1305931 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種矽甲烷輸送及處理系統，特別是 有關於-種可提升管路排空處理效率之⑪甲院輪送及處理 系統。 【先前技術】 在半導體製程中，⑪甲燒⑸h4)之應用是非常普遍的。 -般來說，矽甲烷之輸出應用可以是由一矽曱烷輸送系統 來達成。矽甲烷輸送系統通常主要包括有一矽曱烷儲存容 器以及一輸送管路，輸送管路是連接於矽甲烷儲存容器， 其可用來將矽曱烷儲存容器内之矽曱烷輸送至半導體^程 機台中。在另一方面，當欲更換矽甲烷儲存容器時，必須 先對輸送管路進行低壓下的管路排空（vent)處理。也就是 說，輪送管路中之氣體必紐確實移除後，才可進 行石夕甲烧儲存容器之更換操作，以降低更換㈣ 器時之危險性；另外’未使用之砍甲燒儲存容 後，為了降低管線中進行沖吹所殘餘的氮氣，系統於 前會以高壓真實梦曱烧氣體進行充填(pu㈣及管路排: (Vent/realgaSfl_，以有效降低管線中之氣氣量 ς 免氮氣影響製程品質。 € 然而，為了因應新一代製程的需灰π 而求矽曱烷輪送系统 目釗石夕曱燒輸送系統之石夕 之規模也越來越大。換句話說 0956-Α21649TWF(N2)：P55950016TW；hawdong 5 1305931 曱烷儲存容器容積變得相當龐大及輸送管路之内徑變大且 長度變長。因此，當對輸送管路進行管路排空處理時，需 被移除之碎曱炫氣體數量也相對較大。 如上所述，目前對輸送管路進行管路排空處理之設備 主要包括有乾式洗滌器（dry scrubber)、燃燒管（burn tube) 及燃燒箱（bum box)等幾種。 就乾式洗滌器而言，其受限於處理容量（capacity)不 秦 足，故常會導致管路排空處理效率不彰及整個矽曱烷輸送 攀 系統發生過熱現象。此外，乾式洗蘇器還具有價格昂貴的 缺點，故不利於降低半導體製程之製造成本。 此外，請參閱第1圖，一習知之矽曱烷輸送及處理系 統1主要包括有一矽曱烷儲存容器11、一輸送管路12、一 旁通管路13、一第一氣動閥14、一第二氣動閥15、一第 三氣動閥16、一真空產生器（vacuum generator) 17、一燃燒 管18以及一風車19。輸送管路12是連接於矽曱烷儲存容 Φ 器11，其可將矽曱烷儲存容器11内之矽曱烷輸送至一半 導體製程機台Μ之中。第一氣動閥14及第二氣動閥15均 是設置於輸送管路12上。旁通管路13是連接於輸送管路 12與燃燒管18之間，並且旁通管路13是位於第一氣動閥 14與第二氣動閥15之間。第三氣動閥16及真空產生器17 均是設置於旁通管路13上，並且真空產生器17是位於第 三氣動閥16與燃燒管18之間。燃燒管18及風車19係為 管路排空處理設備。風車19是設置於燃燒管18之一端上， 其可將外界之空氣抽送至燃燒管18之中。旁通管路13是 0956-Α21649TWF(N2)；P5595001 6TW：hawdong 6 1305931 連接於燃燒管18之一側壁上，而輸送管路12中之矽曱烷 氣體可經由旁通管路13輸送至燃燒管18之中。 當欲對輸送管路12進行管路排空處理時，必須先將第 一氣動閥14及第二氣動閥15關閉。然後，開啟第三氣動 閥16，並且啟動真空產生器17及風車19。此時，輸送管 路12中之矽曱烷氣體即會經由真空產生器17被輸送至燃 燒管18中來與風車19所抽入之空氣混合，在此，由於矽 ^ 曱烷氣體具有自燃性，故理論上矽曱烷氣體會與空氣發生 燃燒反應。 然而，如第1圖所示，由於矽曱烷輸送及處理系統1 結構上的設計，故風車19依箭頭A方向輸入至燃燒管18 中之空氣會與真空產生器17(或旁通管路13)依箭頭B方向 輸入至燃燒管18中之矽曱烷氣體垂直混合，而此經常會導 致矽曱烷氣體在燃燒管18中之濃度低於1.33%的燃燒下限 (由於矽曱烷氣體會被輸送方向與其垂直之空氣所快速稀 φ 釋）。如上所述，矽甲烷氣體只能在燃燒管18中進行低效 率的氧化反應，而無法進行高效率的燃燒反應，因而會導 致管路排空處理效率不彰的問題。換言之，在最後從燃燒 管18所排出之氣體中，有毒矽曱烷氣體之含量仍然偏高。 另外，就應用燃燒箱（burn box)之管路排空處理而言， 其是將導入燃燒箱中之空氣與矽曱烷氣體均勻混合，而此 亦經常會導致矽曱烷氣體在燃燒箱中之濃度低於1.33%的 燃燒下限，因而亦會導致管路排空處理效率不彰的問題。 有鑑於此，本發明之目的是要提供一種矽曱烷輸送及 0956-A21649TWF(N2)：P55950016TW；hawdong 7 1305931 處理系統，其可以同流的方式供應空氣及矽甲烷氣體來進 行管路排空處理，以執行高效率的燃燒反應’進而提升管 路排空處理之效率及安全性。 【發明内容】 本發明基本上採用如下所詳述之特徵以為了要解決上 述之問題。也就是說，本發明包括一矽曱烷儲存容器，係 儲存有矽曱烷氣體；一輸送管路，連接於該矽曱烷儲存容 器，係用以輸送該矽曱烷氣體；一燃燒室，具有一入口以 及一出口，其中，該入口係相對於該出口；一旁通管路， 連接於該輸送管路與該燃燒室之該入口之間，係用以將該 輸送管路中之該矽甲烷氣體輸送至該燃燒室之中；以及一 風車，設置於該燃燒室之該出口上，係用以從該燃燒室之 該入口抽取空氣至該燃燒室之中，其中，該燃燒室之該入 口處之空氣流動方向係與由該旁通管路所輸送至該燃燒室 之該入口處之該矽甲烷氣體之流動方向同流。 同時，根據本發明之矽曱烷輸送及處理系統，其更包 括一壓力量測器，係設置於該燃燒室之中，用以量測該燃 燒室中之空氣壓力。 又在本發明中，該矽曱烷輸送及處理系統更包括一可 調式風門，係設置於該燃燒室之中，用以調節該燃燒室中 之空氣流量。 又在本發明中，該矽曱烷輸送及處理系統更包括一真 空產生器，係設置於該旁通管路上，用以將該輸送管路中 0956-A21649TWF(N2)；P55950016TW；hawdong 8 1305931 之該矽甲烷氣體抽送至該燃燒室之中。 又在本發明中，該矽曱烷輸送及處理系統更包括一第 一氣動閥、一第二氣動閥以及一第三氣動閥，其中’該第 一氣動閥及該第二氣動閥係設置於該輸送管路上，該旁通 管路係位於該第一氣動閥與該第二氣動閥之間，該第三氣 動閥及該真空產生器係設置於該旁通管路上，以及該真空 產生器係位於該第三氣動閥與該燃燒室之該入口之間。 又在本發明中，該風車係為一變頻風車。 為使本發明之上述目的、特徵和優點能更明顯易懂， 下文特舉較佳實施例並配合所附圖式做詳細說明。 【實施方式】 茲配合圖式說明本發明之較佳實施例。 第一實施例 請參閱第2圖，本實施例之矽曱烷輸送及處理系統100 主要包括有一矽曱烷儲存容器Π0、一輸送管路120、一燃 燒室130、一旁通管路140、一風車150、一壓力量測器160、 一可調式風門（damper) 170、一真空產生器180、一第一氣 動閥185、一第二氣動閥190以及一第三氣動閥195。 矽曱烷儲存容器Π0内儲存有矽曱烷氣體。輸送管路 120是連接於矽甲烷儲存容器110,其可將矽曱烷氣體輸送 至一半導體製程機台Μ之中，以進行特定的半導體製程。 燃燒室130具有一入口 131以及一出口 132’入口 131 是相對於出口 132。 0956-A21649TWF(N2)；P55950016TW；hawdong 9 1305931 旁通管路140是連接於輸送管路120與燃燒室130之 入口 131之間，其主要是用來將輸送管路120中之矽曱烷 氣體輸送至燃燒室130之中。 風車150是設置於燃燒室130之出口 132上，其可用 來從燃燒室130之入口 131抽取空氣至燃燒室130之中。 壓力量測器160及可調式風門170均是設置於燃燒室 130之中。值得注意的是，壓力量測器160可設置於靠近 • 燃燒室130之入口 131處，而可調式風門170可設置於靠 近燃燒室130之出口 132處。 真空產生器180是設置於旁通管路140上，其乃是用 來將輸送管路120中之矽曱烷氣體抽送至燃燒室130之中。 第一氣動閥185及第二氣動閥190均是設置於輸送管 路120上，而旁通管路140是位於第一氣動閥185與第二 氣動閥190之間。第三氣動閥195是設置於旁通管路140 上，而真空產生器180是位於第三氣動閥195與燃燒室130 φ 之入口 13 1之間。 當欲對輸送管路120進行管路排空（vent/real gas flush) 處理時，須先將第一氣動閥185及第二氣動閥190關閉。 然後，開啟第三氣動閥195，並且啟動真空產生器180及 風車150。此時，輸送管路120中之矽曱烷氣體即會經由 真空產生器180及旁通管路140被輸送至燃燒室130中來 與風車150所抽入之空氣混合。特別的是，仍如第2圖所 示，風車150從燃燒室130之入口 131所抽入之空氣的流 動方向A’是與由旁通管路140所輸送至燃燒室130中之矽 0956-A21649TWF(N2)；P55950016TW；hawdong 10 1305931 曱烷氣體的流動方向B’同流。也就是說，空氣與矽曱烷氣 體是以平行（或同向混合）的方式進入燃燒室130之中。 另外，為了確保矽曱烷氣體在燃燒室130中之反應濃 度能維持在1.33%的燃燒下限以上，故在進行管路排空處 理時可針對燃燒室13 0中之空氣流量進行控制。更詳細的 來說，首先，可經由真空產生器180來量測矽曱烷氣體被 輸送至燃燒室130中之流量。接著，根據以上所量測到的 ^ 流量數據即可推估燃燒室130中所需之空氣流量。然後， 藉由觀察壓力量測器160所量測到之空氣壓力，並配合調 節可調式風門170，即可調整燃燒室130中所需之空氣流 量，進而可達成矽曱烷氣體在燃燒室130中之反應濃度能 被維持在1.33%的燃燒下限以上。 如上所述，由於空氣與矽曱烷氣體是以同流（或同向混 合）的方式進入燃燒室130之中，以及矽曱烷氣體在燃燒室 130中之反應濃度能被維持在1.33%的燃燒下限以上，故矽 φ 曱烷氣體在燃燒室130中即可進行高效率的燃燒反應，因 而可有效提升管路排空處理之效率及安全性。 此外，本實施例之風車150及可調式風門170亦可以 一變頻風車所取代，並且變頻風車仍是設置於燃燒室130 之出口 132上。在此，變頻風車除了可用來從燃燒室130 之入口 131抽取空氣至燃燒室130之中外，尚可調整燃燒 室130中所需之空氣流量。 第二實施例 0956-A21549TWF(N2)：P55950016TW；hawdong 11 1305931 在本實施例中，與第一實施例相同之元件均標示以相 同之符號。 請參閱第2圖及第3圖，本實施例之矽曱烷輸送及處 理系統100’與第一實施例之矽曱烷輸送及處理系統1〇〇之 間的差別是在於風車150之設置位置的差異。更詳細的來 說，如第3圖所示，矽曱烷輸送及處理系統1〇〇’之風車150 是設置於燃燒室130之入口 131上，而旁通管路140亦是 連接於輸送管路120與燃燒室130之入口 131之間。 同樣地，風車150從燃燒室130之入口 Π1所抽入之 空氣的流動方向A’亦是與由旁通管路140所輸送至燃燒室 130中之矽曱烷氣體的流動方向B’同流。也就是說，空氣 與矽甲烷氣體亦是以平行（或同向混合）的方式進入燃燒室 130之中。 至於本實施例之其他元件構造或特徵均與第一實施例 相同，故為了使本案之說明書内容能更清晰易懂起見，在 此省略其重複之說明。 同樣地，由於空氣與矽曱烷氣體是以同流（或同向混合) 的方式進入燃燒室130之中，以及矽曱烷氣體在燃燒室130 中之反應濃度能被維持在1.33%的燃燒下限以上，故矽甲 烷氣體在燃燒室130中即可進行高效率的燃燒反應，因而 可有效提升管路排空處理之效率及安全性。 此外，本實施例之風車150及可調式風門170亦可以 一變頻風車所取代，並且變頻風車仍是設置於燃燒室130 之入口 131上。在此，變頻風車除了可用來從燃燒室130 0956-A21649TWF{N2)；P55950016TW；hawcJong 12 1305931 之入口 131抽取空氣至燃燒室130之中外，尚可調整燃燒 室130中所需之空氣流量。 綜上所述，本發明所揭露之矽甲烷輸送及處理系統不 但可有效提升管路排空處理之效率及安全性，其還可降低 管路排空處理之設備及操作成本。 雖然本發明已以較佳實施例揭露於上，然其並非用以 限定本發明，任何熟習此項技藝者，在不脫離本發明之精 神和範圍内，當可作些許之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。1305931 IX. INSTRUCTIONS: [Technical Field] The present invention relates to a methane-methane transport and processing system, and more particularly to a Class 11 hospital wheeling and handling system that can improve the efficiency of pipe emptying treatment. [Prior Art] In the semiconductor process, the application of 11 A (5) h4) is very common. In general, the output of helium methane can be achieved by a monooxane delivery system. The methane transport system generally comprises a decane storage container and a transfer line connected to the hydrazine methane storage container, which can be used to transport the decane in the decane storage container to the semiconductor machine. Taichung. On the other hand, when the methane storage container is to be replaced, the delivery line must be subjected to a venting process at a low pressure. That is to say, after the gas must be removed from the pipeline, the replacement operation of the Shixijia storage container can be carried out to reduce the risk of replacing the (four) device; After the capacity, in order to reduce the residual nitrogen in the pipeline, the system will be filled with high-pressure real nightmare gas (pu (4) and pipeline row: (Vent/realgaSfl_) to effectively reduce the gas volume in the pipeline. Nitrogen affects the quality of the process. However, in order to respond to the gray π required by the new generation process, the decane rotation system is also becoming more and more large. In other words, 0956-Α21649TWF (N2): P55950016TW; hawdong 5 1305931 The volume of the decane storage container becomes quite large and the inner diameter of the conveying pipe becomes large and the length becomes long. Therefore, when the piping is evacuated, it needs to be moved. In addition, the amount of smashing gas is relatively large. As mentioned above, the equipment for pipe emptying of the conveying pipeline mainly includes a dry scrubber, a burn tube and a combustion box. Bum box) and so on. In the case of dry scrubbers, it is limited by the capacity of the process, which often leads to inefficient pipe emptying treatment and overheating of the entire decane transport climbing system. In addition, the dry scrubber has the disadvantage of being expensive, which is not conducive to reducing the manufacturing cost of the semiconductor process. In addition, referring to Fig. 1, a conventional decane transport and processing system 1 mainly comprises a decane storage container. 11. A delivery line 12, a bypass line 13, a first pneumatic valve 14, a second pneumatic valve 15, a third pneumatic valve 16, a vacuum generator 17, a combustion tube 18, and A windmill 19. The conveying line 12 is connected to a decane storage capacity Φ 11 for conveying the decane in the decane storage container 11 to a semiconductor process machine table. The first pneumatic valve 14 And the second pneumatic valve 15 is disposed on the delivery line 12. The bypass line 13 is connected between the delivery line 12 and the combustion tube 18, and the bypass line 13 is located at the first pneumatic valve 14 and Between the two pneumatic valves 15. The third pneumatic valve 16 The air generators 17 are all disposed on the bypass line 13, and the vacuum generator 17 is located between the third pneumatic valve 16 and the combustion tube 18. The combustion tube 18 and the windmill 19 are line drain processing equipment. 19 is disposed on one end of the combustion tube 18, which can pump outside air into the combustion tube 18. The bypass line 13 is 0956-Α21649TWF (N2); P5595001 6TW: hawdong 6 1305931 is connected to the combustion tube 18. On one side wall, the decane gas in the delivery line 12 can be delivered to the combustion tube 18 via the bypass line 13. When the pipe line evacuation process is to be performed on the delivery line 12, the first pneumatic valve 14 and the second pneumatic valve 15 must first be closed. Then, the third pneumatic valve 16 is opened, and the vacuum generator 17 and the windmill 19 are activated. At this time, the decane gas in the delivery line 12 is sent to the combustion tube 18 via the vacuum generator 17 to be mixed with the air drawn by the windmill 19, where the decane gas is self-igniting. Therefore, theoretically, decane gas will react with air. However, as shown in Fig. 1, due to the structural design of the decane transport and processing system 1, the air that the windmill 19 inputs into the combustion tube 18 in the direction of arrow A will be associated with the vacuum generator 17 (or bypass line). 13) Vertical mixing of the decane gas input into the combustion tube 18 in the direction of the arrow B, which often causes the concentration of the decane gas in the combustion tube 18 to be lower than the lower limit of combustion of 1.33% (due to the decane gas The air that is conveyed in the direction perpendicular to it is rapidly dilute. As described above, the methane gas can only perform an inefficient oxidation reaction in the combustion tube 18, and a high-efficiency combustion reaction cannot be performed, which causes a problem that the efficiency of the pipe emptying process is not good. In other words, in the gas finally discharged from the combustion tube 18, the content of the toxic decane gas is still high. In addition, in the case of the pipeline emptying process using a burn box, it is to uniformly mix the air introduced into the combustion chamber with the decane gas, which often causes the decane gas to be in the combustion chamber. The concentration is lower than the lower limit of combustion of 1.33%, which also leads to the problem of inefficient pipe emptying treatment. In view of the above, the object of the present invention is to provide a decane transport and 0956-A21649TWF (N2): P55950016TW; hawdong 7 1305931 treatment system, which can supply air and helium methane gas in a cocurrent manner for pipeline emptying. Treatment to perform a highly efficient combustion reaction' to increase the efficiency and safety of the pipeline evacuation process. SUMMARY OF THE INVENTION The present invention basically employs the features detailed below in order to solve the above problems. That is, the present invention includes a decane storage container storing decane gas; a delivery line connected to the decane storage container for transporting the decane gas; a combustion chamber, Having an inlet and an outlet, wherein the inlet is opposite to the outlet; a bypass line is connected between the delivery line and the inlet of the combustion chamber for use in the delivery line Methane gas is delivered into the combustion chamber; and a wind turbine is disposed at the outlet of the combustion chamber for extracting air from the inlet of the combustion chamber into the combustion chamber, wherein the combustion chamber The direction of air flow at the inlet is the same as the direction of flow of the helium methane gas delivered by the bypass line to the inlet of the combustion chamber. At the same time, the decane delivery and treatment system according to the present invention further includes a pressure gauge disposed in the combustion chamber for measuring the air pressure in the combustion chamber. In still another aspect of the invention, the decane delivery and processing system further includes a tunable damper disposed in the combustion chamber for regulating air flow in the combustion chamber. In the present invention, the decane transport and processing system further includes a vacuum generator disposed on the bypass line for use in the delivery line 0956-A21649TWF(N2); P55950016TW; hawdong 8 1305931 The helium methane gas is pumped into the combustion chamber. In the present invention, the decane delivery and processing system further includes a first pneumatic valve, a second pneumatic valve, and a third pneumatic valve, wherein the first pneumatic valve and the second pneumatic valve are disposed on The bypass line is located between the first pneumatic valve and the second pneumatic valve, the third pneumatic valve and the vacuum generator are disposed on the bypass line, and the vacuum generator It is located between the third pneumatic valve and the inlet of the combustion chamber. Also in the present invention, the windmill is a variable frequency windmill. The above described objects, features and advantages of the present invention will become more apparent from the description of the appended claims. [Embodiment] A preferred embodiment of the present invention will be described with reference to the drawings. First Embodiment Referring to FIG. 2, the decane transport and treatment system 100 of the present embodiment mainly includes a decane storage container Π0, a delivery line 120, a combustion chamber 130, a bypass line 140, and a A windmill 150, a pressure gauge 160, an adjustable damper 170, a vacuum generator 180, a first pneumatic valve 185, a second pneumatic valve 190, and a third pneumatic valve 195. The decane storage container Π0 stores decane gas. The transfer line 120 is coupled to a helium methane storage vessel 110 that delivers decane gas to a semiconductor process station for a particular semiconductor process. The combustion chamber 130 has an inlet 131 and an outlet 132'. The inlet 131 is opposite the outlet 132. 0956-A21649TWF(N2); P55950016TW; hawdong 9 1305931 The bypass line 140 is connected between the delivery line 120 and the inlet 131 of the combustion chamber 130, and is mainly used to transport the decane gas in the delivery line 120. It is delivered into the combustion chamber 130. The windmill 150 is disposed at an outlet 132 of the combustion chamber 130 and is operable to draw air from the inlet 131 of the combustion chamber 130 into the combustion chamber 130. Both the pressure gauge 160 and the adjustable damper 170 are disposed in the combustion chamber 130. It is noted that the pressure gauge 160 can be disposed adjacent the inlet 131 of the combustion chamber 130, and the adjustable damper 170 can be disposed adjacent the outlet 132 of the combustion chamber 130. The vacuum generator 180 is disposed on the bypass line 140 for pumping the decane gas in the delivery line 120 into the combustion chamber 130. The first pneumatic valve 185 and the second pneumatic valve 190 are both disposed on the delivery pipe 120, and the bypass conduit 140 is located between the first pneumatic valve 185 and the second pneumatic valve 190. The third pneumatic valve 195 is disposed on the bypass line 140, and the vacuum generator 180 is located between the third pneumatic valve 195 and the inlet 13 1 of the combustion chamber 130 φ. When the vent/real gas flush treatment is to be performed on the delivery line 120, the first pneumatic valve 185 and the second pneumatic valve 190 must be closed first. Then, the third pneumatic valve 195 is opened, and the vacuum generator 180 and the windmill 150 are activated. At this time, the decane gas in the delivery line 120 is sent to the combustion chamber 130 via the vacuum generator 180 and the bypass line 140 to be mixed with the air drawn by the windmill 150. In particular, as shown in FIG. 2, the flow direction A' of the air drawn by the windmill 150 from the inlet 131 of the combustion chamber 130 is the same as that transmitted by the bypass line 140 to the combustion chamber 130. A21649TWF (N2); P55950016TW; hawdong 10 1305931 The flow direction of the decane gas B' is the same. That is, the air and the decane gas enter the combustion chamber 130 in parallel (or in the same direction). Further, in order to ensure that the reaction concentration of the decane gas in the combustion chamber 130 can be maintained above the lower limit of combustion of 1.33%, the air flow rate in the combustion chamber 130 can be controlled during the pipe emptying process. In more detail, first, the flow rate of the decane gas to be delivered into the combustion chamber 130 can be measured via the vacuum generator 180. Next, the required air flow rate in the combustion chamber 130 can be estimated based on the above measured flow data. Then, by observing the air pressure measured by the pressure gauge 160 and adjusting the adjustable damper 170, the required air flow rate in the combustion chamber 130 can be adjusted, thereby achieving decane gas in the combustion chamber 130. The reaction concentration in the medium can be maintained above the lower limit of combustion of 1.33%. As described above, since air and decane gas enter the combustion chamber 130 in a cocurrent (or co-mixing) manner, and the reaction concentration of the decane gas in the combustion chamber 130 can be maintained at 1.33%. Since the lower limit of combustion is above, the 矽φ decane gas can perform a high-efficiency combustion reaction in the combustion chamber 130, thereby effectively improving the efficiency and safety of the pipeline evacuation treatment. In addition, the windmill 150 and the adjustable damper 170 of the present embodiment can also be replaced by a variable frequency windmill, and the variable frequency windmill is still disposed at the outlet 132 of the combustion chamber 130. Here, the variable frequency windmill can be used to adjust the air flow required in the combustion chamber 130 in addition to extracting air from the inlet 131 of the combustion chamber 130 into the combustion chamber 130. Second Embodiment 0956-A21549TWF(N2): P55950016TW; hawdong 11 1305931 In the present embodiment, the same elements as those of the first embodiment are denoted by the same reference numerals. Referring to FIGS. 2 and 3, the difference between the decane transport and treatment system 100' of the present embodiment and the decane transport and treatment system 1 of the first embodiment is the position of the windmill 150. The difference. More specifically, as shown in FIG. 3, the windmill 150 of the decane conveying and processing system 1' is disposed at the inlet 131 of the combustion chamber 130, and the bypass line 140 is also connected to the conveying pipe. The path 120 is between the inlet 131 and the inlet 131 of the combustion chamber 130. Similarly, the flow direction A' of the air drawn by the windmill 150 from the inlet port 1 of the combustion chamber 130 is also cocurrent with the flow direction B' of the decane gas delivered to the combustion chamber 130 by the bypass line 140. . That is to say, air and helium methane gas also enter the combustion chamber 130 in parallel (or in the same direction). The other element configurations and features of the present embodiment are the same as those of the first embodiment, and therefore, in order to make the contents of the present specification clearer and easier to understand, the repeated description thereof will be omitted. Similarly, since air and decane gas enter the combustion chamber 130 in a cocurrent (or co-mixing) manner, and the reaction concentration of the decane gas in the combustion chamber 130 can be maintained at 1.33%. Above the lower limit, the methane gas can perform a high-efficiency combustion reaction in the combustion chamber 130, thereby effectively improving the efficiency and safety of the pipe emptying process. In addition, the windmill 150 and the adjustable damper 170 of the present embodiment can also be replaced by a variable frequency windmill, and the variable frequency windmill is still disposed at the inlet 131 of the combustion chamber 130. Here, the variable frequency windmill can be used to adjust the air flow required in the combustion chamber 130 in addition to extracting air from the combustion chamber 130 0956-A21649TWF{N2); P55950016TW; hawcJong 12 1305931 inlet 131 into the combustion chamber 130. In summary, the methane transport and treatment system disclosed in the present invention can not only effectively improve the efficiency and safety of the pipeline emptying process, but also reduce the equipment and operating costs of the pipeline emptying process. Although the present invention has been disclosed in its preferred embodiments, it is not intended to limit the present invention, and it is possible to make some modifications and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.
0956-A21649TWF(N2)；P55950016TW；hawdong I3〇593i 【圖式簡單說明】 〜第1圖係顯示一習知之矽曱烷輸送及處理系統之平面 示意圖； ^第2圖係顯示本發明之第一實施例之矽甲烷輸送及處 里系統之平面示意圖；以及 /第3圖係顯示本發明之第二實施例之矽甲烷輸送及處 % 理系統之平面示意圖。 【主要元件符號說明】 1、100、1〇〇’〜矽曱烷輸送及處理系統 U、110〜矽甲烷儲存容器 12、 120〜輸送管路 13、 140〜旁通管路 14、 185〜第一氣動閥 15、 190〜第二氣動閥 16、 195〜第三氣動閥 17、 180〜真空產生器 18〜燃燒管 19、150〜風車 130〜燃燒室 ， 131〜入口 132〜出口 160〜壓力量測器 170〜可調式風門 〇956-A21649TWF(N2);P55950016TW;hawdong 14 1305931 Μ〜半導體製程機台0956-A21649TWF(N2); P55950016TW;hawdong I3〇593i [Simplified Schematic] ~ Figure 1 shows a schematic plan view of a conventional decane transport and processing system; ^ Figure 2 shows the first of the present invention A schematic plan view of the methane transport and internal system of the embodiment; and/or FIG. 3 is a schematic plan view showing the methane transport and process system of the second embodiment of the present invention. [Description of main component symbols] 1, 100, 1 〇〇 '~ decane transport and processing system U, 110 ~ 矽 methane storage container 12, 120 ~ delivery line 13, 140 ~ bypass line 14, 185 ~ a pneumatic valve 15, 190 ~ second pneumatic valve 16, 195 ~ third pneumatic valve 17, 180 ~ vacuum generator 18 ~ combustion tube 19, 150 ~ windmill 130 ~ combustion chamber, 131 ~ inlet 132 ~ outlet 160 ~ pressure amount Detector 170~Adjustable damper 〇956-A21649TWF(N2);P55950016TW;hawdong 14 1305931 Μ~Semiconductor process machine
0956-A21649TWF(N2)；P55950016TW；hawdong 150956-A21649TWF(N2); P55950016TW;hawdong 15