JP4421980B2 - Continuous film deposition system - Google Patents

Continuous film deposition system Download PDF

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JP4421980B2
JP4421980B2 JP2004261880A JP2004261880A JP4421980B2 JP 4421980 B2 JP4421980 B2 JP 4421980B2 JP 2004261880 A JP2004261880 A JP 2004261880A JP 2004261880 A JP2004261880 A JP 2004261880A JP 4421980 B2 JP4421980 B2 JP 4421980B2
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film forming
chamber
roll
end wall
fixed
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JP2006077284A5 (en
JP2006077284A (en
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利規 瀬川
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Kobe Steel Ltd
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Kobe Steel Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Description

本発明は帯状の被成膜基材を走行させつつ、その表面に機能性薄膜を連続的に成膜する連続成膜装置に関する。   The present invention relates to a continuous film forming apparatus for continuously forming a functional thin film on a surface of a belt-shaped film forming substrate while traveling.

プラスチックや無機質などで形成された長尺のフィルムやシートからなる被成膜基材を、真空チャンバ内で連続的に走行させ、その表面に種々の機能性薄膜をスパッタリングや蒸着によって成膜する連続成膜装置がある。このような連続成膜装置の一例を図９に示す。この成膜装置は、真空チャンバ５１を有し、その内部に被成膜基材が巻き掛けられた成膜ロール５３が設けられ、真空チャンバ５１の内部が隔壁７２，７３，７４によって区画され、上部に巻出しロール５６、巻取りロール５７、各種の案内ロール５８Ａ，５８Ｂ，５９Ａ，５９Ｂ，６０Ａ，６０Ｂが設けられたロール室６６が、下部にカソードボックス５４が設けられた二つの成膜室６７，６７が設けられている。前記隔壁によって区画されたロール室６６、成膜室６７，６７は各々真空ポンプ８８によって独立に真空排気される。巻出しロール５６には、被成膜基材をコイル状に巻いたボビンが装着され、ボビンに巻かれた被成膜基材は、案内ロールを介して成膜ロール５３に連続的に供給され、成膜ロール５３の外周面上で成膜された後、再び案内ロールを介して巻取りロール５７に装着されたボビンに巻き取られる。なお、連続成膜装置には、図例のように隔壁によって真空チャンバ５１の内部を区画したもののほか、隔壁を有しない小型タイプ、簡易タイプのものもある。   A substrate to be deposited consisting of a long film or sheet made of plastic or inorganic material is continuously run in a vacuum chamber, and various functional thin films are deposited on the surface by sputtering or vapor deposition. There is a film forming apparatus. An example of such a continuous film forming apparatus is shown in FIG. This film forming apparatus has a vacuum chamber 51, a film forming roll 53 around which a film forming substrate is wound is provided, and the inside of the vacuum chamber 51 is partitioned by partition walls 72, 73, 74, A roll chamber 66 provided with an unwinding roll 56, a winding roll 57, and various guide rolls 58A, 58B, 59A, 59B, 60A, 60B in the upper part, and two film forming chambers provided with a cathode box 54 in the lower part. 67, 67 are provided. The roll chamber 66 and the film forming chambers 67 and 67 partitioned by the partition walls are each evacuated independently by a vacuum pump 88. A bobbin obtained by winding a film forming substrate in a coil shape is attached to the unwinding roll 56, and the film forming substrate wound around the bobbin is continuously supplied to the film forming roll 53 via a guide roll. After the film is formed on the outer peripheral surface of the film forming roll 53, the film is again wound around the bobbin attached to the winding roll 57 via the guide roll. In addition, as shown in the figure, the continuous film forming apparatus includes a small type and a simple type that do not have a partition, in addition to the inside of the vacuum chamber 51 partitioned by a partition.

前記真空チャンバ５１は、前記成膜ロール５３、巻出しロール５６、巻取りロール５７が回転自在に支持され、それらの駆動装置が背面側に付設された後端壁６２と、その反対側に対向して設けられた前端壁６３と、両端壁をつなぐ筒状の胴部６１とで構成される。図例のものは、成膜ロール５４の軸方向（前後方向）から見て（正面視）、胴部６１が方形をしているが、丸形状のものも用いられる。正面視が方形の連続成膜装置としては、例えば特開２００１−３１６８号公報（特許文献１）、特開２００２−１７３７７３号公報（特許文献２）に記載されたものがある。一方、正面視が円形の連続成膜装置としては、例えば特開平１０−３６９６７号公報（特許文献３）、特開２００２−３３９０５５号公報（特許文献４）に記載されたものがある。
特開２００１−３１６８号公報 特開２００２−１７３７７３号公報 特開平１０−３６９６７号公報 特開２００２−３３９０５５号公報 In the vacuum chamber 51, the film forming roll 53, the unwinding roll 56, and the take-up roll 57 are rotatably supported, and the driving device thereof is opposed to the rear end wall 62 attached to the back side and the opposite side. The front end wall 63 provided in this manner and a cylindrical body 61 connecting the both end walls are configured. In the example shown in the figure, the body 61 is square when viewed from the axial direction (front-rear direction) of the film forming roll 54 (front view), but a round shape is also used. Examples of the continuous film forming apparatus having a square front view include those described in Japanese Patent Application Laid-Open No. 2001-3168 (Patent Document 1) and Japanese Patent Application Laid-Open No. 2002-173773 (Patent Document 2). On the other hand, examples of the continuous film forming apparatus having a circular front view include those described in JP-A-10-36967 (Patent Document 3) and JP-A-2002-339055 (Patent Document 4).
Japanese Patent Laid-Open No. 2001-3168 JP 2002-173773 A JP 10-36967 A JP 2002-339055 A

このような連続成膜装置においては、巻出しロール５６や巻取りロール５７におけるボビンの交換やこれに伴う被成膜基材のロール通し作業（通紙作業）、カソードボックス内のターゲットやスパッタリング用マスクの交換、カソードのメンテナンス、各種ロールや隔壁の交換などの種々の作業がある。これらの作業を行うために連続成膜装置は、真空チャンバ５１の内部が解放されるような構造となっている。   In such a continuous film forming apparatus, the bobbin is replaced in the unwinding roll 56 and the winding roll 57, and the film forming base material is rolled through (paper passing work), the target in the cathode box and the sputtering target. There are various operations such as mask replacement, cathode maintenance, and replacement of various rolls and partition walls. In order to perform these operations, the continuous film forming apparatus has a structure in which the inside of the vacuum chamber 51 is released.

このような解放構造としては、特許文献１や特許文献３に記載されているように、後端壁６２と胴部６１とでチャンバ本体を形成し、後端壁６２に付設された成膜ロール５３、巻出しロール５６，巻取りロール５７、隔壁７２，７３，７４をチャンバ本体内に収容した状態で、カソードボックス５４を取り付けた前端壁６３を前記チャンバ本体に着脱自在に装着する構造のもの（カソードボックス引き出し型構造）がある。また、胴部６１と前端壁６３とを一体的に形成してチャンバ本体とし、チャンバ本体内にカソードボックス５４を収容した状態で、図９に示すように、前記成膜ロール５３等が取り付けられた後端壁６２を前記チャンバ本体に着脱自在に装着する構造のもの（ロール引き出し型構造）がある。いずれの構造においても、前端壁６３あるいは後端壁６２を走行台車等に乗せて、これをチャンバ本体に相対移動させることにより、両者を着脱するようにしている。 As such a release structure, as described in Patent Document 1 and Patent Document 3, a film body roll is formed by forming a chamber body with the rear end wall 62 and the body portion 61 and attaching to the rear end wall 62. 53, a structure in which a front end wall 63 to which a cathode box 54 is attached is detachably attached to the chamber main body in a state where the unwinding roll 56, the take-up roll 57, and the partition walls 72, 73, 74 are accommodated in the chamber main body. (Cathode box drawer type structure). Further, the body 61 and the front end wall 63 are integrally formed to form a chamber main body, and the cathode roll 54 is accommodated in the chamber main body, and as shown in FIG. Further, there is a structure in which the rear end wall 62 is detachably attached to the chamber body (roll drawer type structure). In any structure, the front end wall 63 or the rear end wall 62 is placed on a traveling carriage or the like, and is moved relative to the chamber body so that both are attached and detached.

前記カソードボックス引き出し型構造では、カソードボックスがチャンバ本体から引き出されて露出するため、ターゲットの交換やカソードのメンテナンスは容易であるが、チャンバ本体内に収容された被成膜基材のボビンや各種ロールの交換作業は困難である。
一方、ロール引き出し型構造では、ボビンや各種ロールはチャンバ本体から引き出されて露出するため、これらの交換作業やカソードボックス周りのメンテナンスも容易でメンテナンス性に優れる。しかし、隔壁を有する連続成膜装置では、ボビンの交換毎に、後端壁をチャンバ本体に対して進退させる必要があるため、図９に示すように、隔壁７２，７３の側端部や隔壁７４の下端部とチャンバ本体（胴部）の内面に設けたシール材８０の凹部とが摺動し、シール材８０からかすが発生し易く、成膜品質の劣化を招来するという問題がある。
また、いずれの構造においても、カソードボックスが付設された前端壁や成膜ロール等が付設された後端壁を移動させる必要があるため、大がかりな移動装置が必要になり、またカソードボックスや成膜ロール等をチャンバ本体から引き出す必要があるので、大きなスペースが必要になる。 In the cathode box pull-out type structure, the cathode box is pulled out from the chamber body and exposed, so that the replacement of the target and the maintenance of the cathode are easy. It is difficult to replace the roll.
On the other hand, since the bobbin and various rolls are pulled out from the chamber body and exposed in the roll-drawing structure, the replacement work and maintenance around the cathode box are easy and excellent in maintainability. However, in the continuous film forming apparatus having the partition walls , it is necessary to advance and retract the rear end wall with respect to the chamber main body every time the bobbin is exchanged. Therefore, as shown in FIG. There is a problem that the lower end portion of 74 and the concave portion of the sealing material 80 provided on the inner surface of the chamber main body (body portion) slide, so that the sealing material 80 is likely to be frayed and the film quality is deteriorated.
In any structure, it is necessary to move the front end wall to which the cathode box is attached and the rear end wall to which the film forming roll is attached, which requires a large-scale moving device. Since a film roll or the like needs to be pulled out from the chamber body, a large space is required.

本発明はかかる問題に鑑みなされたもので、作業性やメンテナンス性に優れ、しかも設置スペースが少なくて済み、隔壁を有する場合でも隔壁端部がシール材と摺動しない連続成膜装置を提供することを目的とする。   The present invention has been made in view of such problems, and provides a continuous film forming apparatus that is excellent in workability and maintainability, requires only a small installation space, and does not slide with the sealing material even when it has a partition wall. For the purpose.

本発明の連続成膜装置（第１発明）は、中空状の胴部と当該胴部の後端及び前端にそれぞれ配された後端壁及び前端壁を備えた真空チャンバと、前記真空チャンバ内に収容され、前記後端壁側より回転駆動される成膜ロールと、前記真空チャンバ内に収容され、前記成膜ロールに巻き掛けられた被成膜基材に成膜する成膜ユニットと、前記真空チャンバ内に収容され、前記被成膜基材を前記成膜ロールに供給する巻出しロール及び成膜後の被成膜基材を巻き取る巻取りロールとを備えた基本構成を有する。そして、前記真空チャンバは、前記後端壁の左側の側端部あるいは前記胴部の後端左側の側端部と前記前端壁の上端及び下端を通る分割面及び前記後端壁の右側の側端部あるいは前記胴部の後端右側の側端部と前記前端壁の上端及び下端を通る分割面との二つの分割面によって左右の移動側チャンバ部とそれらの間に配置された固定側チャンバ部とに三分割され、前記固定側チャンバ部の前端壁と後端壁とによって前記成膜ロール、巻出しロール及び巻取りロールが回転自在に支持され、前記移動側チャンバ部に前記成膜ユニットが備えられ、前記左右の移動側チャンバ部と固定側チャンバ部の分割端部がシール材を介して当接離反するように前記左右の移動側チャンバ部を前記固定側チャンバ部に開閉するように設けた。 A continuous film forming apparatus of the present invention (first invention) includes a hollow body, a vacuum chamber having a rear end wall and a front end wall respectively disposed at a rear end and a front end of the body, and the inside of the vacuum chamber A film forming roll which is housed in the film and is rotated from the rear end wall side; a film forming unit which is housed in the vacuum chamber and is wound on the film forming substrate wound around the film forming roll; It has a basic configuration including an unwinding roll that is housed in the vacuum chamber and supplies the film-forming substrate to the film-forming roll, and a winding roll that winds the film-forming substrate after film formation. The vacuum chamber includes a left side end portion of the rear end wall or a left end side end portion of the body portion, a split surface passing through an upper end and a lower end of the front end wall, and a right side side of the rear end wall. Left and right moving-side chamber portions and a fixed-side chamber disposed between them by two dividing surfaces, that is, a side end portion on the right side of the end portion or the rear end of the body portion and a dividing surface passing through the upper end and the lower end of the front end wall The film forming roll, the unwinding roll, and the winding roll are rotatably supported by the front end wall and the rear end wall of the fixed side chamber section , and the film forming unit is mounted on the moving side chamber section. And the left and right moving side chamber portions and the fixed side chamber portion are opened and closed with respect to the fixed side chamber portion so that the split end portions of the left and right moving side chamber portions and the fixed side chamber portion are in contact with and separated from each other via a sealant. Provided.

この発明によると、真空チャンバを固定側チャンバ部と移動側チャンバ部とに所定の分割面によって分割したので、移動側チャンバ部を固定側チャンバ部から離反させて固定チャンバ部を解放することで、固定側チャンバ部に収容されたロール類を露出させてボビンの交換作業や各部材のメンテナンスを容易に行うことができ、作業性に優れる。また、従来のように、成膜ロール類を備えた後端壁や成膜ユニットを備えた前端壁を移動させるのに比較して大掛かり移動装置が不要で、装置の設置スペースも少なくて済む。 According to the present invention, since the thus divided into predetermined division plane and the fixed-side chamber portion and the movable chamber part of the vacuum chamber, that is separating the movable chamber part from the fixed-side chamber section to release the fixing chamber portion The rolls accommodated in the fixed-side chamber portion are exposed so that the bobbin can be easily replaced and maintenance of each member can be easily performed. Further, as compared with the conventional case of moving the rear end wall provided with the film forming rolls and the front end wall provided with the film forming unit, a large-scale moving device is not required, and the installation space for the apparatus can be reduced.

本発明の他の連続成膜装置（第２発明）は、上記第１発明の連続成膜装置と同様の基本構成を有する。そして、前記真空チャンバの内部は、前記巻出しロール及び巻取りロールが配置されたロール室と、前記成膜ユニットが配置された成膜室とが真空チャンバの内部に設けられた隔壁によって区画形成され、前記真空チャンバは、前記後端壁の左側の側端部あるいは前記胴部の後端左側の側端部と前記前端壁の上端及び下端を通る分割面及び前記後端壁の右側の側端部あるいは前記胴部の後端右側の側端部と前記前端壁の上端及び下端を通る分割面との二つの分割面によって左右の移動側チャンバ部とそれらの間に配置された固定側チャンバ部とに三分割され、前記隔壁は、前記二つの分割面によって前記固定側チャンバ部に配置された固定側隔壁部と、前記左右の移動側チャンバ部に配置された移動側隔壁部とに分割され、前記固定側チャンバ部の前端壁と後端壁とによって前記成膜ロール、巻出しロール及び巻取りロールが回転自在に支持され、前記移動側チャンバ部に前記成膜ユニットが備えられ、前記左右の移動側チャンバ部と固定側チャンバ部の分割端部並びに前記固定側隔壁部と移動側隔壁部の分割端部がそれぞれシール材を介して当接離反するように前記左右の移動側チャンバ部を固定側チャンバ部に対して開閉するように設けた。 Another continuous film forming apparatus of the present invention (second invention) has the same basic structure as the continuous film forming apparatus of the first invention. The inside of the vacuum chamber is partitioned by a partition provided inside the vacuum chamber, a roll chamber in which the unwinding roll and the winding roll are arranged, and a film forming chamber in which the film forming unit is arranged. The vacuum chamber has a left side end portion of the rear end wall or a side end portion on the left side of the rear end portion of the body portion, a dividing surface passing through an upper end and a lower end of the front end wall, and a right side side of the rear end wall. Left and right moving-side chamber portions and a fixed-side chamber disposed between them by two dividing surfaces, that is, a side end portion on the right side of the end portion or the rear end of the body portion and a dividing surface passing through the upper end and the lower end of the front end wall The partition wall is divided into a fixed partition wall portion disposed in the fixed chamber portion and a moving partition wall portion disposed in the left and right moving chamber portions by the two split surfaces. The fixed side The film-forming roll by the front end wall and rear end wall parts, unwinding roll and a winding roll is rotatably supported, the film forming unit is provided in the movable chamber part, said right and left movable chamber part The left and right moving side chambers are fixed to the fixed side chamber so that the divided end of the fixed side chamber and the divided end of the fixed side partition and the moving side partition are in contact with and separated from each other via a sealant. It was provided to open and close.

この第２発明によると、真空チャンバを固定側チャンバ部と移動側チャンバ部とに所定の分割面によって分割し、また隔壁も真空チャンバと同様に分割面に沿って分割したので、移動側チャンバ部を固定側チャンバ部から離反させて固定チャンバ部を解放することで、固定側チャンバ部に収容されたロール類を露出させてボビンの交換作業や各部材のメンテナンスを容易に行うことができ、作業性に優れる。また、従来のように、成膜ロール類を備えた後端壁や成膜ユニットを備えた前端壁を移動させるのに比較して大掛かり移動装置が不要で、装置の設置スペースも少なくて済み、しかも隔壁端部とシール材が摺動しないため、シールかすがほとんど発生せず、成膜品質の劣化を防止することができる。 According to the second aspect of the invention, the vacuum chamber thus divided into the fixed-side chamber portion and the movable chamber part to a predetermined dividing plane, and since the partition wall is also divided along the dividing surface similar to the vacuum chamber, movable chamber By separating the part from the fixed side chamber part and releasing the fixed chamber part, it is possible to expose the rolls accommodated in the fixed side chamber part and easily perform the bobbin replacement work and maintenance of each member, Excellent workability. In addition, as compared with the conventional case of moving the rear end wall provided with film forming rolls and the front end wall provided with a film forming unit, a large-scale moving device is unnecessary, and the installation space for the apparatus can be reduced. In addition, since the end of the partition wall and the sealing material do not slide, almost no seal debris is generated, and deterioration of the film forming quality can be prevented.

本発明の他の連続成膜装置（第３発明）は、真空チャンバが所定の分割面で分割されて固定側チャンバ部と、移動側チャンバ部とで構成される点は前記第２発明の連続成膜装置と同様であるが、前記真空チャンバの内部を区画形成する隔壁が分割構造になっておらず、前記移動側チャンバ部を固定側チャンバ部に対して開閉することにより、前記移動側チャンバ部と固定側チャンバ部の分割端部並びに前記移動側チャンバ部の内面と前記隔壁の端部とがそれぞれシール材を介して当接離反するように設けたものである。この連続成膜装置によれば、隔壁を分割構造にする必要がないので、より簡単な構造で第２発明と同様の効果を奏する。   Another continuous film-forming apparatus of the present invention (third invention) is that the vacuum chamber is divided by a predetermined dividing surface, and is composed of a fixed-side chamber portion and a moving-side chamber portion. Similar to the film forming apparatus, the partition wall forming the inside of the vacuum chamber does not have a divided structure, and the moving side chamber portion is opened and closed with respect to the fixed side chamber portion. And the dividing end of the fixed chamber portion, the inner surface of the moving chamber portion, and the end of the partition wall are provided so as to contact and separate from each other via a sealing material. According to this continuous film forming apparatus, since it is not necessary to make the partition wall into a divided structure, the effect similar to that of the second invention can be achieved with a simpler structure.

前記第１から第３発明の連続成膜装置において、前記移動側チャンバ部と固定側チャンバ部とはヒンジ機構によって開閉自在に設けることができる。ヒンジ機構という簡単な機構により、移動側チャンバ部を固定側チャンバ部に容易に開閉することができ、装置構造をより簡単化することができ、またより省スペース化を図ることができる。   In the continuous film forming apparatus according to any one of the first to third aspects of the invention, the moving side chamber portion and the stationary side chamber portion can be provided to be opened and closed by a hinge mechanism. By a simple mechanism called a hinge mechanism, the moving side chamber can be easily opened and closed to the fixed side chamber, so that the structure of the apparatus can be further simplified, and further space saving can be achieved.

また、前記第１から第３発明の連続成膜装置において、前記固定側チャンバ部及び移動側チャンバ部には、排気管を備えた固定側真空ポンプおよび移動側真空ポンプが付設され、前記移動側真空ポンプの排気管と固定側真空ポンプの排気管とは、前記移動側チャンバ部が固定側チャンバ部に開閉する際にシール材を介して当接離反する構造とすることができる。これによって、移動側チャンバ部の開閉によって移動側真空ポンプの排気管を固定側真空ポンプの排気管に自動的に着脱することができ、排気管の配管を簡単化することができる。   In the continuous film-forming apparatus according to any one of the first to third aspects of the present invention, a fixed-side vacuum pump and a moving-side vacuum pump each having an exhaust pipe are attached to the fixed-side chamber portion and the moving-side chamber portion, The exhaust pipe of the vacuum pump and the exhaust pipe of the fixed-side vacuum pump can be configured to abut against each other via a sealing material when the moving-side chamber portion opens and closes to the fixed-side chamber portion. As a result, the exhaust pipe of the moving side vacuum pump can be automatically attached to and detached from the exhaust pipe of the fixed side vacuum pump by opening and closing the moving side chamber section, and the piping of the exhaust pipe can be simplified.

本発明の連続成膜措置によれば、真空チャンバ等を分割構造とし、移動側チャンバ部と固定側チャンバ部等をその分割端部がシール材を介して当接離反するように構成したので、少ない設置スペースで巻取りロール等の正面に広い作業スペースを取ることができ、ボビンの交換や各部メンテナンスの作業性に優れる。また、従来のように、真空チャンバの開閉に大掛かりな走行装置は不要であり、装置構成が簡単で済む。また、隔壁によって真空チャンバの内部を区画する場合においても、移動側チャンバ部の開閉の際、隔壁端部とシール材とは摺動しないため、シール材が摩耗し難く、成膜品質の劣化を防止することができる。   According to the continuous film forming measure of the present invention, the vacuum chamber or the like has a divided structure, and the movable side chamber portion and the fixed side chamber portion and the like are configured such that the divided end portions are in contact with and separated from each other via the sealing material. With a small installation space, a large work space can be taken in front of the take-up roll and the like, and the workability of exchanging bobbins and maintenance of each part is excellent. Further, unlike the conventional case, a large traveling device for opening and closing the vacuum chamber is unnecessary, and the device configuration is simple. In addition, even when the inside of the vacuum chamber is partitioned by the partition walls, the end portions of the partition walls and the sealing material do not slide when the moving side chamber portion is opened and closed, so that the sealing material is not easily worn and the film quality is deteriorated. Can be prevented.

以下、本発明の連続成膜装置の実施形態を図面を参照して説明する。
図１及び図２は本発明の第１実施形態に係る連続成膜装置の平面図及び正面側断面図（図１のＡ−Ａ線断面図）を示している。
この連続成膜装置は、真空チャンバ１を備え、前記真空チャンバ１内には成膜ロール３と、前記成膜ロール３に巻き掛けられた帯状フィルム（被成膜基材）に機能性薄膜を成膜するスパッタリング用カソードボックス４（成膜ユニット）と、前記帯状フィルムを前記成膜ロール３に供給する巻出しロール６及び成膜後の帯状フィルムを巻き取る巻取りロール７、その他の補助ロールが収容されている。前記真空チャンバ１は下部フレーム２に載置され、中空状かつ正面視方形状の胴部１１と、その後端及び前端を閉塞する後端壁１２及び前端壁１３を備える。前記成膜ロール３、巻出しロール６、巻取りロール７等のロールは、各ロール軸が平行になるように後端壁１２の壁面と前端壁１３の壁面あるいは同壁面に付設されたロール支持板１４に回転自在に支持され、後端壁１２の背面に付設されたモータなどの駆動装置（図示省略）によって回転駆動される。 Hereinafter, embodiments of a continuous film forming apparatus of the present invention will be described with reference to the drawings.
1 and 2 show a plan view and a front side sectional view (sectional view taken along line AA in FIG. 1) of the continuous film forming apparatus according to the first embodiment of the present invention.
This continuous film forming apparatus includes a vacuum chamber 1, and a functional thin film is formed on a film forming roll 3 and a belt-like film (film forming substrate) wound around the film forming roll 3 in the vacuum chamber 1. Cathode box 4 for sputtering (deposition unit) for film formation, unwinding roll 6 for feeding the strip-shaped film to the deposition roll 3, winding roll 7 for winding the strip-shaped film after deposition, and other auxiliary rolls Is housed. The vacuum chamber 1 is placed on the lower frame 2 and includes a hollow body 11 having a frontal shape and a rear end wall 12 and a front end wall 13 that close the rear end and the front end . Rolls such as the film forming roll 3, the unwinding roll 6, and the winding roll 7 are roll supports attached to the wall surface of the rear end wall 12 and the wall surface of the front end wall 13 or the same wall surface so that the roll axes are parallel to each other. The plate 14 is rotatably supported and is driven to rotate by a driving device (not shown) such as a motor attached to the back surface of the rear end wall 12.

前記補助ロールは、巻出しロール６及び巻取りロール７の近傍に設けられたフリーロール８Ａ，８Ｂと、成膜ロール３側に設けられたフリーロール１０Ａ，１０Ｂと、これらのフリーロール８Ａ，１０Ａ及び８Ｂ，１０Ｂの間に設けられ、帯状フィルムの張力をロードセルなどの圧力センサーによって検出する張力検出ロール９Ａ，９Ｂを含んでいる。帯状フィルムの表面に成膜するに際し、前記巻出しロール６には帯状フィルムがコイル状に巻き取られたボビンが装着され、一方巻取りロール７には空のボビンが装着される。前記巻出しロール６のボビンから巻き出された帯状フィルムは、フリーロール８Ａ、張力検出ロール９Ａ、フリーロール１０Ａを介して成膜ロール３に巻き掛けられ、成膜ロール３の回転によって連続的に巻き出され、成膜ロール３の外周面上で成膜された後、フリーロール１０Ｂ、張力検出ロール９Ｂ、フリーロール８Ｂを介して巻取りロール７に巻き取られる。前記成膜ロール３は定速モータで駆動されており、前記巻戻しロール６及び巻取りロール７は張力検出ロール９Ａ，９Ｂで検出された張力によって同ロールを駆動するモータのトルクをフィードバック制御し、帯状フィルムが一定張力、一定送り速度で搬送される。   The auxiliary roll includes free rolls 8A and 8B provided in the vicinity of the unwinding roll 6 and the take-up roll 7, free rolls 10A and 10B provided on the film forming roll 3 side, and these free rolls 8A and 10A. And tension detecting rolls 9A and 9B that are provided between 8B and 10B and detect the tension of the belt-like film by a pressure sensor such as a load cell. When the film is formed on the surface of the belt-like film, a bobbin obtained by winding the belt-like film into a coil shape is attached to the unwinding roll 6, while an empty bobbin is attached to the winding roll 7. The belt-like film unwound from the bobbin of the unwinding roll 6 is wound around the film forming roll 3 through the free roll 8A, the tension detecting roll 9A, and the free roll 10A, and continuously by the rotation of the film forming roll 3. After being unwound and deposited on the outer peripheral surface of the film forming roll 3, the film is wound on the winding roll 7 via the free roll 10B, the tension detecting roll 9B, and the free roll 8B. The film forming roll 3 is driven by a constant speed motor, and the rewinding roll 6 and the winding roll 7 feedback control the torque of the motor that drives the roll by the tension detected by the tension detecting rolls 9A and 9B. The belt-like film is conveyed at a constant tension and a constant feed speed.

一方、前記真空チャンバ１の内部は、前記巻出しロール６、巻取りロール７及び補助ロールが配置されたロール室１６と、前記カソードボックス４がそれぞれ配置された左右の成膜室１７，１７が隔壁によって区画形成されている。前記隔壁は、筒状隔壁２０と、筒状隔壁２０の上部に設けられ、前記ロール室１６を区画形成する横隔壁２１（後述するように左横隔壁２２及び右横隔壁２３とで構成される。）と、筒状隔壁２０の下部に設けられ、前記左右の成膜室１７，１７を区画形成する縦隔壁２４、２４とで構成される。   On the other hand, the inside of the vacuum chamber 1 includes a roll chamber 16 in which the unwinding roll 6, a winding roll 7 and an auxiliary roll are disposed, and left and right film forming chambers 17 and 17 in which the cathode box 4 is disposed. A partition is formed by a partition wall. The partition wall is composed of a cylindrical partition wall 20 and a horizontal partition wall 21 provided above the cylindrical partition wall 20 and defining the roll chamber 16 (a left lateral partition wall 22 and a right lateral partition wall 23 as will be described later). )) And vertical partition walls 24, 24 provided below the cylindrical partition wall 20 and defining the left and right film forming chambers 17, 17.

前記筒状隔壁２０は、成膜ロール３の周りに数mmの間隙を空けて配置され、一端が後端壁１２に、他端中央部が前端壁１３の中央部に接合される。また、図３に示すように、大略円筒状であり、上側の左右に長さ方向に開口した第１、第２スリット３１，３２が、下部に長さ方向に開口した第３スリットが設けられ、また上部に基材を成膜ロール３へ巻き出し、巻き取るための巻出し巻取り用開口３４、下側の左右に成膜部用開口３５，３５が開設されている。また、前記成膜部用開口３５，３５のカソード側に、図２に示すように、被覆成膜領域を開口部のみに制限するマスク３６，３６が付設される。   The cylindrical partition wall 20 is disposed around the film forming roll 3 with a gap of several millimeters, and one end is joined to the rear end wall 12 and the other end central part is joined to the central part of the front end wall 13. Further, as shown in FIG. 3, the first and second slits 31 and 32 that are generally cylindrical and open in the length direction are provided on the upper left and right sides, and the third slit that is opened in the length direction is provided in the lower part. In addition, an unwinding and winding opening 34 for unwinding and winding the base material onto the film forming roll 3 is formed at the upper part, and film forming part openings 35 and 35 are formed on the lower left and right. Further, as shown in FIG. 2, masks 36 and 36 are provided on the cathode side of the film forming part openings 35 and 35 to limit the coating film forming region to only the opening part.

前記横隔壁２１は、筒状隔壁２０の上部に左右かつ上下二段に水平に延設された上下二段の左横隔壁２２、２２及び右横隔壁２３、２３とで構成される。前記左横隔壁２２及び右横隔壁２３は、その後端部が後端壁１２に接合され、側端部の一方が前記筒状隔壁２０の外周に接合され、他方が真空チャンバ１の胴部１１側壁の内面に接合される。前記縦隔壁２４，２４は、前記筒状隔壁２０の下部に並設され、一端が前記筒状隔壁２０の外周面に接続され、他端が真空チャンバ１の胴部１１の下壁内面に接合される。前記左横隔壁２２の上下隔壁の間、前記右横隔壁２３の上下隔壁の間及び縦隔壁２４の左右隔壁の間にはそれぞれ第１，第２，第３圧力隔壁室２６，２７，２８（これらをまとめて「圧力隔壁室」という場合がある。）が形成され、これらの圧力隔壁室は前記筒状隔壁２０の第１スリット３１、第２スリット３２、第３スリット３３及び成膜ロール３の側面と後端壁１２内面および前端壁１３内面との隙間を通して互いに連通している。このように、ロール室１６、左右の成膜室１７，１７をそれぞれ前記圧力隔壁室にて分離することで、各室の雰囲気の独立性が高まり、成膜品質を向上させることができる。   The horizontal barrier rib 21 includes upper and lower left horizontal barrier ribs 22 and 22 and right horizontal barrier ribs 23 and 23 that extend horizontally on the upper and lower sides of the cylindrical barrier rib 20. The left lateral partition wall 22 and the right lateral partition wall 23 have rear end portions joined to the rear end wall 12, one side end portion joined to the outer periphery of the cylindrical partition wall 20, and the other end to the body portion 11 of the vacuum chamber 1. It is joined to the inner surface of the side wall. The vertical partition walls 24, 24 are juxtaposed below the cylindrical partition wall 20, one end is connected to the outer peripheral surface of the cylindrical partition wall 20, and the other end is bonded to the inner surface of the lower wall of the body 11 of the vacuum chamber 1. Is done. The first, second and third pressure partition chambers 26, 27, 28 (between the upper and lower partition walls of the left lateral partition wall 22, between the upper and lower partition walls of the right lateral partition wall 23 and between the left and right partition walls of the vertical partition wall 24, respectively. These may be collectively referred to as “pressure partition chambers”), and these pressure partition chambers are formed by the first slit 31, the second slit 32, the third slit 33 and the film forming roll 3 of the cylindrical partition wall 20. Are communicated with each other through a gap between the inner surface of the rear end wall 12 and the inner surface of the rear end wall 12 and the inner surface of the front end wall 13. In this way, by separating the roll chamber 16 and the left and right film forming chambers 17 and 17 in the pressure partition chamber, the independence of the atmosphere in each chamber is increased, and the film forming quality can be improved.

前記ロール室１６、左右の成膜室１７，１７及び第３圧力隔壁室２８は、各々ターボ分子ポンプなどの真空ポンプ３８の吸引口が開口しており、ロール室１６、圧力隔壁室、各成膜室１７，１７の圧力、ガス雰囲気は独立に制御される。前記真空ポンプ３８は後端壁１２や胴部１１側壁に付設され、それぞれ排気管３９が連結され、これらは集合排気管４０に連結されて図示省略した粗引き用真空ポンプに連通接続される。なお、図２において、排気管３９や集合排気管４０は図示省略されている。   The roll chamber 16, the left and right film forming chambers 17, 17 and the third pressure partition chamber 28 are each opened with a suction port of a vacuum pump 38 such as a turbo molecular pump. The pressure and gas atmosphere in the film chambers 17 and 17 are independently controlled. The vacuum pump 38 is attached to the rear end wall 12 and the side wall of the body 11 and is connected to an exhaust pipe 39, which is connected to a collective exhaust pipe 40 and connected to a roughing vacuum pump (not shown). In FIG. 2, the exhaust pipe 39 and the collective exhaust pipe 40 are not shown.

前記真空チャンバ１は、分割構造とされ、中央部に配置された固定側チャンバ部１Ｆと、前記固定側チャンバ部１Ｆの左右に配置された移動側チャンバ部１Ｍ，１Ｍとで構成される。前記固定側チャンバ部１Ｆの内部には、前記成膜ロール３、巻出しロール６、巻取りロール７、補助ロールを備え、その後端壁にはこれらのロールの駆動装置（図示省略）、ロール室１６及び圧力隔壁室用の真空ポンプ３８が付設される。一方、移動側チャンバ部１Ｍ，１Ｍの前端壁内側には、カソードボックス４が取り付けられ、胴部側壁には成膜室用真空ポンプ３８が付設される。また、前記筒状隔壁２０の前端中央部及び前記ロール支持板１４は、固定側チャンバ部１Ｆの前端壁に取り付けられる。なお、固定側チャンバ部１Ｆあるいは移動側チャンバ部１Ｍ，１Ｍにおける後端壁、前端壁、胴部は、真空チャンバ１の対応部材が分割された一部を意味する。 The vacuum chamber 1 has a divided structure, and includes a fixed chamber portion 1F disposed in the center and moving chamber portions 1M and 1M disposed on the left and right of the fixed chamber portion 1F. The fixed-side chamber portion 1F includes the film forming roll 3, the unwinding roll 6, the winding roll 7, and an auxiliary roll, and a drive device (not shown) for these rolls is provided on the rear end wall of the roll chamber. 16 and a vacuum pump 38 for the pressure bulkhead chamber. On the other hand, a cathode box 4 is attached to the inside of the front end walls of the moving side chamber portions 1M, 1M, and a film forming chamber vacuum pump 38 is attached to the barrel side wall . Moreover, the front end center part of the said cylindrical partition 20 and the said roll support plate 14 are attached to the front end wall of the fixed side chamber part 1F. The rear end wall, the front end wall, and the body portion of the fixed chamber portion 1F or the moving chamber portions 1M and 1M mean a part of the corresponding member of the vacuum chamber 1 divided.

また、前記上下二段の左横隔壁２２，２２及び右横隔壁２３，２３もそれぞれ分割構造とされ、前記固定側チャンバ部１Ｆに配置された上下二段の固定側左横隔壁部２２Ｆ，２２Ｆ及び固定側右横隔壁部２３Ｆ，２３Ｆと、左右の移動側チャンバ部１Ｍ、１Ｍに配置された移動側左横隔壁２２Ｍ，２２Ｍ及び移動側右横隔壁部２３Ｍ，２３Ｍとで構成される（図４参照）。   Further, the upper and lower two-stage left horizontal partition walls 22 and 22 and the right horizontal partition wall 23 and 23 are also divided, and the upper and lower two-stage fixed side left horizontal partition walls 22F and 22F arranged in the fixed side chamber section 1F. And fixed side right horizontal partition walls 23F and 23F, and left and right moving side chambers 1M and 1M are arranged in moving left side partition walls 22M and 22M and moving side right horizontal partition walls 23M and 23M (see FIG. 4).

前記固定側チャンバ部１Ｆと移動側チャンバ部１Ｍ，１Ｍ、並びに固定側左横隔壁部２２Ｆ，２２Ｆと移動側左横隔壁部２２Ｍ，２２Ｍ、固定側右横隔壁部２３Ｆ，２３Ｆと移動側右横隔壁部２３Ｍ，２３Ｍとは、前記真空チャンバ１の後端壁１２の左右の側端と胴部１１の後端側の左右の側端の交叉部と、前端壁１３の幅中心から左右に壁幅の１／８〜１／４程度離れた部位で、前端壁１３の上端及び下端を通る二つの分割平面Ｄ，Ｄによって前記真空チャンバ１並びに左横隔壁２２，２２及び右横隔壁２３，２３が分割されたものである。前記分割平面Ｄは、図例では胴部１１の後端側の側端と後端壁１２の側端との交叉部を通るようにしたが、後端壁１２の側端付近あるいは胴部１１の後端壁１２側の側端付近を通るようにしてもよく、要は巻出しロール６あるいは巻取りロール７のボビン交換に支障がない部位で胴部１１あるいは後端壁１２が分割されればよい。 The fixed chamber portion 1F, the moving chamber portions 1M, 1M, the fixed left lateral partition portion 22F, 22F, the moving left lateral partition portion 22M, 22M, the fixed right lateral partition portion 23F, 23F, and the moving right side The partition walls 23M and 23M are the left and right side walls of the rear end wall 12 of the vacuum chamber 1, the intersection of the left and right side ends of the rear end side of the body 11, and the left and right walls from the width center of the front end wall 13. The vacuum chamber 1, the left horizontal partition walls 22, 22 and the right horizontal partition walls 23, 23 are separated by two divided planes D, D passing through the upper end and the lower end of the front end wall 13 at a site about 1/8 to 1/4 of the width. Is divided. In the illustrated example, the dividing plane D passes through the intersection of the side end on the rear end side of the body portion 11 and the side end of the rear end wall 12, but it is near the side end of the rear end wall 12 or the body portion 11. The rear end wall 12 may pass through the vicinity of the side end. In short, the body 11 or the rear end wall 12 is divided at a portion where the bobbin replacement of the unwinding roll 6 or the winding roll 7 is not hindered. That's fine.

前記移動側チャンバ部１Ｍ，１Ｍは、固定側チャンバ部１Ｆの前端壁の外面に設けられたヒンジ機構、すなわち回動軸４２および支持金具４３によって固定側チャンバ部１Ｆに対して開閉自在とされている。そして、前記移動側チャンバ部１Ｍを固定側チャンバ部１Ｆ側に回動させることにより、前記固定側チャンバ部１Ｆと移動側チャンバ部１Ｍの分割端部、並びに前記固定側左横隔壁部２２Ｆ，２２Ｆと移動側左横隔壁部２２Ｍ，２２Ｍ、前記固定側右横隔壁部２３Ｆ，２３Ｆと移動側右横隔壁部２３Ｍ，２３Ｍの分割端部、筒状隔壁２０の前端の左右露出部と移動側チャンバ部１Ｍ，１Ｍの前端壁内面をそれぞれシール材（図示省略）を介して相互に当接させる。これによって、当接部はそれぞれ気密に連結される。
また、移動側チャンバ部１Ｍが固定側チャンバ部１Ｆに当接し、気密に一体化した状態から、移動側チャンバ部１Ｍを固定チャンバ部１Ｆから離反するように回動させることにより、移動側チャンバ部１Ｍは固定側チャンバ部１Ｆから離反して分離され、固定側チャンバ部１Ｆの両側が解放される。
また、成膜室用の真空ポンプ３８の排気管３９も、真空チャンバ１の分割面に沿ってシール材を介して当接離反自在に分割され、移動側チャンバ部１Ｍの開閉により気密に連結分離される。
なお、各分割端部（当接離反部）には、必要に応じて当接幅を広くするフランジ部を形成し、これにシール材を付設するようにしてもよい。もっとも、真空チャンバ１の分割端面は、前端壁１３や胴部１１の側壁を形成する壁材自体が数十mmの厚さがあるので、前記フランジ部を設けるには及ばない。また、本発明では分割端部同士は当接離反し、摺動することがないので、分割端部に付設されるシール材は、従来のような隔壁端部と係合する凹部は不要であり、断面形状が丸形や角形などの単純形状のもので十分である。 The moving-side chamber portions 1M, 1M can be opened and closed with respect to the fixed-side chamber portion 1F by a hinge mechanism provided on the outer surface of the front end wall of the fixed-side chamber portion 1F, that is, by the rotating shaft 42 and the support fitting 43. Yes. Then, by rotating the moving side chamber portion 1M toward the fixed side chamber portion 1F, the divided end portions of the fixed side chamber portion 1F and the moving side chamber portion 1M, and the fixed side left lateral partition wall portions 22F, 22F. And left and right moving partition walls 22M and 22M, split end portions of the fixed and right lateral partition walls 23F and 23F and the moving right lateral partition walls 23M and 23M, left and right exposed portions of the front end of the cylindrical partition wall 20, and the moving chamber. The inner surfaces of the front end walls of the portions 1M and 1M are brought into contact with each other via a sealing material (not shown). Thereby, each contact part is connected airtightly.
Further, the moving side chamber portion 1M is brought into contact with the fixed side chamber portion 1F, and the moving side chamber portion 1M is rotated away from the fixed chamber portion 1F from an airtight integrated state, thereby moving the moving side chamber portion 1M. 1M is separated from the fixed-side chamber portion 1F, and both sides of the fixed-side chamber portion 1F are released.
Further, the exhaust pipe 39 of the vacuum pump 38 for the film forming chamber is also divided into contact and separation along the dividing surface of the vacuum chamber 1 through a sealing material, and is connected and separated in an airtight manner by opening and closing the moving side chamber portion 1M. Is done.
It should be noted that a flange portion that increases the contact width may be formed on each divided end portion (contact / separation portion) as necessary, and a sealing material may be attached thereto. However, since the wall material itself which forms the side wall of the front end wall 13 and the trunk | drum 11 has a thickness of several tens of mm, the division | segmentation end surface of the vacuum chamber 1 does not need to provide the said flange part. Further, in the present invention, the divided end portions are in contact with and separated from each other and do not slide, so that the sealing material attached to the divided end portion does not need a concave portion that engages with the partition wall end portion as in the prior art. A simple shape such as a round shape or a square shape is sufficient.

この連続成膜装置の動作、操作について説明する。
前記移動側チャンバ部１Ｍ，１Ｍを固定側チャンバ部１Ｆに連結一体化して真空チャンバ１を構成した状態において、巻出しロール６に装着されたボビンに巻き取られた未処理の帯状フィルムは、巻出しロール６の回転によってボビンから巻き出され、フリーロール８Ａ、張力検出ロール９Ａ、フリーリール１０Ａを介して、筒状隔壁２０の上部に開設された巻出し巻取り用開口３４から成膜ロール３に巻き掛けられ、成膜ロール３の回転によって連続的にボビンより巻き出され、成膜ロール３の外周上で成膜された後、前記巻出し巻取り用開口３４からフリーロール１０Ｂ、張力検出ロール９Ｂ、フリーロール８Ｂを介して巻取りロール７に装着されたボビンに巻き取られる。前記成膜ロール３の外周に設けられた筒状隔壁２０には、左右の成膜室１７，１７に開口するように成膜部用開口３５，３５が設けられており、アルゴンガスなどの所定の雰囲気とされた成膜室１７に設けられたカソードボックス４に高電圧を印加することにより、カソードボックス４に保持されたターゲットの一部がマスク３６を介して成膜ロール３の表面に保持された帯状フィルムの表面にスパッタリングされ、機能性薄膜が形成される。 The operation and operation of this continuous film forming apparatus will be described.
In the state in which the moving chamber portions 1M and 1M are connected and integrated with the fixed chamber portion 1F to form the vacuum chamber 1, the untreated strip film wound around the bobbin attached to the unwinding roll 6 is wound. The film forming roll 3 is unwound from the bobbin by the rotation of the unwinding roll 6, and from the unwinding / winding opening 34 provided in the upper part of the cylindrical partition wall 20 through the free roll 8A, the tension detecting roll 9A, and the free reel 10A. The film is continuously unwound from the bobbin by the rotation of the film-forming roll 3 and formed on the outer periphery of the film-forming roll 3, and then the free roll 10B and the tension are detected from the unwinding and winding opening 34. It is wound up on a bobbin attached to the winding roll 7 via a roll 9B and a free roll 8B. The cylindrical partition wall 20 provided on the outer periphery of the film forming roll 3 is provided with film forming part openings 35 and 35 so as to open to the left and right film forming chambers 17 and 17. By applying a high voltage to the cathode box 4 provided in the film forming chamber 17 in the atmosphere, a part of the target held in the cathode box 4 is held on the surface of the film forming roll 3 through the mask 36. A functional thin film is formed by sputtering on the surface of the strip-shaped film.

前記巻取りロール７に装着されたボビンが成膜済みの帯状フィルムで満たされると、装置を一旦停止し、真空チャンバ内を大気圧に戻して、図４に示すように、左右の移動側チャンバ部１Ｍ，１Ｍを固定側チャンバ部１Ｆから離反させて分離し、固定側チャンバ部１Ｆの両側を解放する。そして、巻出しロール６、巻取りロール７のボビンの交換や通紙作業を行い、また必要に応じて、ターゲットの交換を行った後、再び移動側チャンバ部１Ｍ，１Ｍを固定側チャンバ部１Ｆに気密に連結一体化し、真空チャンバ内を真空排気した後、再び成膜を行う。また、移動側チャンバ部を解放することにより、上記の通常作業のほか、定期的あるいは必要に応じてロールの交換や、カソードのメンテナンス、チャンバ内の清掃等が行われる。   When the bobbin mounted on the take-up roll 7 is filled with the film-formed belt film, the apparatus is temporarily stopped, the inside of the vacuum chamber is returned to the atmospheric pressure, and the left and right moving side chambers as shown in FIG. The parts 1M and 1M are separated from the fixed side chamber part 1F, and the both sides of the fixed side chamber part 1F are released. Then, the bobbin of the unwinding roll 6 and the take-up roll 7 is exchanged and the paper passing operation is performed, and after the target is exchanged as necessary, the moving side chamber portions 1M and 1M are again connected to the fixed side chamber portion 1F. After the vacuum chamber is evacuated, the film is formed again. Further, by releasing the moving-side chamber portion, in addition to the above-described normal operation, roll replacement, cathode maintenance, cleaning of the chamber, and the like are performed regularly or as necessary.

上記連続成膜装置では、設置スペースが少ない割には巻出しロール６、巻取りロール７、カソードボックス４の正面に広い作業スペースを取ることができる。また、移動側チャンバ部１Ｍと固定側チャンバ部１Ｆとは簡単なヒンジ機構で開閉自在とされるので、従来のように、大掛かりな走行装置は不要であり、装置構成が簡単化される。また、移動側チャンバ部１Ｍの開閉の際、移動側チャンバ部１Ｍと固定側チャンバ部１Ｆ、移動側横隔壁部２２Ｍ，２３Ｍと固定側横隔壁部２２Ｆ，２３Ｆの分割端部は、互いにシール材を介して当接離反し、摺動することがないので、分割端部に設けたシール材が摩耗し難く、成膜品質の劣化を防止することができる。   In the continuous film forming apparatus, a large work space can be provided in front of the unwinding roll 6, the winding roll 7, and the cathode box 4 for a small installation space. Further, since the moving side chamber portion 1M and the fixed side chamber portion 1F can be opened and closed by a simple hinge mechanism, there is no need for a large traveling device as in the prior art, and the device configuration is simplified. Further, when the moving side chamber portion 1M is opened and closed, the divided end portions of the moving side chamber portion 1M and the fixed side chamber portion 1F, the moving side horizontal partition portions 22M and 23M, and the fixed side horizontal partition portions 22F and 23F are mutually sealed. Therefore, the sealing material provided at the divided end portion is not easily worn, and deterioration of the film forming quality can be prevented.

上記実施形態では、移動側チャンバ部１Ｍの開閉機構としてヒンジ機構を採用したが、これに限らず、図５に示すように、移動側チャンバ部１Ｍをシリンダ等を駆動源とする直線移動機構によって固定側チャンバ部１Ｆの前後方向に進退させるようにしてもよい。この場合、従来のように、カソードボックスを取り付けた前端壁ごと移動させる必要がないので、従来のように大掛かりな走行装置は不要であり、また従来に比して設置スペースも少なくて済む。 In the above embodiment, the hinge mechanism is adopted as the opening / closing mechanism of the moving chamber portion 1M. However, the present invention is not limited to this, and as shown in FIG. 5, the moving chamber portion 1M is driven by a linear moving mechanism using a cylinder or the like as a drive source. You may make it advance / retreat to the front-back direction of the stationary-side chamber part 1F. In this case, since it is not necessary to move the front end wall to which the cathode box is attached as in the prior art, a large traveling device as in the prior art is unnecessary, and the installation space can be reduced as compared with the prior art.

また、上記実施形態では、真空チャンバ１のみならず、上下二段の左横隔壁２２，２２、右横隔壁２３，２３も二つの分割平面Ｄ，Ｄに沿って分割した構造としたが、図６の第２実施形態に示すように、左横隔壁２２，右横隔壁２３は必ずしも分割構造にする必要はなく、一体物のままで固定側チャンバ部１Ｆの後端壁内面、筒状隔壁２０の外側面に接合するようにしてもよい。この場合、移動側チャンバ部１Ｍの開閉に応じて、左横隔壁２２，右横隔壁２３の側端部及び前端部は、移動側チャンバ部１Ｍの胴部側壁の内面、前端壁１３の内面とシール材を介して当接離反するようにすればよい。なお、第２実施形態において、第１実施形態と同様の構成は同符合が付されている。
図６の第２実施形態の場合においても、移動側チャンバ部１Ｍの開閉機構は、図例のヒンジ機構に限らず、図７に示すように、固定側チャンバ部１Ｆの前後方向に対して斜め方向に移動側チャンバ部１Ｍを直線的に移動させるようにしてもよく、これにより移動側チャンバ部１Ｍの内面に設けたシール材と、左横隔壁２２，右横隔壁２３の側端部及び前端部との摺動を防止することができる。
また、上記第１、第２実施形態では、移動側チャンバ部１Ｍのヒンジ機構を前端壁１３側に設けたが、図８に示すように後端壁１２側に設けてもよい。この場合、チャンバのメンテナンススペースは若干大きくなるが、チャンバ内部のメンテナンス作業性はより向上する。 In the above embodiment, not only the vacuum chamber 1 but also the left and right upper left partition walls 22 and 22 and the right horizontal partition walls 23 and 23 are divided along two divided planes D and D. As shown in the second embodiment of FIG. 6, the left horizontal partition wall 22 and the right horizontal partition wall 23 do not necessarily need to be divided structures, and the inner wall of the rear end wall of the fixed chamber portion 1F and the cylindrical partition wall 20 are not necessarily divided. You may make it join to the outer surface of. In this case, according to the opening and closing of the moving side chamber portion 1M, the side and front end portions of the left horizontal partition wall 22 and the right horizontal partition wall 23 are connected to the inner surface of the trunk side wall and the inner surface of the front end wall 13 of the moving side chamber portion 1M. What is necessary is just to make it contact / separate via a sealing material. Note that in the second embodiment, the same configurations as those in the first embodiment are denoted by the same reference numerals.
Also in the case of the second embodiment in FIG. 6, the opening / closing mechanism of the moving-side chamber portion 1M is not limited to the hinge mechanism in the example shown in FIG. The moving chamber portion 1M may be moved linearly in the direction, whereby the sealing material provided on the inner surface of the moving chamber portion 1M and the side and front ends of the left horizontal partition wall 22 and the right horizontal partition wall 23 Sliding with the part can be prevented.
Moreover, in the said 1st, 2nd embodiment, although the hinge mechanism of the movement side chamber part 1M was provided in the front end wall 13 side, as shown in FIG. 8, you may provide in the rear end wall 12 side. In this case, the maintenance space of the chamber is slightly increased, but the maintenance workability inside the chamber is further improved.

また、本発明は上記実施形態のように真空チャンバ１が正面視方形に限らず、円形のものでもよく、また成膜室の個数も図例の２室に限らず、３室以上であってもよい。また、被成膜基材の走行経路も、図２のものに限らず、適宜の補助ロールを追加して任意の経路とすることができる。また、各室の区画には、前記実施形態のように圧力隔壁室を形成する必要はなく、単に隔壁によって区画してもよい。さらに、小型の連続成膜装置等の場合、ロール室と成膜室との間の隔壁を省略することもできる。   Further, in the present invention, the vacuum chamber 1 is not limited to a square in a front view as in the above embodiment, and may be circular, and the number of film forming chambers is not limited to two in the illustrated example, and is three or more. Also good. Further, the traveling path of the film formation substrate is not limited to that shown in FIG. 2, and an appropriate auxiliary roll can be added to form an arbitrary path. Moreover, it is not necessary to form a pressure partition chamber in the compartment of each chamber like the said embodiment, and you may partition only by a partition. Further, in the case of a small continuous film forming apparatus or the like, the partition between the roll chamber and the film forming chamber can be omitted.

また、上記実施形態は、隔壁（２２，２３，２４）によって真空チャンバの内部を区画形成したものであるが、隔壁を有しないタイプの連続成膜装置に対しても、真空チャンバを上記のように移動側チャンバ部と固定側チャンバ部との分割構造とすることにより、メンテナンス性、作業性に優れ、従来のような大掛かりな移動装置を省略することができる。   In the above embodiment, the inside of the vacuum chamber is partitioned by the partition walls (22, 23, 24). However, the vacuum chamber is also used for a continuous film forming apparatus of a type having no partition wall as described above. In addition, the split structure of the moving side chamber portion and the fixed side chamber portion is excellent in maintainability and workability, and a conventional large moving device can be omitted.

第１実施形態に係る連続成膜装置の全体平面図である。1 is an overall plan view of a continuous film forming apparatus according to a first embodiment. 同装置の要部断面（図１のＡ−Ａ線断面図）である。It is principal part cross section (AA sectional view taken on the line of FIG. 1) of the apparatus. 同装置の筒状隔壁の斜視図である。It is a perspective view of the cylindrical partition of the apparatus. 同装置の移動側チャンバ部をヒンジ機構を介して固定側チャンバ部から離反させて固定側チャンバ部の側面を解放した状態を示す全体平面図である。It is a whole top view showing the state where the movement side chamber part of the device was separated from the fixed side chamber part via a hinge mechanism, and the side of the fixed side chamber part was released. 移動側チャンバ部を固定側チャンバ部に対して進退させることで固定側チャンバ部を開閉するようにした第１実施形態の変形例の全体平面図である。It is the whole top view of the modification of 1st Embodiment which was made to open and close a stationary side chamber part by moving a moving side chamber part back and forth with respect to a stationary side chamber part. 第２実施形態に係る連続成膜装置（移動側チャンバ部解放）の全体平面図である。It is a whole top view of the continuous film-forming apparatus (moving side chamber part release) concerning 2nd Embodiment. 移動側チャンバ部を固定側チャンバ部に対して進退させることで固定側チャンバ部を開閉するようにした第２実施形態の変形例の全体平面図である。It is the whole top view of the modification of 2nd Embodiment which opened and closed the stationary side chamber part by advancing / retreating a movement side chamber part with respect to a stationary side chamber part. ヒンジ機構が後端壁側に設けられた実施形態に係る連続成膜装置の全体平面図である。It is the whole top view of the continuous film-forming apparatus which concerns on embodiment with which the hinge mechanism was provided in the rear end wall side. 従来の連続成膜装置の要部正面断面図である。It is principal part front sectional drawing of the conventional continuous film-forming apparatus.

符号の説明Explanation of symbols

１ 真空チャンバ
１Ｆ 固定側チャンバ部
１Ｍ 移動側チャンバ部
３ 成膜ロール
４ カソードボックス（成膜ユニット）
６ 巻出しロール
７ 巻取りロール
１１ 胴部
１２ 後端壁
１３ 前端壁
１６ ロール室
１７ 成膜室
２１ 横隔壁
２２ 左横隔壁
２３ 右横隔壁
３８ 真空ポンプ DESCRIPTION OF SYMBOLS 1 Vacuum chamber 1F Fixed side chamber part 1M Movement side chamber part 3 Film-forming roll 4 Cathode box (film-forming unit)
6 Unwinding roll 7 Winding roll 11 Body 12 Rear end wall 13 Front end wall 16 Roll chamber 17 Deposition chamber 21 Horizontal partition 22 Left lateral partition 23 Right lateral partition 38 Vacuum pump

Claims (5)

中空状の胴部と当該胴部の後端及び前端にそれぞれ配された後端壁及び前端壁を備えた真空チャンバと、前記真空チャンバ内に収容され、前記後端壁側より回転駆動される成膜ロールと、前記真空チャンバ内に収容され、前記成膜ロールに巻き掛けられた被成膜基材に成膜する成膜ユニットと、前記真空チャンバ内に収容され、前記被成膜基材を前記成膜ロールに供給する巻出しロール及び成膜後の被成膜基材を巻き取る巻取りロールとを備えた連続成膜装置であって、
前記真空チャンバは、前記後端壁の左側の側端部あるいは前記胴部の後端左側の側端部と前記前端壁の上端及び下端を通る分割面及び前記後端壁の右側の側端部あるいは前記胴部の後端右側の側端部と前記前端壁の上端及び下端を通る分割面との二つの分割面によって左右の移動側チャンバ部とそれらの間に配置された固定側チャンバ部とに三分割され、
前記固定側チャンバ部の前端壁と後端壁とによって前記成膜ロール、巻出しロール及び巻取りロールが回転自在に支持され、前記移動側チャンバ部に前記成膜ユニットが備えられ、
前記左右の移動側チャンバ部と固定側チャンバ部の分割端部がシール材を介して当接離反するように前記左右の移動側チャンバ部を前記固定側チャンバ部に開閉するように設けた、連続成膜装置。 A hollow body, a vacuum chamber having a rear end wall and a front end wall respectively disposed at a rear end and a front end of the body, and housed in the vacuum chamber and driven to rotate from the rear end wall side A film forming roll, a film forming unit for forming a film on a film forming substrate housed in the vacuum chamber and wound around the film forming roll, and a film forming substrate housed in the vacuum chamber, A continuous film forming apparatus provided with an unwinding roll for supplying the film forming roll to the film forming roll and a winding roll for winding the film-forming substrate after film formation,
The vacuum chamber includes a left side end portion of the rear end wall or a left end side end portion of the body portion, a split surface passing through an upper end and a lower end of the front end wall, and a right side end portion of the rear end wall. Alternatively, the left and right moving-side chamber portions and the fixed-side chamber portion disposed between the left and right moving side chamber portions by two dividing surfaces, that is, a side end portion on the right side of the rear end of the body portion and a dividing surface passing through the upper end and the lower end of the front end wall Divided into three,
The film forming roll, the unwinding roll, and the winding roll are rotatably supported by the front end wall and the rear end wall of the fixed side chamber portion , and the moving side chamber portion includes the film forming unit,
Continuously provided to open and close the left and right moving side chamber portions to the fixed side chamber portion so that the divided end portions of the left and right moving side chamber portions and the fixed side chamber portion are in contact with and separated from each other via a sealant. Deposition device. 中空状の胴部と当該胴部の後端及び前端にそれぞれ配された後端壁及び前端壁を備えた真空チャンバと、前記真空チャンバ内に収容され、前記後端壁側より回転駆動される成膜ロールと、前記真空チャンバ内に収容され、前記成膜ロールに巻き掛けられた被成膜基材に成膜する成膜ユニットと、前記真空チャンバ内に収容され、前記被成膜基材を前記成膜ロールに供給する巻出しロール及び成膜後の被成膜基材を巻き取る巻取りロールとを備えた連続成膜装置であって、
前記真空チャンバの内部は、前記巻出しロール及び巻取りロールが配置されたロール室と、前記成膜ユニットが配置された成膜室とが真空チャンバの内部に設けられた隔壁によって区画形成され、
前記真空チャンバは、前記後端壁の左側の側端部あるいは前記胴部の後端左側の側端部と前記前端壁の上端及び下端を通る分割面及び前記後端壁の右側の側端部あるいは前記胴部の後端右側の側端部と前記前端壁の上端及び下端を通る分割面との二つの分割面によって左右の移動側チャンバ部とそれらの間に配置された固定側チャンバ部とに三分割され、
前記隔壁は、前記二つの分割面によって前記固定側チャンバ部に配置された固定側隔壁部と、前記左右の移動側チャンバ部に配置された移動側隔壁部とに分割され、
前記固定側チャンバ部の前端壁と後端壁とによって前記成膜ロール、巻出しロール及び巻取りロールが回転自在に支持され、前記移動側チャンバ部に前記成膜ユニットが備えられ、
前記左右の移動側チャンバ部と固定側チャンバ部の分割端部並びに前記固定側隔壁部と移動側隔壁部の分割端部がそれぞれシール材を介して当接離反するように前記左右の移動側チャンバ部を固定側チャンバ部に対して開閉するように設けた、連続成膜装置。 A hollow body, a vacuum chamber having a rear end wall and a front end wall respectively disposed at a rear end and a front end of the body, and housed in the vacuum chamber and driven to rotate from the rear end wall side A film forming roll, a film forming unit for forming a film on a film forming substrate housed in the vacuum chamber and wound around the film forming roll, and a film forming substrate housed in the vacuum chamber, A continuous film forming apparatus provided with an unwinding roll for supplying the film forming roll to the film forming roll and a winding roll for winding the film-forming substrate after film formation,
The inside of the vacuum chamber is partitioned and formed by a partition provided inside the vacuum chamber, a roll chamber in which the unwinding roll and the take-up roll are arranged, and a film forming chamber in which the film forming unit is arranged,
The vacuum chamber includes a left side end portion of the rear end wall or a left end side end portion of the body portion, a split surface passing through an upper end and a lower end of the front end wall, and a right side end portion of the rear end wall. Alternatively, the left and right moving-side chamber portions and the fixed-side chamber portion disposed between the left and right moving side chamber portions by two dividing surfaces, that is, a side end portion on the right side of the rear end of the body portion and a dividing surface passing through the upper end and the lower end of the front end wall Divided into three,
The partition wall is divided into a fixed partition wall portion disposed in the fixed chamber portion by the two split surfaces, and a movable partition wall portion disposed in the left and right moving chamber portions,
The film forming roll, the unwinding roll, and the winding roll are rotatably supported by the front end wall and the rear end wall of the fixed side chamber portion , and the moving side chamber portion includes the film forming unit,
The left and right moving chambers are arranged such that the divided end portions of the left and right moving side chamber portions and the fixed side chamber portion and the divided end portions of the fixed side partition portion and the moving side partition portion are in contact with and separated from each other via a sealing material. A continuous film forming apparatus provided to open and close the part with respect to the fixed chamber part. 中空状の胴部と当該胴部の後端及び前端にそれぞれ配された後端壁及び前端壁を備えた真空チャンバと、前記真空チャンバ内に収容され、前記後端壁側より回転駆動される成膜ロールと、前記真空チャンバ内に収容され、前記成膜ロールに巻き掛けられた被成膜基材に成膜する成膜ユニットと、前記真空チャンバ内に収容され、前記被成膜基材を前記成膜ロールに供給する巻出しロール及び成膜後の被成膜基材を巻き取る巻取りロールとを備えた連続成膜装置であって、
前記真空チャンバの内部は、前記巻出しロール及び巻取りロールが配置されたロール室と、前記成膜ユニットが配置された成膜室とが真空チャンバの内部に配置された隔壁によって区画形成され、
前記真空チャンバは、前記後端壁の左側の側端部あるいは前記胴部の後端左側の側端部と前記前端壁の上端及び下端を通る分割面及び前記後端壁の右側の側端部あるいは前記胴部の後端右側の側端部と前記前端壁の上端及び下端を通る分割面との二つの分割面によって左右の移動側チャンバ部とそれらの間に配置された固定側チャンバ部とに三分割され、
前記固定側チャンバ部の前端壁と後端壁とによって前記成膜ロール、巻出しロール及び巻取りロールが回転自在に支持され、前記移動側チャンバ部に前記成膜ユニットが備えられ、前記隔壁が前記固定側チャンバ部に設けられ、
前記左右の移動側チャンバ部と固定側チャンバ部の分割端部並びに前記移動側チャンバ部の内面と前記隔壁の端部がそれぞれシール材を介して当接離反するように前記左右の移動側チャンバ部を固定側チャンバ部に対して開閉するように設けた、連続成膜装置。 A hollow body, a vacuum chamber having a rear end wall and a front end wall respectively disposed at a rear end and a front end of the body, and housed in the vacuum chamber and driven to rotate from the rear end wall side A film forming roll, a film forming unit for forming a film on a film forming substrate housed in the vacuum chamber and wound around the film forming roll, and a film forming substrate housed in the vacuum chamber, A continuous film forming apparatus provided with an unwinding roll for supplying the film forming roll to the film forming roll and a winding roll for winding the film-forming substrate after film formation,
The inside of the vacuum chamber is partitioned and formed by a partition wall in which a roll chamber in which the unwinding roll and the take-up roll are arranged and a film forming chamber in which the film forming unit is arranged are arranged inside the vacuum chamber,
The vacuum chamber includes a left side end portion of the rear end wall or a left end side end portion of the body portion, a split surface passing through an upper end and a lower end of the front end wall, and a right side end portion of the rear end wall. Alternatively, the left and right moving-side chamber portions and the fixed-side chamber portion disposed between the left and right moving side chamber portions by two dividing surfaces, that is, a side end portion on the right side of the rear end of the body portion and a dividing surface passing through the upper end and the lower end of the front end wall Divided into three,
The film forming roll, the unwinding roll, and the winding roll are rotatably supported by the front end wall and the rear end wall of the fixed side chamber section, the film forming unit is provided in the moving side chamber section, and the partition wall includes Provided in the fixed-side chamber,
The left and right moving chamber portions are arranged so that the divided end portions of the left and right moving side chamber portions and the fixed side chamber portion, and the inner surface of the moving side chamber portion and the end portions of the partition walls are in contact with and separated from each other via a sealing material. Is a continuous film forming apparatus provided so as to be opened and closed with respect to the stationary chamber portion. 前記移動側チャンバ部と固定側チャンバ部とはヒンジ機構によって開閉自在に設けられた、請求項１から３のいずれか１項に記載した、連続成膜装置。   4. The continuous film forming apparatus according to claim 1, wherein the moving-side chamber portion and the fixed-side chamber portion are provided to be freely opened and closed by a hinge mechanism. 前記固定側チャンバ部及び移動側チャンバ部には、排気管を備えた固定側真空ポンプおよび移動側真空ポンプが付設され、前記移動側真空ポンプの排気管と固定側真空ポンプの排気管とは、前記移動側チャンバ部が固定側チャンバ部に開閉する際にシール材を介して当接離反する、請求項１から４のいずれか１項に記載した、連続成膜装置。   The fixed-side chamber part and the moving-side chamber part are provided with a fixed-side vacuum pump and a moving-side vacuum pump provided with an exhaust pipe, and the exhaust pipe of the moving-side vacuum pump and the exhaust pipe of the fixed-side vacuum pump are: 5. The continuous film forming apparatus according to claim 1, wherein when the moving side chamber portion opens and closes to the fixed side chamber portion, the continuous film forming device contacts and separates via a sealing material.
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