CN110645221A - Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve - Google Patents

Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve Download PDF

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Publication number
CN110645221A
CN110645221A CN201911028143.2A CN201911028143A CN110645221A CN 110645221 A CN110645221 A CN 110645221A CN 201911028143 A CN201911028143 A CN 201911028143A CN 110645221 A CN110645221 A CN 110645221A
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China
Prior art keywords
jet
jet flow
rotary
outlet
stage
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CN201911028143.2A
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Chinese (zh)
Inventor
朱玉川
陈晓明
吴昌文
江裕雷
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Nanjing Hangqi Electro-Hydraulic Control Equipment Co Ltd
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Nanjing Hangqi Electro-Hydraulic Control Equipment Co Ltd
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Priority to CN201911028143.2A priority Critical patent/CN110645221A/en
Publication of CN110645221A publication Critical patent/CN110645221A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/16Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening having selectively- effective outlets
    • B05B1/1627Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening having selectively- effective outlets with a selecting mechanism comprising a gate valve, a sliding valve or a cock
    • B05B1/1636Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening having selectively- effective outlets with a selecting mechanism comprising a gate valve, a sliding valve or a cock by relative rotative movement of the valve elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/004Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005Piezoelectric benders
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

The invention discloses a novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve. The piezoelectric rotary actuator is used for generating a corresponding rotating angle in the horizontal direction according to an input voltage signal and transmitting the rotating angle to the jet flow distribution assembly, the jet flow distribution assembly completes the jet flow vector control of a front stage according to the rotating angle, the jet flow distribution assembly comprises a feedback rod which is eccentrically arranged, the lower end of the feedback rod is inserted into a matching hole of a valve core of the power stage slide valve assembly, and the feedback rod converts the linear motion of the valve core into rotating feedback so as to realize the mechanical feedback of the front stage and the power stage of the servo valve. The invention has the advantages of good heat dissipation, small processing difficulty, smaller actuator power consumption and low manufacturing cost, meets the mechanical design principle, can realize high-frequency action, further increases the use bandwidth of the servo valve, and has smaller preposed stage hydraulic power, more compact assembly, less leakage and higher control precision.

Description

Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve
Technical Field
The invention relates to the field of two-stage electro-hydraulic servo valves, in particular to a novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve.
Background
The hydraulic servo control system is widely applied to the field of aerospace power control which needs high precision, high response and high power density ratio. The servo valve is a main power regulating element used in a high-performance hydraulic servo control system, and a common servo valve is a two-stage device generally, wherein the first stage is used for realizing flow pressure distribution of a hydraulic amplifier by utilizing micro deflection of a torque motor, and the second stage is used for realizing a power stage slide valve structure for realizing accurate control of an execution element. With the rapid development of smart materials, a high-response and wide-bandwidth smart material is one of the best choices for driving the pre-stage of the servo valve. The torque motor of the conventional electro-hydraulic servo valve has the characteristics of high processing and manufacturing cost, high assembly process difficulty, high frequency response lifting difficulty and the like, and the controllable deformation of an intelligent material is used for realizing the preposed precision driving to become an alternative scheme of the torque motor.
Disclosure of Invention
The invention aims to provide a novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve aiming at the defects in the prior art.
In order to achieve the above purpose, the invention provides a novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve, which comprises a piezoelectric rotary actuator, a jet flow distribution assembly and a power stage slide valve assembly which are detachably fixed from top to bottom in sequence, the piezoelectric rotary actuator is used for generating a corresponding horizontal rotary angle according to an input voltage signal, and transmits the rotation angle to a jet flow distribution component, the jet flow distribution component completes the jet flow vector control of the front stage according to the rotation angle, and further controlling the operation of the power stage slide valve assembly, the jet flow distribution assembly including a feedback rod eccentrically disposed at a lower side thereof, the lower end of the feedback rod is inserted into a matching hole of a valve core of the power stage slide valve assembly, and the feedback rod converts the linear motion of the valve core into rotary feedback so as to realize the mechanical feedback of the front stage and the power stage of the servo valve.
Furthermore, the piezoelectric actuator comprises a support outer ring, a rotating main shaft arranged in the middle of the inner side of the support outer ring and a plurality of piezoelectric bending pieces connected between the inner side of the support outer ring and the rotating main shaft, the outer ends of the piezoelectric bending pieces are fixedly connected with the support outer ring, the inner ends of the piezoelectric bending pieces are in sliding connection with the rotating main shaft, the piezoelectric bending pieces are electrified to generate polarization bending and drive the rotating main shaft to generate a corresponding rotating angle, a sealing seat is arranged on the lower side of the support outer ring, and the rotating main shaft is inserted into the sealing seat.
Furthermore, the jet flow distribution assembly comprises a special-shaped jet flow disc, a jet flow inlet, a jet flow left outlet and a jet flow right outlet are formed in the special-shaped jet flow disc, a rotatable deflection control rod is arranged in the middle of the special-shaped jet flow disc, the upper end of the deflection control rod is in threaded connection with the rotating main shaft, the feedback rod is eccentrically arranged on the lower side of the deflection control rod, communicating grooves are formed in the deflection control rod between the jet flow inlet and the jet flow left outlet as well as between the jet flow inlet and the jet flow right outlet, when the deflection control rod does not rotate, the jet flow left outlet and the jet flow right outlet are symmetrically arranged on two sides of the central line of the communicating grooves, and when the deflection control rod rotates along with the rotating main shaft, the communicating grooves, the jet flow left outlet and the jet flow right outlet form inconsistent vector included angles.
Furthermore, the jet flow distribution assembly also comprises a pressing end cover which is detachably and fixedly connected with the supporting outer ring, the special-shaped jet flow disc is arranged on the inner side of the middle part of the pressing end cover, an upper pressing plate and a lower pressing plate are respectively arranged on the upper side and the lower side of the special-shaped jet flow disc, and the deflection control rod is inserted into the upper pressing plate and the lower pressing plate; the deflection control rod and the special-shaped jet disc form a drain port at an interval, and through holes are respectively formed in the positions, corresponding to the left jet outlet, the right jet outlet, the jet inlet and the drain port, of the lower pressing plate, so that the left jet outlet, the right jet outlet, the jet inlet and the drain port are respectively communicated with the left load cavity, the right load cavity, the oil supply port and the oil return port of the power slide valve assembly correspondingly.
Furthermore, the cross section of the communicating groove is trapezoidal, one side with a larger opening is arranged towards the jet inlet, and one side with a smaller opening is arranged towards the jet left outlet and the jet right outlet.
Furthermore, the inner side of the support outer ring is provided with a mounting groove, the outer end of the piezoelectric bending piece is fixed in the connecting groove through a bolt, a limiting groove is formed in the position, corresponding to the piezoelectric bending piece, of the outer side of the rotating spindle, and the inner end of the piezoelectric bending piece is connected in the limiting groove in a sliding mode.
Furthermore, the piezoelectric bending pieces comprise 3 to 6 piezoelectric bending pieces which are uniformly distributed between the inner side of the supporting outer ring and the rotating main shaft.
Furthermore, a first sealing ring is arranged between the lower side of the sealing seat and the upper side of the pressing end cover, and a second sealing ring is arranged between the lower side of the pressing end cover and the power stage slide valve assembly.
Further, the piezoelectric swirl actuator, the jet distribution assembly and the power stage spool valve assembly are bolted together.
Has the advantages that: 1. the invention has good heat dissipation, small processing difficulty and low cost. The high-frequency micro deformation of the piezoelectric bending piece is adopted to realize rotation, and the actuator has smaller power consumption.
2. The main connection form of the invention meets the mechanical design principle, can realize high-frequency action, and further increases the use bandwidth of the servo valve.
3. The device has the working principle different from that of the traditional servo valve, converts the plane motion of the lever principle of the deflection control rod into the rotation in the circumferential direction, and has the advantages of smaller preposed stage hydraulic force, more compact assembly, less leakage and higher control precision.
Drawings
FIG. 1 is a schematic structural diagram of a novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a piezoelectric rotary actuator according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a jet dispensing assembly of an embodiment of the present invention;
FIG. 4 is a schematic view of the engagement of the shaped jet disc with the deflection control lever according to the embodiment of the present invention;
fig. 5 is a schematic diagram of a power stage slide valve assembly according to an embodiment of the present invention.
Detailed Description
The present invention will be further illustrated with reference to the accompanying drawings and specific examples, which are carried out on the premise of the technical solution of the present invention, and it should be understood that these examples are only for illustrating the present invention and are not intended to limit the scope of the present invention.
As shown in fig. 1 to 5, the embodiment of the present invention provides a novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve, which comprises a piezoelectric rotary actuator 1, a jet flow distribution assembly 2 and a power stage slide valve assembly 3. Wherein, the piezoelectric rotary actuator 1, the jet flow distribution component 2 and the power stage slide valve component 3 are sequentially and detachably fixed together from top to bottom. The piezoelectric rotary actuator 1 is used for generating a corresponding rotation angle in the horizontal direction according to an input voltage signal and transmitting the rotation angle to the jet flow distribution assembly 2, the jet flow distribution assembly 2 completes jet flow vector control of a front stage according to the rotation angle so as to control the power stage slide valve assembly 3 to work, a feedback rod 2-4 is arranged on the lower side of the jet flow distribution assembly 2, the feedback rod 2-4 is eccentrically arranged on the lower side of the jet flow distribution assembly 2, a contact ball head 2-5 is arranged at the lower end of the feedback rod 2-4, the contact ball head 2-5 is inserted into a matching hole 3-2 of a valve core 3.1 of the power stage slide valve assembly 3, and the feedback rod 2-4 converts linear motion of the valve core 3.1 into rotation feedback so as to realize mechanical feedback of the front stage and the power stage of the servo valve.
As shown in fig. 2, the piezoelectric actuator 1 according to the embodiment of the present invention includes a supporting outer ring 1.1, a rotating spindle 1.2, and a plurality of piezoelectric bending pieces 1.4. Wherein, the rotating main shaft 1.2 is arranged in the middle of the inner side of the supporting outer ring 1.1, and the piezoelectric bending sheet 1.4 is connected between the inner side of the supporting outer ring 1.1 and the rotating main shaft 1.2. The outer end of the piezoelectric bending piece 1.4 is fixedly connected with the supporting outer ring 1.1, and the inner end of the piezoelectric bending piece 1.4 is connected with the rotating main shaft 1.2 in a sliding mode. When the piezoelectric bending piece is used, the outer end of the piezoelectric bending piece 1.4 is connected with a control wire, alternating current voltage is input to the piezoelectric bending piece 1.4 through the control wire, and therefore the piezoelectric bending piece 1.4 can generate polarization motion in the thickness direction. The number of the piezoelectric bending sheets 1.4 of the embodiment of the invention can be 3 to 6, preferably 4, and the piezoelectric bending sheets 1.4 are uniformly distributed between the inner side of the support outer ring 1.1 and the rotating main shaft 1.2. As a preferred embodiment, an installation groove 1-1 is arranged on the inner side of the support outer ring 1.1, the outer end of the piezoelectric bending piece 1.4 is inserted into the installation groove 1-1, concentric holes are formed in the piezoelectric bending piece 1.4 and the installation groove 1-1, a bolt 1.7 is threaded with a nut 1.6 after passing through the concentric holes, and then the outer end 1.4 of the piezoelectric bending piece is fixed in the installation groove 1-1. A plurality of limiting grooves 1-3 are arranged on the outer side of the rotating main shaft 1.2, the positions of the limiting grooves 1-3 correspond to the positions of the piezoelectric bending pieces 1.4, and the inner ends of the piezoelectric bending pieces 1.4 are connected in the limiting grooves 1-3 in a sliding mode. The switching of the motion mode is realized in order to ensure the accurate positioning of the piezoelectric bending piece 1.4 under the free length and ensure that the piezoelectric bending piece 1.4 and the rotating main shaft 1.2 generate certain dynamic friction force. When the outer end of the piezoelectric bending piece 1.4 is electrified, under the action of a certain electric field, the piezoelectric bending piece 1.4 generates micro polarization in the width direction, so that the radial rotation precision of the rotating spindle 1.2 is influenced, and in order to prevent the piezoelectric bending piece 1.4 from sliding out of the upper side of the limiting groove 1-3, a bolt 1.5 is preferably connected to the upper end of the rotating spindle 1.2 in a threaded manner, and the annular surface of the bolt 1.5 is adopted to limit the piezoelectric bending piece 1.4 in the width direction. The lower side of the supporting outer ring 1.1 is provided with a sealing seat 1.3, the rotating spindle 1.2 is inserted into the sealing seat 1.3 and keeps sealing with the sealing seat 1.3, and the oil on the lower side is prevented from leaking along the rotating spindle 1.2.
As shown in fig. 5, the power stage slide valve assembly 3 of the embodiment of the present invention is a prior art, and includes a valve core 3.1, a valve sleeve 3.2, a valve body 3.3, an end sealing plug 3.4, an outer end cover 3.5, a fastening screw 3.6, and the like. The valve core 3.1 is provided with pressure equalizing grooves 3-6, and the pressure equalizing grooves 3-6 are used for reducing unbalanced hydraulic pressure of the valve core 3.1 in the axial action process. The valve sleeve 3.2 is provided with a right load pressure feedback window 3-3 and a left load pressure feedback window 3-4, and the left load pressure feedback window 3-4 and the right load feedback window 3-3 are used for realizing the control of the pressure of two cavities leading in the actuating element. The valve body 3.3, the end sealing plug screw 3.4 and the valve core 3.1 together form a left control cavity 3-5 and a right control cavity 3-7, the upper side of the valve body 3.3 is provided with a right jet receiving hole 3-9, a left jet receiving hole 3-10, an oil outlet 3-11, a left load port 3-12, an oil supply port 3-13, a right load port 3-14, an oil return port 3-15 and an oil drain port 3-16, wherein, the left load port 3-12, the oil supply port 3-13, the right load port 3-14 and the oil return port 3-15 are connected with a pipeline to form a complete hydraulic system, the right jet flow receiving hole 3-9, the left jet flow receiving hole 3-10, the oil outlet hole 3-11 and the oil drain port 3-16 are communicated with the jet flow distribution component 2, since the modifications of this portion are not involved, further description of the other structure of the power stage spool valve assembly 3 will be omitted.
As shown in fig. 3 and 4, the jet distribution assembly 2 according to the embodiment of the present invention includes a special-shaped jet disc 2.1, the special-shaped jet disc 2.1 is horizontally disposed, a jet inlet 2-2, a jet left outlet 2-6, and a jet right outlet 2-7 are disposed on the special-shaped jet disc 2.1, a deflection control lever 2.5 is rotatably disposed in the middle of the special-shaped jet disc 2.1, the deflection control lever 2.5 is vertically disposed, the upper end of the deflection control lever 2.5 is connected to the rotating spindle 1.2, so that the deflection control lever 2.5 can rotate with the rotating spindle 1.2 within a certain range. The feedback rod 2-4 is arranged eccentrically on the underside of the deflection control rod 2.5. A communication groove 2-3 is arranged on a deflection control rod 2.5 between the jet inlet 2-2 and the jet left outlet 2-6 and the jet right outlet 2-7. High-pressure oil from the power stage slide valve assembly 3 enters through a jet flow inlet 2-2 of the special-shaped jet flow disc 2.1 and then flows into a jet flow left outlet 2-6 and a jet flow right outlet 2-7 through a communicating groove 2-3 respectively. When the piezoelectric rotary actuator 1 is not supplied with control voltage, the deflection control rod 2.5 does not rotate, the left jet outlet 2-6 and the right jet outlet 2-7 are symmetrically arranged at two sides of the central line of the communicating groove 2-3, the flow entering the left jet outlet 2-6 and the right jet outlet 2-7 is the same, the oil pressure of the left control containing cavity 3-5 and the right control containing cavity 3-7 at two sides of the valve core 3.1 is the same, and at the moment, the valve core 3.1 is kept at the middle position. When control voltage is applied to the piezoelectric rotary actuator 1, the deflection control rod 2.5 rotates along with the rotary main shaft 1.2, at the moment, the communicating groove 2-3, the left jet outlet 2-6 and the right jet outlet 2-7 form inconsistent vector included angles, the flow entering the left jet outlet 2-6 and the right jet outlet 2-7 through the communicating groove 2-3 is different, the pressure in the left control containing cavity 3-5 and the pressure in the right control containing cavity 3-7 are different, and the high-pressure side pushes the valve core 3.1 to move to the low-pressure side.
The jet flow distribution assembly 2 of the embodiment of the invention further comprises a pressing end cover 2.4 detachably and fixedly connected with the supporting outer ring 1.1, the special-shaped jet flow disc 2.1 is arranged on the inner side of the middle part of the pressing end cover 2.4, an upper pressing plate 2.2 and a lower pressing plate 2.3 are respectively arranged on the upper side and the lower side of the special-shaped jet flow disc 2.1, the upper pressing plate 2.2 and the lower pressing plate 2.3 are accurately positioned together through cylindrical pins 2.6 and 2.7, the outer sides of the upper pressing plate 2.2 and the lower pressing plate 2.3 and the inner side of the pressing end cover 2.4 can adopt clearance fit or are provided with matched limiting structures, and the upper pressing plate 2.2 and the lower pressing plate 2.3 are prevented from rotating in the pressing end cover 2. The deflection control rod 2.5 is arranged by penetrating the upper pressure plate 2.2 and the lower pressure plate 2.3, the upper end of the deflection control rod 2.5 is preferably in threaded connection with the rotating spindle 1.2, the lower end of the rotating spindle 1.2 is provided with threaded holes 1-6, and the upper end of the deflection control rod 2.5 is provided with an external thread structure 2-9. And strong glue can be injected after setting to prevent the loosening of the rotor in the process of anticlockwise high-frequency rotation. The side part of the deflection control rod 2.5 and the special-shaped jet disc 2.1 form a discharge port 2-10 at intervals, through holes are respectively arranged on the lower pressing plate 2.2 and at the positions corresponding to the left jet outlet 2-6, the right jet outlet 2-7, the jet inlet 2-2 and the discharge port 2-10, and the through holes on the lower pressing plate 2.2 respectively correspond to the positions of the left jet receiving hole 3-10, the right jet receiving hole 3-9, the oil outlet 3-11 and the discharge port 3-6 on the valve body 3.3.
Referring to fig. 3 to 5, a part of the high-pressure oil entering the power stage slide valve assembly 3 from the oil supply port 3-13 of the valve body 3.3 flows out of the power stage slide valve assembly 3 through the oil outlet 3-11 and flows to the jet inlet 2-2 through the through hole on the lower press plate 2.2 corresponding to the position of the oil outlet 3-11, and meanwhile, the oil supply port 3-13 delivers a part of the high-pressure oil to the left load port 3-12 and the right load port 3-14 which are closed; a part of high-pressure oil liquid entering the jet inlet 2-2 is distributed to a jet left outlet 2-6 and a jet right outlet 2-7 through a communicating groove 2-3; the other part of the oil flows into a drain port 2-10, the oil which flows into a left jet outlet 2-6 and a right jet outlet 2-7 flows out of the jet distribution assembly 2 through a through hole on a lower pressure plate 2.3 and flows into a left control cavity 3-5 and a right control cavity 3-7 of the power level slide valve assembly 3 through a left jet receiving hole 3-10 and a right jet receiving hole 3-9, so that the pressures at two ends of the valve core are unequal, and further the left load port 3-12 and the right load port 3-14 are controlled to be communicated with corresponding inlets and outlets of the actuator according to the hydraulic circuit function of the slide valve assembly. The oil flowing into the drain ports 2-10 flows out of the jet flow distribution assembly 2 through the through holes on the lower pressing plate 2.3, flows back to the power stage slide valve assembly 3 through the oil drain ports 3-16, and then flows out of the power stage slide valve assembly 3 through the oil return ports 3-15.
As shown in fig. 4, the cross section of the communicating groove 2-3 of the embodiment of the present invention is preferably arranged in a trapezoidal shape, the side of the communicating groove 2-3 with the larger opening is arranged toward the jet inlet 2-2, so as to facilitate the oil to enter the communicating groove 2-3, and the side with the smaller opening is arranged toward the jet left outlet 2-6 and the jet right outlet 2-7, so as to improve the control sensitivity.
In order to fix the piezoelectric rotary actuator 1, the jet flow distribution assembly 2 and the power stage slide valve assembly 3 together, preferably, a first mounting hole 1-2 is formed in a support outer ring 1.1, a second mounting hole 2-1 is formed in a compression end cover 2.4, a threaded hole 3-8 is formed in a valve body 3.3, preferably, four first mounting holes 1-2, four second mounting holes 2-1 and four threaded holes 3-8 are formed in the same axis one by one, and then bolts are used for sequentially penetrating through the first mounting hole 1-2 and the second mounting hole 2-1 and being screwed into the threaded holes 3-8. In order to ensure the sealing effect between the piezoelectric rotary actuator 1, the jet distribution assembly 2 and the power stage sliding valve assembly 3, it is preferable to provide a first sealing groove at the lower side of the sealing seat 1.3, a first sealing ring 1.8 in the first sealing groove, a second sealing groove 3-1 at the upper side of the valve body 3.3, and a second sealing ring in the second sealing groove 3-1. The first 1.8 and second 1.8 sealing rings are preferably O-ring seals.
The working principle of the invention is as follows:
1. the spin generation process: the outer end of the piezoelectric bending piece 1.4 is connected with a control voltage, the piezoelectric bending piece 1.4 can generate vertical polarization movement, but the outer side of the piezoelectric bending piece 1.4 is fixed, the inner side of the piezoelectric bending piece is limited in a limiting groove 1-3 of the rotating main shaft 1.2, the tangential friction force between the rotating main shaft 1.2 and the piezoelectric bending piece 1.4 enables the rotating main shaft 1.2 to be forced to rotate in a small angle, and further the movement form of electro-mechanical rotation is realized.
2. And (3) jet flow vector control process: when the deflection control rod 2.5 does not rotate, the communicating groove 2-3 of the deflection control rod 2.5 is aligned with the jet inlet 2-2 of the jet disc; when the main shaft 1.2 is rotated for a certain angle due to the up-down polarization after the power is supplied to the piezoelectric bending piece 1.4, the deflection control rod 2.5 also rotates for a corresponding angle, the communicating groove 2-3 and the central line of the jet inlet 2-2 on the special-shaped jet disc 2.1 form a certain included angle, the included angle is deviated to which side, the high-speed jet can be forced to deflect to the side by a vector, and the jet vector control stage of the front stage of the servo valve is completed.
3. The power stage slide valve motion process: when the high-speed jet flow ejected from the jet flow inlet 2-2 of the special-shaped jet flow disc 2.1 rotates at a small angle due to the deflection control rod 2.5, the high-speed jet flow vector deflects, then the high-speed oil flow entering the jet flow left outlet 2-6 and the jet flow right outlet 2-7 changes, the pressures formed in the left control accommodating cavity 3-5 and the right control accommodating cavity 3-7 at the two ends of the valve core 1 communicated with the high-speed jet flow vector are unequal, the valve core 3.1 is pushed to move towards the side with low pressure, and then the left load port 3-12 and the right load port 3-14 are controlled to be communicated with the corresponding inlet and outlet of the actuator according to the hydraulic circuit function of the sliding.
4. Power stage slide valve mechanical feedback process: the matching hole 3-2 of the valve core is matched with the feedback rod 2-4 to realize the mechanical feedback of the front stage of the servo valve, the eccentric feedback rod 2-4 on the deflection control rod 2.5 realizes that the linear motion of the power stage slide valve can be converted into the reverse rotation feedback of a tiny angle of the deflection control rod 2.5, so that the mechanical feedback of the front stage and the power stage of the servo valve can be realized, and the working stability of the servo valve is ensured.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that other parts not specifically described are within the prior art or common general knowledge to those of ordinary skill in the art. Without departing from the principle of the invention, several improvements and modifications can be made, and these improvements and modifications should also be construed as the scope of the invention.

Claims (9)

1. The utility model provides a novel high frequency piezoelectricity rotary type two-stage electro-hydraulic servo valve which characterized in that, can dismantle fixed piezoelectricity rotary actuator, efflux distribution subassembly and power level slide valve subassembly including from top to bottom in proper order, piezoelectricity rotary actuator is used for producing the rotary angle of corresponding horizontal direction according to the voltage signal of input, and will rotary angle transmits for efflux distribution subassembly, efflux distribution subassembly accomplishes the efflux vector control of leading level according to rotary angle, and then control power level slide valve subassembly work, efflux distribution subassembly includes the feedback rod that is eccentric settings in its below, the lower extreme of feedback rod insert extremely in the case cooperation hole of power level slide valve subassembly, the feedback rod turns into the rotary feedback with the linear motion of case to realize the mechanical feedback of leading level of servo valve and power level.
2. The novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve of claim 1, wherein the piezoelectric actuator includes a support outer ring, a rotary main shaft disposed in the middle of the inner side of the support outer ring, and a plurality of piezoelectric bending pieces connected between the inner side of the support outer ring and the rotary main shaft, the outer ends of the piezoelectric bending pieces are fixedly connected to the support outer ring, and the inner ends of the piezoelectric bending pieces are slidably connected to the rotary main shaft, the piezoelectric bending pieces generate polarization bending after being energized and drive the rotary main shaft to generate a corresponding rotary angle, a sealing seat is disposed on the lower side of the support outer ring, and the rotary main shaft is inserted into the sealing seat.
3. The novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve of claim 2, wherein the jet flow distributing assembly includes a special-shaped jet flow disk, the special-shaped jet flow disk is provided with a jet flow inlet, a jet flow left outlet and a jet flow right outlet, the middle part of the special-shaped jet flow disk is provided with a rotatable deflection control rod, the upper end of the deflection control rod is in threaded connection with the rotary main shaft, the feedback rod is eccentrically arranged at the lower side of the deflection control rod, the deflection control rod between the jet flow inlet and the jet flow left outlet as well as between the jet flow right outlet is provided with a communicating groove, and when the deflection control rod is not rotated, the jet flow left outlet and the jet flow right outlet are symmetrically arranged at two sides of the central line of the communicating groove; when the deflection control rod rotates along with the rotating main shaft, the communicating groove and the left jet outlet and the right jet outlet form inconsistent vector included angles, and then the jet flow vector control of the front stage is completed.
4. The novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve of claim 3, wherein the jet flow distributing assembly further includes a pressing end cover detachably and fixedly connected with the supporting outer ring, the special-shaped jet flow disk is arranged at the inner side of the middle part of the pressing end cover, an upper pressing plate and a lower pressing plate are respectively arranged at the upper side and the lower side of the special-shaped jet flow disk, and the deflection control rod is inserted into the upper pressing plate and the lower pressing plate; the deflection control rod and the special-shaped jet disc form a drain port at an interval, and through holes are respectively formed in the positions, corresponding to the left jet outlet, the right jet outlet, the jet inlet and the drain port, of the lower pressing plate, so that the left jet outlet, the right jet outlet, the jet inlet and the drain port are respectively communicated with the left load cavity, the right load cavity, the oil supply port and the oil return port of the power slide valve assembly correspondingly.
5. The novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve of claim 3, wherein the cross section of the communicating groove is trapezoidal, the side with the larger opening is arranged towards the jet inlet, and the side with the smaller opening is arranged towards the jet left outlet and the jet right outlet.
6. The novel high-frequency piezoelectric rotary two-stage electrohydraulic servo valve of claim 2, wherein the inner side of the support outer ring is provided with a mounting groove, the outer end of the piezoelectric bending piece is fixed in the connecting groove by a bolt, the outer side of the rotary main shaft is provided with a limiting groove corresponding to the piezoelectric bending piece, and the inner end of the piezoelectric bending piece is slidably connected in the limiting groove.
7. The new high frequency piezoelectric rotary two-stage electrohydraulic servo valve of claim 2, wherein the piezoelectric bending plates include 3 to 6 pieces, which are uniformly arranged between the inner side of the support outer ring and the rotary main shaft.
8. The novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve according to claim 4, wherein a first sealing ring is arranged between the lower side of the sealing seat and the upper side of the pressing end cover, and a second sealing ring is arranged between the lower side of the pressing end cover and the power stage slide valve assembly.
9. The novel high frequency piezo-electric rotary two stage electro-hydraulic servo valve of claim 1, wherein the piezo-electric rotary actuator, the jet distribution assembly and the power stage spool valve assembly are bolted together.
CN201911028143.2A 2019-10-28 2019-10-28 Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve Pending CN110645221A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113513511A (en) * 2021-04-15 2021-10-19 浙大城市学院 Piezoelectric stack driving electro-hydraulic proportional valve

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3542051A (en) * 1967-12-29 1970-11-24 Moog Inc Free jet stream deflector servovalve
CN105846714A (en) * 2016-06-12 2016-08-10 吉林大学 Stepping piezoelectric drive motor
CN107725519A (en) * 2017-11-01 2018-02-23 湖北航达科技有限公司 The board-like electrohydraulic servo valve of small size high frequency high linearity jet deflection and application method
CN207603478U (en) * 2017-11-21 2018-07-10 深圳市富世达通讯有限公司 Actuation means
CN108626207A (en) * 2017-11-10 2018-10-09 中航工业南京伺服控制系统有限公司 A kind of rotating jet deflection harden structure
CN210799551U (en) * 2019-10-28 2020-06-19 南京航启电液控制设备有限公司 Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3542051A (en) * 1967-12-29 1970-11-24 Moog Inc Free jet stream deflector servovalve
CN105846714A (en) * 2016-06-12 2016-08-10 吉林大学 Stepping piezoelectric drive motor
CN107725519A (en) * 2017-11-01 2018-02-23 湖北航达科技有限公司 The board-like electrohydraulic servo valve of small size high frequency high linearity jet deflection and application method
CN108626207A (en) * 2017-11-10 2018-10-09 中航工业南京伺服控制系统有限公司 A kind of rotating jet deflection harden structure
CN207603478U (en) * 2017-11-21 2018-07-10 深圳市富世达通讯有限公司 Actuation means
CN210799551U (en) * 2019-10-28 2020-06-19 南京航启电液控制设备有限公司 Novel high-frequency piezoelectric rotary two-stage electro-hydraulic servo valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113513511A (en) * 2021-04-15 2021-10-19 浙大城市学院 Piezoelectric stack driving electro-hydraulic proportional valve
CN113513511B (en) * 2021-04-15 2023-09-26 浙大城市学院 Piezoelectric stacking driving electro-hydraulic proportional valve

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