo valve based on increasing material manufacturing valve body structure |
| CN110645221A (en) * | 2019-10-28 | 2020-01-03 | 南京航启电液控制设备有限公司 | Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve |
| CN111894922B (en) * | 2019-12-20 | 2023-06-20 | 中国航发长春控制科技有限公司 | Electro-hydraulic servo valve deflection plate structure |
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| RU2197633C2 (en) * | 2001-03-22 | 2003-01-27 | Гундоров Валентин Михайлович | Internal combustion engine electromagnetic nozzle |
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