JP4418651B2 - Defect detection method and apparatus - Google Patents

Defect detection method and apparatus Download PDF

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JP4418651B2
JP4418651B2 JP2003272439A JP2003272439A JP4418651B2 JP 4418651 B2 JP4418651 B2 JP 4418651B2 JP 2003272439 A JP2003272439 A JP 2003272439A JP 2003272439 A JP2003272439 A JP 2003272439A JP 4418651 B2 JP4418651 B2 JP 4418651B2
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照明 與語
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本発明は、プレス成形品等の3次元形状の被測定物の形状欠陥を光学的に検出する欠陥検出方法及びその装置に関する。   The present invention relates to a defect detection method and apparatus for optically detecting a shape defect of a three-dimensional object to be measured such as a press-formed product.

従来より、特許文献1にあるように、被測定物に格子パターンを投影し、被測定物の各部の高さ分布に応じて変形した格子像を撮影して、モアレ法やヘテロダイン法を用いて、この格子像から被測定物の3次元形状を光学的に測定する方法や装置が知られている。   Conventionally, as disclosed in Patent Document 1, a lattice pattern is projected onto a measurement object, a lattice image deformed according to the height distribution of each part of the measurement object is photographed, and a moire method or a heterodyne method is used. There are known methods and apparatuses for optically measuring the three-dimensional shape of an object to be measured from this lattice image.

モアレ法では変形格子像に基準格子を重ねることにより被測定物の高さ分布の等高線を与えるモアレ縞を発生させて高さ分布を求めている。ヘテロダイン法では基準格子を無変調の空間的キャリア周波数信号と考え、変形格子像を空間的に位相変調されたキャリア信号とみなして変形量を位相として検出することにより被測定物の高さ分布を求めている。
特開平10−246612号公報
In the moire method, the height distribution is obtained by generating moire fringes that give contour lines of the height distribution of the object to be measured by superimposing a reference lattice on the deformed lattice image. In the heterodyne method, the reference grating is considered as an unmodulated spatial carrier frequency signal, the deformation grating image is regarded as a spatially phase-modulated carrier signal, and the amount of deformation is detected as the phase to detect the height distribution of the object to be measured. Looking for.
Japanese Patent Laid-Open No. 10-246612

しかしながら、こうした従来の方法や装置では、被測定物の欠陥があるかどうか、例えば、被測定物がプレス成形品である場合、その表面にプレス加工時に金型と素材との間に侵入した異物による窪み等の欠陥があるかどうか、被測定物の各部の高さ分布を示す測定値からは簡単に判断することができないという問題があった。   However, in these conventional methods and apparatuses, whether or not there is a defect in the object to be measured, for example, when the object to be measured is a press-molded product, foreign matter that has entered the surface between the mold and the material at the time of pressing. There is a problem that it cannot be easily determined from the measured values indicating the height distribution of each part of the object to be measured whether there is a defect such as a dent due to.

本発明の課題は、被測定物の欠陥を簡単に検出できる欠陥検出方法及びその装置を提供することにある。   An object of the present invention is to provide a defect detection method and apparatus capable of easily detecting a defect of an object to be measured.

かかる課題を達成すべく、本発明は課題を解決するため次の方法、手段を取った。即ち、
3次元形状の被測定物の形状の欠陥を光学的に検出し、また、前記被測定物はプレス成形品で、プレス成形の際に金型と素材との間に侵入した異物により発生する前記欠陥を検出する欠陥検出方法において、
前記被測定物に格子パターンを投影して、この格子像を撮影してから、前記被測定物を相対的に平行移動し、再び前記被測定物に格子パターンを投影して、この格子像を撮影し、前記二つの格子像を重ね合わせて、前記二つの格子像のずれにより格子が太く表れた場所を欠陥として検出することを特徴とする欠陥検出方法がそれである。
In order to achieve this problem, the present invention has taken the following methods and means in order to solve the problem. That is,
A defect in the shape of the three-dimensional object to be measured is optically detected, and the object to be measured is a press-molded product, which is generated by a foreign matter that has entered between the mold and the material during press molding. In the defect detection method for detecting defects,
After projecting a lattice pattern on the object to be measured and photographing the lattice image, relatively moving the object to be measured, projecting the lattice pattern onto the object to be measured again, This is a defect detection method characterized in that the two lattice images are photographed and the two lattice images are overlapped to detect as a defect a location where the lattice appears thick due to a shift between the two lattice images.

また、3次元形状の被測定物の形状の欠陥を光学的に検出し、また、前記被測定物はプレス成形品で、プレス成形の際に金型と素材との間に侵入した異物により発生する前記欠陥を検出する欠陥検出装置において、In addition, optically detect the shape defect of the three-dimensional object to be measured, and the object to be measured is a press-molded product, which is caused by foreign matter that has entered between the mold and the material during press molding. In the defect detection apparatus for detecting the defect,
前記被測定物に格子パターンを投影する投影手段と、  Projecting means for projecting a lattice pattern onto the object to be measured;
前記投影手段が投影した格子像を撮影する撮影手段と、  Photographing means for photographing a lattice image projected by the projection means;
前記被測定物と前記投影手段及び前記撮影手段とを相対的に平行移動する移動手段と、  Moving means for relatively translating the object to be measured and the projecting means and the photographing means;
前記移動手段による移動の前後で、前記投影手段により投影した格子パターンを前記撮影手段により撮影した二つの格子像を重ね合わせ、フィルタ処理で前記二つの格子像のずれにより格子が太く表れた場所を欠陥として検出する検出制御手段と、  Before and after the movement by the moving means, two lattice images obtained by photographing the lattice pattern projected by the projecting means are superimposed, and a place where the lattice appears thick due to the displacement of the two lattice images by the filtering process. Detection control means for detecting as a defect;
を備えたことを特徴とする欠陥検出装置がそれである。This is a defect detection apparatus characterized by comprising:

前記移動手段は、前記被測定物を平行に移動するように構成してもよい。
The moving means may be configured to move the object to be measured in parallel.

以上詳述したように本発明の欠陥検出方法及びその装置によると、被測定物を相対的に平行移動して、その前後で撮影した格子像を重ね合わせることにより、容易に欠陥を検出できるという効果を奏する。   As described above in detail, according to the defect detection method and apparatus of the present invention, it is possible to easily detect defects by relatively moving the object to be measured and superimposing the lattice images taken before and after the object. There is an effect.

以下本発明の実施するための最良の形態を図面に基づいて詳細に説明する。
図1に示すように、1は欠陥検出装置で、欠陥検出装置1は光源2を備え、光源2からの光はミラー4で反射された後、格子パターン6に照射される。格子パターン6は投影レンズ8により被測定物10上に投影される。本実施形態では、被測定物10は、プレス加工により形成されたプレス成形品で、例えば、自動車のボディ等である。
The best mode for carrying out the present invention will be described below in detail with reference to the drawings.
As shown in FIG. 1, reference numeral 1 denotes a defect detection device. The defect detection device 1 includes a light source 2, and light from the light source 2 is reflected by a mirror 4 and then irradiated to a lattice pattern 6. The lattice pattern 6 is projected onto the object to be measured 10 by the projection lens 8. In the present embodiment, the DUT 10 is a press-formed product formed by pressing, and is, for example, an automobile body.

格子パターン6の被測定物10上の格子像は、結像レンズ12によりイメージセンサ14上に結像される。イメージセンサ14からの画像データは画像処理回路16に入力される。本実施形態では、このイメージセンサ14により撮影範囲は、200mm×200mmである。画像処理回路16は、被測定物10の3次元形状を光学的に測定し、その分解能は結像レンズ12とイメージセンサ14とを結ぶ光軸方向で10μm程度である。   A lattice image of the lattice pattern 6 on the DUT 10 is imaged on the image sensor 14 by the imaging lens 12. Image data from the image sensor 14 is input to the image processing circuit 16. In the present embodiment, the imaging range by the image sensor 14 is 200 mm × 200 mm. The image processing circuit 16 optically measures the three-dimensional shape of the DUT 10 and has a resolution of about 10 μm in the optical axis direction connecting the imaging lens 12 and the image sensor 14.

被測定物10は、移動機構18上に載置されており、移動機構18は被測定物10を平行に移動することができるものである。本実施形態では、結像レンズ12とイメージセンサ14とを結ぶ光軸は、被測定物10と垂直になるように配置されており、移動機構18はこの光軸と直交する方向に平行に移動するように構成されている。   The DUT 10 is placed on the moving mechanism 18, and the moving mechanism 18 can move the DUT 10 in parallel. In the present embodiment, the optical axis connecting the imaging lens 12 and the image sensor 14 is arranged to be perpendicular to the object to be measured 10, and the moving mechanism 18 moves in a direction perpendicular to the optical axis. Is configured to do.

次に、前述した本実施形態の欠陥検出装置の作動について、画像処理回路16で行われる検出制御処理と共に、図2に示すフローチャートによって説明する。
まず、格子パターン6を光源2からの光により投影レンズ8を介して被測定物10上に投影する(ステップ100)。格子パターン6は、被測定物10の3次元形状に応じて変形した格子像となる。この格子像を結像レンズ12を介してイメージセンサ14により撮影する(ステップ110)。
Next, the operation of the above-described defect detection apparatus of the present embodiment will be described with reference to the flowchart shown in FIG.
First, the grid pattern 6 is projected onto the object 10 via the projection lens 8 by the light from the light source 2 (step 100). The lattice pattern 6 becomes a lattice image deformed according to the three-dimensional shape of the DUT 10. This lattice image is taken by the image sensor 14 through the imaging lens 12 (step 110).

図3(イ)に示すように、被測定物10の3次元形状に応じて変形した格子像が得られる。被測定物10に欠陥、例えば、被測定物10がプレス成形品である場合、その表面にプレス加工時に金型と素材との間に侵入した異物による窪み等の欠陥が生じる。格子像は、この欠陥によっても変形されている。   As shown in FIG. 3A, a lattice image deformed according to the three-dimensional shape of the DUT 10 is obtained. When the object to be measured 10 is a defect, for example, when the object to be measured 10 is a press-molded product, a defect such as a dent due to a foreign substance that has entered between the mold and the material occurs during the pressing process. The lattice image is also deformed by this defect.

格子像を撮影した後、撮影が二度目か否かを判断する(ステップ120)。二度目でない場合には、移動機構18により被測定物10を移動する。この際の移動量は、数mm程度で十分であり、被測定物10の形状や欠陥の大きさ等に応じて決定すればよく、イメージセンサ14による撮影範囲から欠陥が外れない量である。   After taking the lattice image, it is determined whether or not the image is taken for the second time (step 120). If it is not the second time, the DUT 10 is moved by the moving mechanism 18. The moving amount at this time may be about several mm, and may be determined according to the shape of the object to be measured 10, the size of the defect, etc.

被測定物10を移動した後、前述したと同様に、再び、ステップ100〜120の処理を繰り返し、被測定物10に投影した格子パターン6が変形された格子像をイメージセンサ14により撮影する。図3(ロ)に示すように、この二度目の格子像も、欠陥に応じて変形されているが、その変形された位置は、一度目の格子像に対して、移動量の分、位置がずれている。   After moving the device under test 10, the processing in steps 100 to 120 is repeated again in the same manner as described above, and the image sensor 14 captures a lattice image in which the lattice pattern 6 projected onto the device under test 10 is deformed. As shown in FIG. 3B, the second lattice image is also deformed according to the defect, but the deformed position is the position corresponding to the amount of movement with respect to the first lattice image. Is off.

そして、撮影を二度行った後、前述した一度目の格子像と二度目の格子像とを重ね合わせる処理を実行する(ステップ140)。図3(ハ)に示すように、重ね合わせた格子像は、欠陥がある場所では、格子がずれて表れる。この格子像をフィルタ処理すると、図3(ニ)に示すように、欠陥のある場所が黒くなり、欠陥があることが簡単に解る。   Then, after photographing twice, a process of superimposing the first lattice image and the second lattice image described above is executed (step 140). As shown in FIG. 3C, the superimposed lattice image appears with the lattice shifted in a place where there is a defect. When this lattice image is filtered, as shown in FIG. 3 (d), the place with the defect becomes black, and it is easily understood that there is a defect.

即ち、被測定物10に欠陥がない場合、数mm移動して測定しても、一度目の格子像と二度目の格子像とはほぼ重なり合う。被測定物10が自動車のボディのような場合、その3次元形状は緩やかな曲面となっている。被測定物10の移動量が数mmと小さい場合、少しずらして撮影しても、格子像の変形はほぼ同じであり、一度目の格子像と二度目の格子像とを重ね合わせると、ほぼ重なり合う。   That is, when the object to be measured 10 has no defect, the first lattice image and the second lattice image almost overlap each other even if the measurement is performed by moving several millimeters. When the DUT 10 is an automobile body, the three-dimensional shape is a gently curved surface. When the moving amount of the device under test 10 is as small as several mm, even if the image is slightly shifted, the deformation of the lattice image is almost the same. When the first lattice image and the second lattice image are superimposed, overlap.

一方、被測定物10に欠陥がある場合、被測定物10の欠陥がある場所を、撮影すると、その格子像は、欠陥に応じて変形する。そして、被測定物10を移動して、再び撮影すると、その格子像も、欠陥に応じて変形している。   On the other hand, when the object to be measured 10 has a defect, when a place where the object to be measured 10 is defective is photographed, the lattice image is deformed according to the defect. And if the to-be-measured object 10 is moved and it image | photographs again, the lattice image will also deform | transform according to a defect.

窪み等の欠陥がある場合、その変形量は他の緩やかな曲面よりも大きく、一度目の格子像と二度目の格子像とに、格子の変形の程度に違いが表れる。一度目の格子像と二度目の格子像とを重ね合わせると、欠陥がある場所では格子像の格子が太く表れる。これにより、被測定物10に欠陥があることが容易に判別できる。   When there is a defect such as a depression, the amount of deformation is larger than that of other gently curved surfaces, and a difference appears in the degree of lattice deformation between the first lattice image and the second lattice image. When the first lattice image and the second lattice image are superimposed, the lattice of the lattice image appears thick at a place where there is a defect. Thereby, it can be easily determined that the DUT 10 is defective.

このように、移動の前後で撮影した格子像を重ね合わせて、容易に欠陥を検出でき、測定のためのマスターを用意する必要がない。また、被測定物10がプレス成形品である場合、個々の成形品のばらつきによる差があり、マスターと比較しても欠陥を簡単には検出できない。本実施形態のように、被測定物10を移動して、その前後で撮影した格子像を重ね合わせることにより、容易に欠陥を検出できる。 In this way, it is possible to easily detect defects by superimposing lattice images taken before and after movement, and there is no need to prepare a master for measurement. Further, when the DUT 10 is a press-molded product, there is a difference due to variations in individual molded products, and defects cannot be easily detected even when compared with the master. As in the present embodiment, the defect can be easily detected by moving the DUT 10 and superimposing the lattice images taken before and after.

尚、被測定物10の面積が広い場合には、被測定物10を移動して、それそれの場所で検出を行えばよい。あるいは、欠陥検出装置を複数用いて、広い範囲を検出するようにしてもよい。更に、欠陥が検出された際には、欠陥の箇所にインクジェット印刷ヘッド等によりマークを付けるようにしてもよい。   In addition, when the area of the device under test 10 is large, the device under test 10 may be moved and detection may be performed at that location. Alternatively, a wide range may be detected using a plurality of defect detection devices. Further, when a defect is detected, a mark may be attached to the defective portion by an ink jet print head or the like.

以上本発明はこの様な実施形態に何等限定されるものではなく、本発明の要旨を逸脱しない範囲において種々なる態様で実施し得る。   The present invention is not limited to such embodiments as described above, and can be implemented in various modes without departing from the gist of the present invention.

本発明の一実施形態としての欠陥検出装置の概略構成図である。It is a schematic block diagram of the defect detection apparatus as one Embodiment of this invention. 本実施形態の画像処理回路において行われる検出制御処理の一例を示すフローチャートである。It is a flowchart which shows an example of the detection control process performed in the image processing circuit of this embodiment. 本実施形態の移動前後での格子像の説明図である。It is explanatory drawing of the lattice image before and behind the movement of this embodiment.

符号の説明Explanation of symbols

1…欠陥検出装置 2…光源
4…ミラー 6…格子パターン
8…投影レンズ 10…被測定物
12…結像レンズ 14…イメージセンサ
16…画像処理回路 18…移動機構
DESCRIPTION OF SYMBOLS 1 ... Defect detection apparatus 2 ... Light source 4 ... Mirror 6 ... Lattice pattern 8 ... Projection lens 10 ... Object 12 ... Imaging lens 14 ... Image sensor 16 ... Image processing circuit 18 ... Moving mechanism

Claims (3)

3次元形状の被測定物の形状の欠陥を光学的に検出し、また、前記被測定物はプレス成形品で、プレス成形の際に金型と素材との間に侵入した異物により発生する前記欠陥を検出する欠陥検出方法において、
前記被測定物に格子パターンを投影して、この格子像を撮影してから、前記被測定物を相対的に平行移動し、再び前記被測定物に格子パターンを投影して、この格子像を撮影し、前記二つの格子像を重ね合わせて、前記二つの格子像のずれにより格子が太く表れた場所を欠陥として検出することを特徴とする欠陥検出方法。
A defect in the shape of the three-dimensional object to be measured is optically detected, and the object to be measured is a press-molded product, which is generated by a foreign matter that has entered between the mold and the material during press molding. In the defect detection method for detecting defects,
After projecting a lattice pattern on the object to be measured and photographing the lattice image, relatively moving the object to be measured, projecting the lattice pattern onto the object to be measured again, A defect detection method comprising: photographing, superimposing the two lattice images, and detecting as a defect a place where the lattice appears thick due to a shift between the two lattice images.
3次元形状の被測定物の形状の欠陥を光学的に検出し、また、前記被測定物はプレス成形品で、プレス成形の際に金型と素材との間に侵入した異物により発生する前記欠陥を検出する欠陥検出装置において、
前記被測定物に格子パターンを投影する投影手段と、
前記投影手段が投影した格子像を撮影する撮影手段と、
前記被測定物と前記投影手段及び前記撮影手段とを相対的に平行移動する移動手段と、
前記移動手段による移動の前後で、前記投影手段により投影した格子パターンを前記撮影手段により撮影した二つの格子像を重ね合わせ、フィルタ処理で前記二つの格子像のずれにより格子が太く表れた場所を欠陥として検出する検出制御手段と、
を備えたことを特徴とする欠陥検出装置。
A defect in the shape of the three-dimensional object to be measured is optically detected, and the object to be measured is a press-molded product, which is generated by a foreign matter that has entered between the mold and the material during press molding. In a defect detection device for detecting defects,
Projecting means for projecting a lattice pattern onto the object to be measured;
Photographing means for photographing a lattice image projected by the projection means;
Moving means for relatively translating the object to be measured and the projecting means and the photographing means;
Before and after the movement by the moving means, two lattice images obtained by photographing the lattice pattern projected by the projecting means are superimposed, and a place where the lattice appears thick due to the displacement of the two lattice images by the filtering process. Detection control means for detecting as a defect ;
A defect detection apparatus comprising:
前記移動手段は、前記被測定物を平行に移動することを特徴とする請求項2記載の欠陥検出装置。 3. The defect detection apparatus according to claim 2 , wherein the moving means moves the object to be measured in parallel.
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