JP4394134B2 - Cleaning method inside gas container - Google Patents

Cleaning method inside gas container Download PDF

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JP4394134B2
JP4394134B2 JP2007136261A JP2007136261A JP4394134B2 JP 4394134 B2 JP4394134 B2 JP 4394134B2 JP 2007136261 A JP2007136261 A JP 2007136261A JP 2007136261 A JP2007136261 A JP 2007136261A JP 4394134 B2 JP4394134 B2 JP 4394134B2
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チャールズ グレンシ
実 鈴木
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カンサン株式会社
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本発明は、高純度の製品ガスが充填される耐圧性のガス容器内から水分、パーティクル、その他の汚染物質を除去するガス容器内部の洗浄方法に関する。   The present invention relates to a method for cleaning the inside of a gas container that removes moisture, particles, and other contaminants from a pressure-resistant gas container filled with a high-purity product gas.

一般に、天然ガスや酸素など工業上使用されるガスは、耐圧性のガス容器に充填して出荷されている。その種のガス容器は、ガスの使用後に回収して繰り返し利用されるが、回収した空のガス容器に製品ガスを充填する際には、適宜洗浄処理が施され、これにより製品ガスの純度、清浄度を保障している。   Generally, industrially used gases such as natural gas and oxygen are shipped in a pressure-resistant gas container. Such gas containers are collected and reused after the use of the gas, but when the collected empty gas container is filled with the product gas, it is appropriately subjected to a cleaning treatment, whereby the purity of the product gas, Ensures cleanliness.

従来、係る洗浄処理には加熱真空法が多用されてきた。詳しくは、ガス容器を電気ヒータ等により加熱しながら、真空ポンプを用いてガス容器内を真空引きし、ガス容器内に含まれる水分、パーティクル、その他の汚染物質を排気流に乗せて外部に排出するという方法が採られていた。   Conventionally, a heating vacuum method has been frequently used for such cleaning treatment. Specifically, while heating the gas container with an electric heater, etc., the inside of the gas container is evacuated using a vacuum pump, and moisture, particles, and other contaminants contained in the gas container are placed on the exhaust flow and discharged to the outside. The method of doing was taken.

しかし、真空引きを続行する方法では、排気能力の大きい真空ポンプを必要とする上、排気の流速を上げることが難しく、処理の終盤ではガス容器内での気流が分子流となるので、ガス容器の内壁に付着した汚染物質を洗い流す効果は低い。   However, the method of continuing evacuation requires a vacuum pump with a large exhaust capacity, and it is difficult to increase the exhaust flow rate, and the gas flow in the gas container becomes a molecular flow at the end of the process. The effect of washing away the contaminants adhering to the inner wall is low.

そこで、近年では、ガス容器のバルブ装着口に所定のバルブ(実バルブ)を装着し、その実バルブを通じて真空排気と窒素ガス注入による大気圧迄の圧戻しとを複数回行うようにしている(例えば、特許文献1)。   Therefore, in recent years, a predetermined valve (actual valve) is mounted on the valve mounting port of the gas container, and vacuum exhaust and pressure return to atmospheric pressure by nitrogen gas injection are performed a plurality of times through the actual valve (for example, Patent Document 1).

特開2001−108588号公報(段落0024、図1、図2)JP 2001-108588 A (paragraph 0024, FIGS. 1 and 2)

しかしながら、特許文献1に開示されるような真空洗浄方法によれば、ガス容器内に対する洗浄ガス(窒素ガス)の供給と排気が一口の実バルブを介して交互に行われるため、ガス容器内の全域に連続した高速の気流が生じず、ガス容器内に気流が殆ど発生しない箇所が生ずるので、ガス容器内から汚染物質を良好に排出できないという問題があった。   However, according to the vacuum cleaning method disclosed in Patent Document 1, the supply and exhaust of the cleaning gas (nitrogen gas) to the gas container are alternately performed through a single real valve. A continuous high-speed air flow does not occur in the entire area, and there is a portion where the air flow is hardly generated in the gas container. Therefore, there is a problem that contaminants cannot be discharged well from the gas container.

しかも、実バルブを装着しての洗浄では、実バルブの熱劣化や安全弁を成す可溶金属の溶解を防止する上でガス容器を高温加熱することができず、100℃程度までの加熱が限界とされていることから、ガス容器内から水分を排除するのに時間を要する。   Moreover, in cleaning with an actual valve, the gas container cannot be heated at a high temperature in order to prevent heat deterioration of the actual valve and dissolution of the soluble metal forming the safety valve, and heating up to about 100 ° C is the limit. Therefore, it takes time to remove moisture from the gas container.

尚、特許文献1では、真空洗浄の前工程として、注水耐圧検査の終わったガス容器内を乾燥させるために、ガス容器内にバルブ装着口(開口部)から管状の供給ノズルを挿入し、その供給ノズルを通じてガス容器内に乾燥気体を供給する方法が開示されているが、その乾燥気体はバルブ装着口と供給ノズルとの隙間から外部に自然流出されるので、ガス容器内を乾燥させるまでに多くの時間と乾燥気体を費やしてしまう上、乾燥気体の供給はガス容器内を大気中に開放した状態で行われるので、その乾燥気体によりガス容器の内壁に付着した汚染物質を脱離させることは困難である。   In Patent Document 1, as a pre-process of vacuum cleaning, a tubular supply nozzle is inserted into the gas container from the valve mounting port (opening) in order to dry the gas container after the water injection pressure resistance test, Although a method of supplying dry gas into the gas container through the supply nozzle is disclosed, since the dry gas naturally flows out to the outside through the gap between the valve mounting port and the supply nozzle, it is necessary to dry the gas container. In addition to spending a lot of time and dry gas, supply of dry gas is performed with the inside of the gas container open to the atmosphere, so that the contaminants attached to the inner wall of the gas container must be desorbed by the dry gas. It is difficult.

本発明は以上のような事情に鑑みて成されたものであり、その目的は可及的少量の洗浄ガスにより、ガス容器内を短時間で良好に洗浄することのできる方法を提供することにある。   The present invention has been made in view of the circumstances as described above, and an object of the present invention is to provide a method that can clean the inside of a gas container well in a short time with as little cleaning gas as possible. is there.

本発明は上記目的を達成するため、長さ方向一端に、実バルブが装着されるバルブ装着口を有するガス容器の内部に対し、窒素ガス又は不活性ガスから成る洗浄ガスを給排してガス容器の内部を洗浄する方法であり、
前記バルブ装着口に、前記実バルブに代えて給気口と排気口とを有する口金を装着し、その口金には予め前記給気口と前記排気口との何れか一方に連通して前記バブル装着口から前記ガス容器の内底部付近まで達する長さを有するノズル管を接続しておく一方、
前記口金の給気口に前記洗浄ガスの供給源を配管接続すると共に、前記口金の排気口に吸気装置を配管接続し、
前記ガス容器を加熱装置により外部から加熱した状態で、前記吸気装置により前記口金の排気口を通じて前記ガス容器内からの強制排気を連続して行って前記ガス容器内を真空減圧状態に維持しながら、前記供給源から前記口金の給気口を通じて前記ガス容器内に洗浄ガスを断続的に供給した後、
前記吸気装置を停止して前記ガス容器内に洗浄ガスの供給のみを行って当該ガス容器内を大気圧以上にしてから、前記口金を取り外して前記バルブ装着口に前記実バルブを装着することを特徴とする。
In order to achieve the above-mentioned object, the present invention supplies and discharges a cleaning gas composed of nitrogen gas or inert gas to and from the inside of a gas container having a valve mounting port to which an actual valve is mounted at one end in the lengthwise direction. A method of cleaning the inside of the container,
In place of the actual valve, a base having an air supply port and an exhaust port is attached to the valve mounting port, and the bubble communicates with either the air supply port or the exhaust port in advance. While connecting a nozzle tube having a length reaching from the mounting port to the vicinity of the inner bottom of the gas container,
While connecting the supply source of the cleaning gas to the air supply port of the base, connecting an intake device to the exhaust port of the base,
Wherein in a state where the externally heated by a gas container with a heating device, keeping the intake system by the said gas container I forcibly evacuated by successive rows from the gas container through the exhaust port of the mouthpiece in a vacuum reduced pressure while, after intermittently supplying the cleaning gas from the supply source to the gas container through the air inlet of the mouthpiece,
The intake device is stopped and only the supply of the cleaning gas into the gas container is performed to bring the inside of the gas container to atmospheric pressure or higher, and then the base is removed and the actual valve is mounted to the valve mounting port. Features.

又、長さ方向一端に、実バルブが装着されるバルブ装着口を有するガス容器の内部に対し、窒素ガス又は不活性ガスから成る洗浄ガスを給排してガス容器の内部を洗浄する方法であり、In addition, the inside of the gas container is cleaned by supplying and discharging a cleaning gas composed of nitrogen gas or inert gas to the inside of the gas container having a valve mounting port to which the actual valve is mounted at one end in the length direction. Yes,
前記バルブ装着口に、前記実バルブに代えて給気口と排気口とを有する口金を装着し、その口金には予め前記給気口と前記排気口との何れか一方に連通して前記バブル装着口から前記ガス容器の内底部付近まで達する長さを有するノズル管を接続しておく一方、In place of the actual valve, a base having an air supply port and an exhaust port is attached to the valve mounting port, and the bubble communicates with either the air supply port or the exhaust port in advance. While connecting a nozzle tube having a length reaching from the mounting port to the vicinity of the inner bottom of the gas container,
前記口金の給気口に前記洗浄ガスの供給源を配管接続すると共に、前記口金の排気口に吸気装置を配管接続し、While connecting the supply source of the cleaning gas to the air supply port of the base, connecting an intake device to the exhaust port of the base,
前記ガス容器を加熱装置により外部から加熱した状態で、前記吸気装置により前記口金の排気口を通じて前記ガス容器内からの強制排気を連続して行う一方、前記吸気装置による強制排気に遅れて前記供給源から前記口金の給気口を通じて前記ガス容器内に洗浄ガスを連続して供給し、その供給流量と前記吸気装置による排気流量とを均衡させて前記ガス容器内を真空減圧状態に維持しながら前記洗浄ガスの給排を連続して行った後、While the gas container is heated from the outside by a heating device, forced exhaust from the gas container is continuously performed by the intake device through the exhaust port of the base, while the supply is delayed from the forced exhaust by the intake device. A cleaning gas is continuously supplied from the source into the gas container through the supply port of the base, and the supply flow rate and the exhaust flow rate by the intake device are balanced to maintain the inside of the gas container in a vacuum reduced pressure state. After continuously supplying and discharging the cleaning gas,
前記吸気装置を停止して前記ガス容器内に洗浄ガスの供給のみを行って当該ガス容器内を大気圧以上にしてから、前記口金を取り外して前記バルブ装着口に前記実バルブを装着することを特徴とする。The intake device is stopped and only the supply of the cleaning gas into the gas container is performed to bring the inside of the gas container to atmospheric pressure or higher, and then the base is removed and the actual valve is mounted to the valve mounting port. Features.

更に、前記供給源からガス容器内に対する洗浄ガスの供給と、前記吸気装置によるガス容器内からの強制排気とを行うガス給排工程に際し、前記ガス容器を超音波発生器から放射される超音波により外部から励振させることを特徴とする。   Further, in the gas supply / discharge process of supplying the cleaning gas from the supply source to the inside of the gas container and forcibly exhausting the gas container from the inside of the gas container, the ultrasonic wave emitted from the ultrasonic generator is emitted from the ultrasonic container. It is characterized by exciting from the outside.

本発明によれば、ガス容器のバルブ装着口に給気口と排気口とを有する口金を装着し、その給気口と排気口とを通じて洗浄ガスの給排を行うようにしていることから、ガス容器内を真空減圧下で洗浄することができ、このためガス容器の内壁に付着した水分その他の汚染物質を脱離させ易く、しかも給気口と排気口とを通じてガス容器内に連続した気流を発生させることができるので、ガス容器内から水分その他の汚染物質を良好に排出することができる。   According to the present invention, a base having a supply port and an exhaust port is mounted on the valve mounting port of the gas container, and the cleaning gas is supplied and discharged through the supply port and the exhaust port. The inside of the gas container can be cleaned under vacuum and reduced pressure, so it is easy to remove moisture and other contaminants adhering to the inner wall of the gas container, and the air flow continues into the gas container through the air supply and exhaust ports. Therefore, moisture and other contaminants can be discharged well from the gas container.

又、ガス容器に装着された口金の給気口と排気口との何れか一方には、バルブ装着口からガス容器の内底部付近まで達する長さを有するノズル管が接続されることから、ガス容器内の全域に連続した高速の気流を形成し、ガス容器内から水分その他の汚染物質を短時間で良好に排出することができ、延いては洗浄ガスの使用量を大幅に削減することができる。   In addition, a nozzle tube having a length reaching from the valve mounting port to the vicinity of the inner bottom of the gas container is connected to either the air supply port or the exhaust port of the base mounted on the gas container. A continuous high-speed air flow is formed in the entire area of the container, and moisture and other pollutants can be discharged from the gas container in a short time, which in turn can greatly reduce the amount of cleaning gas used. it can.

しかも、ガス容器のバルブ装着口に実バルブに代わる口金を装着して洗浄を行うことから、ガス容器の加熱による実バルブへの悪影響を気にせずガス容器を高温加熱して、水分の気化を促進し、その排除を効率的に行うことができる。   In addition, since the base instead of the actual valve is attached to the valve mounting port of the gas container for cleaning, the gas container is heated to a high temperature without worrying about the adverse effect on the actual valve due to the heating of the gas container, thereby evaporating moisture. Can be promoted and eliminated efficiently.

特に、吸気装置による強制排気によりガス容器内を真空減圧状態に維持しながら、ガス容器内に対する洗浄ガスの供給を断続して行うか、若しくは吸気装置による強制排気に遅れてガス容器内に洗浄ガスを連続して供給すると共に、その供給流量と吸気装置による排気流量とを均衡させてガス容器内を真空減圧状態に維持するようにしていることから、ガス容器の内壁から付着物を脱離させる効果を上げることができる。   In particular, while the gas container is maintained in a vacuum decompression state by forced exhaust by the intake device, the supply of the cleaning gas to the gas container is intermittently performed, or the cleaning gas is delayed in the gas container after the forced exhaust by the intake device. Is continuously supplied, and the supply flow rate and the exhaust flow rate by the intake device are balanced to maintain the inside of the gas container in a vacuum pressure-reduced state, so that the deposits are desorbed from the inner wall of the gas container. The effect can be improved.

加えて、ガス容器に対する洗浄ガスの給排工程に際し、ガス容器を加熱装置により外部から加熱し、更にはガス容器を超音波発生器から放射される超音波により外部から励振させるようにしていることから、ガス容器の内壁から付着物を脱離させる効果を更に上げることができる。   In addition, in the process of supplying and discharging the cleaning gas to and from the gas container, the gas container is heated from the outside by a heating device, and further, the gas container is excited from the outside by the ultrasonic waves emitted from the ultrasonic generator. Therefore, the effect of detaching the deposits from the inner wall of the gas container can be further increased.

以下、本発明の適用例を図面に基づいて詳細に説明する。図1において、1は製品ガスが未充填の耐圧性のガス容器であり、その長さ方向一端側は頚部1aとして直径が縮小され、その端部は内周に雌ねじを形成したバルブ装着口1bとして開口されている。尚、そのバルブ装着口1bには、製品ガスの漏出を防止するため後述の如く封止用の実バルブが装着されるが、本願発明では製品ガスの充填前にガス容器1内を洗浄するべく実バルブに代えてバルブ装着口1bに所定の口金2を装着する。   Hereinafter, application examples of the present invention will be described in detail with reference to the drawings. In FIG. 1, reference numeral 1 denotes a pressure-resistant gas container that is not filled with a product gas. One end in the length direction is reduced in diameter as a neck portion 1a, and the end portion is a valve mounting port 1b in which a female screw is formed on the inner periphery. As open. In addition, in order to prevent leakage of the product gas, an actual valve for sealing is mounted on the valve mounting port 1b as will be described later. However, in the present invention, the gas container 1 should be cleaned before filling with the product gas. Instead of the actual valve, a predetermined base 2 is mounted on the valve mounting port 1b.

口金2は、一端外周にバルブ装着口1bの雌ねじと結合する雄ねじを形成した中空の金具で、その部位には給気口2aと排気口2bが穿設されている。特に、給気口2aには口金2の内部を通じてノズル管3の一端が接続され、そのノズル管3が給気口2aに対して連通されている。   The base 2 is a hollow metal fitting formed with a male screw that is coupled to the female screw of the valve mounting port 1b on the outer periphery of one end, and an air supply port 2a and an exhaust port 2b are formed in that portion. In particular, one end of a nozzle tube 3 is connected to the air supply port 2a through the inside of the base 2, and the nozzle tube 3 communicates with the air supply port 2a.

ノズル管3は、ステンレス鋼などの耐食性を有するストレート状の硬質管であり、その長さはガス容器1の全長と略同じに設定され、ガス容器1のバルブ装着口1bに口金2を装着したとき、ノズル管3がバルブ装着口1bからガス容器1の中心を通ってその内底部付近まで達するようにしてある。   The nozzle tube 3 is a straight hard tube having corrosion resistance such as stainless steel, and its length is set to be substantially the same as the entire length of the gas container 1, and the base 2 is mounted on the valve mounting port 1 b of the gas container 1. At this time, the nozzle tube 3 passes through the center of the gas container 1 from the valve mounting port 1b to reach the vicinity of the inner bottom thereof.

一方、口金2の外周において、給気口2a及び排気口2bにはそれぞれ手動式のバルブ4,5(例えば止め弁)が取り付けられ、給気口2aにはバルブ4を介して洗浄ガスの供給源6が配管接続される。洗浄ガス供給源6は、実質的に水分を含まない高純度の洗浄ガスが充填されたボンベ或いはコールドエバポレータであり、その内部には洗浄ガスとして例えば清浄な窒素ガスや液化窒素が高圧で充填されている。   On the other hand, on the outer periphery of the base 2, manual valves 4 and 5 (for example, stop valves) are respectively attached to the air supply port 2 a and the exhaust port 2 b, and supply of cleaning gas to the air supply port 2 a via the valve 4. A source 6 is piped. The cleaning gas supply source 6 is a cylinder or a cold evaporator filled with a high-purity cleaning gas that does not substantially contain water, and the inside thereof is filled with, for example, clean nitrogen gas or liquefied nitrogen at a high pressure as the cleaning gas. ing.

図1において、7は洗浄ガス供給源6と口金2の給気口2aとを繋ぐ給気用の管路であり、この管路7にはガス容器1内に供給される洗浄ガスの流量を調整するための制御ユニット8が組み込まれる。制御ユニット8は、管路7に取り付けられる制御弁8a、圧力センサ8b、流量センサ8c、及び圧力センサ8bや流量センサ8cの出力信号に基づいて制御弁8aを作動させる制御部8dを含んで構成される。尚、制御ユニット8は2つの制御モード(第1モードおよび第2モード)を有し、「第1モード」では、圧力センサ8bの出力信号に基づいて制御弁8aの開閉制御が行われ、「第2モード」では、流量センサ8cの出力信号に基づいてガス容器1に対する洗浄ガスの供給流量が後述の吸気装置9による排気流量に均衡するよう制御弁8aの開度調整が行われるようになっている。   In FIG. 1, reference numeral 7 denotes an air supply line connecting the cleaning gas supply source 6 and the air supply port 2 a of the base 2, and the flow rate of the cleaning gas supplied into the gas container 1 is set in the pipe line 7. A control unit 8 for adjustment is incorporated. The control unit 8 includes a control valve 8a attached to the pipeline 7, a pressure sensor 8b, a flow rate sensor 8c, and a control unit 8d that operates the control valve 8a based on output signals of the pressure sensor 8b and the flow rate sensor 8c. Is done. The control unit 8 has two control modes (first mode and second mode). In the “first mode”, the control valve 8a is controlled to open and close based on the output signal of the pressure sensor 8b. In the “second mode”, the opening degree of the control valve 8a is adjusted so that the supply flow rate of the cleaning gas to the gas container 1 is balanced with the exhaust flow rate by the intake device 9 described later, based on the output signal of the flow rate sensor 8c. ing.

又、排気口2bには、バルブ5を介して上述の吸気装置9が配管接続される。本例において、吸気装置9は回転式の真空ポンプであり、その排気能力は450L/minとされる。尚、図1において、10は吸気装置9と口金2の排気口2bとを繋ぐ排気用の管路である。   The above-described intake device 9 is connected to the exhaust port 2b through a valve 5. In this example, the intake device 9 is a rotary vacuum pump, and its exhaust capacity is 450 L / min. In FIG. 1, reference numeral 10 denotes an exhaust pipe connecting the intake device 9 and the exhaust port 2 b of the base 2.

ここで、以上のような口金2などを用い、製品ガス充填前のガス容器1内を洗浄する具体的な方法を説明する。   Here, a specific method of cleaning the inside of the gas container 1 before filling with the product gas using the above-described base 2 will be described.

先ず、ガス容器1のバルブ装着口1bに対して口金2を装着し、その給気口2aに連通するノズル管3をガス容器1内に挿入する。尚、口金2の装着時には、給気口2aと排気口2bに取り付けたバルブ4,5から管路7,10をそれぞれ切り離し、口金2をトルクレンチなどによりバルブ装着口1bに所定のトルクで強固に締め付ける。又、口金2の装着後には、給気口2aにバルブ4を介して給気用管路7を接続する一方、排気口2bにバルブ5を介して排気用管路10を接続する。しかして、係るガス容器1の内部を洗浄するためにガス給排工程を開始する。   First, the base 2 is mounted on the valve mounting port 1 b of the gas container 1, and the nozzle tube 3 communicating with the air supply port 2 a is inserted into the gas container 1. When the base 2 is mounted, the pipes 7 and 10 are disconnected from the valves 4 and 5 attached to the air supply port 2a and the exhaust port 2b, respectively, and the base 2 is firmly tightened to the valve mounting port 1b with a predetermined torque using a torque wrench or the like. Tighten to. After the cap 2 is mounted, the air supply line 7 is connected to the air supply port 2a via the valve 4, while the exhaust line 10 is connected to the exhaust port 2b via the valve 5. Thus, a gas supply / discharge process is started to clean the inside of the gas container 1.

ガス給排工程では、先ずバルブ4,5の双方を開き、次いで吸気装置9を駆動してガス容器1内から連続して強制排気を行う一方、そのガス容器1内に対して洗浄ガス供給源6から口金2の給気口2aを通じて洗浄ガス(清浄な窒素ガス)の供給を行う。これによれば、給気口2aに達した洗浄ガスがノズル管3内を通じてガス容器1内の底部に放出され、これが排気口2bを通じてガス容器1の上部から排出されることにより、ガス容器1内の全域にその底部から上部に向かう高速の気流が形成される。この結果、ガス容器1の内壁から水分その他の汚染物質が脱離され、これが洗浄ガス中に拡散した状態で排気口2bから外部に排出される。   In the gas supply / exhaust process, first, both valves 4 and 5 are opened, and then the intake device 9 is driven to continuously forcibly exhaust gas from the inside of the gas container 1. The cleaning gas (clean nitrogen gas) is supplied from 6 through the air supply port 2 a of the base 2. According to this, the cleaning gas that has reached the air supply port 2a is discharged through the nozzle tube 3 to the bottom of the gas container 1, and is discharged from the upper part of the gas container 1 through the exhaust port 2b. A high-speed air flow from the bottom to the top is formed in the entire area. As a result, moisture and other contaminants are desorbed from the inner wall of the gas container 1 and are discharged to the outside through the exhaust port 2b in a state of being diffused into the cleaning gas.

特に、係るガス給排工程には、洗浄ガスの供給を断続して行う方式と、連続して行う方式が適用される。   In particular, in the gas supply / discharge process, a method of intermittently supplying the cleaning gas and a method of continuously performing the cleaning gas are applied.

洗浄ガスの供給を断続する方式では、制御ユニット8を上記の「第1モード」に設定し、吸気装置9によりガス容器1内から一定流量で連続して強制排気しながら、給気側の制御弁8aを開閉してガス容器1内に洗浄ガスを断続して供給する。尚、制御弁8aは圧力センサ8bにより検出されるガス容器1内の圧力が所定の下限圧(例えば、30hPa)に達すると開放し、その開放から一定時間経過後あるいはガス容器1内の圧力が所定の上限圧(例えば、300hPa)に達すると閉鎖するよう制御されるのであり、このためガス容器1内の全域に高速の気流を形成したまま、その内部を真空減圧状態に維持することができる。   In the method of intermittently supplying the cleaning gas, the control unit 8 is set to the “first mode”, and the intake side control is performed while continuously forcibly evacuating the gas container 1 from the gas container 1 at a constant flow rate. The cleaning gas is intermittently supplied into the gas container 1 by opening and closing the valve 8a. The control valve 8a opens when the pressure in the gas container 1 detected by the pressure sensor 8b reaches a predetermined lower limit pressure (for example, 30 hPa). It is controlled to close when it reaches a predetermined upper limit pressure (for example, 300 hPa). For this reason, the inside of the gas container 1 can be maintained in a vacuum pressure-reduced state while a high-speed air flow is formed in the entire region. .

一方、洗浄ガスの供給を連続する方式では、制御ユニット8を上記の「第2モード」に設定し、吸気装置9によりガス容器1内から一定流量で連続して強制排気しながら、吸気装置9による強制排気に遅れてガス容器1内に洗浄ガスを連続して供給すると共に、その供給流量と吸気装置9による排気流量とを均衡させてガス容器1内を真空減圧状態に維持する。つまり、同方式では、先行して行われる強制排気によりガス容器1内が所定の圧力まで減じられた段階で、ガス容器1内に対する洗浄ガスの供給を排気流量と同じ流量で開始し、ガス容器1内を洗浄ガス供給開始時点の圧力に保ったまま洗浄ガスの給排を行う。   On the other hand, in the system in which the supply of the cleaning gas is continued, the control unit 8 is set to the “second mode”, and the intake device 9 is continuously forcedly exhausted from the gas container 1 at a constant flow rate by the intake device 9. The cleaning gas is continuously supplied into the gas container 1 behind the forced exhaust due to the above, and the supply flow rate and the exhaust flow rate by the intake device 9 are balanced to maintain the inside of the gas container 1 in a vacuum decompression state. That is, in this method, at the stage where the inside of the gas container 1 is reduced to a predetermined pressure by the forced exhaust performed in advance, the supply of the cleaning gas to the inside of the gas container 1 is started at the same flow rate as the exhaust flow rate. The supply and discharge of the cleaning gas is performed while maintaining the pressure in 1 at the pressure at the start of the supply of the cleaning gas.

ここに、上記いずれの方式もガス容器1内を真空減圧状態に維持しながら洗浄ガスの給排を行うことから、ガス容器1の内壁に付着した水分の気化を促進し、これを洗浄ガス中に分散させてガス容器1内から効率よく排出することができる。   Here, in any of the above methods, since the cleaning gas is supplied and discharged while maintaining the inside of the gas container 1 in a vacuum pressure-reduced state, the vaporization of moisture adhering to the inner wall of the gas container 1 is promoted, and this is performed in the cleaning gas. Can be efficiently discharged from the gas container 1.

尚、以上のようなガス給排工程に際し、図1に示されるような上部開口する加熱装置11(円筒状の外胴内に抵抗発熱体などを設けた電気ヒータ)にガス容器1を収容し、当該ガス容器1を外部から加熱することが好ましく、これによれば低圧下における加熱容器1内での水分の気化を更に促進し、これを洗浄ガスに含ませてガス容器1から効率よく排出することができる。特に、ガス容器1には実バルブが装着されていないので、加熱装置11による加熱温度を200℃程度まで上げることが可能になる。   In the gas supply / exhaust process as described above, the gas container 1 is accommodated in a heating device 11 (electric heater provided with a resistance heating element in a cylindrical outer body) as shown in FIG. It is preferable to heat the gas container 1 from the outside. According to this, the vaporization of moisture in the heating container 1 under low pressure is further promoted, and this is contained in the cleaning gas and efficiently discharged from the gas container 1. can do. In particular, since the actual valve is not attached to the gas container 1, the heating temperature by the heating device 11 can be increased to about 200 ° C.

又、以上のようなガス給排工程に際し、ガス容器1を超音波発生器12から放射される超音波により外部から励振させることが好ましく、これによればガス容器1の内壁からパーティクルや腐食物を脱離させる効果を上げることができる。特に、ガス容器1を超音波により励振させるとき、これを図1のように宙吊りにしておくことが好ましく、これによればガス容器1の全体に超音波エネルギーを良好に伝搬せしめることができる。   Further, in the gas supply / discharge process as described above, it is preferable that the gas container 1 is excited from the outside by the ultrasonic wave radiated from the ultrasonic generator 12. The effect of desorbing can be increased. In particular, when the gas container 1 is excited by ultrasonic waves, it is preferable to suspend the gas container 1 as shown in FIG. 1, and according to this, ultrasonic energy can be propagated satisfactorily throughout the gas container 1.

尚、加熱装置11と超音波発生器12とを併用し、ガス容器1の加熱、励振を同時に行うことが好ましいが、そのいずれか一方のみを行うようにしてもよい。   In addition, although it is preferable to use the heating apparatus 11 and the ultrasonic generator 12 together and to heat and excite the gas container 1 at the same time, only one of them may be performed.

ここで、以上のような洗浄処理を所要時間施したら、吸気装置9を停止してガス容器1内に洗浄ガスの供給のみを行ってガス容器1内を大気圧(約0.1MPa)以上にした後、バルブ4,5を閉め、管路7,10を切り離し、次いで加熱装置11内からガス容器1を搬出し、これを図示せぬ転倒機により図2のように横倒しにする。そして、口金2を緩め、その過程でガス容器1内から洗浄ガスの漏れ出しを確認したら、口金2をバルブ装着口1bから取り外し、好ましくはこの段階で給気口2aに管路7を再接続し、ガス容器1内に挿入されたままのノズル管3を通じて洗浄ガスをガス容器1内に供給しながら当該ノズル管3をガス容器1内から徐々に引き抜いて行く。   Here, when the above-described cleaning process is performed for the required time, the intake device 9 is stopped and only the cleaning gas is supplied into the gas container 1 so that the inside of the gas container 1 is at atmospheric pressure (about 0.1 MPa) or more. After that, the valves 4 and 5 are closed, the pipe lines 7 and 10 are disconnected, and then the gas container 1 is taken out from the heating device 11 and is laid sideways as shown in FIG. Then, after loosening the base 2 and confirming the leakage of the cleaning gas from the gas container 1 in the process, the base 2 is removed from the valve mounting port 1b, and preferably the pipe line 7 is reconnected to the air supply port 2a at this stage. Then, the nozzle tube 3 is gradually pulled out from the gas container 1 while supplying the cleaning gas into the gas container 1 through the nozzle tube 3 inserted in the gas container 1.

そして、ノズル管3を抜き終えたら、ガス容器1のバルブ装着口1bに対し、図3に示すよう実バルブ13を装着する。   When the nozzle tube 3 is completely pulled out, the actual valve 13 is mounted on the valve mounting port 1b of the gas container 1 as shown in FIG.

尚、実バルブ13が装着されたガス容器1には、その後、所定の製品ガスが充填されるが、洗浄処理済みのガス容器1内の清浄度を確認するため、ガス容器1内の露点測定を行ったところ、従来の加熱真空法において処理時間90分で露点が−79.1℃であったのに対し、本発明に係る方法では、処理時間40分で露点が−90.2℃という好適な結果が得られた。但し、測定に供したガス容器1の内部洗浄では、超音波による励振は行わず、ガス容器1の加熱温度は従来の加熱真空法と同じ100℃とし、ガス給排工程には洗浄ガスを断続供給する方式を採用した。   The gas container 1 to which the actual valve 13 is attached is then filled with a predetermined product gas, but the dew point in the gas container 1 is measured in order to check the cleanliness in the cleaned gas container 1. As a result, in the conventional heating vacuum method, the dew point was −79.1 ° C. at a processing time of 90 minutes, whereas in the method according to the present invention, the dew point was −90.2 ° C. at a processing time of 40 minutes. Good results have been obtained. However, in the internal cleaning of the gas container 1 used for the measurement, excitation by ultrasonic waves is not performed, the heating temperature of the gas container 1 is set to 100 ° C., which is the same as the conventional heating vacuum method, and the cleaning gas is intermittently supplied in the gas supply / discharge process. The supply method was adopted.

以上、本発明について説明したが、洗浄ガスは窒素ガスに限らず、アルゴンガスその他の不活性ガスを用いることができる。又、上記例ではノズル管3を給気口2aに連通させたが、これを排気口2bに連通させてもよく、この場合でもガス容器1内を真空減圧状態に維持しながらガス容器1内の全域に連続した高速の気流を形成してガス容器1内を良好に洗浄することができる。   Although the present invention has been described above, the cleaning gas is not limited to nitrogen gas, and argon gas or other inert gas can be used. In the above example, the nozzle tube 3 is communicated with the air supply port 2a. However, the nozzle tube 3 may be communicated with the exhaust port 2b. In this case, the gas container 1 is maintained in a vacuum-reduced state. The inside of the gas container 1 can be satisfactorily cleaned by forming a continuous high-speed air flow over the entire area.

本発明に係る洗浄方法の実施態様を示す説明図Explanatory drawing which shows the embodiment of the washing | cleaning method which concerns on this invention 洗浄が終わったガス容器から口金を取り外す状態を示す説明図Explanatory drawing which shows the state which removes a nozzle from the gas container after washing 洗浄が終わったガス容器に実バルブを装着した状態を示す説明図Explanatory drawing which shows the state which attached the actual valve to the gas container which cleaned

1 ガス容器
1b バルブ装着口
2 口金
2a 給気口
2b 排気口
3 ノズル管
6 洗浄ガス供給源
9 吸気装置
11 加熱装置
12 超音波発生器
13 実バルブ
DESCRIPTION OF SYMBOLS 1 Gas container 1b Valve installation port 2 Base 2a Air supply port 2b Exhaust port 3 Nozzle pipe 6 Cleaning gas supply source 9 Intake device 11 Heating device 12 Ultrasonic generator 13 Actual valve

Claims (3)

長さ方向一端に、実バルブが装着されるバルブ装着口を有するガス容器の内部に対し、窒素ガス又は不活性ガスから成る洗浄ガスを給排してガス容器の内部を洗浄する方法であり、
前記バルブ装着口に、前記実バルブに代えて給気口と排気口とを有する口金を装着し、その口金には予め前記給気口と前記排気口との何れか一方に連通して前記バブル装着口から前記ガス容器の内底部付近まで達する長さを有するノズル管を接続しておく一方、
前記口金の給気口に前記洗浄ガスの供給源を配管接続すると共に、前記口金の排気口に吸気装置を配管接続し、
前記ガス容器を加熱装置により外部から加熱した状態で、前記吸気装置により前記口金の排気口を通じて前記ガス容器内からの強制排気を連続して行って前記ガス容器内を真空減圧状態に維持しながら、前記供給源から前記口金の給気口を通じて前記ガス容器内に洗浄ガスを断続的に供給した後、
前記吸気装置を停止して前記ガス容器内に洗浄ガスの供給のみを行って当該ガス容器内を大気圧以上にしてから、前記口金を取り外して前記バルブ装着口に前記実バルブを装着することを特徴とするガス容器内部の洗浄方法。
It is a method of cleaning the inside of the gas container by supplying and discharging a cleaning gas composed of nitrogen gas or inert gas to the inside of the gas container having a valve mounting port to which the actual valve is mounted at one end in the length direction.
In place of the actual valve, a base having an air supply port and an exhaust port is attached to the valve mounting port, and the bubble communicates with either the air supply port or the exhaust port in advance. While connecting a nozzle tube having a length reaching from the mounting port to the vicinity of the inner bottom of the gas container,
While connecting the supply source of the cleaning gas to the air supply port of the base, connecting an intake device to the exhaust port of the base,
Wherein in a state where the externally heated by a gas container with a heating device, keeping the intake system by the said gas container I forcibly evacuated by successive rows from the gas container through the exhaust port of the mouthpiece in a vacuum reduced pressure while, after intermittently supplying the cleaning gas from the supply source to the gas container through the air inlet of the mouthpiece,
The intake device is stopped and only the supply of the cleaning gas into the gas container is performed to bring the inside of the gas container to atmospheric pressure or higher, and then the base is removed and the actual valve is mounted to the valve mounting port. A method for cleaning the inside of a gas container.
長さ方向一端に、実バルブが装着されるバルブ装着口を有するガス容器の内部に対し、窒素ガス又は不活性ガスから成る洗浄ガスを給排してガス容器の内部を洗浄する方法であり、
前記バルブ装着口に、前記実バルブに代えて給気口と排気口とを有する口金を装着し、その口金には予め前記給気口と前記排気口との何れか一方に連通して前記バブル装着口から前記ガス容器の内底部付近まで達する長さを有するノズル管を接続しておく一方、
前記口金の給気口に前記洗浄ガスの供給源を配管接続すると共に、前記口金の排気口に吸気装置を配管接続し、
前記ガス容器を加熱装置により外部から加熱した状態で、前記吸気装置により前記口金の排気口を通じて前記ガス容器内からの強制排気を連続して行う一方、前記吸気装置による強制排気に遅れて前記供給源から前記口金の給気口を通じて前記ガス容器内に洗浄ガスを連続して供給し、その供給流量と前記吸気装置による排気流量とを均衡させて前記ガス容器内を真空減圧状態に維持しながら前記洗浄ガスの給排を連続して行った後、
前記吸気装置を停止して前記ガス容器内に洗浄ガスの供給のみを行って当該ガス容器内を大気圧以上にしてから、前記口金を取り外して前記バルブ装着口に前記実バルブを装着することを特徴とするガス容器内部の洗浄方法。
It is a method of cleaning the inside of the gas container by supplying and discharging a cleaning gas composed of nitrogen gas or inert gas to the inside of the gas container having a valve mounting port to which the actual valve is mounted at one end in the length direction.
In place of the actual valve, a base having an air supply port and an exhaust port is attached to the valve mounting port, and the bubble communicates with either the air supply port or the exhaust port in advance. While connecting a nozzle tube having a length reaching from the mounting port to the vicinity of the inner bottom of the gas container,
While connecting the supply source of the cleaning gas to the air supply port of the base, connecting an intake device to the exhaust port of the base,
While the gas container is heated from the outside by a heating device , forced exhaust from the gas container is continuously performed by the intake device through the exhaust port of the base, while the supply is delayed from the forced exhaust by the intake device. A cleaning gas is continuously supplied from the source into the gas container through the supply port of the base, and the supply flow rate and the exhaust flow rate by the intake device are balanced to maintain the inside of the gas container in a vacuum reduced pressure state. After continuously supplying and discharging the cleaning gas,
The intake device is stopped and only the supply of the cleaning gas into the gas container is performed to bring the inside of the gas container to atmospheric pressure or higher, and then the base is removed and the actual valve is mounted to the valve mounting port. features and to Ruga scan the vessel interior cleaning method.
前記供給源からガス容器内に対する洗浄ガスの供給と、前記吸気装置によるガス容器内からの強制排気とを行うガス給排工程に際し、前記ガス容器を超音波発生器から放射される超音波により外部から励振させることを特徴とする請求項1、又は2記載のガス容器内部の洗浄方法。In the gas supply / discharge process of supplying the cleaning gas from the supply source to the inside of the gas container and forcibly exhausting the gas container from the inside of the gas container, the gas container is externally exposed by ultrasonic waves emitted from an ultrasonic generator. The method for cleaning the inside of a gas container according to claim 1 or 2, wherein the gas container is excited from the outside.
JP2007136261A 2007-05-23 2007-05-23 Cleaning method inside gas container Expired - Fee Related JP4394134B2 (en)

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CN106178748B (en) * 2016-07-26 2019-01-08 安徽天地高纯溶剂有限公司 A kind of novel high pure solvent bottle washing apparatus
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